Robot for carrying display substrate

Abstract

The present invention relates to a substrate carrying robot capable of stably carrying and carrying a display substrate. The robot of the present invention comprises: a base; the rack gears are respectively matched with the two side surfaces of the base; pinions which are respectively connected with the rack gears so as to adjust the inclination of the base; the fixed frame is matched on the base; one or more moving frames that move along a rail on the fixed frame; the first servo motor is matched with one side of the fixed frame and supplies power to the movable frame; a hand that moves along a track on the moving frame in the same direction as the moving frame; and a second servo motor that cooperates with one side of the moving frame and supplies power to the hand.

Description

Technical Field

[0001] The present invention relates to a robot for transporting a display substrate. More specifically, it relates to a robot for transporting a display substrate (A ROBOT FOR TRANSPORTING A DISPLAY SUBSTRATE) that can stably mount and transport the display substrate during the process of processing and manufacturing the display substrate. Background Art

[0002] In recent years, with the increase in high-definition display products and the consumption of portable terminals, research and commercialization related to lightweight thin-film flat display devices have been actively carried out in place of the existing display device, the cathode ray tube (CRT).

[0003] As a display means including a panel in televisions, computer monitors, mobile terminals, etc., the panel is mainly made of a glass substrate. The panel of the glass substrate is applicable to liquid crystal displays (LCDs), plasma display panels (PDPs), organic light-emitting diodes (OLEDs), etc.

[0004] An LCD is an element that utilizes the electro-optical effect. Liquid crystal, an intermediate substance of solid and liquid, is injected between two thin glass plates, and the arrangement of liquid crystal molecules is changed by the voltage difference between the electrodes on the upper and lower glass plates, thereby generating light and dark and displaying numbers or images. LCDs are classified into passive matrix and active matrix according to the driving method. The passive matrix includes twisted nematic (TN) and super-twisted nematic (STN), and the active matrix includes thin film transistor (TFT), etc.

[0005] A PDP refers to an electronic display device in which gases such as Ne+Ar, Ne+Xe are placed between glasses sealed by a front glass, a rear glass, and a partition therebetween, and voltage is applied to the electrodes of the anode and the cathode to emit neon light for use as display light. A PDP is a large panel, which not only has high display quality, but also has a fast response speed, high reliability, and a long service life. Therefore, its demand increased sharply in the past, but now its demand is decreasing.

[0006] OLED is also known as organic light-emitting diode or organic EL. It is a light-emitting element based on fluorescent organic compounds and is different from liquid crystals in that it can emit light on its own without a backlight, so it can be made into a thin panel. In addition, it can be driven at a low voltage, has a wide viewing angle, and a fast response speed. Therefore, unlike ordinary LCDs, even when viewed from the side, the picture quality will not change and there will be no afterimage left on the screen. On small screens, it has a favorable price competitiveness due to picture quality superior to that of LCDs and a simple manufacturing process. Moreover, it is attracting much attention as a next-generation display device.

[0007] Processing of the glass substrate used in these display devices involves processes such as deposition, photolithography, and etching. To perform each process, a circular central chamber and process chambers around it are used, and a robot moves inside the central chamber and the robot arm inserts or discharges the glass substrate into or from the process chamber. Existing robots / robot arms rotate in the central chamber to transfer the glass substrate from the process chamber where the process is completed to another process chamber. At this time, the glass substrate may shake or fall, etc., so the possibility of the glass substrate being damaged is high. In addition, existing robots / robot arms require sufficient space to rotate while carrying the glass substrate, so the size of the central chamber can only be large. Summary of the Invention

[0008] Problems to be Solved

[0009] The present invention has been developed in view of the above problems, and its object is to provide a robot for transporting a display substrate that can stably carry and transport the display substrate.

[0010] In addition, its object is to provide a robot for transporting a display substrate having a structure that can minimize the space of the chamber.

[0011] The technical problems to be solved by the present invention are not limited to the above-mentioned technical problems, and those of ordinary skill in the art will clearly understand other technical problems not mentioned from the following description.

[0012] Solutions to the Problems

[0013] A robot for transporting a display substrate according to the present invention, which aims to achieve the above object, includes: a base; rack gears that are respectively engaged with two sides of the base; pinions that are respectively connected to the rack gears to adjust the inclination of the base; a fixed frame that is engaged with the base; one or more moving frames that move along a track on the fixed frame; a first servo motor that is engaged with one side of the fixed frame and provides power to the moving frame; a hand that moves along a track on the moving frame in the same direction as the moving frame; and a second servo motor that is engaged with one side of the moving frame and provides power to the hand.

[0014] The above-mentioned rack gears rotate together with the base around the horizontal rotation axis of the base, and are formed as a curved surface around the rotation axis. The pinions are rotatably engaged with two sides of the base and are formed parallel to the rotation axis.

[0015] The robot for transporting a display substrate according to the present invention further includes: a first pulley that is engaged with the other side of the fixed frame; a first transmission belt that is connected to the first pulley and the first servo motor, and transmits the power of the first servo motor to the moving frame; a first engaging member that is engaged with the first transmission belt and the moving frame, and moves together with the moving frame along with the movement of the first transmission belt; a second pulley that is formed on the other side of the moving frame; a second transmission belt that is connected to the second pulley and the second servo motor, and transmits the power of the second servo motor to the hand; and a second engaging member that is engaged with the hand and the second transmission belt, and moves together with the hand along with the movement of the second transmission belt.

[0016] The robot for transporting a display substrate according to the present invention may further include: first and second vertical support frames in the vertical direction; first and second ball screws in the vertical direction, which are respectively engaged with the first and second support frames; first and second moving blocks, which are respectively connected to two sides of the base and move the base up and down along the first and second ball screws; first and second brakes, which are respectively engaged with the lower ends of the first and second ball screws and respectively slow down the rotation speeds of the first and second ball screws; a first bracket, one side of which is engaged with the first moving block and the other side of which is connected to the horizontal rotation axis of the base; a second bracket, one side of which is engaged with the second moving block and the other side of which is connected to the horizontal rotation axis of the base; and first and second foreign object collectors, which are respectively engaged with the lower sides of the first and second brakes and respectively collect foreign objects generated by the first and second brakes.

[0017] Advantages of the Invention

[0018] The robot for transporting a display substrate according to the present invention is configured to be able to transport the display substrate even without the rotation of the arm, so that the display substrate can be stably loaded and transported, and the size of the chamber can be minimized. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 The figure shows a robot for transporting a display substrate according to an embodiment of the present invention.

[0020] Figure 2 The figure shows Figure 1 the side view of the robot for transporting a display substrate.

[0021] Figure 3 The figure shows Figure 1 the front view of the robot for transporting a display substrate.

[0022] Figure 4 The figure shows in detail Figure 1 the lifting part 20.

[0023] Figure 5 The figure shows another example of the lifting part according to the present invention.

[0024] Figure 6 The figure shows in detail Figure 5 the lifting part 30.

[0025] Figure 7 and Figure 8 The figure shows in detail Figure 1 the base 51, the fixed frame 53 and the moving frame 55.

[0026] Figure 9 The figure shows in detail Figure 1 the moving frame 55 and the hand 57.

[0027] REFERENCE SIGNS

[0028] 10 - main frame, 20 - lifting part, 50 - arm, 51 - base, 53 - fixed frame, 55 - moving frame, 57 - hand. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0029] Hereinafter, embodiments disclosed in this specification will be described in detail with reference to the accompanying drawings. For identical or similar components, the same reference numerals are attached regardless of the reference signs in the drawings, and repeated descriptions thereof are omitted. The suffixes “module” and “section” of the components used in the following description are given or used in combination only for the simplicity of preparing the specification, and do not have distinct meanings or functions by themselves. In addition, in the process of describing the embodiments disclosed in this specification, detailed descriptions of related well-known technologies are omitted when it is determined that they may obscure the gist of the embodiments disclosed in this specification. In addition, the drawings are only used to facilitate the understanding of the embodiments disclosed in this specification, and the technical idea disclosed in this specification is not limited to the drawings, and should be understood to cover all modifications, equivalents or alternatives included in the spirit and technical scope of the present invention.

[0030] The robot for transporting a display substrate according to the present invention is used for processing and manufacturing a glass substrate for a display panel, but is not limited thereto, and can also be applied to processing and manufacturing substrates for other uses. The robot according to the present invention can cooperate with a gantry that provides a moving path, and is configured to move along the track of the gantry with a display substrate mounted thereon and insert the display substrate into or discharge it from the process chamber.

[0031] Figures 1 to 3 A robot for transporting a display substrate according to an embodiment of the present invention is shown, including a main frame 10, a lifting unit 20, and a robotic arm 50 in a state where respective covers (not shown) are removed.

[0032] As Figures 1 to 3 shown, a robot for transporting a display substrate according to an embodiment of the present invention includes a main frame 10, a lifting unit 20, and a robotic arm 50. Other components constituting the robot may be further included, but the description will be centered on the main components of the present invention.

[0033] The main frame 10 can be configured to function as a carriage that moves along the track of the gantry. For this purpose, the main frame 10 may further include a motor, a power transmission system, a speed reducer, etc.

[0034] The lifting unit 20 of the present invention includes first and second support frames 21a and 21b formed vertically on the main frame 10 at a certain interval from each other. The interval between the first and second support frames 21a and 21b can be more firmly maintained by fitting a horizontal bar 70 to the upper ends of the first and second support frames 21a and 21b.

[0035] The first ball screw 22a is vertically engaged with the back surface of the first pillar frame 21a by the ball screw support portions 23a and 23b. The first moving block 24a is connected to one side surface of the base 51 of the robotic arm 50 and moves in the vertical direction by the rotation of the first ball screw 22a.

[0036] As Figure 4 shown, the first transmission belt (Belt) 25a and the first pulley (Pulley) 26a are engaged with the first ball screw 22a below the ball screw support portion 23b. The first transmission belt 25a and the first pulley 26a transmit the rotational force provided by the first motor 29a to the first ball screw 22a.

[0037] The first brake 27a is respectively engaged with the upper end of the first ball screw 22a above the ball screw support portion 23a and is configured to slow down the rotation speed of the first ball screw 22a or stop the rotation of the first ball screw 22a. The first brake 27a can be composed of any one of an electromagnetic brake, a hydraulic disc brake, a band brake, and a clutch brake.

[0038] The second ball screw 22b is vertically engaged with the front surface of the second pillar frame 21b by the ball screw support portions 23c and 23d. The second moving block 24b is connected to the other side surface of the base 51 and moves in the vertical direction by the rotation of the second ball screw 22b.

[0039] The second transmission belt 25b and the second pulley 26b are engaged with the second ball screw 22b below the ball screw support portion 23d. The second transmission belt 25b and the second pulley 26b transmit the rotational force provided by the second motor 29b to the second ball screw 22b.

[0040] The first moving block 24a and the second moving block 24b move together, so that the base 51 moves in the vertical direction along the first ball screw 22a and the second ball screw 22b.

[0041] The first and second brackets 241a and 241b are used to connect the first and second moving blocks 24a and 24b and the base 51 to each other. One side of the first bracket 241a is engaged with the first moving block 24a, and the other side of the first bracket 241a is connected to the horizontal rotation axis located on one side surface of the base 51. One side of the second bracket 241b is engaged with the second moving block 24b, and the other side of the second bracket 241b is connected to the horizontal rotation axis located on the other side surface of the base 51. Therefore, the base 51 can move in the vertical direction by the first moving block 24a and the second moving block 24b and rotate with reference to the horizontal rotation axis while being supported by the first and second brackets 241a and 241b.

[0042] The second brake 27b is respectively engaged with the upper ends of the second ball screws 22b above the ball screw support portion 23c and is configured to slow down the rotation speed of the second ball screws 22b or stop the rotation of the second ball screws 22b. The second brake 27b can be constituted by any one of an electromagnetic brake, a hydraulic disc brake, a belt brake, and a clutch brake.

[0043] Figure 5 and Figure 6 FIG. is a view showing the elevating unit 30 according to another example of the present invention. As Figure 5 and Figure 6 shown, the other components of the elevating unit 30 except for the brake, the foreign matter collector, and the motor are the same as those of the elevating unit 20. Therefore, the detailed description of the components identical to those of the elevating unit 20, namely, the column frame 31a, the ball screw 32a, the ball screw support portions 33a and 33b, the moving block 34a, the transmission belt 35a, and the pulley 36a, is omitted. The brake 37a, the foreign matter collector 38a, and the motor 39a of the elevating unit 30 are respectively engaged with the two column frames, and Figure 5 and Figure 6 only one column frame 31a is shown.

[0044] Two brakes 37a are engaged with their respective column frames 31a, that is, they are engaged with the lower ends of the ball screws 32a below the pulleys 36a and are configured to slow down the rotation speed of the ball screws 32a or stop the rotation of the ball screws 32a. Similarly, the brake 37a can be constituted by any one of an electromagnetic brake, a hydraulic disc brake, a belt brake, and a clutch brake.

[0045] Two foreign matter collectors 38a are engaged with the lower sides of their respective brakes 37a and are configured to collect the foreign matter generated in the brakes 37a. Foreign matter is often generated in the brakes 37a, but since the brakes 37a are respectively formed at the lower parts of the column frames and the foreign matter collectors 38a are formed adjacent to the lower sides of the brakes 37a, it is difficult for the foreign matter to disperse or adhere to other structures. Therefore, the foreign matter contamination in the elevating unit 30 can be minimized.

[0046] Two motors 39a are formed on opposite sides of the pulley 36a with their respective column frames 31a interposed therebetween. Therefore, the transmission belt 35a passes through the column frame 31a to connect the motor 39a and the pulley 36a.

[0047] The robotic arm 50 of the present invention has a structure in which a base 51, a fixed frame 53, one or more moving frames 55, and a hand 57 are stacked. The entire robotic arm 50 can move in the vertical direction, and the moving frames 55 and the hand 57 can linearly move in the front-rear direction on the fixed frame 53. Although Figure 2Shows the case where the moving frame 55 and the hand 57 move forward, but the moving frame 55 and the hand 57 can also move backward by the same length.

[0048] As Figure 7 and Figure 8 Shown, the base 51 can move in the vertical direction and rotate with respect to the horizontal rotation axis by the first moving block 24a and the second moving block 24b while being supported by the first and second brackets 241a, 241b. In order to rotate with respect to the horizontal rotation axis, the rack gears 513 are respectively engaged with the two side surfaces of the base 51 and the pinions 511 are respectively connected to the rack gears 513.

[0049] The rack gears 513 are formed as curved surfaces around the rotation axis so as to be able to rotate together with the base 51 with the horizontal rotation axis of the base 51 as the center, and the pinions 511 are engaged with the two side surfaces of the base 51 in a rotatable manner and are formed parallel to the above rotation axis.

[0050] If the pinions 511 are rotated by the power provided by a motor (not shown) inside the base 51, the inclination of the base 51 is adjusted by the rotation of the rack gears 513. The change in the inclination of the base 51 changes the inclinations of the fixed frame 53, the moving frame 55, and the hand 57. In the case where the hand 57 sags or inclines due to the weight of the display panel or the like, the inclination of the base 51 can be adjusted using the pinions 511 to compensate for these situations.

[0051] The fixed frame 53 is fitted on the base 51 and is fixed so as not to move on the base 51. A first servo motor 531 is fitted on one side surface outside the rear end of the fixed frame 53, and the first servo motor 531 supplies power to the moving frame 55. In order to supply power to the moving frame 55, a first pulley 533 is fitted inside the front end of the fixed frame 53, and a first transmission belt 532 is connected to the power transmission portion of the first pulley 533 and the first servo motor 531. The first transmission belt 532 is located inside the fixed frame 53 and transmits the power of the first servo motor 531 to the moving frame 55. A first fitting member 534 is fitted to the first transmission belt 532 and the moving frame 55, and is configured to move together with the moving frame 55 as the first transmission belt 532 moves. The first fitting member 534 is fitted to one side surface outside the rear end of the moving frame 55 and the top of the first transmission belt 532.

[0052] The moving frame 55 moves along the track 535 on the fixed frame 53 and is configured to be linearly foldable and expandable in two directions, forward and backward. In addition, the moving frame 55 is configured to have a longer length than the fixed frame 53 for the purpose of extending the moving range of the moving frame 55.

[0053] Although a moving frame 55 is shown in the drawings, it may also be configured in a form where two or more moving frames 55 are stacked. In this case, tracks 555 are formed on each moving frame 55, and the upper moving frame 55 is configured to move along the tracks 555 of its lower moving frame 55.

[0054] As Figure 9 shown, a second servo motor 551 is fitted inside the front end of the moving frame 55, and the second servo motor 551 provides power to the hand 57. In order to provide power to the hand 57, a second pulley 553 is fitted inside the rear end of the moving frame 55, and a second transmission belt 552 is connected to the power transmission part of the second pulley 553 and the second servo motor 551. The second transmission belt 552 is located inside the moving frame 55 and transmits the power of the second servo motor 551 to the hand 57. A second fitting member 554 is fitted to the hand 57 and the second transmission belt 552 and is configured to move together with the hand 57 as the second transmission belt 552 moves. The second fitting member 554 is fitted to the middle area of the hand 57 and the top of the second transmission belt 552.

[0055] The hand 57 is used to support and carry the display substrate and is configured to move in the same direction as the moving frame 55 along the tracks 555 on the moving frame 55.

[0056] As described above, although the present invention has been illustrated and described in connection with preferred embodiments for exemplifying the principles of the present invention, the present invention is not limited to the original configurations and operations thus illustrated and described. Instead, those skilled in the art will clearly understand that various changes and modifications can be made to the present invention without departing from the spirit and scope of the appended claims.

Claims

1. A robot for transporting display substrates, characterized in that: include: Pedestal; A rack gear, which is respectively matched with two side surfaces of the base; Pinions, which are respectively connected to the rack gears to adjust the inclination of the base; A fixed frame, which is fitted on the base; One or more mobile frames, which move along the tracks on the fixed frame; a first servo motor, which cooperates with one side of the fixed frame and provides power to the movable frame; a hand that moves along a track on the moving frame in the same direction as the moving frame; and A second servo motor cooperates with one side of the moving frame and provides power to the hand.

2. The display substrate transport robot according to claim 1, characterized in that: The rack gear rotates together with the base around the horizontal rotation axis of the base, and is formed as a curved surface around the outer periphery of the rotation axis.

3. The display substrate transport robot according to claim 2, characterized in that: The pinion gear is rotatably engaged with two side surfaces of the base and is formed parallel to the rotation axis.

4. The display substrate transport robot according to claim 1, characterized in that: Further including: A first pulley, which cooperates with the other side of the fixed frame; and The first transmission belt is connected to the first pulley and the first servo motor and transmits the power of the first servo motor to the moving frame.

5. The display substrate transport robot according to claim 4, characterized in that: It further comprises a first matching component, which matches with the first transmission belt and the moving frame and moves together with the moving frame along with the movement of the first transmission belt.

6. The display substrate transport robot according to claim 1, characterized in that: Further including: a second pulley formed on the other side of the moving frame; The second transmission belt is connected to the second pulley and the second servo motor, and transmits the power of the second servo motor to the hand.

7. The display substrate transport robot according to claim 6, characterized in that: It further comprises a second matching component, which matches with the hand and the second transmission belt and moves together with the hand as the second transmission belt moves.

8. The display substrate transport robot according to claim 1, characterized in that: Further including: The first and second pillar frames in the vertical direction; The first and second ball screws in the vertical direction are respectively matched with the first and second support frames; A first moving block and a second moving block are respectively connected to two side surfaces of the base and enable the base to move in an up-down direction along the first and second ball screws; and The first and second brakes are respectively matched with the lower ends of the first and second ball screws and respectively slow down the rotation speed of the first and second ball screws.

9. The display substrate transport robot according to claim 8, characterized in that: Further including: A first bracket, one side of which cooperates with the first moving block and the other side of which is connected to the horizontal rotation axis of the base; and The second bracket has one side matched with the second moving block and the other side connected with the horizontal rotation axis of the base.

10. The display substrate transporting robot according to claim 8, characterized in that: It further includes a first foreign matter collector and a second foreign matter collector, which are respectively matched with the lower parts of the first and second brakes and respectively collect foreign matter generated by the first and second brakes.

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