LIBS system optical path device micro-offset detection device and method

Abstract

The invention provides an LIBS (Laser-induced Breakdown Spectroscopy) system optical path device micro-offset detection device and method, and particularly relates to the technical field of LIBS analysis. The LIBS system optical path device micro-offset detection device comprises a detection box, a sliding sleeve, a Hall sensor group, a first magnet group, a second magnet group and a detection display system, and the Hall sensor group can move up and down between a first detection position and a second detection position of the detection box along with the sliding sleeve; the first magnet set is arranged above the light path device, and the second magnet sets are arranged on the two sides of the light path device and correspond to the first magnet set; the detection display system is electrically connected with the Hall sensor group; when the sliding sleeve moves to the first detection position, the Hall sensor group is aligned with the first magnet group, and when the sliding sleeve moves to the second detection position, the Hall sensor group is aligned with the second magnet group. The device can be used for quickly and accurately detecting whether the device to be detected has tiny position deviation or not, and the timeliness of LIBS (Laser-induced Breakdown Spectroscopy) field calibration is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of laser-induced breakdown spectroscopy analysis, and particularly relates to a device and method for detecting micro-displacement of optical path devices in a LIBS system. Background Art

[0002] A LIBS (laser-induced breakdown spectroscopy) system uses a laser with a certain power density to irradiate an object to be measured. After the object to be measured is irradiated, a plasma is generated, and then the spectrum emitted by the plasma is analyzed by a spectrometer to qualitatively or quantitatively analyze the chemical composition of the substance. In order to meet requirements such as long-distance focused laser, receiving spectral signals, adjusting the optical path, and accurately aligning the laser with the object to be measured, various optical path devices are required in the LIBS system. When developing the LIBS system, the positions of these optical path devices need to be adjusted to meet the usage requirements of the LIBS system. After the LIBS system is developed, these optical path devices are fixed on the customized mechanical structure of the LIBS system through special brackets to fix the physical positions of each optical path device.

[0003] The LIBS system is complex and expensive, and generally, it is developed and assembled in a laboratory after being customized by the customer. The LIBS system needs to be transported to the usage site. Due to the precision of the LIBS system, it needs to be recalibrated on-site before it can be put into use. Obviously, the on-site calibration does not have the test environment of the laboratory. When it is found that the LIBS system cannot meet the standards during laboratory development, it is necessary to finely adjust the positions of optical path devices, such as lenses, and the timeliness requirement of on-site calibration is very high, and the calibration needs to be completed as soon as possible.

[0004] Therefore, how to quickly and accurately determine whether there is a small displacement in the positions of optical path devices in the LIBS system is a problem that needs to be solved by the developers of the LIBS system. Summary of the Invention

[0005] In view of the above problems existing in the prior art, the present invention provides a device and method for detecting micro-displacement of optical path devices in a LIBS system to improve the problem that the LIBS system cannot quickly determine whether there is a displacement in the positions of optical path devices at the usage site.

[0006] To achieve the above and other related objectives, a micro-offset detection device for optical path components of a LIBS system is provided in the first aspect of the present invention. The LIBS system includes a component bracket and an optical path component fixedly installed on the component bracket. The micro-offset detection device for optical path components of the LIBS system includes: a first magnet group, a second magnet group, a detection box, a sliding sleeve, a Hall sensor group, and a detection display system. The first magnet group is fixed to the component bracket and is arranged above both sides of the optical path component; the second magnet group is fixed to the component bracket and is correspondingly arranged on both sides of the optical path component opposite to the first magnet group; the bottom of the detection box is provided with a fixing hole and a penetration hole, and the optical path component, the component bracket, the first magnet group, and the second magnet group pass through the penetration hole and extend into the detection box; the sliding sleeve is arranged on the detection box and moves between a first detection position and a second detection position of the detection box; the Hall sensor group is arranged in the sliding sleeve and moves synchronously with the sliding sleeve; the detection display system is arranged on the sliding sleeve, and the detection display system is electrically connected to the Hall sensor group; when the sliding sleeve moves to the first detection position, the Hall sensor group is aligned with the first magnet group, and the detection display system collects and displays a first detection signal; when the sliding sleeve moves to the second detection position, the Hall sensor group is aligned with the second magnet group, and the detection display system collects and displays a second detection signal.

[0007] In an embodiment of the present invention, the first magnet group includes a first permanent magnet, a third permanent magnet, and a first bracket, and the second magnet group includes a second permanent magnet, a fourth permanent magnet, and a second bracket. The second bracket is fixed on the component bracket, the second permanent magnet and the fourth permanent magnet are respectively fixed at both ends of the second bracket, and the optical path component is located between the second permanent magnet and the fourth permanent magnet. The first bracket is fixedly arranged above the second bracket, and the distance between the first bracket and the second bracket is equal to the distance between the first detection position and the second detection position. The first permanent magnet and the third permanent magnet are respectively fixed at both ends of the second bracket.

[0008] In an embodiment of the present invention, the Hall sensor group includes a first Hall sensor, a second Hall sensor, a third Hall sensor, and a fourth Hall sensor symmetrically arranged on the inner wall of the sliding sleeve, and the first Hall sensor and the second Hall sensor are oppositely arranged, and the third Hall sensor and the fourth Hall sensor are oppositely arranged.

[0009] In an embodiment of the present invention, the micro-offset detection device for the optical path device of the LIBS system further includes a first limit switch, a second limit switch, a third limit switch, and a fourth limit switch. The first limit switch and the second limit switch are oppositely arranged at the first detection position, the third limit switch and the fourth limit switch are oppositely arranged at the second detection position, and the first limit switch, the second limit switch, the third limit switch, and the fourth limit switch are respectively electrically connected to the detection and display system.

[0010] In an embodiment of the present invention, the micro-offset detection device for the optical path device of the LIBS system further includes an elastic support mechanism. The elastic support mechanism includes a first spring pillar and a second spring pillar. The first spring pillar is arranged on one side of the detection box and supports the sliding sleeve at the top. The second spring pillar is oppositely arranged on the other side of the detection box and supports the sliding sleeve at the top.

[0011] In an embodiment of the present invention, the detection and display system includes a control system, a display screen, and a power supply component. The control system is embedded inside the sliding sleeve and is electrically connected to the display screen and the Hall sensor group. The power supply component supplies power to the control system, the display screen, and the Hall sensor group. The display screen is used to display detection signals.

[0012] In an embodiment of the present invention, the control system includes a micro-control unit and an analog-to-digital converter. The micro-control unit is electrically connected to the Hall sensor group through the analog-to-digital converter; the display screen uses a liquid crystal display screen, and the liquid crystal display screen is arranged on the top of the sliding sleeve.

[0013] The second aspect of the present invention provides a detection method based on the micro-offset detection device for the optical path device of the LIBS system, including the following steps:

[0014] Cover the detection box on the optical path device to be measured and make the sliding sleeve in the first detection position;

[0015] Wake up the detection and display system, and the detection and display system reads the output signal of the Hall sensor group at this time and saves it as the first detection data;

[0016] Push the sliding sleeve downward to make it slide from the first detection position to the second detection position, and the detection and display system detects and reads the output signal of the Hall sensor group at this time and saves it as the second detection data;

[0017] Repeat the data acquisition steps at the first detection position and the second detection position multiple times to obtain multiple groups of first detection data and multiple groups of second detection data;

[0018] The detection and display system analyzes and processes multiple groups of the first detection data and multiple groups of the second detection data, and compares them with a preset threshold data range to determine whether the optical path device to be measured has a displacement.

[0019] In an embodiment of the present invention, the Hall sensor group includes: a first Hall sensor, a second Hall sensor, a third Hall sensor, and a fourth Hall sensor symmetrically arranged on the inner wall of the sliding sleeve, and the first Hall sensor and the second Hall sensor are oppositely arranged, and the third Hall sensor and the fourth Hall sensor are oppositely arranged;

[0020] Define the four data of the Hall sensor group corresponding to the first detection position as: S11(n), S21(n), S31(n), S41(n), where n represents the number of detections at the first detection position;

[0021] Define the four data of the Hall sensor group corresponding to the second detection position as: S12(m), S22(m), S32(m), S42(m), where m represents the number of detections at the second detection position;

[0022] The detection and display system analyzes and processes the first detection data and the second detection data, including:

[0023] Respectively average the values after low-pass filtering of S11(n), S21(n), S31(n), S41(n) to obtain

[0024] Respectively average the values after low-pass filtering of S12(m), S22(m), S32(m), S42(m) to obtain

[0025] Calculate and The difference of is denoted as the first detection value Su12(n) of the first detection position, and calculate and The difference of is denoted as the second detection value Su34(n) of the first detection position;

[0026] Calculate and The difference of is denoted as the first detection value Sl12(m) of the second detection position, and calculate and The difference of is denoted as the second detection value Sl34(m) of the second detection position.

[0027] In an embodiment of the present invention, the pre-stored threshold data range is the error range [Su12 after calibration during the laboratory development of the LIBS system min , Su12 max, [Su34 min , Su34 max , [Sl12 min , Sl12 max , [Sl34 min , Sl34 max ;

[0028] If Su12(n), Su34(n), Sl12(m), and Sl34(m) fall within their respective preset threshold data intervals, the optical path device to be measured has not shifted; otherwise, the optical path device to be measured has shifted.

[0029] The present invention provides a micro-offset detection device for an optical path device in a LIBS system. The detection device is integrated with a detection and display system and a liftable detection mechanism. The detection and display system cooperates with the lifting of the sliding sleeve to drive the Hall sensor group to align with the magnet group at the lifting detection position. The detection and display system collects and analyzes the Hall signal and displays the result on the display screen; the user determines whether there is a small displacement of the optical path device to be measured based on the display result, and then makes targeted fine adjustments to the position of the optical path device.

[0030] The micro-offset detection device for an optical path device in the LIBS system of the present invention has a reasonable structural design and combines an embedded detection and display system, which can quickly and accurately detect whether there is a small position offset of the optical path device to be measured, greatly reducing the difficulty and complexity of adjusting the position of the optical path device during on-site debugging of LIBS, and greatly improving the timeliness of on-site calibration of LIBS.

[0031] The present invention adopts a low-power and portable design with reasonable dimensions, which is convenient to carry and can be easily applied to on-site debugging of LIBS without external support, even in the wild. Description of the Drawings

[0032] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only schematic diagrams of some embodiments of the present invention. For those of ordinary skill in the art, other embodiments can be obtained based on these drawings without creative efforts.

[0033] Figure 1 Schematic diagram of the structure of the micro-offset detection device for an optical path device in the LIBS system of the present invention at the first detection position in an embodiment;

[0034] Figure 2 Schematic diagram of the structure of the micro-offset detection device for an optical path device in the LIBS system of the present invention after removing the sliding sleeve in an embodiment;

[0035] Figure 3Schematic diagram of the micro-offset detection device for the optical path device of the LIBS system of the present invention at the second detection position in an embodiment;

[0036] Figure 4 Control schematic diagram of the detection display system for the micro-offset detection device of the optical path device of the LIBS system of the present invention in an embodiment;

[0037] Figure 5 Flowchart of the micro-offset detection method for the optical path device of the LIBS system of the present invention;

[0038] Figure 6 Flowchart of the micro-offset detection method for the optical path device of the LIBS system of the present invention in an embodiment;

[0039] Figure 7 Flowchart of obtaining the judgment threshold in an embodiment of the micro-offset detection method for the optical path device of the LIBS system of the present invention.

[0040] Description of component labels:

[0041] 100, detection box; 101, fixing hole; 102, penetration hole; 103, device clamp; 104, device support; 110, sliding sleeve; 111, upper cover plate; 120, Hall sensor group; 121, first Hall sensor; 122, second Hall sensor; 123, third Hall sensor; 124, fourth Hall sensor; 130, first magnet group; 131, first permanent magnet; 132, third permanent magnet; 133, first support; 140, second magnet group; 141, second permanent magnet; 142, fourth permanent magnet; 143, second support; 150, elastic support mechanism; 151, first spring pillar; 152, second spring pillar; 160, detection display system. Specific embodiments

[0042] The following illustrates the embodiments of the present invention through specific specific examples. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that, without conflict, the following embodiments and the features in the embodiments can be combined with each other. It should also be understood that the terms used in the embodiments of the present invention are for the purpose of describing specific specific implementation schemes, rather than for limiting the protection scope of the present invention. The test methods without specific conditions noted in the following embodiments are usually carried out according to conventional conditions or according to the conditions recommended by each manufacturer.

[0043] When numerical ranges are given in the embodiments, it should be understood that unless otherwise specified in the present invention, both endpoints of each numerical range and any value between the two endpoints can be selected. Unless otherwise defined, all technical and scientific terms used in the present invention, based on the understanding of those skilled in the art of the prior art and the description of the present invention, any methods, devices, and materials of the prior art similar or equivalent to those in the methods, devices, and materials of the embodiments of the present invention can also be used to implement the present invention.

[0044] It should be noted that the terms such as "upper", "lower", "left", "right", "middle", and "one" cited in this specification are only for the convenience of clear narration and are not used to limit the scope of implementation of the present invention. The change or adjustment of their relative relationship, without substantial change in the technical content, should also be regarded as the scope of implementation of the present invention.

[0045] In order for the LIBS system to meet requirements such as focusing a laser at a long distance, receiving spectral signals, adjusting the optical path, and accurately aligning the laser with the object to be measured, a large number of various optical path devices are required. These optical path devices are fixed in their respective positions through device brackets and device jigs. In actual situations, the device brackets may become loose or deflected due to various reasons, especially during transportation. This will cause the devices to be displaced and deflected, and further cause problems with the optical path of the LIBS system. Therefore, before the LIBS system is put into use, it must be recalibrated at the application site. However, there are many optical path devices in the LIBS system, and the timeliness requirement for on-site calibration is very high. If it is possible to quickly determine whether the optical path devices have been displaced at the site, the timeliness of on-site calibration will be greatly improved.

[0046] Based on this, the present invention provides a micro-offset detection device for optical path devices of a LIBS system and a detection method using the detection device, which can quickly and accurately determine whether the optical path devices have been offset, greatly improving the timeliness of on-site calibration.

[0047] Please refer to Figures 1 to 3, the above LIBS system includes a device bracket 104 and optical path devices. The device bracket 104 is arranged on the frame of the LIBS system, and the optical path devices are fixed on the device bracket 104, for example, fixed on the device bracket 104 through a device fixture 103. Specifically, the device fixture 103 is fixed on the top of the device bracket 104 according to the light requirements of the LIBS system, and the optical path devices are installed on the device fixture 103. When the device bracket 104 has a position offset, the device fixture 103 and the optical path devices will also have an offset. The micro-offset detection device for the optical path devices of the LIBS system provided by the present invention is designed for the optical path devices that may have an offset during the laboratory development of the LIBS system. The micro-offset detection device for the optical path devices of the LIBS system includes: a detection box 100, a sliding sleeve 110, a Hall sensor group 120, a first magnet group 130, a second magnet group 140, and a detection and display system 160.

[0048] Among them, the detection box 100 is used to cover the optical path device to be measured in the LIBS system. The bottom of the detection box 100 is provided with a fixing hole 101 and a penetrating hole 102. The detection box 100 is fixed on the frame of the LIBS system near the optical path device to be measured through the fixing hole 101. The sliding sleeve 110 is arranged on the detection box 100, and the sliding sleeve 110 can move up and down between the first detection position and the second detection position of the detection box 100. The Hall sensor group 120 is arranged in the sliding sleeve 110 and moves synchronously with the sliding sleeve 110. Both the first magnet group 130 and the second magnet group 140 are fixed to the device bracket 104, and the second magnet group 140 is arranged on both sides of the optical path device (device fixture 103) to be measured. The first magnet group 130 and the second magnet group 140 are correspondingly arranged above the optical path device to be measured. The detection and display system 160 is arranged on the sliding sleeve 110, and the detection and display system 160 is electrically connected to the Hall sensor group 120. When the sliding sleeve 110 moves to the first detection position, the Hall sensor group 120 is aligned with the first magnet group 130, and the detection and display system 160 collects and displays the first detection signal; when the sliding sleeve 110 moves to the second detection position, the Hall sensor group 120 is aligned with the second magnet group 140, and the detection and display system 160 collects and displays the second detection signal. When the Hall sensor group 120 is aligned with the first magnet group 130 or the second magnet group 140, affected by the magnetic field of the magnet group, the Hall voltage of the Hall sensor group 120 changes. The detection and display system 160 compares the change situation of the Hall signal detected on-site with the threshold interval preset in the laboratory, so as to determine whether the optical path device to be measured has a displacement.

[0049] Please refer to Figure 1, the detection box 100 can be any cavity structure capable of accommodating the optical path device to be tested, the device support 104, the first magnet group 130, and the second magnet group 140. In an embodiment, the detection box 100 is a cuboid cavity structure. A plurality of fixing holes 101 are provided at the bottom of the detection box 100. The number of the fixing holes 101 is not limited as long as the detection box 100 can be fixed during the detection process. In this embodiment, four fixing holes 101 are provided at the bottom of the detection box 100, and the four fixing holes 101 are symmetrically distributed about the center. When the LIBS system is developed, hole positions corresponding to the fixing holes 101 on the detection box 100 are reserved around the optical path device to be tested. The detection box 100 is fixed to the rack around the optical path device to be tested through the fixing holes 101 and fixing members, such as bolt assemblies. The through hole 102 is provided at the center of the bottom of the detection box 100 to ensure that the optical path device to be tested is at the center of the detection box 100. The size of the through hole 102 allows at least the optical path device to be tested, the first magnet group 130, and the second magnet group 140 to pass through. Further, the top of the detection box 100 communicates with the sliding sleeve 110. For example, the top has no end cover, or a through hole for the optical path device to be tested, the first magnet group 130, and the second magnet group 140 to pass through is provided at the top.

[0050] The optical path device to be tested is fixed on the device support 104. When the device support 104 becomes loose or deflected due to transportation or other reasons, the optical path device to be tested will be displaced and deflected. During the detection process, the positions of the first magnet group 130 and the second magnet group 140 remain fixed relative to the optical path device to be tested. Specifically, the second magnet group 140 is fixed on both sides of the device fixture 103 of the optical path device to be tested, and the first magnet group 130 is correspondingly fixed above the second magnet group 140, and the distance between the first magnet group 130 and the second magnet group 140 is equal to the distance that the sliding sleeve 110 moves up and down (the distance between the first detection position and the second detection position).

[0051] Please refer to Figures 1 to 3, in one embodiment, the first magnet group 130 includes a first permanent magnet 131, a third permanent magnet 132, and a first bracket 133. The second magnet group 140 includes a second permanent magnet 141, a fourth permanent magnet 142, and a second bracket 143. The second bracket 143 is fixed to the top of the device bracket 104 and is rigidly connected to the device fixture 103 of the optical path device to be measured. The second permanent magnet 141 and the fourth permanent magnet 142 are respectively arranged at both ends of the second bracket 143, and the device fixture 103 of the optical path device to be measured is located between the second permanent magnet 141 and the fourth permanent magnet 142. If the optical path device to be measured undergoes displacement and deflection, the second permanent magnet 141 and the fourth permanent magnet 142 will also undergo displacement and deflection. The first bracket 133 is fixed above the second bracket 143, and its fixing method is not limited. For example, it can be fixed to the second bracket 143 through a connecting rod. The first permanent magnet 131 and the third permanent magnet 132 are respectively fixed at both ends of the first bracket 133, and the first permanent magnet 131 is arranged corresponding to the second permanent magnet 141, and the third permanent magnet 132 is arranged corresponding to the fourth permanent magnet 142. If the optical path device to be measured undergoes displacement and deflection, the first permanent magnet 131 and the third permanent magnet 132 will also undergo displacement and deflection. The first permanent magnet 131, the second permanent magnet 141, the third permanent magnet 132, and the fourth permanent magnet 142 have exactly the same properties and shapes. When the optical path device to be measured does not undergo displacement and deflection, the relative positions of the first permanent magnet 131, the second permanent magnet 141, the third permanent magnet 132, and the fourth permanent magnet 142 remain unchanged.

[0052] Please refer to Figures 1 to 3 , the sliding sleeve 110 is arranged on the detection box 100 and can move up and down along the detection box 100. The sliding sleeve 110 can be any structure that can realize its up and down sliding. As an example, the sliding sleeve 110 is sleeved on the detection box 100, and the shape of the sliding sleeve 110 matches the shape of the detection box 100. For example, the detection box 100 is a cuboid cavity structure, and the sliding sleeve 110 is also a cuboid cavity structure. The sliding sleeve 110 includes an upper cover plate 111 and side walls arranged along the circumferential direction of the upper cover plate 111. Sliders are arranged inside the side walls of the sliding sleeve 110, and slide rails are arranged on the side walls of the detection box 100 that cooperate with the sliders. The sliding connection between the sliding sleeve 110 and the detection box 100 can be realized through the cooperation of the sliders and the slide rails. In the initial state, the Hall sensor group 120 in the sliding sleeve 110 is aligned with the first magnet group 130, and this is defined as the first detection position of the detection box 100; when the sliding sleeve 110 slides down along the detection box 100 until the Hall sensor group 120 is aligned with the second magnet group 140, it is defined as the second detection position of the detection box 100.

[0053] Please refer to Figures 1 to 3, in one embodiment, the Hall sensor group 120 includes a first Hall sensor 121, a second Hall sensor 122, a third Hall sensor 123, and a fourth Hall sensor 124. The four Hall sensors are fixed in pairs on the inner wall of the sliding sleeve 110. Specifically, the first Hall sensor 121 and the third Hall sensor 123 are arranged on the first inner wall of the sliding sleeve 110, and the second Hall sensor 122 and the fourth Hall sensor 124 are arranged on the second inner wall opposite to the first inner wall. Moreover, the first Hall sensor 121, the second Hall sensor 122, the third Hall sensor 123, and the fourth Hall sensor 124 are all fixed at the same height. The first Hall sensor 121 and the second Hall sensor 122 are arranged opposite to each other, and the third Hall sensor 123 and the fourth Hall sensor 124 are arranged opposite to each other. When the sliding sleeve 110 is located at the first detection position, the first Hall sensor 121 and the second Hall sensor 122 are aligned with the first permanent magnet 131 of the first magnet group 130, and the third Hall sensor 123 and the fourth Hall sensor 124 correspond to the third permanent magnet 132 of the first magnet group 130. When the sliding sleeve 110 slides to the second detection position, the first Hall sensor 121 and the second Hall sensor 122 are aligned with the second permanent magnet 141 of the second magnet group 140, and the third Hall sensor 123 and the fourth Hall sensor 124 are aligned with the fourth permanent magnet 142 of the second magnet group 140.

[0054] Please refer to Figures 1 to 3 , in one embodiment, in order to ensure that the sliding sleeve 110 can accurately reach the first detection position and the second detection position during the sliding process, a limit switch (not shown in the figure) for detecting the position of the sliding sleeve 110 is further provided inside the sliding sleeve 110. The limit switch is electrically connected to the detection and display system 160. Trigger points cooperating with the limit switch are respectively provided at the first detection position and the second detection position of the detection box 100. When the sliding sleeve 110 drives the limit switch to move to the first detection position or the second detection position, the trigger points at the corresponding positions are triggered, and the limit switch is turned on. In this embodiment, the limit switch includes a first limit switch, a second limit switch, a third limit switch, and a fourth limit switch. Among them, the first limit switch and the second limit switch respectively correspond to the two trigger points at the first detection position and are respectively electrically connected to the detection and display system 160. When the sliding sleeve 110 is located at the first detection position, the first limit switch and the second limit switch respectively contact the two trigger points at the first detection position and are turned on, and both are in an effective state, and are in an invalid state in other cases. The third limit switch and the fourth limit switch respectively correspond to the two trigger points at the second detection position and are respectively electrically connected to the detection and display system 160. When the sliding sleeve 110 moves to the second detection position under the action of an external force, the third limit switch and the fourth limit switch respectively contact the two trigger points at the second detection position and are turned on, and both are in an effective state, and are in an invalid state in other cases.

[0055] Please refer to Figures 1 to 3 In one embodiment, the micro-offset detection device for the optical path device of the LIBS system further includes an elastic support mechanism 150. The elastic support mechanism 150 includes a first spring pillar 151 and a second spring pillar 152. The first spring pillar 151 is fixedly arranged on one side of the detection box 100 and supports the sliding sleeve 110 at the top. The second spring pillar 152 is relatively arranged on the other side of the detection box 100 and supports the sliding sleeve 110 at the top. The first spring pillar 151 and the second spring pillar 152 can provide a certain support for the sliding sleeve 110 and reset under the action of no external force. Therefore, in the initial state, the sliding sleeve 110 is supported at the first detection position of the detection box 100 by the first spring pillar 151 and the second spring pillar 152. Pressing the sliding sleeve 110 downward can compress the first spring pillar 151 and the second spring pillar 152 so that the sliding sleeve 110 moves to the second detection position for detection, and then it can reset under the elastic action. The detection process is simple and fast.

[0056] Please refer to Figures 1 to 4, in one embodiment, the detection and display system 160 includes a control system, a display screen, and a power supply component. Among them, the control system is embedded inside the upper cover plate 111 of the sliding sleeve 110 and is used to receive the signals of the Hall sensor group 120 and the limit switches and perform signal processing. The control system includes a Microcontroller Unit (MCU) and an Analog-to-Digital Converter (ADC). The MCU is connected to the ADC device through the IO. The ADC device is electrically connected to each sensor of the Hall sensor group 120. In this embodiment, the MCU uses a low-power single-chip microcomputer chip, and the ADC device uses a high-precision low-speed four-channel ADC device. The four channels of this ADC device are respectively electrically connected to the four Hall sensors of the Hall sensor group 120 through conditioning circuits. The four channels of the ADC device are connected to four conditioning circuits, and the four conditioning circuits are respectively connected to four Hall sensors, so as to obtain the output signals of the Hall sensor group 120. The four conditioning circuits complete filtering and amplification of the output signals of the Hall sensors, and then send the Hall signals to the ADC device. The ADC device then transmits them to the MCU for storage and processing, thus completing the signal acquisition of the four Hall sensors by the MCU. The display screen is arranged on the surface of the upper cover plate 111 of the sliding sleeve 110 and is electrically connected to the MCU. The display screen is used to display the detection information of the MCU. Arranging it on the surface of the upper cover plate 111 is convenient for users to observe the detection results. The first limit switch, the second limit switch, the third limit switch, and the fourth limit switch are respectively electrically connected to the MCU. The MCU confirms the position of the sliding sleeve 110 through the states of the limit switches, so as to ensure accurate signal reading of the Hall sensor group 120. The display screen can use a Liquid Crystal Display (LCD) or other screens that can display detection information. The power supply component is used to supply power to the control system, the display screen, and the Hall sensor group 120. In this embodiment, the power supply component uses a lithium battery, and the lithium battery can be powered in the form of a single battery, a battery pack, a battery group, etc.

[0057] Furthermore, the detection and display system 160 also has a wireless transmission function, such as Bluetooth. Through Bluetooth, the detection data can be uploaded to an external connected device, such as a computer, and at the same time, it is displayed on the LCD. Even further, the detection and display system 160 is also provided with a trigger mechanism. For example, a button is set on the LCD, and this button is electrically connected to the MCU. Pressing this button can wake up the MCU in the sleep state to work.

[0058] Please refer to Figure 4 , in one embodiment, the control process of the detection and display system 160 is as follows: Press the button to wake up the MCU in the sleep state to work. The MCU determines the position of the sliding sleeve 110 by determining the states of the first limit switch, the second limit switch, the third limit switch, and the fourth limit switch.

[0059] If the first limit switch and the second limit switch are in an effective state, the sliding sleeve 110 is in the upward pressing state, that is, in the first detection position. At this time, the first Hall sensor 121 and the second Hall sensor 122 are aligned with the first permanent magnet 131, and the third Hall sensor 123 and the fourth Hall sensor 124 are aligned with the third permanent magnet 132. The MCU collects the output signals of the four Hall sensors through four channels of the ADC device.

[0060] If the third limit switch and the fourth limit switch are in an effective state, the sliding sleeve 110 is in the downward pressing state, that is, in the second detection position. At this time, the first Hall sensor 121 and the second Hall sensor 122 are aligned with the second permanent magnet 141, and the third Hall sensor 123 and the fourth Hall sensor 124 are aligned with the fourth permanent magnet 142. The MCU collects the output signals of the four Hall sensors through four channels of the ADC device.

[0061] During the detection process, the MCU will calculate the received Hall output information and present the calculation results on the LCD for the user to view.

[0062] Please refer to Figure Figures 1 to 6 In the second aspect of the present invention, a method for detecting micro-offset of an optical path device of a LIBS system is provided. This detection method uses the above-mentioned LIBS system optical path device micro-offset detection device of the present invention for detection, and includes the following steps:

[0063] S1. Cover the detection box 100 on the optical path device to be measured, and make the sliding sleeve 110 in the first detection position;

[0064] S2. Wake up the detection and display system 160. The detection and display system 160 reads the output signals of the Hall sensor group 120 at this time and saves them as the first detection data;

[0065] S3. Push the sliding sleeve 110 downward to move it from the first detection position to the second detection position. The detection and display system 160 reads the output signals of the Hall sensor group 120 at this time and saves them as the second detection data;

[0066] S4. Repeat the data acquisition steps at the first detection position and the second detection position multiple times to obtain multiple groups of first detection data and multiple groups of second detection data;

[0067] S5. The detection and display system 160 analyzes and processes multiple groups of first detection data and multiple groups of second detection data and compares them with a preset threshold data range to determine whether the optical path device to be measured has a displacement.

[0068] Specifically, the optical path device to be measured in step S1 can be any optical path device in the LIBS system, such as a lens. Considering the actual situation, this optical path device is the one with the maximum possible displacement. When the LIBS system is developed in the laboratory, mounting holes are reserved near the optical path device to be measured, and these holes are correspondingly arranged with the fixing holes 101 at the bottom of the detection box 100.

[0069] When the LIBS system is debugged on-site, first cover the detection box 100 on the optical path device to be measured, so that the optical path device to be measured, the device fixture 103, the device support 104, the first magnet group 130 and the second magnet group 140 pass through the through hole 102 at the bottom of the detection box 100. Then use a fixing member, such as a bolt assembly, to fix the detection box 100 on the rack near the optical path device to be measured. At this time, the Hall sensor group 120 in the sliding sleeve 110 is aligned with the first magnet group 130, that is, the sliding sleeve 110 is in the first detection position.

[0070] In step S2, the detection and display system 160 is awakened, that is, the MCU of the detection and display system 160 is awakened. Before the LIBS system is debugged on-site, the detection and display system 160 is default in the low-power sleep state. Therefore, when the LIBS system is debugged on-site, the MCU needs to be awakened first. The awakening method is: push the sliding sleeve 110 downward (due to the elastic action of the elastic support mechanism 150, the sliding sleeve 110 will quickly return to the original position), causing the first limit switch and the second limit switch to generate jump signals, and awakening the sleeping MCU to work. Then the MCU starts to detect whether the first limit switch and the second limit switch are in an effective state. If the first limit switch and the second limit switch are in an effective state, it means that the sliding sleeve 110 is in the upward pressing state, that is, in the first detection position. At this time, the first Hall sensor 121 and the second Hall sensor 122 are aligned with the first permanent magnet 131, and the third Hall sensor 123 and the fourth Hall sensor 124 are aligned with the third permanent magnet 132. The MCU reads the output signals of the current first Hall sensor 121, second Hall sensor 122, third Hall sensor 123 and fourth Hall sensor 124, and obtains the corresponding detection data S11(n), S21(n), S31(n), S41(n). Among them, S11 represents the detection data of the first Hall sensor 121 at the first detection position, S21 represents the detection data of the second Hall sensor 122 at the first detection position, S31 represents the detection data of the third Hall sensor 123 at the first detection position, S41 represents the detection data of the fourth Hall sensor 124 at the first detection position, and n represents the number of detections of the MCU at the first detection position. If the first limit switch and the second limit switch are in an invalid state, the MCU starts to detect whether the third limit switch and the fourth limit switch are effective.

[0071] After the MCU detects that the first limit switch and the second limit switch are in an effective state and obtains the detection data S11(n), S21(n), S31(n), and S41(n), it is also necessary to detect whether the effectiveness of the first limit switch and the second limit switch times out. If it times out, it means that the sliding sleeve 110 has been in the rising and pressing state for a long time, and there is no need to perform further detection. The MCU re-enters the sleep state. If it does not time out, the MCU repeats the detection of whether the first limit switch and the second limit switch are in an effective state.

[0072] The MCU performs low-pass filtering on the four groups of data sequences S11(n), S21(n), S31(n), and S41(n) respectively to obtain F11(n), F21(n), F31(n), and F41(n), where the filtering coefficient is an empirical coefficient. Then, the average of the four groups of data sequences F11(n), F21(n), F31(n), and F41(n) is calculated respectively to obtain the corresponding When calculating the first detection position, the difference between the first Hall sensor and the second Hall sensor and the difference between the third Hall sensor and the fourth Hall sensor

[0073] In step S3, the sliding sleeve 110 is pushed downward so that it descends from the first detection position to the second detection position along the detection box 100. At this time, the first Hall sensor 121 and the second Hall sensor 122 are aligned with the second permanent magnet 141, and the third Hall sensor 123 and the fourth Hall sensor 124 are aligned with the fourth permanent magnet 142. The MCU detects whether the third limit switch and the fourth limit switch are effective. If they are in an effective state, the MCU reads the output signals of the current first Hall sensor 121, second Hall sensor 122, third Hall sensor 123, and fourth Hall sensor 124, and obtains the corresponding detection data S12(m), S22(m), S32(m), and S42(m), where S12 represents the detection data of the first Hall sensor 121 at the second detection position, S22 represents the detection data of the second Hall sensor 122 at the second detection position, S32 represents the detection data of the third Hall sensor 123 at the second detection position, S42 represents the detection data of the fourth Hall sensor 124 at the second detection position, and m represents the detection times of the MCU at the second detection position.

[0074] Then, low-pass filtering is performed on the four groups of data sequences S12(m), S22(m), S32(m), and S42(m) respectively to obtain the filtered values F12(m), F22(m), F32(m), and F42(m); then, the average of the four groups of data sequences F12(m), F22(m), F32(m), and F42(m) is calculated respectively to obtain the corresponding When calculating the second detection position, the difference between the first Hall sensor and the second Hall sensor and the difference between the third Hall sensor and the fourth Hall sensor

[0075] Step S4 repeats steps S2 and S3 to obtain multiple sets of first detection data and multiple sets of second detection data, thereby improving the detection accuracy. In actual situations, the values of n and m can be equal or unequal, and are specifically determined according to the actual situation.

[0076] Step S5 compares the actual detected values Su12(n), Su34(n), Sl12(m), and Sl34(m) with four preset threshold data intervals [Su12 min , Su12 max , [Su34 min , Su34 max , [Sl12 min , Sl12 max , and [Sl34 min , Sl34 max set in the laboratory. If the actual detected values Su12(n), Su34(n), Sl12(m), and Sl34(m) fall into their respective corresponding preset threshold data intervals, the optical path device to be measured has not shifted; otherwise, the optical path device to be measured has shifted. Exemplarily:

[0077] a) When the four measured detected values Su12(n), Su34(n), Sl12(m), and Sl34(m) simultaneously satisfy the conditions: (Su12(n) < Su12 min ), (Sl12(m) < Sl12 min ), (Su34(n) > Su34 max ), and (Sl34(m) > Sl34 max ), the optical path device to be measured has undergone a clockwise rotational shift.

[0078] b) When the four measured values Su12(n), Su34(n), Sl12(m), and Sl34(m) simultaneously satisfy the conditions (Su12(n) > Su12 max ), (Sl12(m) > Sl12 max ), (Su34(n) < Su34 min ), and (Sl34(m) < Sl34 min ), the optical path device to be measured has undergone a counterclockwise rotational shift.

[0079] c) When the four measured values Su12(n), Su34(n), Sl12(m), and Sl34(m) do not fall into the above situations, it is defaulted that the optical path device to be measured has not shifted.

[0080] Please refer to Figure 7 , the above four preset threshold data intervals [Su12 min , Su12 max , [Su34 min , Su34 max , [Sl12 min , Sl12 max , [Sl34 min , Sl34 max are the error intervals obtained by using the micro-offset detection device for the optical path device of the LIBS system after the LIBS system is developed and calibrated in the laboratory. The specific acquisition process is similar to the above test process. The difference is that: the number of test rounds is increased, and the data of each round is averaged to obtain the difference between the first and second Hall sensors and the difference between the third and fourth Hall sensors in each round, and then arranged from small to large, so as to obtain the threshold intervals [Su12 min , Su12 max , [Su34 min , Su34 max , [Sl12 min , Sl12 max , [Sl34 min , Sl34 max . The number of test rounds can be adjusted according to the empirically detected threshold intervals recognized by the user.

[0081] The micro-offset detection device and method for the optical path device of the LIBS system of the present invention can be used for any optical path device in the LIBS system. In actual applications, considering costs, it can be used on one or more optical path devices that are most likely to shift, so as to improve the efficiency of on-site calibration.

[0082] The micro-offset detection device for the optical path components of the LIBS system provided by the present invention integrates a detection and display system and a liftable detection mechanism. The detection and display system cooperates with the lifting of the sliding sleeve to drive the Hall sensor group to align with the magnet group at the lifting detection position. The detection and display system collects and analyzes the Hall signals and displays the results on the display screen. The user can judge whether there is a small displacement of the optical path component to be measured according to the display results, and then make targeted fine adjustments to the position of the optical path component. The structure of this detection device is reasonably designed and combined with an embedded detection and display system, which can quickly and accurately detect whether there is a small position offset of the optical path component to be measured, greatly reducing the difficulty and complexity of debugging the position of the optical path component in the LIBS field, and greatly improving the timeliness of on-site calibration of LIBS. Therefore, the present invention effectively overcomes some practical problems in the prior art and thus has high utilization value and practical significance.

[0083] The above embodiments are only illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Any person familiar with this technology can modify or change the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or changes completed by those with ordinary knowledge in the technical field without departing from the spirit and technical ideas disclosed by the present invention should still be covered by the claims of the present invention.

Claims

1. A micro-offset detection device for an optical path device of a LIBS system, the LIBS system comprising a device bracket and an optical path device fixedly installed on the device bracket, characterized in that, The detection device includes: A first magnet group, which is fixed to the device bracket and is arranged above both sides of the optical path device; A second magnet group, which is fixed to the device bracket and is correspondingly arranged on both sides of the optical path device opposite to the first magnet group; A detection box, the bottom of which is provided with a fixing hole and a through hole, and the optical path device, the device bracket, the first magnet group, and the second magnet group pass through the through hole and extend into the detection box; A sliding sleeve, which is slidably arranged on the detection box and moves between a first detection position and a second detection position of the detection box; A Hall sensor group, which is arranged in the sliding sleeve and moves synchronously with the sliding sleeve; A detection and display system, which is arranged on the sliding sleeve, and the detection and display system is electrically connected to the Hall sensor group; When the sliding sleeve moves to the first detection position, the Hall sensor group is aligned with the first magnet group, and the detection and display system collects and displays a first detection signal; when the sliding sleeve moves to the second detection position, the Hall sensor group is aligned with the second magnet group, and the detection and display system collects and displays a second detection signal.

2. The micro-offset detection device for the optical path device of the LIBS system according to claim 1, characterized in that, The first magnet group includes a first permanent magnet, a third permanent magnet, and a first bracket. The second magnet group includes a second permanent magnet, a fourth permanent magnet, and a second bracket. The second bracket is fixed to the device bracket. The second permanent magnet and the fourth permanent magnet are respectively fixed at both ends of the second bracket, and the optical path device is located between the second permanent magnet and the fourth permanent magnet. The first bracket is fixedly arranged above the second bracket, and the distance between the first bracket and the second bracket is equal to the distance between the first detection position and the second detection position. The first permanent magnet and the third permanent magnet are respectively fixed at both ends of the second bracket.

3. The LIBS system optical path device micro-offset detection device according to claim 1, characterized in that, The Hall sensor group includes a first Hall sensor, a second Hall sensor, a third Hall sensor, and a fourth Hall sensor symmetrically arranged on the inner wall of the sliding sleeve, and the first Hall sensor and the second Hall sensor are arranged opposite to each other, and the third Hall sensor and the fourth Hall sensor are arranged opposite to each other.

4. The micro-offset detection device for the optical path device of the LIBS system according to claim 1, characterized in that, It further includes a first limit switch, a second limit switch, a third limit switch, and a fourth limit switch. The first limit switch and the second limit switch are arranged opposite to each other at the first detection position, and the third limit switch and the fourth limit switch are arranged opposite to each other at the second detection position. The first limit switch, the second limit switch, the third limit switch, and the fourth limit switch are respectively electrically connected to the detection and display system.

5. The micro-offset detection device for the optical path device of the LIBS system according to claim 1, characterized in that, It further includes an elastic support mechanism. The elastic support mechanism includes a first spring pillar and a second spring pillar. The first spring pillar is arranged on one side of the detection box and supports the sliding sleeve at the top. The second spring pillar is correspondingly arranged on the other side of the detection box and supports the sliding sleeve at the top.

6. The micro-offset detection device for the optical path device of the LIBS system according to claim 1, characterized in that, The detection and display system includes a control system, a display screen, and a power supply component. The control system is embedded inside the sliding sleeve and is electrically connected to the display screen and the Hall sensor group. The power supply component supplies power to the control system, the display screen, and the Hall sensor group. The display screen is used to display detection signals.

7. The LIBS system optical path device micro-offset detection device according to claim 6, characterized in that, The control system includes a micro-control unit and an analog-to-digital converter. The micro-control unit is electrically connected to the Hall sensor group through the analog-to-digital converter; the display screen uses a liquid crystal display screen, and the liquid crystal display screen is arranged on the top of the sliding sleeve.

8. A detection method using the LIBS system optical path device micro-offset detection device according to any one of claims 1-7, characterized in that, It includes the following steps: Cover the detection box on the optical path device to be measured, and make the sliding sleeve in the first detection position; Wake up the detection and display system, and the detection and display system reads the output signal of the Hall sensor group at this time and saves it as the first detection data; Push the sliding sleeve downward so that it slides from the first detection position to the second detection position, and the detection and display system detects and reads the output signal of the Hall sensor group at this time and saves it as the second detection data; Repeat the data acquisition steps at the first detection position and the second detection position multiple times to obtain multiple groups of first detection data and multiple groups of second detection data; The detection and display system analyzes and processes multiple groups of the first detection data and multiple groups of the second detection data and compares them with a preset threshold data range to determine whether the optical path device to be measured has a displacement.

9. The detection method according to claim 8, wherein The Hall sensor group includes: a first Hall sensor, a second Hall sensor, a third Hall sensor, and a fourth Hall sensor symmetrically arranged on the inner wall of the sliding sleeve, and the first Hall sensor and the second Hall sensor are arranged opposite to each other, and the third Hall sensor and the fourth Hall sensor are arranged opposite to each other; Define the data of the four Hall sensors corresponding to the first detection position as: S11(n), S21(n), S31(n), S41(n), where n represents the number of detections at the first detection position; Define the data of the four Hall sensors corresponding to the second detection position as: S12(m), S22(m), S32(m), S42(m), where m represents the number of detections at the second detection position; The detection and display system analyzes and processes the first detection data and the second detection data, including: The average values are obtained by averaging the values after low-pass filtering of S11(n), S21(n), S31(n), and S41(n) respectively The average values are obtained respectively by averaging the values after low-pass filtering of S12(m), S22(m), S32(m), and S42(m). Calculation and The difference is denoted as the first detection value Su12(n) of the first detection bit. Calculate and The difference is denoted as the second detection value Su34(n) of the first detection bit; Calculate and The difference is denoted as the first detection value Sl12(m) of the second detection bit. Calculate and The difference is denoted as the second detection value Sl34(m) of the second detection bit.

10. The detection method according to claim 9, wherein, The preset threshold data range is the error range after calibration in the laboratory development of the LIBS system [Su12 min ,Su12 max , [Su34 min ,Su34 max , [Sl12 min ,Sl12 max , [Sl34 min ,Sl34 max ; If Su12(n), Su34(n), Sl12(m), and Sl34(m) respectively fall within the corresponding preset threshold data ranges, then the optical path device to be measured has not shifted; otherwise, the optical path device to be measured has shifted.

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