A high-efficiency and energy-saving filtration system for clean rooms

Abstract

The present invention discloses a clean room high-efficiency and energy-saving filtering system, which belongs to the technical field of filtering systems, and comprises: an air inlet unit, below which an air inlet hood is fixed; an air supply bin, which is arranged at the exhaust port position of the air inlet unit, and a pre-filter mechanism is arranged in the air supply bin; a dust removal bin, which is connected to the exhaust port position of the air supply bin, and an electrostatic dust removal unit is arranged in the dust removal bin; a pipe bin, which is connected to the side of the dust removal bin away from the air supply bin, a high-efficiency filter unit is arranged in the pipe bin, an exhaust bin is arranged on the side of the pipe bin away from the dust removal bin, and an exhaust system is arranged outside the exhaust bin; the high-efficiency filter unit provided in the present invention can deeply purify the fresh air after electrostatic dust removal by a plurality of filter plate groups arranged in combination, and the main air inlet assembly and exhaust assembly can independently select the appropriate air supply position and exhaust position based on the change of the pollution degree of the ambient fresh air, so as to realize the "on-demand activation" regulation of the filter unit.

Description

Technical Field

[0001] The invention belongs to the technical field of dust-free room ventilation and filtering systems, in particular to a dust-free room high-efficiency energy-saving filtering system. Background Art

[0002] Clean rooms are widely used in industries with extremely high requirements for environmental cleanliness, such as semiconductor manufacturing, biomedicine, and precision instrument processing. The fresh air filtration system is an important component of clean room air purification, responsible for introducing fresh outdoor air and performing multi-stage filtration to remove particulate matter, harmful gases and other pollutants in the air. Traditional technologies operate according to fixed filtration parameters and cannot adapt to changes in fresh air pollution levels in different time periods or seasons. Even when air pollution is relatively light, it still operates at the highest filtration intensity, resulting in unnecessary energy consumption and accelerated aging and clogging of filter materials. Or when the external air quality suddenly deteriorates (such as sandstorms, industrial emissions, etc.), the filtration system cannot quickly increase the filtration intensity to cope with higher pollution concentrations, resulting in substandard fresh air quality entering the clean room, affecting the cleanliness of the production environment.

[0003] Therefore, it is necessary to provide a high-efficiency and energy-saving filtration system for a clean room to solve the problems raised in the above background technology. Summary of the Invention

[0004] To achieve the above-mentioned objectives, the present invention provides the following technical solutions: a high-efficiency and energy-saving filtration system for a clean room, comprising: an air inlet unit, with an air inlet hood fixed underneath; an air supply bin, arranged at the exhaust port position of the air inlet unit, a pre-filter mechanism being arranged in the air supply bin; a dust removal bin, connected to the exhaust port position of the air supply bin, an electrostatic dust removal unit being arranged in the dust removal bin; a pipe bin, connected to a side of the dust removal bin away from the air supply bin, a high-efficiency filtration unit being arranged in the pipe bin, an exhaust bin being arranged on a side of the pipe bin away from the dust removal bin, and an exhaust system being arranged outside the exhaust bin.

[0005] Preferably, the high-efficiency filtration unit comprises: a frame fixed horizontally in the pipeline bin, with a carrier plate fixed horizontally inside the frame;

[0006] The filter plate groups are multiple and equidistantly arranged, and each of the filter plate groups is vertically mounted on the carrier plate and arranged along the length direction of the frame; the air inlet assembly is slidably mounted on the frame, the upper end of the air inlet assembly is connected to a first corrugated pipe, and an air supply seat is provided on the side of the pipe bin close to the dust removal bin, and the other end of the first corrugated pipe is connected to the air supply seat; the exhaust assembly is arranged on the side of the frame close to the exhaust bin, and the upper end of the exhaust assembly is connected to a second corrugated pipe.

[0007] Preferably, the plurality of filter plate groups are sealed and matched to form an air duct, two through holes are provided on the left and right sides of the filter plate group, and the air inlet assembly and the air exhaust assembly are respectively connected to the filter plate group through the through holes.

[0008] Preferably, two guide plates are symmetrically fixed on one side of the frame close to the air inlet assembly, and the guide plates are both connected with a transmission rod for transverse sliding movement, and the other end of the transmission rod is connected to the air inlet assembly; a threaded sleeve is rotatably connected in one of the guide plates, and the threaded sleeve is threadedly connected to a screw, and one end of the screw is fixed to the air inlet assembly; a micro motor is provided outside the guide plate, and the output end of the micro motor is connected to the screw for transmission through gear meshing; a beam is symmetrically fixed on the air inlet assembly, and a positioning plate is slidably installed on the beam, and a plurality of connecting rods are vertically fixed on the positioning plate, and the lower ends of the connecting rods are all connected to the exhaust assembly; a propulsion cylinder is provided in parallel on the beam, and the telescopic end of the propulsion cylinder is connected to the positioning plate.

[0009] Preferably, the air inlet assembly and the exhaust assembly have the same composition structure; the air inlet assembly includes: a machine plate seat, whose cross section is an inverted [-shaped structure, an air guide bin is installed in the middle of the upper end surface of the machine plate seat, and the air guide bin is connected to the first corrugated pipe; an air duct is opened in the machine plate seat, the upper end of the air duct is connected to the air guide bin, and the lower end of the air duct is connected to the through hole; a sealing rubber ring is fixed in the air duct, and the lower end surface of the sealing rubber ring is in sliding and sealing contact with the filter plate group; a valve ring is fixed in the through hole, and a guide sleeve is fixed at the upper end of the valve ring in the through hole, and a valve stem is slidably connected in the guide sleeve, the valve stem and the valve ring are slidably and sealingly matched, and a support spring is sleeved on the valve stem; an electromagnetic driver is vertically arranged on the machine plate seat and is in contact with the end of the valve stem.

[0010] Preferably, an air-uniform cavity is provided above the interior of the filter plate group, the lower ends of the through holes are connected to the air-uniform cavity, and a plurality of air-uniform holes are provided below the air-uniform cavity;

[0011] A ventilation cavity is provided below the air-uniform cavity in the filter plate group, and a plurality of one-way exhaust holes are evenly distributed on one side of the ventilation cavity.

[0012] Preferably, a sealing plate is vertically slidably provided in the filter plate group, and a plurality of diversion holes corresponding to the one-way exhaust holes are provided on the sealing plate. A plurality of lifting springs are provided on the lower end surface of the sealing plate. In the absence of external force, the sealing plate is fully connected with the diversion hole and the one-way exhaust hole through the elastic force of the lifting spring; the machine plate seat in the exhaust assembly is symmetrically hinged with a paddle plate on both sides, one end of the paddle plate is abutted against the side edge of the sealing plate, and a control cylinder is provided on the machine plate seat, and the control cylinder is connected to the other end of the paddle plate.

[0013] Preferably, an activated carbon filter plate group is vertically arranged among the plurality of filter plate groups located on the left side of the rack, and a nano filter plate group is vertically arranged among the remaining filter plate groups;

[0014] The activated carbon filter plate group and the nano filter plate group in each filter plate group are arranged in increasing order of filtration accuracy from left to right.

[0015] Preferably, two telescopic guide rods are symmetrically provided on the frame, one end of the two telescopic guide rods is respectively connected to the filter plate group located on the outside, and a hinge frame is provided on the side wall of the filter plate group. The cross-section of the hinge frame is set to an X-shaped structure, and adjacent hinge frames are connected to each other; medium-efficiency fiber filter materials are detachably installed between the filter plate groups.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows: the air supply bin used in the clean room filtration system of the present invention can perform preliminary filtration on the fresh air through the pre-filter mechanism, and then the electrostatic dust removal unit is used in the dust removal bin to electrostatically remove the dust, thereby achieving efficient purification. The high-efficiency filter unit also provided therein can deeply purify the fresh air after electrostatic dust removal by a plurality of filter plate groups arranged in combination, and can effectively utilize the arranged activated carbon filter plate group and the nano filter plate group to adsorb gaseous pollutants in the fresh air, and at the same time efficiently intercept and capture tiny particles in the air to ensure that the air meets the cleanliness standards of the clean room; and the main air intake components and exhaust components can independently select appropriate air supply positions and exhaust positions based on changes in the pollution level of the ambient fresh air. On the one hand, it can reduce energy consumption, improve operating efficiency, and realize "on-demand activation" regulation of the filter unit. On the other hand, it reduces the time of high-intensity operation, achieves energy-saving effects, and extends the service life of the overall system. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0018] Figure 2 Schematic diagram of the structure of the high efficiency filtration unit in the present invention;

[0019] Figure 3 Schematic diagram of the three-dimensional structure of the high-efficiency filtration unit in the present invention;

[0020] Figure 4 is a cross-sectional view of the air inlet assembly of the present invention;

[0021] Figure 5 for Figure 4 A schematic diagram of the structure at center A;

[0022] Figure 6 Schematic diagram of the structure of the filter plate group of the present invention;

[0023] Figure 7 Schematic diagram of the structure of the paddle and the control cylinder in the present invention;

[0024] Figure 8 Schematic diagram of the internal structure of the filter plate group in the present invention;

[0025] Figure 9 Schematic diagram of the connection structure of the hinge bracket in the present invention;

[0026] Figure: 1. Air inlet unit; 11. Air inlet cover; 12. Air supply chamber; 13. Dust removal chamber; 14. Electrostatic dust removal unit; 15. Exhaust chamber; 16. Exhaust system; 2. Pipeline chamber; 21. Air supply seat; 22. Beam frame; 23. Positioning plate; 24. Connecting rod; 25. Propulsion cylinder; 26. Telescopic guide rod; 27. Hinged shaft frame; 3. High-efficiency filter unit; 31. Frame; 32. Carrier plate; 33. First corrugated pipe; 34. Second corrugated pipe; 35. Guide Plate; 36. Transmission rod; 37. Screw; 4. Filter plate group; 41. Through hole; 42. Air uniformity chamber; 43. Air uniformity hole; 44. Ventilation chamber; 45. One-way exhaust hole; 46. Sealing plate; 47. Activated carbon filter plate group; 5. Air inlet assembly; 51. Machine plate seat; 52. Air guide chamber; 53. Air duct; 54. Sealing rubber ring; 55. Valve ring; 56. Guide sleeve; 57. Valve stem; 58. Electromagnetic drive; 6. Exhaust assembly; 61. Dial plate; 62. Control cylinder. DETAILED DESCRIPTION

[0027] See also Figures 1-9 In an embodiment of the present invention, a high-efficiency and energy-saving filtration system for a clean room includes:

[0028] The air inlet unit 1 has an air inlet cover 11 fixed underneath;

[0029] The air supply chamber 12 is provided at the exhaust port of the air inlet unit 1. A pre-filter mechanism (not shown in the figure) is provided in the air supply chamber 12 to intercept large particles of pollutants (such as dust, pollen, hair, etc.) and reduce the burden on the subsequent filter unit;

[0030] The dust removal bin 13 is connected to the exhaust port of the air supply bin 12. The dust removal bin 13 is provided with an electrostatic dust removal unit 14, which uses the principle of high-voltage electric field to absorb tiny particles (such as PM2.5, PM10, etc.);

[0031] The pipe bin 2 is connected to the side of the dust removal bin 13 away from the air supply bin 12. A high-efficiency filtering unit 3 is provided in the pipe bin 2. An exhaust bin 15 is provided on the side of the pipe bin 2 away from the dust removal bin 13. An exhaust system 16 is provided outside the exhaust bin 15.

[0032] In this embodiment, the high efficiency filtration unit 3 includes:

[0033] The frame 31 is fixed horizontally in the pipe bin 2, and a carrier plate 32 is fixed horizontally inside the frame 31;

[0034] The filter plate groups 4 are arranged in a plurality of equal distances, and each of the filter plate groups 4 is vertically mounted on the carrier plate 32 and arranged along the length direction of the frame 31;

[0035] The air inlet assembly 5 is slidably mounted on the frame 31. The upper end of the air inlet assembly 5 is connected to a first corrugated pipe 33. An air supply seat 21 is provided on the side of the pipe bin 2 close to the dust removal bin 13, and an exhaust fan blade is provided inside the air supply seat 21. The other end of the first corrugated pipe 33 is connected to the air supply seat 21; so that the fresh air after electrostatic dust removal can enter the air inlet assembly 5 through the first corrugated pipe 33.

[0036] The exhaust component 6 is arranged on one side of the frame 31 close to the exhaust bin 15. The upper end of the exhaust component 6 is connected to the second corrugated duct 34. The fresh air can enter the exhaust component 6 after passing through the filter plate group 4, and then be discharged into the exhaust bin 15 by the second corrugated duct 34.

[0037] As a preferred embodiment, the multiple filter plate groups 4 are sealed and matched to form an air duct, and two through holes 41 are opened on the left and right sides of the filter plate group 4. The air inlet component 5 and the exhaust component 6 are respectively connected to the filter plate group 4 through the through holes 41. That is to say, the air inlet component 5 can enter the filter plate group 4 through one of the through holes 41 on the filter plate group 4 connected below it, and after deep purification and filtration of the air duct formed by the combination of the filter plate groups 4, enter the exhaust component 6 from the corresponding through hole 41 on the filter plate group 4 below the exhaust component 6.

[0038] In this embodiment, two guide plates 35 are symmetrically fixed on one side of the frame 31 close to the air inlet assembly 5. A transmission rod 36 is laterally slidably connected to each of the guide plates 35. The other end of the transmission rod 36 is connected to the air inlet assembly 5.

[0039] A threaded sleeve is rotatably connected to one of the guide plates 35, and a screw 37 is threadedly connected to the threaded sleeve. One end of the screw 37 is fixed to the air inlet assembly 5. A micro motor (not shown) is provided outside the guide plate 35. The output end of the micro motor is connected to the screw 37 through gear meshing. Therefore, the screw 37 can slide left and right during the forward and reverse driving of the micro motor, so as to adjust the connection between the air inlet assembly 5 and the corresponding filter plate group 4.

[0040] A beam 22 is symmetrically fixed on the air inlet assembly 5, a positioning plate 23 is slidably installed on the beam 22, and a plurality of connecting rods 24 are vertically fixed on the positioning plate 23, and the lower ends of the connecting rods 24 are connected to the exhaust assembly 6; a propulsion cylinder 25 is arranged in parallel on the beam 22, and the telescopic end of the propulsion cylinder 25 is connected to the positioning plate 23, so that the exhaust assembly 6 can be connected to the corresponding filter plate group 4 under the telescopic drive of the propulsion cylinder 25.

[0041] In this embodiment, the air inlet assembly 5 and the air exhaust assembly 6 have the same composition structure;

[0042] The air inlet assembly 5 includes:

[0043] The machine plate base 51 has an inverted [-shaped cross section. An air guide chamber 52 is mounted in the middle of the upper end surface of the machine plate base 51. The air guide chamber 52 is connected to the first corrugated pipe 33.

[0044] An air duct 53 is provided in the panel base 51 , wherein the upper end of the air duct 53 is connected to the air guide chamber 52 , and the lower end of the air duct 53 is connected to the through hole 41 ;

[0045] The sealing rubber ring 54 is fixed in the air duct 53. The lower end surface of the sealing rubber ring 54 is in sliding and sealing contact with the filter plate group 4 so that the fresh air in the air duct 53 can be sealed and enter the filter plate group 4.

[0046] A valve ring 55 is fixed in the through hole 41. A guide sleeve 56 is fixed in the through hole 41 at the upper end of the valve ring 55. A valve stem 57 is slidably connected in the guide sleeve 56. The valve stem 57 and the valve ring 55 are in sliding and sealing engagement. A support spring is sleeved on the valve stem 57. In the absence of external force, the valve stem 57 is in sealing contact with the valve ring 55 due to the elastic force of the support spring.

[0047] The electromagnetic driver 58 is vertically arranged on the machine plate base 51 and is connected to the end of the valve stem 57. Specifically, when the electromagnetic driver 58 is energized, its end can be magnetically connected to the valve stem 57, and when the electromagnetic driver 58 is driven upward, it can pull the valve stem 57 upward, thereby separating the valve stem 57 from the valve ring 55.

[0048] In this embodiment, an air-uniforming cavity 42 is provided above the filter plate group 4. The lower ends of the through holes 41 are connected to the air-uniforming cavity 42. A plurality of air-uniforming holes 43 are provided below the air-uniforming cavity 42 so that the fresh air entering the filter plate group 4 can flow evenly through the air-uniforming holes 43.

[0049] A ventilation cavity 44 is provided below the air-uniform cavity 42 in the filter plate group 4 , and a plurality of one-way exhaust holes 45 are evenly distributed on one side of the ventilation cavity 44 , so that fresh air can only flow to the right side of the arrangement direction of the filter plate group 4 through the one-way exhaust holes 45 .

[0050] As a preferred embodiment, a sealing plate 46 is vertically slidably provided in each of the filter plate groups 4. The sealing plate 46 is provided with a plurality of diversion holes corresponding to the one-way exhaust holes 45. The lower end surface of the sealing plate 46 is provided with a plurality of lifting springs. In the absence of external force, the sealing plate 46 is fully connected to the one-way exhaust holes 45 by the elastic force of the lifting springs.

[0051] The plate seat 51 in the exhaust assembly 6 is symmetrically hinged with a paddle plate 61 on both sides, one end of the paddle plate 61 is in contact with the side edge of the sealing plate 46, and a control cylinder 62 is provided on the plate seat 51, and the control cylinder 62 is connected to the other end of the paddle plate 61; specifically, when the exhaust assembly 6 is docked with the filter plate group 4 at the corresponding position, it can press the sealing plate 46 in the filter plate group 4 downward through the telescopic action of the control cylinder 62, and at this time, the diversion hole on the sealing plate 46 is staggered with the one-way exhaust hole 45, so that the fresh air in the filter plate group 4 can flow upward into the uniform air cavity 42 therein.

[0052] In this embodiment, an activated carbon filter plate group 47 is vertically arranged in the plurality of filter plate groups 4 on the left side of the frame 31, and nano filter plate groups are vertically arranged in the remaining filter plate groups 4;

[0053] The activated carbon filter plate groups 47 and the nano filter plate groups in each filter plate group 4 are arranged from left to right in increasing order of filtration accuracy, ensuring that the fresh air can be gradually purified when passing through different filter plate groups. By filtering in a step-by-step manner, different types of pollutants are processed in stages to avoid a single filter plate group taking on too many tasks and resulting in a decrease in efficiency. Therefore, during use, the system can automatically adjust the filtration intensity according to changes in the external environment (such as seasonal pollution fluctuations or sudden pollution events). On the other hand, it can adjust the initial filtration substrate and the terminal filtration substrate according to the distribution of fresh air pollutants. For example, if the fresh air contains a large amount of large particle pollutants, multiple filter plate groups 4 on the relatively left side can be selected to perform simple filtration on the fresh air.

[0054] In this embodiment, two telescopic guide rods 26 are symmetrically provided on the frame 31. One end of the two telescopic guide rods 26 is respectively connected to the filter plate group 4 located on the outside. A hinge frame 27 is provided on the side wall of the filter plate group 4. The cross section of the hinge frame 27 is set to an X-shaped structure, and adjacent hinge frames 27 are connected to each other.

[0055] Medium-efficiency fiber filter materials are detachably installed between the filter plate groups 4. Two or more medium-efficiency fiber filter materials can be provided to assist in filtering fresh air, reduce the workload of the filter plate groups 4, and avoid excessive loss of some filter materials.

[0056] The above is only a preferred specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any technician familiar with this technical field, within the technical scope disclosed by the present invention, can make equivalent replacements or changes based on the technical solutions and inventive concepts of the present invention, which should be covered by the scope of protection of the present invention.

Claims

1. A clean room high efficiency and energy saving filtration system, characterized in that: It includes: An air inlet unit (1), with an air inlet cover (11) fixed below it; An air supply bin (12) is provided at the exhaust port of the air inlet unit (1), wherein a pre-filter mechanism is provided in the air supply bin (12); A dust removal bin (13) is connected to the exhaust port of the air supply bin (12), and an electrostatic dust removal unit (14) is provided in the dust removal bin (13); A pipe bin (2) is connected to a side of the dust removal bin (13) away from the air supply bin (12), a high-efficiency filter unit (3) is provided in the pipe bin (2), an exhaust bin (15) is provided on a side of the pipe bin (2) away from the dust removal bin (13), and an exhaust system (16) is provided outside the exhaust bin (15); The high-efficiency filtration unit (3) comprises: A frame (31) is fixed horizontally in the pipeline bin (2), and a carrier plate (32) is fixed horizontally inside the frame (31); A plurality of filter plate groups (4) are arranged at equal intervals, each filter plate group (4) is vertically mounted on a carrier plate (32) and arranged along the length direction of the frame (31); An air inlet assembly (5) is slidably mounted on the frame (31), the upper end of the air inlet assembly (5) is connected to a first corrugated pipe (33), and an air supply seat (21) is provided on a side of the pipe bin (2) close to the dust removal bin (13), and the other end of the first corrugated pipe (33) is connected to the air supply seat (21); An exhaust assembly (6) is arranged on a side of the frame (31) close to the exhaust bin (15), and the upper end of the exhaust assembly (6) is connected to a second corrugated pipe (34); The plurality of filter plate groups (4) are sealed and matched to form an air passage. Two through holes (41) are provided on the left and right sides of the filter plate group (4). The air inlet assembly (5) and the air exhaust assembly (6) are respectively connected to the filter plate group (4) through the through holes (41).

2. The clean room high efficiency and energy saving filtering system according to claim 1, characterized in that: Two guide plates (35) are symmetrically fixed on one side of the frame (31) close to the air inlet assembly (5), and each of the guide plates (35) is connected to a transmission rod (36) in a transverse sliding manner, and the other end of the transmission rod (36) is connected to the air inlet assembly (5); A threaded sleeve is rotatably connected to one of the guide plates (35), and the threaded sleeve is threadably connected to a screw (37), one end of which is fixed to the air inlet assembly (5); a micro motor is provided outside the guide plate (35), and an output end of the micro motor is connected to the screw (37) for transmission through gear meshing; A beam (22) is symmetrically fixed on the air inlet assembly (5), a positioning plate (23) is slidably mounted on the beam (22), a plurality of connecting rods (24) are vertically fixed on the positioning plate (23), and the lower ends of the connecting rods (24) are all connected to the exhaust assembly (6); a propulsion cylinder (25) is arranged in parallel on the beam (22), and the telescopic end of the propulsion cylinder (25) is connected to the positioning plate (23).

3. The clean room high efficiency and energy saving filtering system according to claim 1, characterized in that: The air inlet assembly (5) and the air exhaust assembly (6) have the same composition structure; The air inlet assembly (5) comprises: A machine plate seat (51) has an inverted [-shaped cross section, and an air guide bin (52) is installed in the middle of the upper end surface of the machine plate seat (51), and the air guide bin (52) is connected to the first corrugated pipe (33); An air duct (53) is provided in the machine plate base (51), wherein the upper end of the air duct (53) is connected to the air guide chamber (52), and the lower end of the air duct (53) is connected to the through hole (41); A sealing rubber ring (54) is fixed in the air duct (53), and the lower end surface of the sealing rubber ring (54) is in sliding sealing contact with the filter plate group (4); A valve ring (55) is fixed in the through hole (41), a guide sleeve (56) is fixed at the upper end of the valve ring (55) in the through hole (41), a valve stem (57) is slidably connected in the guide sleeve (56), the valve stem (57) and the valve ring (55) are slidably sealed, and a support spring is sleeved on the valve stem (57); The electromagnetic driver (58) is vertically arranged on the machine plate seat (51) and is connected to the end of the valve stem (57).

4. The clean room high-efficiency energy-saving filtration system according to claim 1, characterized in that: An air-uniform cavity (42) is provided above the interior of the filter plate group (4), the lower ends of the through holes (41) are connected to the air-uniform cavity (42), and a plurality of air-uniform holes (43) are provided below the air-uniform cavity (42); A ventilation cavity (44) is provided below the air-uniform cavity (42) in the filter plate group (4), and a plurality of one-way exhaust holes (45) are evenly distributed on one side of the ventilation cavity (44).

5. The clean room high-efficiency energy-saving filtration system according to claim 4, characterized in that: A sealing plate (46) is vertically slidably provided in each of the filter plate groups (4), and a plurality of diversion holes corresponding to the one-way exhaust holes (45) are provided on the sealing plate (46). A plurality of lifting springs are provided on the lower end surface of the sealing plate (46). In the absence of an external force, the sealing plate (46) is used to completely connect the diversion holes with the one-way exhaust holes (45) through the elastic force of the lifting springs; A shift plate (61) is symmetrically hinged on both sides of the machine plate seat (51) in the exhaust assembly (6), one end of the shift plate (61) abuts against the side edge of the sealing plate (46), and a control cylinder (62) is provided on the machine plate seat (51), and the control cylinder (62) is connected to the other end of the shift plate (61).

6. The clean room high-efficiency energy-saving filtration system according to claim 1, characterized in that: An activated carbon filter plate group (47) is vertically arranged in the plurality of filter plate groups (4) located on the left side of the frame (31), and a nano filter plate group is vertically arranged in the remaining filter plate groups (4); The activated carbon filter plate group (47) and the nano filter plate group in each filter plate group (4) are arranged in increasing order of filtration accuracy from left to right.

7. The clean room high efficiency and energy saving filtering system according to claim 6, characterized in that: Two telescopic guide rods (26) are symmetrically arranged on the frame (31), one end of each of the two telescopic guide rods (26) is connected to the filter plate group (4) located on the outside, and a hinge frame (27) is arranged on the side wall of the filter plate group (4). The cross section of the hinge frame (27) is arranged in an X-shaped structure, and adjacent hinge frames (27) are connected to each other. Medium-efficiency fiber filter materials are detachably installed between the filter plate groups (4).

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