Manufacturing apparatus

Abstract

The manufacturing device applies energy to an object, and measures the amount of energy applied to the object.

Description

Technical Field

[0001] The present invention relates to a manufacturing apparatus. Background Art

[0002] Conventionally, various techniques for measuring energy (such as pressure, heat, and ultraviolet rays) applied to a surface have been known.

[0003] First, a technique for measuring the amount of energy using a coloring member that colors according to the amount of energy when energy is applied is known. As such a coloring member, for example, Prescale (registered trademark) (manufactured by FUJIFILM Corporation), which can obtain a coloring density corresponding to the applied pressure, is available. For example, International Publication No. 2021 / 235364 discloses the following: A pressure measurement sheet (such as Prescale) is arranged on a calibration sheet and photographed, the concentration, size, distortion, and shape of the photographed image are corrected based on the calibration sheet included in the photographed image, and the concentration value of the pressure measurement sheet included in the corrected image is converted into a pressure value.

[0004] Second, a sensor device that outputs an electric signal corresponding to pressure or the like through a sensor element that detects pressure or the like is known. For example, Japanese Patent Application Laid-Open No. 2020-123119 discloses a sensor device including: a sensing unit arranged on a substrate and including a sensor element that detects at least one of pressure and temperature; and a storage unit that stores calibration data of the sensor element. Summary of the Invention

[0005] Technical Problem to be Solved by the Invention

[0006] An object of the present invention is to provide a manufacturing apparatus that can apply energy to an object and measure the amount of energy applied.

[0007] Means for Solving the Technical Problem

[0008] A manufacturing apparatus according to a first aspect is a manufacturing apparatus that applies energy to an object and measures the amount of energy applied to the object.

[0009] Advantageous Effects of the Invention

[0010] According to the present invention, it is possible to apply energy to an object and measure the amount of energy applied. Brief Description of the Drawings

[0011] Figure 1 It is a block diagram showing an example of a schematic configuration of a manufacturing apparatus.

[0012] Figure 2 It is a perspective view showing an example of a schematic configuration of a pressing device.

[0013] Figure 3It is a perspective view showing an example of the schematic structure of the measurement unit.

[0014] Figure 4 It is a diagram showing an example of the coloring member and the calibration member.

[0015] Figure 5 It is a block diagram showing an example of the hardware structure of the information processing device.

[0016] Figure 6 It is a diagram showing an example of the characteristic data.

[0017] Figure 7 It is a block diagram showing an example of the functional structure of the information processing device.

[0018] Figure 8 It is a flowchart showing an example of the pressure measurement process. Detailed Embodiment

[0019] Hereinafter, a mode example for implementing the technology of the present invention will be described in detail with reference to the accompanying drawings. In the present embodiment, an example in which pressure is applied as the energy applied to the object is described. Examples of the object include plate-shaped metals and semiconductor wafers.

[0020] First, refer to Figure 1 The structure of the manufacturing apparatus 10 according to the present embodiment will be described. As Figure 1 shown, the manufacturing apparatus 10 includes a loading mechanism 12, a conveying unit 14A, a conveying unit 14B, a pressurizing device 16, a measurement unit 18, and an information processing device 20. Hereinafter, when collectively referring to the conveying unit 14A and the conveying unit 14B, the letter at the end of the symbol is omitted. The loading mechanism 12, the conveying unit 14A, the conveying unit 14B, the pressurizing device 16, the measurement unit 18, and the information processing device 20 are provided inside the housing of the manufacturing apparatus 10.

[0021] The loading mechanism 12 is configured to be able to load the coloring member 24 from outside the housing of the manufacturing apparatus 10. A cassette 22 is loaded in the loading mechanism 12. A plurality of coloring members 24 are stored inside the housing of the cassette 22. That is, the cassette-type coloring member 24 is loaded into the loading mechanism 12. Thereby, the coloring member 24 is held inside the housing of the manufacturing apparatus 10. The cassette 22 storing the coloring member 24 can be manually loaded into the loading mechanism 12 by the user, or can be loaded into the loading mechanism 12 under the control of the information processing device 20. For example, in the case of a structure in which the cassette 22 is loaded into the loading mechanism 12 under the control of the information processing device 20, the loading mechanism 12 includes a gripping mechanism for gripping the housing of the cassette 22 stored in a storage in the outside of the housing of the manufacturing apparatus 10. In this case, the loading mechanism 12 may include an arm portion for transporting the housing gripped by the gripping mechanism to the loading mechanism 12.

[0022] The coloring member 24 colors with a concentration distribution corresponding to the amount of energy applied (pressure in this embodiment). The coloring member 24 is an example of a measuring member that records information corresponding to the amount of energy applied.

[0023] As the coloring member 24, for example, Prescale (registered trademark) (manufactured by FUJIFILM Corporation), which can obtain a coloring concentration corresponding to the applied pressure, can be applied. Prescale is formed by coating a color former and a developer containing microcapsules with a colorless dye on a sheet-like support. When pressure is applied to Prescale, the microcapsules are broken, and the colorless dye is adsorbed onto the developer and colors. Moreover, since the color former contains a variety of microcapsules with different sizes and strengths, the amount of microcapsules broken according to the applied pressure is different, and the coloring concentration is also different. Therefore, by observing the coloring concentration, the magnitude and pressure distribution of the pressure applied to Prescale can be measured.

[0024] Laminating processing and dust-proof processing are performed on the coloring member 24. In addition, the laminating processing of the coloring member 24 can be performed in the conveying process of the coloring member 24 based on the conveying unit 14A.

[0025] As Figure 2 shown, the pressing device 16 includes a flat pressing member 30 and a flat base 32. On the placing surface 32A of the base 32, the object to be pressed (hereinafter simply referred to as "object") and the coloring member 24 are placed in an overlapping state. The pressing member 30 presses the object, that is, applies pressure, under the control of the information processing device 20. When pressing the object, the pressing member 30 moves along the direction approaching the placing surface 32A (downward in the Figure 2 example), and when the pressing is completed, the pressing member 30 moves along the direction away from the placing surface 32A (upward in the Figure 2 example). The pressing member 30 is controlled according to setting parameters such as the pressure value and the angle of the pressing member 30. The pressing device 16 is an example of an applying device that applies energy to the object. In addition, the pressing member 30 is not flat, and can be a roller or a pair of rollers.

[0026] The conveying unit 14A takes out the sheet-like coloring member 24 stored in the housing of the cassette 22 one by one, and conveys the taken-out coloring member 24 to the placing surface 32A. The conveying unit 14A can be an electrostatic method that adsorbs and conveys by charging the coloring member 24, or an attracting method that adsorbs and conveys the coloring member 24 by a suction cup or air suction, etc. Moreover, the conveying unit 14A can be a physical conveying method that conveys the coloring member 24 by a conveyor belt or the like.

[0027] The conveying unit 14A can convey the coloring member 24 separately from the object. Also, when the coloring member 24 is applied to the object or when the coloring member 24 adheres to the object, the conveying unit 14A can convey the coloring member 24 together with the object.

[0028] The measuring unit 18 measures the distribution of the pressure values applied to the object. In the present embodiment, the measuring unit 18 measures the distribution of the pressure values by reading the coloring member 24. Also, the measuring unit 18 measures the distribution of the pressure values in a state where the coloring member 24 is shielded from external light by the light shielding member 42 (refer to Figure 3 ). Also, the measuring unit 18 measures the distribution of the pressure values by reading the coloring member 24 in a state where the coloring member 24 is disposed on the calibration member 48 (refer to Figure 4 ).

[0029] Refer to Figure 3 An example of the configuration of the measuring unit 18 will be described. As Figure 3 shown, the measuring unit 18 includes a flat base 40, a light shielding member 42, a photographing device 44, and a lighting device 46. The calibration member 48 described later is disposed on the placement surface 40A of the base 40. In Figure 3 , the light shielding member 42 is indicated by a dotted line.

[0030] The light shielding member 42 is composed of five surfaces excluding the bottom surface of the rectangular parallelepiped and is provided on the base 40. The light shielding member 42 shields external light from irradiating the coloring member 24 disposed on the calibration member 48. A slit 42A having a size that allows the coloring member 24 to pass through is provided on one of the four side surfaces of the light shielding member 42. A photographing hole 42B for the photographing device 44 to photograph the coloring member 24 is provided on the upper surface of the light shielding member 42.

[0031] The photographing device 44 includes an image sensor such as a CCD (Charge Coupled Device) image sensor or a CMOS (Complementary Metal Oxide Semiconductor) image sensor. The photographing device 44 photographs the coloring member 24 disposed on the calibration member 48 via the photographing hole 42B and outputs the image data obtained by the photographing to the information processing device 20. As an example of the photographing device 44, a camera of a smartphone or the like can be cited.

[0032] The lighting device 46 is disposed at a position between the light shielding member 42 and the coloring member 24 disposed on the calibration member 48 and irradiates the coloring member 24 with light.

[0033] The calibration member 48 is disposed on the placement surface 40A of the base 40. Dust prevention treatment has been performed on the calibration member 48.

[0034] In this embodiment, the imaging device 44 captures an image with the coloring member 24 placed on the calibration member 48. Thus, the imaging device 44 acquires an image including the calibration member 48 and the coloring member 24 (hereinafter referred to as "coloring member image"). The coloring member image may be affected by the characteristics of the imaging device 44, the illumination conditions (such as illuminance and color temperature) in the environment where the imaging is performed, the imaging angle, the imaging distance, and the like. That is, the coloring member image may have deviations in distortion, tilt, size, shadow, color, etc. The calibration member 48 is used to correct these influences in the coloring member image.

[0035] Figure 4 The photographed surface 80S in the calibration member 48 in the state where the coloring member 24 is placed is shown. The calibration member 48 is a member formed in a sheet shape or a plate shape by a support body made of, for example, paper and resin. As Figure 4 shown, the photographed surface 80S includes a plurality of color patches 83, four patterns 86A to 86D, a central region 88, and a frame 89 surrounding the outer edge of the central region 88. The colors of the plurality of color patches 83 may be different from each other, or there may be two or more color patches 83 of the same color.

[0036] The plurality of color patches 83 are used to calibrate the color of the coloring member 24 in the coloring member image. The four patterns 86A to 86D are used to indicate the range that should be included in the viewing angle when the imaging device 44 captures the calibration member 48 and the coloring member 24. The frame 89 is used to correct the shape such as distortion, tilt, and size of the coloring member image.

[0037] In addition, the correction of the coloring member image using the calibration member 48 may be executed by the processor included in the imaging device 44, or may be executed by the processor included in the information processing device 20. In this embodiment, an example in which the processor included in the imaging device 44 executes the correction of the coloring member image using the calibration member 48 will be described. That is, the coloring member image output from the imaging device 44 is a corrected image.

[0038] After applying energy to the object, the conveying unit 14B conveys the coloring member 24 to a position where external light is blocked. Specifically, after the pressing device 16 finishes pressing the object, the conveying unit 14B conveys the coloring member 24 to the calibration member 48 via the slit 42A. The conveying unit 14B may be the above-described electrostatic method, the suction method, or the physical conveying method. And, the conveying unit 14A and the conveying unit 14B may be the same method or different methods.

[0039] Next, with reference to Figure 5 the hardware structure of the information processing device 20 according to this embodiment will be described. As Figure 5As shown in the figure, the information processing apparatus 20 includes a CPU (Central Processing Unit), a memory 51 serving as a temporary storage area, and a non-volatile storage unit 52. Further, the information processing apparatus 20 includes a display 53 such as a liquid crystal display, an input device 54 such as a keyboard and a mouse, a network I / F (InterFace) 55 connected to a network, and an external I / F 56. The CPU 50, the memory 51, the storage unit 52, the display 53, the input device 54, the network I / F 55, and the external I / F 56 are connected to a bus 57. The CPU 50 is an example of a processor. The conveying units 14A and 14B, the pressing device 16, the measuring unit 18, etc. are connected to the external I / F 56.

[0040] The storage unit 52 is implemented by an HDD (Hard Disk Drive), an SSD (Solid State Drive), a flash memory, or the like. An information processing program 90 is stored in the storage unit 52 serving as a storage medium. After reading the information processing program 90 from the storage unit 52, the CPU 50 expands it to the memory 51 and executes the expanded information processing program 90.

[0041] Further, characteristic data 92 is stored in the storage unit 52. Figure 6 An example of the characteristic data 92 is shown in the figure. The characteristic data 92 is data in which a relationship is preset between the amount of energy (in this embodiment, a pressure value) applied to the coloring member 24 and the concentration of the coloring member 24 contained in an image obtained by photographing the coloring member 24. As the amount of energy, for example, a physical quantity corresponding to the energy that can be measured using the coloring member 24, such as a pressure value, can be appropriately applied. Further, in Figure 6 the figure, the pressure value is proportional to the concentration value, but the relationship between the pressure value and the concentration value is not necessarily limited to a proportional relationship.

[0042] Next, Figure 7 the functional configuration of the information processing apparatus 20 according to this embodiment will be described. As Figure 7 shown in the figure, the information processing apparatus 20 includes a conveyance control unit 60, a pressing control unit 62, a photographing control unit 64, an acquisition unit 66, a first derivation unit 68, a second derivation unit 70, a setting unit 72, and a notification unit 74. By executing the information processing program 90 by the CPU 50, the conveyance control unit 60, the pressing control unit 62, the photographing control unit 64, the acquisition unit 66, the first derivation unit 68, the second derivation unit 70, the setting unit 72, and the notification unit 74 function.

[0043] The conveyance control unit 60 controls the conveyance units 14A and 14B. The pressurization control unit 62 controls the pressurization device 16. The imaging control unit 64 controls the imaging device 44. The acquisition unit 66 acquires, under the control of the imaging control unit 64, the colored component image captured by the imaging device 44 from the imaging device 44.

[0044] The first derivation unit 68 uses the feature data 92 and derives the pressure distribution applied to the colored component 24 based on the colored component image acquired by the acquisition unit 66. Specifically, the first derivation unit 68 converts the density value into a pressure value for each pixel of the colored component image using the feature data 92, thereby deriving the pressure distribution.

[0045] The second derivation unit 70 uses the pressure distribution derived by the first derivation unit 68 to derive the setting parameters of the pressurization device 16. Specifically, the second derivation unit 70 derives the setting parameters for which the pressure distribution derived by the first derivation unit 68 is close to the target pressure distribution. For example, when the target pressure distribution is a uniform distribution, the second derivation unit 70 derives the angle of the pressurizing member 30 for which the pressure distribution derived by the first derivation unit 68 is close to the uniform distribution.

[0046] The setting unit 72 updates the setting parameters of the pressurization device 16 according to the setting parameters derived by the second derivation unit 70.

[0047] When the deviation amount between the pressure distribution derived by the first derivation unit 68 and the reference value is equal to or greater than the threshold value, the notification unit 74 notifies a warning by performing control to display a warning message on the display 53. As an example of this deviation amount, the deviation amount from a predetermined limit sample regarding the coloring degree (i.e., the pressure value and the pressure distribution) of the colored component 24 can be cited.

[0048] In addition, the reference value can be, for example, a statistical value such as the average value or variance of the pressure values and pressure distributions measured in the past. And the notification unit 74 can set the threshold value using the statistical values of the pressure values and pressure distributions measured in the past.

[0049] Next, Figure 8 The operation of the information processing device 20 according to the present embodiment will be described. The pressure measurement process shown is executed by the CPU 50 executing the information processing program 90. For example, when an execution start instruction is input by the user via the input device 54, etc., the pressure measurement process shown Figure 8 is executed. Figure 8 is executed.

[0050] In Figure 8In step S10, the conveyance control unit 60 controls the conveyance unit 14A to take out the sheet-like coloring members 24 stored in the housing of the cassette 22 one by one, and conveys the taken-out coloring members 24 to the placement surface 32A. In step S12, the pressing control unit 62 controls the pressing device 16 to press the object placed on the coloring member 24 conveyed to the placement surface 32A.

[0051] In step S14, the conveyance control unit 60 controls the conveyance unit 14B to convey the coloring member 24 to the calibration member 48 via the slit 42A. In step S16, the imaging control unit 64 controls the imaging device 44 to perform imaging in a state where the coloring member 24 is disposed on the calibration member 48.

[0052] In step S18, the acquisition unit 66 acquires the coloring member image captured in step S16 from the imaging device 44. In step S20, the first derivation unit 68 uses the feature data 92 to derive the pressure distribution applied to the coloring member 24 based on the coloring member image acquired in step S18. In step S22, the second derivation unit 70 uses the pressure distribution derived in step S20 to derive the setting parameters of the pressing device 16. In step S24, the setting unit 72 updates the setting parameters of the pressing device 16 according to the setting parameters derived in step S22.

[0053] In step S26, the notification unit 74 determines whether the deviation amount between the pressure distribution derived in step S20 and the reference value is equal to or greater than the threshold value. When this determination is an affirmative determination, the process proceeds to step S28. In step S28, the notification unit 74 notifies a warning by performing control to display a warning message on the display 53. If the process of step S28 ends, the pressure measurement process ends. On the other hand, when the determination in step S26 is a negative determination, the process of step S28 is not executed and the pressure measurement process ends.

[0054] As described above, according to the present embodiment, it is possible to perform a series of processes of applying energy to an object by the manufacturing apparatus 10 and measuring the amount of the applied energy.

[0055] In addition, in the above embodiment, the case of measuring the energy amount using a coloring member that colors with a concentration distribution corresponding to the amount of energy applied has been described, but it is not limited thereto. It may also be a method of measuring the energy amount by a sensor device that detects the amount of energy applied. Examples of the sensor device in this case include a tactile sensor and a temperature sensor.

[0056] Also, in the above-described embodiment, the case where pressure is applied as the energy applied to the object has been described, but it is not limited thereto. For example, heat or ultraviolet rays can be applied as the energy applied to the object. In the case where heat is applied as the energy applied to the object, as the coloring component 24, Thermoscale (product name) (manufactured by FUJIFILM Corporation) that colors according to heat can be used. Also, in the case where ultraviolet rays are applied as the energy applied to the object, as the coloring component 24, UV SCALE (product name) (manufactured by FUJIFILM Corporation) that colors according to the amount of ultraviolet light can be used.

[0057] Also, in the above-described embodiment, it can be set as a method of measuring multiple energy amounts among pressure, heat, and ultraviolet rays.

[0058] Also, in the above-described embodiment, the case where the cartridge-shaped coloring component 24 is loaded into the loading mechanism 12 has been described, but it is not limited thereto. For example, the roll-shaped coloring component 24 can be loaded into the loading mechanism 12, or the sheet-shaped coloring component 24 can be loaded into the loading mechanism 12. When the roll-shaped coloring component 24 is loaded into the loading mechanism 12, the manufacturing apparatus 10 may include a cutting mechanism for cutting the coloring component 24. When the manufacturing apparatus 10 does not include a cutting mechanism, the roll-shaped coloring component 24 can be recovered in a roll shape.

[0059] Also, in the above-described embodiment, for example, as the hardware structure of a processing unit that executes various processes such as each functional unit of the information processing apparatus 20, various processors shown below can be used. As described above, among the above various processors, in addition to the general-purpose processor, i.e., the CPU, which executes software (program) and functions as various processing units, there are also processors such as FPGA (Field Programmable Gate Array) that can change the circuit structure after manufacturing, i.e., programmable logic devices (PLD), and processors with a circuit structure specifically designed for executing specific processes, i.e., dedicated circuits such as ASIC (Application Specific Integrated Circuit).

[0060] One processing unit can be constituted by one of these various processors, or can be constituted by a combination of two or more processors of the same type or different types (for example, a combination of multiple FPGAs or a combination of a CPU and an FPGA). Also, multiple processing units can be constituted by one processor.

[0061] As an example of a processor configured with a plurality of processing units by one processor, first, there is the following method: represented by a computer such as a client and a server, one processor is configured by a combination of one or more CPUs and software, and this processor functions as a plurality of processing units. Second, there is the following method: represented by a System on Chip (SoC) or the like, a processor that uses one IC (Integrated Circuit) chip to implement the functions of the entire system including a plurality of processing units is used. In this way, various processing units are configured by using one or more of the above various processors as a hardware structure.

[0062] Furthermore, as the hardware structure of these various processors, more specifically, circuitry formed by combining circuit elements such as semiconductor elements can be used.

[0063] Also, in the above-described embodiment, the method of pre-storing (installing) the information processing program 90 in the storage unit 52 has been described, but it is not limited thereto. The information processing program 90 may also be provided in a manner recorded on a recording medium such as a CD-ROM (Compact Disc Read Only Memory), a DVD-ROM (Digital Versatile Disc Read Only Memory), and a USB (Universal Serial Bus) memory. Also, the information processing program 90 may be configured to be downloaded from an external device via a network.

[0064] The entire invention of Japanese Patent Application No. 2022-185864 filed on November 21, 2022 is incorporated herein by reference. And all documents, patent applications, and technical standards described in this specification are incorporated herein by reference to the same extent as if each document, patent application, and technical standard incorporated by reference were specifically and individually described.

Claims

1. A manufacturing apparatus, which is a manufacturing apparatus for applying energy to an object, The manufacturing apparatus measures the amount of energy applied to the object.

2. The manufacturing apparatus according to claim 1, wherein The energy is at least one of pressure, heat, and ultraviolet light.

3. The manufacturing apparatus according to claim 1, which measures the distribution of the amount of energy applied to the object.

4. The manufacturing apparatus according to claim 3, wherein The distribution of the amount of energy is measured by reading a measurement component that records information corresponding to the amount of energy applied.

5. The manufacturing apparatus according to claim 4, wherein The measurement component is a coloring component that colors with a concentration distribution corresponding to the amount of energy applied.

6. The manufacturing apparatus according to claim 1, which includes an information processing device having at least one processor, The processor performs the following processing: Using the measured amount of energy, derive the set parameters of the applying device that applies energy to the object.

7. The manufacturing apparatus according to claim 4, which includes a loading mechanism capable of loading the measurement component from outside the device.

8. The manufacturing apparatus according to claim 7, wherein The measurement component in the form of a cartridge, roll, or sheet is loaded into the loading mechanism.

9. The manufacturing apparatus according to claim 7, wherein The measurement component is manually loaded into the loading mechanism by the user, or is loaded into the loading mechanism under the control of the information processing device.

10. The manufacturing apparatus according to claim 7, wherein The measurement component is held inside the housing of the device.

11. The manufacturing apparatus according to claim 4, wherein The measurement component is transported by at least one of electrostatic means, suction means, and physical transport means.

12. The manufacturing apparatus according to claim 7, wherein Laminating and dust-proofing treatments are performed on the measurement component.

13. The manufacturing apparatus according to claim 4, wherein The distribution of the amount of energy is measured by reading the measurement component in a state where the measurement component is disposed on a calibration component.

14. The manufacturing apparatus according to claim 13, wherein Dust-proofing treatment is performed on the calibration component.

15. The manufacturing apparatus according to claim 4, wherein The distribution of the amount of energy is measured in a state where external light to the measurement component is blocked by a light-shielding component.

16. The manufacturing apparatus according to claim 15, wherein After applying energy to the object, the measurement component is transported to a position where the external light is blocked.

17. The manufacturing apparatus according to claim 15, which includes an illumination device that irradiates light to the measurement component.

18. The manufacturing apparatus according to claim 1, which includes an information processing device having at least one processor, The processor performs the following processing: When the deviation amount between the measured amount of energy and a reference value is equal to or greater than a threshold value, a warning is notified.

19. The manufacturing apparatus according to claim 18, wherein The reference value is a statistical value of the amount of energy measured in the past.

20. The manufacturing apparatus according to claim 18, wherein the processor performs the following processing: setting the threshold value using the amount of energy measured in the past.

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