Multi-station cooperative control method and system for equipment

Abstract

The invention relates to the technical field of automation control, in particular to an equipment multi-station cooperative control method and system.The method comprises the steps that in the starting stage, a first state parameter and a preset first standard state parameter are compared, a second state parameter and a preset second standard state parameter are compared, and a first deviation value is obtained; according to the first deviation value, whether starting control is carried out on the bottom XY platform working end and the top XY platform working end or not is determined; in the shutdown stage, the third state parameter is compared with a preset third standard state parameter, the fourth state parameter is compared with a preset fourth standard state parameter to obtain a second deviation value, and whether the alarm device is started or not is determined according to the second deviation value; the operation precision of the equipment and the system stability are improved, the production efficiency and the product quality are improved, the risk and the loss are reduced, and the operation convenience is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of automatic control, and more particularly, to a method and system for collaborative control of multiple workstations of a device. Background Art

[0002] In the fields of semiconductor manufacturing, microelectronic assembly, precision machining, etc., the flip-chip die bonding process is a key technical means. This process involves precisely positioning and mounting a chip onto a substrate, requiring extremely high precision and reliability. To achieve such high-precision operations, a control system with multi-axis collaborative motion is usually required. Among them, the XY platform is a common positioning device. Traditional XY platform positioning systems often only focus on the positioning accuracy of a single platform. In complex processes such as flip-chip die bonding, the upper and lower double XY platforms must achieve a high degree of synchronization and precise relative positioning. This is because the relative position between the top XY platform (such as for chip positioning) and the bottom XY platform (such as for substrate positioning) directly affects the quality of die bonding. The prior art faces the following challenges when dealing with the positioning of double XY platforms. When the device is started, it is necessary to ensure that the upper and lower XY platforms can quickly and accurately enter the predetermined working state. Any deviation in the initial positioning may lead to the failure of subsequent operations. When the device stops or is emergently stopped, how to ensure that the two platforms can stop safely and accurately at the predetermined positions to avoid damage to the workpiece or the device. During continuous production, due to factors such as temperature changes and mechanical wear, the actual working state of the platform may deviate from the ideal state. Therefore, it is necessary to monitor the state parameters in real time and make adjustments according to the deviation. When the deviation exceeds the allowable range, an effective alarm mechanism is required to notify the operator or automatically trigger protective measures. Summary of the Invention

[0003] In view of this, in order to overcome the deficiencies of the prior art, the present invention provides a method and system for collaborative control of multiple workstations of a device, aiming to solve at least one of the problems raised in the above background art.

[0004] To achieve the above object, the present invention provides the following technical solutions:

[0005] On the one hand, an embodiment of the present invention provides a method for collaborative control of multiple workstations of a device, the method comprising the following steps:

[0006] In the startup phase, obtain the first state parameter of the working end of the bottom XY platform and the second state parameter of the working end of the top XY platform, compare the first state parameter with a preset first standard state parameter, and compare the second state parameter with a preset second standard state parameter to obtain a first deviation value, and determine whether to perform startup control on the working end of the bottom XY platform and the working end of the top XY platform according to the first deviation value;

[0007] During the shutdown phase, obtain the third state parameter of the working end of the bottom XY platform and the fourth state parameter of the working end of the top XY platform, compare the third state parameter with a preset third standard state parameter, and compare the fourth state parameter with a preset fourth standard state parameter to obtain a second deviation value, and determine whether to activate the alarm device according to the second deviation value.

[0008] Optionally, the first state parameter includes a temperature parameter and a position parameter.

[0009] Optionally, the second state parameter includes a temperature parameter and a position parameter.

[0010] Optionally, the first standard state parameter, the second standard state parameter, the third standard state parameter, and the fourth standard state parameter all include a preset temperature parameter and a preset position parameter.

[0011] Optionally, the preset temperature parameter is 0°C to 45°C; the preset position parameter is the initial position parameter of the working end of the bottom XY platform and the working end of the top XY platform;

[0012] Wherein the temperature parameter of 0°C to 15°C is the first-level threshold, the temperature parameter of 15°C to 30°C is the second-level threshold, and the temperature parameter of 30°C to 45°C is the third-level threshold;

[0013] Set the initial position of the bottom XY platform as the origin (0, 0), and the allowable deviation range is ±d;

[0014] Set the initial position of the top XY platform as the origin (0, 0), and the allowable deviation range is ±d;

[0015] Where the deviation range of the first-level threshold is (0, 0), the deviation range of the second-level threshold is (0, d) or (0, -d); the deviation range of the third-level threshold is (d, 2d) or (-2d, -d); the deviation range of the fourth-level threshold is (2d, 3d) or (-3d, -2d); the deviation range of the fifth-level threshold is more than 3d.

[0016] Optionally, when the temperature parameters of the working end of the bottom XY platform and the working end of the top XY platform are within 0°C to 45°C and the position parameters of the working end of the bottom XY platform and the working end of the top XY platform are the same as the initial position parameters, the first deviation value is 0, and start control is performed on the working end of the bottom XY platform and the working end of the top XY platform.

[0017] Optionally, the third state parameter and the fourth state parameter are vibration parameters during the operation of the device.

[0018] Optionally, the second standard state parameter is that the vibration displacement generated during the operation of the device is 0 mm. When the third state parameter and the fourth state parameter are 0 mm, the second deviation value is 0, and the device shuts down normally without starting the alarm device; when the third state parameter and the fourth state parameter are not 0 mm, the second deviation value is not 0, and the alarm device is started after the device shuts down normally.

[0019] On the other hand, an embodiment of the present invention provides a multi-station collaborative control system for a device, including:

[0020] A moving module, the moving module includes a bottom XY platform and a top XY platform, the bottom XY platform and the top XY platform are arranged corresponding to each other up and down, the bottom XY platform is used to fix the substrate in the die bonding process, and the top XY platform is used to fix the robotic arm;

[0021] A detection module, the detection module includes a position sensor, a temperature sensor, and a vibration sensor, and the position sensor, the temperature sensor, and the vibration sensor are arranged on the moving module;

[0022] A control module, the position sensor, the temperature sensor, and the vibration sensor are electrically connected to the control module;

[0023] The control module includes:

[0024] At least one processor;

[0025] At least one memory for storing at least one program;

[0026] When the at least one program is executed by the at least one processor, the at least one processor implements the method described in any one of the above.

[0027] Optionally, the system further includes an alarm device, the alarm device is electrically connected to the control module, and the control module controls the alarm device to work.

[0028] The beneficial effects of the present invention are as follows: The present invention discloses a method and system for collaborative control of multiple workstations of a device. By obtaining and comparing the deviation between the state parameters and the standard state parameters during the startup phase, the position of the XY platform can be accurately adjusted, ensuring high-precision operation. Precise startup control helps improve the quality of the final product and reduce the scrap rate caused by inaccurate positioning. During the shutdown phase, by monitoring and comparing the state parameters, accidental shutdowns caused by excessive deviations can be prevented, ensuring the stability of the production process and avoiding mechanical shocks or damages caused by excessive deviations, thereby extending the service life of the device. The rapid and accurate adjustment of the XY platform position reduces the device adjustment time and improves production efficiency. By reducing device failures caused by deviations, the number of device maintenance times and maintenance costs are reduced. When a large deviation is detected, the device operation is stopped in a timely manner, avoiding possible safety accidents, direct economic losses caused by device failures or product scraps, unnecessary device operations and adjustments, saving energy consumption, accurate operations reducing material waste, improving material utilization rate, reducing manual intervention, realizing a more automated and intelligent production process, providing an intuitive interface and operation process for easy monitoring and management by operators. The adoption of advanced control methods provides a technical advantage for enterprises and enhances their market competitiveness. The control method in this application not only improves the operation accuracy and system stability of the device, but also improves production efficiency and product quality, reduces risks and losses, optimizes resource utilization, enhances operation convenience, and enhances the market competitiveness of enterprises. These benefits together constitute the comprehensive value and practicality of this application, providing strong technical support for high-precision application fields such as flip-chip die bonding process. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0030] Figure 1 Flowchart of the method and system for collaborative control of multiple workstations of the device provided by the embodiment of the present invention;

[0031] Figure 2 Front view of the system for collaborative control of multiple workstations of the device provided by the embodiment of the present invention.

[0032] Wherein: 1. Bottom XY platform; 2. Top XY platform; 3. Substrate; 4. Robot arm. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0033] The following will clearly and completely describe the concept, specific structure and technical effects of the present invention in combination with embodiments and drawings to fully understand the purpose, solution and effects of the present invention. It should be noted that, without conflict, the embodiments in the present application and the features in the embodiments may be combined with each other.

[0034] As described in the background art, traditional XY platform positioning systems often only focus on the positioning accuracy of a single platform. However, in complex processes such as flip-chip die bonding, the upper and lower double XY platforms must achieve high synchronization and precise relative positioning. This is because the relative position between the top XY platform (e.g., for chip positioning) and the bottom XY platform (e.g., for substrate positioning) directly affects the quality of die bonding. The prior art faces the following challenges when dealing with the positioning of double XY platforms. When the equipment is started, it is necessary to ensure that the upper and lower XY platforms can quickly and accurately enter the predetermined working state. Any deviation in the initial positioning may lead to the failure of subsequent operations. When the equipment is shut down or stops emergently, how to ensure that the two platforms can stop safely and accurately at the predetermined positions to avoid damage to the workpiece or the equipment. During continuous production, due to factors such as temperature changes and mechanical wear, the actual working state of the platforms may deviate from the ideal state. Therefore, it is necessary to monitor the state parameters in real time and make adjustments according to the deviations. When the deviation exceeds the allowable range, an effective alarm mechanism is required to notify the operator or automatically trigger protective measures.

[0035] To address the above issues, a multi-station collaborative control method and system for equipment proposed in this application are particularly applicable to the up-and-down dual XY platform positioning strategy in the flip-chip die bonding process. By obtaining and comparing the deviation between the status parameters and the standard status parameters during the startup phase, the position of the XY platform can be precisely adjusted to ensure high-precision operation. Precise startup control helps improve the quality of the final product and reduce the scrap rate caused by inaccurate positioning. During the shutdown phase, by monitoring and comparing the status parameters, accidental shutdowns caused by excessive deviations can be prevented, ensuring the stability of the production process and avoiding mechanical shocks or damages caused by excessive deviations, thereby extending the service life of the equipment. Rapid and accurate adjustment of the XY platform position reduces the equipment adjustment time and improves production efficiency. By reducing equipment failures caused by deviations, the number of equipment maintenance times and maintenance costs are reduced. When a large deviation is detected, the equipment operation is stopped in a timely manner to avoid possible safety accidents, direct economic losses caused by equipment failures or product scraps, unnecessary equipment operation and adjustment, and save energy consumption. Accurate operation reduces material waste, improves material utilization rate, reduces manual intervention, and realizes a more automated and intelligent production process. An intuitive interface and operation process are provided for easy monitoring and management by operators. The adoption of advanced control methods provides a technical advantage for enterprises and enhances their market competitiveness. The control method in this application not only improves the operation accuracy and system stability of the equipment, but also increases production efficiency and product quality, reduces risks and losses, optimizes resource utilization, enhances operation convenience, and strengthens the market competitiveness of enterprises. These benefits together constitute the comprehensive value and practicality of this application and provide strong technical support for high-precision application fields such as the flip-chip die bonding process.

[0036] Reference Figure 1 , such as Figure 1 The following shows a multi-station collaborative control method for equipment provided by an embodiment of the present invention. The method includes the following steps:

[0037] S100. During the startup phase, obtain the first status parameter of the working end of the bottom XY platform and the second status parameter of the working end of the top XY platform. Compare the first status parameter with the preset first standard status parameter and the second status parameter with the preset second standard status parameter respectively to obtain the first deviation value. Determine whether to perform startup control on the working end of the bottom XY platform and the working end of the top XY platform according to the first deviation value;

[0038] S200. During the shutdown phase, obtain the third state parameter of the working end of the bottom XY platform and the fourth state parameter of the working end of the top XY platform, compare the third state parameter with a preset third standard state parameter and the fourth state parameter with a preset fourth standard state parameter respectively to obtain a second deviation value, and determine whether to activate the alarm device according to the second deviation value.

[0039] It should be noted that the working end of the bottom XY platform and the working end of the top XY platform are arranged corresponding to each other up and down; the first standard state parameter, the second standard state parameter of the working end of the bottom XY platform, and the third standard state parameter and the fourth standard state parameter of the working end of the top XY platform are preset.

[0040] In some specific embodiments, the first state parameter includes a temperature parameter and a position parameter.

[0041] In some specific embodiments, the second state parameter includes a temperature parameter and a position parameter.

[0042] It should be understood that temperature is one of the key factors affecting the performance of the equipment. By monitoring the temperature parameters, it is possible to ensure that the equipment operates within an appropriate temperature range, avoiding performance degradation or damage caused by overheating or overcooling. Monitoring the position parameters ensures the precise positioning of the equipment components in space, which is crucial for precision operations such as the flip-chip die-bonding process, ensuring high-precision operations. Monitoring the temperature parameters can promptly detect problems such as equipment overheating, preventing equipment failures caused by abnormal temperatures, thereby reducing downtime and maintenance costs. Monitoring the position parameters helps to promptly detect and correct position offsets, preventing mechanical collisions or product defects caused by inaccurate positioning. Controlling the temperature parameters helps to maintain the stability of the production process, thereby ensuring product consistency and quality. Precise monitoring of the position parameters ensures the accuracy of each operation step, directly affecting the quality and performance of the final product. By real-time monitoring and adjusting the temperature and position parameters, production interruptions and adjustment times caused by improper parameters can be reduced, improving production efficiency. Stable temperature and position parameters help to maintain the continuity of the production process, reducing downtime and waiting times. Monitoring the temperature parameters helps to prevent safety accidents that may be caused by overheating, such as equipment burnout or fires. Monitoring the position parameters can prevent accidental injuries or damage caused by position offsets of components such as robotic arms. Effective control of the temperature parameters can reduce the heat loss of the equipment, extending the service life of the equipment. Precise control of the position parameters helps to reduce mechanical wear caused by inaccurate positions, extending the service life of the equipment. By monitoring the first state parameters and the second state parameters including temperature parameters and position parameters, the control method in the present application can comprehensively monitor the equipment state, prevent equipment failures, improve product quality, optimize production efficiency, enhance safety performance, extend the equipment life, improve operation convenience, and reduce maintenance costs. These benefits together enhance the performance and reliability of the entire production system, bringing significant economic and technological advantages to the enterprise.

[0043] In some specific embodiments, the first standard state parameter, the second standard state parameter, the third standard state parameter, and the fourth standard state parameter all include a preset temperature parameter and a preset position parameter.

[0044] In some specific embodiments, the preset temperature parameter is from 0°C to 45°C; the preset position parameter is the initial position parameters of the working end of the bottom XY platform and the working end of the top XY platform;

[0045] Wherein the temperature parameter from 0°C to 15°C is the first-level threshold, the temperature parameter from 15°C to 30°C is the second-level threshold, and the temperature parameter from 30°C to 45°C is the third-level threshold;

[0046] Set the initial position of the bottom XY platform as the origin (0, 0), and the allowable deviation range is ±d;

[0047] Set the initial position of the top XY platform as the origin (0, 0), and the allowable deviation range is ±d;

[0048] Among them, the deviation range of the first-level threshold is (0, 0), the deviation range of the second-level threshold is (0, d) or (0, -d); the deviation range of the third-level threshold is (d, 2d) or (-2d, -d); the deviation range of the fourth-level threshold is (2d, 3d) or (-3d, -2d); the deviation range of the fifth-level threshold is more than 3d.

[0049] Exemplarily, the value of d is 3mm, which can be set according to the actual precision requirements.

[0050] In some specific embodiments, when the temperature parameters of the working ends of the bottom XY platform and the top XY platform are within 0°C to 45°C and the position parameters of the working ends of the bottom XY platform and the top XY platform are the same as the initial position parameters, the first deviation value is 0, and start control is performed on the working ends of the bottom XY platform and the top XY platform.

[0051] In some specific embodiments, the third state parameter and the fourth state parameter are vibration parameters during the operation of the device.

[0052] In some specific embodiments, the second standard state parameter is that the vibration displacement generated during the operation of the device is 0mm. When the third state parameter and the fourth state parameter are 0mm, the second deviation value is 0, the device stops normally, and the alarm device is not started; when the third state parameter and the fourth state parameter are not 0mm, the second deviation value is not 0, and the alarm device is started after the device stops normally.

[0053] It should be understood that by monitoring vibration parameters, accidental shutdowns caused by excessive vibration can be prevented, ensuring the stability of the production process. For example, sudden vibrations may indicate loose or worn components. Detecting and addressing these issues in a timely manner can avoid long-term production interruptions, prevent mechanical shocks or damages caused by excessive vibrations, and thus extend the service life of the equipment. Vibration is one of the main factors leading to equipment fatigue and early failure. Controlling vibration can significantly improve the reliability and durability of the equipment. Vibration control helps reduce product defects caused by vibration, such as cracks and misalignments, improving product quality. In precision manufacturing processes, even minor vibrations can result in out-of-spec product dimensions or incomplete structures. A stable production environment ensures product consistency, meeting the requirements of high-quality standards. Product consistency is one of the core competitiveness in the manufacturing industry, especially in mass production, where each product must meet strict specification requirements. Rapid and accurate adjustment of the equipment status reduces equipment adjustment time and improves production efficiency. On the production line, every minute of downtime causes significant production losses. Therefore, reducing adjustment time is directly related to cost savings. By reducing equipment failures caused by vibration, the frequency and cost of equipment maintenance are reduced. Regular maintenance is necessary, but frequent repairs not only increase costs but also may affect the production schedule. Stopping the equipment operation or activating the alarm device in a timely manner when large vibrations are detected avoids potential safety accidents. Abnormal vibrations of the equipment may be a precursor to serious mechanical problems. Detecting and addressing them in a timely manner can avoid potential safety accidents and avoid direct economic losses caused by equipment failures or product rejects. Equipment failures and product rejects not only cause direct financial losses but also may damage customer trust and brand reputation. Unnecessary equipment operation and adjustment are avoided, saving energy consumption. Energy is a part of production costs. Effective energy management can reduce production costs and environmental impact. Accurate operation reduces material waste and improves material utilization. In industries where material costs account for a relatively high proportion, improving material utilization can be directly translated into economic benefits. By monitoring the first state parameters and the second state parameters including temperature parameters and position parameters, the control method in this application can comprehensively monitor the equipment status, prevent equipment failures, improve product quality, optimize production efficiency, enhance safety performance, extend the equipment life, improve operation convenience, and reduce maintenance costs. These benefits together enhance the performance and reliability of the entire production system, bringing significant economic and technological advantages to the enterprise.

[0054] Reference Figure 2 , The embodiment of the present invention further provides a multi-station collaborative control system for equipment, including:

[0055] Moving module, the moving module includes a bottom XY platform 1 and a top XY platform 2, the bottom XY platform 1 and the top XY platform 2 are arranged corresponding to each other up and down, the bottom XY platform 1 is used to fix the substrate 3 in the die bonding process, and the top XY platform 2 is used to fix the robotic arm 4;

[0056] Detection module, the detection module includes a position sensor, a temperature sensor, and a vibration sensor, and the position sensor, the temperature sensor, and the vibration sensor are arranged on the moving module;

[0057] Control module, the position sensor, the temperature sensor, and the vibration sensor are electrically connected to the control module;

[0058] The control module includes:

[0059] At least one processor;

[0060] At least one memory for storing at least one program;

[0061] When the at least one program is executed by the at least one processor, the at least one processor implements the method described in any one of the above.

[0062] The content in the above method embodiments is applicable to this embodiment. The functions specifically implemented in this embodiment are the same as those in the above method embodiments, and the beneficial effects achieved are also the same as those in the above method embodiments, and will not be elaborated here.

[0063] In some specific embodiments, the system further includes an alarm device, the alarm device is electrically connected to the control module, and the control module controls the alarm device to work.

[0064] It should be understood that by obtaining and comparing the state parameters of the XY platform with the standard state parameters during the startup phase, the position of the XY platform can be accurately adjusted, thereby ensuring the high precision of the operation. Accurate startup control helps to improve the quality of the final product and reduce the scrap rate caused by inaccurate positioning. During the shutdown phase, by monitoring and comparing the state parameters, accidental shutdowns caused by excessive deviations can be prevented, ensuring the stability of the production process. By integrating the moving module, the detection module, and the control module, as well as the alarm device electrically connected to the control module, this system not only improves the operation precision and system stability of the equipment, but also improves production efficiency and product quality, reduces risks and losses, optimizes resource utilization, enhances operation convenience, and strengthens the market competitiveness of the enterprise. These benefits together constitute the comprehensive value and practicality of this system, providing strong technical support for high-precision application fields such as flip-chip die bonding process.

[0065] Although the description of the present disclosure has been quite detailed and has particularly described several of the described embodiments, it is not intended to be limited to any of these details or embodiments or any particular embodiment, but rather should be regarded as effectively covering the intended scope of the present disclosure by reference to the appended claims, considering the prior art to provide a broad interpretation of these claims. In addition, the present disclosure has been described above in terms of embodiments foreseeable by the inventors for the purpose of providing a useful description, and non-substantive modifications to the present disclosure that are not currently foreseeable may still represent equivalent modifications of the present disclosure.

Claims

1. A method for collaborative control of multiple workstations of equipment, characterized in that: The method comprises: In the startup phase, a first state parameter of the bottom XY platform working end and a second state parameter of the top XY platform working end are obtained, the first state parameter is compared with a preset first standard state parameter, and the second state parameter is compared with a preset second standard state parameter to obtain a first deviation value, and whether to perform startup control on the bottom XY platform working end and the top XY platform working end is determined according to the first deviation value; During the shutdown stage, the third state parameter of the bottom XY platform working end and the fourth state parameter of the top XY platform working end are obtained, and the third state parameter is compared with the preset third standard state parameter, and the fourth state parameter is compared with the preset fourth standard state parameter to obtain a second deviation value, and it is determined whether to start the alarm device according to the second deviation value.

2. A method for multi-station collaborative control of equipment according to claim 1, characterized in that: The first state parameter includes a temperature parameter and a position parameter.

3. A method for multi-station collaborative control of equipment according to claim 1, characterized in that: The second state parameter includes a temperature parameter and a position parameter.

4. The method for multi-station coordinated control of equipment according to claim 1, characterized in that: The first standard state parameter, the second standard state parameter, the third standard state parameter and the fourth standard state parameter all include a preset temperature parameter and a preset position parameter.

5. A method for multi-station coordinated control of equipment according to claim 4, characterized in that: The preset temperature parameter is 0°C to 45°C; the preset position parameter is the initial position parameter of the bottom XY platform working end and the top XY platform working end; The temperature parameter 0°C to 15°C is a first-level threshold, the temperature parameter 15°C to 30°C is a second-level threshold, and the temperature parameter 30°C to 45°C is a third-level threshold; Set the initial position of the bottom XY platform to the origin (0,0), and the allowable deviation range is ±d; Set the initial position of the top XY platform to the origin (0,0), and the allowable deviation range is ±d; The level 1 threshold deviation range is (0,0); the level 2 threshold deviation range is (0,d) or (0,-d); the level 3 threshold deviation range is (d,2d) or (-2d,-d); the level 4 threshold deviation range is (2d,3d) or (-3d,-2d); and the level 5 threshold deviation range is more than 3d.

6. A method for coordinating multiple workstations of equipment according to claim 4, characterized in that: When the temperature parameters of the bottom XY platform working end and the top XY platform working end are within the range of 0°C to 45°C and the position parameters of the bottom XY platform working end and the top XY platform working end are the same as the initial position parameters, the first deviation value is 0, and the bottom XY platform working end and the top XY platform working end are started and controlled.

7. The method for multi-station coordinated control of equipment according to claim 1, characterized in that: The third state parameter and the fourth state parameter are vibration parameters during the operation of the equipment.

8. A method for multi-station coordinated control of equipment according to claim 7, characterized in that: The second standard state parameter is that the vibration displacement generated during the operation of the equipment is 0mm. When the third state parameter and the fourth state parameter are 0mm, the second deviation value is 0, the equipment shuts down normally, and the alarm device is not activated. When the third state parameter and the fourth state parameter are not 0mm, the second deviation value is not 0, and the alarm device is activated after the equipment shuts down normally.

9. A multi-station collaborative control system for equipment, characterized in that: include: A moving module, the moving module includes a bottom XY platform and a top XY platform, the bottom XY platform and the top XY platform are arranged correspondingly up and down, the bottom XY platform is used to fix the substrate in the die bonding process, and the top XY platform is used to fix the robot arm; A detection module, the detection module includes a position sensor, a temperature sensor, and a vibration sensor, and the position sensor, the temperature sensor, and the vibration sensor are arranged on the mobile module; A control module, wherein the position sensor, the temperature sensor, and the vibration sensor are electrically connected to the control module; The control module comprises: at least one processor; at least one memory for storing at least one program; When the at least one program is executed by the at least one processor, the at least one processor implements the method according to any one of claims 1 to 8.

10. The equipment multi-station collaborative control system according to claim 9, characterized in that: The system further comprises an alarm device, wherein the alarm device is electrically connected to the control module, and the control module controls the alarm device to operate.

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