Vibration suppression device and vibration suppression system comprising same

Abstract

The invention discloses a vibration suppression system and a vibration suppression device. The vibration suppression system comprises the vibration suppression device and a control unit. The vibration suppression device is arranged on a machining machine table and comprises a base, a rigid module, a driving module, a balance weight module and a damping module. The rigid module comprises a fixed seat, a guide rod and a moving part. The guide rods are connected with fixing seats. The moving part is movably arranged on the guide rod in the first axial direction. The driving module is used for driving the moving part to move in the first axial direction. The counterweight module comprises a counterweight mass unit and a guide piece. The counterweight mass unit is connected with the fixed seat and can move in the second axial direction through the guide piece. The damping module is arranged on the counterweight module. The control unit is used for controlling the machining machine table and controlling the driving module to change the position of the moving part in the first axial direction in real time according to the vibration frequency of the machining machine table, so that the vibration suppression device is matched with the vibration frequency of the machining machine table.

Description

Technical Field

[0001] The present invention relates to a vibration suppression device and a vibration suppression system including the same. Background Art

[0002] During the manufacturing or processing of workpieces, the processing machine tool is prone to vibration because its structure cannot withstand the cutting force. The vibration of the processing machine tool will cause many adverse effects, such as shortening the life of the spindle of the processing machine tool, accelerating the wear rate of the cutting tool, or affecting the surface quality of the workpiece (such as surface roughness), etc. However, if the manufacturing or processing intensity of the processing machine tool is reduced, the manufacturing or processing efficiency will be reduced. For example, if the cutting depth of the cutting tool is reduced to improve the vibration of the processing machine tool, the cutting efficiency will be reduced instead. Summary of the Invention

[0003] The present invention relates to a vibration suppression device and a vibration suppression system including the same.

[0004] According to an embodiment of the present invention, a vibration suppression system for a processing machine tool is provided. The vibration suppression system includes a vibration suppression device and a control unit. The vibration suppression device includes a base, a first rigid module, a first driving module, a first counterweight module, and a damping module. The base is disposed on the processing machine tool. The first rigid module includes a first fixing seat, a first guide rod, and a first moving member. One end of the first guide rod is connected to the first fixing seat. The first moving member is movably disposed on the first guide rod along a first axis. The first driving module is disposed on the base and configured to drive the first moving member to move along the first axis. The first counterweight module includes a first counterweight mass unit and a first linear guide. The first linear guide extends along a second axis. The first counterweight mass unit is connected to the first fixing seat and is movable along the second axis through the first linear guide. The second axis is perpendicular to the first axis. The damping module is disposed on the first counterweight module. The control unit is configured to control the processing machine tool and in real time control the first driving module to change the position of the first moving member along the first axis according to the vibration frequency of the processing machine tool, so that the vibration frequency of the vibration suppression device matches the vibration frequency of the processing machine tool.

[0005] According to another embodiment of the present invention, a vibration suppression device for suppressing the vibration of a processing machine tool is provided, which includes a base, a first rigid module, a first driving module, a first counterweight module, and a damping module. The base is disposed on the processing machine tool. The first rigid module includes a first fixing seat, a first guide rod, and a first moving member. One end of the first guide rod is connected to the first fixing seat. The first moving member is movably disposed on the first guide rod along a first axial direction. The first driving module is disposed on the base and configured to drive the first moving member to move along the first axial direction. The first counterweight module includes a first counterweight mass unit and a first linear guide. The first linear guide extends along a second axial direction. The first counterweight mass unit is connected to the first fixing seat and is movable along the second axial direction through the first linear guide. The second axial direction is perpendicular to the first axial direction. The damping module is disposed on the first counterweight module. The first driving module changes the position of the first moving member in the first axial direction in response to the vibration frequency of the processing machine tool, so that the vibration frequency of the vibration suppression device matches the vibration frequency of the processing machine tool.

[0006] For a better understanding of the above and other aspects of the present invention, the following specific embodiments are given and described in detail in conjunction with the accompanying drawings: Brief Description of the Drawings

[0007] Figure 1A is an embodiment of a vibration suppression system, showing a schematic diagram of the processing machine tool in a first posture;

[0008] Figure 1B is an embodiment of a vibration suppression system, showing a schematic diagram of the processing machine tool in a second posture;

[0009] Figure 2A is a front view of a vibration suppression device according to an embodiment of the present invention;

[0010] Figure 2B is Figure 2A a top view of the vibration suppression device;

[0011] Figure 3 is a schematic diagram of an embodiment of the damping module;

[0012] Figure 4 is a schematic diagram of an embodiment of the vibration suppression effect of the vibration suppression system;

[0013] Figure 5A is another embodiment of the vibration suppression system, showing a schematic diagram of the vibration mode of the processing machine tool being a swing head vibration mode;

[0014] Figure 5B is another embodiment of the vibration suppression system, showing a schematic diagram of the vibration mode of the processing machine tool being a nodding vibration mode;

[0015] Figure 6A is a schematic diagram of a vibration suppression device according to another embodiment of the present invention;

[0016] Figure 6B Is Figure 6A the right side view of the vibration suppression device.

[0017] Symbol Explanation

[0018] 100, 200: Vibration suppression device

[0019] 110: Base

[0020] 120: Rigid module

[0021] 120A: First rigid module

[0022] 120B: Second rigid module

[0023] 121: Fixed seat

[0024] 121A: First fixed seat

[0025] 121B: Second fixed seat

[0026] 122: Guide rod

[0027] 122A: First guide rod

[0028] 122B: Second guide rod

[0029] 123: Moving part

[0030] 123A: First moving part

[0031] 123B: Second moving part

[0032] 130: Driving module

[0033] 130A: First driving module

[0034] 130B: Second driving module

[0035] 131: Driving motor

[0036] 131A: First driving motor

[0037] 131B: Second driving motor

[0038] 132: Linear driving unit

[0039] 132A: First linear driving unit

[0040] 132B: Second linear driving unit

[0041] 140: Counterweight module

[0042] 140A: First counterweight module

[0043] 140B: Second counterweight module

[0044] 141: Counterweight mass unit

[0045] 1411: Connecting plate

[0046] 1412: Counterweight mass

[0047] 141A: First counterweight mass unit

[0048] 1411A: First connecting plate

[0049] 1412A: First counterweight mass

[0050] 141B: Second counterweight mass unit

[0051] 1411B: Second connecting plate

[0052] 1412B: Second counterweight mass

[0053] 142: Linear guide

[0054] 142A: First linear guide

[0055] 142B: Second linear guide

[0056] 142a: Slide block

[0057] 142Ba: Second slide block

[0058] 142b: Slide rail

[0059] 142Bb: Second slide rail

[0060] 150: Damping module

[0061] 151: First magnet group

[0062] 1511: First carrier

[0063] 1512: First magnet

[0064] 152: Second magnet group

[0065] 1521: Second carrier

[0066] 1522: Second magnet

[0067] 153: Metal plate

[0068] 300: Control unit

[0069] 310: First controller

[0070] 320: Second controller

[0071] 400: Storage unit

[0072] 1000, 2000: Vibration suppression system

[0073] 1100: Processing machine

[0074] 1110: Machine tool

[0075] 1120: Moving stage

[0076] 1130: Workbench

[0077] 1140: Upright frame

[0078] 1141: Linear guide rail

[0079] 1150: Spindle head

[0080] D1: First axial direction

[0081] D2: Second axial direction

[0082] S1: First side

[0083] S2: Second side

[0084] S3: Third side

[0085] S4: Fourth side

[0086] W: Vibration frequency spacing

[0087] WP: Workpiece Detailed implementation manners

[0088] The following will detail each embodiment of the present invention and be illustrated in conjunction with the accompanying drawings. In addition to these detailed descriptions, the present invention can be widely implemented in other embodiments, and any easy substitution, modification, and equivalent change of the said embodiments are included in the scope of the present invention and are subject to the subsequent patent scope. In the description of the specification, many specific details and implementation examples are provided to enable the reader to have a more complete understanding of the present invention; however, these specific details and implementation examples should not be regarded as limitations of the present invention. In addition, well-known steps or elements are not described in detail to avoid unnecessary limitations to the present invention.

[0089] Figure 1A is an embodiment of the vibration suppression system 1000, showing the processing machine 1100 in the first posture; Figure 1B is an embodiment of the vibration suppression system 1000, showing the processing machine 1100 in the second posture.

[0090] Please refer to Figure 1A and Figure 1B, the vibration suppression system 1000 can be used in a processing machine tool 1100, including a vibration suppression device 100, a control unit 300, and a storage unit 400. The vibration suppression device 100 is disposed on the processing machine tool 1100 and can be used to suppress the vibration of the processing machine tool 1100. The control unit 300 is coupled to the processing machine tool 1100 and the vibration suppression device 100, and can control the operations of the processing machine tool 1100 and the vibration suppression device 100. The storage unit 400 is coupled to the control unit 300 and is used to store a plurality of databases. In other embodiments, the storage unit can be omitted, which is not limited herein.

[0091] The processing machine tool 1100 may include a machine tool 1110, a moving table 1120, a worktable 1130, an upright frame 1140, and a spindle head 1150. The workpiece WP is disposed (e.g., clamped) on the worktable 1130. The worktable 1130 may be disposed on a linear guide (not shown) in a first horizontal axis (X-axis), and the linear guide in the first horizontal axis is disposed on the moving table 1120 along the first horizontal axis, so that the worktable 1130 can linearly move in the first horizontal axis; the moving table 1120 may be disposed on a linear guide (not shown) in a second horizontal axis (Y-axis), and the linear guide in the second horizontal axis is disposed on the machine tool 1110 along the second horizontal axis, so that the moving table 1120 can linearly move in the second horizontal axis. The spindle head 1150 may be disposed on the linear guide 1141 of the upright frame 1140 in a vertical axis (Z-axis), so that the spindle head 1150 can linearly move in the vertical axis.

[0092] The moving table 1120, the worktable 1130, and the spindle head 1150 can be controllably moved by their respective corresponding linear axis drivers (not shown). Herein, the control unit 300 can respectively transmit control signals to the linear axis drivers corresponding to the moving table 1120, the worktable 1130, and the spindle head 1150, so that the linear axis drivers drive the moving table 1120, the worktable 1130, and the spindle head 1150 to linearly move. In addition, the control unit 300 can know the actual positions of the moving table 1120, the worktable 1130, and the spindle head 1150 through the position sensors (not shown) corresponding to the moving table 1120, the worktable 1130, and the spindle head 1150.

[0093] Figure 2A is a front view of the vibration suppression device 100 according to an embodiment of the present invention; Figure 2B illustrates Figure 2A a top view of the vibration suppression device 100.

[0094] Please refer to Figure 2A and Figure 2B, the vibration suppression device 100 has a first side S1, a second side S2, a third side S3, and a fourth side S4. The first side S1 is opposite to the third side S3, and the second side S2 is opposite to the fourth side S4. The first side S1 is adjacent to the second side S2 and the fourth side S4. The third side S3 is adjacent to the second side S2 and the fourth side S4. The vibration suppression device 100 may include a base 110, a rigid module 120, a drive module 130, a counterweight module 140, and a damping module 150. The rigid module 120 may be disposed adjacent to the first side S1 and may include a fixed seat 121, a guide rod 122, and a moving member 123. One end of the guide rod 122 is connected to the fixed seat 121, and the guide rod 122 extends along a first axis D1 (x-axis). The moving member 123 is movably disposed on the guide rod 122 along the first axis D1 (x-axis). In one embodiment, the moving member 123 may be a ball spline, but is not limited thereto. When the distance between the moving member 123 and the fixed seat 121 is shorter, the rigidity of the rigid module 120 is higher; conversely, when the distance between the moving member 123 and the fixed seat 121 is longer, the rigidity of the rigid module 120 is lower.

[0095] The drive module 130 may be disposed adjacent to the first side S1 and is disposed on the base 110, configured to drive the moving member 123 to move along the first axis D1 (x-axis). In one embodiment, the drive module 130 may include a drive motor 131 and a linear driving unit 132. The linear driving unit 132 is connected to the moving member 123 and generates a movement along the first axis D1 (x-axis) by means of the drive motor 131, thereby driving the moving member 123 to move along the first axis D1 (x-axis), thereby changing the rigidity of the rigid module 120. In one embodiment, the linear driving unit 132 may include a screw, a nut, and a slide rail. The moving member 123 may move along the slide rail. The nut is sleeved on the screw and is connected to the moving member 123. The screw may be driven by the drive motor 131 to rotate, thereby driving the nut to linearly move, so that the moving member 123 linearly moves along the first axis D1 (x-axis) on the slide rail.

[0096] As Figure 2B shown, the rigid module 120 and the drive module 130 are disposed opposite to each other. The rigid module 120 is disposed close to the second side S2, while the drive module 130 is disposed close to the fourth side S4. In another embodiment, the rigid module 120 may be disposed close to the fourth side S4, while the drive module 130 may be disposed close to the second side S2.

[0097] The counterweight module 140 may include a counterweight mass unit 141 and a linear guide 142. The counterweight mass unit 141 has a connecting plate 1411 and a counterweight mass 1412, and is connected to the fixed base 121, for example, the connecting plate 1411 and the fixed base 121 are locked to each other. The counterweight mass 1412 is disposed on the connecting plate 1411. For example, threads are configured on the connecting plate 1411, and the counterweight mass 1412 and the connecting plate 1411 are locked with screws. The counterweight mass 1412 may be configured with different mass sizes in different embodiments according to requirements, which is not limited herein. The linear guide 142 extends along the second axial direction D2 (y-axis), and the second axial direction D2 (y-axis) is perpendicular to the first axial direction D1 (x-axis). The counterweight mass unit 141 can move along the second axial direction D2 (y-axis) through the linear guide 142. In one embodiment, the linear guide 142 may include a slider 142a and a slide rail 142b. The slider 142a may be disposed on the counterweight mass unit 141 (for example, the slider 142a is fixedly configured with the connecting plate 1411), and can slide relative to the slide rail 142b. The slide rail 142b may be disposed on the base 110. Therefore, the counterweight mass unit 141 can move along the second axial direction D2 (y-axis) by means of the slider 142a and the slide rail 142b. In another embodiment, the slider 142a may be disposed on the base 110, and the slide rail 142b may be disposed on the counterweight mass unit 141 (for example, the slide rail 142b is fixedly configured with the connecting plate 1411).

[0098] The damping module 150 is disposed on the counterweight module 140, for example, is fixed to the counterweight mass 1412 of the counterweight mass unit 141. In one embodiment, the damping module 150 may be a multi-directional eddy current damping device. Please refer to Figure 3, which shows an embodiment of the damping module 150. The damping module 150 may include a first magnet group 151, a second magnet group 152, and a metal plate 153. The metal plate 153 is disposed between the first magnet group 151 and the second magnet group 152. The first magnet group 151 may include a first carrier 1511 and a plurality of first magnets 1512 disposed on the first carrier 1511. The second magnet group 152 may include a second carrier 1521 and a plurality of second magnets 1522 disposed on the second carrier 1521. There is a gap between the first magnets 1512 and the second magnets 1522 arranged vertically, and the metal plate 153 is disposed in this gap, that is, the metal plate 153 is disposed between the first magnets 1512 and the second magnets 1522. A magnetic field is generated between the first magnets 1512 and the second magnets 1522, enabling the metal plate 153 to move freely in the plane (xy plane) between the first magnets 1512 and the second magnets 1522. When vibration occurs, the first magnets 1512 and the second magnets 1522 will displace relative to the metal plate 153, and this relative movement can generate eddy currents, thereby providing a damping effect. However, the present invention is not limited thereto. In other embodiments, the damping module 150 may be a viscous damping module, a hydraulic damping module, an elastic damping module, or a friction damping module, as long as it is a damping module that can produce a damping effect, and no limitation is made herein.

[0099] Please refer to Figure 1A , Figure 1B , Figure 2A and Figure 2B , the vibration suppression device 100 may be disposed on the processing machine tool 1100. For example, the base 110 of the vibration suppression device 100 is disposed on the processing machine tool 1100 to provide an effect of suppressing the vibration of the processing machine tool 1100. The vibration suppression device 100 may be disposed at a position on the processing machine tool 1100 where vibration occurs or severe vibration occurs, such as being disposed on the spindle head 1150 of the processing machine tool 1100. In addition to controlling the processing machine tool 1100, the control unit 300 also controls the drive module 130 to change the position of the moving member 123 in the first axial direction D1 (x-axis) in real time according to the vibration frequency of the processing machine tool 1100, and changes the vibration frequency of the vibration suppression device 100 by changing the rigidity of the rigidity module 130, so that the vibration frequency of the vibration suppression device 100 matches the vibration frequency of the processing machine tool 1100. Thus, when the processing machine tool 1100 generates different vibration frequencies, the control unit 300 can also immediately cause the vibration suppression device 100 to produce a continuous and uninterrupted vibration suppression effect according to the change in the vibration frequency of the processing machine tool 1100.

[0100] In one embodiment, the control unit 300 may detect the position of the spindle head 1150 in the vertical axial direction (Z-axis) in real time and control the drive module 130 to change the position of the moving member 123 in the first axial direction D1 (x-axis). Figure 2A andFigure 2B The first axial direction D1 (x-axis) and the second axial direction D2 (y-axis) shown may be in the horizontal direction, that is, corresponding to Figure 1A and Figure 1B the X-axis direction of, or the Y-axis direction of, or any direction in the XY plane, which is perpendicular to the vertical axial direction (Z-axis). Herein, the storage unit 400 may store a processing machine tool database and a vibration suppression device database. The processing machine tool database may include the correspondence between the vibration frequency of the processing machine tool 1100 and the position of the spindle head 1150 in the vertical axial direction (Z-axis), recording the distance between the spindle head 1150 and the surface of the workbench 1130 in the vertical axial direction (Z-axis) and the corresponding vibration frequency of the processing machine tool 1100. The vibration suppression device database may include the correspondence between the vibration frequency of the vibration suppression device 100 and the position of the moving member 123 in the first axial direction D1 (x-axis), recording the distance between the moving member 123 and the fixed seat 121 in the first axial direction D1 (x-axis) and the corresponding vibration frequency of the vibration suppression device 100. For example, the processing machine tool database and the vibration suppression device database may be as shown in Table 1:

[0101] Table 1

[0102]

[0103] The control unit 300 may control the drive module 130 to change the position of the moving member 123 in the first axial direction D1 (x-axis) by detecting the position of the spindle head 1150 in the vertical axial direction in real time, so that the vibration frequency of the vibration suppression device 100 matches the vibration frequency of the processing machine tool 1100. As shown in Table 1, if the control unit 300 detects that the position of the spindle head 1150 in the vertical axial direction is 200 mm, indicating that the current vibration frequency of the processing machine tool 1100 is 50 Hz, the control unit 300 may, according to the processing machine tool database and the vibration suppression device database in the storage unit 400, know that the position of the moving member 123 in the first axial direction D1 (x-axis) should be 20 mm in order to make the vibration frequency of the vibration suppression device 100 match the vibration frequency of the processing machine tool 1100. On the other hand, if the control unit 300 detects that the position of the spindle head 1150 in the vertical axial direction is not recorded in the processing machine tool database, the control unit 300 may calculate the corresponding position of the moving member 123 by interpolation. By comparing the two databases with each other, an immediate vibration suppression effect can be generated for the vibration suppression device 100 in response to the change in the vibration frequency of the processing machine tool 1100 in real time.

[0104] Figure 4 An embodiment showing the vibration suppression effect of the vibration suppression system 1000. Please refer to Figure 1A 、 Figure 1B and Figure 4, when the processing machine tool 1100 is manufacturing or processing different workpieces WP, or during the manufacturing or processing process of the workpiece WP, the processing machine tool 1100 will be in different postures. For example, Figure 1A the processing machine tool 1100 is in the first posture, and its vibration frequency is 46 Hz; Figure 1B the processing machine tool 1100 is in the second posture, and its vibration frequency is 43 Hz. Therefore, when the posture of the processing machine tool 1100 changes, its vibration frequency will also change accordingly. The control unit 300 can immediately make the vibration suppression device 100 produce a continuous and uninterrupted vibration suppression effect according to the change in the vibration frequency of the processing machine tool 1100. For example, when the processing machine tool 1100 changes from the first posture to the second posture, the control unit 300 can find the corresponding position of the moving part 123 in the first axis D1 (x-axis) from the processing machine tool database and the vibration suppression device database stored in the storage unit 400 according to the position of the spindle head 1150 in the vertical axis direction, and then control the drive module 130 to change the position of the moving part 123 in the first axis D1 (x-axis), so that the vibration frequency of the vibration suppression device 100 changes from the original 46 Hz to 43 Hz to match the vibration frequency of the processing machine tool 1100. As Figure 4 shown, whether the processing machine tool 1100 is at a vibration frequency of 46 Hz or 43 Hz, the magnitude of its dynamic deflection can be significantly improved.

[0105] Please refer to Figure 3 and Figure 4 , in an embodiment, the size of the vibration frequency interval W can be adjusted by changing the thickness (length along the z-axis) of the metal plate 153 of the damping module 150 to determine the frequency range that can suppress the dynamic deflection of the processing machine tool 1100. For example, if the thickness of the metal plate 153 of the damping module 150 is thicker, the vibration suppression device 100 can suppress the dynamic deflection of the processing machine tool 1100 at a wider vibration frequency interval W.

[0106] Figure 5A is another embodiment of the vibration suppression system 2000, showing the vibration mode of the processing machine tool 1100 as a swing head vibration mode; Figure 5B is another embodiment of the vibration suppression system 2000, showing the vibration mode of the processing machine tool 1100 as a nodding vibration mode.

[0107] In an embodiment, as Figure 2A , Figure 5A and Figure 5BAs shown, the control unit 300 may include a first controller 310 and a second controller 320, which are respectively coupled to the storage unit 400. The first controller 310 and the second controller 320 may be respectively responsible for controlling the operations of the processing machine tool 1100 and the vibration suppression device 100. The first controller 310 and the second controller 320 can communicate with each other. Therefore, when the first controller 310 controls the processing machine tool 1100, the second controller 320 can also control the driving module 130 in real time according to the vibration frequency of the processing machine tool 1100 to change the position of the moving member 123 in the first axial direction D1.

[0108] In one embodiment, the placement position of the vibration suppression device 100 can be determined according to the vibration mode of the processing machine tool 1100. Please refer to Figure 5A , when the vibration mode of the processing machine tool 1100 is a head-swinging vibration mode, the processing machine tool 1100 swings its head on the X-axis, and the placement position of the vibration suppression device 100 is such that the second axial direction D2 corresponds to the vibration direction of the head-swinging vibration mode, making the second axial direction D2 correspond to the X-axis. Please refer to Figure 5B , when the vibration mode of the processing machine tool 1100 is a nodding vibration mode, the processing machine tool 1100 nods on the Y-axis, and the placement position of the vibration suppression device 100 is such that the second axial direction D2 corresponds to the vibration direction of the nodding vibration mode, making the second axial direction D2 correspond to the Y-axis. In another embodiment, if the vibration mode of the processing machine tool 1100 is a vibration that jumps along the Z-axis, the placement position of the vibration suppression device 100 is such that the second axial direction D2 corresponds to the vibration direction of the jump, making the second axial direction D2 correspond to the Z-axis. That is to say, the placement position of the vibration suppression device 100 can be determined according to the vibration direction of the processing machine tool 1100, making the second axial direction D2 correspond to this vibration direction.

[0109] Figure 6A is a schematic diagram of a vibration suppression device 200 according to another embodiment of the present invention; Figure 6B illustrates Figure 6A a right side view of the vibration suppression device 200 shown in

[0110] Please refer to Figure 6A and Figure 6B , in one embodiment, the vibration suppression device 200 can be applied to the processing machine tool 1100 with vibration modes of head-swinging vibration mode and nodding vibration mode at the same time. Figure 6A and Figure 6B The difference between the vibration suppression device 200 shown in Figure 2A and Figure 2B the vibration suppression device 100 shown in

[0111] The first rigid module 120A includes a first fixing base 121A, a first guide rod 122A, and a first moving member 123A, and its structure and configuration are the same as those of the Figure 2A and Figure 2B rigid module 120 of the vibration damping device 100 as described above, and will not be elaborated herein. The second rigid module 120B can be disposed adjacent to the second side S2, and can include a second fixing base 121B, a second guide rod 122B, and a second moving member 123B. One end of the second guide rod 122B is connected to the second fixing base 121B, and the second guide rod 122B extends along the second axis D2 (y-axis). The second moving member 123B is movably disposed on the second guide rod 122B along the second axis D2 (y-axis). In one embodiment, the second moving member 123B can be a ball spline, but is not limited thereto. When the distance between the second moving member 123B and the second fixing base 121B is shorter, the rigidity of the second rigid module 120B is higher; conversely, when the distance between the second moving member 123B and the second fixing base 121B is longer, the rigidity of the second rigid module 120B is lower.

[0112] The first driving module 130A includes a first driving motor 131A and a first linear driving unit 132A, and its structure and configuration are the same as those of the Figure 2A and Figure 2B driving module 130 of the vibration damping device 100 as described above, and will not be elaborated herein. The second driving module 130B can be disposed adjacent to the second side S2 and is disposed on the base 110, and is configured to drive the second moving member 123B to move along the second axis D2 (y-axis). In one embodiment, the second driving module 130B can include a second driving motor 131B and a second linear driving unit 132B. The second linear driving unit 132B is connected to the second moving member 123B and generates a movement along the second axis D2 (y-axis) by means of the second driving motor 131B, thereby driving the second moving member 123B to move along the second axis D2 (y-axis), thereby changing the rigidity of the second rigid module 120B. In one embodiment, the second linear driving unit 132B can include a screw rod, a nut, and a slide rail. The second moving member 123B can move along the slide rail. The nut is sleeved on the screw rod and is connected to the second moving member 123B. The screw rod can be driven by the second driving motor 131B to rotate, and then drive the nut to linearly move, so that the second moving member 123B linearly moves along the second axis D2 (y-axis) on the slide rail.

[0113] The first counterweight module 140A includes a first counterweight mass unit 141A and a first linear guide 142A, wherein the first counterweight mass unit 141A has a first connecting plate 1411A and a first counterweight mass 1412A. The structure and configuration of the first counterweight module 140A are similar to those of the Figure 2A and Figure 2BThe counterweight module 140 of the vibration suppression device 100 will not be elaborated here. The second counterweight module 140B may include a second counterweight mass unit 141B and a second linear guide 142B, and is disposed between the damping module 150 and the first counterweight module 140A. The second counterweight mass unit 141B has a second connecting plate 1411B and a second counterweight mass 1412B. The second counterweight mass 1412B is disposed on the second connecting plate 1411B. For example, threads are configured on the second connecting plate 1411B, and the second counterweight mass 1412B and the second connecting plate 1411B are locked with screws. The second counterweight mass 1412B may be configured with different mass sizes according to requirements in different embodiments, which is not limited here. The second counterweight mass unit 141B is connected to the second fixed seat 121B. For example, after the second counterweight mass unit 141B and the damping module 150 are fixed to each other, the damping module 150 is then fixed to the second fixed seat 121B, or the second counterweight mass unit 141B is directly fixed to the second fixed seat 121B. The second linear guide 142B extends along the first axial direction D1 (x-axis). The second counterweight mass unit 141B can move along the first axial direction D1 (x-axis) through the second linear guide 142B. In one embodiment, the second linear guide 142B may include a second slider 142Ba and a second slide rail 142Bb. The second slider 142Ba may be disposed on the second counterweight mass unit 141B, and the second slide rail 142Bb may be disposed on the first counterweight mass unit 141A. Therefore, the second counterweight mass unit 141B can move along the first axial direction D1 (x-axis) by means of the second slider 142Ba and the second slide rail 142Bb. In another embodiment, the second slider 142Ba may be disposed on the first counterweight mass unit 141A, and the second slide rail 142Bb may be disposed on the second counterweight mass unit 141B.

[0114] Please refer to Figure 5A 、 Figure 5B and Figure 6A , the first axial direction D1 and the second axial direction D2 may respectively correspond to the vibration directions of the swing head vibration mode and the nodding vibration mode. Therefore, the vibration suppression device 200 can be applied to the processing machine 1100 with the vibration modes of the swing head vibration mode and the nodding vibration mode without changing the placement position.

[0115] In summary, according to the vibration suppression system for a processing machine tool and the vibration suppression device for suppressing the vibration of a processing machine tool provided by the present invention, the vibration frequency of the vibration suppression device can be adjusted in real time according to the vibration frequency of the processing machine tool, so that the two match each other, resulting in a continuous and uninterrupted vibration suppression effect. The vibration frequency of the vibration suppression device can be adjusted by changing the rigidity of the rigid module, for example, by changing the position of the moving part in the first axial direction to change the rigidity of the rigid module. In an embodiment, a processing machine tool database and a vibration suppression device database can be established in advance. The control unit only needs to detect the position of the spindle head in the vertical axial direction, and then it can immediately know the position where the moving part should be located according to the processing machine tool database and the vibration suppression device database, so that the vibration suppression device can produce an immediate vibration suppression effect in response to the change in the vibration frequency of the processing machine tool. In addition, the user can also change the rigidity module of the vibration suppression device and the weight of the counterweight module at any time according to the vibration characteristics of the processing machine tool equipment to adjust the vibration frequency range of the vibration suppression device. In addition, if the damping module is a multi-directional eddy current damping device, the vibration frequency spacing can be adjusted by changing the thickness of the metal plate of the damping module to determine the frequency range that can suppress the dynamic deflection of the processing machine tool.

[0116] Although the present invention is disclosed in combination with the above embodiments, it is not intended to limit the present invention. Those of ordinary skill in the art to which the present invention pertains can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention should be defined by the appended claims.

Claims

1. A vibration suppression system for a processing machine, the vibration suppression system comprising: Vibration suppression device, comprising: A base is arranged on the processing machine; A first rigid module comprises a first fixed seat, a first guide rod and a first moving member, one end of the first guide rod is connected to the first fixed seat, and the first moving member is movably disposed on the first guide rod along a first axial direction; A first driving module, disposed on the base, configured to drive the first moving member to move along the first axial direction; A first counterweight module, comprising a first counterweight mass unit and a first linear guide, wherein the first linear guide extends along a second axial direction, the first counterweight mass unit is connected to the first fixing seat and is movable in the second axial direction through the first linear guide, and the second axial direction is perpendicular to the first axial direction; and A damping module is disposed on the first counterweight module; and The control unit is configured to control the processing machine and control the first driving module to change the position of the first moving member in the first axial direction in real time according to the vibration frequency of the processing machine, so that the vibration frequency of the vibration suppression device matches the vibration frequency of the processing machine.

2. The vibration suppression system as described in claim 1, wherein the processing machine includes a stand and a spindle head, and the spindle head can be controlled to move linearly along the vertical axis on the stand through the control unit, and the control unit controls the first driving module to change the position of the first movable member in the first axis by real-time detecting the position of the spindle head in the vertical axis.

3. The vibration suppression system as described in claim 2 further includes a storage unit, wherein the storage unit stores a processing machine database and a vibration suppression device database, the processing machine database includes a correspondence between the vibration frequency and the position of the spindle head in the vertical axis, and the vibration suppression device database includes a correspondence between the vibration frequency and the position of the first movable member in the first axis, and the control unit is coupled to the storage unit to control the first driving module to change the position of the first movable member in the first axis by real-time detection of the position of the spindle head in the vertical axis, so that the vibration frequency of the vibration suppression device matches the vibration frequency of the processing machine. 4 . The vibration suppression system as claimed in claim 2 , wherein the vertical axis is perpendicular to the first axis and the second axis. 5 . The vibration suppression system as claimed in claim 2 , wherein the vibration suppression device is disposed on the spindle head of the processing machine. 6 . The vibration suppression system as claimed in claim 1 , wherein the vibration suppression device is arranged so that the second axial direction corresponds to the vibration direction of the processing machine.

7. The vibration suppression system as claimed in claim 1, wherein the vibration mode of the processing machine is a swing vibration mode or a nodding vibration mode, and the vibration suppression device is arranged in a position so that the second axial direction corresponds to the vibration direction of the swing vibration mode or the nodding vibration mode. 8 . The vibration suppression system as claimed in claim 1 , wherein the damping module comprises a first magnet group, a second magnet group and a metal plate, and the metal plate is disposed between the first magnet group and the second magnet group. 9 . The vibration suppression system as claimed in claim 8 , wherein the thicker the metal plate is, the wider the vibration frequency interval at which the vibration suppression device can suppress the dynamic deflection of the processing machine.

10. The vibration suppression system as described in claim 1, wherein the control unit includes a first controller and a second controller, the first controller is used to control the processing machine, and the second controller is used to control the first driving module to change the position of the first movable member in the first axial direction in real time according to the vibration frequency of the processing machine.

11. The vibration suppression system as claimed in claim 1, wherein the vibration suppression device further comprises: A second rigid module comprises a second fixed seat, a second guide rod and a second moving member, wherein one end of the second guide rod is connected to the second fixed seat, and the second moving member is movably disposed on the second guide rod along the second axial direction; A second driving module, disposed on the base, configured to drive the second moving member to move along the second axial direction; as well as A second counterweight module, comprising a second counterweight mass unit and a second linear guide, wherein the second linear guide extends along the first axial direction, the second counterweight mass unit is connected to the second fixing seat and is movable in the first axial direction through the second linear guide; The control unit is further used to control the second driving module to change the position of the second moving member in the second axial direction in real time according to the vibration frequency of the processing machine. 12 . The vibration suppression system as claimed in claim 11 , wherein the vibration suppression device has a first side and a second side adjacent to each other, the first rigid module is disposed adjacent to the first side, and the second rigid module is disposed adjacent to the second side.

13. A vibration suppression device for suppressing vibration of a processing machine, the vibration suppression device comprising: A base is arranged on the processing machine; A first rigid module comprises a first fixed seat, a first guide rod and a first moving member, one end of the first guide rod is connected to the first fixed seat, and the first moving member is movably disposed on the first guide rod along a first axial direction; A first driving module, disposed on the base, configured to drive the first moving member to move along the first axial direction; A first counterweight module, comprising a first counterweight mass unit and a first linear guide, wherein the first linear guide extends along a second axial direction, the first counterweight mass unit is connected to the first fixing seat and is movable in the second axial direction through the first linear guide, wherein the second axial direction is perpendicular to the first axial direction; as well as A damping module is arranged on the first counterweight module; The first driving module changes the position of the first moving member in the first axial direction in response to the vibration frequency of the processing machine, so that the vibration frequency of the vibration suppression device matches the vibration frequency of the processing machine.

14. The vibration suppression device as claimed in claim 13, wherein the vibration suppression device is arranged so that the second axial direction corresponds to the vibration direction of the processing machine.

15. The vibration suppression device as claimed in claim 13, wherein the vibration suppression device is disposed on a spindle head of the processing machine.

16. The vibration suppression device as claimed in claim 13, wherein the vibration mode of the processing machine is a swing vibration mode or a nodding vibration mode, and the vibration suppression device is arranged so that the second axial direction corresponds to the vibration direction of the swing vibration mode or the nodding vibration mode. 17 . The vibration suppression device as claimed in claim 13 , wherein the damping module comprises a first magnet group, a second magnet group and a metal plate, and the metal plate is disposed between the first magnet group and the second magnet group. 18 . The vibration suppression device as claimed in claim 17 , wherein the thicker the metal plate is, the wider the vibration frequency interval at which the vibration suppression device can suppress the dynamic deflection of the processing machine.

19. The vibration suppression device as claimed in claim 13, wherein the vibration suppression device further comprises: A second rigid module comprises a second fixed seat, a second guide rod and a second moving member, wherein one end of the second guide rod is connected to the second fixed seat, and the second moving member is movably disposed on the second guide rod along the second axial direction; A second driving module, disposed on the base, configured to drive the second moving member to move along the second axial direction; as well as A second counterweight module, comprising a second counterweight mass unit and a second linear guide, wherein the second linear guide extends along the first axial direction, the second counterweight mass unit is connected to the second fixing seat and is movable in the first axial direction through the second linear guide; The second driving module changes the position of the second moving member in the second axial direction in response to the vibration frequency of the processing machine. 20 . The vibration suppression device as claimed in claim 19 , wherein the vibration suppression device has a first side and a second side adjacent to each other, the first rigid module is disposed adjacent to the first side, and the second rigid module is disposed adjacent to the second side.

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