In-hole polishing method and tool for chemical vapor deposition silicon carbide spray header

Abstract

The invention relates to the technical field of precision machining, and discloses a chemical vapor deposition silicon carbide spray header in-hole polishing method and tool, the chemical vapor deposition silicon carbide spray header in-hole polishing tool comprises a working box, the upper surface of the working box is fixedly connected with a material conveying pipe, the outer wall of the material conveying pipe is fixedly connected with a motor, and the interior of the material conveying pipe is fixedly connected with a guide plate; and a connecting column is fixedly arranged at the output end of the motor, the outer wall of the connecting column is rotationally connected to the interior of the conveying pipe, auger blades are fixedly connected to the outer wall of the connecting column, a transmission assembly is arranged on the outer wall of the connecting column, and fan blades are fixedly connected to the outer wall of the transmission assembly. The motor drives the auger blade to convey polishing powder, the bevel gear is used for being linked with the fan blade to rotate at a high speed to scatter the powder, the polishing powder is evenly distributed in the sealing box, the air pump is matched with the electronic valve to control powder spraying, it is ensured that the polishing powder covers the inner wall of a spraying head hole in a stable and even atomization state, and then the problem that traditional powder scattering is uneven in distribution is effectively solved.

Description

Technical Field

[0001] The present invention relates to the technical field of precision machining, and specifically to a method and tooling for internal hole polishing of a chemical vapor deposition silicon carbide showerhead. Background Art

[0002] In high-end manufacturing fields such as semiconductors, photovoltaics, and LEDs, chemical vapor deposition silicon carbide showerheads are core process components. The machining quality of their internal micropores directly affects the uniform distribution of gases or reactants, and thus determines the uniformity of thin film deposition and device performance. However, due to the high hardness and brittleness of silicon carbide materials, traditional machining methods are prone to defects such as microcracks and chipping on the inner wall of the holes, and it is difficult to meet the machining requirements of high precision and complex hole shapes.

[0003] The prior art uses manual or simple mechanical powder feeding, which is prone to agglomeration and uneven distribution of polishing powder, affecting the polishing effect of the inner wall of the holes. In particular, it is difficult to achieve uniform coverage of deep aspect ratio micropores, resulting in polishing dead corners. Most of the toolings lack an integrated powder conveying and dispersing system and rely on manual intervention, which not only has low efficiency but also poor consistency and is difficult to meet the requirements of mass production. Summary of the Invention

[0004] In view of the deficiencies of the prior art, the present invention provides a method and tooling for internal hole polishing of a chemical vapor deposition silicon carbide showerhead, which solves the problems of uneven distribution of polishing powder and low machining efficiency existing in the prior art.

[0005] To achieve the above objectives, the present invention is realized through the following technical solutions:

[0006] A tooling for internal hole polishing of a chemical vapor deposition silicon carbide showerhead includes a working box. The upper surface of the working box is fixedly connected with a feeding pipe. The outer wall of the feeding pipe is fixedly connected with a motor. The inside of the feeding pipe is fixedly connected with a guiding plate. The output end of the motor is fixedly provided with a connecting column. The outer wall of the connecting column is rotatably connected inside the feeding pipe. The outer wall of the connecting column is fixedly connected with a screw blade. A transmission component is arranged on the outer wall of the connecting column. The outer wall of the transmission component is fixedly connected with a fan blade. The upper surface of the feeding pipe is fixedly connected with a material box. The lower surface of the feeding pipe is fixedly connected with a sealing box. A baffle is fixedly connected inside the sealing box. An air pump is fixedly connected inside the baffle. The output end of the air pump is fixedly connected with an electronic valve. The outer wall of the electronic valve is fixedly connected with a spray head. The outer wall of the spray head is fixedly connected to the inner wall of the sealing box.

[0007] By adopting the above technical solution: the auger blade is driven by a motor to convey polishing powder, and the bevel gear is used to drive the fan blade to rotate at a high speed to disperse the powder, so that the polishing powder is evenly distributed in the sealed box. The air pump cooperates with the electronic valve to control the powder spraying, ensuring that the polishing powder covers the inner wall of the spray head holes in a stable and uniform atomized state, thereby effectively solving the problem of uneven distribution of traditional powder sprinkling, significantly improving the polishing efficiency, and reducing the waste of polishing powder at the same time.

[0008] Preferably, the transmission component includes a first bevel gear, the outer wall of the first bevel gear is fixedly connected to the outer wall of the connecting column, the tooth end of the first bevel gear is meshed with a second bevel gear, the outer wall of the second bevel gear is rotatably connected to the inside of the feeding pipe, and the outer wall of the second bevel gear is fixedly connected to the outer wall of the fan blade.

[0009] Preferably, a support frame is arranged inside the working box, an upper die is fixedly connected to the upper surface of the support frame, and a lower die is arranged on the outer wall of the upper die.

[0010] Preferably, a connecting cylinder is fixedly connected to the inside of the upper die, and a handle is slidably connected to the inner wall of the connecting cylinder.

[0011] Preferably, a clamping rod is fixedly connected to the outer wall of the handle, a first spring is slidably connected to the outer wall of the clamping rod, one end of the first spring is fixed to the handle, and the other end abuts against the inner wall of the connecting cylinder.

[0012] Preferably, the outer wall of the clamping rod is slidably connected to the inside of the upper die and the connecting cylinder, a clamping cylinder is slidably connected to the outer wall of the clamping rod, and the outer wall of the clamping cylinder is fixedly connected to the inside of the lower die.

[0013] Preferably, a spray head body is arranged between the lower die and the upper die, a telescopic rod is fixedly connected to the inside of the lower die, and a limiting block is fixedly connected to the outer wall of the telescopic rod.

[0014] Preferably, the outer wall of the limiting block is slidably connected to the inside of the lower die, and the outer wall of the limiting block is attached to the outer wall of the spray head body.

[0015] Preferably, a second spring is slidably connected to the outer wall of the telescopic rod, and the outer wall of the second spring is fixedly connected to the outer wall of the limiting block.

[0016] Preferably, a method for polishing the inner holes of a chemical vapor deposition silicon carbide spray head is used for the inner hole polishing tooling of a chemical vapor deposition silicon carbide spray head, and the method includes the following steps:

[0017] S1. First, place the spray head body in the lower die, and under the resilience of the second spring, the lower die can be stably clamped in the lower die;

[0018] S2. Place the upper mold on the lower mold, then press and rotate the handle to make the spray head body be clamped between the lower mold and the upper mold;

[0019] S3. Start the motor. The motor drives the auger blade to rotate, and then the polishing powder in the material box can be conveyed to the sealed box. Under the rotation of the fan blade, the polishing powder can be dispersed;

[0020] S4. The dispersed polishing powder is conveyed to the solenoid valve by the air pump and sprayed out through the nozzle under the control of the solenoid valve, and then the holes of the spray head body can be polished.

[0021] Working principle: First, place the spray head body to be polished in the lower mold. When the spray head body slides in the lower mold, it will squeeze the limit block to make it slide in the lower mold, and then it will squeeze the telescopic rod and the second spring. Under the rebound of the second spring, the spray head body can be stably clamped in the lower mold;

[0022] Then place the upper mold on the lower mold, press and rotate the handle. When the handle slides in the connecting cylinder, it will drive the clamping rod to slide, and then it will squeeze the first spring to make it contract. After the clamping rod is clamped into the clamping cylinder, under the rebound of the first spring, the upper mold and the lower mold can be connected together, so that the spray head body is clamped between the lower mold and the upper mold;

[0023] Start the motor. The motor drives the auger blade to rotate through the connecting column, and then the polishing powder in the material box can be conveyed in the conveying pipe. Under the guidance of the guiding plate, the polishing powder can be conveyed to the sealed box. The connecting column drives the first bevel gear to rotate, and the first bevel gear drives the fan blade to rotate through the second bevel gear. Under the rotation of the fan blade, the polishing powder can be dispersed to make it evenly distributed in the sealed box;

[0024] The dispersed polishing powder is conveyed to the solenoid valve by the air pump and sprayed out through the nozzle under the control of the solenoid valve, and then the holes of the spray head body can be polished;

[0025] This tooling not only achieves the effect of clamping and limiting the spray head body, which can ensure that the spray head body remains stable during the processing and will not move or shake, thus helping to improve the processing accuracy, but also achieves the effect of quickly docking the upper mold and the lower mold to make the spray head body be clamped between the lower mold and the upper mold, which makes the installation and disassembly of the spray head body more convenient. The operator does not need to spend a lot of time on complex mold installation and adjustment, and only needs to complete the mold docking through simple operations, greatly simplifying the operation process. At the same time, it also achieves the effect of dispersing the polishing powder while conveying the polishing powder, which can make the polishing powder more evenly distributed on the surface of the spray head body, increase the contact area between the polishing powder and the workpiece surface, and the dispersed polishing powder can play a more sufficient role, reducing the waste of polishing powder.

[0026] The present invention provides a method and tooling for polishing the holes of a chemical vapor deposition silicon carbide showerhead. It has the following beneficial effects:

[0027] 1. In the present invention, a motor drives a screw blade to convey polishing powder, and a bevel gear is used to link and drive a fan blade to rotate at high speed to disperse the powder, so that the polishing powder is evenly distributed in the sealed box. An air pump cooperates with an electronic valve to control the powder spraying, ensuring that the polishing powder covers the inner wall of the showerhead hole in a stable and uniform atomized state. Thus, the problem of uneven distribution in traditional powder scattering is effectively solved, the polishing efficiency is significantly improved, and the waste of polishing powder is reduced at the same time.

[0028] 2. After placing the showerhead body on the lower mold in the present invention, through the elastic cooperation of the limit block and the second spring, it automatically adapts to different dimensional tolerances to achieve flexible clamping. The telescopic rod guiding structure ensures the precise movement of the limit block, avoiding stress concentration caused by rigid clamping, so that the showerhead is always stably fixed during the polishing process, effectively suppressing vibration and offset, improving the processing accuracy, and reducing the breakage rate of silicon carbide workpieces.

[0029] 3. In the present invention, the upper mold and the lower mold adopt a pressing and rotating type snap mechanism. The handle drives the clamping rod to engage with the clamping cylinder, and rapid locking is achieved under the resilience of the first spring. Thus, the operator can quickly complete mold closing or mold opening without tools, greatly improving the efficiency compared with the traditional bolt fastening method. At the same time, the modular design also supports the rapid changeover of different specifications of showerheads, adapting to the production requirements of multiple varieties. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 is a perspective view of a tooling for polishing the holes of a chemical vapor deposition silicon carbide showerhead according to the present invention;

[0031] Figure 2 is a schematic diagram of a support frame of a tooling for polishing the holes of a chemical vapor deposition silicon carbide showerhead according to the present invention;

[0032] Figure 3 is a schematic diagram of a screw blade of a tooling for polishing the holes of a chemical vapor deposition silicon carbide showerhead according to the present invention;

[0033] Figure 4 is a schematic diagram of a connecting cylinder of a tooling for polishing the holes of a chemical vapor deposition silicon carbide showerhead according to the present invention;

[0034] Figure 5 is a schematic diagram of a limit block of a tooling for polishing the holes of a chemical vapor deposition silicon carbide showerhead according to the present invention;

[0035] Figure 6 is a schematic diagram of an upper mold of a tooling for polishing the holes of a chemical vapor deposition silicon carbide showerhead according to the present invention;

[0036] Figure 7Schematic diagram of the second spring of a chemical vapor deposition silicon carbide shower head hole internal polishing tooling according to the present invention;

[0037] Figure 8 Process flow chart of a method for internal hole polishing of a chemical vapor deposition silicon carbide shower head according to the present invention.

[0038] Wherein, 1, working box; 2, feeding pipe; 3, motor; 4, connecting column; 5, auger blade; 6, first bevel gear; 7, second bevel gear; 8, fan blade; 9, baffle; 10, air pump; 11, solenoid valve; 12, spray head; 13, guiding plate; 14, material box; 15, sealing box; 16, support frame; 17, lower mold; 18, upper mold; 19, connecting cylinder; 20, handle; 21, clamping rod; 22, first spring; 23, clamping cylinder; 24, shower head body; 25, telescopic rod; 26, limiting block; 27, second spring. Specific embodiments

[0039] The technical solutions of the present invention will be clearly and completely described below in conjunction with the drawings of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0040] Please refer to the attached Figure 1 - attached Figure 3 As shown in the figure, the embodiment of the present invention provides a chemical vapor deposition silicon carbide shower head hole internal polishing tooling, including a working box 1. The upper surface of the working box 1 is fixedly connected with a feeding pipe 2. The outer wall of the feeding pipe 2 is fixedly connected with a motor 3. The inside of the feeding pipe 2 is fixedly connected with a guiding plate 13. The output end of the motor 3 is fixedly provided with a connecting column 4. The outer wall of the connecting column 4 is rotatably connected inside the feeding pipe 2. The outer wall of the connecting column 4 is fixedly connected with an auger blade 5. A transmission assembly is arranged on the outer wall of the connecting column 4. The outer wall of the transmission assembly is fixedly connected with a fan blade 8. The upper surface of the feeding pipe 2 is fixedly connected with a material box 14. The lower surface of the feeding pipe 2 is fixedly connected with a sealing box 15. The inside of the sealing box 15 is fixedly connected with a baffle 9. The inside of the baffle 9 is fixedly connected with an air pump 10. The output end of the air pump 10 is fixedly connected with a solenoid valve 11. The outer wall of the solenoid valve 11 is fixedly connected with a spray head 12. The outer wall of the spray head 12 is fixedly connected to the inner wall of the sealing box 15.

[0041] Specifically, the motor 3 drives the auger blade 5 to rotate through the connecting column 4, thereby conveying the polishing powder in the material box 14 in the conveying pipe 2. The conveying pipe 2 supports and limits the connecting column 4. Under the guiding action of the guiding plate 13, it further conveys the polishing powder into the sealing box 15. The connecting column 4 drives the first bevel gear 6 to rotate. The first bevel gear 6 drives the fan blade 8 to rotate through the second bevel gear 7. Under the rotation of the fan blade 8, the polishing powder is dispersed, and then evenly distributed in the sealing box 15. The air pump 10 conveys the dispersed polishing powder to the solenoid valve 11, and under the control of the solenoid valve 11, it is sprayed out through the nozzle 12, thereby polishing the holes of the spray head body 24. The guiding plate 13 can reduce the falling speed of the powder and prevent dust. The sealing box 15 stores the dispersed polishing powder temporarily and connects the pneumatic powder conveying system. The solenoid valve 11 controls the spraying sequence and flow rate, and the nozzle 12 directs the pneumatic powder mixture into the holes of the spray head body 24.

[0042] Please refer to the attached Figure 2 and the attached Figure 3 As shown in the figure, the transmission component includes a first bevel gear 6. The outer wall of the first bevel gear 6 is fixedly connected to the outer wall of the connecting column 4. The tooth end of the first bevel gear 6 is meshed with a second bevel gear 7. The outer wall of the second bevel gear 7 is rotatably connected to the inside of the conveying pipe 2. The outer wall of the second bevel gear 7 is fixedly connected to the outer wall of the fan blade 8.

[0043] Specifically, the connecting column 4 serves as a power transmission shaft to synchronously drive the auger blade 5 and the first bevel gear 6 to rotate. The fan blade 8 disperses the polishing powder agglomerates and can atomize the powder when rotating at high speed. The conveying pipe 2 supports and limits the second bevel gear 7.

[0044] Please refer to the attached Figure 2 、the attached Figure 4 and the attached Figure 5 As shown in the figure, a support frame 16 is arranged inside the working box 1. The upper surface of the support frame 16 is fixedly connected with a lower mold 17. The outer wall of the lower mold 17 is provided with an upper mold 18. A connecting cylinder 19 is fixedly connected inside the upper mold 18. A handle 20 is slidably connected to the inner wall of the connecting cylinder 19. A clamping rod 21 is fixedly connected to the outer wall of the handle 20. A first spring 22 is slidably connected to the outer wall of the clamping rod 21. One end of the first spring 22 is fixed to the handle 20, and the other end abuts against the inner wall of the connecting cylinder 19. The outer wall of the clamping rod 21 slides inside the upper mold 18 and the connecting cylinder 19. The outer wall of the clamping rod 21 is slidably connected to a clamping cylinder 23. The outer wall of the clamping cylinder 23 is fixedly connected inside the lower mold 17.

[0045] Specifically, after covering the upper mold 18 on the lower mold 17, press and rotate the handle 20. The handle 20 slides in the connecting cylinder 19 and drives the sliding of the clamping rod 21 at the same time, thereby squeezing the first spring 22 to make it contract. When the clamping rod 21 is clamped into the clamping cylinder 23, under the rebounding action of the first spring 22, the upper mold 18 and the lower mold 17 can be connected together, so that the spray head body 24 is clamped between the lower mold 17 and the upper mold 18. The support frame 16 plays a role in supporting and fixing the lower mold 17 to ensure the stability of the lower mold 17. The lower mold 17 serves as the bottom positioning base of the spray head body 24, and the cavity matches the outer contour of the spray head body 24 to prevent displacement. The upper mold 18 plays a role in covering the top of the spray head body 24 and jointly clamps the spray head body 24 with the lower mold 17. The connecting cylinder 19 plays a role in guiding the linear movement of the handle 20. The handle 20 plays a role in controlling the axial movement and rotation of the clamping rod 21. The clamping rod 21 cooperates with the clamping cylinder 23 to achieve mechanical locking. The first spring 22 plays a role in providing the rebounding force of the clamping rod 21 to maintain the locked state. The first spring 22 is made of stainless steel to prevent corrosion and avoid failure caused by powder intrusion.

[0046] Please refer to the attached Figure 4 - attached Figure 7 There is a spray head body 24 arranged between the lower mold 17 and the upper mold 18. A telescopic rod 25 is fixedly connected inside the lower mold 17, and a limiting block 26 is fixedly connected to the outer wall of the telescopic rod 25; the outer wall of the limiting block 26 slides inside the lower mold 17, and the outer wall of the limiting block 26 is in contact with the outer wall of the spray head body 24; a second spring 27 slides on the outer wall of the telescopic rod 25, and the outer wall of the second spring 27 is fixedly connected to the outer wall of the limiting block 26.

[0047] Specifically, place the spray head body 24 to be polished in the lower mold 17. When the spray head body 24 slides in the lower mold 17, it squeezes the limiting block 26 to make it slide in the lower mold 17, thereby squeezing the telescopic rod 25 and the second spring 27. Under the rebounding action of the second spring 27, the spray head body 24 is stably clamped in the lower mold 17. The telescopic rod 25 serves as a rigid guiding shaft for the limiting block 26 to control its linear movement trajectory. The limiting block 26 directly contacts the outer wall of the spray head body 24 to provide an adaptive clamping force. The V-shaped contact surface of the limiting block 26 can match the cylindrical outer wall of the spray head body 24 to increase the contact area and prevent scratching. The second spring 27 plays a role in providing an elastic pre-tightening force to make the limiting block 26 always fit the spray head body 24.

[0048] Please refer to the attached Figure 1 - attached Figure 8, a method for polishing the holes of a chemical vapor deposition silicon carbide shower head, which is used for the above-mentioned tooling for polishing the holes of a chemical vapor deposition silicon carbide shower head. The method comprises the following steps:

[0049] S1. First, place the shower head body 24 in the lower die 17. Under the resilience of the second spring 27, the lower die 17 can be stably clamped in the lower die 17.

[0050] S2. Cover the upper die 18 on the lower die 17, and then press and rotate the handle 20 to clamp the shower head body 24 between the lower die 17 and the upper die 18.

[0051] S3. Start the motor 3. Drive the auger blade 5 to rotate through the motor 3, so as to convey the polishing powder in the material box 14 to the sealed box 15, and the polishing powder can be dispersed under the rotation of the fan blade 8.

[0052] S4. Convey the dispersed polishing powder to the solenoid valve 11 through the air pump 10, and spray it out through the nozzle 12 under the control of the solenoid valve 11, so as to polish the holes of the shower head body 24.

[0053] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A chemical vapor deposition silicon carbide showerhead hole internal polishing tooling, comprising a working box (1), characterized in that: The upper surface of the working box (1) is fixedly connected with a feeding pipe (2). The outer wall of the feeding pipe (2) is fixedly connected with a motor (3). The inner part of the feeding pipe (2) is fixedly connected with a guiding plate (13). The output end of the motor (3) is fixedly provided with a connecting column (4). The outer wall of the connecting column (4) is rotationally connected inside the feeding pipe (2). The outer wall of the connecting column (4) is fixedly connected with a screw blade (5). A transmission component is arranged on the outer wall of the connecting column (4). The outer wall of the transmission component is fixedly connected with a fan blade (8). The upper surface of the feeding pipe (2) is fixedly connected with a material box (14). The lower surface of the feeding pipe (2) is fixedly connected with a sealed box (15). A baffle (9) is fixedly connected inside the sealed box (15). An air pump (10) is fixedly connected inside the baffle (9). The output end of the air pump (10) is fixedly connected with an electronic valve (11). The outer wall of the electronic valve (11) is fixedly connected with a spray head (12). The outer wall of the spray head (12) is fixedly connected to the inner wall of the sealed box (15).

2. The internal polishing tool for the holes of the chemical vapor deposition silicon carbide showerhead according to claim 1, wherein: The transmission component includes a first bevel gear (6). The outer wall of the first bevel gear (6) is fixedly connected to the outer wall of the connecting column (4). The tooth end of the first bevel gear (6) is meshed with a second bevel gear (7). The outer wall of the second bevel gear (7) is rotationally connected inside the feeding pipe (2). The outer wall of the second bevel gear (7) is fixedly connected to the outer wall of the fan blade (8).

3. The in-hole polishing tooling for a chemical vapor deposition silicon carbide showerhead according to claim 1, wherein: A support frame (16) is arranged inside the working box (1). The upper surface of the support frame (16) is fixedly connected with a lower mold (17). An upper mold (18) is arranged on the outer wall of the lower mold (17).

4. A chemical vapor deposition silicon carbide showerhead hole internal polishing tooling according to claim 3, characterized in that: A connecting cylinder (19) is fixedly connected inside the upper mold (18). A handle (20) is slidably connected to the inner wall of the connecting cylinder (19).

5. A chemical vapor deposition silicon carbide showerhead hole internal polishing tooling according to claim 4, characterized in that: A clamping rod (21) is fixedly connected to the outer wall of the handle (20). A first spring (22) is slidably connected to the outer wall of the clamping rod (21). One end of the first spring (22) is fixed to the handle (20), and the other end abuts against the inner wall of the connecting cylinder (19).

6. A chemical vapor deposition silicon carbide showerhead hole internal polishing tooling according to claim 5, characterized in that: The outer wall of the clamping rod (21) is slidably connected inside the upper mold (18) and the connecting cylinder (19). A clamping cylinder (23) is slidably connected to the outer wall of the clamping rod (21). The outer wall of the clamping cylinder (23) is fixedly connected inside the lower mold (17).

7. A chemical vapor deposition silicon carbide showerhead hole internal polishing tooling according to claim 3, characterized in that: A spray head body (24) is arranged between the lower mold (17) and the upper mold (18). A telescopic rod (25) is fixedly connected inside the lower mold (17). A limiting block (26) is fixedly connected to the outer wall of the telescopic rod (25).

8. A chemical vapor deposition silicon carbide showerhead hole internal polishing tooling according to claim 7, characterized in that: The outer wall of the limiting block (26) is slidably connected inside the lower mold (17). The outer wall of the limiting block (26) is in fit with the outer wall of the spray head body (24).

9. A chemical vapor deposition silicon carbide showerhead hole internal polishing tooling according to claim 8, characterized in that: A second spring (27) is slidably connected to the outer wall of the telescopic rod (25). The outer wall of the second spring (27) is fixedly connected to the outer wall of the limiting block (26).

10. A method for polishing the inner holes of a chemical vapor deposition silicon carbide showerhead, characterized in that, A chemical vapor deposition silicon carbide showerhead hole polishing tooling for any one of claims 1-9, the method comprising the following steps: S1. First, place the showerhead body (24) in the lower mold (17), and under the resilience of the second spring (27), the lower mold (17) can be stably clamped in the lower mold (17); S2. Cover the upper mold (18) on the lower mold (17), then press and rotate the handle (20) to clamp the showerhead body (24) between the lower mold (17) and the upper mold (18); S3. Start the motor (3), drive the auger blade (5) to rotate through the motor (3), and then the polishing powder in the material box (14) can be conveyed to the sealed box (15), and the polishing powder can be scattered under the rotation of the fan blade (8); S4. Convey the scattered polishing powder to the solenoid valve (11) through the air pump (10), and spray it out through the nozzle (12) under the control of the solenoid valve (11), so as to polish the holes of the showerhead body (24).

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