Switching between vacuum pressure operation and near atmospheric pressure operation in material analysis system

Abstract

The invention relates to providing a suitable interior space for near atmospheric pressure and vacuum pressure modes of operation of an inlet section of a material analysis system. The inlet section has a housing configured for vacuum pressure and near atmospheric pressure, the housing having an interior space that can be provided according to an operating mode of the material analysis system, the interior space being configured to receive charged particles released from a sample via an inlet opening at a distal end thereof. Furthermore, the inlet section has an interior space providing device configured to provide an interior space in a near atmospheric pressure operating mode such that a near atmospheric pressure is reduced from a distal end to a proximal end of the interior space to a vacuum pressure, an inner space is provided in a vacuum pressure operation mode; the inner space is configured such that a solid angle occupied by charged particles released from the sample extending into the inner space and a distance between the sample and a distal end of the inner space are greater in a vacuum pressure operating mode than in a near atmospheric pressure operating mode. This enables the inlet section to receive more electrons per unit time under different pressure environments of the inlet section and enables improved analysis of the sample.

Description

Field of the Invention

[0001] The present invention relates to an inlet section of a material analysis system for charged particles released from a sample, a material analysis system for analyzing a sample having a corresponding inlet section for charged particles released from the sample, a negative pressure system, and a method for selectively operating the inlet section in a vacuum pressure operating mode or a near-atmospheric pressure operating mode, and a corresponding method for analyzing a material in a vacuum pressure operating mode or a near-atmospheric pressure operating mode by means of the negative pressure system. The inlet section can be used, for example, for photoelectron spectroscopy in different pressure environments. Background Art

[0002] Cushman et al., in "Trends in Advanced XPS Instrumentation. Near-Ambient Pressure XPS" published in "Vac. Technol. Coatings" in August 2017, describe a near-ambient pressure (NAP) X-ray photoelectron spectroscopy system that can operate photoelectron spectroscopy at a pressure close to atmospheric pressure. Summary of the Invention

[0003] It is a task that can be regarded as the present invention to provide an inlet section, a material analysis system, a negative pressure system, and a method for analyzing a material, which can achieve better analysis of a sample over a large pressure range, especially with higher resolution or in a shorter duration with the same resolution.

[0004] According to a first aspect of the present invention, there is provided an inlet section of a material analysis system for charged particles emitted from a sample. The inlet section has a housing and an internal space providing device configured for vacuum pressure and near-atmospheric pressure. The housing has an internal space that can be provided according to the operating mode of the material analysis system, and the internal space is configured to receive charged particles via an inlet opening at its distal end. The internal space providing device is configured to provide the internal space in the near-atmospheric pressure operating mode such that the near-atmospheric pressure decreases from the distal end to the proximal end of the internal space to the vacuum pressure, and to provide the internal space in the vacuum pressure operating mode such that the solid angle extending into the internal space occupied by the charged particles released from the sample and the distance between the sample and the distal end of the internal space are greater in the vacuum pressure operating mode than in the near-atmospheric pressure operating mode.

[0005] Since the inlet section for charged particles released from the sample has an internal space providing device which can provide an internal space for a vacuum pressure operation mode and an internal space for a near-atmospheric pressure operation mode, the inlet section can be used in the vacuum pressure operation mode and the near-atmospheric pressure operation mode of the material analysis system. In addition, the inlet section can achieve a switch between the vacuum pressure operation mode and the near-atmospheric pressure operation mode, so that the sample can be analyzed in different pressure environments and especially also over a large pressure range. The inlet section can also achieve an intensity coordinated with the pressure environment and shorten the measurement and analysis time.

[0006] The vacuum pressure should be understood here as the absolute pressure within a pressure range between less than 10 -1 and 10 -8 mbar. The vacuum pressure can be, for example, the absolute pressure between 10 -3 mbar and 10 -6 mbar. The near-atmospheric pressure should be understood here as the pressure close to the atmospheric pressure, for example the absolute pressure between 0.1 mbar and 1000 mbar.

[0007] In the near-atmospheric pressure operation mode, a near-atmospheric pressure exists upstream of the distal end of the internal space. The near-atmospheric pressure can be reduced to the vacuum pressure by the inlet section, so that the collision of charged particles with gas particles located in the internal space of the inlet section can be reduced. Thereby, a larger number of charged particles reach the proximal end of the internal space, so that the intensity of the charged particles measured by a detector arranged downstream adjacent to the proximal end of the internal space can be increased. In the vacuum pressure operation mode, a vacuum pressure already exists upstream of the distal end of the internal space. In this case, the pressure does not have to or does not have to be reduced as strongly between the distal end and the proximal end of the internal space as for the near-atmospheric pressure operation mode. This enables the setting of a larger solid angle, whereby more charged particles can be received in the internal space via the inlet opening in the vacuum pressure operation mode. In addition, a larger distance from the sample can be set, so that easier operation and less restricted sample selection can be achieved. The inlet section can achieve a switch between the vacuum pressure operation mode and the near-atmospheric pressure operation mode of the material analysis system.

[0008] The internal space providing device can for example be configured to provide an internal space in an operation mode close to atmospheric pressure such that the near-atmospheric pressure, for example above 0.1 mbar, above 1 mbar, above 10 mbar, above 100 mbar, between 0.1 mbar and 1000 mbar, between 1 mbar and 1000 mbar, between 10 mbar and 1000 mbar or between 100 mbar and 1000 mbar, upstream of the distal end of the internal space is reduced to, for example, below 10 -2 mbar, below 10 -3 mbar, below 10 -4 mbar, below 10 -5 mbar, below 10 -6 mbar, below 10 -7 mbar, between 10 -2 mbar and 10 -8 mbar, between 10 -3 mbar and 10 -8 mbar, between 10 -4 mbar and 10 -8 mbar, between 10 - 5 mbar and 10 -8 mbar, between 10 -6 mbar and 10 -8 mbar, between 10 -7 mbar and 10 -8 mbar or between 10

[0009] The charged particles released from the sample can for example be electrons or ions.

[0010] The material analysis system can be a surface analysis system, such as a photoelectron spectrometer and in particular an XPS system.

[0011] The internal space providing device can be configured to provide an internal space in a vacuum pressure operation mode such that the pressure does not increase at least and preferably decreases from the distal end to the proximal end of the internal space.

[0012] The inlet section can be configured to provide an internal space without changing the position of the sample. This enables switching back and forth between the operation modes without having to change the position of the sample.

[0013] In an operating mode close to atmospheric pressure, the cross-section of the internal space can increase at least along the decompression section of the internal space in the direction from its distal end to its proximal end. This enables a reduction in pressure along the decompression section because the particles have a larger volume in the direction from the distal end to the proximal end of the internal space. The cross-section can increase along the course of the decompression section, for example, such that an absolute pressure of 10 mbar present upstream of the distal end of the internal space is reduced to 10 - 4 mbar or 10 -3 mbar at the proximal end.

[0014] In a vacuum pressure operating mode, the cross-section of the internal space can also increase at least along the decompression section of the internal space in the direction from its distal end to its proximal end.

[0015] At least a part of the inlet section can have a conical shape. In particular, the decompression section can have a conical shape. The said part of the inlet section can have, for example, a frustum shape or a frustum-like shape. In particular, the decompression section can have a frustum shape or a frustum-like shape.

[0016] The inlet section can have or be, for example, a nozzle (English: nozzle).

[0017] In a vacuum pressure operating mode, the cross-section of the internal space can increase from the distal end to the proximal end such that the solid angle occupied by the charged particles released from the sample and extending into the internal space is between 0.1 sr and 1.47 sr, preferably between 0.21 sr and 0.84 sr. This enables the reception of a plurality of charged particles with different characteristics, especially different kinetic energies, in the inlet section. The more charged particles received in the inlet section, the higher the intensity detected by the detector for detecting charged particles.

[0018] The inlet opening area of the inlet opening depends on the distance and the solid angle and is larger for the vacuum pressure operating mode than for the operating mode close to atmospheric pressure. In an operating mode close to atmospheric pressure, the inlet opening area of the inlet opening can be between 0.0003 mm 2 and 1 mm 2 and, in particular, between 0.07 mm 2 and 0.8 mm 2 in size. In a vacuum pressure operating mode, the inlet opening area of the inlet opening can be between more than 1 mm 2 and 1000 mm 2 and, in particular, between 20 mm 2 and 300 mm 2as large as that between. In the vacuum pressure operating mode, the distance between the sample and the distal end of the internal space can be as large as between 1 mm and 40 mm, especially between 5 mm and 20 mm.

[0019] The inlet opening can include one or more openings. In the case of multiple openings, the opening areas of these openings constitute the inlet opening area. If the inlet opening consists of one opening, the opening area of this opening corresponds to the inlet opening area. The one or more openings can be, for example, circular, elliptical, rectangular or slit-shaped. The inlet opening in the near-atmospheric pressure operating mode and in the vacuum pressure operating mode can have the same opening shape or different opening shapes. They can be, for example, circular, elliptical, rectangular or slit-shaped. The shape can also be formed, for example, by multiple openings of the corresponding inlet opening. For example, a slit-shaped opening shape of the corresponding inlet opening can be produced by arranging multiple circular openings side by side at a distance from each other along a line such that these openings together form a slit.

[0020] The solid angle extending into the internal space occupied by the charged particles released from the sample can consist of multiple sub-solid angles, where each sub-solid angle extends from the following position on the surface of the sample through each of the multiple openings into the internal space, at which position the charged particles are released.

[0021] The inlet opening area in the near-atmospheric pressure operating mode can be, for example, circular, having a diameter between 0.02 mm and 1 mm, for example between 0.02 mm and 0.05 mm or between 0.3 mm and 1 mm. A smaller diameter enables operation in the near-atmospheric pressure operating mode at a higher pressure. A smaller diameter can reduce the number of charged particles that can be received by the inlet section. A reduction in the distance between the sample and the inlet opening of the inlet section can counteract this because thereby the number of charged particles received in the inlet opening can be increased. The intensity required for analysis can be adjusted according to the inlet opening area and distance for a specific near-atmospheric pressure by adjusting the inlet opening area and / or the distance. This enables a specific minimum intensity to be obtained for different pressures. For example, in the vacuum pressure operating mode, the diameter of the inlet opening can be between more than 1 mm and 100 mm, preferably between 10 mm and 40 mm. In the vacuum pressure operating mode, the diameter of the inlet opening area can, for example, be equal to the distance between the sample and the distal end of the internal space. The diameter of the inlet opening area can also, for example, be between 1 times and 2 times the distance between the sample and the distal end of the internal space, for example 1.5 times or 2 times.

[0022] The inlet section can have at least two sub - sections that can be connected to each other. The first sub - section can have an internal space for the vacuum pressure operating mode. The connected sub - sections can form an internal space for the near - atmospheric pressure operating mode. The inlet section can be configured such that an opening is formed along their connection part between the mutually connected sub - sections, and the gas flow rate of the opening is less than the gas flow rate through the inlet opening, especially 20% or less, such as 10% or less, 5% or less, or 1% or less of the gas flow rate through the inlet opening. This enables a simple structure of the inlet section to be provided, through which the switching between the vacuum pressure operating mode and the near - atmospheric pressure operating mode of the material analysis system can be achieved.

[0023] The connectable sub - sections can be manufactured such that the very precise positioning of each sub - section relative to each other can be accurate to a few micrometers, for example. The fit between the connectable sub - sections can be less than + / - 10 μm, such as less than + / - 5 μm, or between + / - 1 μm and + / - 5 μm.

[0024] The internal space providing device can have one or more sliding mechanisms, such as chute guiding devices. The chute guiding device can be configured to move the first sub - section relative to the second sub - section. For example, the first chute guiding device can be configured to move the sub - sections relative to each other in the x - direction so that the sub - sections are connected to each other. The second chute guiding device can be configured to move the sub - sections relative to each other in the z - direction perpendicular to the x - direction so that the sub - sections can be moved relative to each other to connect the sub - sections via a seal.

[0025] The housing of the inlet section can be made of a temperature - resistant material, such as resistant to 100 °C, to 120 °C, to 150 °C, or to 300 °C. The temperature - resistant material can, for example, contain or be stainless steel or bronze. The material can have a coating, for example, coated with carbon. This enables the inlet section to be heated.

[0026] The wall of the internal space can be coated, for example, graphitized. The coating can be applied, for example, by physical vapor deposition (English: physical vapor deposition). The coating can, for example, contain carbon. The coating can have a thickness between 2 μm and 10 μm or between 5 μm and 10 μm. This enables a conductive surface to be provided near the charged particles. This can reduce the charging (Aufladung) of the surface, thereby improving the photoelectronic properties of the inlet section.

[0027] The internal space providing device can have one or more drive devices, such as a stepper motor, a gear drive device, or a pneumatic drive device. The one or more drive devices can be configured to move the two sub - sections relative to each other, for example, pivot.

[0028] The sub-segments may each have a sealing member. The sealing members may be configured to overlap each other in the interconnected state of the sub-segments and produce a pressure-sealed connection portion, such that in the near-atmospheric pressure operating mode, the entry of particles between the sub-segments does not prevent the reduction of the near-atmospheric pressure from the distal end portion to the proximal end portion of the internal space to the vacuum pressure. Since the sub-segments overlap each other in the near-atmospheric pressure operating mode, improved sealing can be achieved. In addition, in the case of switching between the vacuum pressure operating mode and the near-atmospheric pressure operating mode, the positioning of the sub-segments relative to each other can be improved.

[0029] The seal may have a labyrinth seal, in particular a smooth-gap labyrinth seal (Glattspaltlabyrinthdichtung). The sub-segments may be sealed from each other without contact, for example, via a smooth-gap labyrinth seal in the form of a long and thin gap serving as a constriction between their surfaces. Alternatively, the seal may also have an O-ring. The seal may have fluororubber (FKM) according to DIN ISO 1629, for example Viton. The seal may be vulcanized, for example, onto the surface of the overlapping portion of the sub-segments.

[0030] The internal space providing device may be configured to press one sub-segment onto another when establishing a pressure-sealed connection portion between the sub-segments, such that at least a part of the sealing members of the sub-segments are directly stacked on top of each other. This can improve the sealing.

[0031] The surfaces, in particular the opposing surfaces of the sub-segments, may be ground, for example, based on DIN 8589 TI5. Grinding enables the surfaces to be smoothed and thus reduces the surface roughness. This enables a better seal to be established.

[0032] The internal space providing device may have at least one support portion, via which the sub-segments are pivotally connected to each other. The internal space providing device may be configured to pivot the sub-segments relative to each other such that an internal space for the near-atmospheric pressure operating mode is provided or an internal space for the vacuum pressure operating mode is provided. Having fewer movable parts enables the degrees of freedom of movement to be restricted. This can reduce inaccuracies, such that the sub-segments can be automatically positioned in a specific direction due to the restriction of the degrees of freedom. This enables a simple and reliable inlet section to be provided, which can achieve a high positioning accuracy of the sub-segments relative to each other. In addition, a compact inlet section can be provided, which can thus enable a compact material analysis system to be provided.

[0033] The internal space providing device can for example have two support parts, both of which are configured to pivot the sub-segments relative to each other. The first support part can be configured such that one of the sub-segments can pivot around the other sub-segment about a first pivot axis. The second support part can be configured such that one of the sub-segments can pivot about itself about a second pivot axis. The second support part can in particular be configured to position one of the sub-segments on the other sub-segment with a kinematically restricted degree of freedom.

[0034] The sub-segments can be concentrically overlapped via a sealing section. This enables improved sealing, for example based on an improved positioning accuracy of the sub-segments relative to each other.

[0035] One or each of the two sub-segments can have a hollow frustum. The two sub-segments can each have an opening at their distal end and at their proximal end. The openings of the sub-segments can be centered with respect to each other. This enables a high positioning accuracy of the sub-segments in the connected state.

[0036] The entrance section can be an aperture device for receiving charged particles. The entrance section can be connected to a lens or an analyzer. The lens can be configured to guide the charged particles from the entrance section to the analyzer. Alternatively, the entrance section can also be part of the lens. The entrance section can also be configured to guide the charged particles from its distal end to its proximal end. The proximal end of the entrance section can be connected to the lens or the analyzer and release the charged particles to the lens or the analyzer. The analyzer can be a hemispherical energy analyzer. The analyzer can be connected to a detector. Alternatively, the entrance section can also be part of the aperture device, for example the front end cap electrode of the aperture device. The aperture device can have one or more photoelectron lenses, stigmatizers, pivoters and / or slits.

[0037] The entrance section can be a flip-open entrance section or a movable entrance section.

[0038] The entrance section can have a solid angle adjusting device. The solid angle adjusting device can be configured to adjust the solid angle. The solid angle adjusting device can have an entrance opening angle adjusting device, which is configured to adjust the entrance opening angle. The solid angle adjusting device can have a distance adjusting device, which can be configured to adjust the distance between the sample and the distal end of the provided internal space. Additionally or alternatively, the solid angle adjusting device can have an entrance opening area adjusting device, which can be configured to adjust the entrance opening area. The solid angle adjusting device enables the adjustment of the solid angle.

[0039] Additionally or alternatively, the inlet section may have a partition. The partition may be, for example, a variable partition, in particular a conical variable partition. The variable partition may be moved continuously or stepwise in order to change the inlet opening area and the distance between the sample and the distal end of the provided internal space. This enables adjustment of different inlet opening areas and the distance between the sample and the distal end of the provided internal space. Thereby, for example, sufficient intensity for analysis can be ensured when the pressure situation changes.

[0040] According to another aspect of the invention, there is provided a material analysis system configured to analyze a sample. The material analysis system has a detector for detecting charged particles released from the sample and an inlet section connected to the detector according to at least one of claims 1 to 9 or any embodiment of the inlet section.

[0041] The material analysis system may be a photoelectron spectrometer. The photoelectron spectrometer may have a lens and an analyzer. The inlet section may be part of the lens or connected to the lens. The analyzer may be connected to the inlet section or to the lens. The analyzer may be a hemispherical energy analyzer. The analyzer may be connected to the detector. The material analysis system may be a surface analysis system for analyzing surface properties and / or material properties.

[0042] According to another aspect of the invention, there is provided a negative pressure system. The negative pressure system has: a negative pressure housing configured for vacuum pressure and near-atmospheric pressure, which is used to hermetically enclose a cavity for arranging a sample; an irradiation system for irradiating the sample; and a material analysis system for analyzing the sample according to claim 10 or any embodiment of the material analysis system. The negative pressure system enables analysis of a sample using the material analysis system under different pressure conditions. The irradiation system may be an X-ray radiation source, for example an X-ray radiation source for irradiating the sample with monochromatic X-ray radiation. The irradiation system may include a monochromator configured to monochromatize the X-ray radiation. The monochromator may be arranged between the X-ray radiation source and the sample so as to be able to irradiate the sample with monochromatic X-ray radiation. This enables irradiation of the sample with monochromatic X-rays and separation of photoelectrons from the sample. The negative pressure system may be used, for example, to generate an X-ray photoelectron emission spectrum and analyze the sample based on this.

[0043] The negative pressure system may include a sample holder and a sample storage. The sample holder or the sample storage may be movable and / or pivotable. The sample holder or the sample storage may be part of the material analysis system.

[0044] According to another aspect of the present invention, there is provided a method for selectively operating the inlet section according to any one of claims 1 to 9 or any embodiment of the inlet section in a vacuum pressure operating mode or a near atmospheric pressure operating mode. The method comprises the following steps:

[0045] - Selecting a near atmospheric pressure operating mode or a vacuum pressure operating mode, and

[0046] - Providing an internal space according to the selected operating mode, such that in the near atmospheric pressure operating mode, an internal space is provided such that the near atmospheric pressure decreases from the distal end portion to the proximal end portion of the internal space to a vacuum pressure, and in the vacuum pressure operating mode, an internal space is provided such that the solid angle occupied by charged particles released from the sample and extending into the internal space and the distance between the sample and the distal end portion of the internal space are greater in the vacuum pressure operating mode than in the near atmospheric pressure operating mode.

[0047] The selection of the near atmospheric pressure operating mode or the vacuum pressure operating mode can be made manually by the user, for example, or automatically based on a pressure measurement upstream of the distal end portion of the internal space, for example. For this purpose, the inlet section can have a pressure sensor. Alternatively, a pressure sensor can also be provided in the negative pressure system. According to the pressure upstream of the distal end portion of the internal space, a corresponding internal space can be provided, which ensures operation with sufficient intensity. This enables improved and more reliable operation under different pressure conditions. In addition, the sample can be analyzed at different pressures, in particular, how different pressures affect the sample and its properties can be analyzed.

[0048] According to another aspect of the present invention, there is provided a method for selectively analyzing a material in a vacuum pressure operating mode or a near atmospheric pressure operating mode by means of a negative pressure system according to claim 11 or any embodiment of the negative pressure system. The method comprises the following steps:

[0049] - Providing a sample in the negative pressure housing of the negative pressure system,

[0050] - Operating the inlet section according to the method according to claim 12,

[0051] - Adjusting the pressure upstream of the distal end portion of the internal space of the inlet section according to the operating mode such that there is a near atmospheric pressure upstream of the distal end portion of the internal space in the near atmospheric pressure operating mode and a vacuum pressure upstream of the distal end portion of the internal space in the vacuum pressure operating mode,

[0052] - Irradiating the sample with an irradiation system, and

[0053] - Detecting charged particles released from the sample in a detector.

[0054] Charged particles can be detected in the detector in an energy-resolved manner. For this purpose, an analyzer, preferably an energy analyzer, in particular a hemispherical energy analyzer, can be arranged upstream of the detector and connected to the detector.

[0055] The method can include, for example, the step of adjusting the distance between the inlet opening and the sample to 1 to 2 times, preferably 1.5 times, the inlet opening area of the inlet opening.

[0056] According to another aspect of the invention, the application of the negative pressure system according to claim 11 or the application of any embodiment of the negative pressure system is provided for: surface analysis, measurement of surface reactions, measurement of liquid-solid reactions, measurement of liquid-gas reactions, measurement of liquids, measurement of thin layers, detection of foreign objects in liquids, photoemission measurement, photoelectron spectroscopy measurement at near atmospheric pressure, X-ray photoelectron spectroscopy measurement at near atmospheric pressure, electrochemical measurement, battery analysis, oxidation measurement, electrolyte measurement, electrode measurement, sample measurement through liquids, quality control, corrosion measurement, catalyst measurement, pressure-related measurement, measurement of biological samples, potential analysis measurement, measurement of supersaturated liquids, or analysis of microelectronic devices.

[0057] According to another aspect of the invention, the application of the method according to claim 13 or the application of any embodiment of the method is provided for: surface analysis, measurement of surface reactions, measurement of liquid-solid reactions, measurement of liquid-gas reactions, measurement of liquids, measurement of thin layers, detection of foreign objects in liquids, photoemission measurement, photoelectron spectroscopy measurement at near atmospheric pressure, X-ray photoelectron spectroscopy measurement at near atmospheric pressure, electrochemical measurement, battery analysis, oxidation measurement, electrolyte measurement, electrode measurement, sample measurement through liquids, quality control, corrosion measurement, catalyst measurement, pressure-related measurement, measurement of biological samples, potential analysis measurement, measurement of supersaturated liquids, or analysis of microelectronic devices.

[0058] According to another aspect of the invention, a computer program product is provided for selectively operating the inlet section according to any one of claims 1 to 9 in a vacuum pressure operating mode or a near atmospheric pressure operating mode. The computer program product contains computer program code means which, when the computer program product is executed on a processor, cause the processor to execute the method according to claim 12 or the method according to any embodiment of the method.

[0059] According to another aspect, a computer-readable medium is provided that stores a computer program product for selectively operating an inlet section. Alternatively or additionally, the computer-readable medium may store a computer program product according to one or more embodiments of the computer program product.

[0060] According to another aspect of the present invention, a computer program product is provided that is configured to selectively analyze a material in a vacuum pressure operating mode or an operating mode close to atmospheric pressure by means of the negative pressure system according to claim 11 or any embodiment of the negative pressure system. The computer program product includes computer program code means that, when the computer program product is executed on a processor, cause the processor to execute the method according to claim 13 or a method according to any embodiment of the method.

[0061] According to another aspect, a computer-readable medium is provided that stores a computer program product for selectively analyzing a material. Alternatively or additionally, the computer-readable medium may store a computer program product according to one or more embodiments of the computer program product.

[0062] The inlet section according to claim 1, the material analysis system according to claim 10, the negative pressure system according to claim 11, the method according to claim 12, the method according to claim 13, the application according to claim 14, and the application according to claim 15, as well as the computer program product and the computer-readable medium, may have similar and / or identical preferred embodiments, as particularly defined in the dependent claims.

[0063] Furthermore, the preferred embodiments of the present invention may also be any combination of the features of the dependent claims or the foregoing embodiments combined with the corresponding independent claims. BRIEF DESCRIPTION OF THE DRAWINGS

[0064] The aspects and other aspects of the present invention will be described in more detail hereinafter with reference to the embodiments shown in the drawings.

[0065] In the following drawings:

[0066] Figure 1A A first embodiment of the inlet section in the form of a pivotable nozzle assembly in an operating mode close to atmospheric pressure is schematically and exemplarily shown;

[0067] Figure 1B A first embodiment during the pivoting-open process is schematically and exemplarily shown;

[0068] Figure 1CSchematically and exemplarily shows a first embodiment in a vacuum pressure operating mode;

[0069] Figure 2A Schematically and exemplarily shows an embodiment of a negative pressure system in a vacuum pressure operating mode, which has a material analysis system in the form of a photoelectron spectrometer, and the material analysis system includes a second embodiment of an inlet section;

[0070] Figure 2B Schematically and exemplarily shows an embodiment of a negative pressure system in a near-atmospheric pressure operating mode;

[0071] Figure 3A Schematically and exemplarily shows a third embodiment of an inlet section in the form of a movable nozzle in a near-atmospheric pressure operating mode;

[0072] Figure 3B Schematically and exemplarily shows a third embodiment of an inlet section in the form of a movable nozzle in a vacuum pressure operating mode;

[0073] Figure 4A Schematically and exemplarily shows a fourth embodiment of an inlet section in a near-atmospheric pressure operating mode in cross-section;

[0074] Figure 4B Schematically and exemplarily shows a fourth embodiment of an inlet section in a vacuum pressure operating mode;

[0075] Figure 5 Shows an exemplary flow chart of an embodiment of a method for selectively operating an inlet section in a vacuum pressure operating mode or in a near-atmospheric pressure operating mode;

[0076] Figure 6 Shows an exemplary flow chart of an embodiment of a method for selectively analyzing a material in a vacuum pressure operating mode or in a near-atmospheric pressure operating mode by means of a negative pressure system. Detailed Description

[0077] Figure 1A Shows a first embodiment of the inlet section 10 of a material analysis system. In this embodiment, the material analysis system is a photoelectron spectrometer that receives photoelectrons from a sample and generates an energy-resolved photoelectron emission spectrum. The photoelectron emission spectrum can be used for material analysis. The inlet section 10 is a pivotable nozzle assembly in the first embodiment. The inlet section 10 is configured to receive photoelectrons released from the sample. In other embodiments, the inlet section may also be configured to receive other types of charged particles released from the sample, such as ions. The inlet section 10 can be in a near-atmospheric pressure operating mode (see Figure 1A ) or in a vacuum pressure operating mode (seeFigure 1C ) runs.

[0078] The inlet section 10 has a housing 12 which is configured to withstand vacuum pressure and near-atmospheric pressure. In a first embodiment, the housing 12 consists of two sub-sections 14 and 16 which can be connected to each other in a pressure-tight manner, and the sub-sections enclose an internal space 18 which extends from its distal end 20 to its proximal end 22. The distal end 20 is oriented in the direction of the sample during the operation of the photoelectron spectrometer (not shown). The proximal end 22 is oriented in the direction of the energy analyzer during operation (not shown). An inlet opening 24 leading into the internal space 18 is provided at the distal end 20, and the inlet opening receives photoelectrons. An outlet opening 26 is provided at the proximal end 22, and the outlet opening leads the photoelectrons out of the inlet section 10. A seal 28 in the form of an O-ring is provided between the mutually connectable sub-sections 14 and 16. The internal space 18 can be adapted via an internal space providing device 30 having a drive device 32 and a support in the form of a radial support 34 driven by the drive device 32. For this purpose, as shown in Figure 1B , the sub-section 14 can be swung open about the radial support 34 such that the provided internal space 18' only extends from the distal end 20' to the proximal end 22. Thus, the sub-section 16 forms the internal space 18' for the vacuum pressure operating mode, and the connected sub-sections 14 and 16 form the internal space 18 for the near-atmospheric pressure operating mode. The sub-section 14 can be swung open such that it does not interfere with the operation of the inlet section 10. For this purpose, as shown in Figure 1C , the sub-section 14 is further swung open away from the inlet opening 24'. The inlet section 10 can operate in the vacuum pressure operating mode in Figure 1C . The sub-section 14 can also be swung open such that the position of the sample does not need to be changed for the swinging-open process (not shown).

[0079] The internal space providing device 30 is capable of providing the internal space 18 or 18' according to the operating mode of the material analysis system. In other embodiments, the internal space providing device may also have a plurality of support portions (the sub-segments are pivotally connected to each other via these support portions) and is configured to pivot the sub-segments relative to each other such that an internal space for an atmospheric pressure operating mode is provided or an internal space for a vacuum pressure operating mode is provided. The internal space providing device 30 provides the internal space 18 in the atmospheric pressure operating mode such that the atmospheric pressure is reduced from the distal end 20 to the proximal end 22 to a vacuum pressure. For this purpose, the cross-section of the internal space 18 increases along the pressure reducing portion 36 in the direction from its distal end 20 to its proximal end 22. The decrease in pressure between the distal end 20 and the proximal end 22 increases the mean free path length of the photoelectrons, such that more photoelectrons can reach the proximal end 22 without colliding with gas molecules. In the atmospheric pressure operating mode, there is an absolute pressure of, for example, 100 mbar upstream of the distal end 20, and a vacuum pressure, for example, approximately 10 -3 mbar of absolute pressure at the proximal end 22. The absolute pressure can then be further reduced by an additional vacuum pump up to the energy analyzer, for example, reduced to 10 -6 mbar. The absolute pressure upstream of the distal end 20 can also be between 0.1 mbar and 1000 mbar in the atmospheric pressure operating mode.

[0080] In the vacuum pressure operating mode, there is a pressure, for example, between 10 -1 mbar and 10 -8 mbar, for example, between 10 -3 mbar and 10 -6The pressure between mbar. The internal space providing device 30 provides the internal space 18' in the vacuum pressure operation mode, such that the solid angle extending into the internal space 18' occupied by the photoelectrons released from the sample is greater than the solid angle extending into the internal space 18 (not shown) occupied by the photoelectrons released from the sample. In this case, for the vacuum pressure operation mode, the solid angle is 0.84 sr, and for the near atmospheric pressure operation mode, the solid angle is 0.46 sr. In addition, in this case, the entrance opening area of the entrance opening 24' of the internal space 18' is also greater than the entrance opening area of the entrance opening 24 of the internal space 18. In addition, the distance between the sample and the distal end 20' of the internal space 18' is greater than the distance between the sample and the distal end 20 of the internal space 18 (not shown). In addition, in the said embodiment, the cross-section of the internal space 18' in the vacuum pressure operation mode increases from the distal end 20' to the proximal end 22, such that the internal space 18' can receive a solid angle of 0.84 sr in the vacuum pressure operation mode. This corresponds to a cone with a half-angle of 30° for the photoelectrons released from the sample during the operation of the photoelectron spectrometer. In other embodiments, in the vacuum pressure operation mode, the cross-section of the internal space can also increase from the distal end to the proximal end, such that the solid angle extending into the internal space occupied by the charged particles released from the sample is between 0.1 sr and 1.47 sr. This corresponds to a cone with a half-angle of the charged particles released from the sample between 10° and 40°. In other embodiments, cones with a half-angle of the charged particles released from the sample, for example, between 0.1° and 40°, between 3° and 40°, or between 20° and 40°, can be received by the internal space.

[0081] In addition, in the said embodiment, the cross-section of the internal space 18 in the near atmospheric pressure operation increases from the distal end 20 to the proximal end 22, such that the internal space 18 in the near atmospheric pressure operation mode can receive a solid angle of 0.46 sr.

[0082] In the said embodiment, in the near atmospheric pressure operation mode, the shape of the entrance opening 24 of the entrance opening is circular and has an entrance opening area of 0.1 mm 2 . In other embodiments, the shape of the entrance opening can also have other shapes, such as rectangular, elliptical, or other shapes. In addition, in the near atmospheric pressure operation mode, the entrance opening area can also have other dimensions, such as between 0.0003 mm 2 and 1 mm 2 , for example, between 0.03 mm 2 and 0.8 mm 2 , especially between 0.07 mm 2 and 0.8 mm 2 that large.

[0083] In the described embodiment, the inlet opening of the inlet opening 24' in the vacuum pressure operating mode is circular and has an inlet opening area of 100 mm 2 . In other embodiments, the inlet opening shape may also have other shapes, such as rectangular, oval or other shapes. In addition, in the vacuum pressure operating mode, the inlet opening area may also have other dimensions, such as between more than 1 mm 2 and 1000 mm 2 , especially between 20 mm 2 and 300 mm 2 .

[0084] In the described embodiment, in the vacuum pressure operating mode, the distance between the sample and the distal end 20' of the internal space 18' is 10 mm. In other embodiments, in the vacuum pressure operating mode, the distance between the sample and the distal end 20' of the internal space 18' may be between 1 mm and 40 mm, especially between 5 mm and 20 mm.

[0085] In the following embodiments, the same reference numerals are used for the same features. The re-explanation of the features is waived where it is not necessary for understanding.

[0086] In Figure 2A , an embodiment of the negative pressure system 100 is shown. The negative pressure system 100 can be used, for example, for: surface analysis, measurement of surface reactions, measurement of liquid-solid reactions, measurement of liquid-gas reactions, measurement of liquids, measurement of thin layers, detection of foreign substances in liquids, photoemission measurement, photoelectron spectroscopy measurement near atmospheric pressure, X-ray photoelectron spectroscopy measurement near atmospheric pressure, electrochemical measurement, battery analysis, oxidation measurement, electrolyte measurement, electrode measurement, sample measurement through liquids, quality control, corrosion measurement, catalyst measurement, pressure-related measurement, measurement of biological samples, potential analysis measurement, measurement of supersaturated liquids or analysis of microelectronic devices.

[0087] The negative pressure system 100 includes a negative pressure housing 102 configured for vacuum pressure and near atmospheric pressure, an irradiation system 40 for irradiating the sample 42, and a material analysis system in the form of a photoelectron spectrometer 50 for analyzing the sample 42.

[0088] The negative pressure housing 102 encloses the cavity 104 in a sealed manner. The negative pressure housing 102 has a window 108 that is transparent to X-ray radiation, a transfer opening 110 that can be sealed and closed for arranging the sample 40 on the sample holder 44 arranged in the cavity 104, and a connection opening 111 for connecting to the photoelectron spectrometer 50. In this case, the sample holder 44 is a platform that can be tilted and translated for arranging the sample 42 below the photoelectron spectrometer 50. The cavity 104 is adjusted to a predetermined absolute pressure by a vacuum pump 112.

[0089] The irradiation system 40 includes an electron gun 45, a target anode 46, and an X-ray monochromator 48. The irradiation system 40 generates X-ray radiation by shooting electrons from the electron gun 45 onto the target anode 46. The target anode 46 is made of a material such as Al, Ag, or Cr, and the material generates representative X-ray radiation with a predetermined energy. The X-ray monochromator 48 generates monochromatic X-ray radiation 106 from the X-ray radiation. The sample 42 is irradiated with the monochromatic X-ray radiation 106 to excite photoelectrons 114. The photoelectrons 114 are released from the sample 42 and received by the photoelectron spectrometer 50.

[0090] The photoelectron spectrometer 50 includes a second embodiment of the inlet section 10' (the inlet section has a conical variable diaphragm 15), an electron optical lens 52, an analyzer 54 in the form of a hemispherical energy analyzer, and a detector 56 in the form of a CMOS detector. In other embodiments, any other embodiment of the inlet section can also be used with the material analysis system and / or in the negative pressure system.

[0091] The detector 56 is connected to the inlet section 10' via the lens 52 and the analyzer 54 and can detect the photoelectrons released from the sample 42. In other embodiments, the detector can also be configured to detect other types of charged particles released from the sample.

[0092] In the described embodiment, the conical variable diaphragm 15 of the inlet section 10' is formed by a thin metal foil. The foil has a wall thickness of 5 μm. In other embodiments, the wall thickness can also be, for example, between 1 μm and 50 μm. The foil is suspended in the housing 12 of the inlet section 10' and rolled into a funnel shape, so that the movement of the foil at one or more action points of the foil changes the internal space 18' (see Figure 2A ) or 18 (see Figure 2B) the distance d between the distal ends. Additionally, thereby, the entrance shape, the solid angle occupied by the photoelectrons 114 released from the sample 42 and extending into the inner space 18' or 18, and the entrance opening area of the entrance opening of the entrance section 10' are also changed. The entrance shape can vary between a circular shape and an oval shape. When the distance d increases, the entrance opening area and the solid angle also increase. Thus, the inner space providing device 30 can thus provide an inner space 18 for operating in an approximate atmospheric pressure mode (see Figure 2B ) and an inner space 18' for operating in a vacuum pressure mode (see Figure 2A ).

[0093] In the embodiment, the lens 52 has a plurality of pressure levels in which the absolute pressure continuously decreases. For this purpose, vacuum pumps 58 and 59 are provided which evacuate the inner space of the pressure levels of the lens 52. This enables further reduction of the pressure upstream of the analyzer 54. The lens 52 is used to guide the photoelectrons 114 from the proximal end of the entrance section 10' to the analyzer 54. In other embodiments, the entrance section 10' can also be part of a lens.

[0094] In the analyzer 54, the photoelectrons 114 are spatially separated based on their kinetic energy and are guided to the detector 56.

[0095] The detector 56 receives and detects the photoelectrons 114 and can thus create an energy-resolved photoelectron emission spectrum of the sample 42 for its analysis. In the embodiment, an absolute pressure of 10 -6 mbar is adjusted upstream of the detector 56. For this purpose, in addition to the vacuum pumps 58 and 59, other vacuum pumps (not shown) can also be provided in the material analysis system. In other embodiments, other vacuum pressures can also be adjusted.

[0096] In Figure 3A and Figure 3B a third embodiment of the entrance section 10'' in the form of a movable nozzle is shown. Different from the first embodiment, the nozzle in the third embodiment is not flipped open but moves linearly. For this purpose, the inner space providing device 30 has a slide guiding device 35 driven by a driving device 32, and the slide guiding device can move a sub-section 14 of the entrance section 10'' between a position connected to the sub-section 16 for operating in an approximate atmospheric pressure mode (see Figure 3A ) and a position separated from the sub-section 16 for operating in a vacuum pressure mode (see Figure 3B ).

[0097] Figure 4AShows a fourth embodiment of the inlet section 10”’ in a cross-sectional view in an operating mode close to atmospheric pressure. The fourth embodiment of the inlet section 10”’ is similar to the first embodiment of the inlet section 10. However, different from the first embodiment of the inlet section 10, the fourth embodiment of the inlet section 10”’ has a gap seal between the sub-sections 14 and 16, especially instead of an O-ring.

[0098] The sub-sections 14 and 16 each have a sealing member 64 or 66. The sealing members 64 and 66 overlap each other in the interconnected state of the sub-sections 14 and 16, such that a pressure-sealed connection is produced, such that the entry of particles, especially gas particles, between the sub-sections 14 and 16 in the operating mode close to atmospheric pressure does not prevent the pressure close to atmospheric pressure from decreasing from the distal end 20 to the proximal end 22 of the internal space 18 to the vacuum pressure. In this embodiment, the gas flow rate through the sealing members 64 and 66 is less than 5% of the gas flow rate through the inlet opening 24. In other embodiments, additional sealing of the seal can be achieved through the sealing members 64 and 66, for example, lower sealing, for example, at a gas flow rate up to 20% of the gas flow rate through the inlet opening, or higher sealing, for example, at a gas flow rate less than 1% of the gas flow rate through the inlet opening.

[0099] In the fourth embodiment of the inlet section 10”’, the internal space providing device 30 has two radial support portions 34’ and 34” (see Figure 4B ). The sub-section 14 can pivot around the first radial support portion 34’ around the sub-section 16. The second radial support portion 34” enables the sub-section 14 to pivot around an additional axis, so that an improved pressure-sealed connection can be produced between the sub-sections 14 and 16 in this way. For this purpose, in the case of producing a pressure-sealed connection between the sub-sections 14 and 16, the internal space providing device 30 can press the sub-section 14 onto the other sub-section 16, such that a part of the sealing members 64 and 66 of the sub-sections 14 and 16 directly overlap. In addition, the sub-sections 14 and 16 overlap concentrically via a sealing section 68 in this embodiment (see Figure 4A ).

[0100] As in the other embodiments, the fourth embodiment of the inlet section 10”’ can also operate in an operating mode close to atmospheric pressure (see Figure 4A ) and in a vacuum pressure operating mode (see Figure 4B ). In the vacuum pressure operating mode, the solid angle α’ occupied by the photoelectrons 114 released from the sample 42 and extending into the internal space 18’ is greater than the solid angle α occupied by the photoelectrons 114 released from the sample 42 and extending into the internal space 18 in the operating mode close to atmospheric pressure.

[0101] The distal end 20 or 20' is located near the sample 42 disposed on the sample holder 44. The sample 42 is preferably located at a distance between 1 and 2 times the diameter of the circular inlet opening. In this embodiment, the sample is arranged to be centered with respect to the optical axis 70 of the inlet section 10'''. The optical axis 70 is aligned with the optical axis of a lens (not shown) disposed at the proximal end 22 of the inlet section 10''', and the lens guides the photoelectrons 114 to the analyzer. The analyzer in turn guides the photoelectrons in an energy-resolved manner onto a detector so that the photoelectrons can be detected in an energy-resolved manner.

[0102] Figure 5 An embodiment of a method 500 is shown for selectively operating an inlet section, such as the inlet section of FIGS. 1 to 4, in a vacuum pressure operating mode or in a near atmospheric pressure operating mode.

[0103] In step 502, a near atmospheric pressure operating mode or a vacuum pressure operating mode is selected. The operating mode can be automatically or manually selected by the user, for example, based on a pressure measurement upstream of the distal end of the internal space of the inlet section.

[0104] In step 504, an internal space is provided according to the selected operating mode. If the near atmospheric pressure operating mode is selected, the internal space is provided such that the near atmospheric pressure decreases from the distal end to the proximal end of the internal space to a vacuum pressure. If the vacuum pressure operating mode is selected, an internal space is provided that is occupied by charged particles released from the sample, has a larger solid angle extending into the internal space than in the near atmospheric pressure operating mode, and has a greater distance between the sample and the distal end of the internal space than in the near atmospheric pressure operating mode. In addition, the inlet opening area of the inlet opening is also larger. Depending on the type of inlet section, the internal space can be provided in different ways. For example, two interconnected sub-sections can be flipped apart from each other by flipping one of the sub-sections open. Thereby, the inlet opening area can be increased and at the same time the distance between the sample and the distal end of the now provided internal space can be increased.

[0105] Figure 6 An embodiment of a method 600 is shown for selectively analyzing a material in a vacuum pressure operating mode or in a near atmospheric pressure operating mode by means of a negative pressure system, such as the negative pressure system shown in Figure 2A and Figure 2B In step 602, a sample is provided in the negative pressure housing of the negative pressure system.

[0106] In step 602, a sample is provided in the negative pressure housing of the negative pressure system.

[0107] In step 604, the inlet section of the negative pressure system is operated according to method 500. For this purpose, first, an operating mode close to atmospheric pressure or a vacuum pressure operating mode is selected in step 502, and then an internal space is provided in step 504 according to the selected operating mode.

[0108] In step 606, the pressure upstream of the distal end of the internal space of the inlet section is adjusted according to the operating mode. For this purpose, for example, the pressure in the negative pressure housing can be adjusted. Alternatively, the pressure in the sample area can also be adjusted only locally. The pressure is adjusted such that there is a pressure close to atmospheric pressure upstream of the distal end of the internal space in the operating mode close to atmospheric pressure and a vacuum pressure upstream of the distal end of the internal space in the vacuum pressure operating mode. Steps 604 and 606 can also be carried out in the reverse order. For example, if the operating mode is automatically selected, for example based on a pressure measurement, the pressure can first be adjusted in step 606 so that the operating mode is then automatically selected in step 502.

[0109] In step 608, the sample is irradiated with an irradiation system. For this purpose, for example, monochromatic X-ray radiation having a specific wavelength or energy can be incident on the surface of the sample.

[0110] In step 610, charged particles released from the sample are detected in a detector. For example, photoelectrons emerging from the sample excited by monochromatic X-ray radiation can be detected in the detector. Before detecting the photoelectrons, the photoelectrons can be guided through an energy analyzer, for example in the form of a hemispherical energy analyzer, in order to be able to resolve their kinetic energy.

[0111] The method for selective analysis can be used, for example, for: surface analysis, measurement of surface reactions, measurement of liquid-solid reactions, measurement of liquid-gas reactions, measurement of liquids, measurement of thin layers, detection of foreign substances in liquids, photoelectric emission measurement, photoelectron spectroscopy measurement close to atmospheric pressure, X-ray photoelectron spectroscopy measurement close to atmospheric pressure, electrochemical measurement, battery analysis, oxidation measurement, electrolyte measurement, electrode measurement, sample measurement through liquids, quality control, corrosion measurement, catalyst measurement, pressure-related measurement, measurement of biological samples, potential analysis measurement, measurement of supersaturated liquids, analysis of microelectronic devices.

[0112] The above description of the present invention in conjunction with the drawings is used to exemplarily illustrate the features of the present invention in the form of embodiments. The features set forth in the embodiments are, however, merely exemplary and should not be construed as restrictive. In particular, the present invention is not limited to the embodiments or the combination of features of the individual embodiments. For example, the present invention can also be operated in embodiments having other material analysis systems that analyze other charged particles, such as ions.

[0113] Those skilled in the art can understand and implement other variants and variations of the illustrated embodiments in a manner that those skilled in the art rework the claimed invention based on the drawings, the description, and the claims.

[0114] The terms "comprising", "having", "including" do not exclude other elements, components or steps, and the indefinite article "a" does not exclude a plurality.

[0115] A unit, a processor or a device, for example, can fulfill multiple functions of various subject matters mentioned in the claims. The fact that a specific device is mentioned in different claims should not be construed as precluding the advantageous use of a combination of these devices.

[0116] Method steps such as selecting to operate in a mode close to atmospheric pressure or a vacuum pressure mode, providing an internal space according to the selected operating mode, etc., implemented by one or more units, components or devices can also be implemented by a different number of units, components or devices. The method steps and / or the method can be executed or set, for example, as computer program code or computer program code means and / or as specific hardware.

[0117] A computer program product can be stored or provided on a suitable medium, such as an optical storage medium or a solid-state medium. It can also be provided together with other hardware or as part of other hardware. In addition, it can also be provided in other ways, for example, via the Internet, Ethernet or via other wired or wireless telecommunication systems.

[0118] The reference signs used in the claims should not be construed as being limited to the features of the embodiments, but should be understood as being merely exemplary for the features of the claims.

[0119] The present invention relates to providing a suitable internal space for an operation mode at near atmospheric pressure and a vacuum pressure operation mode of an inlet section of a material analysis system. The inlet section has a housing configured for vacuum pressure and near atmospheric pressure, the housing having an internal space that can be provided according to the operation mode of the material analysis system, the internal space being configured to receive charged particles released from a sample via an inlet opening at its distal end. Furthermore, the inlet section has an internal space providing device configured to provide the internal space in the near atmospheric pressure operation mode such that the near atmospheric pressure decreases from the distal end to the proximal end of the internal space to a vacuum pressure, and to provide the internal space in the vacuum pressure operation mode such that the solid angle extending into the internal space occupied by the charged particles released from the sample and the distance between the sample and the distal end of the internal space are greater in the vacuum pressure operation mode than in the near atmospheric pressure operation mode. This enables the inlet section to receive more electrons per unit time under different pressure environments of the inlet section and to achieve an improved analysis of the sample.

Claims

1. Inlet section (10; 10'; 10"; 10"') of a material analysis system (50) for charged particles (114) released from a sample (42), wherein, The inlet section (10;...; 10''') has: - A housing (12) configured for vacuum pressure and near-atmospheric pressure, the housing having an internal space (18; 18') that can be provided according to the operating mode' of the material analysis system (50), the internal space being configured to receive charged particles (114) via an inlet opening (24) at its distal end (20; 20'); and - An internal space providing device (30), the internal space providing device being configured to -- Provide the internal space (18; 18') in the near-atmospheric pressure operating mode such that the near-atmospheric pressure is reduced from the distal end (20) to the proximal end (22) of the internal space (18) to a vacuum pressure, and -- Provide the internal space (18') in the vacuum pressure operating mode such that the solid angle (α, α') occupied by the charged particles (114) released from the sample (42) and extending into the internal space (18') and the distance (d) between the sample (42) and the distal end (20') of the internal space (18') are greater in the vacuum pressure operating mode than in the near-atmospheric pressure operating mode.

2. The inlet section (10;...; 10''') according to claim 1, wherein In the near-atmospheric pressure operating mode, the cross-section of the internal space (18) increases at least along the pressure reduction section (36) of the internal space (18) in the direction from its distal end (20) to its proximal end (22).

3. The inlet section (10;...; 10''') according to claim 1 or 2, wherein, In the vacuum pressure operating mode, the cross-section of the internal space (18') increases from the distal end (20') to the proximal end (22) such that the solid angle (α, α') occupied by the charged particles (114) released from the sample (42) and extending into the internal space (18') is between 0.1 sr and 1.47 sr, preferably between 0.21 sr and 0.84 sr.

4. The inlet section (10;...; 10'''), according to at least one of claims 1 to 3, wherein, In the near-atmospheric pressure operating mode, the inlet opening area of the inlet opening (24) is between 0.0003 mm 2 and 1 mm 2 , in particular between 0.07 mm 2 and 0.8 mm 2 . In the vacuum pressure operating mode, the inlet opening area of the inlet opening (24) is between more than 1 mm 2 and 1000 mm 2 , in particular between 20 mm 2 and 300 mm 2 , and in the vacuum pressure operating mode, the distance (d) between the sample (42) and the distal end (20’) of the interior space (18’) is between 1 mm and 40 mm, in particular between 5 mm and 20 mm.

5. The inlet section (10; 10''; 10'''), according to at least one of claims 1 to 4, wherein, The inlet section (10; 10''; 10''') has at least two sub-sections (14; 16) that can be interconnected, the first sub-section (16) having an internal space (18') for the vacuum pressure operating mode and the connected sub-sections (14, 16) forming an internal space (18) for the near-atmospheric pressure operating mode.

6. The inlet section (10”’) according to claim 5, wherein, The sub-sections (14, 16) each have a sealing member (64, 66), and the sealing members (64, 66) are configured to overlap each other in the interconnected state of the sub-sections (14, 16) and produce a pressure-sealed connection such that the entry of particles between the sub-sections (14, 16) in the near-atmospheric pressure operating mode does not prevent the near-atmospheric pressure from being reduced from the distal end (20) to the proximal end (22) of the internal space (18) to a vacuum pressure.

7. The inlet section (10”’) according to claim 6, wherein, The internal space providing device (30) is configured to press one sub-section (14) against another sub-section (16) when establishing a pressure-sealed connection between the sub-sections (14, 16), such that at least a portion of the sealing members (64, 66) of the sub-sections (14, 16) directly overlap each other.

8. The inlet section (10; 10''; 10'''), according to at least one of claims 5 to 7, wherein, The internal space providing device (30) has at least one support portion (34; 34''; 34'''), via which the sub-sections (14, 16) are pivotally connected to each other, and the internal space providing device (30) is configured to pivot the sub-sections (14, 16) relative to each other such that an internal space (18) for the near-atmospheric pressure operating mode is provided or an internal space (18') for the vacuum pressure operating mode is provided.

9. The inlet section (10”’), according to at least one of claims 5 to 8, wherein The sub-sections (14, 16) overlap concentrically via a sealing section (68).

10. A material analysis system (50) configured for analyzing a sample, the material analysis system having: - a detector (56) for detecting charged particles released from the sample (42) and - an inlet section (10') connected to the detector (56) according to at least one of claims 1 to 9.

11. A negative pressure system (100), the negative pressure system having: - a negative pressure housing (102) configured for vacuum pressure and near-atmospheric pressure, which is used to hermetically enclose a cavity (104) for arranging a sample (42), - an irradiation system (40) for irradiating the sample (42), and - a material analysis system (50) for analyzing the sample (42) according to claim 10.

12. A method (500) for selectively operating an inlet section according to any one of claims 1 to 9 in a vacuum pressure operating mode or a near-atmospheric pressure operating mode, the method comprising the following steps: - selecting the near-atmospheric pressure operating mode or the vacuum pressure operating mode, and - providing an internal space according to the selected operating mode such that the internal space is provided in the near-atmospheric pressure operating mode such that the near-atmospheric pressure decreases from the distal end to the proximal end of the internal space to a vacuum pressure, and the internal space is provided in the vacuum pressure operating mode such that the solid angle (α, α') occupied by charged particles (114) released from the sample (42) and extending into the internal space (18') and the distance between the sample and the distal end of the internal space are greater in the vacuum pressure operating mode than in the near-atmospheric pressure operating mode.

13. A method (600) for selectively analyzing a material in a vacuum pressure operating mode or a near-atmospheric pressure operating mode by means of a negative pressure system according to claim 11, the method comprising the following steps: - providing a sample in the negative pressure housing of the negative pressure system, - operating the inlet section according to the method described in claim 12, - Adjust the pressure upstream of the distal end of the internal space of the inlet section according to the operating mode, such that there is an atmospheric pressure upstream of the distal end of the internal space in the near-atmospheric pressure operating mode and a vacuum pressure upstream of the distal end of the internal space in the vacuum pressure operating mode, - Irradiate the sample using the irradiation system, and - Detect charged particles released from the sample in the detector.

14. Use of the negative pressure system (100) according to claim 11, the use being for: - Surface analysis, - Measurement of surface reactions, - Measurement of liquid-solid reactions, - Measurement of liquid-gas reactions, - Measurement of liquids, - Measurement of thin layers, - Detection of foreign objects in liquids, - Photoemission measurement, - Photoelectron spectroscopy measurement at near-atmospheric pressure, - X-ray photoelectron spectroscopy measurement at near-atmospheric pressure, - Electrochemical measurement, - Battery analysis, - Oxidation measurement, - Electrolyte measurement, - Electrode measurement, - Sample measurement through liquids, - Quality control, - Corrosion measurement, - Catalyst measurement, - Pressure-related measurement, - Measurement of biological samples, - Potential analysis measurement, - Measurement of supersaturated liquids, - Analysis of microelectronic devices.

15. Use of the method (600) according to claim 13, the use being for - Surface analysis, - Measurement of surface reactions, - Measurement of liquid-solid reactions, - Measurement of liquid-gas reactions, - Measurement of liquids, - Measurement of thin layers, - Detection of foreign objects in liquids, - Photoemission measurement, - Photoelectron spectroscopy measurement at near-atmospheric pressure, - X-ray photoelectron spectroscopy measurement at near-atmospheric pressure, - Electrochemical measurement, - Battery analysis, - Oxidation measurement, - Electrolyte measurement, - Electrode measurement, - Sample measurement through liquids, - Quality control, - Corrosion measurement, - Catalyst measurement, - Pressure-related measurement, - Measurement of biological samples, - Potential analysis measurement, - Measurement of supersaturated liquids, - Analysis of microelectronic devices.

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