Semiconductor detection tool and method with adjustable plane angle

Abstract

The invention provides a semiconductor detection tool and method with an adjustable plane angle, and relates to the technical field of semiconductor detection, the semiconductor detection tool comprises a flexible hinge and an adjusting assembly, and the adjusting assembly comprises an L-shaped mounting frame, a motor, a mounting plate group, a rotating shaft, a linear cam, an adjusting waist frame and an extension spring. Under the action of the extension spring, the adjusting waist frame is attached to the side face of the linear cam all the time, the linear cam can push the adjusting waist frame to move upwards in the rotating process, then the side, connected with the adjusting waist frame, of the top plate of the flexible hinge is made to tilt / sink, and the purpose of adjusting the angle of the top plate of the flexible hinge is achieved; the linear cam converts small-angle adjustment into change of the diameter of one circle, then the motor is used for driving the linear cam to rotate, and therefore high-precision angle adjustment can be achieved, and the problem that small-angle precise adjustment is needed in the detection process of products such as semiconductors is solved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor detection, and in particular to a semiconductor detection tool with adjustable plane angle and a method. Background Art

[0002] Semiconductor products, LCD products, etc. all need to undergo visual inspection for size and color difference to ensure the consistency and pass rate of factory products. During visual inspection, the product is placed on the inspection tooling, and then identified and inspected by multiple sets of high-definition image acquisition modules. Different inspection items may need to be performed at specific angles, such as appearance inspection, electrical testing, etc. Tooling with adjustable plane angles can meet these diverse needs and improve the accuracy and reliability of inspection.

[0003] The currently adopted plane angle adjustment method is: three independent sets of telescopic rods are used to adjust the tooling platform and change the angle of the detection platform. The small-angle precision adjustment process requires very high accuracy of the telescopic rods, and the manufacturing cost is correspondingly high. Therefore, the present invention provides a semiconductor detection tooling and method with adjustable plane angle. Summary of the invention

[0004] In view of the deficiencies in the prior art, the present invention provides a semiconductor inspection tool and method with adjustable plane angle, which solves the problem of small-angle precision adjustment required in the inspection process of semiconductor and other products.

[0005] To achieve the above objectives, the present invention is implemented through the following technical solutions: A semiconductor inspection tool with adjustable plane angle, comprising: A flexible hinge, the flexible hinge comprising a bottom plate and a top plate arranged in parallel, a narrow strip-shaped connecting portion being arranged between the bottom plate and the top plate and located at a symmetry line position of the top plate; An adjustment component, the adjustment component comprising: an L-shaped mounting frame, a motor, a mounting plate assembly, a rotating shaft, a linear cam, an adjustment waist frame, and a tension spring; The flat plate of the L-shaped mounting frame is fixedly mounted to the bottom plate, a motor is fixedly mounted on the side of the vertical plate of the L-shaped mounting frame, and the rotating shaft of the motor passes through the vertical plate of the L-shaped mounting frame, the mounting plate group is fixedly mounted to the top of the flat plate of the L-shaped mounting frame, a rotating shaft is rotatably mounted on the mounting plate group, one end of the rotating shaft is connected to the rotating shaft of the motor through a coupling, a linear cam is fixedly mounted on the rotating shaft, the adjusting waist frame is fixedly connected to the top plate, the bottom of the adjusting waist frame is fitted with the linear cam, and a tension spring is installed between the adjusting waist frame and the flat plate of the L-shaped mounting frame.

[0006] Preferably, the flexible hinge comprises: A first plate member and a second plate member are arranged in parallel, and a flexible member is arranged between the first plate member and the second plate member; A low-elastic plastic coating layer is provided on the outer sides of the first plate member, the second plate member, and the flexible member; A first hanging nail is threadedly installed on the side surface of the adjusting waist rack, a second hanging nail is threadedly installed on the side surface of the flat plate of the L-shaped mounting rack, and the two ends of the tension spring are respectively hooked to the first hanging nail and the second hanging nail; The mounting plate group includes a first mounting plate and a second mounting plate arranged in parallel. The adjusting waist rack is L-shaped, and the part of the adjusting waist rack located inside the first mounting plate and the second mounting plate is cylindrical.

[0007] Preferably, a first mounting hole is opened on the bottom surface of the first plate member, a second mounting hole is opened on the top surface of the second plate member, a waist rack mounting plate is fixedly connected to the side surface of the first plate member, and the adjusting waist rack is fixedly installed to the waist rack mounting plate by screws.

[0008] Preferably, the flexible member includes: a first triangular flexible support frame, a second triangular flexible support frame, and a top column distributed on a straight line. The top column is located between the first triangular flexible support frame and the second triangular flexible support frame, and the first triangular flexible support frame and the second triangular flexible support frame are in opposite directions.

[0009] Preferably, the top column includes: a waist portion and connecting portions located at both ends of the waist portion, and the axial cross-section of the top column is in the shape of a hyperbola.

[0010] Preferably, the first triangular flexible support frame includes: A wide plate fixedly connected to the top surface of the first plate member; A narrow plate fixedly connected to the bottom surface of the second plate member, and the width of the narrow plate is half of the width of the wide plate; An isosceles trapezoidal frame fixedly connected between the narrow plate and the wide plate, and there are two groups of isosceles trapezoidal frames, which are respectively distributed at both ends of the wide plate and the narrow plate; A core hole is opened on the end surface of the isosceles trapezoidal frame, and an inclined groove is opened on the waist portion of the isosceles trapezoidal frame; A support column is fixedly connected between the narrow plate and the wide plate and between the two isosceles trapezoidal frames.

[0011] Preferably, each waist portion of the isosceles trapezoidal frame is provided with a plurality of inclined grooves, and the included angle between the length direction of the inclined groove and the inclined surface direction of the waist portion of the isosceles trapezoidal frame is 45-60°.

[0012] Preferably, the core hole is rectangular, and the two side edges of the core hole arch outward.

[0013] Preferably, two sets of the flexible hinges and the adjusting components are provided. The two sets of flexible hinges are distributed vertically, and the connecting parts corresponding to the two sets of flexible hinges are distributed vertically. The L-shaped mounting bracket of the adjusting component corresponding to the flexible hinge located above is fixedly connected to the bottom plate of the flexible hinge located below, and the adjusting waist bracket of the adjusting component corresponding to the flexible hinge located above is fixedly connected to the top plate of the flexible hinge located above.

[0014] Another object of the present invention is to provide a method for using a semiconductor detection tooling with adjustable planar angle. Using the above-mentioned semiconductor detection tooling with adjustable planar angle, the method specifically includes the following steps: S1. Place the workpiece to be detected on the upper surface of the top plate of the flexible hinge; S2. Control the motor to rotate according to the required angle. The motor drives the rotating shaft and the linear cam to rotate. The linear cam pushes the adjusting waist bracket upward / under the action of the tension spring, the adjusting waist bracket moves downward, thereby driving the top plate of the flexible hinge to rotate.

[0015] The present invention provides a semiconductor detection tooling and method with adjustable planar angle. It has the following beneficial effects: 1. In the present invention, by designing the flexible hinge and the adjusting component, the adjusting component is used to adjust the angle of the flexible hinge. Specifically, the adjusting component includes: an L-shaped mounting bracket, a motor, a mounting plate group, a rotating shaft, a linear cam, an adjusting waist bracket, and a tension spring. Under the action of the tension spring, the adjusting waist bracket always fits on the side surface of the linear cam. During the rotation of the linear cam, it can push the adjusting waist bracket upward, and then make the side of the top plate of the flexible hinge connected to the adjusting waist bracket tilt up / during the rotation of the linear cam, the radius of the contact point between the linear cam and the adjusting waist bracket decreases. Under the action of the tension spring, the adjusting waist bracket rotates downward, making the side of the top plate of the flexible hinge connected to the adjusting waist bracket sink, achieving the purpose of adjusting the angle of the top plate of the flexible hinge. The linear cam converts a small-angle adjustment into a change in its diameter in one week, and then uses the motor to drive the linear cam to rotate, thereby enabling high-precision angle adjustment, and solving the problem of small-angle precision adjustment required in the detection process of semiconductor and other products.

[0016] 2. In the present invention, by designing the structure of the flexible hinge, it includes a first plate member, a second plate member, and a flexible member. A low-elastic plastic coating layer is provided on the outer sides of the first plate member, the second plate member, and the flexible member. Relying on the flexible structure of the flexible member itself, the second plate member can rotate relative to the first plate member by an angle, and an integral low-elastic plastic coating layer is designed on the overall surface layer, making the adjustment process very stable and improving the accuracy of angle adjustment. Description of the Drawings

[0017] Figure 1 It is a three-dimensional view of a semiconductor detection tooling with adjustable planar angle proposed by the present invention; Figure 2 Front view of the driving component of a semiconductor detection tooling with adjustable planar angle proposed by the present invention; Figure 3 Schematic diagram of the adjustment principle of a semiconductor detection tooling with adjustable planar angle proposed by the present invention; Figure 4 Schematic diagram of the first flexible hinge of a semiconductor detection tooling with adjustable planar angle proposed by the present invention; Figure 5 Disassembly schematic diagram of the framework of the flexible hinge of a semiconductor detection tooling with adjustable planar angle proposed by the present invention; Figure 6 Stereo view of the triangular flexible support frame of a semiconductor detection tooling with adjustable planar angle proposed by the present invention; Figure 7 Stereo schematic diagram of the top column of a semiconductor detection tooling with adjustable planar angle proposed by the present invention; Figure 8 Stereogram of another semiconductor detection tooling with adjustable planar angle proposed by the present invention.

[0018] Wherein, 1. Flexible hinge; 101. First plate member; 101a. First mounting hole; 102. Second plate member; 102a. Second mounting hole; 102b. Waist frame mounting plate; 103. Flexible member; 1031. First triangular flexible support frame; 1031a. Wide plate; 1031b. Narrow plate; 1031c. Support column; 1031d. Isosceles trapezoidal frame; 1031e. Core hole; 1031f. Oblique groove; 1032. Second triangular flexible support frame; 1033. Top column; 10331. Waist portion; 10332. Connection portion; 104. Low-elastic plastic coating layer; 1a. Bottom plate; 1b. Top plate; 2. L-shaped mounting frame; 201. Flat plate; 202. Vertical plate; 3. Motor; 4. Coupling; 5. Mounting plate group; 501. First mounting plate; 502. Second mounting plate; 6. Adjusting waist frame; 7. First hanging nail; 8. Second hanging nail; 9. Tensile spring; 10. Rotating shaft; 11. Linear cam; 12. L-shaped mounting frame; 13. Adjusting waist frame; 14. Flexible hinge. Detailed implementation manners

[0019] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0020] Embodiment 1: like Figures 1-7 As shown, an embodiment of the present invention provides a semiconductor inspection tool with adjustable plane angle, which is used to carry workpieces during visual inspection of semiconductor products, liquid crystal products, etc., and specifically includes: a flexible hinge 1 and an adjustment component, and the adjustment component is used to adjust the angle of the flexible hinge 1.

[0021] The flexible hinge 1 includes a bottom plate 1a and a top plate 1b arranged in parallel. A narrow strip-shaped connecting portion is arranged between the bottom plate 1a and the top plate 1b and at the position of the symmetry line of the top plate 1b. The position of the narrow strip-shaped connecting portion is easy to deform, so that the top plate 1b can rotate around the position of the narrow strip-shaped connecting portion, so that the angle of the top plate 1b is adjusted, and the workpiece to be detected is manipulated to rotate to a predetermined angle. The adjustment component includes: an L-shaped mounting frame 2, a motor 3, a mounting plate group 5, a rotating shaft 10, a linear cam 11, an adjustment waist frame 6, and a tension spring 9. The L-shaped mounting frame 2 includes a flat plate 201 and a vertical plate 202. The vertical plate 202 is fixedly connected to one end of the flat plate 201. The flat plate 201 of the L-shaped mounting frame 2 is fixedly installed with the bottom plate 1a. The motor 3 is fixedly installed on the side of the vertical plate 202 of the L-shaped mounting frame 2. 3. A high-precision stepper motor / servo motor is selected, and a reserved hole is opened on the side of the vertical plate 202 of the L-shaped mounting frame 2. The rotating shaft of the motor 3 passes through the vertical plate 202 of the L-shaped mounting frame 2, and the rotating shaft of the motor 3 is located on the inner side of the reserved hole. The mounting plate group 5 is fixedly installed on the top of the flat plate 201 of the L-shaped mounting frame 2. The rotating shaft 10 is rotatably installed on the mounting plate group 5 through a bearing. One end of the rotating shaft 10 is connected to the rotating shaft of the motor 3 through a coupling 4. A linear cam 11 is fixedly installed on the rotating shaft 10. The linear cam 11 means that the change of its radius length is linear (it is shown as a straight line in the coordinate diagram of the arc and the radius length). The adjusting waist frame 6 is fixedly connected to the top plate 1b, and the bottom of the adjusting waist frame 6 is in contact with the linear cam 11, and a tension spring 9 is installed between the adjusting waist frame 6 and the flat plate 201 of the L-shaped mounting frame 2.

[0022] like Figure 3 As shown in the figure, under the action of the tension spring 9, the adjusting waist frame 6 is always in contact with the side of the linear cam 11. The rotation process of the linear cam 11 can push the adjusting waist frame 6 to move upward, thereby causing the top plate 1b of the flexible hinge 1 connected to the side where the adjusting waist frame 6 is located to tilt up. During the rotation process of the linear cam 11, the radius of the contact point between the linear cam 11 and the adjusting waist frame 6 is reduced. Under the action of the tension spring 9, the adjusting waist frame 6 rotates downward, causing the top plate 1b of the flexible hinge 1 connected to the side where the adjusting waist frame 6 is located to sink, thereby achieving the purpose of adjusting the angle of the top plate 1b of the flexible hinge 1. The use of the linear cam 11 can ensure that the above adjustment process is relatively smooth.

[0023] In the present invention, a linear cam 11 is utilized to convert a small-angle adjustment into a change in its diameter over one revolution, and then a motor is used to drive the linear cam 11 to rotate, thereby enabling high-precision angle adjustment and solving the problem of small-angle precision adjustment required in the detection process of products such as semiconductors.

[0024] In one embodiment, the flexible hinge 1 includes: a first plate member 101 and a second plate member 102 arranged in parallel. A flexible member 103 is disposed between the first plate member 101 and the second plate member 102, and a low-elastic plastic coating layer 104 is provided on the outer sides of the first plate member 101, the second plate member 102, and the flexible member 103.

[0025] The first plate member 101 and its corresponding low-elastic plastic coating layer 104 on the surface layer form a bottom plate 1a, the second plate member 102 and its corresponding low-elastic plastic coating layer 104 on the surface layer form a top plate 1b, and the flexible member 103 and its corresponding low-elastic plastic coating layer 104 on the surface layer form a narrow-strip-shaped connecting portion.

[0026] Relying on the flexible structure of the flexible member 103 itself, the second plate member 102 can rotate relative to the first plate member 101 by an angle, and the overall (referring to the first plate member 101, the second plate member 102, and the flexible member 103) surface layer is designed with an integrated low-elastic plastic coating layer 104, making the above structure adjustment process very stable and improving the accuracy of angle adjustment.

[0027] In one embodiment, in order to facilitate the installation / replacement of the tension spring 9, a first hanging nail 7 is threadedly installed on the side surface of the adjusting waist frame 6, a second hanging nail 8 is threadedly installed on the side surface of the flat plate 201 of the L-shaped mounting frame 2, and both ends of the tension spring 9 are respectively hooked to the first hanging nail 7 and the second hanging nail 8.

[0028] In one embodiment, the mounting plate group 5 includes a first mounting plate 501 and a second mounting plate 502 arranged in parallel. A sliding area is formed between the first mounting plate 501 and the second mounting plate 502. The adjusting waist frame 6 is L-shaped, and the part of the adjusting waist frame 6 located inside the first mounting plate 501 and the second mounting plate 502 is cylindrical. The sliding area formed between the first mounting plate 501 and the second mounting plate 502 can limit the movement of the adjusting waist frame 6, ensure the stability of the movement of the adjusting waist frame 6, and further improve the stability during the angle adjustment of the flexible hinge 1. Moreover, the part of the adjusting waist frame 6 located inside the first mounting plate 501 and the second mounting plate 502 is cylindrical, enabling the flexible hinge 1 to adapt to rotation along the axis perpendicular to the direction of the flexible member 103 and avoiding damage to the flexible hinge 1 under external forces.

[0029] In one embodiment, a first mounting hole 101a is formed in the bottom surface of the first plate member 101, and a second mounting hole 102a is formed in the top surface of the second plate member 102. Holes are also formed at the positions corresponding to the low-elasticity plastic coating layer 104 where the first mounting hole 101a and the second mounting hole 102a are located. A waist frame mounting plate 102b is fixedly connected to the side surface of the first plate member 101. The adjusting waist frame 6 is fixedly installed on the waist frame mounting plate 102b through screws. The waist frame mounting plate 102b is a rigid member, so that the acting force of the adjusting waist frame 6 directly acts on the first plate member 101, and the force transmission among the adjusting waist frame 6, the waist frame mounting plate 102b, and the first plate member 101 is a rigid transmission.

[0030] In one embodiment, the flexible member 103 includes: a first triangular flexible support frame 1031, a second triangular flexible support frame 1032, and a top column 1033 that are distributed on a straight line. The top column 1033 is located between the first triangular flexible support frame 1031 and the second triangular flexible support frame 1032, and the directions of the first triangular flexible support frame 1031 and the second triangular flexible support frame 1032 are opposite. The top column 1033 is used to assist in supporting the second plate member 102 to ensure that the gap between the second plate member 102 and the first plate member 101 remains substantially unchanged during the angle adjustment process. The first triangular flexible support frame 1031 and the second triangular flexible support frame 1032 have the same shape / size, only the installation directions are opposite. The first triangular flexible support frame 1031 plays the same role as the second triangular flexible support frame 1032 during the forward rotation of the second plate member 102 and the reverse rotation of the second plate member 102. The design of this symmetric structure can ensure the consistency of the forward and reverse rotation processes of the second plate member 102.

[0031] In one embodiment, the top column 1033 includes: a waist portion 10331 and connecting portions 10332 located at both ends of the waist portion 10331. The axial cross-section of the top column 1033 is in the shape of a hyperbola. The middle of the top column 1033 is thin and the two ends are thick, which can ensure the support of the second plate member 102 and does not affect the rotatable characteristic of the second plate member 102.

[0032] In one embodiment, the second triangular flexible support frame 1032 has the same structure as the first triangular flexible support frame 1031. The first triangular flexible support frame 1031 will be specifically introduced below. It specifically includes: a wide plate 1031a, a narrow plate 1031b, an isosceles trapezoidal frame 1031d, and a support column 1031c.

[0033] The wide plate 1031a is fixedly connected to the top surface of the first plate member 101, and the narrow plate 1031b is fixedly connected to the bottom surface of the second plate member 102. Moreover, the width of the narrow plate 1031b is half of the width of the wide plate 1031a. The isosceles trapezoidal frame 1031d is fixedly connected between the narrow plate 1031b and the wide plate 1031a, and there are two groups of isosceles trapezoidal frames 1031d, which are respectively distributed at both ends of the wide plate 1031a and the narrow plate 1031b. The top of the isosceles trapezoidal frame 1031d corresponds to the width of the narrow plate 1031b, and the bottom of the isosceles trapezoidal frame 1031d corresponds to the width of the wide plate 1031a. A core hole 1031e is provided on the end face of the isosceles trapezoidal frame 1031d, and an inclined slot 1031f is provided on the waist of the isosceles trapezoidal frame 1031d. Both the core hole 1031e and the inclined slot 1031f increase the flexibility of the isosceles trapezoidal frame 1031d, making it prone to deformation. A support column 1031c is fixedly connected between the narrow plate 1031b and the wide plate 1031a and between the two isosceles trapezoidal frames 1031d. When the first triangular flexible support frame 1031 deforms, the distance between the narrow plate 1031b and the wide plate 1031a is not likely to change.

[0034] In one embodiment, multiple inclined slots 1031f are provided on each waist of the isosceles trapezoidal frame 1031d, and the included angle between the length direction of the inclined slot 1031f and the inclined plane direction of the waist of the isosceles trapezoidal frame 1031d is 45 - 60°. As Figure 6 shown, the waist of the isosceles trapezoidal frame 1031d slopes upward, and the length direction of the inclined slot 1031f also slopes upward. During actual operation, the inclined slots 1031f and the core hole 1031e are both filled with injection molding materials. The core hole 1031e is rectangular, and the two side edges of the core hole 1031e arch outward.

[0035] The first plate member 101, the second plate member 102, and the flexible member 103 are all made of metal materials, such as copper, aluminum, stainless steel, etc. Embodiment Two: The difference between this embodiment and Embodiment One is that: there are two groups of flexible hinges and adjustment components. As Figure 8 shown, the two groups of flexible hinges 1, 14 are distributed vertically, and the corresponding connecting parts of the two groups of flexible hinges 1, 14 are distributed vertically, respectively used for adjusting the rotation angles in the X direction and the Y direction. The adjustment range is wider and the usage scenarios are more. The L-shaped mounting frame 12 of the adjustment component corresponding to the upper flexible hinge 14 is fixedly connected to the bottom plate 1a of the lower flexible hinge 1, and the adjustment waist frame 13 of the adjustment component corresponding to the upper flexible hinge 14 is fixedly connected to the top plate of the upper flexible hinge 14.

[0036] Embodiment Three: This embodiment provides a method for using a semiconductor detection tool with adjustable planar angle. Using a semiconductor detection tool with adjustable planar angle in Embodiment 1, it specifically includes the following steps: S1. Place the workpiece to be detected on the upper surface of the top plate of the flexible hinge. S2. Control the motor to rotate according to the required angle. The motor drives the rotating shaft and the linear cam to rotate. The linear cam pushes the adjusting waist frame upward / the adjusting waist frame moves downward under the action of the tension spring, thereby driving the top plate of the flexible hinge to rotate.

[0037] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A semiconductor detection tool with adjustable planar angle, characterized in that, include: A flexible hinge (1), the flexible hinge (1) comprising a bottom plate (1a) and a top plate (1b) arranged in parallel, a narrow strip-shaped connecting portion being arranged between the bottom plate (1a) and the top plate (1b) and located at a symmetry line of the top plate (1b); An adjustment component, the adjustment component comprising: an L-shaped mounting frame (2), a motor (3), a mounting plate assembly (5), a rotating shaft (10), a linear cam (11), an adjustment waist frame (6), and a tension spring (9); The flat plate (201) of the L-shaped mounting frame (2) is fixedly mounted on the bottom plate (1a); a motor (3) is fixedly mounted on the side of the vertical plate (202) of the L-shaped mounting frame (2); and a rotating shaft of the motor (3) passes through the vertical plate (202) of the L-shaped mounting frame (2); the mounting plate group (5) is fixedly mounted on the top of the flat plate (201) of the L-shaped mounting frame (2); a rotating shaft (10) is rotatably mounted on the mounting plate group (5); one end of the rotating shaft (10) is transmission-connected to the rotating shaft of the motor (3) via a coupling (4); a linear cam (11) is fixedly mounted on the rotating shaft (10); the adjusting waist frame (6) is fixedly connected to the top plate (1b); the bottom of the adjusting waist frame (6) is in contact with the linear cam (11); and a tension spring (9) is mounted between the adjusting waist frame (6) and the flat plate (201) of the L-shaped mounting frame (2).

2. The semiconductor detection tooling with adjustable planar angle according to claim 1, characterized in that, The flexible hinge (1) comprises: A first plate member (101) and a second plate member (102) are arranged in parallel, and a flexible member (103) is arranged between the first plate member (101) and the second plate member (102); A low-elastic plastic coating layer (104) is provided on the outer sides of the first plate member (101), the second plate member (102) and the flexible member (103); A first hanging nail (7) is threadedly mounted on the side of the adjustable waist frame (6), a second hanging nail (8) is threadedly mounted on the side of the flat plate (201) of the L-shaped mounting frame (2), and two ends of the tension spring (9) are respectively mounted on the first hanging nail (7) and the second hanging nail (8); The mounting plate group (5) comprises a first mounting plate (501) and a second mounting plate (502) which are arranged in parallel, the adjusting waist frame (6) is L-shaped, and the portion of the adjusting waist frame (6) located inside the first mounting plate (501) and the second mounting plate (502) is cylindrical.

3. The semiconductor detection tooling with adjustable planar angle according to claim 2, wherein: A first mounting hole (101a) is provided on the bottom surface of the first plate (101), a second mounting hole (102a) is provided on the top surface of the second plate (102), a waist frame mounting plate (102b) is fixedly connected to the side surface of the first plate (101), and the adjustable waist frame (6) is fixedly mounted to the waist frame mounting plate (102b) by means of screws.

4. The semiconductor detection tooling with adjustable planar angle according to claim 2, wherein The flexible member (103) includes: a first triangular flexible support frame (1031), a second triangular flexible support frame (1032), and a top column (1033) distributed on a straight line. The top column (1033) is located between the first triangular flexible support frame (1031) and the second triangular flexible support frame (1032), and the first triangular flexible support frame (1031) and the second triangular flexible support frame (1032) are in opposite directions.

5. The semiconductor detection tooling with adjustable planar angle according to claim 4, wherein The top column (1033) includes: a waist portion (10331) and connecting portions (10332) located at both ends of the waist portion (10331). The axial cross-section of the top column (1033) is in the shape of a hyperbola.

6. The semiconductor detection tooling with adjustable planar angle according to claim 1, wherein, The first triangular flexible support frame (1031) includes: A wide plate (1031a) fixedly connected to the top surface of the first plate member (101); A narrow plate (1031b) fixedly connected to the bottom surface of the second plate member (102), and the width of the narrow plate (1031b) is half of the width of the wide plate (1031a); An isosceles trapezoidal frame (1031d) fixedly connected between the narrow plate (1031b) and the wide plate (1031a), and there are two groups of the isosceles trapezoidal frames (1031d), which are respectively distributed at both ends of the wide plate (1031a) and the narrow plate (1031b); A core hole (1031e) is formed in the end face of the isosceles trapezoidal frame (1031d), and an inclined slot (1031f) is formed in the waist portion of the isosceles trapezoidal frame (1031d); A support column (1031c) is fixedly connected between the narrow plate (1031b) and the wide plate (1031a) and between the two isosceles trapezoidal frames (1031d).

7. The semiconductor detection tooling with adjustable planar angle according to claim 6, characterized in that: Each waist portion of the isosceles trapezoidal frame (1031d) is provided with a plurality of inclined slots (1031f), and the included angle between the length direction of the inclined slot (1031f) and the inclined surface direction of the waist portion of the isosceles trapezoidal frame (1031d) is 45 - 60°.

8. The semiconductor detection tooling with adjustable planar angle according to claim 6, wherein: The core hole (1031e) is rectangular, and both side edges of the core hole (1031e) arch outwards.

9. A semiconductor detection tool with adjustable planar angle according to claim 1, characterized in that: There are two groups of the flexible hinges and the adjustment components. The two groups of flexible hinges (1, 14) are distributed vertically, and the corresponding connecting portions of the two groups of flexible hinges (1, 14) are vertically distributed. The L-shaped mounting frame (12) of the adjustment component corresponding to the flexible hinge (14) located above is fixedly connected to the bottom plate (1a) of the flexible hinge (1) located below, and the adjustment waist frame (13) of the adjustment component corresponding to the flexible hinge (14) located above is fixedly connected to the top plate of the flexible hinge (14) located above.

10. A method for using a semiconductor detection tool with adjustable planar angle, characterized in that, Using a semiconductor detection tooling with adjustable planar angle described in any one of claims 1 - 9, specifically including the following steps: S1. Place the workpiece to be detected on the upper surface of the top plate of the flexible hinge; S2. Control the motor to rotate according to the required angle. The motor drives the rotating shaft and the linear cam to rotate. The linear cam pushes the adjustment waist frame upwards / the adjustment waist frame moves downwards under the action of the tension spring, thereby driving the top plate of the flexible hinge to rotate.

Images