Method for determining aging state of workpiece table and related product

Abstract

The invention discloses a method for determining the aging state of a workpiece table and a related product, and the method comprises the steps: obtaining a first coordinate value of the workpiece table under a first timestamp, a second coordinate value of the workpiece table under a second timestamp, and a first accumulated movement distance value of the workpiece table under the second timestamp under the condition that the workpiece table is electrified, the coordinate value of the workpiece table is determined based on a signal sent by the workpiece table; based on the first coordinate value, the second coordinate value and the first accumulative moving distance value, determining a second accumulative moving distance value of the workpiece table at the first timestamp; and determining that the workpiece table enters the aging state under the condition that the second accumulated moving distance value is greater than or equal to the preset value, and determining the aging state of the workpiece table based on the accumulated distance, so that the accuracy of determining the aging state of the workpiece table can be improved.

Description

Technical Field

[0001] This application belongs to the field of computer technology, and in particular relates to a method for determining the aging state of a workpiece stage and related products. Background Art

[0002] As a carrier device for wafers, the workpiece stage is widely used in the field of wafer observation. The workpiece stage mainly moves the position of the wafer placed on the workpiece stage by moving the position of the workpiece stage on the moving guide rail, so that wafers in different regions can be observed. Therefore, after the workpiece stage runs for a long time, the guide rail and the lubricating material required for the guide rail will be worn, resulting in the aging of the workpiece stage. In the prior art, determining the aging of the workpiece stage based on the running time of the workpiece stage has the problem of inaccurate determination. Summary of the Invention

[0003] The embodiments of this application provide a method for determining the aging state of a workpiece stage and related products, which can improve the accuracy of determining the aging state of the workpiece stage.

[0004] In a first aspect, the embodiments of this application provide a method for determining the aging state of a workpiece stage, including:

[0005] When the workpiece stage is powered on, obtain the first coordinate value of the workpiece stage at the first timestamp, the second coordinate value at the second timestamp, and the first cumulative movement distance value at the second timestamp, where the coordinate value of the workpiece stage is determined based on the signal sent by the workpiece stage, the second timestamp is the timestamp for obtaining the coordinate value of the workpiece stage before the first timestamp, and is adjacent to the first timestamp;

[0006] Determine the second cumulative movement distance value of the workpiece stage at the first timestamp based on the first coordinate value, the second coordinate value, and the first cumulative movement distance value;

[0007] When the second cumulative movement distance value is greater than or equal to a preset value, determine that the workpiece stage enters the aging state.

[0008] In a second aspect, the embodiments of this application provide a semiconductor detection device, including:

[0009] A workpiece stage for sending signals;

[0010] A workpiece stage controller for parsing the signal sent by the workpiece stage to determine the first coordinate value at the first timestamp and the second coordinate value at the second timestamp, where the second timestamp is the timestamp for obtaining the coordinate value of the workpiece stage before the first timestamp, and is adjacent to the first timestamp;

[0011] The host computer is configured to receive the first coordinate value and the second coordinate value sent by the workpiece stage controller, determine the second cumulative movement distance value at the first timestamp based on the first cumulative movement distance value, the first coordinate value, and the second coordinate value at the second timestamp read, and determine that the workpiece stage enters the aging state when it is determined that the second cumulative movement distance value is greater than or equal to a preset value.

[0012] In a third aspect, an embodiment of the present application provides a device for determining the aging state of a workpiece stage, including:

[0013] An acquisition module, configured to acquire the first coordinate value of the workpiece stage at the first timestamp, the second coordinate value of the workpiece stage at the second timestamp, and the first cumulative movement distance value of the workpiece stage at the second timestamp when the workpiece stage is powered on, where the coordinate value is determined based on a signal sent by the workpiece stage, the second timestamp is the timestamp for acquiring the coordinate value of the workpiece stage before the first timestamp, and is adjacent to the first timestamp;

[0014] A distance determination module, configured to determine the second cumulative movement distance value of the workpiece stage at the first timestamp based on the first coordinate value, the second coordinate value, and the first cumulative movement distance value;

[0015] An aging state determination module, configured to determine that the workpiece stage enters the aging state when the second cumulative movement distance value is greater than or equal to a preset value.

[0016] In a fourth aspect, an embodiment of the present application provides an electronic device, including:

[0017] A processor and a memory storing computer program instructions;

[0018] When the processor executes the computer program instructions, it is configured to execute the method for determining the aging state of the workpiece stage in the first aspect above.

[0019] In a fifth aspect, an embodiment of the present application provides a computer storage medium, on which computer program instructions are stored, and when the computer program instructions are executed by a processor, the method for determining the aging state of the workpiece stage in the first aspect above is implemented.

[0020] In a sixth aspect, an embodiment of the present application provides a computer program product, including a computer program, and when the computer program is processed by a processor, the method for determining the aging state of the workpiece stage in the first aspect above is implemented.

[0021] The method and related products for determining the aging state of a workpiece stage provided by the embodiments of the present application obtain the first coordinate value of the workpiece stage at the first timestamp, the second coordinate value at the second timestamp, and the first cumulative movement distance value at the second timestamp when the workpiece stage is powered on. Based on the above first coordinate value, second coordinate value, and first cumulative movement distance value, the second cumulative movement distance value is determined. When it is determined that the second cumulative movement distance value is greater than or equal to a preset value, it is determined that the workpiece stage enters the aging state. By determining whether the workpiece stage is aging through the cumulative movement distance value of the workpiece stage, the accuracy of determining the aging state of the workpiece stage can be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings required to be used in the embodiments of the present application. For those of ordinary skill in the art, other drawings can also be obtained based on these drawings without creative efforts.

[0023] Figure 1 It is a schematic flowchart of a method for determining the aging state of a workpiece stage provided by some embodiments of the present application.

[0024] Figure 2 It is a schematic flowchart of another method for determining the aging state of a workpiece stage provided by some embodiments of the present application.

[0025] Figure 3 It is a schematic flowchart of yet another method for determining the aging state of a workpiece stage provided by some embodiments of the present application.

[0026] Figure 4 It is a schematic diagram of a semiconductor detection device provided by some embodiments of the present application.

[0027] Figure 5 It is a schematic diagram of a device for determining the aging state of a workpiece stage provided by some embodiments of the present application.

[0028] Figure 6 It is a schematic hardware structure diagram of an electronic device provided by the embodiments of the present application. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0029] The features and exemplary embodiments of all aspects of the present application will be described in detail below. In order to make the objectives, technical solutions, and advantages of the present application clearer, the following further describes the present application in detail with reference to the drawings and specific embodiments. It should be understood that the specific embodiments described herein are only intended to explain the present application, rather than limiting the present application. For those skilled in the art, the present application can be implemented without some of these specific details. The following description of the embodiments is only intended to provide a better understanding of the present application by showing examples of the present application.

[0030] It should be noted that, in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variant thereof are intended to cover non-exclusive inclusion, such that a process, method, article or device comprising a series of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "comprising..." does not exclude the presence of additional identical elements in the process, method, article or device comprising the element.

[0031] Before elaborating on the technical solutions provided by the embodiments of the present application, for the convenience of understanding the embodiments of the present application, the present application first specifically describes the problems existing in the related art:

[0032] In the process of wafer manufacturing, the wafer is often placed on a workpiece table, and the position of the wafer is changed by moving the workpiece table, which facilitates the observation of the wafer by the lens of a Scanning Electron Microscope (SEM). Therefore, during the movement of the workpiece table, the guide rail and lubricating material of the workpiece table may be worn, causing the workpiece table to enter an aging state and affecting wafer observation.

[0033] Currently, the aging of the workpiece table is often determined by accumulating the operating duration of the workpiece table. However, there is a situation where the workpiece table is only powered on but not used. Therefore, relying solely on the operating duration to determine its aging has the problem of inaccurate determination.

[0034] Based on this, the embodiments of the present application provide a method and related products for determining the aging state of a workpiece table, which can solve the above problems. Next, the method for determining the aging state of a workpiece table provided by the embodiments of the present application will be described in detail.

[0035] As Figure 1 shown, in some embodiments, the embodiments of the present application provide a method for determining the aging state of a workpiece table, and the method may include the following steps S110 - S130:

[0036] S110: When the workpiece table is powered on, obtain the first coordinate value of the workpiece table at the first timestamp, the second coordinate value at the second timestamp, and the first cumulative movement distance value at the second timestamp, where the coordinate values are determined based on the signals sent by the workpiece table.

[0037] When the workpiece table is powered on, the position coordinate value of the workpiece table can be obtained periodically. Based on the coordinate value obtained at the first timestamp, the coordinate value obtained at the second timestamp, and the cumulative movement distance value calculated at the second timestamp, the cumulative movement distance value at the current moment is determined.

[0038] Here, the first coordinate value of the workpiece table, the second coordinate value at the second timestamp, and the first cumulative movement distance value at the second timestamp can be obtained at the first timestamp. The above first cumulative movement distance value is the cumulative movement distance value of the workpiece table from the power-on moment to the second timestamp.

[0039] It can be imagined that the above coordinate values can be determined based on the signals sent by the workpiece table. The above workpiece table can be equipped with a motor encoder, and the motor encoder can periodically send sine and cosine signals. By analyzing the sine and cosine signals, the coordinate values of the workpiece table can be obtained.

[0040] S120: Determine the second cumulative movement distance value of the workpiece table at the first timestamp based on the first coordinate value, the second coordinate value, and the first cumulative movement distance value.

[0041] Here, the determination of the second cumulative movement distance value of the workpiece table at the first timestamp based on the first coordinate value, the second coordinate value, and the first cumulative movement distance value can satisfy the following conditions:

[0042] A = B + |z1 - z2| (1)

[0043] Where A is the second cumulative movement distance value, B is the first cumulative movement distance value, z1 is the first coordinate value, and z2 is the second coordinate value.

[0044] S130: When the second cumulative movement distance value is greater than or equal to a preset value, determine that the workpiece table enters the aging state.

[0045] When it is determined that the above second cumulative movement distance value is greater than or equal to the preset value, it can be determined that the above workpiece table enters the aging state. Here, the above preset value can be set manually.

[0046] In some examples, the corresponding relationship between the cumulative movement distance value and the aging degree can be set, and the target aging degree corresponding to the second cumulative movement distance value can be determined based on the above corresponding relationship. For example, when it is determined that the second cumulative distance value is x, the target aging program corresponds to y%.

[0047] In some examples, the corresponding relationship between the aging degree and the solution can be established. The target solution corresponding to the target aging degree can be determined based on the above corresponding relationship between the aging degree and the solution, and a prompt message including the target solution can be sent to the user device. The above prompt message can prompt the user to delay the aging of the workpiece table based on the target solution.

[0048] For example, when the aging degree is determined to be 20%, a target solution to increase the lubricating material can be sent to the user equipment. When the aging degree is 80%, a target solution to replace the guide rail can be sent to the user equipment.

[0049] The embodiment of the present application provides a method for obtaining the first coordinate value of the workpiece table at the first timestamp, the second coordinate value at the second timestamp, and the first cumulative movement distance value at the second timestamp when the workpiece table is powered on. Based on the above first coordinate value, second coordinate value, and first cumulative movement distance value, the second cumulative movement distance value is determined. When it is determined that the second cumulative movement distance value is greater than or equal to a preset value, it is determined that the workpiece table enters the aging state. By determining whether the workpiece table is aging through the cumulative movement distance value of the workpiece table, the accuracy of determining the aging state of the workpiece table can be improved.

[0050] In some embodiments, the above step S120: determining the second cumulative movement distance value of the workpiece table at the first timestamp based on the first coordinate value, second coordinate value, and first cumulative movement distance value may include:

[0051] Determining the change value of the movement position based on the first coordinate value and the second coordinate value; determining the second cumulative movement distance value based on the change value of the movement position and the first cumulative movement distance value.

[0052] Here, the absolute value of the difference between the first coordinate value and the second coordinate value can be obtained to determine the change value of the movement position, and the second cumulative movement distance value is determined based on the sum of the above change value of the movement position and the first cumulative movement distance value.

[0053] The embodiment of the present application determines the change value of the movement position based on the above first coordinate value and second coordinate value, and can determine the second cumulative movement distance value at the first timestamp based on the above change value of the movement position and the first cumulative movement distance value, which is convenient for subsequently determining the aging state of the workpiece table based on the above second cumulative movement distance value and improving the accuracy of determining the aging state of the workpiece table.

[0054] Here, due to the particularity of the workpiece table's operation, at each power-on moment, the position of the workpiece table at the power-on moment will be reset to the origin, that is, the coordinate value at the power-on moment is the origin coordinate value, and the first cumulative movement distance value at the power-on moment is reset to a preset value, such as reset to 0. Based on the above characteristics, it can be determined whether there is a power-off situation during the operation of the workpiece table.

[0055] In some embodiments, as Figure 2 shown, determining the second cumulative movement distance value based on the change value of the movement position and the first cumulative movement distance value may include the following steps S210 - S220:

[0056] S210: Obtaining the historical cumulative movement distance value of the workpiece table.

[0057] Here, the cumulative moving distance values calculated at each different timestamp are stored in a preset file. For example, they can be stored in a preset file on the host computer or in a preset file in the cloud storage space. The historical cumulative moving distance value of the workbench can be obtained from the preset file, and the above historical cumulative moving distance value is the value with the update time closest to the current first timestamp.

[0058] S220: Determine the power-off state of the workbench based on the second cumulative moving distance value and the historical cumulative moving distance value.

[0059] Based on the above second cumulative moving distance value and the historical cumulative moving distance value, the power-off state of the workbench can be determined. Here, when the above second cumulative moving distance value is greater than or equal to the historical cumulative moving distance value, the power-off state of the above workbench is the first state; when the above second cumulative moving distance value is less than the historical cumulative moving distance value, the power-off state of the above workbench is the second state. The above first state indicates that the workbench is not powered off, and the above second state indicates that the workbench is powered off during the time period from the second timestamp to the first timestamp, that is, the above first timestamp is the first moment after the workbench is powered on again.

[0060] S230: When the power-off state of the workbench is the first state, determine the second cumulative moving distance value based on the first coordinate value, the second coordinate value, and the first cumulative moving distance value, where the first state is the state corresponding to the first cumulative distance value being greater than or equal to the historical cumulative moving distance value.

[0061] It can be imagined that the above first state indicates that the workbench is not powered off. When the power-off state of the above workbench is the first state, the second cumulative moving distance value can be determined based on the above first coordinate value, the second coordinate value, and the first cumulative moving distance value. For example, the second cumulative moving distance value can be determined based on the above formula (1).

[0062] Or,

[0063] S240: When the power-off state of the workbench is the second state, determine the second cumulative moving distance value based on the first coordinate value, the second coordinate value, the historical cumulative moving distance value, and the first cumulative moving distance value, where the second state is the state corresponding to the first cumulative distance value being less than the historical cumulative moving distance value.

[0064] When the power-off state of the above workbench is the second state, the second cumulative moving distance value can be determined based on the above first coordinate value, the second coordinate value, the historical cumulative moving distance value, and the first cumulative moving distance value. For example, the above second cumulative moving distance value can be determined based on the following expression:

[0065] A = D + |z1 - z2| (2)

[0066] Wherein, A is the second cumulative movement distance value, D is the historical cumulative movement distance value, z1 is the first coordinate value, and z2 is the second coordinate value.

[0067] When it is determined that the above second cumulative movement distance value is greater than or equal to a preset value, it can be determined that the wafer enters the aging state. In the embodiments of the present application, by obtaining the historical cumulative movement distance value of the worktable, determining the power-off state of the worktable based on the above second cumulative movement distance value and the historical cumulative movement distance value, and when it is determined that the power-off state of the worktable is the first state, determining the second cumulative movement distance value based on the above first coordinate value, second coordinate value, and first cumulative movement distance value, the accuracy of determining that the worktable enters the aging state based on the above second cumulative movement distance value can be improved. At the same time, in the embodiments of the present application, by determining that the power-off state of the worktable is the second state, determining the second cumulative movement distance value based on the first coordinate value, second coordinate value, historical cumulative movement distance value, and first cumulative movement distance value, and determining whether the worktable enters the aging state based on the second cumulative movement distance value, it can not only determine that the worktable has a power-off, but also determine the actual cumulative movement distance value of the worktable based on the historical cumulative movement distance value and the coordinate value in the case of power-off, improving the accuracy of determining the aging state of the worktable.

[0068] In some embodiments, the method for determining the aging state of the worktable may further include:

[0069] Updating the first cumulative movement distance value based on the second cumulative movement distance value.

[0070] After determining the second cumulative movement distance value, the first cumulative movement distance value can be updated based on the second cumulative movement distance value, so that the cumulative movement distance value at the third timestamp can be determined based on the third coordinate value, first coordinate value, and the above second cumulative movement distance value of the worktable at the third timestamp.

[0071] In the embodiments of the present application, after determining the second cumulative movement distance value, the first cumulative movement distance value is updated based on the second cumulative movement distance value, so that subsequent superposition can be performed on the basis of the second cumulative movement distance value

[0072] In some embodiments, as Figure 3 shown, the method for determining the aging state of the worktable may further include:

[0073] S310: Based on the corresponding relationship between the preset cumulative distance value and the aging degree, determine the target aging degree corresponding to the second cumulative movement distance value.

[0074] Here, based on the correspondence relationship between the preset cumulative distance value and the aging degree, the target aging degree corresponding to the second cumulative movement distance value can be determined. For example, when the second cumulative distance value is x, the target aging program corresponds to y%.

[0075] S320: Based on the preset correspondence relationship between the aging degree and the solution, determine the target solution corresponding to the target aging degree, and send a prompt message including the target solution to the user equipment.

[0076] Based on the preset correspondence relationship between the aging degree and the solution, the target solution corresponding to the target aging degree can be determined and a prompt message including the target solution can be sent to the user equipment. For example, when it is determined that the aging degree is 20%, it can be determined that the target solution is to increase the lubricating material, and a prompt message to increase the lubricating material can be sent to the user equipment; when the aging degree is 80%, it can be determined that the target solution is to replace the guide rail, and a prompt message to replace the guide rail can be sent to the user equipment.

[0077] In the embodiment of the present application, by determining the target aging degree corresponding to the second cumulative movement distance value based on the preset correspondence relationship between the cumulative movement distance value and the aging degree, and then based on the correspondence relationship between the aging degree and the solution, and sending a prompt message including the target solution to the user equipment, the user can be prompted to delay the aging of the workbench in a timely manner based on the above target solution to extend the service life of the workbench.

[0078] In some embodiments, as Figure 4 shown, the embodiment of the present application provides a semiconductor detection device, which may include:

[0079] A workbench 401 for sending signals.

[0080] A workbench controller 402 for parsing the signals sent by the workbench to determine the first coordinate value at the first timestamp and the second coordinate value at the second timestamp, where the second timestamp is the timestamp for obtaining the coordinate value of the workbench before the first timestamp and is adjacent to the first timestamp.

[0081] A host computer 403 for receiving the first coordinate value and the second coordinate value sent by the workbench controller, and determining the second cumulative movement distance value at the first timestamp based on the first cumulative movement distance value, the first coordinate value, and the second coordinate value at the second timestamp read, and determining that the workbench enters the aging state when it is determined that the second cumulative movement distance value is greater than or equal to the preset value.

[0082] As Figure 4As shown, the above workpiece table 401 can be installed with a motor encoder, and the motor encoder can periodically send signals to the workpiece table controller 402. The signals can include sine and cosine signals.

[0083] The above workpiece table controller 402 can be installed with an encoder, and the encoder can parse the sine and cosine signals sent by the workpiece table 401 to determine the first coordinate value at the first timestamp and the second coordinate value at the second timestamp.

[0084] The above host computer 403 can obtain the first coordinate value and the second coordinate value from the workpiece table controller 402. Here, the host computer 403 can periodically obtain the coordinate values of the workpiece table 401 from the workpiece table controller 402 based on the Ethernet control automation technology (Ethercat) network. For example, when obtaining the second coordinate value at the second timestamp and the first coordinate value at the first timestamp. And the host computer 403 can determine the second cumulative movement distance value at the first timestamp based on the first coordinate value, the second coordinate value, and the first cumulative movement distance value calculated previously at the second timestamp. And when it is determined that the second cumulative movement distance value is greater than or equal to the preset value, it is determined that the workpiece table 401 enters the aging state.

[0085] In the embodiment of the present application, the workpiece table controller parses the signals sent by the workpiece table to obtain the first coordinate value and the second coordinate value, and the host computer determines the second cumulative movement distance value based on the first coordinate value, the second coordinate value, and the first cumulative movement distance value, which is convenient for subsequently determining the aging state of the workpiece table based on the second cumulative movement distance value and improving the accuracy of determining the aging state of the workpiece table.

[0086] In some embodiments, the above host computer is further configured to:

[0087] Obtain the historical cumulative movement distance value of the workpiece table 401, determine the power-off state of the workpiece table 401 based on the second cumulative movement distance value and the historical cumulative movement distance value, and when the power-off state of the workpiece table 401 is the first state, determine the second cumulative movement distance value based on the first coordinate value, the second coordinate value, and the first cumulative movement distance value, and when the second cumulative movement distance value is greater than or equal to the preset value, determine that the workpiece table 401 enters the aging state, where the first state is the state corresponding to the first cumulative distance value being greater than or equal to the historical cumulative movement distance value; or

[0088] When the power-off state of the worktable 401 is the second state, a third cumulative movement distance value is determined based on the first coordinate value, the second coordinate value, the historical cumulative movement distance value, and the first cumulative movement distance value. When the third cumulative movement distance value is greater than or equal to a preset value, it is determined that the worktable 401 enters the aging state, where the second state is the state corresponding to the first cumulative distance value being less than the historical cumulative movement distance value, and the second state indicates that the worktable 401 is powered off.

[0089] The above host computer 403 can obtain the historical cumulative movement distance value of the worktable 401, determine the power-off state of the worktable 401 based on the second cumulative movement distance value and the historical cumulative movement distance value, and determine whether the worktable 401 enters the aging state based on the second cumulative movement distance value or the second cumulative movement distance value respectively when the power-off state is the first state or the second state.

[0090] In the embodiment of the present application, the power-off state of the worktable is determined by comparing the historical cumulative movement distance value and the second cumulative movement distance value, which can not only determine that the worktable has lost power, but also determine the actual cumulative movement distance value of the worktable based on the historical cumulative movement distance value and the coordinate value in the case of power-off, improving the accuracy of determining the aging state of the worktable.

[0091] In some examples, the above host computer can calculate the second cumulative movement distance value based on the foregoing formula (1), and update and store the first cumulative movement distance value based on the second cumulative movement distance value.

[0092] In some embodiments, the above host computer can also determine the target aging degree corresponding to the second cumulative movement distance value based on the corresponding relationship between the preset cumulative distance value and the aging degree, determine the target solution corresponding to the target aging degree based on the corresponding relationship between the preset aging degree and the solution, and send a prompt message including the target solution to the user device. In some embodiments, as Figure 4 shown, the above semiconductor detection device further includes a motor 404. The worktable control can be connected to the encoder in the worktable 401 through the encoder feedback line S1, and connected to the moving component in the worktable 401 through the motor drive line S2.

[0093] The above worktable controller 402 is further configured to control the moving component of the worktable 401 to move on the guide rail based on the power provided by the motor 404.

[0094] In some embodiments, the workpiece stage 401 can have multiple moving directions. For example, it can move along intersecting first and second directions. The first direction can be the direction along the x-axis, and the second direction can be the direction along the y-axis. The guide rails can include a first guide rail in the first direction and a second guide rail in the second direction. The workpiece stage 401 can move on the first guide rail and the second guide rail respectively. The first cumulative moving distance, the second cumulative moving distance, the historical cumulative moving distance, and the coordinate values are all the cumulative moving distance and coordinate values of the workpiece stage 401 on the guide rail in one direction. The aging state of the workpiece stage 401 is the aging state of the guide rail or the lubricating material required for the guide rail.

[0095] Based on the same inventive concept, as Figure 5 shown, an embodiment of the present application further provides a device 500 for determining the aging state of a workpiece stage. The device can include:

[0096] An acquisition module 501, configured to, when the workpiece stage is powered on, acquire the first coordinate value at the first timestamp, the second coordinate value at the second timestamp, and the first cumulative moving distance value at the second timestamp of the workpiece stage, where the coordinate value is determined based on the signal sent by the workpiece stage;

[0097] A distance determination module 502, configured to determine the second cumulative moving distance value of the workpiece stage at the first timestamp based on the first coordinate value, the second coordinate value, and the first cumulative moving distance value;

[0098] An aging state determination module 503, configured to determine that the workpiece stage enters the aging state when the second cumulative moving distance value is greater than or equal to a preset value.

[0099] In some embodiments, the distance determination module may specifically be configured to:

[0100] Determine the moving position change value based on the first coordinate value and the second coordinate value;

[0101] Determine the second cumulative moving distance value based on the moving position change value and the first cumulative moving distance value.

[0102] In some embodiments, the acquisition module is further configured to:

[0103] Acquire the historical cumulative moving distance value of the workpiece stage;

[0104] Determine the power-off state of the workpiece stage based on the second cumulative moving distance value and the historical cumulative moving distance value;

[0105] When the power-off state of the workpiece stage is the first state, determine the second cumulative moving distance value based on the first coordinate value, the second coordinate value, and the first cumulative moving distance value, where the first state is the state where the first cumulative distance value is greater than or equal to the historical cumulative moving distance value; or

[0106] When the power-off state of the workpiece table is the second state, a second cumulative movement distance value is determined based on the first coordinate value, the second coordinate value, the historical cumulative movement distance value, and the first cumulative movement distance value, where the second state is a state in which the first cumulative distance value is less than the historical cumulative movement distance value, and the second state indicates that the workpiece table is powered off.

[0107] In some embodiments, the apparatus for determining the aging state of the workpiece table may further include a prompting module, and the prompting module may be configured to:

[0108] Based on the corresponding relationship between the preset cumulative distance value and the aging degree, determine the target aging degree corresponding to the second cumulative movement distance value;

[0109] Based on the corresponding relationship between the preset aging degree and the solution, determine the target solution corresponding to the target aging degree, and send a prompt message including the target solution to the user equipment.

[0110] In some embodiments, the apparatus for determining the aging state of the workpiece table further includes an updating module, configured to:

[0111] Update the first cumulative movement distance value based on the second cumulative movement distance value.

[0112] The apparatus in the above embodiments is used to implement the corresponding method for determining the aging state of the workpiece table in any of the foregoing embodiments, and has the beneficial effects of the corresponding method embodiments, which will not be elaborated here.

[0113] Figure 6 Schematic diagram of the hardware structure of an electronic device provided by an application embodiment.

[0114] The electronic device 600 may include a processor 601 and a memory 602 storing computer program instructions.

[0115] Specifically, the processor 601 may include a central processing unit (CPU), or an application specific integrated circuit (ASIC), or one or more integrated circuits configured to implement the embodiments of the present application.

[0116] The memory 602 may include a mass memory for data or instructions. By way of example and not limitation, the memory 602 may include a hard disk drive (HDD), a floppy disk drive, a flash memory, an optical disk, a magneto-optical disk, a magnetic tape, or a universal serial bus (USB) drive, or a combination of two or more of these. Where appropriate, the memory 602 may include removable or non-removable (or fixed) media. Where appropriate, the memory 602 may be internal or external to the integrated gateway disaster recovery device. In a particular embodiment, the memory 602 is a non-volatile solid-state memory.

[0117] In a particular embodiment, the memory 602 includes a read-only memory (ROM). Where appropriate, the ROM may be a mask-programmed ROM, a programmable ROM (PROM), an erasable PROM (EPROM), an electrically erasable PROM (EEPROM), an electrically rewritable ROM (EAROM), or a flash memory, or a combination of two or more of these.

[0118] The memory may include a read-only memory (ROM), a random access memory (RAM), a magnetic disk storage media device, an optical storage media device, a flash memory device, an electrical, optical, or other physical / tangible memory storage device. Thus, generally, the memory includes one or more tangible (non-transitory) computer-readable storage media (e.g., memory devices) encoded with software including computer-executable instructions, and when the software is executed (e.g., by one or more processors), it is operable to perform the operations described with reference to the method according to the first aspect of the present application.

[0119] The processor 601 reads and executes the computer program instructions stored in the memory 602 to implement any one of the methods for determining the aging state of the worktable in the above embodiments.

[0120] In one example, the electronic device may further include a communication interface 603 and a bus 604. Among them, as Figure 6 , the processor 601, the memory 602, and the communication interface 603 are connected through the bus 604 and complete communication with each other.

[0121] The communication interface 603 is mainly used to implement communication between the various modules, devices, units, and / or devices in the embodiments of the present application.

[0122] The bus 604 includes hardware, software, or both, and couples the components of the online data flow metering device to each other. By way of example and not limitation, the bus may include an Accelerated Graphics Port (AGP) or other graphics bus, an Enhanced Industry Standard Architecture (EISA) bus, a Front Side Bus (FSB), a HyperTransport (HT) interconnect, an Industry Standard Architecture (ISA) bus, an InfiniBand interconnect, a Low Pin Count (LPC) bus, a memory bus, a MicroChannel Architecture (MCA) bus, a Peripheral Component Interconnect (PCI) bus, a PCI-Express (PCI-X) bus, a Serial Advanced Technology Attachment (SATA) bus, a Video Electronics Standards Association Local (VLB) bus, or other suitable buses or a combination of two or more of these. Where appropriate, the bus 604 may include one or more buses. Although the embodiments of the present application describe and illustrate specific buses, the present application contemplates any suitable bus or interconnect.

[0123] The electronic device of the above embodiment is used to implement the corresponding method for determining the aging state of the workpiece table in any of the foregoing embodiments, and has the beneficial effects of the corresponding method embodiments, which will not be elaborated here.

[0124] In addition, in combination with the method for determining the aging state of the workpiece table in the above embodiments, an embodiment of the present application can be implemented by providing a computer storage medium. Computer program instructions are stored on the computer storage medium; when the computer program instructions are executed by a processor, any of the methods for determining the aging state of the workpiece table in the above embodiments is implemented.

[0125] In addition, in combination with the method for determining the aging state of the workpiece table in the above embodiments, an embodiment of the present application can be implemented by providing a computer program product. When the instructions of the computer program product are executed by the processor of the electronic device, any of the methods for determining the aging state of the workpiece table in the above embodiments is implemented.

[0126] Those of ordinary skill in the art should understand that: the discussion of any of the above embodiments is only exemplary and is not intended to imply that the scope of the present application (including the claims) is limited to these examples; under the concept of the present application, the technical features in the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations in different aspects of the embodiments of the present application as described above, which are not provided in detail for the sake of brevity.

[0127] The functional blocks shown in the above-described structural block diagrams can be implemented as hardware, software, firmware, or a combination thereof. When implemented in hardware, it can be, for example, an electronic circuit, an application specific integrated circuit (ASIC), appropriate firmware, a plug-in, a functional card, and so on. When implemented in software, the elements of the present application are programs or code segments for performing the required tasks. The program or code segment can be stored in a machine-readable medium, or transmitted over a transmission medium or communication link via a data signal carried in a carrier wave. A "machine-readable medium" can include any medium that can store or transmit information. Examples of machine-readable media include electronic circuits, semiconductor memory devices, ROM, flash memory, erasable ROM (EROM), floppy disks, CD-ROMs, optical discs, hard disks, fiber optic media, radio frequency (RF) links, and so on. The code segment can be downloaded via a computer network such as the Internet, an intranet, and so on.

[0128] It should also be noted that in the exemplary embodiments mentioned in the present application, some methods or devices are described based on a series of steps or devices. However, the present application is not limited to the order of the above steps, that is, the steps can be executed in the order mentioned in the embodiments, or can be different from the order in the embodiments, or several steps can be executed simultaneously.

[0129] Aspects of the present application have been described above with reference to the flowcharts and / or block diagrams of methods, apparatuses (devices), and computer program products according to embodiments of the present application. It should be understood that each block in the flowcharts and / or block diagrams, and the combinations of blocks in the flowcharts and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general purpose computer, a special purpose computer, or other programmable data processing device to produce a machine such that the instructions executed by the processor of the computer or other programmable data processing device enable the implementation of the functions / acts specified in one or more blocks of the flowcharts and / or block diagrams. Such a processor can be, but is not limited to, a general purpose processor, a special purpose processor, a special application processor, or a field programmable logic circuit. It can also be understood that each block in the block diagrams and / or flowcharts, and the combinations of blocks in the block diagrams and / or flowcharts, can also be implemented by dedicated hardware that performs the specified functions or acts, or by a combination of dedicated hardware and computer instructions.

[0130] As described above, this is only the specific implementation manner of the present application. Those skilled in the art can clearly understand that for the convenience and brevity of description, the specific working processes of the devices, modules, and units described above can refer to the corresponding processes in the foregoing method embodiments, and will not be elaborated herein. It should be understood that the protection scope of the present application is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present application can easily think of various equivalent modifications or substitutions, and these modifications or substitutions should all be covered within the protection scope of the present application.

Claims

1. A method for determining the aging state of a workpiece table, characterized in that Including: When the workbench is powered on, obtain the first coordinate value of the workbench at the first timestamp, the second coordinate value at the second timestamp, and the first cumulative movement distance value at the second timestamp. Wherein, the coordinate value of the workbench is determined based on the signal sent by the workbench, and the second timestamp is the timestamp when the coordinate value of the workbench was obtained before the first timestamp and is adjacent to the first timestamp; Determine the second cumulative movement distance value of the workbench at the first timestamp based on the first coordinate value, the second coordinate value, and the first cumulative movement distance value; When the second cumulative movement distance value is greater than or equal to a preset value, determine that the workbench enters the aging state.

2. The method for determining the aging state of a workpiece table according to claim 1, wherein Determining the second cumulative movement distance value of the workbench at the first timestamp includes: Determine the change value of the movement position based on the first coordinate value and the second coordinate value; Determine the second cumulative movement distance value based on the change value of the movement position and the first cumulative movement distance value.

3. The method for determining the aging state of a workpiece table according to claim 1, characterized in that, The determining the second cumulative movement distance value of the workbench at the first timestamp based on the first coordinate value, the second coordinate value, and the first cumulative movement distance value includes: Obtain the historical cumulative movement distance value of the workbench; Determine the power-off state of the workbench based on the second cumulative movement distance value and the historical cumulative movement distance value; When the power-off state of the workbench is the first state, determine the second cumulative movement distance value based on the first coordinate value, the second coordinate value, and the first cumulative movement distance value, where the first state is the state corresponding to the first cumulative distance value being greater than or equal to the historical cumulative movement distance value; or When the power-off state of the workbench is the second state, determine the second cumulative movement distance value based on the first coordinate value, the second coordinate value, the historical cumulative movement distance value, and the first cumulative movement distance value, where the second state is the state corresponding to the first cumulative distance value being less than the historical cumulative movement distance value.

4. The method for determining the aging state of a workpiece table according to claim 1, characterized in that, Also including: Determine the target aging degree corresponding to the second cumulative movement distance value based on the corresponding relationship between the preset cumulative distance value and the aging degree; Determine the target solution corresponding to the target aging degree based on the corresponding relationship between the aging degree and the solution, and send a prompt message including the target solution to the user device.

5. The method for determining the aging state of a workpiece table according to claim 1, wherein The method also includes: Update the first cumulative movement distance value based on the second cumulative movement distance value.

6. A semiconductor detection device, characterized in that, Including: A workbench for sending signals; A workbench controller for parsing the signal sent by the workbench to determine the first coordinate value of the workbench at the first timestamp and the second coordinate value at the second timestamp, where the second timestamp is the timestamp when the coordinate value of the workbench was obtained before the first timestamp and is adjacent to the first timestamp; The host computer is configured to receive the first coordinate value and the second coordinate value sent by the workpiece table controller, and determine the second cumulative movement distance value at the first timestamp based on the first cumulative movement distance value, the first coordinate value, and the second coordinate value at the second timestamp read. When it is determined that the second cumulative movement distance value is greater than or equal to a preset value, it is determined that the workpiece table enters the aging state.

7. An apparatus for determining the aging state of a workpiece table, characterized in that, It includes: An acquisition module, configured to, when the workpiece table is powered on, acquire the first coordinate value of the workpiece table at the first timestamp, the second coordinate value at the second timestamp, and the first cumulative movement distance value at the second timestamp. The coordinate value of the workpiece table is determined based on the signal sent by the workpiece table. The second timestamp is the timestamp when the coordinate value of the workpiece table was acquired before the first timestamp and is adjacent to the first timestamp; A distance determination module, configured to determine the second cumulative movement distance value of the workpiece table at the first timestamp based on the first coordinate value, the second coordinate value, and the first cumulative movement distance value; An aging state determination module, configured to determine that the workpiece table enters the aging state when the second cumulative movement distance value is greater than or equal to a preset value.

8. An electronic device, characterized in that, The device includes: a processor and a memory storing computer program instructions; The processor reads and executes the computer program instructions to implement the method for determining the aging state of the workpiece table according to any one of claims 1 to 5.

9. A readable storage medium, characterized in that, Computer program instructions are stored on the readable storage medium, and when the computer program instructions are executed by the processor, the method for determining the aging state of the workpiece table according to any one of claims 1 to 5 is implemented.

10. A computer program product, comprising a computer program, characterized in that, When the computer program is processed by the processor, the method for determining the aging state of the workpiece table according to any one of claims 1 to 5 is implemented.

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