Radio frequency de-embedding method and device
By combining passive electromagnetic field simulation and RF test results, using the through-through and transmission line test structures, the diagonal elements of the ABCD matrix of the device under test are solved, and the accuracy of RF device characteristics is improved.
Patent Information
- Application Number
- CN202311773746.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-21
- Publication Date
- 2025-06-24
AI Technical Summary
The existing RF deembedding technology fails in deep millimeter wave and terahertz bands with frequencies exceeding 40-50GHz, and cannot accurately describe the nature of distribution characteristics at high frequencies.
Using a method combining passive electromagnetic field simulation and RF test results, the RF deembedding and electromagnetic field simulation verification are realized through the test structure of a transmission line with a given length, and the primary and secondary diagonal elements of the ABCD matrix of the device under test are calculated.
The applicable frequency upper limit of RF deembedding technology is improved, and the accuracy of RF device characteristics testing in deep millimeter wave and terahertz bands is achieved.
Smart Images
Figure CN120197326A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of radio frequency de-embedding, and more particularly, to a radio frequency de-embedding method and apparatus. Background Art
[0002] In order to test the characteristics of radio frequency devices, there must be interfaces or fixtures for connecting radio frequency test connectors, or test bonding pads for attaching radio frequency probes, as well as wires connecting the interfaces, fixtures or bonding pads to the ports of the device under test. However, these interfaces, fixtures, bonding pads and wires will inevitably introduce parasitic parameters when measuring the radio frequency characteristics of the device under test. In order to obtain the port characteristics of the device under test from the original data of radio frequency testing, it is necessary to remove or strip the influence of the above parasitic parameters and push the measurement reference plane from the test connector or probe tip to the port of the device under test. This is the so-called radio frequency de-embedding technology.
[0003] Radio frequency de-embedding technology is the basis for testing the characteristics of all radio frequency devices. The existing technology representative of radio frequency de-embedding is the open-circuit - short-circuit method based on lumped equivalent circuits, which is based on a lumped equivalent circuit including three parallel and three series parasitic elements (the schematic diagram of its equivalent circuit is as shown in Figure 2 ), and requires two de-embedding structures for open-circuit and short-circuit measurements (the top view schematic diagrams of the on-wafer radio frequency test open-circuit and short-circuit de-embedding structures are shown in Figure 3 ) to successively strip three parasitic parallel admittances and three series impedances.
[0004] Its specific de-embedding algorithm is as follows:
[0005] Y dut =[(Y rqw -Y open ) -1 -(Y short -Y open ) -1 -1
[0006] where Y rqw 、Y open 、Y short and Y dut are respectively the original test data of the two-port radio frequency small-signal 2x2 admittance parameter matrix of the device under test, the test data of the corresponding open-circuit and short-circuit de-embedding structures for measurement, and the data of the intrinsic device under test with the relevant parasitic parameters stripped as the de-embedding result.
[0007] However, as the operating frequency increases from microwave to millimeter-wave and even terahertz bands, traditional RF de-embedding methods such as open-circuit and short-circuit based on lumped-element equivalent circuits have become ineffective because they can no longer accurately describe the essence of the distributed characteristics at high frequencies. The current consensus in the relevant academic and industrial circles is that their applicable frequency upper limit is approximately 40 - 50 GHz. Therefore, it is necessary to solve the technical problems of RF de-embedding for frequencies exceeding 40 - 50 GHz and penetrating into the millimeter-wave and terahertz bands.
[0008] This section aims to provide background or context for the embodiments of the present invention stated in the claims. The descriptions herein are not admitted to be prior art merely because they are included in this section. Summary of the Invention
[0009] In order to increase the applicable frequency upper limit of RF de-embedding technology and ensure accurate testing of the characteristics of RF devices penetrating into the millimeter-wave and terahertz bands, the present invention proposes a RF de-embedding method and device.
[0010] To achieve the above object, according to one aspect of the present invention, there is provided a RF de-embedding method, the method comprising:
[0011] Calculating the main diagonal elements of the ABCD matrix of the device under test according to the ABCD matrix of the overall structure composed of the device under test, the left cascaded structure of the device under test, and the right cascaded structure of the device under test, and the ABCD matrix of the through de-embedding structure;
[0012] Calculating the main diagonal elements of the ABCD matrix of the transmission line according to the ABCD matrix of the transmission line de-embedding structure and the ABCD matrix of the through de-embedding structure;
[0013] Performing passive electromagnetic field simulation on the transmission line, and selecting the main diagonal elements of the ABCD matrix of the transmission line obtained by the simulation. Referring to the calculated main diagonal elements of the ABCD matrix of the transmission line as the target, adjusting the parameters of the passive electromagnetic field simulation and performing fitting to verify the passive electromagnetic field simulation;
[0014] Calculating the off-diagonal elements of the ABCD matrix of the device under test by using the off-diagonal elements of the ABCD matrix of the transmission line obtained by the verified passive electromagnetic field simulation, the ABCD matrix of the overall structure, the ABCD matrix of the through de-embedding structure, and the ABCD matrix of the transmission line de-embedding structure;
[0015] Obtaining the de-embedded ABCD matrix of the device under test according to the calculated main diagonal elements and off-diagonal elements of the ABCD matrix of the device under test.
[0016] Optionally, the RF de-embedding method further includes:
[0017] Calculating two-port network parameters of the device under test according to the de-embedded ABCD matrix of the device under test, where the two-port network parameters include: transmission parameters, impedance parameters, admittance parameters, hybrid parameters, and scattering parameters.
[0018] Optionally, perform passive electromagnetic field simulation on the transmission line, select the main diagonal elements of the ABCD matrix of the transmission line obtained by the simulation, and use the main diagonal elements of the ABCD matrix of the transmission line calculated as the target. By adjusting the parameters of the passive electromagnetic field simulation and performing fitting, verify the passive electromagnetic field simulation. Specifically, it includes:
[0019] When verifying the passive electromagnetic field simulation, by adjusting the parameters of the passive electromagnetic field simulation and performing fitting, make the main diagonal elements of the ABCD matrix of the transmission line obtained by the simulation approach the main diagonal elements of the ABCD matrix of the transmission line calculated.
[0020] To achieve the above object, according to another aspect of the present invention, there is provided a RF de-embedding device, and the device includes:
[0021] A main diagonal element calculation unit of the device under test, configured to calculate the main diagonal elements of the ABCD matrix of the device under test according to the ABCD matrix of the overall structure composed of the device under test, the left cascaded structure of the device under test, and the right cascaded structure of the device under test, and the ABCD matrix of the through de-embedding structure;
[0022] A main diagonal element calculation unit of the transmission line, configured to calculate the main diagonal elements of the ABCD matrix of the transmission line according to the ABCD matrix of the transmission line de-embedding structure and the ABCD matrix of the through de-embedding structure;
[0023] A simulation verification unit, configured to perform passive electromagnetic field simulation on the transmission line, select the main diagonal elements of the ABCD matrix of the transmission line obtained by the simulation, and use the main diagonal elements of the ABCD matrix of the transmission line calculated as the target. By adjusting the parameters of the passive electromagnetic field simulation and performing fitting, verify the passive electromagnetic field simulation;
[0024] A secondary diagonal element calculation unit of the device under test, configured to calculate the secondary diagonal elements of the ABCD matrix of the device under test by using the secondary diagonal elements of the ABCD matrix of the transmission line obtained by the verified passive electromagnetic field simulation, the ABCD matrix of the overall structure, the ABCD matrix of the through de-embedding structure, and the ABCD matrix of the transmission line de-embedding structure;
[0025] The de-embedding ABCD matrix determination unit is configured to obtain the de-embedded ABCD matrix of the device under test according to the calculated main diagonal elements and sub-diagonal elements of the ABCD matrix of the device under test.
[0026] Optionally, the radio frequency de-embedding device further includes:
[0027] The two-port network parameter determination unit is configured to obtain the two-port network parameters of the device under test according to the de-embedded ABCD matrix of the device under test, where the two-port network parameters include: transmission parameters, impedance parameters, admittance parameters, hybrid parameters, and scattering parameters.
[0028] To achieve the above object, according to another aspect of the present invention, there is also provided a computer device, including a memory, a processor, and a computer program stored on the memory and executable on the processor. When the processor executes the computer program, the steps of the above radio frequency de-embedding method are implemented.
[0029] To achieve the above object, according to another aspect of the present invention, there is also provided a computer-readable storage medium, on which a computer program / instructions are stored. When the computer program / instructions are executed by a processor, the steps of the above radio frequency de-embedding method are implemented.
[0030] The beneficial effects of the present invention are:
[0031] The present invention helps to increase the upper limit of the applicable frequency of radio frequency de-embedding technology and helps to achieve accurate testing of the characteristics of radio frequency devices in the deep millimeter wave and terahertz frequency bands. BRIEF DESCRIPTION OF THE DRAWINGS
[0032] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings. In the drawings:
[0033] Figure 1 is a flowchart of the radio frequency de-embedding method according to an embodiment of the present invention;
[0034] Figure 2 is an equivalent circuit diagram of the existing technology representing the open-circuit - short-circuit method for radio frequency de-embedding;
[0035] Figure 3 is a top view schematic diagram of the on-wafer radio frequency test open-circuit and short-circuit co-test de-embedding structure of the open-circuit - short-circuit method;
[0036] Figure 4It is a schematic diagram of the test structure of the device under test and its related parasitic parameters;
[0037] Figure 5 It is a schematic diagram of a through-embedding structure;
[0038] Figure 6 It is a schematic diagram of a transmission line de-embedding structure;
[0039] Figure 7 It is a block diagram of the RF de-embedding device according to an embodiment of the present invention;
[0040] Figure 8 It is a schematic diagram of a computer device according to an embodiment of the present invention. Detailed implementation manners
[0041] In order to enable those skilled in the art to better understand the solution of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
[0042] Those skilled in the art should understand that the embodiments of the present invention can be provided as a method, a system, or a computer program product. Therefore, the present invention can take the form of a completely hardware embodiment, a completely software embodiment, or an embodiment combining software and hardware aspects. Moreover, the present invention can take the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.
[0043] It should be noted that the terms "including" and "having" and any variations thereof in the specification and claims of the present invention and the above-mentioned accompanying drawings are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or units does not necessarily have to be limited to those clearly listed steps or units, but may include other steps or units that are not clearly listed or are inherent to these processes, methods, products, or devices.
[0044] It should be noted that, without conflict, the embodiments in the present invention and the features in the embodiments can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.
[0045] Based on the distributed equivalent circuit, the present invention proposes a method that combines passive electromagnetic field simulation and relevant radio frequency test results, and can simultaneously achieve radio frequency de-embedding and electromagnetic field simulation verification in the frequency range extending deep into the millimeter wave and terahertz bands with only two co-test structures, namely a through-line and a transmission line of a given length. This solves the problem of breaking through the applicable frequency upper limit of traditional radio frequency de-embedding techniques such as the open-circuit - short-circuit method based on lumped equivalent circuits, thereby expanding and raising the applicable frequency of radio frequency de-embedding and radio frequency device characteristic testing based thereon to deep into the millimeter wave or even terahertz band, laying a good foundation for the radio frequency characteristic characterization of related millimeter wave and terahertz devices with higher frequencies and the extraction of their device models.
[0046] Figure 1 is a flowchart of the radio frequency de-embedding method according to an embodiment of the present invention. As Figure 1 shown, in an embodiment of the present invention, the radio frequency de-embedding method of the present invention includes steps S101 to S105.
[0047] In step S101, according to the ABCD matrix of the overall structure composed of the device under test, the left cascaded structure of the device under test, and the right cascaded structure of the device under test, and the ABCD matrix of the through-line de-embedding structure, the main diagonal elements of the ABCD matrix of the device under test are calculated.
[0048] It should be noted that the ABCD matrix is a common two-port network parameter matrix, which is a 2x2 matrix. The corresponding two-port network parameters are called transmission parameters.
[0049] As Figure 4As shown, the ABCD matrix of the device under test (DUT) that is the target of de-embedding in the present invention is set as D. In the following embodiments of the present invention, D represents both the intrinsic DUT itself and its ABCD matrix. Let the cascaded structure formed from the RF test connector through the corresponding interface or fixture or from the tip of the RF probe through the corresponding test bond pad and its related connection lines to the left port of the DUT be L. L is the left cascaded structure of the DUT described in step S101 above. In the following embodiments of the present invention, L represents both the left cascaded structure of the DUT and its ABCD matrix. Let the cascaded structure formed from the RF test connector through the corresponding interface or fixture or from the tip of the RF probe through the corresponding test bond pad and its related connection lines to the right port of the DUT be R. R is the right cascaded structure of the DUT described in step S101 above. In the following embodiments of the present invention, R represents both the right cascaded structure of the DUT and its ABCD matrix. The present invention sets the overall structure from the left RF test connector or the tip of the RF probe to the right RF test connector or the tip of the RF probe as A. A is the overall structure described in step S101 above. In the following embodiments of the present invention, A represents both the overall structure itself and its ABCD matrix. According to the cascading relationship, A = LDR.
[0050] Figure 5 is a schematic diagram of a through de-embedding structure, as Figure 5 shown, the through de-embedding structure is a combination of the left cascaded structure L and the right cascaded structure R. As Figure 5 shown, the present invention sets the through structure of the companion de-embedding structure as T. In the following embodiments of the present invention, T represents both the through de-embedding structure itself and its ABCD matrix. L and R are directly cascaded to form the through de-embedding structure T. According to the cascading relationship, T = LR.
[0051] In the present invention, the ABCD matrix of the overall structure A is obtained from the original test results, and the ABCD matrix of the through de-embedding structure T is obtained from the test results of the through de-embedding structure T. In the present invention, the main diagonal elements of the ABCD matrix of the DUT D, which is the target of RF de-embedding, are calculated using the ABCD matrix of the overall structure A and the ABCD matrix of the through de-embedding structure T that is the companion de-embedding structure.
[0052] Step S102, calculate the main diagonal elements of the ABCD matrix of the transmission line according to the ABCD matrix of the transmission line de-embedding structure and the ABCD matrix of the through de-embedding structure.
[0053] Figure 6 is a schematic diagram of a transmission line de-embedding structure, as Figure 6 shown, the transmission line de-embedding structure is a combination of the left cascaded structure L, the transmission line F, and the right cascaded structure R. AsFigure 6 As shown, the transmission line de-embedding structure of the present invention is M. In the following embodiments of the present invention, M represents both the transmission line de-embedding structure itself and its ABCD matrix. In the following embodiments of the present invention, F represents both the transmission line itself and its ABCD matrix. The transmission line de-embedding structure M is a structure formed by cascading L, a transmission line F and R which are made of the same materials as L and R but with a length set to a given value l from left to right. According to the cascading relationship, M = LFR.
[0054] In the present invention, the ABCD matrix of the transmission line de-embedding structure M is obtained from the test results of the transmission line de-embedding structure M.
[0055] In the present invention, the main diagonal elements of the ABCD matrix of the transmission line F with a given length l inside the transmission line de-embedding structure M are calculated based on the ABCD matrix of the transmission line de-embedding structure M and the ABCD matrix of the through de-embedding structure T. Considering the symmetry of the transmission line F, its main diagonal elements are equal.
[0056] Step S103: Perform passive electromagnetic field simulation on the transmission line, and select the main diagonal elements of the ABCD matrix of the transmission line obtained from the simulation. Taking the main diagonal elements of the ABCD matrix of the transmission line calculated as the target, calibrate the passive electromagnetic field simulation by adjusting the parameters of the passive electromagnetic field simulation and performing fitting.
[0057] In the present invention, use passive electromagnetic field simulation software to simulate the two-port network frequency response characteristics of the transmission line as the de-embedding structure to be measured, obtain the corresponding ABCD matrix F that varies with frequency, and select its diagonal elements f 11 and f 22 Compare the frequency response characteristics with the results calculated using the transmission line de-embedding structure M and the through de-embedding structure T. Then, calibrate the electromagnetic field simulation appropriately by adjusting the material parameters such as the conductivity of the metal, the dielectric constant of the dielectric material, and the loss tangent value, which are difficult to accurately measure, and / or the structural and geometric dimension parameters, which are difficult to accurately measure, used for electromagnetic field simulation modeling and performing fitting.
[0058] In an embodiment of the present invention, calibrating the passive electromagnetic field simulation in this step specifically includes:
[0059] When calibrating the passive electromagnetic field simulation, adjust the parameters of the passive electromagnetic field simulation and perform fitting to make the main diagonal elements of the ABCD matrix of the transmission line obtained from the simulation approach the main diagonal elements of the ABCD matrix of the transmission line calculated.
[0060] It should be noted that the approach here means that the numerical difference is within a preset range.
[0061] In one embodiment of the present invention, when calibrating the passive electromagnetic field simulation, the present invention adjusts the parameters of the passive electromagnetic field simulation and performs fitting to make the main diagonal elements of the ABCD matrix of the transmission line obtained by the simulation equal to the main diagonal elements of the ABCD matrix of the transmission line calculated.
[0062] Step S104: Calculate the off-diagonal element of the ABCD matrix of the device under test by using the off-diagonal element of the ABCD matrix of the transmission line obtained by the calibrated passive electromagnetic field simulation, the ABCD matrix of the overall structure, the ABCD matrix of the through de-embedding structure, and the ABCD matrix of the transmission line de-embedding structure.
[0063] The F matrix (including the off-diagonal elements f 12 and f 21 ) at different frequencies obtained by the electromagnetic field simulation calibrated through the above step S103 of the present invention will be used as known quantities to participate in the calculation of the off-diagonal element of the ABCD matrix of the device under test D.
[0064] Step S105: Obtain the de-embedded ABCD matrix of the device under test according to the calculated main diagonal element and off-diagonal element of the ABCD matrix of the device under test.
[0065] The ABCD matrix of the present invention is a 2x2 matrix. After obtaining the main diagonal element and off-diagonal element, the complete ABCD matrix can be obtained, which the present invention calls the de-embedded ABCD matrix of the device under test.
[0066] Compared with the prior art based on lumped equivalent circuits, the biggest difference of the present invention is that the parasitic networks from the left and right radio frequency test probes or probes to the left and right ports of the device under test are regarded as a three-part cascaded structure with the device under test, and the distributed characteristics essence of the cascaded structure is fully considered without making any lumped equivalent circuit assumptions, which is particularly suitable for the characteristic testing of radio frequency devices at higher frequencies, especially deep into the millimeter wave and even terahertz frequency bands. The present invention improves the applicable frequency upper limit of the radio frequency de-embedding technology and ensures the accurate testing of the characteristics of radio frequency devices in the deep millimeter wave and terahertz frequency bands.
[0067] In one embodiment of the present invention, the radio frequency de-embedding method of the present invention further includes:
[0068] The two-port network parameters of the device under test are obtained based on the de-embedded ABCD matrix of the device under test, where the two-port network parameters include: transmission parameters (ABCD parameters), impedance parameters (Z parameters), admittance parameters (Y parameters), hybrid parameters (H parameters), and scattering parameters (S parameters). And various parameters refer to the elements of the corresponding matrix (including two main diagonal elements and two off-diagonal elements).
[0069] In the present invention, the goal of RF de-embedding is to obtain the two-port network parameters of the device under test. The ABCD parameters can be obtained through the above steps S101 to S105. Furthermore, depending on specific needs, other two-port network parameters can be obtained by conversion based on the already obtained ABCD parameters.
[0070] In an embodiment of the present invention, the ABCD matrix of the overall structure A is expressed as:
[0071]
[0072] In an embodiment of the present invention, the ABCD matrix of the through de-embedding structure T is expressed as:
[0073]
[0074] In an embodiment of the present invention, the ABCD matrix of the device under test D is expressed as:
[0075]
[0076] In an embodiment of the present invention, in step S101, based on the ABCD matrix of the overall structure composed of the device under test, the left cascaded structure of the device under test, and the right cascaded structure of the device under test, and the ABCD matrix of the through de-embedding structure, calculating the main diagonal elements of the ABCD matrix of the device under test specifically includes:
[0077] Calculating the main diagonal elements of the ABCD matrix of the device under test through the following formula:
[0078]
[0079]
[0080] In an embodiment of the present invention, the ABCD matrix of the transmission line de-embedding structure M is expressed as:
[0081]
[0082] In an embodiment of the present invention, the ABCD matrix of the transmission line F is expressed as:
[0083]
[0084] In an embodiment of the present invention, calculating the main diagonal elements of the ABCD matrix of the transmission line according to the ABCD matrix of the transmission line de-embedding structure and the ABCD matrix of the through de-embedding structure in the above step S102 specifically includes:
[0085] Calculating the main diagonal elements of the ABCD matrix of the transmission line through the following formula:
[0086]
[0087] In an embodiment of the present invention, calculating the off-diagonal elements of the ABCD matrix of the device under test by using the off-diagonal elements of the ABCD matrix of the transmission line, the ABCD matrix of the overall structure, the ABCD matrix of the through de-embedding structure, and the ABCD matrix of the transmission line de-embedding structure obtained from the verified passive electromagnetic field simulation in the above step S104 specifically includes:
[0088] Calculating the off-diagonal elements of the ABCD matrix of the device under test through the following formula:
[0089]
[0090]
[0091] Compared with the prior art based on lumped equivalent circuits, the biggest difference of the present invention is that the parasitic networks from the left and right RF test probes or probes to the left and right ports of the device under test are regarded as a three-part cascaded structure with the device under test (i.e., the overall structure described in step S101), and the distributed characteristics essence of this cascaded structure is fully considered without making any lumped equivalent circuit assumptions, which is particularly suitable for the RF de-embedding technology necessary for testing the characteristics of RF devices at higher frequencies, especially deep into the millimeter-wave and even terahertz frequency bands.
[0092] The present invention first forms a through test structure cascaded by the remaining left and right parts by extracting the device under test from the three-part cascaded structure (i.e., the overall structure described in step S101), and then combines the measured data of the device under test and the through test structure to realize the de-embedding of the main diagonal elements of the ABCD matrix of the device under test.
[0093] At the same time, the present invention forms a transmission line test structure by extracting the device under test from the three-part cascaded structure and replacing it with a transmission line of a given length, and uses the same method as above for this transmission line as a device under test to realize the de-embedding of the main diagonal elements of the ABCD matrix of the transmission line.
[0094] The present invention performs passive electromagnetic field simulation on the transmission line with the given length, and selects the main diagonal elements of the ABCD matrix obtained from the simulation as the target, referring to the main diagonal elements of the ABCD matrix of the transmission line obtained by the above-mentioned de-embedding. By adjusting the material and structural dimension parameters that are required for the relevant passive electromagnetic field simulation modeling and are difficult to accurately measure, the two-port frequency characteristics of the transmission line are fitted, and the electromagnetic field simulation is appropriately verified.
[0095] Finally, the present invention uses the off-diagonal elements in the ABCD matrix parameters of the transmission line obtained from the verified electromagnetic field simulation, combines with the measured data of the device under test, the through and the transmission line co-test structure, to realize the de-embedding of the off-diagonal elements of the ABCD matrix of the device under test, and then converts them into the required two-port network parameters as needed to complete the final RF de-embedding.
[0096] Because the distribution characteristics essence of this cascaded structure is fully considered, the present invention can effectively increase the applicable frequency upper limit restricted by traditional RF de-embedding techniques such as the open-circuit - short-circuit method, and provide accurate test data for the RF testing, characteristic characterization and related model parameter extraction of RF devices in the millimeter-wave and even terahertz frequency bands.
[0097] Since the present invention can realize the de-embedding of the main diagonal elements of the ABCD matrix of the device under test by using the through co-test structure, the cut-off frequency fT of the high-frequency transistor, which is a representative of active RF devices, and the complex propagation constant γ of the RF transmission line, which is a representative of passive distributed RF components (including the attenuation constant α as the real part and the phase constant β as the imaginary part) and their frequency characteristics can be obtained directly by RF testing without the assistance of passive electromagnetic field simulation.
[0098] In view of the RF de-embedding method flow given by the present invention, while realizing the RF de-embedding for the characteristic testing of RF devices, it also completes the verification of the passive electromagnetic field simulation of the RF transmission line, which is a special case of the device under test, to a certain extent. Thus, within a certain range, it provides relatively accurate and efficient simulation data for the establishment of millimeter-wave and even terahertz frequency band RF models of passive distributed components such as RF transmission lines and the extraction of their model parameters instead of measured data.
[0099] It can be seen from the above embodiments that the present invention solves the problem of breaking through the applicable frequency upper limit of traditional RF de-embedding techniques such as the open-circuit - short-circuit method based on lumped equivalent circuits, thereby expanding and increasing the applicable frequency of RF de-embedding and RF device characteristic testing based on it to be able to penetrate into the millimeter-wave and even terahertz frequency bands, laying a good foundation for the RF characteristic characterization of related millimeter-wave and terahertz devices with higher frequencies and the extraction of their device models.
[0100] It should be noted that the steps shown in the flowchart of the accompanying drawings can be executed in a computer system such as a set of computer-executable instructions. And although the logical order is shown in the flowchart, in some cases, the steps shown or described can be executed in a different order than here.
[0101] Based on the same inventive concept, an embodiment of the present invention further provides a radio frequency de-embedding device, which can be used to implement the radio frequency de-embedding method described in the above embodiments, as described in the following embodiments. Since the principle of the radio frequency de-embedding device to solve problems is similar to that of the radio frequency de-embedding method, the embodiments of the radio frequency de-embedding device can refer to the embodiments of the radio frequency de-embedding method, and the repeated parts will not be elaborated. Hereinafter, the term "unit" or "module" can be a combination of software and / or hardware that can implement a predetermined function. Although the devices described in the following embodiments are preferably implemented in software, implementation in hardware, or a combination of software and hardware is also possible and contemplated.
[0102] Figure 7 is a structural block diagram of the radio frequency de-embedding device according to an embodiment of the present invention, as Figure 7 shown. In an embodiment of the present invention, the radio frequency de-embedding device of the present invention includes:
[0103] The main diagonal element calculation unit 1 of the device under test is used to calculate the main diagonal elements of the ABCD matrix of the device under test according to the ABCD matrix of the overall structure composed of the device under test, the left cascaded structure of the device under test, and the right cascaded structure of the device under test, and the ABCD matrix of the through de-embedding structure;
[0104] The main diagonal element calculation unit 2 of the transmission line is used to calculate the main diagonal elements of the ABCD matrix of the transmission line according to the ABCD matrix of the transmission line de-embedding structure and the ABCD matrix of the through de-embedding structure;
[0105] The simulation verification unit 3 is used to perform passive electromagnetic field simulation on the transmission line, select the main diagonal elements of the ABCD matrix of the transmission line obtained by the simulation, and take the main diagonal elements of the ABCD matrix of the transmission line calculated by reference as the target, and verify the passive electromagnetic field simulation by adjusting the parameters of the passive electromagnetic field simulation and performing fitting;
[0106] The secondary diagonal element calculation unit 4 of the device under test is used to calculate the secondary diagonal elements of the ABCD matrix of the device under test by using the secondary diagonal elements of the ABCD matrix of the transmission line, the ABCD matrix of the overall structure, the ABCD matrix of the through de-embedding structure, and the ABCD matrix of the transmission line de-embedding structure obtained by the verified passive electromagnetic field simulation;
[0107] The de-embedded ABCD matrix determination unit 5 is configured to obtain the de-embedded ABCD matrix of the device under test according to the calculated main diagonal elements and sub-diagonal elements of the ABCD matrix of the device under test.
[0108] In an embodiment of the present invention, the radio frequency de-embedding device of the present invention further includes:
[0109] The two-port network parameter determination unit is configured to obtain the two-port network parameters of the device under test according to the de-embedded ABCD matrix of the device under test, where the two-port network parameters include: transmission parameters, impedance parameters, admittance parameters, hybrid parameters, and scattering parameters.
[0110] In an embodiment of the present invention, the simulation verification unit 3 is specifically configured to, when verifying the passive electromagnetic field simulation, approximate the main diagonal elements of the ABCD matrix of the transmission line obtained by simulation to the calculated main diagonal elements of the ABCD matrix of the transmission line by adjusting the parameters of the passive electromagnetic field simulation and performing fitting.
[0111] In an embodiment of the present invention, the ABCD matrix of the overall structure is expressed as:
[0112]
[0113] The ABCD matrix of the through de-embedding structure is expressed as:
[0114]
[0115] The ABCD matrix of the device under test is expressed as:
[0116]
[0117] The main diagonal element calculation unit 1 of the device under test is specifically configured to calculate the main diagonal elements of the ABCD matrix of the device under test through the following formula:
[0118]
[0119]
[0120] In an embodiment of the present invention, the ABCD matrix of the transmission line de-embedding structure is expressed as:
[0121]
[0122] The ABCD matrix of the transmission line is expressed as:
[0123]
[0124] The main diagonal element calculation unit 2 of the transmission line is specifically configured to calculate the main diagonal elements of the ABCD matrix of the transmission line through the following formula:
[0125]
[0126] In an embodiment of the present invention, the secondary diagonal element calculation unit 4 of the device under test is specifically configured to calculate the secondary diagonal elements of the ABCD matrix of the device under test through the following formula:
[0127]
[0128]
[0129] To achieve the above object, according to another aspect of the present application, a computer device is further provided. As Figure 8 shown, the computer device includes a memory, a processor, a communication interface, and a communication bus. A computer program that can run on the processor is stored on the memory. When the processor executes the computer program, the steps in the method of the above embodiment are implemented.
[0130] The processor may be a central processing unit (CPU). The processor may also be other general-purpose processors, digital signal processors (DSPs), application-specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. chips, or combinations of the above types of chips.
[0131] The memory, as a non-transitory computer-readable storage medium, can be used to store non-transitory software programs, non-transitory computer-executable programs, and units, such as the corresponding program units in the above method embodiments of the present invention. The processor executes various functional applications and work data processing of the processor by running the non-transitory software programs, instructions, and modules stored in the memory, that is, the method in the above method embodiments is implemented.
[0132] The memory may include a program storage area and a data storage area. Among them, the program storage area can store the operating system and application programs required for at least one function; the data storage area can store data created by the processor, etc. In addition, the memory may include high-speed random access memory, and may also include non-transitory memory, such as at least one disk storage device, a flash memory device, or other non-transitory solid-state storage devices. In some embodiments, the memory may optionally include a memory remotely provided with respect to the processor, and these remote memories can be connected to the processor through a network. Examples of the above-mentioned network include but are not limited to the Internet, an intranet, a local area network, a mobile communication network, and combinations thereof.
[0133] The one or more units are stored in the memory and, when executed by the processor, execute the methods in the above embodiments.
[0134] Specific details of the above computer device can be understood by referring to the corresponding relevant descriptions and effects in the above embodiments, and will not be elaborated here.
[0135] To achieve the above object, according to another aspect of the present application, there is also provided a computer-readable storage medium storing a computer program, and when the computer program is executed in a computer processor, it implements the steps in the above radio frequency de-embedding method. Those skilled in the art can understand that to implement all or part of the processes in the above embodiment methods, it can be completed by instructing relevant hardware through a computer program. The program can be stored in a computer-readable storage medium, and when the program is executed, it can include the processes of the embodiments of the above methods. Among them, the storage medium can be a magnetic disk, an optical disk, a read-only memory (ROM), a random access memory (RAM), a flash memory, a hard disk drive (abbreviation: HDD), or a solid-state drive (SSD), etc.; the storage medium can also include a combination of the above types of memories.
[0136] To achieve the above object, according to another aspect of the present application, there is also provided a computer program product including a computer program / instructions, and when the computer program / instructions are executed by a processor, they implement the steps of the above radio frequency de-embedding method.
[0137] Obviously, those skilled in the art should understand that the above-mentioned modules or steps of the present invention can be implemented by a general-purpose computing device. They can be concentrated on a single computing device or distributed over a network composed of multiple computing devices. Optionally, they can be implemented by program codes executable by the computing device, so that they can be stored in a storage device and executed by the computing device, or they can be separately fabricated into individual integrated circuit modules, or multiple modules or steps among them can be fabricated into a single integrated circuit module for implementation. Thus, the present invention is not limited to any specific combination of hardware and software.
[0138] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.
Claims
1. A radio frequency de-embedding method, characterized in that Including: Calculating the main diagonal elements of the ABCD matrix of the device under test according to the ABCD matrix of the overall structure composed of the device under test, the left cascaded structure of the device under test, and the right cascaded structure of the device under test, and the ABCD matrix of the through de-embedding structure; Calculating the main diagonal elements of the ABCD matrix of the transmission line according to the ABCD matrix of the transmission line de-embedding structure and the ABCD matrix of the through de-embedding structure; Performing passive electromagnetic field simulation on the transmission line, selecting the main diagonal elements of the ABCD matrix of the transmission line obtained by the simulation, taking the main diagonal elements of the ABCD matrix of the transmission line calculated as the target, and calibrating the passive electromagnetic field simulation by adjusting the parameters of the passive electromagnetic field simulation and performing fitting; Calculating the off-diagonal elements of the ABCD matrix of the device under test by using the off-diagonal elements of the ABCD matrix of the transmission line, the ABCD matrix of the overall structure, the ABCD matrix of the through de-embedding structure, and the ABCD matrix of the transmission line de-embedding structure obtained by the calibrated passive electromagnetic field simulation; Obtaining the de-embedded ABCD matrix of the device under test according to the calculated main diagonal elements and off-diagonal elements of the ABCD matrix of the device under test; 2. The radio frequency de-embedding method according to claim 1, wherein Also including: Calculating the two-port network parameters of the device under test according to the de-embedded ABCD matrix of the device under test, where the two-port network parameters include: transmission parameters, impedance parameters, admittance parameters, hybrid parameters, and scattering parameters; 3. The radio frequency de-embedding method according to claim 1, wherein Performing passive electromagnetic field simulation on the transmission line, selecting the main diagonal elements of the ABCD matrix of the transmission line obtained by the simulation, taking the main diagonal elements of the ABCD matrix of the transmission line calculated as the target, and calibrating the passive electromagnetic field simulation by adjusting the parameters of the passive electromagnetic field simulation and performing fitting, specifically including: When calibrating the passive electromagnetic field simulation, adjusting the parameters of the passive electromagnetic field simulation and performing fitting to make the main diagonal elements of the ABCD matrix of the transmission line obtained by the simulation approach the main diagonal elements of the ABCD matrix of the transmission line calculated; 4. The radio frequency de-embedding method according to claim 1, wherein The ABCD matrix of the overall structure is expressed as: The ABCD matrix of the through de-embedding structure is expressed as: The ABCD matrix of the device under test is expressed as: Calculating the main diagonal elements of the ABCD matrix of the device under test according to the ABCD matrix of the overall structure composed of the device under test, the left cascaded structure of the device under test, and the right cascaded structure of the device under test, and the ABCD matrix of the through de-embedding structure, specifically including: Calculating the main diagonal elements of the ABCD matrix of the device under test through the following formula:
5. The radio frequency de-embedding method according to claim 4, wherein The ABCD matrix of the transmission line de-embedding structure is expressed as: The ABCD matrix of the transmission line is expressed as: Calculating the main diagonal elements of the ABCD matrix of the transmission line according to the ABCD matrix of the transmission line de-embedding structure and the ABCD matrix of the through de-embedding structure, specifically including: The main diagonal elements of the ABCD matrix of the transmission line are calculated by the following formula:
6. The radio frequency de-embedding method according to claim 5, wherein Using the off-diagonal elements of the ABCD matrix of the transmission line obtained by the verified passive electromagnetic field simulation, the ABCD matrix of the overall structure, the ABCD matrix of the through de-embedding structure, and the ABCD matrix of the transmission line de-embedding structure, calculate the off-diagonal elements of the ABCD matrix of the device under test, specifically including: The off-diagonal elements of the ABCD matrix of the device under test are calculated by the following formula:
7. A radio frequency de-embedding device, characterized in that, Including: A main diagonal element calculation unit of the device under test, configured to calculate the main diagonal elements of the ABCD matrix of the device under test according to the ABCD matrix of the overall structure composed of the device under test, the left cascaded structure of the device under test, and the right cascaded structure of the device under test, and the ABCD matrix of the through de-embedding structure; A main diagonal element calculation unit of the transmission line, configured to calculate the main diagonal elements of the ABCD matrix of the transmission line according to the ABCD matrix of the transmission line de-embedding structure and the ABCD matrix of the through de-embedding structure; A simulation verification unit, configured to perform passive electromagnetic field simulation on the transmission line, select the main diagonal elements of the ABCD matrix of the transmission line obtained by the simulation, and use the calculated main diagonal elements of the ABCD matrix of the transmission line as the target, and verify the passive electromagnetic field simulation by adjusting the parameters of the passive electromagnetic field simulation and performing fitting; An off-diagonal element calculation unit of the device under test, configured to calculate the off-diagonal elements of the ABCD matrix of the device under test by using the off-diagonal elements of the ABCD matrix of the transmission line obtained by the verified passive electromagnetic field simulation, the ABCD matrix of the overall structure, the ABCD matrix of the through de-embedding structure, and the ABCD matrix of the transmission line de-embedding structure; An off-diagonal ABCD matrix determination unit, configured to obtain the de-embedded ABCD matrix of the device under test according to the calculated main diagonal elements and off-diagonal elements of the ABCD matrix of the device under test.
8. The radio frequency de-embedding device according to claim 7, characterized in that It further includes: A two-port network parameter determination unit, configured to obtain the two-port network parameters of the device under test according to the de-embedded ABCD matrix of the device under test, where the two-port network parameters include: transmission parameters, impedance parameters, admittance parameters, hybrid parameters, and scattering parameters.
9. A computer device, comprising a memory, a processor, and a computer program stored on the memory and executable on the processor, characterized in that, When the processor executes the computer program, the steps of the method according to any one of claims 1 to 6 are implemented.
10. A computer-readable storage medium having computer programs / instructions stored thereon, characterized in that, When the computer program / instructions are executed by the processor, the steps of the method according to any one of claims 1 to 6 are implemented.