Semiconductor packaging fixture calibration equipment

Abstract

The present invention relates to the technical field of calibration equipment, and proposes a semiconductor packaging jig calibration device, which can cooperate with a semiconductor packaging jig to form a calibration, and adopts the form of filling the positioning holes in the semiconductor packaging jig to simulate the semiconductor packaging jig to form an auxiliary positioning simulation for the packaged semiconductor product. On the one hand, it can realize the position test of the positioning holes on the semiconductor packaging jig, and on the other hand, it can also form a size detection of the positioning holes on the semiconductor packaging jig. The calibration detection data is richer and more practical. It includes a carrier plate and a packaging jig frame, and also includes a placement structure. The carrier plate is fixedly connected to a main frame, and a storage and supply system is provided in the main frame. Low-temperature wax oil is provided in the storage and supply system. The placement structure includes an installation frame, which is fixedly connected to the top of the main frame. A clamping component for positioning the packaging jig frame is provided in the installation frame, and a lifting ring is slidably connected in the installation frame.

Description

Technical Field

[0001] The present invention relates to the technical field of calibration equipment, and in particular to a semiconductor packaging fixture calibration device. Background Art

[0002] As we all know, semiconductor packaging jigs are tools used in the semiconductor packaging process, mainly as a tool to assist in position control. Because semiconductor packaging jigs themselves have certain errors, and these errors will change over time, it is necessary to calibrate the jigs regularly. Calibration plays a key role in ensuring the accuracy and performance of semiconductor packaging jigs and thus ensuring the quality of semiconductor products. To facilitate the calibration of jigs, we have proposed a semiconductor packaging jig calibration device.

[0003] After searching, the Chinese patent publication number CN215578455U and the Chinese patent publication number CN222562665U respectively disclose a chip mounting equipment pressure calibration fixture and a calibration fixture and semiconductor processing equipment, wherein the former is roughly described as including a lower base plate, a sensor protection seat and an upper base plate, wherein the lower base plate, the sensor protection seat and the upper base plate form a detachable connection structure, wherein the sensor protection seat is located between the lower base plate and the upper base plate, a pressure sensor is installed on the lower base plate, and the pressure sensor is located in the sensor protection seat, an opening matching the pressure sensor is opened in the middle of the upper base plate, the upper part of the pressure sensor extends into the opening and its upper surface is not higher than the upper edge of the opening, and when in use, the lower base plate, the sensor protection seat and the upper base plate are combined together to seal the pressure sensor Installed inside, it can effectively protect the sensor from external forces other than the pressure to be measured during pressure testing, improve test accuracy, and effectively calibrate the nozzle pressure when switching between different chips. The latter can be roughly described as including a first calibration component, the first calibration component including a carrier plate and a connecting portion located on the first side of the carrier plate, a notch portion and a first clamping portion are provided on the carrier plate, wherein the connecting portion is used to be detachably connected to the wafer carrier table, the notch portion corresponds to the position of the first groove on the wafer carrier table, and the second calibration component, the second calibration component includes a second clamping portion and a third clamping portion, the second clamping portion is used to be detachably clamped to the first clamping portion, and the third clamping portion is used to be detachably clamped to the robotic arm. When in use, the calibration jig and semiconductor processing equipment can realize the position calibration between the wafer carrier table and the robotic arm.

[0004] Although the above-mentioned existing technical solutions can assist in calibrating the position and movement of chips and semiconductors during the preparation process, the targets of the two calibrations are the position of the chip and the position between the wafer carrier and the robotic arm, respectively. There is no effective and clear calibration measure for the fixture used for positioning, so it is difficult to apply to the inspection of the fixture. The size of the fixture is the core that determines the packaging quality of semiconductor products. Summary of the Invention

[0005] In response to the shortcomings of the existing technology, the present invention provides a semiconductor packaging jig calibration device, which can cooperate with the semiconductor packaging jig to form a calibration, and simulate the semiconductor packaging jig to form an auxiliary positioning simulation for the packaged semiconductor product by filling the positioning holes in the semiconductor packaging jig. On the one hand, it can realize the position test of the positioning holes on the semiconductor packaging jig, and on the other hand, it can also form a size detection of the positioning holes on the semiconductor packaging jig, so that the calibration detection data is richer and more practical.

[0006] To achieve the above-mentioned object, the present invention provides the following technical solution: A semiconductor packaging jig calibration device includes a carrier plate and a packaging jig frame, and also includes a placement structure, wherein the carrier plate is fixedly connected to a main frame, a storage and supply system is provided in the main frame, and low-temperature wax oil is provided in the storage and supply system, the placement structure includes a mounting frame, the mounting frame is fixedly connected to the top of the main frame, a clamping assembly for positioning the packaging jig frame is provided in the mounting frame, a lifting ring is slidably connected in the mounting frame, and the lifting ring is used to support the packaging jig frame, the main frame is slidably connected to two lifting vertical frames, and the top ends of the two lifting vertical frames are slidably connected to a driving ring, each of the two lifting vertical frames is fixedly connected to two elastic springs, and the four elastic springs are fixedly connected to the driving ring, a driving system and a transmission system are respectively installed in the main frame and the mounting frame, the driving system is used to drive the operation of the storage and supply system, and the transmission system is used to drive the transmission between the driving ring and the clamping assembly, two optical detectors are installed below the lifting ring, and a linkage system matching the lifting ring is installed in the main frame.

[0007] Preferably, the clamping assembly includes two first clamping rotats and two second clamping rotats, the two first clamping rotats and the two second clamping rotats are rotatably connected to the mounting frame, two first drive screws and two second drive screws are slidably connected in the mounting frame, and spiral plates are fixedly connected in the two first clamping rotats and the two second clamping rotats, and the four spiral plates are matched with the two first drive screws and the two second drive screws respectively.

[0008] Preferably, the transmission system includes two synchronization plates, both of which are fixedly connected to guide sleeves, both of which are slidably connected to the mounting frame, both of which are fixedly connected to upright springs, both of which are fixedly connected to the top ends of the upright springs, both of which are fixedly connected to push columns, both of which are slidably connected to the two synchronization plates respectively, both of which are fixedly connected to two return springs, both of which are fixedly connected to the top ends of the mounting frame, and both of which are matched with the drive ring.

[0009] Preferably, the storage and supply system includes an elastic storage bag and a two-way temperature control tube, a mounting plate is fixedly connected to the elastic storage bag, the mounting plate is fixedly connected to the main frame by a plurality of assembly bolts, a plurality of normal heating rings are fixedly connected to the outside of the elastic storage bag, the two-way temperature control tube is installed in the mounting frame, a plurality of wax holes are provided in the mounting frame, the plurality of wax holes and the two-way temperature control tube are staggered, a sedimentation tank is provided on the main frame, a center hole is provided in the sedimentation tank, and the center hole matches the elastic storage bag.

[0010] Preferably, the driving system includes a bottom support plate and two transmission links, the top of the bottom support plate is fixedly connected to the bottom end of the elastic storage bag, the bottom support plate is slidably connected to the main frame, both ends of the bottom support plate are fixedly connected with transmission rods, the two transmission rods are respectively connected to the two transmission links, the two transmission links are both rotatably connected to the main frame, and the two transmission links are respectively connected to the two lifting vertical frames.

[0011] Preferably, the two lifting frames are rotatably connected with mounting tubes, the two optical detectors are respectively connected to the two mounting tubes, the two mounting tubes are externally threadedly connected with threaded rings, and the two threaded rings are fixedly connected to the lifting frames.

[0012] Preferably, the linkage system includes two driving bars and two transmission bars, the two driving bars are respectively fixedly connected in the two lifting vertical frames, the outsides of the two driving bars are slidably connected with guide outriggers, the two guide outriggers are fixedly connected to the main frame, the two guide outriggers are rotatably connected with linkage bars, the two linkage bars are respectively connected to the two driving bars, the two transmission bars are respectively connected to the two linkage bars, the two transmission bars are slidably connected with support lifting columns, the two support lifting columns are fixedly connected to the lifting ring, the two support lifting columns are fixedly connected with connecting springs, and the two connecting springs are respectively connected to the two driving bars.

[0013] Preferably, the spiral direction of the spiral plate in the first clamping turret and the spiral plates in the two second clamping turrets are opposite.

[0014] Preferably, the supporting lifting column is made of a transparent material, and an inner driving strip opening and an outer driving strip opening are opened in the linkage bar frame. Transmission columns are provided in the inner driving strip opening and the outer driving strip opening, and the two transmission columns are fixedly connected to the driving bar rod and the transmission bar rod respectively.

[0015] Preferably, the main frame and the supporting plate are fixedly connected by a plurality of connecting bolts, and fixed mounting ears are fixedly connected at the four corners of the supporting plate.

[0016] Compared with the prior art, the present invention provides a semiconductor packaging fixture calibration device with the following beneficial effects:

[0017] (1) In the present invention, by equipping the placement structure, the supporting packaging jig frame forms a corresponding bracket and positioning structure to facilitate the subsequent calibration and detection of the packaging jig frame.

[0018] (2) In the present invention, through the design of the storage and supply system, the packaging jig frame can be matched to form the extrusion injection of wax oil, and then the positioning holes on the packaging jig frame can be filled with wax oil for subsequent corresponding detection.

[0019] (3) In the present invention, by equipping an optical detector, the wax oil injected into the packaging jig frame can be detected accordingly, thereby achieving the purpose of detecting and calibrating the packaging jig frame. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of a partially cutaway three-dimensional structure of the present invention;

[0021] Figure 2 For the present invention Figure 1 Schematic diagram of the local enlarged structure at A in the middle;

[0022] Figure 3 For the present invention Figure 1 Schematic diagram of the local enlarged structure at B in the middle;

[0023] Figure 4 It is a schematic diagram of the three-dimensional structure of the transmission bar, the guide outrigger and the linkage bar frame of the present invention;

[0024] Figure 5 It is a schematic diagram of the exploded three-dimensional structure of the transmission bar, the guide outrigger and the linkage bar frame of the present invention;

[0025] Figure 6 It is a schematic diagram of the overall three-dimensional structure of the present invention;

[0026] Figure 7 This is a schematic diagram of the overall three-dimensional structure of the present invention after the packaging jig frame is placed;

[0027] Figure 8 It is a structural schematic diagram of the main frame of the present invention;

[0028] Figure 9 It is a schematic diagram of the three-dimensional structure of the mounting frame, the first clamping rotating frame and the second clamping rotating frame of the present invention;

[0029] Figure 10 A schematic diagram of the three-dimensional structure of the mounting frame, the spiral plate and the second clamping rotating frame of the present invention;

[0030] Figure 11 It is a schematic diagram of the three-dimensional structure of the present invention from another angle;

[0031] Figure 12 It is a schematic diagram of the overall three-dimensional structure of the present invention when viewed from above;

[0032] Figure 13 It is a schematic diagram of the three-dimensional structure of the lifting frame and the elastic spring of the present invention;

[0033] Figure 14 It is a schematic diagram of a three-dimensional structure of a cross-section of the mounting frame and the bidirectional temperature regulating tube according to the present invention;

[0034] Figure 15 It is a partially cutaway three-dimensional structural diagram of the synchronization plate, guide sleeve, and vertical spring of the present invention.

[0035] Figure: 1, carrier plate; 2, packaging fixture frame; 3, main frame; 4, mounting frame; 5, lifting ring; 6, lifting vertical frame; 7, driving ring; 8, elastic spring; 9, optical detector; 10, first clamping turret; 11, second clamping turret; 12, first driving screw; 13, second driving screw; 14, spiral plate; 15, synchronization plate; 16, guide sleeve; 17, vertical spring; 18, push column; 19, return spring; 20, elastic storage capsule; 2 1. Two-way temperature control tube; 22. Mounting plate; 23. Assembly bolts; 24. Normal heating ring; 25. Wax hole; 26. Sedimentation trough; 27. Center hole; 28. Bottom support plate; 29. Transmission frame; 30. Transmission rod; 31. Mounting cylinder; 32. Threaded ring; 33. Drive bar; 34. Transmission bar; 35. Guide extension frame; 36. Linkage bar; 37. Support lifting column; 38. Connecting bolts; 39. Fixed mounting ears; 40. Transmission column. DETAILED DESCRIPTION

[0036] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0037] For examples, see Figures 1-15, a semiconductor packaging jig calibration device includes a carrier plate 1 and a packaging jig frame 2, and also includes a placement structure, the carrier plate 1 is fixedly connected to a main frame 3, a storage and supply system is provided in the main frame 3, and low-temperature wax oil is provided in the storage and supply system, and the storage and supply system includes an elastic storage bag 20 and a two-way temperature regulating tube 21, a mounting plate 22 is fixedly connected to the elastic storage bag 20, and the mounting plate 22 is fixedly connected to the main frame 3 by a plurality of assembly bolts 23, a plurality of normal heating rings 24 are fixedly connected to the outside of the elastic storage bag 20, and the two-way temperature regulating tube 21 is installed in the mounting frame 4, and a plurality of wax holes 25 are provided in the mounting frame 4, and the plurality of wax holes 25 are staggered with the two-way temperature regulating tube 21, a sedimentation tank 26 is provided on the main frame 3, and a center hole 27 is provided in the sedimentation tank 26, and the center hole 27 matches the elastic storage bag 20, and through the design of the storage and supply system, the packaging jig frame 2 can be matched to form an extrusion injection of wax oil, and then the positioning holes on the packaging jig frame 2 are filled with wax oil for subsequent corresponding inspection The placement structure includes a mounting frame 4, which is fixedly connected to the top of the main frame 3. A clamping assembly for positioning the package jig frame 2 is provided in the mounting frame 4. The clamping assembly includes two first clamping turrets 10 and two second clamping turrets 11. The two first clamping turrets 10 and the two second clamping turrets 11 are both rotatably connected to the mounting frame 4. Two first drive screws 12 and two second drive screws 13 are slidably connected in the mounting frame 4. The two first clamping turrets 10 and the two second clamping turrets 11 are rotatably connected in the mounting frame 4. There are spiral plates 14 fixedly connected inside, and the four spiral plates 14 are matched with the two first drive screws 12 and the two second drive screws 13 respectively. The spiral directions of the spiral plates 14 in the first clamping turret 10 and the spiral plates 14 in the two second clamping turrets 11 are opposite. A lifting ring 5 is slidably connected in the mounting frame 4, and the lifting ring 5 is used to support the packaging jig frame 2. Through the equipment of the placement structure, the matching packaging jig frame 2 forms a corresponding bracket and positioning structure to facilitate the subsequent calibration and detection of the packaging jig frame 2.

[0038] It should be further explained that the main frame 3 is slidably connected to two lifting vertical frames 6, and the top ends of the two lifting vertical frames 6 are slidably connected to a driving ring 7. Two elastic springs 8 are fixedly connected to the two lifting vertical frames 6, and the four elastic springs 8 are fixedly connected to the driving ring 7. A driving system and a transmission system are respectively installed in the main frame 3 and the mounting frame 4. The driving system is used to drive the operation of the storage supply system. The driving system includes a bottom support plate 28 and two transmission frames 29. The top end of the bottom support plate 28 is fixedly connected to the bottom end of the elastic storage bag 20. The bottom support plate 28 is slidably connected to the main frame 3. Both ends of the bottom support plate 28 are fixedly connected with a transmission rod 30. The two transmission rods 30 are respectively connected to the two transmission frames 29. The two transmission frames 29 are rotatably connected to the main frame 3. The two transmission frames 29 are respectively connected to the two lifting vertical frames 6. The transmission system is used for transmission drive between the driving ring 7 and the clamping assembly. The transmission system includes two synchronization plates 15 and two synchronization plates 15. Both are fixedly connected with a guide sleeve 16, and the two guide sleeves 16 are slidably connected to the mounting frame 4. The two guide sleeves 16 are fixedly connected with an upright spring 17, and the top of the two upright springs 17 are fixedly connected with a push column 18. The two push columns 18 are respectively slidably connected to the two synchronous plates 15. The two synchronous plates 15 are fixedly connected with two return springs 19. The four return springs 19 are fixedly connected to the top of the mounting frame 4. The two push columns 18 match the drive ring 7. Two optical detectors 9 are installed below the lifting ring 5. The two lifting vertical frames 6 are rotatably connected with the mounting cylinders 31. The two optical detectors 9 are respectively connected to the two mounting cylinders 31. The outside of the two mounting cylinders 31 is threadedly connected with a threaded ring 32. The two threaded rings 32 are fixedly connected to the lifting vertical frames 6. By equipping the optical detector 9, the wax oil injected into the packaging jig frame 2 can be detected accordingly, thereby achieving the purpose of detecting and calibrating the packaging jig frame 2.

[0039] It should be further explained that a linkage system matching the lifting ring 5 is installed in the main frame 3, and the linkage system includes two driving bars 33 and two transmission bars 34. The two driving bars 33 are respectively fixedly connected to the two lifting vertical frames 6. The two driving bars 33 are slidably connected to the guide outriggers 35 outside. The two guide outriggers 35 are fixedly connected to the main frame 3. The two guide outriggers 35 are rotatably connected to the linkage bars 36. The two linkage bars 36 are respectively connected to the two driving bars 33, and the two transmission bars 34 are respectively connected to the two linkage bars 36. The two transmission bars 34 are slidably connected to the support bars 36. The supporting lifting columns 37 are both fixedly connected to the lifting ring 5. There are connecting springs fixedly connected to the two supporting lifting columns 37. The two connecting springs are respectively connected to the two transmission bars 34. The supporting lifting columns 37 are made of transparent material. The linkage bar frame 36 is provided with an inner driving bar opening and an outer driving bar opening. There are transmission columns 40 in the inner driving bar opening and the outer driving bar opening. The two transmission columns 40 are respectively fixedly connected to the driving bar 33 and the transmission bar 34. The main frame 3 and the bearing plate 1 are fixedly connected by multiple connecting bolts 38. The four corners of the bearing plate 1 are fixedly connected with fixed mounting ears 39.

[0040] The optical detector 9, normal heating ring 24, electric switching valve and control host in this embodiment are all conventional equipment purchased on the market and well known to those skilled in the art. In the present invention, we only use them and do not improve their structure and function. For those skilled in the art, their setting method, installation method and electrical connection method only need to be debugged and operated according to the requirements of the instruction manual, and will not be described in detail here.

[0041] In summary, the working principle of the semiconductor packaging jig calibration equipment is as follows: when in use, the semiconductor packaging jig calibration equipment is first installed at the desired location, the control power is turned on for the normal heating ring 24, the normal heating ring 24 uses a resistance wire for constant temperature normal heating, the two-way thermostat 21 is connected to the external cooling gas and heating gas, and an electric switching valve is installed on the two-way thermostat 21 to realize the operation control of the cooling and heating inside the two-way thermostat 21, and a control host is installed to match the optical detector 9, and the information collected by the optical detector 9 is formed by the control host. After analysis and storage, the packaging jig frame 2 to be tested is placed on the lifting ring 5, and then downward pressure is applied to the driving ring 7. The driving ring 7 is forced to fall, which will push the two lifting vertical frames 6 to fall synchronously through the elastic spring 8. The falling two lifting vertical frames 6 respectively drive the two transmission frames 29 to move. The two transmission frames 29 rotate relative to the main frame 3 to drive the two transmission rods 30 to move respectively. The movement of the two transmission rods 30 will drive the bottom support plate 28 to rise in the main frame 3. Due to the elastic effect of the elastic storage bag 20 and the gravity of the bottom support plate 28, the elastic spring 8 forms a space between the driving ring 7 and the lifting vertical frame 6. In the early stage of the transmission effect, it will be elastically compressed, that is, the driving ring 7 falls while the lifting frame 6 maintains its original height unchanged, until the force generated by the compression of the elastic spring 8 is sufficient to compress the elastic storage bag 20 and lift the bottom support plate 28. When the driving ring 7 is pressed down, it will drive the threaded ring 32 to fall synchronously. Under the action of the threaded connection between the threaded ring 32 and the mounting cylinder 31, the mounting cylinder 31 will be driven to rotate relative to the lifting frame 6, and then the detection area of the optical detector 9 is rotated and adjusted. When the threaded action between the threaded ring 32 and the mounting cylinder 31 moves relative to each other to the limit state, The accumulation of force of the elastic spring 8 is also completed. Thereafter, the driving ring 7 continues to be pushed down, which will form a downward push of the lifting vertical frame 6. The two lifting vertical frames 6 continue to fall, which will realize the upward lifting of the bottom support plate 28, and then realize the squeezing of the elastic storage bag 20. Since the normal heating ring 24 will make the wax oil in the elastic storage bag 20 in liquid state after being energized, the elastic storage bag 20 will cause the wax oil inside to be squeezed into the center hole 27 when it is squeezed. When the wax oil is filled in the center hole 27, it will flow into the sedimentation tank 26. When the wax oil in the sedimentation tank 26 is filled, it will enter the upper side of the mounting frame 4 through the wax hole 25.

[0042] Furthermore, as the height of the lifting vertical frame 6 drops, the driving bar 33 therein also drops. Therefore, under the transmission action of the driving bar 33, the linkage bar 36 and the transmission bar 34, the driving bar 33 drops and drives the linkage bar 36 to rotate relative to the linkage bar 36. The rotating and falling linkage bar 36 drives the transmission bar 34 to drop. In this process, the falling driving bar 33 realizes the falling of the transmission bar 34, and the rising transmission bar 34 drives the support lifting column 37 to decrease in height. Moreover, due to the variable speed transmission of the linkage bar 36, the falling speed of the support lifting column 37 is faster than the falling speed of the driving bar 33. Therefore, the lifting ring 5 can quickly drop into the installation frame 4. When the lifting ring 5 drops into the installation frame 4 After that, when the driving ring 7 is pushed down further, the connecting spring will be compressed to facilitate the further downward movement of the driving ring 7. The driving ring 7 pushed down further will contact the pushing column 18. The pushing column 18 will drive the synchronous plate 15 to fall, and the first driving screw 12 and the second driving screw 13 connected to the synchronous plate 15 will fall synchronously. Under the transmission action of the spiral plate 14 and the first driving screw 12 and the second driving screw 13 and the spiral plate 14, the corresponding first clamping rotary frame 10 and the second clamping rotary frame 11 will form relative rotation. The rotating first clamping rotary frame 10 and the second clamping rotary frame 11 will cooperate with the packaging jig frame 2 entering the installation frame 4 to form a clamping position, and then continue to press down to push the driving ring 7 to make the elastic storage bag 20 Further compression is formed. Due to the reasonable space setting of the center hole 27 and the sedimentation tank 26, when the packaging jig frame 2 forms a clamping position in the mounting frame 4 and continues to push down the drive ring 7, the wax oil in the elastic storage bag 20 will form an upwelling through the wax hole 25. The wax oil that upwells to the upper side of the mounting frame 4 will fill the packaging jig frame 2. When the wax oil forms a suitable filling relative to the packaging jig frame 2, the downward drive of the drive ring 7 is stopped, and the height of the drive ring 7 is maintained. Then, the external refrigerant gas is passed into the two-way temperature regulating tube 21 by controlling the electric switching valve, and the wax oil in the wax hole 25 and the wax oil that upwells to the upper side of the mounting frame 4 are controlled to form a cooling, so that this part of the wax oil is solidified, and then the downward pressure on the drive ring 7 is gradually reduced, so that the drive ring 7 resumes its upward movement. During this process, the positioning and clamping function of the packaging jig frame 2 will first fail and then rise and separate relative to the wax oil, and then the optical detector 9 will swing in the opposite direction to detect the corresponding size of the solidified wax oil. Since the solidified wax oil forms a reverse mold for the positioning holes on the packaging jig frame 2, the appearance of the structure formed by the solidified wax oil is inspected, that is, the size and shape of the packaging jig can be analyzed, and then the purpose of calibrating and inspecting the packaging jig is achieved. Finally, the packaging jig frame 2 is removed from the lifting ring 5, and the external heating gas is allowed to pass into the two-way temperature regulating tube 21 by controlling the electric switching valve to heat and melt the wax oil on the upper side of the mounting frame 4. The melted wax oil will flow back to the elastic storage bag 20 under the action of its own gravity for next use.

[0043] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A semiconductor packaging jig calibration device, comprising a carrier plate (1) and a packaging jig frame (2), characterized in that: The mounting structure further comprises a main frame (3) fixedly connected to the carrier plate (1), a storage supply system provided in the main frame (3), and low-temperature wax oil provided in the storage supply system. The mounting structure comprises a mounting frame (4), the mounting frame (4) being fixedly connected to the top of the main frame (3), a clamping assembly for positioning the packaging fixture frame (2) provided in the mounting frame (4), a lifting ring (5) being slidably connected in the mounting frame (4), the lifting ring (5) being used for supporting the packaging fixture frame (2), the main frame (3) being slidably connected to two lifting vertical frames (6), the two lifting vertical frames (6) being provided with a plurality of lifting vertical frames (6) and a plurality of ... The top of the vertical lowering frame (6) is slidably connected to a driving ring (7), and two elastic springs (8) are fixedly connected to the two vertical lifting frames (6). The four elastic springs (8) are fixedly connected to the driving ring (7). A driving system and a transmission system are respectively installed in the main frame (3) and the installation frame (4). The driving system is used for driving the operation of the storage supply system, and the transmission system is used for driving the transmission between the driving ring (7) and the clamping assembly. Two optical detectors (9) are installed below the lifting ring (5), and a linkage system matching the lifting ring (5) is installed in the main frame (3); The storage and supply system includes an elastic storage bag (20) and a two-way temperature regulating pipe (21), wherein a mounting plate (22) is fixedly connected to the elastic storage bag (20), and the mounting plate (22) is fixedly connected to the main frame (3) through a plurality of assembly bolts (23), and a plurality of normal heating rings (24) are fixedly connected to the outside of the elastic storage bag (20), and the two-way temperature regulating pipe (21) is installed in the installation frame (4), and a plurality of wax holes (25) are provided in the installation frame (4), and the plurality of wax holes (25) and the two-way temperature regulating pipe (21) are arranged in an alternating manner, and a sedimentation tank (26) is provided on the main frame (3), and a center hole (27) is provided in the sedimentation tank (26), and the center hole (27) matches the elastic storage bag (20). When the normal heating ring (24) is energized, the wax oil in the elastic storage bag (20) is in a liquid state. Therefore, when the elastic storage bag (20) is squeezed, the wax oil inside it will be squeezed into the center hole (27). When the wax oil is filled in the center hole (27), it will flow into the sedimentation tank (26). When the wax oil in the sedimentation tank (26) is filled, it will enter the upper side of the installation frame (4) through the wax hole (25). The driving system includes a bottom support plate (28) and two transmission frames (29). The top end of the bottom support plate (28) is fixedly connected to the bottom end of the elastic storage bag (20). The bottom support plate (28) is slidably connected to the main frame (3). Both ends of the bottom support plate (28) are fixedly connected with a transmission rod (30). The two transmission rods (30) are respectively connected to the two transmission frames (29). The two transmission frames (29) are both rotatably connected to the main frame (3). The two transmission frames (29) are respectively connected to the two lifting vertical frames (6).

2. The semiconductor packaging jig calibration device according to claim 1, characterized in that: The clamping assembly includes two first clamping rotats (10) and two second clamping rotats (11), the two first clamping rotats (10) and the two second clamping rotats (11) are rotatably connected to the mounting frame (4), two first drive screws (12) and two second drive screws (13) are slidably connected in the mounting frame (4), and spiral plates (14) are fixedly connected in the two first clamping rotats (10) and the two second clamping rotats (11), and the four spiral plates (14) are matched with the two first drive screws (12) and the two second drive screws (13), respectively.

3. The semiconductor packaging jig calibration device according to claim 2, characterized in that: The transmission system includes two synchronization plates (15), the two synchronization plates (15) are fixedly connected to guide sleeves (16), the two guide sleeves (16) are slidably connected to the installation frame (4), the two guide sleeves (16) are fixedly connected to vertical springs (17), the top ends of the two vertical springs (17) are fixedly connected to push columns (18), the two push columns (18) are slidably connected to the two synchronization plates (15), the two synchronization plates (15) are fixedly connected to two return springs (19), the four return springs (19) are fixedly connected to the top end of the installation frame (4), and the two push columns (18) match the drive ring (7).

4. The semiconductor packaging jig calibration device according to claim 3, characterized in that: The two lifting frames (6) are both rotatably connected with mounting cylinders (31), the two optical detectors (9) are respectively connected to the two mounting cylinders (31), the two mounting cylinders (31) are both externally threadedly connected with threaded rings (32), and the two threaded rings (32) are both fixedly connected to the lifting frames (6).

5. The semiconductor packaging jig calibration device according to claim 4, characterized in that: The linkage system comprises two driving bars (33) and two transmission bars (34), the two driving bars (33) are respectively fixedly connected in the two lifting vertical frames (6), the two driving bars (33) are slidably connected to the outside of the two driving bars (33), the two guiding outriggers (35) are both fixedly connected to the main frame (3), the two guiding outriggers (35) are rotatably connected to the inside of the two guiding outriggers (35), the two linkage bars (36) are respectively connected to the two driving bars (33), the two transmission bars (34) are respectively connected to the two linkage bars (36), the two transmission bars (34) are slidably connected to the support lifting column (37), the two support lifting columns (37) are both fixedly connected to the lifting ring (5), the two support lifting columns (37) are both fixedly connected to the inside of the two supporting lifting columns (37), and the two connecting springs are respectively connected to the two driving bars (34).

6. The semiconductor packaging jig calibration device according to claim 5, characterized in that: The spiral direction of the spiral plate (14) in the first clamping turret (10) and the spiral plates (14) in the two second clamping turrets (11) are opposite.

7. The semiconductor packaging jig calibration device according to claim 6, characterized in that: The supporting lifting column (37) is made of a transparent material. An inner driving strip opening and an outer driving strip opening are opened in the linkage bar frame (36). Transmission columns (40) are provided in the inner driving strip opening and the outer driving strip opening. The two transmission columns (40) are respectively fixedly connected to the driving bar (33) and the transmission bar (34).

8. The semiconductor packaging jig calibration device according to claim 7, characterized in that: The main frame (3) and the bearing plate (1) are fixedly connected via a plurality of connecting bolts (38), and fixed mounting ears (39) are fixedly connected at the four corners of the bearing plate (1).

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