Metal forming rolling apparatus, manufacturing method and application in high purity aluminum target

Abstract

The application belongs to the technical field of metal processing, and discloses a metal forming rolling equipment, a manufacturing method and application in high-purity aluminum target material. The metal forming rolling equipment comprises a support frame, a polishing assembly is connected to the support frame, a rolling assembly is connected to one side of the polishing assembly, a detection assembly is connected to one end of the rolling assembly, and a regulating part is further connected to the support frame. The regulating part can regulate the polishing assembly. The mutual cooperation between the polishing assembly and the rolling assembly ensures the stable movement of the metal plate on the rolling equipment, cleans the impurities on the surface of the metal plate, ensures the rolling efficiency of the metal plate when passing through the rolling assembly, reduces the damage of impurities to the rolling assembly, improves the rolling precision, and reduces the frequency of subsequent maintenance and replacement of the rolling assembly.

Description

Technical Field

[0001] This invention belongs to the field of metal processing technology, specifically metal forming and rolling equipment, manufacturing method, and its application in high-purity aluminum sputtering targets. Background Technology

[0002] Rolling is a pressure processing method that compresses metal billets with rollers, reducing the cross-section of the material and increasing its length. It is mainly used to produce profiles, plates, and pipes. In the existing pipe rolling process, the rotation of the rollers only stretches the metal plate to make its thickness meet the usage requirements.

[0003] Chinese patent application number CN202310077688.2 discloses a metal material rolling forming equipment, including two vertical plates, a roughing rolling mechanism, a cleaning mechanism, and a joining mechanism. The equipment first performs preliminary rolling on the metal sheet using a cooperating roller and a rolling roller, resulting in uniform thickness and a smooth surface, thus ensuring uniform overall dimensional changes in the metal sheet. Then, a flattening roller performs secondary rolling to further improve the flatness of the metal sheet and reduce dimensional deviations after roughing. A swing plate changes the distance between the flattening roller and the corresponding receiving roller to adapt to the flattening requirements of metal sheets of different thicknesses, improving the applicability of the device. However, this solution does not achieve the identification of the rolling state during the metal rolling process and cannot determine the influence of the rolling roller and impurities on the forming state of the metal sheet.

[0004] During the rolling process of metal sheets, the rolling pressure and impurities can easily lead to the rolling efficiency of the rolled sheet failing to meet the usage requirements. Furthermore, it is impossible to identify the usage of the rolling rolls, resulting in low rolling efficiency of the metal sheet during the rolling process.

[0005] Therefore, in order to solve the above-mentioned technical problems, the present invention proposes metal forming and rolling equipment, manufacturing method and its application in high-purity aluminum sputtering targets. Summary of the Invention

[0006] The purpose of this invention is to address the above-mentioned problems. This invention provides metal forming and rolling equipment, manufacturing method, and application in high-purity aluminum sputtering materials, which has the advantages of rapidly achieving rolling and ensuring accurate forming.

[0007] To achieve the above objectives, the present invention provides the following technical solution: a metal forming and rolling equipment, including a support frame, a grinding component connected to the support frame, a rolling component connected to one side of the grinding component, a detection component connected to one end of the rolling component, and an adjustment unit connected to the support frame, the adjustment unit being able to adjust the grinding component;

[0008] The polishing assembly includes a sanding roller, and a polishing roller is connected to one side of the sanding roller;

[0009] The rolling assembly includes a working box with a rolling chamber running through it. Two rolling rolls are rotatably mounted inside the rolling chamber. Each rolling roll includes a connecting rod, and multiple telescopic rods are connected to the outer circumference of the connecting rod. A movable plate is connected to the end of each telescopic rod away from the connecting rod.

[0010] Preferably, the rolling chamber has a movable groove on its wall, and two abutment rods are slidably disposed in the movable groove, with the abutment rods having the same axial direction as the rolling roll.

[0011] Preferably, the detection component includes a detection box connected to the working box. The detection box has a through groove and a connecting cavity inside. The connecting cavity communicates with the through groove. Two identification parts are connected inside the connecting cavity and are symmetrically distributed with the through groove as the center of symmetry.

[0012] Preferably, both of the identification parts include a crossbar, and a plurality of movable rods are connected to one end of the crossbar that is opposite to the other. A connecting frame is connected to the end of the movable rod that is away from the crossbar, and an abutment wheel is rotatably provided on the connecting frame.

[0013] Preferably, two buffer grooves are symmetrically formed on the connecting frame, and an elastic rod is connected to each of the two buffer grooves. The two ends of the abutment wheel distributed along the axial direction are respectively connected to the elastic rod.

[0014] Preferably, the two ends of the through groove distributed along the length direction are respectively provided with grinding parts.

[0015] Preferably, a power assembly is connected to the support frame, and the power assembly is connected to both the grinding assembly and the rolling assembly.

[0016] Preferably, a baffle is connected to the side of the detection component away from the rolling component, and one end of the baffle is connected to the support frame.

[0017] A manufacturing method utilizing metal forming and rolling equipment includes the following steps:

[0018] S1. Based on the thickness and model of the metal sheet, the grinding assembly is controlled by the control unit, and then the metal sheet to be rolled is connected to the grinding assembly.

[0019] S2. The power component controls the operation of the grinding component and the rolling component, which drives the metal sheet to move and grinds the surface of the metal sheet as it passes through the grinding component.

[0020] S3. After the metal sheet enters the rolling chamber, the landing point of the metal sheet is adjusted by moving the abutment rod to make the starting end face of the metal sheet located between the rolling rolls.

[0021] S4. Roll the polished metal sheet using rolling rolls, and push the rolled metal sheet through the rolling chamber into the through groove. Use the detection components to detect the end face of the metal sheet.

[0022] S5. The state of the rolled metal sheet and the rolling roll is judged by the state of the contact wheel and the elastic rod.

[0023] An application of metal forming and rolling equipment in high-purity aluminum sputtering materials.

[0024] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0025] 1. By coordinating the grinding and rolling components, the metal sheet is moved stably on the rolling equipment while impurities on the surface of the metal sheet are cleaned. This ensures the rolling efficiency of the metal sheet as it passes through the rolling components, reduces damage to the rolling components caused by impurities, improves rolling accuracy, and reduces the number of times the rolling components need to be repaired or replaced.

[0026] 2. By coordinating the rolling and detection components, the rolled metal sheet is identified. The state of the metal sheet is judged by the dynamic changes of the contact wheel and the elastic rod. At the same time, the surface condition of the rolling roll is judged based on the contact between the contact wheel and the metal sheet, ensuring that the metal sheet meets the rolling requirements and avoiding rolling failure caused by damage to the rolling roll surface, thereby further improving rolling efficiency.

[0027] 3. Based on the elastic changes of the elastic rod and the interaction of the rolling rolls, the state of the metal sheet is identified, and it is determined whether there are impurities on the surface of the metal sheet that affect the rolling efficiency. This allows for the adjustment of the rolling and grinding components to ensure that the subsequent metal sheet can be rolled successfully. Attached Figure Description

[0028] Figure 1 This is a three-dimensional structural diagram of the overall device of the present invention;

[0029] Figure 2 This is a schematic diagram of the connection structure of the rolling assembly of the present invention;

[0030] Figure 3 This is a three-dimensional structural schematic diagram of the rolling assembly of the present invention;

[0031] Figure 4 This is a schematic cross-sectional view of the rolling assembly of the present invention;

[0032] Figure 5 This is a three-dimensional structural diagram of the rolling roll of the present invention;

[0033] Figure 6 This is a three-dimensional structural diagram of the detection component of the present invention;

[0034] Figure 7 This is a cross-sectional structural diagram of the detection component of the present invention;

[0035] Figure 8 This is a three-dimensional structural diagram of the abutment wheel of the present invention;

[0036] Figure 9 This is a schematic diagram of the connection structure of the elastic rod of the present invention.

[0037] Figure Descriptions: 1. Support frame; 2. Control unit; 3. Grinding assembly; 301. Grinding roller; 302. Grinding roller; 4. Baffle; 5. Rolling assembly; 501. Working box; 5011. Rolling chamber; 5012. Movable groove; 502. Rolling roller; 5021. Connecting rod; 5022. Telescopic rod; 5023. Movable plate; 6. Power assembly; 7. Abutment rod; 8. Detection assembly; 801. Detection box; 8011. Through groove; 8012. Connecting chamber; 802. Grinding unit; 803. Identification unit; 8031. Connecting frame; 8032. Movable rod; 8033. Crossbar; 8034. Abutment wheel; 8035. Buffer groove; 8036. Elastic rod. Detailed Implementation

[0038] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0039] Example 1

[0040] like Figure 1 - Figure 9As shown in the figure, this embodiment discloses a metal forming rolling equipment, including a support frame 1 for fixing components. In order to improve the support stability of the support frame 1, in this invention, the cross-sectional shape of the support frame 1 is in the shape of the Chinese character "tu". On one side of the support frame 1 far from the area contacting the ground, a grinding component 3 for grinding the surface of metal plates is connected. On one side of the grinding component 3, a rolling component 5 for forming metal materials is connected. Then, after the metal plate is ground by the grinding component 3, it is rolled by the rolling component 5, reducing the amount of impurities on the metal plate and improving the rolling efficiency of the rolling component 5. At one end of the rolling component 5, a detection component 8 for identifying the rolled metal plate is connected. A control part 2 is also connected to the support frame 1. The control part 2 can control the grinding component 3. Then, according to the type of the metal plate, the control part 2 is operated to change the distance and angle between the grinding components 3, ensuring that the grinding component 3 can grind the surface of the metal plate.

[0041] During use, the metal plate to be rolled is passed through the grinding component 3 and then corresponds to the position of the rolling component 5. Then, the grinding component 3 and the rolling component 5 are controlled to work, driving the metal plate to move on the grinding component 3, and using the grinding component 3 to remove the oxides on the surface of the metal plate, and then entering the rolling component 5 for rolling.

[0042] The grinding component 3 includes a grinding roller 301. On one side of the grinding roller 301, a polishing roller 302 is connected. The lengths of the grinding roller 301 and the polishing roller 302 can both meet the grinding of the surface of the metal plate, ensuring that the impurities on the surface of the metal plate will not affect the subsequent rolling process and improving the success rate of rolling.

[0043] It should be noted that when using the grinding component 3 to grind the surface of the metal plate, due to the interference of the rolling component 5, the rotation speed of the grinding component 3 is greater than the moving speed of the metal plate, so as to realize the grinding of the surface of the metal plate.

[0044] The rolling assembly 5 includes a work box 501, which is connected to the support frame 1. A rolling chamber 5011 is provided through the work box 501. The metal sheet after passing through the grinding assembly 3 enters the rolling chamber 5011, awaiting rolling. Two rolling rolls 502 for processing the metal sheet are rotatably installed in the rolling chamber 5011. The two rolling rolls 502 are at the same horizontal height. After the metal sheet enters the rolling chamber 5011, it falls between the two rolling rolls 502. The metal sheet is formed by the rotation of the two rolling rolls 502. During the processing of the metal sheet, due to the heat present on the metal sheet, the metal sheet will adhere to the rolling rolls 502 when rolled, resulting in... In the event of damage to the rolling roll 502 or the metal sheet, the rolling roll 502 includes a connecting rod 5021. Multiple telescopic rods 5022 are connected to the outer circumference of the connecting rod 5021. A movable plate 5023 is connected to the end of the telescopic rod 5022 away from the connecting rod 5021. The rotation of the connecting rod 5021 drives the telescopic rod 5022 to rotate, thereby rotating the movable plate 5023. At the same time, after the metal sheet passes the position where the distance between the two rolling rolls 502 is the smallest, the telescopic rod 5022 in that area is controlled to extend, driving the movable plate 5023 in that area to move away from the end of the connecting rod 5021, so that the rolled metal sheet can be separated from the rolling roll 502, allowing the rolled metal sheet to enter the detection assembly 8.

[0045] Furthermore, when the telescopic rod 5022 is in its initial state, the two adjacent movable plates 5023 are in contact with each other, ensuring the stability of the rolling quality during the rolling process of the metal sheet.

[0046] To ensure that the metal sheet after passing through the grinding assembly 3 can accurately enter between the two rolling rolls 502, a movable groove 5012 is further provided on the cavity wall of the rolling chamber 5011. Two abutment rods 7 are slidably arranged in the movable groove 5012. By adjusting the distance between the two abutment rods 7, the landing position of the metal sheet can be controlled. The abutment rods 7 are in the same axial direction as the rolling rolls 502. In use, when the metal sheet passes through the grinding assembly 3, it contacts the abutment rods 7, and the movement of the abutment rods 7 makes the ground sheet located between the two rolling rolls 502.

[0047] Furthermore, to ensure that the rolled metal sheet meets the rolling requirements and improve rolling efficiency, it is necessary to inspect the rolled sheet during use. The inspection component 8 includes an inspection box 801, which is connected to the working box 501. After being rolled, the metal sheet enters the inspection box 801 through the rolling chamber 5011 and is then inspected. The inspection box 801 has a through groove 8011 for the rolled metal sheet to pass through, and a connecting cavity 8012 is provided inside the inspection box 801. The connecting cavity 8012 is connected to the through groove 8011. Two identification parts 803 for detecting the thickness of the sheet are connected in the connecting cavity 8012. The two identification parts 803 are symmetrically distributed with the through groove 8011 as the center of symmetry. When the rolled sheet passes through the through groove 8011, the two identification parts 803 are controlled to move towards each other, so that the two identification parts 803 come into contact with the metal sheet. As the metal sheet moves, the identification of the identification parts 803 ensures that the rolled metal sheet meets the rolling requirements.

[0048] To ensure that the identification unit 803 can accurately identify the metal sheet and adjust the rolling assembly 5 in a timely manner based on the detection results, both identification units 803 further include a crossbar 8033 for device fixation. Multiple movable rods 8032 are connected to the opposite ends of the crossbars 8033, and the length of the movable rods 8032 can be adjusted. A connecting frame 8031 ​​for support is connected to the end of the movable rod 8032 away from the crossbar 8033, and a contact wheel 8034 for detection is rotatably mounted on the connecting frame 8031. In use, adjusting the length of the movable rod 8032 moves the connecting frame 8031 ​​away from the crossbar 8033 and moves the contact wheel 8034 closer to the metal sheet, causing the contact wheel 8034 to come into contact with the metal sheet. The quality detection is achieved through the contact pressure between the contact wheel 8034 and the metal sheet.

[0049] Furthermore, to improve the detection efficiency of the contact wheel 8034 and ensure the pass rate of the metal sheet, two buffer grooves 8035 are symmetrically opened on the connecting frame 8031 ​​to ensure that the contact wheel 8034 will not interfere with the elastic rod 8036 during the detection process. The elastic rod 8036 is connected to both buffer grooves 8035. The two ends of the contact wheel 8034 distributed along the axial direction are respectively connected to the elastic rod 8036. When the contact wheel 8034 comes into contact with the rolled metal sheet, the contact wheel 8034 rotates with the movement of the metal sheet to detect the surface condition of the metal sheet. When the length of the elastic rod 8036 does not change significantly during the rotation of the contact wheel 8034, it means that the rolled metal sheet is in a qualified state. When the contact wheel 8034 fluctuates with the movement of the metal sheet, it causes the elastic rod 8036 to expand and contract, which means that the rolled metal sheet does not meet the rolling standard.

[0050] Furthermore, based on the elastic change of the elastic rod 8036 and the cooperation of the rolling rolls 502, the state of the metal sheet is identified, and it is determined whether there are impurities on the surface of the metal sheet that affect the rolling efficiency. Thus, the rolling assembly 5 and the grinding assembly 3 are adjusted to ensure that the subsequent metal sheet can be rolled successfully.

[0051] During the identification and inspection process of the rolled metal sheet by the contact wheel 8034, the surface condition of the metal sheet is judged by the state of the elastic rod 8036. When the contact wheel 8034 contacts the metal sheet, if the length of the elastic rod 8036 at a certain point fluctuates irregularly, it means that there are impurities in that area affecting the rolling efficiency of the metal sheet. When the contact wheel 8034 continuously exhibits relatively regular shaking after contacting the metal sheet, it means that the rolling force of the rolling assembly 5 on the metal sheet is too small and cannot meet the rolling requirements of the sheet. At the same time, when the contact wheel 8034 and the elastic rod 8036 at the same position continuously exhibit abnormal shaking during the identification process, the machine needs to be stopped to identify and inspect the surface of the rolling roll 502 to ensure that the surface of the rolling roll 502 is not damaged and affects the success rate of rolling the metal sheet.

[0052] Furthermore, since abnormal protrusions may appear on the edges of the metal after being squeezed during the rolling process, affecting the rolling quality of the metal sheet, grinding parts 802 for eliminating abnormal protrusions are respectively provided at both ends of the through groove 8011 along the length direction. The grinding parts 802 are used to grind the edges of the rolled metal sheet. When the metal sheet passes through the through groove 8011, the grinding parts 802 can contact the edge of the metal sheet and grind away the abnormal protrusions on the edge of the metal sheet.

[0053] Meanwhile, to prevent the stress within the rolled metal sheet from causing deformation and affecting the pass rate, an electromagnetic heating component is installed on the side of the inspection box 801 away from the rolling roll 502. This component heats the rolled metal sheet in sections to eliminate stress in the sheet and ensure the accuracy of the data detected by the inspection component 8, thus preventing the metal sheet from deforming under stress.

[0054] Furthermore, a power assembly 6 is connected to the support frame 1. The power assembly 6 is connected to the grinding assembly 3 and the rolling assembly 5 respectively. When the power assembly 6 starts working, it can drive the grinding assembly 3 and the rolling assembly 5 to start working.

[0055] Furthermore, a baffle 4 is connected to the side of the detection component 8 away from the rolling component 5. One end of the baffle 4 is connected to the support frame 1. The baffle 4 is in an arc shape. When the metal sheet passes through the detection component 8, it comes into contact with the baffle 4 and moves along the arc of the baffle 4 as the metal sheet moves, so that the rolled metal sheet is removed from the rolling equipment for storage.

[0056] During operation, the metal sheet to be rolled is first connected to the grinding component 3, and then the power component 6 is started, which drives the grinding component 3 and the rolling component 5 to work, ensuring that the metal sheet can be rolled on the rolling equipment.

[0057] The two ends of the metal sheet are respectively connected to the grinding roller 301 and the polishing roller 302, and the distance between the grinding roller 301 and the polishing roller 302 is adjusted to ensure the stability of the position of the metal sheet. At the same time, it can remove impurities adhering to the surface of the metal sheet, reducing the impact of impurities on the rolling efficiency of the sheet. As the grinding roller 301 and the polishing roller 302 rotate, the polished sheet is guided into the rolling chamber 5011. When the end of the metal sheet enters the rolling chamber 5011, the position of the metal sheet is adjusted by the contact rod 7 so that the end of the metal sheet can contact the rolling roller 502, so that the metal sheet is rolled when passing through the rolling roller 502. Then it enters the detection component 8, and the surface of the rolled plate is identified and judged by the identification unit 803 to ensure that the rolled plate meets the usage requirements. Finally, the rolled plate is conveyed out of the rolling equipment by the arc of the baffle 4.

[0058] When rolling plates of different thicknesses, the spacing of the grinding components 3 is adjusted by the control unit 2 to ensure that the grinding roller 301 and the grinding roller 302 can adapt to plates of different thicknesses and improve their applicability.

[0059] When the rolled sheet passes through the through groove 8011, the two identification parts 803 are controlled to move towards each other, so that the metal sheet comes into contact with the two identification parts 803. As the metal sheet moves, the identification of the identification parts 803 ensures that the rolled metal sheet meets the rolling requirements.

[0060] Specifically, by adjusting the length of the movable rod 8032, the connecting frame 8031 ​​is moved away from the crossbar 8033, and the contact wheel 8034 is moved closer to the metal sheet, causing the contact wheel 8034 to come into contact with the metal sheet. The contact pressure between the contact wheel 8034 and the metal sheet is used to achieve quality detection. At the same time, the surface condition of the rolling roll 502 is identified based on the surface condition of the metal sheet, so as to avoid damage to the rolling roll 502 from affecting the rolling of the metal sheet.

[0061] After the contact wheel 8034 comes into contact with the rolled metal sheet, the contact wheel 8034 rotates as the metal sheet moves. When the contact wheel 8034 rotates, the length of the elastic rod 8036 does not change significantly, which means that the surface of the rolled metal sheet is flat and there are no obvious unevenness, and it is in a qualified state. When the contact wheel 8034 vibrates as the metal sheet moves, it causes the elastic rod 8036 to expand and contract, which means that the rolled metal sheet does not meet the rolling standard.

[0062] Meanwhile, during the process of identifying and detecting the rolled metal sheet, the contact wheel 8034 judges the surface condition of the metal sheet by the state of the elastic rod 8036. When the contact wheel 8034 contacts the metal sheet, if the length of the elastic rod 8036 at a certain point fluctuates irregularly, it means that there are impurities in that area affecting the rolling efficiency of the metal sheet. At this time, the control and regulation unit 2 adjusts the position of the grinding roller 301 and the polishing roller 302 to ensure that the impurities on the metal sheet are fully eliminated. If necessary, the grinding roller 301 and the polishing roller 302 can be replaced to ensure stable polishing efficiency.

[0063] When the contact wheel 8034 continues to vibrate in a relatively regular manner after contacting the metal sheet, it indicates that the thickness of the metal sheet after passing through the rolling roll 502 is uneven. This means that the rolling force of the rolling roll 502 in the rolling assembly 5 is too small to meet the rolling requirements of the sheet. When the rolling force on the rolling roll 502 is increased, if the elastic rod 8036 still vibrates in a relatively regular manner when passing through the contact wheel 8034 and the elastic rod 8036, it means that the rolling roll 502 is damaged, that is, the surface of the movable plate 5023 is damaged, affecting the rolling accuracy. The machine needs to be stopped to repair the rolling roll 502 and the movable plate 5023.

[0064] Meanwhile, when the contact wheel 8034 and the elastic rod 8036 at the same position continue to vibrate abnormally during the identification process, the machine needs to be stopped to identify and inspect the surface of the rolling roll 502 to ensure that the surface of the rolling roll 502 is not damaged and affects the success rate of metal sheet rolling.

[0065] Furthermore, in order to reduce the stress caused by rolling after the rolling of the rolled sheet by the detection component 8, which could lead to deformation of the rolled sheet, an electromagnetic heating component is installed to heat the rolled sheet in sections after passing through the contact wheel 8034. This reduces the rolling stress in the rolled sheet, decreases the probability of deformation, and improves the forming efficiency of the rolled sheet.

[0066] Example 2

[0067] This embodiment discloses a manufacturing method using metal forming and rolling equipment, including the following steps:

[0068] S1. Based on the thickness and model of the metal sheet, the grinding assembly 3 is controlled by the control unit 2, and then the metal sheet to be rolled is connected to the grinding assembly 3.

[0069] S2. The power component 6 is used to control the operation of the grinding component 3 and the rolling component 5, which drive the metal sheet to move and grind the surface of the metal sheet when it passes through the grinding component 3.

[0070] S3. After the metal sheet enters the rolling chamber 5011, the landing position of the metal sheet is adjusted by moving the abutment rod 7 to make the starting end face of the metal sheet located between the rolling rolls 502.

[0071] S4. The polished metal sheet is rolled using the rolling roll 502, and the rolled metal sheet is pushed into the through groove 8011 through the rolling chamber 5011. The end face of the metal sheet is inspected using the detection component 8.

[0072] S5. The state of the rolled metal sheet and the rolling roll 502 is determined by the state of the contact wheel 8034 and the elastic rod 8036.

[0073] Example 3

[0074] An application of metal forming and rolling equipment in high-purity aluminum sputtering targets is disclosed. Before rolling, the ultra-high purity aluminum ingot undergoes surface milling to remove the oxide layer. Rolling is then performed on a reversible hot rolling mill with a single-pass reduction of 20 mm, lubricated with an emulsion. During rolling, the mill roll gap is initially set to half the single-pass reduction, and then adjusted to the full single-pass reduction. Controlling the deformation temperature and single-pass deformation reduction is crucial in this step to control the grain size and orientation of the finished target. After annealing, the target needs to be leveled and then milled to obtain the ultra-high purity aluminum sputtering target.

[0075] It should be noted that, in this document, the terms “comprising,” “including,” or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0076] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A metal forming and rolling equipment, comprising a support frame (1), characterized in that: A grinding component (3) is connected to the support frame (1), a rolling component (5) is connected to one side of the grinding component (3), a detection component (8) is connected to one end of the rolling component (5), and an adjustment unit (2) is also connected to the support frame (1). The adjustment unit (2) can adjust the grinding component (3). The polishing assembly (3) includes a polishing roller (301), and a polishing roller (302) is connected to one side of the polishing roller (301). The rolling assembly (5) includes a working box (501), a rolling chamber (5011) is provided through the working box (501), two rolling rolls (502) are rotatably arranged in the rolling chamber (5011), the rolling rolls (502) include a connecting rod (5021), a plurality of telescopic rods (5022) are connected to the outer circumference of the connecting rod (5021), and a movable plate (5023) is connected to the end of the telescopic rod (5022) away from the connecting rod (5021). The detection component (8) includes a detection box (801), which is connected to the working box (501). A through groove (8011) is provided through the detection box (801), and a connecting cavity (8012) is provided inside the detection box (801). The connecting cavity (8012) communicates with the through groove (8011). Two identification parts (803) are connected inside the connecting cavity (8012). The two identification parts (803) are symmetrically distributed with the through groove (8011) as the center of symmetry. Both of the identification units (803) include a crossbar (8033), and a plurality of movable rods (8032) are connected to one end of the crossbar (8033) facing each other. A connecting frame (8031) is connected to the end of the movable rod (8032) away from the crossbar (8033), and an abutment wheel (8034) is rotatably provided on the connecting frame (8031).

2. The metal forming and rolling equipment according to claim 1, characterized in that: The rolling chamber (5011) has a movable groove (5012) on its wall. Two abutting rods (7) are slidably arranged in the movable groove (5012), and the abutting rods (7) are in the same axial direction as the rolling roll (502).

3. The metal forming and rolling equipment according to claim 2, characterized in that: Two buffer grooves (8035) are symmetrically opened on the connecting frame (8031). An elastic rod (8036) is connected in each of the two buffer grooves (8035). The two ends of the abutment wheel (8034) distributed along the axial direction are respectively connected to the elastic rod (8036).

4. The metal forming and rolling equipment according to claim 1, characterized in that: The through groove (8011) is provided with grinding parts (802) at both ends along its length.

5. The metal forming and rolling equipment according to claim 3, characterized in that: The support frame (1) is connected to a power assembly (6), which is connected to the grinding assembly (3) and the rolling assembly (5) respectively.

6. The metal forming and rolling equipment according to claim 1, characterized in that: The detection component (8) is provided with a baffle (4) on the side away from the rolling component (5), and one end of the baffle (4) is connected to the support frame (1).

7. A manufacturing method using the metal forming and rolling equipment as described in claim 5, characterized in that: Includes the following steps: S1. Based on the thickness and model of the metal sheet, the grinding assembly (3) is controlled by the control unit (2), and the metal sheet to be rolled is connected to the grinding assembly (3). S2. The power component (6) controls the operation of the grinding component (3) and the rolling component (5) to move the metal plate and grind the surface of the metal plate when the metal plate passes through the grinding component (3). S3. After the metal sheet enters the rolling chamber (5011), the landing position of the metal sheet is adjusted by moving the abutment rod (7) so that the starting end face of the metal sheet is located between the rolling rolls (502). S4. The polished metal sheet is rolled using rolling rolls (502), and the rolled metal sheet is pushed into the through groove (8011) through the rolling chamber (5011). The end face of the metal sheet is inspected using the detection assembly (8). S5. The state of the rolled metal sheet and the rolling roll (502) is determined by the state of the contact wheel (8034) and the elastic rod (8036).

8. An application of the metal forming and rolling equipment as described in any one of claims 1-6 in high-purity aluminum sputtering targets.

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