A device and method for measuring dynamic performance of fast-reflecting mirror

By combining a rocking table and gyroscope with camera image acquisition, the problems of contact measurement and gyroscope drift error in the dynamic performance measurement of fast-reflection mirrors are solved, achieving high-precision and convenient dynamic performance evaluation and supporting single-axis and dual-axis compensation performance measurement.

CN120213423BActive Publication Date: 2025-09-16CHANGCHUN SUMMIT PHOTOELECTRIC TECH CO LTD
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Patent Information

Application Number
CN202510695712.8
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2025-05-28
Publication Date
2025-09-16
Estimated Expiration
2045-05-28

AI Technical Summary

Technical Problem

In the existing technology, the dynamic performance measurement method of the fast reflex mirror has the following problems: the contact measurement method cannot reflect the actual optical system compensation effect, the gyroscope drift error affects the accuracy of the measurement results, and it is difficult to meet the requirements of high precision and convenience.

Method used

A rocking platform is used to simulate external dynamic disturbances. Combined with gyroscope and camera image acquisition, the dynamic performance of the fast mirror is measured through spot trajectory analysis. FPGA closed-loop control and PID algorithm are used for compensation. Optical feedback and inertial measurement are integrated to provide gyroscope drift calibration and achieve high-precision dynamic performance evaluation.

Benefits of technology

It realizes high-precision compensation performance evaluation of the fast-reflection mirror under different working conditions, reduces the influence of gyro drift error, improves the accuracy and convenience of measurement, and supports single-axis and dual-axis dynamic performance evaluation.

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Abstract

The present invention relates to the field of optical measurement, and in particular to a device and method for measuring the dynamic performance of a fast reflex mirror. The device comprises: a swing stage for simulating external dynamic disturbances of the fast reflex mirror; a gyroscope for collecting motion data of the azimuth axis and the pitch axis of the swing stage; a main control host computer for controlling the swing of the swing stage; a fast reflex mirror controller for receiving the motion data of the swing stage monitored in real time by the gyroscope, generating a reverse control signal according to the received motion data to control the fast reflex mirror to perform reverse compensation motion; and a camera for collecting image data of a light spot on the fast reflex mirror; an image acquisition and analysis host computer for analyzing the motion trajectory of the light spot according to the received image data, calculating the gyroscope drift rate, and obtaining the compensation effect of the fast reflex mirror on the swing stage motion in a single-axis direction, thereby testing the single-axis compensation dynamic performance of the fast reflex mirror. The present invention can accurately and conveniently evaluate the compensation performance of the fast reflex mirror under different working conditions.
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Description

Technical Field

[0001] The present invention relates to the field of optical measurement technology, and in particular to a device and method for measuring the dynamic performance of a fast-reflecting mirror. Background Art

[0002] As a core optical component that enables rapid and precise adjustment of light beam direction, fast-reflection mirrors (SRMs) have widespread and critical applications in high-end fields such as laser communications, adaptive optical imaging, and high-precision laser aiming. Their dynamic performance directly determines the performance ceiling of the entire optical system. Therefore, accurately measuring the dynamic performance of SRMs has important engineering significance and application value.

[0003] Traditional measurement methods rely primarily on accelerometers or angular displacement sensors to directly acquire the motion parameters of the FMR. However, these methods have significant drawbacks: First, the sensor installation process is complex and cumbersome, easily introducing additional mechanical errors. Second, these contact-based measurement methods cannot directly reflect the FMR's compensation effect within the actual optical system. Furthermore, gyroscope drift errors can significantly impact dynamic measurement results, leading to data distortion, and existing technologies have yet to offer effective solutions. Overall, existing measurement solutions have limitations in terms of accuracy, ease of operation, and comprehensive evaluation of FMR performance, making them difficult to meet the high standards required for practical engineering applications. Summary of the Invention

[0004] To address the technical issues in existing technologies for measuring the dynamic performance of fast-reflection mirrors, such as the inability of contact-based measurement methods to directly reflect the compensation effect of the fast-reflection mirror in the actual optical system and the significant impact of gyro drift errors on dynamic measurement results, leading to data distortion, the present invention provides a device and method for measuring the dynamic performance of a fast-reflection mirror. The technical solution is as follows:

[0005] On the one hand, a device for measuring the dynamic performance of a fast reflex mirror is provided, which includes: a swing stage, a fast reflex mirror, a fast reflex mirror controller, a power supply, a camera, a point light source, an adjustment frame, a gyroscope, a main control host computer, and an image acquisition and analysis host computer;

[0006] The gyroscope and the quick-reflection mirror are respectively set on the swing platform, which is connected to the main control computer.

[0007] The quick-reflection mirror controller is communicatively connected with the gyroscope and the quick-reflection mirror respectively;

[0008] The camera is connected to the image acquisition and analysis host computer in communication, and the image acquisition and analysis host computer is connected to the quick-reflection mirror controller in communication;

[0009] The point light source is the target light source, and the fast reflector receives the light from the target light source to produce a light spot;

[0010] The swing stage is equipped with a dual-axis drive system for azimuth and pitch axes, which is used to simulate external dynamic disturbances of the fast-reflection mirror;

[0011] Gyroscope, used to collect motion data of the azimuth and pitch axes of the swing platform;

[0012] The main control computer is used to input driving information to the swing stage and control the swing stage to perform single-axis or dual-axis periodic swing according to the fixed amplitude and frequency set by the main control computer;

[0013] A quick-reflection mirror controller is used to receive motion data collected by the gyroscope in real time, and to generate a reverse control signal based on the received motion data to control the quick-reflection mirror to perform reverse compensation motion; the quick-reflection mirror controller is also used to receive the gyroscope drift rate and to perform zero-bias drift calibration on the gyroscope based on the gyroscope drift rate;

[0014] A camera is used to collect image data of the light spot on the quick-reflection mirror and transmit the image data of the light spot to an image acquisition and analysis host computer;

[0015] The image acquisition and analysis host computer is used to receive the image data collected by the camera, analyze the motion trajectory of the light spot based on the received image data, and calculate the gyroscope drift rate; the quick reflex mirror controller is also used to receive the gyroscope drift rate input by the image acquisition and analysis host computer; transmit the gyroscope drift rate to the quick reflex mirror controller, and the quick reflex mirror controller performs zero-bias drift calibration on the gyroscope based on the gyroscope drift rate. By analyzing the image data, the compensation effect of the quick reflex mirror on the swing stage movement in the single-axis direction is obtained, thereby testing the single-axis compensation dynamic performance of the quick reflex mirror.

[0016] The swing stage is used to simulate external dynamic disturbances and features a dual-axis servo drive structure: azimuth and pitch. The stage controls the structure mounted on it to periodically swing along these axes, either single-axis or dual-axis, at a fixed amplitude and frequency set by the host control computer. This allows for independent control of the azimuth and pitch axes. The quick-reflex mirror and quick-reflex mirror controller are mounted on the swing stage. The quick-reflex mirror is secured to the stage via an adapter and integrates dual-axis rotation capabilities. The quick-reflex mirror controller integrates the swing stage's motion velocity, measured in real time by the gyroscope, and converts this into a position control variable for the quick-reflex mirror. This controller controls the quick-reflex mirror's yaw and compensates for the optical path between the point light source, the quick-reflex mirror, and the camera. The fast-reflection mirror controller utilizes an FPGA-based closed-loop control architecture, supporting a PID control algorithm with a control cycle of ≤10μs, ensuring fast response and precise control. The measurement device also includes a power supply, which powers the fast-reflection mirror controller and point light source. A camera collects image data after the fast-reflection mirror is stabilized. The point light source serves as the target light source, and its spot is adjusted to the center of the camera's field of view via an adjustment mount. A gyroscope is directly mounted on the swing stage, collecting the stage's motion data in real time and transmitting it to the fast-reflection mirror controller. The host computer system includes a main control computer and an image acquisition and analysis computer. The main control computer sets the stage's motion parameters and coordinates the operations of various modules. The image acquisition and analysis computer integrates functions such as parameter setting, real-time image data acquisition, image display, and test report generation, automating the measurement process and streamlining data processing.

[0017] On the other hand, a method for measuring the dynamic performance of a fast reflex mirror is provided. The method for measuring the dynamic performance of a fast reflex mirror uses the above-mentioned fast reflex mirror dynamic performance measuring device, and the method comprises the following steps:

[0018] Step 1: System initialization: Adjust the point light source, start the point light source, camera and quick-reflection mirror controller in sequence, and keep the swing stage still;

[0019] Step 2: Perform drift compensation calibration and drift compensation verification on the gyroscope. The drift compensation calibration parameters of the gyroscope are calculated by analyzing the drift trajectory of the camera's recorded light spot center.

[0020] Step 3: Drive the swing stage to simulate the external environment of the quick-reflection mirror, and the gyroscope collects the motion data of the swing stage. The swing stage is driven by the main control host computer to make the swing stage swing in a single axis or a dual-axis composite swing;

[0021] Step 4: Start the quick-reflex mirror controller, which receives the motion data of the azimuth axis, pitch axis, or both the azimuth axis and pitch axis of the swing stage, and controls the quick-reflex mirror to enter the real-time compensation mode; the gyroscope collects the motion data of the azimuth axis or pitch axis of the swing stage and inputs it into the quick-reflex mirror controller. The quick-reflex mirror controller can integrate the swing stage motion speed measured in real time by the gyroscope, convert it into a quick-reflex mirror position control value, control the deflection of the quick-reflex mirror, and compensate the optical path between the point light source, the quick-reflex mirror, and the camera; the quick-reflex mirror controller generates a reverse control signal based on the motion data of the azimuth axis or pitch axis collected by the gyroscope, and drives the quick-reflex mirror to perform azimuth axis compensation motion or pitch axis compensation motion according to the reverse control signal;

[0022] Step 5: The image data of the light spot collected by the camera's fast mirror is transmitted to the image acquisition and analysis host computer;

[0023] Step 6: Image acquisition and analysis The host computer calculates and processes the image data of the light spot, measures and judges the dynamic performance of the fast mirror through the light spot trajectory characteristics; Image acquisition and analysis The host computer calculates the centroid of each frame of the image to obtain the X-axis offset Δx of the light spot corresponding to the azimuth axis, or obtains the Y-axis offset Δy of the light spot corresponding to the pitch axis, performs statistical analysis on the Δx sequence or Δy sequence, calculates its peak-to-peak value (PP) and standard deviation (σ), and calculates its peak-to-peak value (PP) and standard deviation (σ) according to the Δx sequence as the evaluation index of the azimuth axis tracking error, and calculates its peak-to-peak value (PP) and standard deviation (σ) according to the Δy sequence as the evaluation index of the pitch axis tracking error. The peak-to-peak value reflects the maximum fluctuation range of the light spot offset after compensation, and the standard deviation reflects the stability of the compensation process. The synthetic error of the light spot coordinates (Δx, Δy) of each frame of the image is calculated as the evaluation index of the dual-axis comprehensive tracking error; define the maximum value of the X-axis and Y-axis offsets and , the cross-coupling degree is calculated to quantify the degree of mutual influence between the two-axis motions.

[0024] The beneficial effects brought about by the technical solution provided by the embodiment of the present invention include at least:

[0025] The present invention provides a device and method for measuring the dynamic performance of a fast reflex mirror, which can accurately and conveniently evaluate the compensation performance of the fast reflex mirror under different working conditions, and provide reliable data support for its performance optimization. By providing a gyro drift error compensation algorithm, the drift compensation calibration of the gyroscope is realized, and the influence of the gyro drift error on the dynamic performance measurement results of the fast reflex mirror is reduced, thereby realizing high-precision evaluation of the single-axis and dual-axis dynamic compensation performance of the fast reflex mirror. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0027] Figure 1 This is a structural block diagram of a fast mirror dynamic performance measurement device provided by an embodiment of the present invention;

[0028] Figure 2 is a gyroscope drift compensation calibration flow chart provided by an embodiment of the present invention;

[0029] Figure 3 This is a flow chart of a method for measuring the dynamic performance of a fast-reflection mirror azimuth axis provided by an embodiment of the present invention;

[0030] Figure 4 This is a flow chart of a method for measuring the dynamic performance of a fast-reflection mirror in pitch axis according to an embodiment of the present invention;

[0031] Figure 5 This is a flow chart of a method for measuring the dual-axis dynamic performance of a fast-reflection mirror, namely, the azimuth axis and the pitch axis, provided by an embodiment of the present invention.

[0032] In the figure: a swing stage 1, a quick reflex mirror 2, a quick reflex mirror controller 3, a power supply 4, a camera 5, a point light source 6, an adjustment frame 7, a gyroscope 8, a main control host computer 9, an image acquisition and analysis host computer 10, and an adapter 11. DETAILED DESCRIPTION

[0033] The technical solution of the present invention is described below in conjunction with the accompanying drawings.

[0034] In the embodiments of the present invention, words such as "exemplarily" and "for example" are used to indicate examples, illustrations, or explanations. Any embodiment or design described as an "exemplary" in the present invention should not be interpreted as being preferred or advantageous over other embodiments or designs. Rather, the use of the word "exemplary" is intended to present concepts in a concrete manner. Furthermore, in the embodiments of the present invention, "and / or" can mean both or either of the two.

[0035] In the embodiments of the present invention, the terms "image" and "picture" may sometimes be used interchangeably. It should be noted that, when the distinction is not emphasized, the meanings they convey are the same. The terms "of," "corresponding," and "corresponding" may sometimes be used interchangeably. It should be noted that, when the distinction is not emphasized, the meanings they convey are the same.

[0036] In the embodiments of the present invention, sometimes a subscript such as W1 may be written as a non-subscript such as W1. When the difference is not emphasized, the meanings to be expressed are the same.

[0037] In order to make the technical problems, technical solutions and advantages to be solved by the present invention clearer, a detailed description will be given below with reference to the accompanying drawings and specific embodiments.

[0038] like Figure 1 As shown, an embodiment of the present invention provides a device for measuring the dynamic performance of a fast reflex mirror, the device comprising: a swing stage 1, a fast reflex mirror 2, a fast reflex mirror controller 3, a power supply 4, a camera 5, a point light source 6, an adjustment frame 7, a gyroscope 8, a main control host computer 9, and an image acquisition and analysis host computer 10;

[0039] The gyroscope 8 and the quick-reflection mirror 2 are respectively arranged on the swing platform 1, and the swing platform 1 is connected to the main control host computer 9 for communication.

[0040] The quick-reflection mirror controller 3 is in communication with the gyroscope 8 and the quick-reflection mirror 2 respectively;

[0041] The camera 5 is in communication with the image acquisition and analysis host computer 10, and the image acquisition and analysis host computer 10 is in communication with the quick-reflection mirror controller 3;

[0042] The point light source 6 is the target light source, and the fast mirror 2 receives the light from the target light source to generate a light spot;

[0043] The swing stage 1 is equipped with a dual-axis drive system of azimuth and pitch axes, which is used to simulate the external dynamic disturbance of the fast-reflection mirror 2;

[0044] The gyroscope 8 is used to collect the motion data of the azimuth axis and the pitch axis of the swing platform 1;

[0045] The main control host computer 9 is used to input driving information to the swing stage 1 and control the swing stage 1 to perform single-axis or dual-axis periodic swing according to the fixed amplitude and frequency set by the main control host computer 9;

[0046] The quick-reflection mirror controller 3 is used to receive the motion data collected in real time by the gyroscope 8 and generate a reverse control signal based on the received motion data to control the quick-reflection mirror 2 to perform reverse compensation movement; the quick-reflection mirror controller 3 is also used to receive the drift rate of the gyroscope 8 and calibrate the zero bias drift of the gyroscope 8 based on the drift rate of the gyroscope 8;

[0047] The camera 5 is used to collect image data of the light spot on the quick-reflection mirror 2 and transmit the image data of the light spot to the image acquisition and analysis host computer 10;

[0048] The image acquisition and analysis host computer 10 is used to receive the image data collected by the camera 5, and analyze the motion trajectory of the light spot based on the received image data, and calculate the drift rate of the gyroscope 8; the quick reflex mirror controller 3 is also used to receive the drift rate of the gyroscope 8 input by the image acquisition and analysis host computer 10; transmit the drift rate of the gyroscope 8 to the quick reflex mirror controller 3, and the quick reflex mirror controller 3 performs zero-bias drift calibration on the gyroscope 8 based on the drift rate of the gyroscope 8. By analyzing the image data, the compensation effect of the quick reflex mirror 2 on the movement of the swing stage 1 in the single-axis direction is obtained, thereby testing the single-axis compensation dynamic performance of the quick reflex mirror 2.

[0049] The swing stage 1 is used to simulate external dynamic disturbances and features a dual-axis servo drive structure: azimuth and pitch. The swing stage 1 controls the structure mounted thereon to periodically swing along these axes, either single-axis or dual-axis, at a fixed amplitude and frequency set by the master control computer 9. This allows for independent control of the azimuth and pitch axes. A quick-reflex mirror 2 and a quick-reflex mirror controller 3 are mounted on the swing stage 1. The quick-reflex mirror 2 is secured to the swing stage 1 via an adapter 11, integrating both azimuth and pitch rotation capabilities. The quick-reflex mirror controller 3 integrates the swing stage 1's motion velocity, as measured in real time by the gyroscope 8, and converts this into a position control variable for the quick-reflex mirror 2. This controller controls the deflection of the quick-reflex mirror 2 and compensates for the optical path between the point light source 6, the quick-reflex mirror 2, and the camera 5. A gyroscope 8 compensation system is provided in the quick reflex mirror controller 3. The gyroscope 8 compensation system adopts an FPGA-based closed-loop control architecture, supports a PID control algorithm, and has a control period of ≤10μs, ensuring fast response and precise control. The measuring device is also provided with a power supply 4, which supplies power to the quick reflex mirror controller 3 and the point light source 6. The camera 5 is used to collect image data after the quick reflex mirror 2 is stabilized. The point light source 6 serves as the target light source, and its light spot is adjusted to the center of the field of view of the camera 5 through the adjustment frame 7. The gyroscope 8 is directly installed on the swing stage 1 to collect the motion data of the swing stage 1 in real time and transmit it to the quick reflex mirror controller 3. The host computer system includes a main control host computer 9 and an image acquisition and analysis host computer 10. The main control host computer 9 is used to set the motion parameters of the swing platform 1 and coordinate the work of each module; the image acquisition and analysis host computer 10 is provided with image acquisition and analysis software, and the image acquisition and analysis host computer 10 integrates functions such as parameter setting, real-time image data acquisition, image display and test report generation. The image acquisition and analysis host computer 10 receives image data collected by the camera 5, analyzes the motion trajectory of the light spot based on the received image data, and calculates the drift rate of the gyroscope 8; the fast reflex mirror controller 3 receives the drift rate of the gyroscope 8 input by the image acquisition and analysis host computer 10, and performs zero bias drift calibration on the gyroscope 8 based on the drift rate of the gyroscope 8; the image acquisition and analysis host computer 10 analyzes the image data to obtain the compensation effect of the fast reflex mirror 2 on the motion of the swing platform 1 in the uniaxial direction, thereby measuring the uniaxial compensation dynamic performance of the fast reflex mirror 2. By measuring the azimuth axis and pitch axis of the fast reflex mirror 2 simultaneously, the dual-axis compensation dynamic performance of the fast reflex mirror 2 can be measured. The image acquisition and analysis host computer 10 realizes the automation of the measurement process and the efficiency of data processing.

[0050] In one embodiment, if Figure 3 As shown, the technical solution provided by this application proposes a method for measuring the dynamic performance of a fast reflex mirror. The method uses the above-mentioned fast reflex mirror dynamic performance measurement device and applies the method to test the pitch axis performance of the fast reflex mirror:

[0051] The measurement method includes the following steps:

[0052] Step 1: System initialization: Adjust the point light source, start the point light source, camera and quick-reflection mirror controller in sequence, and keep the swing stage still;

[0053] Step 1: Specific operation process: Turn on the power, turn off the swing stage drive system of the main control computer, start the point light source, camera and fast reflex mirror controller in sequence, initialize each system, adjust the point light source, use the point light source as the target light source, and adjust its light spot to the center of the camera's field of view through the adjustment frame; accurately align the center of the light spot with the center of the camera's field of view, with the error controlled within 1 pixel.

[0054] Step 2: Perform drift compensation calibration and drift compensation verification on the gyroscope. The drift compensation calibration parameters of the gyroscope are calculated by analyzing the drift trajectory of the camera's recorded light spot center.

[0055] The drift compensation calibration of the gyroscope includes: recording the drift trajectory of the center of the light spot through a camera, calculating the gyroscope drift rate through image acquisition and analysis by the host computer, writing the gyroscope drift rate into the compensation parameter table of the fast reaction mirror controller to obtain the drift calibration parameter, compensating the gyroscope drift according to the drift calibration parameter, and completing the calibration of the gyroscope zero bias drift.

[0056] Specific gyroscope drift compensation calibration process: Figure 2 As shown in the figure, the camera continuously captures 60,000 frames of light spot images at a frame rate of 200 fps for 5 minutes. The host computer receives and analyzes the images and calculates the centroid of each frame to obtain a sequence of light spot offsets in the pixel coordinate system. This sequence is linearly fitted using the least squares method. The slope of the fitted line is the gyro drift rate ω (unit: ° / h), which is written into the compensation parameter table of the fast-reflection mirror controller to complete the calibration of the gyro bias drift.

[0057] Drift compensation verification involves starting the fast-reflection mirror controller and allowing the gyroscope compensation system in the controller to run continuously for a period of time while receiving an external disturbance signal. A camera is used to record the drift trajectory of the light spot center, and the root mean square (RMS) value of the light spot center drift is calculated before and after gyroscope drift compensation is performed using drift calibration parameters. The difference between the two values ​​is then compared. If the drift is significantly reduced after compensation, the effectiveness of the gyroscope drift compensation algorithm is verified.

[0058] The specific gyroscope drift compensation verification process: After gyroscope drift compensation calibration, the swing stage remains stationary to prevent external disturbances from affecting the test results. The quick-reaction mirror controller is activated, and the gyroscope compensation system within the quick-reaction mirror controller operates continuously for 5 minutes while receiving an external disturbance signal to compensate for gyroscope drift. During this time, the camera captures a real-time spot image at a frame rate of 200 fps, recording the drift trajectory of the spot center. The RMS value of the spot center drift is calculated before gyroscope drift compensation and after gyroscope drift compensation using the drift calibration parameters. The difference between the two is compared. If the drift is significantly reduced after compensation, the effectiveness of the gyroscope drift compensation algorithm is verified.

[0059] Step 3: Drive the swing stage through the main control computer to make the azimuth axis of the swing stage swing; specifically, set the azimuth axis of the swing stage to perform sinusoidal swing through the main control computer with the following parameters: frequency 10 Hz, amplitude 0.05°, and lock the pitch axis to prevent it from producing unnecessary movement.

[0060] Step 4: Start the quick reflex mirror controller to put its quick reflex mirror compensation system into real-time compensation mode. The gyroscope collects the motion data of the azimuth axis and inputs it into the quick reflex mirror controller. The quick reflex mirror controller generates a reverse control signal based on the motion data of the azimuth axis collected by the gyroscope. The quick reflex mirror controller drives the quick reflex mirror to perform azimuth axis compensation movement according to the reverse control signal.

[0061] Step 5: The camera continuously captures 30 seconds of light spot motion trajectory images at a frame rate of 200 fps and transmits them to the image acquisition and analysis host computer, for a total of 6000 frames.

[0062] Step 6: Image acquisition and analysis The host computer calculates the centroid of each frame of the image to obtain the offset Δx of the light spot on the X-axis (corresponding to the azimuth axis). Statistical analysis is performed on the Δx sequence to calculate its peak-to-peak value PP and standard deviation σ. These are used as evaluation indicators of the azimuth axis tracking error. The peak-to-peak value reflects the maximum fluctuation range of the light spot offset after compensation, and the standard deviation reflects the stability of the compensation process. The evaluation indicator of the azimuth axis tracking error, the peak-to-peak value reflects the maximum fluctuation range of the light spot offset after compensation, and the standard deviation reflects the stability of the compensation process, and the dynamic performance of the fast mirror is measured.

[0063] In another embodiment, if Figure 4 As shown, the dynamic performance measurement method of the fast reflex mirror provided by the present invention is used to test the pitch axis performance of the fast reflex mirror:

[0064] The measurement method includes the following steps:

[0065] Step 1: System initialization: Adjust the point light source, start the point light source, camera and quick-reflection mirror controller in sequence, and keep the swing stage still;

[0066] Step 1: Specific operation process: Turn on the power, turn off the swing stage drive system of the main control computer, start the point light source, camera and fast reflex mirror controller in sequence, initialize each system, adjust the point light source, use the point light source as the target light source, and adjust its light spot to the center of the camera's field of view through the adjustment frame; accurately align the center of the light spot with the center of the camera's field of view, with the error controlled within 1 pixel.

[0067] Step 2: Perform drift compensation calibration and drift compensation verification on the gyroscope. The drift compensation calibration parameters of the gyroscope are calculated by analyzing the drift trajectory of the camera's recorded light spot center.

[0068] The drift compensation calibration of the gyroscope includes: recording the drift trajectory of the center of the light spot through a camera, calculating the gyroscope drift rate through image acquisition and analysis by the host computer, writing the gyroscope drift rate into the compensation parameter table of the fast reaction mirror controller to obtain the drift calibration parameter, compensating the gyroscope drift according to the drift calibration parameter, and completing the calibration of the gyroscope zero bias drift.

[0069] Specific gyroscope drift compensation calibration process: Figure 2 As shown in the figure, the camera continuously captures 60,000 frames of light spot images at a frame rate of 200 fps for 5 minutes. The host computer receives and analyzes the images and calculates the centroid of each frame to obtain a sequence of light spot offsets in the pixel coordinate system. This sequence is linearly fitted using the least squares method. The slope of the fitted line is the gyro drift rate ω (unit: ° / h), which is written into the compensation parameter table of the fast-reflection mirror controller to complete the calibration of the gyro bias drift.

[0070] Drift compensation verification involves starting the fast-reflection mirror controller and allowing the gyroscope compensation system in the controller to run continuously for a period of time while receiving an external disturbance signal. A camera is used to record the drift trajectory of the light spot center, and the root mean square (RMS) value of the light spot center drift is calculated before and after gyroscope drift compensation is performed using drift calibration parameters. The difference between the two values ​​is then compared. If the drift is significantly reduced after compensation, the effectiveness of the gyroscope drift compensation algorithm is verified.

[0071] The specific gyroscope drift compensation verification process: After gyroscope drift compensation calibration, the swing stage remains stationary to prevent external disturbances from affecting the test results. The quick-reaction mirror controller is activated, and the gyroscope compensation system within the quick-reaction mirror controller operates continuously for 5 minutes while receiving an external disturbance signal to compensate for gyroscope drift. During this time, the camera captures a real-time spot image at a frame rate of 200 fps, recording the drift trajectory of the spot center. The RMS value of the spot center drift is calculated before gyroscope drift compensation and after gyroscope drift compensation using the drift calibration parameters. The difference between the two is compared. If the drift is significantly reduced after compensation, the effectiveness of the gyroscope drift compensation algorithm is verified.

[0072] Step 3: Drive the swing stage through the main control computer to make the pitch axis of the swing stage swing; specifically, set the pitch axis of the swing stage to perform sinusoidal swing through the main control computer with the following parameters: frequency 10Hz, amplitude 0.05°, and lock the azimuth axis to prevent it from producing unnecessary movement.

[0073] Step 4: Start the quick-reflection mirror controller, which controls the quick-reflection mirror to enter a real-time compensation mode. The gyroscope collects motion data of the pitch axis and inputs it into the quick-reflection mirror controller. The quick-reflection mirror controller generates a reverse control signal based on the motion data of the azimuth axis or pitch axis collected by the gyroscope, and drives the quick-reflection mirror to perform pitch axis compensation motion according to the reverse control signal.

[0074] Step 5: The camera continuously captures 30 seconds of light spot motion trajectory images at a frame rate of 200 fps and transmits them to the image acquisition and analysis host computer, for a total of 6000 frames;

[0075] Step 6: Image acquisition and analysis The host computer calculates the centroid of each frame of the image to obtain the Y-axis offset Δy of the light spot corresponding to the pitch axis. The Δy sequence is statistically analyzed to calculate its peak-to-peak value PP and standard deviation σ. The peak-to-peak value PP and standard deviation σ calculated based on the Δy sequence are used as evaluation indicators of the pitch axis tracking error. The peak-to-peak value reflects the maximum fluctuation range of the light spot offset after compensation, and the standard deviation reflects the stability of the compensation process. The evaluation indicator of the pitch axis tracking error, the peak-to-peak value reflects the maximum fluctuation range of the light spot offset after compensation, and the standard deviation reflects the stability of the compensation process. The dynamic performance of the fast mirror is measured by judging the stability of the compensation process through the evaluation indicator of the pitch axis tracking error, the peak-to-peak value reflects the maximum fluctuation range of the light spot offset after compensation, and the standard deviation.

[0076] In another embodiment, Figure 5 As shown, the dynamic performance measurement method of the fast reflex mirror provided by the present invention is used to test the dual-axis coupling performance of the azimuth axis and the pitch axis of the fast reflex mirror:

[0077] The measurement method includes the following steps:

[0078] Step 1: System initialization: Adjust the point light source, start the point light source, camera and quick-reflection mirror controller in sequence, and keep the swing stage still;

[0079] Step 1: Specific operation process: Turn on the power, turn off the swing stage drive system of the main control computer, start the point light source, camera and fast reflex mirror controller in sequence, initialize each system, adjust the point light source, use the point light source as the target light source, and adjust its light spot to the center of the camera's field of view through the adjustment frame; accurately align the center of the light spot with the center of the camera's field of view, with the error controlled within 1 pixel.

[0080] Step 2: Perform drift compensation calibration and drift compensation verification on the gyroscope. The drift compensation calibration parameters of the gyroscope are calculated by analyzing the drift trajectory of the camera's recorded light spot center.

[0081] The drift compensation calibration of the gyroscope includes: recording the drift trajectory of the center of the light spot through a camera, calculating the gyroscope drift rate through image acquisition and analysis by the host computer, writing the gyroscope drift rate into the compensation parameter table of the fast reaction mirror controller to obtain the drift calibration parameter, compensating the gyroscope drift according to the drift calibration parameter, and completing the calibration of the gyroscope zero bias drift.

[0082] Specific gyroscope drift compensation calibration process: Figure 2 As shown in the figure, the camera continuously captures 60,000 frames of light spot images at a frame rate of 200 fps for 5 minutes. The host computer receives and analyzes the images and calculates the centroid of each frame to obtain a sequence of light spot offsets in the pixel coordinate system. This sequence is linearly fitted using the least squares method. The slope of the fitted line is the gyro drift rate ω (unit: ° / h), which is written into the compensation parameter table of the fast-reflection mirror controller to complete the calibration of the gyro bias drift.

[0083] Drift compensation verification involves starting the fast-reflection mirror controller and allowing the gyroscope compensation system in the controller to run continuously for a period of time while receiving an external disturbance signal. A camera is used to record the drift trajectory of the light spot center, and the root mean square (RMS) value of the light spot center drift is calculated before and after gyroscope drift compensation is performed using drift calibration parameters. The difference between the two values ​​is then compared. If the drift is significantly reduced after compensation, the effectiveness of the gyroscope drift compensation algorithm is verified.

[0084] The specific gyroscope drift compensation verification process: After gyroscope drift compensation calibration, the swing stage remains stationary to prevent external disturbances from affecting the test results. The quick-reaction mirror controller is activated, and the gyroscope compensation system within the quick-reaction mirror controller operates continuously for 5 minutes while receiving an external disturbance signal to compensate for gyroscope drift. During this time, the camera captures a real-time spot image at a frame rate of 200 fps, recording the drift trajectory of the spot center. The RMS value of the spot center drift is calculated before gyroscope drift compensation and after gyroscope drift compensation using the drift calibration parameters. The difference between the two is compared. If the drift is significantly reduced after compensation, the effectiveness of the gyroscope drift compensation algorithm is verified.

[0085] Step 3: Use the main control computer to perform a two-axis compound sinusoidal motion on the swing stage, setting the frequency to 10 Hz, the amplitude to 0.05°, and the phase difference to 90° to generate a standard Lissajous figure.

[0086] Step 4: Start the quick-reflex mirror controller, which controls the quick-reflex mirror to enter real-time compensation mode. The gyroscope collects motion data of the azimuth and pitch axes and inputs it into the quick-reflex mirror controller. The quick-reflex mirror controller simultaneously receives the gyroscope data of the azimuth and pitch axes, and adjusts the dual-axis angles of the quick-reflex mirror in real time through a composite strategy of feedforward compensation and PID control, thereby synchronously compensating for the dual-axis disturbance of the swing stage.

[0087] Step 5: The camera continuously captures 30 seconds of light spot motion trajectory images at a frame rate of 200 fps and transmits them to the image acquisition and analysis host computer, totaling 6000 frames. Lissajous figures are generated using image analysis software.

[0088] Step 6: Image acquisition and analysis The host computer calculates the synthetic error of the spot coordinates (Δx, Δy) of each frame image and obtains , as the evaluation index of dual-axis comprehensive tracking error.

[0089] Defines the maximum value of the X-axis and Y-axis offset and , calculate the cross coupling and , , , which is used to quantify the degree of mutual influence between the two-axis motion. The smaller the cross-coupling degree, the better the dual-axis decoupling control performance of the fast mirror.

[0090] This application utilizes high-precision drift-resistant measurement technology. Addressing the issue of traditional gyro drift errors affecting dynamic measurement accuracy, a drift calibration method based on optical image feedback is proposed. By accurately calculating the gyro drift rate using the static light spot offset, dynamic compensation for gyro bias is achieved. This fundamentally addresses the data distortion caused by insufficient gyro stability during long-term testing, significantly improving the long-term measurement accuracy of the compensation system.

[0091] Fusion of Optical Feedback and Inertial Measurement: This innovative approach combines camera image acquisition with gyroscope inertial measurement. Through sub-pixel detection of the light spot's centroid (with an accuracy of 0.1 pixel), it directly reflects the actual optical compensation effect of the fast-reflection mirror. Compared to traditional contact sensors, this method avoids mechanical installation errors and provides a more intuitive and accurate assessment of the fast-reflection mirror's performance in actual optical systems.

[0092] A full-dimensional dynamic performance evaluation system: A test solution has been designed to cover key indicators such as single-axis compensation accuracy, dual-axis coupling error, and response speed. It supports single-axis and dual-axis dynamic disturbance simulation and cross-coupling error detection. The host computer software automates the entire process from parameter setting to data acquisition and analysis. The user-friendly interface eliminates the need for complex manual intervention, significantly lowering the measurement system's user threshold and improving its convenience in engineering applications. Through the automated testing process, a full performance evaluation of the fast-reflection mirror can be completed in 15 minutes, significantly improving testing efficiency and meeting the factory inspection requirements of mass production.

[0093] The above embodiments can be implemented in whole or in part via software, hardware (e.g., circuits), firmware, or any other combination thereof. When implemented using software, the above embodiments can be implemented in whole or in part in the form of a computer program product. The computer program product comprises one or more computer instructions or computer programs. When loaded or executed on a computer, the processes or functions described in accordance with the embodiments of the present invention are fully or partially performed. The computer can be a general-purpose computer, a special-purpose computer, a computer network, or other programmable device. The computer instructions can be stored in a computer-readable storage medium or transmitted from one computer-readable storage medium to another. For example, the computer instructions can be transmitted from one website, computer, server, or data center to another website, computer, server, or data center via wired means (e.g., infrared, wireless, microwave, etc.). The computer-readable storage medium can be any available medium accessible by a computer or a data storage device such as a server or data center that contains a collection of one or more available media. The available medium can be magnetic media (e.g., floppy disks, hard disks, magnetic tapes), optical media (e.g., DVDs), or semiconductor media. The semiconductor media can be a solid-state drive.

[0094] It should be understood that the term "and / or" as used herein simply describes a relationship between associated objects, indicating that three possible relationships exist. For example, "A and / or B" can represent: A alone, A and B together, or B alone. A and B can be singular or plural. Furthermore, the character " / " as used herein generally indicates an "or" relationship between the associated objects, but it may also indicate an "and / or" relationship. For specific understanding, please refer to the context.

[0095] In this disclosure, "at least one" means one or more, and "plurality" means two or more. "At least one of the following" or similar expressions refers to any combination of these items, including any combination of single or plural items. For example, "at least one of a, b, or c" can mean: a, b, c, ab, ac, bc, or abc, where a, b, and c can be single or plural.

[0096] It should be understood that in various embodiments of the present invention, the size of the serial numbers of the above-mentioned processes does not mean the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of the present invention.

[0097] Those skilled in the art will appreciate that the units and algorithm steps of each example described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. Professionals and technicians can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of the present invention.

[0098] Those skilled in the art will clearly understand that, for the convenience and brevity of description, the specific working processes of the above-described equipment, devices and units can refer to the corresponding processes in the aforementioned method embodiments and will not be repeated here.

[0099] In the several embodiments provided by the present invention, it should be understood that the disclosed devices, apparatuses and methods can be implemented in other ways. For example, the device embodiments described above are merely illustrative. For example, the division of the units is merely a logical function division. In actual implementation, there may be other division methods, such as multiple units or components can be combined or integrated into another device, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interface, indirect coupling or communication connection of the device or unit, which can be electrical, mechanical or other forms.

[0100] The units described as separate components may or may not be physically separate, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed across multiple network units. Some or all of these units may be selected to achieve the purpose of this embodiment according to actual needs.

[0101] In addition, each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit.

[0102] If the functions are implemented as software functional units and sold or used as independent products, they can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention, or the portion that contributes to the prior art, or the portion of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions for enabling a computer device (which can be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in various embodiments of the present invention. The aforementioned storage media include various media that can store program code, such as USB flash drives, mobile hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0103] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any modifications or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present invention should be included in the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection of the claims.

Claims

1. A fast mirror dynamic performance measurement device, characterized in that: The device includes: a swing platform, a quick-reflection mirror, a quick-reflection mirror controller, a power supply, a camera, a point light source, a gyroscope, a main control host computer and an image acquisition and analysis host computer; The gyroscope and the quick reflex mirror are respectively arranged on the swing platform, the swing platform is communicated with the main control host computer, and the quick reflex mirror controller is communicated with the gyroscope and the quick reflex mirror respectively; the camera is communicated with the image acquisition and analysis host computer, and the image acquisition and analysis host computer is communicated with the quick reflex mirror controller; The point light source is the target light source, and the fast reflector receives the light from the target light source to produce a light spot; The swing stage is equipped with a dual-axis drive system for azimuth and pitch axes, which is used to simulate external dynamic disturbances of the fast-reflection mirror; Gyroscope, used to collect motion data of the azimuth and pitch axes of the swing platform; The main control computer is used to input driving information to the swing stage and control the swing stage to perform single-axis or dual-axis periodic swing according to the fixed amplitude and frequency set by the main control computer; The quick-reflex mirror controller receives the motion data of the swing stage monitored in real time by the gyroscope, generates a reverse control signal based on the received motion data, and controls the quick-reflex mirror to perform reverse compensation motion, thereby maintaining the continuous swing of the quick-reflex mirror surface. This ensures that the light spot remains stable in the camera's field of view. The quick-reflex mirror controller calibrates the gyroscope's zero-bias drift according to the built-in compensation parameter table. A camera is used to collect image data of the light spot on the quick-reflection mirror and transmit the image data to an image acquisition and analysis host computer; The image acquisition and analysis host computer is used to receive image data captured by the camera, analyze the motion trajectory of the light spot based on the received image data, and calculate the gyroscope drift rate. The quick reflex mirror controller is also used to receive the gyroscope drift rate input by the image acquisition and analysis host computer and transmit the gyroscope drift rate to the quick reflex mirror controller. By analyzing the image data, the compensation effect of the quick reflex mirror on the swing stage movement in the single-axis direction is obtained, thereby testing the single-axis compensation dynamic performance of the quick reflex mirror. For image acquisition and analysis, the host computer calculates the centroid of each frame to obtain the X-axis offset Δx of the light spot. Statistical analysis is performed on the Δx sequence to calculate its peak-to-peak value PP and standard deviation σ. These are used as evaluation indicators for the azimuth axis tracking error. The peak-to-peak value reflects the maximum fluctuation range of the light spot offset after compensation, while the standard deviation reflects the stability of the compensation process. The stability of the compensation process is judged through the evaluation indicator of the azimuth axis tracking error, the peak-to-peak value reflects the maximum fluctuation range of the light spot offset after compensation, and the standard deviation reflects the stability of the compensation process, and the dynamic performance of the fast mirror is measured.

2. The fast mirror dynamic performance measurement device according to claim 1, characterized in that: The point light source is set on an adjustment frame, and the light spot of the point light source is adjusted to the center of the camera's field of view through the adjustment frame.

3. The fast mirror dynamic performance measurement device according to claim 1, characterized in that: The fast reflex mirror is fixed on the swing stage through an adapter.

4. A method for measuring the dynamic performance of a fast reflex mirror, implemented using the fast reflex mirror dynamic performance measuring device according to any one of claims 1 to 3, characterized in that: The measurement method includes the following steps: Step 1: System initialization: Adjust the point light source, start the point light source, camera and quick-reflection mirror controller in sequence, and keep the swing stage stationary; Step 2: Perform drift compensation calibration and drift compensation verification on the gyroscope. The drift compensation calibration parameters of the gyroscope are calculated by analyzing the drift trajectory of the camera's recorded light spot center. Step 3: Drive the swing stage to simulate the external environment of the quick-reflection mirror, and the gyroscope collects the motion data of the swing stage. The swing stage is driven by the main control host computer to make the swing stage swing in a single axis or a dual-axis composite swing; Step 4: Start the quick-reflection mirror controller, which receives the motion data of the azimuth axis, pitch axis, or both the azimuth axis and pitch axis of the swing stage, and controls the quick-reflection mirror to enter the real-time compensation mode; the gyroscope collects the motion data of the azimuth axis or pitch axis of the swing stage and inputs it into the quick-reflection mirror controller, which generates a reverse control signal based on the motion data of the azimuth axis or pitch axis collected by the gyroscope, and drives the quick-reflection mirror to perform azimuth axis compensation motion or pitch axis compensation motion according to the reverse control signal; Step 5: The image data of the light spot collected by the camera's fast mirror is transmitted to the image acquisition and analysis host computer; Step 6: Image Acquisition and Analysis: The host computer processes the image data of the light spot and measures and determines the dynamic performance of the fast mirror based on the light spot trajectory characteristics. The host computer calculates the center of mass of each image frame to obtain the light spot offset Δx on the azimuth axis or the light spot offset Δy on the pitch axis. Statistical analysis is performed on the Δx or Δy sequences to calculate their peak-to-peak value (PP) and standard deviation (σ). The peak-to-peak value (PP) and standard deviation (σ) calculated from the Δx sequence serve as evaluation indicators for the azimuth tracking error, while the peak-to-peak value (PP) and standard deviation (σ) calculated from the Δy sequence serve as evaluation indicators for the pitch tracking error. The peak-to-peak value reflects the maximum fluctuation range of the compensated light spot offset, while the standard deviation reflects the stability of the compensation process. The composite error of the light spot coordinates (Δx, Δy) for each frame is calculated as an evaluation indicator for the dual-axis integrated tracking error. The maximum values ​​of the X- and Y-axis offsets, Δxmax and Δymax, are defined, and the cross-coupling degree is calculated to quantify the degree of mutual influence between the dual-axis motions.

5. The method for measuring the dynamic performance of a fast-reflecting mirror according to claim 4, wherein: In step 1, adjust the point light source, specifically aligning the center of the light spot with the center of the camera's field of view accurately, with the error controlled within 1 pixel.

6. The method for measuring the dynamic performance of a fast-reflecting mirror according to claim 4, wherein: The drift compensation calibration of the gyroscope includes: recording the drift trajectory of the center of the light spot through a camera, calculating the gyroscope drift rate through image acquisition and analysis by the host computer, writing the gyroscope drift rate into the compensation parameter table of the fast reaction mirror controller to obtain the drift calibration parameter, compensating the gyroscope drift according to the drift calibration parameter, and completing the calibration of the gyroscope zero bias drift.

7. The method for measuring the dynamic performance of a fast-reflecting mirror according to claim 6, wherein: Drift compensation verification involves starting the quick-reaction mirror controller and allowing the gyroscope compensation system in the quick-reaction mirror controller to run continuously for a period of time while receiving an external disturbance signal. The camera records the drift trajectory of the light spot center, and the root mean square (RMS) value of the light spot center drift is calculated before and after gyroscope drift compensation is performed using drift calibration parameters. The difference between the two values ​​is then compared. If the drift is significantly reduced after compensation, the effectiveness of the gyroscope drift compensation algorithm is verified.

Citation Information

Patent Citations

  • Device and method for automatically testing dynamic performance of fast steering mirror

    CN118032294A

  • Stabilize revolving stage system based on reverse displacement compensation

    CN208384428U