Design method and verification method of middle-infrared band narrow-band metal nanopore array optical filter

Abstract

The invention provides a design method and a verification method of a middle-infrared band narrow-band metal nanopore array optical filter, and belongs to the technical field of micro-nano optics in order to solve the problems that in the prior art, a device is not ideal in light weight and miniaturization, high in loss, low in resolution ratio, low in energy efficiency and the like. The function of the band-pass multispectral optical filter is shown as a band-pass multispectral optical filter. According to the design method, a method of filling metal NHAs with an amorphous GST material (a-Ge2Sb2Te5) is adopted to carry out special modulation on incident light, and LSPR in the nanopore array is enhanced, so that the local electric field intensity and the energy transmittance of an EOT phenomenon are further improved. According to the design method of the optical filter, the band-pass position can be controlled by geometric parameters of NHAs, and the optical filter has the advantages of high energy efficiency, high spectral resolution, easiness in integration, simple structure and the like, and has important prospects in the fields of mid-infrared high-performance spectral filtering, sensing and detection.

Description

Technical Field

[0001] The present invention belongs to the technical field of micro-nano optics, and particularly relates to a design method for a narrow-band metal nanohole array filter in the mid-infrared band. Background Art

[0002] As an important part of the molecular fingerprint region, mid-wave infrared has the ability to perform highly selective qualitative and quantitative analysis on specific targets, and is widely used in fields such as fire detection, mineral exploration, aerospace, etc. To adapt to the applications in these fields, devices for infrared spectral imaging analysis are gradually developing towards lightweight and integration. Currently, many highly integrated infrared multispectral filters have been proposed, such as FP filters, linear gradient LVF filters, guided-mode resonance GMR filters, etc. These filters achieve filtering by adjusting the resonant layer material. However, there are few and expensive resonant layer materials available for the infrared band, which greatly increases the cost. Moreover, the film layer stress caused by temperature changes affects the resonant layers, and the service life is questionable. As a kind of micro-nano filter, the metal nanohole array (NHAs) filter has the advantages of wide modulation bandwidth, single material, and low cost, and has been widely proposed. However, the inherent ohmic loss of the metal limits the transmission efficiency and resolution of the metal nanohole array filter.

[0003] Through in-depth research on the metal NHAs filter, we found that the extraordinary optical transmission (EOT) phenomenon that occurs in NHAs is greatly affected by the refractive indices of the media inside and on the upper and lower surfaces of the nanoholes. When there is a high refractive index medium, the local surface plasmon resonance (LSPR) in the nanoholes will be significantly enhanced, thereby improving the transmittance and resolution.

[0004] Therefore, based on concepts such as local surface plasmon resonance and EOT effect, the present invention proposes a design method for a narrow-band metal NHAs filter in the mid-infrared band, whose function is manifested as a band-pass multispectral filter. This design method uses the method of filling amorphous GST material (a-Ge2Sb2Te5) into the metal NHAs to specially modulate the incident light, enhance the LSPR inside the nanohole array, and further improve the local electric field intensity and the energy transmittance of the EOT phenomenon. The band-pass position of the filter design method of the present invention can be controlled by the geometric parameters of the NHAs, and has the advantages of high energy efficiency, high spectral resolution, easy integration, simple structure, etc., and has important prospects in the fields of mid-infrared high-performance spectral filtering, sensing, and detection. Summary of the Invention

[0005] In order to solve the problems existing in the prior art such as unsatisfactory lightweight and miniaturization of devices, high loss, low resolution, and low energy efficiency, the present invention proposes a design method for a narrow-band metal NHAs filter in the mid-infrared band.

[0006] To achieve the above object, the present invention provides the following technical solutions:

[0007] The present invention proposes a design method for a narrow-band metal NHAs filter in the mid-infrared band. The design method includes the following steps:

[0008] Step 1: Design a narrow-band metal NHAs filter device in the mid-infrared band;

[0009] Step 2: Obtain the basic data of each spectral channel, including the central wavelength, the number of channels, the working wavelength range, and the pixel size, and inversely calculate the NHAs period data corresponding to each central wavelength;

[0010] Step 3: Set the arrangement mode of the nanopores of the filter device, specifically: starting from the center coordinates of the array, taking the period as the step length, set the nanopores according to the triangular lattice arrangement mode, and the size of each array is the same as the pixel size. The nanopores of the remaining channel arrays are set in this way;

[0011] Step 4: Fill all the nanopores with amorphous GST-225 material, and the filling thickness is the same as the height of the nanopores.

[0012] Further, the filter device designed in the above step 1 includes a mid-infrared high-transmission CaF2 substrate, an Ag nano-film, a nanopore array, and an amorphous GST filling material.

[0013] Further, the basic data of each spectral channel is obtained through a matched mid-infrared photodetector;

[0014] According to the required central wavelength and the number of channels, inversely calculate the period data corresponding to each central wavelength of the filter;

[0015] The formula is:

[0016]

[0017] where λ max is the central wavelength, P is the period of the nanopore array, ε m and ε d are the dielectric constants of the Ag nano-film and the CaF2 substrate respectively, and i and j are the diffraction orders in the x and y directions respectively.

[0018] Further, the nanopore array on the Ag nano-film is filled with amorphous GST material, and the filling height is the same as the thickness of the Ag nano-film.

[0019] The present invention also proposes a verification method for verifying a metal nanopore array filter implemented by the design method of a narrow-band metal nanopore array filter in the mid-infrared band described in any one of the above. The verification method is:

[0020] Step Five: Use the finite-difference time-domain (FDTD) method to simulate the designed mid-infrared narrow-band metal NHAs filter, and verify the consistency between the center wavelength of the array and the initially obtained value;

[0021] Step Six: For the amorphous GST inside the small holes, perform encrypted calculations using a local grid with an accuracy of 10 nm in the x and y directions and 5 nm in the z direction to complete the verification of the LSPR and local electric field enhancement effects inside the small holes;

[0022] Step Seven: Use the perfectly matched layer (PML) and symmetric boundary conditions to improve the FDTD operation speed, and at the same time set steepangle and increase the number of PML layers to 32;

[0023] Step Eight: Compare the power spectrum data captured by the monitor with the initially calculated value.

[0024] Furthermore, when using the finite-difference time-domain (FDTD) method for simulation, periodic boundaries are selected to discretize each nanopore for simulation.

[0025] Furthermore, Step Eight specifically is:

[0026] Set 501 sampling points in the range of 2 - 6 μm, use a monitor placed under the substrate to extract the power spectrum results calculated by FDTD, extract the peak energy transmittance parameter and the position of the 0th main peak, and compare them with the initially selected values to verify the accuracy of the design.

[0027] The verification method described in the present invention can be fully implemented using computer software. Therefore, correspondingly, the present invention also provides a verification system, which includes a storage device for executing the verification method described in any one of the above.

[0028] The present invention also proposes a computer-readable storage medium, on which a computer program is stored. When the computer program is run by a processor, it executes the verification method described in any one of the above.

[0029] The present invention also proposes a computer device, which includes a memory and a processor. A computer program is stored in the memory. When the processor runs the computer program stored in the memory, the processor executes the verification method described in any one of the above

[0030] The beneficial effects of the present invention are:

[0031] 1. Based on concepts such as local surface plasmon resonance and EOT effect, the present invention proposes a design method for a narrow-band metal NHAs filter in the mid-infrared band, whose function is manifested as a band-pass multispectral filter. This design method uses the method of filling metal NHAs with amorphous GST material (a-Ge2Sb2Te5) to specially modulate the incident light, enhance the LSPR inside the nanopore array, and further improve the local electric field strength and the energy transmittance of the EOT phenomenon.

[0032] Furthermore, the band-pass position of the filter design method of the present invention can be controlled by the geometric parameters of NHAs, and it has the advantages of high energy efficiency, high spectral resolution, easy integration, simple structure, etc., and has important prospects in the fields of mid-infrared high-performance spectral filtering, sensing, and detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the following drawings are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0034] Figure 1 It is a schematic diagram of the array arrangement of the narrow-band nanopore array filter in the mid-infrared band proposed by the present invention;

[0035] Figure 2 It is a schematic diagram of the structure of the narrow-band nanopore array filter in the mid-infrared band proposed by the present invention;

[0036] Figure 3 It is an experimental optical path diagram for verifying the narrow-band nanopore array filter in the mid-infrared band of the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0037] In the following description, specific details such as specific system structures and technologies are presented for the purpose of illustration rather than limitation, so as to thoroughly understand the embodiments of the present application. However, those skilled in the art should clearly understand that the present application can also be implemented in other embodiments without these specific details. In other cases, detailed descriptions of well-known systems, devices, circuits, and methods are omitted to avoid unnecessary details from interfering with the description of the present application.

[0038] The following further elaborates on the specific embodiments of the present invention in conjunction with the accompanying drawings. The following embodiments will assist those skilled in the art in further understanding the present invention, but do not limit the present invention in any form. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several changes and improvements can still be made, and these all fall within the protection scope of the present invention.

[0039] Embodiment 1. To solve the problems existing in the prior art, such as unsatisfactory lightweight miniaturization of devices, high loss, low resolution, and low energy efficiency, a design method for a narrowband metal nanopore array filter in the mid-infrared band is proposed.

[0040] The design method includes the following steps:

[0041] Step 1: Design a narrowband metal NHAs filter device in the mid-infrared band;

[0042] Step 2: Obtain the basic data of each spectral channel, including the central wavelength, number of channels, working wavelength range, and pixel size, and inversely calculate the NHAs period data corresponding to each central wavelength;

[0043] Step 3: Set the arrangement mode of the nanopores of the filter device. Specifically: starting from the central coordinate of the array, using the period as the step size, set the nanopores according to the triangular lattice arrangement mode. The size of each array is the same as the pixel size, and the nanopores of the remaining channel arrays are set in this way;

[0044] Step 4: Fill all the nanopores with amorphous GST-225 material, and the filling thickness is the same as the height of the nanopores.

[0045] Embodiment 2. In combination with Figure 1 and Figure 2 This embodiment specifically describes a design method for a narrowband metal nanopore array filter in the mid-infrared band proposed in the above Embodiment 1;

[0046] Step 1: Design a narrowband metal NHAs filter device in the mid-infrared band;

[0047] Specifically:

[0048] As Figure 2As shown in the figure, the device designed in Step 1 includes four parts: a mid-infrared band highly transparent CaF2 substrate, an Ag nanometer thin film, a nanohole array, and an amorphous GST filling material. The incident light irradiates the Ag nanometer thin film along the normal direction, exciting surface plasmon polaritons (SPPs) and propagating along the surface of the Ag nanometer thin film. Subsequently, it is jointly modulated by the periodic NHAs on the Ag nanometer thin film and the amorphous GST inside the NHAs, forming enhanced LSPR. Since the small holes are filled with amorphous GST, the LSPR resonance is enhanced, resulting in an extremely strong local electric field. The LSPRs excited on the upper and lower surfaces of the Ag nanometer thin film are coupled in the small holes filled with amorphous GST and exit at the lower surface output end. The CaF2 substrate conducts the energy at the output end to the detector pixel with extremely low energy loss for spectral analysis.

[0049] Step 2: Obtain the basic data of each spectral channel, including the central wavelength, number of channels, working wavelength range, and pixel size, and inversely calculate the period data of NHAs corresponding to each central wavelength;

[0050] Specifically:

[0051] In Step 2, the basic data such as the pixel size and wavelength range are obtained by a matching mid-infrared photodetector, and the period data corresponding to each central wavelength of the filter is inversely calculated according to the required central wavelength and number of channels. The relationship between the central wavelength λmax and the period P can be described as:

[0052]

[0053] where P is the period of the nanohole array, ε m and ε d are the dielectric constants of the Ag nanometer thin film and the CaF2 substrate respectively, and i and j are the diffraction orders in the x and y directions respectively. Each array's transmission spectrum has a 0th-order main peak and multiple high-order diffraction peaks. The position of the 0th-order main peak can be calculated by setting (i,j)=(1,0) or (i,j)=(0,1), and the positions of the high-order diffraction peaks can be calculated by setting higher (i,j) values. Finally, the period data of NHAs for each channel are inversely calculated according to formula (1).

[0054] Step 3: Set the arrangement mode of the nanoholes of the filter device. Specifically: Starting from the center coordinates of the array, taking the period as the step size, set the nanoholes according to the triangular lattice arrangement mode. The size of each array is the same as the pixel size, and the nanoholes of the remaining channel arrays are set by this method;

[0055] Specifically:

[0056] Starting from the center coordinates of the array, with the period as the step size, nanopores are set according to the triangular lattice arrangement pattern. The size of each array is the same as the pixel size, and the nanopores of the remaining channel arrays are set in this way. The specific implementation is as follows: Figure 1 As shown in Figure 1 , starting from the center coordinates (0, 0) of the array, with the period P as the step size, nanopores are set according to the equilateral triangular lattice arrangement pattern, so that the distance between every two adjacent small holes is the period P. Taking channel 1 as an example, the central wavelength is λ1, the corresponding period is P1. When arranging nanopores in an equilateral triangle, starting from the nanopore at the center coordinates, one nanopore is set in each of the directions of 0°, 60°, 120°, 180°, 240°, and 300°, and the distance from the center coordinates is P1, and they are arranged in sequence until the entire array is covered. The size of each array is the same as the pixel size, and the nanopores of the remaining channel arrays are set in this way.

[0057] Step 4: Fill all the nanopores with amorphous GST-225 material, and the filling thickness is the same as the height of the nano-through hole.

[0058] Specifically:

[0059] In the said step 4, the nanopore array on the Ag nano-film is filled with amorphous GST material, and the filling height is the same as the thickness of the Ag nano-film. Amorphous GST has a high refractive index and a low extinction coefficient, and at the same time has a high degree of disorder. When light propagates in a disordered crystal, multiple scattering effects will occur, thus forming strong local states. Filling GST in the nanopores will produce a stronger localization effect on light, thereby improving the energy transmittance of the EOT effect and restricting the full width at half maximum of the transmission spectrum.

[0060] A design method of a narrowband metal nanopore array filter in the mid-infrared band proposed in this embodiment is based on concepts such as local surface plasmon resonance and EOT effect, and its function is manifested as a band-pass multi-spectral filter. This design method uses the method of filling amorphous GST material (a-Ge2Sb2Te5) into metal NHAs to specially modulate the incident light, enhance the LSPR inside the nanopore array, and further improve the local electric field strength and the energy transmittance of the EOT phenomenon.

[0061] Furthermore, the band-pass position of the filter design method described in this embodiment can be controlled by the geometric parameters of NHAs, and has the advantages of high energy efficiency, high spectral resolution, easy integration, simple structure, etc., and has important prospects in the fields of mid-infrared high-performance spectral filtering, sensing, and detection.

[0062] Embodiment 3. This embodiment proposes a verification method for verifying the metal nanopore array filter implemented by the design method of the mid-infrared band narrowband metal nanopore array filter described in Embodiment 1 or Embodiment 2 above;

[0063] It includes the following steps:

[0064] Step 5: Use the finite-difference time-domain method FDTD to perform simulation on the designed mid-infrared narrowband metal NHAs filter, and verify the consistency between the center wavelength of the array and the initially obtained value;

[0065] Step 6: Perform encrypted calculation on the amorphous GST inside the small holes using a local grid with an accuracy of 10 nm in the x and y directions and 5 nm in the z direction to complete the verification of the LSPR and local electric field enhancement effects inside the small holes;

[0066] Step 7: Use the perfectly matched layer PML and symmetric boundary conditions to improve the FDTD operation speed, and at the same time set steepangle and increase the number of PML layers to 32;

[0067] Step 8: Compare the power spectrum data captured by the monitor with the initial calculated value.

[0068] Embodiment 4. Combining Figure 3 This embodiment is a further specific description of the verification method proposed in Embodiment 3 above;

[0069] Step 5: Use the finite-difference time-domain method FDTD to perform simulation on the designed mid-infrared narrowband metal NHAs filter, and verify the consistency between the center wavelength of the array and the initially obtained value;

[0070] Specifically:

[0071] In Step 5, use the finite-difference time-domain method FDTD in commercial numerical simulation software to simulate the designed mid-infrared narrowband metal NHAs filter, and verify the consistency between the center wavelength of the array and the initially obtained value. Simulate the NHAs filter filled with amorphous GST in the commercial simulation software Ansys Lumerical FDTD. The NHAs with pixel size will occupy a huge amount of memory and simulation time in the FDTD simulation. Therefore, periodic boundaries are used to discretize each nanopore for simulation. The filtering effect of the entire NHAs with pixel size can be deduced by simulating the optical response of a single nanopore. Thus, data such as energy transmittance and center wavelength position are obtained, and compared with the initially selected values to verify the accuracy.

[0072] Step Six: For the amorphous GST inside the small hole, perform encrypted calculations using a local grid with an accuracy of 10 nm in the x and y directions and 5 nm in the z direction to complete the verification of the LSPR and local electric field enhancement effects inside the small hole;

[0073] Specifically:

[0074] In Step Six, for the amorphous GST inside the small hole, perform encrypted calculations using a local grid with an accuracy of 10 nm in the x and y directions and 5 nm in the z direction, making the calculations of the LSPR and local electric field enhancement effects inside the small hole more accurate. This step depends on the computing power of the computer CPU used. Different computing powers result in different required calculation times. The CPU model of the computer used in the numerical simulation steps of the present invention is AMD Ryzen ThreadRipper 5955WX. For the amorphous GST inside the small hole, a locally encrypted grid is used, with an accuracy of 10 nm in the x and y directions and 5 nm in the z direction. The numerical calculation takes 13 minutes and 36 seconds. The grid can be further reduced according to the computing power of the used CPU to achieve higher calculation accuracy, and the results of the LSPR and local electric field enhancement calculated by the numerical simulation are also more accurate.

[0075] Step Seven: Use the perfectly matched layer PML and symmetric boundary conditions to improve the FDTD operation speed, and at the same time set steepangle and increase the PML layer number to 32;

[0076] Specifically:

[0077] In Step Seven, use the perfectly matched layer PML and symmetric boundary conditions to improve the FDTD operation speed, set steepangle and increase the PML layer number to 32 to make the simulation more accurate. Use the commercial simulation software Ansys Lumerical FDTD to perform simulation calculations on a single-period nanopore. Since only a single period is simulated, the reflection and scattering of electromagnetic waves at the periodic boundary will seriously affect the calculation results. In this design method, the perfectly matched layer PML is used to solve this problem. By setting steepangle, the complex scattering conditions at the exit end of the nanopore and inside the amorphous GST are simulated, and the PML layer number is increased to 32. The increase in the layer number can better eliminate the influence of boundary scattering and reflection and improve the calculation accuracy. The symmetric boundary condition can reduce the simulation time by 1 / 2 and improve the calculation efficiency.

[0078] Step Eight: Compare the power spectrum data captured by the monitor with the initial calculated value.

[0079] Specifically:

[0080] In Step 8, compare the power spectrum data captured by the monitor with the initial calculated value. Set 501 sampling points in the range of 2 - 6 μm, and use the monitor placed under the substrate to extract the power spectrum results calculated by FDTD. Extract the peak energy transmittance parameter and the position of the 0 - level main peak, and compare them with the initially selected values to verify the accuracy of the design.

[0081] When conducting verification in this embodiment, it is also necessary to set up an experimental optical path for the mid - infrared band narrow - band nano - pore array filter. As shown in Figure 3, the optical path structure includes a mid - infrared radiation source, a grating monochromator, a collimator, a lens, a narrow - band nano - pore array filter, and a detector.

[0082] Embodiment 5: The verification methods proposed in the above - mentioned Embodiment 4 or Embodiment 5 can all be implemented by computer software. Therefore, correspondingly, this embodiment proposes a verification system, which includes:

[0083] A storage device for simulating and verifying the consistency between the center wavelength of the array and the initially obtained value by using the finite - difference time - domain method (FDTD) for the designed mid - infrared narrow - band metal NHAs filter;

[0084] A storage device for performing encrypted calculations on the amorphous GST inside the small holes using a local grid with an accuracy of 10 nm in the x and y directions and 5 nm in the z direction to complete the verification of the LSPR and local electric field enhancement effects inside the small holes;

[0085] A storage device for using the perfectly matched layer (PML) and symmetric boundary conditions to improve the FDTD operation speed, and at the same time setting steepangle and increasing the number of PML layers to 32;

[0086] A storage device for comparing the power spectrum data captured by the monitor with the initial calculated value.

[0087] Embodiment 6: This embodiment proposes a computer - readable storage medium, characterized in that a computer program is stored on the computer - readable storage medium, and when the computer program is run by a processor, the verification method described in the above - mentioned Embodiment 3 or Embodiment 4 is executed.

[0088] Embodiment 7: This embodiment proposes a computer device, which includes a memory and a processor. A computer program is stored in the memory, and when the processor runs the computer program stored in the memory, the processor executes the verification method described in the above - mentioned Embodiment 3 or Embodiment 4.

[0089] A computer device provided by this embodiment, the hardware device in this part is a general model and is not shown in the form of a diagram. The system includes a processor and a memory, where the processor and the memory can be connected through a bus or other means. The memory, as a non-transitory computer-readable storage medium, can be used to store non-transitory software programs, non-transitory computer-executable programs, and modules, as well as corresponding program instructions / modules. The processor executes various functional applications and data processing of the processor by running the non-transitory software programs, instructions, and modules stored in the memory, so as to implement the verification method and steps proposed in the above embodiment.

[0090] The above are only the embodiments of the present invention and do not limit the present invention. For those skilled in the art, the present invention can have various changes and modifications. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the scope of the claims of the present invention.

Claims

1. A design method for a narrow-band metal nanopore array filter in the mid-infrared band, characterized in that, Including: Step 1: Design a narrowband metal NHAs filter device in the mid-infrared band; Step 2: Obtain the basic data of each spectral channel, including the central wavelength, number of channels, operating wavelength range, and pixel size, and inversely calculate the NHAs period data corresponding to each central wavelength; Step 3: Set the arrangement of the nanopores of the filter device, specifically: starting from the central coordinate of the array, taking the period as the step size, setting the nanopores according to the triangular lattice arrangement pattern, the size of each array is the same as the pixel size, and the nanopores of the remaining channel arrays are set in this way; Step 4: Fill all the nanopores with amorphous GST-225 material, and the filling thickness is the same as the height of the nanopore through-holes.

2. The design method of a narrowband metal nanopore array filter in the mid-infrared band according to claim 1, wherein The filter device designed in Step 1 includes a mid-infrared high-transmission CaF2 substrate, an Ag nanometer thin film, a nanopore array, and an amorphous GST filling material.

3. A design method of a narrow-band metal nanopore array filter in the mid-infrared band according to claim 2, characterized in that Obtain the basic data of each spectral channel through a matched mid-infrared photodetector; Inverse calculate the period data corresponding to each central wavelength of the filter according to the required central wavelength and number of channels; The formula is: where λ max is the central wavelength, P is the period of the nanopore array, ε m and ε d are the dielectric constants of the Ag nanofilm and the CaF2 substrate, respectively, and i and j are the diffraction orders in the x- and y-directions, respectively.

4. The design method of a narrow-band metal nanopore array filter in the mid-infrared band according to claim 3, characterized in that Fill the nanopore array on the Ag nanometer thin film with amorphous GST material, and the filling height is the same as the thickness of the Ag nanometer thin film.

5. A verification method for verifying a metal nanopore array filter implemented by the design method of a mid-infrared band narrowband metal nanopore array filter according to any one of claims 1-4, characterized in that, The method is: Step 5: Use the finite-difference time-domain method FDTD to simulate the designed mid-infrared narrowband metal NHAs filter, and verify the consistency between the central wavelength of the array and the initially obtained value; Step 6: Perform encrypted calculation on the amorphous GST inside the small holes using a local grid with an accuracy of 10 nm in the x and y directions and 5 nm in the z direction to complete the verification of the LSPR and local electric field enhancement effects inside the small holes; Step 7: Use the perfectly matched layer PML and symmetric boundary conditions to improve the FDTD operation speed, and at the same time set steepangle and increase the number of PML layers to 32; Step 8: Compare the power spectrum data captured by the monitor with the initially calculated value.

6. The verification method according to claim 5, characterized in that, When using the finite-difference time-domain method FDTD for simulation, select periodic boundaries to discretize and simulate each nanopore.

7. The verification method according to claim 5, characterized in that Step 8 is specifically: Set 501 sampling points in the range of 2-6 μm, use a monitor placed under the substrate to extract the power spectrum results calculated by FDTD, extract the peak energy transmittance parameter and the position of the 0th main peak, and compare them with the initially selected values to verify the accuracy of the design.

8. Verification system, characterized in that, The verification system includes a storage device, and the storage device is used to execute the verification method described in any one of claims 5-7.

9. A computer-readable storage medium, characterized in that, A computer program is stored on the computer-readable storage medium, and when the computer program is run by a processor, the processor executes the verification method described in any one of claims 5-7.

10. A computer device, characterized in that, The device includes a memory and a processor, a computer program is stored in the memory, and when the processor runs the computer program stored in the memory, the processor executes the verification method described in any one of claims 5-7.

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