Motion simulation device of transmission equipment

Abstract

The invention provides a motion simulation device of transmission equipment, and relates to the technical field of automation. The motion simulation device comprises a driving power supply interface, a sensor interface and a control module; the control module is electrically connected with the driving power supply interface and the sensor interface. The driving power supply interface is electrically connected with a power supply end of a to-be-tested driving module; the sensor interface is electrically connected with a sensor; the control module is used for providing a standard sensing signal for a sensor interface electrically connected with a sensor of the to-be-tested driving mechanism according to a standard driving parameter of the to-be-tested driving mechanism and a power supply signal of a driving module power supply end when simulating that a driving module in the to-be-tested driving mechanism drives the motion platform; the control module is also used for receiving the sensing signal through the sensor interface electrically connected with the sensor of the non-to-be-tested driving mechanism, and determining the fault condition of the to-be-tested driving mechanism. According to the invention, the fault condition of the driving module in the transmission equipment can be rapidly detected, and the maintenance efficiency of the transmission equipment is improved.

Description

Technical Field

[0001] Embodiments of the present invention relate to the field of automation technology, and in particular, to a motion simulation device for a transmission device. Background Art

[0002] Semiconductor manufacturing is the core of the modern electronics industry. As the basic material for semiconductor devices, wafers need to be processed and transported through various automated equipment during the production process, such as etching equipment, lithography equipment, and measurement equipment, etc., to complete complex process flows. The efficiency and stability of wafer transfer equipment directly affect the overall performance of the production line.

[0003] In existing semiconductor manufacturing production lines, wafer transfer usually relies on a combination of multiple drive mechanisms to achieve precise motion. These drive mechanisms can drive the motion platform carrying the wafer through a motor or a cylinder, and each drive mechanism has different parameters such as stroke, precision, and torque, so as to achieve the automatic handling of wafers from the storage area to the processing area.

[0004] However, since the above transmission equipment includes multiple drive mechanisms, these drive mechanisms are prone to wear, jamming, or overload failures during wafer transfer. Moreover, when multiple drive mechanisms operate simultaneously, it is difficult to accurately locate the specific faulty mechanism. The commonly used replacement and troubleshooting method in the prior art requires preparing a large number of spare parts of various specifications, and the disassembly, installation, and debugging of precision drive mechanisms have high technical requirements and complex operations, significantly reducing the maintenance and repair efficiency of the transmission equipment, thereby affecting the stability and continuity of wafer processing. Summary of the Invention

[0005] The present invention provides a motion simulation device for a transmission device to quickly detect the fault conditions of the drive module in the transmission device, thereby effectively improving the maintenance and repair efficiency of the transmission device.

[0006] The first aspect of the present invention provides a motion simulation device for a transmission device. The transmission device includes a motion platform and multiple drive mechanisms; the drive mechanism includes a drive module and at least one sensor; the drive module is used to drive the motion platform to move; the sensor is arranged in the motion path of the motion platform;

[0007] The motion simulation device includes at least one drive power supply interface, multiple sensor interfaces, and a control module; the control module is electrically connected to the drive power supply interface and each of the sensor interfaces respectively;

[0008] The drive power supply interface is used to be electrically connected to the power supply terminal of the drive module to be tested;

[0009] The sensor interface is used to be electrically connected to each of the sensors respectively;

[0010] The control module is configured to obtain the standard driving parameters of the driving mechanism to be tested and the power supply signal of the power supply terminal of the driving module in the driving mechanism to be tested through the driving power supply interface when the driving module in the driving mechanism to be tested drives the moving platform, and provide a standard induction signal to the sensor interface electrically connected to the sensor of the driving mechanism to be tested according to the power supply signal and the standard driving parameters;

[0011] The control module is further configured to receive a sensing signal through the sensor interface electrically connected to the sensor of the driving mechanism that is not to be tested, and determine the fault condition of the driving mechanism to be tested according to the sensing signal.

[0012] Optionally, the driving module includes a motor driving mechanism and / or a cylinder driving mechanism; the motor driving mechanism includes a motor; the cylinder driving mechanism includes a cylinder and a cylinder solenoid valve; the cylinder solenoid valve is communicated with the internal air circuit of the cylinder; the cylinder solenoid valve is used to control the exhaust path of the cylinder; the sensor includes a position detection sensor;

[0013] The driving power supply interface includes a motor power supply interface and a solenoid valve power supply interface; the motor power supply interface is configured to be electrically connected to the power supply terminal of the motor when the driving module of the driving mechanism to be tested includes the motor driving mechanism; the solenoid valve power supply interface is configured to be electrically connected to the power supply terminal of the cylinder solenoid valve when the driving module of the driving mechanism to be tested includes the cylinder driving mechanism;

[0014] The sensor interface includes a position detection sensor interface; the position detection sensor interface is used to be electrically connected to the position detection sensor.

[0015] Optionally, the motion simulation device further includes a signal processing unit and an analog-to-digital conversion unit electrically connected between the motor power supply interface and the control module;

[0016] The signal processing unit is electrically connected to the motor power supply interface and the analog-to-digital conversion unit respectively; the signal processing unit is configured to process the power supply signal of the power supply terminal of the motor obtained by the motor power supply interface and output the processed power supply signal;

[0017] The analog-to-digital conversion unit is electrically connected to the signal processing unit and the control module respectively; the analog-to-digital conversion unit is configured to convert the processed power supply signal into a digital signal and transmit it to the control module.

[0018] Optionally, the motor driving mechanism further includes an encoder; the encoder is disposed in the motor;

[0019] The motion simulation device further includes an encoder interface; the control module is also electrically connected to the encoder interface;

[0020] The encoder interface is used to be electrically connected to the encoder in the motor drive mechanism when the drive module of the drive mechanism to be tested includes the motor drive mechanism;

[0021] The control module is further used to provide a standard encoding signal to the encoder interface electrically connected to the encoder of the drive mechanism to be tested according to the power supply signal and the standard drive parameters when the drive module in the drive mechanism to be tested drives the motion platform and the drive module of the drive mechanism to be tested includes the motor drive mechanism.

[0022] Optionally, the motion simulation device further includes:

[0023] A first level conversion unit, the first level conversion unit is respectively electrically connected to the solenoid valve power supply interface and the control module; the first level conversion unit is used to perform level conversion on the power supply signal of the cylinder solenoid valve obtained by the solenoid valve power supply interface and transmit it to the control module; and / or,

[0024] A second level conversion unit, one end of the second level conversion unit is respectively electrically connected to the encoder interface and each position detection sensor interface, and the other end of the second level conversion unit is electrically connected to the control module; the second level conversion unit is used to perform level conversion on the control signal output by the control module and transmit it to the encoder interface and each position detection sensor interface respectively.

[0025] Optionally, when the drive module includes the motor drive mechanism, the sensor further includes a home position sensor; the home position sensor is arranged at a preset origin position in the motion path of the motion platform;

[0026] The sensor interface further includes a home position sensor interface; the home position sensor interface is used to be electrically connected to the home position sensor of the drive mechanism to be tested.

[0027] Optionally, the motion simulation device further includes a rotary coding switch;

[0028] The control module is also electrically connected to the rotary coding switch;

[0029] The control module is further configured to, when the driving module of the driving mechanism to be tested drives the moving platform in simulation and the driving module of the driving mechanism to be tested includes a cylinder driving mechanism, obtain an encoding adjustment parameter based on the rotary encoding switch, and provide a standard induction signal to the sensor interface electrically connected to the sensor of the driving mechanism to be tested according to the power supply signal, the standard driving parameter, and the encoding adjustment parameter.

[0030] Optionally, the motion simulation device further includes: a circuit board; the control module, each of the driving power supply interfaces, and each of the sensor interfaces are disposed on the circuit board;

[0031] Each of the driving power supply interfaces and each of the sensor interfaces are arranged in sequence along a first direction and are located on one side of the control module; the first direction is parallel to the plane where the circuit board is located.

[0032] Optionally, the motion simulation device further includes: a power supply interface and a communication interface;

[0033] The power supply interface is configured to receive a power supply signal and supply power to the control module;

[0034] The communication interface is configured to be electrically connected to an external communication device, and the external communication device is configured to monitor the working state of the motion simulation device.

[0035] Optionally, the control module is further configured to, when the driving mechanism to be tested is working properly, obtain the standard induction signal through the sensor interface electrically connected to each sensor of the driving mechanism to be tested, and determine the standard driving parameter of the driving mechanism to be tested according to the standard induction signal.

[0036] The technical solution of the present invention is to set at least one driving power supply interface, multiple sensor interfaces and a control module in a motion simulation device, and set the control module to be electrically connected to the driving power supply interface and each sensor interface respectively. Set the driving power supply interface to be electrically connected to the power supply terminal of the driving module to be tested, and set the sensor interfaces to be electrically connected to the sensors in each driving mechanism respectively, so that the control module can obtain the power supply signal of the power supply terminal of the driving module in the driving mechanism to be tested through the driving power supply interface, and can obtain the sensing signals sent by each sensor or provide standard induction signals to the sensors in the driving mechanism to be tested. In this way, when simulating the driving of the motion platform by the driving module in the driving mechanism to be tested, the control module can provide standard induction signals to the sensor interfaces electrically connected to the sensors of the driving mechanism to be tested according to the standard driving parameters and the power supply signal, so as to simulate the motion state of the motion platform in the driving mechanism to be tested. At the same time, the control module can also receive the sensing signals through the sensor interfaces electrically connected to the sensors of the driving mechanisms other than the driving mechanism to be tested, and determine the fault conditions of the driving mechanism to be tested according to the sensing signals, so as to quickly detect the fault conditions of the driving mechanism to be tested in the transmission device, avoid the high cost and complex operation of the traditional replacement and troubleshooting method, thereby reducing the downtime of the transmission device, improving the maintenance and repair efficiency of the transmission device, and ensuring the continuity and stability of the wafer production line.

[0037] It should be understood that the content described in this part is not intended to identify the key or important features of the embodiments of the present invention, nor is it used to limit the scope of the present invention. Other features of the present invention will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0039] Figure 1 is a schematic structural diagram of a transmission device provided by an embodiment of the present invention;

[0040] Figure 2 is a schematic structural diagram of a motion simulation device provided by an embodiment of the present invention;

[0041] Figure 3 is a schematic structural diagram of another transmission device provided by an embodiment of the present invention;

[0042] Figure 4 is a schematic structural diagram of another transmission device provided by an embodiment of the present invention;

[0043] Figure 5 It is a schematic structural diagram of another motion simulation device provided by an embodiment of the present invention. Detailed implementation manners

[0044] In order to enable those skilled in the art to better understand the solution of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0045] It should be noted that the terms "first", "second", etc. in the description and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and do not have to be used to describe a specific order or sequence. It should be understood that such data can be interchanged under appropriate circumstances so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device that includes a series of steps or units does not have to be limited to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0046] Figure 1 It is a schematic structural diagram of a transmission device provided by an embodiment of the present invention. As Figure 1 shown, the transmission device includes a motion platform 01 and a plurality of drive mechanisms 02; the drive mechanism 02 includes a drive module 03 and at least one sensor 04; the drive module 03 is used to drive the motion platform 01 to move; the sensor 04 is arranged in the motion path of the motion platform 01.

[0047] Among them, the transfer device can be specifically understood as a device used to transfer wafers in a semiconductor production line. The transfer device can complete the point-to-point transfer task of wafers to ensure the smooth flow of wafers in the production line. Specifically, the transfer device includes a moving platform 01 and a plurality of driving mechanisms 02. The moving platform 01 is used to carry the wafer and move along a specific path. The plurality of driving mechanisms 02 can cooperate to complete the multi-dimensional and efficient transfer of the wafer in three-dimensional space. Exemplarily, the driving mechanism 02 can include a first driving mechanism 021, a second driving mechanism 022, and a third driving mechanism 023. The first driving mechanism 021 can specifically be a translation component, which is used to drive the moving platform 01 to move in the horizontal direction, that is, the X-axis direction, so as to transfer the wafer from the initial position to the entrance of the processing device. The second driving mechanism 022 can specifically be a lifting component, which is used to drive the moving platform 01 to move in a direction perpendicular to the horizontal direction, that is, the Y-axis direction, so as to adjust the alignment position of the wafer in the processing device. The third driving mechanism 023 can specifically be a rotating component, which is used to drive the moving platform 01 to perform a rotational motion, so as to adjust the angle or direction of the wafer to ensure that the wafer is aligned with the device or meets specific process requirements during processing. The driving mechanism 02 includes a driving module 03 and one or more sensors 04. The driving module 03 is used to provide power for the moving platform 01 to drive it to move along a specific path. The sensor 04 is arranged in the moving path of the moving platform 01. It can be understood that a baffle is arranged on the moving platform 01. When the driving module 03 drives the moving platform 01 to move, the baffle arranged on the moving platform 01 will sequentially pass through the detection areas of the respective sensors 04, so as to sequentially trigger the respective sensors 04, and the respective sensors 04 will sequentially change the level state. Therefore, by obtaining the sensing signals sent by the respective sensors 04 in the driving mechanism 02, the movement of the moving platform 01 in the preset moving path can be determined. The number of sensors 04 arranged in the moving path of the moving platform 01 can be set according to actual needs, and the present invention does not make specific limitations thereon.

[0048] It can also be understood that when the first driving mechanism 021 is a translation component, the second driving mechanism 022 is a lifting component, and the third driving mechanism 023 is a rotating component, the motion state of the motion platform 01 on the translation component can be determined by the relative position between the lifting component and the translation component, that is, the motion platform 01 moves along the X-axis on the translation component with the lifting component, and the lifting component will trigger the sensor 04 on the path of the translation component to be able to judge the translation position of the motion platform 01; the motion state of the motion platform 01 on the lifting component can be determined by the relative position between the rotating component and the lifting component, that is, the motion platform 01 moves up and down along the Y-axis on the lifting component with the rotating component, and the rotating component will trigger the sensor 04 on the path of the lifting component to be able to judge the lifting height of the motion platform 01; the motion state of the motion platform 01 on the rotating component can be determined by the rotation angle sensor in the rotating component, and the rotation angle sensor outputs a pulse signal to be able to calculate the rotation angle of the motion platform 01. Thus, the motion state of the motion platform 01 on different driving mechanisms can be accurately determined, providing support for the precise positioning of the wafer transfer system.

[0049] In addition, the transmission device may further include a transmission control module 05. The transmission control module 05 is connected to the drive module 03. The transmission control module 05 is used to provide a power supply signal to the drive module 03 so that the drive module 03 can drive the moving platform 01 to move. At the same time, the transmission control module 05 is also electrically connected to each sensor 04. The transmission control module 05 is further used to respectively obtain the sensing signals sent by each sensor 04, so as to be able to detect whether the working state of the transmission device is normal. Exemplarily, when the transmission device is working normally, the moving platform 01 can sequentially trigger each sensor 04 in the first drive mechanism 021, the second drive mechanism 022, and the third drive mechanism 023. The transmission control module 05 can sequentially obtain the sensing signals sent by each sensor 04 in the first drive mechanism 021, the second drive mechanism 022, and the third drive mechanism 023. The transmission control module 05 determines that the transmission device is working normally and will continuously provide a power supply signal to the drive module 03. When the transmission device is working abnormally, for example, the first drive mechanism 021 jams and the moving platform 01 cannot move as expected, each sensor 04 in the first drive mechanism 021 is not triggered on time. The transmission control module 05 detects that the sensing signals of each sensor 04 in the first drive mechanism 021 are abnormal and will immediately stop providing a power supply signal to the drive module 03. At this time, the moving platform 01 stops moving, the sensor 04 no longer feeds back the sensing signal, and the transmission control module 05 can trigger an alarm to indicate a fault in the transmission device. It can also be understood that since the transmission device includes multiple drive mechanisms 02, when the transmission device fails and triggers an alarm, the operator can only judge that the transmission device as a whole is abnormal and cannot directly locate the specific drive mechanism 02 with a fault. Therefore, it is necessary to perform motion simulation on each drive mechanism 02 one by one through a motion simulation device to quickly locate the drive mechanism 02 with a fault.

[0050] Figure 2 is a schematic structural diagram of a motion simulation device provided by an embodiment of the present invention. The motion simulation device is used to simulate the motion state of the moving platform 01 in each drive mechanism 02 in the above-mentioned transmission device, such as Figure 2As shown in the figure, the motion simulation device includes at least one drive power supply interface 1, a plurality of sensor interfaces 2, and a control module 3. The control module 3 is electrically connected to the drive power supply interface 1 and each sensor interface 2 respectively. The drive power supply interface 1 is used to be electrically connected to the power supply terminal of the drive module 03 to be measured. The sensor interface 2 is used to be electrically connected to each sensor 04 respectively. The control module 3 is used to obtain the standard drive parameters of the drive mechanism 02 to be measured and the power supply signal of the power supply terminal of the drive module 03 in the drive mechanism 02 to be measured through the drive power supply interface 1 when the drive module 03 in the drive mechanism 02 to be measured drives the motion platform 01, and provide a standard induction signal to the sensor interface 2 electrically connected to the sensor 04 of the drive mechanism 02 to be measured according to the power supply signal and the standard drive parameters. The control module 3 is further used to receive the sensing signal through the sensor interface 2 electrically connected to the sensor 04 of the drive mechanism 02 that is not to be measured, and determine the fault condition of the drive mechanism 02 to be measured according to the sensing signal.

[0051] Among them, the drive power supply interface 1 is used to be electrically connected to the power supply terminal of the drive module 03 to be measured, so that the drive power supply interface 1 can obtain the power supply signal of the power supply terminal of the drive module 03 in the drive mechanism 02 to be measured. The drive mechanism 02 to be measured can be specifically understood as the drive mechanism 02 to be detected for whether there is a fault. The motion simulation device may include one or more drive power supply interfaces 01, that is, the drive module 03 may include one or more drive forms, and the present invention does not make specific limitations on this. Each sensor interface 2 is used to be electrically connected to each sensor 04 in each drive mechanism 02 respectively, and the control module 3 is electrically connected to the drive power supply interface 1 and each sensor interface 2 respectively, so that the control module 3 can obtain the power supply signal of the power supply terminal of the drive module 03 in the drive mechanism 02 to be measured through the drive power supply interface 1, and obtain the sensing signal sent by each sensor 04 in each drive mechanism 02 or provide a standard induction signal to the sensor interface 2 electrically connected to the sensor 04 of the drive mechanism 02 to be measured through each sensor interface 2. The control module 3 may include a micro control chip, and the specific model of the micro control chip can be selected according to actual application requirements, and the present invention does not make specific limitations on this.

[0052] Before simulating the motion state of the motion platform 01 in the drive mechanism 02 to be measured through the motion simulation device, the control module 3 can learn the normal motion state of the drive mechanism 02 to be measured to determine the standard drive parameters of the drive mechanism 02 to be measured.

[0053] Optionally, the control module 3 is further used to obtain a standard induction signal through the sensor interface 2 electrically connected to each sensor 04 of the drive mechanism 02 to be measured when the drive mechanism 02 to be measured is working normally, and determine the standard drive parameters of the drive mechanism 02 to be measured according to the standard induction signal.

[0054] Specifically, when the drive mechanism 02 to be tested is operating normally, its drive module 03 can drive the moving platform 01 to move normally, so that the moving platform 01 passes through each sensor 04 in the drive mechanism 02 to be tested in sequence. Each sensor 04 will send out sensing signals in sequence, and this sensing signal can be used as a standard sensing signal. Moreover, the control module 3 can obtain this standard sensing signal through the sensor interface 2 electrically connected to each sensor 04 of the drive mechanism 02 to be tested. After the control module 3 obtains the standard sensing signal, it can determine the standard drive parameters of the drive mechanism 02 to be tested based on this standard sensing signal. By obtaining the standard drive parameters, it helps the control module 3 determine the triggering timing of each sensor 04 in the drive mechanism 02 to be tested when the drive mechanism 02 to be tested is operating normally. This triggering timing is related to the calibration drive parameters and the power supply signal of the power supply terminal of the drive module 03 in the drive mechanism 02 to be tested obtained by the drive power supply interface 1. By the control module 3 obtaining the standard sensing signal, it provides a data basis for subsequently providing the standard sensing signal to the sensor interface 2 electrically connected to the sensor 04 of the drive mechanism 02 to be tested.

[0055] After the control module 3 determines the standard drive parameters of the drive mechanism 02 to be tested, the control module 3 can provide the standard sensing signal to the sensor interface 2 electrically connected to the sensor 04 of the drive mechanism 02 to be tested according to the power supply signal of the power supply terminal of the drive module 03 in the drive mechanism 02 to be tested obtained by the drive power supply interface 1 and the standard drive parameters. It can be understood that the time period for the drive module 03 to drive the moving platform 01 to move can be determined through the power supply signal, and the moment when the sensor 04 sends out the sensing signal during the time period when the moving platform 01 moves can be determined through the standard drive parameters. Therefore, by combining the power supply signal and the standard drive parameters, the triggering timing of each sensor 04 in the drive mechanism 02 to be tested when the drive mechanism 02 to be tested is operating normally can be determined. The control module 3 provides the standard sensing signal to the sensor interface 2 according to the determined triggering timing, which can enable the sensors 04 of the drive mechanism 02 to be tested to send out sensing signals in sequence according to the triggering timing of each sensor 04 in the drive mechanism 02 to be tested when the drive mechanism 02 to be tested is operating normally. After the transmission control module 05 obtains the standard sensing signals sent out by each sensor 04 in the drive mechanism 02 to be tested, it will mistakenly think that the moving platform 01 has completed its movement in the drive mechanism 02 to be tested, thus realizing the simulation of the movement state of the moving platform 01 in the drive mechanism 02 to be tested without the need for the moving platform 01 to actually move in the drive mechanism 02 to be tested.

[0056] It can also be understood that when the transmission control module 05 detects that the sensors 04 in a certain drive mechanism 02 of the transmission device do not normally emit electrical signals, it will determine that the transmission device is operating abnormally. At this time, the moving platform 01 stops moving, and the sensors 04 in each drive mechanism 02 of the transmission device no longer emit sensing signals. After simulating the faulty drive mechanism 02 through the motion simulation device, the sensors 04 in the faulty drive mechanism 02 will emit standard induction signals. At this time, the transmission control module 05 will determine that the transmission device is operating normally and will continuously provide a power supply signal to the drive module 03. The drive modules 03 in other drive mechanisms 02 without faults will continue to drive the moving platform 01 to move, and the sensors 04 in each drive mechanism 02 of the transmission device will continue to emit sensing signals. Therefore, after simulating the motion state of the moving platform 01 in the drive mechanism 02 to be tested through the motion simulation device, the control module 3 can also receive sensing signals through the sensor interface 2 electrically connected to the sensors 04 of the drive mechanisms 02 other than the drive mechanism 02 to be tested, and determine the fault condition of the drive mechanism 02 to be tested according to the sensing signals.

[0057] Specifically, when a fault occurs in the transmission device, if the control module 3 receives a sensing signal through the sensor interface 2 electrically connected to the sensors 04 of the drive mechanisms 02 other than the drive mechanism 02 to be tested, it is determined that the moving platform 01 can move normally in the drive mechanisms 02 other than the drive mechanism 02 to be tested, and it is further determined that the drive mechanism 02 to be tested has a fault; if the control module 3 cannot receive a sensing signal through the sensor interface 2 electrically connected to the sensors 04 of the drive mechanisms 02 other than the drive mechanism 02 to be tested, it means that the moving platform 01 still stops moving, and the control module 3 will determine that the drive mechanism 02 to be tested has no fault. At this time, the motion simulation device will continue to simulate each of the other drive mechanisms 02 that are not to be tested one by one until the faulty drive mechanism 02 is finally located. By simulating the drive mechanism 02 to be tested through the motion simulation device and judging the fault condition of the drive mechanism 02 to be tested, the fault condition of the drive mechanism 02 to be tested in the transmission device can be quickly detected, avoiding the high cost and complex operation of the traditional replacement troubleshooting method, thereby reducing the downtime of the transmission device, improving the repair and maintenance efficiency of the transmission device, and ensuring the continuity and stability of the wafer production line at the same time.

[0058] In this embodiment, at least one drive power supply interface, multiple sensor interfaces, and a control module are provided in the motion simulation device. The control module is electrically connected to the drive power supply interface and each sensor interface respectively. The drive power supply interface is electrically connected to the power supply terminal of the drive module to be tested, and the sensor interfaces are respectively electrically connected to the sensors in each drive mechanism, so that the control module can obtain the power supply signal of the power supply terminal of the drive module in the drive mechanism to be tested through the drive power supply interface, and can obtain the sensing signals sent by the sensors or provide induction signals to the sensors of the drive mechanism to be tested. In this way, when simulating the driving of the motion platform by the drive module in the drive mechanism to be tested, the control module can provide a standard induction signal to the sensor interface electrically connected to the sensors of the drive mechanism to be tested according to the standard drive parameters and the power supply signal, so as to simulate the motion state of the motion platform in the drive mechanism to be tested. At the same time, the control module can also receive the sensing signals through the sensor interfaces electrically connected to the sensors of the drive mechanisms other than the drive mechanism to be tested, and determine the fault conditions of the drive mechanism to be tested according to the sensing signals, so as to quickly detect the fault conditions of the drive mechanism to be tested in the transmission device, avoid the high cost and complex operation of the traditional replacement and troubleshooting method, reduce the downtime of the transmission device, improve the maintenance and repair efficiency of the transmission device, and ensure the continuity and stability of the wafer production line.

[0059] Optionally, Figure 3 and Figure 4 is a schematic structural diagram of another transmission device provided by an embodiment of the present invention. As Figure 3 and Figure 4 shown, the drive module 03 includes a motor drive mechanism 031 and / or a cylinder drive mechanism 032; the motor drive mechanism 031 includes a motor 033; the cylinder drive mechanism 032 includes a cylinder 034 and a cylinder solenoid valve 035; the cylinder solenoid valve 035 is communicated with the internal air path of the cylinder 034; the cylinder solenoid valve 035 is used to control the exhaust path of the cylinder 034; the sensor 04 includes a position detection sensor 041.

[0060] Specifically, the drive module 03 includes a motor drive mechanism 031 and / or a cylinder drive mechanism 032, that is, the motor or the cylinder in the drive module 03 drives the motion platform 01 to move, or the two drive modes of the motor and the cylinder in the drive module 03 are combined to drive the motion platform 01 to move. When the drive module 03 includes the motor drive mechanism 031, the motor drive mechanism 031 may include a motor 033 and a transmission mechanism connected to the output end of the motor 033. The motor 033 is used to provide power for the motor drive mechanism 031, and the motor 033 can output power through rotational motion to drive the motion platform 01 in the drive mechanism 02 to move along a specific path on the transmission mechanism.

[0061] Continue to refer to Figure 4, when the driving module 03 includes a cylinder driving mechanism 032, the cylinder driving mechanism 032 includes a cylinder 034 and a cylinder solenoid valve 035. The cylinder solenoid valve 035 is in communication with the internal air path of the cylinder 034 and is used to control the exhaust path of the cylinder 034. Exemplarily, a piston is provided inside the cylinder 034. The piston is connected to a piston transmission mechanism, and the cylinder 034 includes an air inlet, a first air outlet, and a second air outlet. The air inlet is respectively in communication with a front air chamber and a rear air chamber. The first air outlet is in communication with the front air chamber, and the second air outlet is in communication with the rear air chamber. The cylinder solenoid valve 035 may include a first power supply terminal and a second power supply terminal. When the first power supply terminal receives a power supply signal, the cylinder solenoid valve 035 controls the air inlet to communicate with the rear air chamber, so that compressed air enters the rear air chamber from the air inlet, the air pressure in the rear air chamber increases, and at the same time, it controls the second air outlet to close and the first air outlet to open, so that the air in the front air chamber is discharged through the first air outlet, the air pressure in the front air chamber decreases, and the piston moves forward under the action of the pressure difference, so that the piston transmission mechanism moves accordingly, thereby being able to drive the moving platform to move forward on the piston transmission mechanism; when the second power supply terminal receives a power supply signal, the cylinder solenoid valve 035 controls the air inlet to communicate with the front air chamber, so that compressed air enters the front air chamber from the air inlet, the air pressure in the front air chamber increases, and at the same time, it controls the second air outlet to open and the first air outlet to close, and the air in the rear air chamber is discharged through the second air outlet, the air pressure in the rear air chamber decreases, and the piston moves backward under the action of the pressure difference, so that the piston transmission mechanism moves accordingly, thereby being able to drive the moving platform to move backward on the piston transmission mechanism.

[0062] In addition, the sensor 04 includes a position detection sensor 041. The position detection sensor 041 is disposed in the movement path of the moving platform 01 and is configured to emit a sensing signal when the moving platform 01 passes through a special position in the movement path, so as to determine the movement condition of the moving platform 01 in the movement path. Exemplarily, the position detection sensor 041 may include a first limit sensor 0411, a second limit sensor 0412, and at least one intermediate position sensor. Among them, the first limit sensor 0411 is configured to emit a sensing signal when the moving platform 01 passes through a first defined position, and the first defined position can be specifically understood as the starting point of the movement stroke of the moving platform 01; the second limit sensor 0412 is configured to emit a sensing signal when the moving platform 01 passes through a second defined position, and the second defined position can be specifically understood as the end point of the movement stroke of the moving platform 01; the specific number of the intermediate position sensors can be determined according to actual needs, and the present invention does not make specific limitations thereon. Exemplarily, the intermediate position sensors may include a first intermediate sensor 0413 and a second intermediate sensor 0414. The first intermediate sensor 0413 and the second intermediate sensor 0414 are respectively configured to emit a sensing signal when the moving platform 01 passes through a first intermediate position and a second intermediate position. The first intermediate position and the second intermediate position can be specifically understood as specific positions during the movement of the moving platform 01, such as positions where the wafer transfer needs to be paused during the wafer transfer process.

[0063] Figure 5 is a schematic structural diagram of another motion simulation device provided by an embodiment of the present invention. As Figure 5 shown, the drive power supply interface 1 includes a motor power supply interface 11 and a solenoid valve power supply interface 12; the motor power supply interface 11 is configured to be electrically connected to the power supply terminal of the motor 033 when the drive module 03 of the drive mechanism 02 to be tested includes a motor drive mechanism 031; the solenoid valve power supply interface 12 is configured to be electrically connected to the power supply terminal of the cylinder solenoid valve 035 when the drive module 03 of the drive mechanism 02 to be tested includes a cylinder drive mechanism 032; the sensor interface 2 includes a position detection sensor interface 21; the position detection sensor interface 21 is configured to be electrically connected to the position detection sensor 041.

[0064] Specifically, in order to select corresponding simulation methods for different driving modes of driving the motion platform 01 through the motor driving mechanism 031 and driving the motion platform 01 through the cylinder driving mechanism 032, the control module 3 can determine the driving mode of the driving module 03 according to the power supply signals obtained from the motor power supply interface 11 and / or the solenoid valve power supply interface 12. Exemplarily, when the control module 3 obtains the power supply signal of the motor 033 through the motor power supply interface 11 connected to the driving module 03 of the driving mechanism 02 to be measured, the control module 3 can determine that the driving module 03 of the driving mechanism 02 to be measured includes the motor driving mechanism 031; when the control module 3 obtains the power supply signal of the cylinder solenoid valve 035 through the solenoid valve power supply interface 12 connected to the driving module 03 of the driving mechanism 02 to be measured, the control module 3 can determine that the driving module 03 of the driving mechanism 02 to be measured includes the cylinder driving mechanism 032.

[0065] Among them, the motor power supply interface 11 is used to be electrically connected to the power supply end of the motor 033 when the driving module 03 of the driving mechanism 02 to be measured includes the motor driving mechanism 031, so as to obtain the power supply signal of the motor 033. The power supply signal of the motor 033 is a voltage signal. By detecting the positive and negative of this voltage signal, the target direction in which the transmission control module 05 is intended to drive the motor 033 to rotate can be judged. Exemplarily, when the voltage signal is a positive voltage, it indicates that the transmission control module 05 is intended to drive the motor 033 to rotate forward. The forward rotation of the motor 033 can be understood as the motor 033 rotating in the clockwise direction; when the voltage signal is a negative voltage, it indicates that the transmission control module 05 is intended to drive the motor 033 to rotate in reverse. The reverse rotation of the motor 033 can be understood as the motor 033 rotating in the counterclockwise direction. At the same time, by detecting the magnitude of this voltage signal, the target rotation speed in which the transmission control module 05 is intended to drive the motor 033 to rotate can be judged. Exemplarily, the higher the voltage of the voltage signal, the faster the transmission control module 05 is intended to drive the motor 033 to rotate.

[0066] The solenoid valve power supply interface 12 is used to be electrically connected to the power supply terminal of the cylinder solenoid valve 035 when the drive module 03 of the drive mechanism 02 to be measured includes a cylinder drive mechanism 032, so as to obtain the power supply signal of the cylinder solenoid valve 035. Exemplarily, the solenoid valve power supply interface 12 may include a first solenoid valve power supply interface 121 and a second solenoid valve power supply interface 122. The first solenoid valve power supply interface 121 is electrically connected to the first power supply terminal of the cylinder solenoid valve 035, and the second solenoid valve power supply interface 122 is electrically connected to the second power supply terminal of the cylinder solenoid valve 035. Thus, the power supply signal of the cylinder solenoid valve 035 obtained through the first solenoid valve power supply interface 121 and the second solenoid valve power supply interface 122 can be used to determine the target direction in which the transmission control module 05 intends to drive the moving platform 01 to move through the cylinder drive mechanism 032. For example, when the first solenoid valve power supply interface 121 obtains a power supply signal, the moving platform 01 moves forward, that is, from the first defined position to the second defined position; when the second solenoid valve power supply interface 122 obtains a power supply signal, the moving platform 01 moves backward, that is, from the second defined position to the first defined position.

[0067] In addition, the sensor interface 2 includes a position detection sensor interface 21, and the position detection sensor interface 21 is used for electrically connecting to the position detection sensor 041. Exemplarily, when the position detection sensor 041 includes a first limit sensor 0411, a second limit sensor 0412, a first intermediate sensor 0413, and a second intermediate sensor 0414, the detection sensor interface 21 may include a first limit sensor interface 211, a second limit sensor interface 212, a first intermediate sensor interface 213, and a second intermediate sensor interface 214. Among them, the first limit sensor interface 211 is used for connecting to the first limit sensor 0411, the second limit sensor interface 212 is used for connecting to the second limit sensor 0412, the first intermediate sensor interface 213 is connected to the first intermediate sensor 0413, and the second intermediate sensor interface 214 is connected to the second intermediate sensor 0414. By acquiring the sensing signals sent by the first limit sensor interface 0411 and the second limit sensor interface 0412, the control module 3 can determine the moments when the moving platform 01 passes through the first defined position and the second defined position during movement in the movement path, that is, the starting moment and the ending moment of the movement of the moving platform 01 in the movement path. By acquiring the sensing signals sent by the first intermediate sensor interface 213 and the second intermediate sensor interface 214, the control module 3 can determine the moments when the moving platform 01 passes through the first intermediate position and the second intermediate position during movement in the movement path, so as to meet the diverse positioning requirements during the wafer transfer process. The control module 3 acquires the sensing signals sent by the respective position detection sensors 041 of the to-be-tested driving mechanism 02, so as to be able to acquire the standard driving parameters of the to-be-tested driving mechanism 02, providing a data basis for subsequently determining the standard induction signals provided to the position detection sensor interface 21 electrically connected to the respective position detection sensors 041 of the to-be-tested driving mechanism 02 in combination with the power supply signal at the power supply end of the driving module 03 and the standard driving parameters.

[0068] Optionally, continuing to refer to Figure 5 , the motion simulation device further includes a signal processing unit 4 and an analog-to-digital conversion unit 5 electrically connected between the motor power supply interface 11 and the control module 3; the signal processing unit 4 is electrically connected to the motor power supply interface 11 and the analog-to-digital conversion unit 5 respectively; the signal processing unit 4 is used for processing the power supply signal at the power supply end of the motor 033 acquired by the motor power supply interface 11 and outputting the processed power supply signal; the analog-to-digital conversion unit 5 is electrically connected to the signal processing unit 4 and the control module 3 respectively; the analog-to-digital conversion unit 5 is used for converting the processed power supply signal into a digital signal and transmitting it to the control module 3.

[0069] Specifically, the signal processing unit 4 and the analog-to-digital conversion unit 5 are electrically connected between the motor power supply interface 11 and the control module 3. The signal processing unit 4 is electrically connected to the motor power supply interface 11 and the analog-to-digital conversion unit 5 respectively, so that the power supply signal of the motor 033 obtained by the motor power supply interface 11 can first be signal-processed by the signal processing unit 4 to remove the noise in the power supply signal of the motor 033 and adjust the amplitude of the power supply signal of the motor 033 to generate a stable analog voltage signal, and this analog voltage signal can be transmitted to the analog-to-digital conversion unit 5. The analog-to-digital conversion unit 5 is electrically connected to the signal processing unit 4 and the control module 3 respectively, so that the analog voltage signal can be converted into a digital voltage signal by the analog-to-digital conversion unit 5 for the control module 3 to process. This digital voltage signal is transmitted to the control module 3, so that the control module 3 can judge the target direction and target speed for driving the motor to rotate of the transmission control module 05. The control module 3 obtains the power supply signal of the motor 033 of the driving mechanism 02 to be measured, so as to determine the standard induction signal provided to the position detection sensor interface 21 electrically connected to each position detection sensor 041 of the driving mechanism 02 to be measured according to the power supply signal and the standard driving parameters of the driving mechanism 02 to be measured.

[0070] Optionally, continue to refer to Figure 3 , the motor driving mechanism 031 further includes an encoder 036; the encoder 036 is disposed in the motor 033. Continue to refer to Figure 5 , the motion simulation device further includes an encoder interface 6; the control module 3 is also electrically connected to the encoder interface 6; the encoder interface 6 is used to be electrically connected to the encoder 036 in the motor driving mechanism 031 when the driving module 03 of the driving mechanism 02 to be measured includes the motor driving mechanism 031; the control module 3 is further used to provide a standard encoding signal to the encoder interface 6 electrically connected to the encoder 036 of the driving mechanism 02 to be measured according to the power supply signal and the standard driving parameters when simulating the driving of the motion platform 01 by the driving module 03 in the driving mechanism 02 to be measured and the driving module 03 of the driving mechanism 02 to be measured includes the motor driving mechanism 031.

[0071] Specifically, the motor drive mechanism 031 further includes an encoder 036 disposed in the motor 033. The encoder 036 can be specifically understood as a device on the motor 033 for measuring the rotation direction and rotation speed of the motor 033. The pulse signal output by the encoder 036 reflects the rotation direction and rotation speed of the motor 033. Exemplarily, the encoder of the motor 033 can output two channel signals, namely, channel A signal and channel B signal. Through the phase difference between the channel A signal and the channel B signal, the actual rotation direction of the motor 033 can be accurately inferred. For example, when the rising edge of the channel A signal occurs earlier than the rising edge of the channel B signal, that is, when the channel A signal leads the channel B signal by 90 degrees, it indicates that the motor 033 is rotating forward; when the rising edge of the channel B signal occurs earlier than the rising edge of the channel A signal, that is, when the channel B signal leads the channel A signal by 90 degrees, it indicates that the motor 033 is rotating in reverse. At the same time, whenever the motor 033 rotates a certain angle, the encoder 036 will output a pulse through channel A or channel B. For example, when the motor 033 rotates one full circle, the encoder 036 will output a pulse. Therefore, the rotation speed of the motor 033 can be determined by the pulse frequency output by the encoder 036. For example, when the motor 033 rotates 10 circles per second, the pulse frequency of the encoder 036 is 10 pulses / second. Thus, the rotation speed of the motor 033 can be determined to be 10 revolutions per second, that is, 600 RPM, based on this pulse frequency.

[0072] The motion simulation device further includes an encoder interface 6. When the drive module 03 of the drive mechanism 02 to be tested includes a motor drive mechanism 031, the encoder interface 6 is electrically connected to the encoder 036 in the motor drive module 031, so that the encoder interface 6 can obtain the pulse signal output by the encoder 036. The control module 3 is also electrically connected to the encoder interface 6, so that the pulse signal output by the encoder 036 obtained by the encoder interface 6 can be transmitted to the control module 3. By comparing the power supply signal of the motor 033 and the pulse signal output by the encoder 036, the control module 3 can determine whether the actual motion state of the motor 033 conforms to the instruction of the transmission control module 05. At the same time, the control module 3 can also record the correspondence between the voltage value of the power supply signal of the motor 033 and the pulse frequency of the pulse signal, so as to establish a mapping relationship between the voltage value of the power supply signal and the pulse frequency of the pulse signal. Exemplarily, when the voltage value of the power supply signal of the motor 033 is 5V, the pulse frequency of the pulse signal output by the encoder 036 is 500Hz; when the voltage value of the power supply signal of the motor 033 increases to 10V, the pulse frequency of the pulse signal output by the encoder 036 rises to 1000Hz. Therefore, when the control module 3 is used to drive the motion platform 01 in the drive module 03 of the drive mechanism 02 to be tested, and the drive module 03 of the drive mechanism 02 to be tested includes a motor drive mechanism 031, the control module 3 is also used to determine the target pulse frequency of the pulse signal according to the power supply signal of the motor 033, the correspondence between the voltage value of the power supply signal of the motor 033 and the pulse frequency of the pulse signal, and the standard drive parameters, so that the control module 3 can provide a standard coding signal to the encoder interface 6 electrically connected to the encoder 036 of the drive mechanism 02 to be tested, so that the control encoder interface 6 can output a pulse signal according to the target pulse frequency, so as to be able to simulate the real motion state of the motor 033 without the real rotation of the motor 033.

[0073] Optionally, continuing to refer to Figure 5 , the motion simulation device further includes: a first level conversion unit 7, the first level conversion unit 7 is electrically connected to the solenoid valve power supply interface 12 and the control module 3 respectively; the first level conversion unit 7 is used to perform level conversion on the power supply signal of the cylinder solenoid valve 035 obtained by the solenoid valve power supply interface 12 and transmit it to the control module 3; and / or, a second level conversion unit 8, one end of the second level conversion unit 8 is electrically connected to the encoder interface 6 and each position detection sensor interface 21 respectively, and the other end of the second level conversion unit 8 is electrically connected to the control module 3; the second level conversion unit 8 is used to perform level conversion on the control signal output by the control module 3 and transmit it to the encoder interface 6 and each position detection sensor interface 21 respectively.

[0074] Specifically, the motion simulation device further includes a first level conversion unit 7. The first level conversion unit 7 is electrically connected to the solenoid valve power supply interface 12 and the control module 3 respectively, so that the power supply signal of the cylinder solenoid valve 035 obtained by the solenoid valve power supply interface 12 can be transmitted to the control module 3 through level conversion by the first level conversion unit 7, to ensure that the power supply signal of the cylinder solenoid valve 035 is compatible with the voltage standard of the control module 3, so that the control module 3 can obtain the power supply signal of the cylinder solenoid valve 035 according to the first solenoid valve power supply interface 121 or the second solenoid valve power supply interface 122 in the solenoid valve power supply interface 12, and judge the direction in which the cylinder driving mechanism 032 drives the motion platform 01 to move.

[0075] The motion simulation device further includes a second level conversion unit 8. One end of the second level conversion unit 8 is electrically connected to the encoder interface 6 and each position detection sensor interface 21 respectively, and the other end of the second level conversion unit 8 is electrically connected to the control module 3. It can be understood that the second level conversion unit 8 can be a bidirectional level conversion unit, that is, the pulse signal output by the encoder 036 obtained by the encoder interface 6 can be transmitted to the control module 3 through level conversion by the second level conversion unit 8, to ensure that the pulse signal output by the encoder 036 is compatible with the pulse standard of the control module 3; the sensing signals sent by each position detection sensor 041 obtained by each position detection sensor interface 21 can be transmitted to the control module 3 through level conversion by the second level conversion unit 8, to ensure that the sensing signals sent by each position detection sensor 041 are compatible with the pulse standard of the control module 3.

[0076] At the same time, the second level conversion unit 8 is also used to perform level conversion on the control signal output by the control module 3 and transmit it to the encoder interface 6 and each position detection sensor interface 21 respectively, so as to simulate the motion state of the motion platform 01 in the driving mechanism 02 to be measured. Specifically, when the control module 3 obtains the sensing signal sent by the first limit sensor 0411 through the first limit sensor interface 211, it starts to count the pulse signal output by the encoder 036, and when it obtains the sensing signal sent by the second limit sensor 0412 through the second limit sensor interface 212, it stops counting the pulse signal output by the encoder 036, so that the control module 3 can respectively determine the pulse counts of the pulse signals output by the encoder 036 corresponding to the sensing signals sent by the first limit sensor 0411, the second limit sensor 0412, the first intermediate sensor 0413 and the second intermediate sensor 0414 in the position detection sensor 041 according to the obtained pulse signal output by the encoder 036 and the standard driving parameters.

[0077] Therefore, when the drive module 03 in the drive mechanism 02 to be tested includes a motor drive module 031, the control module 3 can determine the target pulse frequency of the pulse signal and output a standard coding signal according to the power supply signal of the motor 033 and the corresponding relationship between the voltage value of the power supply signal of the motor 033 and the pulse frequency of the pulse signal when the drive mechanism 02 to be tested is working properly. The standard coding signal is level-converted by the second level conversion unit 8 and then transmitted to the encoder interface 6, so that the encoder interface 6 can output a pulse signal according to the target pulse frequency. At the same time, the control module 3 can also, according to the pulse count of the pulse signal output by the encoder 036 corresponding to the sensing signals sent by the first limit sensor 0411, the second limit sensor 0412, the first intermediate sensor 0413, and the second intermediate sensor 0414 in the position detection sensor 041, respectively provide standard sensing signals to the first limit sensor interface 211, the first intermediate sensor interface 213, the second intermediate sensor interface 214, and the second limit sensor interface 212 when the pulse signal output by the encoder interface 6 reaches the corresponding pulse count. The standard sensing signals are level-converted by the second level conversion unit 8 and then transmitted to the first limit sensor interface 211, the first intermediate sensor interface 213, the second intermediate sensor interface 214, and the second limit sensor interface 212 in sequence. Thus, the first limit sensor interface 211, the first intermediate sensor interface 213, the second intermediate sensor interface 214, and the second limit sensor interface 212 can send standard sensing signals when the pulse signal output by the encoder 036 reaches the corresponding pulse count, causing the transmission control module 05 to mistakenly think that the moving platform 01 has completed its movement in the drive mechanism 02. Therefore, on the premise that the moving platform 01 does not actually move in the drive mechanism 02 to be tested, the simulation of the motion state of the motor drive mechanism 031 of the drive mechanism 02 to be tested driving the moving platform 01 to move is realized, improving the accuracy of motion simulation and at the same time improving the maintenance and repair efficiency of the transmission equipment.

[0078] Optionally, continuing to refer to Figure 3 , when the drive module 03 includes a motor drive mechanism 031, the sensor 04 further includes a home position sensor 042; the home position sensor 042 is arranged at a preset origin position in the movement path of the moving platform 01.

[0079] Specifically, when the drive module 03 includes a motor drive mechanism 031, the sensor 04 further includes a home position sensor 042. The home position sensor 042 is arranged at a preset origin position in the movement path of the moving platform 01. The home position sensor 042 is used to send a sensing signal when the moving platform 01 passes through the preset origin position. The preset origin position can be specifically understood as the position for calibrating the movement path of the moving platform 01 during the movement of the moving platform 01.

[0080] Continue to refer to Figure 5 The sensor interface 2 further includes a home position sensor interface 22; the home position sensor interface 22 is used for electrically connecting with the home position sensor 042 of the drive mechanism 02 to be measured.

[0081] Specifically, the sensor interface 2 further includes a home position sensor interface 22, and the home position sensor interface 22 is used for electrically connecting with the home position sensor 042 of the drive mechanism 02 to be measured, so that the control module 3 can obtain the sensing signal sent by the home position sensor 042 of the drive mechanism 02 to be measured through the home position sensor interface 22, enabling the control module 3 to determine whether the moving platform 01 moves along a preset path and passes through a preset origin position according to the sensing signal sent by the home position sensor 042, so that the control module 3 can calibrate the moving path of the moving platform 01. Exemplarily, the control module 3 can determine the pulse count of the pulse signal output by the encoder 036 corresponding to the sensing signal sent by the home position sensor 042 of the drive mechanism 02 to be measured, and can compare the pulse count with the expected pulse count when the home position sensor 042 sends a sensing signal to judge whether the moving platform 01 deviates from the preset path. For example, if the expected pulse count when the home position sensor 042 sends a sensing signal in the preset path is 100, but the pulse count of the sensing signal sent by the home position sensor 042 when it is actually triggered is 110, it indicates that the moving platform 01 may deviate from the path, and it is necessary to calibrate the moving path of the motor drive mechanism 031 driving the moving platform 01 to move. Thereby, the accumulation of moving path errors caused by the long-term operation of the motor drive mechanism 031 is avoided, ensuring that the moving platform 01 can move along the preset path.

[0082] In addition, when the pulse count of the pulse signal output by the encoder 036 corresponding to the sensing signal sent by the home position sensor 042 of the drive mechanism 02 to be measured meets the expected pulse count, the control module 3 can also provide a standard sensing signal to the home position sensor interface 22 when the pulse signal output by the encoder interface 6 reaches the pre-charge pulse count, so that the home position sensor interface 22 can send a standard sensing signal when the pulse signal output by the encoder 036 reaches the expected pulse count, thereby realizing the simulation of the moving state of the moving platform 01 in the drive mechanism 02 to be measured.

[0083] It can also be understood that when the moving platform 01 is driven by the cylinder driving mechanism 032, the stroke of the moving platform 01 is usually fixed. Fiber blocks can be arranged at both ends of the moving path of the moving platform 01 to achieve physical collision stop. As a buffer device, the fiber blocks can absorb the impact energy, avoid hard collision, and ensure that the moving platform 01 can stop safely within the fixed stroke. For example, every time the moving platform 01 moves to both ends of the moving path, that is, the first limit position or the second limit position, it will hit the fiber blocks and trigger the first limit sensor 0411 or the second limit sensor 0412. Thus, the motion path calibration function can be realized by obtaining the sensing signals sent by the first limit sensor 0411 or the second limit sensor 0412, without setting an additional home position sensor.

[0084] Optionally, continuing to refer to Figure 5 , the motion simulation device further includes a rotary encoder switch 91; the control module 3 is also electrically connected to the rotary encoder switch 91; when the driving module 03 of the driving mechanism 02 to be tested drives the moving platform 01 and the driving module 03 of the driving mechanism 02 to be tested includes a cylinder driving mechanism 032, the control module 3 is further configured to obtain an encoding adjustment parameter based on the rotary encoder switch 91, and provide a standard induction signal to the sensor interface 2 electrically connected to the sensor 04 of the driving mechanism 02 to be tested according to the power supply signal, the standard driving parameter, and the encoding adjustment parameter.

[0085] Specifically, when the driving module 03 of the driving mechanism 02 to be tested includes a cylinder driving mechanism 032, the control module 3 can start timing when obtaining the sensing signal sent by the first limit sensor 0411 through the first limit sensor interface 211 when the driving mechanism 02 to be tested is working properly, and can stop timing when obtaining the sensing signal sent by the second limit sensor 0412 through the second limit sensor interface 212, so that the control module 3 can obtain the time values corresponding to the sensing signals sent by the first limit sensor 0411, the second limit sensor 0412, the first intermediate sensor 0413, and the second intermediate sensor 0414 in the position detection sensor 04 according to the timing data. For example, the first intermediate sensor sends a sensing signal at 2 s, and the second limit sensor sends a sensing signal at 5 s.

[0086] In addition, when the driving module 03 of the driving mechanism 02 to be measured drives the moving platform 01 in simulation, the control module 3 first obtains the coding adjustment parameter through the rotary coding switch 91, so as to be able to adjust the time for the first limit sensor interface 211, the first intermediate sensor interface 213, the second intermediate sensor interface 214, and the second limit sensor interface 212 to output standard induction signals. Exemplarily, the rotary coding switch 91 may include 1 - 10 gears, and the coding adjustment parameter may be 0.5 - 1.5. When the time conversion ratio set by the rotary coding switch 91 is 0.8, the control module 3 can convert the time for the first intermediate sensor interface 211 to output a standard induction signal to 1.6 s, convert the time for the second limit sensor interface 212 to output a standard induction signal to 4 s, and can sequentially control the first intermediate sensor interface 211 and the second limit sensor interface 212 to output standard induction signals at 1.6 s and 4 s respectively. Thus, without the moving platform 01 actually moving in the driving mechanism 02 to be measured, the accurate simulation of the motion state of the cylinder driving mechanism 032 of the driving mechanism 02 to be measured driving the moving platform 01 is realized, and the maintenance and repair efficiency of the transmission equipment is improved. At the same time, the simulation motion speed when the simulated cylinder driving mechanism 032 drives the moving platform 01 to move is dynamically adjusted, so that the motion simulation device can adapt to different wafer transmission requirements.

[0087] Optionally, continuing to refer to Figure 5 , the motion simulation device further includes: a circuit board 10; the control module 3, each driving power supply interface 1, and each sensor interface 2 are all arranged on the circuit board 10; each driving power supply interface 1 and each sensor interface 2 are arranged in sequence along a first direction and are located on one side of the control module 3; the first direction is parallel to the plane where the circuit board 10 is located.

[0088] Specifically, the motion simulation device may further include a circuit board 10, and the control module 3, each driving power supply interface 1, and each sensor interface 2 are all arranged on the circuit board 10. Exemplarily, the circuit board 10 may be a printed circuit board, which can integrate and support the installation of electronic components in the motion simulation device and can provide an electrical connection path to ensure smooth signal transmission between the control module 3 and each driving power supply interface 1 and each sensor interface 2. And each driving power supply interface 1 and each sensor interface 2 are arranged in sequence along a first direction parallel to the plane where the circuit board 10 is located and are located on one side of the control module 3, so that the wiring design of the circuit board 10 is simple, the signal transmission path is short, while reducing signal interference and line loss, and improving the stability of the motion simulation device. At the same time, the connection lines of external devices, such as the driving module 03 of the driving mechanism 02 to be measured and the sensor 04, can be accessed from the same side of the circuit board 10, avoiding cable crossing or detouring and reducing the wiring difficulty of the motion simulation device.

[0089] Optionally, continue to refer to Figure 5 , the motion simulation device further includes: a power interface 92 and a communication interface 93; the power interface 92 is used to receive a power supply signal and supply power to the control module 3; the communication interface 93 is used to be electrically connected to an external communication device, and the external communication device is used to monitor the working state of the motion simulation device.

[0090] Among them, the power interface 92 can be specifically understood as an electrical interface connected to an external power supply. The power interface 02 can receive the power supply signal provided by the external power supply, such as 5V, 12V or 24V DC power, and can transmit the power supply signal to the power management circuit of the circuit board 10, so that the power management circuit of the circuit board 10 can convert the power supply signal provided by the external power supply into the working voltage required by the control module 3 and supply power to the control module 3 to ensure that the motion simulation device can operate normally.

[0091] The communication interface 93 can be specifically understood as a data communication interface connected to an external communication device in a wired or wireless manner. Exemplarily, the communication interface 93 can include a serial port, a USB interface, an Ethernet interface or a wireless module, etc. The external communication device can include a host computer, a programmable logic controller (PLC) or a display screen, etc. The communication interface 93 can support bidirectional data transmission, that is, the control module 3 can transmit the working state data of the motion simulation device to the external communication device through the communication interface 93, such as whether each sensor interface 2 emits a sensing signal, the count value of the pulse signal output by the encoder 036 obtained by the encoder interface 6, the time value recorded by the control module 3, and the troubleshooting result of the fault condition of the motion mechanism 02 to be measured, etc., so that the external communication device can monitor the working state of the motion simulation device in real time and can display the working state of the motion simulation device, so that the operator can more intuitively obtain the working state of the motion simulation device and can quickly locate the faulty drive mechanism 02, improving the maintenance and repair efficiency of the transmission device. At the same time, the external communication device can also send instructions to the control module 3 through the communication interface 93 to control the working state of the control module 3, such as controlling the control module 3 to obtain a standard induction signal through the sensor interface 2 electrically connected to each sensor 04 of the drive mechanism 02 to be measured or controlling the control module 3 to provide a standard induction signal to the sensor interface 2 electrically connected to the sensor 04 of the drive mechanism 02 to be measured through an instruction. In addition, the external communication device can also adjust the parameters of the motion simulation device through the communication interface 93, such as adjusting the encoding adjustment parameters of the rotary encoding switch 91 through an instruction. Through the communication interface 93, the interaction between the motion simulation device and the external communication device is realized, so as to realize the real-time monitoring and remote control of the working state of the motion simulation device, improving the flexibility and reliability of the motion simulation device.

[0092] It can also be understood that the power interface 92 and the communication interface 93 can be arranged in sequence along a first direction parallel to the plane where the circuit board 10 is located, so that external devices, such as an external power supply and an external communication device, can be accessed from the same side of the circuit board 10, avoiding cable crossing or detouring and reducing the wiring difficulty of the motion simulation device. At the same time, the power interface 92 and the communication interface 93 can be located on one side of the control module 3 away from each drive power supply interface 1 and each sensor interface 2, so that different functional areas are formed on both sides of the control module 3, that is, the power interface 92 and the communication interface 93 are located on one side of the control module 3, and each drive power supply interface 1 and each sensor interface 2 are located on the other side of the control module 3. By separating the two groups of interfaces, the electromagnetic interference caused by the power noise generated by the power interface 92 and the communication signals transmitted by the communication interface 93 to the drive signals transmitted by each drive power supply interface 1 and the sensing signals transmitted by each sensor interface 2 is reduced, thereby improving the stability of signal transmission in the control simulation device and the accuracy of simulating the driving of the motion platform 01 by the drive module 03 in the drive mechanism 02 to be measured.

[0093] It should be understood that various forms of the processes shown above can be used, steps can be reordered, added or deleted. For example, the steps described in the present invention can be executed in parallel, sequentially or in a different order, as long as the desired results of the technical solutions disclosed in the present invention can be achieved, and no limitations are imposed herein.

[0094] The above specific embodiments do not constitute a limitation on the protection scope of the present invention. Those skilled in the art should understand that various modifications, combinations, sub - combinations and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions and improvements made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A motion simulation device for a transmission device, characterized in that, The transmission device includes a motion platform and a plurality of driving mechanisms; each driving mechanism includes a driving module and at least one sensor; the driving module is used to drive the motion platform to move; the sensor is arranged in the motion path of the motion platform; The motion simulation device includes at least one driving power supply interface, a plurality of sensor interfaces and a control module; the control module is electrically connected to the driving power supply interface and each of the sensor interfaces respectively; The driving power supply interface is used to be electrically connected to the power supply end of the driving module to be tested; The sensor interface is used to be electrically connected to each of the sensors respectively; When simulating that the driving module in the driving mechanism to be tested drives the motion platform, the control module is used to obtain the standard driving parameters of the driving mechanism to be tested, and obtain the power supply signal of the power supply end of the driving module in the driving mechanism to be tested through the driving power supply interface, and provide a standard induction signal to the sensor interface electrically connected to the sensor of the driving mechanism to be tested according to the power supply signal and the standard driving parameters; The control module is further used to receive a sensing signal through the sensor interface electrically connected to the sensor of the driving mechanism that is not to be tested, and determine the fault condition of the driving mechanism to be tested according to the sensing signal.

2. The motion simulation device of the transmission device according to claim 1, characterized in that, The driving module includes a motor driving mechanism and / or a cylinder driving mechanism; the motor driving mechanism includes a motor; the cylinder driving mechanism includes a cylinder and a cylinder solenoid valve; the cylinder solenoid valve is communicated with the internal air path of the cylinder; the cylinder solenoid valve is used to control the exhaust path of the cylinder; the sensor includes a position detection sensor; The driving power supply interface includes a motor power supply interface and a solenoid valve power supply interface; the motor power supply interface is used to be electrically connected to the power supply end of the motor when the driving module of the driving mechanism to be tested includes the motor driving mechanism; the solenoid valve power supply interface is used to be electrically connected to the power supply end of the cylinder solenoid valve when the driving module of the driving mechanism to be tested includes the cylinder driving mechanism; The sensor interface includes a position detection sensor interface; the position detection sensor interface is used to be electrically connected to the position detection sensor.

3. The motion simulation device of the transmission device according to claim 2, characterized in that, The motion simulation device further includes a signal processing unit and an analog-to-digital conversion unit electrically connected between the motor power supply interface and the control module; The signal processing unit is electrically connected to the motor power supply interface and the analog-to-digital conversion unit respectively; the signal processing unit is used to process the power supply signal of the power supply end of the motor obtained by the motor power supply interface, and output the processed power supply signal; The analog-to-digital conversion unit is electrically connected to the signal processing unit and the control module respectively; the analog-to-digital conversion unit is used to convert the processed power supply signal into a digital signal and transmit it to the control module.

4. The motion simulation device of the transmission device according to claim 2, characterized in that, The motor driving mechanism further includes an encoder; the encoder is arranged in the motor; The motion simulation device further includes an encoder interface; the control module is also electrically connected to the encoder interface; The encoder interface is used to be electrically connected to the encoder in the motor drive module when the drive module of the drive mechanism to be tested includes the motor drive mechanism. The control module is further configured to, when simulating that the drive module in the drive mechanism to be tested drives the motion platform and the drive module of the drive mechanism to be tested includes the motor drive mechanism, provide a standard encoding signal to the encoder interface that is electrically connected to the encoder of the drive mechanism to be tested according to the power supply signal and the standard drive parameters.

5. The motion simulation device of the transmission device according to claim 4, characterized in that The motion simulation device further includes: A first level conversion unit, the first level conversion unit is electrically connected to the solenoid valve power supply interface and the control module respectively; the first level conversion unit is configured to perform level conversion on the power supply signal of the cylinder solenoid valve obtained by the solenoid valve power supply interface and transmit it to the control module; and / or, A second level conversion unit, one end of the second level conversion unit is electrically connected to the encoder interface and each of the position detection sensor interfaces respectively, and the other end of the second level conversion unit is electrically connected to the control module; the second level conversion unit is configured to perform level conversion on the control signal output by the control module and transmit it to the encoder interface and each of the position detection sensor interfaces respectively.

6. The motion simulation device of the transmission device according to claim 2, characterized in that, When the drive module includes the motor drive mechanism, the sensor further includes a home position sensor; the home position sensor is arranged at a preset origin position in the motion path of the motion platform. The sensor interface further includes a home position sensor interface; the home position sensor interface is used to be electrically connected to the home position sensor of the drive mechanism to be tested.

7. The motion simulation device of the transmission device according to claim 2, characterized in that, The motion simulation device further includes a rotary encoder switch. The control module is also electrically connected to the rotary encoder switch. The control module is further configured to, when simulating that the drive module of the drive mechanism to be tested drives the motion platform and the drive module of the drive mechanism to be tested includes a cylinder drive mechanism, obtain an encoding adjustment parameter based on the rotary encoder switch, and provide a standard induction signal to the sensor interface that is electrically connected to the sensor of the drive mechanism to be tested according to the power supply signal, the standard drive parameters, and the encoding adjustment parameter.

8. The motion simulation device of the transmission device according to claim 1, characterized in that, It further includes: A circuit board; The control module, each of the drive power supply interfaces, and each of the sensor interfaces are all arranged on the circuit board. Each of the drive power supply interfaces and each of the sensor interfaces are arranged in sequence along a first direction and are located on one side of the control module; the first direction is parallel to the plane where the circuit board is located.

9. The motion simulation device of the transmission device according to claim 1, characterized in that, It further includes: A power supply interface and a communication interface; The power supply interface is used to receive a power supply signal and supply power to the control module. The communication interface is used to be electrically connected to an external communication device, and the external communication device is used to monitor the working state of the motion simulation device.

10. The motion simulation device of the transmission device according to claim 1, characterized in that, The control module is further configured to, when the driving mechanism to be tested is operating normally, obtain the standard induction signal through the sensor interface electrically connected to each of the sensors of the driving mechanism to be tested, and determine the standard driving parameters of the driving mechanism to be tested according to the standard induction signal.

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