Crystal grid type flexible pressure sensor for deep sea environment and preparation method of crystal grid type flexible pressure sensor

Abstract

The invention provides a crystal lattice type flexible pressure sensor for a deep sea environment and a preparation method thereof. The crystal lattice type flexible pressure sensor for the deep sea environment comprises an active dielectric layer; wherein an interdigital electrode is arranged on the lower surface of the active dielectric layer, and packaging layers are arranged on the upper surface of the active dielectric layer and the lower surface of the interdigital electrode; and a lattice structure is formed in the active dielectric layer. According to the crystal lattice type flexible pressure sensor for the deep sea environment and the preparation method thereof, the technical problem that an existing flexible sensor cannot normally operate in the deep sea environment can be solved.

Description

Technical Field

[0001] The present invention relates to deep - sea exploration, and the finished product is applied to marine sensors. Specifically, it relates to a lattice - type flexible pressure sensor for deep - sea environment and a preparation method thereof. Background Art

[0002] The ocean is a huge treasure trove of resources, including mineral resources, oil resources, rare elements, etc. regarded as strategic resources by various countries, which are countless in the ocean. However, due to the limitations of the technology of the times, humans have not over - exploited the ocean, and the ocean is truly an undeveloped treasure. Therefore, deep - sea exploration is of great significance to the development of a country. Developing these resources requires advanced ocean exploration equipment. Underwater vehicles are the main tools for deep - sea exploration and development, equipped with underwater robotic arms and using rigid mechanical claws for activities such as deep - sea sample collection, mineral extraction, and biological fishing. However, the huge water pressure and dark environment in the deep sea limit the efficiency of underwater operations and may cause damage to the captured objects. Therefore, there is an urgent need to develop pressure sensors that can be integrated with mechanical claws.

[0003] Currently, underwater pressure sensors usually adopt a rigid structure and are mainly designed based on the piezoresistive effects of quartz crystals, optical fibers, and silicon. These sensors usually need to be used in conjunction with a pressure protection cavity, which limits the sensitivity of the sensing system, increases the size and energy consumption. In addition to rigid sensors, researchers also use soft materials to manufacture pressure sensors for underwater use. These flexible sensors are compact, low - cost, and easier to integrate into underwater robots and data acquisition devices, showing great potential in deep - sea exploration. However, due to the low pressure resistance of flexible materials, the current flexible deep - sea pressure sensors usually have a range of less than 1500 meters in seawater. There are still challenges in the design and manufacture of flexible sensors that can be used in the deep sea.

[0004] Based on the above - mentioned technical problems, there is an urgent need for a flexible sensor that can be applied to the deep sea. Summary of the Invention

[0005] In view of the above problems, the purpose of the present invention is to provide a lattice - type flexible pressure sensor for deep - sea environment and a preparation method thereof, so as to solve the technical problem that the current flexible sensors cannot operate normally in the deep - sea environment.

[0006] The lattice - type flexible pressure sensor for deep - sea environment provided by the present invention includes an active medium layer; wherein,

[0007] Interdigitated electrodes are arranged on the lower surface of the active medium layer, and encapsulation layers are arranged on the upper surface of the active medium layer and the lower surface of the interdigitated electrodes; and,

[0008] A lattice structure is formed in the active medium layer.

[0009] In addition, preferably, the line width of the grid lines of the lattice structure includes at least one of 0.17 mm, 0.20 mm, 0.23 mm, 0.26 mm, 0.30 mm, and 0.35 mm.

[0010] In addition, preferably, the active medium layer is a single-layer structure or a stacked structure; and,

[0011] The number of layers of the active medium layer is any number from one to four.

[0012] In addition, preferably, the interdigital electrode is a conductive cloth component;

[0013] The pore size of the conductive cloth is 0.015 mm.

[0014] In addition, preferably, the thickness of the conductive cloth is one of 0.02 mm, 0.03 mm, 0.04 mm, 0.05 mm, and 0.08 mm.

[0015] On the other hand, the present invention also provides a method for preparing the lattice-type flexible pressure sensor for deep-sea environment as described above, including:

[0016] Preparing a dielectric-sensitive blank and a conductive material dispersion respectively;

[0017] Preparing the active medium layer based on the dielectric-sensitive blank and the conductive material dispersion;

[0018] Performing heat treatment on the active medium layer, and pasting an interdigital electrode on the lower surface of the heat-treated active medium layer;

[0019] Pasting a packaging layer on the upper surface of the active medium layer and the lower surface of the interdigital electrode.

[0020] In addition, preferably, the process of preparing the dielectric-sensitive blank includes:

[0021] Printing the dielectric-sensitive blank based on a resin raw material by using 3D printing technology; wherein,

[0022] The resin raw material includes at least one of epoxy acrylate, polyurethane acrylate resin, polyester acrylate resin, and amino acrylate resin.

[0023] In addition, preferably, the process of preparing the conductive material dispersion includes:

[0024] Adding a conductive material to a dispersion solvent, and obtaining the conductive material dispersion through ultrasonic dispersion;

[0025] Among them, the conductive material includes at least one of single-walled carbon nanotubes, multi-walled carbon nanotubes, graphene, conductive silver paste, and graphite; and / or,

[0026] The dispersion solvent includes at least one of isopropanol, ethanol, and deionized water.

[0027] In addition, preferably, preparing the active dielectric layer based on the dielectric-sensitive green body and the conductive material dispersion liquid includes:

[0028] After mixing the dielectric-sensitive green body and the conductive material dispersion liquid, ultrasonic adhesion is performed to obtain the active dielectric layer; where

[0029] The mass ratio of the conductive material dispersion liquid to the dielectric-sensitive green body is: 25:1.

[0030] In addition, preferably, the process of heat-treating the active dielectric layer includes:

[0031] The active dielectric layer is placed in a vacuum environment at a preset temperature and kept warm for a preset time.

[0032] Compared with the prior art, the above lattice-type flexible pressure sensor for deep-sea environment and its preparation method according to the present invention have the following beneficial effects:

[0033] When the lattice-type flexible pressure sensor for deep-sea environment provided by the present invention enters the deep-sea environment, seawater actively enters the internal structure of the lattice-type flexible pressure sensor for deep-sea environment (mainly referring to seawater entering the lattice structure of the active dielectric layer), balancing the huge pressure difference inside and outside the lattice-type flexible pressure sensor for deep-sea environment, thereby offsetting the influence brought by the deep-sea high pressure. And when a relatively small contact pressure acts on the surface of the lattice-type flexible pressure sensor for deep-sea environment, the active dielectric layer of the sensor is compressed under the corresponding pressure, forming more and shorter conductive circuits inside, the overall resistance of the sensor decreases, and a varying resistance signal is led out through the interdigital electrodes, thereby realizing pressure detection in the deep-sea environment.

[0034] To achieve the above and related purposes, one or more aspects of the present invention include features that will be described in detail later and particularly pointed out in the claims. The following description and the drawings detail certain exemplary aspects of the present invention. However, these aspects indicate only some of the various ways in which the principles of the present invention can be used. In addition, the present invention is intended to cover all these aspects and their equivalents. Description of the Drawings

[0035] By referring to the following description and claims in conjunction with the accompanying drawings, and with a more comprehensive understanding of the present invention, other objects and results of the present invention will become more apparent and easier to understand. In the accompanying drawings:

[0036] Figure 1 An optical image of a crystal-type flexible pressure sensor for deep-sea environments provided by the present invention;

[0037] Figure 2 Internal structure diagrams of active medium layers of four different lattice structures provided by the present invention;

[0038] Figure 3 A sensitivity relationship diagram of four active medium layers with different lattice structures provided by the present invention;

[0039] Figure 4 The sensitivity relationship diagram of the active medium layer with six different grid line thicknesses provided by the present invention;

[0040] Figure 5 A sensitivity relationship diagram of four active medium layers with different thicknesses provided by the present invention;

[0041] Figure 6 A sensitivity curve diagram of the crystal-type flexible pressure sensor for deep-sea environment provided by the present invention when subjected to different pressure cycles;

[0042] Figure 7 A sensitivity curve diagram of the crystal-type flexible pressure sensor for deep-sea environment provided by the present invention under different seawater pressures;

[0043] Figure 8 A sensitivity curve diagram of the crystal-type flexible pressure sensor for deep-sea environment provided by the present invention after being immersed in seawater for different time periods;

[0044] The same reference numerals throughout the drawings indicate similar or corresponding features or functions. DETAILED DESCRIPTION

[0045] In the following description, for the purpose of illustration, in order to provide a comprehensive understanding of one or more embodiments, many specific details are set forth. However, it is apparent that these embodiments may also be implemented without these specific details. In other examples, for ease of describing one or more embodiments, known structures and devices are shown in the form of block diagrams.

[0046] It should be understood that the terms used in this invention are only for describing specific embodiments and are not intended to limit the invention. Additionally, for the numerical ranges in this invention, it should be understood that each intermediate value between the upper and lower limits of the range is also specifically disclosed. Each intermediate value within any stated value or stated range, as well as each smaller range between any other stated value or intermediate value within the stated range, is also included in this invention. The upper and lower limits of these smaller ranges may be independently included or excluded from the range.

[0047] Furthermore, the endpoints and any numerical values disclosed in the ranges herein are not limited to the exact ranges or values, but should be understood to include values close to those ranges or values. Combinations can be formed between the endpoint values of each numerical range, between the endpoint values of each numerical range and individual point values, and between individual point values to form one or more new numerical ranges, which should be considered to be specifically disclosed herein.

[0048] Without departing from the scope or spirit of the invention, various improvements and changes can be made to the specific embodiments of the specification of the invention, which are obvious to those skilled in the art. Other embodiments obtained from the specification of the invention are obvious to those skilled in the art. The specification and examples of this application are merely exemplary.

[0049] Figure 1 The optical image structure of the lattice - type flexible pressure sensor provided by the present invention for deep - sea environments is shown. Combining Figure 1 As can be seen, the lattice - type flexible pressure sensor provided by the present invention for deep - sea environments includes an active medium layer; wherein, interdigital electrodes are provided on the lower surface of the active medium layer, and encapsulation layers are provided on the upper surface of the active medium layer and the lower surface of the interdigital electrodes; and, a lattice structure is formed within the active medium layer.

[0050] When the lattice - type flexible pressure sensor provided by the present invention for deep - sea environments enters the deep - sea environment, seawater will enter the structure of the lattice - type flexible pressure sensor for deep - sea environments (mainly into the lattice structure of the active medium layer). Since the seawater and the lattice - type flexible pressure sensor for deep - sea environments become an integral whole, the internal and external pressures of the lattice - type flexible pressure sensor for deep - sea environments will remain balanced, thus releasing the influence brought by the deep - sea high pressure. Then, when other pressures act on the surface of the lattice - type flexible pressure sensor provided by the present invention for deep - sea environments, the active medium layer in the lattice - type flexible pressure sensor for deep - sea environments will be compressed due to the pressure, the internal structure of the active medium layer will shorten, and the thickness of the lattice structure of the active medium layer will increase, thereby forming a new and shorter conductive circuit, making the overall resistance of the lattice - type flexible pressure sensor for deep - sea environments decrease, and realizing the normal operation of pressure detection in the deep - sea environment.

[0051] In a preferred embodiment provided by the present invention, in order to enable the active medium layer provided by the present invention to facilitate the entry and exit of seawater and accurately sense external pressure, the present invention designs four different lattice structures. Figure 2 The internal structure diagrams of the active medium layers with four different lattice structures provided by the present invention are shown. From Figure 2 it can be seen that the four different lattice structures are respectively defined as "A" type, "B" type, "C" type, and "D" type; among them, the mesh holes of the lattice structure can be set to be composed of one structure, such as: "B" type, "C" type, "D" type, and the mesh holes are all the same polygon structure; the mesh holes of the lattice structure can also be designed to be composed of multiple structures, such as the "A" type lattice structure, whose mesh holes are composed of "quadrilateral" structures and "hexagonal" structures. It should be noted that the present invention only provides four preferred lattice structures of the active medium layer by way of example. In the actual design process, lattice structures of other structures can also be adopted, as long as the water permeability and external pressure sensing of the active medium layer can be satisfied.

[0052] It should also be noted that for the active medium layer, the areas of its different cross-sections (such as cross-section or longitudinal section) are basically the same, and each cross-section shows a woven structure composed of grid lines. In addition, in order to facilitate the perception of external pressure by the lattice structure in the active medium layer provided by the present invention, the line widths of the grid lines of the lattice structure of the active medium layer usually need to be selected from at least one of 0.17 mm, 0.20 mm, 0.23 mm, 0.26 mm, 0.30 mm, and 0.35 mm; and when the thickness of the grid lines in the active medium layer changes, the thickness of the active medium layer and the structure of the active medium layer basically remain unchanged, and basically will not cause a large amount of seawater to flow out or flow into the active medium layer.

[0053] In addition, it should also be noted that for the active medium layer, it can be designed as a single-layer structure (that is, only including one layer monomer composed of a lattice structure); it can also be designed as a multi-layer structure (that is, including multiple layer monomers composed of a lattice structure stacked and designed); and the number of layers of the active medium layer is selected from any number of layers from one layer to four layers.

[0054] It should be noted that in order to facilitate seawater to enter the inside of the entire lattice-type flexible pressure sensor for the deep-sea environment, the interdigital electrodes can be cut from conductive cloth (that is, conductive cloth interdigital electrodes); among them, the pore size of the conductive cloth is preferably 0.015 mm; in addition, the thickness of the conductive cloth is usually selected from one of 0.02 mm, 0.03 mm, 0.04 mm, 0.05 mm, and 0.08 mm.

[0055] In addition, it should be noted that in the actual use process, the encapsulation layer may not be used, that is, the encapsulation layer on the upper surface of the active medium layer and the lower surface of the interdigital electrode is not set, and only the active medium layer and the interdigital electrode can also achieve the detection function of the lattice flexible pressure sensor for deep-sea environment provided by the present invention.

[0056] To facilitate the understanding of the preparation process of the lattice flexible pressure sensor for deep-sea environment provided by the present invention, the present invention also provides a preparation method for the lattice flexible pressure sensor for deep-sea environment, including: This preparation method includes:

[0057] Prepare a dielectric sensitive blank and a conductive material dispersion respectively;

[0058] Prepare the active medium layer based on the dielectric sensitive blank and the conductive material dispersion;

[0059] Heat-treat the active medium layer, and paste an interdigital electrode on the lower surface of the heat-treated active medium layer;

[0060] Paste an encapsulation layer on the upper surface of the active medium layer and the lower surface of the interdigital electrode.

[0061] In a specific embodiment of the present invention, the process of preparing the dielectric sensitive blank includes:

[0062] Design a model for the active medium layer according to a preselected lattice structure,

[0063] Based on the designed model, use a resin raw material to print the dielectric sensitive blank (non-conductive active medium layer) on a 3D printer by 3D printing technology; wherein, the resin raw material includes at least one of epoxy acrylate, polyurethane acrylate resin, polyester acrylate resin, and amino acrylate resin; the 3D printer can be selected from one of FDM, SLS, SLM, LOM, SLA, DLP, EBM, PCM, LENS, MSL, MLS, LCVD.

[0064] In addition, the process of preparing the conductive material dispersion may include:

[0065] Add a conductive material to a dispersion solvent, and obtain the conductive material dispersion through ultrasonic dispersion; wherein, the ultrasonic dispersion power can be set to 600W, the time is 3s on, 3s off, and the total duration is 60min; for the conductive material, at least one of single-walled carbon nanotubes, multi-walled carbon nanotubes, graphene, conductive silver paste, and graphite can be selected; for the dispersion solvent, at least one of isopropanol, ethanol, and deionized water can be selected.

[0066] In addition, the preparation of the active medium layer based on the dielectric sensitive body and the conductive material dispersion may include:

[0067] The dielectric sensitive blank prepared above and the conductive material dispersion prepared above are mixed, and then ultrasonically adhered to obtain the active medium layer (i.e., the active medium layer having conductive properties); wherein,

[0068] The mass ratio of the conductive material dispersion to the dielectric sensitive body is preferably 25:1; the ultrasonic adsorption power can be set to 800W, the time is on for 4s, off for 2s, and the total duration is 60min.

[0069] In a specific embodiment of the present invention, the process of heat treating the active medium layer may include:

[0070] The active medium layer is placed in a vacuum environment at a preset temperature and kept warm for a preset time. For example, the active medium layer is placed in an oven for heat treatment at a temperature of 120°C for 8 hours; then the interdigitated electrodes cut from the conductive cloth are glued to the lower surface of the heat-treated active medium layer, and finally the encapsulation layer is attached to the upper surface of the active medium layer and the lower surface of the conductive cloth.

[0071] also, Figure 3 The sensitivity relationship of the active medium layer with four different lattice structures provided by the present invention is shown. Figure 4 The sensitivity relationship of the active medium layer with six different grid line thicknesses provided by the present invention is shown. Figure 5 The sensitivity relationship of the active medium layers of four different thicknesses provided by the present invention is shown. Figure 6 The sensitivity curve of the crystal-type flexible pressure sensor for deep-sea environment provided by the present invention when subjected to different pressure cycles is shown. Figure 7 The sensitivity curves of the crystal-type flexible pressure sensor for deep sea environment provided by the present invention under different seawater pressures are shown. Figure 8 The figure shows the sensitivity curves of the crystal-type flexible pressure sensor for deep sea environment provided by the present invention after being immersed in sea water for different time periods.

[0072] The following further illustrates the method for preparing the crystal-based flexible pressure sensor for deep-sea environment provided by the present invention by showing multiple embodiments.

[0073] Embodiment 1: In this embodiment, the lattice structure of the active medium layer adopts Figure 2 The "A" type structure shown in the figure has a grid line thickness of 1000 mm / s. Figure 4 The thickness of the active dielectric layer is 0.23 mm as shown. Figure 5 2 layers (4mm) shown.

[0074] The specific preparation process of the lattice flexible pressure sensor for deep - sea environment provided by this embodiment is as follows:

[0075] Design a 3D printing model corresponding to the "A" - type lattice structure, and print an insulating active medium layer (i.e., dielectric - sensitive green body) with a weight of 2.32 g in a 3D printer based on this 3D printing model. Then, put the obtained insulating active medium layer into an isopropyl alcohol solution and ultrasonically clean it for 5 min. After taking it out and drying it for later use, perform post - treatment for 3 min with a post - treatment device;

[0076] Mix 1.2 g of multi - walled carbon nanotubes and 150 ml of isopropyl alcohol solution, and obtain a carbon nanotube dispersion after ultrasonic dispersion. The ultrasonic conditions are 600 W, on for 3 s, off for 3 s, and the ultrasonic time is 60 min.

[0077] Mix the insulating active medium layer and the carbon nanotube dispersion together and perform ultrasonic adhesion. The mass ratio of the carbon nanotube dispersion to the active medium layer is 25:1. The ultrasonic adsorption conditions are 800 W, on for 4 s, off for 2 s, and the ultrasonic time is 60 min;

[0078] Take out the ultrasonically - treated active medium layer with conductive properties and put it into a vacuum oven for heat treatment. The oven temperature is 120 °C and the heat - preservation time is 8 h;

[0079] After completing the heat treatment, stick interdigital electrodes cut from conductive cloth on the lower surface of the active medium layer. The thickness of the used conductive cloth is 0.05 mm. Finally, stick a polyurethane encapsulation layer on the upper surface of the active medium layer and the lower surface of the interdigital electrodes.

[0080] Example 2: Different from Example 1, in this example, the lattice structure of the active medium layer adopts any one of the "B" - type, "C" - type, and "D" - type; the content of other schemes is exactly the same as that of Example 1 and will not be elaborated here.

[0081] Example 3: Different from Example 1, in this example, the thickness of the grid lines of the active medium layer is selected from any one of 0.17 mm, 0.20 mm, 0.26 mm, 0.30 mm, and 0.35 mm; the content of other schemes is exactly the same as that of Example 1 and will not be elaborated here.

[0082] Example 4: Different from Example 1, in this example, the layer thickness of the active medium layer is selected from one of 1 layer (2 mm), 3 layers (6 mm), and 4 layers (8 mm); the content of other schemes is exactly the same as that of Example 1 and will not be elaborated here.

[0083] Example 5: Different from Example 1, the raw material for printing the active dielectric layer in this example uses commercial A30 resin, which is a polyurethane acrylate resin; the other solution contents are exactly the same as those in Example 1 and will not be elaborated here.

[0084] Example 6: Different from Example 1, the conductive material in this example is selected from one or more of single-walled carbon nanotubes, graphene, conductive silver paste, and graphite; the other solution contents are exactly the same as those in Example 1 and will not be elaborated here.

[0085] Example 7: Different from Example 1, the thickness of the conductive cloth interdigital electrode in this example is one of 0.02 mm, 0.03 mm, 0.04 mm, and 0.08 mm; the other solution contents are exactly the same as those in Example 1 and will not be elaborated here.

[0086] It should be noted that the performance of the flexible pressure sensor prepared in Example 1 was detected, and the performance comparison was made with the flexible pressure sensors prepared in Example 2. The detection results are as Figure 3 shown. From Figure 3 it can be seen that the flexible pressure sensor prepared in Example 1 of the present invention has a linear sensitivity of 0.76 kPa-1 under load and can maintain stable operation in the working range of 0-90 kPa. Therefore, the lattice-type flexible pressure sensor for deep-sea environment prepared in the embodiments of the present invention has the ability to detect pressure signals and generate current feedback.

[0087] In addition, the performance of the flexible pressure sensor prepared in Example 1 was detected, and the performance comparison was made with the flexible pressure sensors prepared in Example 3. The detection results are as Figure 4 shown. From Figure 4 it can be seen that when the grid line thickness of the active dielectric layer is 0.23 mm, the lattice-type flexible pressure sensor shown in the present invention has the highest sensitivity of 0.78 kPa-1.

[0088] In addition, the performance of the flexible pressure sensor prepared in Example 1 was detected, and the performance comparison was made with the flexible pressure sensors prepared in Example 4. The detection results are as Figure 5 shown. From Figure 5 it can be seen that when the thickness of the active dielectric layer is 2 layers (4 mm), the lattice-type flexible pressure sensor shown in the present invention has the highest sensitivity of 0.80 kPa-1.

[0089] Finally, different performance detections were carried out on the crystal flexible stress sensor prepared in Example 1, and the detection results are as Figure 6 、 Figure 7 and Figure 8 shown; from Figure 6It can be seen that the flexible pressure sensor prepared in Embodiment 1 of the present invention can still maintain the stability of the current response signal and can work normally after being subjected to load cycles of 10 kPa, 30 kPa, and 50 kPa. From Figure 7 It can be seen that for the flexible pressure sensor prepared in Embodiment 1 of the present invention, after being subjected to different water pressures of 0 - 30 MPa, the change rate of the feedback current signal is only 2.09%; and after being subjected to a water pressure of 30 MPa and then continuing to bear a positive pressure, it can still maintain the ability to work normally. From Figure 8 It can be seen that the lattice flexible pressure sensor prepared in Embodiment 1 of the present invention can still maintain the linear response of the signal after being immersed in seawater for 30 days.

[0090] In summary, the lattice-structured flexible pressure sensor for deep-sea environment prepared in the embodiments of the present invention has the ability to withstand the high pressure of the deep sea, can still maintain the stability of the current signal after being subjected to a maximum high pressure of 30 Mpa, and can work normally.

[0091] As described above with reference to Figures 1 to 8 The lattice flexible pressure sensor for deep-sea environment according to the present invention and its preparation method are described by way of example. However, those skilled in the art should understand that various improvements can be made to the above-mentioned lattice flexible pressure sensor for deep-sea environment and its preparation method of the present invention without departing from the content of the present invention. Therefore, the protection scope of the present invention should be determined by the content of the appended claims.

Claims

1. A lattice flexible pressure sensor for deep - sea environment, characterized in that, including an active medium layer; wherein, interdigitated electrodes are provided on the lower surface of the active medium layer, and encapsulation layers are provided on the upper surface of the active medium layer and the lower surface of the interdigitated electrodes; and, a lattice structure is formed within the active medium layer.

2. The lattice-type flexible pressure sensor for deep-sea environment according to claim 1, characterized in that, the line width of the grid lines of the lattice structure includes at least one of 0.17 mm, 0.20 mm, 0.23 mm, 0.26 mm, 0.30 mm, and 0.35 mm.

3. The lattice-type flexible pressure sensor for deep-sea environment according to claim 2, characterized in that, the active medium layer is a single-layer structure or a laminated structure; and, the number of layers of the active medium layer is any number from one to four.

4. The lattice-type flexible pressure sensor for deep-sea environment according to claim 3, characterized in that, the interdigitated electrodes are made of conductive cloth; the pore size of the conductive cloth is 0.015 mm.

5. The lattice-type flexible pressure sensor for deep-sea environment according to claim 4, characterized in that, the thickness of the conductive cloth is one of 0.02 mm, 0.03 mm, 0.04 mm, 0.05 mm, and 0.08 mm.

6. A preparation method of the lattice flexible pressure sensor for deep - sea environment according to any one of claims 1 to 5, characterized in that, including: preparing a dielectric-sensitive green body and a conductive material dispersion respectively; preparing the active medium layer based on the dielectric-sensitive green body and the conductive material dispersion; performing heat treatment on the active medium layer, and pasting interdigitated electrodes on the lower surface of the heat-treated active medium layer; pasting encapsulation layers on the upper surface of the active medium layer and the lower surface of the interdigitated electrodes.

7. The preparation method of the lattice flexible pressure sensor for deep-sea environment according to claim 6, characterized in that The process of preparing the dielectric-sensitive green body includes: printing the dielectric-sensitive green body based on a resin raw material by using 3D printing technology; wherein, the resin raw material includes at least one of epoxy acrylate, polyurethane acrylate resin, polyester acrylate resin, and amino acrylate resin.

8. The preparation method of the lattice flexible pressure sensor for deep-sea environment according to claim 7, characterized in that, The process of preparing the conductive material dispersion includes: adding a conductive material into a dispersion solvent, and obtaining the conductive material dispersion through ultrasonic dispersion; wherein, the conductive material includes at least one of single-walled carbon nanotubes, multi-walled carbon nanotubes, graphene, conductive silver paste, and graphite; and / or, the dispersion solvent includes at least one of isopropanol, ethanol, and deionized water.

9. The preparation method of the lattice flexible pressure sensor for deep-sea environment according to claim 8, characterized in that, The preparing the active medium layer based on the dielectric-sensitive green body and the conductive material dispersion includes: mixing the dielectric-sensitive green body and the conductive material dispersion, and performing ultrasonic adhesion to obtain the active medium layer; wherein, the mass ratio of the conductive material dispersion to the dielectric-sensitive green body is: 25:

1.

10. A preparation method of the lattice flexible pressure sensor for deep - sea environment as described in claim 9, characterized in that, The process of performing heat treatment on the active medium layer includes: placing the active medium layer in a vacuum environment at a preset temperature and keeping it warm for a preset time.

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