Vacuum ion plating machine cavity structure with self-cleaning function

Abstract

The invention relates to the technical field of vacuum ion film plating machines, in particular to a vacuum ion film plating machine cavity structure with a self-cleaning function, which comprises a device body, an outward opening door is mounted on one side of the device body, an inclined side door is arranged on the bottom side of the outward opening door, a film plating cavity is formed in the device body, a limiting rod is mounted in the film plating cavity, and the limiting rod is connected with the outward opening door. And a cleaning part is movably connected to the outer side of the limiting rod and comprises a cleaning frame, a telescopic rod and a first wall scraping strip, the first wall scraping strip is installed on the outer side of the cleaning frame, the telescopic rod is arranged at the outer side end of the cleaning frame, and a pushing frame is further movably connected into the coating cavity. According to the scheme, the possibility that a large number of materials are still left in the coating cavity after coating is reduced, the possibility that the machine needs to be stopped continuously to clean the residues during coating is reduced, the cleaning effect of the device on the interior of the equipment is improved, the material residues are reduced, and the automatic cleaning effect of the device is also improved; and the possibility of manual operation is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum ion coating machines, and particularly to a cavity structure of a vacuum ion coating machine with a self-cleaning function. Background Art

[0002] A vacuum ion coating machine is a device that uses a vacuum environment and ion technology to coat the surface of materials, and is widely used in industries, electronics, optics, decoration and other fields. Its core principle is to convert the coating material into an ionic or atomic state under vacuum conditions through physical or chemical methods, and deposit it on the surface of the substrate under the action of an electric field or plasma to form a dense and uniform thin film.

[0003] At present, during the coating process of a vacuum ion coating machine, a large amount of residual materials are easily accumulated on the inner wall of the coating cavity. These materials adhere to the inner wall of the cavity and may fall off during the coating process and splash onto the surface of the substrate, resulting in pinholes, protrusions or impurity embedding in the film layer. The residual substances may adsorb air holes and be released during the vacuum pumping process, resulting in fluctuations in the vacuum degree and an extended pumping time. For this reason, a cavity structure of a vacuum ion coating machine with a self-cleaning function is proposed. Summary of the Invention

[0004] The purpose of the present invention is to solve the disadvantages existing in the prior art, and to propose a cavity structure of a vacuum ion coating machine with a self-cleaning function.

[0005] In order to achieve the above purpose, the present invention adopts the following technical solutions: A cavity structure of a vacuum ion coating machine with a self-cleaning function, including a device body. An outer door is installed on one side of the device body. An inclined side door is arranged at the bottom side of the outer door. A coating cavity is opened in the device body. A limiting rod is installed in the coating cavity. A cleaning member is movably connected to the outside of the limiting rod. The cleaning member includes a cleaning frame, a telescopic rod and a first wall scraping strip. The first wall scraping strip is installed on the outside of the cleaning frame. The telescopic rod is arranged at the outer end of the cleaning frame. A pushing frame is also movably connected in the coating cavity.

[0006] Preferably, side plates are symmetrically installed on both sides of the coating cavity. One side of the side plate is in an outwardly convex triangular shape. The side plate is fixed in the device body and they are mutually adapted. The outer doors are symmetrically installed on the front side of the device body. The inclined side doors are inclinedly installed on the front side of the device body.

[0007] Preferably, two limiting rods are provided, and the two limiting rods are symmetrically installed between the top surface and the bottom surface on both sides of the coating chamber. A sliding groove is formed on the cleaning frame, and the limiting rods are connected in the sliding groove. First motors are symmetrically installed on the top surface of the device body, and a screw rod is installed on the output end of the first motor. The screw rod is rotatably connected in the coating chamber, and the cleaning frame is threadedly connected to the outside of the screw rod.

[0008] Preferably, the cleaning frame is in a "C" shape, and receiving grooves are formed at both ends of the cleaning frame. First scraping strips are installed on the upper and lower edges of the outer side surface of the cleaning frame, and the first scraping strips are connected to the inner wall of the coating chamber.

[0009] Preferably, telescopic rods are arranged in the receiving grooves, a compression spring is connected between the telescopic rods and the receiving grooves, a hemispherical contact head is installed on the outer side end of the telescopic rods, the contact head is movably connected to the frame of the device body, and a second scraping strip is installed on one side of the telescopic rods.

[0010] Preferably, limiting grooves are symmetrically formed on the bottom surface of the coating chamber, both ends of the pushing frame are slidably connected in the limiting grooves, pull ropes are arranged in the limiting grooves, one end of each pull rope is installed on the pushing frame, a winding rod is further arranged in the device body and is located at the bottom side of the inclined side door, a second motor is installed at one end of the winding rod, the other end of the pull rope is connected to the outer surface of the winding rod, and a collecting groove is further formed on the bottom surface of the coating chamber and is located on one side of the inclined side door.

[0011] The beneficial effects of the present invention are as follows: In this solution, the screw rod can drive the cleaning part to move up and down, the first scraping strip can clean the inner wall surface of the coating wall, the telescopic rod can extend and receive the position of the second scraping strip, which is convenient for automatically adjusting to fit different sizes of cavity surfaces, and the pushing frame can push the materials on the bottom surface of the coating chamber into the collecting groove for unified collection.

[0012] This solution reduces the possibility that a large amount of materials still remain in the coating chamber after coating, reduces the possibility of constantly stopping the machine during coating to clean the residues, improves the cleaning effect of the device on the interior of the equipment and reduces the material residue, also improves the effect of the device for automatic cleaning, and reduces the possibility of manual operation. Description of the Drawings

[0013] Figure 1 It is a schematic structural diagram of the cavity structure of the vacuum ion coating machine with a self-cleaning function proposed by the present invention; Figure 2 It is a schematic structural diagram when the cavity structure of the vacuum ion coating machine with a self-cleaning function proposed by the present invention is opened; Figure 3Internal structure schematic diagram of the cavity structure of the vacuum ion coating machine with self-cleaning function proposed by the present invention; Figure 4 Top view structure schematic diagram of the cavity structure of the vacuum ion coating machine with self-cleaning function proposed by the present invention; Figure 5 Structure schematic diagram of the cleaning part; Figure 6 Front view structure schematic diagram of the cleaning part; Figure 7 is Figure 5 Structure schematic diagram of part A in

[0014] In the figure: 1. Device body; 2. Side plate; 3. Outer door; 4. Oblique side door; 5. First motor; 6. Limit groove; 7. Collection tank; 8. Limit rod; 9. Cleaning part; 10. First scraping strip; 11. Extrusion spring; 12. Second scraping strip; 13. Telescopic rod; 14. Contact head; 15. Screw; 16. Pushing frame; 17. Second motor; 18. Winding rod; 19. Pulling rope. Specific embodiments

[0015] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments.

[0016] Embodiment: Refer to Figures 1-7 , the cavity structure of the vacuum ion coating machine with self-cleaning function includes a device body 1. An outer door 3 is installed on one side of the device body 1. An oblique side door 4 is arranged at the bottom side of the outer door 3. A coating cavity is opened in the device body 1. A limit rod 8 is installed in the coating cavity. A cleaning part 9 is movably connected to the outside of the limit rod 8. The cleaning part 9 includes a cleaning frame, a telescopic rod 13 and a first scraping strip 10. The first scraping strip 10 is installed on the outside of the cleaning frame. The telescopic rod 13 is arranged at the outer end of the cleaning frame. A pushing frame 16 is also movably connected in the coating cavity. Side plates 2 are symmetrically installed on both sides of the coating cavity. One side of the side plate 2 is in a convex triangular shape. The side plate 2 is fixed in the device body 1 and is mutually adapted therebetween. The outer doors 3 are symmetrically installed on the front side of the device body 1. The oblique side doors 4 are inclinedly installed on the front side of the device body 1.

[0017] Specifically, two limit rods 8 are provided. The two limit rods 8 are symmetrically installed between the top and bottom surfaces on both sides of the coating cavity to enhance the stability during the up and down movement of the cleaning frame. A sliding groove is opened on the cleaning frame. The limit rod 8 is connected in the sliding groove. First motors 5 are symmetrically installed on the top surface of the device body 1. A screw 15 is installed on the output end of the first motor 5. The screw 15 is rotatably connected in the coating cavity. The cleaning frame is threadedly connected to the outside of the screw 15 to control the up and down movement of the cleaning frame.

[0018] Furthermore, the cleaning rack is in a "C" shape, which is convenient for scraping the inner walls of three sides in the coating chamber. Storage grooves are provided at both ends of the cleaning rack. First scraping strips 10 are installed along the upper and lower edges of the outer side of the cleaning rack. The first scraping strips 10 are connected to the inner wall of the coating chamber and are used for scraping impurities inside.

[0019] In this embodiment, telescopic rods 13 are arranged in the storage grooves. A compression spring 11 is connected between the telescopic rods 13 and the storage grooves to act on the contraction of the telescopic rods 13. A hemispherical contact head 14 is installed at the outer end of the telescopic rod 13. The contact head 14 is movably connected to the frame of the device body 1 and can be telescopically adjusted according to the shape of the frame to reduce areas that cannot be cleaned. A second scraping strip 12 is installed on one side of the telescopic rod 13 to achieve cleaning after extension.

[0020] Limiting grooves 6 are symmetrically provided on the bottom surface of the coating chamber. Both ends of the pushing frame 16 are slidably connected in the limiting grooves 6 to act on converging the scraped impurities. Pulling ropes 19 are arranged in the limiting grooves 6. One end of the pulling rope 19 is installed on the pushing frame 16. A winding rod 18 is further arranged in the device body 1. The winding rod 18 is located at the bottom side of the inclined side door 4. A second motor 17 is installed at one end of the winding rod 18. The other end of the pulling rope 19 is connected to the outer surface of the winding rod 18. A collection groove 7 is further provided on the bottom surface of the coating chamber. The collection groove 7 is located on one side of the inclined side door 4 to act on uniformly gathering the scraped impurities.

[0021] Working principle: When the equipment needs to be cleaned after completing work, first control the first motors 5 on both sides to rotate synchronously. The screw rod 15 will start to rotate, and the cleaning rack will start to move. During the movement, the first scraping strips 10 will scrape the inner wall of the coating chamber from top to bottom. When moving to the bottom side area of the side plate 2, one end of the contact head 14 will move along the frame in the device body 1. Under the action of the compression spring 11, the telescopic rod 13 will extend forward, and the second scraping strip 12 will move to the corresponding area for scraping the wall. The materials scraped during the scraping process will fall on the bottom surface of the coating chamber. Then control the second motor 17 to rotate. The winding rod 18 will start to wind the pulling rope 19, and the pushing frame 16 will move towards one side of the inclined side door 4 to push the scraped impurities into the collection groove 7.

[0022] The content not detailed in this specification belongs to the prior art well-known to those skilled in the art.

[0023] The standard parts used in the present invention can all be purchased from the market. The special-shaped parts can be customized according to the descriptions in the specification and the attached drawings. The specific connection methods of each part all adopt conventional means such as bolts, rivets, and welding that are mature in the prior art. The machines, parts, and equipment all adopt conventional models in the prior art. In addition, the circuit connection adopts the conventional connection method in the prior art, which will not be elaborated here.

[0024] The above is only the preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution of the present invention and its inventive concept, makes equivalent replacements or changes, and should be covered within the protection scope of the present invention.

Claims

1. The chamber structure of the vacuum ion plating machine with self-cleaning function is characterized by: Comprising: The device body (1), an externally opening door (3) is installed on one side of the device body (1), an inclined side door (4) is arranged at the bottom side of the externally opening door (3), a coating chamber is opened in the device body (1), a limiting rod (8) is installed in the coating chamber, a cleaning member (9) is movably connected to the outer side of the limiting rod (8), the cleaning member (9) includes a cleaning frame, a telescopic rod (13) and a first scraping strip (10), the first scraping strip (10) is installed on the outer side of the cleaning frame, the telescopic rod (13) is arranged at the outer end of the cleaning frame, and a pushing frame (16) is also movably connected in the coating chamber.

2. The vacuum ion plating machine chamber structure with self-cleaning function according to claim 1 is characterized in that: Side plates (2) are symmetrically installed on both sides of the coating chamber, one side of the side plate (2) is in a convex triangular shape, the side plate (2) is fixed in the device body (1), and they are mutually adapted. The externally opening doors (3) are symmetrically installed on the front side surface of the device body (1), and the inclined side doors (4) are inclinedly installed on the front side surface of the device body (1).

3. The vacuum ion plating machine chamber structure with self-cleaning function according to claim 2 is characterized in that: There are two limiting rods (8), and the two limiting rods (8) are symmetrically installed between the top surface and the bottom surface on both sides of the coating chamber. A sliding groove is opened on the cleaning frame, and the limiting rod (8) is connected in the sliding groove. First motors (5) are symmetrically installed on the top surface of the device body (1), a screw rod (15) is installed on the output end of the first motor (5), the screw rod (15) is rotatably connected in the coating chamber, and the cleaning frame is threadedly connected to the outer side of the screw rod (15).

4. The vacuum ion plating machine chamber structure with self-cleaning function according to claim 3 is characterized in that: The cleaning frame is in a "C" shape, receiving grooves are opened at both ends of the cleaning frame, first scraping strips (10) are installed on the upper and lower edges of the outer side surface of the cleaning frame, and the first scraping strips (10) are connected to the inner wall of the coating chamber.

5. The vacuum ion plating machine chamber structure with self-cleaning function according to claim 4, characterized in that: Telescopic rods (13) are arranged in the receiving grooves, a compression spring (11) is connected between the telescopic rod (13) and the receiving groove, a hemispherical contact head (14) is installed on the outer end of the telescopic rod (13), the contact head (14) is movably connected to the frame of the device body (1), and a second scraping strip (12) is installed on one side of the telescopic rod (13).

6. The vacuum ion plating machine chamber structure with self-cleaning function according to claim 5, characterized in that: Limiting grooves (6) are symmetrically opened on the bottom surface of the coating chamber, both ends of the pushing frame (16) are slidably connected in the limiting grooves (6), pull ropes (19) are arranged in the limiting grooves (6), one end of the pull rope (19) is installed on the pushing frame (16), a winding rod (18) is also arranged in the device body (1), the winding rod (18) is located at the bottom side of the inclined side door (4), a second motor (17) is installed at one end of the winding rod (18), the other end of the pull rope (19) is connected to the outer surface of the winding rod (18), and a collection groove (7) is also opened on the bottom surface of the coating chamber, and the collection groove (7) is located on one side of the inclined side door (4).

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