Composite film forming production equipment and production method thereof

Abstract

The invention discloses composite film forming production equipment and a production method thereof, the production equipment comprises a production box body and a composite film forming subsystem, and the composite film forming subsystem comprises a polymer preparation device, a polymer curing device and a metal evaporation device; the production method comprises the following steps: evaporating or coating the surface of the substrate film, curing to form the polymer layer, and / or evaporating the polymer layer to form the metal layer. According to the invention, evaporation / coating curing and evaporation processes can be repeated according to production requirements to form a multi-layer stacked structure formed by stacking the same or different materials, so that the resistivity of the composite film is effectively reduced, and the production efficiency of the composite film is improved; the metal layer formed by evaporation of the evaporation device has no sputtering points, and the polymer layer formed by evaporation / coating and curing of the polymer preparation device and the curing device can be tightly attached to the metal layer, so that the adhesive force between the metal layer and the polymer layer is effectively improved, and the problems that the electrical property of the composite film is reduced, and the service life of the composite film is prolonged are solved.

Description

Technical Field

[0001] The present invention relates to the technical field of composite films, and in particular to a composite film forming production device and a production method thereof. Background Art

[0002] A composite film is a structural film composed of multiple metal or non-metal materials. Taking the composite current collector for lithium batteries as an example, it can replace traditional pure metal foils (such as aluminum foil for the positive electrode and copper foil for the negative electrode). Its typical structure is metal-polymer-metal (such as aluminum-polymer-aluminum or copper-polymer-copper), with a light polymer material (such as PET, OPP, PE, PI, etc.) in the middle and ultra-thin metal layers covered on both sides. The insulating layer uses a polymer material, which can reduce the weight of the composite current collector while effectively blocking the risk of short circuit between the positive and negative electrodes and improving the battery safety performance; the metal layer is responsible for conducting current to ensure the electrical conductivity of the composite current collector; with these characteristics, the composite current collector can effectively improve the energy density of lithium batteries while significantly reducing its own weight, reducing metal consumption during the production process, thereby cutting costs; and it can enhance flexibility, reduce the risk of pole piece fracture, and adapt to high-deformation scenarios (such as flexible batteries).

[0003] Taking the negative composite current collector as an example, the current composite current collector preparation process includes: the one-step method, that is, magnetron sputtering a copper metal layer with a thickness of 1 um on an oriented polypropylene film (OPP) with a thickness of 4.5 - 10 um; the multi-step method, that is, magnetron sputtering a copper metal layer with a thickness of 10 - 100 nm on an oriented polypropylene (OPP) film with a thickness of 4.5 - 10 um, and then thickening it to 1 um through evaporation and / or electroplating with water. The resistivity of the produced composite copper composite current collector is 2 - 2.5×10-8 Ω·m, and the speed of the negative composite current collector is 5 - 10 m / min. Taking the positive composite current collector as an example, the current composite current collector preparation process includes: evaporating (or magnetron sputtering, electroplating with water, etc.) an aluminum metal layer with a thickness of 1 um on a polyethylene terephthalate (PET) film with a thickness of 4.5 - 10 um. The compactness of the film layer prepared during this production process is lower than that of the original metal, and the resistivity is higher. Therefore, the electrical conductivity is poor, and the production efficiency is low. The resistivity of the produced composite aluminum is 3.2 - 4.0×10-8 Ω·m, and the speed of the positive current collector is 10 - 15 m / min); and there is a problem that the sputtering points of the positive composite current collector cannot be eliminated, and there is a problem that the bonding force between the polymer substrate and the metal layer of the negative composite current collector is low, resulting in a decline in the electrical performance and service life of the composite current collector. Summary of the Invention

[0004] The object of the present invention is to solve the disadvantages existing in the prior art, and a composite film forming production device and its production method are proposed.

[0005] To achieve the above object, in a first aspect, the present invention provides a composite film forming production device. The composite film includes a metal layer and a polymer layer disposed on at least one surface of the metal layer, and the device includes: A production box body, the internal cavity of which is used to provide a vacuum environment and a space for preparing the composite film; A composite film forming subsystem, which includes a polymer preparation device, a polymer curing device, and a metal evaporation device. The polymer preparation device includes a polymer evaporation device and / or a polymer coating device. A plurality of groups of the polymer preparation devices are arranged in parallel in the internal cavity of the production box body. One side of each group of the polymer preparation devices is provided with a polymer curing device in parallel, and the metal evaporation device is arranged on one side of the polymer preparation device and the polymer curing device; A film material conveying subsystem, which is used to convey the metal substrate film to be formed; A vacuum environment subsystem, which is used to extract the gas in the internal cavity of the production box body.

[0006] In some embodiments, the polymer evaporation device includes a nozzle array, and a flow guide cover is arranged outside the nozzle; the coating device includes a slot die, and a support roller is arranged outside the slot die. The polymer curing device is an electron beam curing gun or an ultraviolet lamp. A corona treatment device or a plasma treatment device is arranged between adjacent polymer preparation devices. The metal evaporation device includes a placement seat, and an evaporation boat or a magnetron device is detachably installed on the placement seat.

[0007] In some embodiments, it further includes a film material conveying subsystem, which includes an unwinding roller, a temperature control roller, and a winding roller. A flattening roller is arranged between the unwinding roller and the temperature control roller, and an idler roller is arranged between the winding roller and the temperature control roller. A pressing roller is arranged between the polymer preparation devices. A plurality of groups of the unwinding rollers and the winding rollers are symmetrically arranged on both sides of the internal cavity of the production box body. A plurality of groups of the temperature control rollers are arranged between the composite film forming subsystems. There is a common tangent plane among the unwinding roller, the temperature control roller, the winding roller, the flattening roller, the pressing roller, and the idler roller. The tangent direction at the tangent point of the unwinding roller, the temperature control roller, the winding roller, the flattening roller, the pressing roller, and the idler roller is consistent with the film material conveying direction.

[0008] In some of these embodiments, the vacuum environment subsystem includes a first vacuum pump group, a second vacuum pump group, and a third vacuum pump group. The first vacuum pump group includes a first mechanical pump and a first Roots pump. The second vacuum pump group includes a first diffusion pump and a second diffusion pump. The third vacuum pump group includes a second mechanical pump and a second Roots pump. The first vacuum pump group is connected to the top of the inner cavity of the production box. The second vacuum pump group is connected to the bottom of the inner cavity of the production box. The third vacuum pump group is connected to the bottom of the inner cavity of the production box and the second vacuum pump group.

[0009] In some of these embodiments, the first mechanical pump is connected to the first Roots pump. The first Roots pump is connected to the top of the inner cavity of the production box. The first diffusion pump and the second diffusion pump are respectively connected to the bottom of the inner cavity of the production box. The second mechanical pump is connected to the second Roots pump. The second Roots pump is connected to the bottom of the inner cavity of the production box. The second Roots pump is connected to the first diffusion pump and the second diffusion pump.

[0010] Second, the present invention also provides a method for producing a composite film. The method is executed via the composite film forming production equipment as described in the first aspect. The production method includes: S100, determining whether to start the vacuum environment subsystem based on the film forming scheme, so as to establish an atmospheric environment, an inert gas environment, or a vacuum gas environment in the inner cavity of the production box; S200, starting the film material conveying subsystem to convey the substrate film to be formed; S300, starting the composite film forming subsystem to evaporate or coat and then cure on the surface of the substrate film to form a polymer layer, and / or evaporate a metal layer on the polymer layer.

[0011] In some of these embodiments, the S100 includes: S110, determining the composite film forming gas environment based on the film forming scheme, sequentially starting the first mechanical pump and the first Roots pump of the first vacuum pump group, evacuating the inner cavity of the production box to establish a vacuum gas environment in the inner cavity of the production box. If an atmospheric environment is required, enter S120a. If an inert gas environment is required, enter S120b. If a vacuum gas environment is required, enter S120c. S120a, introducing air until the internal and external pressures of the production box are equal to establish an atmospheric environment in the inner cavity of the production box; S120b, introducing an inert gas until the internal and external pressures of the production box are equal to establish an inert gas environment in the inner cavity of the production box; For S120c, start the first diffusion pump and the second diffusion pump of the second pumping vacuum pump group in sequence, start the second mechanical pump and the second Roots pump of the third pumping vacuum pump group in sequence, and maintain the vacuum environment.

[0012] In some embodiments, the S200 includes: S210, preheat all temperature control rollers to a preset temperature respectively, and adjust and detect the operating parameters of the film material transportation. S220, start the unwind roller and the wind-up roller in sequence, and guide the film material through the flattening roller and the idler roller to unwind and wind up the same or different metal substrate films.

[0013] In some embodiments, the S300 includes: S310a, in a vacuum environment, inject the same or different polymer materials through a polymer evaporation device, vaporize and then evaporate them onto the metal substrate film. S320a, cure the polymer materials through a polymer curing device to form one or more polymer layers; or S310b, in a vacuum environment, extract the same or different polymer materials through a polymer coating device, infiltrate and then coat them onto the metal substrate film in steps. S320b, cure the polymer materials through a polymer curing device to form one or more polymer layers.

[0014] In some embodiments, the S300 further includes: S330, evaporate to form a metal layer through a metal evaporation device. S340, detect whether the film layer thickness and the number of film layers reach a preset range, and judge whether to repeatedly stack and form polymer layers and metal layers until the preparation of the composite film is completed.

[0015] The present invention has the following beneficial effects: 1. In the present invention, through the polymer preparation device and the curing device, a polymer layer is formed on one side plane of the metal substrate film by evaporation / coating and then curing, and then a metal layer is formed on the other side plane of the polymer layer by evaporation process through the evaporation device; and the evaporation / coating curing and evaporation processes can be repeated according to production needs to form a multi-layer stacked structure with the same or different materials stacked, effectively reducing the resistivity of the composite film without changing the resistivity of the existing materials, and improving the production efficiency of the composite film. 2. In the present invention, there are no sputtering points on the metal layer formed by the evaporation device, and the polymer layer formed by the polymer preparation device and the curing device through evaporation / coating and curing can be closely attached to the metal layer, effectively improving the adhesion between the metal layer and the polymer layer, and solving the problem of the decline in the electrical properties and service life of the composite film. Description of the Drawings

[0016] Figure 1 Schematic structural diagram of the composite film forming production equipment proposed by the present invention; Figure 2 Schematic flow chart of the composite film forming production method proposed by the present invention Figure 1 ; Figure 3 Schematic flow chart of the composite film forming production method proposed by the present invention Figure 2 ; Figure 4 Schematic flow chart of the composite film forming production method proposed by the present invention Figure 3 ; Figure 5 Schematic flow chart of the composite film forming production method proposed by the present invention Figure 4 .

[0017] Legend: 1. Production box; 11. Cavity; 2. Composite film forming subsystem; 21. Polymer preparation device; 211. Polymer evaporation device; 212. Polymer coating device; 22. Polymer curing device; 23. Metal evaporation device; 24. Corona treatment device; 25. Plasma treatment device; 3. Film material conveying subsystem; 31. Unwinding roller; 32. Temperature control roller; 33. Rewinding roller; 34. Flattening roller; 35. Idle roller; 36. Pressing roller; 4. Vacuum environment subsystem; 41. First vacuum pumping unit; 411. First mechanical pump; 412. First Roots pump; 42. Second vacuum pumping unit; 421. First diffusion pump; 422. Second diffusion pump; 43. Third vacuum pumping unit; 431. Second mechanical pump; 432. Second Roots pump. Detailed implementation manners

[0018] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0019] The embodiments of the present application provide a composite film forming production device and its production method, which solve the problems in the prior art such as low production efficiency, the inability to eliminate sputtering points in the positive composite current collector, and the lower density of the prepared metal film layer than the original metal material. In the negative composite current collector, the bonding force between the polymer substrate and the metal layer is relatively low, resulting in a decline in the electrical performance and service life of the composite current collector. According to the production requirements, the present application repeats the evaporation / coating curing and evaporation processes to form a multi-layer stacked structure with the same or different materials stacked. Without changing the resistivity of the existing materials, the resistivity of the composite current collector is effectively reduced, and the production efficiency of the composite current collector is improved.

[0020] For details, please refer to the following embodiments: Refer to Figure 1 , an embodiment of a composite film forming production device provided by the present invention, the specific structure includes: a production box 1, a film material conveying subsystem 3, a vacuum environment subsystem 4, and a composite film forming subsystem 2.

[0021] Among them, the cavity 11 inside the production box 1 is used to provide a vacuum environment and a composite film preparation space. The vacuum environment can prevent the metal film and polymer material from reacting with components such as oxygen in the air during the processing, ensuring the product quality. Its internal space layout can be divided into functional areas such as a polymer evaporation area, a polymer coating area, a polymer curing area, and a metal evaporation area according to the device layout, realizing continuous production of multiple processes; the corresponding film material conveying subsystem 3 is used to convey the metal substrate film to be formed, and through multiple groups of functional rollers, the unwinding, flattening, heating, and winding of the substrate film are realized: first, the substrate film is unwound with a constant tension, then flattened to eliminate the internal stress of the film material, then heated to complete the forming process, and finally the composite film finished product is wound; in addition, the vacuum environment subsystem 4 is used to establish a vacuum environment. Through the coordinated work of multiple-stage pump groups, the vacuum degree inside the cavity 11 is reduced from normal pressure to a preset level within a preset time, and the vacuum environment is continuously maintained during the composite film forming process; Furthermore, the composite film forming subsystem 2 is used to evaporate or coat and then cure on the surface of the same or different metal substrate films to form a polymer layer (multiple groups of polymer preparation devices 21 can be used to prepare the same or different polymer curing layers), and then optionally evaporate the same or different metal layers on the polymer layer. Finally, according to the production requirements, the evaporation / coating curing and evaporation processes are continuously repeated to form a multi-layer stacked structure with the same or different materials stacked.

[0022] Specifically, first, a polymer material (such as acrylate materials, including polyurethane acrylate, epoxy acrylate, etc.) can be applied on a substrate film made of metal material (usually aluminum foil or copper foil) by continuous evaporation or slot coating according to production requirements. Subsequently, it is subjected to electron beam curing or ultraviolet light curing treatment to form a dense polymer cured layer. Then, a metal layer is formed on the cured polymer layer by evaporation process (for example, aluminum can be used for the positive electrode and copper can be used for the negative electrode). And this process step can be cycled multiple times according to actual production requirements, that is, by repeating the evaporation / coating curing and metal evaporation processes, a composite film with a multi-layer alternating stacked structure is constructed.

[0023] It can be understood that by optimizing the process steps and parameters, while maintaining the intrinsic resistivity of the original materials, the overall resistance of the composite film is effectively reduced (the resistivity of the composite copper current collector produced by using the process equipment of the present application is 1.7 - 1.85×10-8Ω·m, and the resistivity of the composite aluminum current collector produced by using the process equipment of the present application is 2.6 - 2.9×10-8Ω·m); by adopting an efficient continuous production process, the production speed of the composite film is increased from the original 5 - 15m / min to 100 - 300m / min, effectively improving the production efficiency; and by evaporating the polymer, after the polymer is embedded on the surface of the metal film, the interfacial adhesion force is increased by more than 2 - 5 times.

[0024] Please continue to refer to Figure 1 , in this embodiment, the composite film forming subsystem 2 includes a polymer preparation device 21, a polymer curing device 22, and a metal evaporation device 23. Among them, the polymer preparation device 21 includes a polymer evaporation device 211 and / or a polymer coating device 212, and multiple groups of polymer preparation devices 21 are arranged in parallel in the inner cavity 11 of the production box 1.

[0025] Exemplarily, the polymer evaporation device 211 can be composed of an array structure of multiple groups of high-precision ultrasonic atomizing nozzles, and each nozzle is equipped with an independent flow control system (single spray 100 - 1000nm), and is heated and evaporated (200 - 400°C) in cooperation with a vaporization chamber to ensure the evaporation operation of the polymer layer at a preset evaporation angle in a vacuum environment; correspondingly, the polymer coating device 212 can adopt a slot die (gap is 50 - 200μm, adjustment accuracy is ±1μm), and cooperate with a high-hardness support roller (hardness is 60±2, surface roughness is Ra0.05μm) to form an accurate coating gap; and the polymer preparation device 21 can be correspondingly integrated with a temperature control system and an on-line thickness gauge, so as to realize the preparation of polymer layers with different thickness ranges (1000 - 5000nm) and ensure that the thickness uniformity is controlled within ±2%. Multiple groups of polymer preparation devices 21 are arranged in parallel (spacing is greater than or equal to 50cm).

[0026] Correspondingly, a polymer curing device 22 is arranged in parallel on one side of each group of polymer preparation devices 21. Exemplarily, the polymer curing device 22 is an electron beam curing gun or an ultraviolet lamp. The electron beam curing gun uses a 150 keV electron gun (the beam current density is adjustable from 1 to 10 mA / cm²), and through an electromagnetic scanning system, uniform irradiation with a width of 650 mm can be achieved, and the complete curing of materials with a thickness of 0 - 300 μm can be completed within 1 second; correspondingly, the ultraviolet lamp is composed of multiple groups of light-emitting bulb units, and with a parabolic reflector with a high reflectivity (>95%) and a nitrogen protection system (oxygen content < 100 ppm), the surface curing of materials with a thickness of 0 - 50 μm can be achieved within 3 seconds. Moreover, both curing devices are equipped with an infrared temperature sensor (measurement range 0 - 300 °C, accuracy ±1 °C) and a curing degree detector (measurement accuracy ±2%), which can automatically select the optimal curing parameters according to the characteristics of different polymer materials to ensure that the polymer layer can be quickly cured (the crosslinking degree reaches more than 98%).

[0027] Furthermore, the metal evaporation device 23 is arranged on one side of the polymer preparation device 21 and the polymer curing device 22. Specifically, the metal evaporation device 23 includes a mounting base, and an evaporation boat or a magnetron device is detachably mounted on the mounting base, which can achieve uniform deposition of the metal layer in a vacuum environment (the evaporation temperature is 1000 - 23000 °C, the evaporation rate is 0.1 - 10 nm / s, and the thickness uniformity is ±3%), and supports the evaporation of various metals such as aluminum and copper.

[0028] Furthermore, a corona treatment device 24 or a plasma treatment device 25 is arranged between adjacent polymer preparation devices 21. It can be understood that: (1) Corona treatment uses high-voltage discharge to generate plasma on the metal surface (such as aluminum foil, copper foil), forms micron-level roughness through physical etching, and at the same time introduces oxygen-containing polar groups (—OH, —COOH), thereby significantly increasing the surface energy and enhancing the adhesion to polymer materials, and further improving the uniformity of subsequent thermal evaporation or coating processes to avoid coating defects; and the corona treatment has strong controllability, and the parameters can be adjusted online and the effects can be detected.

[0029] (2) Plasma treatment forms low-temperature plasma by applying a high-frequency electric field (usually 13.56 MHz radio frequency or 2.45 GHz microwave) in the vacuum chamber 11 to ionize the process gas (such as argon, oxygen, or nitrogen) introduced. Under the constraint of a magnetic field (using a permanent magnet array or electromagnetic coil), electrons are restricted to perform helical motion, generating an electron multiplication effect and continuously bombarding the surface of the metal film: on the one hand, surface contaminants (including organic substances and oxides) are removed by physical sputtering of argon ions, forming a nanoscale rough surface (Ra increases by 20 - 100 nm); on the other hand, oxygen / nitrogen plasma introduces active groups such as hydroxyl (-OH) and carboxyl (-COOH) on the surface, thereby increasing the surface energy, increasing the metal / polymer interface bonding strength by 2 - 3 times, and at the same time maintaining the electrical conductivity of the metal body (resistivity change < 3%), providing an ideal interface environment for the subsequent thermal evaporation process.

[0030] Please continue to refer to Figure 1 , in this embodiment, the film material conveying subsystem 3 includes an unwinding roller 31, a temperature control roller 32, and a winding roller 33. Among them, a set of unwinding roller 31 and winding roller 33 are symmetrically arranged on both sides of the top of the inner cavity 11 of the production box 1, and another set or multiple sets of unwinding rollers 31 are correspondingly arranged at the bottom of the inner cavity 11 of the production box 1, for unwinding the to-be-formed metal film substrates of the same or different materials, and then winding the formed composite film after processing.

[0031] Exemplarily, the unwinding roller 31 and the winding roller 33 can adopt an air shaft structure, be equipped with a magnetic powder brake (realizing stepless tension adjustment of 0 - 200 N·m) and integrated encoder feedback system (rotation speed control accuracy ±0.1 rpm), to achieve continuous supply of the film with constant tension (tension fluctuation can be controlled within ±1%); correspondingly, multiple sets of temperature control rollers 32 are correspondingly arranged between the composite film forming subsystems 2, for controlling the temperature (-20 - 45 °C) of the to-be-formed metal film substrate and the formed composite film, thereby optimizing the adhesion performance between the film layers; the temperature control roller 32 can adopt a double-layer spiral flow channel structure and control the temperature through the circulation of heat transfer oil.

[0032] Furthermore, a flattening roller 34 (on the feeding side) is arranged between the unwinding roller 31 and the temperature control roller 32, and an idler roller 35 (on the discharging side) is correspondingly arranged between the winding roller 33 and the temperature control roller 32, which can eliminate the longitudinal wrinkles generated during the unwinding process of the film material and ensure the flatness and eliminate static electricity during the winding process of the composite film.

[0033] In addition, a pressure roller 36 is arranged between adjacent polymer preparation devices 21, so that the metal film guided by the bottom unwinding roller 31 and the metal film coated and cured with polymer material guided by the top unwinding roller 31 can be extruded and stacked together after being compounded.

[0034] It should be explained in detail that there is a common tangent surface between the unwinding roller 31, the temperature control roller 32, the winding roller 33, the flattening roller 34, the idle roller 35 and the pressure roller 36, and the tangent direction at the tangent point of the unwinding roller 31, the temperature control roller 32, the winding roller 33, the flattening roller 34, the idle roller 35 and the pressure roller 36 is consistent with the film material conveying direction, which can effectively reduce the straightness error of the film material transmission path (less than 0.1mm / m), so that the film material is evenly stressed during the entire transmission process, avoiding lateral deviation and stress concentration.

[0035] Please continue reading Figure 1 In this embodiment, the vacuum environment subsystem 4 includes a first vacuum pump group 41, a second vacuum pump group 42 and a third vacuum pump group 43. Through the coordinated work of the three-stage vacuum pump group, a precisely controllable vacuum environment is constructed for the production of composite films.

[0036] Furthermore, the first vacuum pump group 41 is composed of a first mechanical pump 411 and a first Roots pump 412. After the first mechanical pump 411 is connected to the first Roots pump 412, it is connected to the top of the internal cavity 11 of the production box 1 through a pipeline, so that the cavity 11 can be quickly evacuated from atmospheric pressure to a medium vacuum range, creating preconditions for a high vacuum system; correspondingly, the second vacuum pump group 42 is composed of a first diffusion pump 421 and a second diffusion pump 422, and the third vacuum pump group 43 is composed of a second mechanical pump 431 and a second Roots pump 432, and the first diffusion pump 421 and the second diffusion pump 422 are connected to the first mechanical pump 431 and the second Roots pump 432. They are respectively connected to the bottom of the internal cavity 11 of the production box 1 through pipelines, connecting the coating / curing area and the metal evaporation area, and can stably maintain the vacuum degree of the corresponding areas (polymer evaporation area, polymer coating area, polymer curing area and metal evaporation area) within a preset pressure range; similarly, after the second mechanical pump 431 is connected to the second Roots pump 432, it is respectively connected to the bottom of the internal cavity 11 of the production box 1, the first diffusion pump 421 and the second diffusion pump 422 through pipelines, which can not only directly assist in maintaining the vacuum of the cavity 11 through the bottom interface, but also serve as the front pump of multiple groups of diffusion pumps to ensure their efficient operation.

[0037] Illustratively, a rough pumping valve (such as a pneumatic baffle valve) is provided on the gas pipeline connecting the multiple vacuum pump groups to the production box 1 to prevent pump oil backflow or gas backflow: in the startup phase, the first vacuum pump group 41 is first started to perform preliminary vacuuming on the internal cavity 11 of the production box 1; when the pressure drops to a preset range value, the second vacuum pump group 42 and the third vacuum pump group 43 are started to continue to vacuum the internal cavity 11 of the production box 1; after ensuring that the corresponding areas (polymer evaporation area, polymer coating area, polymer curing area and metal evaporation area) are maintained within the production range value, the subsequent composite film forming process is carried out.

[0038] Reference Figures 2 - 5, the present invention also provides an embodiment of a method for producing a composite film, which is executed by the composite film forming production equipment as in the above embodiment. The production method includes: S100, based on the film forming scheme, determine whether to start the vacuum environment subsystem 4 to establish an atmospheric environment, an inert gas environment or a vacuum gas environment in the internal cavity of the production box 1; S200, start the film material conveying subsystem 3 to convey the substrate film to be formed; S300, start the composite film forming subsystem 2 to evaporate or coat and then cure on the surface of the substrate film to form a polymer layer, and / or evaporate to form a metal layer on the polymer layer.

[0039] Exemplarily, based on the film forming scheme, determine the composite film forming gas environment. That is, the film forming scheme is divided into an atmospheric environment, an inert gas environment and a vacuum gas environment, and then different operations are carried out step by step, including: introducing conventional air, introducing an inert gas or extracting gas into the internal cavity 11 of the production box 1; when performing a vacuum pumping operation, first start the vacuum environment subsystem 4, and perform a staged vacuum pumping operation on the production line body through a multi-stage pump set to make its internal part in a vacuum environment; then start the film material conveying subsystem 3, and sequentially pass the metal film substrate to be formed through unwinding, heating and winding. During this period, start the composite film forming subsystem 2, and form a polymer layer on one side plane of the metal substrate film through evaporation / coating and then curing through the polymer preparation device 21 and the curing device, and then form a metal layer on the other side plane of the polymer layer through an evaporation process through the evaporation device; and the evaporation / coating curing and evaporation processes can be repeated according to production needs to repeat the above operations to form a multi-layer stacked structure with the same or different material stacks.

[0040] Please continue to refer to Figure 3 , in this embodiment, S100 includes: S110, based on the film forming scheme, determine the composite film forming gas environment, and sequentially start the first mechanical pump 411 and the first roots pump 412 of the first vacuum pump set 41 to pump the internal cavity 11 of the production box 1 to establish a vacuum gas environment in the internal cavity of the production box 1. If it is an atmospheric environment, enter S120a. If it is an inert gas environment, enter S120b. If it is a vacuum gas environment, enter S120c. S120a, introduce air until the internal and external pressures of the production box 1 are equal to establish an atmospheric environment in the internal cavity of the production box 1; S120b, introduce an inert gas until the internal and external pressures of the production box 1 are equal to establish an inert gas environment in the internal cavity of the production box 1; For the S120c, start the first diffusion pump 421 and the second diffusion pump 422 of the second vacuum pumping group 42 in sequence, and start the second mechanical pump 431 and the second Roots pump 432 of the third vacuum pumping group 43 in sequence to maintain a vacuum environment.

[0041] Exemplarily, judge the forming gas environment of the composite film based on the film material forming scheme. That is, the film material forming scheme is divided into an atmospheric environment, an inert gas environment, and a vacuum gas environment, and then different operations are carried out step by step, including: when performing a vacuum pumping operation first, start the first mechanical pump 411 and the first Roots pump 412 first, and quickly pump the internal cavity 11 of the production box 1 from normal pressure to the medium vacuum range. During the operation, the vacuum degree of the cavity 11 is monitored in real time through a pressure sensor to ensure a stable pumping rate. If an abnormality is detected (such as a slow pressure drop), the system automatically triggers an alarm and prompts to check the airtightness; subsequently, perform an operation of introducing conventional air, introducing an inert gas, or extracting gas into the internal cavity 11 of the production box 1; when performing the gas introduction operation, the pump groups of the vacuum environment subsystem 4 do not work, and directly introduce conventional gas or inert gas; or start the second mechanical pump 431 and the second Roots pump 432, and start the first diffusion pump 421 and the second diffusion pump 422 synchronously or step by step. The first diffusion pump 421 and the second diffusion pump 422 are respectively used to maintain a high vacuum in the coating area, the curing area, and the evaporation area to avoid the volatilization of polymer solvents from polluting the cavity 11.

[0042] Please continue to refer to Figure 4 , in this embodiment, S200 includes: S210, preheat all the temperature control rollers 32 to a preset temperature, and adjust and detect the operating parameters of the film material transportation; S220, start the unwinding roller 31 and the winding roller 33 in sequence, and guide the film material through the flattening roller 34 and the idler roller 35 to perform the unwinding and winding of the same or different metal substrate films.

[0043] Exemplarily, after preheating all the temperature control rollers 32 to the preset temperature, adjust and detect the operating parameters such as the film material transportation speed and tension in real time. Start the unwinding roller 31 and the winding roller 33 in sequence. The unwinding roller 31 releases the film material, and the wrinkles of the film material are eliminated under the action of the flattening roller 34, and the film material passes through the temperature control rollers 32 in a flat state for heating. After the composite film forming process, the film material passes through the temperature control rollers 32 in a flat state for heating, and then passes through the idler roller 35 to ensure that the composite film remains flat, and is wound by the winding roller 33; It should be noted in detail that through the coordinated operation of multiple groups of winding rollers 33 and unwinding rollers 31, the unwinding and winding of the same or different metal substrate films of different materials can be realized, and the preparation and curing of the same or different polymer materials can be realized in cooperation with the polymer preparation device 21 and the polymer curing device 22.

[0044] Please continue to refer toFigure 5 , in this embodiment, S300 includes: S310a, in a vacuum environment, inject the same or different polymer materials through a polymer evaporation device, vaporize them and then evaporate them onto the metal substrate film; S320a, cure the polymer materials through a polymer curing device to form one or more polymer layers; or S310b, in a vacuum environment, extract the same or different polymer materials through a polymer coating device, infiltrate them and then coat them step by step onto the metal substrate film; S320b, cure the polymer materials through a polymer curing device to form one or more polymer layers.

[0045] Exemplarily, the present application provides two forming devices for preparing a polymer curing layer, that is, realizing the interface bonding of metal-polymer through different film-forming methods, ensuring that the cured polymer layer can be closely attached to the metal layer.

[0046] It can be understood that when actually preparing the film material, according to specific usage requirements, the stacking and curing between the same or different single-layer composite films (metal + polymer) can be realized through stacking; by repeatedly implementing the above process for multiple cycles, composite films with various stacking composite structures such as "metal1-polymer-metal1", "metal1-polymer-metal2", "metal2-polymer-metal2", "metal1-polymer1-polymer1-metal1", "metal1-polymer1-polymer2-metal1", "metal1-polymer2-polymer1-metal1", "metal1-polymer1-polymer1-metal1", or "metal2-polymer1-polymer2-metal2" can be constructed.

[0047] Please continue to refer to Figure 5 , in this embodiment, S300 further includes: S330, evaporate to form a metal layer through the metal evaporation device 23; S340, detect whether the film layer thickness and the number of film layers reach a preset range, and judge whether to repeatedly stack and form the polymer layer and the metal layer until the preparation of the composite film is completed.

[0048] It can be understood that based on actual production requirements, the evaporation / coating curing and evaporation processes can be flexibly repeated to construct a multi-layer stacking structure with the same or different material stacks. For example, for different application scenarios, the number of stacked layers can be flexibly selected based on the mechanical properties and electrical conductivity of the composite film, and continuous and automated production can be achieved, greatly shortening the production cycle, reducing the production cost, and significantly improving the production efficiency, electrical conductivity, and service life of the composite film.

[0049] Finally, it should be noted that the above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions recorded in the foregoing embodiments or perform equivalent replacements on some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A composite film forming production equipment, the composite film comprising a metal layer and a polymer layer disposed on at least one surface of the metal layer, characterized in that: include: A production box, wherein the inner cavity of the production box is used to provide a vacuum environment and a composite film preparation space; A composite film forming subsystem, the composite film forming subsystem comprising a polymer preparation device, a polymer curing device and a metal evaporation device, the polymer preparation device comprising a polymer evaporation device and / or a polymer coating device, a plurality of groups of the polymer preparation devices are arranged in parallel in the inner cavity of the production box, a polymer curing device is arranged in parallel on one side of each group of the polymer preparation devices, and the metal evaporation device is arranged on one side of the polymer preparation device and the polymer curing device; A film material conveying subsystem, wherein the film material conveying subsystem is used to convey the metal substrate film to be formed; A vacuum environment subsystem is used to extract the gas in the internal cavity of the production box.

2. The composite film forming production equipment according to claim 1, characterized in that: The polymer evaporation device comprises a nozzle array, and a flow guide cover is arranged on the outer side of the nozzle; the coating device comprises a slit die, and a supporting roller is arranged on the outer side of the slit die; the polymer curing device is an electron beam curing gun or an ultraviolet lamp, and a corona treatment device or a plasma treatment device is arranged between adjacent polymer preparation devices; the metal evaporation device comprises a placement seat, and an evaporation boat or a magnetron device is detachably mounted on the placement seat.

3. The composite film forming production equipment according to claim 1, characterized in that: The film material conveying subsystem includes a unwinding roller, a temperature control roller and a winding roller, a flattening roller is arranged between the unwinding roller and the temperature control roller, an idler roller is arranged between the winding roller and the temperature control roller, and a pressure roller is arranged between the polymer preparation devices. Multiple groups of unwinding rollers and winding rollers are symmetrically arranged on both sides of the internal cavity of the production box, and multiple groups of temperature control rollers are arranged between the composite film forming subsystems. There are common tangent surfaces between the unwinding roller, temperature control roller, winding roller, flattening roller, pressure roller and idler roller, and the tangent direction at the tangent point of the unwinding roller, temperature control roller, winding roller, flattening roller, pressure roller and idler roller is consistent with the film material conveying direction.

4. The composite film forming production equipment according to claim 1, characterized in that: The vacuum environment subsystem includes a first vacuum pump group, a second vacuum pump group and a third vacuum pump group. The first vacuum pump group includes a first mechanical pump and a first Roots pump. The second vacuum pump group includes a first diffusion pump and a second diffusion pump. The third vacuum pump group includes a second mechanical pump and a second Roots pump. The first vacuum pump group is connected to the top of the internal cavity of the production box, the second vacuum pump group is connected to the bottom of the internal cavity of the production box, and the third vacuum pump group is connected to the bottom of the internal cavity of the production box and the second vacuum pump group.

5. The composite film forming production equipment according to claim 4, characterized in that: The first mechanical pump is connected to the first Roots pump, the first Roots pump is connected to the top of the internal cavity of the production box, the first diffusion pump and the second diffusion pump are respectively connected to the bottom of the internal cavity of the production box, the second mechanical pump is connected to the second Roots pump, the second Roots pump is connected to the bottom of the internal cavity of the production box, and the second Roots pump is connected to the first diffusion pump and the second diffusion pump.

6. A composite film forming production method, characterized in that: The production method is performed by the composite film forming production equipment according to any one of claims 1 to 5, and the production method comprises: S100, judging whether to start the vacuum environment subsystem based on the film material forming scheme, so that the inner cavity of the production box is established with an atmospheric environment, an inert gas environment or a vacuum gas environment; S200, starting the film material conveying subsystem to convey the substrate film to be formed; S300, starting the composite film forming subsystem to form a polymer layer by evaporation or coating on the surface of the substrate film and then curing it, and / or evaporating the polymer layer to form a metal layer.

7. The composite film forming production method according to claim 6, characterized in that: The S100 includes: S110, judging the composite film forming gas environment based on the film material forming scheme, starting the first mechanical pump and the first Roots pump of the first vacuum pump group in sequence, evacuating the internal cavity of the production box, so that a vacuum gas environment is established in the internal cavity of the production box, if an atmospheric environment is required, entering S120a, if an inert gas environment is required, entering S120b, if a vacuum gas environment is required, entering S120c, S120a, introducing air until the air pressure inside and outside the production box is equal, so that the inner cavity of the production box is in an atmospheric environment; S120b, introducing inert gas until the pressure inside and outside the production box is equal, so that an inert gas environment is established in the inner cavity of the production box; S120c, sequentially start the first diffusion pump and the second diffusion pump of the second vacuum pump group, and sequentially start the second mechanical pump and the second Roots pump of the third vacuum pump group to maintain a vacuum environment.

8. The composite film forming production method according to claim 6, characterized in that: The S200 includes: S210, preheating all temperature-controlled rollers to preset temperatures, adjusting and detecting film material conveying operation parameters; S220, starting the unwinding roller and the winding roller in sequence, guiding the film material through the flattening roller and the idler roller to unwind and wind the same or different metal substrate films.

9. The composite film forming production method according to claim 6, characterized in that: The S300 includes: S310a, injecting the same or different polymer materials through a polymer evaporation device in a vacuum environment, and evaporating the same or different polymer materials onto the metal substrate film after vaporization; S320a, curing the polymer material by a polymer curing device to form one or more polymer layers; or S310b, in a vacuum environment, extracting the same or different polymer materials through a polymer coating device, and coating them onto the metal substrate film in steps after infiltration; S320b, curing the polymer material by a polymer curing device to form one or more polymer layers.

10. The composite film forming production method according to claim 9, characterized in that: The S300 further includes: S330, forming a metal layer by evaporation through a metal evaporation device; S340, detecting whether the film thickness and the number of film layers have reached a preset range, and determining whether to repeatedly stack the polymer layer and the metal layer until the preparation of the composite film is completed.

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