Pressurizing device

Abstract

Provided is a pressurizing device capable of changing the temperature gradient during heating and / or cooling of a workpiece. This pressurizing device (1) is provided with a first mold unit (4) and a second mold unit (5). The second mold unit is provided with: a plurality of heat pipes (7); a mold body part (6) to which the plurality of heat pipes are fixed, the mold body part (6) being disposed between the workpiece and the first mold unit when the workpiece is heated or cooled; and heat source units (8, 9) capable of heating or cooling corresponding heat pipes among the plurality of heat pipes. Each of the heat pipes has a protruding end portion (7a, 7b) protruding in the horizontal direction from the mold body portion. The heat source unit is provided with: a plurality of contact sections (80b, 81b, 90b, 91b) that are movable with respect to each of the protruding end sections and that can come into contact with the corresponding protruding end section; and contact switching sections (84, 94) that switch between contact of the contact section with the protruding end section and separation from the protruding end section.

Description

Technical Field

[0001] The present invention relates to a pressurizing device. Background Art

[0002] Conventionally, a pressurizing device has been used to pressurize an object to be pressurized such as electronic components (hereinafter referred to as "workpiece"). For example, the pressurizing device disclosed in Patent Document 1 includes an upper and lower pressurizing unit that clamps and pressurizes the workpiece using two units. This pressurizing device heats the workpiece using a heater provided in the lower pressurizing unit. The heater is disposed inside the mold. In this pressurizing device, after the pressurization and heating of the workpiece are completed, the workpiece is cooled while being in contact with the mold. The mold has a structure that withstands pressurization so as not to apply a large pressure to the heater. Therefore, the volume of the mold is large, and the heat capacity of the mold is also large. As a result, the heating time and cooling time of the workpiece become long. That is, the temperature change rate during heating and cooling of the workpiece becomes small (becomes gentle).

[0003] On the other hand, in the pressurizing device disclosed in Patent Document 2, the lower pressurizing unit includes a heating unit that is always heated and a cooling unit that is always cooled. The heating unit and the cooling unit are configured to be movable relative to the upper pressurizing unit holding the workpiece and are appropriately switched according to the progress of the pressurizing process. Therefore, the switching time for switching between heating and cooling by the lower pressurizing unit is shortened, and the heating time and cooling time of the workpiece are also shortened. That is, the temperature change rate during heating and cooling of the workpiece becomes large (becomes steep).

[0004] Prior Art Documents

[0005] Patent Documents:

[0006] Patent Document 1: Japanese Patent Application Laid-Open No. 2004-296746.

[0007] Patent Document 2: Japanese Patent Application Laid-Open No. 2017-199812. Summary of the Invention

[0008] Problems to be Solved by the Invention

[0009] As described above, each pressurizing device has opposite characteristics in the temperature gradient (heating time and cooling time) during heating and cooling of the workpiece. However, the temperature change rate (heating time and cooling time) during heating and cooling of the workpiece has become a trend and is difficult to control.

[0010] An object of the present invention is to provide a pressurizing device capable of controlling the temperature change rate during heating and / or cooling of a workpiece.

[0011] Means for Solving the Problems

[0012] One aspect of the present invention is a pressurizing device for pressurizing a workpiece. The pressurizing device includes: a first mold unit disposed below the workpiece and capable of heating or cooling the workpiece; and a second mold unit capable of heating or cooling the workpiece together with the first mold unit. The second mold unit includes: a plurality of heat pipes; a mold main body portion to which the plurality of heat pipes are fixed, and when the workpiece is being heated or cooled, the mold main body portion is disposed between the workpiece and the first mold unit; and a heat source unit capable of heating or cooling corresponding ones of the plurality of heat pipes. Each heat pipe has a protruding end portion protruding horizontally from the mold main body portion. The heat source unit includes: a plurality of abutting portions capable of moving relative to each protruding end portion and capable of abutting against the corresponding protruding end portion; and an abutment switching unit that switches between the abutting portion abutting against the protruding end portion and separating from the protruding end portion. The abutment switching unit causes the abutting portion to abut against the protruding end portion when the second mold unit starts heating or cooling the workpiece, and causes the abutting portion to separate from the protruding end portion when the second mold unit ends heating or cooling the workpiece.

[0013] Advantages of the Invention

[0014] According to the present invention, there is provided a pressurizing device capable of changing the temperature gradient during heating and / or cooling of a workpiece. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 FIG. is a schematic cross-sectional view of the pressurizing device showing an embodiment of the pressurizing device of the present invention.

[0016] Figure 2 is Figure 1 A schematic cross-sectional view of the present device as viewed in the direction of A of FIG..

[0017] Figure 3 FIG. is a schematic top view of the second mold unit of the above-described pressurizing device.

[0018] Figure 4 is Figure 3 A schematic view of the first heat source unit of the above-described second mold unit as viewed in the direction of B of FIG..

[0019] Figure 5 is Figure 3 A schematic view of the second heat source unit of the above-described second mold unit as viewed in the direction of C of FIG..

[0020] Figure 6 FIG. is a schematic cross-sectional view of the pressurizing device showing a state in which a workpiece is accommodated in a housing chamber of the above-described pressurizing device.

[0021] Figure 7It is a schematic cross-sectional view of the pressing device showing the state where the heating die unit and the main body of the above-mentioned pressing device are in the processing position.

[0022] Figure 8 It is Figure 7 a schematic cross-sectional view of the pressing device as viewed from direction D.

[0023] Figure 9 It is a schematic cross-sectional view of the pressing device showing the state where the chamber unit of the above-mentioned pressing device has descended.

[0024] Figure 10 It is a timing chart showing an example of the temperature changes of the workpiece, the above-mentioned heating die unit, and the above-mentioned main body during workpiece heating.

[0025] Figure 11 It is a schematic cross-sectional view of the pressing device showing the state where the first clamping member of the above-mentioned pressing device has moved to the clamping position.

[0026] Figure 12 It is a schematic cross-sectional view of the pressing device showing the state where the first clamping member has moved to the non-clamping position.

[0027] Figure 13 It is a schematic cross-sectional view of the pressing device showing the state where the cooling die unit of the above-mentioned pressing device has moved to the processing position.

[0028] Figure 14 It is Figure 13 a schematic cross-sectional view of the pressing device as viewed from direction E.

[0029] Figure 15 It is a schematic cross-sectional view of the pressing device showing the state where the above-mentioned chamber unit has descended.

[0030] Figure 16 It is a timing chart showing an example of the temperature changes of the workpiece, the above-mentioned cooling die unit, and the above-mentioned main body during workpiece cooling.

[0031] Figure 17 It is a schematic cross-sectional view of the pressing device showing the state where the first clamping member has moved to the clamping position.

[0032] Figure 18 It is a schematic cross-sectional view of the pressing device showing the state where the first clamping member has moved to the non-clamping position.

[0033] Figure 19 It is a schematic diagram showing an example of the actual temperature change of the workpiece.

[0034] Figure 20 It is a schematic cross-sectional view of the pressing device showing the state where the second clamping member of the above-mentioned pressing device has moved to the clamping position during workpiece heating.

[0035] Figure 21 It is a schematic cross-sectional view of a pressurizing device showing another embodiment of the pressurizing device of the present invention.

[0036] Figure 22 It is Figure 21 a schematic cross-sectional view of the pressurizing device viewed in the F direction.

[0037] Figure 23 It is a schematic top view of the heating die unit of the above-mentioned pressurizing device.

[0038] Figure 24 It is a schematic top view of the cooling die unit of the above-mentioned pressurizing device.

[0039] Figure 25 It is a schematic cross-sectional view of the pressurizing device showing the state where the first clamping member of the above-mentioned pressurizing device has moved to the clamping position.

[0040] Figure 26 It is a schematic cross-sectional view of the pressurizing device showing the first modification of the pressurizing device of the present invention.

[0041] Figure 27 (a) of is a schematic top view of the second die unit showing the second modification of the pressurizing device of the present invention, Figure 27 (b) of is a schematic top view of the second die unit showing the third modification of the pressurizing device of the present invention, Figure 27 (c) of is a schematic top view of the second die unit showing the fourth modification of the pressurizing device of the present invention.

[0042] Figure 28 (a) of is a schematic top view of the second die unit showing the fifth modification of the pressurizing device of the present invention, Figure 28 (b) of is Figure 28 a schematic diagram of the pressurizing device viewed in the G direction of (a) of.

[0043] Explanation of reference numerals

[0044] 1: Pressurizing device

[0045] 2: Control device

[0046] 4: First die unit

[0047] 40: Heating die unit

[0048] 40c: Heating source

[0049] 41: Cooling die unit

[0050] 41b: Cooling source

[0051] 5: Second die unit

[0052] 6: Main body

[0053] 7: Heat pipe

[0054] 71: Heat pipe (the first heat pipe)

[0055] 72 - 75: Heat pipes (the second heat pipes)

[0056] 7a: The first end (protruding end, the first protruding end)

[0057] 7b: The second end (protruding end, the second protruding end)

[0058] 8: The first heat source unit (heat source unit, cooling unit)

[0059] 80: The first clamping component (heat source main body)

[0060] 80b: Contact part

[0061] 80b1 - 80b6: Contact parts (the first contact part, the second contact part)

[0062] 81: The first clamping component (heat source main body)

[0063] 81b: Contact part

[0064] 81b1 - 81b6: Contact parts (the first contact part, the second contact part)

[0065] 82: The first heat source (cooling source, heating source)

[0066] 83: The first heat source (cooling source, heating source)

[0067] 84: The first heat source moving mechanism (contact switching part, heat source switching part)

[0068] 9: The second heat source unit (heat source unit, heating unit)

[0069] 90: The second clamping component (heat source main body)

[0070] 90b: Contact part

[0071] 91: The second clamping component (heat source main body)

[0072] 91b: Contact part

[0073] 92: The second heat source (heating source, cooling source)

[0074] 93: The second heat source (heating source, cooling source)

[0075] 94: The second heat source moving mechanism (contact switching part, heat source switching part)

[0076] 10: Temperature measuring device

[0077] 21: Unit switching section

[0078] 1Z: Pressurizing device

[0079] 4Z: Die unit

[0080] 40Z: Heating die unit

[0081] 40Za: Main body section

[0082] 41Z: Cooling die unit

[0083] 41Za: Main body section

[0084] 7Z: Heat pipe

[0085] A11: First region

[0086] A12: Second region

[0087] Pr1: Temperature curve

[0088] Pr2: Temperature curve Detailed implementation manner

[0089] The implementation manner of the pressurizing device of the present invention (hereinafter referred to as "this device") is described as follows. In the following description, each drawing is appropriately referred to. In each drawing, the same reference numerals are assigned to the same components and elements, and repeated descriptions are omitted. In addition, for ease of explanation, there are cases where the dimensional ratios of each element are enlarged, and it is not limited to the ratios shown in each drawing.

[0090] In the following description and drawings, unless otherwise emphasized, when the three mutually orthogonal axes in space are the X-axis, Y-axis, and Z-axis respectively, the X-axis and Y-axis are parallel to the horizontal direction, and the Z-axis is parallel to the vertical direction. The "X-axis direction" is the direction along the X-axis, the "+X direction" is one direction of the X-axis direction, and the "-X direction" is the other direction of the X-axis direction. The +X direction is an example of the first direction in the present invention, and the -X direction is an example of the second direction in the present invention. The "Y-axis direction" is the direction along the Y-axis, the "+Y direction" is one direction of the Y-axis direction, and the "-Y direction" is the other direction of the Y-axis direction. The "Z-axis direction" refers to the direction along the Z-axis, which is the vertical direction. The "+Z direction" is upward, and the "-Z direction" is downward. The "XY direction" is the direction along the X-axis direction and the Y-axis direction, and the "XY plane" is a virtual plane parallel to the XY direction (horizontal direction). The "XZ direction" is the direction along the X-axis direction and the Z-axis direction, and the "XZ plane" is a virtual plane parallel to the XZ direction (vertical direction).

[0091] In the following description, the lower surface is a surface facing downward and parallel to the XY direction. The upper surface is a surface facing upward and parallel to the XY direction. That is, the shapes of the lower surface and the upper surface are planar.

[0092] Pressing device (first embodiment)

[0093] Structure of the pressing device (first embodiment)

[0094] Figure 1 It is a schematic cross-sectional view of the present device showing an embodiment of the present device.

[0095] Figure 2 It is Figure 1 A schematic cross-sectional view of the present device as viewed from direction A.

[0096] Figure 1 It shows a cross-sectional view of the present device 1 along the YZ plane, where the central portion of the present device 1 in the X-axis direction is cut ([[]] Figure 6 , Figure 7 , Figure 13 and Figure 20 the same applies). Figure 2 It shows a cross-sectional view of the present device 1 along the XZ plane, where the central portion of the present device 1 in the Y-axis direction is cut ([[]] Figures 8 - 11 , Figures 14 - 17 , Figure 21 , Figures 24 - 26 the same applies).

[0097] The present device 1 presses the workpiece W in the vertical direction. The present device 1 includes a control device 2, a carrier plate 3, a first mold unit 4, a second mold unit 5, a base member 12, side members 13, an upper mold 14, a frame member 15, a pressing pad 16, a first spring member 17, a second spring member 18, two sealing members 19, 20, and a pump P. The carrier plate 3, the first mold unit 4, and the second mold unit 5 are disposed at a position lower than the workpiece W and function as a lower pressing unit DP that presses the workpiece W from below. The base member 12, the side members 13, the upper mold 14, the frame member 15, the pressing pad 16, the first spring member 17, the second spring member 18, and the two sealing members 19, 20 are disposed at a position higher than the workpiece W and function as an upper pressing unit UP that presses the workpiece W from above.

[0098] The control device 2 controls the operation of the entire device 1. The control device 2 includes, for example, a processor such as a CPU (Central Processing Unit), a volatile memory such as a RAM (Random Access Memory) that functions as a working area for the CPU, a non-volatile memory such as a ROM (Read Only Memory) that stores various information such as control programs, and a storage unit that stores information required for the operation of the device 1 (for example, the temperature curves Pr1 and Pr2 described later: refer to Figure 12 and Figure 18 ).

[0099] The mounting plate 3 is a component for mounting the workpiece W and defines the accommodation chamber R described later (refer to Figure 6 . The same applies hereinafter). The mounting plate 3 is made of, for example, a metal with high thermal conductivity (for example, a copper alloy). The shape of the mounting plate 3 is rectangular along the XY axis direction when viewed from above and is plate-shaped. The mounting plate 3 has an upper surface 3a and a lower surface 3b. The upper surface 3a is a mounting surface for mounting the workpiece W.

[0100] The first die unit 4 heats and cools the workpiece W. The first die unit 4 includes a heating die unit 40, a cooling die unit 41, and a first unit transfer device 42.

[0101] The heating die unit 40 heats the workpiece W. The heating die unit 40 can move between a processing position below the upper pressing unit UP and a standby position separated from the processing position in the horizontal direction (in this embodiment, the -Y direction). The heating die unit 40 includes a main body portion 40a, a heat insulation member 40b, a plurality of heating sources 40c, and a plurality of cooling sources 40d.

[0102] The main body portion 40a encloses the heating source 40c and the cooling source 40d. The main body portion 40a is made of, for example, a metal with relatively high rigidity (for example, carbon steel). The shape of the main body portion 40a is rectangular along the XY direction when viewed from the up-down direction and is cuboid-shaped. The main body portion 40a has an upper surface 40e. The heat insulation member 40b is arranged to divide the main body portion 40a into two parts vertically. The heat insulation member 40b suppresses the heat of the heating source 40c from being transferred downward. The heating source 40c heats the workpiece W. The heating source 40c is, for example, a known straight tubular heater. The heating source 40c is arranged parallel to the Y-axis direction inside the upper half of the main body portion 40a. The cooling source 40d is, for example, a straight tubular flow path through which a refrigerant for cooling the lower half of the main body portion 40a flows. The refrigerant is cooled by a cooling device (not shown, the same hereinafter) and circulates between the cooling source 40d and the cooling device. The cooling source 40d is arranged parallel to the Y-axis direction inside the lower half of the main body portion 40a.

[0103] The cooling die unit 41 cools the workpiece W. The cooling die unit 41 is capable of moving between a processing position below the upper pressing unit UP and a standby position spaced apart from the processing position in the horizontal direction (in this embodiment, the +Y direction). The cooling die unit 41 includes a main body portion 41a and a plurality of cooling sources 41b.

[0104] The main body portion 41a protects the cooling sources 41b. The main body portion 41a is made of, for example, a metal with high rigidity (e.g., carbon steel). The shape of the main body portion 41a is rectangular along the XY direction when viewed from the up-down direction, and is a rectangular parallelepiped shape. The main body portion 41a has an upper surface 41c. The structure of the cooling source 41b is the same as the structure of the cooling source 40d. The cooling sources 41b are arranged inside the main body portion 41a in a manner parallel to the Y-axis direction.

[0105] The first unit transfer device 42 transfers the heating die unit 40 and the cooling die unit 41 between the processing position and their respective standby positions. The first unit transfer device 42 includes, for example, a known power source (e.g., a motor: not shown), a power transmission mechanism (e.g., gears, ball screws, etc.: not shown), and a track (not shown).

[0106] When heating or cooling the workpiece W, the second die unit 5 heats or cools the workpiece W together with the first die unit 4. In addition, the second die unit 5 controls the heating time and temperature change rate when heating the workpiece W, and the cooling time and temperature change rate when cooling the workpiece W. The second die unit 5 is separate from the first die unit 4. The second die unit 5 includes a main body portion 6, a plurality of heat pipes 7, a first heat source unit 8, a second heat source unit 9, a plurality of temperature measuring devices 10, and a second unit transfer device 11.

[0107] The main body portion 6 protects the heat pipes 7. The main body portion 6 is made of, for example, a metal with high rigidity (e.g., carbon steel). The shape of the main body portion 6 is rectangular along the XY direction when viewed from the up-down direction, and is a rectangular parallelepiped shape. The main body portion 6 has a strength capable of withstanding the official pressing force described later, and has a thickness such that the heat capacity of the main body portion 6 when heating / cooling the workpiece W is relatively small. The volume of the main body portion 6 is smaller than the volumes of the main body portions 40a and 41a (e.g., 1 / n: n is an integer of 2 or more), and the heat capacity of the main body portion 6 is smaller than the heat capacities of the main body portions 40a and 41a. The main body portion 6 is capable of moving between a processing position below the upper pressing unit UP and a standby position spaced apart from the processing position in the horizontal direction (in this embodiment, the -Y direction). The main body portion 6 is an example of the die main body portion in the present invention. The main body portion 6 has an upper surface 6a, a lower surface 6b, a plurality of (six in this embodiment) insertion through-holes 6c, and a plurality of (three in this embodiment) insertion holes 6d.

[0108] Figure 3It is a schematic top view of the second die unit 5.

[0109] This figure shows the state where the main body portion 6 is in the processing position. In the following description, appropriate reference will be made together to Figure 1 , Figure 2 and Figure 3 .

[0110] The insertion through-hole 6c is a through-hole that penetrates the main body portion 6 along the X-axis direction. In the following description, when particularly distinguishing each insertion through-hole 6c, "1" to "6" are appended to the end of their reference numerals. In the Y-axis direction, the insertion through-holes 6c1 to 6c6 are arranged at equal intervals in sequence from the +Y direction side.

[0111] The insertion hole 6d is a non-through-hole that opens toward the +X direction side of the main body portion 6 along the X-axis direction. In the following description, when particularly distinguishing each insertion hole 6d, "1" to "3" are appended to the end of their reference numerals. The insertion hole 6d1 is arranged between the insertion through-hole 6c1 and the insertion through-hole 6c2, the insertion hole 6d2 is arranged between the insertion through-hole 6c3 and the insertion through-hole 6c4, and the insertion hole 6d3 is arranged between the insertion through-hole 6c5 and the insertion through-hole 6c6.

[0112] The heat pipe 7 is, for example, a known heat pipe filled with a volatile working fluid. The shape of the heat pipe 7 is a straight pipe shape. The heat pipe 7 has a first end portion 7a and a second end portion 7b. The heat pipe 7 is inserted through the corresponding insertion through-hole 6c and fixed to the main body portion 6. That is, when viewed from the up and down direction, the heat pipe 7 is arranged parallel to the X-axis direction and is arranged parallel to each other in a manner orthogonal to the heating source 40c and the cooling source 41b. The first end portion 7a protrudes from the main body portion 6 toward the +X direction, and the second end portion 7b protrudes from the main body portion 6 toward the -X direction. The first end portion 7a is an example of the protruding end portion and the first protruding end portion in the present invention, and the second end portion 7b is an example of the protruding end portion and the second protruding end portion in the present invention. In the following description, when particularly distinguishing each heat pipe 7, "1" to "6" are appended to the end of their reference numerals.

[0113] Figure 4 is Figure 3 a schematic view of the first heat source unit 8 in the B-direction view.

[0114] For ease of explanation, this figure shows the abutting portion 80b to be described later with thick solid lines, and also shows a cross-section of the first end portion 7a along the YZ plane. In the following description, appropriate reference will be made together to Figure 1 , Figure 2 and Figure 3 .

[0115] The first heat source unit 8 corresponds to the first end portion 7a and cools the heat pipe 7 (working fluid). That is, the first heat source unit 8 is a cooling unit for the heat pipe 7. The first heat source unit 8 includes two first clamping members 80, 81, two first heat sources 82, 83, and a first heat source moving mechanism 84.

[0116] When the heat pipe 7 is cooled, the first clamping members 80, 81 abut against the first end portion 7a of the heat pipe 7, and transfer the heat from the heat pipe 7 to the first heat sources 82, 83. The first clamping members 80, 81 are made of, for example, a metal having high thermal conductivity (e.g., copper alloy). The shape of the first clamping members 80, 81 is, for example, a rectangular shape along the XY direction when viewed from the up-down direction, and is a rectangular parallelepiped shape having a longitudinal direction along the Y-axis direction. The first clamping member 80 has a lower surface 80a. When the heat pipe 7 is cooled, a part of the region of the lower surface 80a functions as an abutting portion 80b that abuts against the corresponding first end portion 7a. That is, the first clamping member 80 includes a plurality of (six in the present embodiment) abutting portions 80b. In the Y-axis direction, the abutting portions 80b are arranged at equal intervals. The first clamping member 81 has an upper surface 81a. When the heat pipe 7 is cooled, a part of the region of the upper surface 81a functions as an abutting portion 81b that abuts against the corresponding first end portion 7a. That is, the first clamping member 81 includes a plurality of (six in the present embodiment) abutting portions 81b. In the Y-axis direction, the abutting portions 81b are arranged at equal intervals. When the main body portion 6 is in the standby position, the abutting portion 81b faces the abutting portion 80b. The first clamping members 80, 81 can move in the up-down direction. The first clamping members 80, 81 are an example of the heat source main body portion in the present invention. In the following description, when particularly distinguishing each of the abutting portions 80b, 81b, "1" to "6" are appended to the end of their reference numerals.

[0117] The first heat sources 82, 83 are cooling sources for cooling the heat pipe 7 via the first clamping members 80, 81. The first heat sources 82, 83 are, for example, flow paths through which a refrigerant for cooling the first clamping members 80, 81 flows. The refrigerant is cooled by a cooling device and circulates between the first heat sources 82, 83 and the cooling device. The first heat source 82 is disposed inside the first clamping member 80, and the first heat source 83 is disposed inside the first clamping member 81.

[0118] The first heat source moving mechanism 84 moves the first clamping members 80 and 81 in the vertical direction between the clamping position and the non-clamping position. The "clamping position" is the position where the first clamping members 80 and 81 clamp the first end portion 7a. The "non-clamping position" is the position where the first clamping members 80 and 81 are separated from the first end portion 7a. By moving the first clamping members 80 and 81 between the clamping position and the non-clamping position, the abutting portions 80b and 81b move relative to the first end portion 7a. That is, the first heat source moving mechanism 84 switches between the state where the abutting portions 80b and 81b abut against the first end portion 7a and the state where they are separated from the first end portion 7a. The first heat source moving mechanism 84 includes, for example, a known power source (e.g., a motor: not shown) and a power transmission mechanism (e.g., gears, ball screws, etc.: not shown). The first heat source moving mechanism 84 is an example of the abutting switching portion in the present invention.

[0119] Figure 5 is Figure 3 A schematic view of the second heat source unit 9 as viewed in the C direction.

[0120] For ease of explanation, the abutting portion 90b described later is shown by a thick solid line in this figure, and a cross-section of the second end portion 7b along the YZ plane is also shown.

[0121] The second heat source unit 9 corresponds to the second end portion 7b and heats the heat pipe 7 (working fluid). That is, the second heat source unit 9 is a heating unit that heats the heat pipe 7. The second heat source unit 9 includes two second clamping members 90 and 91, two second heat sources 92 and 93, and a second heat source moving mechanism 94.

[0122] When the heat pipe 7 is heated, the second clamping members 90 and 91 abut against the second end portion 7b of the heat pipe 7 and transfer the heat from the second heat sources 92 and 93 to the heat pipe 7. The structures of the second clamping members 90 and 91 are the same as those of the first clamping members 80 and 81. That is, the second clamping member 90 has a lower surface 90a and a plurality (six in this embodiment) of abutting portions 90b. The second clamping member 91 has an upper surface 91a and a plurality (six in this embodiment) of abutting portions 91b. When the main body portion 6 is in the standby position, the abutting portion 91b faces the abutting portion 90b. The second clamping members 90 and 91 can move in the vertical direction. The second clamping members 90 and 91 are examples of the heat source main body portions in the present invention. In the following description, when specifically distinguishing each of the abutting portions 90b and 91b, "1" to "6" are appended to the end of their reference numerals.

[0123] The second heat sources 92 and 93 are heat sources that heat the heat pipe 7 via the second clamping members 90 and 91. The second heat sources 92 and 93 are, for example, known tubular heaters. The second heat source 92 is disposed inside the second clamping member 90, and the second heat source 93 is disposed inside the second clamping member 91.

[0124] The second heat source moving mechanism 94 moves the second clamping members 90 and 91 in the vertical direction between a clamping position and a non-clamping position. The "clamping position" is the position where the second clamping members 90 and 91 clamp the second end portion 7b. The "non-clamping position" is the position where the second clamping members 90 and 91 move away from each other and separate from the second end portion 7b. By moving the second clamping members 90 and 91 between the clamping position and the non-clamping position, the abutting portions 90b and 91b relatively move with respect to the second end portion 7b. That is, the second heat source moving mechanism 94 switches between the abutting portions 90b and 91b abutting against the second end portion 7b and separating from the second end portion 7b. The structure of the second heat source moving mechanism 94 is the same as the structure of the first heat source moving mechanism 84. The second heat source moving mechanism 94 is an example of the abutment switching portion in the present invention.

[0125] Among the insertion through holes 6c, the heat pipe 7, and the abutting portions 80b, 81b, 90b, and 91b, the components with the same reference numerals added for distinction respectively correspond to each other. That is, for example, the insertion through hole 6c1 corresponds to the heat pipe 71, and the heat pipe 71 is inserted through the insertion through hole 6c1. The abutting portions 80b1 and 81b1 correspond to the first end portion 7a1 and can abut against the first end portion 7a1. The abutting portions 90b1 and 91b1 correspond to the second end portion 7b1 and can abut against the second end portion 7b1.

[0126] Here, the first heat source unit 8 and the second heat source unit 9 are examples of the heat source unit in the present invention. In other words, the heat source unit in the present invention includes the first heat source unit 8 and the second heat source unit 9.

[0127] The temperature measurer 10 measures the temperature of the main body portion 6. The temperature measurer 10 is, for example, a known thermocouple. The temperature measurer 10 is inserted into the corresponding insertion hole 6d of the main body portion 6. In the following description, when specifically distinguishing each temperature measurer 10, "1" to "3" are appended to the end of their reference numerals. The temperature measurer 101 is inserted into the insertion hole 6d1, the temperature measurer 102 is inserted into the insertion hole 6d2, and the temperature measurer 103 is inserted into the insertion hole 6d3.

[0128] In the following description, mainly referring to Figure 1 and Figure 2 .

[0129] The second unit conveying device 11 conveys the main body portion 6 between the processing position and the standby position. The second unit conveying device 11 includes, for example, a known power source (e.g., a motor: not shown), a power transmission mechanism (e.g., gears, ball screws, etc.: not shown), and a rail (not shown).

[0130] The base member 12 supports the upper die 14, the first spring member 17, and the second spring member 18. The shape of the base member 12 is rectangular along the XY direction when viewed from above, and it is a rectangular parallelepiped shape.

[0131] The side member 13 divides the accommodation chamber R described later. When viewed from below, the shape of the side member 13 is rectangular along the XY direction, and it is a frame shape. The side member 13 houses the upper die 14, the frame member 15, and the pressure pad 16. The side member 13 is supported by the base member 12 via the second spring member 18. The side member 13 has a lower surface 13a and through holes 13b that open on the inner and outer surfaces of the side member 13.

[0132] The upper die 14 presses the workpiece W from above via the pressure pad 16. The upper die 14 is disposed below the base member 12 and is mounted on the base member 12. The shape of the upper die 14 is rectangular along the XY direction when viewed from below, and it is a rectangular parallelepiped shape.

[0133] The frame member 15 holds the pressure pad 16. When viewed from below, the shape of the frame member 15 is rectangular along the XY axis direction, and it is a frame shape. In the horizontal direction, the frame member 15 is disposed to surround the upper die 14. In the vertical direction, the lower end portion of the frame member 15 is located below the upper die 14. The frame member 15 is supported by the base member 12 via the first spring member 17.

[0134] When pressing the workpiece W, the pressure pad 16 deforms in a manner following the shape of the surface of the workpiece W, presses the workpiece W evenly, and divides the accommodation chamber R described later. The pressure pad 16 is held at the lower end portion of the frame member 15 and is disposed below the upper die 14. The pressure pad 16 includes a soft layer 16a and a heat insulating layer 16b.

[0135] The soft layer 16a is made of, for example, a known elastomeric material having high fluidity and a low rebound elastic modulus. The soft layer 16a is filled, for example, between two film members (not shown, the same below) disposed above and below the soft layer 16a and is surrounded by the frame member 15.

[0136] The heat insulating layer 16b is made of, for example, a known fiber material having high flexibility and low thermal conductivity. The heat insulating layer 16b is disposed adjacent to the soft layer 16a below the soft layer 16a. The heat insulating layer 16b is filled, for example, between two film members (not shown, the same below) in the vertical direction and is surrounded by the frame member 15 in the same manner as the soft layer 16a.

[0137] It should be noted that in the present invention, when the temperature of the workpiece W is lower than the heat-resistant temperature of the soft layer 16a, the pressure pad 16 may not be provided with the heat-insulating layer 16b.

[0138] The first spring member 17 supports the frame member 15 so as to be relatively movable in the vertical direction with respect to the upper die 14. The first spring member 17 is disposed between the base member 12 and the frame member 15 and is respectively mounted on the base member 12 and the frame member 15.

[0139] The second spring member 18 supports the side member 13 so as to be relatively movable in the vertical direction with respect to the upper die 14 and the frame member 15. The second spring member 18 is disposed between the base member 12 and the side member 13 and is respectively mounted on the base member 12 and the side member 13.

[0140] The sealing members 19, 20 hermetically seal between the side member 13 and the frame member 15 and between the mounting plate 3 and the side member 13. The sealing members 19, 20 are, for example, known O-rings. The sealing member 19 is disposed between the side member 13 and the frame member 15. The sealing member 20 is disposed on the lower surface 13a of the side member 13.

[0141] The pump P is a known vacuum pump connected to the through-hole 13b.

[0142] In the present embodiment, when the workpiece W is pressed, the upper pressing unit UP and the mounting plate 3 are used to assemble a chamber unit CU (see Figure 7 ). When the chamber unit CU is assembled, the workpiece W is accommodated in a closed space (hereinafter referred to as "accommodation chamber R" (see Figure 6 )) defined by the mounting plate 3, the side member 13, the frame member 15, the pressure pad 16, and the sealing members 19, 20.

[0143] Operation of the pressing device (first embodiment)

[0144] Next, the operation of the present device 1 will be described as follows. In the following description, appropriate reference will be made to Figures 1 - 5 . In the present device 1, before the workpiece W is loaded, the heating die unit 40 is located at the processing position, the cooling die unit 41 is located at the standby position, and the upper pressing unit UP is located above the heating die unit 40.

[0145] First, the mounting plate 3 on which the workpiece W is placed is placed on the cooling die unit 41. Then, the first unit transfer device 42 transfers the heating die unit 40 to the standby position and transfers the cooling die unit 41 to the processing position.

[0146] Next, the control device 2 lowers the upper pressing unit UP until the sealing member 20 closely adheres to the placement plate 3. At this time, a storage chamber R is formed between the placement plate 3 and the upper pressing unit UP, and the workpiece W is stored in the storage chamber R.

[0147] Figure 6 It is a schematic cross-sectional view of the present device 1 showing the state where the workpiece W is stored in the storage chamber R.

[0148] Next, the control device 2 operates the pump P to make the atmosphere in the storage chamber R a reduced-pressure atmosphere. At this time, due to the action of the vacuum pressure (the pressure difference between the storage chamber R and the external space of the chamber unit CU (refer to Figure 7 , the same below)), the placement plate 3 closely adheres (is installed) to the side member 13, the second spring member 18 contracts, and the placement plate 3 and the side member 13 rise. As a result, the pressure pad 16 comes into contact with the workpiece W, and the workpiece W is pre-pressed with a pre-pressure corresponding to the vacuum pressure. Through the pre-pressing, the pressure pad 16 deforms according to the shape of the surface of the workpiece W, and the workpiece W is held between the placement plate 3 and the pressure pad 16. Here, the pre-pressure is much smaller than the formal pressing force described later. In this way, by installing the placement plate 3 on the upper pressing unit UP, the chamber unit CU is assembled, and the workpiece W is stored in the chamber unit CU.

[0149] Next, the control device 2 raises the chamber unit CU. Then, the first unit transfer device 42 and the second unit transfer device 11 transfer the heating die unit 40 and the main body 6 to the processing position, and transfer the cooling die unit 41 to the standby position.

[0150] Figure 7 It is a schematic cross-sectional view of the present device 1 showing the state where the heating die unit 40 and the main body 6 are located at the processing position.

[0151] Figure 8 It is Figure 7 a schematic cross-sectional view of the present device 1 in the D-direction view.

[0152] The first end 7a of the heat pipe 7 is located between the first clamping members 80 and 81, and the second end 7b is located between the second clamping members 90 and 91. The lower surface 6b of the main body 6 abuts against the upper surface 40e of the main body 40a of the heating die unit 40. The heating die unit 40 is heated to a predetermined heating temperature "T1: for example, about 400 °C". Therefore, the heat from the heating die unit 40 is transferred to the main body 6, and the main body 6 is heated to the temperature "T1". Here, in order to increase the heating speed of the workpiece W, the temperature "T1" is set to a temperature higher than the predetermined processing temperature "T2: for example, 300 °C".

[0153] Next, the control device 2 lowers the chamber unit CU until the placement plate 3 abuts against the main body 6. At this time, the main body 6 and the heat pipe 7 are disposed between the placement plate 3 and the heating die unit 40.

[0154] Figure 9 FIG. is a schematic cross-sectional view of the present apparatus 1 showing the state in which the chamber unit CU has been lowered.

[0155] Figure 10 FIG. is a timing chart showing an example of the temperature changes of the workpiece W, the heating die unit 40, and the main body 6 when the workpiece W is heated.

[0156] Figure 10 An example of the temperature curve Pr1 referred to by the control device 2 in the temperature control of the workpiece W is also shown. In the following description, reference will be made as appropriate Figure 10 .

[0157] Next, the control device 2 lowers the base member 12 until a predetermined pressing force (hereinafter referred to as “formal pressing force”) is applied to the workpiece W. At this time, the upper die 14 descends relative to the frame member 15 and the side member 13. Therefore, the upper die 14 presses the pressure pad 16 downward, and the pressure pad 16 deforms so as to follow the shape of the surface of the workpiece W, and presses the workpiece W evenly.

[0158] In addition, when the placement plate 3 abuts against the main body 6, the control device 2 changes the set temperature of the heating die unit 40 to “T2”. Since the heat capacity of the main body 40a is large, the temperatures of the heating die unit 40 and the main body 6 decrease relatively slowly from the temperature “T1” to the temperature “T2”. At this time, the heat from the heating die unit 40 is transferred to the workpiece W via the main body 6 and the placement plate 3. At this time, the heating rate of the workpiece W becomes faster until the temperature of the workpiece W approaches the temperatures of the heating die unit 40 and the main body 6 (temperatures “T1” to “T2”), and the heating rate becomes slower as the temperature of the workpiece W further approaches this temperature. Therefore, in the present embodiment, in order to increase this heating rate, the set temperature of the heating die unit 40 before the placement plate 3 abuts is set to a temperature “T1” higher than the temperature “T2”. As this temperature “T1” increases, the heating rate of the workpiece W becomes faster, but the temperature of the workpiece W easily exceeds the temperature “T2” (easily overshoots). Therefore, in order to suppress this overheating, the second die unit 5 is used.

[0159] Next, when the workpiece W is heated to a predetermined temperature “T3”, the first heat source moving mechanism 84 moves the first clamping members 80 and 81 to the clamping positions. At this time, the abutting portions 80b1 to 80b6 and 81b1 to 81b6 move together and abut against the corresponding first ends 7a1 to 7a6. As a result, the first heat source unit 8 comes into contact with the heat pipe 7.

[0160] The temperature "T3" is preset to a temperature lower than the temperature "T2" so that the temperature of the workpiece W does not exceed the temperature "T2" by the cooling of the heat pipe 7 described later (or even if the temperature of the workpiece W exceeds the temperature "T2", the over-temperature will be smaller). In the present embodiment, for example, the temperature change rate of the workpiece W is measured in advance. The first heat source moving mechanism 84 moves the first clamping members 80 and 81 so that the temperature of the workpiece W reaches the temperature "T2" after a predetermined elapsed time based on the temperature change rate and the elapsed time since the mounting plate 3 abutted against the main body portion 6.

[0161] It should be noted that in the present invention, the first heat source moving mechanism 84 may also move the first clamping members 80 and 81 to the clamping position when the main body portion 6 is cooled to a predetermined temperature "Tx". That is, the first heat source moving mechanism 84 may also switch between the separation and abutment of the abutting portions 80b1 to 80b6 and 81b1 to 81b6 according to the measurement result of the temperature measuring device 10. In this case, for example, the temperature change rate of the workpiece W is measured in advance, and the temperature "Tx" is preset according to the temperature change rate.

[0162] Figure 11 It is a schematic cross-sectional view of the present device 1 showing the state in which the first clamping members 80 and 81 are moved to the clamping position.

[0163] When the first clamping members 80 and 81 are moved to the clamping position, the abutting portions 80b and 81b abut against the corresponding first end portions 7a from the vertical direction. The first clamping members 80 and 81 are pre-cooled to a predetermined temperature "Tc: for example, about 20 °C" by the first heat sources 82 and 83. That is, the first clamping members 80 and 81 also function as a cooling source corresponding to the first end portions 7a. As described above, the shapes of the first clamping members 80 and 81 are rectangular parallelepiped shapes, and all the abutting portions 80b and 81b are arranged on one of the first clamping members 80 and 81. That is, the heat capacity of the first clamping members 80 and 81 is relatively large. Therefore, it is difficult for the first clamping members 80 and 81 to be heated by the heat pipe 7, and the first end portions 7a are rapidly cooled by the first clamping members 80 and 81. As a result, the heat of the main body portion 6 (transferred from the heating die unit 40) is transferred to the first clamping members 80 and 81 via the heat pipe 7. As a result, the temperature of the main body portion 6 is lower than the temperature of the heating die unit 40 and approaches the temperature "T2". The heating rate of the workpiece W rapidly decreases between the temperature "T3" and the temperature "T2". At this time, compared with the case where the power supply of the heating source 40c is turned off without cooling the heat pipe 7, the temperature change rate of the workpiece W during heating becomes smaller. Then, the temperature of the workpiece W stabilizes at the temperature "T2". Thus, the present device 1 controls the temperature change rate of the workpiece W during heating by cooling the heat pipe 7 when the workpiece W is heated. As a result, the present device 1 realizes temperature control for suppressing the over-temperature of the workpiece W while accelerating the heating rate of the workpiece W.

[0164] Next, when the temperature of the heating die unit 40 decreases to the temperature "T2", the first heat source moving mechanism 84 moves the first clamping members 80 and 81 to the non-clamping positions. At this time, the abutting portions 80b1 to 80b6 and 81b1 to 81b6 move together and move away from the corresponding first ends 7a1 to 7a6. As a result, the first heat source unit 8 is separated from the heat pipe 7.

[0165] Figure 12 It is a schematic cross-sectional view of the present apparatus 1 showing a state in which the first clamping members 80 and 81 are moved to the non-clamping positions.

[0166] When the first clamping members 80 and 81 are moved to the non-clamping positions, the first clamping members 80 and 81 are mechanically separated from the first ends 7a. As a result, the temperatures of the main body portion 6, the heat pipe 7, and the workpiece W are maintained at the temperature of the heating die unit 40, that is, the temperature "T2".

[0167] It should be noted that in the present invention, the first heat source moving mechanism 84 may, for example, also switch between abutting and separating of the abutting portions 80b and 81b with respect to the first ends 7a one or more times according to the temperature measurement result of the temperature measurer 10 so that the workpiece W is heated according to a predetermined temperature curve Pr1. In this case, the temperature during heating of the workpiece W further changes according to the temperature curve Pr1. As a result, the present apparatus 1 can accurately control the temperature change rate of the workpiece W during heating according to the temperature curve Pr1. Thus, the temperature change rate of the workpiece W during heating is controlled by the first die unit 4 and the second die unit 5. In other words, when heating the workpiece W, the second die unit 5 heats the workpiece W together with the first die unit 4.

[0168] Next, after a predetermined time, the control device 2 ends the pressurization of the workpiece W. Next, the control device 2 raises the chamber unit CU to separate the mounting plate 3 from the main body portion 6. Next, the first unit conveying device 42 moves the heating die unit 40 to the standby position and moves the cooling die unit 41 to the processing position. At this time, the main body portion 6 and the heat pipe 7 are disposed between the mounting plate 3 and the cooling die unit 41.

[0169] Figure 13 It is a schematic cross-sectional view of the present apparatus 1 showing a state in which the cooling die unit 41 is moved to the processing position.

[0170] Figure 14 is Figure 13 a schematic cross-sectional view of the present apparatus 1 viewed in the E direction.

[0171] The first end 7a of the heat pipe 7 is located between the first clamping members 80 and 81, and the second end 7b is located between the second clamping members 90 and 91. The lower surface 6b of the main body 6 abuts against the upper surface 41c of the main body 41a of the cooling die unit 41. The cooling die unit 41 is pre-cooled to a predetermined temperature "T4: for example, about 20 °C". In addition, as described above, the heat capacity of the main body 6 is smaller than that of the main body 41a. Therefore, the heat from the main body 6 is transferred to the cooling die unit 41, and the main body 6 is cooled to the temperature "T4".

[0172] Next, the control device 2 lowers the chamber unit CU until the placement plate 3 abuts against the main body 6.

[0173] Figure 15 It is a schematic cross-sectional view of the present device 1 showing the state where the chamber unit CU has been lowered.

[0174] Figure 16 It is a timing chart showing an example of the temperature changes of the workpiece W, the cooling die unit 41, and the main body 6 when the workpiece W is cooled.

[0175] Figure 16 It also shows an example of the temperature curve Pr2 referred to by the control device 2 in the temperature control of the workpiece W. In the following description, appropriate reference is made to Figure 16 .

[0176] When the placement plate 3 abuts against the main body 6, the heat from the workpiece W and the placement plate 3 is transferred to the main body 6. As a result, the workpiece W and the placement plate 3 are rapidly cooled, and the main body 6 is rapidly heated. At this time, the main body 6 is cooled by the workpiece W, the placement plate 3, and the cooling die unit 41 having a main body 41a with a heat capacity larger than that of the main body 6. Therefore, the temperature change rate (heating speed) of the main body 6 is smaller than the temperature change rate (cooling speed) of the workpiece W and the placement plate 3.

[0177] Next, when the main body 6 is heated to a predetermined temperature "T5", the first heat source moving mechanism 84 moves the first clamping members 80 and 81 to the clamping positions. At this time, the abutting portions 80b1 to 80b6 and 81b1 to 81b6 move together and abut against the corresponding first ends 7a1 to 7a6. As a result, the first heat source unit 8 comes into contact with the heat pipe 7.

[0178] The temperature "T5" is preset to a temperature lower than the temperature "T6" described later to prevent the temperature of the main body 6 from being too high. In the present embodiment, the first heat source moving mechanism 84 switches between the separation and abutment of the abutting portions 80b1 to 80b6 and 81b1 to 81b6 according to the measurement result of the temperature measuring device 10.

[0179] It should be noted that in the present invention, the first heat source moving mechanism 84 can also move the first clamping members 80 and 81 to the clamping position when the workpiece W is cooled to a predetermined temperature "Ty". In this case, for example, the temperature change rate of the workpiece W is measured in advance, and the temperature "Ty" is set in advance according to this temperature change rate. The first heat source moving mechanism 84 estimates the temperature of the workpiece W based on the elapsed time since the mounting plate 3 abutted against the main body portion 6.

[0180] Figure 17 It is a schematic cross-sectional view of the present device 1 showing the state where the first clamping members 80 and 81 are moved to the clamping position.

[0181] When the first clamping members 80 and 81 are moved to the clamping position, the abutting portions 80b and 81b abut against the corresponding first end portions 7a from the up-and-down direction. As described above, the first clamping members 80 and 81 function as cooling sources corresponding to the first end portions 7a. As a result, the heating of the main body portion 6 is suppressed, and the temperature of the main body portion 6 is maintained near the temperature "T5" (for example, the temperature between the temperature "T5" and the temperature "T6"), and then gradually decreases. As a result, it is possible to suppress the decrease in the cooling rate of the workpiece W caused by the temperature rise of the main body portion 6. That is, it is possible to suppress the reduction in the temperature change rate of the workpiece W.

[0182] Next, when the temperature of the workpiece W is cooled to a predetermined temperature "T6", the first heat source moving mechanism 84 moves the first clamping members 80 and 81 to the non-clamping position. At this time, the abutting portions 80b1 to 80b6 and 81b1 to 81b6 move together and move away from the corresponding first end portions 7a1 to 7a6. In the present embodiment, for example, the temperature change rate of the workpiece W is measured in advance. The first heat source moving mechanism 84 moves the first clamping members 80 and 81 so that the temperature of the workpiece W reaches the temperature "T6" in a predetermined elapsed time according to this temperature change rate and the elapsed time since the mounting plate 3 abutted against the main body portion 6.

[0183] It should be noted that in the present invention, the first heat source moving mechanism 84 can also move the first clamping members 80 and 81 to the non-clamping position when the main body portion 6 is cooled to a predetermined temperature "Tz". That is, the first heat source moving mechanism 84 can also switch between the abutting and separating of the abutting portions 80b1 to 80b6 and 81b1 to 81b6 according to the measurement result of the temperature measuring device 10. In this case, for example, the temperature change rate of the workpiece W is measured in advance, and the temperature "Tz" is set in advance according to this temperature change rate.

[0184] Figure 18 It is a schematic cross-sectional view of the present device 1 showing the state where the first clamping members 80 and 81 are moved to the non-clamping position.

[0185] When the first clamping members 80 and 81 are moved to the non-clamping positions, the first clamping members 80 and 81 are mechanically separated from the first end portion 7a. Thereafter, the temperature of the workpiece W slowly decreases, and the temperatures of the cooling die unit 41 and the main body portion 6 also slowly decrease to the temperature "T4".

[0186] It should be noted that in the present invention, the first heat source moving mechanism 84 may also, for example, switch between the contact and separation of the contact portions 80b and 81b with respect to the first end portion 7a one or more times according to the temperature measurement result of the temperature measuring device 10, so that the workpiece W is cooled according to a specified temperature curve Pr2. In this case, the temperature of the workpiece W further changes according to the temperature curve Pr2 during cooling. As a result, the apparatus 1 can accurately control the temperature change rate of the workpiece W during cooling according to the temperature curve Pr2. Thus, the temperature change rate of the workpiece W during cooling is controlled by the first die unit 4 and the second die unit 5. In other words, when cooling the workpiece W, the second die unit 5 cools the workpiece W together with the first die unit 4.

[0187] Next, after a predetermined time, the control device 2 raises the chamber unit CU to separate the mounting plate 3 from the main body portion 6. Next, the second unit transfer device 11 moves the main body portion 6 to the standby position. Next, the control device 2 lowers the chamber unit CU until the mounting plate 3 abuts against the cooling die unit 41. Next, the control device 2 stops the pump P and purges the atmosphere of the housing chamber R with an inert gas, thereby taking out the workpiece W from the chamber unit CU.

[0188] Figure 19 It is a schematic diagram showing an example of the actual temperature change of the workpiece W.

[0189] In this figure, as an embodiment of the present invention, "Example 1" shows the temperature change when the heat pipe 7 is cooled during heating by the apparatus 1. As a comparative example, "Example 2" shows the temperature change when the chamber unit CU is brought into contact with a pre-heated heating die unit 40. "Example 3" shows the temperature change when the heating die unit 40 is heated after the chamber unit CU is brought into contact with the non-pre-heated heating die unit 40. As shown in this figure, in "Example 1", with the same heating time as in "Example 2", a different temperature change rate (close to the temperature change rate of "Example 3") is obtained.

[0190] Thus, in this device 1, when the workpiece W is heated, the main body 6 is cooled by cooling the heat pipe 7, and thus the heating rate of the workpiece W decreases rapidly. That is, the temperature change rate of the workpiece W becomes extremely small (changes greatly). As a result, even if the workpiece W is rapidly heated to the temperature "T3", the temperature of the workpiece W does not exceed the temperature "T2". Further, by mechanically separating the cooling source (the first clamping members 80, 81 and the first heat sources 82, 83) from the heat pipe 7, the cooling of the heat pipe 7 is forcibly terminated. As a result, the thermal state of the heat pipe 7 instantaneously switches from the cooled state (temperature equilibrium state) to the heated state heated by the heating die unit 40. Similarly, in this device 1, when the workpiece W is cooled, the main body 6 is cooled by cooling the heat pipe 7, thereby suppressing a decrease in the cooling rate of the workpiece W due to an increase in the temperature of the main body 6. That is, it is possible to suppress a decrease in the temperature change rate of the workpiece W. As a result, the temperature change rate of the workpiece W becomes larger than in the case where the heat pipe 7 is not cooled, and thus the workpiece W is rapidly cooled. Further, by mechanically separating the cooling source from the heat pipe 7, the cooling of the heat pipe 7 is forcibly terminated. As a result, the thermal state of the heat pipe 7 instantaneously switches from the cooled state (temperature equilibrium state) to the cooled state cooled by the cooling die unit 41. This instantaneous switching of the thermal state can be achieved by mechanically separating the heat source from the heat pipe 7, and cannot be obtained by switching the on / off of the heat source of the heat pipe 7.

[0191] This device 1 can control the temperature change rate of the workpiece W during heating and cooling in at least two stages by cooling the workpiece W together with the second die unit 5 and the first die unit 4. Therefore, this device 1 can change the heating time and the cooling time of the workpiece W. Further, this device 1 can perform complex temperature control of the workpiece W by controlling the number and timing of the contact and separation of the heat source with respect to the heat pipe 7, and can control the temperature change rate of the workpiece W during heating (cooling) according to the purpose. That is, for example, when the workpiece W is a sintered material and it is necessary to apply a formal pressing force to the workpiece W before the temperature of the workpiece W reaches the sintering start temperature, this device 1 can cope with this workpiece W by changing the temperature change rate during heating before and after the sintering start temperature. Thus, this device 1 can control the relationship between the pressing force applied to the workpiece W and the temperature according to the type of the workpiece W.

[0192] It should be noted that in the present invention, when the workpiece W is heated, the second clamping members 90, 91 may also move to the contact position instead of the first clamping members 80, 81.

[0193] Figure 20 FIG. 10 is a schematic cross-sectional view of this device 1 showing a state in which the second clamping members 90, 91 move to the clamping position when the workpiece W is heated.

[0194] In this case, the workpiece W is rapidly heated. That is, the rate of temperature change during the heating of the workpiece W becomes larger and the heating time becomes shorter. When the workpiece W is heated to the temperature "T3", the second heat source moving mechanism 94 moves the second clamping members 90, 91 to the non-contact position, and the first heat source moving mechanism 84 moves the first clamping members 80, 81 to the contact position. As a result, the temperature of the workpiece W does not exceed the temperature "T2". This structure is particularly effective when the heating performance of the heating die unit 40 is low.

[0195] In addition, in the present invention, when the workpiece W is cooled, the second clamping members 90, 91 may also move to the contact position instead of the first clamping members 80, 81. In this case, the workpiece W is slowly cooled. That is, the rate of temperature change during the cooling of the workpiece W becomes smaller and the cooling time becomes longer.

[0196] Moreover, in the present invention, the timing of the contact and separation of the contact portions 80b, 81b with respect to the first end portion 7a is not limited to the present embodiment. The timing of the contact and separation of the contact portions 90b, 91b with respect to the second end portion 7b is the same.

[0197] Summary (First Embodiment)

[0198] According to the embodiment described above, the present device 1 includes the first die unit 4 and the second die unit 5. The second die unit 5 heats or cools the workpiece W together with the first die unit 4. The second die unit 5 includes a main body portion 6, a plurality of heat pipes 7, a first heat source unit 8, and a second heat source unit 9. The main body portion 6 is disposed between the first die unit 4 and the workpiece W (carrier plate 3) when the workpiece W is heated and cooled. The first heat source unit 8 includes a plurality of contact portions 80b, 81b and a first heat source moving mechanism 84. The second heat source unit 9 includes a plurality of contact portions 90b, 91b and a second heat source moving mechanism 94. The first heat source moving mechanism 84 switches between the contact of the contact portions 80b, 81b with the first end portion 7a and the separation from the first end portion 7a. The second heat source moving mechanism 94 switches between the contact of the contact portions 90b, 91b with the second end portion 7b and the separation from the second end portion 7b. According to this structure, the present device 1 can instantaneously switch the thermal state of the heat pipes 7 between the heating state and the cooling state. Therefore, the present device 1 can perform complex temperature control of the workpiece W by controlling the number and timing of the contact and separation of the heat source with respect to the heat pipes 7, and can control the rate of temperature change of the workpiece W during heating and cooling according to the purpose.

[0199] In addition, according to the embodiment described above, the second die unit 5 is provided with a temperature measurer 10. The first heat source moving mechanism 84 and the second heat source moving mechanism 94 control the abutment and separation of the abutting portions 80b, 81b relative to the first end portion 7a and the abutment and separation of the abutting portions 90b, 91b relative to the second end portion 7b according to the temperature measurement result of the temperature measurer 10. According to this structure, based on the actual temperature of the main body portion 6, which is the component closest to the workpiece W in the lower pressing unit DP, the temperature (temperature change rate) of the workpiece W is controlled. Therefore, the temperature control accuracy of the workpiece W is improved.

[0200] Moreover, according to the embodiment described above, the first die unit 4 is provided with a heating die unit 40. The first heat source unit 8 is provided with first heat sources 82, 83 for cooling the heat pipe 7. The first heat source moving mechanism 84 controls the abutment and separation of the abutting portions 80b, 81b relative to the first end portion 7a so that the workpiece W is heated according to the temperature curve Pr1. According to this structure, the apparatus 1 can control the temperature change rate and the heating time when heating the workpiece W according to the temperature curve Pr1.

[0201] In addition, according to the embodiment described above, the first die unit 4 is provided with a cooling die unit 41. The second heat source unit 9 is provided with second heat sources 92, 93 for heating the heat pipe 7. The second heat source moving mechanism 94 controls the abutment of the abutting portions 90b, 91b against the second end portion 7b and the separation therefrom so that the workpiece W is cooled according to the temperature curve Pr2. According to this structure, the apparatus 1 can control the temperature change rate and the cooling time when cooling the workpiece W according to the temperature curve Pr2.

[0202] In addition, according to the embodiment described above, when the heat pipe 7 is cooled, the abutting portions 80b, 81b abut against the first end portion 7a, and when the heat pipe 7 is heated, the abutting portions 90b, 91b abut against the second end portion 7b. In other words, the first heat source moving mechanism 84 and the second heat source moving mechanism 94 switch between the first heat source unit 8 and the second heat source unit 9 according to the heating and cooling of the heat pipe 7. That is, the first heat source moving mechanism 84 and the second heat source moving mechanism 94 function as a unit switching portion in the present invention. According to this structure, the apparatus 1 can further control the temperature change rate and the heating time / cooling time when heating / cooling the workpiece W.

[0203] In addition, according to the embodiment described above, the second die unit 5 includes a first heat source unit 8 corresponding to the first end portion 7a and a second heat source unit 9 corresponding to the second end portion 7b. The first heat source unit 8 is a cooling unit, and the second heat source unit 9 is a heating unit. According to this structure, when the contact portions 80b and 81b are brought into contact with the first end portion 7a during heating of the workpiece W, the rate of temperature change during heating of the workpiece W becomes smaller and the heating time becomes longer. In addition, when the contact portions 80b and 81b are brought into contact with the first end portion 7a during cooling of the workpiece W, the rate of temperature change during cooling of the workpiece W becomes larger and the cooling time becomes shorter. On the other hand, when the contact portions 90b and 91b are brought into contact with the second end portion 7b during heating of the workpiece W, the rate of temperature change during heating of the workpiece W becomes larger and the heating time becomes shorter. In addition, when the contact portions 90b and 91b are brought into contact with the second end portion 7b during cooling of the workpiece W, the rate of temperature change during cooling of the workpiece W becomes smaller and the cooling time becomes longer. Thus, the present apparatus 1 can control the rate of temperature change and the heating time / cooling time during heating / cooling of the workpiece W.

[0204] In addition, according to the embodiment described above, the first heat source moving mechanism 84 moves the first clamping members 80 and 81, whereby the plurality of contact portions 80b and 81b are brought into contact with the corresponding first end portion 7a together, or are separated from the corresponding first end portion 7a together. The second heat source moving mechanism 94 moves the second clamping members 90 and 91, whereby the plurality of contact portions 90b and 91b are brought into contact with the corresponding second end portion 7b together, or are separated from the corresponding second end portion 7b together. According to this structure, the structures of the first clamping members 80 and 81 and the second clamping members 90 and 91 can be simplified. In addition, the heat capacities of the first clamping members 80 and 81 and the second clamping members 90 and 91 become relatively large.

[0205] In addition, according to the embodiment described above, the second die unit 5 is separated from the first die unit 4. The main body portion 6 can move relative to the first die unit 4 in the horizontal direction. When the workpiece W is not heated or cooled, the main body portion 6 moves relatively from the processing position to the standby position. According to this structure, it is possible to freely select whether to use the second die unit 5. That is, the present apparatus 1 can heat / cool the workpiece W by using only the first die unit 4. As a result, the present apparatus 1 can change the rate of temperature change and the time during heating / cooling of the workpiece W by selecting whether to use the second die unit 5. In addition, one second die unit 5 can be used for the heating die unit 40 and the cooling die unit 41. Therefore, compared with the case where dedicated second die units 5 are required for the heating die unit 40 and the cooling die unit 41 respectively, the structure of the present apparatus 1 is simple. Moreover, by bringing the main body portion 6 into contact with the heating die unit 40, the main body portion 6 can be heated from room temperature instead of from the temperature of the heating die unit 40.

[0206] In addition, according to the embodiment described above, when viewed from the up-down direction, the heat pipes 7 are arranged in parallel with each other in a manner orthogonal to the heating source 40c and the cooling source 41b. According to this structure, when the heat pipes 7 are not heated or cooled by the first heat source unit 8 or the second heat source unit 9, the temperature uniformity of the main body portion 6 is improved.

[0207] Pressing device (second embodiment)

[0208] Next, centering on the parts different from the embodiment described above (hereinafter referred to as "first embodiment"), another embodiment of the present device (hereinafter referred to as "second embodiment") will be described as follows. In the second embodiment, the second die unit is integrated with the first die unit, which is different from the first embodiment. In the following description, the same reference numerals as those in the first embodiment are assigned to the elements identical to those in the first embodiment and the elements having the same functions, and their descriptions are omitted. In the following description, appropriate reference is made to Figure 4 and Figure 5 .

[0209] Structure of the pressing device (second embodiment)

[0210] Figure 21 is a schematic cross-sectional view of the present device showing the second embodiment of the present device.

[0211] Figure 22 is Figure 21 a schematic cross-sectional view of the present device viewed in the F direction.

[0212] The present device 1Z presses the workpiece W in the up-down direction. The present device 1Z includes a control device 2, a mounting plate 3, a die unit 4Z, a base member 12, side members 13, an upper die 14, a frame member 15, a pressing pad 16, a first spring member 17, a second spring member 18, two sealing members 19, 20, and a pump P. The mounting plate 3 and the die unit 4Z are arranged at a position lower than the workpiece W and function as a lower pressing unit DPZ that presses the workpiece W from below.

[0213] The die unit 4Z heats and cools the workpiece W. The die unit 4Z includes a heating die unit 40Z, a cooling die unit 41Z, a first unit conveying device 42, a plurality of (six each in the second embodiment) heat pipes 7, 7Z, a first heat source unit 8, a second heat source unit 9, and a plurality of (three each in the second embodiment) temperature measuring devices 10.

[0214] The heating die unit 40Z heats the workpiece W. The heating die unit 40Z is capable of moving between a processing position and a standby position. The heating die unit 40Z includes a main body portion 40Za, a heat insulating member 40b, a plurality of heating sources 40c, a plurality of cooling sources 40d, an upper surface 40e, a plurality of (six in the second embodiment) insertion through holes 40f, and a plurality of (three in the second embodiment) insertion holes 40g.

[0215] The main body portion 40Za protects the heating source 40c, the cooling source 40d, and the heat pipe 7. The main body portion 40Za is made of, for example, a metal (e.g., carbon steel) having high rigidity. The shape of the main body portion 40Za is rectangular along the XY direction when viewed from the up-down direction and is a rectangular parallelepiped shape. The heat insulating member 40b is disposed to divide the main body portion 40Za into upper and lower parts. The heating sources 40c are arranged parallel to the Y-axis direction inside the upper half of the main body portion 40Za. The cooling sources 40d are arranged parallel to the Y-axis direction inside the lower half of the main body portion 40Za.

[0216] Figure 23 It is a schematic top view of the heating die unit 40Z.

[0217] This figure shows the state where the heating die unit 40Z is located at the processing position. In the following description, appropriate reference will be made together to Figure 21 , Figure 22 and Figure 23 .

[0218] The insertion through holes 40f are through holes that penetrate the main body portion 40Za along the X-axis direction. The insertion through holes 40f are disposed at a position above the heating sources 40c and in the upper part of the main body portion 40Za. In the following description, when particularly distinguishing each insertion through hole 40f, "1" to "6" are appended to the end of their reference numerals. In the Y-axis direction, the insertion through holes 40f1 to 40f6 are arranged at equal intervals in order from the +Y direction side.

[0219] The insertion holes 40g are non-through holes that open toward the +X direction side of the main body portion 40Za along the X-axis direction. In the following description, when particularly distinguishing each insertion hole 40g, "1" to "3" are appended to the end of their reference numerals. The insertion hole 40g1 is disposed between the insertion through holes 40f1 and 40f2, the insertion hole 40g2 is disposed between the insertion through holes 40f3 and 40f4, and the insertion hole 40g3 is disposed between the insertion through holes 40f5 and 40f6.

[0220] The heat pipe 7 is inserted into the corresponding insertion hole 40f and fixed to the main body portion 40Za. That is, the main body portion 40Za also functions as the mold main body portion in the present invention. As a result, in the vertical direction, the region (upper side region) of the main body portion 40Za where the heat pipe 7 is fixed functions as the second mold unit 5 of the first embodiment together with the first heat source unit 8, the second heat source unit 9, and the temperature measurer 10. Similarly, the region on the lower side of the main body portion 40Za than the region where the heat pipe 7 is fixed (the region where the heating source 40c and the cooling source 40d are arranged) functions as the first mold unit 4 of the first embodiment. That is, the mold unit 4Z includes the first mold unit 4 and the second mold unit 5 of the first embodiment. Thus, in the second embodiment, the first mold unit 4 (heating mold unit 40) of the first embodiment and a part of the second mold unit 5 (the main body portion 6 and the heat pipe 7) are integrated.

[0221] Among the insertion hole 40f, the heat pipe 7, and the abutting portions 80b, 81b, 90b, 91b, the components with the same reference numerals added for distinction respectively correspond to each other. That is, for example, the insertion hole 40f1 corresponds to the heat pipe 7Z1, and the heat pipe 7Z1 is inserted into the insertion hole 40f1. The abutting portions 80b1, 81b1 correspond to the first end portion 7a1 and can abut against the first end portion 7a1. The abutting portions 90b1, 91b1 correspond to the second end portion 7b1 and can abut against the second end portion 7b1.

[0222] In the following description, mainly referring to Figure 21 and Figure 22 .

[0223] The cooling mold unit 41Z cools the workpiece W. The cooling mold unit 41Z can move between a processing position and a standby position. The cooling mold unit 41Z includes a main body portion 41Za, a plurality of cooling sources 41b, an upper surface 41c, a plurality of (six in this embodiment) insertion holes 41d, and a plurality of (three in this embodiment) insertion holes 41e.

[0224] The main body portion 41Za protects the cooling source 41b and the heat pipe 7Z. The main body portion 41Za is made of, for example, a metal with high rigidity (for example, carbon steel). The shape of the main body portion 41Za is a rectangular shape along the XY direction when viewed from the vertical direction and is a rectangular parallelepiped shape. The cooling sources 41b are arranged inside the main body portion 41Za in parallel with the Y-axis direction.

[0225] Figure 24 is a schematic top view of the cooling mold unit 41Z.

[0226] This figure shows the state where the cooling mold unit 41Z is located at the processing position. In the following description, together with Figure 24 appropriately refer toFigure 21 , Figure 22 。

[0227] The insertion through-hole 41d is a through-hole that penetrates the main body portion 41Za in the X-axis direction. The insertion through-hole 41d is disposed at a position above the cooling source 41b and in the upper portion of the main body portion 41Za. In the following description, when particularly distinguishing each insertion through-hole 41d, "1" to "6" are appended to the end of their reference numerals. In the Y-axis direction, the insertion through-holes 41d1 to 41d6 are arranged at equal intervals in sequence from the +Y direction side.

[0228] The insertion hole 41e is a non-through-hole that opens on the +X direction side of the main body portion 41Za in the X-axis direction. In the following description, when particularly distinguishing each insertion hole 41e, "1" to "3" are appended to the end of their reference numerals. The insertion hole 41e1 is disposed between the insertion through-hole 41d1 and the insertion through-hole 41d2, the insertion hole 41e2 is disposed between the insertion through-hole 41d3 and the insertion through-hole 41d4, and the insertion hole 41e3 is disposed between the insertion through-hole 41d5 and the insertion through-hole 41d6.

[0229] The structure of the heat pipe 7Z is the same as that of the heat pipe 7. The heat pipe 7Z includes a first end portion 7Za and a second end portion 7Zb. The heat pipe 7Z is inserted through the corresponding insertion through-hole 41d and fixed to the main body portion 41Za. That is, the main body portion 41Za also functions as the mold main body portion in the present invention. As a result, the region (upper side region) of the main body portion 41Za where the heat pipe 7Z is fixed functions as the second mold unit 5 of the first embodiment together with the first heat source unit 8, the second heat source unit 9, and the temperature measuring device 10. Similarly, the region on the lower side of the main body portion 41Za that is more than the region where the heat pipe 7Z is fixed (the region where the cooling source 41b is disposed) functions as the first mold unit 4 of the first embodiment. Thus, in the second embodiment, a part of the first mold unit 4 (cooling mold unit 41Z) and the second mold unit 5 of the first embodiment are integrated.

[0230] The first end portion 7Za protrudes from the main body portion 41Za in the +X direction, and the second end portion 7Zb protrudes from the main body portion 41Za in the -X direction. The first end portion 7Za and the second end portion 7Zb are an example of the protruding end portions in the present invention. In the following description, when particularly distinguishing each heat pipe 7Z, "1" to "6" are appended to the end of their reference numerals.

[0231] In the following description, mainly with reference to Figures 21 - 24 。

[0232] The temperature measuring device 10 is inserted into the corresponding insertion holes 40g and 41e. In the following description, when specifically distinguishing each temperature measuring device 10, "1" to "6" are appended to the end of their reference numerals. The temperature measuring device 101 is inserted into the insertion hole 40g1, the temperature measuring device 102 is inserted into the insertion hole 40g2, and the temperature measuring device 103 is inserted into the insertion hole 40g3. The temperature measuring device 104 is inserted into the insertion hole 41e1, the temperature measuring device 105 is inserted into the insertion hole 41e2, and the temperature measuring device 106 is inserted into the insertion hole 41e3.

[0233] Among the insertion through holes 41d, the heat pipes 7Z, and the abutting portions 80b, 81b, 90b, and 91b, the components with the same symbol numbers appended for distinction correspond to each other. That is, for example, the insertion through hole 41d1 corresponds to the heat pipe 7Z1, and the heat pipe 7Z1 is inserted through the insertion through hole 41d1. The abutting portions 80b1 and 81b1 correspond to the first end portion 7Za1 and can abut against the first end portion 7Za1. The abutting portions 90b1 and 91b1 correspond to the second end portion 7Zb1 and can abut against the second end portion 7Zb1.

[0234] Operation of the pressing device (second embodiment)

[0235] Next, the operation of the present device 1Z is described as follows. In the following description, appropriate reference is made to Figure 8 , Figure 9 and Figures 21 - 24 . In the present device 1Z, before the workpiece W is carried in, the heating die unit 40Z is in the processing position, and the cooling die unit 41Z is in the retracted position.

[0236] First, the placement plate 3 carrying the workpiece W is placed on the cooling die unit 41Z. Next, the first unit transfer device 42 transfers the heating die unit 40Z to the standby position and transfers the cooling die unit 41Z to the processing position. At this time, the first heat source unit 8 and the second heat source unit 9 do not contact the heat pipe 7Z.

[0237] Next, in the same manner as in the first embodiment, the workpiece W is received in the chamber unit CU.

[0238] Next, the control device 2 raises the chamber unit CU, moves the heating die unit 40Z to the processing position, and moves the cooling die unit 41Z to the standby position. At this time, the first end portion 7a of the heat pipe 7 is located between the first clamping members 80 and 81, and the second end portion 7b is located between the second clamping members 90 and 91. The heating die unit 40Z is preheated to a predetermined temperature "T1".

[0239] Next, the control device 2 lowers the chamber unit CU until the placement plate 3 abuts against the main body portion 40Za. At this time, the control device 2 changes the set temperature of the heating die unit 40 to "T2". In addition, the control device 2 lowers the base member 12 to apply a formal pressing force to the workpiece W. Next, when the workpiece W is heated to a predetermined temperature "T3", the first heat source moving mechanism 84 moves the first clamping members 80 and 81 to the clamping positions.

[0240] Figure 25 FIG. is a schematic cross-sectional view of the present device 1Z showing the state in which the first clamping members 80 and 81 are moved to the clamping positions.

[0241] Next, the first heat source moving mechanism 84 switches between the abutting portions 80b and 81b abutting against the first end portion 7a and separating from the first end portion 7a according to the temperature measurement result of the temperature measuring device 10, so that the workpiece W is heated according to a specified temperature curve Pr1 (see Figure 10 , the same below). As a result, the temperature change rate of the workpiece W during heating changes along the temperature curve Pr1.

[0242] Next, when the temperature of the heating die unit 40 drops to the temperature "T2", the first heat source moving mechanism 84 moves the first clamping members 80 and 81 to the non-clamping positions. As a result, the temperatures of the main body portion 6, the heat pipe 7, and the workpiece W are maintained at the temperature of the heating die unit 40, that is, the temperature "T2".

[0243] Next, after a predetermined time, the control device 2 ends the pressing of the workpiece W. Next, the control device 2 raises the chamber unit CU to separate the placement plate 3 from the main body portion 40Za. Next, the first unit transfer device 42 moves the heating die unit 40Z to the standby position and moves the cooling die unit 41Z to the processing position. At this time, the first end portion 7Za of the heat pipe 7Z is located between the first clamping member 80 and the first clamping member 81, and the second end portion 7Zb is located between the second clamping members 90 and 91. Here, the cooling unit 50 is pre-cooled to a predetermined temperature "T4".

[0244] Next, the control device 2 lowers the chamber unit CU until the placement plate 3 abuts against the main body portion 6. Next, when the main body portion 6 is heated to a predetermined temperature "T5", the first heat source moving mechanism 84 moves the first clamping members 80 and 81 to the clamping positions. Next, when the temperature of the workpiece W is cooled to a predetermined temperature "T6", the first heat source moving mechanism 84 moves the first clamping members 80 and 81 to the non-clamping positions. Next, in the same manner as in the first embodiment, the control device 2 takes out the workpiece W from the chamber unit CU.

[0245] Summary (Second Embodiment)

[0246] According to the embodiments described above, the device 1Z includes a die unit 4Z. In the die unit 4Z, the region where the second die unit 5 functions as the first embodiment is disposed between the region where the first die unit 4 functions as the first embodiment and the workpiece W (carrier plate 3). The die unit 4Z includes main body portions 40Za, 41Za, a plurality of heat pipes 7, 7Z, a first heat source unit 8, and a second heat source unit 9. The first heat source unit 8 includes a plurality of abutting portions 80b, 81b and a first heat source moving mechanism 84. The second heat source unit 9 includes a plurality of abutting portions 90b, 91b and a second heat source moving mechanism 94. The first heat source moving mechanism 84 switches between the abutting portions 80b, 81b abutting against the first end portion 7a and separating from the first end portion 7a. The second heat source moving mechanism 94 switches between the abutting portions 90b, 91b abutting against the second end portion 7Zb and separating from the second end portion 7Zb. According to this structure, similar to the first embodiment, the device 1Z can perform complex temperature control on the workpiece W and can control the temperature change rates during heating and cooling of the workpiece W according to the purpose.

[0247] In addition, according to the embodiments described above, the die unit 4Z includes a temperature measurer 10. The first heat source moving mechanism 84 and the second heat source moving mechanism 94 control the abutting portions 80b, 81b to abut against the first end portion 7a and separate therefrom, and control the abutting portions 90b, 91b to abut against the second end portion 7Zb and separate therefrom according to the temperature measurement result of the temperature measurer 10. According to this structure, similar to the first embodiment, the temperature control accuracy of the workpiece W is improved.

[0248] Moreover, according to the embodiments described above, the first heat source moving mechanism 84 controls the abutting portions 80b, 81b to abut against the first end portion 7a and separate therefrom so that the workpiece W is heated according to the temperature curve Pr1. According to this structure, the device 1Z can control the temperature change rate and the heating time during heating of the workpiece W according to the temperature curve Pr1.

[0249] In addition, according to the embodiments described above, the second heat source moving mechanism 94 controls the abutting portions 90b, 91b to abut against the second end portion 7Zb and separate therefrom so that the workpiece W is cooled according to the temperature curve Pr2. According to this structure, the device 1Z can control the temperature change rate and the cooling time during cooling of the workpiece W according to the temperature curve Pr2.

[0250] In addition, according to the embodiments described above, similar to the first embodiment, the first heat source moving mechanism 84 and the second heat source moving mechanism 94 function as the unit switching portion in the present invention. According to this structure, the device 1Z can further control the temperature change rates and the heating / cooling times during heating / cooling of the workpiece W.

[0251] In addition, according to the embodiment described above, the mold unit 4Z includes a first heat source unit 8 corresponding to the first end portion 7a and a second heat source unit 9 corresponding to the second end portion 7Zb. The first heat source unit 8 is a cooling unit, and the second heat source unit 9 is a heating unit. According to this structure, similar to the first embodiment, the apparatus 1Z can control the temperature change rate and the heating time / cooling time when the workpiece W is heated / cooled.

[0252] In addition, according to the embodiment described above, the first heat source moving mechanism 84 causes the plurality of abutting portions 80b, 81b to abut against the corresponding first end portion 7a together, or to move away from the corresponding first end portion 7a together. The second heat source moving mechanism 94 causes the plurality of abutting portions 90b, 91b to abut against the corresponding second end portion 7Zb together, or to move away from the corresponding second end portion 7Zb together. According to this structure, the structures of the first clamping members 80, 81 and the second clamping members 90, 91 can be simplified. In addition, the heat capacities of the first clamping members 80, 81 and the second clamping members 90, 91 become relatively large.

[0253] In addition, in the embodiment described above, the heating mold unit 40Z includes a plurality of heating sources 40c fixed to the main body portion 40Za, and the cooling mold unit 41Z includes a plurality of cooling sources 41b fixed to the main body portion 41Za. The heat pipe 7 is disposed at a position above the heating source 40c, and the heat pipe 7Z is disposed at a position above the cooling source 41b. In the vertical direction, the region in the main body portion 40Za where the heating source 40c is disposed functions as the first mold unit 4 of the first embodiment, and the region where the heat pipe 7 is disposed functions as the second mold unit 5 of the first embodiment. In the vertical direction, the region in the main body portion 41Za where the cooling source 41b is disposed functions as the first mold unit 4 of the first embodiment, and the region where the heat pipe 7Z is disposed functions as the second mold unit 5 of the first embodiment. In this structure, similar to the first embodiment, without the movement of the second mold unit 5, the apparatus 1Z of the present invention can be made smaller than the apparatus 1 of the first embodiment.

[0254] In addition, according to the embodiment described above, when viewed from the vertical direction, the heat pipes 7 are arranged parallel to each other in a manner orthogonal to the heating source 40c, and the heat pipes 7Z are arranged parallel to each other in a manner orthogonal to the cooling source 41b. According to this structure, when the heat pipes 7, 7Z are not heated or cooled by the first heat source unit 8 or the second heat source unit 9, the temperature uniformity of the main body portion 6 is improved.

[0255] It should be noted that in the second embodiment, the heating mold unit 40Z may not include the heat pipe 7, or the cooling mold unit 41Z may not include the heat pipe 7Z.

[0256] In addition, in the second embodiment, the heating die unit 40Z may also include a main body portion 40a and the main body portion 6, and the cooling die unit 41Z may also include a main body portion 41a and the main body portion 6. In this case, the main body portion 6 is fixed to the main body portions 40a and 41a, respectively. In this structure, the maintainability of the heating die unit 40Z and the cooling die unit 41Z is improved.

[0257] Modification

[0258] Next, the modifications of the present device will be described centering on the parts different from the first embodiment. In the following description of the modifications, for the sake of convenience, the same elements as those in the first embodiment and the elements having the same functions are denoted by the same reference numerals as those in the first embodiment, and their descriptions are omitted. Each modification can also be applied to the second embodiment. In the following description, appropriate reference is made to Figures 1 - 5 .

[0259] First Modification

[0260] Figure 26 FIG. is a schematic cross-sectional view of the present device showing the first modification of the present device.

[0261] In the first modification, the second die unit 5 includes a main body portion 6, a plurality of heat pipes 7, a first heat source unit 8, a second heat source unit 9, a plurality of temperature sensors 10, a second unit conveying device 11, and a unit switching device 21. The unit switching device 21 is an example of the unit switching portion in the present invention.

[0262] In the first modification, the second heat source unit 9 also corresponds to the first end portion 7a. That is, when the heat pipe 7 is heated, the second clamping members 90 and 91 abut against the first end portion 7a of the heat pipe 7, and transfer the heat from the second heat sources 92 and 93 to the heat pipe 7.

[0263] The unit switching device 21 switches between the first heat source unit 8 and the second heat source unit 9 for the first end portion 7a. Specifically, when the heat pipe 7 is heated, the unit switching device 21 switches between the first heat source unit 8 and the second heat source unit 9 so that the abutting portions 80b and 81b or the abutting portions 90b and 91b can abut against the corresponding first end portion 7a. Similarly, when the heat pipe 7 is cooled, the unit switching device 21 switches between the first heat source unit 8 and the second heat source unit 9 so that the abutting portions 80b and 81b or the abutting portions 90b and 91b can abut against the corresponding first end portion 7a. In this structure, the same effect as that of the first embodiment can also be obtained.

[0264] It should be noted that in the first modification, the second end portion 7b may not protrude from the main body portion 6 as in the second modification described later.

[0265] In addition, in the first modification example, the second die unit 5 may also include a first heat source unit 8, a second heat source unit 9, and a unit switching device 21 corresponding to the second end portion 7b.

[0266] Second to Fourth Modification Examples

[0267] Figure 27 (a) of FIG. shows a schematic top view of the second die unit of the second modification example of the present device. Figure 27 (b) of FIG. shows a schematic top view of the second die unit of the third modification example of the present device. Figure 27 (c) of FIG. shows a schematic top view of the second die unit of the fourth modification example of the present device.

[0268] In the second to fourth modification examples, the arrangement and / or number of the heat pipes 7 are different from those in the first embodiment.

[0269] As Figure 27 shown in (a) of FIG., in the second modification example, only the first end portion 7a of the heat pipe 7 protrudes from the main body portion 6, and the second end portion 7b is disposed inside the main body portion 6. In addition, the second die unit 5 does not include the second heat source unit 9. In this structure, when the first end portion 7a is heated, the second end portion 7b is not exposed to the atmosphere. Therefore, the second end portion 7b does not function like a heat sink, and the temperature of the end portion on the -X direction side of the main body portion 6 is not easily reduced.

[0270] It should be noted that, in the second modification example, the first heat source 82 may be a heating source, and the first heat source 83 may be a cooling source. In this case, when the first heat source 82 is turned on, the first heat source 83 is turned off, and when the first heat source 83 is turned on, the first heat source 82 is turned off. The switching of this on / off is controlled by the control device 2, for example. That is, the control device 2 can function as the heat source switching unit in the present invention. In this structure, the present device 1 can heat and cool the heat pipe 7 using one first heat source unit 8. In this case, in other words, the first heat source unit 8 functions as a heating unit and a cooling unit, and also functions as the unit switching unit in the present invention.

[0271] As Figure 27 shown in (b) of FIG., in the third modification example, the first end portions 7a2, 7a4, 7a6 of half of the heat pipes 72, 74, 76 protrude from the main body portion 6 in the +X direction, and the second end portions 7b2, 7b4, 7b6 are disposed inside the main body portion 6. Similarly, the second end portions 7b1, 7b3, 7b5 of half of the heat pipes 71, 73, 75 protrude from the main body portion 6 in the -X direction, and the first end portions 7a1, 7a3, 7a5 are disposed inside the main body portion 6.

[0272] As Figure 27As shown in (c) of the fourth modification, in the fourth modification, the second die unit 5 includes eight heat pipes 71 to 78. In the Y-axis direction, the heat pipes 71 to 78 are arranged in order from the +Y direction. The interval between the heat pipes 71 and 72 is the same as the interval between the heat pipes 77 and 78, and is smaller than the interval between the heat pipes 72 and 73. The heat pipes 73 to 76 are arranged at equal intervals, and the interval is larger than the interval between the heat pipes 72 and 73. That is, in the Y-axis direction, when approaching the end of the main body 6, the interval between the adjacent heat pipes 71 to 78 becomes narrower (the intervals are uneven). In this structure, by concentrating the heat pipes 7 at the end of the main body 6 where the temperature is likely to decrease, the temperature decrease at this end can be suppressed.

[0273] Fifth modification

[0274] Figure 28 (a) of the fifth modification shows a schematic top view of the second die unit 5 of the present device. Figure 28 (b) is Figure 28 a schematic view of the first heat source unit 8 in the G-direction view of (a).

[0275] In this figure, for ease of explanation, the later-described first region A11 and third region A13 are shown by hatched lines, and the second region A12 is shown in gray.

[0276] As Figure 28As shown, in the fifth modification example, the first heat source unit 8 is physically divided into three parts, namely, a first part 8A having abutting portions 80b1 and 81b1; a second part 8B having abutting portions 80b2 to 80b5 and 81b2 to 81b5; and a third part 8C having abutting portions 80b6 and 81b6. The first part 8A, the second part 8B, and the third part 8C can operate independently of each other. The first heat source moving mechanism 84 switches between abutting and separating of the first part 8A, the second part 8B, and the third part 8C at different / same timings. That is, the abutting portions 80b1, 80b6, 81b1, and 81b6 can move independently of the abutting portions 80b2 to 80b5 and 81b2 to 81b5. When viewed from the up-down direction, the region in the main body 6 where the heat pipe 71 is disposed is a first region A11, the region where the heat pipes 72 to 75 are disposed is a second region A12, and the region where the heat pipe 76 is disposed is a third region A13. The second mold unit 5 includes five temperature sensors 101 to 105. The temperature sensor 104 is disposed at the end portion on the +Y direction side of the main body 6, and the temperature sensor 105 is disposed at the end portion on the -Y direction side of the main body 6. The heat pipe 71 (76) is an example of the first heat pipe in the present invention, and the heat pipes 72 to 75 are examples of the second heat pipes in the present invention. The abutting portions 80b1, 80b6, 81b1, and 81b6 are examples of the first abutting portions in the present invention, and the abutting portions 80b2 to 80b5 and 81b2 to 81b5 are examples of the second abutting portions in the present invention. In this structure, different temperature controls and the same temperature control can be performed in the first region A11, the second region A12, and the third region A13.

[0277] It should be noted that in the fifth modification example, the number of parts into which the first heat source unit 8 is physically divided is not limited to "3". That is, for example, the first heat source unit 8 may also divide the heat pipes 71 to 76 one by one. In this case, the parts corresponding to the heat pipes 71, 73, and 75 can function as heating units, and the parts corresponding to the heat pipes 72, 74, and 76 can function as cooling units.

[0278] In addition, in the fifth modification example, the second part 8B may also function as a cooling unit.

[0279] Other embodiments

[0280] It should be noted that in each embodiment, the apparatus 1, 1Z may not include the heating mold units 40, 40Z or the cooling mold units 41, 41Z and the first unit conveying device 42. In this case, in the apparatus 1, the chamber unit CU may not move in the up-down direction.

[0281] In addition, in the first embodiment, the second die unit 5 may also be used only when the workpiece W is heated or cooled.

[0282] Moreover, in each embodiment, the first heat source unit 8 may also be a heating unit, and the second heat source unit 9 may also be a cooling unit.

[0283] In addition, in each embodiment, both the first heat source unit 8 and the second heat source unit 9 may be heating units or cooling units.

[0284] In addition, in each embodiment, the number of the heat pipes 7 and 7Z is not limited to "6". In this case, the number of the insertion holes 6c, 40f, and 41d is set according to the number of the heat pipes 7 and 7Z.

[0285] In addition, in each embodiment, regarding the direction along which the heat pipe 7 extends, it is sufficient that the heat pipe 7 is arranged parallel to the horizontal direction, and it is not limited to the X-axis direction. That is, for example, the heat pipe 7 may also be arranged along the Y-axis direction. In this case, when viewed from the up-down direction, the heat pipe 7 is arranged parallel to the heating source 40c and the cooling source 41b. In this structure, when the heat pipe 7 is not heated or cooled by the first heat source unit 8 or the second heat source unit 9, the temperature uniformity of the main body portion 6 is improved.

[0286] In addition, in each embodiment, the heat pipes 7 may not be arranged at equal intervals. That is, for example, as in the fourth modification example, the intervals of a part of the heat pipes 7 may be different from those of another part. In addition, for example, when viewed from the up-down direction, the heat pipes 7 may be concentratedly arranged at the position where the workpiece W is placed.

[0287] In addition, in each embodiment, the method by which the first heat source unit 8 and the second heat source unit 9 are in contact with the heat pipes 7 and 7Z is not limited to the clamping method. That is, for example, the first heat source unit 8 and the second heat source unit 9 may also be provided with insertion holes into which the first end portion 7a or the second end portion 7b is inserted (embedded). In this case, the first heat source moving mechanism 84 and the second heat source moving mechanism 94 are configured to relatively move the insertion holes with respect to the first end portion 7a or the second end portion 7b. The insertion holes function as the contact portions in the present invention. In addition, for example, only the first clamping member 80 or the first clamping member 81 may be in contact with the heat pipe 7. In this case, the first heat source unit 8 may also be provided with only either the first clamping member 80 or the first clamping member 81. The same applies to the second heat source unit 9.

[0288] In addition, in each embodiment, the device 1 and 1Z may not be provided with the temperature measurer 10. In this structure, as long as the temperature change of the workpiece W is known, the device 1 and 1Z can perform temperature control (control of temperature gradient) corresponding to the workpiece W.

[0289] In addition, in each of the embodiments, the number of the temperature sensors 10 is not limited to "3" or "6". In this case, the number of the insertion holes 6d, 40g, and 41e is set according to the number of the temperature sensors 10.

[0290] In addition, in each of the embodiments, the temperature sensor 10 is not limited to a thermocouple.

[0291] In addition, in each of the embodiments, the storage unit may not store the temperature curves Pr1 and Pr2. That is, the first heat source moving mechanism 84 may not switch between the contact and separation of the contact portions 80b and 81b with respect to the first end portion 7a so that the workpiece W is heated according to the temperature curve Pr1. The same applies to the second heat source moving mechanism 94.

[0292] In addition, in each of the embodiments, the storage unit may store temperature curves different from the temperature curves Pr1 and Pr2.

[0293] In addition, in each of the embodiments, the heating die units 40 and 40Z and the cooling die units 41 and 41Z may also be conveyed in the X-axis direction.

[0294] In addition, in the first embodiment, the main body portion 6 may also be conveyed in the X-axis direction.

[0295] Embodiments of the present invention

[0296] Next, by referring to the terms and reference numerals described in each of the embodiments, the embodiments of the present invention understood from the above-described embodiments are described as follows.

[0297] A first embodiment of the present invention is a pressing device (e.g., pressing devices 1, 1Z) that presses a workpiece (e.g., workpiece W). The pressing device includes: a first die unit (e.g., first die units 4, die units 4Z) disposed below the workpiece and capable of heating or cooling the workpiece; and a second die unit (e.g., second die units 5, die units 4Z) capable of heating or cooling the workpiece together with the first die unit. The second die unit includes: a plurality of heat pipes (e.g., heat pipes 7, 7Z); a die main body portion (e.g., main body portions 6, 40Za, 41Za) to which the plurality of heat pipes are fixed, and which is disposed between the workpiece and the first die unit when the workpiece is being heated or cooled; and a heat source unit (e.g., first heat source units 8, second heat source units 9) capable of heating or cooling corresponding ones of the plurality of heat pipes. Each heat pipe has a protruding end portion (e.g., first end portion 7a, second end portion 7b) protruding horizontally from the die main body portion. The heat source unit includes: a plurality of abutting portions (e.g., abutting portions 80b, 81b, 90b, 91b) capable of moving relative to each protruding end portion and abutting against the corresponding protruding end portion; and an abutment switching portion (e.g., first heat source moving mechanisms 84, second heat source moving mechanisms 94) that switches between the abutting of the abutting portion against the protruding end portion and the separation from the protruding end portion.

[0298] According to this structure, complex temperature control of the workpiece can be performed, and the temperature change rate during heating and cooling of the workpiece can be controlled according to the purpose.

[0299] A second embodiment of the present invention is based on the first embodiment. The second die unit includes a temperature measuring device (e.g., temperature measuring device 10) capable of measuring the temperature of the die main body portion. The abutment switching portion switches between the abutting and the separation of the abutting portion based on the measurement result of the temperature measuring device.

[0300] According to this structure, the temperature control accuracy of the workpiece is improved.

[0301] A third embodiment of the present invention is based on the second embodiment. The first die unit includes a heating die unit (e.g., heating die units 40, 40Z) that heats the workpiece. The heat source unit includes a cooling source (e.g., first heat sources 82, 83) that cools the heat pipes or a heating source (e.g., second heat sources 92, 93) that heats the heat pipes. The abutment switching portion switches between the abutting and the separation of the abutting portion so that the workpiece is heated according to a specified temperature curve (e.g., temperature curve Pr1).

[0302] According to this structure, the temperature change rate and heating time of the workpiece during heating can be controlled according to the temperature curve.

[0303] A fourth embodiment of the present invention is based on the second embodiment. The first mold unit includes a cooling mold unit (for example, cooling mold units 41, 41Z) for cooling the workpiece. The heat source unit includes a cooling source for cooling the heat pipe or a heating source for heating the heat pipe. The contact switching unit switches between the contact and the separation of the contact portion so that the workpiece is cooled according to a specified temperature curve (for example, temperature curve Pr2).

[0304] According to this structure, the temperature change rate and cooling time of the workpiece during cooling can be controlled according to the temperature curve.

[0305] A fifth embodiment of the present invention is based on the second embodiment. The first mold unit includes a heating mold unit for heating the workpiece or a cooling mold unit for cooling the workpiece. The heat source unit includes: a heating source (for example, first heat source 82, second heat source 92) for heating the heat pipe; a cooling source (for example, first heat source 83, second heat source 93) for cooling the heat pipe; and a heat source switching unit (for example, first heat source moving mechanism 84, second heat source switching mechanism 94) for switching between the heating source and the cooling source. The heat source switching unit switches between the heating source and the cooling source so that the workpiece is heated or cooled according to a specified temperature curve.

[0306] According to this structure, the present device can heat and cool the heat pipe using one first heat source unit.

[0307] A sixth embodiment of the present invention is based on the first embodiment. The heat source unit includes: a heating unit (for example, second heat source unit 9) for heating the corresponding heat pipe; a cooling unit (for example, first heat source unit 8) for cooling the corresponding heat pipe; and a unit switching unit (for example, unit switching device 21) for switching between the heating unit and the cooling unit. When the heat pipe is heated, the unit switching unit switches between the heating unit and the cooling unit so that the contact portion of the heating unit can contact the corresponding protruding end portion. When the heat pipe is cooled, the unit switching unit switches between the heating unit and the cooling unit so that the contact portion of the cooling unit can contact the corresponding protruding end portion.

[0308] According to this structure, the present device can control the temperature change rate and heating time / cooling time of the workpiece during heating / cooling.

[0309] The seventh embodiment of the present invention is based on the first embodiment. Each of the heat pipes includes: a first protruding end (for example, the first end 7a), which protrudes from the die main body portion in a first direction in the horizontal direction (for example, the +X direction) and functions as the protruding end; and a second protruding end (for example, the second end 7b), which protrudes from the die main body portion in a second direction opposite to the first direction (for example, the -X direction) and functions as the protruding end. The heat source unit includes: a first heat source unit (for example, the first heat source unit 8), which corresponds to the first protruding end; and a second heat source unit (for example, the second heat source unit 9), which corresponds to the second protruding end. The first heat source unit is a heating unit for heating the corresponding heat pipe or a cooling unit for cooling the corresponding heat pipe, and the second heat source unit is the heating unit or the cooling unit.

[0310] According to this structure, the device can further control the temperature gradient and heating time / cooling time when heating / cooling the workpiece.

[0311] The eighth embodiment of the present invention is based on any one of the first to seventh embodiments. The heat source unit includes a heat source main body portion (for example, the first clamping members 80, 81, the second clamping members 90, 91) for arranging a plurality of the abutting portions. The abutment switching portion moves the heat source main body portion, so that the plurality of abutting portions abut against the protruding end portion together or leave the protruding end portion together.

[0312] According to this structure, the structures of the first clamping member and the second clamping member can be simplified.

[0313] The ninth embodiment of the present invention is based on any one of the first to seventh embodiments. The plurality of heat pipes include a first heat pipe (for example, the heat pipe 71) and a second heat pipe (for example, the heat pipes 72 to 75). The plurality of abutting portions include: a first abutting portion (for example, the abutting portions 80b1, 80b6, 81b1, 81b6), which corresponds to the protruding end portion (for example, the first ends 7a1, 7a6) of the first heat pipe; and a second abutting portion (for example, the abutting portions 80b2 to 80b5, 81b2 to 81b5), which corresponds to the protruding end portion (for example, the first ends 7a2 to 7a5) of the second heat pipe. The first abutting portion and the second abutting portion can move independently of each other.

[0314] According to this structure, different temperature controls can be performed on the first heat pipe and the second heat pipe.

[0315] In the tenth embodiment of the present invention, based on the ninth embodiment, when viewed from the up-and-down direction, the mold main body portion includes a first region (for example, the first region A11) and a second region (for example, the second region A12) that performs temperature control different from that of the first region. The first heat pipe is disposed in the first region, the second heat pipe is disposed in the second region, and the contact switching portion switches between the contact and the separation of the first contact portion and the second contact portion at different timings.

[0316] According to this structure, different temperature controls can be performed in the first region and the second region.

[0317] In the eleventh embodiment of the present invention, based on the first embodiment, the first mold unit (for example, the heating mold unit 40Z, the cooling mold unit 41Z) includes a plurality of first heating sources (for example, the heating source 40c) or a plurality of first cooling sources (for example, the cooling source 41b) fixed to the mold main body portion. The plurality of heat pipes (for example, the heat pipes 7, 7Z) are disposed at positions above the plurality of first heating sources or the plurality of first cooling sources. In the up-and-down direction, the region of the mold main body portion where the plurality of first heating sources or the plurality of first cooling sources are disposed functions as the first mold unit, and in the up-and-down direction, the region of the mold main body portion where the plurality of heat pipes are disposed functions as the second mold unit.

[0318] According to this structure, complex temperature control can be performed on the workpiece, and the temperature change rate during heating and cooling of the workpiece W can be controlled according to the purpose.

[0319] In the twelfth embodiment of the present invention, based on the first embodiment, the second mold unit (for example, the second mold unit 5) is separated from the first mold unit (for example, the first mold unit 4), and the mold main body portion can move relative to the first mold unit in the horizontal direction. When the workpiece is not heated or cooled, the mold main body portion moves relatively from the processing position above the first mold unit to a standby position separated from the processing position in the horizontal direction.

[0320] According to this structure, the device of the present invention can control the temperature change rate and the heating time / cooling time during heating / cooling of the workpiece by selecting whether to use the second mold unit.

[0321] In the 13th embodiment of the present invention, based on the 1st embodiment, the 1st die unit includes a plurality of 1st heating sources (e.g., heating source 40c) or a plurality of 1st cooling sources (e.g., cooling source 41b), the shape of the 1st heating source or the 1st cooling source is linear, the plurality of 1st heating sources are arranged parallel to each other respectively, or the plurality of 1st cooling sources are arranged parallel to each other respectively, when viewed from the vertical direction, the plurality of heat pipes are arranged parallel to each other in a manner orthogonal or parallel to the 1st heating source or the 1st cooling source.

[0322] According to this structure, when the heat pipe is not heated or cooled by the 1st heat source unit or the 2nd heat source unit, the temperature uniformity of the main body portion is improved.

Claims

1. A pressurizing device for pressurizing a workpiece, wherein, the pressurizing device has: a first mold unit disposed at a position below the workpiece and capable of heating or cooling the workpiece; and a second mold unit capable of heating or cooling the workpiece together with the first mold unit, the second mold unit includes: a plurality of heat pipes; a mold main body to which the plurality of heat pipes are fixed, and when the workpiece is being heated or cooled, the mold main body is disposed between the workpiece and the first mold unit; and a heat source unit capable of heating or cooling the corresponding heat pipes among the plurality of heat pipes, each of the heat pipes has a protruding end portion protruding horizontally from the mold main body, the heat source unit includes: a plurality of abutting portions capable of moving relative to each of the protruding end portions and capable of abutting against the corresponding protruding end portions; and an abutting switching portion that switches between abutting the abutting portion against the protruding end portion and separating from the protruding end portion, the abutting switching portion causes the abutting portion to abut against the protruding end portion when the second mold unit starts heating or cooling the workpiece, and causes the abutting portion to separate from the protruding end portion when the second mold unit ends heating or cooling the workpiece.

2. The pressurizing device according to claim 1, wherein, the second mold unit includes a temperature measuring device capable of measuring the temperature of the mold main body, the abutting switching portion switches between the abutting and the separation of the abutting portion according to the measurement result of the temperature measuring device.

3. The pressurizing device according to claim 2, wherein, the first mold unit includes a heating mold unit for heating the workpiece, the heat source unit includes a cooling source for cooling the heat pipes or a heating source for heating the heat pipes, the abutting switching portion switches between the abutting and the separation of the abutting portion so that the workpiece is heated according to a specified temperature curve.

4. The pressurizing device according to claim 2, wherein, the first mold unit includes a cooling mold unit for cooling the workpiece, the heat source unit includes a cooling source for cooling the heat pipes or a heating source for heating the heat pipes, the abutting switching portion switches between the abutting and the separation of the abutting portion so that the workpiece is cooled according to a specified temperature curve.

5. The pressurizing device according to claim 2, wherein, the first mold unit includes a heating mold unit for heating the workpiece or a cooling mold unit for cooling the workpiece, the heat source unit includes: a heating source for heating the heat pipes; a cooling source for cooling the heat pipes; and a heat source switching portion that switches between the heating source and the cooling source, the heat source switching portion switches between the heating source and the cooling source so that the workpiece is heated or cooled according to a specified temperature curve.

6. The pressurizing device according to claim 1, wherein, the heat source unit includes: a heating unit for heating the corresponding heat pipes; a cooling unit for cooling the corresponding heat pipes; and a unit switching portion that switches between the heating unit and the cooling unit, When the heat pipe is heated, the unit switching part switches between the heating unit and the cooling unit so that the abutting part of the heating unit can abut against the corresponding protruding end part. When the heat pipe is cooled, the unit switching part switches between the heating unit and the cooling unit so that the abutting part of the cooling unit can abut against the corresponding protruding end part.

7. The pressing device according to claim 1, wherein Each of the heat pipes includes: A first protruding end part that protrudes from the mold main body part in a first direction in the horizontal direction and functions as the protruding end part; and A second protruding end part that protrudes from the mold main body part in a second direction opposite to the first direction and functions as the protruding end part. The heat source unit includes: A first heat source unit corresponding to the first protruding end part; and A second heat source unit corresponding to the second protruding end part. The first heat source unit is a heating unit that heats the corresponding heat pipe or a cooling unit that cools the corresponding heat pipe. The second heat source unit is the heating unit or the cooling unit.

8. The pressing device according to any one of claims 1 to 7, wherein The heat source unit includes a heat source main body part for arranging a plurality of the abutting parts. The abutting switching part moves the heat source main body part, whereby a plurality of the abutting parts abut against the protruding end part together or move away from the protruding end part together.

9. The pressing device according to any one of claims 1 to 7, wherein A plurality of the heat pipes include a first heat pipe and a second heat pipe. A plurality of the abutting parts include: A first abutting part corresponding to the protruding end part of the first heat pipe; and A second abutting part corresponding to the protruding end part of the second heat pipe. The first abutting part and the second abutting part can each move independently.

10. The pressing device according to claim 9, wherein When viewed from the up-down direction, the mold main body part includes: A first area; and A second area where temperature control different from that of the first area is performed. The first heat pipe is arranged in the first area. The second heat pipe is arranged in the second area. The abutting switching part switches between the abutting and the separation of the first abutting part and the second abutting part at different times.

11. The pressing device according to claim 1, wherein The first mold unit includes a plurality of first heating sources or a plurality of first cooling sources fixed to the mold main body part. A plurality of the heat pipes are arranged at a position above the plurality of first heating sources or the plurality of first cooling sources. In the up-down direction, the area of the mold main body part where the plurality of first heating sources or the plurality of first cooling sources are arranged functions as the first mold unit. In the up-down direction, the area of the mold main body part where the plurality of heat pipes are arranged functions as the second mold unit.

12. The pressing device according to claim 1, wherein The second mold unit is separated from the first mold unit. The mold main body portion is capable of relative movement in the horizontal direction with respect to the first mold unit. When the workpiece is not heated or cooled, the mold main body portion relatively moves from a processing position above the first mold unit to a standby position separated from the processing position in the horizontal direction.

13. The pressing device according to claim 1, wherein the first mold unit includes a plurality of first heating sources or a plurality of first cooling sources, the shape of the first heating source or the first cooling source is linear, the plurality of first heating sources are respectively arranged parallel to each other, or the plurality of first cooling sources are respectively arranged parallel to each other, when viewed from the up-down direction, the plurality of heat pipes are arranged parallel to each other in a manner orthogonal or parallel to the first heating source or the first cooling source.

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