Back clearance compensation method and device and computer readable storage medium

By determining the equivalent and measured motion information in the motion device of the radiation delivery device in real time and adjusting the backlash compensation amount dynamically, the problem of inaccurate backlash compensation in the prior art is solved, and the motion accuracy and stability are improved.

CN120227594APending Publication Date: 2025-07-01SHANGHAI UNITED IMAGING HEALTHCARE
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Patent Information

Application Number
CN202311868019.3
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2023-12-29
Publication Date
2025-07-01

AI Technical Summary

Technical Problem

There is a problem of inaccurate backlash compensation in existing radiation delivery equipment, which affects the motion accuracy and stability of the moving device.

Method used

During the operation of the moving device, the equivalent motion information and measured motion information of the moving device are determined, and the backlash compensation amount is dynamically adjusted based on these information, and the backlash compensation is performed in real time.

Benefits of technology

It improves the accuracy of backlash compensation, enhances the motion accuracy and stability of the motion device, and is suitable for complex motion processes in radiation delivery equipment.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention relates to a back clearance compensation method and device and a computer readable storage medium. The method comprises the steps that a motion device is controlled to work according to initial back clearance compensation information; in the working process of the motion device, equivalent motion information and actually measured motion information of a first structure of the motion device are determined; determining target back clearance compensation information according to the equivalent motion information and the actually measured motion information; and returning the target back clearance compensation information as new initial back clearance compensation information to execute the step of controlling the motion device to work according to the initial compensation information. By using the back clearance compensation method provided by the invention, the accuracy of performing back clearance compensation on the motion device can be improved.
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Description

Technical Field

[0001] The present application relates to the field of radiotherapy technology, and in particular, to a backlash compensation method, device, and computer-readable storage medium. Background Art

[0002] With the rapid development of radiotherapy technology, the application of using radiation delivery equipment for radiotherapy treatment or research is becoming more and more widespread. The radiation delivery equipment may include radiation processing equipment, radiation flaw detection equipment, radiation experiment equipment, etc. There are drive mechanisms in all radiation delivery equipment. Due to its own structural characteristics and processing and assembly errors, there are inevitably gaps in the drive mechanism. The gap in the drive mechanism has a certain impact on the motion accuracy of the load structure. When the power source outputs at a low speed, the influence of the gap on the system is mainly manifested in the form of backlash. At the moment of motion commutation, the motions of the power source, the drive mechanism, and the moving load are not completely consistent. Some structures of the drive mechanism and the power source have a part of reverse idle motion, which affects the motion accuracy. Moreover, the series mechanical structure of the radiation delivery equipment will cause error accumulation. Therefore, it is necessary to compensate for the errors of the motion device.

[0003] Generally, the methods for eliminating the gap in the drive mechanism include mechanical backlash elimination and motor backlash elimination, as well as error compensation for the gap. Among them, the mechanical backlash elimination method mainly makes a backlash elimination gear by stacking two gears vertically. The teeth of the two gears are staggered by a certain angle, and the pre-tightening force is adjusted by a spring so that the teeth of the two gears clamp the transmission gear engaged with them to achieve the purpose of eliminating the gear gap. However, this kind of gear has high precision requirements, large manufacturing difficulty, and is generally used in occasions with small loads. When the transmission torque is large, the backlash elimination ability of this kind of gear drops significantly. At the same time, the backlash elimination gear has a large volume, and the treatment head space of the radiation delivery equipment is compact. The mechanical backlash elimination method is not suitable for power transmission in the compact space of the radiation delivery equipment. Another means of mechanical backlash elimination is to use a spring to hold the moving nut on the lead screw nut drive mechanism so that the nut always contacts the lead screw on the same side when it stops to ensure the position accuracy of the motion. Electrical backlash elimination, that is, double-motor gear backlash elimination, eliminates the gear gap by adjusting the motion of the two motors so that the small gears fixed to the two motors clamp the large gear. Electrical backlash elimination is suitable for occasions with large torque and heavy loads, and puts forward higher requirements for the motor and motor control. One motor provides the driving force, and the other motor provides the motion resistance to eliminate the backlash. The energy consumption is large and it is easy to heat up. When the two-axis coordinated control is improper, it is easy to generate impact vibration and affect the motion accuracy. The error compensation method is mainly to measure the backlash of the radiation delivery equipment in advance, determine the fixed compensation amount according to the measurement result, and perform backlash compensation based on the fixed compensation amount during motion control.

[0004] However, in existing radiation delivery devices, the load-bearing structures are connected in series, which can lead to the accumulation of backlash errors in each load-bearing structure and ultimately be reflected in the multi-leaf collimator blades. That is to say, when the motors and load-bearing structures of the multi-leaf collimator blades mainly operate at high speeds in the system, the error impact caused by the gaps in the transmission structure is not limited to the reverse backlash errors of the original power source and transmission mechanism. The frequent variable acceleration and reverse movement of the motors and load-bearing structures cause the multi-leaf collimator blades to be briefly disengaged from the transmission parts of the transmission mechanism during the speed change process, resulting in relatively large errors in the static and dynamic position accuracy of the multi-leaf collimator blades. In traditional technologies, only a fixed compensation amount is obtained when the transmission mechanism is static, without considering the errors existing during the movement process, thus there is a problem of inaccurate backlash compensation for radiation delivery devices. Summary of the Invention

[0005] Based on this, in view of the above technical problems, it is necessary to provide a backlash compensation method, device, and computer-readable storage medium that can improve the accuracy of backlash compensation.

[0006] In a first aspect, the present application provides a backlash compensation method, which includes:

[0007] Controlling the operation of the motion device according to the initial backlash compensation information;

[0008] During the operation of the motion device, determining the equivalent motion information and measured motion information of the first structure of the motion device;

[0009] Determining the target backlash compensation information according to the equivalent motion information and measured motion information;

[0010] And using the target backlash compensation information as the new initial backlash compensation information, and returning to execute the step of controlling the operation of the motion device according to the initial backlash compensation information.

[0011] In one embodiment, determining the target backlash compensation information according to the equivalent motion information and measured motion information includes:

[0012] Determining the predicted motion information of the first structure according to the equivalent motion information and measured motion information; and

[0013] Determining the target backlash compensation information according to the predicted motion information.

[0014] In one embodiment, the motion device includes a first structure and one or more second structures associated with the first structure, the equivalent motion information includes equivalent acceleration, and the measured motion information includes measured acceleration; determining the predicted motion information of the first structure according to the equivalent motion information and measured motion information includes:

[0015] Predict the relative position information of each second structure and the predicted acceleration of the first structure based on the equivalent acceleration and the measured acceleration.

[0016] In one embodiment, the motion device includes a first structure and one or more second structures associated with the first structure. Determining the equivalent motion information of the first structure of the motion device includes:

[0017] Determine the equivalent position of the first structure according to the position information of one or more second structures; and

[0018] Determine the equivalent motion information of the second structure according to the equivalent position of the first structure.

[0019] In one embodiment, the first structure includes a load structure, and one or more second structures include a bearing structure directly or indirectly connected to the first structure.

[0020] In one embodiment, the first structure is the multi-leaf collimator blade of a radiation delivery device, and one or more second structures are one or more of the frame fixing member, frame moving member, collimator fixing member, box body, lead screw, and blade guiding structure of the radiation delivery device.

[0021] In one embodiment, controlling the operation of the motion device according to the initial backlash compensation information includes:

[0022] Update the preset motion trajectory according to the initial backlash compensation information to obtain an updated motion trajectory;

[0023] Control the operation of the motion device based on the updated motion trajectory.

[0024] In one embodiment, before controlling the operation of the motion device according to the initial backlash compensation information, the method further includes:

[0025] Obtain the preset position information of the motion device;

[0026] Plan the motion trajectory of the motion device according to the preset position information to obtain a preset motion trajectory;

[0027] Determine the initial backlash compensation information according to the preset motion trajectory and the position information of the motion device in the current time period.

[0028] In a second aspect, an embodiment of the present application provides a backlash compensation device, and the device includes:

[0029] A control module for controlling the operation of the motion device according to the initial backlash compensation information;

[0030] An acquisition module for determining the equivalent motion information and the measured motion information of the first structure of the motion device during the operation of the motion device;

[0031] A determination module, configured to determine target backlash compensation information according to equivalent motion information and measured motion information; and return to execute the step of controlling the operation of the motion device according to the initial backlash compensation information with the target backlash compensation information as the new initial backlash compensation information.

[0032] In a third aspect, an embodiment of the present application provides a computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, the steps of the method provided in the first aspect are implemented.

[0033] The above-mentioned backlash compensation method, device and computer-readable storage medium control the operation of the motion device according to the initial backlash compensation information; during the operation of the motion device, determine the equivalent motion information and measured motion information of the first structure of the motion device; determine the target backlash compensation information according to the equivalent motion information and measured motion information; and return to execute the step of controlling the operation of the motion device according to the initial backlash compensation information with the target backlash compensation information as the new initial backlash compensation information. In this embodiment, before the motion device operates, obtain the initial backlash compensation information, that is, the static backlash compensation information, to compensate for the backlash existing in the motion device; during the operation of the motion device, determine the target backlash compensation information, that is, the dynamic backlash compensation information, according to the determined equivalent motion information and measured motion information, to compensate for the backlash existing in the motion device during the motion process. Both the static backlash existing in the motion device and the dynamic backlash existing in the motion device are considered, so that the backlash compensation of the motion device is more accurate, and the accuracy and stability of the motion of the motion device can be improved. Description of the Drawings

[0034] Figure 1 It is a schematic structural diagram of a radiation delivery device in an embodiment;

[0035] Figure 2 It is a schematic diagram of a third bearing structure in an embodiment;

[0036] Figure 3 It is a schematic diagram of a third bearing structure in another embodiment;

[0037] Figure 4 It is a schematic flowchart of the steps of a backlash compensation method in an embodiment;

[0038] Figure 5 It is a schematic flowchart of the steps of a backlash compensation method in another embodiment;

[0039] Figure 6 It is a schematic flowchart of the steps of a backlash compensation method in another embodiment;

[0040] Figure 7 It is a schematic flowchart of the steps of a backlash compensation method in another embodiment;

[0041] Figure 8 Schematic diagram of the step flow of the backlash compensation method in another embodiment;

[0042] Figure 9 Schematic diagram of the step flow of the backlash compensation method in another embodiment;

[0043] Figure 10 Schematic diagram of the step flow of the backlash compensation method in another embodiment;

[0044] Figure 11 Schematic diagram of the step flow of the backlash compensation method in another embodiment;

[0045] Figure 12 Schematic diagram of the step flow of the backlash compensation method in another embodiment;

[0046] Figure 13 Schematic diagram of the structure of the backlash compensation device in one embodiment;

[0047] Figure 14 Internal structure diagram of a computer device in one embodiment. Detailed implementation manners

[0048] In order to make the objectives, technical solutions and advantages of the present application clearer, the present application will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application, and are not used to limit the present application.

[0049] The serial numbers assigned to the components herein, such as "first", "second", etc., are only used to distinguish the described objects, and do not have any sequential or technical meanings.

[0050] First, before specifically introducing the technical solutions of the disclosed embodiments of the present application, the background technology or the technical evolution context based on the embodiments of the present application will be introduced. With the rapid development of radiotherapy treatment technology, the applications of using radiation delivery devices for radiotherapy treatment and research are becoming more and more widespread. Radiation delivery devices may include radiation processing devices, radiation flaw detection devices, radiation experiment devices, etc. For radiation delivery devices, it includes a plurality of load-bearing structures and load structures connected to each other in series, the movements of the load-bearing structures are independent of each other, and the load structure is a multi-leaf collimator blade.

[0051] Assume that the radiation delivery device includes three load-bearing structures, and the structure of the radiation delivery device is as Figure 1As shown in the figure. The radiation delivery device includes a first carrier structure, a second carrier structure, and a third carrier structure; the first carrier structure includes a first fixing component 101 and a first moving component 102. The first fixing component 101 is a rack fixing part of the radiation delivery device, and the first moving component 102 is a rack moving part of the radiation delivery device. The second carrier structure includes a second fixing component 201 and a second moving component 202. The second fixing component 201 is a collimator fixing part of the radiation delivery device. The third carrier structure 300 includes a third fixing component and a third moving component (not shown in the figure). The first fixing component 101 is installed on the ground, the second fixing component 201 is installed on the first moving component 102, and the third fixing component is installed on the second moving component 202. The third carrier structure 300 is a box for accommodating multi-leaf collimator blades, and the box can move along a fixed track. The fixed track of the box is arranged on the second moving component 202 of the second carrier mechanism. The power source of each carrier structure is a motor. The transmission mechanism of the first carrier structure and the second carrier structure can be a gear, and the transmission mechanism of the third carrier structure 300 is a lead screw and a nut. The moving components of each carrier structure are driven by a motor to rotate, and a position sensor is arranged on the rotating shaft to obtain the position information of each carrier structure. The moving components on each carrier structure have degrees of freedom of movement in different directions.

[0052] The structure of the third carrier structure 300 is as Figure 2 and Figure 3 shown. The third carrier structure 100 includes a blade lead screw 103, a blade motor 104, an acceleration sensor 105, multi-leaf collimator blades 106, a position sensor 107, a box motor 108, a box lead screw 109, and a box 110. Among them, the blade lead screw 102 is a blade guiding structure of the radiation delivery device. The blade motor 104 is arranged on the box 110 and drives the multi-leaf collimator blades 106 to move through the blade lead screw 103 and the nut. The acceleration sensor 105 is arranged on the multi-leaf collimator blades 106 to obtain the acceleration of the multi-leaf collimator blades 106 in real time. The box motor 108 is arranged on the box 110 and drives the box 110 to move along the fixed track through the box lead screw 109. The position sensor 107 is arranged on the surface of the box 110 to obtain the position information of the box 110.

[0053] The existing radiation delivery device has the problem of inaccurate backlash compensation. In response to this, the present application provides a backlash compensation method.

[0054] The following uses specific embodiments to describe in detail the technical solution of the present application and how the technical solution of the present application solves the technical problem.

[0055] The backlash compensation method provided by the present application can be applied to a computer device, and the computer device can be, but is not limited to, an industrial computer, a laptop computer, a tablet computer, etc.

[0056] In one embodiment, as Figure 4 shown, a backlash compensation method is provided. In this embodiment, this method is exemplified by being applied to a computer device, and the computer device can be, but is not limited to, an industrial computer, a laptop computer, a tablet computer, etc. In this embodiment, the method includes the following steps:

[0057] Step 400: Control the motion device to work according to the initial backlash compensation information.

[0058] In an alternative embodiment, the initial backlash compensation information includes the compensation amount for compensating the backlash of the motion device pre-acquired in the static state of the motion device. The initial backlash compensation information can be pre-stored in the memory of the computer device, and when the computer device needs to compensate the backlash of the motion device, it can directly obtain it from the memory. The motion device can be a radiation delivery device. This embodiment does not limit the specific method for obtaining the initial backlash compensation information, as long as its function can be achieved.

[0059] In another alternative embodiment, the method for obtaining the initial backlash compensation information includes: measuring the backlash of the motion device and determining the initial backlash compensation information according to the measurement result.

[0060] After the computer device obtains the initial backlash compensation, it compensates the backlash in the motion device according to the initial backlash compensation information to correct the control amount of the motion device; and controls the motion device to work according to the corrected control amount. This embodiment does not limit the specific process of controlling the motion device to work according to the initial backlash compensation information, as long as its function can be achieved.

[0061] In an alternative embodiment, the computer device can correct the control amount of the motor of the motion device according to the initial backlash compensation information, so that the motor controls the motion device to work according to the corrected control amount.

[0062] In another alternative embodiment, the computer device pre-stores the planned path of the motion device, and the computer device can correct the planned path according to the initial backlash compensation information, so that the motor controls the motion device to work according to the corrected planned path.

[0063] Step 410: During the operation of the motion device, determine the equivalent motion information and the measured motion information of the first structure of the motion device.

[0064] The motion device may include multiple motion structures. The first structure in the motion device may refer to the structure at the end of the motion device, or at least one of the multiple motion structures included in the motion device. As an example, the equivalent motion information may include the motion information of the motion device obtained by calculation during the operation of the motion device. As an example, the measured motion information may include the motion information actually measured during the operation of the motion device. For example, the measured motion information may be actually measured by a sensor or an external detection device provided in the motion device. The equivalent motion information may include one or more of an equivalent velocity quantity, an equivalent acceleration, an equivalent position, etc., and the measured motion information may include one or more of a measured velocity quantity, a measured acceleration, a measured position, etc.

[0065] The computer device controls the motion device to start working according to the initial backlash compensation information. During the operation of the motion device, the equivalent motion information and the measured motion information of the first structure of the motion device are determined. The equivalent motion information and the measured motion information of the motion device may be determined at preset time intervals. That is to say, the determined equivalent motion information and measured motion information may be the information of the current time period.

[0066] Step 420: Determine the target backlash compensation information according to the equivalent motion information and the measured motion information; and use the target backlash compensation information as the new initial backlash compensation information, and return to execute the step of controlling the motion device to work according to the initial backlash compensation information.

[0067] After obtaining the equivalent motion information and the measured motion information of the motion device, the computer device determines the target backlash compensation information by comparing and analyzing the equivalent motion information and the measured motion information. If the computer device determines, by comparing the equivalent motion information and the measured motion information, that the difference between the measured motion information and the equivalent motion information exceeds the preset range, it means that there is backlash that needs to be compensated in the motion device, and the target backlash compensation information can be determined according to this difference. If the computer device determines, by comparing the equivalent motion information and the measured motion information, that the difference between the measured motion information and the equivalent motion information does not exceed the preset range, it may be determined that the target backlash compensation information is empty or zero.

[0068] After obtaining the target backlash compensation information, the computer device uses the target backlash compensation information as the new initial backlash compensation information and returns to execute step 400. That is to say, during the operation of the motion device, it is allowed to determine the target backlash compensation information in real time according to the motion information (equivalent motion information and measured motion information) of the motion device, so as to correct the control amount of the motion device in real time. That is, the target backlash information is dynamic compensation information, and the backlash of the motion device is compensated in real time during the motion of the motion device.

[0069] The backlash compensation method provided by the embodiment of the present application controls the operation of the motion device according to the initial backlash compensation information; during the operation of the motion device, the equivalent motion information and the measured motion information of the first structure of the motion device are determined; according to the equivalent motion information and the measured motion information, the target backlash compensation information is determined; and the target backlash compensation information is used as the new initial backlash compensation information, and the step of controlling the operation of the motion device according to the initial backlash compensation information is returned for execution. In this embodiment, before the motion device operates, the initial backlash compensation information (also referred to as static backlash compensation information) is obtained to compensate for the backlash existing in the motion device; during the operation of the motion device, the target backlash compensation information, that is, the dynamic backlash compensation information, is determined according to the determined equivalent motion information and the measured motion information to compensate for the backlash existing in the motion device during the motion process. Both the static backlash existing in the motion device and the dynamic backlash existing in the motion device are considered, so that the backlash compensation of the motion device is more accurate, and the accuracy and stability of the motion of the motion device can be improved.

[0070] In one embodiment, as Figure 5 shown, it relates to an implementation manner of determining the target backlash compensation information according to the equivalent motion information and the measured motion information. The steps of this implementation manner include:

[0071] Step 500: Determine the predicted motion information of the first structure according to the equivalent motion information and the measured motion information.

[0072] After the computer device obtains the equivalent motion information and the measured motion information of the motion device, it predicts the motion information of the first structure of the motion device according to the equivalent motion information and the measured motion information to obtain the predicted motion information. That is to say, the computer device obtains the equivalent motion information and the measured motion information of the motion device in the current time period, and predicts the motion information of the motion device in the next time period or other future time periods according to the equivalent motion information and the measured motion information in the current time period, that is, the predicted motion information.

[0073] In an optional embodiment, a pre-trained prediction model is stored in the computer device. The computer device inputs the obtained equivalent motion information and the measured motion information into the prediction model, and performs prediction through the prediction model to output the predicted motion information of the motion device in the next time period or other future time periods.

[0074] Step 510: Determine the target backlash compensation information according to the predicted motion information.

[0075] After the computer device obtains the predicted motion information of the first structure of the motion device, it determines the target backlash compensation information according to the predicted motion information.

[0076] In an alternative embodiment, the computer device may directly calculate the target backlash compensation information based on the predicted motion information; or it may adjust the initial compensation information according to the predicted motion information to obtain the target backlash compensation information.

[0077] In an alternative embodiment, a backlash compensation model is stored in the computer device. The computer device inputs the obtained predicted motion information into the backlash compensation model to obtain the target backlash compensation information.

[0078] In this embodiment, the target backlash compensation information is determined by the predicted motion information of the first structure determined according to the equivalent motion information and the measured motion information. By determining the target backlash compensation information based on the predicted motion information, the motion device can be compensated according to the determined target backlash compensation information before the motion device performs the motion in the next time period, thereby improving the accuracy and smoothness of the motion of the motion device.

[0079] In one embodiment, the equivalent motion information is equivalent acceleration. As Figure 6 shown, it relates to an implementation manner of determining the equivalent motion information of the first structure of the motion device, that is, determining the equivalent acceleration of the first structure of the motion device. The steps of this implementation manner include:

[0080] Step 600: Obtain the physical quantity of the motion device; the physical quantity includes the first position information or the velocity quantity.

[0081] The physical quantity of the motion device may refer to the first position information of the motion device in the current time period, or may refer to the velocity quantity of the motion device in the current time period. The computer device obtains the physical quantity of the motion device in the current time period.

[0082] In an alternative embodiment, if the physical quantity is the first position information, the computer device obtains the first position information of the motion device in the current time period through a position sensor disposed on the motion device. If the physical quantity is the velocity quantity, the computer device obtains the velocity quantity of the motion device in the current time period through a velocity sensor disposed on the motion device, or may also calculate the velocity quantity of the motion device according to the first position information after obtaining the first position information through the position sensor.

[0083] Step 610: Determine the equivalent acceleration of the motion device according to the physical quantity.

[0084] After the computer device obtains the physical quantity of the motion device, it determines the equivalent acceleration according to the physical quantity. Different physical quantities result in different methods for determining the equivalent acceleration.

[0085] In this embodiment, the equivalent acceleration of the motion device is determined by obtaining the physical quantity of the motion device. In this way, the method for determining the equivalent acceleration is fast and easy to implement. Moreover, the physical quantity may include the first position information or the velocity quantity. In this way, the user can select the required physical quantity according to the actual application scenario to determine the equivalent acceleration, which can improve the practicability of the backlash compensation method.

[0086] In one embodiment, the measured motion information is the measured acceleration. As Figure 7 shown, there are two methods for determining the measured motion information of the motion device, that is, determining the measured acceleration of the motion device. One method is:

[0087] Step 700: Obtain the measured acceleration of the motion device according to the acceleration sensor arranged on the motion device.

[0088] The computer device obtains the measured acceleration of the motion device through the acceleration sensor arranged on the motion device. That is to say, an acceleration sensor is arranged on the first structure of the motion device. The acceleration sensor can collect the measured acceleration of the first structure in real time and transmit the collected measured acceleration to the computer device.

[0089] Another method is:

[0090] Step 710: Determine the measured acceleration of the motion device according to the measured motion state of the motion device and the acceleration table; the acceleration table includes the corresponding relationship between the motion state and the acceleration.

[0091] The acceleration table is pre-stored in the computer device. The acceleration table includes different motion states, accelerations, and the corresponding relationship between the motion state and the acceleration. The motion states include acceleration, deceleration, stop, and uniform motion.

[0092] The computer device obtains the measured motion state of the first structure of the motion device in the current time period, searches in the acceleration table according to the measured motion state, and determines the acceleration corresponding to the motion state with the highest similarity to the measured motion state as the measured acceleration of the first structure.

[0093] In this embodiment, two methods for obtaining the measured acceleration of the motion device are provided. The user can select according to the actual application scenario, which can improve the practicability of the backlash compensation method.

[0094] In one embodiment, the motion device includes a first structure and one or more second structures associated with the first structure. Here, the second structure is associated with the first structure means that their motion states will affect each other at least in some cases. For example, the first structure is directly or indirectly connected or coupled to the second structure.

[0095] As an example, the first structure can be the load structure of the motion device, and one or more second structures can be the bearing structures of the motion device. The descriptions of the load structure and the bearing structure can refer to the specific descriptions of the load structure and the bearing structure in the radiation delivery device in the above embodiments. As a non-limiting example, if the motion device is a radiation delivery device, the load structure refers to the multi-leaf collimator blades in the radiation delivery device.

[0096] One or more second structures can be directly connected or indirectly connected to the first structure. That is to say, if the motion device includes two second structures, it can be that both second structures are directly connected to the first structure, or the two second structures are connected in series to the first structure, that is, one second structure is directly connected to the first structure, and the other second structure is indirectly connected to the first structure.

[0097] In this embodiment, the motion device includes a first structure and one or more second structures directly or indirectly connected to the first structure. That is to say, as long as the motion device includes a first structure and a second structure, the backlash compensation method provided in this embodiment can be used for backlash compensation, which can improve the applicability of the backlash compensation method.

[0098] In the case where the motion device includes a load structure and one or more bearing structures, there is an implementation manner of determining the equivalent acceleration of the motion device according to a physical quantity. This implementation manner includes:

[0099] Determine the equivalent acceleration of the load structure according to the physical quantities of the bearing structures in the motion device.

[0100] If the bearing structures in the motion device are connected in series, the computer device obtains the physical quantities of the bearing structures in the motion device, and determines the equivalent acceleration of the load structure by superimposing the physical quantities of the bearing structures.

[0101] In one embodiment, in the case where the physical quantity is the first position information, there is an implementation manner of determining the equivalent acceleration of the load structure according to the physical quantities of the bearing structures in the motion device. As Figure 8 shown, the steps of this implementation manner include:

[0102] Step 800: Determine the equivalent position of the load structure according to the first position information of the bearing structures in the motion device.

[0103] The computer device can obtain the first position information of each load-bearing structure according to the position sensors set on each load-bearing structure, and perform coordinate transformation and vector superposition processing on the obtained first position information of each load-bearing structure to obtain the equivalent position of the load structure. That is to say, each load-bearing structure and the load structure have corresponding coordinate systems, and the first position information of each load-bearing structure is the position information in its coordinate system. The computer device can convert the first position information of each load-bearing structure to the coordinate system of the load structure according to the conversion relationship between the coordinate systems of each load-bearing structure and the load structure; by performing vector superposition on the first position information of each load-bearing structure in the coordinate system of the load structure and the position information of the load structure, the equivalent position of the load structure can be obtained.

[0104] Step 810: Determine the equivalent acceleration of the load structure according to the equivalent position of the load structure.

[0105] After the computer device obtains the equivalent position of the load structure, for example, it can calculate the equivalent acceleration of the load structure according to the duration of the current time period and this equivalent position.

[0106] In this embodiment, first, the equivalent position of the load structure is determined by the first position information of each load-bearing structure in the motion device; then, the equivalent acceleration of the load structure is determined by the equivalent position of the load structure. This method of determining the equivalent acceleration of the load structure is fast and easy to implement, can improve the efficiency of determining the equivalent acceleration, and thus can improve the efficiency of the backlash compensation method.

[0107] In one embodiment, when the physical quantity is a velocity quantity, an implementation manner for determining the equivalent acceleration of the load structure according to the physical quantities of each load-bearing structure in the motion device is involved. This implementation manner includes:

[0108] Determine the equivalent acceleration of the load structure according to the velocity quantities of each load-bearing structure in the motion device.

[0109] After the computer device obtains the velocity quantities of each load-bearing structure through the velocity sensors on each load-bearing structure in the motion device, it can calculate the velocity quantity of the load structure along the motion direction according to the velocity quantities, and can obtain the equivalent acceleration of the load structure according to this velocity quantity and the duration of the current time period.

[0110] Assume that the motion device includes a first load-bearing structure and a second load-bearing structure. The velocity quantities of each load-bearing structure in the motion device refer to the velocity quantity of the first load-bearing structure relative to the second load-bearing structure and the velocity quantity of the second load-bearing structure.

[0111] In this embodiment, the equivalent acceleration of the load structure is determined according to the velocity quantities of the respective load-bearing structures in the motion device. The method of determining the equivalent acceleration of the load structure in this way is fast and easy to implement, which can improve the efficiency of determining the equivalent acceleration, and thus can improve the efficiency of the backlash compensation method.

[0112] In one embodiment, there is provided an implementation manner for determining the predicted motion information of a first structure according to equivalent motion information and measured motion information, including:

[0113] Predict the relative position information of each second structure and the predicted acceleration of the first structure according to the equivalent acceleration and the measured acceleration.

[0114] After the computer device determines the equivalent acceleration and the measured acceleration of the first structure, it predicts the motion information of each second structure according to the equivalent acceleration and the measured acceleration, and obtains the relative position information of each second structure in the next time period and the predicted acceleration of the first structure in the next time period. The relative position information of each second structure refers to the position difference between the positions of each second structure in the next time period and the positions of each second structure in the current time period.

[0115] In an alternative embodiment, a pre-trained prediction model is stored in the computer device. The computer device inputs the obtained equivalent acceleration and measured acceleration into the prediction model, and performs prediction through the prediction model to output the relative position information of each second structure in the next time period and the predicted acceleration of the first structure in the next time period.

[0116] After the computer device obtains the relative position information and the predicted acceleration, it determines the target backlash compensation information according to the relative position information, the preset acceleration, and the position information of the motion device in the current time period. That is to say, the computer device can determine the position information of each second structure in the next time period according to the relative position information and the first position information, and determine the compensation amount according to the position information of each second structure in the next time period and the predicted acceleration, so as to send a control amount to the motors of each second structure, so that the motors drive each second structure to reach the target position.

[0117] In this embodiment, the relative position information of each second structure and the predicted acceleration of the first structure are predicted according to the equivalent acceleration and the measured acceleration. Determining the target backlash compensation information according to the predicted relative position information and predicted acceleration in this way can improve the accuracy of determining the target backlash compensation information.

[0118] In the case where the motion device includes a first structure and one or more second structures, and the equivalent motion information includes equivalent acceleration and the measured motion information includes measured acceleration, there is provided an implementation manner for determining the target backlash compensation information according to the equivalent motion information and the measured motion information. This implementation manner includes:

[0119] Determine the target backlash compensation information according to the equivalent acceleration and the measured acceleration.

[0120] The computer device conducts a comparative analysis on the equivalent acceleration and the measured acceleration. If it is determined that the measured acceleration is less than the equivalent acceleration and the directions of the measured acceleration and the equivalent acceleration are the same, it indicates that the first structure of the motion device (such as multi-leaf collimator blades, the end effector of a robotic arm, etc.) may be disengaged from the transmission mechanism at the next moment, and then the target backlash compensation information, that is, the backlash compensation amount, is determined. If the computer device determines that the equivalent acceleration is equal to the measured acceleration, indicating that there is no disengagement of the first structure of the motion device, the determined target backlash compensation information, that is, the backlash compensation amount, can be empty or zero.

[0121] In one embodiment, as Figure 9 shown, it relates to an implementation method of controlling the operation of a motion device according to initial backlash compensation information. The steps of this implementation method include:

[0122] Step 900: Update the preset motion trajectory according to the initial backlash compensation information to obtain the updated motion trajectory.

[0123] The preset motion trajectory is the planning result of the trajectory that the user pre-plans for the motion device to move when completing a task. The preset motion trajectory can be pre-stored in the memory of the computer device, or can be obtained by the computer device through trajectory planning after the user inputs the task of the motion device. This embodiment does not limit the method for obtaining the predicted motion trajectory, as long as its function can be achieved. The preset motion trajectory is the trajectory points in each time period without compensating for the backlash of the motion device.

[0124] After the computer device obtains the initial backlash compensation information and the preset motion trajectory, it updates the preset motion trajectory according to the initial backlash compensation information (for example, by considering the influence of backlash on the trajectory) to obtain the updated motion trajectory.

[0125] In an alternative embodiment, the initial backlash compensation information may include a position difference (such as backlash or other types of position deviations), and the computer device corrects each trajectory point in the preset motion trajectory according to the position difference to obtain the updated motion trajectory.

[0126] Step 910: Control the operation of the motion device based on the updated motion trajectory.

[0127] After the computer device obtains the updated motion trajectory, it can send control quantities to each motion control device (such as a motor) in the motion device according to the updated motion trajectory, so as to control the motion device to move according to the updated motion trajectory.

[0128] In this embodiment, the preset motion trajectory is updated based on the initial backlash compensation information, and the motion device is controlled to work based on the updated motion trajectory. In this way, the method for determining the control amount of the motors of the respective second structures in the motion device according to the updated motion trajectory to control the operation of the motion device is fast and easy to implement, and can improve the practicability of the backlash compensation method. Moreover, using the initial backlash compensation information to update the preset motion trajectory can compensate for the backlash existing in the static state of the motion device, thereby improving the accuracy of the backlash compensation for the motion device.

[0129] In one embodiment, as Figure 10 shown, before controlling the motion device to work according to the initial backlash compensation information, the backlash compensation method further includes an implementation method for obtaining the initial backlash compensation information, and the steps of this implementation method include:

[0130] Step 101: Obtain the preset position information of the motion device.

[0131] The preset position information refers to the preset position information of the second structural load structure of the motion device when the motion device executes a task before compensating for the backlash existing in the motion device. The preset position information can be pre-stored in the memory of the computer device, and the computer device directly obtains it from the memory when needed.

[0132] Step 102: According to the preset position information, plan the motion trajectory of the motion device to obtain a preset motion trajectory.

[0133] After the computer device obtains the preset position information, it plans the motion trajectory of the motion device. For example, it can predict the trajectory points passed by the motion device during the process of moving to the preset position to obtain the preset motion trajectory.

[0134] In an alternative embodiment, a pre-trained planning model is stored in the computer device. After the computer device obtains the preset position information, it inputs the preset position information into the planning model, and performs planning through the planning model to output the preset motion trajectory.

[0135] Step 103: Determine the initial backlash compensation information according to the preset motion trajectory and the position information of the motion device in the current time period.

[0136] After the computer device obtains the preset motion trajectory, it acquires the position information of the motion device in the current time period. Based on the position information of the motion device in the current time period and the preset motion trajectory, it can determine whether the position of the motion device in the current time period is the same as the position of the preset trajectory point in the preset motion trajectory in the current time period. If they are not the same, indicating that there is an error, then based on the position information of the motion device in the current time period and the position of the preset trajectory point, the position difference, that is, the initial backlash compensation information, can be determined. The length of the position difference included in the initial backlash compensation information does not exceed the length of the backlash during reverse motion of the motion device.

[0137] In this embodiment, based on the preset position information, the preset motion trajectory of the motion device is obtained. Based on the preset motion trajectory and the position information of the motion device in the current time period, the initial backlash compensation information can be determined. This method of determining the initial backlash compensation information is relatively fast, and by comparing the preset motion trajectory and the position information of the motion device in the current time period, more accurate initial backlash compensation information can be obtained.

[0138] In one embodiment, please refer to Figure 11 , this application provides a backlash compensation method, and the steps of this method include:

[0139] Step 110: Acquire the preset position information of the motion device;

[0140] Step 111: According to the preset position information, plan the motion trajectory of the motion device to obtain the preset motion trajectory;

[0141] Step 112: Determine the initial backlash compensation information based on the preset trajectory and the position information of the motion device in the current time period;

[0142] Step 113: Update the preset motion trajectory according to the initial backlash compensation information to obtain the updated motion trajectory, and control the motion device to work based on the updated motion trajectory; The motion device includes multiple load-bearing structures and load structures;

[0143] Step 114: During the operation of the motion device, acquire the first position information of each load-bearing structure, and determine the equivalent acceleration of the load structure according to the first position information;

[0144] Step 115: Acquire the measured acceleration of the load structure according to the acceleration sensor arranged on the load structure;

[0145] Step 116: Input the equivalent acceleration and the measured acceleration into the prediction model to obtain the relative position information of each load-bearing structure in the next time period, and the predicted acceleration of the load structure in the next time period;

[0146] Step 117: Determine the target backlash compensation information based on the relative position information and the predicted acceleration; and use the target backlash compensation information as the new initial backlash compensation information, then return to execute Step 113 - Step 117.

[0147] In one embodiment, as Figure 12 shown, when the motion device includes a first structure and one or more second structures, the present application provides a backlash compensation method, and the steps of the backlash compensation method include:

[0148] Step 121: Determine the first motion information of the first structure and the second motion information of one or more second structures associated with the first structure.

[0149] The first motion information refers to the motion information of the first structure actually measured during the motion of the motion device. The second motion information refers to the motion information of the second structure actually measured during the motion of the motion device. The first motion information may include at least one of position information, velocity, and acceleration. The second motion information may also include at least one of position information, velocity, and acceleration.

[0150] During the motion of the motion device, the computer device determines the first motion information of the first structure and the second motion information of each second structure.

[0151] In an alternative embodiment, corresponding sensors are provided on the first structure and each second structure. For example, position sensors, velocity sensors, acceleration sensors, etc., and the first motion information of the first structure and the second motion information of the second structure are obtained through the sensors provided on the first structure and each second structure.

[0152] Step 122: Determine the equivalent motion information of the first structure based on the first motion information and the second motion information.

[0153] After the computer device determines the first motion information of the first structure and the second motion information of each second structure, it determines the equivalent motion information of the first structure according to the first motion information and the second motion information. The description of the equivalent motion information of the first structure can refer to the specific description in the above embodiment and will not be elaborated here.

[0154] If the equivalent motion information is equivalent acceleration, and both the first motion information and the second motion information are physical quantities (position information or velocity), the description of determining the equivalent motion information of the first structure based on the first motion information and the second motion information can refer to the specific description in the above Figure 6 shown embodiment and will not be elaborated here.

[0155] Step 123: Determine the target backlash compensation information based on the equivalent motion information.

[0156] After the computer device determines the equivalent motion information, it determines the target backlash compensation information for compensating the backlash of the first structure according to the equivalent motion information.

[0157] In an alternative embodiment, the computer device may obtain the measured motion information of the first structure, and determine the target backlash compensation information according to the equivalent motion information and the measured motion information.

[0158] In another alternative embodiment, historical motion information is pre-stored in the memory of the computer device, and the computer device may determine the target backlash compensation information according to the historical motion information and the equivalent motion information.

[0159] In this embodiment, by determining the first motion information of the first structure and the second motion information of one or more second structures associated with the first structure; based on the first motion information and the second motion information, determining the equivalent motion information of the first structure; and based on the equivalent motion information, determining the target backlash compensation information. In this embodiment, the target backlash compensation information, that is, the dynamic backlash compensation information, is determined by obtaining the first motion information and the second motion information during the motion of the first structure and each second structure. In this way, it is possible to compensate for the backlash existing in the first structure and each second structure during the motion process, improve the accuracy of backlash compensation, and thus improve the precision and smoothness of the motion of the first structure and each second structure.

[0160] It should be understood that although the steps in the flowcharts involved in the above-described embodiments are shown in sequence according to the arrows, these steps are not necessarily executed in the order indicated by the arrows. Unless there is a clear description in this article, the execution of these steps has no strict order limit, and these steps can be executed in other orders. Moreover, at least a part of the steps in the flowcharts involved in the above-described embodiments may include multiple steps or multiple stages. These steps or stages are not necessarily executed at the same time, but can be executed at different times. The execution order of these steps or stages is not necessarily sequential, but can be executed alternately or alternately with at least a part of other steps or steps or stages in other steps.

[0161] Based on the same inventive concept, an embodiment of the present application further provides a backlash compensation device for implementing the above-mentioned backlash compensation method. The solution provided by this device for solving the problem is similar to the solution described in the above method. Therefore, the specific limitations in one or more embodiments of the following backlash compensation device can refer to the limitations on the backlash compensation method in the above text, and will not be repeated here.

[0162] In one embodiment, as Figure 13As shown, a backlash compensation device 10 is provided, including: a control module 11, a determination module 12, and an execution module 13, where:

[0163] The control module 11 is configured to control the operation of the motion device according to the initial backlash compensation information.

[0164] The determination module 12 is configured to determine the equivalent motion information and the measured motion information of the first structure of the motion device during the operation of the motion device.

[0165] The execution module 13 is configured to determine the target backlash compensation information according to the equivalent acceleration and the measured acceleration; and use the target backlash compensation information as the new initial backlash compensation information, and return to execute the step of controlling the operation of the motion device according to the initial backlash compensation information.

[0166] In one embodiment, the execution module 13 includes a first determination unit and a second determination unit. The first determination unit is configured to determine the predicted motion information of the first structure according to the equivalent motion information and the measured motion information; the second determination unit is configured to determine the target backlash compensation information according to the predicted motion information.

[0167] In one embodiment, the first determination unit is specifically configured to predict the relative position information of each second structure and the predicted acceleration of the first structure according to the equivalent acceleration and the measured acceleration.

[0168] In one embodiment, the determination module 12 is specifically configured to determine the equivalent position of the first structure according to the position information of one or more second structures; and determine the equivalent motion information of the second structure according to the equivalent position of the first structure.

[0169] In one embodiment, the first structure includes a load structure, and one or more second structures include a bearing structure directly or indirectly connected to the first structure.

[0170] In one embodiment, the first structure is a multi-leaf collimator blade of a radiation delivery device, and the one or more second structures are one or more of a frame fixing member, a frame moving member, a collimator fixing member, a box body, a lead screw, and a blade guiding structure of the radiation delivery device.

[0171] In one embodiment, the control module 11 is specifically configured to update a preset motion trajectory according to the initial backlash compensation information to obtain an updated motion trajectory; and control the operation of the motion device based on the updated motion trajectory.

[0172] In one embodiment, the backlash compensation device 10 further includes an acquisition module. The acquisition module is used to acquire the preset position information of the motion device; according to the preset position information, plan the motion trajectory of the motion device to obtain a preset motion trajectory; and determine initial backlash compensation information according to the preset motion trajectory and the position information of the motion device in the current time period.

[0173] In one embodiment, the determination module 12 is further used to acquire the measured acceleration of the motion device according to an acceleration sensor arranged on the motion device; or; determine the measured acceleration of the motion device according to the measured motion state of the motion device and an accelerometer; the accelerometer includes the corresponding relationship between the motion state and the acceleration.

[0174] Each module in the above backlash compensation device can be implemented in whole or in part by software, hardware, and their combination. The above modules can be embedded in the processor of the computer device in hardware form or be independent of it, or can be stored in the memory of the computer device in software form, so that the processor can call and execute the operations corresponding to the above respective modules.

[0175] In one embodiment, a computer device is provided, and its internal structure diagram can be as Figure 14 shown. The computer device includes a processor, a memory, a communication interface, a display screen, and an input device connected through a system bus. Among them, the processor of the computer device is used to provide computing and control capabilities. The memory of the computer device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system and a computer program. The internal memory provides an environment for the operation of the operating system and the computer program in the non-volatile storage medium. The communication interface of the computer device is used to communicate with an external terminal in a wired or wireless manner, and the wireless manner can be implemented through WIFI, a mobile cellular network, NFC (Near Field Communication), or other technologies. When the computer program is executed by the processor, it implements a backlash compensation method. The display screen of the computer device can be a liquid crystal display screen or an electronic ink display screen, and the input device of the computer device can be a touch layer covering the display screen, or a button, a trackball, or a touchpad arranged on the housing of the computer device, or an external keyboard, a touchpad, or a mouse, etc.

[0176] Those skilled in the art can understand that Figure 14 the structure shown in

[0177] In one embodiment, a computer device is provided, including a memory and a processor. A computer program is stored in the memory. When the processor executes the computer program, the following steps are implemented:

[0178] Control the operation of the motion device according to the initial backlash compensation information;

[0179] During the operation of the motion device, determine the equivalent motion information and the measured motion information of the first structure of the motion device;

[0180] According to the equivalent motion information and the measured motion information, determine the target backlash compensation information; and use the target backlash compensation information as the new initial backlash compensation information, and return to execute the step of controlling the operation of the motion device according to the initial backlash compensation information.

[0181] In one embodiment, a computer-readable storage medium is provided, on which a computer program is stored. When the computer program is executed by a processor, the following steps are implemented:

[0182] Control the operation of the motion device according to the initial backlash compensation information;

[0183] During the operation of the motion device, determine the equivalent motion information and the measured motion information of the first structure of the motion device;

[0184] According to the equivalent motion information and the measured motion information, determine the target backlash compensation information; and use the target backlash compensation information as the new initial backlash compensation information, and return to execute the step of controlling the operation of the motion device according to the initial backlash compensation information.

[0185] In one embodiment, a computer program product is provided, including a computer program. When the computer program is executed by a processor, the following steps are implemented:

[0186] Control the operation of the motion device according to the initial backlash compensation information;

[0187] During the operation of the motion device, determine the equivalent motion information and the measured motion information of the first structure of the motion device;

[0188] According to the equivalent motion information and the measured motion information, determine the target backlash compensation information; and use the target backlash compensation information as the new initial backlash compensation information, and return to execute the step of controlling the operation of the motion device according to the initial backlash compensation information.

[0189] Those of ordinary skill in the art can understand that all or part of the processes in the methods of the above embodiments can be completed by instructing relevant hardware through a computer program. The computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above methods. Among them, any reference to a memory, database, or other medium used in the embodiments provided in the present application can include at least one of non-volatile and volatile memories. Non-volatile memories can include read-only memory (ROM), magnetic tape, floppy disk, flash memory, optical memory, high-density embedded non-volatile memory, resistive random access memory (ReRAM), magnetoresistive random access memory (MRAM), ferroelectric random access memory (FRAM), phase change memory (PCM), graphene memory, etc. Volatile memories can include random access memory (RAM) or external cache memory, etc. By way of illustration and not limitation, RAM can be in various forms, such as static random access memory (SRAM) or dynamic random access memory (DRAM), etc. The databases involved in the embodiments provided in the present application can include at least one of relational databases and non-relational databases. Non-relational databases can include distributed databases based on blockchain, etc., without limitation. The processors involved in the embodiments provided in the present application can be general-purpose processors, central processing units, graphics processing units, digital signal processors, programmable logic devices, data processing logics based on quantum computing, etc., without limitation.

[0190] The technical features of the above embodiments can be combined arbitrarily. For the sake of concise description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope described in this specification.

[0191] The above-described embodiments merely represent several implementation manners of the present application. Their descriptions are relatively specific and detailed, but they should not be construed as limiting the patent scope of the present application. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present application, several modifications and improvements can still be made, and these all belong to the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the appended claims.

Claims

1. A backlash compensation method, characterized in that, Including: Controlling the operation of the motion device according to the initial backlash compensation information; During the operation of the motion device, determining the equivalent motion information and the measured motion information of the first structure of the motion device; Determining the target backlash compensation information according to the equivalent motion information and the measured motion information; And Taking the target backlash compensation information as the new initial backlash compensation information, and returning to execute the step of controlling the operation of the motion device according to the initial backlash compensation information.

2. The backlash compensation method according to claim 1, characterized in that Determining the target backlash compensation information according to the equivalent motion information and the measured motion information includes: Determining the predicted motion information of the first structure according to the equivalent motion information and the measured motion information; and Determining the target backlash compensation information according to the predicted motion information.

3. The backlash compensation method according to claim 2, wherein The motion device includes the first structure and one or more second structures associated with the first structure. The equivalent motion information includes equivalent acceleration, and the measured motion information includes measured acceleration. Determining the predicted motion information of the first structure according to the equivalent motion information and the measured motion information includes: Predicting the relative position information of each of the second structures and the predicted acceleration of the first structure according to the equivalent acceleration and the measured acceleration.

4. The backlash compensation method according to claim 1, characterized in that The motion device includes the first structure and one or more second structures associated with the first structure. Determining the equivalent motion information of the first structure of the motion device includes: Determining the equivalent position of the first structure according to the position information of the one or more second structures; and Determining the equivalent motion information of the second structure according to the equivalent position of the first structure.

5. The backlash compensation method according to claim 3 or 4, characterized in that The first structure includes a load structure, and the one or more second structures include a bearing structure directly or indirectly connected to the first structure.

6. The backlash compensation method according to claim 3 or 4, characterized in that The first structure is a multi-leaf collimator blade of a radiation delivery device, and the one or more second structures are one or more of a frame fixing member, a frame moving member, a collimator fixing member, a box body, a lead screw, and a blade guiding structure of the radiation delivery device.

7. The backlash compensation method according to any one of claims 1-4, characterized in that, Controlling the operation of the motion device according to the initial backlash compensation information includes: Updating a preset motion trajectory according to the initial backlash compensation information to obtain an updated motion trajectory; Controlling the operation of the motion device based on the updated motion trajectory.

8. The backlash compensation method according to claim 7, characterized in that, Before controlling the operation of the motion device according to the initial backlash compensation information, the method further includes: Obtaining the preset position information of the motion device; Planning the motion trajectory of the motion device according to the preset position information to obtain the preset motion trajectory; Determining the initial backlash compensation information according to the preset motion trajectory and the position information of the motion device in the current time period.

9. A backlash compensation device, characterized in that, The device includes: A control module for controlling the operation of the motion device according to the initial backlash compensation information; An acquisition module for determining the equivalent motion information and the measured motion information of the first structure of the motion device during the operation of the motion device; A determination module, configured to determine target backlash compensation information according to the equivalent motion information and the measured motion information; and return the target backlash compensation information as new initial backlash compensation information to execute the step of controlling the operation of the motion device according to the initial backlash compensation information.

10. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by a processor, it implements the steps of the method according to any one of claims 1 to 8.