High-resolution microwave imaging device and imaging method thereof
By adopting reflection amplification technology of multi-beam detection light and coupled light in the microwave imaging device, the problems of small detection range and low resolution in the prior art are solved, and high-resolution microwave field imaging is achieved.
Patent Information
- Application Number
- CN202410039703.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-01-10
- Publication Date
- 2025-07-11
AI Technical Summary
In the existing microwave imaging methods, the detection and coupled light are in a single beam mode, resulting in a small detection range and low resolution.
Multiple beams of detection light and coupled light are used to transmit along multiple reflection paths parallel to each other in the atomic gas chamber, and the spectral splitting distance is detected through a photodetector, and the electric field intensity is calculated in combination with the upper computer to achieve high-resolution microwave imaging.
The detection range and resolution of the microwave imaging device are expanded, and the accuracy of electric field measurement is improved.
Smart Images
Figure CN120294023A_ABST
Abstract
Description
Technical Field
[0001] This application relates to the technical field of microwave signal imaging, and in particular, to a high-resolution microwave imaging device and an imaging method thereof. Background Art
[0002] Currently, the complexity and integration level of chip circuits have increased unprecedentedly, and the feature line width is continuously decreasing. Developing a new non-destructive high-resolution microwave field near-field imaging technology is crucial for the function and failure analysis of chips. The microwave measurement technology based on Rydberg atoms uses the response of atoms in a highly excited state to an external microwave electric field to measure microwaves. This method uses an all-optical method and utilizes the atomic sensitivity to the microwave field distribution, with advantages such as high resolution and low near-field interference, and is expected to provide a new measurement scheme for applications such as chip electromagnetic compatibility testing, microwave chip failure analysis, and antenna near-field distribution imaging.
[0003] Existing measurement methods form Rydberg atoms in an atomic vapor cell through the counter-propagation of probe light and coupling light, and utilize the high sensitivity of Rydberg atoms to the microwave electric field to achieve electric field measurement. However, in existing measurement schemes, both the probe light and the coupling light adopt a single-beam mode, resulting in problems such as a small detection range and low resolution. Summary of the Invention
[0004] Embodiments of this application provide a high-resolution microwave imaging device and an imaging method thereof to solve the problem that both the probe light and the coupling light in existing measurement schemes adopt a single-beam mode, resulting in a small detection range and low resolution.
[0005] In a first aspect, embodiments of this application provide a high-resolution microwave imaging device, including:
[0006] The high-resolution microwave imaging device includes a detection system and a host computer. The detection system includes a first laser, an atomic cell, a second laser, a beam splitter, and a photodetector;
[0007] Wherein, the atomic cell is disposed in a microwave field to be measured. The probe light generated by the first laser is divided into multiple parallel probe lights through the beam splitter and is incident into the atomic cell. The multiple probe lights excite the atoms in the atomic cell from the ground state energy level to the metastable state energy level;
[0008] The coupled light generated by the second laser is incident on the atomic gas cell and is transmitted along a plurality of reflection paths parallel to each other in the atomic gas cell. The multiple probe lights are respectively overlapped with the coupled light on the corresponding reflection paths and transmitted in opposite directions. The coupled light is used to excite the atoms from the metastable energy level to the Rydberg energy level. The microwave field to be measured causes the energy level change of the atoms, so that spectral splitting occurs in the intensity of the probe light output from the atomic gas cell. The spacing of the spectral splitting is proportional to the electric field strength of the microwave field to be measured;
[0009] The photodetector detects the intensities of the multiple probe lights output from the atomic gas cell. The host computer calculates the electric field strength of the microwave field to be measured at the corresponding position of each probe light based on the intensity of each probe light to obtain a one-dimensional electric field measurement result.
[0010] In one embodiment, coupling light reflectors are arranged on both end faces of the atomic gas cell. The multiple probe lights are obliquely incident relative to the coupling light reflectors and are incident on the atomic gas cell after being transmitted through the coupling light reflectors. The coupled light is obliquely incident on the atomic gas cell relative to the coupling light reflectors, and forms the multiple reflection paths under the reflection action of the coupling light reflectors on both end faces of the atomic gas cell.
[0011] In one embodiment, the difference between the maximum intensity and the minimum intensity of the multiple probe lights incident on the coupling light reflectors is not greater than 20%.
[0012] In one embodiment, the reflectivity of the coupling light reflector to the coupled light is not less than 90%.
[0013] In one embodiment, the atoms in the atomic gas cell are rubidium atoms, the ground state energy level is 5S 1 / 2 , F = 2 fine energy level, the metastable energy level is 5P 3 / 2 , F` = 3 fine energy level, the Rydberg energy level is 87D 5 / 2 .
[0014] In one embodiment, the wavelength of the probe light is 780 nm, and the wavelength of the coupled light is 480 nm.
[0015] In one embodiment, the high-resolution microwave imaging device further includes a rotating device. The rotating device is used to rotate the detection system with the atomic gas cell as the center. The host computer synthesizes the one-dimensional electric field measurement results at different rotation angles into a two-dimensional electric field measurement result.
[0016] In one embodiment, the high-resolution microwave imaging device further includes a translation device for translating the detection system, and the host computer synthesizes one-dimensional electric field measurement results at different translation positions into two-dimensional electric field measurement results.
[0017] In one embodiment, the number of the multiple probe lights is not less than 4.
[0018] In a second aspect, an embodiment of the present application further provides a high-resolution microwave imaging method, including:
[0019] Placing an atomic gas cell in a microwave field to be measured;
[0020] Splitting the probe light generated by a first laser into multiple parallel probe lights and incident on the atomic gas cell, where the multiple probe lights excite atoms in the atomic gas cell from the ground state energy level to the metastable energy level;
[0021] Controlling the coupling light generated by the second laser to be transmitted along multiple parallel reflection paths in the atomic gas cell, and enabling the multiple probe lights to respectively overlap and travel in opposite directions with the coupling light on the corresponding reflection paths, where the coupling light is used to excite the atoms from the metastable energy level to the Rydberg energy level;
[0022] Performing intensity detection on the multiple probe lights exiting from the atomic gas cell;
[0023] Calculating the electric field intensity of the microwave field to be measured at the position corresponding to each probe light according to the proportional relationship between the spacing of the spectral splitting of the probe light and the electric field intensity of the microwave field to be measured.
[0024] The high-resolution microwave imaging device provided by the embodiment of the present application includes a detection system and a host computer. The detection system includes a first laser, an atomic gas cell, a second laser, a beam splitter, and a photodetector. Among them, the atomic gas cell is arranged in the microwave field to be measured. The probe light generated by the first laser is divided into multiple parallel probe lights through the beam splitter and incident into the atomic gas cell, and resonates with the ground state and metastable state energy level transitions of the atoms in the atomic gas cell, so that the atoms in the atomic gas cell can be excited from the ground state energy level to the metastable energy level; at the same time, the coupling light generated by the second laser is incident into the atomic gas cell and is transmitted along multiple parallel reflection paths in the atomic gas cell. The multiple probe lights respectively overlap and travel in opposite directions with the coupling light on the corresponding reflection paths. The coupling light is used to resonate with the excited state and Rydberg energy level transitions of the atoms in the atomic gas cell, so that the atoms in the atomic gas cell can be excited from the metastable energy level to the Rydberg energy level. The microwave field to be measured causes energy level changes of the atoms, thereby generating spectral splitting in the intensity of the probe light output from the atomic gas cell, and the spacing of the spectral splitting is proportional to the electric field intensity of the microwave field to be measured.
[0025] In addition, the photodetector can detect the intensities of multiple detection light beams output from the atomic gas cell. The host computer calculates the electric field intensity of the microwave field to be measured at the corresponding position of each detection light beam based on the intensity of each detection light beam, so as to obtain a one-dimensional electric field measurement result.
[0026] It can be understood that in the high-resolution microwave imaging device provided in the embodiments of the present application, the detection light generated by the first laser is divided into multiple mutually parallel detection light beams by a beam splitter and then incident into the atomic gas cell. Then, the coupling light generated by the second laser is incident into the atomic gas cell and transmitted along multiple mutually parallel reflection paths in the atomic gas cell, and the multiple detection light beams are respectively overlapped with the coupling light on the corresponding reflection paths and transmitted in opposite directions. In this way, the number of detection light beams and coupling light beams can be amplified by reflection, so as to expand the detection range and resolution of the microwave imaging device. Thereafter, the intensities of the multiple detection light beams are detected by the photodetector, and the electric field intensity of the microwave field to be measured at the corresponding position of each detection light beam is calculated by the host computer, so as to ensure the accuracy of the one-dimensional electric field measurement result. Description of the Drawings
[0027] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the following described drawings are only some embodiments of the present application, and those skilled in the art can obtain other drawings based on these drawings without creative efforts.
[0028] Figure 1 It is an overall schematic block diagram of the high-resolution microwave imaging device provided in the embodiments of the present application.
[0029] Figure 2 For Figure 1 the schematic optical path diagram of the detection light and the coupling light in the shown high-resolution microwave imaging device.
[0030] Figure 3 It is a flowchart of the high-resolution microwave imaging method provided in the embodiments of the present application.
[0031] Description of the Reference Numerals:
[0032] 100, high-resolution microwave imaging device; 110, detection system; 111, first laser; 112, atomic gas cell; 113, second laser; 114, beam splitter; 115, photodetector; 116, filter; 120, host computer. Detailed Embodiments
[0033] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present application without creative efforts shall fall within the protection scope of the present application.
[0034] Currently, the complexity and integration of chip circuits have increased unprecedentedly, and the feature line width is continuously decreasing. Developing a new non-destructive high-resolution microwave field near-field imaging technology is crucial for the function and failure analysis of chips. The microwave measurement technology based on Rydberg atoms uses the response of atoms in a highly excited state to an external microwave electric field to measure microwaves. This method adopts an all-optical method and utilizes the atomic sensitive microwave field distribution, with advantages such as high resolution and small interference to the near field, and is expected to provide a new measurement scheme in applications such as chip electromagnetic compatibility testing, microwave chip failure analysis, and antenna near-field distribution imaging.
[0035] Existing measurement methods form Rydberg atoms in the atomic vapor magnet by the counter-propagation of probe light and coupling light, and utilize the high sensitivity of Rydberg atoms to microwave electric fields to achieve electric field measurement. However, in existing measurement schemes, both the probe light and the coupling light adopt a single-beam mode, resulting in problems such as a small detection range and low resolution.
[0036] Based on the above technical problems, the embodiments of the present application provide a high-resolution microwave imaging device 100. Please refer to Figure 1 and Figure 2 , Figure 1 which is the overall schematic block diagram of the high-resolution microwave imaging device 100 provided by the embodiments of the present application, Figure 2 and Figure 1 is the optical path schematic diagram of the probe light and the coupling light in the high-resolution microwave imaging device 100 shown in
[0037] In this embodiment, as shown in Figure 1 and Figure 2As shown in the figure, the high-resolution microwave imaging device 100 includes a detection system 110 and a host computer 120. The detection system 110 includes a first laser 111, an atomic gas cell 112, a second laser 113, a beam splitter 114, and a photodetector 115. Among them, the atomic gas cell 112 is arranged in the microwave field to be measured. The probe light generated by the first laser 111 is divided into multiple parallel probe lights by the beam splitter 114 and enters the atomic gas cell 112, and resonates with the atomic ground state and metastable energy level transitions in the atomic gas cell 112, so that the atoms in the atomic gas cell 112 can be excited from the ground state energy level to the metastable energy level; at the same time, the coupling light generated by the second laser 113 enters the atomic gas cell 112 and is transmitted along multiple parallel reflection paths in the atomic gas cell 112. The multiple probe lights are respectively recombined with the coupling light on the corresponding reflection paths and transmitted in opposite directions. The coupling light is used to resonate with the atomic excited state and Rydberg energy level transitions in the atomic gas cell 112, so that the atoms in the atomic gas cell 112 can be excited from the metastable energy level to the Rydberg energy level. The microwave field to be measured causes changes in the energy levels of the atoms, so that spectral splitting occurs in the intensity of the probe light output from the atomic gas cell 112, and the spacing of the spectral splitting is proportional to the electric field strength of the microwave field to be measured.
[0038] In addition, the photodetector 115 can detect the intensities of the multiple probe lights output from the atomic gas cell 112. The host computer 120 calculates the electric field strength of the microwave field to be measured at the corresponding position of each probe light based on the intensity of each probe light to obtain a one-dimensional electric field measurement result.
[0039] Specifically, the photodetector 115 can use a silicon photodetector 115. The microwave field to be measured causes changes in the atomic energy levels, resulting in spectral splitting in the intensity of the probe light. Among them, the relationship between the microwave electric field E to be measured and the spectral splitting spacing W is: Then, the host computer 120 calculates the value of the microwave electric field to be measured at the corresponding position of each path of probe light to complete the one-dimensional electric field measurement.
[0040] It can be understood that in the high-resolution microwave imaging device 100 provided in this embodiment, the probe light generated by the first laser 111 is divided into multiple mutually parallel probe lights by the beam splitter 114 and incident into the atomic gas cell 112, and then the coupling light generated by the second laser 113 is incident into the atomic gas cell 112 and transmitted along multiple mutually parallel reflection paths in the atomic gas cell 112, and the multiple probe lights are respectively recombined with the coupling light on the corresponding reflection paths and transmitted in opposite directions. In this way, the number of probe light and coupling light beams can be amplified by reflection, so as to expand the detection range and resolution of the microwave imaging device. Then, the intensity of the multiple probe lights is detected by the photodetector 115, and the electric field intensity of the microwave field to be measured at the corresponding position of each probe light is calculated by the upper computer 120, so as to ensure the accuracy of the one-dimensional electric field measurement result.
[0041] It should be noted that in another embodiment of the present application, the number of multiple probe lights is not less than 4, so as to further enhance the detection range and resolution of the microwave imaging device; in addition, in another embodiment of the present application, the wavelength of the probe light can be 780 nm, and the wavelength of the coupling light can be 480 nm.
[0042] In some embodiments, as Figure 1 and Figure 2 shown, coupling light reflectors can be provided on both end faces of the atomic gas cell 112. Among them, the coupling light reflectors are used to transmit the probe light and reflect the coupling light, that is, the multiple probe lights can be incident obliquely relative to the coupling light reflectors and incident into the atomic gas cell 112 after being transmitted by the coupling light reflectors. At the same time, the coupling light is incident obliquely into the atomic gas cell 112 relative to the coupling light reflectors, and multiple reflection paths are formed under the reflection action of the coupling light reflectors on both end faces of the atomic gas cell 112, so that the coupling light is transmitted along multiple mutually parallel reflection paths in the atomic gas cell 112, and the multiple probe lights are respectively recombined with the coupling light on the corresponding reflection paths and transmitted in opposite directions. In this way, the number of probe light and coupling light beams can be amplified by reflection, so as to expand the detection range and resolution of the microwave imaging device.
[0043] In some embodiments, the difference between the maximum intensity and the minimum intensity of the multiple probe lights incident on the coupling light reflectors is not greater than 20%, so as to ensure the uniformity of the light intensity in the atomic gas cell 112; at the same time, in another embodiment, the reflectivity of the coupling light reflectors to the coupling light is not less than 90%, so as to ensure that the coupling light can form multiple reflection paths and the coupling light is transmitted along multiple mutually parallel reflection paths in the atomic gas cell 112.
[0044] In some embodiments, the atoms in the atomic gas cell 112 can be rubidium atoms, and the probe light and the ground state energy level are 5S 1 / 2, F = 2 fine energy level and metastable energy level is 5P 3 / 2 , F` = 3 fine energy level transition resonance, coupling light with metastable 5P 3 / 2 , F` = 3 fine energy level and Rydberg energy level 87D 5 / 2 transition resonance.
[0045] In some embodiments, the high-resolution microwave imaging device 100 may further include a rotating device, wherein the rotating device is configured to rotate the detection system 110 centered on the atomic gas cell 112. Meanwhile, the host computer 120 may synthesize the one-dimensional electric field measurement results at different rotation angles into two-dimensional electric field measurement results to complete the local electric field imaging.
[0046] Meanwhile, in another embodiment, the high-resolution microwave imaging device 100 may further include a translation device, wherein the translation device is configured to translate the detection system 110. Meanwhile, the host computer 120 may synthesize the one-dimensional electric field measurement results at different translation positions into two-dimensional electric field measurement results to complete the local electric field imaging.
[0047] In some embodiments, the high-resolution microwave imaging device 100 may further include a filter 116, and the filter 116 is configured to filter the light emitted from the atomic gas cell 112, thereby achieving the purpose of reducing local noise.
[0048] The embodiment of the present application also provides a high-resolution microwave imaging method. Please refer to Figure 1 and Figure 2 and refer to Figure 3 , Figure 3 which is the flowchart of the high-resolution microwave imaging method provided by the embodiment of the present application. Specifically, the high-resolution microwave imaging method includes:
[0049] Step S101: Arrange the atomic gas cell 112 in the microwave field to be measured.
[0050] Specifically, the atoms in the atomic gas cell 112 may be rubidium atoms, and the microwave field to be measured can cause energy level changes of the rubidium atoms.
[0051] Step S102: Split the detection light generated by the first laser 111 into multiple parallel detection lights and incident them into the atomic gas cell 112, wherein the multiple detection lights excite the atoms in the atomic gas cell 112 from the ground state energy level to the metastable energy level.
[0052] Specifically, the detection light generated by the first laser 111 is split into multiple parallel detection lights by the beam splitter 114 and incident into the atomic gas cell 112, and resonates with the ground state and metastable energy level transitions of the atoms in the atomic gas cell 112, so that the atoms in the atomic gas cell 112 can be excited from the ground state energy level to the metastable energy level. Among them, the detection light resonates with the ground state energy level of 5S 1 / 2, F=2 fine level and metastable level is 5P 3 / 2 , F`=3 fine energy level transition resonance.
[0053] Step S103: Control the coupling light generated by the second laser 113 to be transmitted along multiple reflection paths parallel to each other in the atomic gas chamber 112, and make multiple beams of detection light overlap with the coupling light on the corresponding reflection paths and transmit in opposite directions, wherein the coupling light is used to excite atoms from the metastable energy level to the Rydberg energy level.
[0054] Specifically, the coupling light generated by the second laser 113 is incident into the atomic gas chamber 112, and is transmitted along multiple parallel reflection paths in the atomic gas chamber 112. Multiple beams of detection light overlap with the coupling light on the corresponding reflection paths and are transmitted in opposite directions. The coupling light is used to resonate with the atomic excited state and Rydberg energy level transition in the atomic gas chamber 112, so that the atoms in the atomic gas chamber 112 can be excited from the metastable energy level to the Rydberg energy level, and the microwave field to be measured causes the energy level of the atoms to change, thereby generating spectral splitting in intensity in the detection light output from the atomic gas chamber 112, and the spacing of the spectral splitting is proportional to the electric field strength of the microwave field to be measured. 3 / 2 , F` = 3 fine levels and Rydberg levels 87D 5 / 2 Transition resonance.
[0055] Step S104: performing intensity detection on the multiple probe light beams emitted from the atomic gas chamber 112 .
[0056] Specifically, the intensity of the multiple beams of detection light output from the atomic gas chamber 112 can be detected by the photodetector 115. It should be noted that the photodetector 115 can be a silicon photodetector 115. The microwave field to be measured causes the atomic energy level to change, thereby generating spectrum splitting on the detection light intensity. The relationship between the microwave electric field to be measured E and the spectrum splitting spacing W is:
[0057] Step S105: according to the proportional relationship between the spacing of the spectrum splitting of the detection light and the electric field strength of the microwave field to be measured, the electric field strength of the microwave field to be measured at the corresponding position of each detection light beam is calculated.
[0058] Specifically, the host computer 120 calculates the electric field intensity of the microwave field to be measured at the position corresponding to each detection light beam based on the intensity of each detection light beam, so as to obtain a one-dimensional electric field measurement result.
[0059] In the above embodiments, the description of each embodiment has its own emphasis. For parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.
[0060] In the description of the present application, the terms "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more features.
[0061] The high-resolution microwave imaging device and its imaging method provided by the embodiments of the present application have been introduced in detail above. Specific examples are used in this article to elaborate on the principle and implementation manner of the present application. The description of the above embodiments is only used to help understand the method and its core idea of the present application; at the same time, for those skilled in the art, according to the idea of the present application, there will be changes in the specific implementation manner and application scope. In summary, the content of this specification should not be construed as a limitation to the present application.
Claims
1. A high-resolution microwave imaging device, characterized in that, The high-resolution microwave imaging device includes a detection system and a host computer. The detection system includes a first laser, an atomic gas cell, a second laser, a beam splitter, and a photodetector; Wherein, the atomic gas cell is disposed in the microwave field to be measured. The probe light generated by the first laser is split into multiple parallel probe lights by the beam splitter and incident into the atomic gas cell. The multiple probe lights excite the atoms in the atomic gas cell from the ground state energy level to the metastable energy level; The coupling light generated by the second laser is incident into the atomic gas cell and transmitted along multiple parallel reflection paths in the atomic gas cell. The multiple probe lights respectively coincide with the coupling light on the corresponding reflection paths and transmit in opposite directions. The coupling light is used to excite the atoms from the metastable energy level to the Rydberg energy level. The microwave field to be measured causes energy level changes of the atoms, thereby generating spectral splitting in the intensity of the probe light output from the atomic gas cell. The spacing of the spectral splitting is proportional to the electric field strength of the microwave field to be measured; The photodetector detects the intensities of the multiple probe lights output from the atomic gas cell. The host computer calculates the electric field strength of the microwave field to be measured at the corresponding position of each probe light based on the intensity of each probe light to obtain a one-dimensional electric field measurement result.
2. The high-resolution microwave imaging device according to claim 1, characterized in that Coupling light reflectors are arranged on both end faces of the atomic gas cell. The multiple probe lights are obliquely incident relative to the coupling light reflectors and incident into the atomic gas cell after being transmitted by the coupling light reflectors. The coupling light is obliquely incident into the atomic gas cell relative to the coupling light reflectors and forms the multiple reflection paths under the reflection action of the coupling light reflectors on both end faces of the atomic gas cell.
3. The high-resolution microwave imaging device according to claim 2, wherein The difference between the maximum intensity and the minimum intensity of the multiple probe lights incident on the coupling light reflectors is not greater than 20%.
4. The high-resolution microwave imaging device according to claim 2, wherein The reflectivity of the coupling light reflectors to the coupling light is not less than 90%.
5. The high-resolution microwave imaging device according to claim 1, characterized in that, The atoms in the atomic gas chamber are rubidium atoms, and the ground state energy level is 5S 1 / 2 , the fine energy level of F = 2, and the metastable energy level is 5P 3 / 2 , the fine energy level of F` = 3, and the Rydberg energy level is 87D 5 / 2 .
6. The high-resolution microwave imaging device according to claim 1, characterized in that, The wavelength of the probe light is 780 nm, and the wavelength of the coupling light is 480 nm.
7. The high-resolution microwave imaging device according to claim 1, characterized in that, The high-resolution microwave imaging device further includes a rotating device for rotating the detection system centered on the atomic gas cell. The host computer synthesizes the one-dimensional electric field measurement results at different rotation angles into a two-dimensional electric field measurement result.
8. The high-resolution microwave imaging device according to claim 1, characterized in that The high-resolution microwave imaging device further includes a translation device for translating the detection system. The host computer synthesizes the one-dimensional electric field measurement results at different translation positions into a two-dimensional electric field measurement result.
9. The high-resolution microwave imaging device according to claim 1, characterized in that The number of the multiple probe lights is not less than 4.
10. A high-resolution microwave imaging method, characterized in that, Including: Placing the atomic gas cell in the microwave field to be measured; Splitting the probe light generated by the first laser into multiple parallel probe lights and incident into the atomic gas cell, wherein the multiple probe lights excite the atoms in the atomic gas cell from the ground state energy level to the metastable energy level; Control the coupled light generated by the second laser to be transmitted along a plurality of reflection paths parallel to each other in the atomic gas chamber, and enable the multiple probe lights to respectively coincide with the coupled light on the corresponding reflection paths and transmit in opposite directions, wherein the coupled light is used to excite the atoms from the metastable energy level to the Rydberg energy level; Detect the intensities of the multiple probe lights emitted from the atomic gas chamber; Calculate the electric field strength of the microwave field to be measured at the position corresponding to each probe light according to the proportional relationship between the spacing of the spectral splitting of the probe light and the electric field strength of the microwave field to be measured.