Adjusting assembly for photoelectric sensor and photoelectric sensor

Abstract

The invention discloses an adjusting assembly for a photoelectric sensor and the photoelectric sensor. The adjusting assembly comprises a composite transverse adjusting mechanism, a three-dimensional pitching adjusting mechanism, an intelligent locking system and a closed-loop control system. The system further comprises a split type sensing module, an optical path coupling system and a signal processing unit. By introducing piezoelectric ceramic precision driving, magnetorheological intelligent materials, multi-sensor fusion and other technologies, breakthrough improvement is achieved in the aspects of adjustment precision, dynamic response and environmental adaptability, and the sensor is particularly suitable for semiconductor detection, precision optical measurement and other high-end industrial scenes.

Description

Technical Field

[0001] The present invention relates to the technical field of photoelectric sensors, and in particular to an adjustment component for a photoelectric sensor and a photoelectric sensor. Background Art

[0002] In recent years, photoelectric sensors have been widely used in industrial detection, image recognition, spectral analysis and other fields. However, existing photoelectric sensors have certain problems in light beam collimation, polarization splitting, focus adjustment, etc., such as complex optical path structure, insufficient adjustment accuracy, limited thermal management capabilities, etc., which make it difficult for the sensitivity and stability of the sensor to meet the needs of high-end applications. In the prior art, traditional optical path adjustment methods usually rely on mechanical motion mechanisms, which have the disadvantages of complex structure, limited adjustment range, and susceptibility to environmental interference. For example, the lateral adjustment mechanism uses a precision screw, which has high accuracy, but the adjustment speed may be slow, or manual operation is required. The elastic reset unit may rely on a mechanical spring, and the elasticity may weaken after long-term use, affecting the reset accuracy. The micro-stepping motor step of the pitch angle adjustment mechanism is 0.1 degrees, which may be good, but there may be a gap in the transmission mechanism, affecting the accuracy of the angle adjustment. The electromagnetic lock of the quick locking device may not remain locked when the power is off, or the locking force is not enough, resulting in stability problems. Summary of the invention

[0003] 1. Technical issues to be resolved

[0004] In response to the shortcomings of the existing technology, the present invention has achieved breakthrough improvements in adjustment accuracy, dynamic response and environmental adaptability by introducing technologies such as piezoelectric ceramic precision drive, magnetorheological intelligent materials, and multi-sensor fusion. It is particularly suitable for high-end industrial scenarios such as semiconductor detection and precision optical measurement.

[0005] (II) Technical solution

[0006] To achieve the above object, the present invention provides the following technical solution: an adjustment assembly for a photoelectric sensor, comprising the following components:

[0007] a) Composite lateral adjustment mechanism: responsible for lateral movement adjustment, composed of a double-track linear slide, a harmonic reduction motor group and a laser displacement sensor. The double-track linear slide is connected to the launch module through a diamond cross rail. The diamond cross rails are arranged at a 45° angle, with a rail spacing of 38mm, and are matched with linear ball bearings. The harmonic reduction motor group has a built-in 32-bit encoder and an integrated temperature compensation chip. The laser displacement sensor is installed at the end of the double-track linear slide, with a measurement accuracy of ±0.5μm;

[0008] b) Three-dimensional pitch adjustment mechanism: Responsible for three-dimensional space adjustment, including a hemispherical universal slide rail, a piezoelectric ceramic drive array, and a six-axis gyroscope. The surface of the hemispherical universal slide rail is coated with a diamond-like carbon film layer (DLC). The piezoelectric ceramic drive array consists of 36 independent drive units distributed in a honeycomb pattern. The six-axis gyroscope is integrated at the center of gravity of the receiving module, with a sampling frequency of 1 kHz;

[0009] c) Intelligent locking system: Adopts a magnetorheological elastomer locking unit and a shape memory alloy positioning pin to work together, equipped with a capacitive contact pressure sensor;

[0010] d) Closed-loop control system: Integrates an FPGA processing chip, receives feedback signals from a laser displacement sensor, a six-axis gyroscope, and a capacitive contact pressure sensor in real time, and dynamically adjusts the connection of each actuator to parts such as the crossbeam and slide rail through an improved PID algorithm; A spring is embedded inside the electromagnetic lock to provide an immediate reset force.

[0011] As a preferred solution, the harmonic reduction motor set adopts a dual-motor differential drive structure. The main motor (200W) is responsible for coarse adjustment, and the auxiliary motor (50W) performs fine adjustment. The two motors are coupled and output through a planetary gear set.

[0012] As a preferred solution, the piezoelectric ceramic drive unit adopts a stacked structure. The maximum output displacement of a single drive unit is 120μm, the resolution reaches 5nm, and the drive voltage is adjustable from 0 to 150V.

[0013] As a preferred solution, the magnetorheological elastomer locking unit includes an annular excitation coil and a nano-Fe3O4 doped silicone rubber layer.

[0014] As a preferred solution, the controller equation of the improved PID algorithm is:

[0015]

[0016] where, K p ,K i ,K d The parameters are dynamically optimized through fuzzy logic.

[0017] An optoelectronic sensor includes an adjustment component for the optoelectronic sensor, which consists of a split sensing module, an optical path coupling system, and a signal processing unit, where:

[0018] The split sensor module includes a transmitting module: an integrated high-stability laser light source (850nm VCSEL array), a collimating lens group (aspherical lens, NA=0.25), and a heat sink heat dissipation structure (microchannel copper substrate). The receiving module includes an avalanche photodiode (APD) array (16×16 pixels), an adaptive variable aperture (piezoelectric ceramic drive), and a second harmonic filter (bandpass range ±5nm).

[0019] The optical coupling system includes a spatial light modulator: a phase modulation panel based on LCoS (1920×1080 pixels, refresh rate 120Hz); a polarization beam splitter: a birefringent crystal prism (YVO4 material, extinction ratio>30dB); a focus adaptive module: a liquid lens (dielectric wetting principle, curvature adjustment range ±15D);

[0020] The signal processing unit includes a preamplifier: a low-temperature drift transimpedance amplifier (gain 100dBΩ, bandwidth 10MHz); a digital processing board: an integrated TIA conversion chip (24-bit Σ-Δ ADC, sampling rate 1MSPS); a spectrum analysis module: an adjustable Fabry-Perot interferometer (FSR=50GHz, finesse 200).

[0021] As a preferred solution, the transmitting module is connected to the double-track linear slide via a four-point elastic coupling, and the receiving module is connected to the hemispherical universal slide rail using a ball joint.

[0022] As a preferred solution, the lateral displacement of the transmitting module is driven by a harmonic reduction motor and fed back to the FPGA in real time through a laser displacement sensor. Dynamic focusing is achieved by combining the curvature change of the liquid lens (Δf=0.15D / mm). The pitch angle of the receiving module is fine-tuned by a piezoelectric ceramic array, and a six-axis gyroscope monitors attitude deviation. A honeycomb drive unit distribution achieves a resolution of 0.001° within a range of ±15°.

[0023] (III) Beneficial effects

[0024] Compared with the prior art, the present invention provides an adjustment component for a photoelectric sensor and a photoelectric sensor, which realizes efficient, stable and flexible adjustment and control of the photoelectric sensor through innovative structural design, intelligent control algorithm and integration of high-precision sensors. The following are the detailed beneficial effects of the present invention:

[0025] 1. Based on the composite lateral adjustment mechanism, the double-track linear slide of the present invention cooperates with the diamond cross rail to provide high-stability bidirectional adjustment, and the micro-arc oxidation treatment enhances the surface hardness and wear resistance. The harmonic reduction motor unit has a built-in 32-bit encoder and a temperature compensation chip to ensure precise position control in a temperature-changing environment (accuracy can reach ±0.5μm), effectively reducing the error caused by thermal expansion;

[0026] 2. Based on the three-dimensional pitch adjustment mechanism, the hemispherical universal slide rail of the present invention (with a diamond-like carbon film layer coated on the surface) works in coordination with the piezoelectric ceramic drive array (36 independent drive units, distributed in a honeycomb pattern) to provide a wide range of three-dimensional spatial adjustment capabilities. The piezoelectric ceramic drive unit adopts a stacked structure with a maximum displacement of 120μm and a resolution of up to 5nm, which meets the needs of minute position adjustments.

[0027] 3. The improved PID control algorithm based on FPGA processing chip receives the feedback signals from laser displacement sensor, six-axis gyroscope and contact pressure sensor in real time, and dynamically adjusts the output of each actuator. The high parallel processing capability of FPGA ensures the real-time and fast response of the control system. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a partial structural diagram of the photoelectric sensor and adjustment component of the present invention. DETAILED DESCRIPTION

[0029] In order to better understand the purpose, structure and function of the present invention, an adjustment component for a photoelectric sensor and a photoelectric sensor of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0030] Example 1

[0031] refer to Figure 1 The present invention provides an adjustment assembly for a photoelectric sensor, comprising the following components:

[0032] a) Composite lateral adjustment mechanism: responsible for lateral movement adjustment, composed of a double-track linear slide, a harmonic reduction motor group and a laser displacement sensor. The double-track linear slide is connected to the launch module through a diamond cross rail. The diamond cross rails are arranged at a 45° angle, with a rail spacing of 38mm, and are matched with linear ball bearings. The harmonic reduction motor group has a built-in 32-bit encoder and an integrated temperature compensation chip. The laser displacement sensor is installed at the end of the double-track linear slide, with a measurement accuracy of ±0.5μm;

[0033] b) Three-dimensional pitch adjustment mechanism: responsible for three-dimensional space adjustment, including a hemispherical universal slide rail, a piezoelectric ceramic drive array and a six-axis gyroscope. The surface of the hemispherical universal slide rail is coated with a diamond-like carbon film (DLC). The piezoelectric ceramic drive array consists of 36 independent drive units distributed in a honeycomb shape. The six-axis gyroscope is integrated at the center of gravity of the receiving module, and the sampling frequency is 1kHz.

[0034] c) Intelligent locking system: It uses a magnetorheological elastomer locking unit and a shape memory alloy positioning pin to work together, and is equipped with a capacitive contact pressure sensor;

[0035] d) Closed-loop control system: Integrate an FPGA processing chip to receive feedback signals from a laser displacement sensor, a six-axis gyroscope, and a capacitive contact pressure sensor in real time. Dynamically adjust the connections between each actuator and parts such as the crossbeam and the slide rail through an improved PID algorithm. Springs are embedded inside the electromagnetic lock to provide timely reset force.

[0036] Its specific structure and positional relationship are shown in Table 1 below

[0037]

[0038] Table 1

[0039] Specifically, in this embodiment, the composite lateral adjustment mechanism:

[0040] The double-rail linear slide is machined from 7075 aviation aluminum by CNC and its surface is subjected to micro-arc oxidation treatment;

[0041] The diamond cross rails are arranged at a 45° angle, with a rail spacing of 38 mm, and are fitted with linear ball bearings;

[0042] The harmonic reduction motor set is connected to the ball screw (Ф8 mm, lead 2 mm) through a coupling; the laser displacement sensor is installed at the end of the slide, with a measurement accuracy of ±0.5 μm. Its specific structure and positional relationship are shown in Table 2 below

[0043]

[0044] Table 2

[0045] Three-dimensional pitch adjustment mechanism:

[0046] The hemispherical universal slide rail has a radius of 45 mm and a curvature tolerance of ≤0.01 mm;

[0047] The piezoelectric ceramic drive array has a unit spacing of 5 mm and is vacuum encapsulated with epoxy resin; the six-axis gyroscope is integrated at the center of gravity of the receiving module, with a sampling frequency of 1 kHz. Its specific structure and positional relationship are shown in Table 3 below

[0048]

[0049] Table 3

[0050] The magnetorheological elastomer locking ring of the intelligent locking system has an inner diameter of Φ50 mm and a thickness of 8 mm;

[0051] The shape memory alloy positioning pin is made of Ni-Ti-Cu alloy with a phase transition temperature of 45°C; the contact pressure sensor has a measurement range of 0 - 50 N and a linearity of ±0.3% FS. Its specific structure and positional relationship are shown in Table 4 below

[0052]

[0053]

[0054] Table IV

[0055] Furthermore, in this embodiment, the harmonic reduction motor set adopts a dual-motor differential drive structure. The main motor (200W) is responsible for coarse adjustment, and the auxiliary motor (50W) performs fine adjustment. The two motors are coupled and output through a planetary gear set. The magnetorheological elastomer locking unit includes an annular excitation coil and a nano-Fe3O4-doped silicone rubber layer. The vibration interference is monitored in real time by a six-axis gyroscope, and the piezoelectric ceramic array generates a reverse displacement for compensation. The driving parameters of the stepper motor are automatically corrected by a temperature compensation chip according to the coefficient of thermal expansion. The adjustment assembly has a multi-modal locking mechanism, which are respectively:

[0056] Normal working state: The magnetorheological elastomer provides flexible damping (shear modulus 0.5 MPa);

[0057] Fine-tuning locking state: Apply a 1.2T magnetic field to increase the shear modulus to 1.5 MPa;

[0058] Emergency locking state: The shape memory alloy pin pops out for mechanical hard locking.

[0059] The controller equation of the improved PID algorithm in this embodiment is:

[0060]

[0061] Among them, K p , K i , K d The parameters are dynamically optimized by fuzzy logic.

[0062] Embodiment 2

[0063] An optoelectronic sensor includes an adjustment assembly for the optoelectronic sensor, which is composed of a split sensing module, an optical path coupling system, and a signal processing unit, wherein:

[0064] The split sensing module includes a transmitting module: integrating a high-stability laser light source (850nm VCSEL array), a collimating lens group (aspherical lens, NA = 0.25), a heat sink heat dissipation structure (microchannel copper substrate) receiving module: including an avalanche photodiode (APD) array (16×16 pixels), an adaptive variable aperture (piezoelectric ceramic drive), a second harmonic filter (bandpass range ±5nm);

[0065] The optical path coupling system includes a spatial light modulator: an LCoS-based phase modulation panel (1920×1080 pixels, refresh rate 120 Hz); a polarization beam splitter: a birefringent crystal prism (made of YVO4 material, extinction ratio > 30 dB); a focus adaptive module: a liquid lens (dielectric wetting principle, curvature adjustment range ±15 D).

[0066] The signal processing unit includes a preamplifier: a low-temperature drift transimpedance amplifier (gain 100 dBΩ, bandwidth 10 MHz); a digital processing board: an integrated TIA conversion chip (24-bit Σ-Δ ADC, sampling rate 1 MSPS); a spectral analysis module: an adjustable Fabry-Perot interferometer (FSR = 50 GHz, finesse 200).

[0067] Specifically, the transmitting module is connected to the double-rail linear slide by a four-point elastic coupling, the receiving module is connected to the hemispherical universal slide rail by a ball joint, the lateral displacement of the transmitting module is driven by a harmonic reduction motor, and is fed back to the FPGA in real time through a laser displacement sensor. Combining with the curvature change of the liquid lens (Δf = 0.15 D / mm) to achieve dynamic focusing. The pitch angle of the receiving module is finely adjusted by a piezoelectric ceramic array, and the attitude deviation is monitored by a six-axis gyroscope. The resolution of 0.001° is achieved within the range of ±15° through the distribution of the honeycomb drive unit.

[0068] The operating mechanism of the present invention includes: from the harmonic motor to the ball screw to the double-rail slide, driving the receiving module through the locking system to achieve spatial pose adjustment on the pitching mechanism;

[0069] Lateral coarse adjustment (main motor) to pitching fine adjustment (piezoelectric drive) to locking and fixing (magnetostrictive elastomer) to environmental compensation (gyroscope + temperature chip).

[0070] Furthermore, the present invention has achieved a breakthrough improvement in terms of adjustment accuracy, dynamic response and environmental adaptability by introducing technologies such as piezoelectric ceramic precision drive, magnetorheological intelligent materials, and multi-sensor fusion, and is particularly suitable for high-end industrial scenarios such as semiconductor detection and precision optical measurement.

[0071] It can be understood that the present invention is described through some embodiments. Those skilled in the art know that without departing from the spirit and scope of the present invention, various changes or equivalent replacements can be made to these features and embodiments. In addition, under the teaching of the present invention, these features and embodiments can be modified to adapt to specific situations and materials without departing from the spirit and scope of the present invention. Therefore, the present invention is not limited by the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of this application belong to the scope protected by the present invention.

Claims

1. An adjustment component for a photoelectric sensor, the adjustment component being integrated inside a housing of the photoelectric sensor, characterized in that: Includes the following components: a) Composite lateral adjustment mechanism: responsible for lateral movement adjustment, composed of a double-track linear slide, a harmonic reduction motor group and a laser displacement sensor. The double-track linear slide is connected to the launch module through a diamond cross rail. The diamond cross rails are arranged at a 45° angle, with a rail spacing of 38mm, and are matched with linear ball bearings. The harmonic reduction motor group has a built-in 32-bit encoder and an integrated temperature compensation chip. The laser displacement sensor is installed at the end of the double-track linear slide, with a measurement accuracy of ±0.5μm; b) Three-dimensional pitch adjustment mechanism: responsible for three-dimensional space adjustment, including a hemispherical universal slide rail, a piezoelectric ceramic drive array and a six-axis gyroscope. The surface of the hemispherical universal slide rail is coated with a diamond-like carbon film (DLC). The piezoelectric ceramic drive array consists of 36 independent drive units distributed in a honeycomb shape. The six-axis gyroscope is integrated at the center of gravity of the receiving module, and the sampling frequency is 1kHz. c) Intelligent locking system: It uses a magnetorheological elastomer locking unit and a shape memory alloy positioning pin to work together, and is equipped with a capacitive contact pressure sensor; d) Closed-loop control system: integrated with FPGA processing chip, it receives feedback signals from laser displacement sensor, six-axis gyroscope and capacitive contact pressure sensor in real time, and dynamically adjusts the connection between each actuator and beam, slide rail and other parts through improved PID algorithm; the spring is embedded in the electromagnetic lock to provide timely reset force.

2. The adjustment assembly for a photoelectric sensor according to claim 1, characterized in that: The harmonic reduction motor group adopts a dual-motor differential drive structure, the main motor (200W) is responsible for coarse adjustment, the auxiliary motor (50W) is responsible for fine adjustment, and the two motors are coupled to the output through a planetary gear set.

3. The adjustment assembly for a photoelectric sensor according to claim 1, characterized in that: The piezoelectric ceramic drive unit adopts a stacked structure, a single drive unit has a maximum output displacement of 120 μm, a resolution of 5 nm, and an adjustable drive voltage of 0-150V.

4. The adjustment assembly for a photoelectric sensor and the photoelectric sensor according to claim 1, characterized in that: The magnetorheological elastomer locking unit comprises an annular excitation coil and a nano-Fe3O4 doped silicone rubber layer.

5. The adjustment assembly for a photoelectric sensor and the photoelectric sensor according to claim 1, characterized in that: The controller equation of the improved PID algorithm is: Among them, K p , K i , K d Parameters are dynamically optimized via fuzzy logic.

6. A photoelectric sensor, comprising an adjustment assembly for a photoelectric sensor according to any one of claims 1 to 5, characterized in that: It consists of a split sensor module, an optical coupling system and a signal processing unit, among which: The split sensor module includes a transmitting module: an integrated high-stability laser light source (850nm VCSEL array), a collimating lens group (aspherical lens, NA=0.25), and a heat sink heat dissipation structure (microchannel copper substrate). The receiving module includes an avalanche photodiode (APD) array (16×16 pixels), an adaptive variable aperture (piezoelectric ceramic drive), and a second harmonic filter (bandpass range ±5nm). The optical coupling system includes a spatial light modulator: a phase modulation panel based on LCoS (1920×1080 pixels, refresh rate 120Hz); a polarization beam splitter: a birefringent crystal prism (YVO4 material, extinction ratio>30dB); a focus adaptive module: a liquid lens (dielectric wetting principle, curvature adjustment range ±15D); The signal processing unit includes a preamplifier: a low-temperature drift transimpedance amplifier (gain 100dBΩ, bandwidth 10MHz); a digital processing board: an integrated TIA conversion chip (24-bit Σ-Δ ADC, sampling rate 1MSPS); a spectrum analysis module: an adjustable Fabry-Perot interferometer (FSR=50GHz, finesse 200).

7. A photoelectric sensor according to claim 6, characterized in that: The transmitting module is connected to the double-track linear slide via a four-point elastic coupling, and the receiving module is connected to the hemispherical universal slide rail via a ball joint.

8. A photoelectric sensor according to claim 7, characterized in that: The lateral displacement of the transmitting module is driven by a harmonic reduction motor and fed back to the FPGA in real time through a laser displacement sensor. Dynamic focusing is achieved in combination with the curvature change of the liquid lens (Δf=0.15D / mm). The pitch angle of the receiving module is fine-tuned by a piezoelectric ceramic array, and a six-axis gyroscope monitors attitude deviation. A honeycomb drive unit distribution achieves a resolution of 0.001° within a range of ±15°.

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