Transfer device

Abstract

The invention provides a transfer device, and relates to the technical field of mass transfer, the transfer device comprises a pick-up structure located on a first carrier plate, the pick-up structure comprises a plurality of pick-up units, each pick-up unit comprises N grooves, the grooves are located in the sides, away from the first carrier plate, of the pick-up units, and the grooves extend towards the interiors of the pick-up units, a cavity can be formed by the groove and the light-emitting element located on the second carrier plate, and the cavity is formed by pressing the side, away from the first carrier plate, of the pickup unit and the light-emitting element in the first direction. When the pickup unit is in press fit with the light-emitting element, the groove can be deformed to promote the cavity to discharge gas therein, so that adsorption force is generated on the light-emitting element, and the light-emitting element is picked up. Therefore, the light-emitting element can be picked up by the transfer device through the deformation of the groove in the pickup unit and the adsorption force generated on the light-emitting element, the influence of external environmental factors is avoided, the transfer yield and the stability of the transfer yield can be effectively improved, and the transfer device has a wide application prospect.

Description

Technical Field

[0001] The present application relates to the field of mass transfer technology, and in particular to a transfer device. Background Art

[0002] Compared with current LCD and OLED display devices, micro light-emitting diode (Micro LED) display devices have the advantages of higher resolution, better contrast, faster response time and lower energy consumption. Therefore, they are regarded as the next generation of display technology and have become one of the hot spots of future display technology.

[0003] However, Micro-LED display technology has many difficulties and is complex, especially the Micro-LED transfer technology in the process of manufacturing Micro-LED display devices. Among them, Micro-LED transfer technology includes the picking and placement of Micro-LEDs, and the yield of Micro-LED picking determines whether the subsequent placement of Micro-LEDs can achieve the expected effect. Therefore, how to improve the yield of Micro-LED picking has become a key issue for technicians in this field. Summary of the invention

[0004] In view of this, the present application provides a transfer device, which has a higher transfer yield and a more stable transfer yield. The scheme is as follows:

[0005] A transfer device, comprising:

[0006] The first carrier board;

[0007] A picking structure, the picking structure is arranged on the first carrier plate, and the picking structure includes a plurality of picking units;

[0008] The picking unit comprises N grooves, N≥1, the grooves are located on a side of the picking unit away from the first carrier plate, and the grooves extend toward the inside of the picking unit;

[0009] The groove is used to form a cavity with the light-emitting element located on the second carrier, and the cavity is formed by pressing the side of the pickup unit away from the first carrier and the light-emitting element along the first direction, and when the pickup unit is pressed with the light-emitting element, the groove is deformed along at least one of the second direction and the third direction, so that the gas in the cavity is discharged, the light-emitting element is adsorbed, and the light-emitting element is picked up;

[0010] The first direction is parallel to the arrangement direction of the first carrier board and the picking structure, and the first direction points from the first carrier board to the picking structure; the second direction is parallel to the side of the picking unit facing away from the first carrier board, and the second direction points from the inside of the groove to the outside; the third direction is parallel and opposite to the first direction, and the third direction points from the inside of the groove to the outside.

[0011] Compared with the related art, the beneficial effects of the technical solution of the present application are as follows:

[0012] The transfer device includes: a picking structure located on a first carrier board, the picking structure includes a plurality of picking units, each picking unit includes N grooves, the grooves are located on the side of the picking unit facing away from the first carrier board, and the grooves extend towards the inside of the picking unit. The grooves can be used to form a cavity with a light-emitting element located on a second carrier board. The cavity is formed by pressing the side of the picking unit facing away from the first carrier board and the light-emitting element in the first direction. Among them, when the picking unit is pressed against the light-emitting element, the groove can deform at least along one of the second direction and the third direction, so as to discharge the gas in the cavity, generate an adsorption force on the light-emitting element, and pick up the light-emitting element. The first direction is parallel to the arrangement direction of the first carrier board and the picking structure, and the first direction points from the first carrier board to the picking structure. The second direction is parallel to the side of the picking unit facing away from the first carrier board, and the second direction points from the inside of the groove to the outside. The third direction is parallel to the first direction, and the third direction points from the inside of the groove to the outside. It can be seen that the transfer device can generate an adsorption force on the light-emitting element through the deformation of the groove on the picking unit, realize the picking of the light-emitting element, and is not affected by external environmental factors, which can effectively improve the transfer yield and the stability of the transfer yield, and has broad application prospects. Description of the Drawings

[0013] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the related art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only the embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained according to the provided drawings.

[0014] The structures, ratios, sizes, etc. shown in the drawings of this specification are only used to cooperate with the content disclosed in the specification for those who are familiar with this technology to understand and read, and are not used to limit the limited conditions that can be implemented in the present application. Therefore, they do not have technical essence. Any modification of the structure, change of the proportional relationship or adjustment of the size, without affecting the effects that the present application can produce and the purposes that can be achieved, should still fall within the scope that the technical content disclosed in the present application can cover.

[0015] Figure 1 Schematic structural diagram of a transfer device provided by the present application;

[0016] Figure 2 Schematic diagram of the lamination of a transfer device provided by the present application and a light-emitting element;

[0017] Figure 3 Schematic structural diagram of a pickup unit in a transfer device provided by the present application;

[0018] Figure 4 Schematic structural diagram of a pickup unit in another transfer device provided by the present application;

[0019] Figure 5 Schematic structural diagram of a pickup unit in yet another transfer device provided by the present application;

[0020] Figure 6 Schematic structural diagram of a pickup unit in yet another transfer device provided by the present application;

[0021] Figure 7 Schematic structural diagram of a pickup unit in yet another transfer device provided by the present application;

[0022] Figure 8 Schematic structural diagram of a pickup unit in yet another transfer device provided by the present application;

[0023] Figure 9 Schematic structural diagram of a pickup unit in yet another transfer device provided by the present application;

[0024] Figure 10 Schematic structural diagram of a pickup unit in yet another transfer device provided by the present application;

[0025] Figure 11 Schematic structural diagram of a pickup unit in yet another transfer device provided by the present application;

[0026] Figure 12 Schematic structural diagram of a pickup unit in yet another transfer device provided by the present application;

[0027] Figure 13 Schematic structural diagram of another transfer device provided by the present application;

[0028] Figure 14 Schematic structural diagram of yet another transfer device provided by the present application;

[0029] Figure 15 Schematic structural diagram of a pickup unit in yet another transfer device provided by the present application;

[0030] Figure 16 Schematic diagram of the imprinting process of a transfer device provided by the present application;

[0031] Figure 17 It is a schematic diagram of the preparation process of a silicon mold. Specific implementation manners

[0032] Next, the embodiments in the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present application.

[0033] To make the above objects, features, and advantages of the present application more obvious and understandable, the present application will be further described in detail below in conjunction with the accompanying drawings and specific implementation manners.

[0034] In the related art, the transfer device usually picks up Micro LEDs by means of adhesion, and then realizes the transfer. However, in order to achieve the transfer, or rather, to better achieve the transfer, it is usually desired that the adhesion force of the carrier board where the Micro LEDs are located to the Micro LEDs is less than the adhesion force of the transfer device to the Micro LEDs. That is to say, the adhesion force of the transfer device to the Micro LEDs needs to be large. However, for the subsequent placement of the Micro LEDs, the adhesion force of the transfer device to the Micro LEDs cannot be too large. Therefore, it is necessary to develop a glue material with a matching adhesion force, and the development difficulty is great.

[0035] In addition, when picking up Micro LEDs by means of adhesion, the adhesion force is greatly affected by external environmental factors, such as temperature, humidity, etc., and it cannot ensure the picking up of Micro LEDs, and the transfer yield is relatively low. Moreover, the adhesion force is greatly affected by external environmental factors, which will also cause the transfer yield to be unstable, which is not conducive to practical applications.

[0036] Therefore, providing a transfer device with a relatively high transfer yield and a stable yield has become the research focus of those skilled in the art.

[0037] Based on the above, the present application provides a transfer device, as Figure 1 shown Figure 1 is a schematic structural diagram of a transfer device provided by the present application. The transfer device includes:

[0038] The first carrier board 100. The present application does not limit the material of the first carrier board 100, and any one or several materials that meet the requirements can be used, depending on the specific situation.

[0039] The picking structure 300 is arranged on the first carrier board 100, and the picking structure 300 includes a plurality of picking units 310.

[0040] The picking unit 310 includes N grooves 312, where N≥1. The grooves 312 are located on the side of the picking unit 310 facing away from the first carrier 100, and the grooves 312 extend towards the inside of the picking unit 310.

[0041] The grooves 312 are used to form a cavity with the light-emitting elements 400 located on the second carrier 200 (as Figure 2 shown). This cavity is formed by pressing the side of the picking unit 210 facing away from the first carrier 100 and the light-emitting elements 400 in the first direction. When the side of the picking unit 310 facing away from the first carrier 100 is pressed against the light-emitting elements 400, the grooves 312 are deformed at least in one of the second direction and the third direction, prompting the gas in the cavity to be discharged, thereby generating an adsorption force on the light-emitting elements 400 to pick up the light-emitting elements 400. It should be noted that the above-mentioned multiple picking units 310 correspond to the light-emitting elements 400 one by one, that is, one picking unit 310 can be used to pick up one light-emitting element 400. It should also be noted that the second carrier 200 may include a carrier plate and a carrier adhesive, and the carrier adhesive is located on the side facing the light-emitting elements 400 and is used to bond the light-emitting elements 400.

[0042] Among them, the first direction is parallel to the arrangement direction of the first carrier 100 and the picking structure 300, and the first direction points from the first carrier 100 to the picking structure 300. That is, the first direction can be the direction in which the first carrier 100 vertically points to the picking structure 310. That is to say, when picking up the light-emitting elements 400, the picking unit 310 is pressed against the light-emitting elements 400 along the direction in which the first carrier 100 vertically points to the picking structure 300, so as to make the pressing force applied by each part of the picking unit 310 to the light-emitting elements 400 the same when the picking unit 310 is pressed against the light-emitting elements 400, ensuring the transfer yield. Because if the pressing force applied by each part of the picking unit 310 to the light-emitting elements 400 is different, it will cause the adsorption force in some areas of the light-emitting elements 400 to be large and the adsorption force in some areas to be small, resulting in the possibility of the light-emitting elements 400 falling off, affecting the transfer yield, and for the areas with a large adsorption force, it may also cause damage to the light-emitting elements 400.

[0043] The second direction is parallel to the side of the picking unit 310 facing away from the first carrier 100, and the second direction points from the inside of the groove 312 to the outside. The third direction is parallel to the first direction, and the third direction points from the inside of the groove 312 to the outside. That is to say, when the picking unit 310 is pressed against the light-emitting elements 400 to pick up the light-emitting elements 400, the deformation mode of the groove 312 can be a compressive deformation along the second direction, or an outward expansion deformation along the third direction, or it can be a compressive deformation along the second direction and an outward expansion deformation along the third direction.

[0044] Since the groove 312 is located on the side of the pickup unit 310 facing away from the first carrier 100 and extends towards the inside of the pickup unit 310, when the side of the pickup unit 310 facing away from the first carrier 100 is pressed against the light-emitting element 400 in the first direction, the inner walls of the groove 312 on the side of the pickup unit 310 facing away from the first carrier 100 will not come into contact with the light-emitting element 400 everywhere. Furthermore, the pickup unit 310 can form a cavity with the light-emitting element 400 through the groove 312 thereon. Also, since the groove 312 can deform, after the pickup unit 310 forms a cavity with the light-emitting element 400 through the groove 312 thereon, as the pressing force increases, the deformation of the groove 312 can be used to expel the air therein, so that the groove 312 has a negative pressure on the light-emitting element 400, generating an adsorption force on the light-emitting element 400, and thus the light-emitting element 400 can be picked up.

[0045] Moreover, since the adsorption force of the pickup unit 310 on the light-emitting element 400 is caused by the deformation of the groove 312 to expel air from the cavity, the degree of deformation of the groove 312 can be controlled by controlling the pressing force when the pickup unit 310 is pressed against the light-emitting element 400, and the amount of air discharged from the cavity formed by the groove 312 can be controlled. Furthermore, the magnitude of the adsorption force of the pickup unit 310 on the light-emitting element 400 can be controlled to be suitable for the transfer of various types of light-emitting elements 400. For example, for a light-emitting element 400 that requires a large adsorption force, the pressing force between the pickup unit 310 and the light-emitting element 400 is increased, so that the degree of deformation of the groove 312 is larger and more air is discharged, thereby making the adsorption force of the pickup unit 310 on the light-emitting element 400 larger. Another example is that for a light-emitting element 400 that requires a small adsorption force, the pressing force between the pickup unit 310 and the light-emitting element 400 is reduced, so that the degree of deformation of the groove 312 is smaller and less air is discharged, thereby making the adsorption force of the pickup unit 310 on the light-emitting element 400 smaller.

[0046] As can be seen from the above, the transfer device provided in the present application can generate an adsorption force on the light-emitting element 400 through the deformation of the groove 312 on the pickup unit 310 to pick up the light-emitting element 400. Compared with the related art, it is not affected by external environmental factors, can effectively improve the transfer yield and the stability of the transfer yield, and has broad application prospects.

[0047] In an embodiment of the present application, as Figure 3 shown, Figure 3 is a schematic structural diagram of a pickup unit in a transfer device provided by the present application, Figure 3 is a schematic structural diagram observed along the second direction in Figure 3In Fig. b, which is a sectional view of a along AA1, the pickup unit 310 includes N grooves 312, where N≥1, and the N grooves 312 can be located in the middle area on the side of the pickup unit 310 facing away from the first carrier 100. That is to say, at least one groove 312 can be provided in the middle area on the side of the pickup unit 310 facing away from the first carrier 100, and thus the light-emitting element 400 can be adsorbed through the groove 312 in the middle area to realize the pickup of the light-emitting element 400. It should be noted that Figure 3 The way of schematically showing the groove 312 in Fig. a is to more clearly show the groove 312, rather than indicating that the groove 312 is a through hole in the pickup unit 310. In subsequent figures, the groove is schematically shown in a similar way to more clearly show the position, size, etc. of the groove, and it will not be emphasized one by one in the following figures. It should also be noted that the middle area on the side of the pickup unit 310 facing away from the first carrier 100 can be as Figure 3 shown in the area inside the dashed line box in Fig. a.

[0048] In another embodiment of the present application, as Figure 4 shown, Figure 4 is a schematic structural diagram of the pickup unit in another transfer device provided by the present application, Figure 4 is a schematic structural diagram of Fig. a observed in the second direction, Figure 4 In Fig. b, which is a sectional view of a along BB1, the pickup unit 310 may include N grooves 312, where N≥2. The N grooves 312 can be located in the edge area on the side of the pickup unit 310 facing away from the first carrier 100, and the grooves 312 are symmetrically arranged relative to the middle area in the edge area. That is to say, at least two grooves 312 are provided in the edge area on the side of the pickup unit 310 facing away from the first carrier 100, and the at least two grooves 213 are symmetrically arranged relative to the middle area in the edge area to realize the pickup of the light-emitting element 400 through the grooves 312 in the edge area. It should be noted that the edge area on the side of the pickup unit 310 facing away from the first carrier 100 can be as Figure 4 shown in the area outside the dashed line box in Fig. a.

[0049] As described above, when the above-mentioned N grooves 312 are located in the edge region, the above-mentioned N grooves 312 are symmetrically arranged in the edge region with respect to the middle region. When the picking unit 310 picks up the light-emitting element 400 through the grooves 312 arranged in the edge region, the adsorption force generated on the light-emitting element 400 is balanced, and the situation where the adsorption force on one side is large and the adsorption force on the other side is small will not occur, suppressing the situation where the light-emitting element 400 falls off due to uneven force on the light-emitting element 400, and improving the transfer yield. Specifically, for example, if the shape of the side of the picking unit 310 facing away from the first carrier 100 is square, having opposite first and second sides, and opposite third and fourth sides, then the N grooves 312 are respectively located on the first and second sides and are opposite to each other in pairs, or can also be respectively located on the third and fourth sides and are opposite to each other in pairs, or the N grooves 312 are both respectively located on the first and second sides and are opposite to each other in pairs, and are also respectively located on the third and fourth sides and are opposite to each other in pairs. The side of the picking unit 310 facing away from the first carrier 100 can also be other shapes, and as long as the N grooves 312 on it are arranged opposite to each other in pairs, it will not be elaborated one by one here.

[0050] In another embodiment of the present application, as Figure 5 shown, Figure 5 is a schematic structural diagram of a picking unit in another transfer device provided by the present application, Figure 5 is a schematic structural diagram observed along the second direction in Figure 3 where b is a sectional view taken along AA1 of a. The picking unit 310 includes N grooves 312, N≥3. The N grooves 312 include m first grooves 314 and n second grooves 316, m≥1, n≥2, m + n = N. The first grooves 314 are located in the middle region of the side of the picking unit 310 facing away from the first carrier 100, and the second grooves 316 are located in the edge region other than the middle region, and the second grooves 316 are symmetrically arranged in the edge region with respect to the middle region.

[0051] The difference between this embodiment and the above two embodiments is that grooves 312 (first grooves 314) are arranged in the middle region of the side of the picking unit 310 facing away from the first carrier 100, and grooves 312 (second grooves 316) are also arranged in the edge region, that is, grooves 312 are arranged in more regions of the side of the picking unit 310 facing away from the first carrier 100. When picking up the light-emitting element 400, the adsorption force on the light-emitting element 400 can be generated through the grooves 312 in more regions, that is, a greater adsorption force is generated on the light-emitting element 400, ensuring the picking up of the light-emitting element 400 and improving the transfer yield.

[0052] In addition, more grooves 312 are arranged in a region of the pickup unit 310 on the side away from the first carrier plate 100. The grooves 312 in the more regions generate an adsorption force on the light-emitting element 400, and the adsorption force on the light-emitting element 400 can also be controlled to vary within a larger range based on the deformation of the grooves 312. Furthermore, it can be applied to more application scenarios and has broad application prospects.

[0053] Based on any of the above embodiments, in an embodiment of the present application, as Figure 1 shown, the projection of the notch of the groove 312 in the first direction is smaller than the contact surface of the light-emitting element 400. Herein, the notch of the groove 312 is the side where the groove 312 is pressed against the light-emitting element 400, and the contact surface of the light-emitting element 400 is the side where the light-emitting element 400 is pressed against the groove 312, so as to ensure that a cavity can be formed between the groove 312 and the light-emitting element 400 when picking up the light-emitting element 400, thereby realizing the picking up of the light-emitting element 400.

[0054] Taking the example that the groove 312 (the first groove 314) is arranged in the middle region of the pickup unit 310 on the side away from the first carrier plate 100 and the groove 312 (the second groove 316) is arranged in the edge region, the specific arrangement manner of the groove 312 will be introduced in detail below.

[0055] In an embodiment of the present application, as Figure 6 shown, Figure 6 is a schematic structural diagram of the pickup unit in a transfer device provided by the present application. Along the fourth direction, the width of the notch of the first groove 314 is D11, and the width of the notch of the second groove 316 is D12, and D11 > D12. The notch of the first groove 314 is the side pressed against the light-emitting element 400, and the notch of the second groove 316 is the side pressed against the light-emitting element 400.

[0056] Along the fifth direction, the depth of the first groove 314 is H11, and the depth of the second groove 316 is H12, and H11 > H12. The fourth direction is parallel to the side of the pickup unit 310 away from the first carrier plate 100, and the fifth direction is parallel to the arrangement direction of the first carrier plate 100 and the pickup structure 300.

[0057] As can be seen from the above, the first groove 314 in the middle region on the side of the pickup unit 310 facing away from the first carrier 100 is larger than the second groove 316 in the edge region, which can effectively prevent the groove in the edge region from being too large and exceeding the contact range with the light-emitting element 400, resulting in the inability to form a cavity with the light-emitting element 400. That is to say, when the side of the pickup unit 310 facing away from the first carrier 100 is pressed against the light-emitting element 400, not only can the first groove 314 in the middle region form a cavity with the light-emitting element 400, but also the second groove 316 in the edge region can form a cavity with the light-emitting element 400, improving the adsorption force of the pickup unit 310 on the light-emitting element 400 and improving the transfer yield.

[0058] In addition, the adsorption force of the first groove 314 in the middle region on the side of the pickup unit 310 facing away from the first carrier 100 on the light-emitting element 400 is greater than the adsorption force of the second groove 316 in the edge region on the light-emitting element 400. When the pickup unit 310 picks up the light-emitting element 400, the adsorption force on the middle region of the light-emitting element 400 is greater than the adsorption force on its edge region, which is beneficial for placing the light-emitting element 400 later while being able to pick up the light-emitting element 400.

[0059] It should be noted that after picking up the light-emitting element 400, the picked-up light-emitting element 400 needs to be placed at the expected position, such as being installed in a display panel and separated from the transfer device. In this application, when the pickup unit 310 picks up the light-emitting element 400, the adsorption force on the middle region of the light-emitting element 400 is greater than the adsorption force on its edge region. Thus, when the light-emitting element 400 is separated from the transfer device, the edge region of the contact surface of the light-emitting element 400 adsorbed by the transfer device can be separated first, and then the middle region of the contact surface of the light-emitting element 400 can be separated, thereby realizing the sub-region separation of the contact surface of the light-emitting element 400 and facilitating the separation of the light-emitting element 400 from the transfer device. It should also be noted that the center of the side of the pickup unit 310 facing away from the first carrier 100 coincides as much as possible with the center of the contact surface of the light-emitting element 100. Therefore, when the pickup unit 310 is pressed against the light-emitting element 400, the middle region of the side of the pickup unit 310 facing away from the first carrier 100 can be in contact with the middle region of the contact surface of the light-emitting element 100, and the edge region of the side of the pickup unit 310 facing away from the first carrier 100 can be in contact with the edge region of the contact surface of the light-emitting element 100.

[0060] In an embodiment of the present application, as Figure 7 shown, Figure 7The structural schematic diagram of the pickup unit in a transfer device provided by this application. Along the sixth direction, the width of the notch of the first groove 314 is D13, and the width of the notch of the second groove 316 is D14, where D13 > D14. The sixth direction is parallel to the side of the pickup unit 310 facing away from the first carrier 100, and the sixth direction intersects with the fourth direction.

[0061] As can be seen from the above, along the sixth direction parallel to the side of the pickup unit 310 facing away from the first carrier 100, the width of the first groove 314 is greater than that of the second groove 316, that is, the width of the second groove 316 is less than that of the first groove 314, further suppressing the grooves in the edge area from being too large and exceeding the range of contact with the light-emitting element 400, so that the second groove 316 in the edge area can form a cavity with the light-emitting element 400, improving the adsorption force of the pickup unit 310 on the light-emitting element 400 and improving the transfer yield.

[0062] In an embodiment of this application, as Figure 5 shown, Figure 5 The structural schematic diagram of the pickup unit in a transfer device provided by this application. For a transfer device with grooves 312 arranged in both the middle area and the edge area, m = 1, n ≥ 2, that is, the number of the first grooves 314 in the middle area can be 1, and the number of the second grooves 316 in the edge area can be at least 2. It should be noted that when there is 1 first groove 314 arranged in the middle area on the side of the pickup unit 310 facing away from the first carrier 100, the center of the area where the first groove 314 is located coincides with the center of the middle area on the side of the pickup unit 310 facing away from the first carrier 100, or the area where the first groove 314 is located covers the center of the middle area on the side of the pickup unit 310 facing away from the first carrier 100.

[0063] In another embodiment of this application, as Figure 8 shown, Figure 8The schematic structural diagram of the pickup unit in a transfer device provided by this application. For a transfer device with grooves arranged in both the middle area and the edge area, m≥2, n≥2, that is, the number of the first grooves 314 in the middle area can be at least 2, and the number of the second grooves 316 in the edge area can be at least 2. It should be noted that when the number of the first grooves 314 in the middle area can be at least 2, which has the same arrangement principle as the second grooves 316 in the edge area, the first grooves 314 in the middle area should be symmetrically arranged relative to the center of the middle area. This application will not elaborate on this anymore. It should be noted that when at least 2 first grooves 314 are arranged in the middle area on the side of the pickup unit 310 facing away from the first carrier 100, these at least 2 first grooves 314 are symmetrically distributed relative to the center of the middle area on the side of the pickup unit 310 facing away from the first carrier 100, or 1 of the at least 2 first grooves 314 coincides with the center of the middle area on the side of the pickup unit 310 facing away from the first carrier 100, or the area where the first grooves 314 are located covers the center of the middle area on the side of the pickup unit 310 facing away from the first carrier 100, and the remaining first grooves 314 are symmetrically distributed relative to the center of the middle area on the side of the pickup unit 310 facing away from the first carrier 100.

[0064] In an embodiment of this application, as Figure 9 shown, Figure 9 The schematic structural diagram of the pickup unit in a transfer device provided by this application. When grooves are arranged in both the middle area on the side of the pickup unit 310 facing away from the first carrier 100 and the edge area, the second grooves 316 are evenly arranged in the edge area along the direction of surrounding the middle area, so that when the pickup unit 310 picks up the light-emitting element 400, the adsorption force applied to the light-emitting element 400 is balanced, that is, the adsorption force received by the light-emitting element 400 is balanced, avoiding the light-emitting element 400 falling off due to uneven force on the light-emitting element 400 and affecting the transfer yield. It should be noted that when the number of the first grooves 314 in the middle area on the side of the pickup unit 310 facing away from the first carrier 100

[0065] It should also be noted that whether at least 2 first grooves 314 are arranged in the middle area on the side of the pickup unit 310 facing away from the first carrier 100 or at least 2 second grooves 316 are arranged in the edge area on the side of the pickup unit 310 facing away from the first carrier 100, this application does not limit the specific number of the first grooves 314 and the second grooves 316, which depends on the specific situation. When the pickup unit 310 is pressed against the light-emitting element 400, it is only necessary to ensure that the adsorption force applied to the light-emitting element 400 is balanced.

[0066] When a plurality of first grooves 314 are arranged in the middle area on the side of the pickup unit 310 facing away from the first carrier 100, in an embodiment of this application, asFigure 10 As shown Figure 10 Figure 10 This is a schematic structural diagram of a picking unit in a transfer device provided by the present application. When at least two first grooves 314 are arranged in the middle area on the side of the picking unit 310 facing away from the first carrier 100, that is, when m≥2, the widths of the first grooves 314 in each of the at least two first grooves 314 are equal in the fourth direction, and the depths of the first grooves 314 in each of the at least two first grooves 314 are equal in the fifth direction. The fourth direction is parallel to the side of the picking unit 310 facing away from the first carrier 100, and the fifth direction is parallel to the arrangement direction of the first carrier 100 and the picking structure 300.

[0067] Based on the above, in this embodiment, the at least two first grooves 314 arranged in the middle area on the side of the picking unit 310 facing away from the first carrier 100 are first grooves 314 with the same shape and size, which helps to simplify the manufacturing process of the first grooves 314, and further helps to simplify the manufacturing process of the transfer device.

[0068] When a plurality of first grooves 314 are arranged in the middle area on the side of the picking unit 310 facing away from the first carrier 100, in another embodiment of the present application, as Figure 11 shown Figure 11 Figure 11 This is a schematic structural diagram of a picking unit in a transfer device provided by the present application. When at least two first grooves 314 are arranged in the middle area on the side of the picking unit 310 facing away from the first carrier 100, that is, when m≥2, the widths of the first grooves 314 in each of the at least two first grooves 314 are not equal in the fourth direction, and the width of the first groove 314 closer to the edge area is smaller, and the depths of the first grooves 314 in each of the at least two first grooves 314 are equal in the fifth direction. Among them, the fourth direction is parallel to the side of the picking unit 310 facing away from the first carrier 100, and the fifth direction is parallel to the arrangement direction of the first carrier 100 and the picking structure 300.

[0069] Based on the above, in this embodiment, at least two first grooves 314 arranged in the middle area on the side of the picking unit 310 facing away from the first carrier 100 have the same depth but different widths. The width of the first groove 314 closer to the edge area is smaller. That is to say, along the direction from the middle area on the side of the picking unit 310 facing away from the first carrier 100 to the edge area, the width of the notch of the first groove 314 decreases. Thus, the adsorption force of the first groove 314 closer to the edge area among at least two first grooves 314 on the light-emitting element 400 is smaller. That is, along the direction from the middle area on the side of the picking unit 310 facing away from the first carrier 100 to the edge area, the adsorption force of the picking unit 310 on the light-emitting element 400 decreases, so as to facilitate the placement of the light-emitting element 400 after picking while picking up the light-emitting element 400. It should be noted that the facilitation of the placement of the light-emitting element 400 after picking here is based on the same principle as the smaller adsorption force in the edge area than in the middle area on the side of the picking unit 310 facing away from the first carrier 100, which will not be elaborated here.

[0070] It should also be noted that the adsorption force of the first groove 314 on the light-emitting element 400 is related to the cavity formed by it, that is to say, related to its volume. However, when the volumes are the same or similar, it is related to the ability of the cavity to discharge air, and the strength of the ability of the cavity to discharge air is related to the width of the first groove 314. Therefore, along the direction from the middle area on the side of the picking unit 310 facing away from the first carrier 100 to the edge area, the width of the notch of the first groove 314 decreases, so that the adsorption force of the first groove 314 on the light-emitting element 400 also decreases.

[0071] When a plurality of first grooves 314 are arranged in the middle area on the side of the picking unit 310 facing away from the first carrier 100, in another embodiment of the present application, as Figure 12 shown, Figure 12 is a schematic structural diagram of the picking unit in a transfer device provided by the present application. When at least two first grooves 314 are arranged in the middle area on the side of the picking unit 310 facing away from the first carrier 100, that is, when m≥2, the widths of the respective first grooves 314 among at least two first grooves 314 in the fourth direction are not equal, and the width of the first groove 314 closer to the edge area is smaller. The depths of the respective first grooves 314 in the first groove 314 in the fifth direction are not equal, and the depth of the first groove 314 closer to the edge area is smaller. Among them, the fourth direction is parallel to the side of the picking unit 310 facing away from the first carrier 100, and the fifth direction is parallel to the arrangement direction of the first carrier 100 and the picking structure 300.

[0072] Based on the above, in the embodiment, at least two first grooves 314 are arranged in the middle region on the side of the picking unit 310 away from the first carrier 100. The depths and widths of the first grooves 314 are different from each other, and are smaller closer to the edge region. Thus, the adsorption forces of the first grooves 314 arranged in the middle region of the picking unit 310 on the light-emitting element 400 are different. While facilitating the subsequent placement of the light-emitting element 400, it can effectively prevent the width of the first grooves 314 near the edge from being too large and exceeding the range of the light-emitting element 400, which is conducive to better pressing of the first grooves 314 and the light-emitting element 400, thereby facilitating better picking of the light-emitting element 400 by the picking unit 310 and improving the transfer yield.

[0073] Based on any of the above embodiments, in an embodiment of the present application, as Figure 11 shown, the widths of the second grooves 316 in the second grooves 316 along the fourth direction are not equal, and the widths of the second grooves 316 closer to the middle region are larger. The depths of the second grooves 316 in the second grooves 316 along the fifth direction are equal. That is to say, the depths of the second grooves 316 are the same, but the widths are different. The closer to the middle region, the larger the width. That is, in the direction away from the middle region in the edge region, the width of the second groove 316 becomes smaller, which is the same as the width of the above first groove 314 gradually becoming smaller closer to the edge region. It can facilitate the placement of the light-emitting element 400 while picking up the light-emitting element 400.

[0074] In another embodiment of the present application, as Figure 12 shown, the widths of the second grooves 316 in the second grooves 316 along the fourth direction are not equal, and the widths of the second grooves 316 closer to the middle region are larger. The depths of the second grooves 316 in the second grooves 316 along the fifth direction are not equal, and the widths of the second grooves 316 closer to the middle region are larger. That is to say, the depths and widths of the second grooves 316 in the edge region of the side of the picking unit 310 away from the first carrier 100 are different from each other. Along the direction away from the middle region, the depths and widths of the second grooves 316 become smaller, which is the same as the depths and widths of the above first grooves 314 being smaller closer to the edge region. It can make the second grooves 316 in the edge region better press against the light-emitting element 400 to form a cavity, and then pick up the light-emitting element 400 better, improving the transfer yield.

[0075] In an embodiment of the present application, as Figure 13 shown, Figure 13This is a schematic diagram of the structure of a pick-up unit in a transfer device provided by the present application. Along the first direction, the depth of the groove 312 is H1, and the thickness of the pick-up unit 310 is H2, where H1≤(H2) / 2. That is, the depth of the groove 312 in the pick-up unit 310 does not exceed half of the thickness of the pick-up unit 310, so as to avoid the groove 312 from exceeding the range of the light-emitting element 400 when the groove 312 is deformed along the third direction due to excessive expansion of the groove 312, and thus failing to form a cavity with the light-emitting element 400, thereby affecting the pick-up of the light-emitting element 400 and further affecting the transfer yield.

[0076] It should be noted that, when introducing the layout of the depth and width of the first groove 314 and the second groove 316, the above embodiment is introduced by taking the example that the layout of the depth and width of the first groove 314 is the same as the layout of the depth and width of the second groove 316, but the layout of the depth and width of the first groove 314 and the layout of the depth and width of the second groove 316 do not affect each other, that is, the layout of the depth and width of the two can be the same or different, depending on the specific circumstances.

[0077] It should also be noted that the above embodiment introduces the arrangement of the groove 312 by taking the case where the groove 312 is arranged in the middle area of ​​the side of the picking unit 310 facing away from the first carrier 100 and in the edge area of ​​the side of the picking unit 310 facing away from the first carrier 100 as an example, but the above layout is also applicable to the case where the groove 312 is arranged only in the middle area of ​​the side of the picking unit 310 facing away from the first carrier 100 or the groove 312 is arranged only in the edge area of ​​the side of the picking unit 310 facing away from the first carrier 100.

[0078] For example, when the groove 312 is arranged only in the middle area of ​​the side of the pickup unit 310 away from the first carrier 100, the number of the groove 312 may be 1 or at least 2. When the number of the groove 312 may be 1, the one groove 312 coincides with the center of the middle area of ​​the side of the pickup unit 310 away from the first carrier 100, or the area where the one groove 312 is located covers the center of the middle area of ​​the side of the pickup unit 310 away from the first carrier 100.

[0079] When the number of the grooves 312 may be at least 2, the at least 2 grooves 312 are arranged symmetrically with respect to the center of the middle area of ​​the side of the pickup unit 310 away from the first carrier 100, or one of the at least 2 grooves 312 coincides with the center of the middle area of ​​the side of the pickup unit 310 away from the first carrier 100, or the area where the one groove 312 is located covers the center of the middle area of ​​the side of the pickup unit 310 away from the first carrier 100, and the remaining grooves 312 are arranged symmetrically with respect to the center of the middle area of ​​the side of the pickup unit 310 away from the first carrier 100. And the layout of the depth and width of the at least 2 grooves 312 is also the same as the layout of the first groove 314 in the middle area in the above embodiment, which will not be repeated here.

[0080] For example, when the grooves 312 are arranged only in the edge region of the pickup unit 310 away from the first carrier 100, the number of the grooves 312 may be at least 2. The at least two grooves 312 are symmetrically arranged relative to the middle region, and the layout of the depth and width of the at least two grooves 312 is the same as the layout of the second grooves 316 in the edge region in the above embodiment, which will not be described in detail.

[0081] In one embodiment of the present application, Figure 14 As shown, Figure 14 This is a schematic diagram of the structure of a transfer device provided by the present application. The pick-up structure 300 also includes a pick-up film layer 320. The pick-up film layer 320 is located in the area other than the groove 312 on the side of the pick-up unit 310 away from the first carrier 100. The pick-up film layer 320 has an adhesive effect on the light-emitting element 400, and cooperates with the groove 312 to pick up the light-emitting element 400, which can ensure that the light-emitting element 400 is picked up and improve the transfer yield. It should be noted that in order to prevent the pick-up film layer 320 from affecting the deformation of the groove 312, the pick-up film layer 320 is required to have a moderate viscosity, which will not affect the deformation of the groove 312 and has an adhesive effect on the light-emitting element 400. However, the present application does not limit the specific material of the pick-up film layer 320, and any material that meets the above viscosity requirements can be used, depending on the specific situation.

[0082] In an embodiment of the present application, the shape of the notch of the groove 312 may be the same as the shape of the contact surface of the light-emitting element 400, such as a rectangle. When the shape of the notch of the groove 312 is a rectangle same as that of the light-emitting element 400, the edge trend of the notch of the groove 312 is the same as the edge trend of the contact surface of the light-emitting element 400. When there are multiple grooves 312, the number of grooves 312 exceeding the range of the light-emitting element 400 can be effectively reduced. Thus, when the picking unit 310 is pressed against the light-emitting element 400, it can help the grooves 312 thereon and the light-emitting element 400 to form a cavity, especially the grooves 312 in the edge area on the side of the picking unit 310 facing away from the first carrier 100, thereby facilitating the picking of the light-emitting element 400 by the picking unit 310 and improving the transfer yield. Herein, the notch of the groove 312 is the side where the groove 312 is pressed against the light-emitting element 400, and the contact surface of the light-emitting element 400 is the side where the light-emitting element 400 is pressed against the groove 312.

[0083] It should be noted that the shape of the notch of the groove 312 may also be different from the shape of the contact surface of the light-emitting element 400, such as a circle, a triangle, a polygon, etc. The present application does not limit this, and it depends on the specific situation.

[0084] In an embodiment of the present application, as Figure 15 shown, Figure 15 is a schematic structural diagram of the picking unit in a transfer device provided by the present application. The shape of the side of the picking unit 310 facing away from the first carrier 100 is the same as the shape of the notch of the groove 312, so that the edge trend of the notch of the groove 312 can be the same as the edge trend of the picking unit 310. Thus, the groove 312 can be arranged in an area closer to the edge of the picking unit 310, and further, a larger number of grooves 312 can be arranged on the side of the picking unit 310 facing away from the first carrier 100, so that the picking unit 310 can generate a greater adsorption force on the light-emitting element 400 and improve the transfer yield.

[0085] It should be noted that for the transfer device described in any of the above embodiments, it should be understood that the area of the side where the picking unit 310 is pressed against the light-emitting element 400, or the side of the picking unit 310 where the groove 312 is to be arranged, should be larger than the area of the contact surface where the light-emitting element 400 contacts the picking unit 310, so as to ensure that the picking unit 310 can set grooves 312 of sufficient size and arrange a sufficient number of grooves 312 to achieve the picking of the light-emitting element 400 and improve the transfer yield.

[0086] For the transfer device described in any of the above embodiments, it can be manufactured by an imprinting method. For example Figure 16As shown, the transfer device can be fabricated using the silicon mold 1 through an imprinting process. It should be noted that the silicon mold 1 can be obtained through common existing fabrication processes, such as Figure 17 as shown, through processes such as etching and demolding. This application will not elaborate further on this.

[0087] In this specification, the various embodiments are described in a progressive, or parallel, or a combination of progressive and parallel manners. Each embodiment focuses on the differences from other embodiments. For the similarities between the embodiments, reference can be made to each other. For the devices disclosed in the embodiments, since they correspond to the methods disclosed in the embodiments, the description is relatively simple. For the relevant parts, reference can be made to the description in the method section.

[0088] It should be noted that in the description of this application, it should be understood that the orientation or positional relationships indicated by terms such as "upper", "lower", "top", "bottom", "inner", "outer", etc. are based on the orientation or positional relationships shown in the drawings. This is only for the convenience of describing this application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to this application. When a component is considered to be "connected" to another component, it can be directly connected to the other component or there may be intermediate components present simultaneously.

[0089] It should also be noted that in this text, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, such that an article or device comprising a series of elements includes not only those elements but also other elements not explicitly listed, or elements that are inherent to such article or device. Without further limitation, an element defined by the statement "comprising one..." does not exclude the existence of additional identical elements in the article or device comprising the above elements.

[0090] The above description of the disclosed embodiments enables those skilled in the art to implement or use this application. Various modifications to these embodiments will be obvious to those skilled in the art. The general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application will not be limited to the embodiments shown herein, but rather will be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A transfer device, characterized in that, include: The first carrier board; A picking structure, the picking structure is arranged on the first carrier plate, and the picking structure includes a plurality of picking units; The picking unit comprises N grooves, N≥1, the grooves are located on a side of the picking unit away from the first carrier plate, and the grooves extend toward the inside of the picking unit; The groove is used to form a cavity with the light-emitting element located on the second carrier, and the cavity is formed by pressing the side of the pickup unit away from the first carrier and the light-emitting element along the first direction, and when the pickup unit is pressed with the light-emitting element, the groove is deformed along at least one of the second direction and the third direction, so that the gas in the cavity is discharged, the light-emitting element is adsorbed, and the light-emitting element is picked up; The first direction is parallel to the arrangement direction of the first carrier plate and the pickup structure, and the first direction is from the first carrier plate to the pickup structure; the second direction is parallel to the side of the pickup unit away from the first carrier plate, and the second direction is from the inside of the groove to the outside; The third direction is antiparallel to the first direction, and the third direction is directed from the inside to the outside of the groove.

2. The transfer device according to claim 1, characterized in that N≥1, the groove is located in the middle area of ​​the pickup unit on a side away from the first carrier plate.

3. The transfer device according to claim 1, characterized in that: N≥2, the groove is located in an edge region of the pickup unit that is away from the first carrier plate, and the groove is symmetrically arranged in the edge region relative to the middle region.

4. The transfer device according to claim 1, characterized in that N≥3, the N grooves include m first grooves and n second grooves, m≥1, n≥2, m+n=N, the first grooves are located in the middle area of ​​the picking unit away from the first carrier plate, the second grooves are located in the edge area except the middle area, and the second grooves are symmetrically arranged in the edge area relative to the middle area.

5. The transfer device according to any one of claims 1-4, characterized in that, The projection of the notch of the groove along the first direction is smaller than the contact surface of the light emitting element; The notch of the groove is the side where the groove and the light emitting element are pressed together, and the contact surface of the light emitting element is the side where the light emitting element and the groove are pressed together.

6. The transfer device according to claim 4, characterized in that Along the fourth direction, the width of the notch of the first groove is D11, the width of the notch of the second groove is D12, D11>D12; the notch of the first groove is a side pressed with the light emitting element, and the notch of the second groove is a side pressed with the light emitting element; Along the fifth direction, the depth of the first groove is H11, the depth of the second groove is H12, and H11>H12; The fourth direction is parallel to a side of the pickup unit facing away from the first carrier, and the fifth direction is parallel to an arrangement direction of the first carrier and the pickup structure.

7. The transfer device according to claim 6, wherein In the sixth direction, the width of the notch of the first groove is D13, and the width of the notch of the second groove is D14, where D13 > D14; The sixth direction is parallel to the side of the pickup unit facing away from the first carrier plate, and the sixth direction intersects with the fourth direction.

8. The transfer device according to claim 4, wherein m = 1, n ≥ 2; or m ≥ 2, n ≥ 2.

9. The transfer device according to claim 8, wherein The second grooves are evenly arranged in the circumferential direction around the middle region in the edge region.

10. The transfer device according to claim 8, wherein m ≥ 2, the widths of the first grooves in the first grooves along the fourth direction are all equal, and the depths of the first grooves in the first grooves along the fifth direction are equal; or m ≥ 2, the widths of the first grooves in the first grooves along the fourth direction are not equal, and the width of the first groove closer to the edge region is smaller, and the depths of the first grooves in the first grooves along the fifth direction are equal; or m ≥ 2, the widths of the first grooves in the first grooves along the fourth direction are not equal, and the width of the first groove closer to the edge region is smaller, the depths of the first grooves in the first grooves along the fifth direction are not equal, and the depth of the first groove closer to the edge region is smaller; The fourth direction is parallel to the side of the pickup unit facing away from the first carrier plate, and the fifth direction is parallel to the arrangement direction of the first carrier plate and the pickup structure.

11. The transfer device according to any one of claims 6-10, wherein the widths of the second grooves in the second grooves along the fourth direction are not equal, and the width of the second groove closer to the middle region is larger, and the depths of the second grooves in the second grooves along the fifth direction are equal; or the widths of the second grooves in the second grooves along the fourth direction are not equal, and the width of the second groove closer to the middle region is larger, the depths of the second grooves in the second grooves along the fifth direction are not equal, and the width of the second groove closer to the middle region is larger.

12. The transfer device according to claim 1, wherein In the first direction, the depth of the groove is H1, and the thickness of the pickup unit is H2, where H1 ≤ (H2) / 2.

13. The transfer device according to claim 1, wherein The pickup structure further includes a pickup film layer, which is located in the area other than the groove on the side of the pickup unit facing away from the first carrier plate. The pickup film layer has an adhesive effect on the light-emitting element and cooperates with the groove to pick up the light-emitting element.

14. The transfer device according to claim 1, characterized in that, The shape of the notch of the groove is the same as the shape of the contact surface of the light-emitting element; The notch of the groove is the side where the groove is pressed against the light-emitting element, and the contact surface of the light-emitting element is the side where the light-emitting element is pressed against the groove.

15. The transfer device according to claim 14, characterized in that, The shape of the side of the pickup unit facing away from the first carrier plate is the same as the shape of the notch of the groove.

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