Substrate coating spray head

Abstract

The invention provides a substrate coating nozzle, and relates to the technical field of semiconductor processing coating, the substrate coating nozzle comprises an outer shell, the outer shell is internally provided with a cavity, the outer shell is provided with an air outlet part and a glue outlet part, the air outlet part is arranged around the glue outlet part, and the substrate coating nozzle further comprises an ultrasonic vibrator module located in the cavity of the outer shell; the ultrasonic vibrator module is provided with a glue solution channel, and the glue solution channel is in butt joint with the glue outlet part, so that the glue solution can be discharged from the glue outlet part after passing through the ultrasonic vibrator module; compared with the prior art, a substrate does not need to be clamped, the substrate coating spray head only needs to be placed on a workbench, then the substrate coating spray head is moved to the position above the substrate, then a glue solution and gas are input into the spray head, the liquid glue solution is vibrated into a mist state under the action of the ultrasonic vibrator module, namely the mist glue solution is sprayed out from the glue outlet part, and the substrate coating spray head is used for coating the substrate. And the gas exhausted from the gas outlet part can blow away the vaporous glue solution, so that the vaporous glue solution can be sprayed on the surface of the substrate.

Description

Technical Field

[0001] The present invention belongs to the field of coating equipment, and specifically relates to a substrate coating nozzle head. Background Art

[0002] Substrate spin coating is a process of uniformly coating a liquid material on the surface by rotating the substrate. With its high precision and easy operation, it is an irreplaceable coating technology in fields such as semiconductors and optics. Especially in the semiconductor lithography process, it has the characteristics of high film forming uniformity and suitability for precision scenarios.

[0003] However, in the existing substrate spin coating process, the substrate is mostly clamped and positioned, and then the rotation of the substrate is controlled. During the rotation of the substrate, materials are sprayed onto the surface of the substrate through a spraying device. In this way, the material utilization rate is low (more than 90% of the materials are thrown out), and the clamped position of the substrate is covered, making it impossible to achieve full coating. Summary of the Invention

[0004] The purpose of the present invention is to provide a substrate coating nozzle head that can fully coat the surface of the substrate with materials and reduce material waste.

[0005] To achieve the above purpose, the technical solution adopted by the present invention is a substrate coating nozzle head, which includes an outer housing. The interior of the outer housing has a cavity. An air outlet part and a glue outlet part are provided on the outer housing, and the air outlet part is arranged around the glue outlet part; It further includes an ultrasonic oscillator module located in the cavity of the outer housing. A glue channel is provided on the ultrasonic oscillator module, and the glue channel is docked with the glue outlet part so that the glue can be discharged from the glue outlet part after passing through the ultrasonic oscillator module; A partition is also provided in the outer housing. The partition is located above the ultrasonic oscillator module. The area between the partition and the inner wall of the outer housing is a gas channel, and the gas channel can increase the flow rate of the gas and change the gas flow direction, so that the gas is discharged from the air outlet part in a spiral state.

[0006] Further, the partition includes a disc body. An inner cavity hole is provided on the disc body, and the inner cavity hole is docked with the glue channel so that after the glue enters the outer housing, the glue first passes through the inner cavity hole and then enters the glue channel on the ultrasonic oscillator module.

[0007] Further, the partition also includes a convex part. The convex part is provided on the disc body. The convex part is circular, and there is a gap between the circumferential surface of the convex part and the inner wall of the outer housing, so that the gas can increase its flow rate when passing through this gap.

[0008] Furthermore, the separator further includes a turbine part and a cone. The eddy current part is arranged on the circumferential surface of the disc body and is used to change the gas flow direction. The cone is arranged on the bottom surface of the disc body and cooperates with the outer shell to form a second flow guiding part, and the second flow guiding part guides the gas flow direction.

[0009] Furthermore, the eddy current part includes a barrier body and a groove part. The barrier body is arranged on the circumferential surface of the disc body, and the barrier body is in a circular ring shape. The groove part is arranged on the barrier body, and the groove part is an opening that obliquely penetrates the barrier body, enabling the gas to flow through the opening.

[0010] Furthermore, the eddy current part includes a positioning section and a displacement section. The positioning section is fixed on the outer circumferential surface of the disc body, and there are several positioning sections that are arranged in an array around the disc body. The displacement section is located between two adjacent positioning sections, and there is a spacing between the two ends of the displacement section and the positioning section.

[0011] Furthermore, a conduction component is connected to the displacement section. After the displacement section is guided by the conduction component, the distance between the end of the displacement section and the positioning section changes.

[0012] Furthermore, the displacement section includes two cover bodies. Each cover body is fixedly connected to the outer circumferential surface of the disc body. The space between the cover body and the disc body is a displacement channel, and there is an over-flow interval between the two cover bodies. An inner blocking component is arranged in the displacement channel, and the inner end of the inner blocking component is a vertical surface and is located in the over-flow interval, so that the over-flow interval is in a closed state. When the inner blocking component moves towards the positioning section, the over-flow interval is opened.

[0013] Furthermore, an annular cavity is arranged in the disc body. The disc body is connected with a dial. The dial is located in the annular cavity and is connected with the inner blocking component, so that when the dial is driven by the conduction component, the inner blocking component is driven to move.

[0014] Furthermore, the conduction component includes a push rod, a transmission part, and a transmission driving rod. The push rod is arranged on the outer shell, and the push rod can move vertically. The transmission part is located in the annular cavity and is meshed and connected with the dial. The transmission driving rod is arranged on the cone. The upper end of the transmission driving rod is located in the annular cavity and is meshed with the transmission part, so that when the transmission part moves vertically, the dial is driven to rotate through the transmission part.

[0015] Compared with the prior art, the beneficial effects of the present invention are as follows: When spin-coating the substrate, there is no need to clamp the substrate. Just place the substrate on the workbench, then move the substrate coating nozzle above the substrate, and then input glue and gas into the nozzle. Under the action of the ultrasonic oscillator module, the liquid glue is vibrated into a mist state, that is, the mist-like glue is ejected from the glue outlet. The gas discharged from the air outlet can disperse the mist-like glue, so that the mist-like glue can be sprayed on the surface of the substrate. At the same time, after the gas enters the housing body, it will pass through the eddy current part. Affected by the eddy current part and combined with the guidance of the inner wall of the second housing, the air flow finally sprays out from the air outlet in a spiral state. The spirally ejected air flow drives the mist-like glue to be sprayed on the substrate, thus avoiding the situation of wasting more glue being thrown out. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the first embodiment of the present invention; Figure 2 It is a schematic diagram of the overall sectional structure of the first embodiment of the present invention; Figure 3 It is a schematic diagram of the structure of the separator of the first embodiment of the present invention; Figure 4 It is a schematic diagram of the structure of the second housing of the first embodiment of the present invention; Figure 5 It is a schematic diagram of the overall sectional structure of the second embodiment of the present invention; Figure 6 It is a schematic diagram of the structure of the turbine part of the second embodiment of the present invention; Figure 7 It is a schematic diagram of the structure of the inner baffle assembly of the second embodiment of the present invention; Figure 8 It is a schematic diagram of the structure of the disc body of the second embodiment of the present invention; Figure 9 It is a schematic diagram of the structure of the dial of the second embodiment of the present invention; Figure 10 It is a schematic diagram of the connection between the dial and the inner baffle assembly in the second embodiment of the present invention; Figure 11 It is a schematic diagram of the structure of the transmission part of the second embodiment of the present invention; Figure 12 It is a schematic diagram of the overall structure of the third embodiment of the present invention; Figure 13 It is a schematic diagram of the structure of the spraying cover of the third embodiment of the present invention.

[0017] Among them, 1 - intake part, 2 - glue inlet part, 3 - air outlet part, 4 - glue outlet part, 5 - partition member, 501 - inner cavity passage, 502 - disc body, 5021 - annular cavity, 5022 - flat opening, 503 - convex part, 504 - barrier body, 505 - groove part, 506 - conical body, 6 - ultrasonic oscillator module, 601 - glue liquid channel, 701 - first housing, 702 - second housing, 7021 - conical cavity housing, 7022 - straight cavity housing, 703 - upper chamber, 704 - lower chamber, 801 - speed-up part, 802 - conical channel, 901 - positioning rod, 902 - positioning collar, 1011 - bottom housing, 1101 - positioning section, 11021 - cover body, 11022 - inner blocking assembly, 11023 - flow-through interval, 11024 - displacement channel, 110221 - outer end stop, 110222 - inner end stop, 110223 - pull rod, 110224 - arc-shaped channel, 110225 - compression return spring 1201 - dial, 12011 - annular disc, 12012 - extension rod, 1203 - expansion port, 1204 - transmission member, 12041 - gear disc, 12042 - cylindrical gear, 1301 - ejector rod, 1302 - transmission rod, 1303 - return spring member, 16 - inner extension plate, 17 - spraying cover, 18 - partition plate Specific embodiments

[0018] In order to make the objectives, technical solutions and advantages of the embodiments of the present invention clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art without creative efforts based on the embodiments of the present invention belong to the scope of protection of the present invention

[0019] In the description of the present invention, it should be noted that, unless otherwise clearly defined and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected, or indirectly connected through an intermediate medium, and it may be the internal communication of two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances

[0020] Refer to Figures 1 to 2As shown in the figure, a substrate coating nozzle includes a housing body. The interior of the housing body has a cavity. An air inlet part 1, a glue inlet part 2, an air outlet part 3, and a glue outlet part 4 are provided on the housing body. The air inlet part 1 and the glue inlet part 2 are both located at the top of the housing body. Gas is introduced into the interior of the housing body through the air inlet part 1, preferably nitrogen, because nitrogen has stable performance, but it can also be other gases. The air outlet part 3 and the glue outlet part 4 are both located at the bottom of the housing body. The gas entering the housing body from the air inlet part 1 is discharged through the air outlet part 3, and the glue liquid enters the housing through the glue inlet part 2 and is discharged through the glue outlet part 4. The glue outlet part 4 is a hole-like structure. The glue inlet part 2, the glue outlet part 4, and the air outlet part 3 are coaxially arranged with the housing body. The air outlet part 3 is an annular structure and is arranged around the glue outlet part 4. A partition member 5 and an ultrasonic oscillator module 6 are provided in the cavity of the housing body. The gas entering from the air inlet part 1 first passes through the partition member 5, then passes through the ultrasonic oscillator module 6, and finally is discharged through the air outlet part 3. The flow rate of the gas is increased after passing through the partition member 5, and the colloid is vibrated into a mist state after passing through the ultrasonic oscillator module 6, so that the mist-like glue liquid is sprayed out spirally, thereby improving the spraying effect.

[0021] The housing body is composed of a first housing body 701 and a second housing body 702. The first housing body 701 and the second housing body 702 are detachably connected and are arranged vertically. The first housing body 701 has a lower end opening, and the second housing body 702 has an upper end opening. The upper end opening of the second housing body 702 is docked with the lower end opening of the first housing body 701. When the spaces covered by the first housing body 701 and the second housing body 702 are the upper half cavity and the lower half cavity respectively, the upper end of the partition member 5 is located in the upper half cavity. An axially penetrating inner cavity channel 501 is provided on the partition member 5. The lower end of the partition member 5 is located in the lower half cavity. The air inlet part 1 and the glue inlet part 2 are provided on the first housing body 701, and the air outlet part 3 and the glue outlet part 4 are provided at the lower end of the second housing body 702. A glue liquid channel 601 is provided on the ultrasonic oscillator module 6. The lower end of the glue liquid channel 601 is docked with the glue outlet part 4 on the second housing body 702. The partition member 5 is disk-shaped and specifically includes a disk body 502. An upper channel extending axially is provided on the disk body 502. At this time, the upper channel can be the inner cavity channel 501. The upper end of the upper channel is docked with the glue inlet part 2 on the first housing body 701. The upper channel axially penetrates the disk body 502, and the lower end of the upper channel is docked with the glue liquid channel 601 provided on the ultrasonic oscillator module 6. So that after the glue liquid enters from the glue inlet part 2, it first passes through the upper channel on the disk body 502, and then passes through the glue liquid channel 601 on the ultrasonic oscillator module 6. In this way, an independent flow channel is formed inside the housing body, and this flow channel is used for the circulation of the glue liquid, thereby preventing the gas entering the housing body from affecting the circulation of the glue liquid.

[0022] Refer to Figure 2 and Figure 3As shown, a gas passage for gas flow is also provided inside the outer casing. The gas passage is used to increase the speed of the gas when it is discharged from the air outlet portion 3. The gas passage is composed of two parts, including an acceleration portion 801 and a diversion portion. The acceleration portion 801 is formed by the cooperation of the convex portion 503 and the first housing 701. The convex portion 503 is provided on the upper half of the disc body 502. The convex portion 503 is circular ring-shaped. There is a gap between the circumferential surface of the convex portion 503 and the inner wall of the first housing 701, so that the gas can increase its flow rate when passing through the gap between the convex portion 503 and the first housing 701. The diversion portion includes a first diversion portion and a second diversion portion. The first diversion portion is formed by the cooperation of the turbine portion and the second housing 702. The turbine portion includes a circular ring-shaped barrier body 504. The outer circumferential surface of the barrier body 504 abuts against the inner wall of the second housing 702. A groove portion 505 is provided on the barrier body 504. The groove portion 505 is an opening that penetrates the barrier body 504. At this time, the groove portion 505 is inclined. After the gas entering from the air inlet portion 1 into the first housing 701 passes through the gap between the convex portion 503 and the inner wall of the first housing 701, the gas will pass through the groove portion 505. At this time, the gas flow direction is changed, and then it enters the space inside the second housing 702. The separator 5 further includes a conical body 506. The conical body 506 is docked at the lower end of the disc body 502. A central hole is provided on the conical body 506. At this time, after the central hole communicates with the upper channel on the disc body 502, an inner cavity hole 501 is also formed. The conical surface of the conical body 506 and the inner wall of the second housing 702 form a conical channel 802. The conical channel 802 is the second diversion portion. After the gas enters from the air inlet portion 1 and passes through the first diversion portion, the gas flow direction is changed at this time. Then after the gas passes through the second diversion portion, the second diversion portion guides the gas flow, so that the gas is discharged from the air outlet portion 3 in a spiral form.

[0023] Refer to Figure 2 and Figure 4 As shown, the above-mentioned second housing 702 includes a conical cavity housing 7021 and a straight cavity housing 7022. The straight cavity housing 7022 is docked at the upper end of the conical cavity housing 7021. The outer circumferential surface of the turbine portion abuts against the inner wall of the straight cavity housing 7022. The space inside the conical cavity housing 7021 is a secondary chamber, specifically including an upper chamber 703 and a lower chamber 704. The volume of the upper chamber 703 is larger than that of the lower chamber 704. The inner walls of the conical cavity housing 7021 corresponding to the upper chamber 703 and the lower chamber 704 are both conical walls. A positioning member is provided in the lower chamber 704. When the ultrasonic oscillator module 6 is installed inside the second housing 702, the positioning member positions the ultrasonic oscillator module 6. Specifically, the positioning components include a number of positioning rods 901. The positioning rods 901 are arranged in an array around the central axis of the second housing 702. The outer ends of the positioning rods 901 are fixed to the inner wall of the second housing 702. A positioning collar 902 is connected to the inner ends of the positioning rods 901. The positioning collar 902 is sleeved on the ultrasonic oscillator module 6. The inner ends of the positioning rods 901 are fixedly connected to the positioning collar 902, enhancing the stability of the ultrasonic oscillator module 6.

[0024] In the above embodiment, when docking the separator 5 and the ultrasonic oscillator module 6, the upper end of the ultrasonic oscillator module 6 is docked in the inner cavity hole 501 of the separator 5. The separator 5 forms a gas passage inside the outer housing. The gas passage communicates the air inlet 1 and the air outlet 3. The glue liquid entering the outer housing is vibrated into a misty glue liquid under the action of the ultrasonic oscillator module 6, and then the misty glue liquid is output from the glue outlet 4. The gas discharged from the air outlet 3 can disperse the misty glue liquid, enabling the misty glue liquid to be sprayed out.

[0025] Since the gas passage includes an acceleration part 801 and a diversion part, the acceleration part 801 accelerates the air flow entering the outer housing, and then the gas passes through the diversion part, causing the gas with increased flow velocity to flow out from the air outlet 3 in a spiral form, thereby realizing the circumfluence of the misty glue liquid and making the misty glue liquid spray out in a spiral shape, thus improving the spraying effect.

[0026] A first seal is provided between the first housing and the separator 5, a second seal is provided between the first housing and / or the second housing and the eddy current part, and a third seal is provided at the lower end opening of the inner cavity hole 501 of the separator 5, thereby ensuring the airtightness of the gas passage and ensuring that the gas is discharged in a vortex form.

[0027] This embodiment is mainly used for surface spraying operations on circular parts such as wafers.

[0028] Refer to Figures 5 to 6 As shown, in the second embodiment, in this embodiment, it is used to adjust the form of the gas flow when it is ejected so that it is no longer discharged in a spiral form, that is, the switching between the spiral form and the non-spiral form can be realized. At this time, the substrate coating nozzle further includes a flow splitting component. The flow splitting component is installed at the lower end of the outer housing, and the state of the glue liquid output can be changed by adjusting the flow splitting component.

[0029] Specifically, the flow splitting component includes a bottom housing 1011 connected to the second housing 702. The bottom housing 1011 is screwed to the second housing 702. A conduction component is provided on the second housing 702. During the process of screwing the bottom housing 1011 to the second housing 702, a force is applied to the turbine part through the conduction component. After the turbine part receives the force from the conduction component, the state of the groove part 505 will be changed, causing the groove part 505 to change from an inclined state to a vertical state. When the gas is discharged from the air outlet 3 at the lower end of the outer housing, it will not be discharged in a spiral form.

[0030] In this embodiment, the turbine part includes a positioning section 1101 and a displacement section. Both the positioning section 1101 and the displacement section extend in an arc shape. There are several positioning sections 1101 and displacement sections, and they are both arranged in an array around the central axis of the disc body 502. The positioning section 1101 among them is fixed on the outer circumferential surface of the disc body 502, while the displacement section is movably connected to the outer circumferential surface of the disc body 502. The displacement section is located between two adjacent positioning sections 1101. Both ends of the positioning section 1101 and the displacement section are inclined surfaces. A sealing gasket is provided at the end of the positioning section 1101. At this time, the distance between the positioning section 1101 and the displacement section is the groove part 505, but at this time the groove part 505 is in an inclined opening state. The displacement section includes two cover bodies 11021. The cross-section of the cover body 11021 is in a "U" shape. Each cover body 11021 is fixedly connected to the outer circumferential surface of the disc body 502. At this time, the space between the cover body 11021 and the disc body 502 is the displacement channel 11024. There is an over-flow interval 11023 between the two cover bodies 11021. An inner blocking component 11022 is provided in the displacement channel 11024. At this time, there are two inner blocking components 11022. The outer end of the inner blocking component 11022 is an inclined surface, and its inner end is a vertical surface and is located in the over-flow interval 11023. After the inner blocking component 11022 is controlled, its length changes. Specifically, when the inner blocking component 11022 is not controlled, its inner end is located in the over-flow interval 11023, making the over-flow interval 11023 in a closed state at this time. When the inner blocking component 11022 is controlled, its inner end moves towards the inside of the cover body 11021. At the same time, the outer end of the inner blocking component 11022 also moves, and the moving direction is the same as the moving direction of its inner end. At this time, the inner blocking component moves towards the positioning section. When the outer end of the inner blocking component 11022 abuts against the end of the adjacent positioning section 1101, the inner end of the inner blocking component 11022 continues to move in this direction. At this time, the length of the inner blocking component 11022 becomes shorter, thereby opening the over-flow interval 11023, enabling the gas to flow through the over-flow interval 11023. Since the inner end of the inner blocking component 11022 is a vertical surface, the over-flow interval 11023 extends linearly at this time. In this way, the output form of the air flow is changed, so that the air flow no longer outputs in a spiral form.

[0031] Refer to Figure 7As shown, the inner blocking assembly 11022 therein includes an outer end stopper 110221 and an inner end stopper 110222. The outer end stopper 110221 is connected to the inner end stopper 110222 through an arc-shaped pull rod 110223. An arc-shaped hole 110224 for inserting the pull rod 110223 is provided on the outer end stopper 110221. During the process of the inner end stopper 110222 moving into the displacement channel 11024, the pull rod 110223 enters the arc-shaped hole 110224. At this time, the distance between the outer end stopper 110221 and the inner end stopper 110222 becomes smaller. A compression return spring 110225 is sleeved on the pull rod 110223. After the inner end stopper 110222 moves into the displacement channel 11024, a pushing force is applied to the outer end stopper 110221 through the compression return spring 110225, so that the outer end stopper 110221 is in close contact with the end of the positioning section 1101.

[0032] Refer to Figure 6 、 Figure 8 Figure 9 and Figure 10 As shown, each of the above displacement sections includes two inner blocking assemblies 11022, and the moving directions of the two inner blocking assemblies 11022 are opposite. Therefore, an annular cavity 5021 is provided inside the above-mentioned disc body 502. The annular cavity 5021 surrounds the upper channel. An arc-shaped and extended flat opening 5022 is provided on the outer circumferential surface of the disc body 502. The flat opening 5022 is located in the displacement channel 11024, and the flat opening 5022 communicates with the annular cavity 5021. Two dial plates 1201 are provided in the annular cavity 5021, namely a lower dial plate and an upper dial plate. The two dial plates 1201 are arranged longitudinally, and the rotating directions of the two dial plates 1201 are opposite. The dial plate 1201 is connected to the pull rod 110223. When the dial plate 1201 rotates, the inner end stopper 110222 can be controlled to move into the displacement channel 11024 through the pull rod 110223. Sealing gaskets are provided between the outer end stopper 110221 and the inner end stopper 110222 and the displacement channel 11024 to prevent external air flow from entering the displacement channel 11024. The dial plate 1201 therein includes an annular disc 12011 located in the annular cavity 5021. An extension rod 12012 is fixed on the annular disc 12011. The extension rod 12012 passes through the flat opening 5022 and is connected to the pull rod 110223. The dial plate 1201 is connected to the conduction assembly, and the rotation of the dial plate 1201 can be controlled through the conduction assembly. Refer to Figures 5 to 10As shown in the figure, the conduction component includes a push rod 1301 and a transmission rod 1302. There are at least two groups of conduction components. One group of conduction components is used to control the clockwise rotation of the dial 1201, and the other group of conduction components is used to control the counterclockwise rotation of the dial 1201. Both the push rod 1301 and the transmission rod 1302 can move vertically. The push rod 1301 is located on the extension line of the transmission rod 1302. The push rod 1301 and the transmission rod 1302 are respectively connected to the second housing 702 and the cone 506. Specifically, a perforation is provided on the second housing 702, and a limited short tube is connected to the perforation. The limited short tube extends along the axial direction of the second housing 702. The upper end of the limited short tube is located within the perforation. The push rod 1301 is inserted through the limited short tube. A reset spring member 1303 is sleeved on the push rod 1301. After the push rod 1301 moves upward, the reset spring member 1303 is compressed. After the push rod 1301 loses the upward acting force, it will be reset under the restoring force of the reset spring member 1303; A positioning channel is provided within the cone 506. The positioning channel extends upward from the bottom surface of the cone 506 until the positioning channel communicates with the annular cavity 5021 within the disc body 502. The transmission rod 1302 is located within the positioning channel. After the push rod 1301 moves upward, the upper end of the push rod 1301 will enter from the lower end of the positioning channel. At this time, the push rod 1301 applies an upward thrust to the transmission rod 1302, causing the transmission rod 1302 to move upward. After the upper end of the transmission rod 1302 enters the annular cavity 5021, the transmission rod 1302 cooperates with the dial 1201 to cause the dial 1201 to rotate. Furthermore, the outer extension rod 12012 and the pull rod 110223 drive the inner blocking component 11022 to move, thereby changing the shape of the groove portion 505; The thickness of the dial 1201 is less than the height of the annular cavity 5021. Both dials 1201 are connected with a stabilizing sleeve 1202. The upper end of one stabilizing sleeve 1202 contacts the top surface of the annular cavity 5021, and the lower end of the other stabilizing sleeve 1202 contacts the bottom surface of the annular cavity 5021. At this time, the two stabilizing sleeves 1202 are in an overlapping state. The stabilizing sleeve 1202 can rotate within the annular cavity 5021. There are spaced spaces between the dial 1201 and the top and bottom surfaces of the annular cavity 5021. An arc-shaped expansion opening 1203 is provided on the dial 1201. The expansion opening 1203 extends along the circumferential direction of the dial 1201. A transmission member 1204 is provided within the annular cavity 5021. The transmission member 1204 meshes with the dial 1201. When the transmission member 1204 rotates, it will drive the dial 1201 to rotate.

[0033] Refer to Figure 11As shown, there are two transmission parts 1204. One transmission part 1204 is located below the lower dial, and the other transmission part 1204 is located above the upper dial. The transmission part 1204 includes a gear disk 12041 and a cylindrical gear 12042. The cylindrical gear 12042 is coaxially arranged with the gear disk 12041 and the two are butt-jointed. Tooth grooves 15 are provided on the bottom surface of the lower dial and the top surface of the upper dial. The tooth grooves 15 are located on the side of the expansion port 1203. The gear disk 12041 meshes with the tooth grooves 15. When the gear disk 12041 rotates, the dial 1201 can be rotated; The above-mentioned cylindrical gear 12042 is fixed on the gear disk 12041. The cylindrical gear 12042 is located below the expansion port 1203. The cross-section of the transmission rod 1302 is square. Convex teeth are provided at a position near the top of the transmission rod 1302. The convex teeth are arranged along the length direction of the transmission rod 1302. The convex teeth mesh with the cylindrical gear 12042. After the transmission rod 1302 moves upward, the cylindrical gear 12042 will be controlled to rotate through the convex teeth, and then the gear disk 12041 will rotate. At this time, the upper end of the transmission rod 1302 is inside the expansion port 1203.

[0034] An annular inner extension plate 16 is provided on the inner wall of the bottom housing 1011. The inner extension plate 16 supports the lower end of the ejector rod 1301. After the bottom housing 1011 rotates, it will move axially. When the bottom housing 1011 moves upward, a thrust is applied to the ejector rod 1301 through the inner extension plate 16; Refer to Figure 12 and Figure 13 As shown in the figure, in Embodiment 3, on the basis of the above-mentioned embodiment, a spraying cover 17 can also be butted at the lower end of the bottom housing 1011. This embodiment is used for surface spraying operations on square plates. During the operation, it is necessary to control the square plate to move linearly. The spraying cover 17 is detachably connected to the bottom housing 1011. For example: the two are connected by screws. When the bottom housing 1011 is screwed onto the second housing 702 and the shape of the groove part 505 changes to a direct current state, the inlet port of the spraying cover 17 is butted against the bottom end of the outer housing. At this time, the inlet port of the spraying cover 17 covers the air outlet part 3 and the glue outlet part 4 at the bottom of the outer housing. A partition plate 18 is provided inside the spraying cover 17. The partition plate 18 divides the inside of the spraying cover 17 into at least two spaces, and the volumes of the two spaces are not equal. Similarly, the areas of the inlets of the two spaces are not equal. At this time, the partition plate 18 also divides the air outlet part 3 and the glue outlet part 4 on the outer housing. The air flow and the atomized glue liquid can flow into different spaces and then be discharged from the bottom end of the spraying cover 17. At this time, when the square plate passes below the spraying cover 17, different thickness coatings can be formed on the square plate.

[0035] The device embodiments described above are merely illustrative. The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed to multiple network units. Some or all of the modules can be selected according to actual needs to achieve the purpose of the solution of this embodiment. Those of ordinary skill in the art can understand and implement it without creative efforts.

[0036] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit them. Although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments or equivalently replace some of the technical features. These modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A substrate coating nozzle, characterized in that, Comprising: An outer housing having a cavity inside. An air outlet part (3) and a glue outlet part (4) are provided on the outer housing, and the air outlet part (3) is arranged around the glue outlet part (4); An ultrasonic oscillator module (6) located inside the cavity of the outer housing. A glue channel (601) is provided on the ultrasonic oscillator module (6), and the glue channel (601) is docked with the glue outlet part (4) so that the glue can be discharged from the glue outlet part (4) after passing through the ultrasonic oscillator module (6); A separator (5) located above the ultrasonic oscillator module (6). The area between the separator (5) and the inner wall of the outer housing is a gas channel, and the gas channel can increase the flow rate of the gas and change the gas flow direction so that the gas is discharged from the air outlet part (3) in a spiral state.

2. The substrate coating nozzle according to claim 1, wherein The separator (5) includes: A disc body (502) having an inner cavity hole (501) provided thereon. The inner cavity hole (501) is docked with the glue channel (601). After the glue enters the outer housing, the glue first passes through the inner cavity hole (501) and then enters the glue channel (601).

3. The substrate coating nozzle according to claim 2, characterized in that, The separator (5) further includes: A convex part (503) provided on the disc body (502). The convex part (503) is annular, and there is a gap between the circumferential surface of the convex part (503) and the inner wall of the outer housing so that the gas can increase its flow rate when passing through this gap.

4. The substrate coating nozzle according to claim 2 or 3, characterized in that, The separator (5) further includes: A turbine part provided on the circumferential surface of the disc body (502) for changing the gas flow direction; A cone body (506) provided on the bottom surface of the disc body (502), which cooperates with the outer housing to form a second flow guiding part for guiding the gas flow direction.

5. The substrate coating spray head according to claim 4, wherein, The eddy current part includes: A barrier body (504) provided on the circumferential surface of the disc body (502). The barrier body (504) is annular; A groove part (505) provided on the barrier body (504). The groove part (505) is an opening that obliquely penetrates the barrier body (504) so that the gas can flow through the opening.

6. The substrate coating nozzle according to claim 4, wherein, The eddy current part includes: A positioning section (1101) fixed on the outer circumferential surface of the disc body (502). There are several positioning sections (1101) and they are arranged in an array around the disc body (502); A displacement section located between two adjacent positioning sections (1101). There is a distance between both ends of the displacement section and the positioning section (1101).

7. The substrate coating nozzle according to claim 6, wherein The displacement section is connected with a conduction component. After being guided by the conduction component, the distance between the end of the displacement section and the positioning section (1101) changes.

8. The substrate coating nozzle according to claim 7, characterized in that, The displacement section includes: Two cover bodies (11021). Each cover body (11021) is fixedly connected to the outer circumferential surface of the disc body (502). The space between the cover body (11021) and the disc body (502) is a displacement channel (11024), and there is a flow-through interval (11023) between the two cover bodies (11021); The inner blocking component (11022) is located within the displacement channel (11024). The inner end of the inner blocking component (11022) is a vertical plane and is located within the flow-through interval (11023), rendering the flow-through interval (11023) in a closed state. When the inner blocking component (11022) moves towards the positioning section, the flow-through interval (11023) is opened up.

9. The substrate coating nozzle according to claim 8, characterized in that, An annular cavity (5021) is provided within the disc body (502). The disc body (502) is connected to a dial (1201). The dial (1201) is located within the annular cavity (5021) and is connected to the inner blocking component (11022), such that when the dial (1201) is driven by the conduction component, it drives the inner blocking component (11022) to move.

10. The substrate coating nozzle according to claim 9, characterized in that, The conduction component includes: A push rod (1301) is provided on the outer casing, and the push rod (1301) can move vertically; A transmission member (1204) is located within the annular cavity (5021) and is meshed and connected to the dial (1201); A transmission drive rod (1302) is provided on the cone body (506). The upper end of the transmission drive rod (1302) is located within the annular cavity (5021) and is meshed with the transmission member (1204), such that when the transmission member (1204) moves vertically, it drives the dial (1201) to rotate through the transmission member (1204).

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