Aerosol particle spectrum characteristic analysis method and system based on electron microscope

Abstract

The invention discloses an aerosol particle spectrum characteristic analysis method and system based on an electron microscope, and relates to the technical field of aerosol analysis. The aerosol particle spectrum characteristic analysis method based on the electron microscope comprises the following steps: carrying out aerosol particle filtering evaluation; pre-evaluating the aerosol particle spectrum; evaluating electron beam interference of an electron microscope; and evaluating the analysis accuracy of the aerosol particle spectrum characteristics. The method comprises the following steps: executing aerosol particle filtering evaluation, executing aerosol particle spectrum pre-evaluation after the aerosol particle filtering evaluation is qualified, executing aerosol particle spectrum characteristic analysis accuracy evaluation after the aerosol particle spectrum pre-evaluation is qualified, and executing aerosol particle spectrum characteristic analysis accuracy evaluation after the aerosol particle spectrum characteristic analysis accuracy evaluation is qualified. According to the method, the effect of improving the accuracy of the aerosol particle spectrum characteristic analysis is achieved, and the problem that the accuracy of the aerosol particle spectrum characteristic analysis is low due to electrostatic interference of the filter membrane in the prior art is solved.

Description

Technical Field

[0001] The present invention relates to the technical field of aerosol analysis, and particularly to a method and system for analyzing aerosol particle spectrum characteristics based on an electron microscope. Background Art

[0002] With the development of environmental monitoring technologies, the demand for aerosol particle analysis is increasing day by day. Aerosol particle spectrum characteristic analysis mainly studies the particle size distribution, concentration, chemical composition, and optical properties of solid and liquid particulate matters (i.e., aerosols) suspended in the air. Aerosol particles are characterized by small particle sizes and complex compositions. However, the impact of aerosol particles on the environment cannot be ignored. Therefore, the spectral characteristic analysis of aerosol particles poses challenges to the selection and design of equipment. The analysis results can be evaluated through an electron microscope, thereby optimizing the configuration of monitoring equipment and improving the accuracy and efficiency of aerosol particle spectrum characteristic analysis. Since the analysis process of aerosol particles is easily interfered by factors such as particle shape, size distribution, and composition diversity, the accuracy of the analysis results is affected.

[0003] In the prior art, mainly by using multiple layers of filter membranes with gradually decreasing pore sizes to filter aerosol particles, enhancing the capture ability for particles of different sizes, or using filter membranes with gradient pore sizes, that is, the pore sizes gradually decrease, enabling aerosol particles to be captured between different layers of filter membranes and preventing small-sized particles from passing through larger pore size layers.

[0004] For example, an air aerosol single-particle multimodal spectral diagnosis device and diagnosis method disclosed in the invention patent publication with the publication number CN110487686B includes a scattering light source, a deep ultraviolet light source, a near ultraviolet light source, a high-energy pulsed light source, a spectral collection and transport optical path, and a photodetector; the light beam emitted by the scattering light source is distributed at the forefront of the path of the aerosol single particle, and the light beams emitted by the deep ultraviolet light source, the near ultraviolet light source, and the high-energy pulsed light source are all located on the path of the aerosol single particle, behind the light beam emitted by the scattering light source; the same aerosol single particle passes through the light beams emitted by the scattering light source, the deep ultraviolet light source, the near ultraviolet light source, and the high-energy pulsed light source, generating scattering signals, fluorescence spectra, and laser-induced breakdown spectra, which are transmitted to the photodetector through the spectral collection and transport optical path to jointly characterize the properties of the aerosol single particle.

[0005] For example, a device and method for measuring micro-nano particles disclosed in the invention patent announcement with the announcement number CN110823772B. The device includes: a first chamber, a microporous membrane, an electrophoresis tank, and a second chamber. The microporous membrane is located between the first chamber and the electrophoresis tank, and the microporous membrane has micropores. The first chamber is connected to the electrophoresis tank through the micropores. The second chamber is adjacent to the electrophoresis tank and has a first side wall located between the second chamber and the electrophoresis tank. The first side wall has a first opening for connecting the second chamber and the electrophoresis tank. The inner diameter of the micropores is smaller than the inner diameter of the electrophoresis tank, and the inner diameter of the electrophoresis tank is smaller than the inner diameter of the second chamber. The first chamber has a first electrode, and the second chamber has a second electrode.

[0006] However, in the process of implementing the technical solution of the invention in the embodiments of the present application, it is found that the above technology has at least the following technical problems: In the prior art, with the accumulation of aerosol particles, electrostatic attraction is generated on the surface of the filter membrane, resulting in the blockage of the filter membrane, thereby causing a decrease in the filtration speed of some layers of the filter membrane, and further triggering the formation of local blockage points in some areas of the filter membrane. These blockage points will change the airflow distribution near the filter membrane, leading to an increase in the degree of blockage and the non-uniformity of the distribution of aerosol particles. Due to the electrostatic interference of the filter membrane, the accuracy of the aerosol particle spectrum characteristic analysis is low. Summary of the Invention

[0007] The embodiments of the present application provide a method and system for analyzing aerosol particle spectrum characteristics based on an electron microscope, which solve the problem of low accuracy of aerosol particle spectrum characteristic analysis due to electrostatic interference of the filter membrane in the prior art, and achieve the effect of improving the accuracy of aerosol particle spectrum characteristic analysis.

[0008] An embodiment of the present application provides a method for analyzing the spectral characteristics of aerosol particles based on an electron microscope, including the following steps: During the aerosol particle filtration process, perform an aerosol particle filtration assessment to quantitatively evaluate the qualification degree of aerosol particle filtration, and determine whether to optimize the aerosol particle filtration based on the filtration qualification conditions. The aerosol particle filtration optimization is used to improve the qualification of aerosol particle filtration during the aerosol particle filtration process; after the aerosol particle filtration assessment is qualified, perform an aerosol particle spectrum pre-assessment to quantitatively evaluate the accuracy of the aerosol particle spectrum pre-assessment, and determine whether to optimize the initial spectrum feature assessment based on the spectrum feature pre-assessment qualification conditions. The spectrum feature initial assessment optimization is used to improve the accuracy of the aerosol particle spectrum pre-assessment; after the aerosol particle spectrum pre-assessment is qualified, perform an electron microscope electron beam interference assessment to quantitatively evaluate the interference degree of the electron microscope electron beam, and determine whether to optimize the electron microscope electron beam interference based on the electron microscope qualification conditions. The electron microscope electron beam interference optimization is used to improve the anti-interference ability of the aerosol particle spectral characteristic analysis; after the electron microscope electron beam interference assessment is qualified, perform an aerosol particle spectral characteristic analysis accuracy assessment to quantitatively evaluate the accuracy of the aerosol particle spectral characteristic analysis, and determine whether to optimize the aerosol particle spectral characteristic analysis based on the spectrum feature analysis qualification conditions. The aerosol particle spectral characteristic analysis optimization is used to improve the accuracy of the aerosol particle spectral characteristic analysis.

[0009] The embodiment of the present application provides an aerosol particle spectrum feature analysis system based on an electron microscope, including the following modules: an aerosol particle filtration evaluation module, an aerosol particle spectrum pre-evaluation module, an electron microscope electron beam interference evaluation module, and an aerosol particle spectrum feature analysis accuracy evaluation module; the aerosol particle filtration evaluation module is used to perform aerosol particle filtration evaluation during the aerosol particle filtration process to quantitatively evaluate the qualified degree of aerosol particle filtration, and judge whether to perform aerosol particle filtration optimization based on the filtration qualified condition. The aerosol particle filtration optimization is used to improve the qualifiedness of aerosol particle filtration during the aerosol particle filtration process; the aerosol particle spectrum pre-evaluation module is used to perform aerosol particle spectrum pre-evaluation after the aerosol particle filtration evaluation is qualified to quantitatively evaluate the accuracy of the aerosol particle spectrum pre-evaluation, and judge whether to perform spectrum feature initial evaluation optimization based on the spectrum feature pre-evaluation qualified condition. The spectrum feature initial evaluation optimization is used to improve the accuracy of the aerosol particle spectrum pre-evaluation; the electron microscope electron beam interference evaluation module is used to perform electron microscope electron beam interference evaluation after the aerosol particle spectrum pre-evaluation is qualified to quantitatively evaluate the interference degree of the electron microscope electron beam, and judge whether to perform electron microscope electron beam interference optimization based on the electron microscope qualified condition. The electron microscope electron beam interference optimization is used to improve the anti-interference ability of the aerosol particle spectrum feature analysis; the aerosol particle spectrum feature analysis accuracy evaluation module is used to perform aerosol particle spectrum feature analysis accuracy evaluation after the electron microscope electron beam interference evaluation is qualified to quantitatively evaluate the accuracy of the aerosol particle spectrum feature analysis, and judge whether to perform aerosol particle spectrum feature analysis optimization based on the spectrum feature analysis qualified condition. The aerosol particle spectrum feature analysis optimization is used to improve the accuracy of the aerosol particle spectrum feature analysis.

[0010] One or more technical solutions provided in the embodiment of the present application have at least the following technical effects or advantages: 1. By performing aerosol particle filtration evaluation during the aerosol particle filtration process and judging whether to perform aerosol particle filtration optimization, then performing aerosol particle spectrum pre-evaluation and judging whether to perform spectrum feature initial evaluation optimization, then performing electron microscope electron beam interference evaluation and judging whether to perform electron microscope electron beam interference optimization, and finally performing aerosol particle spectrum feature analysis accuracy evaluation and judging whether to perform aerosol particle spectrum feature analysis optimization, the stability of the aerosol particle spectrum feature analysis is enhanced, and further the effect of improving the accuracy of the aerosol particle spectrum feature analysis is achieved, solving the problem of low accuracy of aerosol particle spectrum feature analysis due to electrostatic interference of the filter membrane in the prior art.

[0011] 2. By performing multi-dimensional coupling on the filtration occupancy ratio, the qualified value of aerosol particle filtration is obtained. Based on the monitored qualified value of aerosol particle filtration, it is determined whether the filtration qualified condition is met, thereby enhancing the qualifiedness of aerosol particle filtration during the aerosol particle filtration process, and further improving the qualifiedness of aerosol particle spectrum feature analysis.

[0012] 3. By performing multi-dimensional coupling on the spectral feature analysis deviation value, the accurate value of spectral feature analysis is obtained. Based on the monitored accurate value of spectral feature analysis, it is determined whether the spectral feature analysis qualified condition is met, thereby enhancing the integrity of aerosol particle spectrum feature analysis, and further improving the accuracy of aerosol particle spectrum feature analysis. Description of the Drawings

[0013] Figure 1 It is a flowchart of a method for analyzing aerosol particle spectrum characteristics based on an electron microscope provided by an embodiment of the present application; Figure 2 It is a logical framework diagram for aerosol particle filtration evaluation of a method for analyzing aerosol particle spectrum characteristics based on an electron microscope provided by an embodiment of the present application; Figure 3 It is a logical framework diagram for pre-evaluation of aerosol particle spectrum of a method for analyzing aerosol particle spectrum characteristics based on an electron microscope provided by an embodiment of the present application; Figure 4 It is a logical framework diagram for evaluating the interference of the electron beam of an electron microscope in a method for analyzing aerosol particle spectrum characteristics based on an electron microscope provided by an embodiment of the present application; Figure 5 It is a logical framework diagram for evaluating the accuracy of aerosol particle spectrum feature analysis in a method for analyzing aerosol particle spectrum characteristics based on an electron microscope provided by an embodiment of the present application; Figure 6 It is a system flowchart of a system for analyzing aerosol particle spectrum characteristics based on an electron microscope provided by an embodiment of the present application. Detailed Embodiments

[0014] Embodiments of the present application provide a method for analyzing the spectral characteristics of aerosol particles based on an electron microscope, which solves the problem in the prior art that the accuracy of aerosol particle spectral characteristic analysis is low due to electrostatic interference of the filter membrane. During the aerosol particle filtration process, aerosol particle filtration evaluation is performed to quantitatively evaluate the qualification degree of aerosol particle filtration. Based on the filtration qualification conditions, it is determined whether to optimize aerosol particle filtration. If the monitored aerosol particle filtration qualification value meets the filtration qualification conditions, the corresponding aerosol particles are marked as qualified aerosol particles, and the qualified aerosol particles are obtained. Then, after the aerosol particle filtration evaluation is qualified, aerosol particle spectrum pre-evaluation is performed to quantitatively evaluate the accuracy of aerosol particle spectrum pre-evaluation. Based on the spectrum characteristic pre-evaluation qualification conditions, it is determined whether to optimize the initial evaluation of spectrum characteristics. If the monitored deviation value of the aerosol particle size distribution ratio meets the spectrum characteristic pre-evaluation qualification conditions, the qualified aerosol particles that meet the spectrum characteristic pre-evaluation qualification conditions are marked as qualified samples. Immediately after the aerosol particle spectrum pre-evaluation is qualified, electron microscope electron beam interference evaluation is performed to quantitatively evaluate the interference degree of the electron microscope electron beam. Based on the electron microscope qualification conditions, it is determined whether to optimize the electron microscope electron beam interference. If the monitored electron microscope electron beam interference value meets the electron microscope qualification conditions, a qualified prompt is sent, and the aerosol particle spectrum is obtained. Finally, after the electron microscope electron beam interference evaluation is qualified, aerosol particle spectrum characteristic analysis accuracy evaluation is performed to quantitatively evaluate the accuracy of aerosol particle spectrum characteristic analysis. Based on the spectrum characteristic analysis qualification conditions, it is determined whether to optimize aerosol particle spectrum characteristic analysis. If the monitored spectrum characteristic analysis accurate value meets the spectrum characteristic analysis qualification conditions, a qualified prompt is sent, realizing the improvement of the accuracy of aerosol particle spectrum characteristic analysis due to the existence of filter membrane electrostatic interference.

[0015] The technical solutions in the embodiments of the present application are to solve the above problem that the analysis of aerosol particle spectral characteristics is inaccurate due to electrostatic interference of the filter membrane. The general idea is as follows: During the aerosol particle filtration process, aerosol particle filtration evaluation is performed to quantitatively evaluate the qualification degree of aerosol particle filtration. Based on the filtration qualification conditions, it is judged whether to optimize the aerosol particle filtration. Then, after the aerosol particle filtration evaluation is qualified, aerosol particle spectrum pre-evaluation is performed to quantitatively evaluate the accuracy of the aerosol particle spectrum pre-evaluation. Based on the spectrum feature pre-evaluation qualification conditions, it is judged whether to optimize the spectrum feature initial evaluation. Immediately after the aerosol particle spectrum pre-evaluation is qualified, electron microscope electron beam interference evaluation is performed to quantitatively evaluate the interference degree of the electron microscope electron beam. Based on the electron microscope qualification conditions, it is judged whether to optimize the electron microscope electron beam interference. Finally, after the electron microscope electron beam interference evaluation is qualified, aerosol particle spectrum feature analysis accuracy evaluation is performed to quantitatively evaluate the accuracy of the aerosol particle spectrum feature analysis. Based on the spectrum feature analysis qualification conditions, it is judged whether to optimize the aerosol particle spectrum feature analysis, achieving the effect of improving the accuracy of the aerosol particle spectrum feature analysis.

[0016] To better understand the above technical solution, the above technical solution will be described in detail below in conjunction with the accompanying drawings of the specification and specific implementation manners.

[0017] As Figure 1 shown, it is a flowchart of a method for analyzing aerosol particle spectrum features based on an electron microscope provided by an embodiment of the present application, including the following steps: Aerosol particle filtration evaluation: During the aerosol particle filtration process, aerosol particle filtration evaluation is performed to quantitatively evaluate the qualification degree of aerosol particle filtration. Based on the filtration qualification conditions, it is judged whether to optimize the aerosol particle filtration. The aerosol particle filtration optimization is used to improve the qualification of aerosol particle filtration during the aerosol particle filtration process; Aerosol particle spectrum pre-evaluation: After the aerosol particle filtration evaluation is qualified, aerosol particle spectrum pre-evaluation is performed to quantitatively evaluate the accuracy of the aerosol particle spectrum pre-evaluation. Based on the spectrum feature pre-evaluation qualification conditions, it is judged whether to optimize the spectrum feature initial evaluation. The spectrum feature initial evaluation optimization is used to improve the accuracy of the aerosol particle spectrum pre-evaluation; Electron microscope electron beam interference evaluation: After the aerosol particle spectrum pre-evaluation is qualified, electron microscope electron beam interference evaluation is performed to quantitatively evaluate the interference degree of the electron microscope electron beam. Based on the electron microscope qualification conditions, it is judged whether to optimize the electron microscope electron beam interference. The electron microscope electron beam interference optimization is used to improve the anti-interference of the aerosol particle spectrum feature analysis; Aerosol particle spectrum feature analysis accuracy evaluation: After the electron microscope electron beam interference evaluation is qualified, aerosol particle spectrum feature analysis accuracy evaluation is performed to quantitatively evaluate the accuracy of the aerosol particle spectrum feature analysis. Based on the spectrum feature analysis qualification conditions, it is judged whether to optimize the aerosol particle spectrum feature analysis. The aerosol particle spectrum feature analysis optimization is used to improve the accuracy of the aerosol particle spectrum feature analysis.

[0018] In this embodiment, the aerosol particle filtration evaluation, aerosol particle spectrum pre-evaluation, electron microscope electron beam interference evaluation, and aerosol particle spectrum characteristic analysis accuracy evaluation are interrelated and progressive layer by layer. As Figure 2 shown, it is a logic framework diagram of aerosol particle filtration evaluation for a method of analyzing aerosol particle spectrum characteristics based on an electron microscope provided by an embodiment of the present application. During the aerosol particle filtration process, aerosol particle filtration evaluation is performed to quantitatively evaluate the qualification degree of aerosol particle filtration. Based on the monitored aerosol particle filtration qualification value, it is judged whether the filtration qualification condition is met. If the monitored aerosol particle filtration qualification value meets the filtration qualification condition, the corresponding aerosol particles are marked as qualified aerosol particles. Based on the obtained qualified aerosol particles, aerosol particle spectrum pre-evaluation is performed. If the monitored aerosol particle filtration qualification value does not meet the filtration qualification condition, aerosol particle filtration optimization is carried out. After aerosol particle filtration optimization, it is judged whether the newly obtained aerosol particle filtration qualification value meets the filtration qualification condition and whether the monitored aerosol particle concentration is greater than the preset minimum aerosol particle concentration. If the newly obtained aerosol particle filtration qualification value meets the filtration qualification condition after aerosol particle filtration optimization and the monitored aerosol particle concentration is greater than the preset minimum aerosol particle concentration, aerosol particle spectrum pre-evaluation is performed. Otherwise, an alarm is sent to the preset personnel. As Figure 3 shown, it is a logic framework diagram of aerosol particle spectrum pre-evaluation for a method of analyzing aerosol particle spectrum characteristics based on an electron microscope provided by an embodiment of the present application. After the aerosol particle filtration evaluation is qualified, aerosol particle spectrum pre-evaluation is performed to quantitatively evaluate the accuracy of aerosol particle spectrum pre-evaluation. Based on the aerosol particle size distribution ratio deviation value, it is judged whether the spectrum characteristic pre-evaluation qualification condition is met. If the monitored aerosol particle size distribution ratio deviation value meets the spectrum characteristic pre-evaluation qualification condition, electron microscope electron beam interference evaluation is performed. If the monitored aerosol particle size distribution ratio deviation value does not meet the spectrum characteristic pre-evaluation qualification condition, spectrum characteristic initial evaluation optimization is carried out. After spectrum characteristic initial evaluation optimization, it is re-judged whether the aerosol particle size distribution ratio deviation value meets the spectrum characteristic pre-evaluation qualification condition. If the newly obtained aerosol particle size distribution ratio deviation value meets the spectrum characteristic pre-evaluation qualification condition, electron microscope electron beam interference evaluation is performed. Otherwise, an alarm is sent to the preset personnel. As Figure 4As shown in the figure, it is a logic framework diagram for evaluating the interference of the electron beam of an electron microscope in a method for analyzing the aerosol particle spectrum characteristics provided by an embodiment of the present application. After the pre-evaluation of the aerosol particle spectrum is qualified, the interference of the electron beam of the electron microscope is evaluated to quantitatively evaluate the degree of interference of the electron beam of the electron microscope. Based on the monitored interference value of the electron beam of the electron microscope, it is judged whether it meets the qualified conditions of the electron microscope. If the monitored interference value of the electron beam of the electron microscope meets the qualified conditions of the electron microscope, a qualified prompt is sent, the aerosol particle spectrum is obtained, and the accuracy evaluation of the aerosol particle spectrum characteristic analysis is performed. If the monitored interference value of the electron beam of the electron microscope does not meet the qualified conditions of the electron microscope, the interference of the electron beam of the electron microscope is optimized. After the interference of the electron beam of the electron microscope is optimized, it is re-judged whether the interference value of the electron beam of the electron microscope meets the qualified conditions of the electron microscope. If the re-obtained interference value of the electron beam of the electron microscope after the judgment of the electron beam of the electron microscope meets the qualified conditions of the electron microscope, a qualified prompt is sent, the aerosol particle spectrum is obtained, and the accuracy evaluation of the aerosol particle spectrum characteristic analysis is performed. Otherwise, an alarm is sent to the preset personnel, such as Figure 5 As shown in the figure, it is a logic framework diagram for evaluating the accuracy of the aerosol particle spectrum characteristic analysis in a method for analyzing the aerosol particle spectrum characteristics provided by an embodiment of the present application. After the evaluation of the interference of the electron beam of the electron microscope is qualified, the accuracy evaluation of the aerosol particle spectrum characteristic analysis is performed to quantitatively evaluate the accuracy of the aerosol particle spectrum characteristic analysis. Based on the monitored accurate value of the spectrum characteristic analysis, it is judged whether it meets the qualified conditions of the spectrum characteristic analysis. If the monitored accurate value of the spectrum characteristic analysis meets the qualified conditions of the spectrum characteristic analysis, a qualified prompt is sent. If the monitored accurate value of the spectrum characteristic analysis does not meet the qualified conditions of the spectrum characteristic analysis, the aerosol particle spectrum characteristic analysis is optimized. After the aerosol particle spectrum characteristic analysis is optimized, it is re-judged whether the accurate value of the spectrum characteristic analysis meets the qualified conditions of the spectrum characteristic analysis. If the monitored accurate value of the spectrum characteristic analysis meets the qualified conditions of the spectrum characteristic analysis, a qualified prompt is sent; if the monitored accurate value of the spectrum characteristic analysis does not meet the qualified conditions of the spectrum characteristic analysis, an alarm is sent to the preset personnel. Through layer-by-layer evaluation and step-by-step optimization of aerosol particle filtration evaluation, aerosol particle spectrum pre-evaluation, electron microscope electron beam interference evaluation, and aerosol particle spectrum characteristic analysis accuracy evaluation, the accuracy of aerosol particle spectrum characteristic analysis is improved.

[0019] By analyzing the spectral characteristics of aerosol particles, including aerosol particle composition, aerosol particle size distribution ratio, aerosol particle morphology, etc., during the process from aerosol particle filtration to the analysis of the spectral characteristics of aerosol particles, electrostatic interference from the filter membrane may occur, which may cause aerosol particles to aggregate on the single-layer filter membrane, resulting in interference in the analysis of the aerosol particle size distribution ratio, and thus interference in the accuracy of the analysis of the spectral characteristics of aerosol particles. During the processes of aerosol particle filtration and the analysis of the spectral characteristics of aerosol particles, the aerosol particle filtration assessment, the aerosol particle spectrum pre-assessment, the electron microscope electron beam interference assessment, and the accuracy assessment of the analysis of the spectral characteristics of aerosol particles are interrelated. Through the interaction among the aerosol particle filtration assessment, the aerosol particle spectrum pre-assessment, the electron microscope electron beam interference assessment, and the accuracy assessment of the analysis of the spectral characteristics of aerosol particles, the stability of aerosol particles during filtration and observation and the accuracy of the analysis of the spectral characteristics of aerosol particles are improved.

[0020] It should be added that before designing a method for analyzing the spectral characteristics of aerosol particles based on an electron microscope in this application, a database for storing various set data is established. The database includes, but is not limited to, a preset filtration influence value, a preset qualified value for aerosol particle filtration, a preset deviation value for the aerosol particle size distribution ratio, a preset electron beam energy, a preset irradiation time period, a preset electron microscope electron beam interference value, a preset interference value for spectral characteristic analysis, a preset accurate value for spectral characteristic analysis, etc. Various values therein are directly set by technicians. For example, the preset electron microscope electron beam interference value is represented by the average value of the electron microscope electron beam interference values in the historical time period.

[0021] Furthermore, during the aerosol particle filtration process, an aerosol particle filtration assessment is performed to quantitatively evaluate the qualified degree of aerosol particle filtration. The specific process is as follows: After performing a ratio analysis on the aerosol particle penetration rate of the filter membrane and the preset aerosol particle penetration rate of the filter membrane, the ratio analysis means performing a ratio operation, and combined with the penetration influence rate, a weighted analysis is performed to obtain the ratio of the aerosol particle penetration rate of the filter membrane, which is used to reflect the influence of the aerosol particle penetration rate of the filter membrane on the qualified degree of aerosol particle filtration during the preset filtration time period. Specifically, the expression for the ratio of the aerosol particle penetration rate of the filter membrane is: , represents the ratio of the aerosol particle penetration rate of the filter membrane in the t-th preset filtration time period, represents the aerosol particle penetration rate of the filter membrane in the t-th preset filtration time period, represents the preset aerosol particle penetration rate of the filter membrane, represents the penetration influence rate, , t represents the number of the preset filtration time period, Indicates the total number of preset filtering time periods; the preset filtering time period represents the preset time period corresponding to the execution of aerosol particle filtration evaluation. The aerosol particle amount at the end state and the initial state of the preset filtering time period are monitored by a light scattering particle counter, and the value obtained by the ratio operation thereof is used as the aerosol particle penetration rate of the filter membrane.

[0022] After performing a ratio analysis on the aerosol particle amount and the preset aerosol particle amount, and combining the velocity influence rate for weighted analysis to obtain the aerosol particle amount ratio value, which is used to reflect the influence of the aerosol particle amount in the preset filtering time period on the qualification degree of aerosol particle filtration; specifically, the expression of the aerosol particle amount ratio value is: , represents the aerosol particle amount ratio value of the t-th preset filtering time period, represents the aerosol particle amount of the t-th preset filtering time period, represents the preset aerosol particle amount, represents the velocity influence rate. By monitoring the initial state aerosol particle amount and the end state aerosol particle amount corresponding to each preset filter membrane monitoring point in the preset filtering time period with an aerosol particle counter, the average value corresponding to the difference therebetween is used as the aerosol particle amount.

[0023] After performing a ratio analysis on the preset filter membrane pressure difference and the change amount of the filter membrane pressure difference, and combining the pressure influence rate for weighted analysis to obtain the filter membrane pressure difference ratio value, which is used to reflect the influence of the filter membrane pressure difference in the preset filtering time period on the qualification degree of aerosol particle filtration; specifically, the expression of the filter membrane pressure difference ratio value is: , represents the filter membrane pressure difference ratio value of the t-th preset filtering time period, represents the change amount of the filter membrane pressure difference in the t-th preset filtering time period. Among them, the change amount of the filter membrane pressure difference is obtained by performing a summation operation on the absolute value of the difference between the filter membrane pressure difference and the preset filter membrane pressure difference and a constant, and this constant is used to avoid the denominator in the formula of the change amount of the filter membrane pressure difference being equal to 0. represents the preset filter membrane pressure difference, represents the pressure influence rate. By monitoring the absolute value of the difference between the end state filter membrane pressure and the initial state filter membrane pressure of the preset filter membrane monitoring point within the preset filtering time period with a differential pressure gauge, the average value corresponding thereto is used as the filter membrane pressure difference.

[0024] The obtained filtration ratio values are multi-dimensionally coupled to obtain the aerosol particle filtration qualification value.

[0025] Among them, the aerosol particle filtration qualification value is obtained through the following method: ; In the formula, Represents the qualified value of aerosol particle filtration for the t-th preset filtration time period; It should be added that the qualified value of aerosol particle filtration is used to reflect the comprehensive influence of the filtration influence value and the preset filtration influence value on the qualified degree of aerosol particle filtration; the filtration occupancy ratio includes: the occupancy ratio of the aerosol particle penetration rate of the filter membrane, the occupancy ratio of the aerosol particle amount, and the occupancy ratio of the filter membrane pressure difference; the filtration influence value includes: the aerosol particle penetration rate of the filter membrane, the aerosol particle amount, and the filter membrane pressure difference; the preset filtration influence value includes: the preset aerosol particle penetration rate of the filter membrane, the preset aerosol particle amount, and the preset filter membrane pressure difference, and the filtration influence rate includes: the penetration influence rate, the velocity influence rate, and the pressure influence rate.

[0026] Among them, the preset aerosol particle penetration rate of the filter membrane is represented by the average value of the aerosol particle penetration rate of the filter membrane in the historical time period; the preset aerosol particle amount is represented by the average value of the aerosol particle amount in the historical time period; the preset filter membrane pressure difference is represented by the average value of the filter membrane pressure difference in the historical time period; among them, both the aerosol particle penetration rate of the filter membrane and the preset aerosol particle penetration rate of the filter membrane have no unit, the unit of both the aerosol particle amount and the preset aerosol particle amount is "pieces", and the unit of both the filter membrane pressure difference and the preset filter membrane pressure difference is Pascal.

[0027] It should be added that this embodiment provides a set of mapping sets extracted from the database, and the mapping relationship in the mapping set can be a one-to-one mapping or a many-to-one mapping. This mapping set contains the mapping relationship between the filtration influence value and the corresponding filtration influence rate, and this mapping set is obtained from the database. By inputting the real-time monitored filtration influence value into the mapping set, the corresponding filtration influence rate can be obtained. Among them, the mapping set is constructed by preset personnel through preset mapping relationships to correspond the filtration influence value and the filtration influence rate one by one; in this embodiment, the value range of the filtration influence rate is from 0 to 1.

[0028] In this embodiment, the occupancy ratio of the aerosol particle penetration rate of the filter membrane is obtained by analyzing the qualified degree of aerosol particle filtration of the filtration influence value; the larger the occupancy ratio of the aerosol particle penetration rate of the filter membrane, the stronger the effect of the aerosol particle penetration rate of the filter membrane on the qualified degree of aerosol particle filtration, resulting in a larger qualified value of aerosol particle filtration; the larger the occupancy ratio of the aerosol particle amount, the stronger the effect of the aerosol particle amount on the qualified degree of aerosol particle filtration, resulting in a larger qualified value of aerosol particle filtration; the larger the occupancy ratio of the filter membrane pressure difference, the stronger the effect of the filter membrane pressure difference on the qualified degree of aerosol particle filtration, resulting in a larger qualified value of aerosol particle filtration; in summary, there is a positive correlation between the filtration influence value and the qualified value of aerosol particle filtration.

[0029] In this embodiment, the filtration influence values do not exist independently but are interrelated and require comprehensive analysis. When the amount of aerosol particles increases, due to the continuous deposition of aerosol particles, the pores of the filter membrane are gradually blocked, resulting in a continuous increase in the filter membrane pressure, which in turn leads to an increase in the filter membrane pressure difference. When the filter membrane pressure difference increases, aerosol particles may be filtered through pores that do not meet the preset filter membrane pore size, resulting in a shortened movement time of aerosol particles, which in turn leads to an increase in the penetration rate of aerosol particles through the filter membrane. By analyzing the mutual correlation between the filtration influence values, the effect of improving the filtration qualification of aerosol particles is achieved, and furthermore, the accuracy of aerosol particle spectrum characteristic analysis is improved due to the existence of filter membrane electrostatic interference.

[0030] Generally speaking, if the proportion of the amount of aerosol particles increases, when the aerosol particles increase, more aerosol particles will pass through, resulting in an increase in the proportion of the penetration rate of aerosol particles through the filter membrane. If the proportion of the filter membrane pressure difference is larger, since aerosol particles are easily deposited on the surface of the filter membrane, it causes the pores of the filter membrane to be blocked, resulting in an increase in the filter membrane pressure difference, thereby forming new pores, increasing the penetration rate of aerosol particles, and thus leading to an increase in the proportion of the penetration rate of aerosol particles through the filter membrane.

[0031] Furthermore, the specific process of determining whether to optimize the filtration of aerosol particles based on the filtration qualification conditions is as follows: Determine whether the monitored aerosol particle filtration qualification value meets the filtration qualification conditions; the filtration qualification conditions indicate that the aerosol particle filtration qualification value is greater than the preset aerosol particle filtration qualification value; if the monitored aerosol particle filtration qualification value meets the filtration qualification conditions, mark the corresponding aerosol particles as qualified aerosol particles, and based on the obtained qualified aerosol particles, perform a pre-evaluation of the aerosol particle spectrum; qualified aerosol particles refer to the samples of the aerosol particles corresponding to the qualified aerosol particles; if the monitored aerosol particle filtration qualification value does not meet the filtration qualification conditions, perform optimization of the aerosol particle filtration.

[0032] In this embodiment, by comparing and analyzing the monitored aerosol particle filtration qualification value with the preset aerosol particle filtration qualification value in real time, the qualification degree of aerosol particle filtration can be effectively evaluated, avoiding interference with the integrity of aerosol particles and ensuring that the particle size distribution ratio of aerosol particles is not disturbed, thereby improving the qualification of aerosol particles, and furthermore, improving the accuracy of aerosol particle spectrum characteristic analysis.

[0033] Further, a filter membrane step operation is performed; performing a filter membrane step operation means sending a prompt to a preset person, and taking the multiple relationship between the aerosol particle filtration qualified value obtained from the database and the preset aerosol particle filtration qualified value as a standard, and gradually reducing the filter membrane pore size in corresponding preset multiples; performing a filter membrane step operation also includes performing a deflector operation and performing an aerosol flow rate operation; performing a deflector operation means sending a prompt to a preset person to set a deflector device; performing an aerosol flow rate operation means sending a prompt to a preset person, and taking the multiple relationship between the aerosol particle filtration qualified value obtained from the database and the preset aerosol particle filtration qualified value as a standard, and gradually reducing the aerosol particle flow rate in corresponding preset multiples; if the aerosol particle filtration qualified value re-obtained after performing the filter membrane step operation meets the filtration qualified condition and the monitored aerosol particle concentration is greater than the preset minimum aerosol particle concentration, then mark the corresponding aerosol particles as qualified aerosol particles, and based on the obtained qualified aerosol particles, perform a pre-evaluation of the aerosol particle spectrum. Otherwise, send an alarm to the preset person.

[0034] In this embodiment, taking the multiple relationship between the aerosol particle filtration qualified value obtained from the database and the preset aerosol particle filtration qualified value as a standard, gradually reducing the filter membrane pore size in corresponding preset multiples. If the aerosol particle filtration qualified value re-obtained after performing the filter membrane step operation meets the filtration qualified condition and the monitored aerosol particle concentration is greater than the preset minimum aerosol particle concentration, where the aerosol particle concentration at the preset filter membrane centroid at the preset filtration time point is monitored by a beta-ray absorption method monitor and used as the aerosol particle concentration, then stop performing the filter membrane step operation; performing the filter membrane step operation is used to reduce the filtration resistance to improve the qualification of aerosol particle filtration, and can also make each layer of the filter membrane operate stably to improve the quality of the filter membrane for filtering aerosol particles, thereby improving the accuracy of aerosol particle filtration; monitoring the aerosol particle concentration is used to ensure the accuracy of aerosol particle filtration qualification during the optimization process of aerosol particle filtration; taking the multiple relationship between the aerosol particle filtration qualified value obtained from the database and the preset aerosol particle filtration qualified value as a standard, gradually reducing the aerosol particle flow rate in corresponding preset multiples. If the aerosol particle filtration qualified value re-obtained after performing the filter membrane step operation meets the filtration qualified condition and the monitored aerosol particle concentration is greater than the preset minimum aerosol particle concentration, then stop performing the aerosol flow rate operation; performing the sampling rate operation is used to reduce the pressure of aerosol particles on the filter membrane surface, ensure the stability of the aerosol particle filtration process to improve the qualification of aerosol particle filtration, and performing the deflector operation is used to make aerosol particles pass through the filter membrane evenly, reduce the impact force of aerosol particles on the filter membrane, and further improve the qualification of aerosol particle filtration, thereby achieving an improvement in the accuracy of aerosol particle spectrum feature analysis due to the existence of filter membrane electrostatic interference.

[0035] Further, the specific process of performing pre - evaluation of the aerosol particle spectrum is as follows: Obtain the deviation value of the aerosol particle size distribution ratio; the deviation value of the aerosol particle size distribution ratio is used to reflect the accuracy degree of the pre - evaluation of the aerosol particle spectrum; the deviation value of the aerosol particle size distribution ratio is represented by the absolute value corresponding to the difference between the monitored aerosol particle size distribution ratio and the preset aerosol particle size distribution ratio; among them, the aerosol particle size distribution ratio of each preset filter membrane monitoring point in a preset time period is directly monitored by a laser particle size analyzer, and its corresponding average value is used as the aerosol particle size distribution ratio, and the preset aerosol particle size distribution ratio is represented by the average value of the aerosol particle size distribution ratio in the historical time period; Judge whether it meets the qualified conditions for pre - evaluation of the spectrum characteristics based on the deviation value of the aerosol particle size distribution ratio; the qualified conditions for pre - evaluation of the spectrum characteristics mean that the deviation value of the aerosol particle size distribution ratio is not greater than the preset deviation value of the aerosol particle size distribution ratio; if the monitored deviation value of the aerosol particle size distribution ratio meets the qualified conditions for pre - evaluation of the spectrum characteristics, perform the electron microscope electron beam interference evaluation; if the monitored deviation value of the aerosol particle size distribution ratio does not meet the qualified conditions for pre - evaluation of the spectrum characteristics, perform the optimization of the initial evaluation of the spectrum characteristics; the specific process of the optimization of the initial evaluation of the spectrum characteristics is as follows: Perform humidification treatment; performing humidification treatment means taking the multiple relationship between the deviation value of the aerosol particle size distribution ratio obtained from the database by sending a prompt to the preset personnel and the preset deviation value of the aerosol particle size distribution ratio as the standard, and gradually increasing the water pump speed in corresponding preset multiples; performing humidification treatment is used to increase the conductivity of aerosol particles to improve the accuracy of the pre - evaluation of the aerosol particle spectrum; if the deviation value of the aerosol particle size distribution ratio re - obtained after performing humidification treatment meets the qualified conditions for pre - evaluation of the spectrum characteristics, perform the electron microscope electron beam interference evaluation, otherwise, send an alarm to the preset personnel; Mark the qualified aerosol particles that meet the qualified conditions for pre - evaluation of the spectrum characteristics as qualified samples; Perform pre - evaluation judgment; performing pre - evaluation judgment means that after the optimization of the initial evaluation of the spectrum characteristics, re - judge whether the deviation value of the aerosol particle size distribution ratio meets the qualified conditions for pre - evaluation of the spectrum characteristics; if the re - obtained deviation value of the aerosol particle size distribution ratio meets the qualified conditions for pre - evaluation of the spectrum characteristics, perform the electron microscope electron beam interference evaluation, otherwise, send an alarm to the preset personnel.

[0036] In this embodiment, by comparing and analyzing the deviation value of the aerosol particle size distribution ratio in real time with the preset deviation value of the aerosol particle size distribution ratio, the accuracy of the pre-evaluation of the aerosol particle spectrum can be ensured, the interference of the aerosol particle spectrum characteristics can be avoided, and thus the accuracy of the pre-evaluation of the aerosol particle spectrum can be improved; by taking the multiple relationship between the deviation value of the aerosol particle size distribution ratio obtained from the database and the preset deviation value of the aerosol particle size distribution ratio as a standard, the water pump speed is increased step by step in corresponding preset multiples. If the deviation value of the aerosol particle size distribution ratio obtained again after humidification treatment meets the qualified conditions for the pre-evaluation of the spectrum characteristics, the humidification treatment is stopped; the humidification treatment is used to increase the dosage of water, thereby increasing the conductivity of the aerosol particles, and then neutralizing the surface charge of the aerosol particles with moisture, reducing electrostatic adsorption, and thus improving the accuracy of the pre-evaluation of the aerosol particle spectrum, and further achieving the improvement of the accuracy of the aerosol particle spectrum characteristic analysis due to the electrostatic interference of the filter membrane.

[0037] Further, the specific process of performing the electron microscope electron beam interference evaluation is as follows: Obtain the electron microscope electron beam interference value; the electron microscope electron beam interference value is represented by the absolute value of the difference between the preset electron microscope electron beam energy and the preset electron beam energy monitored by an accelerating voltmeter during a preset irradiation period; the preset irradiation period represents the preset period corresponding to the execution of the electron microscope electron beam interference evaluation; the electron microscope electron beam interference value is used to reflect the interference degree of the electron microscope electron beam on the aerosol particle spectrum characteristic analysis; judge whether it meets the electron microscope qualified conditions based on the monitored electron microscope electron beam interference value; the electron microscope qualified conditions mean that the electron microscope electron beam interference value is not greater than the preset electron microscope electron beam interference value; if the monitored electron microscope electron beam interference value meets the electron microscope qualified conditions, send a qualified prompt, obtain the aerosol particle spectrum and perform the accuracy evaluation of the aerosol particle spectrum characteristic analysis; if the monitored electron microscope electron beam interference value does not meet the electron microscope qualified conditions, perform the optimization of the electron microscope electron beam interference.

[0038] In this embodiment, by comparing and analyzing the electron microscope electron beam interference value in real time with the preset electron microscope electron beam interference value, it is helpful to evaluate the interference degree of the electron microscope electron beam on the aerosol particle spectrum characteristic analysis, avoid the interference of the electron microscope electron beam on the aerosol particle size distribution, ensure the stability of the aerosol particle spectrum density analysis, and thus improve the anti-interference ability of the aerosol particle spectrum density analysis, and further achieve the improvement of the accuracy of the aerosol particle spectrum characteristic analysis due to the electrostatic interference of the filter membrane.

[0039] Further, the specific process of optimizing the electron beam interference of the electron microscope is as follows: perform the operation of reducing the acceleration voltage; performing the operation of reducing the acceleration voltage means sending a prompt to a preset person, and taking the multiple relationship between the electron microscope electron beam interference value obtained from the database and the preset electron microscope electron beam interference value as a standard, and gradually reducing the acceleration voltage of the electron microscope in corresponding preset multiples; performing the operation of reducing the acceleration voltage also includes performing the operation of shortening the irradiation time; performing the operation of shortening the irradiation time means sending a prompt to a preset person, and taking the multiple relationship between the electron microscope electron beam interference value obtained from the database and the preset electron microscope electron beam interference value as a standard, and gradually shortening the irradiation time in corresponding preset multiples; the irradiation time is greater than the preset minimum irradiation time; wherein, the irradiation time of the electron beam of the electron microscope is monitored by an electron beam oscilloscope during a preset time period and used as the preset minimum irradiation time. If the electron microscope electron beam interference value re-obtained after performing the operation of reducing the acceleration voltage meets the electron microscope qualification conditions, and the monitored irradiation time is greater than the preset minimum irradiation time, then send a qualified prompt, obtain the aerosol particle spectrum and perform the accuracy evaluation of the aerosol particle spectrum feature analysis; perform the electron microscope electron beam judgment; performing the electron microscope electron beam judgment means that after optimizing the electron microscope electron beam interference, re-judge whether the electron microscope electron beam interference value meets the electron microscope qualification conditions; if the electron microscope electron beam interference value re-obtained after performing the electron microscope electron beam judgment meets the electron microscope qualification conditions, then send a qualified prompt, obtain the aerosol particle spectrum and perform the accuracy evaluation of the aerosol particle spectrum feature analysis, otherwise, send an alarm to the preset person.

[0040] In this embodiment, taking the multiple relationship between the electron microscope electron beam interference value obtained from the database and the preset electron microscope electron beam interference value as a standard, the irradiation time is gradually shortened in corresponding preset multiples. If the electron microscope electron beam interference value re-obtained after performing the operation of reducing the acceleration voltage meets the electron microscope qualification conditions, then stop performing the operation of reducing the acceleration voltage; performing the operation of reducing the acceleration voltage is used to reduce the penetration and damage of the electron microscope electron beam to the qualified aerosol particles to reduce the interference of the electron microscope electron beam on the aerosol particle spectrum feature analysis; performing the operation of shortening the irradiation time is used to reduce the interference of the electron microscope electron beam on the qualified sample, thereby reducing the interference of the electron microscope electron beam on the aerosol particle spectrum feature analysis, and further achieving the improvement of the accuracy of the aerosol particle spectrum feature analysis due to the existence of the filter membrane electrostatic interference.

[0041] Further, after the evaluation of the electron beam interference of the electron microscope is qualified, an evaluation of the accuracy of the aerosol particle spectrum characteristics analysis is performed to quantitatively evaluate the accuracy of the aerosol particle spectrum characteristics analysis. The specific process is as follows: After performing a ratio analysis on the preset particle surface charge quantity and the particle surface charge quantity, a weighted analysis is performed in combination with the density deviation rate to obtain the particle surface charge quantity deviation value, which is used to reflect the influence of the particle surface charge quantity on the accuracy of the aerosol particle spectrum characteristics analysis during the preset analysis time period; specifically, the expression of the particle surface charge quantity deviation value is: , represents the particle surface charge quantity deviation value of the th preset analysis time period, represents the particle surface charge quantity of the th preset analysis time period, represents the preset particle surface charge quantity, represents the density deviation rate, , represents the number of the preset analysis time period, represents the total number of the preset analysis time periods; The preset analysis time period represents the preset time period corresponding to the evaluation of the accuracy of the aerosol particle spectrum characteristics analysis. The surface preset point charge quantity of the aerosol particles of the preset qualified samples in the preset analysis time period is monitored by a Faraday cup charge analyzer and used as the particle surface charge quantity.

[0042] After performing a ratio analysis on the preset charge distribution ratio and the charge distribution ratio, a weighted analysis is performed in combination with the distribution deviation rate to obtain the charge distribution ratio deviation value, which is used to reflect the influence of the charge distribution ratio on the accuracy of the aerosol particle spectrum characteristics analysis during the preset analysis time period; specifically, the expression of the charge distribution ratio deviation value is: , represents the charge distribution ratio deviation value of the th preset analysis time period, represents the charge distribution ratio of the th preset analysis time period, represents the preset charge distribution ratio, represents the distribution deviation rate. The charge distribution ratio of the aerosol particles of the preset qualified samples in the preset analysis time period is monitored by an electrostatic low-pressure impactor, and its average value is used as the charge distribution ratio.

[0043] After performing a ratio analysis on the preset electron microscope electron beam interference value and the electron microscope electron beam interference value, a weighted analysis is performed in combination with the interference deviation rate to obtain the electron microscope electron beam interference deviation value, which is used to reflect the influence of the electron microscope electron beam interference value on the accuracy of the aerosol particle spectrum characteristics analysis during the preset analysis time period; specifically, the expression of the electron microscope electron beam interference deviation value is: , Indicates the interference deviation value of the electron beam of the electron microscope for the th preset analysis time period, Indicates the interference value of the electron beam of the electron microscope for the th preset analysis time period, Indicates the preset interference value of the electron beam of the electron microscope, Indicates the interference deviation rate. By monitoring the interference value of the electron beam of the electron microscope for the preset qualified samples in the preset analysis time period with a condensation particle counter, and taking its average value as the interference value of the electron beam of the electron microscope.

[0044] Perform multi-dimensional coupling on the obtained spectral feature analysis deviation value to obtain the accurate spectral feature analysis value.

[0045] Among them, the accurate spectral feature analysis value is obtained through the following method: ; In the formula, Indicates the accurate spectral feature analysis value for the th preset analysis time period; It should be added that the accurate spectral feature analysis value is used to reflect the comprehensive influence of the spectral feature analysis interference value in the preset analysis time period and the preset spectral feature analysis interference value on the accurate degree of aerosol particle spectral feature analysis; the spectral feature analysis deviation value includes: the particle surface charge amount deviation value, the charge distribution ratio deviation value and the electron microscope electron beam interference deviation value, and the spectral feature analysis deviation values all consider the case greater than 0; the spectral feature analysis interference value includes: the particle surface charge amount, the charge distribution ratio and the electron microscope electron beam interference value; the preset spectral feature analysis interference value includes: the preset particle surface charge amount, the preset charge distribution ratio and the preset electron microscope electron beam interference value, and the analysis deviation rate includes: the density deviation rate, the distribution deviation rate and the interference deviation rate.

[0046] Among them, the preset particle surface charge amount is represented by the average value of the particle surface charge amount in the historical time period; the preset charge distribution ratio is represented by the average value of the charge distribution ratio in the historical time period; among them, the unit of the preset particle surface charge amount and the particle surface charge amount is kilograms per cubic meter, the preset charge distribution ratio and the charge distribution ratio have no unit, and the unit of the preset electron microscope electron beam interference value and the electron microscope electron beam interference value is joules.

[0047] It should be added that this embodiment provides a set of mapping sets extracted from a database. The mapping relationships in the mapping sets can be one-to-one mappings or many-to-one mappings. This mapping set contains the mapping relationship between the spectral feature analysis interference value and the corresponding analysis deviation rate, and this mapping set is obtained from the database. By inputting the spectrally monitored spectral feature analysis interference value into the mapping set, the corresponding analysis deviation rate can be obtained. Among them, the mapping set is constructed by preset personnel through preset mapping relationships to correspond the spectral feature analysis interference value and the analysis deviation rate one by one; in this embodiment, the value range of the analysis deviation rate is from 0 to 1.

[0048] In this embodiment, the spectral feature analysis interference value is analyzed for the accuracy of the aerosol particle spectral feature analysis to obtain the spectral feature analysis deviation value; the larger the electron microscope electron beam interference deviation value, the stronger the effect of the electron microscope electron beam interference value on the accuracy of the aerosol particle spectral feature analysis, resulting in a larger spectral feature analysis accurate value; the larger the particle surface charge amount deviation value, the stronger the effect of the particle surface charge amount on the accuracy of the aerosol particle spectral feature analysis, resulting in a larger spectral feature analysis accurate value; the larger the charge distribution ratio deviation value, the stronger the effect of the charge distribution ratio on the accuracy of the aerosol particle spectral feature analysis, resulting in a larger spectral feature analysis accurate value; in summary, the spectral feature analysis deviation value and the spectral feature analysis accurate value are positively correlated.

[0049] In this embodiment, the spectral feature analysis interference values do not exist independently and are interrelated and need to be comprehensively analyzed. When the particle surface charge amount increases, the electric field strength of the aerosol particle increases. When the electron microscope electron beam approaches the aerosol particle, it will be affected by the Coulomb force, resulting in an increase in the range of the electron microscope electron beam irradiation, thereby causing an increase in the electron microscope electron beam interference value. When the charge distribution ratio increases, since the electron microscope electron beam is affected by Coulomb forces with different angles and intensities when passing through, the path of the electron microscope electron beam changes, thereby causing an increase in the electron microscope electron beam interference value. By analyzing the mutual correlation relationship between the spectral feature analysis interference values, the effect of improving the stability of the aerosol particle spectral feature analysis is achieved, and thus the improvement of the accuracy of the aerosol particle spectral feature analysis is achieved.

[0050] Generally speaking, when the electron microscope electron beam interference deviation value increases, since the electron microscope electron beam irradiation will cause an increase in the surface charge of the qualified sample, resulting in an increase in the aerosol particle surface charge amount deviation value and an increase in the charge distribution ratio deviation value. Since the aerosol particle charge is concentrated on the aerosol particle surface, a tip effect will occur. When the electron microscope electron beam approaches the aerosol particle surface, it will be scattered due to the Coulomb force, resulting in an increase in the electron microscope electron beam interference deviation value.

[0051] Further, the specific process of determining whether to optimize the aerosol particle size spectrum analysis based on the qualified conditions of the spectrum feature analysis is as follows: Determine whether the accurately measured spectrum feature analysis value based on the monitoring meets the qualified conditions of the spectrum feature analysis; the qualified conditions of the spectrum feature analysis indicate that the accurately measured spectrum feature analysis value based on the monitoring is greater than the preset accurately measured spectrum feature analysis value; if the accurately measured spectrum feature analysis value based on the monitoring meets the qualified conditions of the spectrum feature analysis, send a qualified prompt; if the accurately measured spectrum feature analysis value based on the monitoring does not meet the qualified conditions of the spectrum feature analysis, perform optimization of the aerosol particle size spectrum analysis; the specific process of performing optimization of the aerosol particle size spectrum analysis is as follows: First step, perform a dilution operation; performing a dilution operation means sending a prompt to a preset person, using the multiple relationship between the accurately measured spectrum feature analysis value obtained from the database and the preset accurately measured spectrum feature analysis value as a standard, and gradually reducing the particle concentration by a corresponding preset multiple; performing a dilution operation also includes monitoring the residence time; monitoring the residence time means monitoring the residence time of aerosol particles in the aerosol diluter; if the accurately measured spectrum feature analysis value obtained again after performing the dilution operation meets the qualified conditions of the spectrum feature analysis, send a qualified prompt, otherwise, perform the second step; Second step, perform a voltage adjustment operation; performing a voltage adjustment operation means sending a prompt to a preset person, using the multiple relationship between the accurately measured spectrum feature analysis value obtained from the database and the preset accurately measured spectrum feature analysis value as a standard, and gradually reducing the angle of the voltage regulator knob of the charger by a corresponding preset multiple; if the accurately measured spectrum feature analysis value obtained again after performing the voltage adjustment operation meets the qualified conditions of the spectrum feature analysis, send a qualified prompt, otherwise, send an alarm to the preset person.

[0052] In this embodiment, by comparing and analyzing the accurate value of spectral feature analysis obtained in real time with the preset accurate value of spectral feature analysis, the accuracy of aerosol particle spectral feature analysis can be ensured, interference of the electrostatic effect on aerosol particle spectral feature analysis can be avoided, the timeliness of aerosol particle spectral density analysis can be improved, and thus the accuracy of aerosol particle spectral density analysis can be enhanced. Taking the multiple relationship between the accurate value of spectral feature analysis obtained from the database and the preset accurate value of spectral feature analysis as a standard, the particle concentration is gradually reduced in corresponding preset multiples. If the accurate value of spectral feature analysis obtained again after dilution operation meets the qualified conditions for spectral feature analysis, the dilution operation is stopped; the monitoring residence time is used to determine the shortest effective dilution time to improve the accuracy of aerosol particle spectral feature analysis; the dilution operation is performed to reduce the aerosol particle concentration to improve the accuracy of aerosol particle spectral feature analysis; the dilution operation can reflect the accurate degree of aerosol particle spectral feature analysis; taking the multiple relationship between the accurate value of spectral feature analysis obtained from the database and the preset accurate value of spectral feature analysis as a standard, if the accurate value of spectral feature analysis obtained again after adjusting the voltage operation meets the qualified conditions for spectral feature analysis, the voltage adjustment operation is stopped; the voltage adjustment operation is performed to reduce the electrode voltage, avoid the deviation of the charge distribution ratio from the preset value due to high voltage, and thus improve the accuracy of aerosol particle spectral feature analysis; the voltage adjustment operation can reflect the accurate degree of aerosol particle spectral feature analysis, and thus the accuracy of aerosol particle spectral feature analysis is improved due to the electrostatic interference of the filter membrane.

[0053] Further, there are an aerosol particle filtration evaluation module, an aerosol particle spectrum pre-evaluation module, an electron microscope electron beam interference evaluation module, and an aerosol particle spectrum feature analysis accuracy evaluation module. The aerosol particle filtration evaluation module is used to perform aerosol particle filtration evaluation during the aerosol particle filtration process to quantitatively evaluate the qualification degree of aerosol particle filtration, and determine whether to optimize aerosol particle filtration based on the filtration qualification conditions. The aerosol particle filtration optimization is used to improve the qualification of aerosol particle filtration during the aerosol particle filtration process. The aerosol particle spectrum pre-evaluation module is used to perform aerosol particle spectrum pre-evaluation after the aerosol particle filtration evaluation is qualified to quantitatively evaluate the accuracy of the aerosol particle spectrum pre-evaluation, and determine whether to optimize the initial spectrum feature evaluation based on the spectrum feature pre-evaluation qualification conditions. The spectrum feature initial evaluation optimization is used to improve the accuracy of the aerosol particle spectrum pre-evaluation. The electron microscope electron beam interference evaluation module is used to perform electron microscope electron beam interference evaluation after the aerosol particle spectrum pre-evaluation is qualified to quantitatively evaluate the interference degree of the electron microscope electron beam, and determine whether to optimize the electron microscope electron beam interference based on the electron microscope qualification conditions. The electron microscope electron beam interference optimization is used to improve the anti-interference ability of aerosol particle spectrum feature analysis. The aerosol particle spectrum feature analysis accuracy evaluation module is used to perform aerosol particle spectrum feature analysis accuracy evaluation after the electron microscope electron beam interference evaluation is qualified to quantitatively evaluate the accuracy of aerosol particle spectrum feature analysis, and determine whether to optimize aerosol particle spectrum feature analysis based on the spectrum feature analysis qualification conditions. The aerosol particle spectrum feature analysis optimization is used to improve the accuracy of aerosol particle spectrum feature analysis.

[0054] In this embodiment, as Figure 6As shown in the figure, it is the system flowchart of an aerosol particle spectrum feature analysis system provided by an embodiment of the present application. The aerosol particle filtration evaluation module, the aerosol particle spectrum pre-evaluation module, the electron microscope electron beam interference evaluation module, and the aerosol particle spectrum feature analysis accuracy evaluation module are interconnected. Through the aerosol particle filtration evaluation module, it is judged whether to optimize the aerosol particle filtration. If the monitored qualified value of aerosol particle filtration does not meet the filtration qualified conditions, the aerosol particle filtration is optimized. Then, through the aerosol particle spectrum pre-evaluation module, it is judged whether to optimize the initial evaluation of spectrum features. If the monitored deviation value of the aerosol particle size distribution ratio does not meet the qualified conditions for spectrum feature pre-evaluation, the initial evaluation of spectrum features is optimized. Secondly, through the electron microscope electron beam interference evaluation module, it is judged whether to optimize the electron microscope electron beam interference. If the monitored electron microscope electron beam interference value does not meet the qualified conditions of the electron microscope, the electron microscope electron beam interference is optimized. Finally, through the aerosol particle spectrum feature analysis accuracy evaluation module, it is judged whether to optimize the aerosol particle spectrum feature analysis. If the monitored accurate value of spectrum feature analysis does not meet the qualified conditions for spectrum feature analysis, the aerosol particle spectrum feature analysis is optimized, thereby achieving an improvement in the accuracy of aerosol particle spectrum feature analysis due to the existence of filter membrane electrostatic interference.

[0055] In summary, during the aerosol particle filtration process, by performing the aerosol particle filtration evaluation and judging whether to optimize the aerosol particle filtration, then performing the aerosol particle spectrum pre-evaluation and judging whether to optimize the initial evaluation of spectrum features, then performing the electron microscope electron beam interference evaluation and judging whether to optimize the electron microscope electron beam interference, and finally performing the aerosol particle spectrum feature analysis accuracy evaluation and judging whether to optimize the aerosol particle spectrum feature analysis, the stability of aerosol particle spectrum feature analysis is enhanced, and thus the effect of improving the accuracy of aerosol particle spectrum feature analysis is achieved, solving the problem in the prior art of low accuracy of aerosol particle spectrum feature analysis due to filter membrane electrostatic interference.

[0056] Those skilled in the art should understand that the embodiments of the present invention can be provided as a method, a system, or a computer program product. Therefore, the present invention can take the form of a completely hardware embodiment, a completely software embodiment, or an embodiment combining software and hardware aspects. Moreover, the present invention can take the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0057] The present invention is described with reference to the flowcharts and / or block diagrams of methods, apparatus (systems), and computer program products according to embodiments of the present invention. It should be understood that each flow and / or block in the flowchart and / or block diagram, and combinations of flows and / or blocks in the flowchart and / or block diagram, can be implemented by computer program instructions. These computer program instructions can be provided to the processors of general-purpose computers, special-purpose computers, embedded processors, or other programmable data processing devices to produce a machine, such that the instructions executed by the processors of the computer or other programmable data processing devices produce means for implementing the functions specified in one flow Figure 1 one flow or multiple flows and / or blocks Figure 1 or multiple blocks.

[0058] These computer program instructions can also be stored in a computer-readable memory that can direct a computer or other programmable data processing device to work in a specific manner, such that the instructions stored in the computer-readable memory produce a manufactured article including instruction means that implement the functions specified in one flow Figure 1 one flow or multiple flows and / or blocks Figure 1 or multiple blocks.

[0059] These computer program instructions can also be loaded onto a computer or other programmable data processing device, such that a series of operation steps are executed on the computer or other programmable device to produce a computer-implemented process, so that the instructions executed on the computer or other programmable device provide steps for implementing the functions specified in one flow Figure 1 one flow or multiple flows and / or blocks Figure 1 or multiple blocks.

[0060] Although the preferred embodiments of the present invention have been described, those skilled in the art can make additional changes and modifications once they learn the basic creative concept. Therefore, the appended claims are intended to be construed to include the preferred embodiments and all changes and modifications that fall within the scope of the present invention.

[0061] Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalent technologies, the present invention is also intended to include these modifications and variations.

Claims

1. A method for analyzing the spectral characteristics of aerosol particles based on an electron microscope, characterized in that, It includes the following steps: During the aerosol particle filtration process, perform an aerosol particle filtration assessment to quantitatively evaluate the qualification degree of aerosol particle filtration, and judge whether to optimize the aerosol particle filtration based on the filtration qualification conditions. The aerosol particle filtration optimization is used to improve the qualification of aerosol particle filtration during the aerosol particle filtration process; After the aerosol particle filtration assessment is qualified, perform an aerosol particle spectrum pre-assessment to quantitatively evaluate the accuracy of the aerosol particle spectrum pre-assessment, and judge whether to optimize the spectrum feature initial assessment based on the spectrum feature pre-assessment qualification conditions. The spectrum feature initial assessment optimization is used to improve the accuracy of the aerosol particle spectrum pre-assessment; After the aerosol particle spectrum pre-assessment is qualified, perform an electron microscope electron beam interference assessment to quantitatively evaluate the interference degree of the electron microscope electron beam, and judge whether to optimize the electron microscope electron beam interference based on the electron microscope qualification conditions. The electron microscope electron beam interference optimization is used to improve the anti-interference of aerosol particle spectrum feature analysis; After the electron microscope electron beam interference assessment is qualified, perform an aerosol particle spectrum feature analysis accuracy assessment to quantitatively evaluate the accuracy of the aerosol particle spectrum feature analysis, and judge whether to optimize the aerosol particle spectrum feature analysis based on the spectrum feature analysis qualification conditions. The aerosol particle spectrum feature analysis optimization is used to improve the accuracy of the aerosol particle spectrum feature analysis.

2. The aerosol particle spectrum feature analysis method based on an electron microscope according to claim 1, characterized in that, During the aerosol particle filtration process, perform an aerosol particle filtration assessment to quantitatively evaluate the qualification degree of aerosol particle filtration. The specific process is as follows: After performing a ratio analysis on the filter membrane aerosol particle penetration rate and the preset filter membrane aerosol particle penetration rate, combined with the penetration influence rate for weighted analysis to obtain the filter membrane aerosol particle penetration rate ratio value, which is used to reflect the influence of the filter membrane aerosol particle penetration rate on the qualification degree of aerosol particle filtration during the preset filtration time period; After performing a ratio analysis on the aerosol particle amount and the preset aerosol particle amount, combined with the velocity influence rate for weighted analysis to obtain the aerosol particle amount ratio value, which is used to reflect the influence of the aerosol particle amount on the qualification degree of aerosol particle filtration during the preset filtration time period; After performing a ratio analysis on the preset filter membrane pressure difference and the change amount of the filter membrane pressure difference, combined with the pressure influence rate for weighted analysis to obtain the filter membrane pressure difference ratio value, which is used to reflect the influence of the filter membrane pressure difference on the qualification degree of aerosol particle filtration during the preset filtration time period; Perform multi-dimensional coupling on the obtained filtration ratio values to obtain the aerosol particle filtration qualification value; The aerosol particle filtration qualification value is used to reflect the comprehensive influence of the filtration influence value and the preset filtration influence value on the qualification degree of aerosol particle filtration; The filtration ratio values include: the filter membrane aerosol particle penetration rate ratio value, the aerosol particle amount ratio value, and the filter membrane pressure difference ratio value.

3. The method for analyzing the aerosol particle spectrum characteristics based on an electron microscope according to claim 2, wherein The specific process of judging whether to optimize the aerosol particle filtration based on the filtration qualification conditions is as follows: Judge whether it meets the filtration qualification conditions based on the monitored aerosol particle filtration qualification value; The filtration qualification conditions indicate that the aerosol particle filtration qualification value is greater than the preset aerosol particle filtration qualification value. If the monitored aerosol particle filtration qualified value meets the filtration qualified condition, mark the corresponding aerosol particles as qualified aerosol particles, and based on the obtained qualified aerosol particles, perform pre-evaluation of the aerosol particle spectrum; If the monitored aerosol particle filtration qualified value does not meet the filtration qualified condition, perform aerosol particle filtration optimization.

4. The aerosol particle spectrum feature analysis method based on an electron microscope according to claim 3, wherein The specific process of the aerosol particle filtration optimization is as follows: Perform filter membrane step operation; The perform filter membrane step operation means sending a prompt to a preset person to gradually reduce the filter membrane pore size; The perform filter membrane step operation also includes performing deflector operation and performing aerosol flow rate operation; The perform deflector operation means sending a prompt to a preset person to set the deflector device; The perform aerosol flow rate operation means sending a prompt to a preset person to gradually reduce the aerosol particle flow rate; If the aerosol particle filtration qualified value obtained after aerosol particle filtration optimization meets the filtration qualified condition, and the monitored aerosol particle concentration is greater than the preset minimum aerosol particle concentration, mark the corresponding aerosol particles as qualified aerosol particles, and based on the obtained qualified aerosol particles, perform pre-evaluation of the aerosol particle spectrum, otherwise, send an alarm to the preset person.

5. The aerosol particle spectrum feature analysis method based on an electron microscope according to claim 1, wherein The specific process of the perform aerosol particle spectrum pre-evaluation is as follows: Obtain the deviation value of the aerosol particle size distribution ratio; The deviation value of the aerosol particle size distribution ratio is used to reflect the accuracy degree of the aerosol particle spectrum pre-evaluation; Based on the deviation value of the aerosol particle size distribution ratio, judge whether it meets the qualified condition of the spectrum feature pre-evaluation; The qualified condition of the spectrum feature pre-evaluation means that the deviation value of the aerosol particle size distribution ratio is not greater than the preset deviation value of the aerosol particle size distribution ratio; If the monitored deviation value of the aerosol particle size distribution ratio meets the qualified condition of the spectrum feature pre-evaluation, perform electron microscope electron beam interference evaluation; If the monitored deviation value of the aerosol particle size distribution ratio does not meet the qualified condition of the spectrum feature pre-evaluation, perform spectrum feature initial evaluation optimization; The specific process of the spectrum feature initial evaluation optimization is as follows: Perform humidification treatment; The perform humidification treatment means taking the multiple relationship between the deviation value of the aerosol particle size distribution ratio obtained from the database by sending a prompt to a preset person and the preset deviation value of the aerosol particle size distribution ratio as the standard, and gradually increasing the water pump speed by the corresponding preset multiple; If the deviation value of the aerosol particle size distribution ratio obtained after humidification treatment meets the qualified condition of the spectrum feature pre-evaluation, perform electron microscope electron beam interference evaluation, otherwise, send an alarm to the preset person; Mark the qualified aerosol particles that meet the qualified condition of the spectrum feature pre-evaluation as qualified samples; Perform pre-evaluation judgment; The perform pre-evaluation judgment means that after the spectrum feature initial evaluation optimization, re-judge whether the deviation value of the aerosol particle size distribution ratio meets the qualified condition of the spectrum feature pre-evaluation; If the re-obtained deviation value of the aerosol particle size distribution ratio meets the qualified condition of the spectrum feature pre-evaluation, perform electron microscope electron beam interference evaluation, otherwise, send an alarm to the preset person.

6. The aerosol particle spectrum feature analysis method based on an electron microscope according to claim 1, characterized in that, The specific process of the perform electron microscope electron beam interference evaluation is as follows: Obtain the electron microscope electron beam interference value; The electron beam interference value of the electron microscope is used to reflect the interference degree of the electron beam of the electron microscope on the analysis of the aerosol particle spectrum characteristics; Judge whether it meets the qualified conditions of the electron microscope based on the monitored electron beam interference value of the electron microscope; The qualified conditions of the electron microscope indicate that the electron beam interference value of the electron microscope is not greater than the preset electron beam interference value of the electron microscope; If the monitored electron beam interference value of the electron microscope meets the qualified conditions of the electron microscope, send a qualified prompt, obtain the aerosol particle spectrum and perform the accuracy evaluation of the aerosol particle spectrum characteristic analysis; If the monitored electron beam interference value of the electron microscope does not meet the qualified conditions of the electron microscope, optimize the electron beam interference of the electron microscope.

7. The aerosol particle spectrum feature analysis method based on an electron microscope according to claim 6, wherein The specific process of optimizing the electron beam interference of the electron microscope is as follows: Perform the operation of reducing the acceleration voltage; The operation of reducing the acceleration voltage means sending a prompt to the preset personnel to gradually reduce the acceleration voltage of the electron microscope; The operation of reducing the acceleration voltage also includes the operation of shortening the irradiation time; The operation of shortening the irradiation time means sending a prompt to the preset personnel to gradually shorten the irradiation time; If the re-obtained electron beam interference value of the electron microscope meets the qualified conditions of the electron microscope after the operation of reducing the acceleration voltage, and the monitored irradiation time is greater than the preset minimum irradiation time, send a qualified prompt, obtain the aerosol particle spectrum and perform the accuracy evaluation of the aerosol particle spectrum characteristic analysis; Perform the electron beam judgment of the electron microscope; The electron beam judgment of the electron microscope means that after the optimization of the electron beam interference of the electron microscope, re-judge whether the electron beam interference value of the electron microscope meets the qualified conditions of the electron microscope; If the re-obtained electron beam interference value of the electron microscope meets the qualified conditions of the electron microscope after the electron beam judgment of the electron microscope, send a qualified prompt, obtain the aerosol particle spectrum and perform the accuracy evaluation of the aerosol particle spectrum characteristic analysis, otherwise, send an alarm to the preset personnel.

8. The aerosol particle spectrum feature analysis method based on an electron microscope according to claim 1, wherein After the evaluation of the electron beam interference of the electron microscope is qualified, perform the accuracy evaluation of the aerosol particle spectrum characteristic analysis to quantitatively evaluate the accuracy of the aerosol particle spectrum characteristic analysis. The specific process is as follows: After performing the ratio analysis of the preset particle surface charge quantity and the particle surface charge quantity, combined with the density deviation rate for weighted analysis to obtain the particle surface charge quantity deviation value, which is used to reflect the influence of the particle surface charge quantity on the accuracy of the aerosol particle spectrum characteristic analysis during the preset analysis period; After performing the ratio analysis of the preset charge distribution ratio and the charge distribution ratio, combined with the distribution deviation rate for weighted analysis to obtain the charge distribution ratio deviation value, which is used to reflect the influence of the charge distribution ratio on the accuracy of the aerosol particle spectrum characteristic analysis during the preset analysis period; After performing the ratio analysis of the preset electron beam interference value of the electron microscope and the electron beam interference value of the electron microscope, combined with the interference deviation rate for weighted analysis to obtain the electron beam interference deviation value of the electron microscope, which is used to reflect the influence of the electron beam interference value of the electron microscope on the accuracy of the aerosol particle spectrum characteristic analysis during the preset analysis period; The obtained spectral feature analysis deviation values are multi-dimensionally coupled to obtain the accurate spectral feature analysis value; The accurate spectral feature analysis value is used to reflect the comprehensive influence of the spectral feature analysis interference value in the preset analysis time period and the preset spectral feature analysis interference value on the accuracy of aerosol particle spectral feature analysis; The spectral feature analysis deviation values include: the particle surface charge amount deviation value, the charge distribution ratio deviation value, and the electron microscope electron beam interference deviation value.

9. The aerosol particle spectrum characteristic analysis method based on an electron microscope according to claim 8, wherein, The specific process of judging whether to optimize the aerosol particle spectral feature analysis based on the spectral feature analysis qualification conditions is as follows: Judge whether the monitored accurate spectral feature analysis value meets the spectral feature analysis qualification conditions; The spectral feature analysis qualification conditions indicate that the monitored accurate spectral feature analysis value is greater than the preset accurate spectral feature analysis value; If the monitored accurate spectral feature analysis value meets the spectral feature analysis qualification conditions, send a qualified prompt; If the monitored accurate spectral feature analysis value does not meet the spectral feature analysis qualification conditions, optimize the aerosol particle spectral feature analysis; The specific process of optimizing the aerosol particle spectral feature analysis is as follows: First step, perform a dilution operation; Performing the dilution operation means gradually reducing the particle concentration by sending a prompt to a preset person; Performing the dilution operation also includes monitoring the residence time; Monitoring the residence time means monitoring the residence time of aerosol particles in the aerosol diluter; If the accurate spectral feature analysis value re-obtained after performing the dilution operation meets the spectral feature analysis qualification conditions, send a qualified prompt, otherwise, perform the second step; Second step, perform a voltage adjustment operation; Performing the voltage adjustment operation means gradually reducing the angle of the voltage regulator knob of the charger by sending a prompt to a preset person; If the accurate spectral feature analysis value re-obtained after performing the voltage adjustment operation meets the spectral feature analysis qualification conditions, send a qualified prompt, otherwise, send an alarm to a preset person.

10. An aerosol particle spectrum characteristic analysis system based on an electron microscope, characterized in that, It includes an aerosol particle filtration evaluation module, an aerosol particle spectrum pre-evaluation module, an electron microscope electron beam interference evaluation module, and an aerosol particle spectral feature analysis accuracy evaluation module; The aerosol particle filtration evaluation module is used to perform aerosol particle filtration evaluation during the aerosol particle filtration process to quantitatively evaluate the qualification degree of aerosol particle filtration, and judge whether to optimize the aerosol particle filtration based on the filtration qualification conditions. The aerosol particle filtration optimization is used to improve the qualification of aerosol particle filtration during the aerosol particle filtration process; The aerosol particle spectrum pre-evaluation module is used to perform aerosol particle spectrum pre-evaluation after the aerosol particle filtration evaluation is qualified to quantitatively evaluate the accuracy of the aerosol particle spectrum pre-evaluation, and judge whether to optimize the spectral feature initial evaluation based on the spectral feature pre-evaluation qualification conditions. The spectral feature initial evaluation optimization is used to improve the accuracy of the aerosol particle spectrum pre-evaluation; The electron beam interference evaluation module of the electron microscope is used to perform the electron beam interference evaluation of the electron microscope to quantitatively evaluate the degree of interference of the electron beam of the electron microscope after the pre-evaluation of the aerosol particle spectrum is qualified, and determine whether to optimize the electron beam interference of the electron microscope based on the qualified conditions of the electron microscope. The electron beam interference optimization of the electron microscope is used to improve the anti-interference ability of the aerosol particle spectrum feature analysis; The accuracy evaluation module of the aerosol particle spectrum feature analysis is used to perform the accuracy evaluation of the aerosol particle spectrum feature analysis to quantitatively evaluate the accuracy of the aerosol particle spectrum feature analysis after the electron beam interference evaluation of the electron microscope is qualified, and determine whether to optimize the aerosol particle spectrum feature analysis based on the qualified conditions of the spectrum feature analysis. The aerosol particle spectrum feature analysis optimization is used to improve the accuracy of the aerosol particle spectrum feature analysis.

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