Automatic chip storage equipment

Abstract

The invention provides automatic chip storage equipment, and relates to the technical field of semiconductor production equipment, and the equipment comprises a goods shelf mechanism which is used for forming a multi-layer chip storage warehouse area; the traveling mechanism comprises an X-axis mechanism capable of moving in the horizontal direction and a Z-axis mechanism capable of moving in the vertical direction, and the Z-axis mechanism is arranged on the X-axis mechanism in a sliding mode; the pallet fork mechanism comprises a base, a first pallet fork and a second pallet fork, the base is fixed to the moving end of the Z-axis mechanism, the first pallet fork is movably connected with the base through a first driving assembly, the second pallet fork is slidably connected with the first pallet fork through a first transmission assembly, and the first driving assembly drives the first pallet fork to move along the Y axis; and the holding and clamping mechanism is arranged on the base of the pallet fork mechanism and comprises two holding and clamping arms capable of sliding relatively and a holding and clamping driving mechanism for driving the two holding and clamping arms. Two-stage movement can be achieved only by arranging one driving mechanism, long-range movement of the Y axis is achieved while the driving structure is simplified, and the effective movement distance of the Y axis is increased.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor production equipment, and in particular to an automatic chip storage device. Background Art

[0002] In semiconductor production, a large number of chip storage and access operations are often involved. When storing and accessing chips, multiple chips are usually placed in a tray, and the tray is operated for access. Chip storage cabinets generally have multiple storage areas along the Z-axis, and in order to improve space utilization, multiple storage areas are also provided on the X-axis and Y-axis. Both the X-axis and Y-axis are arranged horizontally, and the Z-axis is arranged vertically. This structure of the chip storage cabinet causes the access mechanism of the tray to require a three-axis moving mechanism on the X-axis, Y-axis, and Z-axis. Among them, the X-axis moving mechanism generally occupies a large space and can improve the moving stability of the access mechanism. The Y-axis moving mechanism, in order to improve the space utilization of the storage area, generally relies on the X-axis moving mechanism, resulting in the limited moving distance of the Y-axis moving mechanism. Summary of the Invention

[0003] The present invention provides an automatic chip storage device, including: A shelf mechanism for forming multiple chip storage areas; A traveling mechanism, including an X-axis mechanism that can move horizontally and a Z-axis mechanism that can move vertically. The Z-axis mechanism is slidably arranged on the X-axis mechanism; A fork mechanism, including a base, a first fork, and a second fork. The base is fixed to the moving end of the Z-axis mechanism. The first fork is movably connected to the base through a first driving component. The second fork is slidably connected to the first fork through a first transmission component. The first driving component drives the first fork to move along the Y-axis. The Y-axis is arranged horizontally and intersects with the X-axis. The first transmission component includes a first transmission belt and a second transmission belt. The first end and the second end of the first transmission belt are respectively fixedly connected to the first end of the base and the first end of the second fork. The second end of the first fork is also provided with a first abutting portion, and the first transmission belt is wound around the first abutting portion. The first end and the second end of the second transmission belt are respectively fixedly connected to the second end of the base and the second end of the second fork. The first end of the first fork is also provided with a second abutting portion, and the second transmission belt is wound around the second abutting portion. The first end of the base, the first end of the first fork, and the first end of the second fork are relatively arranged. The second end of the base, the second end of the first fork, and the second end of the second fork are relatively arranged; A clamping mechanism is arranged on the base of the fork mechanism and includes two relatively slidable clamping arms and a clamping driving mechanism for driving the two clamping arms.

[0004] In an alternative embodiment, rollers are provided on both the first abutting portion and the second abutting portion, and the first conveyor belt and the second conveyor belt are respectively wound around the rollers of the first abutting portion and the second abutting portion.

[0005] In an alternative embodiment, bypass perforations are provided at both the first end and the second end of the first forklift, the second abutting portion and the first abutting portion are respectively disposed within the bypass perforations, and the second conveyor belt and the first conveyor belt respectively pass through the bypass perforations at the first end and the second end of the first forklift.

[0006] In an alternative embodiment, the first drive assembly includes a drive wheel provided on the drive motor and a rack provided on the first forklift, the drive wheel and the rack cooperate, and the drive motor is fixedly provided on the base.

[0007] In an alternative embodiment, the first drive assembly further includes at least one driven wheel, and the driven wheel cooperates with both the rack and the drive wheel.

[0008] In an alternative embodiment, sliding guide mechanisms are provided both between the first forklift and the base and between the second forklift and the first forklift.

[0009] In an alternative embodiment, the shelf mechanism includes two regions arranged symmetrically left and right, and the traveling mechanism is provided between the two regions of the shelf mechanism.

[0010] In an alternative embodiment, the clamping mechanism includes a fixed bracket fixedly provided on the base, and the clamping arms are slidably provided on the fixed bracket.

[0011] In an alternative embodiment, the clamping drive mechanism includes a drive cylinder, the driving direction of the drive cylinder is perpendicular to the sliding direction of the two clamping arms, guide grooves are provided on both clamping arms, the extending direction of the guide grooves intersects both the driving direction of the drive cylinder and the sliding direction of the clamping arms, the drive cylinder also directly drives two guide portions, and the two guide portions are respectively slidably provided within the two guide grooves.

[0012] In an alternative embodiment, the fixed bracket includes a plurality of legs and an upper top plate, the clamping arms include an upper sliding plate and a clamping bracket, the upper sliding plate is slidably connected to the upper top plate, and the clamping bracket is provided inside the plurality of legs.

[0013] The automatic storage chip device provided by the present invention has the following beneficial effects: 1. The present invention utilizes the traveling mechanism to achieve X-axis movement and Z-axis movement, and utilizes the forklift mechanism to achieve Y-axis movement, thereby achieving the three-axis movement effect of the tray, and can automatically perform three-axis movement in the shelf mechanism to realize the storage and retrieval operations of the tray; 2. The first transmission assembly includes a first transmission belt and a second transmission belt. When the first driving assembly drives the first forklift to move along the Y-axis, the two respectively achieve the transmission effects in two directions, so that the second forklift can move bidirectionally along the Y-axis, enabling the movement of the first forklift to drive the second forklift, and the second forklift is responsible for transporting the pallet to a predetermined position along the Y-axis. 3. The present invention uses the first driving assembly to drive the first forklift to move along the Y-axis, and at the same time uses the first transmission assembly to achieve the movement of the second forklift along the Y-axis. Only one driving mechanism is required to achieve two-stage movement, thus simplifying the driving structure while achieving long-range movement along the Y-axis and increasing the effective movement distance along the Y-axis. Description of the Drawings

[0014] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for use in the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0015] Figure 1 It is a schematic diagram of the overall structure of an automatic storage chip device provided by an embodiment of the present invention; Figure 2 It is a schematic diagram of the overall structure of a traveling mechanism of an automatic storage chip device provided by an embodiment of the present invention; Figure 3 It is a schematic diagram of the overall structure of a forklift mechanism of an automatic storage chip device provided by an embodiment of the present invention; Figure 4 It is a schematic cross-sectional structure diagram of a forklift mechanism of an automatic storage chip device provided by an embodiment of the present invention; Figure 5 It is a schematic diagram of the overall structure of a clamping mechanism of an automatic storage chip device provided by an embodiment of the present invention.

[0016] Icons: 100 - Shelf mechanism; 200 - Traveling mechanism; 400 - Clamping mechanism; 210 - X-axis mechanism; 220 - Z-axis mechanism; 300 - Fork mechanism; 310 - Base; 320 - First fork; 330 - Second fork; 340 - First drive assembly; 350 - First transmission assembly; 351 - First transmission belt; 352 - Second transmission belt; 321 - First abutting portion; 341 - Drive motor; 342 - Drive wheel; 323 - Rack; 343 - Driven wheel; 322 - Bypass perforation; 360 - Sliding guide mechanism; 410 - Clamping arm; 420 - Clamping drive mechanism; 430 - Fixed bracket; 421 - Drive cylinder; 411 - Guide groove; 422 - Guide portion; 431 - Leg; 432 - Upper top plate; 412 - Upper sliding plate; 413 - Clamping frame. Detailed implementation manners

[0017] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. The components of the embodiments of the present invention usually described and illustrated in the accompanying drawings here can be arranged and designed in various different configurations.

[0018] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed present invention, but merely represents selected embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts fall within the scope of protection of the present invention.

[0019] It should be noted that: Similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0020] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of the present invention is usually placed during use. It is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. In addition, the terms "first", "second", "third", etc. are only used for descriptive distinction and cannot be understood as indicating or implying relative importance.

[0021] In addition, terms such as "horizontal", "vertical", "hanging", etc. do not require the components to be absolutely horizontal or hanging, but can be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0022] In the description of the present invention, it should also be noted that, unless otherwise clearly specified and limited, the terms "set", "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0023] The following will describe in detail some embodiments of the present invention with reference to the accompanying drawings. Without conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0024] An embodiment of the present invention provides an automatic storage chip device, such as Figures 1 to 5As shown in the figure, it includes: a shelf mechanism 100 for forming a multi-layer chip storage area; a traveling mechanism 200, including an X-axis mechanism 210 that can move horizontally and a Z-axis mechanism 220 that can move vertically. The Z-axis mechanism 220 is slidably arranged on the X-axis mechanism 210; a fork mechanism 300, including a base 310, a first fork 320 and a second fork 330. The base 310 is fixed to the moving end of the Z-axis mechanism 220. The first fork 320 is movably connected to the base 310 through a first driving component 340. The second fork 330 is slidably connected to the first fork 320 through a first transmission component 350. The first driving component 340 drives the first fork 320 to move along the Y-axis. The Y-axis is arranged horizontally and intersects with the X-axis. The first transmission component 350 includes a first transmission belt 351 and a second transmission belt 352. The first end and the second end of the first transmission belt 351 are respectively fixedly connected to the first end of the base 310 and the first end of the second fork 330. A first abutting portion 321 is further provided at the second end of the first fork 320. The first transmission belt 351 is wound around the first abutting portion 321. The first end and the second end of the second transmission belt 352 are respectively fixedly connected to the second end of the base 310 and the second end of the second fork 330. A second abutting portion is further provided at the first end of the first fork 320. The second transmission belt 352 is wound around the second abutting portion. The first ends of the base 310, the first fork 320 and the second fork 330 are arranged opposite to each other. The second ends of the base 310, the first fork 320 and the second fork 330 are arranged opposite to each other; a clamping mechanism 400 is arranged on the base 310 of the fork mechanism 300, including two clamping arms 410 that can slide relative to each other and a clamping driving mechanism 420 for driving the two clamping arms 410.

[0025] Among them, Figure 1 is a schematic diagram of the overall structure of an automatic chip storage device provided by an embodiment of the present invention, Figure 2 is a schematic diagram of the overall structure of the traveling mechanism 200 of an automatic chip storage device provided by an embodiment of the present invention, Figure 3 is a schematic diagram of the overall structure of the fork mechanism 300 of an automatic chip storage device provided by an embodiment of the present invention, Figure 4 is a schematic cross-sectional structure diagram of the fork mechanism 300 of an automatic chip storage device provided by an embodiment of the present invention, Figure 5 is a schematic diagram of the overall structure of the clamping mechanism 400 of an automatic chip storage device provided by an embodiment of the present invention.

[0026] Such as Figure 1 and 2As shown, in this embodiment, the traveling mechanism 200 is utilized to achieve X-axis movement and Z-axis movement, and the forklift mechanism 300 is utilized to achieve Y-axis movement, thereby realizing the three-axis movement effect of the pallet, enabling automatic three-axis movement in the shelf mechanism 100 to achieve the operations of storing and retrieving the pallet. The X-axis, Y-axis, and Z-axis are not shown in the figure. However, taking Figure 2 as an example, the extending direction of the X-axis mechanism 210 is the X-axis, and the extending direction of the Z-axis mechanism 220 is the Z-axis. Taking Figure 3 as an example, the sequential setting direction of the first forklift 320 and the second forklift 330 is the Y-axis.

[0027] In this embodiment, as shown in Figure 3 and Figure 4 , the first transmission assembly 350 includes a first transmission belt 351 and a second transmission belt 352. When the first driving assembly 340 drives the first forklift 320 to move along the Y-axis, they respectively achieve the transmission effects in two directions, thereby enabling the second forklift 330 to move bidirectionally along the Y-axis, such that the movement of the first forklift 320 can drive the second forklift 330 to move, and the second forklift 330 is responsible for transporting the pallet to a predetermined position on the Y-axis.

[0028] Figure 3 and Figure 4 show the first end of the first transmission belt 351. The first end of the first transmission belt 351 is fixed to the first end of the base 310, and the second end of the first transmission belt 351 is fixed to the first end of the second forklift 330. Figure 3 and Figure 4 also show the structure in which the second transmission belt 352 is wound around the second abutting portion; the first end and the second end of the second transmission belt 352 are respectively connected to the base 310 and the second end of the second forklift 330. The first ends of the base 310, the first forklift 320, and the second forklift 330 are all the ends close to the Figure 3 left side in Figure 3 , and the second ends of the base 310, the first forklift 320, and the second forklift 330 are all the ends close to the

[0029] right side in Figure 3 . Taking as an example, when the first driving mechanism drives the first forklift 320 in the right direction in the figure, that is, the positive Y-axis direction, since the two ends of the first transmission belt 351 are respectively fixed to the base 310 and the second forklift 330, the movement of the first forklift 320 will cause the first abutting portion 321 to move synchronously to the right. The first abutting portion 321 pushes the first transmission belt 351, causing the second forklift 330 to move to the right accordingly. Correspondingly, when the first driving mechanism drives the forklift in the left direction in the figure, that is, the negative Y-axis direction, since the two ends of the second transmission belt 352 are respectively fixed to the base 310 and the second end of the first forklift 320, the second abutting portion will drive the first forklift 320 to move synchronously to the left when moving to the left.

[0030] Taking Figure 4 as an example, at this time, the second forklift 330 has been moved to the position in the left direction in the figure. The first driving mechanism drives the first forklift 320 in the right direction in the figure. When the first forklift 320 moves to the right, the abutting part of the first forklift 320 pushes the first conveyor belt 351, thereby driving the second forklift 330 to move synchronously to the right.

[0031] In this embodiment, the first driving component 340 is used to drive the first forklift 320 to move along the Y-axis, and at the same time, the first transmission component 350 is used to realize the movement of the second forklift 330 along the Y-axis. Only one driving mechanism needs to be set to achieve two-stage movement, so as to realize long-range movement along the Y-axis while simplifying the driving structure and improving the effective movement distance along the Y-axis.

[0032] The shelf mechanism 100 is as Figure 1 shown, having a multi-layer and multi-row storage structure. Each layer structure can be formed by a pair of angle irons and other structures to carry the tray. The X-axis mechanism 210 and the Z-axis mechanism 220 move the forklift mechanism 300 to the corresponding specific layer in the shelf mechanism 100. During this process and before, the clamping mechanism 400 is in a tightened state, and the clamping arms 410 clamp the tray to prevent the tray from moving or shaking. After the forklift mechanism 300 moves to the corresponding specific layer, the tightening mechanism is loosened, and the clamping arms 410 leave the tray. After that, the forklift mechanism 300 moves, and the tray is arranged on the second forklift 330. The first driving component 340 drives the second forklift 330 by driving the first forklift 320, so that the second forklift 330 moves a long distance along the Y-axis to a predetermined position. Subsequently, the first driving component 340 drives in the reverse direction to move the second forklift 330 out of the specific layer of the shelf mechanism 100. After the second forklift 330 moves to the predetermined position, the Z-axis mechanism 220 can move downward to make the tray fall on the storage mechanism, and then drive the second forklift 330 out of the specific layer of the shelf mechanism 100.

[0033] In this embodiment, as Figure 3 shown, both the first abutting part 321 and the second abutting part are provided with rollers, and the first conveyor belt 351 and the second conveyor belt 352 are respectively wound around the rollers of the first abutting part 321 and the second abutting part. The setting of the rollers is convenient for reducing the wear effect of the abutting part on the conveyor belt.

[0034] In this embodiment, as Figure 3As shown, bypass perforations 322 are provided at both the first end and the second end of the first forklift fork 320. The second abutting portion and the first abutting portion 321 are respectively provided in the bypass perforations 322. The second transmission belt 352 and the first transmission belt 351 respectively pass through the bypass perforations 322 at the first end and the second end of the first forklift fork 320. The bypass perforations 322 can confine the first transmission belt 351 and the second transmission belt 352 within the first forklift fork 320, preventing the first transmission belt 351 and the second transmission belt 352 from being exposed outside the first forklift fork 320 and reducing the possibility of accidental detachment or jamming of the first transmission belt 351 and the second transmission belt 352.

[0035] In this embodiment, as Figure 3 shown, the first driving assembly 340 includes a driving wheel 342 provided on the driving motor 341 and a rack 323 provided on the first forklift fork 320. The driving wheel 342 cooperates with the rack 323, and the driving motor 341 is fixedly provided on the base 310.

[0036] In this embodiment, as Figure 3 shown, the first driving assembly 340 further includes at least one driven wheel 343. The driven wheel 343 cooperates with both the rack 323 and the driving wheel 342. The driven wheel 343 can extend the cooperation distance of the rack 323 and provide a longer transmission path.

[0037] In this embodiment, as Figure 3 shown, a sliding guiding mechanism 360 is provided between the first forklift fork 320 and the base 310 and between the second forklift fork 330 and the first forklift fork 320. The sliding guiding mechanism 360 can improve the smoothness of the movement of the first forklift fork 320 and the second forklift fork 330 along the Y-axis, prevent shaking during movement, and thus avoid damaging the chips on the tray. The sliding guiding mechanism 360 can adopt forms such as linear guide rails or the form of rollers cooperating with grooves. The present application does not limit this.

[0038] In this embodiment, as Figure 1 shown, the shelf mechanism 100 includes two symmetrically arranged left and right regions, and the traveling mechanism 200 is provided between the two regions of the shelf mechanism 100. When the first driving mechanism drives the first forklift fork 320 in the positive and negative directions along the Y-axis, the first transmission belt 351 and the second transmission belt 352 can cooperate to drive the second forklift fork 330 to also move in the positive and negative directions along the Y-axis. Thus, the picking and placing operations of the second forklift fork 330 in the left and right regions of the shelf mechanism 100 can be directly realized by using the first driving mechanism.

[0039] In this embodiment, as Figure 5 shown, the clamping mechanism 400 includes a fixed bracket 430. The fixed bracket 430 is fixedly provided on the base 310, and the clamping arm 410 is slidably arranged on the fixed bracket 430.

[0040] In this embodiment, as Figure 5 shown, the clamping driving mechanism 420 includes a driving cylinder 421. The driving direction of the driving cylinder 421 is perpendicular to the sliding direction of the two clamping arms 410. Both of the two clamping arms 410 are provided with guide grooves 411. The extending direction of the guide grooves 411 intersects with both the driving direction of the driving cylinder 421 and the sliding direction of the clamping arms 410. The driving cylinder 421 also directly drives the two guiding parts 422, and the two guiding parts 422 are respectively slidably arranged in the two guide grooves 411.

[0041] In this embodiment, as Figure 5 shown, the fixed bracket 430 includes a plurality of legs 431 and an upper top plate 432. The clamping arm 410 includes an upper sliding plate 412 and a clamping bracket 413. The upper sliding plate 412 is slidably connected to the upper top plate 432, and the clamping bracket 413 is arranged inside the plurality of legs 431.

[0042] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. An automatic storage chip device, characterized in that, Including: A shelf mechanism (100) for forming a multi-layer chip storage area; A traveling mechanism (200) including an X-axis mechanism (210) movable in the horizontal direction and a Z-axis mechanism (220) movable in the vertical direction, and the Z-axis mechanism (220) is slidably disposed on the X-axis mechanism (210); A fork mechanism (300) including a base (310), a first fork (320) and a second fork (330), the base (310) is fixed to the movable end of the Z-axis mechanism (220), the first fork (320) is movably connected to the base (310) through a first driving assembly (340), the second fork (330) is slidably connected to the first fork (320) through a first transmission assembly (350), the first driving assembly (340) drives the first fork (320) to move along the Y-axis, the Y-axis is arranged in the horizontal direction and intersects with the X-axis, the first transmission assembly (350) includes a first transmission belt (351) and a second transmission belt (352), the first end and the second end of the first transmission belt (351) are respectively fixedly connected to the first end of the base (310) and the first end of the second fork (330), a first abutting portion (321) is further provided at the second end of the first fork (320), the first transmission belt (351) is wound around the first abutting portion (321), the first end and the second end of the second transmission belt (352) are respectively fixedly connected to the second end of the base (310) and the second end of the second fork (330), a second abutting portion is further provided at the first end of the first fork (320), the second transmission belt (352) is wound around the second abutting portion, the first ends of the base (310), the first fork (320) and the second fork (330) are oppositely arranged, and the second ends of the base (310), the first fork (320) and the second fork (330) are oppositely arranged; A clamping mechanism (400) is disposed on the base (310) of the fork mechanism (300), including two relatively slidable clamping arms (410) and a clamping driving mechanism (420) for driving the two clamping arms (410).

2. The automatic storage chip device according to claim 1, wherein Rollers are provided on both the first abutting portion (321) and the second abutting portion, and the first transmission belt (351) and the second transmission belt (352) are respectively wound around the rollers on the first abutting portion (321) and the second abutting portion.

3. The automatic storage chip device according to claim 1, wherein Circular through holes (322) are provided at both the first end and the second end of the first fork (320), the second abutting portion and the first abutting portion (321) are respectively disposed in the circular through holes (322), and the second transmission belt (352) and the first transmission belt (351) respectively pass through the circular through holes (322) at the first end and the second end of the first fork (320).

4. The automatic storage chip device according to claim 1, wherein, The first driving assembly (340) includes a driving wheel (342) provided on a driving motor (341) and a rack (323) provided on the first fork (320). The driving wheel (342) cooperates with the rack (323), and the driving motor (341) is fixedly provided on the base (310).

5. The automatic storage chip device according to claim 4, wherein, The first driving assembly (340) further includes at least one driven wheel (343), and the driven wheel (343) cooperates with both the rack (323) and the driving wheel (342).

6. The automatic storage chip device according to claim 1, wherein A sliding guiding mechanism (360) is provided between the first fork (320) and the base (310), and between the second fork (330) and the first fork (320).

7. The automatic storage chip device according to claim 1, wherein The shelf mechanism (100) includes two symmetrically arranged regions on the left and right, and the traveling mechanism (200) is provided between the two regions of the shelf mechanism (100).

8. The automatic storage chip device according to claim 1, wherein The clamping mechanism (400) includes a fixed bracket (430), the fixed bracket (430) is fixedly provided on the base (310), and the clamping arms (410) are slidably arranged on the fixed bracket (430).

9. The automatic storage chip device according to claim 8, characterized in that, The clamping driving mechanism (420) includes a driving cylinder (421). The driving direction of the driving cylinder (421) is perpendicular to the sliding direction of the two clamping arms (410). Guide grooves (411) are provided on both clamping arms (410). The extending direction of the guide grooves (411) intersects with both the driving direction of the driving cylinder (421) and the sliding direction of the clamping arms (410). The driving cylinder (421) directly drives two guiding parts (422), and the two guiding parts (422) are respectively slidably arranged in the two guide grooves (411).

10. The automatic storage chip device according to claim 9, characterized in that, The fixed bracket (430) includes a plurality of legs (431) and an upper top plate (432). The clamping arm (410) includes an upper sliding plate (412) and a clamping frame (413). The upper sliding plate (412) is slidably connected to the upper top plate (432), and the clamping frame (413) is arranged inside the plurality of legs (431).

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