Bearing device and detection equipment

Abstract

The invention discloses a bearing device and detection equipment. The bearing device comprises a bearing part, the bearing part is provided with a first gas path and a second gas path, and the first gas path and the second gas path are each provided with a gas source hole, a gas pressure channel and a plurality of gas pressure holes. The air pressure hole and the air source hole are formed in the bearing face and the connecting face of the bearing piece respectively, and the air pressure channel is arranged in the bearing piece. The air pressure channel comprises a first cavity channel, a second cavity channel and a plurality of third cavity channels which are located at different height positions, the first cavity channel is communicated with the air source hole and the second cavity channel, the second cavity channel is communicated with the third cavity channels, and the third cavity channels are communicated with the air pressure holes in a one-to-one correspondence mode. The cavity channels at different height positions in the bearing part are communicated to form the air pressure channel, on one hand, the airflow flowing distance in the bearing part can be effectively prolonged, and the airflow stability is improved; and on the other hand, under the mutual cooperation of the cavity channels, the airflow can be uniformly collected and distributed, so that the air pressure of the airflow entering and exiting from each air pressure hole is more uniform and stable, and the air floatation bearing performance is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of detection, and particularly to a carrying device and a detection device. Background Art

[0002] When detecting a workpiece to be measured (such as a wafer, a glass substrate, etc.), it is first necessary to carry and fix the workpiece to be measured. Common carrying methods include vacuum adsorption carrying, electrostatic adsorption carrying, and air-floating carrying, etc. Among them, both vacuum adsorption carrying and electrostatic adsorption carrying require the workpiece to be measured to be in close contact with the carrying device. Therefore, in some detection scenarios where it is necessary to reduce or avoid contact between the workpiece to be measured and the carrying device, the air-floating carrying method is generally used to carry and fix the workpiece to be measured.

[0003] The principle of the air-floating carrying method is to provide positive pressure and negative pressure for the workpiece to be measured at the same time, so that the workpiece to be measured can be suspended in a certain preset plane. However, during the operation of the air-floating carrying device, the air flow or air pressure is likely to be unstable, thus seriously affecting the carrying and fixing effect of the workpiece to be measured. Summary of the Invention

[0004] The main technical problem to be solved by the present invention is to provide a carrying device and a detection device applying the carrying device, so as to achieve the purpose of improving air pressure stability.

[0005] According to a first aspect, in one embodiment, a carrying device is provided, including a carrier. The surface of the carrier facing the workpiece to be carried in its axial direction is a carrying surface, and the surface other than the carrying surface is a connection surface. The carrier has a first air path and a second air path isolated from each other, and each of the first air path and the second air path has an air source hole, an air pressure channel, and a plurality of air pressure holes. Among them: The air source hole is arranged on the connection surface for connecting an air source. The air pressure hole is arranged on the carrying surface for providing air pressure to the workpiece to be carried. The air pressure channel is formed inside the carrier for guiding air flow to enter and exit the carrier through the air source hole and the air pressure hole. The air pressure channel includes a first channel, a second channel, and a plurality of third channels. The first channel, the second channel, and the third channels are at different height positions in the axial direction of the carrier. The first channel is communicated with the air source hole and the second channel, the second channel is communicated with the plurality of third channels, and the plurality of third channels are in one-to-one correspondence and communication with the plurality of air pressure holes.

[0006] In one embodiment, in the first air path and / or the second air path, the number of the first channels and the number of the second channels are set to be multiple. Among them: The second channels are arranged to enclose the geometric center line of the carrier, and a plurality of the second channels are arranged concentrically and at intervals, and each of the second channels communicates with a plurality of the third channels; A plurality of the first channels extend radially around the geometric center of the carrier, and each of the first channels communicates with a corresponding air source hole, and the plurality of the first channels and the plurality of the second channels communicate with each other alternately.

[0007] In one embodiment, in the first air path and the second air path, the number of the first channels and the number of the second channels are set to be plural; the first channels of the first air path and the first channels of the second air path are arranged alternately along the circumferential direction of the carrier.

[0008] In one embodiment, the air source holes of the first air path and the air source holes of the second air path are arranged alternately along the circumferential direction of the carrier at the contour edge position of the carrier.

[0009] In one embodiment, the air pressure holes of the first air path and the air pressure holes of the second air path are arranged alternately along the radial direction of the carrier and / or the circumferential direction of the carrier.

[0010] In one embodiment, the first channels of the first air path and the first channels of the second air path are at the same height position in the axial direction of the carrier; The second channels of the first air path and the second channels of the second air path are at different height positions in the axial direction of the carrier; The third channels of the first air path and the third channels of the second air path are at different height positions in the axial direction of the carrier.

[0011] In one embodiment, in the axial direction of the carrier, the second channels of the first air path are located on the side of the carrier close to the bearing surface, and the second channels of the second air path are located on the side of the carrier away from the bearing surface; In the axial direction of the carrier, the first channels of the first air path and the first channels of the second air path are located between the second channels of the first air path and the second channels of the second air path.

[0012] In one embodiment, the air pressure channel of the first air path further includes a plurality of first air guiding channels; in the axial direction of the carrier, the first air guiding channels are located between the first cavity and the second cavity of the first air path; the first air guiding channels have a preset length in a direction parallel to the bearing surface, and one end of the length direction of the first air guiding channel communicates with the first cavity of the first air path, and the other end communicates with the second cavity of the first air path.

[0013] In one embodiment, the air pressure channel of the second air path further includes a plurality of second air guiding channels and a plurality of third air guiding channels; in the axial direction of the carrier, the second air guiding channels are located between the first cavity and the second cavity of the second air path, and the third air guiding channels are located between the second cavity and the third cavity of the second air path; The first cavity of the second air path communicates with the second cavity through a plurality of the second air guiding channels, and the second cavity of the second air path communicates with a plurality of the third cavities in one-to-one correspondence through a plurality of the third air guiding channels.

[0014] In one embodiment, the carrier includes a bearing layer, a connecting layer, and a plurality of intermediate layers; in the axial direction of the carrier, the plurality of intermediate layers are sequentially stacked and fixed between the connecting layer and the bearing layer; wherein: The air pressure channel is formed between adjacent ones of the bearing layer, the intermediate layer, and the connecting layer, the air source hole penetrates through the connecting layer along the axial direction of the carrier, and the air pressure hole penetrates through the bearing layer along the axial direction of the carrier.

[0015] In one embodiment, among the plurality of intermediate layers, there are a first air path layer, a second air path layer, a third air path layer, a fourth air path layer, a fifth air path layer, and a sixth air path layer that are sequentially stacked between the connecting layer and the bearing layer; wherein: In the first air path, the first cavity is formed between the second air path layer and the third air path layer, the second cavity is formed between the bearing layer and the sixth air path layer, and the third cavity penetrates through the sixth air path layer and is formed between the bearing layer and the fifth air path layer; In the second air path, the first cavity is formed between the second air path layer and the third air path layer, the second cavity is formed between the connecting layer and the first air path layer, and the third cavity penetrates through the fourth air path layer and is formed between the third air path layer and the fifth air path layer.

[0016] According to a second aspect, an embodiment provides a detection device, including a detection device and the carrier device according to the first aspect; the detection device is arranged in cooperation with the carrier device for detecting a workpiece to be carried suspended on the carrier.

[0017] A bearing device according to the above embodiment includes a bearing member, the bearing member having a first air passage and a second air passage, the first air passage and the second air passage each having an air source hole, a pneumatic channel, and a plurality of pneumatic holes; the pneumatic holes and the air source holes are respectively arranged on the bearing surface and the connection surface of the bearing member, and the pneumatic channel is arranged inside the bearing member; the pneumatic channel includes a first cavity, a second cavity, and a plurality of third cavities at different height positions, the first cavity communicating with the air source hole and the second cavity, the second cavity communicating with the plurality of third cavities, and the plurality of third cavities communicating with the plurality of pneumatic holes in one-to-one correspondence. By using the cavities at different height positions inside the bearing member to communicate to form a pneumatic channel, on the one hand, the distance of the airflow flowing inside the bearing member can be effectively extended, improving the stability of the airflow; on the other hand, with the mutual cooperation of each cavity, the airflow can be uniformly collected and distributed, making the air pressure of the airflow entering and exiting each pneumatic hole more uniform and stable, and improving the air-floating bearing performance. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic perspective view of a bearing device of an embodiment.

[0019] Figure 2 It is a schematic exploded view (I) of a bearing device of an embodiment.

[0020] Figure 3 It is a schematic exploded view (II) of a bearing device of an embodiment.

[0021] Figure 4 It is a schematic plan view of a bearing device of an embodiment.

[0022] Figure 5 It is a schematic structural layout view of each cavity of the second air passage in a bearing device of an embodiment.

[0023] Figure 6 It is a schematic structural layout view of each cavity of the first air passage in a bearing device of an embodiment.

[0024] Figure 7 It is a schematic view of the path of the airflow flowing along the first air passage in a bearing device of an embodiment.

[0025] Figure 8 It is a schematic view of the path of the airflow flowing along the second air passage in a bearing device of an embodiment.

[0026] Figure 9 It is a schematic view of the structure of the connection layer in a bearing device of an embodiment.

[0027] Figure 10 It is a schematic view of the structure of the second air passage layer in a bearing device of an embodiment.

[0028] Figure 11 Schematic structural diagram of a bearing layer in a bearing device of an embodiment.

[0029] Figure 12 Schematic structural diagram of a fourth gas path layer in a bearing device of an embodiment.

[0030] Figure 13 Schematic diagram of the forming principle of a third cavity in a bearing device of an embodiment.

[0031] In the figure: 10. First gas path layer; 20. Second gas path layer; 21. First groove; 30. Third gas path layer; 40. Fourth gas path layer; 41. Tooth-shaped structure; 50. Fifth gas path layer; 60. Sixth gas path layer; 70. Connection layer; 71. Third groove; 80. Bearing layer; 80a. Bearing part; 80b. Enclosing wall part; 81. Second groove; 91. First fixing part; 92. Second fixing part; V1. First negative pressure cavity; V2. Second negative pressure cavity; V3. Third negative pressure cavity; V4. Negative pressure air source hole; V5. Negative pressure air pressure hole; V6. First air guiding channel; P1. First positive pressure cavity; P2. Second positive pressure cavity; P3. Third positive pressure cavity; P4. Positive pressure air source hole; P5. Positive pressure air pressure hole; P6. Second air guiding channel; P7. Third air guiding channel; A1. Bearing surface; A2. Connection surface; A3. Assembly hole; A4. Connection hole; A5. First positioning structure; A6. Second positioning structure. Detailed implementation manners

[0032] The present invention will be further described in detail below in conjunction with the accompanying drawings through specific implementation manners. Similar elements in different implementation manners are labeled with related similar element numbers. In the following implementation manners, many detailed descriptions are provided to enable a better understanding of the present application. However, those skilled in the art can easily recognize that some of the features can be omitted in different situations, or can be replaced by other elements, materials, or methods. In some cases, some operations related to the present application are not shown or described in the specification, which is to avoid the core part of the present application being overwhelmed by excessive descriptions. For those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations based on the descriptions in the specification and the general technical knowledge in the art.

[0033] In addition, the features, operations, or characteristics described in the specification can be combined in any suitable manner to form various embodiments. At the same time, the steps or actions in the method description can also be reordered or adjusted in a manner obvious to those skilled in the art. Therefore, the various sequences in the specification and drawings are only for clearly describing a certain embodiment and do not mean a necessary sequence, unless it is otherwise stated that a certain sequence must be followed.

[0034] The serial numbers assigned to the components herein, such as "first", "second", etc., are only used to distinguish the described objects and do not have any sequential or technical meaning. And as used in this application, "connection" and "coupling", unless otherwise specified, both include direct and indirect connection (coupling).

[0035] Please refer to Figures 1 to 13 , an embodiment of the present application provides a carrying device, which can be used to carry products / workpieces including but not limited to wafers, glass substrates, display screens, optical lenses, etc. (hereinafter referred to as the workpiece to be carried); for example, in the form of air-floating carrying, the workpiece to be measured is suspended and fixed at a preset position above the carrying device, so as to perform detection and measurement on the workpiece to be carried; the carrying device includes a carrier and other functional components (such as a gas source, a motion mechanism, etc.) that exist as needed, which will be specifically described below.

[0036] Please refer to Figures 1 to 8 , the overall contour of the carrier is generally disk-shaped. For the convenience of distinction and description, the surface of the carrier facing the workpiece to be carried in its axial direction is defined as the carrying surface A1, and the surface of the carrier other than the carrying surface A1 is defined as the connection surface A2; the carrier has a first air passage and a second air passage that are isolated or independent of each other, and each of the first air passage and the second air passage is formed by connecting a gas source hole, a pressure passage, and a plurality of pressure holes; wherein, the gas source hole is arranged on the connection surface A2 and is mainly used to connect a gas source (such as a positive pressure gas source or a negative pressure gas source); the pressure hole is arranged on the carrying surface A1 and is mainly used to provide air pressure (such as a positive pressure blowing force or a negative pressure suction force) for the workpiece to be carried. The pressure passage is formed inside the carrier and is mainly used to establish an air passage connection relationship between the gas source hole and the pressure hole, so as to provide a path for the air flow to enter and exit the carrier through the gas source hole and the pressure hole. The pressure passage includes a first chamber, a second chamber, and a plurality of third chambers.

[0037] Please refer to Figures 5 to 8 , the first chamber, the second chamber, and the third chamber are arranged at different height positions in the axial direction of the carrier, that is to say, the first chamber, the second chamber, and the third chamber in the same air passage are arranged in a staggered layer in the axial direction of the carrier. Among them, the gas source hole is connected to the second chamber through the first chamber, a plurality of third chambers are connected to the second chamber at the same time, and a plurality of third chambers are connected to a plurality of pressure holes in one-to-one correspondence.

[0038] For the sake of distinction and description, please refer to Figures 5 to 8 , the first channel, the second channel, the third channel, the air source hole and the air pressure hole in the first air path are respectively defined as the first negative pressure channel V1, the second negative pressure channel V2, the third negative pressure channel V3, the negative pressure air source hole V4 and the negative pressure air pressure hole V5; the first channel, the second channel, the third channel, the air source hole and the air pressure hole in the second air path are respectively defined as the first positive pressure channel P1, the second positive pressure channel P2, the third positive pressure channel P3, the positive pressure air source hole P4 and the positive pressure air pressure hole P5.

[0039] In terms of the relative positional relationship of each channel inside the carrier.

[0040] In some embodiments, please refer to Figure 7 and Figure 8 , the third negative pressure channel V3 can be arranged at the height position between the first negative pressure channel V1 and the second negative pressure channel V2 in the axial direction of the carrier; correspondingly, the air pressure channel further includes a first air guiding channel V6 communicating between the first negative pressure channel V1 and the second negative pressure channel V2, and the first air guiding channel V6 is arranged separately from the third negative pressure channel V3, and the first air guiding channel V6 can penetrate from the first negative pressure channel V1 to the second negative pressure channel V2 along the axial direction of the carrier.

[0041] The first positive pressure channel P1 can be arranged at the height position between the second positive pressure channel P2 and the third positive pressure channel P3 in the axial direction of the carrier; correspondingly, the air pressure channel further includes a second air guiding channel P6 communicating between the first positive pressure channel P1 and the second positive pressure channel P2 and a third air guiding channel P7 communicating between the second positive pressure channel P2 and the third positive pressure channel P3; the second air guiding channel P6 and the third air guiding channel P7 can be arranged to extend along the axial direction of the carrier.

[0042] In some embodiments, please refer to Figure 7 and Figure 8 , the channels of the first air path and the channels of the second air path can also be arranged in a staggered layer form. For example, in the axial direction of the carrier, the second negative pressure channel V2 is located on the side of the carrier close to the bearing surface A1, the second positive pressure channel P2 is located on the side of the carrier away from the bearing surface A1, and the first negative pressure channel V1 and the first positive pressure channel P1 are arranged at the same height position or in the same layer between the second negative pressure channel V2 and the second positive pressure channel P2.

[0043] In terms of the structural form presented by each channel inside the carrier.

[0044] In some embodiments, please refer to Figure 5 , Figure 6 and Figures 9 to 11, the first channel can adopt a strip structure extending from one side of the geometric center line (or axis line) of the self-bearing member towards the contour edge part of the bearing member, and the second channel can adopt an annular structure arranged around the geometric center line of the bearing member; the third channel can have a preset length in a plane parallel to the bearing surface A1.

[0045] Regarding the first channel, please refer to Figure 5 , Figure 6 and Figure 10 , the number of the first negative pressure channels V1 is set to be multiple, such as two, four or more other numbers. The multiple first negative pressure channels V1 extend radially around the geometric center line of the bearing member, and each first negative pressure channel V1 is correspondingly connected to a negative pressure air source hole V4; the first positive pressure channel P1 can be set with reference to the first negative pressure channel V1, that is: the multiple first positive pressure channels P1 extend radially around the geometric center line of the bearing member, and each first positive pressure channel P1 is correspondingly connected to a positive pressure air source hole P4.

[0046] Moreover, the multiple first negative pressure channels V1 and the multiple first positive pressure channels P2 are alternately arranged in the circumferential direction at the same height position in the axial direction of the bearing member; correspondingly, the multiple negative pressure air source holes V4 and the multiple positive pressure air source holes P4 are alternately arranged in the circumferential direction at the contour edge position of the bearing member; for example, the negative pressure air source hole V4 and the positive pressure air source hole P4 can be arranged on the connection surface A1 which is arranged opposite to the bearing surface A1 in the axial direction of the bearing member; again, for example, the negative pressure air source hole V4 and the positive pressure air source hole P4 can be arranged on the circumferential side of the bearing member and at the same height as the corresponding first channel.

[0047] Regarding the second channel, please refer to Figure 5 , Figure 6 , Figure 9 and Figure 11 , the number of the second negative pressure channels V2 is set to be multiple, such as three, four, six or more other numbers. The multiple second negative pressure channels V2 are arranged concentrically and at intervals with the geometric center line of the bearing member as the center, and each second negative pressure channel V2 is connected to multiple third negative pressure channels V3; correspondingly, the second positive pressure channel P2 can be set with reference to the second negative pressure channel V2, that is: the multiple second positive pressure channels P2 are arranged at the same height position in the axial direction of the bearing member in a concentric and spaced arrangement, and each second positive pressure channel P2 is connected to multiple third positive pressure channels P3.

[0048] Moreover, each first negative-pressure channel V1 is correspondingly connected to multiple second negative-pressure channels V2 through multiple first air-conducting channels V6, each first positive-pressure channel P1 is correspondingly connected to multiple second positive-pressure channels P2 through multiple second air-conducting channels P6, and the third positive-pressure channel P3 is connected to the corresponding second positive-pressure channel P2 through the corresponding third air-conducting channel P7.

[0049] The communication relationship established between the corresponding channels through the air-conducting channels, as well as the structural forms, arrangement forms, and relative positions of the first channels and the second channels, can form an interactively connected air path network structure inside the carrier; it can be understood that the projections of the multiple first negative-pressure channels V1 and the multiple second negative-pressure channels V2 on a plane parallel to the bearing surface A1 are interactively connected to each other, and the projections of the multiple first positive-pressure channels P1 and the multiple second positive-pressure channels P2 on a plane parallel to the bearing surface A1 are interactively connected to each other.

[0050] Regarding the third channels, please refer to Figure 5 、 Figure 6 、 Figure 12 and Figure 13 In each of the multiple third negative-pressure channels V3 corresponding to each second negative-pressure channel V2, one end of the third negative-pressure channel V3 in the length direction is connected to the second negative-pressure channel V2, and the other end is connected to the corresponding negative-pressure air hole V5; one end of the third positive-pressure channel P3 in the length direction is connected to the corresponding second positive-pressure channel P2, and the other end is connected to the corresponding positive-pressure air hole P5; correspondingly, the negative-pressure air holes V5 and the positive-pressure air holes P5 are alternately arranged in the radial direction and the circumferential direction of the carrier, so as to form uniformly dense air holes with alternating positive and negative pressures on the bearing surface A1 by means of the multiple negative-pressure air holes V5 and positive-pressure air holes P5.

[0051] Below, mainly taking the axial direction of the carrier as the up-and-down direction, the bearing surface A1 as the upper surface of the carrier, the first air path for providing negative pressure to the workpiece to be carried, and the second air path for providing positive pressure to the workpiece to be carried as examples, the general flow path or flow direction of the air flowing in and out of the carrier will be described.

[0052] Regarding the first air path, please refer to Figure 7 The air flowing into the carrier through the negative-pressure air hole V5 first flows downward into the third negative-pressure channel V3 corresponding to the negative-pressure air hole V5. By using the structural form in which each second negative-pressure channel V2 is correspondingly connected to multiple third negative-pressure channels V3, the air in the third negative-pressure channel V3 flows upward and converges into the second negative-pressure channel V2, and then by using the structural form in which the multiple second negative-pressure channels V2 and the multiple first negative-pressure channels V1 are interactively connected, the air in the second negative-pressure channel V2 flows downward and is distributed to each first negative-pressure channel V1, and finally is discharged from the negative-pressure air source hole V4 out of the carrier; thus, negative-pressure suction is provided to the workpiece to be carried by means of the negative-pressure air hole V5.

[0053] Regarding the second air passage, please refer to Figure 8 . The air flow that enters the first positive pressure chamber P1 through the positive pressure air source hole P4 first flows downward into the second positive pressure chamber P2 by virtue of the interaction and connection relationship between the multiple first positive pressure chambers P1 and the multiple second positive pressure chambers P2, realizing the distribution and collection of the air flow. Subsequently, by using the structural feature that each second positive pressure chamber P2 correspondingly communicates with multiple third positive pressure chambers P3, the air flow in the second positive pressure chamber P2 flows upward into the corresponding third positive pressure chamber P3, and finally continues to flow upward from the third positive pressure chamber P3 and is finally discharged from the positive pressure air hole P5 corresponding to the third positive pressure chamber P3 to the carrier; thus, a positive pressure blowing force is provided for the workpiece to be carried by means of the positive pressure air hole P5.

[0054] It should be noted that Figure 7 and Figure 8 the bold solid lines in represent the approximate layout form of each chamber inside the carrier, and do not represent the actual structure of each chamber; Figure 7 and Figure 8 the dashed lines with arrows in represent the approximate direction of the air flow along the corresponding air passage.

[0055] Based on this, firstly, by using the structural features of each chamber at different height positions and the corresponding connection relationship between them, a tortuous air passage structure can be formed inside the carrier, thereby effectively extending the flow distance or path of the air flow flowing in and out of the carrier and enhancing the stability of the air flow. Secondly, by means of the structural space provided by each chamber, the air flow can be collected, distributed, and equalized, and a stable air pressure can be generated at each air pressure hole. Thirdly, by using the structural form in which the positive and negative pressure air holes are evenly and alternately arranged on the bearing surface A1, the uniformity of the positive and negative pressure air flow distribution can be ensured, so that the carrying device can carry the workpiece to be carried smoothly, achieving the purpose of improving the air floating carrying performance.

[0056] In other embodiments, other arrangement forms can also be adopted for each chamber, air source hole, and air pressure hole. For example, multiple positive pressure air holes P5 and multiple negative pressure air holes V5 are each arranged at intervals in multiple circles around the geometric center line of the carrier on the bearing surface A1, and the multiple circles of positive pressure air holes P5 and the multiple circles of negative pressure air holes V5 are arranged concentrically and alternately in the radial direction of the carrier.

[0057] For another example, multiple positive pressure air holes P5 and multiple negative pressure air holes V5 are each arranged radially around the geometric center line of the carrier on the bearing surface A1, and the positive pressure air holes P5 and the negative pressure air holes V5 are arranged alternately in the circumferential direction of the carrier.

[0058] Correspondingly, due to the change in the arrangement form of the air pressure holes, the structural forms, quantities, and positional relationships among the respective channels can be adaptively adjusted and set; the key point is that the respective channels in the same air path are at different height positions in the axial direction of the carrier.

[0059] It should be noted that using the first air path to provide negative pressure for the workpiece to be carried and using the second air path to provide positive pressure for the workpiece to be carried is only an embodiment of a specific application of this carrying device. In other words, the first air path can also be used to provide positive pressure for the workpiece to be carried, and the second air path can be used to provide negative pressure for the workpiece to be carried. Additionally, according to actual needs, the overall contour of the carrier can also be set to other shapes, such as a rectangular disk shape, etc.

[0060] In addition, based on the setting principle of the air path structure in this carrying device, the functions of the air path or the respective channels and air holes can be adaptively adjusted and set, so that this carrying device can be applicable to different application scenarios or meet the application requirements.

[0061] For example, the first air path and the second air path can be used to simultaneously provide positive pressure for the workpiece to be carried. By balancing the air pressure provided by the balancing device and the gravity of the workpiece to be carried, the workpiece to be carried can be carried and fixed in a suspended form; or one of the first air path and the second air path can be omitted, and the other of the first air path and the second air path can be used to provide positive pressure for the workpiece to be carried; correspondingly, in the embodiment where one of the air paths is omitted, the structural forms of the respective channels need to be adaptively adjusted to ensure the uniformity of the positive pressure air flow.

[0062] Again, for example, the first air path and the second air path can be used to simultaneously provide negative pressure for the workpiece to be carried to adsorb and fix the workpiece to be carried on the carrying surface A1; or one of the first air path and the second air path can be omitted, and the other of the first air path and the second air path can be used to provide negative pressure for the workpiece to be carried); correspondingly, in the embodiment where one of the air paths is omitted, the structural forms of the respective channels need to be adaptively adjusted to ensure the uniformity of the negative pressure air flow.

[0063] In one embodiment, please refer to Figure 2 、 Figure 3 and Figures 7 to 13 , the carrier adopts a multi-layer structure, which includes a connection layer 70, a carrying layer 80, and a plurality of intermediate layers; in the axial direction of the carrier, the plurality of intermediate layers are sequentially stacked and fixed between the connection layer 70 and the carrying layer 80; specifically, among the plurality of intermediate layers, there are included a first air path layer 10, a second air path layer 20, a third air path layer 30, a fourth air path layer 40, a fifth air path layer 50, and a sixth air path layer 60 that are sequentially stacked and fixed between the connection layer 70 and the carrying layer 80.

[0064] The air pressure channels of the first air path and the air pressure channels of the second air path are formed between the adjacent connection layer 70, the intermediate layer, and the bearing layer 80; the positive pressure air holes P5 and the negative pressure air holes V5 penetrate the bearing layer 80 along the axial direction of the bearing member. It can also be understood that the side of the bearing layer 80 facing away from the intermediate layer and the connection layer 70 in the axial direction of the bearing member is the bearing surface A1; the positive pressure air source holes P4 and the negative pressure air source holes V4 penetrate the connection layer 70 along the axial direction of the bearing member. It can also be understood that the side of the connection layer 70 facing away from the intermediate layer and the bearing layer 80 in the axial direction of the bearing member is the connection surface A1. The following is a specific description.

[0065] Please refer to Figure 2 、 Figure 3 、 Figure 7 、 Figure 8 and Figure 10 ,a first negative pressure cavity V1 and a first positive pressure cavity P1 are formed between the second air path layer 20 and the third air path layer 30; specifically, a plurality of groove structures are provided on the side of the second air path layer 20 facing the third air path layer 30. For the convenience of distinction and description, the groove structure is defined as the first groove 21, and the plurality of first grooves 21 extend radially around the geometric center line of the bearing member; the third air path layer 30 covers the first groove 21, so as to construct the plurality of first grooves 21 into a plurality of corresponding first negative pressure cavities V1 and second positive pressure cavities P1 by means of the third air path layer 30.

[0066] Correspondingly, the negative pressure air source hole V4 and the positive pressure air source hole P4 can be arranged to penetrate the connection layer 70, the first air path layer 10, and the second air path layer 20 along the axial direction of the bearing member to realize the connection between the air source hole and the corresponding first cavity; it can also be understood that by providing through hole structures at the positions of the connection layer 70, the first air path layer 10, and the second air path layer 20 corresponding to the first groove 21, after the three layers are stacked and fixed, the air source holes are naturally formed based on the coaxial connection relationship between the through hole structures.

[0067] Please refer to Figure 2 、 Figure 3 、 Figure 7 、 Figure 8 and Figure 11 ,a second negative pressure cavity V2 is formed between the bearing layer 80 and the sixth air path layer 60; specifically, a plurality of annular groove structures surrounding the geometric center line of the bearing member are provided on the side of the bearing layer 80 facing the sixth air path layer 60. For the convenience of distinction and description, the annular groove structure is defined as the second groove 81, and the plurality of second grooves 81 are arranged concentrically at intervals; the sixth air path layer 60 covers the second groove 81, so as to construct the second groove 81 into a plurality of corresponding second negative pressure cavities V2 by means of the sixth air path layer 60.

[0068] Correspondingly, the first air guiding channel V6 can be arranged to penetrate through the third air path layer 30, the fourth air path layer 40, the fifth air path layer 50, and the sixth air path layer 60 in sequence along the axial direction of the carrier, so as to establish a communication relationship between the first negative pressure cavity V1 and the second negative pressure cavity V2 by means of the first air guiding channel V6; it can also be understood that, by arranging through hole structures at the positions of the third air path layer 30, the fourth air path layer 40, the fifth air path layer 50, and the sixth air path layer 60 corresponding to the first groove 21 and the second groove 81, after the four layers are stacked and fixed, the first air guiding channel V6 is naturally formed based on the communication relationship between the through hole structures.

[0069] During specific implementation, the through hole structures arranged on the third air path layer 30, the fourth air path layer 40, the fifth air path layer 50, and the sixth air path layer 60 are strip-shaped hole structures in the direction parallel to the bearing surface A1, and the strip-shaped holes on the four layers can be arranged staggeredly; thus, the first guiding channel V6 has a preset length in the direction parallel to the bearing surface A1, one end of the length direction of the first guiding channel V6 is communicated with the first negative pressure cavity V1, and the other end is communicated with the second negative pressure cavity V2; thus, by setting the first guiding channel V6 as a strip-shaped or racetrack-shaped channel structure, it can adapt to the arrangement positions of other cavities, positive and negative air pressure holes, etc. in the carrier.

[0070] Please refer to Figure 2 、 Figure 3 、 Figure 7 、 Figure 8 、 Figure 12 and Figure 13 The third negative pressure cavity V3 penetrates through the sixth air path layer 60 and is formed between the fifth air path layer 50 and the bearing layer 80; specifically, the sixth air path layer 60 is provided with a strip-shaped through hole structure having a preset length in the plane parallel to the bearing surface A1, and the fifth air path layer 50 and the bearing layer 80 cover the strip-shaped through hole structure on both sides of the sixth air path layer 60, so as to form the third negative pressure cavity V3 between the fifth air path layer 50 and the bearing layer 80 based on the size (specifically, such as thickness) of the sixth air path layer 60 in the axial direction of the carrier. Correspondingly, at the position of the sixth air path layer 60 corresponding to one end of the strip-shaped through hole structure or the third negative pressure cavity V3, a ventilation hole for communicating the third negative pressure cavity V3 with the negative air pressure hole V5 is provided throughly, and at the position of the sixth air path layer 60 corresponding to the other end of the strip-shaped through hole structure or the third negative pressure cavity V3, a ventilation hole for communicating the third negative pressure cavity V3 with the second negative pressure cavity V2 is provided.

[0071] Please refer to Figure 2 、 Figure 3 and Figures 7 to 9, a second positive pressure channel P2 is formed between the connection layer 70 and the first gas path layer 10; specifically, on the side of the connection layer 70 facing the first gas path layer 10, there are provided a plurality of annular groove structures surrounding the geometric center line of the carrier, and for the convenience of distinction and description, this annular groove structure is defined as the third groove 71, and the plurality of third grooves 71 are arranged concentrically at intervals; the first gas path layer 10 is then disposed to cover the third groove 71, so as to construct the third groove 71 into a plurality of corresponding second positive pressure channels P2 by means of the first gas path layer 10.

[0072] Correspondingly, the second air guiding channel P6 can be arranged to penetrate through the first gas path layer 10 and the second gas path layer 20 in sequence along the axial direction of the carrier, so as to establish a communication relationship between the first positive pressure channel P1 and the second positive pressure channel P2 by means of the second air guiding channel P6; it can also be understood that, by providing through hole structures at the positions of the first gas path layer 10 and the second gas path layer 20 corresponding to the third groove 71 and the first groove 21, after the two layers are stacked and fixed, the second air guiding channel P6 is naturally formed based on the communication relationship between the through hole structures.

[0073] Please refer to Figure 2 , Figure 3 , Figure 7 , Figure 8 , Figure 12 and Figure 13 , a third positive pressure channel P3 is arranged to penetrate through the fourth gas path layer 40 and is formed between the third gas path layer 30 and the fifth gas path layer 50; specifically, the fourth gas path layer 40 is provided with a strip-shaped through hole structure having a preset length in a plane parallel to the bearing surface A1, and the third gas path layer 30 and the fifth gas path layer 50 cover the strip-shaped through hole structure on both sides of the fourth gas path layer 40, so that based on the dimension (specifically, such as the thickness) of the fourth gas path layer 40 in the axial direction of the carrier, a third positive pressure channel P3 can be formed between the third gas path layer 30 and the fifth gas path layer 50.

[0074] Correspondingly, the third air guiding channel P7 can be arranged to penetrate through the first gas path layer 10, the second gas path layer 20 and the third gas path layer 30 in sequence along the axial direction of the carrier, so as to connect one end of the second positive pressure channel P2 with the third positive pressure channel P3 by means of the third air guiding channel P7; at the same time, at the positions of the fifth gas path layer 50 and the sixth gas path layer 60 corresponding to the other end of the third positive pressure channel P3, there are provided through holes that connect the third positive pressure channel P3 with the corresponding positive pressure air source hole P5.

[0075] Based on this, by using the corresponding structures (such as through hole structures, groove structures, etc.) provided on each layer, the gas path structure of the carrier can be conveniently and quickly combined by stacking and fixedly arranging the connection layer 70, the intermediate layer and the bearing layer 80.

[0076] On the one hand, it can effectively reduce the processing and manufacturing difficulty of the device, especially the forming difficulty of the air pressure channels inside the carrier; meanwhile, a gas path structure with remarkable airtightness can be constructed in the carrier without configuring sealing components such as sealing rings and gaskets.

[0077] On the other hand, based on the laminated arrangement relationship between the layers, by selecting and configuring the specific structures of the layers, not only can the required air pressure channels or gas path structures be constructed inside the carrier to meet different application requirements, but also it is convenient to precisely control the setting positions, structural forms, arrangement forms, and mutual positional relationships of the various channels and pores, providing structural support for improving the stability and uniformity of the positive pressure air flow and negative pressure air flow.

[0078] In other embodiments, based on the different numbers of gas paths configured in the carrier, the number of intermediate layers can also be adaptively increased or decreased; for example, in the embodiment where only the first gas path is configured in the carrier, the first gas path layer 10 and the second gas path layer 20 can be omitted, etc., and the first negative pressure chamber V1 is formed by the laminated relationship between the connection layer 70 and the third gas path layer 30, and the second negative pressure chamber V2 and the third negative pressure chamber V3 are formed by the laminated relationship between the carrier layer 80, the sixth gas path layer 60, and the fifth gas path layer 50.

[0079] Of course, the carrier can also adopt an integral structure, that is, by setting corresponding channels in the carrier and sealing and plugging the corresponding channels, a corresponding gas path structure is constructed inside the carrier. Although the processing and manufacturing difficulty of the gas path may be relatively large, based on the structural characteristics that each chamber is at a different height position in the axial direction of the carrier, the stability and uniformity of the air flow or air pressure can also be improved.

[0080] In one embodiment, please refer to Figure 2 and Figure 3 , in the axial direction of the carrier, the sizes (i.e., thicknesses) of the connection layer 70, the second gas path layer 20, and the carrier layer 80 are greater than those of the other gas path layers (i.e., the first gas path layer 10, the third gas path layer 30, the fourth gas path layer 40, the fifth gas path layer 50, and the sixth gas path layer 60).

[0081] On the one hand, based on the differences in the thickness dimensions between the layers, it is convenient to set corresponding groove structures on the connection layer 70, the second gas path layer 20, and the carrier layer 80 to ensure the structural stability of the corresponding chambers. At the same time, it also creates favorable conditions for reducing the overall thickness dimension and self-weight of the carrier.

[0082] On the other hand, by laminating other gas path layers with smaller or thinner thickness dimensions between the connection layer 70, the second gas path layer 20, and the bearing layer 80, the connection layer 70, the second gas path layer 20, and the bearing layer 80 can be utilized to disperse the acting forces between the layers, preventing the gas path layer with a smaller thickness dimension from deforming due to lamination and extrusion, thereby ensuring the flatness or planarity of each layer, eliminating the structural gaps between the layers, and improving the airtightness of the gas path structure.

[0083] In one embodiment, please refer to Figure 12 and Figure 13 , the third positive pressure chamber P3 has a plurality of tooth-shaped structures 41, which are arranged along the length direction of the third positive pressure chamber P3, and the plurality of tooth-shaped structures 41 are arranged relatively staggeredly in the third positive pressure chamber P3; specifically, the tooth-shaped structures 41 can be arranged in the strip-shaped through-hole structures of the fourth gas path layer 40; thus, by means of the tooth-shaped structures 41, not only can the flow distance of the air flow in the third positive pressure chamber P3 be extended, but also by repeatedly changing the flow direction of the air flow in the third positive pressure chamber P3, the effect of uniform air flow or air pressure can be achieved.

[0084] In other embodiments, the strip-shaped through-hole structures of the third positive pressure chamber P3 or the fourth gas path layer 40 can also be set to other structural forms, such as being arranged along a wavy track, a broken-line track, etc., which can also play the role of air flow uniformity.

[0085] As for the third negative pressure chamber V3, it can be selected and set with reference to the structural form of the third positive pressure chamber P3, which will not be elaborated here.

[0086] In one embodiment, please refer to Figures 2 to 4 and Figures 9 to 12 , the carrying device further includes a plurality of fixing member groups, which are mainly used to laminate and fix the bearing layer 80, the intermediate layer, and the connection layer 70 into an integral body to construct a complete carrier; the fixing member group includes a plurality of first fixing members 91 and a plurality of second fixing members 92, and the fixing member group can be arranged around the geometric center line of the carrier, and the plurality of fixing member groups are arranged concentrically at intervals; it can also be understood that the plurality of first fixing members 91 and the plurality of second fixing members 92 in each fixing member group are arranged at intervals along an annular track around the geometric center line of the carrier. The first fixing members 91 and the second fixing members 92 respectively pass through the connection layer 70 and a plurality of intermediate layers from the side of the connection layer 70 facing away from the intermediate layer (such as the first gas path layer 10) and are connected to the bearing layer 80, thereby laminating and fixing the plurality of intermediate layers in a clamped and pressed form between the connection layer 70 and the bearing layer 80.

[0087] In specific implementation, the first fixing member 91 and the second fixing member 92 adopt structural bodies or material bodies with different connection strengths. For example, the first fixing member 91 can adopt a screw structure made of plastic material, and the second fixing member 92 can adopt a screw structure made of metal material such as stainless steel, so that the connection strength of the second fixing member 92 is significantly stronger than that of the first fixing member 91; and in the loading device, the sum of the numbers of the first fixing members 91 is greater than the sum of the numbers of the second fixing members 92.

[0088] On the one hand, by selecting and setting the arrangement form of the fixing member group on the loading member, all the fixing members can be arranged as evenly and densely as possible on the loading member to enhance the balance of the forces on each layer, which is beneficial to improving the stability of the overall structure of the loading member; and it can also adapt to the structural layout of the air circuit in the loading member to avoid channels, air holes, etc. in the air circuit, creating conditions for improving the assembly efficiency and assembly accuracy of the loading member.

[0089] On the other hand, based on the differences in the connection strength and quantity between the first fixing member 91 and the second fixing member 92, by using the fixing members with relatively more quantity and relatively weaker connection strength (specifically, the first fixing member 91), while realizing the stacked and fixed connection of each layer, it can effectively prevent the connection layer 70 and the loading layer 80 from excessively squeezing the intermediate layer stacked between them, preventing the intermediate layer (especially in the air circuit layers with relatively small or thin thickness dimensions) from deforming structurally, so as to ensure the flatness or planarity of each layer, eliminate the structural gaps between layers, and improve the airtightness of the air circuit structure.

[0090] By using the fixing members with relatively less quantity and relatively stronger connection strength (specifically, the second fixing member 92), it can not only effectively enhance the connection strength between the connection layer 70 and the loading layer 80 and improve the structural stability after the stacked and fixed connection of each layer; but also adjust the tightness of the stacked arrangement of each layer with the help of the second fixing member 92, so as to accurately adjust the planarity of the loading surface of the loading member while ensuring the airtightness of the air circuit structure in the loading member.

[0091] It should be noted that Figure 4 the second fixing member 92 is shown by a bold circle in the figure, but it is only for distinguishing the first fixing member 91 and the second fixing member 92, and does not represent their actual arrangement positions.

[0092] In some embodiments, based on the overall structural form of the loading member or actual needs, the connection layer 70, the intermediate layer and the loading layer 80 can also be stacked and fixed in other suitable ways, such as bonding, welding, etc.; for another example, a clamping structure can be provided between the connection layer 70 and the loading layer 80 to clamp and press multiple intermediate layers between them; all these are not elaborated here.

[0093] In one embodiment, please refer toFigure 2 , Figure 3 and Figures 9 to 12 , the carrier further has a plurality of mounting holes A3 and a plurality of connecting holes A4, and the plurality of mounting holes A3 communicate with the plurality of connecting holes A4 in one-to-one correspondence to form a plurality of mounting channels on the carrier, and the plurality of mounting channels correspond to the plurality of first fixing members 91 and the plurality of second fixing members 92 in one-to-one correspondence. Specifically, the mounting holes A3 penetrate through the connecting layer 70 and the plurality of intermediate layers along the axial direction of the carrier, and the connecting holes A4 are provided on the surface of the bearing layer 80 facing the intermediate layer (such as the sixth gas path layer 60); the first fixing member 91 and the second fixing member 92 pass through their respective corresponding mounting holes A3 and are screwed to the corresponding connecting holes A4, thereby laminating and fixing the connecting layer 70, the intermediate layer and the bearing layer 80 into one body.

[0094] By using the screwing relationship between the fixing member and the corresponding connecting hole A4, not only can the plurality of intermediate layers be clamped and pressed between the connecting layer 70 and the bearing layer 80 to facilitate the disassembly, assembly and combination of the carrier quickly, but also since there is no need to provide corresponding thread structures in the intermediate layer (together with the connecting layer 70), it also creates conditions for reducing the thickness dimension of the intermediate layer, so as to construct a pneumatic channel inside the carrier by means of the intermediate layer in the form of a thin sheet structure.

[0095] It should be noted that Figure 3 the bold dashed line in

[0096] represents the extending direction of the mounting hole A3 in the carrier. Figure 4 In one embodiment, please refer to

[0097] In one embodiment, please refer to Figure 4 , in adjacent two fixing member groups, the one closer to the geometric center line of the carrier is the first fixing group, and the one farther from the geometric center line of the carrier is the second fixing group; the sum of the number of the first fixing members 91 and the second fixing members 92 in the first fixing group is set to be: less than the sum of the number of the first fixing members 91 and the second fixing members 92 in the second fixing group.

[0098] Thus, the number of fixing members on the carrier shows the characteristic of increasing from the central side to the edge side, which is beneficial to enhancing the stability of the overall structure of the carrier. In a specific implementation, the number of the second fixing members 92 can also be set such that the number of the second fixing members 92 located on the central side of the carrier is greater than the number of the second fixing members 92 located on the edge side of the carrier.

[0099] In one embodiment, please refer to Figure 11 and Figure 2 and Figure 3 , the bearing layer 80 has a bearing portion 80a and a surrounding wall portion 80b; wherein, the connecting layer 70 and a plurality of intermediate layers are sequentially stacked on one side of the bearing portion 80a, and the surrounding wall portion 80b is arranged to enclose around the geometric center line of the carrier or the bearing portion 80a, so as to form a receiving cavity on the side of the bearing layer 80 facing the connecting layer 70 and the intermediate layers; and the connecting layer 70 and the plurality of intermediate layers are received in this receiving cavity. As for the fixing member group, the first fixing member 91 and the second fixing member 92 sequentially pass through the connecting layer 70 and the intermediate layers and then are connected to the bearing portion 80a.

[0100] Through the cooperation of the surrounding wall portion 80b and the bearing portion 80a, the connecting layer 70 and the intermediate layers can be enclosed and received inside the bearing layer, which is beneficial to improving the integrity of the overall structure of the carrier; at the same time, the surrounding wall portion 80b can be in contact and abut against the outer peripheral surfaces of the connecting layer 70 and the intermediate layers to form a protective structure from the periphery of the connecting layer 70 and the intermediate layers, so as to avoid structural gaps between adjacent layers.

[0101] In one embodiment, please refer to Figures 2 to 4 and Figures 9 to 12 , a plurality of first positioning structures A5 are provided on one side of the surrounding wall portion 80b located in the receiving cavity, and the plurality of first positioning structures A5 are arranged at intervals along the circumferential direction of the carrier (i.e., around the geometric center line of the carrier); the first positioning structure A5 can be a convex structure extending along the axial direction of the carrier (or the direction parallel to the geometric center line of the carrier) and protruding from the inner surface of the surrounding wall portion 80b; correspondingly, the connecting layer 70 and the intermediate layers are provided with second positioning structures A6 at positions corresponding to each first positioning structure A5, and the second positioning structure A6 can be a notch structure provided at the contour edge position of the connecting layer 70 and the intermediate layers; the first positioning structure A5 can be inserted into the corresponding second positioning structure A6 in a position-aligned manner.

[0102] During the process of assembling and forming the carrier, by utilizing the alignment and cooperation relationship between the first positioning structure A5 and the second positioning structure A6, the intermediate layer and the connection layer 70 can be placed layer by layer in the receiving cavity, thereby achieving the rapid assembly of the carrier. At the same time, by setting the number of positioning structures or the spacing distance in the circumferential direction of the carrier, etc., an anti-misoperation function can be achieved, avoiding misassembly of the intermediate layer or the connection layer 70 due to angular deviation in the circumferential direction of the carrier, and ensuring that each cavity and air hole can be accurately aligned.

[0103] It should be noted that Figure 3 The bold implementation in represents the extending direction of the second positioning structure A6.

[0104] In other embodiments, the first positioning structure A5 and the second positioning structure A6 can also adopt other suitable structures. For example, the first positioning structure A5 adopts a columnar structure protruding from the bearing portion 80a, and the second positioning structure A6 adopts a through-hole structure penetrating through the connection layer 70 and the intermediate layer; again, for example, one of the first positioning structure A5 and the second positioning structure A6 in alignment and cooperation adopts a convex structure and the other adopts a notch structure; and so on, which will not be elaborated here.

[0105] Please refer to Figures 1 to 13 , The embodiment of the present application further provides a detection device, including a detection device and the carrier device of the foregoing embodiment; wherein, the detection device is cooperatively arranged with the carrier device, and is mainly used for detecting and measuring the test piece carried by the carrier device; in specific implementation, a suitable detection device can be selected according to the type of the piece to be carried, the actual detection item, etc.; for example, taking the detection of various defects existing on the surface of a wafer as an example, the detection device can be composed of a camera, a light source, etc. For the specific structure, carrying principle and technical effect of the carrier device, they have been described above and will not be described here.

[0106] The above uses specific examples to elaborate on the present invention, which is only used to help understand the present invention and is not intended to limit the present invention. For those skilled in the art of the present invention, based on the idea of the present invention, several simple deductions, deformations or substitutions can also be made.

Claims

1. A carrying device, characterized in that, It includes a carrier. The surface of the carrier facing the component to be carried in its axial direction is the carrying surface, and the surfaces other than the carrying surface are connection surfaces. The carrier has a first air passage and a second air passage isolated from each other. The first air passage and the second air passage each have an air source hole, a pneumatic channel, and a plurality of pneumatic holes. Among them: The air source hole is arranged on the connection surface for connecting to an air source. The pneumatic holes are arranged on the carrying surface for providing air pressure to the component to be carried. The pneumatic channel is formed inside the carrier for guiding air flow in and out of the carrier through the air source hole and the pneumatic holes. The pneumatic channel includes a first channel, a second channel, and a plurality of third channels. The first channel, the second channel, and the third channels are at different height positions in the axial direction of the carrier. The first channel is communicated with the air source hole and the second channel. The second channel is communicated with a plurality of the third channels, and the plurality of third channels are respectively communicated with a plurality of the pneumatic holes one by one.

2. The bearing device according to claim 1, wherein In the first air passage and / or the second air passage, the number of the first channels and the number of the second channels are set to be multiple. Among them: The second channels are arranged around the geometric center line of the carrier in a surrounding manner. The plurality of second channels are arranged concentrically and at intervals, and each second channel is communicated with a plurality of the third channels. The plurality of first channels extend radially around the geometric center of the carrier. Each first channel is respectively communicated with an air source hole one by one, and the plurality of first channels and the plurality of second channels are communicated with each other alternately.

3. The carrying device according to claim 2, characterized in that, In the first air passage and the second air passage, the number of the first channels and the number of the second channels are set to be multiple. The first channels of the first air passage and the first channels of the second air passage are arranged alternately along the circumferential direction of the carrier.

4. The carrier device according to claim 3, wherein, The air source holes of the first air passage and the air source holes of the second air passage are arranged alternately along the circumferential direction of the carrier at the contour edge position of the carrier.

5. The carrying device according to claim 3, characterized in that The pneumatic holes of the first air passage and the pneumatic holes of the second air passage are arranged alternately along the radial direction and / or the circumferential direction of the carrier.

6. The carrying device according to any one of claims 1-5, characterized in that, The first channels of the first air passage and the first channels of the second air passage are at the same height position in the axial direction of the carrier. The second channels of the first air passage and the second channels of the second air passage are at different height positions in the axial direction of the carrier. The third channels of the first air passage and the third channels of the second air passage are at different height positions in the axial direction of the carrier.

7. The bearing device according to claim 6, characterized in that, In the axial direction of the carrier, the second channel of the first air passage is located on the side of the carrier close to the carrying surface, and the second channel of the second air passage is located on the side of the carrier far from the carrying surface. In the axial direction of the carrier, the first channels of the first air passage and the first channels of the second air passage are located between the second channel of the first air passage and the second channel of the second air passage.

8. The bearing device according to claim 7, characterized in that, The air pressure passage of the first air path further includes a plurality of first air guiding passages; in the axial direction of the carrier, the first air guiding passages are located between the first chamber and the second chamber of the first air path; the first air guiding passages have a preset length in the direction parallel to the bearing surface, and one end of the length direction of the first air guiding passage communicates with the first chamber of the first air path, and the other end communicates with the second chamber of the first air path.

9. The bearing device according to claim 7, wherein, The air pressure passage of the second air path further includes a plurality of second air guiding passages and a plurality of third air guiding passages; in the axial direction of the carrier, the second air guiding passages are located between the first chamber and the second chamber of the second air path, and the third air guiding passages are located between the second chamber and the third chamber of the second air path; The first chamber of the second air path communicates with the second chamber through a plurality of the second air guiding passages, and the second chamber of the second air path communicates with a plurality of the third chambers in one-to-one correspondence through a plurality of the third air guiding passages.

10. The bearing device according to any one of claims 1-5, characterized in that, The carrier includes a bearing layer, a connecting layer, and a plurality of intermediate layers; in the axial direction of the carrier, the plurality of intermediate layers are sequentially stacked and fixed between the connecting layer and the bearing layer; wherein: The air pressure passage is formed between the adjacent bearing layer, the intermediate layer, and the connecting layer, the air source hole penetrates the connecting layer along the axial direction of the carrier, and the air pressure hole penetrates the bearing layer along the axial direction of the carrier.

11. The bearing device according to claim 10, wherein, Among the plurality of intermediate layers, there are a first air path layer, a second air path layer, a third air path layer, a fourth air path layer, a fifth air path layer, and a sixth air path layer that are sequentially stacked between the connecting layer and the bearing layer; wherein: In the first air path, the first chamber is formed between the second air path layer and the third air path layer, the second chamber is formed between the bearing layer and the sixth air path layer, and the third chamber penetrates the sixth air path layer and is formed between the bearing layer and the fifth air path layer; In the second air path, the first chamber is formed between the second air path layer and the third air path layer, the second chamber is formed between the connecting layer and the first air path layer, and the third chamber penetrates the fourth air path layer and is formed between the third air path layer and the fifth air path layer.

12. A detection device, characterized in that, It includes a detection device and a carrier device as described in any one of claims 1-11; the detection device is arranged in cooperation with the carrier device to detect a workpiece to be carried suspended on the carrier.

Images