Gas flow control device

Abstract

The invention provides a gas flow control device which comprises a base, a gas inlet, a gas outlet, a gas flow sensor, a gas flow sensor, a gas flow sensor, a gas flow sensor, a gas flow sensor and a gas flow sensor, wherein the two sides of the base are provided with a gas inlet and a gas outlet; the integrated valve seat is arranged in the containing groove and is provided with an air flow channel communicated with the air inlet and the air outlet, and a sealing part is formed in the air flow channel; one end face of the supporting piece abuts against the bottom face of the containing groove. The first elastic piece is fixedly arranged between the other end face of the supporting piece and the sealing part; the valve element comprises a first contact part and a fixing part, the top face of the contact part abuts against the sealing part, and the fixing part penetrates through the first through hole; the transmission part penetrates through the sealing part and is connected with the top surface of the first contact part, and the outer diameter of the transmission part is smaller than that of the airflow channel at the sealing part; and the diaphragm is arranged above the transmission part and the base, is connected with the transmission part and seals the accommodating groove. By the adoption of the technical scheme, compared with a split type valve seat, potential leakage points are reduced, and the overall reliability and performance are improved.

Description

Technical Field

[0001] This application belongs to the technical field of gas control, and particularly relates to a gas flow control device. Background Art

[0002] Gas flow meters are important measuring instruments in industrial production. The airtightness of the valve core, which is the core component, directly affects the measurement accuracy and service life of the flow meter. Currently, the valve seat structure of gas flow meters usually achieves airtightness by pressing two components, an upper one and a lower one, together.

[0003] However, during the installation of the upper and lower components of the valve core, if there are installation errors or the surfaces of the components are scratched during installation, the installed valve seat structure will result in poor airtightness, affecting the normal use of the flow meter.

[0004] In addition, during long-term use of the gas flow meter, due to factors such as gas pressure, temperature changes, and mechanical vibrations, the upper and lower components of the valve seat are prone to problems such as loosening or deformation, resulting in a decrease in airtightness and further affecting the measurement accuracy of the flow meter.

[0005] To solve the above problems, the present invention proposes an improved gas flow control device, aiming to improve the airtightness, reliability, and service life of the fluid control valve. Summary of the Invention

[0006] Aiming at the above problems of the prior art, the purpose of this article is to provide a gas flow control device to solve the problem of poor airtightness of the fluid control valve in the prior art.

[0007] To solve the above technical problems, the specific technical solution of this article is as follows: A gas flow control device includes: A base, with an air inlet and an air outlet formed on both sides respectively, and an open receiving groove formed on the top. The air inlet and the air outlet are communicated through the receiving groove; An integrated valve seat, arranged in the receiving groove. The integrated valve seat forms an air flow channel communicating with the air inlet and the air outlet, and a sealing portion is formed in the air flow channel; A support member, arranged in the air flow channel, and one end face of the support member abuts against the bottom surface of the receiving groove; A first elastic member, fixedly arranged between the other end face of the support member and the sealing portion. The first elastic member forms a first through hole for the valve core to pass through; The valve core, including: a first contact portion and a fixing portion. The top surface of the first contact portion abuts against the sealing portion, and the fixing portion passes through the first through hole; A transmission member, passing through the sealing portion and connected to the top surface of the contact portion. The outer diameter of the transmission member is smaller than the outer diameter of the air flow channel at the sealing portion; A diaphragm is provided above the transmission member and the base, connected to the transmission member, and sealing the accommodation groove.

[0008] Furthermore, it further includes: a first seal, the seal is arranged between the integral valve seat and the accommodation groove, and the first seal is arranged on the outer periphery of the support member.

[0009] Furthermore, a limiting groove matching the support member is formed on the bottom surface of the accommodation groove.

[0010] Furthermore, it further includes: a second elastic member; The second elastic member is arranged between the transmission member and the integral valve seat.

[0011] Furthermore, a first counterbore for the second elastic member to abut against is formed on the top surface of the integral valve seat.

[0012] Furthermore, the air flow channel includes: an axial first flow channel, a second flow channel formed by the top surface of the integral valve seat and the diaphragm, and a third flow channel perpendicular to the second flow channel; The air inlet is sequentially communicated with the first flow channel, the second flow channel, the third flow channel and the air outlet.

[0013] Furthermore, the end surface of the transmission member away from the valve core is spherical.

[0014] Furthermore, an inverted conical ventilation hole is formed at one end of the sealing portion close to the transmission member.

[0015] Furthermore, it further includes: a driving member, the driving member is arranged above the diaphragm and is used to provide a downward driving force for the diaphragm.

[0016] Furthermore, the end of the sealing portion in contact with the valve core is arc-shaped.

[0017] This technical solution adopts an integral valve seat structure to replace the traditional multi-part splicing design. Through the integral molding process, the structural integrity and sealing performance are enhanced, the leakage hidden danger formed by the traditional assembly interface is completely eliminated, and the airtight reliability and long-term stability of the gas flow control device are significantly improved. At the same time, the split structure of the diaphragm and the transmission member endows the system with dynamic adaptive ability. That is, when there is a radial offset in the force applied by the driving mechanism, the diaphragm assembly can form dynamic compensation with the transmission member through flexible deformation, automatically correct the force application direction, and ensure that the driving force is strictly transmitted along the axis of the valve core. This force transmission mechanism effectively avoids the eccentric load wear problem easily generated by the traditional rigid transmission structure, makes the positioning accuracy of the valve core opening and closing stroke more accurate, and provides a reliable guarantee for the high-precision adjustment of the gas flow.

[0018] To make the above and other objects, features, and advantages of this article more apparent and understandable, the following provides preferred embodiments in conjunction with the accompanying drawings and describes them in detail as follows. Brief Description of the Drawings

[0019] To more clearly illustrate the technical solutions in the embodiments of this article or in the prior art, the following will briefly introduce the accompanying drawings required for use in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only some embodiments of this article. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0020] Figure 1 Shows a schematic cross-sectional structure diagram of a gas flow control device according to an embodiment of this article; Figure 2 Shows a schematic cross-sectional structure diagram of a gas flow control device in a closed state according to an embodiment of this article; Figure 3 Shows a schematic structure diagram of an integrated valve seat according to an embodiment of this article; Figure 4 Shows a schematic cross-sectional structure diagram of an integrated valve seat according to an embodiment of this article; Figure 5 Shows a schematic cross-sectional connection diagram of a diaphragm and a transmission member according to an embodiment of this article; Figure 6 Shows a schematic structure diagram of a diaphragm according to an embodiment of this article; Figure 7 Shows a schematic diagram of the force direction of the actuating part in a scenario where the driving force and the actuating part are not coaxial according to an embodiment of this article; Figure 8 Shows a schematic cross-sectional structure diagram of a gas flow control device in an open state according to an embodiment of this article; Figure 9 Shows a schematic structure diagram of a support member according to an embodiment of this article; 1 - Integrated valve seat, 11 - Limiting part, 12 - Sealing part, 13 - First sink, 14 - Second sink, 15 - Vent hole, 16 - Second contact part, 17 - First flow channel, 18 - Third flow channel, 19 - Fourth flow channel; 2 - Valve core, 21 - First contact part, 22 - Fixing part; 3 - First elastic member; 4 - Support member; 5 - Transmission member; 6 - Diaphragm, 61 - Deformation part, 62 - Force-receiving part; 7 - Driving member; 8 - Second elastic member; 9 - Base, 91 - Air inlet, 92 - Air outlet; 101 - First seal, 102 - Second seal; Detailed implementation

[0021] The following will clearly and completely describe the technical solutions in the embodiments of this article with reference to the accompanying drawings in the embodiments of this article. Obviously, the described embodiments are only a part of the embodiments of this article, rather than all of the embodiments. Based on the embodiments in this article, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the scope of protection of this article.

[0022] It should be noted that the terms "first", "second", etc. in the specification and claims of this article and the above - mentioned drawings are used to distinguish similar objects, and do not necessarily need to describe a specific order or sequence. It should be understood that such used data can be interchanged under appropriate circumstances so that the embodiments of this article described here can be implemented in an order other than those illustrated or described here. In addition, the terms "including" and "having" and any variations thereof are intended to cover non - exclusive inclusion. For example, a process, method, device, product, or equipment that includes a series of steps or units does not necessarily have to be limited to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, methods, products, or equipment.

[0023] In the prior art, as in the patent CN115479128A, in the fluid control valve it provides, a spring guiding member, a valve body return spring, a valve body, a valve seat member, an actuating portion, and a brake are respectively arranged from bottom to top in the inner cavity of the base. When the fluid control valve is opened (that is, when the valve body and the valve seat member are in a separated state and the air flow channel is opened), the gas flows through the upstream - side flow channel, the first internal flow channel, the third internal flow channel, the second internal flow channel, and the downstream - side flow channel in sequence; Since the spring guiding member and the valve seat member are separate (that is, the two are only sealed by contact), and the outer diameters of both the spring guiding member and the valve seat member are in contact with the second internal flow channel. When the fluid control valve is not opened (that is, when the valve body and the valve seat member are in sealed contact and the air flow channel is closed), the air pressure in the upstream - side flow channel will be greater than the air pressure in the downstream - side flow channel, and there is a risk that the gas in the upstream - side flow channel flows to the downstream - side flow channel through the gap between the spring guiding member and the valve seat member.

[0024] In addition, in the above - mentioned solution, the sealing ring between the base and the spring guiding member is in direct contact with the flowing gas. If the gas is a corrosive gas, there will be a risk that the sealing ring in direct contact with the gas will be corroded.

[0025] In addition, in the above solution, the moving part, as a component for driving force transmission, adopts an integral structure. The integral moving part includes: a top receiving force member, a diaphragm, and a driving shaft that are fixedly connected to each other. Since the moving part has an integral structure, when the driving force received by the top receiving force member is in an eccentric direction, the force transmitted to the bottom end of the driving shaft will have a lateral offset, and the lateral offset of the force transmitted to the bottom end of the driving shaft will be greater as the length of the moving part increases. As a result, the moving part will tilt (non-axially vertical state), causing the force received by the valve body to be the offset force. When the force received by the valve body is not axially vertical, the valve body will only tilt in the direction opposite to the offset direction. In the field of gas flow control, strict control accuracy is often required. As described above, if the valve body tilts, the flow control accuracy will decrease, affecting the product performance. In addition, when the lateral offset of the moving part is too large, the driving shaft at the lower end of the moving part may contact and wear the valve seat member, forming metal debris. In the semiconductor field, metal debris seriously affects the yield of chips.

[0026] To solve the above problems, the embodiments of this article provide a gas flow control device, which can effectively close the air flow, reduce potential leakage points, and improve the overall reliability and performance. Figures 1-9 The structure diagram of a gas flow control device according to an embodiment of this article is shown, but based on routine or non-creative labor, it may include more or fewer operating components. The present application provides a gas flow control device, including: a base 9, an integral valve seat 1, a support member 4, a first elastic member 3, a valve core 2, a transmission member 5, a diaphragm 6, a first seal 101, a driving member 7 and other components. Its specific working states include: a closed state and an open state. As Figure 1 and 2 shown, among them, in the closed state, the valve core 2 is in sealed contact with the sealing portion 12, isolating the air inlet 91 and the air outlet 92; as Figure 9 shown, in the open state, after the valve core 2 receives the driving force provided by the driving member 7 transmitted through the transmission member 5, the valve core 2 moves downward, connecting the air inlet 91 and the air outlet 92 through the air flow channel in the integral valve seat 1.

[0027] The following details each part.

[0028] Base 9: Specifically, as Figure 1 shown, the base 9 can be formed with an air inlet 91 (a first air inlet, a second air inlet, and a third air inlet connected in sequence). Among them, the first air inlet can be used to connect to equipment such as an air tank for storing gas, and the third air inlet can be connected to a receiving groove opened on the top surface of the base 9. The shape of the receiving groove can be cylindrical, and the third air inlet is formed at a substantially central position of the receiving groove. The outer diameter of the third air inlet should be smaller than the inner diameter of the receiving groove to provide a placement space for the following support member 4.

[0029] On the other side of the base 9, an air outlet 92 is formed. The air outlet 92 is provided on the bottom surface of the receiving groove. An air flow channel of the integrated valve seat 1 is provided between the air inlet 91 and the air outlet 92. To ensure that the air inlet and the air outlet 92 are not directly connected, a first seal 101 can be provided between the integrated valve seat 1 and the receiving groove, so that the air inlet 91 and the air outlet 92 can only be connected through the air flow channel of the integrated valve seat 1.

[0030] In the above scenario, the first seal 101 will still be in contact with the gas at the air outlet 92, and there is a possibility of being corroded by the corrosive gas. To avoid this problem, a circular ring-shaped boss structure can be formed on the outer periphery of the bottom surface of the receiving groove, and the air outlet 92 can be provided at the circular ring-shaped boss structure. At the same time, a circular chamfer is formed at the bottom surface of the integrated valve seat 1, so that when the integrated valve seat 1 is installed on the base 9, the circular chamfer can abut against the circular ring-shaped boss structure, thereby effectively preventing the first seal 101 from contacting the gas at the air outlet 92.

[0031] It can be understood that the position of the air inlet 91 in the receiving groove is lower than the position of the air outlet 92 in the receiving groove.

[0032] The receiving groove can also be formed with a limiting groove for fixing the following support member 4. The size, shape, depth, etc. of the limiting groove can be determined based on the shape of the support member 4. The limiting groove can be formed between the air inlet 91 and the air outlet 92 on the bottom surface of the receiving groove.

[0033] Such as Figure 3 and 4 shown, the integrated valve seat 1: The integrated valve seat 1 can be a cylindrical structure matching the receiving groove, and a first flow channel 17 communicating with the air inlet 91 is formed inside it. The orientation of the first flow channel 17 is the axial direction of the integrated valve seat 1. A sealing portion 12 can be formed inside the first flow channel 17. The sealing portion 12 can seal the first flow channel 17 after abutting against the valve core 2, so as to isolate the air inlet 91 and the air outlet 92.

[0034] Among them, the sealing portion 12 can be a sheet-like structure, and an air vent 15 for gas to pass through is formed in the sheet-like structure. The size of the air vent 15 can be set according to the size of the flow rate and the outer diameter of the transmission member 5, that is, the inner diameter of the air vent 15 is larger than the outer diameter of the transmission member 5, so as to ensure that the transmission member 5 can pass through the air vent 15 and contact the valve core 2.

[0035] Among them, the air vent 15 can be set as an inverted cone-shaped structure. The inverted cone-shaped structure can effectively prevent the transmission member 5 from contacting the inner wall of the air vent 15. At the same time, the air vent 15 with an inverted cone-shaped structure can improve the air flow passing efficiency in the open state, and can quickly balance the air pressures of the air inlet 91 and the air outlet 92, and can effectively reduce the driving force required in the open state.

[0036] It can be understood that in the closed state, the valve core 2 is under the pressure of the air inlet 91. In the open state, if the pressures of the air inlet 91 and the air outlet 92 are not equal, the valve core 2 will still be under the pressure difference between the air inlet 91 and the air outlet 92. By providing the vent hole 15 with an inverted conical structure, the gas pressures of the air inlet 91 and the air outlet 92 can be quickly made equal, thereby reducing the driving force provided by the driving member 7 and saving resources.

[0037] To improve the sealing performance between the sealing portion 12 and the top surface of the valve core 2, a second contact portion 16 protruding from the sheet-like structure can be provided on the side of the sheet-like sealing portion 12 close to the valve core 2. The second contact portion 16 can be annular, and the end surface of the second contact portion 16 in contact with the valve core 2 can be arc-shaped, that is, the form of contact between the second contact portion 16 and the valve core 2 is line contact, so as to improve the sealing performance between the two through the above-mentioned line contact.

[0038] The valve core 2 can include: a first contact portion 21 and a fixing portion 22. The first contact portion 21 can be a cylindrical structure, and the surface area of the top surface of the first contact portion 21 is larger than the area of the opening on the side of the vent hole 15 close to the bottom surface of the accommodation groove. When the second contact portion 16 is provided on the sealing portion 12, the area of the first contact portion 21 is larger than the area of the second contact portion 16.

[0039] In practical applications, the surface hardness of the area where the valve core 2 contacts the second contact portion 16 is less than the surface hardness of the second contact portion 16. When the two are in contact, a slight deformation can be formed on the surface of the valve core 2, thereby improving the sealing performance of the air flow channel. Exemplarily, a resin film can be formed on the surface of the valve core 2.

[0040] It can be understood that a slight deformation can occur on the top surface of the first contact portion 21 or the bottom surface of the second contact portion 16, thereby improving the sealing performance between the two.

[0041] The fixing portion 22 can be a cylindrical structure and can pass through the through hole of the first elastic member 3. The outer diameter of the through hole of the first elastic member 3 is larger than the outer diameter of the fixing portion 22 and smaller than the outer diameter of the first contact portion 21, so that the first contact portion 21 in the valve core 2 is stably arranged above the first elastic member 3.

[0042] The end surface of the valve core 2 in contact with the sealing portion 12 is perpendicular to the axis of the inlet of the air flow channel, so that the pressure of the gas entering from the air inlet 91 can be transmitted to the sealing portion 12 through the valve core 2, thereby ensuring airtightness.

[0043] Such as Figure 9As shown, the support member 4 can be an annular structure. The height of the support member 4 is greater than the height from the sealing portion 12 to the bottom surface of the integral valve seat 1. That is, when the support member 4 is disposed inside the integral valve seat 1, the support member 4 protrudes from the bottom surface of the integral valve seat 1. In this scenario, one end of the support member 4 is fixed to the bottom surface of the receiving groove or inside the limiting groove in the receiving groove, and the other end of the support member 4 abuts against the first elastic member 3. A valve core 2 is disposed above the first elastic member 3, and the valve core 2 contacts the sealing portion 12 to achieve the sealing of the air inlet 91 and the air outlet 92. In the open state, the valve core 2 moves downward, and the first elastic member 3 generates a downward deformation. When switched to the closed state, the first elastic member 3 provides a resilience force to abut the valve core 2 against the sealing portion 12. At the same time, the gas pressure at the air inlet 91 further acts on the bottom surface of the valve core 2, thereby better ensuring the sealing performance.

[0044] In an alternative embodiment, the integral valve seat 1 may be provided with a limiting portion 11 that abuts against the top surface of the first elastic member 3. The limiting portion 11 is located below the second contact portion 16 and / or the sealing portion 12. The limiting portion 11 is used to fix the first elastic member 3 between the support member 4 and the limiting portion 11 to further improve the stability of the first elastic member 3.

[0045] Wherein, a through hole for gas passage is further formed in the first elastic member 3.

[0046] A first sunk platform 13 for abutting against the second elastic member 8 is further formed on the top surface of the integral valve seat 1 to limit the movement of the second elastic member 8 in the radial direction. The depth of the first sunk platform 13 is equal to the sum of the height of the second elastic member 8 and the height of the transmission member 5 above the second elastic member 8. Thus, after the transmission member 5 and the second elastic member 8 are installed on the integral valve seat 1, the top surface of the transmission member 5 is substantially coplanar with the top surface of the integral valve seat 1.

[0047] It can be understood that the second elastic member 8 and the first elastic member 3 can be elastic sheets. Their structures are basically the same and will not be elaborated here.

[0048] A second sunk platform 14 is further formed on the outer periphery of the top surface of the integral valve seat 1. The projection of the second sunk platform 14 on the bottom surface of the integral valve seat 1 is located outside the first sunk platform 13. After the integral valve seat 1 and the diaphragm 6 are installed on the base 9, a second flow channel is formed between the bottom surface of the second sunk platform 14 and the diaphragm 6. At least one third flow channel 18 is formed in the second sunk platform 14, and the third flow channel 18 is substantially parallel to the first flow channel 17. A fourth flow channel 19 communicating with the third flow channel 18 is further formed on the side surface of the integral valve seat 1, and the fourth flow channel 19 communicates with the above-mentioned air outlet 92.

[0049] Such as Figure 5As shown, the structure of the transmission member 5 is basically the same as that of the valve core 2. In some possible embodiments, the end face of the transmission member 5 in contact with the diaphragm 6 is spherical. The spherical transmission member 5 can adaptively adjust the direction of the force under the action of the biasing force, ensuring that the force can be conducted along the axial direction of the transmission member.

[0050] Specifically, the end face of the transmission member 5 is spherical, that is, it has a smoothly transitioning curved surface structure. The spherical design can ensure that the acting force is directly conducted to the target point along the shortest path, avoiding energy loss or force dispersion caused by improper angles. In addition, compared with the planar design, the spherical surface is more likely to move in a complex environment and is not easily stuck. Especially in the presence of small particles or other impurities, the spherical surface can reduce the accumulation of these substances, further reducing the possibility of jamming.

[0051] As Figure 2 shown, an annular groove for placing the second seal 102 is provided on the outside of the receiving groove. After the second seal 102 is arranged in the annular groove, the fourth flow channel 19 can be isolated from the outside by the diaphragm 6 arranged above.

[0052] In some optional embodiments, the outer periphery of the top surface of the integral valve seat 1 can be set as an annular structure matching the annular groove. After the integral valve seat 1 is installed in the receiving groove, the annular structure of the integral valve seat 1 can abut against the annular groove, so as to fix the second seal 102 between the outside of the annular structure of the integral valve seat 1, below the diaphragm 6 and the inner wall of the annular groove, reducing the risk of gas contacting the second seal 102.

[0053] It can be understood that both the first seal 101 and the second seal 102 are in a relatively enclosed space. Even if the sealing performance between the integral valve seat 1 and the base 9 is poor, during the gas flow process, the internal air pressure is relatively stable, and there will be no continuous gas flowing through the surfaces of the first seal 101 and the second seal 102, thereby improving the stability of the first seal 101 and the second seal 102.

[0054] In the prior art, during the production of the actuating part, the thimble, the diaphragm 6 and the transmission member 5 need to be produced coaxially. The coaxial production has high requirements for the coaxial process, resulting in high production difficulty. In addition, since the diaphragm 6 is very thin, there are often scenarios where it needs to be replaced due to damage. When the actuating part needs to be replaced, it can only be replaced entirely, which has a higher maintenance cost compared to separate maintenance. Additionally, when the force applied by the driving member 7 upstream of the thimble is not coaxial with the thimble, the transmission member 5 and the diaphragm 6, the force applied by the driving member 7 will directly act on the integral transmission mechanism (the thimble, the transmission member and the diaphragm). Due to the influence of the length of the integral transmission mechanism, the lateral offset of the horizontal component force applied by the driving member at the end of the transmission member 5 (near the end of the vent hole 15) will be enlarged, and further, the transmission member 5 may be stuck in the vent hole 15. Specifically, asFigure 7 As shown, when the driving force provided by the driving member 7 is coaxial with the actuating portion (the ejector pin, the transmission member 5 and the diaphragm 6 are integrated), the offset of the actuating portion is shown by the solid line, and when the driving force provided by the driving member 7 is not coaxial with the actuating portion, the offset of the actuating portion is shown by the dashed line. It can be seen that there is a lateral offset, which causes the force on the valve core 2 not to be at the center point, resulting in the side deviation of the valve core 2 and affecting the control accuracy.

[0055] To overcome the above technical problems, in this embodiment, the transmission member 5 and the diaphragm 6 are in a split form.

[0056] The diaphragm 6 includes a deformation portion 61 and a force-receiving portion 62. The deformation portion 61 is disposed around the force-receiving portion 62, and the deformation portion 61 does not contact the integral valve seat 1. The thickness of the force-receiving portion 62 is greater than the thickness of the deformation portion 61. One end of the force-receiving portion 62 abuts against the driving member 7, and the other end of the force-receiving portion 62 abuts against the transmission member 5, so that after the deformation portion 61 deforms, the driving force of the driving member 7 is transmitted to the transmission member 5.

[0057] Specifically, referring to Figure 6 , the deformation portion 61 may be an annular structure, which is disposed around the force-receiving portion 62 at the central position. The thickness of the force-receiving portion 62 is higher than that of the deformation portion 61. Among them, the thickness of the deformation portion 61 is less than or equal to 0.05 mm, preferably 0.02 mm. The diaphragm 6 as a whole may be a circular structure. The thickness of the contact area between the diaphragm 6 and the base 9 is greater than the thickness of the groove formed in the base for accommodating the diaphragm 6, so that the diaphragm can be fixed in the base by pressing, specifically as Figure 1 shown.

[0058] In addition, the deformation portion 61 of the traditional diaphragm 6 is manufactured by turning process. Inevitably, a large amount of heat will be generated during the processing, causing the local temperature of the material to rise, resulting in a small but non-negligible deformation of the deformation portion 61. Over time and under the repeated stress in actual operation, these pre-existing micro-deformations will gradually intensify. Especially for the deformation portion 61 with a relatively thin thickness, this situation is very likely to cause the overall performance of the diaphragm 6 to decline, shorten its service life and affect the control accuracy.

[0059] To overcome the above problems, the deformation portion 61 of the diaphragm 6 in this application is formed by metal etching technology. It can effectively avoid the risk of thermal damage caused by the traditional turning process, ensuring that the deformation portion 61 will not have any adverse pre-deformation due to overheating during the manufacturing stage. The metal etching technology can finely adjust the material under precise control, not only ensuring the dimensional accuracy and surface quality of the deformation portion 61, but also greatly improving the overall stability and durability of the diaphragm 6, extending its service life, and improving the reliability and efficiency of the fluid control system.

[0060] It is understandable that the transmission member 5 and the diaphragm 6 in the present application are provided in a split form. When the acting force applied by the driving member 7 is not coaxial with the diaphragm 6 and / or the transmission member 5, since each component is split, the lateral offset caused by the acting force of the horizontal component received by each corresponding component is lower than that of the integral acting part. In addition, the acting force of the horizontal component received by each corresponding component can also cause a slight lateral movement of the corresponding component, further reducing the lateral movement distance of the end of the transmission member 5 (the end close to the vent hole) caused by non-coaxial installation, thereby preventing the end of the transmission member 5 from being stuck in the vent hole 15 and improving the reliability of the fluid control valve. Further, even if the direction of the force applied by the driving member 7 is not coaxial with the transmission member 5, due to the lateral limit of the second elastic member 8, it can also ensure that the transmission member moves vertically in the vent hole 15, thereby reducing the risk of the transmission member 5 being stuck in the vent hole 15.

[0061] In practical applications, there are often machining errors. When the actual heights of the valve core 2 and the support member 4 are higher than the designed heights, the machining errors can be compensated by increasing the first elastic member 3. Compared with the prior art, the present application has better adaptability.

[0062] The driving member 7 can be a driving device such as a solenoid valve or a piezoelectric valve. The driving member 7 can provide a driving force to move the transmission member 5 and the valve core 2 to open the air flow channel. It is understandable that the diaphragm 6 can isolate the air flow channel and the driving member 7 to prevent gas leakage into the interior of the driving member 7 and avoid the electronic components inside the driving member 7 from being corroded by the gas. At the same time, since the driving member 7 does not directly contact the working medium (gas), the risk of damage to the driving member 7 caused by impurities in the medium is reduced, and the stability and reliability of the entire system are improved.

[0063] The driving force provided by the driving member 7 can act directly on the force-receiving part, or as Figure 5 shown, by arranging a thimble between the driving member and the diaphragm, and the thimble can cover the force-receiving part 62 to extend the displacement of the driving member.

[0064] In the implementation of the embodiments of this specification, compared with the split valve seat, the present application adopts an integral valve seat, reducing potential leakage points and improving the overall reliability and performance. In addition, the resilience provided by the first elastic member helps to maintain the close contact between the valve core and the sealing part, and can maintain a good sealing state even after long-term use. The design of the support member not only provides stable support for the first elastic member, but also increases the mechanical stability of the entire device and extends the service life. The combined design of the integral valve seat and the diaphragm simplifies the overall structure, reduces the number of parts, lowers the assembly difficulty and maintenance cost. At the same time, it solves the assembly problems caused by manufacturing errors and improves the usability and maintainability of the product.

[0065] It should also be understood that in the embodiments herein, the term "and / or" is merely a description of the association relationship of associated objects, indicating that three relationships may exist. For example, A and / or B may represent three situations: A exists alone, A and B exist simultaneously, and B exists alone. In addition, the character " / " herein generally indicates that the associated objects before and after are in an "or" relationship.

[0066] Those of ordinary skill in the art can realize that the units and algorithm steps of each example described in combination with the embodiments disclosed herein can be implemented by electronic hardware, computer software, or a combination of both. To clearly illustrate the interchangeability of hardware and software, the composition and steps of each example have been generally described according to functions in the above description. Whether these functions are executed in a hardware or software manner depends on the specific application and design constraints of the technical solution. Professional technicians can use different methods for each specific application to implement the described functions, but such implementation should not be considered to exceed the scope of this article.

[0067] Those skilled in the art can clearly understand that for the convenience and brevity of description, the specific working processes of the systems, devices, and units described above can refer to the corresponding processes in the foregoing method embodiments and will not be elaborated herein.

[0068] In the several embodiments provided herein, it should be understood that the disclosed systems, devices, and methods can be implemented in other ways. For example, the device embodiments described above are merely illustrative. For example, the division of units is only a logical function division, and there may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. In addition, the displayed or discussed couplings or direct couplings or communication connections to each other can be indirect couplings or communication connections through some interfaces, devices, or units, and can also be in electrical, mechanical, or other forms of connection.

[0069] The units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they can be located in one place or distributed to multiple network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiments herein.

[0070] In this text, specific embodiments are used to elaborate on the principles and implementation manners of this text. The description of the above embodiments is only used to help understand the method and its core idea of this text; at the same time, for those of ordinary skill in the art, according to the idea of this text, there will be changes in the specific implementation manners and application scopes. In summary, the content of this specification should not be construed as a limitation to this text.

Claims

1. A gas flow control device, characterized in that, Comprising: A base (9) with an air inlet (91) and an air outlet (92) formed on both sides respectively, and an open receiving groove formed on the top. The air inlet (91) and the air outlet (92) are communicated through the receiving groove; An integrated valve seat (1) disposed in the receiving groove. The integrated valve seat (1) forms an air flow channel communicated with the air inlet (91) and the air outlet (92), and a sealing portion (12) is formed in the air flow channel; A support member (4) disposed in the air flow channel, and one end surface of the support member abuts against the bottom surface of the receiving groove; A first elastic member (3) fixedly disposed between the other end surface of the support member (4) and the sealing portion (12). The first elastic member (3) forms a first through hole for the valve core (2) to pass through; The valve core (2) includes: a first contact portion (21) and a fixing portion (22). The top surface of the first contact portion (21) abuts against the sealing portion (12), and the fixing portion (22) passes through the first through hole; A transmission member (5) passing through the sealing portion (12) and connected to the top surface of the first contact portion (21). The outer diameter of the transmission member (5) is smaller than the outer diameter of the air flow channel at the sealing portion (12); A diaphragm (6) disposed above the transmission member (5) and the base (9), connected to the transmission member (5), and sealing the receiving groove.

2. The gas flow control device according to claim 1, wherein Further comprising: A first sealing member (101) disposed between the integrated valve seat (1) and the receiving groove, and the first sealing member (101) is disposed on the outer periphery of the support member (4).

3. The gas flow control device according to claim 1, characterized in that, A limiting groove matching the support member (4) is formed on the bottom surface of the receiving groove.

4. The gas flow control device according to claim 1, wherein, Further comprising: A second elastic member (8); The second elastic member (8) is disposed between the transmission member (5) and the integrated valve seat (1).

5. The gas flow control device according to claim 4, characterized in that, A first counterbore (13) for the second elastic member (8) to abut against is formed on the top surface of the integrated valve seat (1).

6. The gas flow control device according to claim 3, characterized in that, The air flow channel includes: an axial first flow channel (17), a second flow channel formed by the top surface of the integrated valve seat (1) and the diaphragm (6), and a third flow channel (18) perpendicular to the second flow channel; The air inlet is sequentially communicated with the first flow channel (17), the second flow channel, the third flow channel (18), and the air outlet (92).

7. The gas flow control device according to claim 1, characterized in that, The end surface of the transmission member (5) away from the valve core (2) is spherical.

8. The gas flow control device according to claim 3, wherein, An inverted conical ventilation hole (15) is formed at one end of the sealing portion (12) close to the transmission member (5).

9. The gas flow control device according to claim 1, wherein, Further comprising: a driving member (7) disposed above the diaphragm (6) for providing a downward driving force to the diaphragm (6).

10. The gas flow control device according to claim 1, wherein, The end of the sealing portion (12) in contact with the valve core (2) is arc-shaped.

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