Broadband spectrum measurement device and detection equipment

Abstract

The invention discloses a broadband spectrum measurement device and detection equipment. The broadband spectrum measurement device comprises a first entrance slit, a first light splitting assembly, a first spectrum module and a second spectrum module, the first entrance slit is configured to input a light beam to be measured, and the light beam to be measured is a multi-color light beam; the first light splitting assembly is configured to split a to-be-measured light beam to obtain a first light beam and a second light beam; the first spectrum module is configured to input a first light beam and perform spectral measurement on the first light beam; the second spectrum module is configured to input a second light beam and perform spectral measurement on the second light beam; after passing through the first entrance slit, a light beam to be measured is transmitted to the first light splitting assembly and is split into a first light beam and a second light beam. According to the invention, at least two wavebands can be measured at the same time, and the detection efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of optical detection, and particularly relates to a broadband spectrum measurement device and a detection device. Background Art

[0002] In semiconductor research and manufacturing, a detection light of broadband spectrum is used to detect a device under test. When the device under test is irradiated by the detection light, a detection beam to be detected is formed by reflection, and multiple detections are performed on the detection beam to be detected through an optical detection device.

[0003] For example, wafers involve optical measurements in different wavelength ranges. Usually, the ultraviolet range (170nm - 400nm) is used to detect the energy gap and electronic structure of materials and for photoresist-related detections; the visible light range (400 - 700nm) for conventional measurements to reflect material state information; and the near-infrared range (700 - 2500nm) for measuring reflection and absorption spectra to understand the performance of semiconductor materials.

[0004] Existing detection lights are measured separately using multiple optical detection devices (such as spectrometers) to cover the entire broadband spectrum from deep ultraviolet to visible light to infrared. Therefore, the existing detection method cannot perform single-shot simultaneous measurement, requires multiple optical detection devices, and has a complex optical path and long time consumption. Summary of the Invention

[0005] The main technical problem to be solved by the present invention is that a single optical detection device cannot detect a wide spectrum in a single shot.

[0006] According to a first aspect, in one embodiment, a broadband spectrum measurement device is provided, including: a first incident slit, a first beam splitting component, a first spectral module, and a second spectral module;

[0007] The first incident slit is configured to input a detection beam to be detected, and the detection beam to be detected is a polychromatic beam;

[0008] The first beam splitting component is configured to split the detection beam to be detected to obtain a first beam and a second beam;

[0009] The first spectral module is configured to input the first beam and perform spectral measurement on the first beam;

[0010] The second spectral module is configured to input the second beam and perform spectral measurement on the second beam;

[0011] After passing through the first incident slit, the detection beam to be detected is transmitted to the first beam splitting component and split into a first beam and a second beam. The first detection wavelength range of the first spectral module does not overlap with the second detection wavelength range of the second spectral module.

[0012] According to a second aspect, in one embodiment, a broadband spectral measurement device is provided, including: a first incident slit, a first reflection component, a first spectral module, and a second spectral module;

[0013] The first incident slit is configured to input a beam to be measured, and the beam to be measured is a polychromatic beam;

[0014] The first spectral module is configured to input the beam to be measured, disperse the beam to be measured, and perform spectral measurement on a part of the dispersed beam to be measured; this part is defined as the first-stage beam to be measured, and the remaining undetected part is defined as the second-stage beam to be measured;

[0015] The first reflection component is configured to reflect the second-stage beam to be measured to the second spectral module;

[0016] The second spectral module is configured to input the second-stage beam to be measured and perform spectral measurement on the second-stage beam to be measured;

[0017] After passing through the first incident slit, the beam to be measured is transmitted to the first spectral module and dispersed into a first-stage beam to be measured and a second-stage beam to be measured. The first detection wavelength range of the first spectral module does not overlap with the second detection wavelength range of the second spectral module.

[0018] According to a third aspect, in one embodiment, a detection device is provided, including: a wide-spectrum light source module, a transmission module, and the broadband spectral measurement device described in the first aspect or the second aspect;

[0019] The wide-spectrum light source module is configured to provide a wide-spectrum illumination beam; the illumination beam is configured to irradiate the object to be measured, and after being reflected or scattered by the object to be measured, information light is formed;

[0020] The transmission module is configured to collect the information light and use the information light as the beam to be measured and transmit it to the broadband spectral measurement device.

[0021] Based on the broadband spectral measurement device and the detection device according to the above embodiments, by using a cascaded broadband spectral measurement device to split the beam to be measured, and using the first spectral module and the second spectral module to simultaneously measure two split beams of the beam to be measured at different wavelengths, it is possible to achieve simultaneous measurement of at least two bands and improve the detection efficiency. Description of the Drawings

[0022] Figure 1 It is a schematic structural diagram (one) of a broadband spectral measurement device provided by an embodiment of the present application;

[0023] Figure 2 It is a schematic structural diagram (two) of a broadband spectral measurement device provided by an embodiment of the present application;

[0024] Figure 3Schematic diagram (III) of a broadband spectral measurement device provided by an embodiment of the present application;

[0025] Figure 4 Schematic diagram (IV) of a broadband spectral measurement device provided by an embodiment of the present application;

[0026] Figure 5 Schematic diagram (V) of a broadband spectral measurement device provided by an embodiment of the present application;

[0027] Figure 6 Schematic diagram (VI) of a broadband spectral measurement device provided by an embodiment of the present application;

[0028] Figure 7 Schematic diagram (VII) of a broadband spectral measurement device provided by an embodiment of the present application;

[0029] Figure 8 Schematic diagram (VIII) of a broadband spectral measurement device provided by an embodiment of the present application;

[0030] Figure 9 Schematic diagram (IX) of a broadband spectral measurement device provided by an embodiment of the present application;

[0031] Figure 10 Schematic diagram (X) of a broadband spectral measurement device provided by an embodiment of the present application;

[0032] Figure 11 Schematic diagram (XI) of a broadband spectral measurement device provided by an embodiment of the present application;

[0033] Figure 12 Schematic diagram (XII) of a broadband spectral measurement device provided by an embodiment of the present application;

[0034] Figure 13 Schematic diagram (XIII) of a broadband spectral measurement device provided by an embodiment of the present application;

[0035] Figure 14 Schematic diagram (XIV) of a broadband spectral measurement device provided by an embodiment of the present application;

[0037] Figure 15 Schematic diagram of a detection device provided by an embodiment of the present application.

[0038] Reference numerals: 101 - beam to be measured; 102 - first incident slit; 103 - first beam splitting component; 1100 - first spectral module; 110 - first dispersion component; 111 - first array detector; 120 - first mirror; 1200 - second spectral module; 121 - second incident slit; 123 - second dispersion component; 125 - second array detector; 401 - beam to be measured; 402 - first incident slit; 4100 - first spectral module; 410 - first dispersion component; 411 - first array detector; 412 - first reflection component; 420 - first beam splitting component; 4200 - second spectral module; 421 - second incident slit; 422 - second dispersion component; 424 - second array detector; 4300 - third spectral module; 431 - third incident slit; 433 - third dispersion component; 435 - third array detector; 450 - second reflection component; 601 - broad - spectrum light source; 602 - beam transmission module; 603 - polarizer; 604 - rotation compensator; 605 - focusing module; 606 - collection module; 607 - rotation compensator; 608 - analyzer; 609 - beam transmission module; 700 - broadband spectral measurement device. Detailed implementation manners

[0039] The present invention will be further described in detail below in conjunction with the accompanying drawings through specific implementation manners. Similar elements in different implementation manners are labeled with related similar reference numerals. In the following implementation manners, many detailed descriptions are provided to enable a better understanding of the present application. However, those skilled in the art can easily recognize that some of the features can be omitted in different situations, or can be replaced by other elements, materials, or methods. In some cases, some operations related to the present application are not shown or described in the specification to avoid overwhelming the core part of the present application with excessive descriptions. For those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations based on the descriptions in the specification and the general technical knowledge in the art.

[0040] In addition, the features, operations, or characteristics described in the specification can be combined in any appropriate manner to form various implementation manners. At the same time, the steps or actions in the method description can also be reordered or adjusted in an obvious manner by those skilled in the art. Therefore, the various sequences in the specification and the drawings are only for clearly describing a certain embodiment and do not mean that they are the necessary sequences, unless it is stated that a certain sequence must be followed.

[0041] The serial numbers assigned to the components in this document itself, such as "first", "second", etc., are only used to distinguish the described objects and do not have any sequential or technical meanings. And the "connection" and "coupling" mentioned in this application, unless otherwise specified, both include direct and indirect connection (coupling).

[0042] A spectral measurement device, such as a conventional spectrometer, generally includes an entrance slit, a dispersion component, and a detector. The dispersion component is used to disperse the incident light and reflect or transmit it to the detector, ultimately achieving spectral measurement. Among them, for the wavelength band of the incident light, the parameters of the dispersion component are different. For example, the parameters of the gratings used in the ultraviolet band and the infrared band are not the same. Therefore, a spectrometer can only perform spectral measurement on light within a certain wavelength band range. When the information beam formed by the component to be measured has a wide wavelength band, at least two types of spectrometers need to be used for sequential measurement, resulting in low measurement efficiency.

[0043] In the embodiments of this application, by setting two or three cascaded spectral modules, spectral measurement can be simultaneously performed on two or three wavelength bands, with high measurement efficiency.

[0044] In the embodiments of this application, the first spectral module, the second spectral module, and the third spectral module can each be correspondingly provided with their own entrance slit, dispersion component, and detector. Of course, the entrance slits of the two spectral modules can also be shared and can be set according to actual needs.

[0045] Embodiment 1

[0046] As Figures 1 to 5 shown, the embodiments of this application provide a broadband spectral measurement device, which may include: a first entrance slit 102, a first beam splitting component 103, a first spectral module 1100, and a second spectral module 1200.

[0047] The first entrance slit 102 is configured to input a beam to be measured 101. The beam to be measured 101 is a polychromatic beam. For example, the beam to be measured 101 may include polychromatic light within the wavelength range of 190 nm - 1700 nm.

[0048] The first beam splitting component 103 is configured to split the beam to be measured 101 to obtain a first beam and a second beam.

[0049] The first spectral module 1100 is configured to input the first beam and perform spectral measurement on the first beam.

[0050] The second spectral module 1200 is configured to input the second beam and perform spectral measurement on the second beam.

[0051] The beam to be measured 101 passes through the first incident slit 102 and then is transmitted to the first beam splitting component 103, where it is split into a first beam and a second beam. The first detection wavelength range of the first spectral module 1100 and the second detection wavelength range of the second spectral module 1200 do not completely overlap or do not overlap.

[0052] Among them, the first incident slit 102 is used to control the size and shape of the beam to be measured 101. By adjusting the width and height of the incident slit, the size and shape of the beam passing through the slit can be controlled. A narrower slit will limit the size of the beam, making it more focused and concentrated.

[0053] The first beam splitting component 103 can split / spectrally split the beam output from the first incident slit 102 to form two split beams for output. The first beam is output to the first spectral module 1100, and the second beam is output to the second spectral module 1200. After the two split beams are dispersed by the dispersion components corresponding to their respective bands, they are measured by their respective corresponding detectors, thereby enabling the two spectral modules to simultaneously measure the light in two bands.

[0054] For example, the first spectral module 1100 can be configured to measure the spectrum of light in the wavelength range of 190 nm - 900 nm, achieving spectral measurement from ultraviolet light to visible light. The second spectral module 1200 can be configured to measure the spectrum of light in the wavelength range of 900 nm - 1700 nm, achieving spectral measurement of infrared light. By adopting a two-stage cascaded method, broadband spectral measurement of the beam to be measured 101 can be realized.

[0055] In some embodiments, as Figures 2 to 5 shown, the first spectral module 1100 may include a first dispersion component 110 and a first array detector 111.

[0056] The first dispersion component 110 is configured to disperse the first beam, and the dispersed first beam is incident on the first array detector 111. The first dispersion component 110 can be a dispersion prism or a diffraction grating (also known as a grating). The diffraction grating can be a transmission grating or a reflection grating. As Figures 3 to 5 shown, the first dispersion component 110 can be a reflection grating.

[0057] The first array detector 111 is configured to perform spectral detection on the dispersed first beam. The first array detector 111 can be a CCD array detector, or other optical detection array detectors, such as a CMOS device, or a PMT photomultiplier tube.

[0058] It can be seen that the first incident slit 102 can be used as the incident slit of the first spectral module 1100. Alternatively, the first spectral module 1100 can also be additionally provided with an incident slit, which is used to receive the first light beam split by the first beam splitting component 103 and output it to the first dispersion component 110.

[0059] For another example, the first spectral module 1100 can also include a first transmission component, which is used to reflect, focus, etc. the light beam to be measured 101 and / or the first light beam. For example, it is a component for optical path transmission and focusing such as a mirror or an annular mirror.

[0060] In some embodiments, as Figures 2 to 5 shown, the second spectral module 1200 can include a second incident slit 121, a second dispersion component 123, and a second array detector 125.

[0061] The second incident slit 121 is configured to input the second light beam. According to actual needs, the second incident slit 121 can also not be used. However, based on the measurement of different bands, the light beam to be measured 101 passing through the first incident slit 102 is split again. After the second light beam is transmitted, its size or dimension may not be ideal, and the second light beam may not be directly dispersed by the second dispersion component 123. In order to improve the measurement accuracy, the second incident slit 121 can be set to control the size and shape of the second light beam.

[0062] The second dispersion component 123 is configured to disperse the second light beam, and the dispersed second light beam is output to the second array detector 125. The second dispersion component 123 can be a dispersion prism or a diffraction grating. The diffraction grating can be a transmission grating or a reflection grating. As Figures 3 to 5 shown, the second dispersion component 123 can be a reflection grating.

[0063] The second array detector 125 is configured to perform spectral detection on the dispersed second light beam. The second array detector 125 can be a CCD array detector, or other optical detection array detectors, such as a CMOS device, or a PMT photomultiplier tube.

[0064] For another example, the second spectral module 1200 can also include a second transmission component, which is used to reflect, focus, etc. the second light beam. As Figures 3 to 5 shown, for example, it is a component for optical path transmission and focusing such as a mirror or an annular mirror.

[0065] In some embodiments, as Figures 3 to 5 shown, the second spectral module 1200 can also include a first mirror 120.

[0066] The first mirror 120 is configured to focus or reflect the second light beam to the second incident slit 121. Since the second light beam formed by splitting the light beam 101 to be measured after passing through the first incident slit 102 can be a parallel light beam or a three-dimensional light beam, when the light beam 101 to be measured has a large spatial divergence angle, a parabolic mirror can be used to focus it to the second incident slit 121 so that the second light beam can enter better. When the second light beam is a parallel light beam, a plane mirror can be used to reflect it to the second incident slit 121.

[0067] In some embodiments, such as Figures 3 to 5 shown, the first beam splitting component 103 may include a dichroic sheet, a beam splitter, a beam splitting prism, or a reflector.

[0068] Such as Figure 3 shown, the dichroic sheet is configured to reflect the light within the first wavelength range in the light beam 101 to be measured to form a first light beam, and transmit the light outside the first wavelength range in the light beam 101 to be measured to form a second light beam. The first wavelength range can be set corresponding to the first detection wavelength range of the first spectral module 1100, and the second wavelength range can be set corresponding to the second detection wavelength range of the second spectral module 1200. The dichroic sheet can reflect or transmit the light of a specified wavelength and can be used to split the light beam 101 to be measured.

[0069] Such as Figure 4 shown, the reflector may have a smooth straight-edge, and is configured to partially cut into the light beam 101 to be measured. When the light beam 101 to be measured is transmitted to the area where the reflector is located and has a corresponding beam diameter, part of the light beam 101 is reflected, and the reflected part forms a first light beam, and the non-reflected part forms a second light beam. The reflector can cut into half of the light beam 101 to be measured, and the straight-edge is parallel to the optical axis of the light beam 101 to be measured, so that the straight-edge will not reflect to form interfering light. Half of the light beam 101 to be measured is reflected to the first spectral module 1100, and the other half is directly transmitted to the second spectral module 1200 without being reflected by the reflector, or is reflected by the first mirror 120 to the second incident slit 121. The reflector can split the light beam 101 to be measured by partial reflection.

[0070] Such as Figure 5 shown, the beam splitter or the beam splitting prism is configured to partially reflect the light beam 101 to be measured to form a first light beam; and transmit the remaining part of the light beam 101 to be measured to form a second light beam. For example, the beam splitter can be a semi-transmissive and semi-reflective beam splitter, and the beam splitter can split the light beam 101 to be measured by reflection and transmission.

[0071] The embodiments of the present application are not limited to the specific implementation form of the first beam splitting component 103, which may be a dichroic sheet, a beam splitting sheet, a beam splitting prism, or a reflector as described in the above embodiments. On this basis, optical elements such as a filter, a diaphragm, or a lens can be added.

[0072] In some embodiments, the first dispersion component 110 may include a first diffraction grating, and the second dispersion component 123 may include a second diffraction grating.

[0073] In summary, the broadband spectral measurement device provided by the embodiments of the present application can split / beam split the beam to be measured 101. The first beam and the second beam after beam splitting can be simultaneously subjected to spectral measurement by the first spectral module 1100 and the second spectral module 1200, improving the measurement efficiency of the beam to be measured 101 with a wide spectrum.

[0074] It should be noted that in the first embodiment of the present application, a two-stage cascading method is adopted to achieve simultaneous measurement of a wide spectrum. In fact, more spectral modules can be introduced. For example, the first beam and / or the second beam can be split again in the manner of the first beam splitting component 103 to form more beam splits, and multiple spectral modules are used for simultaneous measurement. For example, for three bands of 190nm - 400nm, 400nm - 900nm, and 900nm - 1700nm, a three-stage cascading method is used for measurement. That is to say, broadband spectral measurement devices with three-stage, four-stage, etc. multi-stage cascading can also be formed.

[0075] Embodiment 2

[0076] As Figure 6 And Figure 7 shown, the embodiments of the present application provide a broadband spectral measurement device, which may include: a first incident slit 402, a first reflection component 412, a first spectral module 4100, and a second spectral module 4200.

[0077] The first incident slit 402 is configured to input the beam to be measured 401, and the beam to be measured 401 is a polychromatic beam.

[0078] The first spectral module 4100 is configured to input the beam to be measured 401, disperse the beam to be measured 401, and perform spectral measurement on a part of the dispersed beam to be measured 401; this part is defined as the first-stage beam to be measured, and the remaining undetected part is defined as the second-stage beam to be measured.

[0079] The first reflection component 412 is configured to reflect the second-stage beam to be measured to the second spectral module 4200.

[0080] The second spectral module 4200 is configured to input the second-stage beam to be measured and perform spectral measurement on the second-stage beam to be measured.

[0081] After the beam to be measured 401 passes through the first incident slit 402, it is transmitted to the first spectral module 4100 and dispersed into a first-order beam to be measured and a second-order beam to be measured. The first detection wavelength range of the first spectral module 4100 does not completely overlap or does not overlap with the second detection wavelength range of the second spectral module 4200.

[0082] Among them, the first incident slit 402 is used to control the size and shape of the beam to be measured 401. By adjusting the width and height of the incident slit, the size and shape of the beam passing through the slit can be controlled. A narrower slit will limit the size of the beam, making it more focused and concentrated.

[0083] When the first spectral module 4100 performs spectral measurement on the beam to be measured 401, the first dispersion component 410 of the first spectral module 4100 will disperse the beam to be measured 401. The light of different wavelengths in the dispersed beam to be measured 401 will exit at different angles. For example, when using a diffraction grating for dispersion, the diffraction angles of the beams corresponding to different diffraction orders are not the same. The spatial angle of the diffraction grating can be set to make the wavelength band that needs to be measured by the first spectral module 4100 exit onto the first array detector 411 of the first spectral module 4100, and the wavelength bands that are not measured are collected by the first reflection component 412 and reflected to the second spectral module 4200, so as to realize the splitting of the dispersed beam to be measured 401 and realize the simultaneous measurement of the light in two wavelength bands by the two spectral modules.

[0084] It should be noted that the first-order beam to be measured and the second-order beam to be measured do not refer to the first order and the second order in the diffraction order, but after the beam to be measured 401 is dispersed, the colored light in some wavelength bands is the first-order beam to be measured, and the colored light in other wavelength bands is the second-order beam to be measured.

[0085] For example, the first spectral module 4100 can be configured to measure the spectrum of light with a wavelength range of 190 nm - 900 nm, realizing the spectral measurement from ultraviolet to visible light. The second spectral module 4200 can be configured to measure the spectrum of light with a wavelength range of 900 nm - 1700 nm, realizing the spectral measurement of infrared light. By adopting a two-stage cascaded method, the broadband spectral measurement of the beam to be measured 401 can be realized. Then the wavelength band of the first-order beam to be measured can be 190 nm - 900 nm, and the wavelength band of the second-order beam to be measured can be 900 nm - 1700 nm.

[0086] In some embodiments, the broadband spectral measurement device of the embodiment of the present application can be a three-stage cascaded broadband spectral measurement device, such as Figures 8 to 11 shown, the broadband spectral measurement device of the embodiment of the present application may further include: a first beam splitting component 420 and a third spectral module 4300.

[0087] The first reflection component 412 is configured to reflect the second-stage beam to be measured to the first beam splitting component 420.

[0088] The first beam splitting component 420 is configured to split the second-stage beam to be measured to obtain a second beam and a third beam.

[0089] The second spectral module 4200 is configured to input the second beam and perform spectral measurement on the second beam.

[0090] The third spectral module 4300 is configured to input the third beam and perform spectral measurement on the third beam.

[0091] The first detection wavelength range of the first spectral module 4100, the second detection wavelength range of the second spectral module 4200, and the third detection wavelength range of the third spectral module 4300 do not completely overlap or do not overlap pairwise.

[0092] The first beam splitting component 420 can split the beam output by the first reflection component 412, form two split beams from the second-stage beam to be measured, output the second beam to the second spectral module 4200, and output the third beam to the third spectral module 4300. After the two split beams are dispersed by the dispersion components in their corresponding bands, they are measured by their respective corresponding detectors, so as to realize the simultaneous measurement of light in two bands by the two spectral modules.

[0093] In some embodiments, when a three-stage cascaded broadband spectral measurement device is adopted, the first detection wavelength range can be 190 nm - 400 nm, the second detection wavelength range can be 400 nm - 900 nm, and the third detection wavelength range can be 900 nm - 1700 nm.

[0094] For example, the first spectral module 4100 can be configured to measure the spectrum of light with a wavelength range of 190 nm - 400 nm to realize the spectral measurement of ultraviolet light. The second spectral module 4200 can be configured to measure the spectrum of light with a wavelength range of 400 nm - 900 nm to realize the visible spectral measurement. The third spectral module 4300 can be configured to measure the spectrum of light with a wavelength range of 900 nm - 1700 nm to realize the spectral measurement of infrared light. By adopting a two-stage cascaded method, the broadband spectral measurement of the beam to be measured 401 can be realized.

[0095] In summary, by adopting three spectral modules to form a three-stage cascade, the spectral measurement of light in three bands can be carried out simultaneously. Specifically, the first spectral module 4100 can be used for dispersion first, and by partially reflecting and partially not reflecting the dispersed light, beam splitting can be realized, and the second-stage beam to be measured that is beam split is secondarily split by the first beam splitting component 420, so that the three-stage cascaded spectral measurement can be realized.

[0096] In some embodiments, such as Figure 10 and Figure 11 shown, the first reflection component 412 may include a parabolic mirror; the second spectral module 4200 may include a second entrance slit 421, and the third spectral module 4300 may include a third entrance slit 431.

[0097] The second entrance slit 421 is configured to input a second light beam; the third entrance slit 431 is configured to input a third light beam. The first reflection component 412 is configured to converge the second-order light beam to be measured, so that the second light beam is focused on the second entrance slit 421 and the third light beam is focused on the third entrance slit 431. The dispersed light beam to be measured 401 (i.e., the second-order light beam to be measured) has a divergence angle, and the divergence angle can be changed by focusing through the first reflection component 412, so that the second light beam and the third light beam are better incident on the second spectral module 4200 and the third spectral module 4300 respectively.

[0098] In some embodiments, such as Figures 9 to 11 shown, the first spectral module 4100 may include a first dispersion component 410 and a first array detector 411.

[0099] The first dispersion component 410 is used to disperse the light beam to be measured 401, and a part of the dispersed light beam to be measured 401 is output to the first array detector 411; the first dispersion component 410 may be a dispersion prism or a diffraction grating (also known as a diffraction grating), and the diffraction grating may be a transmission grating or a reflection grating. As Figures 10 to 11 shown, the first dispersion component 410 may be a reflection grating.

[0100] The first array detector 411 is configured to perform spectral detection on the first-order dispersed light beam to be measured. The first array detector 411 may be a CCD array detector, or other optical detection array detectors, such as a CMOS device, or a PMT photomultiplier tube.

[0101] It can be seen that the first entrance slit 402 can be used as the entrance slit of the first spectral module 4100. Or the first spectral module 4100 may additionally be provided with an entrance slit, which is used to receive the first light beam split by the first beam splitting component 420 and output it to the first dispersion component 410.

[0102] For another example, the first spectral module 4100 may further include a first transmission component, and the first transmission component is used to reflect, focus, etc. the light beam to be measured 401 and / or the first light beam, such as a component for optical path transmission and focusing using a mirror or an annular mirror.

[0103] In some embodiments, such as Figures 9 to 11As shown, the second spectral module 4200 may include a second incident slit 421, a second dispersion component 422, and a second array detector 424.

[0104] The second incident slit 421 is configured to input a second light beam; the dispersed light beam to be measured 401 (i.e., the second-order light beam to be measured) has a divergence angle, and the divergence angle can be changed by focusing through the first reflection component 412. After the second-order light beam to be measured is split, the obtained second light beam may have an unsatisfactory size or dimension after transmission, and the second light beam may not be directly dispersed by the second dispersion component 422. To improve the measurement accuracy, the second incident slit 421 can be set to control the size and shape of the second light beam.

[0105] The second dispersion component 422 is configured to disperse the second light beam, and the dispersed second light beam is emitted to the second array detector 424; the second dispersion component 422 can be a dispersion prism or a diffraction grating, and the diffraction grating can be a transmission grating or a reflection grating. As Figures 10 to 11 shown, the second dispersion component 422 can be a reflection grating.

[0106] The second array detector 424 is configured to perform spectral detection on the dispersed second light beam; the second array detector 424 can be a CCD array detector, or other optical detection array detectors, such as a CMOS device, or a PMT photomultiplier tube.

[0107] Again, for example, as Figure 10 shown in Figure 11 the second spectral module 4200 may further include a second transmission component, and the second transmission component is used to reflect, focus, etc. the second light beam, such as a component for optical path transmission and focusing using a mirror or an annular mirror.

[0108] In some embodiments, as Figures 9 to 11 shown, the third spectral module 4300 may include a third incident slit 431, a third dispersion component 433, and a third array detector 435.

[0109] The third incident slit 431 is configured to input a third light beam; the dispersed light beam to be measured 401 (i.e., the second-order light beam to be measured) has a divergence angle, and the divergence angle can be changed by focusing through the first reflection component 412. After the second-order light beam to be measured is split, the obtained third light beam may have an unsatisfactory size or dimension after transmission, and the third light beam may not be directly dispersed by the third dispersion component 433. To improve the measurement accuracy, the third incident slit 431 can be set to control the size and shape of the third light beam.

[0110] The third dispersion component 433 is configured to disperse the third light beam, and the dispersed third light beam is emitted to the third array detector 435; the third dispersion component 433 may employ a dispersion prism or a diffraction grating, and the diffraction grating may be a transmission grating or a reflection grating. For example, Figures 10 to 11 as shown, the third dispersion component 433 may be a reflection grating.

[0111] The third array detector 435 is configured to perform spectral detection on the dispersed third light beam. The third array detector 435 may employ a CCD array detector, or other optical detection array detectors, such as a CMOS device, or a PMT photomultiplier tube.

[0112] For another example, the third spectral module 4300 may further include a third transmission component, which is used to reflect, focus, etc. the third light beam. For example, it may employ components for optical path transmission and focusing such as a mirror or an annular mirror.

[0113] In some embodiments, as Figures 10 to 11 shown, the first beam splitting component 420 may include a dichroic sheet, a beam splitter sheet, a beam splitting prism, or a reflector.

[0114] As Figure 10 shown, the dichroic sheet is configured to reflect the light within the second wavelength range in the second-stage beam to be measured, forming a second light beam, and transmit the light outside the second wavelength range in the second-stage beam to be measured, forming a third light beam; the dichroic sheet may reflect or transmit the light of a specified wavelength and can be used to split the beam to be measured 401.

[0115] The beam splitter sheet or the beam splitting prism is configured to partially reflect the second-stage beam to be measured, forming a second light beam; and transmit the remaining part of the second-stage beam to be measured, forming a third light beam. For example, the beam splitter sheet may be a semi-transmissive and semi-reflective beam splitter sheet, and the beam splitter sheet can split the beam to be measured 401 through reflection and transmission.

[0116] As Figure 11 shown, the reflector has a smooth straight-edge, and is configured to partially cut into the second-stage beam to be measured. When the second-stage beam to be measured is transmitted to the area where the reflector is located and has a corresponding beam diameter, the second-stage beam to be measured is partially reflected, and the reflected part forms a second light beam, and the non-reflected part forms a third light beam. The reflector may cut into half of the beam to be measured 401, and the straight-edge is parallel to the optical axis of the beam to be measured 401, so that the straight-edge will not reflect to form interfering light, and half of the beam to be measured 401 is reflected to the first spectral module 4100, and the other half is directly transmitted to the second spectral module 4200 without being reflected by the reflector. The reflector can split the beam to be measured 401 through partial reflection.

[0117] The embodiments of the present application are not limited to the specific implementation form of the first beam splitting component 420, which may be a dichroic sheet, a beam splitting sheet, a beam splitting prism, or a reflector as described in the above embodiments. On this basis, optical elements such as a filter, a diaphragm, or a lens may be additionally provided.

[0118] In some embodiments, the first dispersion component 410 may include a first diffraction grating, the second dispersion component 422 may include a second diffraction grating, and the third dispersion component 433 may include a third diffraction grating.

[0119] In summary, the broadband spectrum measurement device provided by the embodiments of the present application can perform partial reflection on the to-be-measured beam 401 after dispersion to achieve beam splitting. The second-stage to-be-measured beam after beam splitting can be further split by the first beam splitting component 420. The second beam and the third beam obtained by splitting can be simultaneously subjected to spectrum measurement by the second spectrum module 4200 and the third spectrum module 4300, improving the measurement efficiency of the to-be-measured beam 401 with a wide spectrum.

[0120] It should be noted that in the second embodiment of the present application, two-stage cascading or three-stage cascading is adopted to achieve simultaneous measurement of a wide spectrum. In fact, more spectrum modules can be introduced. For example, the second beam and / or the third beam of the first-stage to-be-measured beam are split again to form more beam splits, and multiple spectrum modules are used for simultaneous measurement. That is to say, a broadband spectrum measurement device with four-stage, five-stage, or other multi-stage cascading can also be formed.

[0121] Embodiment Three

[0122] As Figures 12 to 14 , in the embodiments of the present application, based on the second embodiment, another beam splitting method may be adopted to split the second-stage to-be-measured beam, realizing a three-stage cascading broadband spectrum measurement device. In some embodiments, the broadband spectrum measurement device may include a first spectrum module 4100, a second spectrum module 4200, and may further include: a second reflection component 450 and a third spectrum module 4300.

[0123] The second spectrum module 4200 is configured to input the second-stage to-be-measured beam, perform dispersion on the second-stage to-be-measured beam, and perform spectrum measurement on a part of the dispersed second-stage to-be-measured beam; this part is defined as the third-stage to-be-measured beam, and the remaining undetected part is defined as the fourth-stage to-be-measured beam.

[0124] The second reflection component 450 is configured to reflect the fourth-stage to-be-measured beam to the third spectrum module 4300.

[0125] The third spectrum module 4300 is configured to input the fourth-stage to-be-measured beam and perform spectrum measurement on the third-stage to-be-measured beam.

[0126] The first detection wavelength range of the first spectral module 4100, the second detection wavelength range of the second spectral module 4200, and the third detection wavelength range of the third spectral module 4300 do not completely overlap or do not overlap pairwise.

[0127] For example, when the second spectral module 4200 performs spectral measurement on the beam to be measured 401, the first dispersion component 410 of the second spectral module 4200 disperses the beam to be measured 401, and the light with different wavelengths in the dispersed beam to be measured 401 exits at different angles. For example, when using a diffraction grating for dispersion, the diffraction angles of the beams corresponding to different diffraction orders are different. The angle of the diffraction grating can be set to make the wavelength band that needs to be measured by the second spectral module 4200 exit onto the second array detector 424 of the second spectral module 4200, and the wavelength bands that are not measured are collected by the second reflection component 450 and reflected to the third spectral module 4300, so that the dispersed beam to be measured 401 can be split, and simultaneous measurement by three spectral modules can be realized.

[0128] It should be noted that the third-order beam to be measured and the fourth-order beam to be measured do not refer to the third order and the fourth order in the diffraction order, but after the second-order beam to be measured is dispersed, the colored light of some wavelength bands is the third-order beam to be measured, and the colored light of other wavelength bands is the fourth-order beam to be measured.

[0129] For example, the second spectral module 4200 can be configured to measure the spectrum of light with a wavelength range of 400 nm - 900 nm to realize the spectral measurement of visible light. The third spectral module 4300 can be configured to measure the spectrum of light with a wavelength range of 900 nm - 1700 nm to realize the spectral measurement of infrared light. By using a three-stage cascading method, broadband spectral measurement of the beam to be measured 401 can be realized.

[0130] In summary, by using three spectral modules to form a three-stage cascade, spectral measurement of light in three wavelength bands can be performed simultaneously. Specifically, the first spectral module 4100 can be used for dispersion first, and beam splitting is achieved by partially reflecting the dispersed light; the second spectral module 4200 is used for dispersing the second-order beam to be measured, and partial measurement and partial reflection spectroscopy are performed on the dispersed second-order beam to be measured to form the fourth-order beam to be measured; the third spectral module 4300 performs spectral measurement on the fourth-order beam to be measured.

[0131] The limitations of the incident slit, dispersion component, and detector of the first spectral module 4100, the second spectral module 4200, and the third spectral module 4300 in the third embodiment of the present application can refer to the specific limitations in the second embodiment, and the limitations of other transmission components can also refer to the second embodiment.

[0132] In summary, the second embodiment provides a method of partially reflecting the dispersed light beam 401 to be measured to achieve the first beam splitting, and then realizing the second beam splitting through the first beam splitting component 420, that is, the beam splitting is performed before the second-stage light beam to be measured is dispersed; in the third embodiment, the first beam splitting is performed by partially reflecting the dispersed light beam 401 to be measured, and then the second beam splitting is performed by partially reflecting the dispersed second-stage light beam to be measured. Therefore, those skilled in the art can adopt a combination of the second embodiment and the third embodiment to perform pre-dispersion and / or post-dispersion beam splitting on a beam of light beam 401 to be measured, forming a multi-stage cascade, which can be a broadband spectrum measurement device with a multi-stage cascade of two, three, four, etc.

[0133] Embodiment 4

[0134] like Figure 15 As shown, an embodiment of the present application provides a detection device, which may include: a wide-spectrum light source module 601, a transmission module, and the broadband spectrum measurement device 700 described in Embodiments 1 to 3.

[0135] The wide spectrum light source module 601 is configured to provide a wide spectrum illumination beam; the illumination beam is configured to irradiate the device under test, and the illumination beam is reflected or scattered by the device under test to form information light. The information light can be used as the beam under test described in Embodiments 1 to 3.

[0136] The transmission module is configured to collect information light and transmit the information light as the measured light beam to the broadband spectrum measurement device 700. The transmission module may include an incident transmission module and an outgoing transmission module. The transmission module may include optical elements such as lenses, reflectors, tube lenses, and apertures.

[0137] In some embodiments, the transmission module may include an incident transmission module and an outgoing transmission module.

[0138] The incident transmission module may include a beam transmission module 602, a polarizer 603, a rotation compensator 604, and a focusing module 605. When polarized light does not need to be detected, the polarizer 603 and the rotation compensator 604 may not be required. The beam transmission module 602 may include a lens, a reflector, an aperture, etc. The focusing module 605 may include a convex lens, etc. The rotation compensator 604 may include a half-wave plate to compensate for the polarization angle. The polarizer 603 may include a polarizer.

[0139] The output transmission module may include a collection module 606, a rotation compensator 607, an analyzer 608, and a beam transmission module 609. When polarization light detection is not required, the analyzer 608 and the rotation compensator 607 may not be needed. The collection module 606 may include a convex lens or the like. The beam transmission module 609 may include lenses, mirrors, diaphragms, etc. The rotation compensator 607 may include a half-wave plate to compensate for the polarization angle. The analyzer 608 may include a polarizer.

[0140] By adopting the broadband spectrum measurement device 700, spectral measurements of the information light can be performed in multiple bands, improving the detection efficiency.

[0141] This document is described with reference to various exemplary embodiments. However, those skilled in the art will recognize that changes and modifications can be made to the exemplary embodiments without departing from the scope of this document. For example, various operation steps and the components for performing the operation steps can be implemented in different ways according to a specific application or considering any number of cost functions associated with the operation of the system (e.g., one or more steps can be deleted, modified, or incorporated into other steps).

[0142] Although the principles of this document have been shown in various embodiments, many modifications of the structures, arrangements, proportions, elements, materials, and components that are particularly applicable to specific environments and operating requirements can be used without departing from the principles and scope of this disclosure. The above modifications and other changes or corrections will be included within the scope of this document.

[0143] The foregoing specific description has been described with reference to various embodiments. However, those skilled in the art will recognize that various corrections and changes can be made without departing from the scope of this disclosure. Therefore, the consideration of this disclosure will be in an illustrative rather than a restrictive sense, and all such modifications will be included within its scope. Similarly, the advantages of the various embodiments, other advantages, and solutions to problems have been described above. However, the benefits, advantages, solutions to problems, and any elements that can produce these, or solutions that make them more explicit, should not be construed as critical, essential, or necessary. The term "comprising" and any other variants used herein are non-exclusive inclusions, such that a process, method, article, or device that includes a list of elements not only includes those elements but also other elements not explicitly listed or not belonging to the process, method, system, article, or device. In addition, the term "coupled" and any other variants used herein refer to physical connection, electrical connection, magnetic connection, optical connection, communication connection, functional connection, and / or any other connection.

[0144] Those skilled in the art will recognize that many changes may be made to the details of the above-described embodiments without departing from the basic principles of the present invention. Thus, the scope of the present invention should be determined solely by the appended claims.

Claims

1. A broadband spectral measurement device, characterized in that, Comprising: A first incident slit, a first beam splitting component, a first spectral module, and a second spectral module; The first incident slit is configured to input a beam to be measured, and the beam to be measured is a polychromatic beam; The first beam splitting component is configured to split the beam to be measured to obtain a first beam and a second beam; The first spectral module is configured to input the first beam and perform spectral measurement on the first beam; The second spectral module is configured to input the second beam and perform spectral measurement on the second beam; After passing through the first incident slit, the beam to be measured is transmitted to the first beam splitting component and split into the first beam and the second beam. The first detection wavelength range of the first spectral module does not overlap with the second detection wavelength range of the second spectral module.

2. The broadband spectral measurement device according to claim 1, wherein The first spectral module includes a first dispersion component and a first array detector; The first dispersion component is configured to disperse the first beam, and the dispersed first beam is incident on the first array detector; The first array detector is configured to perform spectral detection on the dispersed first beam; And / or, the second spectral module includes a second incident slit, a second dispersion component, and a second array detector; The second incident slit is configured to input the second beam; The second dispersion component is configured to disperse the second beam, and the dispersed second beam is incident on the second array detector; The second array detector is configured to perform spectral detection on the dispersed second beam.

3. The broadband spectral measurement device according to claim 2, wherein The second spectral module further includes a first reflector; The first reflector is configured to focus the second beam onto the second incident slit.

4. The broadband spectral measurement device according to claim 1, wherein The first beam splitting component includes a dichroic sheet or a beam splitter or a reflector; Wherein, the dichroic sheet is configured to reflect the light within the first wavelength range in the beam to be measured to form the first beam, and transmit the light outside the first wavelength range in the beam to be measured to form the second beam; The beam splitter is configured to reflect a part of the beam to be measured to form the first beam; transmit the remaining part of the beam to be measured to form the second beam; The reflector has a smooth straight-edge and is configured to partially cut into the beam to be measured, partially reflect the beam to be measured, the reflected part forms the first beam, and the non-reflected part forms the second beam.

5. The broadband spectral measurement device according to claim 2, wherein, The first dispersion component includes a first diffraction grating, and the second dispersion component includes a second diffraction grating.

6. The broadband spectral measurement device according to claim 1, wherein, The first detection wavelength range is 190 nm - 900 nm, and the second detection wavelength range is 900 nm - 1700 nm.

7. A broadband spectral measurement device, characterized in that, Comprising: A first incident slit, a first reflection component, a first spectral module, and a second spectral module; The first incident slit is configured to input a beam to be measured, and the beam to be measured is a polychromatic beam; The first spectral module is configured to input the beam to be measured, disperse the beam to be measured, and perform spectral measurement on the dispersed part of the beam to be measured; this part is defined as the first-level beam to be measured, and the remaining undetected part is defined as the second-level beam to be measured; The first reflection component is configured to reflect the second-level beam to be measured to the second spectral module; The second spectral module is configured to input the second-level beam to be measured and perform spectral measurement on the second-level beam to be measured; After passing through the first incident slit, the beam to be measured is transmitted to the first spectral module and dispersed into the first-level beam to be measured and the second-level beam to be measured. The first detection wavelength range of the first spectral module does not overlap with the second detection wavelength range of the second spectral module.

8. The broadband spectral measurement device according to claim 7, wherein, It further includes: A first beam splitting component and a third spectral module; The first reflection component is configured to reflect the second-level beam to be measured to the first beam splitting component; The first beam splitting component is configured to split the second-level beam to be measured to obtain a second beam and a third beam; The second spectral module is configured to input the second beam and perform spectral measurement on the second beam; The third spectral module is configured to input the third beam and perform spectral measurement on the third beam; The first detection wavelength range of the first spectral module, the second detection wavelength range of the second spectral module, and the third detection wavelength range of the third spectral module do not overlap pairwise.

9. The broadband spectral measurement device according to claim 8, wherein, The first spectral module includes a first dispersion component and a first array detector; The first dispersion component is used to disperse the beam to be measured, and the dispersed part of the beam to be measured exits to the first array detector; The first array detector is configured to perform spectral detection on the dispersed first-level beam to be measured; And / or, the second spectral module includes a second incident slit, a second dispersion component, and a second array detector; The second incident slit is configured to input the second beam; The second dispersion component is configured to disperse the second beam, and the dispersed second beam exits to the second array detector; The second array detector is configured to perform spectral detection on the dispersed second beam; And / or, the third spectral module includes a third incident slit, a third dispersion component, and a third array detector; The third incident slit is configured to input the third beam; The third dispersion component is configured to disperse the third beam, and the dispersed third beam exits to the third array detector; The third array detector is configured to perform spectral detection on the dispersed third beam.

10. The broadband spectral measurement device according to claim 8, characterized in that, The first detection wavelength range is 190nm - 400nm, the second detection wavelength range is 400nm - 900nm, and the third detection wavelength range is 900nm - 1700nm.

11. The broadband spectral measurement device according to claim 9, characterized in that, The first beam splitting component includes a dichroic filter or a beam splitter or a reflector; Wherein, the dichroic sheet is configured to reflect the light within the second wavelength range in the second-stage beam to be measured, forming the second beam, and transmit the light outside the second wavelength range in the second-stage beam to be measured, forming the third beam; The beam splitter is configured to partially reflect the second-stage beam to be measured, forming the second beam; and transmit the remaining part of the second-stage beam to be measured, forming the third beam; The reflector has a smooth straight-edge, and is configured to partially cut into the second-stage beam to be measured, partially reflect the second-stage beam to be measured, the reflected part forms the second beam, and the non-reflected part forms the third beam.

12. The broadband spectral measurement device according to claim 8, characterized in that, The first reflection assembly includes a parabolic mirror; the second spectral module includes a second entrance slit, and the third spectral module includes a third entrance slit; The second entrance slit is configured to input the second beam; the third entrance slit is configured to input the third beam; The first reflection assembly is configured to converge the second-stage beam to be measured, so that the second beam is focused on the second entrance slit and the third beam is focused on the third entrance slit.

13. The broadband spectral measurement device according to claim 9, characterized in that, The first dispersion assembly includes a first diffraction grating, the second dispersion assembly includes a second diffraction grating, and the third dispersion assembly includes a third diffraction grating.

14. The broadband spectral measurement device according to claim 7, characterized in that, Further included are: a second reflection assembly and a third spectral module; The second spectral module is configured to input the second-stage beam to be measured, disperse the second-stage beam to be measured, and perform spectral measurement on a part of the dispersed second-stage beam to be measured; define this part as the third-stage beam to be measured, and define the remaining undetected part as the fourth-stage beam to be measured; The second reflection assembly is configured to reflect the fourth-stage beam to be measured to the third spectral module; The third spectral module is configured to input the fourth-stage beam to be measured and perform spectral measurement on the third-stage beam to be measured; The first detection wavelength range of the first spectral module, the second detection wavelength range of the second spectral module, and the third detection wavelength range of the third spectral module do not overlap pairwise.

15. A detection device, characterized in that, Including: A wide-spectrum light source module, a transmission module, and the broadband spectral measurement device according to any one of claims 1-14; The wide-spectrum light source module is configured to provide a wide-spectrum illumination beam; the illumination beam is configured to irradiate the object to be measured, and after reflection or scattering by the object to be measured, information light is formed; The transmission module is configured to collect the information light and transmit the information light as the beam to be measured to the broadband spectral measurement device.

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