Chip packaging leak detection device

Abstract

The invention discloses a chip packaging leak detection device, and belongs to the technical field of chip detection. The detection box comprises an outer box body and an inner box body, and an upper working position, a middle working position and a lower working position are arranged in the outer box body; an upper placing position and a lower placing position are arranged in the inner box body; the driving part is used for driving the inner box body to slide in the outer box body, so that the upper and lower placing positions of the inner box body are communicated with the middle and lower working positions of the outer box body in a one-to-one correspondence manner or the upper and lower placing positions of the inner box body are communicated with the upper and middle working positions of the outer box body in a one-to-one correspondence manner; the side wall of each working position in the outer box body is connected with a vacuumizing pipe and a vacuum gauge pipe, and the vacuumizing pipe is connected with a vacuumizing device; and the middle working position of the outer box body is connected with a leak detector. Parallel operation of chip detection and loading and unloading is realized through the outer box body and the inner box body; when the middle working position is detecting the chip, the upper working position and the lower working position can be used for loading, unloading and pre-vacuumizing preparation of the chip, so that the waiting time is greatly shortened, and the overall detection efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of chip detection, and particularly to a chip package leak detection device. Background Art

[0002] In the semiconductor manufacturing industry, the quality inspection after chip packaging is an important link to ensure the product performance and reliability. Among them, the leak detection test is a key process to evaluate the integrity of the chip package. The existing technology generally uses a leak detector to perform leak detection operations on chips, and this process needs to be carried out in a vacuum environment to ensure the accuracy and reliability of the detection. In order to achieve a vacuum environment, the traditional solution usually relies on a vacuum pumping device, which needs to evacuate the detection area before each detection to remove air and other gases that may affect the detection results. Once the detection is completed, air intake operations are required to restore the normal pressure state, facilitating the loading and unloading of chips and the start of the next detection cycle. This cyclic operation of evacuation and air intake not only increases the time cost of the detection process but also affects the continuity and overall efficiency of chip detection. Summary of the Invention

[0003] Aiming at the above existing technical deficiencies, the present invention provides a chip package leak detection device.

[0004] The present invention adopts the following technical solutions: A chip package leak detection device includes a detection box, a vacuum pumping device and a leak detector connected to the detection box; the detection box includes: An outer box body, which has upper, middle and lower working positions inside; An inner box body, which has upper and lower placement positions for placing chips inside; the upper and lower placement positions are separated by a partition; A driving member, which is fixed at the upper end inside the outer box body; the output end of the driving member is connected to the inner box body, and is used to drive the inner box body to slide in the outer box body, so that the upper and lower placement positions of the inner box body are in one-to-one correspondence and communication with the middle and lower working positions of the outer box body, or the upper and lower placement positions of the inner box body are in one-to-one correspondence and communication with the upper and middle working positions of the outer box body; Wherein, the side wall of each working position in the outer box body is connected with a vacuum pumping pipe and a vacuum gauge tube for detecting the air pressure at the working position inside the outer box body, and the vacuum pumping pipe is connected to the vacuum pumping device through a control valve; the side wall of the middle working position of the outer box body is connected with a connecting pipe, and the connecting pipe is connected to the leak detector.

[0005] Preferably: The outer box body includes an upper shell and a lower shell that are butt-jointed up and down; the lower end of the upper shell is open, and a circle of upper positioning platforms is fixed on the inner wall of the lower end of the upper shell; the upper end of the lower shell is open, and a circle of lower positioning platforms is fixed on the inner wall of the middle part of the lower shell.

[0006] Preferably: the interior of the upper housing is the upper working position, and the upper and lower parts in the lower housing correspond to the middle working position and the lower working position respectively.

[0007] Preferably: sealing strips are fixed on both sides of the upper positioning table and the lower positioning table.

[0008] Preferably: the inner box body includes the partition board and the upper box body and the lower box body fixedly corresponding to the upper and lower sides of the partition board. The edge of the partition board extends beyond the upper box body and the lower box body and is opposite to the upper positioning table and the lower positioning table up and down; The edge of the upper side plate of the upper box body is opposite to the upper positioning table up and down, and through grooves are provided on the peripheral side plate and the upper side plate of the upper box body; The edge of the lower side plate of the lower box body is opposite to the lower positioning table up and down, and through grooves are provided on the peripheral side plate and the upper side plate of the lower box body.

[0009] Preferably: the interior of the upper box body is the upper placement position, the interior of the lower box body is the upper placement position, and support bars are fixed on both inner side walls of the upper box body and the lower box body.

[0010] Preferably: the support bars are arranged in multiple layers.

[0011] Preferably: door openings are provided on the front sides of the upper and lower working positions of the outer box body and the upper and lower placement positions of the inner box body, and sealing doors are installed at the door openings of the upper and lower working positions of the outer box body.

[0012] Preferably: observation windows are provided on the front side of the middle working position of the outer box body and on the sealing door.

[0013] Preferably: the driving member includes a cylinder body fixed to the upper end of the outer box body. The lower end of the cylinder body is communicated with the interior of the outer box body, and an electric cylinder is fixed inside the cylinder body. The moving end of the electric cylinder is fixedly connected to the upper end of the inner box body.

[0014] Compared with the prior art, the beneficial effects of the present invention are as follows: through the outer box body including upper, middle and lower three working positions and the inner box body that can slide up and down therein, the parallel operation of detecting and loading and unloading chips is realized; when the middle working position is detecting chips, the upper and lower working positions can respectively perform chip loading and unloading and pre-pumping vacuum preparation, thus greatly reducing the waiting time and improving the overall detection efficiency; In the traditional chip leak detection process, air extraction and air intake operations are required for each detection, which interrupts the continuity of detection; while the present invention enables steps such as vacuum pumping, detection, and chip loading and unloading to be staggered through the design of multiple working positions, enhancing the continuity of operation and improving the utilization rate of the equipment; Each working position is independently equipped with a vacuum extraction pipe and a vacuum gauge pipe, and can independently control the vacuum extraction and air intake operations and monitor the air pressure state in real time; the design improves the flexibility of the system and can adjust the operation sequence and time of different working positions as needed. Brief Description of the Drawings

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0016] Figure 1 It is a perspective view of a chip package leak detection device of the present invention.

[0017] Figure 2 It is a front view of a chip package leak detection device of the present invention.

[0018] Figure 3 It is a top view of a chip package leak detection device of the present invention.

[0019] Figure 4 It is Figure 3 the A-A cross-sectional view in

[0020] Figure 5 It is a main cross-sectional view of the outer box of the present invention.

[0021] Figure 6 It is a perspective view of the inner box of the present invention.

[0022] Description of the reference numerals: 1. Outer box; 11. Upper shell; 111. Upper positioning platform; 12. Lower shell; 121. Lower positioning platform; 13. Sealing door; 14. Observation window; 2. Vacuum extraction pipe; 3. Vacuum gauge tube; 4. Inner box; 41. Partition board; 42. Upper box; 43. Lower box; 44. Support bar; 5. Driving member; 51. Cylinder body; 52. Electric cylinder; 6. Connecting pipe. Detailed Embodiments

[0023] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the drawings in the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, rather than all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present invention.

[0024] Embodiment 1: As Figure 1 , Figure 2 shown, the present invention provides a chip package leak detection device, which mainly includes a detection box, a vacuum extraction device and a leak detector. The detection box is used to hold the chips to be detected, and the vacuum extraction device and the leak detector are respectively connected to the detection box to provide a vacuum condition and detect the chips.

[0025] Combined Figures 1 to 6 As shown, the outer box body 1 includes an upper shell 11 and a lower shell 12 that are docked up and down, and has three working positions: upper, middle, and lower inside. Both the upper shell 11 and the lower shell 12 are square box bodies with one end open, and are fixedly connected by a flange plate and bolts; the inside of the upper shell 11 is the upper working position, and the upper and lower parts in the lower shell 12 correspond to the middle working position and the lower working position respectively. A circle of upper positioning platform 111 is fixedly installed on the inner wall of the lower end of the upper shell 11, and a circle of lower positioning platform 121 is fixedly installed on the inner wall of the middle part of the lower shell 12; the upper positioning platform 111 and the lower positioning platform 121 exactly divide the upper working position, the middle working position, and the lower working position. Sealing strips are adhesively fixed on both sides of the upper positioning platform 111 and the lower positioning platform 121; the sealing strip close to the inside is used to cooperate with the inner box body 4 inside, so that the upper working position, the middle working position, and the lower working position are in a sealed and divided state during detection; the sealing strip close to the outside mainly plays a buffering role.

[0026] Door openings are provided on the front sides of the upper and lower working positions of the outer box body 1, and a sealing door 13 is installed at the door opening for loading and unloading chips. Observation windows 14 are provided on the front side of the middle working position of the outer box body 1 and on the sealing door 13 for observing the state of the chips during detection and waiting for detection.

[0027] A vacuum extraction tube 2 and a vacuum gauge tube 3 are connected to the side wall of each working position in the outer box body 1. The vacuum extraction tube 2 is connected to a vacuum extraction device through a control valve, and the vacuum extraction and air intake operations of each working position can be independently controlled through the vacuum extraction device and the control valve; the vacuum gauge tube 3 is used to monitor the air pressure in the corresponding working position in the outer box body 1 in real time to confirm the vacuum state. The upper and lower working positions of the box body 1 are working positions for loading and unloading chips; the middle working position of the box body 1 is a working position for chip detection, and a connecting pipe 6 is connected to the side wall of the middle working position, and the connecting pipe 6 is connected to a leak detector.

[0028] The inner box body 4 is slidably installed up and down in the outer box body 1. The inside of the inner box body 4 has upper and lower placement positions for placing chips, and the upper and lower placement positions are separated by a partition 41. The driving member 5 drives the inner box body 4 to move up and down in the outer box body 1, controls the inner box body 4 to switch between high and low positions, so that the upper and lower placement positions of the inner box body 4 are in one-to-one correspondence and communication with the upper and middle working positions of the outer box body 1, or so that the upper and lower placement positions of the inner box body 4 are in one-to-one correspondence and communication with the middle and lower working positions of the outer box body 1. In this way, when one placement position in the inner box body 4 is being detected, the other placement position is used for loading and unloading chips, thereby improving the detection operation efficiency.

[0029] Embodiment 2: On the basis of the above Embodiment 1, combined Figures 3 to 6As shown in the figure, the inner box body 4 includes a partition plate 41. The upper box 42 and the lower box 43 are respectively welded to the upper and lower sides of the partition plate 41. The inside of the upper box 42 is the upper placement position, and the inside of the lower box 43 is the lower placement position. Door openings are provided on the front sides of the upper and lower placement positions of the inner box body 4 for loading and unloading chips. The edge of the partition plate 41 extends beyond the upper box 42 and the lower box 43 and is opposite to the upper positioning table 111 and the lower positioning table 121 up and down. When the inner box body 4 is reversed up and down, the partition plate 41 abuts against the upper positioning table 111 or the lower positioning table 121 to realize the sealed separation between the lower placement position and the upper placement position of the inner box body 4. The edge of the upper side plate of the upper box 42 is opposite to the upper positioning table 111 up and down, and the edge of the lower side plate of the lower box 43 is opposite to the lower positioning table 121 up and down. When the inner box body 4 is reversed up and down, the edges of the upper and lower side plates cooperate with the upper positioning table 111 and the lower positioning table 121 to realize positioning. Through grooves are provided on the peripheral side plates and the upper side plate of the upper box 42, and through grooves are also provided on the peripheral side plates and the upper side plate of the lower box 43. The purpose of providing the through grooves is that when the inner box body 4 is in the high and low positions, the upper and lower placement positions in the inner box body 4 can communicate with the corresponding upper, middle, and lower working positions in the outer box body 1 to realize operations such as vacuum pumping, air intake, and detection.

[0030] Embodiment Three: Based on the above Embodiment Two, combined with Figures 1 to 4 As shown in the figure, the driving member 5 mainly includes a cylinder body 51 and an electric cylinder 52. The lower end of the cylinder body 51 is open and fixed to the upper end of the outer box body 1, and is communicated with the inside of the outer box body 1. The electric cylinder 52 is fixed at the axial center position of the cylinder body 51, and the moving end at the lower end of the electric cylinder 52 is fixedly connected to the upper end of the inner box body 4. By the telescopic movement of the electric cylinder 52, the up and down movement of the inner box body 4 is realized.

[0031] Working Principle: Before starting, the inner box body 4 is in the lower position. Open the lower sealing door 13, install the chip in the lower placement position of the inner box body 4, and then close the lower sealing door 13; the electric cylinder 52 retracts to control the inner box body 4 to reach the upper position. At this time, the partition plate 41 abuts against the lower side of the upper positioning table 111, and the partition plate 41 realizes the sealed separation between the middle and lower working positions and the upper working position in the outer box body 1, as Figure 4 shown in the figure; Start the vacuum pumping device, control the two lower vacuum tubes 2 to work through the control valve, so that the middle working position, the lower working position of the outer box body 1 and the lower placement position of the inner box body 4 reach the vacuum condition; start the leak detector to detect the chip located in the middle working position (the lower placement position of the inner box body 4); While detecting, open the upper sealing door 13, install the chip in the upper placement position of the inner box body 4, and then close the upper sealing door 13; control the upper vacuum tube 2 to work through the control valve, so that the upper working position of the outer box body 1 and the upper placement position of the inner box body 4 reach the vacuum condition to realize the preloading of the chip to be tested; After the chip detection in the lower placement of the inner box body 4 is completed, turn off the leak detector; control the inner box body 4 to move down to the lower position through the electric cylinder 52; at this time, the partition plate 41 abuts against the upper side of the lower positioning table 121, and the partition plate 41 realizes the sealed separation between the middle, upper working positions and the lower working position in the outer box body 1; observe the two vacuum gauges 3 on the upper side, re-determine the internal air pressure, and after meeting the compound conditions, turn on the leak detector to detect the chips located in the middle working position (the upper placement position of the inner box body 4). During the detection, control the intake of the lower evacuation tube 2 through the control valve. After the lower working position is stable, open the lower sealing door 13 and take out the chips in the lower placement position of the inner box body 4; place the new chips to be detected again according to the above steps.

[0032] Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and its equivalent technologies, the present invention also intends to include these changes and modifications.

Claims

1. A chip package leak detection device, comprising a detection box, a vacuum pumping device connected to the detection box, and a leak detector; characterized in that, The detection box includes: An outer box body with upper, middle, and lower working positions inside. An inner box body with upper and lower placement positions for placing chips inside; the upper and lower placement positions are separated by a partition. A driving member fixed at the upper end inside the outer box body; the output end of the driving member is connected to the inner box body and is used to drive the inner box body to slide in the outer box body, so that the upper and lower placement positions of the inner box body are in one-to-one correspondence and communication with the middle and lower working positions of the outer box body, or the upper and lower placement positions of the inner box body are in one-to-one correspondence and communication with the upper and middle working positions of the outer box body. Among them, a vacuum extraction tube and a vacuum gauge tube for detecting the air pressure at the working position inside the outer box body are connected to the side wall of each working position in the outer box body. The vacuum extraction tube is connected to the vacuum extraction device through a control valve; a connecting pipe is connected to the side wall of the middle working position of the outer box body, and the connecting pipe is connected to the leak detector.

2. The chip package leak detection device according to claim 1, characterized in that: The outer box body includes an upper shell and a lower shell that are butt-jointed up and down; the lower end of the upper shell is open, and a circle of upper positioning platforms is fixed on the inner wall of the lower end of the upper shell; the upper end of the lower shell is open, and a circle of lower positioning platforms is fixed on the inner wall of the middle of the lower shell.

3. The chip package leak detection device according to claim 2, wherein: The inside of the upper shell is the upper working position, and the upper and lower parts in the lower shell correspond to the middle working position and the lower working position respectively.

4. The chip package leak detection device according to claim 2, characterized in that: Sealing strips are fixed on both sides of the upper positioning platform and the lower positioning platform.

5. The chip package leak detection device according to claim 2, characterized in that: The inner box body includes the partition and the upper box and the lower box fixed on the upper and lower sides of the partition respectively. The edge of the partition extends beyond the upper box and the lower box and is opposite to the upper positioning platform and the lower positioning platform up and down. The edge of the upper side plate of the upper box is opposite to the upper positioning platform up and down, and through grooves are provided on the peripheral side plate and the upper side plate of the upper box. The edge of the lower side plate of the lower box is opposite to the lower positioning platform up and down, and through grooves are provided on the peripheral side plate and the upper side plate of the lower box.

6. The chip package leak detection device according to claim 5, wherein: The inside of the upper box is the upper placement position, the inside of the lower box is the lower placement position, and support bars are fixed on both inner side walls of the upper box and the lower box.

7. An apparatus for detecting leaks in a chip package according to claim 6, characterized in that: The support bars are arranged in multiple layers.

8. A chip package leak detection device according to claim 1, characterized in that: Door openings are provided on the front sides of the upper and lower working positions of the outer box body and the upper and lower placement positions of the inner box body, and sealing doors are installed at the door openings of the upper and lower working positions of the outer box body.

9. The chip package leak detection device according to claim 8, wherein: Observation windows are provided on the front side of the middle working position of the outer box body and on the sealing door.

10. A chip package leak detection device according to claim 1, characterized in that: The driving member includes a cylinder body fixed at the upper end of the outer box body. The lower end of the cylinder body is communicated with the inside of the outer box body. An electric cylinder is fixed inside the cylinder body, and the moving end of the electric cylinder is fixedly connected to the upper end of the inner box body.

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