Nonlinear model predictive temperature control method for semiconductor temperature control type synthesis reactor

By establishing a dynamic heat transfer model and constructing a multi-constrained nonlinear predictive control problem, and using the projection gradient descent method to solve the optimal control input, the problem that traditional PID control algorithms cannot effectively control the nonlinear system of semiconductor temperature-controlled synthesis reactors is solved, and high-precision and real-time temperature control are achieved.

CN120178981AActive Publication Date: 2025-06-20CHINA JILIANG UNIV
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Patent Information

Application Number
CN202510665132.4
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-05-22
Publication Date
2025-06-20
Estimated Expiration
2045-05-22

AI Technical Summary

Technical Problem

Traditional PID control algorithms cannot effectively capture and compensate the nonlinear behavior of the system for the nonlinear system of semiconductor temperature-controlled synthesis reactors, resulting in unsatisfactory temperature control effect and lack of predictive ability of future system behavior.

Method used

By establishing a dynamic heat transfer model of the reactor, nonlinear predictive control problems with multiple constraints are constructed, and the projection gradient descent method is used to solve the optimal control input online to achieve accurate control and real-time adjustment of the reactor temperature.

Benefits of technology

This method achieves high precision and real-time control of reactor temperature, meets multiple constraints, is highly robust, and is suitable for high-demand chemical reaction safety testing and automated chemical process control.

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Abstract

The invention belongs to the technical field of fine chemical reaction safety testing and automatic chemistry, and particularly discloses a nonlinear model predictive temperature control method of a semiconductor temperature control type synthesis reactor. The method comprises the following steps: constructing a dynamic heat transfer model of the system based on the semiconductor temperature control type synthesis reactor; designing a nonlinear model prediction controller according to the heat transfer model of the synthesis reactor; constructing a multi-constraint objective function for nonlinear predictive control according to the characteristics of the controlled object; and solving an optimal control sequence for the nonlinear model prediction controller by adopting a projection gradient method. Compared with a traditional PID temperature control algorithm, the temperature of the reactor can be accurately predicted and controlled through the designed nonlinear model prediction temperature control algorithm, it is ensured that the chemical reaction is conducted at the optimal temperature, and the robustness and adaptability of a control system are improved.
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