Electronic-grade ammonia purification and distillation equipment and distillation method

Abstract

The invention discloses an electronic-grade ammonia purification and distillation equipment and a distillation method, which relate to the technical field of distillation towers, comprising an upper main tower, a lower main tower, several sealing components, a top tower barrel, a bottom tower barrel, a waste water pipe, a steam pipe and an output pipe, wherein the bottom tower barrel, the lower main tower, the upper main tower and the top tower barrel are arranged in sequence from bottom to top, and the bottom tower barrel, the lower main tower, the upper main tower and the top tower barrel are all connected by sealing components, the top of the top tower barrel is installed with an upper sealing plate, the bottom of the bottom tower barrel is installed with a lower sealing plate, the waste water pipe is connected below the lower sealing plate, the steam pipe is connected to the bottom tower barrel, the output pipe is connected above the upper sealing plate, a reflux pipe is connected between the output pipe and the top tower barrel, and several support frames are provided inside the upper main tower and the lower main tower, each support frame is provided with a filler plate, and the ammonia water is purified step by step and the doping solution is separated step by step by utilizing the characteristics of ammonia water having a low boiling point and a doping solution having a high boiling point.

Description

Technical Field

[0001] The present invention relates to the technical field of distillation towers, in particular to electronic-grade ammonia purification and distillation equipment and a distillation method. Background Art

[0002] Electronic-grade ammonia is a high-purity ammonia solution specifically designed for use in the electronics industry, such as semiconductor or integrated circuit manufacturing. It is mainly used in semiconductor manufacturing processes such as silicon wafer cleaning, photoresist removal, and wafer surface corrosion. It is often used in combination with hydrogen peroxide or hydrofluoric acid. Its electrical impurity content is extremely low, meeting the stringent purity requirements for chemicals in electronic component manufacturing. Existing distillation towers use traditional rubber for sealing in their structure, which is easily corroded in a strong alkaline environment, affecting the quality of the purified ammonia. Secondly, the temperature of the packing plates closer to the top of the tower is lower than that of the packing plates at the bottom of the tower, and there is a gradient of temperature decrease, resulting in a decrease in the distillation and purification efficiency of the distillation tower. In addition, the distillation tower needs to continuously consume a large amount of energy to maintain the temperature of steam vaporization, and the energy utilization rate is low. Summary of the Invention

[0003] The object of the present invention is to provide an electronic-grade ammonia purification and distillation device and a distillation method to solve the problems raised in the prior art.

[0004] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: an electronic grade ammonia purification and distillation equipment comprises an upper main tower, a lower main tower, several sealing components, a top tower barrel, a bottom tower barrel, a waste water pipe, a steam pipe and an output pipe, wherein the bottom tower barrel, the lower main tower, the upper main tower and the top tower barrel are arranged in sequence from bottom to top, and the bottom tower barrel, the lower main tower, the upper main tower and the top tower barrel are all connected by sealing components, an upper sealing plate is installed on the top of the top tower barrel, a lower sealing plate is installed on the bottom of the bottom tower barrel, the waste water pipe is connected to the bottom of the lower sealing plate, the steam pipe is connected to the bottom tower barrel, the output pipe is connected to the top of the upper sealing plate, and the output pipe is connected to the A reflux pipe is connected between the top tower cylinders. Several support frames are provided inside the upper main tower and the lower main tower. Each support frame is provided with a filler plate. The boiling point and evaporation point of the liquid ammonia water are low, and the boiling point and evaporation point of the doping solution are high. The steam flows upward in the distillation tower. The filler plate intercepts the acid foam and particulate matter in the steam. The steam reaches the top of the distillation tower and flows out through the output pipe. It is cooled by the heat dissipation pipe group in the output pipe. The high-boiling-point gas phase is liquefied first, and the liquid phase of the doping solution flows back into the distillation tower through the reflux pipe. The low-boiling-point gas phase is purified ammonia. After the ammonia water vapor is liquefied, it is transported from the output pipe to the subsequent process.

[0005] The refluxed doping solution liquid phase is the original liquid phase, and the steam output from the steam pipe is the original gas phase. The original liquid phase flows downward along the distillation tower, drips onto the Nth packing plate through the drainage of the guide plate, and meets the original gas phase on the Nth packing plate. The cooled original liquid phase is heated again, and the low-boiling point ammonia solution in the original liquid phase is evaporated. The partially vaporized low-boiling point ammonia solution forms a new gas phase with the original gas phase and rises. The high-boiling point impurity solution in the original gas phase is partially condensed, and the partially condensed impurity solution forms a new liquid phase with the original liquid phase and descends. After the distillation process, the purity of ammonia water in the new gas phase is greater than that in the original gas phase, the concentration of ammonia water in the new liquid phase is less than that in the original liquid phase, the light components increase, and the heavy components decrease. The concentration of ammonia water in the new liquid phase is close to zero, and the concentration of ammonia water in the new gas phase is close to 100%. Taking advantage of the low boiling point of ammonia water and the high boiling point of the doping solution, the ammonia water is purified step by step and the doping solution is separated step by step by partially vaporizing the original liquid phase and partially condensing the original gas phase.

[0006] Furthermore, the tops and bottoms of the upper main tower, lower main tower, top tower tube and bottom tower tube are all provided with upper flanges and lower flanges, the sealing assembly includes a rubber sealing ring and a spring sealing ring, the thickness of the inner ring of the spring sealing ring is less than the thickness of the outer ring, each of the upper flange and the lower flange is provided with a bevel, the upper flange and the lower flange are in contact with the spring sealing ring, the rubber sealing ring is located on the outer ring of the spring sealing ring, the rubber sealing ring is in sealing contact with the upper flange and the lower flange, the upper flange and the lower flange are connected by bolts and nuts, and in the process of connecting the upper flange and the lower flange by bolts and nuts, The rubber sealing ring and the spring sealing ring are placed at the interface at the same time. The spring sealing ring is made of elastic metal. The upper flange and the lower flange inclined surfaces squeeze the spring sealing ring so that the spring sealing ring slides and moves. The axis of the spring sealing ring is aligned with the axis of the upper flange and the lower flange. The spring sealing ring is in close contact with the inclined surfaces of the upper flange and the lower flange. The spring sealing ring is not easily corroded in a strong alkaline environment, which increases the connection sealing performance at the interface. The rubber sealing ring performs double sealing on the outer ring to prevent external dust from entering the interface. Compared with directly using rubber seals, it is more resistant to corrosion in a strong alkaline environment, enhances sealing performance, and extends service life.

[0007] Furthermore, a group of guide plates are arranged below each support frame, and the guide plates are evenly distributed in a circular shape. Each guide plate contacts the inner wall of the upper main tower, and several winding coils are evenly distributed in a ring shape inside each support frame.

[0008] Furthermore, a rotating shaft is provided between the interior of the top tower barrel and the bottom tower barrel, the rotating shaft passes through each support frame, the rotating shaft is rotatably connected to the support frame, a steam turbine is installed at the bottom of the rotating shaft, the height of the steam turbine is the same as the height of the steam pipe, the top of the rotating shaft passes through the upper sealing plate, and a magnet is provided at the position of each support frame on the rotating shaft. The temperature of the packing plate closer to the top of the tower is lower than that of the packing plate at the bottom of the tower. The steam input in the steam pipe directly drives the steam turbine to rotate, the steam turbine drives the rotating shaft to rotate, and the magnet rotates synchronously. The magnetic flux lines of the magnet pass through each winding coil, and through Lenz's law, an oscillating induced magnetic field is generated in the winding coil, and then an induced current is generated, which makes the winding coil generate heat, heats the support frame at the top of the tower, prevents the temperature of the tower top from decaying, and improves the efficiency of distillation and storage.

[0009] Furthermore, a limiting column is provided on the top of the upper sealing plate, and a piston is provided on the top of the upper sealing plate. The piston is slidably connected to the limiting column, and an annular curved groove is opened inside the piston. A pin is provided on the top of the rotating shaft, and the pin is slidably installed in the curved groove.

[0010] Furthermore, a water pump body is provided on the top of the upper sealing plate, and a water inlet and a water outlet are provided on the water pump body. The piston is slidably arranged in the water pump body, and a one-way valve is provided at the water inlet and the water outlet. The water inlet is connected to a heat dissipation pipe group, and the water outlet is connected to a pumping pipe. The heat dissipation pipe group passes through the output pipe, and the other end of the heat dissipation pipe group is connected to a circulation pipe. The rotating shaft drives the pin to rotate, and the pin drives the piston to slide up and down in the water pump body. The water in the water tank is pumped to the top of the tower, and the output pipe is cooled by the heat dissipation pipe group to assist in liquefaction of ammonia. The cooling water entering the circulation pipe quickly returns to the water tank under the action of gravity. During the reflux process, air is inhaled through the capillary, so that the cooling water produces dense bubbles, which helps the water to dissipate heat, reduces the density of the water, and makes the cooling water easier to extract and circulate.

[0011] Furthermore, a water tank is provided on one side of the bottom tower, and a semiconductor plate is provided in the middle of the water tank. The steam pipe passes through the side of the water tank close to the heating end of the semiconductor plate. The pumping pipe and the circulation pipe are located inside the water tank on the side close to the cooling end of the semiconductor plate. Several capillaries are spirally passed through the circulation pipe. The semiconductor plate cools the cooling water, heats the water on the steam pipe side, and keeps the steam warm.

[0012] A distillation method applicable to an electronic-grade ammonia purification distillation device comprises the following steps: S1: mixed steam enters the distillation device and drives the steam turbine to rotate;

[0013] S2: The mixed steam is distilled and purified through each layer of packing plates in the distillation equipment. Pure ammonia water flows out from the output pipe, and the doped solution is discharged from the waste water pipe.

[0014] S3: The steam turbine drives the shaft to rotate, and the shaft drives the piston to slide up and down in the water pump body, driving the cooling water to circulate and cool the output pipe.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] 1. Taking advantage of the low boiling point of ammonia water and the high boiling point of the doping solution, the ammonia water is purified step by step and the doping solution is separated step by step by partially vaporizing the original liquid phase and partially condensing the original gas phase;

[0017] 2. The spring seal is not easily corroded in a strong alkaline environment, which increases the connection sealing of the interface. The rubber seal is double-sealed on the outer ring to prevent external dust from entering the interface. Compared with directly using rubber seals, it is more resistant to strong alkaline environmental corrosion, enhances sealing and prolongs service life.

[0018] 3. The magnetic flux lines of the magnet pass through each winding coil, generating an oscillating induced magnetic field in the winding coil, and then generating an induced current, which makes the winding coil generate heat, heating the support frame at the top of the tower, preventing the temperature of the tower top from decaying, and improving the efficiency of distillation and storage. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 The overall structure of the present invention is shown in FIG. Figure 1 ;

[0020] Figure 2 The overall structure of the present invention is shown in FIG. Figure 2 ;

[0021] Figure 3 Schematic diagram of the structure of the sealing assembly of the present invention;

[0022] Figure 4 This is a schematic diagram of the internal structure of the upper main tower of the present invention;

[0023] Figure 5 Schematic diagram of part of the structure of the present invention Figure 1 ;

[0024] Figure 6 Schematic diagram of part of the structure of the present invention Figure 2 ;

[0025] Figure 7 Schematic diagram of the structure of the piston of the present invention;

[0026] Figure 8 It is a structural schematic diagram of the circulation pipe of the present invention.

[0027] In the figure: 1. Upper main tower; 2. Lower main tower; 3. Sealing assembly; 4. Upper flange; 5. Lower flange; 6. Rubber sealing ring; 7. Spring sealing ring; 8. Top tower; 9. Bottom tower; 10. Waste water pipe; 11. Steam pipe; 12. Water tank; 13. Semiconductor board; 14. Pumping pipe; 15. Circulation pipe; 16. Output pipe; 17. Return pipe; 18. Heat dissipation pipe group; 19. Upper sealing plate; 20. Lower sealing plate; 21. Support frame; 22. Filling plate; 23. Guide plate; 24. Steam turbine; 25. Rotating shaft; 26. Magnet; 27. Pin; 28. Piston; 29. Pump body; 30. Capillary tube. DETAILED DESCRIPTION

[0028] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0029] Example: Figures 1-8 As shown, the present invention provides a technical solution, an electronic grade ammonia purification and distillation equipment includes an upper main tower 1, a lower main tower 2, several sealing components 3, a top tower tube 8, a bottom tower tube 9, a waste water pipe 10, a steam pipe 11, a water tank 12 and an output pipe 16, the bottom tower tube 9, the lower main tower 2, the upper main tower 1 and the top tower tube 8 are arranged in sequence from bottom to top, the bottom tower tube 9, the lower main tower 2, the upper main tower 1 and the top tower tube 8 are connected by a sealing component 3, the top of the top tower tube 8 is installed with an upper sealing plate 19, the bottom of the bottom tower tube 9 is installed with a lower sealing plate 20, the waste water pipe 10 is connected below the lower sealing plate 20, the steam pipe 11 is connected to the bottom tower tube 9, the output pipe 16 is connected above the upper sealing plate 19, and the output pipe A reflux pipe 17 is connected between 16 and the top tower tube 8. Several support frames 21 are provided inside the upper main tower 1 and the lower main tower 2. Each support frame 21 is provided with a filler plate 22. The boiling point and evaporation point of the liquid ammonia water are low, and the boiling point and evaporation point of the doping solution are high. The steam flows upward in the distillation tower. The filler plate 22 intercepts the acid foam and particulate matter in the steam. The steam reaches the top of the distillation tower and flows out through the output pipe 16. It is cooled by the heat pipe group 18 in the output pipe 16. The high-boiling-point gas phase is liquefied first, and the liquid phase of the doping solution flows back into the distillation tower through the reflux pipe 17. The low-boiling-point gas phase is purified ammonia. After the ammonia water vapor is liquefied, it is transported to the subsequent process from the output pipe 16;

[0030] The refluxed doping solution liquid phase is the original liquid phase, and the steam output from the steam pipe 11 is the original gas phase. The original liquid phase flows downward along the distillation tower, and drips onto the Nth packing plate 22 through the drainage of the guide plate 23, and meets the original gas phase on the Nth packing plate 22. The cooled original liquid phase is heated again, and the low-boiling point ammonia solution in the original liquid phase is evaporated. The partially vaporized low-boiling point ammonia solution forms a new gas phase with the original gas phase and rises. The high-boiling point impurity solution in the original gas phase is partially condensed, and the partially condensed impurity solution forms a new liquid phase with the original liquid phase. Phase descends, and after the distillation process, the purity of ammonia water in the new gas phase is greater than that in the original gas phase, the concentration of ammonia water in the new liquid phase is less than that in the original liquid phase, the light component rises, and the heavy component decreases. The concentration of ammonia water in the new liquid phase is close to zero, and the concentration of ammonia water in the new gas phase is close to 100%. Taking advantage of the low boiling point of ammonia water and the high boiling point of the doping solution, the ammonia water is purified step by step and the doping solution is separated step by step by partially vaporizing the original liquid phase and partially condensing the original gas phase.

[0031] The top and bottom of the upper main tower 1, the lower main tower 2, the top tower tube 8 and the bottom tower tube 9 are all provided with an upper flange 4 and a lower flange 5. The sealing assembly 3 includes a rubber sealing ring 6 and a spring sealing ring 7. The thickness of the inner ring of the spring sealing ring 7 is less than the thickness of the outer ring. Each upper flange 4 and the lower flange 5 are provided with a bevel. The upper flange 4 and the lower flange 5 are in contact with the spring sealing ring 7. The rubber sealing ring 6 is located on the outer ring of the spring sealing ring 7. The rubber sealing ring 6 is in sealing contact with the upper flange 4 and the lower flange 5. The upper flange 4 and the lower flange 5 are connected by bolts and nuts. In the process of connecting the upper flange 4 and the lower flange 5 by bolts and nuts, the rubber sealing ring 6 is tightened. The sealing ring 6 and the spring sealing ring 7 are placed at the interface at the same time. The spring sealing ring 7 is made of elastic metal. The upper flange 4 and the lower flange 5 are inclined to squeeze the spring sealing ring 7, so that the spring sealing ring 7 slides and displaces. The axis of the spring sealing ring 7 is aligned with the axis of the upper flange 4 and the lower flange 5. The spring sealing ring 7 is in close contact with the inclined surfaces of the upper flange 4 and the lower flange 5. The spring sealing ring 7 is not easily corroded in a strong alkaline environment, which increases the connection sealing at the interface. The rubber sealing ring 6 performs double sealing on the outer ring to prevent external dust from entering the interface. Compared with directly using rubber seals, it is more resistant to corrosion in a strong alkaline environment, enhances sealing, and extends service life.

[0032] A group of guide plates 23 are arranged below each support frame 21. The group of guide plates 23 are evenly distributed in a circular shape. Each guide plate 23 contacts the inner wall of the upper main tower 1. Several winding coils are evenly distributed in a ring shape inside each support frame 21. A rotating shaft 25 is arranged between the top tower tube 8 and the bottom tower tube 9. The rotating shaft 25 passes through each support frame 21 and is rotatably connected to the support frame 21. A steam turbine 24 is installed at the bottom of the rotating shaft 25. The height of the steam turbine 24 is the same as that of the steam pipe 11. The top of the rotating shaft 25 passes through the upper cover plate 19. The rotating shaft 25 is connected to the support frame 21. 5, a magnet 26 is provided at a position corresponding to each support frame 21. The temperature of the packing plate 22 closer to the top of the tower is lower than that of the packing plate 22 at the bottom of the tower. The steam input from the steam pipe 11 directly drives the steam turbine 24 to rotate, and the steam turbine 24 drives the rotating shaft 25 to rotate, and the magnet 26 rotates synchronously. The magnetic flux lines of the magnet 26 pass through each winding coil, and according to Lenz's law, an oscillating induced magnetic field is generated in the winding coil, which in turn generates an induced current, causing the winding coil to generate heat, heating the support frame 21 at the top of the tower, preventing the temperature of the tower top from decaying, and improving the efficiency of distillation and storage.

[0033] A limiting column is provided on the top of the upper sealing plate 19, and a piston 28 is provided on the top of the upper sealing plate 19. The piston 28 is slidably connected to the limiting column. An annular curved groove is provided inside the piston 28. A pin 27 is provided on the top of the rotating shaft 25. The pin 27 is slidably installed in the curved groove. A water pump body 29 is also provided on the top of the upper sealing plate 19. A water inlet hole and a water outlet hole are provided on the water pump body 29. The piston 28 is slidably set in the water pump body 29. A one-way valve is provided at the water inlet hole and the water outlet hole. The water inlet hole is connected to the heat dissipation pipe group 18, and the water outlet hole is connected to the water pump pipe 14. The heat dissipation pipe group 18 passes through the output pipe 16, and the other end of the heat dissipation pipe group 18 is connected to the circulation pipe 15. A semiconductor plate 13 is provided in the middle of the water tank 12, and the steam pipe 11 passes through the side of the water tank 12 close to the heating end of the semiconductor plate 13 The pumping pipe 14 and the circulation pipe 15 are located on one side of the water tank 12 near the cooling end of the semiconductor plate 13. Several capillaries 30 are spirally arranged on the circulation pipe 15. The rotating shaft 25 drives the pin 27 to rotate, and the pin 27 drives the piston 28 to slide up and down in the water pump body 29. The water in the water tank 12 is pumped to the top of the tower and the output pipe 16 is cooled by the heat dissipation pipe group 18 to assist in the liquefaction of ammonia. The cooling water entering the circulation pipe 15 quickly flows back to the water tank 12 under the action of gravity. During the reflux process, air is inhaled through the capillary 30, causing dense bubbles in the cooling water, which helps the water to dissipate heat and reduce the density of the water, making it easier to extract and circulate the cooling water. The semiconductor plate 13 cools the cooling water, heats the water on the side of the steam pipe 11, and keeps the steam warm.

[0034] The working principle of the present invention is as follows: the boiling point and evaporation point of liquid ammonia water are low, and the boiling point and evaporation point of the doping solution are high. The steam flows upward in the distillation tower, and the filler plate 22 intercepts the acid foam and particulate matter in the steam. The steam reaches the top of the distillation tower and flows out through the output pipe 16. It is cooled by the heat dissipation pipe group 18 in the output pipe 16. The high-boiling-point gas phase is liquefied first, and the liquid phase of the doping solution flows back into the distillation tower through the reflux pipe 17. The low-boiling-point gas phase is purified ammonia. After the ammonia water vapor is liquefied, it is transported from the output pipe 16 to the subsequent process.

[0035] The refluxed doping solution liquid phase is the original liquid phase, and the steam output from the steam pipe 11 is the original gas phase. The original liquid phase flows downward along the distillation tower, and drips onto the Nth packing plate 22 through the drainage of the guide plate 23, and meets the original gas phase on the Nth packing plate 22. The cooled original liquid phase is heated again, and the low-boiling point ammonia solution in the original liquid phase is evaporated. The partially vaporized low-boiling point ammonia solution forms a new gas phase with the original gas phase and rises. The high-boiling point impurity solution in the original gas phase is partially condensed, and the partially condensed impurity solution forms a new liquid phase with the original liquid phase. Phase descends, and after the distillation process, the purity of ammonia water in the new gas phase is greater than that in the original gas phase, the concentration of ammonia water in the new liquid phase is less than that in the original liquid phase, the light component rises, and the heavy component decreases. The concentration of ammonia water in the new liquid phase is close to zero, and the concentration of ammonia water in the new gas phase is close to 100%. Taking advantage of the low boiling point of ammonia water and the high boiling point of the doping solution, the ammonia water is purified step by step and the doping solution is separated step by step by partially vaporizing the original liquid phase and partially condensing the original gas phase.

[0036] During the process of connecting the upper flange 4 and the lower flange 5 by bolts and nuts, the rubber sealing ring 6 and the spring sealing ring 7 are placed at the interface at the same time. The spring sealing ring 7 is made of elastic metal. The upper flange 4 and the lower flange 5 are inclined to squeeze the spring sealing ring 7, so that the spring sealing ring 7 slides and displaces. The axis of the spring sealing ring 7 is aligned with the axis of the upper flange 4 and the lower flange 5. The spring sealing ring 7 is in close contact with the inclined surfaces of the upper flange 4 and the lower flange 5. The spring sealing ring 7 is not easily corroded in a strong alkaline environment, which increases the connection sealing at the interface. The rubber sealing ring 6 performs double sealing on the outer ring to prevent external dust from entering the interface. Compared with directly using rubber seals, it is more resistant to corrosion in a strong alkaline environment, enhances sealing, and extends service life.

[0037] The temperature of the packing plate 22 closer to the top of the tower is lower than that of the packing plate 22 at the bottom of the tower. The steam input in the steam pipe 11 directly drives the steam turbine 24 to rotate, and the steam turbine 24 drives the rotating shaft 25 to rotate, and the magnet 26 rotates synchronously. The magnetic flux lines of the magnet 26 pass through each winding coil, and through Lenz's law, an oscillating induced magnetic field is generated in the winding coil, and then an induced current is generated, which makes the winding coil generate heat, heats the support frame 21 at the top of the tower, prevents the temperature of the top of the tower from decaying, and improves the efficiency of distillation and storage.

[0038] The rotating shaft 25 drives the pin 27 to rotate, and the pin 27 drives the piston 28 to slide up and down in the water pump body 29. The water in the water tank 12 is pumped to the top of the tower, and the output pipe 16 is cooled by the heat dissipation pipe group 18 to assist in the liquefaction of ammonia. The cooling water entering the circulation pipe 15 quickly flows back to the water tank 12 under the action of gravity. During the reflux process, air is inhaled through the capillary 30, causing dense bubbles in the cooling water, which helps the water to dissipate heat, reduce the density of the water, and make the cooling water easier to extract and circulate. The semiconductor plate 13 cools the cooling water, heats the water on the side of the steam pipe 11, and keeps the steam warm.

[0039] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the invention can be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the invention is defined by the appended claims, not the foregoing description, and all variations within the meaning and range of equivalents of the claims are intended to be included therein. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

Claims

1. An electronic grade ammonia purification and distillation equipment, characterized by: The invention comprises an upper main tower (1), a lower main tower (2), several sealing components (3), a top tower cylinder (8), a bottom tower cylinder (9), a waste water pipe (10), a steam pipe (11) and an output pipe (16), wherein the bottom tower cylinder (9), the lower main tower (2), the upper main tower (1) and the top tower cylinder (8) are arranged in sequence from bottom to top, and the bottom tower cylinder (9), the lower main tower (2), the upper main tower (1) and the top tower cylinder (8) are connected by the sealing components (3), and the top of the top tower cylinder (8) is installed with an upper sealing plate (19). The bottom of the bottom tower (9) is provided with a lower sealing plate (20), the waste water pipe (10) is connected to the bottom of the lower sealing plate (20), the steam pipe (11) is connected to the bottom tower (9), the output pipe (16) is connected to the top of the upper sealing plate (19), a return pipe (17) is connected between the output pipe (16) and the top tower (8), and a plurality of support frames (21) are provided inside the upper main tower (1) and the lower main tower (2), and a filler plate (22) is provided in each support frame (21); A group of guide plates (23) is provided below each support frame (21), and the guide plates (23) are evenly distributed in a circular shape. Each guide plate (23) contacts the inner wall of the upper main tower (1), and a plurality of winding coils are evenly distributed in a circular shape inside each support frame (21); A rotating shaft (25) is provided between the interiors of the top tower (8) and the bottom tower (9), the rotating shaft (25) passing through each support frame (21), the rotating shaft (25) being rotatably connected to the support frame (21), a steam turbine (24) being installed at the bottom of the rotating shaft (25), the height of the steam turbine (24) being the same as the height of the steam pipe (11), the top of the rotating shaft (25) passing through the upper sealing plate (19), and a magnet (26) being provided at a position on the rotating shaft (25) corresponding to each support frame (21); A limiting column is provided on the top of the upper sealing plate (19), a piston (28) is provided on the top of the upper sealing plate (19), the piston (28) is slidably connected to the limiting column, an annular curved groove is provided inside the piston (28), a pin (27) is provided on the top of the rotating shaft (25), and the pin (27) is slidably installed in the curved groove; A water pump body (29) is further provided on the top of the upper sealing plate (19). A water inlet hole and a water outlet hole are provided on the water pump body (29). The piston (28) is slidably provided in the water pump body (29). Both the water inlet hole and the water outlet hole are provided with a one-way valve. The water inlet hole is connected to a heat dissipation pipe group (18), and the water outlet hole is connected to a water pumping pipe (14). The heat dissipation pipe group (18) passes through the output pipe (16), and the other end of the heat dissipation pipe group (18) is connected to a circulation pipe (15).

2. The electronic-grade ammonia purification and distillation equipment according to claim 1, characterized in that: The top and bottom of the upper main tower (1), the lower main tower (2), the top tower tube (8) and the bottom tower tube (9) are all provided with an upper flange (4) and a lower flange (5); the sealing assembly (3) comprises a rubber sealing ring (6) and a spring sealing ring (7); the thickness of the inner ring of the spring sealing ring (7) is less than the thickness of the outer ring; each of the upper flange (4) and the lower flange (5) is provided with a bevel; the upper flange (4) and the lower flange (5) are in contact with the spring sealing ring (7); the rubber sealing ring (6) is located on the outer ring of the spring sealing ring (7); the rubber sealing ring (6) is in sealing contact with the upper flange (4) and the lower flange (5); the upper flange (4) and the lower flange (5) are connected by bolts and nuts.

3. The electronic-grade ammonia purification and distillation equipment according to claim 1, characterized in that: A water tank (12) is provided on one side of the bottom tower (9), and a semiconductor plate (13) is provided in the middle of the water tank (12). The steam pipe (11) passes through the side of the water tank (12) close to the heating end of the semiconductor plate (13). The pumping pipe (14) and the circulation pipe (15) are located inside the water tank (12) close to the cooling end of the semiconductor plate (13). Several capillaries (30) are provided on the circulation pipe (15) in a spiral line. The cooling water entering the circulation pipe (15) quickly flows back to the water tank (12) under the action of gravity. During the backflow process, air is sucked in through the capillaries (30), so that the cooling water produces dense bubbles.

4. A distillation method suitable for the electronic-grade ammonia purification and distillation equipment according to any one of claims 1 to 3, characterized in that: The method comprises the following steps: S1: the mixed steam enters the distillation equipment and drives the steam turbine (24) to rotate; S2: The mixed steam is distilled and purified through each layer of packing plate (22) in the distillation equipment, and the pure ammonia water flows out from the output pipe (16), and the doped solution is discharged from the waste water pipe (10); S3: The steam turbine (24) drives the rotating shaft (25) to rotate, and the rotating shaft (25) drives the piston (28) to slide up and down in the water pump body (29), driving the cooling water to circulate and cool the output pipe (16).

Images