Hyper-hemisphere surface topography measuring device and measuring method thereof

Abstract

The invention relates to a hyper-hemisphere surface topography measuring device which comprises an air floatation rotary table, an air floatation pendulum shaft and an aligning tool. A clamp is arranged on a pendulum shaft of the air floating pendulum shaft, a displacement sensor is arranged on the clamp, and the axis of the air floating pendulum shaft is perpendicular to the axis of the displacement sensor. The axis of the displacement sensor and the axis of the air floating rotary table are located in the same plane. The aligning tool comprises a connecting base, a connecting plate and four screws, the connecting base is fixed to a rotary table of the air-floating rotary table, an ejector rod is arranged in the center of the top of the connecting base, an arc-shaped groove is formed in the bottom of the inner side of the supporting base, the top of the ejector rod is located in the arc-shaped groove, and a gap is formed between the bottom of the connecting plate and the top of the connecting base; threaded holes are formed in the four corners of the connecting base, through holes corresponding to the four threaded holes respectively are formed in the connecting plate, and each screw penetrates through the corresponding through hole and the corresponding threaded hole. According to the invention, precise and efficient measurement of the three-dimensional surface morphology of the hyper-hemisphere can be realized, and the processing precision of ball parts can be improved.

Description

Technical Field

[0001] The present invention relates to the technical fields of mechanical engineering and precision measurement technology, and in particular to a measurement device and a measurement method for the surface topography of a super hemisphere. Background Art

[0002] Super hemisphere ball parts are widely used, such as optical metrology balls, bearing balls, artificial joint balls, ball valves, etc. Excessive peak-valley values of the three-dimensional surface topography of ball parts will seriously affect the performance of equipment and the movement of human joints. The detection of the three-dimensional surface topography can not only evaluate the quality of the processing technology, but also guide the improvement of the processing technology and continuously improve the processing accuracy of ball parts. At present, the detection of the three-dimensional surface topography of ball parts usually uses a spherical interferometer and a roundness instrument, which have certain defects. Due to the limitations of the three-dimensional surface topography measurement method and the performance of the measurement device, the improvement of the accuracy of ball parts is restricted.

[0003] The spherical interferometer uses a standard spherical mirror to detect the interference fringes between the standard spherical mirror and the measured ball, and calculates the three-dimensional surface topography of the measured ball. The disadvantage is that it can only measure a local spherical crown and cannot measure the three-dimensional surface topography above the hemisphere. The roundness instrument uses an air-bearing turntable to rotate the measured ball, and can only measure the two-dimensional roundness error of the cross-section perpendicular to the axis of the turntable. It is necessary to change the attitude of the measured ball to measure the roundness error of several cross-sections, but it cannot reflect the three-dimensional surface topography of the sphere.

[0004] Existing measurement devices cannot conveniently and quickly measure the three-dimensional surface topography of spheres.

[0005] For this reason, we propose a measurement device and a measurement method for the surface topography of a super hemisphere. Summary of the Invention

[0006] The applicant of the present invention aims at the above-mentioned disadvantages in the existing production technology, and provides a measurement device and a measurement method for the surface topography of a super hemisphere, so as to realize the precise and efficient measurement of the three-dimensional surface topography of the super hemisphere, and help to improve the processing accuracy of ball parts.

[0007] The technical solution adopted by the present invention is as follows:

[0008] A measurement device for the surface topography of a super hemisphere, comprising:

[0009] An air-bearing turntable;

[0010] An air-bearing swing axis, arranged on a sliding table, and the sliding table can adjust the height of the air-bearing swing axis;

[0011] An alignment tooling, fixed on the turntable of the air-bearing turntable;

[0012] A measured ball, placed on the alignment tooling;

[0013] Among them, a fixture is provided on the pendulum shaft of the air-floating pendulum shaft, and a displacement sensor is provided on the fixture. The axis of the air-floating pendulum shaft is perpendicular to the axis of the displacement sensor; the axis of the displacement sensor and the axis of the air-floating turntable are in the same plane;

[0014] The centering tooling includes a connecting seat, a connecting plate and four screws. The connecting seat is fixed on the turntable of the air-floating turntable. A ejector rod is provided at the center of the top of the connecting seat. The top of the ejector rod is arc-shaped. The connecting plate is sleeved on the support seat. An arc-shaped groove is provided at the inner bottom of the support seat. The top of the ejector rod is located in the arc-shaped groove. There is a gap between the bottom of the connecting plate and the top of the connecting seat; threaded holes are provided at the four corners of the connecting seat, through holes corresponding to the four threaded holes are provided on the connecting plate, and each screw passes through the through hole and the threaded hole.

[0015] Its further feature lies in that:

[0016] The air-floating turntable is arranged on one side of the top of the base. A column is arranged on the other side of the top of the base. The sliding table is fixed on the column. A differential head is arranged on the column. The differential head is arranged below the air-floating pendulum shaft and is used for limiting the air-floating pendulum shaft.

[0017] The four screws are respectively a first screw, a second screw, a third screw and a fourth screw.

[0018] This application also provides a method for measuring the surface topography of a super hemisphere, including the following steps:

[0019] The first step: Place the measured ball on the support seat;

[0020] The second step: The air-floating pendulum shaft drives the displacement sensor to rotate a certain angle towards the side of the first screw and the second screw;

[0021] The third step: The air-floating turntable drives the measured ball to rotate through the centering tooling, and measures the distance between the displacement sensor and the measured ball through the displacement sensor; when the data measured by the displacement sensor is not a fixed value, adjust the angle of the connecting plate by screwing the screw, and repeat the above operation until the data measured by the displacement sensor is a fixed value;

[0022] The fourth step: Adjust the height of the air-floating pendulum shaft through the sliding table so that the axis of the air-floating pendulum shaft is close to coinciding with the axis of the measured ball;

[0023] The fifth step: The air-floating pendulum shaft drives the displacement sensor to rotate through the fixture, and measures the distance between the displacement sensor and the measured ball through the displacement sensor; when the data measured by the displacement sensor is not a fixed value, adjust the height of the air-floating pendulum shaft through the sliding table, and repeat the above operation until the data measured by the displacement sensor is a fixed value;

[0024] Step 6: The air-floating swing shaft drives the displacement sensor to rotate to a specified angle through a fixture, and the air-floating turntable drives the ball under test to rotate to a specified angle through an alignment tooling. The two angle values and the distance between the displacement sensor and the ball under test are collected in real time. Repeat the above measurement operations to obtain dense three-dimensional measurement points.

[0025] Step 7: Using the least squares method, fitting these measurement points can obtain an ideal spherical surface.

[0026] Step 8: Use grids and colors to identify the positions of the measurement points relative to the ideal spherical surface, reflecting the three-dimensional surface topography of the spherical surface with peaks and valleys.

[0027] In Step 5, the air-floating swing shaft drives the displacement sensor to start rotating from the highest position of the displacement sensor. As the displacement sensor rotates, the data measured by the displacement sensor gradually decreases, and it is necessary to move the air-floating swing shaft downward through the sliding table.

[0028] In Step 5, the air-floating swing shaft drives the displacement sensor to start rotating from the highest position of the displacement sensor. As the displacement sensor rotates, the data measured by the displacement sensor gradually increases, and it is necessary to move the air-floating swing shaft upward through the sliding table.

[0029] In Step 4, the air-floating turntable rotates clockwise for one circle. When the measured value of the displacement sensor gradually increases from the initial X, then gradually decreases back to X, it is necessary to adjust the ball under test to the side of the third screw and the fourth screw.

[0030] In Step 4, the air-floating turntable rotates clockwise for one circle. When the measured value of the displacement sensor gradually decreases from the initial X, then gradually increases back to X, it is necessary to adjust the ball under test to the side of the first screw and the second screw.

[0031] In Step 4, the air-floating turntable rotates clockwise for one circle. When the measured value of the displacement sensor gradually decreases from the initial X, then gradually increases back to X, continues to increase, and then decreases to X again, it is necessary to adjust the ball under test to the side of the second screw and the third screw.

[0032] In Step 4, the air-floating turntable rotates clockwise for one circle. When the measured value of the displacement sensor gradually increases from the initial X, then gradually decreases back to X, continues to decrease, and then increases to X again, it is necessary to adjust the ball under test to the side of the first screw and the fourth screw.

[0033] The beneficial effects of the present invention are as follows:

[0034] The structure of the present invention is compact and reasonable, and it is easy to operate. By using an alignment tooling to adjust the position of the measured ball, the center of the measured ball coincides with the axis of the air-bearing turntable. By using a slide table to adjust the height of the air-bearing swing shaft, the axis of the air-bearing swing shaft coincides with the center of the measured ball. The air-bearing swing shaft drives the displacement sensor to rotate to a specified angle through a fixture, and the air-bearing turntable drives the measured ball to rotate to a specified angle through the alignment tooling. The two angle values and the distance between the displacement sensor and the measured ball are collected in real time. By repeating the above measurement operations, dense three-dimensional measurement points are obtained. The air-bearing swing shaft can drive the displacement sensor to swing at an angle exceeding 180°. Therefore, the super hemisphere of the measured ball can be measured, and the three-dimensional measurement points of the super hemisphere are obtained. By using the least square method, an ideal spherical surface can be obtained by fitting these measurement points. By using grids and colors to identify the positions of the measurement points relative to the ideal spherical surface, a three-dimensional spherical surface topography reflecting peaks and valleys can be obtained. It can achieve precise and efficient measurement of the three-dimensional surface topography of the super hemisphere, which helps to improve the machining accuracy of spherical parts.

[0035] Meanwhile, the present invention also has the following advantages:

[0036] (1) Place the measured ball on the support seat, rotate the air-bearing swing shaft to a certain angle, and then drive the displacement sensor to rotate to a certain angle through a fixture. The air-bearing turntable works, drives the measured ball to rotate through the alignment tooling, and judges whether the center of the measured ball coincides with the axis of the air-bearing turntable according to the data measured by the displacement sensor. When the data measured by the displacement sensor is not a fixed value, adjust the angle of the connecting plate by turning the screw, then tighten the screw, and repeat rotating the air-bearing turntable for measurement until the data measured by the displacement sensor is a fixed value, then the center of the measured ball coincides with the axis of the air-bearing turntable.

[0037] (2) Adjust the height of the air-bearing swing shaft through the slide table to make the axis of the air-bearing swing shaft approximately coincide with the axis of the measured ball. The air-bearing swing shaft drives the displacement sensor to rotate through a fixture. When the data measured by the displacement sensor is not a fixed value, adjust the height of the air-bearing swing shaft through the slide table and then conduct measurement until the data measured by the displacement sensor is a fixed value, and the axis of the air-bearing swing shaft coincides with the axis of the measured ball. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Figure 1 is a schematic structural diagram of the present invention.

[0039] Figure 2 is a schematic diagram of the alignment tooling of the present invention.

[0040] Figure 3 is Figure 2 a schematic diagram of the A-A cross-section in

[0041] Figure 4 is Figure 3 an enlarged schematic diagram at B in

[0042] Figure 5 Schematic diagrams of the connecting plate, support seat, screw, etc. of the present invention.

[0043] Wherein: 1. Base; 2. Air-bearing turntable; 3. Centering tooling; 4. Measured ball; 5. Displacement sensor; 6. Fixture; 7. Slide table; 8. Air-bearing swing shaft; 9. Micrometer head; 10. Column.

[0044] 301. Connecting seat; 302. Connecting plate; 303. Through hole; 304. Threaded hole; 305. Screw; 306. Support seat; 307. Arc-shaped groove; 308. Ejector rod.

[0045] 3051. First screw; 3052. Second screw; 3053. Third screw; 3054. Fourth screw. Detailed implementation manners

[0046] The following combines with the drawings to illustrate the detailed implementation manners of the present invention.

[0047] As Figures 1-5 shown, a super-hemisphere surface topography measuring device includes a base 1, an air-bearing turntable 2, a centering tooling 3, a displacement sensor 5, a fixture 6, a slide table 7, an air-bearing swing shaft 8, a micrometer head 9 and a column 10. An air-bearing turntable 2 is arranged on one side of the top of the base 1, a column 10 is arranged on the other side of the top of the base 1, a slide table 7 is arranged on the top of the column 10, an air-bearing swing shaft 8 is arranged on the slide table 7, the air-bearing swing shaft 8 is driven by the slide table 7 to move up and down, a micrometer head 9 is arranged on the column 10, and the micrometer head 9 is arranged below the air-bearing swing shaft 8.

[0048] In one embodiment, the slide table 7 includes a frame, a motor is arranged on the frame, the motor is connected with a lead screw through a coupling, the other end of the lead screw is rotatably arranged on the frame, a nut is arranged on the lead screw in a matching manner, the nut is fixedly connected with the air-bearing swing shaft 8, a linear guide rail is arranged on the frame, a slider is arranged on the linear guide rail in a matching manner, and the slider is fixedly connected with the air-bearing swing shaft 8. The slide table 7 further includes an electromagnetic brake, and the lead screw can be locked by the electromagnetic brake. When the motor works, the motor drives the lead screw to rotate through the coupling, and the lead screw cooperates with the nut to drive the air-bearing swing shaft 8 to move up and down along the linear guide rail.

[0049] The slide table 7 can also be other types of lifting structures.

[0050] In one embodiment, the air-floating pendulum shaft 8 includes a pendulum shaft, which is arranged in a bearing, the pendulum shaft is precisely matched with the inner ring of the bearing, and the outer ring of the bearing is arranged on a base to provide support; the outer ring of the bearing is provided with air inlet and outlet holes for introducing and discharging compressed air. An air cavity is provided between the inner ring and the outer ring of the bearing, and air holes are provided on the wall of the air cavity. Compressed air is ejected through the air cavity to form an air film to support the pendulum shaft. The driving device is connected to the pendulum shaft, and the pendulum shaft is driven to rotate by the driving device, and compressed air is provided by the air supply system. The air supply system includes an air source, and the air source passes through the air pipe and the inlet and outlet holes of the bearing.

[0051] The air-floating pendulum shaft 8 may also be of other possible structures.

[0052] In one embodiment, the differential head 9 includes a screw, a sleeve, a differential cylinder, a fixed sleeve, and a fastening screw. The sleeve is sleeved in the middle part of the screw for support and guidance. An adjusting nut is provided at the rear end of the sleeve for adjusting the axial position and preload of the screw. The sleeve is provided in the fixed sleeve, and the sleeve is connected to the fixed sleeve. The differential cylinder is sleeved on the fixed sleeve and can rotate axially around the fixed sleeve. The differential cylinder is provided with scale lines, which are used in conjunction with the scale lines on the fixed sleeve. The differential cylinder is fixed by the fastening screw.

[0053] The air-floating pendulum shaft 8 is limited by the differential head 9. When the axis of the air-floating pendulum shaft 8 coincides with the center of the ball 4 to be measured, the air-floating pendulum shaft 8 is limited by the differential head 9. When the slide 7 drives the air-floating pendulum shaft 8 to rise and then fall,

[0054] A clamp 6 is fixed on the swing shaft of the air-floating swing shaft 8, and the displacement sensor 5 is fixed by the clamp 6. The axis of the displacement sensor 5 intersects and is perpendicular to the axis of the air-floating swing shaft 8. The axis of the swing shaft of the air-floating swing shaft 8 intersects and is perpendicular to the axis of the air-floating turntable 2. The axis of the displacement sensor 5 and the axis of the air-floating turntable 2 are in the same plane.

[0055] In one embodiment, the air-floating turntable 2 includes an air-floating bearing system, a driving system, a turntable and a support frame. The air-floating bearing system includes an axial bearing and an axial bearing. The axial bearing bears the axial load of the rotating shaft to ensure the stability of the rotating shaft in the axial direction. The inner surfaces of the radial bearing and the axial bearing are provided with evenly distributed small holes. When high-pressure gas enters the gap between the bearing and the rotating shaft through these small holes, a uniform air film is formed to suspend the rotating shaft, and compressed air is provided to the radial bearing and the axial bearing through the air source. The driving system can be a direct drive motor, which drives the rotating shaft through the direct drive motor, and the axial bearing and the axial bearing are fixed in the rotating shaft and the support frame, and the turntable is fixedly connected to the rotating shaft. When the direct drive motor is working, it will drive the turntable to rotate.

[0056] The centering tooling 3 is arranged on the turntable of the air-bearing turntable 2. The centering tooling 3 includes a connecting seat 301, a connecting plate 302, four screws 305, a support seat 306 and a ejector rod 308. The connecting seat 301 is fixedly connected to the turntable of the air-bearing turntable 2. The connecting plate 302 is arranged above the connecting seat 301, and the connecting plate 302 is sleeved outside the support seat 306. The lower part of the support seat 306 is conical, the bottom of the support seat 306 is hollow, the upper part of the support seat 306 is tubular and is used to support the ball under test 4. An arc-shaped groove 307 is arranged at the inner bottom of the support seat 306. A ejector rod 308 is arranged at the center of the top of the connecting seat 301. The top of the ejector rod 308 is arc-shaped, and the top of the ejector rod 308 is arranged in the arc-shaped groove 307 of the support seat 306. Threaded holes 304 are arranged at the four corners of the connecting seat 301, through holes 303 corresponding to the threaded holes 304 are arranged at the four corners of the connecting plate 302, the size of the through holes 303 is larger than that of the threaded holes 304, and the four screws 305 are respectively connected to the four threaded holes 304, and each screw 305 passes through a through hole 303. There is a gap between the bottom of the connecting plate 302 and the top of the connecting seat 301.

[0057] When adjusting the position of the ball under test 4 on the support seat 306 through the four screws 305, the arc-shaped groove 307 of the support seat 306 is always above the ejector rod 308, so that the support seat 306 can rotate along the top of the ejector rod 308.

[0058] The ball under test 4 is placed on the centering tooling 3.

[0059] Further, the ball under test 4 is placed on the support seat 306.

[0060] As Figure 5 shown, the four screws 305 are respectively a first screw 3051, a second screw 3052, a third screw 3053 and a fourth screw 3054.

[0061] When it is necessary to adjust the ball under test 4 to the side of the first screw 3051 and the second screw 3052, the third screw 3053 and the fourth screw 3054 are screwed up a little, and then the first screw 3051 and the second screw 3052 are tightened downwards, so that the support seat 306 rotates along the top of the ejector rod 308 towards the first screw 3051 and the second screw 3052, thereby driving the ball under test 4 to move towards the side of the first screw 3051 and the second screw 3052.

[0062] When the ball under test 4 needs to be adjusted in other directions, refer to the above method to adjust the position of the ball under test 4.

[0063] In specific implementation, the ball 4 to be measured is placed on the support base 306, and the air-floating swing shaft 8 rotates to a certain angle. Then, the displacement sensor 5 is driven by the fixture 6 to rotate to a certain angle. The air-floating turntable 2 operates, and drives the ball 4 to be measured to rotate through the centering tooling 3. According to the data measured by the displacement sensor 5, it is judged whether the center of the ball 4 to be measured coincides with the axis of the air-floating turntable 2. When the data measured by the displacement sensor 5 is not a fixed value, the angle of the connecting plate 302 is adjusted by screwing the screw 305, and then the screw 305 is tightened. The air-floating turntable 2 is rotated repeatedly for measurement until the data measured by the displacement sensor 5 is a fixed value, then the center of the ball 4 to be measured coincides with the axis of the air-floating turntable 2;

[0064] The height of the air-floating swing shaft 8 is adjusted through the slide table 7 so that the axis of the air-floating swing shaft 8 is approximately coincident with the axis of the ball 4 to be measured. The air-floating swing shaft 8 drives the displacement sensor 5 to rotate through the fixture 6. When the data measured by the displacement sensor 5 is not a fixed value, the height of the air-floating swing shaft 8 is adjusted through the slide table 7, and then measurement is carried out until the data measured by the displacement sensor 5 is a fixed value, and the axis of the air-floating swing shaft 8 coincides with the axis of the ball 4 to be measured.

[0065] The air-floating swing shaft 8 controls the displacement sensor 5 to rotate to a specified angle through the fixture 6, and the air-floating turntable 2 drives the ball 4 to be measured to rotate to a specified angle through the centering tooling 3. The two angle values and the distance between the displacement sensor 5 and the ball 4 to be measured are collected in real time. The above measurement operation is repeated to obtain dense three-dimensional measurement points. The air-floating swing shaft 8 can drive the displacement sensor 5 to swing an angle exceeding 180°. Therefore, the super hemisphere of the ball 4 to be measured can be measured to obtain three-dimensional measurement points of the super hemisphere. Using the least squares method, fitting these measurement points can obtain an ideal spherical surface. Marking the position of the measurement points relative to the ideal spherical surface with grids and colors can obtain a three-dimensional spherical surface topography reflecting peaks and valleys. It can realize precise and efficient measurement of the three-dimensional surface topography of the super hemisphere, which helps to improve the machining accuracy of spherical parts.

[0066] A super hemisphere surface topography measuring device and its measuring method include the following steps:

[0067] The first step: Place the ball 4 to be measured on the support base 306;

[0068] The second step: The air-floating swing shaft 8 drives the displacement sensor 5 to rotate a certain angle toward the side of the first screw 3051 and the second screw 3052;

[0069] The third step: The air-floating turntable 2 drives the ball 4 to be measured to rotate through the centering tooling 3, and the distance between the displacement sensor 5 and the ball 4 to be measured is measured through the displacement sensor 5; when the data measured by the displacement sensor 5 is not a fixed value, the angle of the connecting plate 302 is adjusted by screwing the screw 305, and the above operation is repeated until the data measured by the displacement sensor 5 is a fixed value;

[0070] Step 4: Adjust the height of the air-bearing swing shaft 8 through the slide table 7 so that the axis of the air-bearing swing shaft 8 is approximately coincident with the axis of the measured ball 4;

[0071] Step 5: The air-bearing swing shaft 8 drives the displacement sensor 5 to rotate through the fixture 6, and the distance between the displacement sensor 5 and the measured ball 4 is measured by the displacement sensor 5; when the data measured by the displacement sensor 5 is not a fixed value, adjust the height of the air-bearing swing shaft 8 through the slide table 7 and repeat the above operation until the data measured by the displacement sensor 5 is a fixed value;

[0072] Step 6: The air-bearing swing shaft 8 controls the displacement sensor 5 to rotate to a specified angle through the fixture 6, and the air-bearing turntable 2 drives the measured ball 4 to rotate to a specified angle through the centering tooling 3, and the two angle values and the distance between the displacement sensor 5 and the measured ball 4 are collected in real time. Repeat the above measurement operation to obtain dense three-dimensional measurement points;

[0073] Step 7: Using the least squares method, fitting these measurement points can obtain an ideal spherical surface;

[0074] Step 8: Use grids and colors to identify the positions of the measurement points relative to the ideal spherical surface to reflect the three-dimensional surface topography of the spherical surface with peaks and valleys.

[0075] In Step 5, the air-bearing swing shaft 8 drives the displacement sensor 5 to start rotating from the highest position of the displacement sensor 5. As the displacement sensor 5 rotates, the data measured by the displacement sensor 5 gradually decreases, and it is necessary to move the air-bearing swing shaft 8 downward through the slide table 7.

[0076] In Step 5, the air-bearing swing shaft 8 drives the displacement sensor 5 to start rotating from the highest position of the displacement sensor 5. As the displacement sensor 5 rotates, the data measured by the displacement sensor 5 gradually increases, and it is necessary to move the air-bearing swing shaft 8 upward through the slide table 7.

[0077] The distribution of the first screw 3051, the second screw 3052, the third screw 3053 and the fourth screw 3054 is as Figure 5 shown;

[0078] In Step 4, when the air-bearing turntable 2 rotates clockwise for one circle, when the measured value of the displacement sensor 5 gradually increases from the initial X, then gradually decreases and returns to X, it is necessary to adjust the measured ball 4 toward the third screw 3053 and the fourth screw 3054;

[0079] In Step 4, when the air-bearing turntable 2 rotates clockwise for one circle, when the measured value of the displacement sensor 5 gradually decreases from the initial X, then gradually increases and returns to X, it is necessary to adjust the measured ball 4 toward the first screw 3051 and the second screw 3052;

[0080] In the fourth step, the air-bearing turntable 2 rotates clockwise for one full circle. When the measured value of the displacement sensor 5 gradually decreases from the initial X, then gradually increases back to X, continues to increase, and then decreases to X again, the measured ball 4 needs to be adjusted towards the side of the second screw 3052 and the third screw 3053.

[0081] In the fourth step, the air-bearing turntable 2 rotates clockwise for one full circle. When the measured value of the displacement sensor 5 gradually increases from the initial X, then gradually decreases back to X, continues to decrease, and then increases to X again, the measured ball 4 needs to be adjusted towards the side of the first screw 3051 and the fourth screw 3054.

[0082] It is possible to quickly determine which side to adjust the position of the measured ball 4 based on the data measured by the displacement sensor 5. Any adjustment of the position of the measured ball 4 is achieved by adjusting the screw 305.

[0083] The above description is an explanation of the present invention, not a limitation thereof. The scope defined by the present invention is set forth in the claims, and within the protection scope of the present invention, any form of modification can be made.

Claims

1. A device for measuring the surface topography of a super hemisphere, characterized in that Comprising: An air-floating turntable (2); An air-floating swing shaft (8) arranged on a sliding table (7), and the sliding table (7) can adjust the height of the air-floating swing shaft (8); An alignment tooling (3) fixed on the turntable of the air-floating turntable (2); A ball under test (4) placed on the alignment tooling (3); Wherein, a fixture (6) is arranged on the swing shaft of the air-floating swing shaft (8), a displacement sensor (5) is arranged on the fixture (6), and the axis of the air-floating swing shaft (8) is perpendicular to the axis of the displacement sensor (5); the axis of the displacement sensor (5) is in the same plane as the axis of the air-floating turntable (2); The alignment tooling (3) includes a connecting seat (301), a connecting plate (302) and four screws (305). The connecting seat (301) is fixed on the turntable of the air-floating turntable (2). A ejector rod (308) is arranged at the center of the top of the connecting seat (301), and the top of the ejector rod (308) is arc-shaped. The connecting plate (302) is sleeved on a support seat (306), and an arc-shaped groove (307) is arranged at the inner bottom of the support seat (306). The top of the ejector rod (308) is located in the arc-shaped groove (307), and there is a gap between the bottom of the connecting plate (302) and the top of the connecting seat (301); threaded holes (304) are arranged at the four corners of the connecting seat (301), through holes (303) corresponding to the four threaded holes (304) respectively are arranged on the connecting plate (302), and each screw (305) passes through the through hole (303) and the threaded hole (304).

2. The super hemispherical surface topography measuring device according to claim 1, wherein: The air-floating turntable (2) is arranged on one side of the top of a base (1), a column (10) is arranged on the other side of the top of the base (1), the sliding table (7) is fixed on the column (10), and a micrometer head (9) is arranged on the column (10). The micrometer head (9) is arranged below the air-floating swing shaft (8) for limiting the air-floating swing shaft (8).

3. A super-hemispherical surface topography measuring device according to any one of claims 1-2, characterized in that: The four screws (305) are respectively a first screw (3051), a second screw (3052), a third screw (3053) and a fourth screw (3054).

4. A method for measuring the surface topography of a super hemisphere, using the super hemisphere surface topography measuring device according to any one of claims 1-3, characterized in that, Including the following steps: The first step: Place the ball under test (4) on the support seat (306); The second step: The air-floating swing shaft (8) drives the displacement sensor (5) to rotate a certain angle towards the side of the first screw (3051) and the second screw (3052); The third step: The air-floating turntable (2) drives the ball under test (4) to rotate through the alignment tooling (3), and measures the distance between the displacement sensor (5) and the ball under test (4) through the displacement sensor (5); when the data measured by the displacement sensor (5) is not a fixed value, adjust the angle of the connecting plate (302) by screwing the screw (305), and repeat the above operation until the data measured by the displacement sensor (5) is a fixed value; The fourth step: Adjust the height of the air-floating swing shaft (8) through the sliding table (7) so that the axis of the air-floating swing shaft (8) is approximately coincident with the axis of the ball under test (4); Step 5: The air-bearing swing shaft (8) drives the displacement sensor (5) to rotate through the fixture (6), and the distance between the displacement sensor (5) and the measured ball (4) is measured by the displacement sensor (5); when the data measured by the displacement sensor (5) is not a fixed value, the height of the air-bearing swing shaft (8) is adjusted by the slide table (7), and the above operation is repeated until the data measured by the displacement sensor (5) is a fixed value; Step 6: The air-bearing swing shaft (8) controls the displacement sensor (5) to rotate to a specified angle through the fixture (6), and the air-bearing turntable (2) drives the measured ball (4) to rotate to a specified angle through the centering tooling (3), and these two angle values and the distance between the displacement sensor (5) and the measured ball (4) are collected in real time, and the above measurement operation is repeated to obtain dense three-dimensional measurement points; Step 7: Using the least squares method, fitting these measurement points can obtain an ideal spherical surface; Step 8: Use grids and colors to identify the positions of the measurement points relative to the ideal spherical surface, reflecting the three-dimensional surface topography of the spherical surface with peaks and valleys.

5. The method for measuring the surface topography of a super hemisphere according to claim 4, characterized in that: In Step 5, the air-bearing swing shaft (8) drives the displacement sensor (5) to start rotating from the highest position of the displacement sensor (5). As the displacement sensor (5) rotates, the data measured by the displacement sensor (5) gradually decreases, and the air-bearing swing shaft (8) needs to be moved downward by the slide table (7).

6. The method for measuring the surface topography of a super hemisphere according to claim 4, characterized in that: In Step 5, the air-bearing swing shaft (8) drives the displacement sensor (5) to start rotating from the highest position of the displacement sensor (5). As the displacement sensor (5) rotates, the data measured by the displacement sensor (5) gradually increases, and the air-bearing swing shaft (8) needs to be moved upward by the slide table (7).

7. A method for measuring the surface topography of a super hemisphere according to any one of claims 4-6, characterized in that: In Step 4, the air-bearing turntable (2) rotates clockwise for one circle. When the measured value of the displacement sensor (5) gradually increases from the initial X, then gradually decreases and returns to X, the measured ball (4) needs to be adjusted towards the third screw (3053) and the fourth screw (3054).

8. A method for measuring the surface topography of a super hemisphere according to any one of claims 4-6, characterized in that: In Step 4, the air-bearing turntable (2) rotates clockwise for one circle. When the measured value of the displacement sensor (5) gradually decreases from the initial X, then gradually increases and returns to X, the measured ball (4) needs to be adjusted towards the first screw (3051) and the second screw (3052).

9. A method for measuring the surface topography of a super hemisphere, as described in any one of claims 4-6, characterized in that: In Step 4, the air-bearing turntable (2) rotates clockwise for one circle. When the measured value of the displacement sensor (5) gradually decreases from the initial X, then gradually increases and returns to X, continues to increase, and then decreases to X, the measured ball (4) needs to be adjusted towards the second screw (3052) and the third screw (3053).

10. A method for measuring the surface topography of a super hemisphere according to any one of claims 4-6, characterized in that: In Step 4, the air-bearing turntable (2) rotates clockwise for one circle. When the measured value of the displacement sensor (5) gradually increases from the initial X, then gradually decreases and returns to X, continues to decrease, and then increases to X, the measured ball (4) needs to be adjusted towards the first screw (3051) and the fourth screw (3054).

Images