Rapid detection device for new gaseous pollution in semiconductor industry

Abstract

The invention relates to the technical field of gaseous pollution detection, and discloses a rapid detection device for new gaseous pollution in the semiconductor industry, the bottom end of a motor is fixedly connected with a platform, the output end of the motor is connected with a displacement part, the displacement part is composed of a bottom and a top, and the motor is used for driving the bottom of the displacement part to reciprocate in the vertical direction; the top of the displacement part is in non-coaxial rotating connection with the rotating part, and the top of the displacement part synchronously rotates along with vertical reciprocating displacement of the displacement part, so that when the displacement part can drive the rotating part to vertically change along with the displacement part, the sensor integrator mounted at the top of the rotating part is synchronously driven to rotate. The displacement part can drive the sensor integrator to perform reciprocating displacement in the vertical direction and can be matched with the rotating part to realize synchronous rotation change under vertical reciprocating displacement, and the rotating part can also realize angle change, so that the detection efficiency and range of gaseous pollutants of the device are further improved.

Description

Technical Field

[0001] The present invention relates to the technical field of gaseous pollution detection, and particularly to a rapid detection device for new gaseous pollution in the semiconductor industry. Background Art

[0002] The gaseous pollutants involved in semiconductor industrial production mainly include the following four categories: acidic gases (MA), basic gases (MB), condensable organic substances (MC), doping substances (MD), and other pollutants.

[0003] Among them, acidic gases (MA) include: hydrogen chloride (HCl), hydrofluoric acid (HF), sulfuric acid vapor (H2SO4), nitrogen oxides (NOx), etc. They corrode the metal circuits of wafers, resulting in surface particle deposition and shortened service life of equipment components; basic gases (MB) include: ammonia (NH3), organic amines (such as trimethylamine), amides, etc. They react with acidic gases to form salt particles, causing surface contamination of wafers or deformation of photoresist (T-top defects), and even leading to line width errors (e.g., 5 ppb NH3 exposure for 10 minutes can cause an error of 10 - 20 nm); condensable organic substances (MC) include: volatile organic compounds (VOCs, such as isopropyl alcohol, siloxanes), plasticizers (phthalates), antioxidants, etc. They condense on the wafer surface to form a film, changing the dielectric properties or triggering impurity structures (such as oxidation of silicon nitride film); doping substances (MD) include: boron compounds (BF3), phosphine (PH3), arsine (AsH3), diborane (B2H6), etc. They change the electrical properties of semiconductors, resulting in device failure or reduced yield (e.g., boron contamination causes an increase in leakage current); other pollutants: sulfides (such as SO2), ozone (O3), heavy metal vapors (such as mercury), etc., which may come from external air pollution or equipment leakage.

[0004] Hydrogen chloride is an inorganic acid gas with the molecular formula HCl. HCl is widely used as a raw material for preparing hydrochloric acid, chlorides, and various organic synthesis reactions in chemical production. Pure HCl gas is colorless and has a pungent odor. It is extremely soluble in water to form hydrochloric acid and has high volatility under normal temperature and pressure. Its toxicity is mainly manifested as a strong irritating effect on the respiratory mucosa, and long-term exposure can cause occupational diseases.

[0005] Hydrofluoric acid is an inorganic acid with the molecular formula HF. Its particularity lies in its ability to react with silicon and its oxides. HF is used as an etchant and cleaning agent in the semiconductor industry, especially in the manufacturing process of microelectronic devices. The HF solution is colorless and transparent, has a strong pungent odor, and is extremely volatile. Its toxicity is extremely high. It can quickly penetrate the skin and tissues, combine with calcium ions in the blood to form calcium fluoride, resulting in severe or even fatal systemic poisoning.

[0006] Sulfuric acid (H2SO4) is a strong acid with the molecular formula H2SO4. Sulfuric acid is widely used in fertilizer production, oil refining, wastewater treatment, and various chemical synthesis reactions. Pure sulfuric acid is a colorless oily liquid with strong irritation and corrosiveness. At normal temperature and pressure, its concentrated solution has a high vapor pressure, while dilute sulfuric acid is relatively stable. Its toxicity is mainly manifested in the strong irritation to the skin, eyes, and respiratory tract, and long-term exposure may cause serious health problems. Currently, the main method for dealing with sulfuric acid leakage or contact is to quickly rinse with a large amount of water and seek medical assistance.

[0007] Nitric acid is a strong oxidizing inorganic acid with the molecular formula HNO3 and has wide applications in the fields of chemical industry, military industry, and medicine. Nitric acid is an important raw material for manufacturing nitrogen fertilizers, explosives, and various organic synthesis reactions. Pure nitric acid is a colorless transparent liquid with an irritating odor, volatile and unstable. Its toxicity is mainly manifested as strong irritation and corrosion to the skin and mucous membranes, and inhaling high-concentration nitric acid vapor can cause serious respiratory tract damage.

[0008] Phosphorus is a non-metallic element with the element symbol P and exists in two allotropes: white phosphorus and red phosphorus. Phosphorus has wide applications in the fields of chemical industry, agriculture, medicine, and military, such as manufacturing phosphate fertilizers, pesticides, and matches. White phosphorus is a colorless or yellowish wax-like solid, highly toxic and flammable; red phosphorus is a dark red powder, relatively stable but still toxic. The toxicity of phosphorus is mainly manifested as damage to the nervous system and causing organ failure of the liver, kidneys, etc.

[0009] Boron is a non-metallic element with the element symbol B and exists in nature in various compound forms. Boron has important applications in the fields of glass, ceramics, metallurgy, and nuclear industry. Pure boron is a black or silver-gray solid, insoluble in water but can form various compounds with elements such as oxygen and nitrogen. The toxicity of boron is relatively low, but excessive intake may still cause irritation to the skin, eyes, and respiratory system.

[0010] Ozone is an allotrope of oxygen with the molecular formula O3 and mainly exists in the stratosphere of the atmosphere as the earth's protective umbrella. Ozone has wide applications in water treatment, air purification, and medical treatment. Ozone is a light blue gas with a special irritating odor, extremely unstable and easily decomposes into oxygen. Its toxicity is mainly manifested as the irritation to the respiratory mucosa, and long-term exposure can cause respiratory diseases and a decline in lung function.

[0011] In order to quickly detect gaseous pollution in the semiconductor industry, detection devices are generally set up in the core area inside the clean room, around hazardous gas process equipment, auxiliary facilities and high-risk areas, and outdoor associated areas (in a few scenarios). And due to the semiconductor industrial environment, explosion-proof design is required for the detection equipment. At this time, explosion-proof certification schemes such as flameproof type (Exd) or intrinsically safe type (Exia) need to be adopted.

[0012] On this basis, in order to further improve the detection efficiency and range of the detection device, a rapid detection device for new gaseous pollutants in the semiconductor industry is specifically proposed. Summary of the Invention

[0013] To solve the technical problems proposed in the background art, the present invention provides a rapid detection device for new gaseous pollutants in the semiconductor industry.

[0014] The present invention is realized by the following technical solutions: A rapid detection device for new gaseous pollutants in the semiconductor industry includes a motor, a displacement member, a rotating member, and a sensor integrator.

[0015] The bottom end of the motor is fixedly connected to a platform, and the output end of the motor is connected to the displacement member. The displacement member is composed of a bottom and a top. The motor is used to drive the bottom of the displacement member to perform reciprocating movement in the vertical direction, and the top of the displacement member is rotatably connected to the rotating member non-coaxially. When the top of the displacement member makes a vertical reciprocating displacement, it rotates synchronously, so that when the displacement member drives the rotating member to change vertically, it will synchronously drive the sensor integrator installed on the top of the rotating member to rotate.

[0016] Among them, when the rotating member makes a vertical displacement, it can synchronously drive the sensor integrator to perform compound rotation and angle change, and at the same time, the sensor integrator can further rotate under the connection with the rotating member, thereby ultimately further improving the detection range and efficiency.

[0017] As a further improvement of the above solution, the displacement member includes an upper plate fixedly connected to the top of the motor, and a circular hole one is opened in the central area of the upper plate. Four connecting rods are fixedly connected to the periphery of the bottom end of the upper plate, and the bottom ends of the four connecting rods are fixedly connected to the platform. Vertical holes are symmetrically opened on both sides of the top end of the upper plate. Two sliding rods are vertically slidably connected in the two vertical holes. The two sliding rods are arranged outside the motor, and the top ends of the two sliding rods are fixedly connected with a sliding plate above the upper plate. A circular hole two is opened in the middle of the sliding plate. The circular hole one, the circular hole two and the output end of the motor are coaxially arranged. A positioning block is fixedly connected to the top end of the sliding plate. Convex blocks are symmetrically fixedly connected to the top end of the positioning block. A protrusion is fixedly connected to the inner side of one of the convex blocks. The top ends of the two convex blocks are rotatably connected with a ring block one. The middle of the top end of the ring block one is fixedly connected with a cylinder one. Sleeve plates one are symmetrically fixedly connected to the top end of the cylinder one, and a block is symmetrically fixedly connected to one side of the top end of the cylinder one. Vertical side slot openings are symmetrically opened on the inner wall of the cylinder one. The output end of the motor is fixedly connected with a rotating shaft. A spiral closed guiding slot opening is opened on the outer wall of the rotating shaft, and the guiding slot opening is arranged in a uniform peak-valley pattern. The guiding slot opening is slidably connected with the protrusion, and is used for the rotating shaft to drive the convex block to drive the cylinder one to perform vertical reciprocating displacement. Side blocks are symmetrically fixedly connected to both sides of the top end of the rotating shaft, and the side blocks are vertically slidably connected with the side slot openings, and are used for driving the cylinder one to perform vertical displacement and rotation when the rotating shaft rotates by using the side blocks.

[0018] As a further improvement of the above solution, the rotating member includes a fixed rod, the fixed rod is rotatably connected to one of the two sleeve plates, and sleeve plates two are fixedly connected to both ends of the fixed rod outside the sleeve plate one. Cylinders two are fixedly connected to the tops of the two sleeve plates two. A limiting block is fixedly connected to the middle of the inner wall of the cylinder two, and a rotating block one is rotatably connected inside the limiting block. The rotating block one is coaxially fixedly connected to a rotating rod. A conical gear two is fixedly connected to the bottom end of the rotating rod. A conical gear one is meshed and connected to one side of the conical gear two. The conical gear one is coaxially fixed to the outer wall of the fixed rod. A gear one is coaxially fixedly connected to the outer wall of the fixed rod outside the conical gear one. A rack plate is meshed and connected to the other side of the gear one. The bottom end of the rack plate is fixedly connected to the top end of the rotating shaft. An insertion block is fixedly connected to the top end of the rotating rod. An annular groove is opened at the top end of the cylinder two. An annular block two is rotatably connected inside the annular groove. A rotating block two is fixedly connected to the top end of the annular block two. Sleeve plates three are symmetrically fixedly connected to the top end of the rotating block two. A connecting block is fixedly connected to the middle of the two sleeve plates three. The top end of the connecting block is fixedly connected to the sensor integrator. A limiting groove is opened in the middle of the bottom end of the sensor integrator. The limiting groove is inserted and connected with the insertion block. An activity groove is opened at one side of the bottom end of the cylinder two at the matching position with the rack plate, and the rack plate and the stop block are arranged in the same direction.

[0019] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0020] (1) The present invention uses the displacement member to drive the sensor integrator to perform reciprocating displacement in the vertical direction, and can realize synchronous rotational change under the cooperation of the rotating member during the vertical reciprocating displacement. Moreover, the rotating member can also realize the change of the angle, further improving the detection efficiency and range of gaseous pollutants of the device.

[0021] (2) The sensor integrator at the top end of the rotating member of the present invention can rotate synchronously, realizing that the sensor integrator further improves the detection range of gaseous pollutants.

[0022] (3) The present invention uses the MEMS sensor array to significantly improve the accuracy and scene adaptability of semiconductor industry gaseous pollution detection through multi-sensor cooperation (such as MOX + electrochemistry + temperature and humidity) and intelligent integration (AI algorithm optimized data fusion). BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of the overall structure of a rapid detection device for a new gaseous pollution in the semiconductor industry provided by Embodiment 1 of the present invention;

[0024] Figure 2 It is a schematic diagram of the structure from the top view angle of the present invention;

[0025] Figure 3 For the present invention Figure 2Schematic cross-sectional structure diagram in the A-A direction;

[0026] Figure 4 Schematic structure diagram of the connection state of the displacement member of the present invention;

[0027] Figure 5 Schematic connection state structure diagram of the displacement member and the rotating member of the present invention;

[0028] Figure 6 Schematic internal structure diagram of the rotating member of the present invention;

[0029] Figure 7 For the present invention Figure 6 Schematic enlarged structure diagram at position a;

[0030] Figure 8 Schematic structure diagram of the angle change state of the present invention.

[0031] Main symbol description:

[0032] 1. Platform; 2. Motor; 3. Upper plate; 4. Connecting rod; 5. Slide bar; 6. Slide plate; 7. Positioning block; 8. Convex block; 9. First ring block; 10. First cylinder; 11. Side notch; 12. First sleeve plate; 13. Stop block; 14. Protrusion; 15. Rotating shaft; 16. Side block; 17. Guide notch; 18. Rack plate; 19. First gear; 20. Fixed rod; 21. First bevel gear; 22. Second sleeve plate; 23. Second cylinder; 24. Limit block; 25. First rotating block; 26. Rotating rod; 27. Second bevel gear; 28. Third sleeve plate; 29. Connecting block; 30. Sensor integrator; 31. Limit groove; 32. Insert block; 33. Second rotating block; 34. Second ring block; 35. Activity groove. Detailed implementation manners

[0033] Next, in combination with the accompanying drawings and specific implementation manners, the present invention will be further described. It should be noted that, on the premise of no conflict, any combination of the following-described embodiments or technical features can form a new embodiment.

[0034] Embodiment: Please combine Figures 1 - 8 , A rapid detection device for new gaseous pollution in the semiconductor industry in this embodiment includes a motor 2, a displacement member, a rotating member, and a sensor integrator 30, wherein the sensor integrator 30 includes a gas detection core sensor (metal oxide semiconductor MOX gas sensor and electrochemical gas sensor), an environmental parameter auxiliary sensor (temperature sensor, humidity sensor, and pressure sensor), and a signal processing and integration component (microfluidic system, signal conditioning circuit, and AIoT cooperation module).

[0035] The bottom end of the motor 2 is fixedly connected to the platform 1. The output end of the motor 2 is connected to the displacement member. The displacement member is composed of a bottom and a top. The motor 2 is used to drive the bottom of the displacement member to reciprocate vertically. The top of the displacement member is rotatably connected to the rotating member non-coaxially. When the top of the displacement member moves vertically and reciprocally, it rotates synchronously. Thus, when the displacement member drives the rotating member to change vertically, it will synchronously drive the sensor integrator 30 installed on the top of the rotating member to rotate.

[0036] Among them, when the rotating member moves vertically with the displacement member, it can synchronously drive the sensor integrator 30 to perform compound rotation and angle change, and can also realize further rotation of the sensor integrator 30 under the connection with the rotating member, thereby ultimately further improving the detection range and efficiency.

[0037] The displacement member includes an upper plate 3 fixedly connected to the top of the motor 2. A circular hole 1 is provided in the central area of the upper plate 3. Four connecting rods 4 are fixedly connected to the periphery of the bottom end of the upper plate 3, and the bottom ends of the four connecting rods 4 are fixedly connected to the platform 1. Vertical holes are symmetrically provided on both sides of the top end of the upper plate 3. Two sliding rods 5 are vertically slidably connected in the two vertical holes. The two sliding rods 5 are arranged outside the motor 2. The top ends of the two sliding rods 5 are fixedly connected to a sliding plate 6 above the upper plate 3. A circular hole 2 is provided in the middle of the sliding plate 6. The circular hole 1, the circular hole 2 and the output end of the motor 2 are coaxially arranged. A positioning block 7 is fixedly connected to the top end of the sliding plate 6. Two convex blocks 8 are symmetrically fixedly connected to the top end of the positioning block 7. A protrusion 14 is fixedly connected to the inner side of one of the convex blocks 8. The top ends of the two convex blocks 8 are rotatably connected to a first ring block 9. The middle of the top end of the first ring block 9 is fixedly connected to a first cylinder 10. Two first sleeve plates 12 are symmetrically fixedly connected to the top end of the first cylinder 10. A stopper 13 is symmetrically fixedly connected to one side of the top end of the first cylinder 10. Vertically arranged side notches 11 are symmetrically provided on the inner wall of the first cylinder 10. The output end of the motor 2 is fixedly connected to a rotating shaft 15. A helically closed guiding notch 17 is provided on the outer wall of the rotating shaft 15, and the guiding notch 17 is arranged with evenly distributed peaks and valleys. The guiding notch 17 is slidably connected to the protrusion 14, and is used for the rotating shaft 15 to rotate and drive the convex block 8 to drive the first cylinder 10 to reciprocate vertically. Two side blocks 16 are symmetrically fixedly connected to both sides of the top end of the rotating shaft 15, and the side blocks 16 are vertically slidably connected to the side notches 11, and are used for the rotating shaft 15 to drive the first cylinder 10 to move vertically and rotate when rotating.

[0038] The rotating member includes a fixed rod 20 which is rotatably connected to two first sleeve plates 12. Both ends of the fixed rod 20 are fixedly connected with second sleeve plates 22 outside the first sleeve plates 12. At the top of both second sleeve plates 22, a second cylinder 23 is fixedly connected. In the middle of the inner wall of the second cylinder 23, a limiting block 24 is fixedly connected. A first rotating block 25 is rotatably connected in the limiting block 24. The first rotating block 25 is coaxially fixedly connected with a rotating rod 26. At the bottom end of the rotating rod 26, a second bevel gear 27 is fixedly connected. On one side of the second bevel gear 27, a first bevel gear 21 is meshed. The first bevel gear 21 is coaxially fixed on the outer wall of the fixed rod 20. On the outer wall of the fixed rod 20, outside the first bevel gear 21, a first gear 19 is coaxially fixedly connected. On the other side of the first gear 19, a rack plate 18 is meshed. The bottom end of the rack plate 18 is fixedly connected to the top end of a rotating shaft 15. At the top end of the rotating rod 26, an inserting block 32 is fixedly connected. At the top of the second cylinder 23, a ring groove is formed. In the ring groove, a second ring block 34 is rotatably connected. At the top of the second ring block 34, a second rotating block 33 is fixedly connected. At the top of the second rotating block 33, two third sleeve plates 28 are symmetrically fixedly connected. In the middle of both third sleeve plates 28, a connecting block 29 is fixedly connected. The top of the connecting block 29 is fixedly connected to a sensor integrator 30. In the middle of the bottom end of the sensor integrator 30, a limiting groove 31 is formed. The limiting groove 31 is inserted and connected with the inserting block 32. On one side of the bottom end of the second cylinder 23, at the matching position with the rack plate 18, a moving groove 35 is formed, and the rack plate 18 and the stop block 13 are arranged in the same direction.

[0039] In the embodiment of the present application, the implementation principle of a rapid detection device for new gaseous pollution in the semiconductor industry is as follows:

[0040] Install and fix the device at the semiconductor production area to be monitored. When it is necessary to detect gaseous pollutants, first start the motor 2 and the sensor integrator 30. Use the sensors in the sensor integrator 30 to detect the gas in the area. With the start of the motor 2, the rotating shaft 15 rotates synchronously. Under the sliding connection of the guiding slot 17 and the protrusion 14, the protrusion 14 can reciprocate vertically along the guiding slot 17. The protrusion 14 drives the sliding plate 6 to slide vertically along the sliding rod 5. And under the vertical sliding of the side block 16 and the side slot 11, the entire first cylinder 10 rotates simultaneously with the rotating shaft 15.

[0041] Meanwhile, as the vertical displacement of cylinder 10 increases, the relative distance between the fixed rod 20 and the rotating shaft 15 will be enlarged. When the rack plate 18 is pulled down, under the meshing connection between the rack plate 18 and the first gear 19, the fixed rod 20 is driven to drive the entire cylinder 23 to rotate towards the stopper 13. When cylinder 10 drives cylinder 23 vertically upward, cylinder 23 will gradually expand in angle along the fixed rod 20. At the same time, cylinder 23 will rotate around the center line of cylinder 10, enabling the sensor integrator 30 to expand the detection range of the surrounding area. When the vertical displacement of cylinder 10 decreases, the fixed rod 20 and the rotating shaft 15 move closer to each other. The rack plate 18 rises and meshes with the first gear 19, causing cylinder 23 to rotate around the center line of the fixed rod 20 and return to the same axis as cylinder 10, realizing angle adjustment reciprocally.

[0042] Meanwhile, when the first gear 19 rotates forward and backward, it can drive the first bevel gear 21 to rotate synchronously. Under the meshing connection between the first bevel gear 21 and the second bevel gear 27, the top of the rotating rod 26 drives the insertion block 32 and the connecting block 29 to rotate. When the sensor integrator 30 changes with the rotational displacement, the detection of external gaseous pollutants can be further expanded.

[0043] The above embodiments are only the preferred embodiments of the present invention and cannot be used to limit the scope of protection of the present invention. Any non-substantial changes and substitutions made by those skilled in the art based on the present invention fall within the scope of protection required by the present invention.

Claims

1. A rapid detection device for new gaseous pollutants in the semiconductor industry, characterized in that, Comprising: A motor, a platform is fixedly connected to the bottom end of the motor, the output end of the motor is connected to a displacement member, wherein the displacement member is composed of a bottom and a top, the motor is used to drive the bottom of the displacement member to reciprocate vertically, and the top of the displacement member is rotatably connected to the rotating member non-coaxially. When the top of the displacement member reciprocates vertically with the displacement member, it rotates synchronously, so as to realize that when the displacement member drives the rotating member to change vertically with the displacement member, it will synchronously drive the sensor integrator installed on the top of the rotating member to rotate; Among them, when the rotating member vertically displaces, it can synchronously drive the sensor integrator to perform compound rotation and angle change, and at the same time, it can also realize that the sensor integrator further rotates under the connection with the rotating member, so as to ultimately further improve the detection range and efficiency.

2. The rapid detection device for a new gaseous pollution in the semiconductor industry according to claim 1, characterized in that, The displacement member includes an upper plate fixedly connected to the top of the motor, and a circular hole one is opened in the central area of the upper plate. Four connecting rods are fixedly connected to the periphery of the bottom end of the upper plate, and the bottom ends of the four connecting rods are fixedly connected to the platform. Vertical holes are symmetrically opened on both sides of the top end of the upper plate. Two sliding rods are vertically slidably connected in the two vertical holes. The two sliding rods are arranged outside the motor, and the top ends of the two sliding rods are fixedly connected with sliding plates above the upper plate. A circular hole two is opened in the middle of the sliding plate.

3. The rapid detection device for a new gaseous pollution in the semiconductor industry according to claim 2, characterized in that, The circular hole one, the circular hole two and the output end of the motor are coaxially arranged.

4. The rapid detection device for a new gaseous pollution in the semiconductor industry according to claim 2, characterized in that, A positioning block is fixedly connected to the top end of the sliding plate, and convex blocks are symmetrically fixedly connected to the top end of the positioning block. A protrusion is fixedly connected to the inner side of one of the convex blocks. The top ends of the two convex blocks are rotatably connected with a ring block one. A cylinder one is fixedly connected to the middle of the top end of the ring block one. Sleeve plates one are symmetrically fixedly connected to the top end of the cylinder one, and stoppers are symmetrically fixedly connected to one side of the top end of the cylinder one. Vertical side slots are symmetrically opened on the inner wall of the cylinder one.

5. The rapid detection device for new gaseous pollution in the semiconductor industry according to claim 3, characterized in that, The output end of the motor is fixedly connected with a rotating shaft, and a helically closed guiding slot is opened on the outer wall of the rotating shaft, and the guiding slot is arranged with evenly distributed peaks and valleys. The guiding slot is slidably connected with the protrusion, and is used for the rotating shaft to rotate to drive the convex block to drive the cylinder one to reciprocate vertically. Side blocks are symmetrically fixedly connected to both sides of the top end of the rotating shaft, and the side blocks are vertically slidably connected with the side slots, and are used for the side blocks to drive the cylinder one to vertically displace and rotate when the cylinder one vertically displaces.

6. The rapid detection device for a new gaseous pollution in the semiconductor industry according to claim 1, characterized in that, The rotating member includes a fixed rod, the fixed rod is rotatably connected to two sleeve plates one, and sleeve plates two are fixedly connected to both ends of the fixed rod outside the sleeve plates one. Cylinder two are fixedly connected to the top ends of the two sleeve plates two. A limiting block is fixedly connected to the middle of the inner wall of the cylinder two.

7. The rapid detection device for a new gaseous pollution in the semiconductor industry according to claim 6, characterized in that, A rotating block one is rotatably connected in the limiting block, the rotating block one is coaxially fixedly connected with a rotating rod, a bevel gear two is fixedly connected to the bottom end of the rotating rod, a bevel gear one is meshed and connected to one side of the bevel gear two, the bevel gear one is coaxially fixed to the outer wall of the fixed rod, and a gear one is coaxially fixed to the outer wall of the fixed rod on the outer side of the bevel gear one. A rack plate is meshed and connected to the other side of the gear one, and the bottom end of the rack plate is fixedly connected to the top end of the rotating shaft.

8. The rapid detection device for a new gaseous pollution in the semiconductor industry according to claim 7, characterized in that, A ring groove is formed at the top end of the second cylinder. A second ring block is rotatably connected in the ring groove. A second rotating block is fixedly connected to the top end of the second ring block. Third sleeve plates are symmetrically and fixedly connected to the top end of the second rotating block. A connecting block is fixedly connected to the middle parts of the two third sleeve plates. The top end of the connecting block is fixedly connected to the sensor integrator. A limiting groove is formed in the middle of the bottom end of the sensor integrator.

9. The rapid detection device for new gaseous pollution in the semiconductor industry according to claim 8, characterized in that, An insertion block is fixedly connected to the top end of the rotating rod. The limiting groove is inserted and connected with the insertion block.

10. The rapid detection device for a new gaseous pollution in the semiconductor industry according to claim 8, wherein, An activity groove is formed at the matching position of the bottom end of the second cylinder and the rack plate, and the rack plate and the stop block are arranged in the same direction.

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