High-precision screen printing plate film thickness gauge

Abstract

The invention discloses a high-precision screen film thickness gauge, which belongs to the technical field of measuring instruments and comprises a base, a support is fixedly mounted on the base, a measuring mechanism is fixedly mounted at the end of the support, a marble slab is laid on the top of the base, and a control switch is arranged on one side of the base. A pneumatic system and a controller are connected to the other side of the machine base, a pressure regulating valve and a pressure gauge are arranged on the side face of the support, a first push rod air cylinder and a second push rod air cylinder are arranged in the measuring mechanism, a fixing frame is fixedly installed in the measuring mechanism, an output shaft of the first push rod air cylinder is connected with a first telescopic frame, and an output shaft of the second push rod air cylinder is connected with a second telescopic frame. A displacement sensor is fixedly installed in the fixing frame, the end of the displacement sensor is connected with a probe, an output shaft of the second push rod air cylinder is connected with a second telescopic frame, and the bottom of the second telescopic frame is connected with a pressing plate. According to the invention, the thickness of each thin film layer can be ensured to be within a design range, so that the performance and reliability of the device are improved.

Description

Technical Field

[0001] The present invention relates to the technical field of measuring instruments, and in particular to a high-precision screen film thickness gauge. Background Art

[0002] As a production link that requires strict thickness control such as semiconductor etching and screen preparation, photosensitive glue must achieve a thickness that fully meets the process requirements and thickness consistency. A higher-precision thickness measuring instrument is imperative. Especially in the refined production of photovoltaics and microelectronics, the film thickness has a greater impact on printing. The screen film thickness is a core parameter of printing quality, directly related to product appearance, function, and cost. By accurately controlling the film thickness, the consistency, reliability, and production efficiency of printed products can be significantly improved. Existing laser thickness gauges can measure large-sized screens or films, but have strict requirements for the reference of screens or films. There are large errors in measuring thin screens or films that are not completely flat. The accuracy of laser thickness gauges is only about 20 microns, which cannot fully meet the needs of photosensitive glue thickness measurement. Ordinary ray-type film thickness gauges have strict requirements for the measured material and the substrate material, and can only measure specific materials. The accuracy is about 10 - 100 microns, which cannot fully meet the needs of photosensitive glue thickness measurement. It is necessary to design a high-precision screen film thickness gauge to solve the problem. Summary of the Invention

[0003] Aiming at the deficiencies of the prior art, the present invention provides a high-precision screen film thickness gauge, which overcomes the deficiencies of the prior art and aims to solve the problems in the background art.

[0004] To achieve the above object, the present invention provides the following technical solution: A high-precision screen film thickness gauge, including a machine base, a bracket is fixedly installed on the machine base, and a measuring mechanism is fixedly installed at the end of the bracket. A marble plate is laid on the top of the machine base. A control switch is arranged on one side of the machine base. A pneumatic system and a controller are connected and installed on the other side of the machine base. A pressure regulating valve and a pressure gauge are arranged on the side of the bracket, and the pressure regulating valve and the pressure gauge are connected to the pneumatic system. A first push rod cylinder and a second push rod cylinder are arranged in the measuring mechanism, and a fixing frame is fixedly installed in the measuring mechanism. The output shaft of the first push rod cylinder is connected with a first telescopic frame. A displacement sensor is fixedly installed in the fixing frame. The end of the displacement sensor is connected with a probe, and the probe is fixedly connected with the first telescopic frame. The output shaft of the second push rod cylinder is connected with a second telescopic frame, and the bottom of the second telescopic frame is connected with a pressing plate.

[0005] As a preferred technical solution of the present invention, the model of the marble plate is 500MMX600MM, and an anvil is arranged in the machine base and below the measuring mechanism.

[0006] As a preferred technical solution of the present invention, the chopping board is threadedly connected to the machine base. Four jackscrews are provided at the bottom of the machine base where the chopping board is located, and the jackscrews are distributed in a circular array with the chopping board as the center. As a preferred technical solution of the present invention, there are three types of control switches, namely a power switch, a detection switch, and a zeroing switch.

[0007] As a preferred technical solution of the present invention, there are three types of controllers, namely a pneumatic interface, a communication interface, and a power interface.

[0008] As a preferred technical solution of the present invention, through grooves adapted to the first telescopic frame and the probe are provided inside the pressing plate.

[0009] As a preferred technical solution of the present invention, the fixing frame is slidably connected to the pressing plate. A lifting groove adapted to the pressing plate is provided inside the fixing frame, and a compression spring is connected between the fixing frame and the second telescopic frame.

[0010] Advantages of the present invention: This invention can adjust the height and flatness of the chopping board through jackscrews, thereby improving the accuracy to 0.1 micrometers and the repeat positioning accuracy to 0.02 micrometers. During the semiconductor manufacturing process, it can ensure that the thickness of each thin film layer is within the designed range, thereby improving the performance and reliability of the device. Moreover, it can detect stencils or thin films in the range of 500MMX600MM, including hard materials and soft materials such as wire meshes. At the same time, it uses contact measurement, has a large application scenario range, low requirements for material characteristics, and ensures the accuracy and reliability of the measurement results. Description of the drawings

[0011] Figure 1 It is a front 3D structural schematic diagram of the present invention; Figure 2 It is a back 3D structural schematic diagram of the present invention; Figure 3 It is a 3D structural schematic diagram of the measuring mechanism in the present invention; Figure 4 It is a front structural schematic diagram of the measuring mechanism in the present invention; Figure 5 It is a side structural schematic diagram of the measuring mechanism in the present invention.

[0012] In the figure: 1, machine base; 2, bracket; 3, measuring mechanism; 4, marble slab; 5, control switch; 6, pneumatic system; 7, controller; 8, pressure regulating valve; 9, pressure gauge; 10, first push rod cylinder; 11, second push rod cylinder; 12, fixing frame; 13, first telescopic frame; 14, displacement sensor; 15, probe; 16, second telescopic frame; 17, pressing plate; 18, compression spring. Detailed implementation manners

[0013] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention. Embodiment

[0014] Please refer to Figure 1 - Figure 5 A high-precision screen film thickness gauge, comprising a machine base 1, a bracket 2 is fixedly installed on the machine base 1, and a measuring mechanism 3 is fixedly installed at the end of the bracket 2. A marble plate 4 is laid on the top of the machine base 1, and the model of the marble plate 4 is 500MMX600MM. An anvil is arranged below the measuring mechanism 3 inside the machine base 1. The anvil is threadedly connected to the machine base (1). Four jackscrews are arranged at the bottom of the machine base (1) below the anvil, and the jackscrews are distributed in an annular array with the anvil as the center. A control switch 5 is arranged on one side of the machine base 1. There are three types of control switches 5, namely a power switch, a detection switch and a zeroing switch. A pneumatic system 6 and a controller 7 are connected and installed on the other side of the machine base 1. There are three types of controllers 7, namely a pneumatic interface, a communication interface and a power interface. A pressure regulating valve 8 and a pressure gauge 9 are arranged on the side of the bracket 2, and the pressure regulating valve 8 and the pressure gauge 9 are connected to the pneumatic system 6. A first push rod cylinder 10 and a second push rod cylinder 11 are arranged inside the measuring mechanism 3, and a fixed frame 12 is fixedly installed inside the measuring mechanism 3. The output shaft of the first push rod cylinder 10 is connected to a first telescopic frame 13. A displacement sensor 14 is fixedly installed inside the fixed frame 12. The end of the displacement sensor 14 is connected to a probe 15, and the probe 15 is fixedly connected to the first telescopic frame 13. The output shaft of the second push rod cylinder 11 is connected to a second telescopic frame 16, and a pressing plate 17 is connected to the bottom of the second telescopic frame 16. A through groove adapted to the first telescopic frame 13 and the probe 15 is opened in the pressing plate 17. A lifting groove adapted to the pressing plate 17 is opened in the fixed frame 12, and a compression spring 18 is connected between the fixed frame 12 and the second telescopic frame 16.

[0015] Working principle: Before use, the anvil needs to be debugged. Adjust the height of the four setscrews by rotation, determine the angle through the height difference, then rotate the anvil so that its bottom touches the setscrews, making the height and angle of the anvil reach the required range. Then use a level to confirm. Press the power switch to start the instrument, and then press the zeroing switch to calibrate the instrument. Place the stencil or film on the marble slab 4, and place the part to be detected in the anvil area. Press the detection switch to make the instrument detect the thickness of the part. After the detection switch is pressed, the pressure plate 17 is driven downward by the second push rod cylinder 11 to press and flatten the stencil or film, and the probe 15 is driven downward by the first push rod cylinder 10 until it detects the stencil or film. After the displacement sensor 14 measures the thickness, the pressure plate 17 and the probe 15 return to their original positions. The system records the data and transmits it to the customer system through the communication interface or directly displays the data through the display window of the displacement sensor 14.

[0016] The above are only the preferred embodiments of the present invention and are not used to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A high-precision screen film thickness gauge, comprising a machine base (1), characterized in that, A bracket (2) is fixedly installed on the machine base (1), and a measuring mechanism (3) is fixedly installed at the end of the bracket (2). A marble slab (4) is laid on the top of the machine base (1). A control switch (5) is arranged on one side of the machine base (1). A pneumatic system (6) and a controller (7) are connected and installed on the other side of the machine base (1). A pressure regulating valve (8) and a pressure gauge (9) are arranged on the side of the bracket (2), and the pressure regulating valve (8) and the pressure gauge (9) are connected to the pneumatic system (6). A first push rod cylinder (10) and a second push rod cylinder (11) are arranged in the measuring mechanism (3), and a fixing frame (12) is fixedly installed in the measuring mechanism (3). The output shaft of the first push rod cylinder (10) is connected with a first telescopic frame (13). A displacement sensor (14) is fixedly installed in the fixing frame (12). The end of the displacement sensor (14) is connected with a probe (15), and the probe (15) is fixedly connected with the first telescopic frame (13). The output shaft of the second push rod cylinder (11) is connected with a second telescopic frame (16), and a pressing plate (17) is connected to the bottom of the second telescopic frame (16).

2. The high-precision screen film thickness gauge according to claim 1, wherein The model of the marble slab (4) is 500MMX600MM. An anvil is arranged below the measuring mechanism (3) on the machine base (1).

3. The high-precision screen film thickness gauge according to claim 2, characterized in that, The anvil is threadedly connected to the machine base (1). Four jackscrews are arranged at the bottom of the machine base (1) below the anvil, and the jackscrews are distributed in an annular array with the anvil as the center.

4. The high-precision screen film thickness gauge according to claim 1, wherein There are three types of the control switch (5), namely a power switch, a detection switch and a zeroing switch.

5. The high-precision screen film thickness gauge according to claim 1, wherein There are three types of the controller (7), namely a pneumatic interface, a communication interface and a power interface.

6. The high-precision screen film thickness gauge according to claim 1, wherein, A through groove adapted to the first telescopic frame (13) and the probe (15) is formed in the pressing plate (17).

7. The high-precision screen film thickness gauge according to claim 1, characterized in that, The fixing frame (12) is slidably connected to the pressing plate (17). A lifting groove adapted to the pressing plate (17) is formed in the fixing frame (12), and a compression spring (18) is connected between the fixing frame (12) and the second telescopic frame (16).

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