Light uniformizing assembly, laser module and laser equipment

Abstract

The invention relates to a dodging assembly, a laser module and laser equipment. The dodging assembly comprises an installation supporting plate, a support and a fly-eye lens. The bracket is arranged on the mounting supporting plate; the fly's-eye lens is arranged on the support, the support can drive the fly's-eye lens to move relative to the installation supporting plate in the first direction, and the first direction is parallel to the axial direction of the fly's-eye lens. According to the dodging assembly, parameter differences such as light beam divergence characteristics and laser chip spacing of laser assemblies of different specifications can be compensated to adapt to the laser assemblies of different specifications, the adaptability of the dodging assembly is improved, the displacement of the fly-eye lens can be compensated, the light beam convergence or divergence angle is optimized, a flexible debugging means is provided for the fly-eye lens, and the debugging efficiency is improved. And the stability and the light beam quality of the fly-eye lens are improved.

Description

Technical Field

[0001] This application relates to the technical field of laser homogenization, and particularly to a light homogenizing component, a laser module, and a laser device. Background Art

[0002] In laser devices such as laser heating devices and laser detection devices, the energy uniformity of the laser beam has a crucial impact on the processing accuracy and spot quality. As a beam homogenizing element, a fly-eye lens can achieve the homogenization of the energy distribution by splitting the beam emitted by the laser array into multiple sub-beams and recombining them. However, in traditional laser devices, it is difficult for the fly-eye lens to adapt to different laser arrays, and there is a lack of flexible debugging means, which affects the adaptability and stability of the fly-eye lens. Summary of the Invention

[0003] Based on this, it is necessary to provide a light homogenizing component, a laser module, and a laser device for the problem that in traditional laser devices, it is difficult for the fly-eye lens to adapt to different laser arrays and there is a lack of flexible debugging means.

[0004] A light homogenizing component includes: A mounting pallet; A bracket disposed on the mounting pallet; and, A fly-eye lens disposed on the bracket, and the bracket can drive the fly-eye lens to move relative to the mounting pallet in a first direction, and the first direction is parallel to the axis of the fly-eye lens.

[0005] In the above light homogenizing component, the fly-eye lens can move relative to the mounting pallet in the first direction. Thus, when the light homogenizing component is applied to a laser module and the mounting pallet is relatively fixed to the laser component of the laser module, by driving the fly-eye lens to move relative to the mounting pallet in the first direction through the bracket, the distance between the fly-eye lens and the laser component can be adjusted. In this way, when the fly-eye lens corresponds to laser components of different specifications (such as different powers, wavelengths, or models), by moving the fly-eye lens relative to the mounting pallet, the fly-eye lens can compensate for parameter differences such as the beam divergence characteristics and the laser chip pitch of different specifications of laser components, so as to adapt to different specifications of laser components and improve the adaptability of the light homogenizing component. When the fly-eye lens is displaced during installation or due to factors such as temperature change and mechanical vibration during the use of the laser module, the displacement of the fly-eye lens can also be compensated by moving the fly-eye lens relative to the mounting pallet, optimizing the beam convergence or divergence angle, providing a flexible debugging means for the fly-eye lens, and being beneficial to improving the stability of the fly-eye lens and the beam quality.

[0006] In one embodiment, the bracket is capable of driving the compound eye lens to move relative to the mounting plate along a second direction, and the compound eye lens is capable of moving relative to the bracket along a third direction. The second direction and the third direction are two mutually perpendicular directions on a plane perpendicular to the first direction. The ability of the compound eye lens to move relative to the mounting plate in two mutually perpendicular directions on a plane perpendicular to the axial direction is conducive to calibrating the lateral alignment accuracy between the compound eye lens and the laser assembly, compensating for the position offset of the compound eye lens caused by factors such as temperature changes or mechanical vibrations, and is also conducive to the compound eye lens adapting to laser assemblies of different specifications, providing flexible debugging means for the compound eye lens, and enhancing the adaptability and stability of the compound eye lens.

[0007] In one embodiment, the light homogenizing assembly includes a first adjusting member. The bracket is provided with a first adjusting hole extending along the first direction. The first adjusting member is disposed on the mounting plate and is slidably disposed in the first adjusting hole along the first direction.

[0008] In one embodiment, the mounting plate is provided with a second adjusting hole extending along the second direction. The light homogenizing assembly includes a second adjusting member. The second adjusting member is disposed on the bracket and is slidably disposed in the second adjusting hole along the second direction.

[0009] In one embodiment, the mounting plate is further provided with a chute extending along the second direction. The first adjusting member is slidably disposed in the chute along the second direction. The cooperation between the chute and the first adjusting hole can ensure that the movement of the compound eye lens relative to the mounting plate along the first direction and the second direction does not interfere with each other, which is conducive to improving the performance reliability of the light homogenizing assembly.

[0010] In one embodiment, the light homogenizing assembly further includes a third adjusting member. The bracket is provided with a third adjusting hole extending along the third direction. The third adjusting member is fixedly connected to the compound eye lens and is slidably disposed in the third adjusting hole along the third direction. Through the cooperation of structures such as adjusting members, adjusting holes, and chutes, mechanical adjustability is provided for the movement of the compound eye lens relative to the mounting plate, which is conducive to quickly adjusting the position of the compound eye lens relative to the mounting plate manually or automatically, reducing the debugging time, and improving the debugging efficiency.

[0011] A laser module includes a laser component and a light homogenizing component as described in any of the above embodiments. The laser component includes a substrate and a plurality of laser chips disposed on the substrate. The substrate is fixed on the mounting bracket, and the fly-eye lens is disposed on the light-emitting side of the plurality of laser chips. By using the above light homogenizing component in the laser module to homogenize the light emitted by the laser chips, the fly-eye lens includes a plurality of sub-lenses arranged in an array, which can divide the light beam emitted by the laser component into a plurality of sub-beams and recombine them, effectively improving the uniformity of the light beam energy distribution, so that the laser module can emit a flat-top distributed light spot, improving the uniformity of the light beam energy distribution and the light beam quality, and meeting the high-precision laser application requirements such as laser heating and laser detection.

[0012] In one embodiment, the fly-eye lens includes a plurality of sub-lenses arranged in an array, and the focal length F of the sub-lenses satisfies: 5mm ≤ F ≤ 15mm. In this way, the focal length of the sub-lenses in the fly-eye lens can be reasonably configured according to the laser component, so that the fly-eye lens can homogenize the light emitted by the laser component well and improve the uniformity of the light beam emitted by the laser module.

[0013] In one embodiment, the laser module further includes a heat dissipation plate. The heat dissipation plate is in thermal contact with the substrate. A cooling channel is provided in the heat dissipation plate, and the heat dissipation plate is further provided with a water inlet and a water outlet communicating with the cooling channel. By using the cooling medium flowing through the cooling channel to dissipate heat from the laser component, the high-efficiency heat dissipation requirement of the laser component can be met, which is beneficial to improving the performance stability and service life of the laser component and improving the light beam quality.

[0014] A laser device includes a laser module as described in any of the above embodiments. By using the above laser module in the laser device, it is beneficial to improve the uniformity of the light beam emitted by the laser device, meet the high-precision laser processing requirements, and at the same time can adapt to different specifications of laser components, improving the adaptability and stability of the laser device. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a bottom view of the laser module in some embodiments.

[0016] Figure 2 is Figure 1 a side view of the laser module shown.

[0017] Figure 3 It is a schematic optical path diagram of the laser module in some embodiments.

[0018] Figure 4 is Figure 1 a front view of the laser module shown.

[0019] Figure 5 is Figure 1Top view of the laser module shown

[0020] Figure 6 Isometric view of the light homogenizing component in some embodiments

[0021] Figure 7 Is Figure 6 Side view of the light homogenizing component shown

[0022] Figure 8 Is Figure 6 Front view of the light homogenizing component shown

[0023] Figure 9 Is Figure 8 Schematic cross-sectional view of the light homogenizing component shown along the A-A direction

[0024] Reference numerals: 10. Laser module; 11. Laser component; 111. Substrate; 112. Laser chip; 12. Heat dissipation plate; 121. Water inlet; 122. Water outlet; 13. Flexible circuit board; 131. Positive electrode; 132. Negative electrode; 20. Light homogenizing component; 21. Mounting support plate; 22. Fly-eye lens; 23. Bracket; 24. Pressing block; 251. First adjusting member; 252. Second adjusting member; 253. Third adjusting member; 261. First adjusting hole; 262. Second adjusting hole; 263. Third adjusting hole; 264. Slide groove; 271. First direction; 272. Second direction; 273. Third direction. Detailed implementation manners

[0025] To make the above objects, features, and advantages of the present application more apparent and understandable, the following describes the detailed implementation manners of the present application in conjunction with the accompanying drawings. Many specific details are set forth in the following description to fully understand the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present application. Therefore, the present application is not limited by the specific embodiments disclosed below.

[0026] In the description of the present application, it should be understood that if terms such as "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or positional relationship indicated by these terms is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present application.

[0027] In addition, if the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In the description of this application, if the term "a plurality" appears, the meaning of "a plurality" is at least two, such as two, three, etc., unless otherwise specifically defined.

[0028] In this application, unless otherwise clearly specified and defined, if terms such as "installed", "connected", "linked", "fixed", etc. appear, these terms should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the internal communication of two components or the interaction relationship between two components, unless otherwise clearly defined. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0029] In this application, unless otherwise clearly specified and defined, if there is a description such as a first feature being "on" or "under" a second feature, the meaning may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over", and "on top of" the second feature may mean that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath", and "underneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0030] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may also be an intermediate element. If an element is considered to be "connected" to another element, it may be directly connected to the other element or there may be an intermediate element at the same time. If so, the terms "vertical", "horizontal", "up", "down", "left", "right", and similar expressions used in this application are only for illustrative purposes and do not represent the only implementation.

[0031] Please refer to Figure 1 and Figure 2 as shown Figure 1 and Figure 2Schematic diagrams of the laser module 10 at different angles in some embodiments of the present application are respectively shown. The laser module 10 provided in the present application can form a laser device with a housing, and the laser device includes, but is not limited to, a laser heating device, a laser detection device, etc. When the laser device is a laser heating device, the laser device includes, but is not limited to, being used in the field of heating the surface coating of new energy devices such as perovskite batteries. The laser module 10 is used to emit a laser beam towards the surface coating of the perovskite battery to heat the surface coating, so that the surface coating peels off to achieve the recycling of the perovskite battery. When the laser device is a laser detection device, the laser device includes, but is not limited to, being used in the fields of laser ranging, laser three-dimensional detection, etc. The laser device may further include a sensing module. The laser module 10 is used to emit a laser towards a target, and the sensing module is used to receive the laser reflected from the target to obtain the distance information or three-dimensional imaging information of the target.

[0032] In some embodiments, the laser module 10 includes a laser component 11 and a light homogenizing component 20. The laser component 11 includes a substrate 111 and a plurality of laser chips 112 disposed on the substrate 111. The plurality of laser chips 112 are arranged in an array and are all used to emit laser beams. The laser chips 112 include, but are not limited to, vertical-cavity surface-emitting lasers (VCSELs), etc. The wavelength of the laser emitted by the laser chips 112 can be in the range of 300 nm - 1100 nm.

[0033] The light homogenizing component 20 includes a mounting support plate 21 and a fly-eye lens 22 mounted on the mounting support plate 21. The substrate 111 can be fixed on the mounting support plate 21, and the fly-eye lens 22 is disposed on the light-emitting side of the plurality of laser chips 112. The fly-eye lens 22 may include a plurality of sub-lenses arranged in an array. Each sub-lens can be opposite to one laser chip 112, or each sub-lens is opposite to a plurality of laser chips 112. The plurality of sub-lenses of the fly-eye lens 22 can divide the beams emitted by the plurality of laser chips 112 into a plurality of sub-beams and recombine them, thereby improving the uniformity of the beam energy distribution.

[0034] Reference Figure 3 As shown, in the laser module 10, the light homogenizing component 20 is used to homogenize the light emitted by the laser chips 112. The fly-eye lens 22 can effectively improve the uniformity of the beam energy distribution of the laser beam emitted by the laser module 10, so that the laser module 10 can emit a flat-top distributed light spot, improving the uniformity of the beam energy distribution and the beam quality, and meeting the high-precision laser application requirements such as laser heating and laser detection.

[0035] Taking a 4W vertical-cavity surface-emitting laser as the laser chip 112 as an example, in a traditional laser module, at a position 100 mm from the light-emitting surface of the laser chip, the energy density can reach 11 W / cm2 , but the laser energy of the light field in the central region is only about 67%, and the energy in the surrounding transition region accounts for 33%. The uneven energy distribution results in the waste of light energy and affects the beam quality. In some embodiments of the present application, the laser module 10 uses a fly-eye lens 22 to homogenize the laser beam emitted by the laser chip 112, so that the light field in the central region presents a flat-top distribution, and the proportion of the optical power of the light field in the central flat-top region can be increased to more than 90%, effectively improving the uniformity of the light field distribution and the utilization efficiency of light energy.

[0036] Combined with Figure 4 As shown, in some embodiments, the light-emitting surface (the surface facing away from the laser assembly 11) of each sub-lens in the fly-eye lens 22 is a convex surface, the light-incident surface (the surface facing the laser assembly 11) of each sub-lens can be a flat surface, and the focal lengths of each sub-lens can be equal. In some embodiments, the focal length F of each sub-lens satisfies: 5mm ≤ F ≤ 15mm. For example, it can be 5mm, 7mm, 10mm, 13mm or 15mm, and can be specifically set according to the homogenization requirements of the laser chip 112. In this way, the focal length of the sub-lenses in the fly-eye lens 22 can be reasonably configured according to the laser assembly 11, so that the fly-eye lens 22 can well homogenize the light emitted by the laser assembly 11 and improve the uniformity of the beam emitted by the laser module 10.

[0037] Referring to Figure 2 and Figure 5 As shown, in some embodiments, the laser module 10 further includes a heat dissipation plate 12. The heat dissipation plate 12 is in thermal contact with the substrate 111. A cooling channel is provided in the heat dissipation plate 12. For example, a plurality of fins arranged in an array can be provided in the heat dissipation plate 12, and the plurality of fins and the heat dissipation plate 12 jointly enclose to form a cooling channel. The heat dissipation plate 12 is also provided with a water inlet 121 and a water outlet 122 communicating with the cooling channel. During the use of the laser module 10, the water inlet 121 can be connected to an external water pipe, and the external cooling medium can flow into the cooling channel from the water inlet 121, absorb the heat from the laser assembly 11 in the cooling channel and then flow out from the water outlet 122, so as to realize the heat dissipation of the laser assembly 11. The cooling medium includes but is not limited to any suitable fluid such as water and ethylene glycol. By using the cooling medium flowing through the cooling channel to dissipate heat from the laser assembly 11, the high-efficiency heat dissipation requirements of the laser assembly 11 can be met, which is beneficial to improving the performance stability and service life of the laser assembly 11 and improving the beam quality.

[0038] In some embodiments, the surface of the heat dissipation plate 12 facing the laser assembly 11 is connected to the substrate 111, and the substrate 111 includes, but is not limited to, a ceramic material. A flexible printed circuit board 13 (FPC) may be disposed on the heat dissipation plate 12. The laser chip 112 is connected to the positive electrode 131 of the flexible printed circuit board 13 through a gold wire. The negative pin of the laser chip 112 conducts the circuit through the flexible printed circuit board 13. The flexible printed circuit board 13 has a positive electrode 131 and a negative electrode 132 for connecting to a power supply or a control device, so as to be able to connect the laser chip 112 to a power supply or a control circuit. A solder paste or a solder sheet may be disposed between the substrate 111 and the heat dissipation plate 12 and connected by an eutectic soldering method.

[0039] Further, referring Figure 6 and Figure 7 As shown, in some embodiments, the homogenizing component 20 further includes a bracket 23. The bracket 23 is movably disposed on the mounting tray 21. The fly-eye lens 22 is disposed on the bracket 23. The bracket 23 can move relative to the mounting tray 21 along the first direction 271 to drive the fly-eye lens 22 to move relative to the mounting tray 21 along the first direction 271. The first direction 271 is parallel to the axis of the fly-eye lens 22. It can be understood that the mounting tray 21 is relatively fixed to the laser assembly 11. When the fly-eye lens 22 moves relative to the mounting tray 21 along the first direction 271, the fly-eye lens 22 also moves relative to the laser assembly 11 along the first direction 271 at the same time, so that the distance between the fly-eye lens 22 and the laser chip 112 changes.

[0040] For the above homogenizing component 20, the fly-eye lens 22 can move relative to the mounting tray 21 along the first direction 271. Thus, when the homogenizing component 20 is applied to the laser module 10 and the mounting tray 21 is relatively fixed to the laser assembly 11 of the laser module 10, by driving the fly-eye lens 22 to move relative to the mounting tray 21 along the first direction 271 through the bracket 23, the distance between the fly-eye lens 22 and the laser assembly 11 can be adjusted. In this way, when the fly-eye lens 22 corresponds to laser assemblies 11 of different specifications (such as different powers, wavelengths or models), by moving the fly-eye lens 22 relative to the mounting tray 21, the fly-eye lens 22 can compensate for parameter differences such as the beam divergence characteristics of laser assemblies 11 of different specifications and the spacing of laser chips 112 to adapt to laser assemblies 11 of different specifications and improve the adaptability of the homogenizing component 20. When the fly-eye lens 22 is displaced due to factors such as temperature change and mechanical vibration during the installation process or during the use of the laser module 10, the displacement of the fly-eye lens 22 can also be compensated by moving the fly-eye lens 22 relative to the mounting tray 21, optimizing the beam convergence or divergence angle, providing a flexible debugging means for the fly-eye lens 22, and being beneficial to improving the stability of the fly-eye lens 22 and the beam quality.

[0041] Combined with Figure 8 andFigure 9 As shown, in some embodiments, the bracket 23 can move relative to the mounting plate 21 along the second direction 272, so as to drive the compound eye lens 22 to move relative to the mounting plate 21 in the second direction 272. The compound eye lens 22 can move relative to the bracket 23 along the third direction 273, that is, move relative to the mounting plate 21 along the third direction 273. The second direction 272 and the third direction 273 are two mutually perpendicular directions on a plane perpendicular to the first direction 271, and the first direction 271 and the second direction 272 can correspond to the length and width directions of the compound eye lens 22.

[0042] The compound eye lens 22 can move in two mutually perpendicular directions on a plane perpendicular to the axial direction relative to the mounting plate 21, which is beneficial to calibrating the lateral alignment accuracy between the compound eye lens 22 and the laser assembly 11, compensating for the position offset of the compound eye lens 22 caused by factors such as temperature change or mechanical vibration, and at the same time is also beneficial to the compound eye lens 22 to adapt to different specifications of the laser assembly 11, providing flexible debugging means for the compound eye lens 22, and improving the adaptability and stability of the compound eye lens 22.

[0043] The specific implementation manner of the movement of the compound eye lens 22 relative to the mounting plate 21 along the first direction 271, the second direction 272 and the third direction 273 is not limited, as long as the movement of the compound eye lens 22 relative to the laser assembly 11 can be realized to improve the adaptability and stability of the compound eye lens 22.

[0044] Combined Figure 6 and Figure 8 As shown, in some embodiments, the light homogenizing assembly 20 includes a first adjusting member 251. A first adjusting hole 261 is provided on the bracket 23, and the first adjusting hole 261 can be a waist-shaped hole extending along the first direction 271. One end of the first adjusting member 251 is provided on the mounting plate 21, and the other end is provided in the first adjusting hole 261 and can slide in the first adjusting hole 261 along the first direction 271. When the first adjusting member 251 slides in the first adjusting hole 261 along the first direction 271, the bracket 23 will drive the compound eye lens 22 to move relative to the mounting plate 21 along the first direction 271.

[0045] In some embodiments, a second adjusting hole 262 is provided on the mounting plate 21, and the second adjusting hole 262 can be a waist-shaped hole extending along the second direction 272. The light homogenizing assembly 20 includes a second adjusting member 252. One end of the second adjusting member 252 is fixedly provided on the bracket 23, and the other end is provided in the second adjusting hole 262 and can slide in the second adjusting hole 262 along the second direction 272. When the second adjusting member 252 slides in the second adjusting hole 262 along the second direction 272, the bracket 23 will drive the compound eye lens 22 to move relative to the mounting plate 21 along the second direction 272 with the second adjusting member 252.

[0046] Further, in some embodiments, a sliding groove 264 corresponding to the first adjusting member 251 is further provided on the mounting bracket 21. The sliding groove 264 extends along the second direction 272, and the first adjusting member 251 is slidably disposed in the sliding groove 264 and can slide along the second direction 272 in the sliding groove 264. Thus, when the second adjusting member 252 slides along the second direction 272 in the second adjusting hole 262, the first adjusting member 251 will slide along the second direction 272 in the sliding groove 264, so that the bracket 23 and the compound eye lens 22 as a whole can smoothly slide relative to the mounting bracket 21 along the second direction 272. The sliding groove 264 cooperates with the first adjusting hole 261, which can prevent the movement of the compound eye lens 22 relative to the mounting bracket 21 along the first direction 271 and the second direction 272 from interfering with each other, which is beneficial to improving the performance reliability of the light homogenizing assembly 20.

[0047] Combined Figure 6 with Figure 9 As shown in the figure, in some embodiments, the light homogenizing assembly 20 further includes a third adjusting member 253. A third adjusting hole 263 is provided on the bracket 23. The third adjusting hole 263 can be a waist-shaped hole extending along the third direction 273. The third adjusting member 253 is fixedly connected to the compound eye lens 22. A part of the third adjusting member 253 is disposed in the third adjusting hole 263 and can slide along the third direction 273 in the third adjusting hole 263.

[0048] In the above embodiments, through the cooperation of structures such as the first adjusting member 251, the second adjusting member 252, the third adjusting member 253, the first adjusting hole 261, the second adjusting hole 262, the third adjusting hole 263 and the sliding groove 264, mechanical adjustability is provided for the movement of the compound eye lens 22 relative to the mounting bracket 21. Therefore, it is beneficial to quickly adjust the position of the compound eye lens 22 relative to the mounting bracket 21 manually or automatically, which is beneficial to reducing the debugging time and improving the debugging efficiency.

[0049] In the above embodiments, both the first adjusting member 251 and the second adjusting member 252 can be columnar structures, and the third adjusting member 253 can be a screw structure passing through the third adjusting hole 263 and having its end screwed and fixed to the compound eye lens 22, which is beneficial to simplifying the structure of the light homogenizing assembly 20 and reducing the manufacturing cost of the light homogenizing assembly 20.

[0050] In some embodiments, a pressing block 24 can be fixedly connected to the compound eye lens 22, and the end of the third adjusting member 253 is fixedly connected to the pressing block 24. When the third adjusting member 253 moves along the third adjusting hole 263, the pressing block 24 can drive the compound eye lens 22 to move along the third direction 273 with the third adjusting member 253. The setting of the pressing block 24 can prevent the third adjusting member 253 from being directly connected to the compound eye lens 22, which is beneficial to reducing the risk of wear of the compound eye lens 22 and improving the structural reliability of the light homogenizing assembly 20.

[0051] It can be understood that by adopting the laser module 10 as described in any of the above embodiments in a laser device, the use of the fly-eye lens 22 is beneficial to improving the uniformity of the light beam emitted by the laser device and meeting the requirements of high-precision laser processing. The movable setting of the fly-eye lens 22 relative to the mounting plate 21 in the light homogenizing component 20 can adapt to different specifications of laser components 11, thereby improving the adaptability and stability of the laser device.

[0052] The technical features of the above embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope described in this specification.

[0053] The above embodiments only represent several implementation manners of the present application. The description is relatively specific and detailed, but it should not be construed as a limitation on the scope of the patent application. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present application, several modifications and improvements can still be made, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the appended claims.

Claims

1. A light homogenizing component, characterized in that, Comprising: Installation pallet; A bracket disposed on the installation pallet; And, A compound eye lens disposed on the bracket, the bracket being capable of driving the compound eye lens to move relative to the installation pallet in a first direction, the first direction being parallel to the axial direction of the compound eye lens.

2. The homogenizing component according to claim 1, characterized in that, The bracket is capable of driving the compound eye lens to move relative to the installation pallet in a second direction, the compound eye lens being capable of moving relative to the bracket in a third direction, the second direction and the third direction being two mutually perpendicular directions on a plane perpendicular to the first direction.

3. The homogenizing component according to claim 2, wherein The light homogenizing assembly includes a first adjusting member, the bracket is provided with a first adjusting hole extending along the first direction, the first adjusting member is disposed on the installation pallet and is slidably disposed in the first adjusting hole along the first direction.

4. The light homogenizing component according to claim 3, wherein The installation pallet is provided with a second adjusting hole extending along the second direction, the light homogenizing assembly includes a second adjusting member, the second adjusting member is disposed on the bracket and is slidably disposed in the second adjusting hole along the second direction.

5. The homogenizing component according to claim 4, characterized in that, The installation pallet is further provided with a chute extending along the second direction, the first adjusting member is slidably disposed in the chute along the second direction.

6. The homogenizing component according to claim 2, wherein, The light homogenizing assembly further includes a third adjusting member, the bracket is provided with a third adjusting hole extending along the third direction, the third adjusting member is fixedly connected to the compound eye lens and is slidably disposed in the third adjusting hole along the third direction.

7. A laser module, characterized in that, Comprising a laser assembly and the light homogenizing assembly according to any one of claims 1-6, the laser assembly includes a substrate and a plurality of laser chips disposed on the substrate, the substrate is fixed to the installation pallet, and the compound eye lens is disposed on the light emitting side of the plurality of laser chips.

8. The laser module according to claim 7, wherein, The compound eye lens includes a plurality of sub-lenses arranged in an array, and the focal length F of the sub-lenses satisfies: 5mm ≤ F ≤ 15mm.

9. The laser module according to claim 7, wherein, The laser module further includes a heat dissipation plate, the heat dissipation plate is in thermal contact with the substrate, a cooling channel is provided in the heat dissipation plate, and the heat dissipation plate is further provided with a water inlet and a water outlet communicating with the cooling channel.

10. A laser device, characterized in that, Comprising the laser module according to any one of claims 7-9.

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