A high-sensitivity force guiding mechanism based on coupling of thirteen-stage flexible hinges

Abstract

A high-sensitivity force guiding mechanism based on thirteen-stage flexible hinge coupling relates to the technical field of precision instruments. A main support assembly is fixedly installed in the middle of the surface of a base plate, a rotating beam assembly is suspended below the main support assembly, fine adjustment assemblies are symmetrically installed at both ends of the rotating beam assembly, two guiding modules are symmetrically arranged at the bottom of the rotating beam assembly, a vice support assembly is used to fix the two guiding modules to the surface of the base plate, and the rotating beam assembly is connected with the two guiding modules through four connecting plate spring assemblies. The rotating beam assembly is suspended below the main support assembly through a main rotating flexible hinge, two guiding modules are supported and installed below both sides of the rotating beam assembly and are connected through four connecting plate spring assemblies, a thirteen-stage flexible hinge coupling mechanism is formed, and the force and guiding requirements can be met at the same time under specific conditions.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of precision instruments, and particularly relates to a high-sensitivity force guiding mechanism based on thirteen-stage flexible hinge coupling. BACKGROUND

[0002] The high-sensitivity force guiding device is an important part of many precision instruments, which requires small stiffness in the force direction to obtain high force sensitivity, and requires high straightness in the force direction to meet the guiding requirements.

[0003] In addition, some special high-sensitivity force guiding mechanisms have higher requirements for their use environment, for example, vacuum and magnetic isolation environment. Common guiding mechanisms used in precision instruments include ball screw guiding mechanisms, air floating rail guiding mechanisms and magnetic floating rail guiding mechanisms, but these guiding mechanisms are difficult to be applied in limited use environment due to their own characteristics.

[0004] Common force measuring devices mostly use force sensors based on electronic components for measurement, but electronic components are easily disturbed by external environment, so that the output of the sensor changes or the output value of the electric signal cannot be output in real time, ultimately leading to inaccurate force measurement and hysteresis of force timing. Therefore, it is required to design a high-sensitivity force guiding mechanism which can meet the requirements of force measurement and guiding at the same time and can be applied in specific use environment. SUMMARY

[0005] To solve the problems in the background art, the present application provides a high-sensitivity force guiding mechanism based on thirteen-stage flexible hinge coupling, which suspends a rotating beam assembly below a main support assembly through a main rotating flexible hinge, supports and installs two guiding modules below both sides of the rotating beam assembly and connects them through four connecting plate spring assemblies, forms a thirteen-stage flexible hinge coupling mechanism and can meet the requirements of force measurement and guiding at the same time under specific conditions.

[0006] To achieve the above-mentioned purpose, the present application adopts the following technical solution: a high-sensitivity force guiding mechanism based on thirteen-stage flexible hinge coupling, comprising a rotating beam assembly, a main support assembly, a third connecting plate spring assembly, a base plate, a vice support assembly, a fourth connecting plate spring assembly and a guiding module;

[0007] The main support assembly is fixedly installed on the middle of the surface of the base plate;

[0008] The main support assembly is arranged with a cross beam above it, and the cross beam is installed with leg supports at both ends;

[0009] The rotating beam assembly top surface center vertically installs the main rotating flexible hinge and is connected and fixed with the suspension piece, the rotating beam assembly bottom two sides symmetrically arrange two guide modules, the rotating beam assembly two ends symmetrically install the fine adjustment assembly for leveling, and the rotating beam assembly two sides symmetrically process two vertical perforations for the installation of the third connecting plate spring assembly.

[0010] The guide module comprises a first connecting plate spring assembly, a second connecting plate spring assembly, an indirect motion assembly, a fixed end assembly and a direct motion assembly, the fixed end assembly is composed of two vertical columns arranged side by side and a U-shaped connecting rod connecting the middle positions of the two columns into one, the indirect motion assembly adopts an arc structure and is oppositely arranged at the closed side of the U-shaped connecting rod of the fixed end assembly, the direct motion assembly is arranged between the two vertical columns of the fixed end assembly, and a load to be measured connecting piece is installed at the middle position of the bottom of the direct motion assembly, the top and the two sides of the bottom of the direct motion assembly are connected with the indirect motion assembly through four first connecting plate spring assemblies, and the top and the two sides of the bottom of the indirect motion assembly are connected with the two vertical column ends of the fixed end assembly through four second connecting plate spring assemblies.

[0011] The auxiliary support assembly fixes and installs the fixed end assemblies of the two guide modules with the surface of the base plate.

[0012] The number of the third connecting plate spring assemblies is two, and the two third connecting plate spring assemblies connect the two sides of the rotating beam assembly with the indirect motion assemblies of the two guide modules.

[0013] The number of the fourth connecting plate spring assemblies is two, and the two fourth connecting plate spring assemblies connect the two ends of the rotating beam assembly with the direct motion assemblies of the two guide modules.

[0014] Further, the rotating beam assembly is symmetrically processed with four limiting grooves in the rectangular arrangement of the two side wall surfaces, the main support assembly is symmetrically installed with four limiting assemblies in the rectangular arrangement of the top of the foot support, the limiting assembly main body is an L-shaped connecting arm, one side of the arm is connected and fixed with the foot support, the other side of the arm is arranged in parallel with the side wall surface of the rotating beam assembly and is installed with a limiting screw, and the limiting screw extends into the corresponding limiting groove to limit the maximum deflection angle of the rotating beam assembly.

[0015] Further, the length of the third connecting plate spring assembly is l1, the length of the fourth connecting plate spring assembly is l2, the distance of the third connecting plate spring assembly from the center of the main rotating flexible hinge is L2, the distance of the fourth connecting plate spring assembly from the center of the main rotating flexible hinge is L1, and the relationship satisfies

[0016] Further, the fine adjustment assembly comprises a screw rod, a U-shaped connecting frame and a fine adjustment nut, the U-shaped connecting frame is horizontally arranged and connected and fixed with the end of the rotating beam body at the opening side, the screw rod is coaxially fixed outside the closed side of the U-shaped connecting frame, and the fine adjustment nut is screwed with the screw rod.

[0017] Further, the openings on both sides of the main rotating flexible hinge are symmetrical arcs, so that the main rotating flexible hinge gradually thickens from the center point to the upper and lower ends.

[0018] Further, the first connecting plate spring assembly and the second connecting plate spring assembly both adopt the structure form that a flexible spring sheet is clamped in the middle of a double-layered press plate.

[0019] Compared with the prior art, the beneficial effects of the present application are as follows: the rotating beam assembly is suspended below the main support assembly through the main rotating flexible hinge, the fine adjustment assembly is arranged at the two ends of the rotating beam assembly for leveling in the initial state, two guide modules are supported and installed below the two sides of the rotating beam assembly, each guide module horizontally oppositely arranges a direct motion assembly and an indirect motion assembly, and is connected through four pairs of connecting plate spring assemblies, the rotating beam assembly is connected with the indirect motion assemblies of the two guide modules through two connecting plate spring assemblies at the middle of the two sides, and is connected with the direct motion assemblies of the two guide modules through two connecting plate spring assemblies at the two ends, a thirteen-stage flexible hinge coupling mechanism is formed, the load is applied below the two direct motion assemblies, the stress difference can be calculated through the straightness measurement along the guide direction, the force measurement and the guide requirement can be met at the same time under specific conditions, and the measurement precision is high. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 is the overall structure schematic diagram of the high-sensitivity force guiding mechanism of the present application;

[0021] Figure 2 is the structure schematic diagram of the fine adjustment assembly in the present application;

[0022] Figure 3 is the structure schematic diagram of the rotating beam assembly in the present application;

[0023] Figure 4 is the structure schematic diagram of the limiting assembly in the present application;

[0024] Figure 5 is the structure schematic diagram of the main support assembly in the present application;

[0025] Figure 6 is the structure schematic diagram of the auxiliary support assembly in the present application;

[0026] Figure 7 is the structure schematic diagram of the first connecting plate spring assembly in the present application;

[0027] Figure 8is the structural schematic view of the second connecting plate spring assembly in the application;

[0028] Figure 9 is the structural schematic view of the third connecting plate spring assembly in the application;

[0029] Figure 10 is the structural schematic view of the fourth connecting plate spring assembly in the application;

[0030] Figure 11 is the structural schematic view of the direct motion assembly in the application;

[0031] Figure 12 is the structural schematic view of the guide module in the application;

[0032] Figure 13 is the size information marking view of the upper connecting plate spring assembly of the rotating beam assembly in the application;

[0033] Figure 14 is the application real object view of the measurement scheme in the application.

[0034] In the figure: 1, fine adjustment assembly; 2, rotating beam assembly; 3, limiting assembly; 4, main support assembly; 5, first connecting plate spring assembly; 6, second connecting plate spring assembly; 7, third connecting plate spring assembly; 8, indirect motion assembly; 9, base plate; 10, auxiliary support assembly; 11, fixed end assembly; 12, direct motion assembly; 13, fourth connecting plate spring assembly; 1-1, screw rod; 1-2, U-shaped connecting frame; 1-3, fine adjustment nut; 2-1, main rotating flexible hinge; 2-2, rotating beam body; 2-21, limiting groove; 2-22, through hole; 3-1, limiting screw; 3-2, L-shaped connecting arm; 4-1, main support frame; 4-2, suspension piece; 4-3, main support base; 4-4, cross beam; 5-1, spring sheet end plate one; 5-2, flexible spring sheet one; 5-3, spring sheet middle section plate one; 6-1, spring sheet end plate two; 6-2, flexible spring sheet two; 6-3, spring sheet middle section plate two; 7-1, hinge cover plate one; 7-2, plate spring connecting piece one; 7-3, flexible plate spring one; 10-1, auxiliary support frame; 10-2, auxiliary support base; 12-1, direct motion end; 12-2, to-be-measured load connecting piece; 13-1, hinge cover plate two; 13-2, plate spring connecting piece two; 13-3, flexible plate spring two. DETAILED DESCRIPTION

[0035] The technical solutions in the application will be described clearly and completely below in combination with the drawings in the embodiments of the application. Obviously, the described embodiments are only a part of the embodiments of the application, rather than all the embodiments of the application. Based on the embodiments in the application, all the other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the application.

[0036] This plan is for the National Key Research and Development Program (NQI) project, project number 2023YFF0612501. Figures 1-13 As shown, a high-sensitivity force-measuring and guiding mechanism based on thirteen-level flexible hinge coupling includes a rotating beam assembly 2, a main support assembly 4, a third connecting leaf spring assembly 7, a base plate 9, a secondary support assembly 10, a fourth connecting leaf spring assembly 13, and a guiding module.

[0037] Combination Figures 1-5 As shown, the main support assembly 4 is fixedly installed in the middle of the surface of the substrate 9, combined with... Figure 5 As shown, the main support assembly 4 includes a main support frame 4-1, a suspension member 4-2, a main support base 4-3, and a crossbeam 4-4. The crossbeam 4-4 is positioned above the base plate 9. The suspension member 4-2 is bolted to the middle of the bottom of the crossbeam 4-4. Support legs are bolted to both ends of the crossbeam 4-4 and fixed to the base plate 9. Each support leg consists of the main support frame 4-1 and the main support base 4-3. The top of the main support frame 4-1 is bolted to the crossbeam 4-4, and the bottom of the main support frame 4-1 is bolted to the top of the main support base 4-3. The bottom of the main support base 4-3 is bolted to the base plate 9. A rotating beam assembly 2 is suspended below the main support assembly 4, combined with... Figure 3 As shown, the rotating beam assembly 2 includes a main rotating flexible hinge 2-1 and a rotating beam body 2-2. A pre-fabricated mounting groove is formed at the center of the top surface of the rotating beam body 2-2, and the main rotating flexible hinge 2-1 is vertically mounted and fixed thereon. The top of the main rotating flexible hinge 2-1 extends out of the mounting groove and is connected and fixed to the suspension member 4-2 by bolts. The openings on both sides of the main rotating flexible hinge 2-1 are symmetrically arc-shaped, causing the main rotating flexible hinge 2-1 to gradually thicken from the center point to the upper and lower ends. Furthermore, two vertical through holes 2-22 are symmetrically machined on both sides of the mounting groove of the rotating beam body 2-2 for the subsequent installation of the third connecting leaf spring assembly 7. Four limiting grooves 2-21 are machined in a rectangular arrangement on the side wall surfaces of the rotating beam body 2-2, centered on the mounting groove, for the subsequent limiting of the limiting assembly 3. Fine-tuning components 1 are symmetrically installed at both ends of the rotating beam assembly 2, combined with… Figure 2 As shown, the fine-tuning component 1 includes a screw 1-1, a U-shaped connecting frame 1-2, and a fine-tuning nut 1-3. The U-shaped connecting frame 1-2 is horizontally arranged, and its open side is bolted to the end of the rotating beam 2-2. The screw 1-1 is coaxially fixed to the outside of the closed side of the U-shaped connecting frame 1-2. The fine-tuning nut 1-3 is screwed into the screw 1-1. By adjusting the position of the fine-tuning nuts 1-3 at both ends, the leveling operation of the rotating beam component 2 before testing is achieved. Four limiting components 3 are symmetrically installed in a rectangular arrangement on the top of the two side legs of the main support component 4, combined with... Figure 4As shown, the limiting assembly 3 includes a limiting screw 3-1 and an L-shaped connecting arm 3-2, one side of the L-shaped connecting arm 3-2 is connected and fixed with the main support frame 4-1 through bolts, and the other side of the L-shaped connecting arm 3-2 is arranged in parallel with the side wall surface of the rotating beam body 2-2 and installs the limiting screw 3-1 through the preformed screw hole, the limiting screw 3-1 extends into the limiting groove 2-21 corresponding to the side wall surface of the rotating beam body 2-2, so as to limit the maximum deflection angle of the two ends of the rotating beam assembly 2.

[0038] As shown in Figure 1 , Figures 7-8 and Figures 11-12 , two guide modules are arranged symmetrically on both sides of the bottom of the rotating beam assembly 2, as shown in Figure 12 , the guide module includes a first connecting plate spring assembly 5, a second connecting plate spring assembly 6, an indirect motion assembly 8, a fixed end assembly 11 and a direct motion assembly 12. Among them, the fixed end assembly 11 is composed of two vertical columns arranged side by side and a U-shaped connecting rod connecting the middle position of the two as a whole, the indirect motion assembly 8 adopts an arc structure and is arranged opposite to the closed side of the U-shaped connecting rod of the fixed end assembly 11. The direct motion assembly 12 is arranged between the two vertical columns of the fixed end assembly 11, as shown in Figure 11 , the direct motion assembly 12 includes a direct motion end 12-1 and a measured load connecting piece 12-2, the direct motion end 12-1 is arranged in a gap between the two vertical columns of the fixed end assembly 11 in a plate structure, the measured load connecting piece 12-2 is fixedly installed at the middle position of the bottom of the direct motion end 12-1 through bolts, and is used for carrying the test piece. The top and bottom of the direct motion end 12-1 are connected with the indirect motion assembly 8 through four first connecting plate spring assemblies 5, and the top and bottom of the indirect motion assembly 8 are connected with the end portions of the two vertical columns of the fixed end assembly 11 through four second connecting plate spring assemblies 6. The first connecting plate spring assembly 5 and the second connecting plate spring assembly 6 both adopt a structure form that a flexible spring sheet is clamped in the middle of a double-layer pressing plate, as shown in Figure 7 , the first connecting plate spring assembly 5 includes a spring sheet end pressing plate one 5-1, a flexible spring sheet one 5-2 and a spring sheet middle segment pressing plate one 5-3, the flexible spring sheet one 5-2 is clamped in the middle through two layers of the spring sheet middle segment pressing plate one 5-3 and is fixed by bolts, and the two ends of the flexible spring sheet one 5-2 are clamped through two layers of the spring sheet end pressing plate one 5-1 respectively and are fixed by bolts after being overlapped with the direct motion end 12-1 and the indirect motion assembly 8; as shown in Figure 8As shown, the second connecting leaf spring assembly 6 includes a spring end pressure plate 6-1, a flexible spring 6-2, and a spring middle section pressure plate 6-3. The flexible spring 6-2 is clamped in the middle by two layers of the spring middle section pressure plate 6-3 and then fixed with bolts. The two ends of the flexible spring 6-2 are respectively clamped by two layers of the spring end pressure plate 6-1, and are overlapped with the two columns of the indirect motion assembly 8 and the fixed end assembly 11 and then fixed with bolts.

[0039] Combination Figure 1 and Figure 6 As shown, the fixed end components 11 of the two guide modules are respectively mounted and fixed to the surface of the substrate 9 via the auxiliary support components 10, and combined with Figure 6 As shown, the secondary support assembly 10 includes a secondary support frame 10-1 and a secondary support base 10-2. The top end of the secondary support frame 10-1 is fixedly connected to the U-shaped connecting rod of the fixed end assembly 11 by bolts. The bottom end of the secondary support frame 10-1 is fixedly connected to the top end of the secondary support base 10-2 by bolts. The bottom end of the secondary support base 10-2 is fixedly connected to the base plate 9 by bolts. The two guide modules are supported by four secondary support assemblies 10 arranged in a rectangular symmetrical manner.

[0040] Combination Figure 1 , Figures 9-10 As shown, the two sides of the middle of the rotating beam assembly 2 are connected to the indirect motion components 8 of the two guide modules via two third connecting leaf spring assemblies 7, combined with... Figure 9 As shown, the third connecting leaf spring assembly 7 includes a hinge cover plate 7-1, a leaf spring connector 7-2, and a flexible leaf spring 7-3. The upper end of the flexible leaf spring 7-3 is clamped to the leaf spring connector 7-2 via the hinge cover plate 7-1 and then fixed with bolts. The leaf spring connector 7-2 passes through the corresponding through hole 2-22 of the rotating beam assembly 2 and is fixed to the top surface of the rotating beam 2-2 with bolts. The lower end of the flexible leaf spring 7-3 is clamped to the corresponding indirect motion assembly 8 via the hinge cover plate 7-1 and then fixed with bolts. Both ends of the rotating beam assembly 2 are connected to the direct motion assemblies 12 of the two guide modules via two fourth connecting leaf spring assemblies 13. Figure 10 As shown, the fourth connecting leaf spring assembly 13 includes a hinge cover plate 13-1, a leaf spring connector 13-2, and a flexible leaf spring 13-3. The upper end of the flexible leaf spring 13-3 is clamped by the hinge cover plate 13-1 and the leaf spring connector 13-2 and then fixed with bolts. The leaf spring connector 13-2 passes through the corresponding fine-tuning assembly 1 and is fixed to the top surface of the end of the rotating beam 2-2 with bolts. The lower end of the flexible leaf spring 13-3 is clamped by the hinge cover plate 13-1 and the corresponding direct motion assembly 12 and then fixed with bolts.

[0041] Through the above design, the high-sensitivity force guiding mechanism is in a symmetrical structure, and the minimum motion unit on one side of the symmetrical structure is taken as the form, which contains two first connecting plate spring assemblies 5 as four flexible hinges, two second connecting plate spring assemblies 6 as four flexible hinges, one third connecting plate spring assembly 7 as two flexible hinges, one fourth connecting plate spring assembly 13 as two flexible hinges, and one main rotating flexible hinge 2-1 as one flexible hinge, and a total of thirteen flexible hinge coupling structures.

[0042] In the initial state of the mechanism, the two sides of the measured load connecting piece 12-2 do not bear force, and the two direct motion assemblies 12 do not move, so the fourth connecting plate spring assembly 13 does not drive the rotating beam assembly 2 to deflect, and the rotating beam assembly 2 does not drive the indirect motion assembly 8 to move through the third connecting plate spring assembly 7, and since the direct motion assembly 12 and the indirect motion assembly 8 do not move, the first connecting plate spring assembly 5 and the second connecting plate spring assembly 6 of the two guiding modules do not deform. In this state, the flexible hinges at all levels do not deform, and the rotating beam body 2-2 can be adjusted to be flat by adjusting the position of the fine adjustment nut 1-3 at both ends of the rotating beam body 2-2.

[0043] In the force guiding mode, the two sides of the measured load connecting piece 12-2 are respectively subjected to force, and the two direct motion assemblies 12 move under the action of the mass difference, so the direct motion assembly 12 drives the rotating beam assembly 2 to deflect through the fourth connecting plate spring assembly 13, and the rotating beam assembly 2 drives the indirect motion assembly 8 to move through the third connecting plate spring assembly 7, and since the direct motion assembly 12 and the indirect motion assembly 8 move, the first connecting plate spring assembly 5 and the second connecting plate spring assembly 6 of the two guiding modules deform. In this mode, the flexible hinges at all levels deform, and the deformation of the hinges can calibrate the force guiding sensitivity k of the high-sensitivity force guiding mechanism, and then the displacement x of the direct motion assembly 12 can be measured through the distance measuring sensor, and the loaded force F can be calculated through the calculated force guiding sensitivity k and the measured displacement x, and the calculation formula is F=kx.

[0044] The guiding function of the high-sensitivity force guiding mechanism is realized through the guiding module, and the guiding module is combined with the measured load connecting piece 12-2, the direct motion assembly 12, the fourth connecting plate spring assembly 13, the rotating beam assembly 2, the third connecting plate spring assembly 7, and the indirect motion assembly 8. Figure 13 When the relationship between the length l1 of the flexible plate spring one 7-3, the length l2 of the flexible plate spring two 13-3, the distance L2 from the center of the flexible plate spring one 7-3 to the main rotating flexible hinge 2-1, and the distance L1 from the center of the flexible plate spring two 13-3 to the main rotating flexible hinge 2-1 satisfies , the displacement x of the direct motion assembly 12 and the displacement y of the indirect motion assembly 8 satisfy the relationship of 2:1, and the motion trajectory of the direct motion assembly 12 is a straight line, thereby realizing the guiding function.

[0045] The high-sensitivity force guiding mechanism is actually applied to load at the bottom of the two direct motion assemblies 12, and the force difference of the two sides can be calculated by measuring the displacement of one direct motion assembly 12. The straightness of the force direction (guiding direction) of the direct motion assembly 12 is measured by a collimator, and for an actual measurement scheme, the collimator device assembly, the 45-degree reflecting prism, and the mirror are shown in the figure, which includes the high-sensitivity force guiding mechanism, the collimator device assembly, the 45-degree reflecting prism, and the mirror. The 45-degree reflecting prism arranged below one of the direct motion assemblies 12 converts the measurement mode of the collimator device assembly in the horizontal direction to the measurement mode in the vertical direction, and the mirror is installed on the direct motion assembly 12 or the bottom of the load, the light path is reflected to the 45-degree reflecting prism, and then reflected back to the collimator device assembly through the 45-degree reflecting prism, and the straightness of the direct motion assembly 12 in the guiding direction is measured by the collimator device assembly to be 5 μm / 15 mm. Figure 14

[0046] It is obvious to a person skilled in the art that the present application is not limited to the details of the above-described exemplary embodiments, but can be implemented in other embodiments without departing from the spirit or essential characteristics of the present application. Therefore, the embodiments should be considered in all aspects as exemplary and non-limiting, and the scope of the present application is defined by the appended claims rather than the above description, and therefore all changes falling within the meaning and scope of the equivalent conditions of the claims are intended to be included in the present application. Any reference signs in the claims should not be considered as limiting the claims involved.

[0047] In addition, it should be understood that although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the description of the specification is only for the sake of clarity, and those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can be combined appropriately to form other embodiments that those skilled in the art can understand.​

Claims

1. A high sensitivity force sensing guide mechanism based on a thirteen stage flexure coupling, characterized by: It comprises a rotating beam assembly (2), a main support assembly (4), a third connecting plate spring assembly (7), a base plate (9), a vice support assembly (10), a fourth connecting plate spring assembly (13) and a guide module; The main support assembly (4) is fixedly installed on the middle of the surface of the base plate (9); The horizontal beam (4-4) is arranged above the main support assembly (4), and the two ends of the horizontal beam (4-4) are installed with parallel foot supports; the middle of the bottom of the horizontal beam (4-4) is installed with a suspension piece (4-2); The top surface of the rotating beam assembly (2) is vertically installed with a main rotating flexible hinge (2-1) in the center and is fixedly connected with the suspension piece (4-2); two guide modules are symmetrically arranged on the two sides of the bottom of the rotating beam assembly (2); the two ends of the rotating beam assembly (2) are symmetrically installed with fine adjustment assemblies (1) for leveling; two vertical perforations (2-22) are symmetrically processed on the side wall surface of the rotating beam assembly (2) for the installation of the third connecting plate spring assembly (7); The guide module comprises a first connecting plate spring assembly (5), a second connecting plate spring assembly (6), an indirect motion assembly (8), a fixed end assembly (11) and a direct motion assembly (12); the fixed end assembly (11) is composed of two vertical columns arranged in parallel and a U-shaped connecting rod connecting the middle positions of the two vertical columns; the indirect motion assembly (8) is in an arc structure and is oppositely arranged on the closed side of the U-shaped connecting rod of the fixed end assembly (11); the direct motion assembly (12) is arranged between the two vertical columns of the fixed end assembly (11), and a load to be measured connecting piece (12-2) is installed at the middle position of the bottom of the direct motion assembly (12); the top and bottom of the direct motion assembly (12) are connected with the indirect motion assembly (8) through four first connecting plate spring assemblies (5); the top and bottom of the indirect motion assembly (8) are connected with the two ends of the vertical columns of the fixed end assembly (11) through four second connecting plate spring assemblies (6); The vice support assembly (10) is used for fixedly installing the fixed end assemblies (11) of the two guide modules on the surface of the base plate (9); The number of the third connecting plate spring assemblies (7) is two, and the two third connecting plate spring assemblies (7) are used for connecting the two sides of the rotating beam assembly (2) with the indirect motion assemblies (8) of the two guide modules; The number of the fourth connecting plate spring assemblies (13) is two, and the two fourth connecting plate spring assemblies (13) are used for connecting the two ends of the rotating beam assembly (2) with the direct motion assemblies (12) of the two guide modules.

2. A high sensitivity force sensing guide mechanism based on thirteen stage flexure coupling according to claim 1, characterized in that: Four limiting grooves (2-21) are symmetrically processed on the two side wall surfaces of the rotating beam assembly (2) in a rectangular arrangement; four limiting assemblies (3) are symmetrically installed on the top of the foot supports of the main support assembly (4) in a rectangular arrangement; the main body of the limiting assembly (3) is an L-shaped connecting arm (3-2), one side of which is fixedly connected with the foot support, and the other side is parallelly arranged with the side wall surface of the rotating beam assembly (2) and is installed with a limiting screw (3-1); the limiting screw (3-1) extends into the corresponding limiting groove (2-21) to limit the maximum deflection angle of the rotating beam assembly (2).

3. A high sensitivity force sensing guide mechanism based on coupling of thirteen stage flexure hinges as claimed in claim 1 or 2, wherein: The length of the third connecting plate spring assembly (7) is l1, the length of the fourth connecting plate spring assembly (13) is l2, the distance from the center of the main rotary flexible hinge (2-1) to the third connecting plate spring assembly (7) is L2, the distance from the center of the main rotary flexible hinge (2-1) to the fourth connecting plate spring assembly (13) is L1, and the relationship satisfies 4. The high sensitivity force sensing guide mechanism based on thirteen stage flexure coupling according to claim 1, characterized in that: The fine adjustment assembly (1) comprises a screw rod (1-1), a U-shaped connecting frame (1-2) and a fine adjustment nut (1-3), the U-shaped connecting frame (1-2) is horizontally arranged and connected and fixed with the end of the rotating beam body (2-2) at the opening side, the screw rod (1-1) is coaxially fixed outside the closed side of the U-shaped connecting frame (1-2), and the fine adjustment nut (1-3) is screwed with the screw rod (1-1).

5. A high sensitivity force sensing guide mechanism based on thirteen stage flexure coupling as claimed in claim 1, wherein: The opening of the main rotating flexible hinge (2-1) on both sides is a symmetrical arc, so that the main rotating flexible hinge (2-1) gradually thickens from the center point to the upper and lower ends.

6. A high sensitivity force sensing guide mechanism based on thirteen stage flexure coupling as claimed in claim 1, wherein: The first connecting plate spring assembly (5) and the second connecting plate spring assembly (6) both adopt a structure form that a flexible spring sheet is clamped in the middle of a double-layer pressboard.

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