Gas nozzle and deposition equipment

Abstract

A gas nozzle comprises a gas inlet part, an inner cavity and a spraying body. The inner cavity is provided with an air inlet and an air outlet and is communicated with the air inlet part through the air inlet, and the wall face of the inner cavity is provided with a combination structure corresponding to the air outlet. The spraying body comprises a plurality of spraying holes, a connecting structure corresponding to the combining structure is arranged outside the spraying body, the spraying body is connected with the connecting structure through the combining structure, and the spraying body seals and covers the air outlet. The invention further provides deposition equipment with the gas nozzle.

Description

Technical Field

[0001] The present invention relates to a gas nozzle, and more particularly to a gas nozzle suitable for atomic layer deposition. Background Art

[0002] The gas nozzle of a deposition device is an essential manufacturing tool for depositing thin films. The gas nozzle delivers precursors to form thin films. Existing gas nozzles are mainly made of metal, such as aluminum alloy, mostly integrally formed or in the form of a disk, and are fixed by screws.

[0003] Facing the requirements of different thin film processes, the gas nozzles are also different, such as the manufacturing conditions of the shape and size of the spray holes. Therefore, when the device replaces the gas nozzle due to process needs, the entire set of gas nozzle components needs to be disassembled and replaced. However, when the gas nozzle used is integrally formed, when it needs to be replaced or adjusted due to process requirements, the entire set of gas nozzle components must be replaced, which will surely prolong the process time. And when the gas nozzle is fixed by screws, micro arcing is likely to occur during plasma formation, which damages the thin film. Cracks may occur in the thin film, resulting in poor thin film quality and other problems. In addition, dust is also likely to be generated, causing the process to malfunction.

[0004] Therefore, how to improve the efficiency of the thin film deposition process through the improvement of the structural design of the gas nozzle and thus overcome the above-mentioned defects has become one of the important issues that this industry wants to solve. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to provide a gas nozzle in view of the deficiencies of the prior art. By the structural design of the gas nozzle, the occurrence of problems such as micro arcing generated by the traditional screw-fixed gas nozzle and residual gas in the screw holes is reduced, making the related process more stable. In addition, for different process requirements, the deposition device can quickly replace the gas nozzle, shortening the standby and maintenance time of the deposition device and improving the production efficiency.

[0006] To solve the above technical problems, one of the technical solutions adopted by the present invention is to provide a gas nozzle, which includes an air inlet part, an inner cavity and a spraying body. The inner cavity has an air inlet and an air outlet. The inner cavity communicates with the air inlet part through the air inlet. A coupling structure is provided on the wall surface of the inner cavity corresponding to the air outlet. The spraying body includes a plurality of spray holes. A connection structure is provided on the outside of the spraying body corresponding to the coupling structure. Through the combination of the coupling structure and the connection structure, the spraying body covers the air outlet.

[0007] According to a feasible implementation, the coupling structure and the connection structure are combined in a threaded locking manner.

[0008] According to a feasible implementation, the gas nozzle further includes an O-ring located between the inner cavity and the spraying body.

[0009] According to a feasible implementation, the spraying body has a plate, and the outer diameter of the plate is 280 mm - 350 mm.

[0010] According to a feasible implementation, the spraying body has a plate, and a plurality of spray holes penetrate through the plate, and the spraying direction of each spray hole forms an angle with the plane where the plate is located.

[0011] To solve the above technical problems, another technical solution adopted by the present invention is to provide a deposition device, which includes an intake pipeline, a reaction chamber, and a gas nozzle. The intake part is connected to the intake pipeline, and the inner cavity and the spraying body are located in the reaction chamber.

[0012] To solve the above technical problems, another technical solution adopted by the present invention is to provide a gas nozzle, which includes a plate, a plurality of spray holes, and a connection structure. A plurality of spray holes penetrate through the plate, and the spraying direction of each spray hole forms an angle with the plane where the plate is located. The connection structure is arranged outside the plate for combining with the combining structure of the inner cavity.

[0013] One beneficial effect of the present invention is that the gas nozzle and the deposition device provided by the present invention can improve the efficiency of replacing and disassembling the gas nozzle through the technical solutions of "the wall surface of the inner cavity is provided with a combining structure corresponding to the air outlet" and "the outside of the spraying body is provided with a connection structure corresponding to the combining structure, and the spraying body covers the air outlet through the combination of the combining structure and the connection structure". Reduce the occurrence of problems such as micro arcing generated by generally fixing the gas nozzle with screws and residual gas in the screw holes.

[0014] Furthermore, through the above technical features and the design of the spray holes, for different process requirements, the deposition device can quickly replace the gas nozzle, shorten the standby and maintenance time of the deposition device, and improve the production efficiency.

[0015] Furthermore, through the technical solutions of "the gas nozzle includes a plate, a plurality of spray holes, and a connection structure" and "a plurality of spray holes penetrate through the plate, and the spraying direction of each spray hole forms an angle with the plane where the plate is located. The connection structure is arranged outside the plate for combining with the combining structure of the inner cavity", gas nozzles with different spray hole sizes, quantities, and distribution positions are designed. For different process requirements, the gas nozzle can be quickly replaced, the standby and maintenance time of the deposition device can be shortened, and the process efficiency can be improved.

[0016] To further understand the features and technical content of the present invention, please refer to the following detailed description and drawings of the present invention. However, the provided drawings are only for reference and illustration, and are not used to limit the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 FIG. 5 is a top view of a gas nozzle according to an embodiment of the present invention.

[0018] Figure 2 is Figure 1 a schematic cross-sectional view of the embodiment shown.

[0019] Figure 3 FIG. 15 is a schematic view of a deposition apparatus according to an embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0020] The following is a description of the embodiments of the present invention related to "gas nozzles and deposition apparatuses" through specific embodiments. Those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of the present invention. Additionally, it should be noted in advance that the drawings of the present invention are only simple schematic illustrations and are not drawn according to actual dimensions. The following embodiments will further describe the related technical content of the present invention in detail, but the disclosed content is not intended to limit the protection scope of the present invention.

[0021] Please refer to Figures 1 to 3 , Figure 1 FIG. 27 is a top view of a gas nozzle 2 according to an embodiment of the present invention, omitting the intake portion 21. Figure 2 is Figure 1 a schematic cross-sectional view of the embodiment shown. Figure 3 FIG. 33 is a schematic view of a deposition apparatus 100 according to an embodiment of the present invention.

[0022] The gas nozzle 2 includes an intake portion 21, an inner cavity 22, and a spraying body 23. The inner cavity 22 has an intake port 221 and an outlet port 222. The inner cavity 22 communicates with the intake portion 21 via the intake port 221. A coupling structure 2231 is provided on the wall surface 223 of the inner cavity 22 corresponding to the outlet port 222. The spraying body 23 includes a plurality of spray holes 231. A connection structure 232 is provided on the outside of the spraying body 23 corresponding to the coupling structure 2231. The spraying body 23 is sealed to the outlet port 222 by engaging the coupling structure 2231 with the connection structure 232.

[0023] As Figure 1 and Figure 2 shown, in this embodiment, the spraying body 23 has a plate 233 with a plurality of spray holes 231 passing through the plate 233. The precursor (gas) is sprayed towards the workpiece 6 (such as a wafer) through the spray holes 231. The workpiece 6 is located on the carrier 7 (see Figure 3)According to some embodiments, the outer diameter of the plate 233 ranges from 280 mm to 350 mm.

[0024] In addition, the ejection direction D of each ejection hole 231 forms an angle θ with the plane where the plate 233 is located. In Figure 3 the illustrated embodiment, the angle θ is 90 degrees. However, according to some embodiments, the angle θ is less than 90 degrees, and the present invention is not limited thereto. According to some embodiments, multiple angles θ may be the same or different.

[0025] As Figure 3 shown, the deposition device 100 includes an intake pipeline 3, a reaction chamber 4, and a gas nozzle 2. The intake part 21 is communicated with the intake pipeline 3, and the inner cavity 22 and the spraying body 23 are located inside the reaction chamber 4. An exhaust motor 5 is connected outside the reaction chamber 4. According to some embodiments, the combining structure 2231 and the connecting structure 232 can be joined by means of a snap connection. In this embodiment, the combining structure 2231 and the connecting structure 232 are joined by means of a threaded connection. As Figure 3 shown, for the airtightness of the inner cavity 22 and the spraying body 23, in this embodiment, the gas nozzle 2 further includes an O-ring 24, and the O-ring is located between the inner cavity 22 and the spraying body 23.

[0026] [Advantages of the Embodiment]

[0027] One of the advantages of the present invention is that the gas nozzle and the deposition device provided by the present invention can improve the efficiency of replacing and disassembling the gas nozzle through the technical solutions of "the inner wall surface of the inner cavity is provided with a combining structure corresponding to the air outlet" and "the outside of the spraying body is provided with a connecting structure corresponding to the combining structure, and the spraying body covers the air outlet through the engagement of the combining structure and the connecting structure". It reduces the occurrence of problems such as micro arcing generated by generally fixing the gas nozzle with screws and residual gas in the screw holes.

[0028] Furthermore, through the above technical features and the design of the ejection holes (such as size, quantity, ejection direction, and distribution position, etc.), for different process requirements, the deposition device can quickly change the gas nozzle, shorten the standby and maintenance time of the deposition device, and improve the production efficiency.

[0029] Furthermore, through the technical solutions of "the gas nozzle includes a plate, a plurality of ejection holes, and a connecting structure" and "the plurality of ejection holes penetrate through the plate, and the ejection direction of each ejection hole forms an angle with the plane where the plate is located. The connecting structure is arranged outside the plate for engaging with the combining structure of the inner cavity", gas nozzles with multiple different ejection hole sizes, quantities, and distribution positions are designed. For different process requirements, the gas nozzle can be quickly replaced, the standby and maintenance time of the deposition device can be shortened, and the process efficiency can be improved.

[0030] The above-disclosed content is only the preferred and feasible embodiment of the present invention, and does not limit the scope of the patent application of the present invention. Therefore, all equivalent technical changes made by using the content of the specification and drawings of the present invention are included in the scope of the patent application of the present invention.

Claims

1. A gas nozzle, characterized in that, The gas spray head includes: An air inlet part; An inner cavity having an air inlet and an opposite air outlet. The inner cavity communicates with the air inlet part via the air inlet. A coupling structure is provided on a wall surface of the inner cavity corresponding to the air outlet; and A spraying body including a plurality of spray holes. An engaging structure is provided outside the spraying body corresponding to the coupling structure. The spraying body covers the air outlet through the combination of the coupling structure and the engaging structure.

2. The gas nozzle according to claim 1, characterized in that, The coupling structure has a first thread, and the engaging structure has a second thread. The coupling structure and the engaging structure are combined in a threaded locking manner.

3. The gas nozzle according to claim 1, characterized in that, The gas spray head further includes an O-ring located between the inner cavity and the spraying body.

4. The gas nozzle according to claim 1, characterized in that, The spraying body has a plate, and the outer diameter of the plate is 280 mm - 350 mm.

5. The gas nozzle according to claim 1, characterized in that, The spraying body includes a plate, and the plurality of spray holes penetrate through the plate. The spraying direction of each spray hole forms an angle with the plane where the plate is located.

6. A deposition device, characterized in that, The deposition device includes: An intake pipeline; A reaction chamber; and The gas spray head according to any one of claims 1 to 5, wherein the air inlet part communicates with the intake pipeline, and the inner cavity and the spraying body are located in the reaction chamber.

7. The deposition device according to claim 6, characterized in that, The coupling structure and the engaging structure are locked in a threaded locking manner.

8. The deposition device according to claim 6, characterized in that, The spraying body has a plate, and the outer diameter of the plate is 280 mm - 350 mm.

9. The deposition device according to claim 6, characterized in that, The spraying body has a plate, and the plurality of spray holes penetrate through the plate. The spraying direction of each spray hole forms an angle with the plane where the plate is located.

10. A gas nozzle, characterized in that, The gas spray head includes: A plate; A plurality of spray holes penetrating through the plate. The spraying direction of each spray hole forms an angle with the plane where the plate is located; and An engaging structure provided outside the plate for engaging with a coupling structure of an inner cavity.

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