Wire roller for slicing, slicing machine and design method of wire roller for slicing

Abstract

The invention provides a line roller for slicing, a slicing machine and a design method of the line roller for slicing. The wire roller for slicing has the winding outer diameter DS differentiated in the axial direction, and the winding outer diameter DS is gradually increased from the two ends of the wire roller for slicing to the middle of the wire roller for slicing. The tension compensation for the cutting line is realized, and the defects that the cutting force in the middle of a cutting line net is insufficient, the width of a cutting mark does not meet the requirement, the thickness of a slice does not meet the standard, and the cutting line deviates and jumps are overcome; the closer to the middle of the line roller for slicing, the larger the compensation tension obtained by the cutting line is, so that the problems of attenuation type gradual change of the tension of the cutting line net and gradual change type attenuation of the cutting force in current slicing processing are solved in a targeted manner, and the cutting force, the cutting mark width and the slicing thickness are uniform in the axial direction of the line roller for slicing; on the premise that the material and the mechanical property of the material are not changed, the rigidity of the line roller for slicing is improved, and the line roller for slicing is not prone to deflection deformation and bending under the pressure effect of a cutting line net.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor device production, and particularly relates to a wire roller for slicing, a slicing machine, and a design method for the wire roller for slicing. Background Art

[0002] The multi-wire cutting process is a process of using a slicing machine and a cutting wire to cut a crystal bar to obtain wafers. A cylindrical wire roller for driving the cutting wire is mounted in the slicing machine. Currently, there are some problems in the multi-wire cutting process, such as insufficient cutting force of the cutting wire, the width of the cutting mark not meeting the requirements, and the thickness of the sliced wafers not meeting the standards. Since the cylindrical wire roller in the current slicing machine is prone to deflection deformation, the shaft section between the two ends of the cylindrical wire roller sags, causing the entire cylindrical wire roller to bend, ultimately resulting in poor slicing processing as mentioned above. Summary of the Invention

[0003] In view of this, the present invention provides a wire roller for slicing, a slicing machine, and a design method for the wire roller for slicing, aiming to overcome the problem of poor slicing processing caused by the deflection deformation of the cylindrical wire roller.

[0004] The wire roller for slicing of the present invention has a winding outer diameter D that varies axially. S , and the winding outer diameter D S increases from both ends of the wire roller for slicing towards the middle of the wire roller for slicing. In a preset plane rectangular coordinate system, the winding outer diameter D S and the axial position x of the wire roller for slicing conform to the curve of a quadratic function image. The axis of the wire roller for slicing coincides with the X coordinate axis, and the center of one end of the wire roller for slicing coincides with the origin of the coordinate system.

[0005] The shape of the wire roller for slicing of the present invention is similar to the shape of the space passed through when the current cylindrical wire roller rotates and undergoes deflection deformation. Compared with the volume of the current cylindrical wire roller, the extra part of the volume of the wire roller for slicing of the present invention forms a compensation redundancy. The compensation redundancy increases the radius of the arc segment when the cutting wire is wound around the wire roller for slicing. The closer to the middle of the wire roller for slicing, the greater the compensation redundancy and the greater the radius of the arc segment, that is, the increase amount of the radius of the arc segment increases from both ends of the wire roller for slicing towards the middle of the wire roller for slicing;

[0006] The beneficial effects of the wire roller for slicing of the present invention are as follows:

[0007] 1) It realizes the compensation tension for the cutting wire. When using the wire roller for slicing of the present invention for slicing processing, the cutting wire is tensioned by obtaining the compensation tension. Therefore, the cutting wire can apply sufficient cutting force to the crystal bar, thereby obtaining better slicing processing quality, and overcoming the problems of poor slicing processing such as insufficient cutting force in the middle of the cutting wire mesh, the width of the cutting mark not meeting the requirements, the thickness of the sliced wafers not meeting the standards, and the cutting wire offsetting and jumping due to poor tensioning of the cutting wire;

[0008] 2) The tension compensation effect is differentiated along the axial direction of the wire roller for slicing. The closer to the middle of the wire roller for slicing, the greater the compensated tension obtained by the cutting wire. Therefore, the problems of the gradual attenuation of the wire mesh tension of the cutting wire and the gradual attenuation of the cutting force during the current slicing process are targeted solved. When using the wire roller for slicing of the present invention for slicing processing, it can ensure that the cutting force, the scratch width, and the slice thickness are uniform along the axial direction of the wire roller for slicing, and finally wafers with equal performance and quality are obtained; in addition, the compensated tension obtained by the cutting wire is of appropriate magnitude, neither exceeding nor lacking, and the final tension of the cutting wire and the cutting force finally acting on the ingot are closer to the ideal situation under the condition that the wire roller is a standard rigid body;

[0009] 3) The wire roller for slicing of the present invention has improved rigidity without changing the material and material mechanical properties of the wire roller for slicing. The higher rigidity makes the wire roller for slicing not easily deflect and bend under the pressure of the cutting wire mesh, and solves the problem that the wire groove of the current cylindrical wire roller is damaged by being scratched and extruded due to deflection and bending.

[0010] In some embodiments, the wire roller for slicing includes an inner roller and a roller sleeve sleeved on the inner roller. A plurality of wire grooves are formed on the outer circumference of the roller sleeve, and the winding outer diameter D S is twice the distance from the bottom of the wire groove to the axis of the wire roller for slicing.

[0011] In some embodiments, the outer diameter D of the inner roller increases from both ends of the inner roller towards the middle of the inner roller, and reaches the maximum value D max at the middle of the inner roller, and reaches the minimum value D min at at least one end of the inner roller.

[0012] In some embodiments, the minimum wall thickness of the roller sleeve is evenly arranged along the axial direction.

[0013] In some embodiments, in a preset plane rectangular coordinate system, the radius y of the inner roller and the axial position x of the wire roller for slicing conform to the outer diameter compensation calculation formula f(x), ;

[0014] wherein, L is the axial dimension of the inner roller, d is the maximum sag deformation amount of a preset reference cylindrical roller under the action of a preset radial load F uniformly distributed along the axial direction, the axial dimension of the preset reference cylindrical roller is equal to L, and the outer diameter of the preset reference cylindrical roller is equal to D min .

[0015] In some embodiments, the preset radial load F is uniformly distributed within the axial dimension range of the preset reference cylindrical roller, D max = D min + 2d, , E is the elastic modulus of the inner roller, and E is equal to the elastic modulus of the preset reference cylindrical roller.

[0016] In some embodiments, at any axial position of the wire roller for slicing, D S The difference from D is the minimum wall thickness of the roller sleeve at this axial position, and 0.033 ≤ ≤ 0.06.

[0017] In some embodiments, the minimum wall thickness of the roller sleeve increases from both ends of the roller sleeve towards the middle of the roller sleeve.

[0018] In some embodiments, the outer diameter D of the inner roller is evenly arranged along the axis.

[0019] The slicing machine of the present invention includes a wire roller for slicing.

[0020] In the design method of the wire roller for slicing of the present invention, the wire roller for slicing has a winding outer diameter D that is axially differentiated S , and the winding outer diameter D S increases and changes from both ends of the wire roller for slicing towards the middle of the wire roller for slicing;

[0021] In a preset plane rectangular coordinate system:

[0022] The winding outer diameter D S coincides with the axial position x of the wire roller for slicing to form a quadratic function graph. The axis of the wire roller for slicing coincides with the X coordinate axis, and the center of one end of the wire roller for slicing coincides with the origin of the coordinate system;

[0023] The wire roller for slicing includes an inner roller and a roller sleeve sleeved on the inner roller. A plurality of wire grooves are provided on the outer periphery of the roller sleeve. The winding outer diameter D S is twice the distance from the bottom of the wire groove to the axis of the wire roller for slicing; the outer diameter D of the inner roller increases from both ends of the inner roller towards the middle of the inner roller and reaches the maximum value D max in the middle of the inner roller, and reaches the minimum value D min at at least one end of the inner roller, and the minimum wall thickness of the roller sleeve is evenly arranged along the axis;

[0024] The design method of the wire roller for slicing includes the following steps:

[0025] Step 1: According to the Euler - Bernoulli beam theory, calculate the maximum sagging deformation d of a preset reference cylindrical roller under the action of a preset radial load F evenly distributed axially.

[0026] Step 2: Set the relative position of the preset reference cylindrical roller and the preset plane rectangular coordinate system. In the preset plane rectangular coordinate system, the axis of the preset reference cylindrical roller coincides with the X coordinate axis, and the center of one end of the preset reference cylindrical roller coincides with the origin of the coordinate system.

[0027] Step 3: In the preset rectangular coordinate system, use the function image curve of the compensation calculation formula f(x) as the inner roller bus of the wire roller for slicing, and determine the outer diameter D of the inner roller of the wire roller for slicing at each axial position within the axial dimension range of the preset reference cylindrical roller, where:

[0028] The expression of f(x) is , L is equal to the axial dimension of the preset reference cylindrical roller, D = 2×f(i), f(i) is the function value of f(x) when x = i, and i is the axial distance from any position on the wire roller for slicing to the coordinate origin;

[0029] Step 4: Sum twice the minimum wall thickness of the roller sleeve and the outer diameter D of the inner roller at any axial position of the wire roller for slicing, and use the obtained sum as the winding outer diameter D of the wire roller for slicing at the axial position S .

[0030] In some embodiments, the ratio of the minimum wall thickness of the roller sleeve to the outer diameter D of the inner roller is not less than 0.033 and not greater than 0.06.

[0031] In some embodiments, the calculation formula for the maximum sag deformation d is: , E is equal to the elastic modulus of the preset reference cylindrical roller, D min is equal to the outer diameter of the preset reference cylindrical roller. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 is a schematic structural diagram of the wire roller for slicing according to Embodiment 1 of the present invention;

[0033] Figure 2 is Figure 1 a partial structural schematic diagram of the wire roller for slicing shown;

[0034] Figure 3 is for determining Figure 1 the function analysis image of the structure of the wire roller for slicing shown;

[0035] Figure 4 is a schematic structural diagram of the wire roller for slicing according to Embodiment 2 of the present invention;

[0036] Figure 5 is a data statistical chart of the surface deformation of the cylindrical wire roller of the prior art;

[0037] Figure 6 is a data statistical chart of the surface deformation of the wire roller for slicing according to one embodiment of the present invention.

[0038] Reference numerals: 100, wire roller for slicing; 10, inner roller; 20, roller sleeve. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0039] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0040] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the technical field to which the present invention belongs. The terms used in the specification of the present invention herein are only for the purpose of describing specific embodiments, and are not intended to limit the present invention. The term "or / and" used herein includes any and all combinations of one or more of the related listed items.

[0041] The present invention provides a wire roller 100 for slicing and a slicing machine including the wire roller 100 for slicing. The slicing machine is a device for driving multiple cutting wires to slide and rub against a crystal bar so as to divide the crystal bar into multiple wafers. The wire roller 100 for slicing is rotatably installed on a frame in the slicing machine and is bypassed by multiple cutting wires. The wire roller 100 for slicing is driven by a wire roller driving unit in the slicing machine to rotate, thereby driving the cutting wires to move relative to the crystal bar. Multiple wire rollers 100 for slicing are carried in the slicing machine, and the cutting wires bypass at least two wire rollers 100 for slicing. When performing slicing processing, the crystal bar is frictionally cut off by a cutting wire segment located between two of the wire rollers 100 for slicing.

[0042] The wire rollers carried by the existing slicing machines are cylindrical. The number of wire rollers in the slicing machine is multiple, and the multiple wire rollers are axially parallel to each other and arranged at intervals. Multiple cutting wires bypass the outer peripheral sides of the multiple wire rollers and are arranged at intervals along the axial direction of the wire rollers to form a cutting net. When performing slicing processing, the axial direction of the crystal bar is consistent with the axial direction of the wire rollers, and the crystal bar moves relatively closer to the cutting net in a direction perpendicular to the axial direction. A plurality of circular wire grooves are formed on the outer peripheral side of each wire roller at intervals along the axial direction, and each wire groove extends annularly along the axis of the wire roller. The cutting wires are wound in the wire grooves of the wire rollers. In the existing cylindrical wire rollers, the wire groove diameters of all the wire grooves are equal, that is, the distances from the bottoms of all the wire grooves to the axis of the cylindrical wire roller are equal. Therefore, when multiple cutting wires are wound around the wire rollers, multiple arc segments with equal radii will be formed in the multiple wire grooves respectively.

[0043] In order to enable the cutting wires to apply sufficient cutting force to the crystal bar, the cutting wires need to be in a tensioned state. Currently, the means to achieve the tensioning of the cutting wires include adjusting the axial distances of the multiple wire rollers. The cutting wires are tensioned as the multiple wire rollers move away from each other, thereby achieving the tensioning of the cutting net.

[0044] However, when the existing slicing machine performs slicing processing, problems are likely to occur, such as insufficient cutting force of the local cutting line, the scratches at the local positions of the ingot not meeting the requirements, errors or inconsistencies in the thickness of some wafers resulting in non-compliant slicing thickness, etc. The main reason for the above-mentioned poor slicing processing is that the wire roller undergoes deflection deformation, and the shaft section between the two ends of the wire roller droops, causing the entire wire roller to bend. The cutting wire in a tensioned state exerts a radial load on the outer peripheral side of the ingot. Affected by the radial load, the wire roller generates deflection deformation. The position with the largest droop deformation of the entire wire roller is the middle of the wire roller. Therefore, the poor slicing processing mainly appears in the shaft section between the two ends of the ingot and the wafers formed by the shaft section between the two ends of the ingot.

[0045] In view of this, the wire roller 100 for slicing of the present invention is improved: the wire roller 100 for slicing has a winding outer diameter D that is differentially arranged along its own axial direction S , when the cutting wire is wound around the outer peripheral side of the wire roller 100 for slicing, twice the radius of the arc segment of the cutting wire is equal to the winding outer diameter D S . The winding outer diameter D S increases from both ends of the wire roller 100 for slicing towards the middle of the wire roller 100 for slicing. In a preset plane rectangular coordinate system, the winding outer diameter D S and the axial position x of the wire roller for slicing conform to the curve of a quadratic function image. The axis of the wire roller for slicing coincides with the X coordinate axis, and the center of one end of the wire roller for slicing coincides with the origin of the coordinate system. The middle of the wire roller 100 for slicing is located between the two ends of the wire roller 100 for slicing, that is, the winding outer diameter D S gradually increases from one end of the wire roller 100 for slicing towards the middle of the wire roller 100 for slicing, and then gradually decreases from the middle of the wire roller 100 for slicing towards the other end of the wire roller 100 for slicing.

[0046] In some embodiments, the distance from the middle of the wire roller 100 for slicing to both ends of the wire roller 100 for slicing is equal, that is, the maximum value of the winding outer diameter D S appears at the midpoint of the wire roller 100 for slicing. In other embodiments, the distance from the middle of the wire roller 100 for slicing to both ends of the wire roller 100 for slicing is not equal.

[0047] In some embodiments, the wire roller 100 for slicing includes an inner roller 10 and a roller sleeve 20. The inner roller 10 is of a rotary body structure. The roller sleeve 20 is coaxially sleeved on the outer peripheral side of the inner roller 10. The axis of the wire roller 100 for slicing is the axis of the inner roller 10 and the roller sleeve 20. A plurality of wire grooves are arranged at intervals along the axial direction of the wire roller 100 on the outer peripheral side of the roller sleeve 20. Each wire groove is a circular groove and extends along the circumferential direction of the wire roller 100 to surround the axis of the wire roller 100; the winding outer diameter D SThat is the wire groove diameter, which is twice the distance from the bottom of the wire groove to the axis of the wire roller 100 for slicing. That is to say, at any position on the wire roller 100 for slicing where a wire groove is provided in the axial direction, the wire groove diameter at that position is the winding outer diameter D of the wire roller 100 at that position. S The wire groove diameters of multiple wire grooves increase from both ends of the wire roller 100 for slicing towards the middle of the wire roller 100.

[0048] When the wire roller 100 for slicing includes the roller sleeve 20, the outer peripheral side of the wire roller 100 for slicing is the outer peripheral side of the roller sleeve 20. At any position in the axial direction of the wire roller 100 for slicing, the winding outer diameter D always satisfies S > the outer diameter D of the inner roller 10; in some other embodiments, the wire roller 100 for slicing does not include the roller sleeve 20 and is only formed by the inner roller 10 to form the wire roller 100 for slicing. The wire grooves of the wire roller 100 for slicing are provided on the outer peripheral side of the inner roller 10, and the outer peripheral side of the inner roller 10 is the outer peripheral side of the wire roller 100 for slicing. At any position in the axial direction of the wire roller 100 for slicing, the winding outer diameter D S = the outer diameter D of the inner roller 10.

[0049] Specifically, in some embodiments, the inner roller 10 is a metal part, and the roller sleeve 20 is a rubber coating layer at least covering the outer peripheral side of the inner roller 10. The material of the inner roller 10 is preferably 40Cr.

[0050] Refer to Figures 1 to 2 , in some embodiments, the outer diameter D of the inner roller 10 increases from both ends of the inner roller 10 towards the middle of the inner roller 10. The middle of the inner roller 10 is located between both ends of the inner roller 10, that is, the outer diameter D of the inner roller 10 gradually increases from one end of the inner roller 10 towards the middle of the inner roller 10, and then gradually decreases from the middle of the inner roller 10 towards the other end of the inner roller 10. The distances from the middle of the inner roller 10 to both ends of the inner roller 10 are equal. The minimum wall thickness of the roller sleeve 20 is evenly arranged along the axial direction of the wire roller 100 for slicing. The wire grooves are provided on the outer peripheral side of the roller sleeve 20. The outer peripheral side of the roller sleeve 20 includes the bottom of the wire groove. The inner peripheral side of the roller sleeve 20 adheres to the outer peripheral side of the inner roller 10. The minimum wall thickness of the roller sleeve 20 is the distance from the bottom of the wire groove to the inner peripheral side of the roller sleeve 20.

[0051] The outer diameter of the inner roller 10 reaches the maximum value D at the middle of the inner roller 10 max , and the outer diameter of the inner roller 10 reaches the minimum value D at at least one end of the inner roller 10 min . D max and D min The difference is 2d, where d means: assuming there is a cylindrical wire roller, the inner roller of this cylindrical wire roller is made of the same material as the inner roller 10 of the wire roller 100 for slicing of the present invention, the inner roller of this cylindrical wire roller and the inner roller 10 of the wire roller 100 for slicing of the present invention have equal axial dimensions, both have the same mechanical properties, and the outer diameter of the inner roller of this cylindrical wire roller is equal to Dmin A cylinder, when the cylindrical wire roller is subjected to a preset radial load F applied by the cutting wire, and the preset radial load F is uniformly distributed along the axial direction of the cylindrical wire roller and the acting direction of the preset radial load F points to the axis of the cylindrical wire roller, the cylindrical wire roller generates a deflection deformation and bends, and the maximum sag deformation of the shaft section between the two ends of the cylindrical wire roller is d, as shown in Figure 2 shown. For the convenience of description, the inner roller of the above imaginary cylindrical wire roller will be hereinafter simply referred to as the preset reference cylindrical roller.

[0052] It can be understood that if the slicing machine is equipped with the above cylindrical wire roller, the cylindrical wire roller will generate a deflection deformation with a maximum sag deformation of d under the pressure of the cutting wire. This deflection deformation not only causes the cylindrical wire roller to bend, but also causes insufficient local tension of the cutting mesh, and leads to problems such as reduced cutting force of some cutting wires, non-compliant cut marks at local positions of the ingot, errors or inconsistencies in the thickness of some wafers, etc. during the slicing process.

[0053] Ideally, the loads applied by multiple cutting wires to the wire roller are radial loads pointing to the axis of the wire roller, and the loads applied by multiple cutting wires to the wire roller are uniformly distributed along the axial direction of the wire roller. At the same time, the wire roller is a standard rigid body without deflection deformation, and multiple cutting wires wound around the wire roller should have the same tension. Therefore, ideally, the cutting forces applied by multiple cutting wires to the ingot are equal, the cut mark widths are uniform along the axial directions of the ingot and the wire roller, and the slice thicknesses are uniform along the axial directions of the ingot and the wire roller. Ideally, the preset radial load F borne by the wire roller under the cutting wire is obtained in advance according to the slicing process regulations and relevant parameters.

[0054] The key to determining the outer shape structure of the wire roller 100 for slicing of the present invention lies in: determining the winding outer diameter D within the axial dimension range of the wire roller 100 for slicing S . The following introduces Figures 1 to 2 the structure of the inner roller 10 of the wire roller 100 for slicing shown in and the method for determining the outer diameter D of the inner roller of the wire roller 100 for slicing.

[0055] The structural features of the wire roller 100 for slicing need to be disclosed in combination with a preset plane rectangular coordinate system. The relative positions of the wire roller 100 for slicing of the present invention and the preset plane rectangular coordinate system are set according to the following rules: as shown in Figure 3 shown, the X coordinate axis of the preset plane rectangular coordinate system coincides with the axis of the wire roller 100 for slicing, the coordinate origin of the preset plane rectangular coordinate system is located at the center of one end of the wire roller 100 for slicing. Thus, the Y coordinate axis of the preset plane rectangular coordinate system is perpendicular to the axis of the wire roller 100 for slicing. The positive projection of the outer peripheral side of the inner roller 10 in the first quadrant of the preset plane rectangular coordinate system forms a generatrix curve of the inner roller 10. The function expression of the generatrix curve of the inner roller 10 is:

[0056] ;

[0057] The above function expression is called the outer diameter compensation calculation formula, where L is the axial dimension of the inner roller 10, d is the maximum sag deformation of the preset reference cylindrical roller under the action of the preset radial load F, the axial dimension of the preset reference cylindrical roller is equal to L, and the outer diameter of the preset reference cylindrical roller is equal to D min . At any position within the axial dimension range of the wire roller 100 for slicing, the outer diameter D of the inner roller 10 corresponds to and is equal to 2×f(x). For example, along the axis of the wire roller 100 for slicing, the outer diameter at the position i from the origin of the preset plane rectangular coordinate system on the inner roller 10 is equal to 2×f(i), and f(i) is the function value of the outer diameter compensation calculation formula f(x) when x = i. In this way, the outer diameter of any position on the inner roller 10 can be calculated according to the above outer diameter compensation calculation formula, thereby determining the shape of the inner roller 10

[0058] It can be understood that when the axial dimension is L and the outer diameter is equal to D min of the preset reference cylindrical roller bears the preset radial load F applied by the cutting wire, the preset reference cylindrical roller undergoes bending deformation. In the case where the X-axis of the preset plane rectangular coordinate system coincides with the axis of the preset reference cylindrical roller and the origin of the coordinate system of the preset plane rectangular coordinate system is located at the center of one end of the preset reference cylindrical roller, the positive projection of the outer peripheral side of the preset reference cylindrical roller in the first quadrant of the preset plane rectangular coordinate system forms a quadratic function curve, and the corresponding function of this quadratic function curve is the outer diameter compensation calculation formula f(x). At the same time, this quadratic function curve is the generatrix of the inner roller 10 of the wire roller 100 for slicing of the present invention

[0059] When the preset reference cylindrical roller bears the preset radial load F uniformly distributed along the axis, the axial length of the preset reference cylindrical roller is L, and the outer diameter of the preset reference cylindrical roller is D min , according to the Euler - Bernoulli beam theory, the calculation formula for the maximum sag deformation d of the preset reference cylindrical roller is: , D max = D min + 2d, where E is the elastic modulus of the inner roller 10 of the wire roller 100 for slicing of the present invention, and E is also equal to the elastic modulus of the preset reference cylindrical roller. Optionally, when the material of the inner roller 10 is 40Cr, the elastic modulus E of the inner roller 10 takes a value of 206 GPa when calculating the maximum sag deformation d

[0060] Figures 1 to 2 After the structure and outer diameter of the inner roller 10 of the wire roller 100 for slicing shown are determined, according to 0.033 ≤ ≤ 0.06 to determine the minimum wall thickness of the roller sleeve 20 sleeved on the outer peripheral side of the inner roller 10, where at any axial position of the wire roller 100 for slicing, the winding outer diameter D SThe difference from the outer diameter D of the inner roller 10 is the minimum wall thickness of the roller sleeve 20 at this axial position. A wire groove is provided on the outer peripheral side of the roller sleeve 20, and the minimum wall thickness of the roller sleeve 20 is the distance from the bottom of the wire groove to the inner peripheral side of the roller sleeve 20.

[0061] Optionally, when the outer diameter dimension D at a certain position in the axial direction of the inner roller 10 is 150 mm, the minimum wall thickness range of the roller sleeve 20 at this position is 4.95 mm to 9 mm, and the winding outer diameter D S / wire groove diameter range of the wire roller 100 for slicing at this position is 159.9 mm to 168 mm.

[0062] Figures 1 to 2 The structure and outer diameter of the inner roller 10 of the wire roller 100 for slicing shown are determined according to the structural parameters of the preset reference cylindrical roller, the elastic modulus of the inner roller 10, and the preset radial load F. Figures 1 to 2 The wire roller 100 for slicing shown is an upgraded replacement for the corresponding preset reference cylindrical roller, and the preset reference cylindrical roller is equivalent to the improved structural basis of the wire roller 100 for slicing. As Figure 3 shown, the X-axis of the preset plane coordinate system in the figure coincides with the axis of the wire roller 100 for slicing, and also coincides with the axis of the corresponding preset reference cylindrical roller of the wire roller 100 for slicing. The dotted line parallel to the X-axis of the preset plane coordinate system represents the generatrix of the preset reference cylindrical roller, and the curve indicated by S is the image of the outer diameter compensation calculation formula f(x) in the horizontal interval [0, L]. The curve indicated by S represents the generatrix of the inner roller 10 of the wire roller 100 for slicing.

[0063] Compared with the existing cylindrical wire roller, Figures 1 to 2 the overall rigidity of the inner roller 10 of the wire roller 100 for slicing shown is improved, and it is not easy to deflect and bend under the pressure of the cutting wire; the wall thickness dimension of the roller sleeve 20 is uniform to ensure the mechanical properties of each part of the roller sleeve 20 are balanced, and the service life of the wire roller 100 for slicing is improved.

[0064] Refer to Figure 4 , in some other embodiments, the minimum wall thickness of the roller sleeve 20 increases from both ends of the roller sleeve 20 towards the middle of the roller sleeve 20. The middle of the roller sleeve 20 is located between the two ends of the roller sleeve 20, that is, the minimum wall thickness of the roller sleeve 20 gradually increases from one end of the roller sleeve 20 towards the middle of the roller sleeve 20, and then gradually decreases from the middle of the roller sleeve 20 towards the other end of the roller sleeve 20. The distances from the middle of the roller sleeve 20 to both ends of the roller sleeve 20 are equal, the outer diameter D of the inner roller 10 is uniform along the axial direction of the wire roller 100 for slicing, and the outer diameter D of the inner roller 10 can also increase from both ends of the inner roller 10 towards the middle of the inner roller 10.

[0065] The shape of the wire roller 100 for slicing in the present invention is similar to the shape of the space passed through when the current cylindrical wire roller rotates and undergoes deflection deformation. Compared with the volume of the current cylindrical wire roller, the extra part of the volume of the wire roller 100 for slicing in the present invention forms a compensation redundancy. If the shape of the space passed through when the cylindrical wire roller rotates is denoted as Q, and the actual occupied space volume of the cylindrical wire roller is P, then the compensation redundancy is the remaining part after removing P from Q. The compensation redundancy increases the arc segment radius when the cutting wire is wound around the wire roller 100 for slicing. The closer to the middle of the wire roller 100 for slicing, the greater the compensation redundancy and the greater the arc segment radius, that is, the increase amount of the arc segment radius increases from both ends of the wire roller 100 for slicing towards the middle of the wire roller 100 for slicing;

[0066] The beneficial effects of the wire roller 100 for slicing in the present invention are as follows:

[0067] 1) It realizes the compensation tension for the cutting wire. When using the wire roller 100 for slicing in the present invention for slicing processing, the cutting wire is tensioned by obtaining the compensation tension. Therefore, the cutting wire can apply sufficient cutting force to the ingot, so that better slicing processing quality can be obtained, overcoming the problems of insufficient cutting force in the middle of the cutting wire mesh, unqualified cutting mark width, unqualified slicing thickness, cutting wire deviation and jumping wire caused by poor tensioning of the cutting wire in slicing processing;

[0068] 2) The tension compensation effect is different along the axial direction of the wire roller 100 for slicing. The closer to the middle of the wire roller 100 for slicing, the greater the compensation tension obtained by the cutting wire. Therefore, the problems of gradual attenuation of the cutting wire mesh tension and gradual attenuation of the cutting force in the current slicing processing are targeted to be solved. When using the wire roller 100 for slicing in the present invention for slicing processing, it can ensure that the cutting force, cutting mark width, and slicing thickness are uniform along the axial direction of the wire roller 100 for slicing, and finally wafers with equal performance and quality can be obtained. In addition, the compensation tension obtained by the cutting wire is of appropriate magnitude, neither exceeding nor insufficient. The final tension of the cutting wire and the cutting force finally acting on the ingot are closer to the ideal situation under the condition that the wire roller is a standard rigid body;

[0069] 3) The wire roller 100 for slicing in the present invention has improved rigidity without changing the material and material mechanical properties of the wire roller 100 for slicing. The higher rigidity makes the wire roller 100 for slicing not easily generate deflection deformation and bend under the pressure of the cutting wire mesh, solving the problem that the current cylindrical wire roller is scratched and squeezed by the cutting wire due to deflection deformation and bending.

[0070] Figure 5It shows the deformation of an existing cylindrical wire roller under the action of a preset radial load F from a cutting wire. The preset radial load F is uniformly distributed along the axial direction of the cylindrical wire roller. The sagging deformation amount of the cylindrical wire roller under the pressure of the cutting wire increases from both ends of the cylindrical wire roller towards the middle of the cylindrical wire roller, and the maximum sagging deformation amount at the middle reaches 1.036 mm;

[0071] Figure 6 It shows the deformation of the wire roller 100 for slicing of the present invention under the action of a preset radial load F from a cutting wire. The preset radial load F is uniformly distributed along the axial direction of the wire roller 100 for slicing. The maximum value of the deformation amount of the wire roller 100 for slicing appears at both ends of the wire roller 100 for slicing, and the specific value is 0.1219 mm. In addition, a peak value of the deformation amount of 0.0373 mm appears between both ends of the wire roller 100 for slicing. Both the maximum value of the deformation amount and the peak value of the deformation amount are less than 1.036 mm. Therefore, when bearing the same magnitude of radial load from the cutting wire, the deformation amplitude of the wire roller 100 for slicing of the present invention is reduced, the attenuation degree of the cutting wire tension is alleviated, thereby reducing the attenuation degree of the cutting force of the cutting wire, alleviating the phenomenon that the cutting wire deviates and jumps due to relaxation, and improving processing defects such as the cutting mark width being too wide and the slice thickness not meeting the standard.

[0072] Both ends of the wire roller 100 for slicing are the both ends of the inner roller 10. The present invention does not limit the shape of the inner roller 10 in the wire roller 100 for slicing. When the axis of the wire roller 100 for slicing coincides with the X-axis of the preset plane rectangular coordinate system and the coordinate origin is located at the center of one end of the wire roller 100 for slicing, the bottom surfaces of multiple wire grooves respectively form multiple bottom surface projection points in the positive projection in the first quadrant of the preset plane rectangular coordinate system. The distance from each bottom surface projection point to the X-axis is equal to half of the winding outer diameter D of the axial position where the bottom surface projection point is located. By connecting these bottom surface projection points successively one by one with a smooth curve, a quadratic function curve can be obtained, which is simply called the point-plotting quadratic function curve. The point-plotting quadratic function curve is located on the side of the function image of the compensation calculation formula f(x) relatively far from the X-axis. It can be determined that the point-plotting quadratic function curve and the function image of f(x) can be translated and approached along the Y-axis direction until they coincide. After multiple bottom surface projection points are translated and approached as a whole along the negative Y-axis direction towards the X-axis, they can all fall on the function image curve of the compensation calculation formula f(x). S Half of the winding outer diameter D of the axial position where the bottom surface projection point is located. By connecting these bottom surface projection points successively one by one with a smooth curve, a quadratic function curve can be obtained, which is simply called the point-plotting quadratic function curve. The point-plotting quadratic function curve is located on the side of the function image of the compensation calculation formula f(x) relatively far from the X-axis. It can be determined that the point-plotting quadratic function curve and the function image of f(x) can be translated and approached along the Y-axis direction until they coincide. After multiple bottom surface projection points are translated and approached as a whole along the negative Y-axis direction towards the X-axis, they can all fall on the function image curve of the compensation calculation formula f(x).

[0073] The following introduces the design method of the wire roller for slicing of the invention, and this method includes:

[0074] Step 1: According to the Euler-Bernoulli beam theory, calculate the maximum sagging deformation amount d of a preset reference cylindrical roller under the action of a preset radial load F uniformly distributed axially;

[0075] Step 2: Set the relative position of the preset reference cylindrical roller and the preset plane rectangular coordinate system. In the preset plane rectangular coordinate system, the axis of the preset reference cylindrical roller coincides with the X coordinate axis, and the center of one end of the preset reference cylindrical roller coincides with the coordinate origin;

[0076] Step 3: In the preset plane rectangular coordinate system, use the function image curve of the compensation calculation formula f(x) as the inner roller bus of the wire roller for slicing, and determine the outer diameter D of the inner roller of the wire roller for slicing at each axial position within the axial dimension range of the preset reference cylindrical roller;

[0077] The expression of f(x) is , where L is equal to the axial dimension of the preset reference cylindrical roller, D = 2×f(i), f(i) is the function value of f(x) when x = i, and i is the axial distance from any position on the wire roller for slicing to the coordinate origin;

[0078] Step 4: Sum twice the minimum wall thickness of the roller sleeve and the outer diameter D of the inner roller of the wire roller for slicing, and use the obtained summation result as the winding outer diameter D of the wire roller for slicing S .

[0079] In some embodiments, the ratio of the minimum wall thickness of the roller sleeve to the outer diameter D of the inner roller is not less than 0.033 and not greater than 0.06; and / or,

[0080] The calculation formula for the maximum sag deformation d is: , E is equal to the elastic modulus of the preset reference cylindrical roller, D min is equal to the outer diameter of the preset reference cylindrical roller.

[0081] The above design method for the wire roller for slicing is used to determine Figures 1 to 2 the structure of the wire roller for slicing 100 shown in, as described above, Figures 1 to 2 the wire roller for slicing 100 shown in adopts a uniform wall thickness design, that is, the distance from the bottom of all wire grooves on the outer peripheral side of the roller sleeve 20 to the inner peripheral side of the roller sleeve 20 is equal. Therefore, when the bus of the inner roller 10 of the wire roller for slicing 100 determined according to Step 3 is a quadratic function image curve, the radius y of the inner roller 10 and the axial position x of the wire roller for slicing 100 conform to the quadratic function image, and at any axial position of the wire roller for slicing, the outer diameter D of the inner roller is equal to twice the radius y of the inner roller 10. Thus, the outer diameter D of the inner roller and the axial position x of the wire roller for slicing 100 also conform to the quadratic function image. Further, on the basis of the outer diameter D of the inner roller, twice the minimum wall thickness of the roller sleeve is added to obtain the winding outer diameter D S After that, the winding outer diameter D S and the axial position x of the wire roller for slicing 100 also conform to the quadratic function image.

[0082] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered to be within the scope described in this specification.

[0083] Those of ordinary skill in the art of this technology should recognize that the above embodiments are only used to illustrate the present invention and are not used to limit the present invention. As long as appropriate changes and variations made to the above embodiments fall within the scope of the spirit of the present invention, they fall within the scope of protection required by the present invention.

Claims

1. A wire roller for slicing, characterized in that, The slicing wire roller has a winding outer diameter D that is differentiated in the axial direction. S , the winding outer diameter D S The width of the slicing wire roller increases from both ends to the middle of the slicing wire roller; In a preset rectangular coordinate system: The winding outer diameter D S conforms to the quadratic function image with the axial position x of the wire roller for slicing. The axis of the wire roller for slicing coincides with the X coordinate axis, and the center of one end of the wire roller for slicing coincides with the origin of the coordinate system.

2. The wire roller for slicing according to claim 1, wherein The wire roller for slicing includes an inner roller (10) and a roller sleeve (20) sleeved on the inner roller (10). A plurality of wire grooves are formed in the outer circumference of the roll sleeve (20), and the winding outer diameter D S is twice the distance from the bottom of the wire groove to the axis of the wire roller for slicing.

3. The wire roller for slicing according to claim 2, wherein, The outer diameter D of the inner roller (10) increases from both ends of the inner roller (10) towards the middle of the inner roller (10), and reaches the maximum value D at the middle of the inner roller (10). max and reaches the minimum value D at at least one end of the inner roller (10). min The minimum wall thickness of the roller sleeve (20) is evenly arranged along the axial direction.

4. The wire roller for slicing according to any one of claims 2 to 3, characterized in that, In a preset rectangular coordinate system: The radius y of the inner roller (10) and the axial position x of the wire roller for slicing conform to the outer diameter compensation calculation formula f(x). ; Let L be the axial dimension of the inner roller (10), d be the maximum sag deformation of a preset reference cylindrical roller under the action of a preset radial load F uniformly distributed along the axis, the axial dimension of the preset reference cylindrical roller being equal to L, and the outer diameter of the preset reference cylindrical roller being equal to D min .

5. The wire roller for slicing according to claim 4, characterized in that, The preset radial load F is uniformly distributed within the axial dimension range of the preset reference cylindrical roller. D max = D min + 2d, , where E is the elastic modulus of the inner roller (10) and E is equal to the elastic modulus of the preset reference cylindrical roller.

6. The wire roller for slicing according to any one of claims 2 to 3, characterized in that, At any axial position of the slicing wire roller, D S The difference from D is the minimum wall thickness of the roller sleeve (20) at the axial position, 0.033 ≤ ≤ 0.

06.

7. The wire roller for slicing according to claim 2, characterized in that, The minimum wall thickness of the roller sleeve (20) increases from both ends of the roller sleeve (20) towards the middle of the roller sleeve (20), and the outer diameter D of the inner roller (10) is evenly set along the axis.

8. A slicing machine, characterized in that, It includes the wire roller for slicing according to any one of claims 1 to 7.

9. A design method for a wire roller used for slicing, characterized in that, The method includes: Step 1, calculate the maximum sag deformation amount d of the preset reference cylindrical roller under the action of the preset radial load F uniformly distributed in the axial direction. Step 2, set the position of the preset reference cylindrical roller relative to the preset rectangular coordinate system. In the preset rectangular coordinate system, the axis of the preset reference cylindrical roller coincides with the X coordinate axis, and the center of one end of the preset reference cylindrical roller coincides with the coordinate origin. Step 3, in the preset rectangular coordinate system, use the function image curve of the compensation calculation formula f(x) as the inner roller bus of the wire roller for slicing, and determine the outer diameter D of the inner roller of the wire roller for slicing at each axial position within the axial dimension range of the preset reference cylindrical roller, where: The expression of f(x) is , where L is equal to the axial dimension of a preset reference cylindrical roller, D = 2×f(i), f(i) is the function value of f(x) when x = i, and i is the axial distance from any position on the wire roller for slicing to the coordinate origin; Step 4: Add twice the minimum wall thickness of the roller sleeve to the outer diameter D of the inner roller of the wire roller for slicing, and use the resulting sum as the winding outer diameter D of the wire roller for slicing S .

10. The method for designing a wire roller for slicing according to claim 9, characterized in that, The ratio of the minimum wall thickness of the roller sleeve to the outer diameter D of the inner roller is not less than 0.033 and not greater than 0.06; and / or The calculation formula for the maximum sag deformation amount d is as follows: , where E is the elastic modulus of the preset reference cylindrical roller, and D min is the outer diameter of the preset reference cylindrical roller.

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