MOX gas sensor and manufacturing method thereof
By constructing the intake passage on the flexible substrate of the MOX gas sensor and increasing the area of the gas sensitive layer, the problem of limited area of the gas sensitive layer in space-limited places is solved, the detection sensitivity is improved, and the gas sensitive layer is kept working at a suitable temperature through the heating member.
Patent Information
- Application Number
- CN202311835148.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-27
- Publication Date
- 2025-06-27
AI Technical Summary
In places with limited space, the area of the gas-sensitive layer is limited, resulting in a decrease in detection sensitivity.
The MOX gas sensor designed with a flexible substrate and a heating member is used to construct an intake passage on the flexible substrate, and the gas-sensitive layer is placed in the intake passage, increasing the area of the gas-sensitive layer, and providing heat through the heating member to keep the gas-sensitive layer working at a suitable temperature.
It is possible to construct a gas-sensitive layer with a larger area in a place with limited space, improve the detection sensitivity of the MOX gas sensor, and to reduce heat transfer, keep the gas-sensitive layer working at a suitable temperature, avoiding the detection sensitivity being reduced due to the temperature drop.
Smart Images
Figure CN120214030A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of gas monitoring, and in particular, to a MOX gas sensor and a manufacturing method thereof. Background Art
[0002] Currently, a MOX gas sensor is a gas sensing element with high sensitivity, having a fast non-specific response to one or more oxidizing or reducing gases, and is widely used in production and life fields such as environmental pollution monitoring, hazardous gas leakage, and chemical detection.
[0003] In related technologies, a MOX gas sensor includes a substrate, a sensing electrode, and a gas-sensitive layer that wraps the sensing electrode. The sensing electrode is used to measure the resistance or conductivity of the gas-sensitive layer. According to the corresponding relationship between the resistance or conductivity and the degree of oxidation of the gas-sensitive layer, the concentration of specific gas components in the gas environment around the gas-sensitive layer is judged.
[0004] In some application scenarios, the MOX gas sensor is installed in a place with limited space. In these places with limited space, the length and width of the MOX gas sensor may be restricted. Naturally, the area of the gas-sensitive layer on the MOX gas sensor will also be restricted, resulting in an inability to construct a gas-sensitive layer with a sufficiently large area, and the detection sensitivity of the MOX gas sensor is limited. Summary of the Invention
[0005] The present application aims to at least solve the technical problem in the prior art that the area of the gas-sensitive layer on the MOX gas sensor is also restricted, resulting in an inability to construct a gas-sensitive layer with a sufficiently large area, and the detection sensitivity of the MOX gas sensor is limited. For this purpose, the present application provides a MOX gas sensor and a manufacturing method thereof.
[0006] In a first aspect, the present application provides a MOX gas sensor, including: A flexible substrate, on which a sensing electrode is provided. A heating member is further provided adjacent to the sensing electrode on the flexible substrate, and the heating member is used to provide heat to the sensing electrode; A gas-sensitive layer, which is correspondingly arranged on the sensing electrode and wraps the sensing electrode; Wherein, one end of the flexible substrate is connected to the other end of the flexible substrate to enclose an intake channel, and the sensing electrode and the gas-sensitive layer are located in the intake channel.
[0007] By adopting the above technical solution, on the one hand, the MOX gas sensor provided by the embodiment of the present application is applied in places with limited installation space, and a gas-sensitive layer with a larger area can be constructed, thereby improving the detection sensitivity of the MOX gas sensor; on the other hand, the gas-sensitive layer is in the intake passage, compared with being directly exposed to the air, heat transfer can be reduced, so that it can be maintained at an appropriate temperature, and the detection sensitivity of the MOX gas sensor can be prevented from decreasing due to a decrease in temperature.
[0008] According to an embodiment of the present application, the number of the gas-sensitive layers is multiple, and the multiple gas-sensitive layers are arranged around the center of the intake passage.
[0009] According to an embodiment of the present application, the MOX gas sensor further includes a support frame; The support frame is arranged in the intake passage, and a plurality of partition plates are fixedly connected to the circumferential direction of the support frame. The plurality of partition plates abut against the flexible substrate and divide the intake passage into a plurality of air guide passages, and the gas-sensitive layer is correspondingly arranged in each air guide passage.
[0010] By adopting the above technical solution, the ambient temperature around the gas-sensitive layer in the intake passage is higher, and the ambient temperature around the gas-sensitive layer outside the intake passage is lower. In this way, the gas-sensitive layer in the intake passage and the gas-sensitive layer outside the intake passage can respectively detect different gases.
[0011] According to an embodiment of the present application, both ends of the support frame are connected with mounting structures, and the support frame is used for mounting on a mounting surface through the mounting structures.
[0012] By adopting the above technical solution, the mounting structure can be a mounting component such as a screw. Both ends of the support frame are respectively mounted on a mounting surface that can provide a supporting effect through the mounting structure to ensure the mounting stability of the MOX gas sensor.
[0013] According to an embodiment of the present application, the mounting structure is at the center of the intake passage, and there is a gap for gas to enter between the mounting structure and the intake passage.
[0014] By adopting the above technical solution, the mounting structure is at the center of the intake passage, which changes the intake path of the gas entering the intake passage. This can reduce the direct heat convection between the inside and outside of the intake passage, thereby reducing the heat transfer from the inside of the intake passage to the outside, so as to ensure that the gas-sensitive layer in the intake passage can work at an appropriate temperature.
[0015] According to an embodiment of the present application, the number of the heating members is multiple, and they are correspondingly arranged in the air guide passages one by one. Each heating member is configured to provide different amounts of heat to the corresponding air guide passage.
[0016] By adopting the above technical solution, the ambient temperature around the gas-sensitive layer in some of the air ducts is higher, and the ambient temperature around the gas-sensitive layer in some other air ducts is lower, so that the gas-sensitive layers in the air ducts at different temperatures can detect different gases.
[0017] According to an embodiment of the present application, the heating member is located below the induction electrode and is configured to have the same shape as the orthographic projection of the induction electrode.
[0018] By adopting the above technical solution, the heating member is configured to have the same shape as the orthographic projection of the induction electrode, so that the heat emitted by the heating member can be evenly conducted towards the induction electrode, thereby making the gas-sensitive layer coated on the induction electrode receive uniform heat.
[0019] According to an embodiment of the present application, the induction electrodes are arranged on both sides of the flexible substrate; Wherein, the induction electrode on one side of the flexible substrate is located in the intake passage, and the induction electrode on the other side of the flexible substrate is located outside the intake passage.
[0020] By adopting the above technical solution, the ambient temperature around the gas-sensitive layer in the intake passage is higher, and the ambient temperature around the gas-sensitive layer outside the intake passage is lower, so that the gas-sensitive layer in the intake passage and the gas-sensitive layer outside the intake passage can respectively detect different gases.
[0021] In a second aspect, the present application also provides a method for manufacturing a MOX gas sensor, including: Providing a flexible substrate and fabricating induction electrodes on the flexible substrate; Fabricating a heating member on the flexible substrate, and the heating member is arranged adjacent to the induction electrode; Fabricating a gas-sensitive layer corresponding to the induction electrode, and the gas-sensitive layer wraps the induction electrode; Connecting one end of the flexible substrate to the other end of the flexible substrate to enclose and form an intake passage, and the induction electrode and the gas-sensitive layer are located in the intake passage.
[0022] By adopting the above technical solution, on the one hand, when applied in places with limited installation space, a gas-sensitive layer with a larger area can be constructed, thereby improving the detection sensitivity of the MOX gas sensor; on the other hand, compared with being directly exposed to the air, the gas-sensitive layer is located in the intake passage, which can reduce heat transfer, so that it can be maintained at an appropriate temperature and avoid the reduction of the detection sensitivity of the MOX gas sensor due to a decrease in temperature.
[0023] According to an embodiment of the present application, one end of the flexible substrate is connected to the other end of the flexible substrate to enclose an intake channel, and the sensing electrode and the gas-sensitive layer are located in the intake channel, including: Provide a support frame, a plurality of partition plates are fixedly connected circumferentially to the support frame, and the partition plates abut against the surface of the flexible substrate; Wind one end of the flexible substrate along the support frame and connect it to the other end of the flexible substrate to enclose an intake channel, wherein the plurality of partition plates divide the intake channel into a plurality of air ducts, and the gas-sensitive layer is correspondingly arranged in each air duct.
[0024] By adopting the above technical solution, on the one hand, the partition plates of the support frame can divide the space in the intake channel into a plurality of air ducts, which can further block the heat transfer from the intake channel to the outside, so as to more effectively reduce the temperature drop around the gas-sensitive layer due to the decrease of the ambient temperature, thus ensuring the detection sensitivity of the MOX gas sensor.
[0025] On the other hand, the partition plates of the support frame can also support the flexible substrate to ensure the stability of the intake channel formed by enclosing the flexible substrate.
[0026] In summary, the present application includes at least one of the following beneficial technical effects: on the one hand, it can be applied in places with limited installation space to construct a gas-sensitive layer with a larger area, thereby improving the detection sensitivity of the MOX gas sensor; on the other hand, the gas-sensitive layer is located in the intake channel, compared with being directly exposed to the air, it can reduce heat transfer, so that it can be maintained at a suitable temperature, avoiding the reduction of the detection sensitivity of the MOX gas sensor due to the temperature drop. BRIEF DESCRIPTION OF THE DRAWINGS
[0027] Figure 1 is one of the structural schematic diagrams of the MOX gas sensor provided by the embodiment of the present application; Figure 2 (A) is the second structural schematic diagram of the MOX gas sensor provided by the embodiment of the present application; Figure 2 (B) is Figure 2 (A) The partial enlarged view; Figure 3 is the third structural schematic diagram of the MOX gas sensor provided by the embodiment of the present application; Figure 4 is the fourth structural schematic diagram of the MOX gas sensor provided by the embodiment of the present application; Figure 5 (A) is the structural schematic diagram of the flexible substrate provided by the embodiment of the present application; Figure 5(B) is a schematic structural diagram of a support frame, a partition board, and an installation structure provided in an embodiment of the present application.
[0028] Reference numerals: 100, flexible substrate; 110, induction electrode; 120, heating member; 200, gas-sensitive layer; 310, support frame; 320, partition board; 330, installation structure; a, intake channel; a1, air guide channel. Detailed implementation manners
[0029] The embodiments of the present application will be described in detail below. Examples of the embodiments are shown in the drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are only used to explain the present application and should not be construed as a limitation to the present application.
[0030] Below, refer to Figures 1-5 to describe a MOX gas sensor according to an embodiment of the present application.
[0031] As Figure 1 and Figure 2 shown, the MOX gas sensor includes: a flexible substrate 100 and a gas-sensitive layer 200.
[0032] An induction electrode 110 is provided on the flexible substrate 100, and a heating member 120 is further provided on the flexible substrate 100 adjacent to the induction electrode 110. The heating member 120 is used to provide heat to the induction electrode 110.
[0033] The gas-sensitive layer 200 is correspondingly provided on the induction electrode 110 and wraps the induction electrode 110. The induction electrode 110 is used to measure the resistance or conductivity of the gas-sensitive layer 200.
[0034] According to the corresponding relationship between the resistance and the degree of oxidation of the gas-sensitive layer 200, the concentration of specific gas components in the gas environment around the gas-sensitive layer 200 is judged.
[0035] Among them, the specific gas components include but are not limited to carbon monoxide (CO), methane (CH4), carbon dioxide (CO2), and certain volatile organic compounds (VOCs).
[0036] One end of the flexible substrate 100 is connected to the other end of the flexible substrate 100 to enclose an intake channel a, and the gas-sensitive layer 200 is located in the intake channel a.
[0037] In some application scenarios, the MOX gas sensor will be installed in a place with limited space. For example, in such a place with limited space, the length of the MOX gas sensor is restricted.
[0038] In the related art, when the length of the MOX gas sensor is limited, the area of the gas-sensitive layer 200 on the MOX gas sensor is also correspondingly limited, and it is impossible to construct a gas-sensitive layer 200 with a sufficiently large area, resulting in limited detection sensitivity of the MOX gas sensor.
[0039] In the above embodiments of the present application, a gas-sensitive layer 200 with a sufficiently large area can be first constructed on the flexible substrate 100, and then bent along the length direction of the flexible substrate 100 so that when one end of the flexible substrate 100 is connected to the other end of the flexible substrate 100, an intake channel a is formed. In this way, without reducing the area of the gas-sensitive layer 200, the detection sensitivity of the MOX gas sensor is ensured.
[0040] It should be noted that the MOX gas sensor usually needs to work at a relatively high temperature, such as above 200 °C, which can ensure the detection sensitivity of the gas-sensitive layer 200 to gases. On the contrary, the sensitivity of the MOX gas sensor will decrease significantly at a lower temperature, and it may not even be usable below 100 °C.
[0041] In the related art, the gas-sensitive layer 200 is disposed on the substrate, and the heating member 120 provides the heat required for the gas-sensitive layer 200 to work. However, the gas-sensitive layer 200 is directly exposed to the air. Once the ambient temperature drops, it is easy to affect the temperature around the gas-sensitive layer 200, resulting in a decrease in the detection sensitivity of the MOX gas sensor.
[0042] In the above embodiments of the present application, the gas-sensitive layer 200 is located in the intake channel a, and the flexible substrate 100 can block the heat in the intake channel a from being transferred outwards. In this way, it can effectively reduce the decrease in the temperature around the gas-sensitive layer 200 due to the drop in the ambient temperature, thereby ensuring the detection sensitivity of the MOX gas sensor.
[0043] In summary, according to the MOX gas sensor provided by the embodiments of the present application, on the one hand, when applied in a place with limited installation space, a gas-sensitive layer 200 with a larger area can be constructed, thereby improving the detection sensitivity of the MOX gas sensor; on the other hand, the gas-sensitive layer 200 being located in the intake channel a can reduce heat transfer compared to being directly exposed to the air, so that it can be maintained at a suitable temperature, avoiding the reduction of the detection sensitivity of the MOX gas sensor due to the drop in temperature.
[0044] As Figure 2 shown, in actual implementation, a plurality of sensing electrodes 110 and gas-sensitive layers 200 corresponding to the sensing electrodes 110 one by one can be constructed on the flexible substrate 100 as needed, and the plurality of gas-sensitive layers 200 are arranged around the center of the intake channel a.
[0045] By controlling the ambient temperature around the gas-sensitive layer 200 within a certain temperature range, the selectivity and sensitivity of the gas-sensitive layer 200 to specific gases can be improved, making it suitable for different gas detections.
[0046] Based on this, the MOX gas sensor can be in at least one of the following structural forms: One is, as Figure 3 shown, the sensing electrodes 110 are arranged on both sides of the flexible substrate 100. The sensing electrode 110 on one side of the flexible substrate 100 is inside the intake channel a, and the sensing electrode 110 on the other side of the flexible substrate 100 is outside the intake channel a. Each sensing electrode 110 is coated with the gas-sensitive layer 200.
[0047] In this embodiment, the ambient temperature around the gas-sensitive layer 200 inside the intake channel a is higher, and the ambient temperature around the gas-sensitive layer 200 outside the intake channel a is lower. In this way, the gas-sensitive layer 200 inside the intake channel a and the gas-sensitive layer 200 outside the intake channel a can detect different gases respectively.
[0048] For example, the ambient temperature around the gas-sensitive layer 200 inside the intake channel a can be controlled between 300°C and 500°C for detecting carbon monoxide (CO).
[0049] The ambient temperature around the gas-sensitive layer 200 outside the intake channel a can be controlled between 200°C and 400°C for detecting ethanol (C2H5OH).
[0050] The second is, as Figure 4 and Figure 5 shown, the MOX gas sensor further includes: a support frame 310.
[0051] The support frame 310 is arranged inside the intake channel a. A plurality of partition plates 320 are fixedly connected to the circumferential direction of the support frame 310. The plurality of partition plates 320 abut against the flexible substrate 100 and divide the intake channel a into a plurality of air guide channels a1. A gas-sensitive layer 200 is correspondingly arranged in each air guide channel a1.
[0052] In this embodiment, on the one hand, the partition plates 320 of the support frame 310 can divide the space inside the intake channel a into a plurality of air guide channels a1, which can further block the heat transfer from the inside of the intake channel a to the outside, thereby more effectively reducing the decrease in the temperature around the gas-sensitive layer 200 due to the drop in the ambient temperature, thus ensuring the detection sensitivity of the MOX gas sensor.
[0053] On the other hand, the partition plates 320 of the support frame 310 can also support the flexible substrate 100 to ensure the stability of the intake channel a formed by enclosing the flexible substrate 100.
[0054] As Figure 4 and Figure 5 shown, in actual implementation, both ends of the support frame 310 are connected with mounting structures 330, and the support frame 310 is used to be mounted on the mounting surface through the mounting structures 330.
[0055] The mounting structure 330 can be a mounting component such as a screw. Both ends of the support frame 310 are respectively mounted on the mounting surface that can provide a supporting effect through the mounting structure 330 to ensure the mounting stability of the MOX gas sensor.
[0056] Exemplarily, the mounting structure 330 is at the center of the intake channel a, and there is a gap for gas to enter between the mounting structure 330 and the intake channel a.
[0057] By making the mounting structure 330 at the center of the intake channel a, this changes the intake path of the gas entering the intake channel a, thereby reducing the direct heat convection that occurs between the inside and outside of the intake channel a, reducing the heat transfer from the inside of the intake channel a to the outside, and further ensuring that the gas-sensitive layer 200 in the intake channel a can work at a suitable temperature.
[0058] As Figure 2 and Figure 4 shown, in actual implementation, the number of the heating components 120 is multiple, and they are respectively arranged in the air guide channel a1 one by one. Each heating component 120 is configured to provide different amounts of heat into the corresponding air guide channel a1.
[0059] Exemplarily, the ambient temperature around the gas-sensitive layer 200 in some air guide channels a1 is higher, and the ambient temperature around the gas-sensitive layer 200 in some other air guide channels a1 is lower. In this way, the gas-sensitive layer 200 in the air guide channels a1 at different temperatures can detect different gases.
[0060] For example, the ambient temperature around the gas-sensitive layer 200 in some air guide channels a1 can be controlled between 300°C and 500°C for detecting carbon monoxide (CO).
[0061] The ambient temperature around the gas-sensitive layer 200 in some other air guide channels a1 can be controlled between 200°C and 400°C for detecting ethanol (C2H5OH). In some embodiments, the heating component 120 is below the induction electrode 110 and has the same shape as the orthographic projection of the induction electrode 110.
[0062] In this embodiment, the heating component 120 has the same shape as the orthographic projection of the induction electrode 110, so that the heat emitted by the heating component 120 can be evenly conducted towards the induction electrode 110, thereby making the gas-sensitive layer 200 coated on the induction electrode 110 uniformly heated.
[0063] In actual implementation, the heating member 120 includes a heating electrode, a wire, and a resistance wire. The heating electrode is connected to the resistance wire through the wire. In this embodiment, the resistance wire can provide the heat source required for the sensing reaction for the gas sensing layer 200. The resistance wire can be made of a material with a relatively large resistivity and is configured in a meandering shape to be the same as the orthographic projection of the induction electrode 110.
[0064] This application also provides a manufacturing method of a MOX gas sensor, including: step 610, step 620, step 630, and step 640.
[0065] Step 610: Provide a flexible substrate 100 and fabricate an induction electrode 110 on the flexible substrate 100.
[0066] Step 620: Fabricate a heating member 120 on the flexible substrate 100, and the heating member 120 is disposed adjacent to the induction electrode 110.
[0067] Step 630: Fabricate a gas sensing layer 200 corresponding to the induction electrode 110, and the gas sensing layer 200 wraps the induction electrode 110.
[0068] Step 640: Connect one end of the flexible substrate 100 to the other end of the flexible substrate 100 to enclose and form an intake channel a, and the induction electrode 110 and the gas sensing layer 200 are located inside the intake channel a.
[0069] In the above embodiments of this application, a gas sensing layer 200 with a sufficiently large area can be first constructed on the flexible substrate 100, and then bent along the length direction of the flexible substrate 100 so that when one end of the flexible substrate 100 is connected to the other end of the flexible substrate 100, an intake channel a is formed. In this way, without reducing the area of the gas sensing layer 200, the detection sensitivity of the MOX gas sensor is ensured.
[0070] In addition, the gas sensing layer 200 of this application is located inside the intake channel a, and the flexible substrate 100 can block the outward transfer of heat inside the intake channel a, which can effectively reduce the temperature drop around the gas sensing layer 200 due to the decrease in the ambient temperature, thereby ensuring the detection sensitivity of the MOX gas sensor.
[0071] In summary, according to the MOX gas sensor provided by the embodiments of this application, on the one hand, it can be applied in places with limited installation space, and a gas sensing layer 200 with a larger area can be constructed, thereby improving the detection sensitivity of the MOX gas sensor; on the other hand, compared with being directly exposed to the air, the gas sensing layer 200 is located inside the intake channel a, which can reduce heat transfer, so that it can be maintained at an appropriate temperature and avoid the reduction of the detection sensitivity of the MOX gas sensor due to the temperature drop.
[0072] In some embodiments, step 640, connecting one end of the flexible substrate 100 to the other end of the flexible substrate 100 to enclose and form an intake channel a, with the sensing electrode 110 and the gas-sensitive layer 200 being within the intake channel a, includes: Step 641, providing a support frame 310, with a plurality of partition plates 320 fixedly connected circumferentially to the support frame 310, and the partition plates 320 abutting against the surface of the flexible substrate 100; Step 642, winding one end of the flexible substrate 100 along the support frame 310 and connecting it to the other end of the flexible substrate 100 to enclose and form an intake channel a, wherein the plurality of partition plates 320 divide the intake channel a into a plurality of air ducts a1, and a gas-sensitive layer 200 is correspondingly arranged in each air duct a1.
[0073] In this embodiment, on the one hand, the partition plates 320 of the support frame 310 can divide the space within the intake channel a into a plurality of air ducts a1, which can further block the heat transfer from the inside of the intake channel a to the outside, thereby more effectively reducing the temperature drop around the gas-sensitive layer 200 due to the decrease in the ambient temperature, thus ensuring the detection sensitivity of the MOX gas sensor.
[0074] On the other hand, the partition plates 320 of the support frame 310 can also support the flexible substrate 100 to ensure the stability of the intake channel a formed by enclosing the flexible substrate 100.
[0075] The above are all the preferred embodiments of the present application. Without limiting the protection scope of the present application accordingly, therefore: All equivalent changes made according to the structure, shape, and principle of the present application shall be covered within the protection scope of the present application.
Claims
1. A MOX gas sensor, characterized in that, Comprising: A flexible substrate (100) with a sensing electrode (110) disposed thereon. A heating member (120) is further disposed on the flexible substrate (100) adjacent to the sensing electrode (110), and the heating member (120) is configured to supply heat to the sensing electrode (110). A gas-sensitive layer (200) disposed corresponding to the sensing electrode (110) and wrapping the sensing electrode (110). Wherein, one end of the flexible substrate (100) is connected to the other end of the flexible substrate (100) to enclose an intake channel (a), and the sensing electrode (110) and the gas-sensitive layer (200) are located within the intake channel (a).
2. The MOX gas sensor according to claim 1, characterized in that, The number of the gas-sensitive layers (200) is multiple, and the multiple gas-sensitive layers (200) are arranged around the center of the intake channel (a).
3. The MOX gas sensor according to claim 2, characterized in that, Further comprising a support frame (310). The support frame (310) is disposed within the intake channel (a). A plurality of partition plates (320) are fixedly connected circumferentially to the support frame (310). The plurality of partition plates (320) abut against the flexible substrate (100) and divide the intake channel (a) into a plurality of air guide channels (a1), and the gas-sensitive layer (200) is correspondingly disposed in each air guide channel (a1).
4. The MOX gas sensor according to claim 3, wherein The number of the heating members (120) is multiple, and they are respectively disposed within the air guide channels (a1) one by one. Each heating member (120) is configured to supply different amounts of heat into the corresponding air guide channel (a1).
5. The MOX gas sensor according to claim 3, characterized in that, Both ends of the support frame (310) are connected with mounting structures (330), and the support frame (310) is used for mounting on a mounting surface through the mounting structures (330).
6. The MOX gas sensor according to claim 5, wherein the mounting structure (330) is located at the center of the intake channel (a), and there is a gap for gas to enter between the mounting structure (330) and the intake channel (a).
7. The MOX gas sensor according to claim 1, wherein the heating member (120) is located below the sensing electrode (110) and is configured to have the same shape as the orthographic projection of the sensing electrode (110).
8. The MOX gas sensor according to any one of claims 1-7, wherein the sensing electrode (110) is disposed on both sides of the flexible substrate (100). Among them, The sensing electrode (110) on one side of the flexible substrate (100) is located within the intake channel (a), and the sensing electrode (110) on the other side of the flexible substrate (100) is located outside the intake channel (a).
9. A manufacturing method of a MOX gas sensor, characterized in that Comprising: Providing a flexible substrate (100) and fabricating a sensing electrode (110) on the flexible substrate (100). Fabricating a heating member (120) on the flexible substrate (100), and the heating member (120) is disposed adjacent to the sensing electrode (110). Fabricate a gas-sensitive layer (200) corresponding to the induction electrode (110), and the gas-sensitive layer (200) wraps the induction electrode (110); Connect one end of the flexible substrate (100) to the other end of the flexible substrate (100) to enclose an intake channel (a), and the induction electrode (110) and the gas-sensitive layer (200) are located in the intake channel (a).
10. The manufacturing method of the MOX gas sensor according to claim 9, characterized in that, Connect one end of the flexible substrate (100) to the other end of the flexible substrate (100) to enclose an intake channel (a), and the induction electrode (110) and the gas-sensitive layer (200) are located in the intake channel (a), including: Provide a support frame (310), a plurality of partition plates (320) are fixedly connected circumferentially to the support frame (310), and the partition plates (320) abut against the surface of the flexible substrate (100); Wind one end of the flexible substrate (100) along the support frame (310) and connect it to the other end of the flexible substrate (100) to enclose an intake channel (a), wherein the plurality of partition plates (320) divide the intake channel (a) into a plurality of air guide channels (a1), and the gas-sensitive layer (200) is correspondingly arranged in each air guide channel (a1).