Method for driving a fluidic tube regulated by a piezoceramic sheet

By replacing the jet tube with a jet plate and using a Fibonacci-coded piezoelectric ceramic plate array, the problem of low frequency response of the jet tube type proportional servo valve was solved, achieving high response speed and high-precision motion control, and extending the life of the jet plate assembly.

CN120175703BActive Publication Date: 2025-12-26JIANG SU GUO RUI JI XIE ZHI ZAO YOU XIAN GONG SI
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Patent Information

Application Number
CN202510376444.3
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2025-03-28
Publication Date
2025-12-26
Estimated Expiration
2045-03-28

AI Technical Summary

Technical Problem

Existing jet tube type proportional servo valves have low frequency response, and the traditional torque motor drive method leads to assembly complexity and reduced frequency response.

Method used

The jet tube is replaced with a jet plate and discretized into four segments along the axial direction. A Fibonacci-coded piezoelectric ceramic plate array is used. The offset of the jet plate is adjusted by controlling the excitation voltage of the piezoelectric ceramic plate, thereby achieving precise control of the proportional servo valve.

Benefits of technology

The response speed and dynamic performance of the proportional servo valve have been improved, enabling high-precision motion control and extending the lifespan of the jet plate assembly.

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Abstract

The application discloses a piezoelectric ceramic sheet regulated fluidic tube, a fluidic tube driving method and a servo valve. The fluidic tube comprises a fluidic plate group, the fluidic plate group comprises at least two fluidic plates which are sequentially hinged, the fluidic plate is provided with an oil channel, the oil channels of two adjacent fluidic plates are communicated, the fluidic plates are divided into at least one connecting fluidic plate and a tail fluidic plate, the two ends of the connecting fluidic plate are provided with first connecting pieces, the connecting fluidic plates are sequentially hinged, one end of the tail fluidic plate is provided with a first connecting piece, and the tail fluidic plate and the connecting fluidic plate at the end are hinged. Piezoelectric ceramic sheets are arranged on the opposite sides of the fluidic plate, and the piezoelectric ceramic sheets are connected with wires. The piezoelectric ceramic sheet and the fluidic tube are discretized, at least two sections of the fluidic plate are formed into a piezoelectric ceramic sheet array in the Fibonacci code, the input voltage of each piezoelectric ceramic sheet is controlled, and the high-precision long-life driving method is combined, so that the fluidic tube has the advantages of high precision, high reliability, high dynamic response, good interchangeability and high expandability.
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Description

TECHNICAL FIELD

[0001] The present application relates to hydraulic transmission and control, and in particular to a driving method of a jet pipe regulated by a piezoelectric ceramic sheet. BACKGROUND

[0002] As a core component of high-end hydraulic transmission and driving equipment, the proportional servo valve has the characteristics of high precision, high reliability, and good control performance, and has been widely used in industrial automation, automobiles, aerospace, and other fields. The pilot stage of the proportional servo valve can be divided into slide valve, nozzle flapper valve, jet pipe valve, and deflector plate jet valve according to the structure. The jet pipe type proportional servo valve has become one of the two typical two-stage proportional servo valves that are widely used at present due to its high reliability. However, due to the response speed of the torque motor, the frequency response of the jet pipe type proportional servo valve is generally lower than that of the nozzle flapper type proportional servo valve.

[0003] The Chinese patent application publication CN220748702U discloses a jet pipe valve deflection structure, which uses a piezoelectric ceramic assembly to replace the traditional torque motor to drive the jet pipe. When working, the piezoelectric ceramic assembly is powered to deform, which in turn pushes the ear plate to elastically deform and press the jet pipe to deflect. Although this can avoid many problems faced by the jet pipe type proportional servo valve with an electric-mechanical converter using a torque motor during assembly, it does not solve the problem of low frequency response of the jet pipe type proportional servo valve.

[0004] The Chinese patent application publication CN106337851B discloses a deflection jet type brake pressure servo valve, which uses a deflection rod jet hydraulic amplifier as a pre-stage, drives the deflection rod with a torque motor, and guides the high-speed fluid emitted by the jet disc to the coverage area of the two receiving ports. The minimum size of the pilot stage of this invention is one order of magnitude larger than that of the nozzle flapper hydraulic amplifier. Although this invention increases the output power of the pilot stage hydraulic amplifier to improve the frequency response of the proportional servo valve, increasing the output power of the pilot stage will inevitably require the cross-sectional area or stroke of the power stage valve core to increase accordingly, which will reduce the hydraulic stiffness at both ends of the power stage valve core, and in turn reduce the frequency response of the entire valve. In addition, the electric-mechanical converter uses a torque motor, which greatly increases the complexity and difficulty of the assembly process. SUMMARY

[0005] In view of the deficiencies in the prior art, the application provides a driving method of a piezoelectric ceramic sheet regulated fluidic tube, wherein the traditional fluidic tube is changed into a fluidic plate, and the fluidic plate is discretized in the axial direction to form four sections of the fluidic plate provided with a Fibonacci coded piezoelectric ceramic sheet array, and the horizontal offset of the fluidic plate is controlled by controlling the excitation voltage value applied to the piezoelectric ceramic sheet array, the gap value between the fluidic plate nozzle and the middle position of the two circular holes of the receiver is further changed, and finally the pressure difference between the left and right ends of the proportional servo valve core is generated to realize the accurate control of the displacement of the proportional servo valve, and the driving method has the advantages of high control precision, high reliability, high replaceability, easy disassembly and assembly and the like.

[0006] In order to achieve the above-mentioned purpose, the application provides a driving method of a piezoelectric ceramic sheet regulated fluidic tube, wherein the piezoelectric ceramic sheet regulated fluidic tube comprises a fluidic plate group, the fluidic plate group comprises at least two sequentially rotatable connected fluidic plates, the fluidic plate is provided with an oil channel, the oil channels between adjacent two fluidic plates are communicated, the fluidic plate is divided into at least one connecting fluidic plate and a tail fluidic plate, both ends of the connecting fluidic plate are provided with a first connecting piece, the fluidic plate group is rotatably connected on the housing of the servo valve through the first connecting piece, each connecting fluidic plate is sequentially rotatably connected through the first connecting piece, one end of the tail fluidic plate is provided with a first connecting piece, and the tail fluidic plate is rotatably connected on the connecting fluidic plate at the end through the first connecting piece; opposite sides of the fluidic plate are provided with piezoelectric ceramic sheets, the piezoelectric ceramic sheets are connected with wires, and a direct current voltage is applied to the piezoelectric ceramic sheets to make the fluidic plate connected with the piezoelectric ceramic sheets deviate;

[0007] Preferably, the fluidic plate group comprises four fluidic plates, from the side close to the servo valve housing to the side away from the servo valve housing, the fluidic plates are arranged in order as a first fluidic plate, a second fluidic plate, a third fluidic plate and a fourth fluidic plate, and the maximum horizontal offset of each fluidic plate is 3E, 2E, E and E respectively, and the driving method is as follows:

[0008] An target horizontal offset x is obtained;

[0009] If x is a decimal number and x≤E, a voltage excitation is applied to the piezoelectric ceramic sheet on the fourth fluidic plate according to the value of x;

[0010] If x is a decimal number and x>E, x1 is obtained by rounding down x;

[0011] If x1∈(0,E], corresponding voltage excitations are applied to the piezoelectric ceramic sheets on the third fluidic plate and the fourth fluidic plate according to the value of x;

[0012] If x1∈(E,2E], corresponding voltage excitations are applied to the piezoelectric ceramic sheets on the second fluidic plate and the fourth fluidic plate according to the value of x;

[0013] If x1 is in (2E, 3E], according to the value of x, the piezoelectric ceramic pieces on the second jet plate, the third jet plate and the fourth jet plate are excited by corresponding voltage excitation;

[0014] If x1 is greater than 3E, the remainder m1 of x1 divided by 3E is calculated, if m1 is 0, according to the value of x, the piezoelectric ceramic pieces on the first jet plate, the second jet plate, the third jet plate and the fourth jet plate are excited by corresponding voltage excitation;

[0015] If m1 is 2E, according to the value of x, the piezoelectric ceramic pieces on the first jet plate, the second jet plate and the fourth jet plate are excited by corresponding voltage excitation;

[0016] If m1 is E, according to the value of x, the piezoelectric ceramic pieces on the first jet plate, the third jet plate and the fourth jet plate are excited by corresponding voltage excitation;

[0017] If x is an integer, according to the formula 3aE+2bE+cE+dE=x, the values of a, b, c, d corresponding to the formula are traversed, wherein the values of a, b, c, d are 0 or 1, the values of a, b, c, d that meet the formula are combined into a state array M, and the state array M is written into a scheme array L x in turn;

[0018] According to the number of occurrences of the target horizontal offset x, the piezoelectric ceramic pieces on the first jet plate, the second jet plate, the third jet plate and the fourth jet plate are excited by corresponding voltage excitation according to the state array M in the execution scheme array L x in turn.

[0019] Further, the first connecting piece includes an ear, and a flow distribution pin shaft passes through the ears of two adjacent jet plates to rotatably connect the two adjacent jet plates;

[0020] The flow distribution pin shaft is provided with two oil communication windows, and the two oil communication windows are in communication from the inside of the flow distribution pin shaft, and the oil communication windows are in communication with the oil channels of the two jet plates respectively to communicate the oil channels of the adjacent jet plates.

[0021] Further, in the jet plate group, the length of the jet plate decreases from the side close to the servo valve housing to the side away from the servo valve housing.

[0022] Further, in the jet plate group, the length of the jet plate is arranged in a Fibonacci sequence from the side away from the servo valve housing to the side close to the servo valve housing.

[0023] Further, the length of the piezoelectric ceramic piece accounts for 5 / 6-2 / 3 of the length of the jet plate connected thereto.

[0024] Further, if x1 is in (0, E], a piezoelectric ceramic piece on the third jet flow plate is applied with U voltage excitation, and a piezoelectric ceramic piece on the fourth jet flow plate is applied with (x-x1)U voltage excitation, wherein U represents that when the piezoelectric ceramic piece is applied with voltage excitation with a value of U, the jet flow plate connected with the piezoelectric ceramic piece reaches a maximum offset amount;

[0025] If x1 is in (E, 2E], a piezoelectric ceramic piece on the second jet flow plate is applied with U voltage excitation, and a piezoelectric ceramic piece on the fourth jet flow plate is applied with (x-x1)U voltage excitation.

[0026] If x1 is in (2E, 3E], a piezoelectric ceramic piece on the second jet flow plate is applied with U voltage excitation, a piezoelectric ceramic piece on the third jet flow plate is applied with U voltage excitation, and a piezoelectric ceramic piece on the fourth jet flow plate is applied with (x-x1)U voltage excitation.

[0027] Further, if m1=0, a piezoelectric ceramic piece on the first jet flow plate, a piezoelectric ceramic piece on the second jet flow plate, and a piezoelectric ceramic piece on the third jet flow plate are applied with U voltage excitation, and a piezoelectric ceramic piece on the fourth jet flow plate is applied with (x-x1)U voltage excitation.

[0028] If m1=2E, a piezoelectric ceramic piece on the first jet flow plate and a piezoelectric ceramic piece on the second jet flow plate are applied with U voltage excitation, and a piezoelectric ceramic piece on the fourth jet flow plate is applied with (x-x1)U voltage excitation.

[0029] If m1=E, a piezoelectric ceramic piece on the first jet flow plate and a piezoelectric ceramic piece on the third jet flow plate are applied with U voltage excitation, and a piezoelectric ceramic piece on the fourth jet flow plate is applied with (x-x1)U voltage excitation.

[0030] By means of the above technical solutions, the present application has the following advantages:

[0031] Compared with the traditional jet flow valve, the present application discretizes the jet flow pipe, has a smaller mass, and preferentially selects a jet flow plate with a smaller mass to act in a plurality of qualified driving schemes, so that the response speed of the jet flow proportional servo valve can be improved. Compared with the traditional jet flow proportional servo valve, the dynamic performance is better, which is reflected in the following two aspects: in the structure, a single large mass jet flow pipe is discretized into a plurality of small mass jet flow plates, and high frequency movement and high precision control are realized by means of piezoelectric ceramic pieces; in the driving method, the array piezoelectric ceramic piece driving combination can be optimally selected according to the target horizontal offset amount, so as to realize minimization of the movement mass.

[0032] Since the axial dimensions of the jet flow plates according to the present application are arranged according to the Fibonacci number, for any given target horizontal offset amount, there are at least two driving schemes, and the driving method according to the present application can realize autonomous switching of different driving schemes when receiving the same target horizontal offset amount, so as to ensure that the driving times of the jet flow plates are as equal as possible, that is, the long life control of the jet flow plate group is realized.

[0033] The above and other objects, features and advantages of the present application will become more apparent from the following detailed description when taken in conjunction with the accompanying drawings in which: BRIEF DESCRIPTION OF DRAWINGS

[0034] In order to clearly illustrate the technical solutions of the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed for use in the embodiments or prior art description. Obviously, the drawings described below are only some embodiments of the present application, and for those skilled in the field, other drawings can be obtained based on these drawings without creative labor.

[0035] Figure 1 A two-dimensional sectional view of a piezoelectric ceramic sheet regulated fluidic tube provided by the embodiment of the present application;

[0036] Figure 2 A three-dimensional assembly appearance schematic diagram of a proportional servo valve provided by the embodiment of the present application;

[0037] Figure 3 A two-dimensional sectional view of a pilot shell of a proportional servo valve provided by the embodiment of the present application;

[0038] Figure 4 A mounting schematic diagram of a first fluidic plate and a second fluidic plate provided by the embodiment of the present application;

[0039] Figure 5 A two-dimensional sectional view of a pilot control oil path of a proportional servo valve provided by the embodiment of the present application;

[0040] Figure 6 A two-dimensional sectional view of a valve body provided by the embodiment of the present application;

[0041] Figure 7 A piezoelectric ceramic sheet regulated fluidic tube driving method flow chart provided by the embodiment of the present application;

[0042] Figure 8 A working schematic diagram of each fluidic plate under a target horizontal offset x provided by the embodiment of the present application.

[0043] The reference signs of the above drawings are as follows: 1, pilot housing; 101, convex shaft; 102, shaft shoulder; 2, first right piezoelectric ceramic sheet; 3, first jet plate; 301, first lug; 302, annular groove; 303, double lug; 304, circular arc surface; 3004, flow channel of the first jet plate; 4, first left piezoelectric ceramic sheet; 5, first flow distribution pin shaft; 501, first oil passage window; 502, second oil passage window; 6, second right piezoelectric ceramic sheet; 7, second jet plate; 701, second lug; 702, oil passage in the second jet plate; 8, second left piezoelectric ceramic sheet; 9, second flow distribution pin shaft; 901, third oil passage window; 902, fourth oil passage window; 10, third right piezoelectric ceramic sheet; 11, third jet plate; 1101, oil passage of the third jet plate; 12, third left piezoelectric ceramic sheet; 13, third flow distribution pin shaft; 1301, fifth oil passage window; 1302, sixth oil passage window; 14, fourth right piezoelectric ceramic sheet; 15, fourth jet plate; 1501, oil passage of the fourth jet plate; 16, fourth left piezoelectric ceramic sheet; 17, valve core; 18, valve body; 1801, internal control oil port; 19, sealing ring; 20, receiver mounting seat; 21, receiver; 22, wire bolt; 23, elastic retainer ring for shaft. DETAILED DESCRIPTION

[0044] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0045] It should be noted that, in the description of the present application, the terms first, second, etc. are only used for description purposes and to distinguish similar objects, and there is no sequence between them, nor can they be understood as indicating or implying relative importance. In addition, in the description of the present application, unless otherwise specified, the meaning of multiple is two or more.

[0046] Embodiment: A servo valve is disclosed in the embodiment, comprising:

[0047] The housing 1, as shown in Figure 3 The housing 1 is provided with a convex shaft 101 and a shaft shoulder 102, and the convex shaft 101 has a flow channel 105.

[0048] The convex shaft 101 is hinged with a jet plate group, the jet plate group comprises four jet plates hinged in sequence, each jet plate has a flow channel, and the flow channels of adjacent jet plates are communicated. From the side close to the convex shaft 101 to the side away from the convex shaft 101, the four jet plates are sequentially sorted as the first jet plate 3, the second jet plate 7, the third jet plate 11 and the fourth jet plate 15.

[0049] Combining Figure 1 、 3 , as shown in FIG. 4, the upper end of the first jet plate 3 is provided with a first lifting lug 301, the shell 1 and the first jet plate 3 are connected through the cooperation of the convex shaft 101 and the shaft hole of the first lifting lug 301, the first jet plate 3 can rotate relative to the shell 1, the axial fixation of the first jet plate is realized through the shaft shoulder 102 and the elastic shaft baffle 23, and the oil channel of the first jet plate 3 and the flow channel 105 of the convex shaft 101 are communicated. The lower end of the first jet plate 3 is designed with double lifting lugs 303 and a circular arc surface 304, the upper end of the second jet plate 7 is designed with a second lifting lug 701, the diameter of the circular arc surface 304 is equal to the outer contour diameter of the second lifting lug 701, the length between the double lifting lugs 303 is equal to the radial length of the second lifting lug 701, the axial fixation of the second jet plate is realized through the interference fit between the first flow distribution pin shaft 5 and the inner hole of the double lifting lugs 303, and the clearance fit between the inner hole of the second lifting lug 701. Among them, the diameter of the first flow distribution pin shaft 5 is equal to the inner hole diameter of the double lifting lugs 303 and the second lifting lug 701, and the length of the first flow distribution pin shaft 5 is equal to the radial length of the first jet plate 3 and the second jet plate 7. Among them, the first flow distribution pin shaft 5 is provided with two oil through windows, the two oil through windows are communicated from the inside of the first flow distribution pin shaft 5, and the oil through windows are respectively communicated with the oil channels of the first jet plate 3 and the second jet plate 7 to communicate the oil channels of the first jet plate 3 and the second jet plate 7. The mounting mode and cooperation relationship between the second jet plate 7 and the third jet plate 11 and the third jet plate 11 and the fourth jet plate 15 are the same as the mounting mode and cooperation relationship between the first jet plate 3 and the second jet plate 7.

[0050] The lower end of the fourth jet plate 15 is connected with a nozzle 1502, and the nozzle 1502 and the oil channel of the fourth jet plate 15 are communicated.

[0051] The opposite sides of the jet plate are respectively connected with piezoelectric ceramic sheets, as shown in Figure 1 , the two sides of the first jet plate 3 are adhesively connected with a first right piezoelectric ceramic sheet 2 and a first left piezoelectric ceramic sheet 4 through epoxy resin; the two sides of the second jet plate 7 are adhesively connected with a second right piezoelectric ceramic sheet 6 and a second left piezoelectric ceramic sheet 8 through epoxy resin; the two sides of the third jet plate 11 are adhesively connected with a third right piezoelectric ceramic sheet 10 and a third left piezoelectric ceramic sheet 12 through epoxy resin; and the two sides of the fourth jet plate 15 are adhesively connected with a fourth right piezoelectric ceramic sheet 14 and a fourth left piezoelectric ceramic sheet 16 through epoxy resin.

[0052] The shell 1 is fixed with a wire bolt 22 through a bolt, and the piezoelectric ceramic sheet is connected with a wire through the wire bolt 22.

[0053] A receiver mounting base 20 is provided below the nozzle 1502. The receiver mounting base 20 is used to fix the receiver 21. The receiver mounting base 20 is interference-fitted with the receiver 21. The receiver 21 is provided with two receiving oil passages, and the two receiving oil passages are symmetrical about the outlet center of the nozzle 1502.

[0054] The receiver mounting base 20 is provided with a valve body 18 on the side opposite to the housing 1. The receiver mounting base 20 and the valve body 18 are fixed together by bolts, and the housing 1 and the valve body 18 are also fixed together by bolts. Figure 6 As shown, the valve body 18 is provided with a valve body oil circuit, a first oil inlet P1 and a second oil inlet P2 connected to the valve body oil circuit, the first oil inlet P1 and the second oil inlet P2 respectively connected to the two receiving oil channels of the receiver, a first working oil channel A and a second working oil channel B connected to the valve body oil circuit are provided between the first oil inlet P1 and the second oil inlet P2, and a return oil channel T connected to the valve body oil circuit is provided between the first working oil channel A and the second working oil channel B. The valve body 18 is also provided with an internal control oil port 1801.

[0055] The valve body oil passage is provided with a valve core 17, which isolates the first working oil passage A and the second working oil passage B, the return oil passage T and the valve body oil passage, the valve body oil passage and the first oil inlet passage P1, and the valve body oil passage and the second oil inlet passage P2. The valve core 17 can slide along the valve body oil passage so that the first oil inlet passage P1 or the second oil inlet passage P2 can be connected to the valve body oil passage.

[0056] The receiver 21 has two receiving oil passages connected to both sides of the valve body oil circuit. Pilot fluid from the hydraulic power source flows through flow channels 105 and 104 on the housing 1 and is introduced into the jet plate assembly, then sprayed onto the receiver 21 through the nozzle 1502 of the fourth jet plate 15. When there is no signal input, the jet plate assembly remains in the middle position between the two receiving holes, and the jet kinetic energy received by both receiving holes is the same. Therefore, the recovery pressure of the two receiving holes is also equal, and the valve core 17 remains stationary. When there is a signal input to the jet plate assembly, the jet plate deviates from the middle position, and the jet kinetic energy received by the two receiving holes is different. Therefore, the recovery pressure of the two receiving holes is different, and the pressure difference causes the valve core 17 to move.

[0057] In some feasible embodiments, the jet plate assembly may further include at least two jet plates that are hinged sequentially, such as two, three, five, etc. Furthermore, the lengths of the jet plates are arranged in a Fibonacci sequence from the side furthest from the servo valve housing to the side closest to the servo valve housing.

[0058] In this embodiment, the pilot liquid flow can adopt two liquid supply modes. One is internal oil supply, which is connected to the flow channel 105 on the shell 1 through one end of the external pipeline and connected to the internal control oil port 1801 on the valve body 18 through the other end; the other is external oil supply, which is connected to the flow channel 105 on the shell 1 through one end of the external pipeline and connected to an independent hydraulic power source through the other end.

[0059] Through the above technical solution, combined with the working characteristics of the fluidic servo valve, the oil path is opened in the fluidic plate to adjust the working state of the fluidic plate without affecting the fluidics. The internal oil path of the fluidic plate group is shown in Figure 5 The pilot control liquid flow of the fluidic plate group is introduced into the inside of the convex shaft 101 through the flow channel 105 on the shell 1, communicated with the annular groove 302 inside the first lifting lug 301 on the top of the first fluidic plate 3 through the vertical hole 104 on the convex shaft 101, flowed into the first fluidic plate 3 through the flow channel 3004 inside the first fluidic plate 3, flowed out through the second oil window 502 on the first flow distribution pin shaft 5, and the rotational speed of the liquid flow is converted into horizontal speed by the flow distribution pin shaft, so that the relative rotation between the first fluidic plate 3 and the second fluidic plate 7 is smooth; similarly, the liquid flow flows into the oil inlet hole on the second fluidic plate 7 through the second oil window 502 on the first flow distribution pin shaft 5, flows into the third oil window 901 of the second flow distribution pin shaft 9 through the oil path 702 inside the second fluidic plate, and flows out through the fourth oil window 902; the oil flowing out of the fourth oil window 902 flows through the third fluidic plate 11, flows into the third flow distribution pin shaft 13 through the oil channel 1101 inside the third fluidic plate 11, enters the fifth oil window 1301 of the third flow distribution pin shaft, and flows out through the sixth oil window 1302; the oil flows into the fourth fluidic plate 15 through the third flow distribution pin shaft, and is sprayed from the nozzle 1502 to the receiver 21 through the oil path 1501 inside the fourth fluidic plate 15.

[0060] In this embodiment, the horizontal offset of the four fluidic plates is controlled, and then the offset of the nozzle 1502 on the fourth fluidic plate 15 relative to the middle position of the receiver 21 is controlled. The length of the first fluidic plate 3: the length of the second fluidic plate 7: the length of the third fluidic plate 11: the length of the fourth fluidic plate 15 = 3:2:1:1. According to similar triangles, when the first fluidic plate 3, the second fluidic plate 7, the third fluidic plate 11 and the fourth fluidic plate 15 are independently driven, the maximum horizontal offset is arranged in a Fibonacci sequence, that is, x 1max : x 2max : x 3max : x 4max = 3:2:1:1, wherein the adjustable horizontal offset range of the first fluidic plate 3 is the largest, and the adjustable horizontal offset ranges of the third fluidic plate 11 and the fourth fluidic plate 15 are the smallest.

[0061] The driving voltage of the jet plate is U1, the deflection angle is θ, and the axial length is L, wherein the calculation formula of the deflection angle is θ=f(U1). When the first jet plate, the second jet plate, the third jet plate and the fourth jet plate are independently driven to deviate, according to the trigonometric function, the deviation δ of the fourth jet plate 15 from the middle position of the two receiving oil channels of the receiver 21 is Lsin(f(U1)).

[0062] The embodiment also discloses a driving method of the piezoelectric ceramic sheet regulated jet pipe, which is used for realizing the displacement closed-loop control of the valve core 17, and comprises self-adaptive driving of each jet plate under the premise of guaranteeing the target horizontal deviation of the fourth jet plate 15, so as to realize the high-precision and long-life requirements of the jet plate group. The first jet plate 3, the second jet plate 7, the third jet plate 11 and the fourth jet plate 15 are all deviated to the right, so that voltage excitation needs to be applied to the first left piezoelectric ceramic sheet 4, the second left piezoelectric ceramic sheet 8, the third left piezoelectric ceramic sheet 12 and the fourth left piezoelectric ceramic sheet 16, and the rated working voltage of the first left piezoelectric ceramic sheet 4, the second left piezoelectric ceramic sheet 8, the third left piezoelectric ceramic sheet 12 and the fourth left piezoelectric ceramic sheet 16 is U, that is, when voltage excitation with the value of U is applied to the first left piezoelectric ceramic sheet 4, the second left piezoelectric ceramic sheet 8, the third left piezoelectric ceramic sheet 12 and the fourth left piezoelectric ceramic sheet 16, the first left piezoelectric ceramic sheet 4, the second left piezoelectric ceramic sheet 8, the third left piezoelectric ceramic sheet 12 and the fourth left piezoelectric ceramic sheet 16 all reach the maximum deviation. The maximum horizontal deviation of the first jet plate, the second jet plate, the third jet plate and the fourth jet plate is 3E, 2E, E and E respectively, and the driving method is as follows.

[0063] The target horizontal deviation x is obtained;

[0064] If x is a decimal number and x≤E, voltage excitation is applied to the piezoelectric ceramic sheet on the fourth jet plate 15 according to the value of x;

[0065] If x is a decimal number and x>E, x1 is obtained by taking x down to the integer;

[0066] If x1∈(0,E], U voltage excitation is applied to the piezoelectric ceramic sheet on the third jet plate, and (x-x1)U voltage excitation is applied to the piezoelectric ceramic sheet on the fourth jet plate, wherein U represents that when voltage excitation with the value of U is applied to the piezoelectric ceramic sheet, the jet plate connected to the piezoelectric ceramic sheet reaches the maximum deviation;

[0067] If x1∈(E,2E], U voltage excitation is applied to the piezoelectric ceramic sheet on the second jet plate, and (x-x1)U voltage excitation is applied to the piezoelectric ceramic sheet on the fourth jet plate;

[0068] If x1 is in (2E, 3E], the piezoelectric ceramic piece on the second jet plate is excited by U voltage, the piezoelectric ceramic piece on the third jet plate is excited by U voltage, and the piezoelectric ceramic piece on the fourth jet plate is excited by (x-x1)U voltage.

[0069] If x1>3E, the remainder m1 of x1 divided by 3E is calculated,

[0070] If m1=0, the piezoelectric ceramic pieces on the first jet plate, the second jet plate, and the third jet plate are excited by U voltage, and the piezoelectric ceramic piece on the fourth jet plate is excited by (x-x1)U voltage;

[0071] If m1=2E, the piezoelectric ceramic pieces on the first jet plate and the second jet plate are excited by U voltage, and the piezoelectric ceramic piece on the fourth jet plate is excited by (x-x1)U voltage;

[0072] If m1=E, the piezoelectric ceramic pieces on the first jet plate and the third jet plate are excited by U voltage, and the piezoelectric ceramic piece on the fourth jet plate is excited by (x-x1)U voltage.

[0073] If x is an integer, the values of a, b, c, and d are calculated according to the formula 3aE+2bE+cE+dE=x, and the values of a, b, c, and d that meet the formula are combined into a state array M, and the state array M is sequentially written into a scheme array L x , where a, b, c, and d respectively represent the state quantities of the first jet plate, the second jet plate, the third jet plate, and the fourth jet plate, the values of a, b, c, and d are 0 or 1, if the values of a, b, c, and d are 0, it means that no voltage excitation is applied to the piezoelectric ceramic pieces on the first jet plate, the second jet plate, the third jet plate, and the fourth jet plate, if the values of a, b, c, and d are 1, it means that voltage excitation is applied to the piezoelectric ceramic pieces on the first jet plate, the second jet plate, the third jet plate, and the fourth jet plate.

[0074] According to the occurrence frequency of the target horizontal offset x, the state arrays M in the scheme array L x are sequentially executed.

[0075] Since the axial dimensions of the jet plates are arranged according to the Fibonacci numbers, for any given target horizontal offset, there are at least two driving schemes, and through the above driving method, the same target horizontal offset can be received to automatically switch different driving schemes, so as to ensure that the driving frequencies of the jet plates are as equal as possible, that is, the long-life control of the jet plate assembly is realized.

[0076] In some feasible embodiments, the above driving method is executed using a controller:

[0077] Step 1, define variable N xThe driving scheme cycle state for recording each target horizontal offset x, the counter N is initialized and set to 1, where N x The value of N when the target horizontal offset is x.

[0078] Step 2, get the target horizontal offset x.

[0079] Step 3, determine whether x is an integer, if the determination result is false, sequentially execute step 4; if the determination result is true, jump to execute step 20.

[0080] Step 4, enter the high-precision short-life driving condition, determine whether x belongs to (0, 1), if the determination result is false, jump to execute step 7; if the determination result is true, sequentially execute step 5.

[0081] Step 5, according to the value of x, apply voltage excitation to the fourth left piezoelectric ceramic sheet 16 on the fourth jet plate 15, and do not apply voltage excitation to the first left piezoelectric ceramic sheet 4, the second left piezoelectric ceramic sheet 8, and the third left piezoelectric ceramic sheet 12 on the first jet plate 3, the second jet plate 7, and the third jet plate 11.

[0082] Step 6, jump to execute step 2.

[0083] Step 7, round down the target horizontal offset x to get x1.

[0084] Step 8, determine whether x1 belongs to (0, 3), if the determination result is false, jump to execute step 11; if the determination result is true, sequentially execute step 9.

[0085] Step 9, if x1 ∈ (0, 1], apply U voltage excitation to the third left piezoelectric ceramic sheet 12 on the third jet plate 11, apply (x-x1)U voltage excitation to the fourth left piezoelectric ceramic sheet 16 on the fourth jet plate 15, and do not apply voltage excitation to the first left piezoelectric ceramic sheet 4 and the second left piezoelectric ceramic sheet 8 on the first jet plate 3 and the second jet plate 7;

[0086] If x1 ∈ (1, 2], apply U voltage excitation to the second left piezoelectric ceramic sheet 8 on the second jet plate 7, apply (x-x1)U voltage excitation to the fourth left piezoelectric ceramic sheet 16 on the fourth jet plate 15, and do not apply voltage excitation to the first left piezoelectric ceramic sheet 4 and the third left piezoelectric ceramic sheet 12 on the first jet plate 3 and the third jet plate 11;

[0087] If x1 ∈ (2, 3], apply U voltage excitation to the second left piezoelectric ceramic sheet 8 on the second jet plate 7, apply U voltage excitation to the third left piezoelectric ceramic sheet 12 on the third jet plate 11, apply (x-x1)U voltage excitation to the fourth left piezoelectric ceramic sheet 16 on the fourth jet plate 15, and do not apply voltage excitation to the first left piezoelectric ceramic sheet 4 on the first jet plate 3.

[0088] Step 10, return to Step 2.

[0089] Step 11, calculate the remainder ml of xl divided by 3E.

[0090] Step 12, determine whether ml is 0, if the determination result is false, jump to Step 15; if the determination result is true, sequentially execute Step 13.

[0091] Step 13, apply U voltage excitation to the first left piezoelectric ceramic piece 4, the second left piezoelectric ceramic piece 8, and the third left piezoelectric ceramic piece 12 on the first jet plate 3, the second jet plate 7, and the third jet plate 11, and apply (x-xl)U voltage excitation to the fourth left piezoelectric ceramic piece 16 on the fourth jet plate 15.

[0092] Step 14, return to Step 2.

[0093] Step 15, determine whether ml is 2, if the determination result is false, jump to Step 18; if the determination result is true, sequentially execute Step 16.

[0094] Step 16, apply U voltage excitation to the first left piezoelectric ceramic piece 4 and the second left piezoelectric ceramic piece 8 on the first jet plate 3 and the second jet plate 7, apply (x-xl)U voltage excitation to the fourth left piezoelectric ceramic piece 16 on the fourth jet plate 15, and do not apply voltage excitation to the third left piezoelectric ceramic piece 12 on the third jet plate 11.

[0095] Step 17, return to Step 2.

[0096] Step 18, apply U voltage excitation to the first left piezoelectric ceramic piece 4 and the third left piezoelectric ceramic piece 12 on the first jet plate 3 and the third jet plate 11, apply (x-xl)U voltage excitation to the fourth left piezoelectric ceramic piece 16 on the fourth jet plate 15, and do not apply voltage excitation to the second left piezoelectric ceramic piece 8 on the second jet plate 7.

[0097] Step 19, return to Step 2.

[0098] Step 20, enter the low-precision long-life working condition, define and initialize four jet plate state quantities a, b, c, and d, where a, b, c, and d respectively take values 0 or 1, and the four jet plate state quantities represent the working state of the jet plate, i.e., when a=0, it indicates that the first jet plate 3 does not work; when a=1, it indicates that the first jet plate 3 works.

[0099] Step 21, define a variable T to record the number of cycles, and initialize and set the counter T to 1.

[0100] Step 22, bit operation is performed on variable T to realize traversal of state quantities a, b, c and d of the four-jet plate, and the formula 3a+2b+c+d is brought in to judge whether 3a+2b+c+d is equal to x, if the judgment result is no, jump to execute step 25, if the judgment result is yes, jump to execute step 23.

[0101] Step 23, define state array M to record state quantities of the four-jet plate, write state quantities a, b, c and d of the four-jet plate at this time into the state array M.

[0102] Step 24, define scheme array L x to record all jet plate action schemes meeting the condition, write the state array M into the scheme array L x .

[0103] Step 25, calculate values of state quantities a, b, c and d of the four-jet plate corresponding to T by using bit operation respectively.

[0104] Step 26, increment the counter T.

[0105] Step 27, judge whether T is greater than or equal to 15, if the judgment result is no, return to execute step 22, if the judgment result is yes, jump to execute step 28.

[0106] Step 28, output the scheme array L x (N x ), wherein L x (N x ) represents the N x th state array M in the scheme array L x .

[0107] Step 29, increment N x .

[0108] Step 30, judge whether N x is greater than length(L x ), wherein length(L x ) represents the number of state arrays M meeting the target offset, if the judgment result is no, return to execute step 2, if the judgment result is yes, jump to execute step 31.

[0109] Step 31, set N x to 1, namely N x =1.

[0110] Step 32, jump to execute step 2.

[0111] The following illustrates how to determine the driving scheme of the selected jet plate group according to different target horizontal displacement x in computer language. It is assumed that the first jet plate 3, the second jet plate 7, the third jet plate 11 and the fourth jet plate 15 are independently driven, and the maximum horizontal displacement x of the four jet plates is respectively 3 μm, 2 μm, 1 μm and 1 μm. 1max 2max 3max 4max

[0112] It is assumed that the first target horizontal displacement is 0.5 μm.

[0113] The variable N is defined to record the driving scheme adopted under each target horizontal displacement, and the counter N is initialized and set to 1.

[0114] The target horizontal displacement x = 0.5 μm is inputted.

[0115] The x-floor(x) = 0? conditional instruction is executed, and the result is false, i.e. x is not an integer.

[0116] The high-precision short-life driving condition is entered, and the x = 0.5 ∈ (0, 1)? conditional instruction is executed, and the result is true, i.e. x ∈ (0, 1).

[0117] The fourth left piezoelectric ceramic sheet 16 on the fourth jet plate 15 is applied with 0.5 U voltage excitation, and the first left piezoelectric ceramic sheet 4, the second left piezoelectric ceramic sheet 8 and the third left piezoelectric ceramic sheet 12 on the first jet plate 3, the second jet plate 7 and the third jet plate 11 are not applied with voltage excitation.

[0118] It is assumed that the second horizontal displacement is 2 μm.

[0119] The target horizontal displacement x = 2 μm is inputted.

[0120] The x-floor(x) = 0? conditional instruction is executed, and the result is true, i.e. x is an integer.

[0121] The low-precision long-life driving condition is entered, and the four jet plate state variables a, b, c and d are defined and initialized to 0, respectively. The jet plate state variable represents the working state of the four jet plates, i.e. when a = 0, it indicates that the first jet plate 3 does not work; when a = 1, it indicates that the first jet plate 3 works.

[0122] The counter T is initialized and set to 1.

[0123] The 3a + 2b + c + d = x? conditional instruction is executed, and the result is true.

[0124] The four jet plate state variables a, b, c and d at this time are written into the state array M.

[0125] ​​​​Write the state array M into the scheme array L x In the scheme array L x ;

[0126] The counter T is incremented by 1;

[0127] The T >= 15? conditional instruction is executed, and if the result is false, the above steps are repeated to traverse all values of a, b, c, d that satisfy 3a+2b+c+d=x, and write them into the state array M and then into the scheme array L2. That is, M1=[0 0 11], M2=[0 1 0 0], L2(1)=M1=[0 0 1 1], L2(2)=M2=[0 1 0 0];

[0128] Until the T >= 15? conditional instruction is true, the scheme array L2(N x ) is output, that is, the scheme array L2(1)=M1=[0 0 1 1] is output, so the third jet plate 11 and the fourth jet plate 15 move and reach the maximum deflection angle, and the first jet plate 3 and the second jet plate 7 do not move;

[0129] The counter N x is incremented by 1;

[0130] The N x >length(L2)? conditional instruction is executed, and the result is false.

[0131] The third target horizontal offset is 2μm:

[0132] The target horizontal offset x=2μm is input;

[0133] The x-floor(x)=0? conditional instruction is executed, and the result is true, that is, x is an integer;

[0134] The low-precision long-life working condition is entered, and the four jet plate state variables a, b, c, d are defined and initialized to 0. The jet plate state variable represents the working state of the four jet plates, that is, when a=0, it means that the first jet plate 3 does not work; when a=1, it means that the first jet plate 3 works;

[0135] The counter T is initialized and set to 1;

[0136] The 3a+2b+c+d=x? conditional instruction is executed, and the result is true;

[0137] The four jet plate state variables a, b, c, d at this time are written into the state array M;

[0138] The state array M is written into the scheme array L x , that is, the state array M is written into the scheme array L x ;

[0139] The counter T is incremented;

[0140] The T >= 15? conditional instruction is executed, and if the result is false, the above steps are repeated to traverse all values of a, b, c, d that satisfy 3a+2b+c+d=x, and write them into the state array M and then into the scheme array L2. That is, M1=[0 0 11], M2=[0 1 0 0], L2(1)=M1=[0 0 1 1], L2(2)=M2=[0 1 0 0];

[0141] Until the result of the T >= 15? conditional instruction is true, the scheme array L2(N x ) is output, and in the second target horizontal offset of 2μm, N x has been incremented, that is, at this time N x =2, so the scheme array L2(2)=M2=[0 1 0 0] is output, that is, the first jet plate, the third jet plate 11, and the fourth jet plate 15 do not act, and the second jet plate 7 acts and reaches the maximum deflection angle;

[0142] N x is incremented;

[0143] The N x >length(L2) conditional instruction is executed, and after the third target horizontal offset is executed, at this time N x =3, because in the case of the target horizontal offset x=2μm, there are only two jet plate driving schemes, that is, length(L2)=2, so the result is true;

[0144] N x is set to 1, that is, N x =1.

[0145] The fourth target horizontal offset is 4.3μm:

[0146] The target horizontal offset x=4.3μm is input;

[0147] The x-floor(x)=0? conditional instruction is executed, and the result is false, that is, x is not an integer;

[0148] The high-precision short-life driving condition is entered, the x=4.3∈(0,1)? conditional instruction is executed, and the result is false, that is, x∉(0,1), x1=floor(x) is executed, and x1=4μm is obtained by rounding down the target horizontal offset x;

[0149] The x1=4.3∈(0,3)? conditional instruction is executed, and the result is false, that is, x∉(0,3),

[0150] Execute m1=mod(x1,3), that is, m1=1;

[0151] Execute m1=0? conditional instruction, and the determination result is false.

[0152] Execute m1=2? conditional instruction, and the determination result is false.

[0153] A U voltage excitation is applied to the first left piezoelectric ceramic piece 4 on the first jet plate 3, the third left piezoelectric ceramic piece 12 on the third jet plate 11, and a 0.3U voltage excitation is applied to the fourth left piezoelectric ceramic piece 16 on the fourth jet plate 15, and no voltage excitation is applied to the second left piezoelectric ceramic piece 8 on the second jet plate 7.

[0154] Similarly, if the first jet plate 3, the second jet plate 7, the third jet plate 11 and the fourth jet plate 15 are to be shifted to the left, the excitation voltage is applied to the first right piezoelectric ceramic piece 4 on the first jet plate 3, the second right piezoelectric ceramic piece 8 on the second jet plate 7, the third right piezoelectric ceramic piece 12 on the third jet plate 11 and the fourth right piezoelectric ceramic piece 16 on the fourth jet plate 15, so that the first jet plate 3, the second jet plate 7, the third jet plate 11 and the fourth jet plate 15 can be shifted to the left.

[0155] It can be known from the above horizontal offset amount embodiments that the driving method proposed in the application can autonomously select into which working condition according to the input target horizontal offset amount type, not only can ensure the high-precision control of the piezoelectric ceramic piece regulated jet pipe displacement, but also can consider the long service life requirement of the jet plate group. Compared with the traditional jet pipe valve, the application is equivalent to discretizing the jet pipe, and the quality is smaller, and at the same time, in a plurality of qualified driving schemes, the jet plate action with smaller quality is preferentially selected, so that the response speed of the jet pipe type proportional servo valve can be improved.

[0156] Those skilled in the art can understand that all or part of the processes of the above-mentioned embodiments can be completed by writing a computer program into related hardware, and the program can be stored in a readable storage medium on the hardware. The readable storage medium includes but is not limited to a single-chip microcomputer and other memories with storage memory functions.

[0157] The principle and implementation mode of the application are described in the specific embodiments in the application, and the above embodiment description is only used to help understand the method and core idea of the application; meanwhile, for those skilled in the art, according to the idea of the application, the specific implementation mode and application range will be changed, and the above description should not be understood as a limitation of the application.

Claims

1. A method of driving a piezoelectric ceramic sheet regulated fluidic tube, the piezoelectric ceramic sheet regulated fluidic tube comprising: The jet plate group comprises at least two sequentially rotatable connected jet plates, the jet plates are provided with oil channels, the oil channels between two adjacent jet plates are communicated, the jet plates are divided into at least one connecting jet plate and a tail jet plate, both ends of the connecting jet plate are provided with first connecting members, the jet plate group is rotatably connected on the housing of the servo valve through the first connecting members, each connecting jet plate is sequentially rotatably connected through the first connecting members, one end of the tail jet plate is provided with a first connecting member, and the tail jet plate is rotatably connected on the connecting jet plate at the end through the first connecting member; opposite sides of the jet plate are provided with piezoelectric ceramic sheets, the piezoelectric ceramic sheets are connected with wires, and a direct current voltage is applied to the piezoelectric ceramic sheets to offset the jet plate connected with the piezoelectric ceramic sheet. The jet plate group comprises four jet plates, from the side close to the housing of the servo valve to the side away from the housing of the servo valve, the jet plates are sequentially arranged as a first jet plate, a second jet plate, a third jet plate and a fourth jet plate, and the maximum horizontal offset of each jet plate is 3E, 2E, E and E respectively. The target horizontal offset x is obtained. If x is a decimal number and x≤E, only the piezoelectric ceramic sheet on the fourth jet plate is excited by applying a voltage according to the value of x. If x is a decimal number and x>E, x1 is obtained by rounding down x. If x1∈(0, E], the piezoelectric ceramic sheets on the third jet plate and the fourth jet plate are excited by applying corresponding voltages according to the value of x. If x1∈(E, 2E], the piezoelectric ceramic sheets on the second jet plate and the fourth jet plate are excited by applying corresponding voltages according to the value of x. If x1∈(2E, 3E], the piezoelectric ceramic sheets on the second jet plate, the third jet plate and the fourth jet plate are excited by applying corresponding voltages according to the value of x. If x1>3E, m1 is calculated by dividing x1 by 3E, if m1=0, the piezoelectric ceramic sheets on the first jet plate, the second jet plate, the third jet plate and the fourth jet plate are excited by applying corresponding voltages according to the value of x. If m1=2E, the piezoelectric ceramic sheets on the first jet plate, the second jet plate and the fourth jet plate are excited by applying corresponding voltages according to the value of x. If m1=E, the piezoelectric ceramic sheets on the first jet plate, the third jet plate and the fourth jet plate are excited by applying corresponding voltages according to the value of x. If x is an integer, according to the formula 3aE+2bE+cE+dE=x, traverse the corresponding values of a, b, c, d that meet the formula, wherein the values of a, b, c, d are 0 or 1, combine the values of a, b, c, d that meet the formula into a state array M, and write the state array M into the scheme array L in turn x In the middle; According to the number of occurrences of the target level offset x, the piezoelectric ceramic pieces on the first fluidic plate, the second fluidic plate, the third fluidic plate, and the fourth fluidic plate are sequentially excited by voltage according to the state array M in the execution scheme array L. x ​ 2. The piezoelectric ceramic sheet regulated fluidic drive method according to claim 1, characterized by, The first connecting member comprises an eye, and the eye of the adjacent two jet plates is penetrated by a flow distribution pin shaft to rotatably connect the adjacent two jet plates. The flow distribution pin shaft is provided with two oil communication windows, the two oil communication windows are communicated from the inside of the flow distribution pin shaft, and the oil communication windows are respectively communicated with the oil channels of the two jet plates to communicate the oil channels of the adjacent jet plates.

3. The piezoelectric ceramic sheet regulated fluidic drive method according to claim 2, wherein In the jet plate group, the length of the jet plate decreases from the side close to the housing of the servo valve to the side away from the housing of the servo valve.

4. The piezoelectric ceramic sheet regulated fluidic drive method according to claim 3, wherein In the jet plate group, from the side away from the housing of the servo valve to the side close to the housing of the servo valve, the length of the jet plate is arranged in a Fibonacci sequence.

5. The piezoelectric ceramic sheet regulated fluidic drive method according to claim 4, wherein The length of the piezoelectric ceramic sheet accounts for 5 / 6-2 / 3 of the length of the jet plate connected therewith.

6. The piezoelectric ceramic sheet regulated fluidic drive method according to claim 1, wherein If x1 is in (0, E], a piezoelectric ceramic piece on the third fluidic plate is applied with U voltage excitation, and a piezoelectric ceramic piece on the fourth fluidic plate is applied with (x-x1)U voltage excitation, wherein U represents that when a piezoelectric ceramic piece is applied with voltage excitation with a value of U, a fluidic plate connected with the piezoelectric ceramic piece reaches a maximum offset amount; If x1 is in (E, 2E], a piezoelectric ceramic piece on the second fluidic plate is applied with U voltage excitation, and a piezoelectric ceramic piece on the fourth fluidic plate is applied with (x-x1)U voltage excitation; If x1 is in (2E, 3E], a piezoelectric ceramic piece on the second fluidic plate is applied with U voltage excitation, a piezoelectric ceramic piece on the third fluidic plate is applied with U voltage excitation, and a piezoelectric ceramic piece on the fourth fluidic plate is applied with (x-x1)U voltage excitation.

7. The piezoelectric ceramic sheet regulated fluidic drive method according to claim 6, wherein If m1=0, a piezoelectric ceramic piece on the first fluidic plate, a piezoelectric ceramic piece on the second fluidic plate, and a piezoelectric ceramic piece on the third fluidic plate are applied with U voltage excitation, and a piezoelectric ceramic piece on the fourth fluidic plate is applied with (x-x1)U voltage excitation; If m1=2E, a piezoelectric ceramic piece on the first fluidic plate and a piezoelectric ceramic piece on the second fluidic plate are applied with U voltage excitation, and a piezoelectric ceramic piece on the fourth fluidic plate is applied with (x-x1)U voltage excitation; If m1=E, a piezoelectric ceramic piece on the first fluidic plate and a piezoelectric ceramic piece on the third fluidic plate are applied with U voltage excitation, and a piezoelectric ceramic piece on the fourth fluidic plate is applied with (x-x1)U voltage excitation.

Citation Information

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