Crystal support clamping device, wire cutting machine and crystal support clamping method

Abstract

The invention provides a crystal support clamping device, a wire cutting machine and a crystal support clamping method, belongs to the technical field of crystal bar machining, and solves the problem that a cut crystal bar is prone to subfissure due to an existing crystal support clamping mode. The device comprises a base, a first clamping assembly and a second clamping assembly, the base is provided with a fixed clamping face and a floating clamping face, the fixed clamping face is used for abutting against a first part of the upper surface of the crystal support, the floating clamping face can float up and down to abut against a second part of the upper surface of the crystal support, the first clamping assembly can lift the two ends of the crystal support, and the second clamping assembly can lift the two ends of the crystal support. The second clamping assembly can jack the middle area of the crystal support. The floating adjusting piece moves downwards so as to abut against and support the second part of the upper surface of the crystal support, the crystal support cannot generate clamping bending, and when the base drives the crystal support and the crystal bar to press the cutting line downwards, the fixed clamping face and the floating clamping face can effectively support the borne cutting reaction force, so that the cutting efficiency is improved. And the subfissure probability of crystal bar cutting can be effectively reduced.

Description

Technical Field

[0001] This application belongs to the technical field of ingot processing. Specifically, it relates to a crystal holder clamping device, a wire sawing machine, and a crystal holder clamping method. Background Art

[0002] Before processing an ingot with a wire sawing machine, the ingot needs to be bonded to the bottom of the crystal holder with glue. The spring cylinder in the clamping base of the wire sawing machine uses spring force to fix the crystal holder to the lower part of the clamping base through a T-shaped slot structure, and generally uses a cylinder or an oil cylinder to release the clamping force.

[0003] The existing clamping surface is the fixed surface at the bottom of the base, and about 3 spring cylinders are used to clamp and fix the crystal holder in the length direction. In the bonded state of the crystal holder and the ingot, the middle area of the crystal holder is sunken or convex relative to the two end areas, and the clamping surface of the crystal holder and the clamping base cannot be completely fitted. As a result, under the action of the spring cylinder, elastic deformation occurs between the crystal holder and the clamping base under the spring force, and internal stress is generated inside the bonded ingot. When the ingot is cut downward by the diamond wire, internal stress is released, resulting in poor wafer crack defects.

[0004] Based on the above, the technical problem to be solved by this application is: how to reduce the probability of crack defects in ingot cutting. Summary of the Invention

[0005] The purpose of this application is to address the above problems existing in the prior art by proposing a crystal holder clamping device, a wire sawing machine, and a crystal holder clamping method, which solves the problem that the existing crystal holder clamping method easily causes crack defects in the cut ingot and reduces the probability of crack defects in ingot cutting.

[0006] The object of the present application can be achieved by the following technical solutions: A crystal tray clamping device, comprising a base, at least two fixed clamping surfaces arranged along the length direction at the bottom of the base, the fixed clamping surfaces being used for abutting against a first part of the upper surface of the crystal tray, a floating adjustment member, the floating adjustment member being arranged between at least two of the fixed clamping surfaces and movably connected to the base, the floating adjustment member having a floating clamping surface, the floating clamping surface having a vertical degree of freedom of movement for abutting against a second part of the upper surface of the crystal tray, defining that the second part of the upper surface of the crystal tray is located between at least two of the first parts of the upper surface of the crystal tray; a first clamping assembly, the first clamping assembly comprising: a first clamping member, the first clamping member being at least two and respectively arranged in the vertical direction of the fixed clamping surface, the first clamping member and the fixed clamping surface being used for jointly clamping the first part of the upper surface of the crystal tray; a first driving mechanism, the first driving mechanism having a first output end, the first output end acting on the first clamping member to drive the first clamping member to approach or move away from the fixed clamping surface; and a second clamping assembly, the second clamping assembly comprising: a second clamping member, the second clamping member being arranged in the vertical direction of the floating clamping surface, the second clamping member and the floating clamping surface being used for jointly clamping the second part of the upper surface of the crystal tray; a second driving mechanism, the second driving mechanism having a second output end, the second output end passing through the floating adjustment member and acting on the second clamping member to drive the second clamping member to approach or move away from the floating clamping surface.

[0007] It can be understood that the fixed clamping surface is fixed to the bottom of the base, preferably arranged at both ends of the bottom of the base or near both ends of the bottom of the base. Exemplarily, there can also be three fixed clamping surfaces, with one fixed clamping surface arranged in the middle area of the bottom of the base, and a floating adjustment member is respectively arranged at intervals between every two of the three fixed clamping surfaces; Exemplarily, there can also be two fixed clamping surfaces, and two floating adjustment members are equally spaced along the length direction of the base between the two fixed clamping surfaces; Exemplarily, there can also be three fixed clamping surfaces, with a floating adjustment member arranged between two of the fixed clamping surfaces. Additionally, the number of fixed clamping surfaces can also be four, five, six, etc. Correspondingly, at least one floating adjustment member is required to be located between two of the fixed clamping surfaces. By making the fixed clamping surface fit with the first part of the upper surface of the crystal holder, and by arranging a floating adjustment member between at least two fixed clamping surfaces, the floating adjustment member floats up and down to make the floating clamping surface abut against the second part of the upper surface of the crystal holder. Among them, the first part of the upper surface of the crystal holder is generally set at both ends of the upper surface of the crystal holder, and the second part of the upper surface of the crystal holder is generally set in the middle area of the upper surface of the crystal holder. Since the first part of the upper surface of the crystal holder is lifted upward by at least two first clamping members and abuts against the fixed clamping surface, and the second part of the upper surface of the crystal holder protrudes downward relative to the first part and has a certain curvature, it cannot directly use the second clamping member to lift upward and abut against the base, otherwise it is easy to cause internal stress in the crystal bar inside the bottom of the crystal holder. Therefore, the floating adjustment member moves downward to abut against and support the second part of the upper surface of the crystal holder, and the crystal holder will not be clamped and bent. Moreover, when the base drives the crystal holder and the crystal bar to press down on the cutting wire, both the fixed clamping surface and the floating clamping surface can support the received cutting reaction force, and the probability of hidden cracks in crystal bar cutting can be effectively reduced. Exemplarily, the first driving mechanism and the second driving mechanism are preferably configured as spring cylinders, or other conventional driving mechanisms that output in the vertical direction can also be used.

[0008] In the above crystal holder clamping device, a receiving groove is opened at the bottom of the base, and the floating adjustment member is received in the receiving groove. The floating adjustment member includes: a first plate body, which is arranged between the second clamping member and the base, and the first plate body is movably connected to the base in the vertical direction. A first opening is provided on the first plate body, and the second output end passes through the first opening. The surface of the first plate body facing away from the base is the floating clamping surface, and the surface of the first plate body close to the base is a first inclined surface; a second plate body, which is arranged between the first plate body and the base and is located in the receiving groove. A second opening is provided on the second plate body, and the second opening is coaxially arranged with the first opening for the second output end to pass through. The second plate body has a degree of freedom of movement along the first inclined surface to adjust the movement of the first plate body relative to the base in the vertical direction.

[0009] Exemplarily, the first plate body and the second plate body are configured as wedge blocks. By providing a receiving groove at the bottom of the base, a movable space is provided for the second plate body, and the inner wall of the receiving groove is configured to at least partially abut against the first plate body and the second plate body, so as to ensure that the second plate body can only move along the second inclined plane and cannot move in other directions. By opening holes in the first plate body and the second plate body, the second output end of the second driving mechanism can pass through, so as to cooperate with the second clamping member to perform clamping activities in the vertical direction.

[0010] In the above crystal holder clamping device, a connecting column is provided between the first plate body and the base. The connecting column penetrates through the second plate body to form a third opening. The cross-sectional length of the third opening is greater than the outer diameter of the connecting column. The length direction of the cross-section of the third opening is substantially parallel to the length direction of the second plate body. The connecting column has a first end and a second end. The first end is fixedly connected to the first plate body, and an elastic member is provided between the second end and the base. The elastic member acts on the second end to make the first plate body always have a tendency to move upward. Exemplarily, there are multiple connecting columns, preferably 4, which are circumferentially arranged on the first plate body. Installation grooves corresponding to the number of connecting columns are provided on the base. The second end and the elastic member are located in the installation grooves. The connecting column penetrates through the installation grooves and the first plate body and is fixedly connected to the second plate body. The second end of the connecting column is in the shape of a bolt. The connecting column penetrates through the installation groove to form a through hole. The outer diameter of the second end is greater than the aperture of the through hole. The elastic member is arranged in the installation groove and between the second end and the through hole, so as to always provide an upward elastic force to the second end, ensuring that the connecting column always drives the first plate body to closely abut against the second plate body upward. When the second plate body receives sufficient force to overcome the elastic force of the elastic member, it can move, realizing the height adjustment of the floating clamping surface. During the moving process, the first plate body always abuts against the second plate body through the elastic force of the elastic member on the connecting column, ensuring the adjustment accuracy of the floating clamping surface and having a resetable performance. It should be noted that the width direction of the cross-section of the third opening is slightly larger than the outer diameter of the connecting column. By configuring the length direction of the cross-section of the third opening to be substantially parallel to the length direction of the second plate body, a guiding effect can be provided for the movement of the second plate body, further improving the movement accuracy.

[0011] In the above-mentioned crystal holder clamping device, the second plate body has a second inclined surface, the second inclined surface is attached to the first inclined surface, and the slope of the second inclined surface is equal to the slope of the first inclined surface. The surface of the second plate body close to the base is a second plane, and the second plane and the floating clamping surface are respectively parallel to the fixed clamping surface. It can be understood that by setting the slopes of the second inclined surface and the first inclined surface to be equal, after the two are overlapped, the floating clamping surface of the first plate body and the second plane of the second plate body are respectively parallel to the fixed clamping surface, so that the floating clamping surface can increase the fitting area with the second part of the crystal holder, thereby providing stable support. Preferably, the slopes of the first inclined surface and the second inclined surface are both less than or equal to 0.2, so as to improve the moving accuracy of the second plate body, and further improve the adjusting accuracy of the floating clamping surface in the vertical direction.

[0012] In the above-mentioned crystal holder clamping device, a third driving mechanism is provided on the base, and the third driving mechanism acts on the second plate body to drive the second plate body to move along the first inclined surface. It can be understood that by driving the second plate body to move along the first inclined surface by the third driving mechanism, the relative floating of the floating clamping surface in the height direction can be controlled, so that the floating clamping surface abuts and supports the second part of the upper surface of the crystal holder. In some embodiments, the third driving mechanism can also be communicatively connected to the second driving mechanism, so that when the third driving mechanism drives the floating clamping surface in place, a signal can be sent to the second driving mechanism, and after the second driving mechanism responds, it can drive the second clamping member to jack up the crystal holder, and the second clamping member and the floating clamping surface cooperate to clamp the crystal holder.

[0013] In the above crystal holder clamping device, a first distance sensor is provided on one side of the base near the floating adjustment member. The first distance sensor faces the outer peripheral side of the floating clamping surface to obtain the distance from the second part of the upper surface of the crystal holder, and the first distance sensor is communicatively connected to the third driving mechanism. Exemplarily, the first distance sensor is preferably an eddy current sensor. The eddy current sensor can obtain the height position of the second part of the upper surface of the crystal holder. Since the first part of the upper surface of the crystal holder has abutted against the fixed clamping surface and the fixed clamping surface has a fixed height, the height difference between the second part and the first part of the upper surface of the crystal holder can be calculated. The eddy current sensor can send a signal to the third driving mechanism, and the third driving mechanism drives the floating adjustment member to move to a suitable height to abut against the second part of the upper surface of the crystal holder. At the same time, it can also detect in real time whether the actual distance of the second part of the upper surface of the crystal holder reaches the set distance, and send a signal to the third driving mechanism accordingly. The third driving mechanism can stop driving to avoid the aggravation of the crystal holder bending and driving the crystal bar to have a hidden crack. It should be noted that the upper surface of the crystal holder has a certain bending arc. Therefore, the eddy current sensor is closer to the second part of the upper surface of the crystal holder in the horizontal direction, that is, the detection value is more accurate. Therefore, it is a preferred solution to set the first distance sensor on the outer periphery of the floating clamping surface without being blocked by the floating clamping member within the detection visual field range.

[0014] In the above crystal holder clamping device, a connecting portion is provided on the second plate body, and a screw rod is threadedly connected to the connecting portion. The third driving mechanism acts on the screw rod to drive the screw rod to rotate. It can be understood that since the second plate body is arranged in the accommodating groove and is restricted to move only along the first inclined surface, by driving the screw rod to rotate through the third driving mechanism, the rotation of the screw rod can drive the second plate body to move along the first inclined surface. This driving method is preferably used to ensure the moving accuracy of the second plate body. After the screw rod stops rotating, an automatic locking function can be realized to avoid the floating of the floating clamping surface and ensure the stable support of the second part of the upper surface of the crystal holder.

[0015] In the above crystal holder clamping device, the third driving mechanism is connected with a torque sensor to feedback and adjust the rotation of the screw rod. It can be understood that when the torque sensor of the third driving mechanism detects an increase in torque, it can be judged that the floating clamping surface abuts against the crystal holder. If the floating clamping surface wants to continue to move downward, a greater driving force is required. Therefore, the rotation of the screw rod can be immediately stopped to ensure that the floating clamping surface and the crystal holder are in this just-fitting state, avoiding damage to the crystal bar due to hidden cracks.

[0016] In the above crystal holder clamping device, a second distance sensor is provided on the screw rod. The second distance sensor faces the second plate body to obtain the distance from the second plate body, and the second distance sensor is communicatively connected to the third driving mechanism. It can be understood that by providing the second distance sensor on the screw rod, the moving distance of the stud can be further clarified, and the actual height position change amount of the second plate body and the floating clamping surface in the vertical direction can be deduced, which can be matched with the pre-adjusted height of the floating clamping surface calculated after detecting the position of the crystal holder to complete the closed-loop adjustment.

[0017] In the above crystal holder clamping device, a magnetic member is provided on the second plate body, and the third driving mechanism includes an electromagnet. The electromagnet acts on the magnetic member to drive the second plate body to move along the first inclined surface. It can be understood that as another solution, by utilizing the magnetic characteristics of the electromagnet and the magnetic member, one of them can be driven for magnetic attraction movement or magnetic repulsion movement, and the magnetic force can be adjusted by controlling the magnitude of the current of the electromagnet, thereby changing the movement amount of the second plate body, and the height adjustment of the floating clamping surface can also be realized.

[0018] Another object of the present application is to provide a wire cutting machine including the above crystal holder clamping device. It can be understood that by applying the crystal holder clamping device of the present application to the wire cutting machine, the clamping state of the crystal holder can be significantly improved, the crystal bar can be prevented from continuing to deform and causing hidden cracks, and the slicing quality of the crystal bar can be improved.

[0019] Another object of the present application is to provide a method for clamping a crystal holder, including the following steps: Controlling at least two first clamping members to lift the crystal holder upward, and keeping the first part of the upper surface of the crystal holder in contact with the fixed clamping surface of the base; Obtaining the height position of the second part of the upper surface of the crystal holder; Based on the height position of the second part of the upper surface of the crystal holder, controlling the floating clamping surface to downwardly contact the second part of the upper surface of the crystal holder, and controlling the second clamping member to upwardly contact the crystal holder.

[0020] Compared with the prior art, the present application has the following beneficial effects: The present application utilizes the floating adjustment member to move downward, so as to abut and support the second part of the upper surface of the crystal holder. The crystal holder will not be clamped and bent, and when the base drives the crystal holder and the crystal bar to press down on the cutting wire, both the fixed clamping surface and the floating clamping surface can effectively support the received cutting reaction force, and the probability of hidden cracks in the crystal bar cutting can be effectively reduced. Description of the Drawings

[0021] Figure 1 It is a schematic structural diagram of the crystal holder clamping device of the present application after assembling the crystal holder with the crystal bar; Figure 2It is a schematic structural diagram of the crystal holder clamping device and the crystal holder being separated in this application; Figure 3 It is a schematic structural diagram of the crystal holder clamping device in this application assembling the crystal holder; Figure 4 It is Figure 3 the schematic cross-sectional structure diagram in the Figure 1 ; Figure 5 It is Figure 4 the enlarged structural schematic diagram of area A in Figure 6 It is Figure 4 the enlarged structural schematic diagram of area B in Figure 7 It is a schematic structural diagram showing the perspective of the bottom surface of the base after hiding some structures in this application; Figure 8 It is Figure 3 the schematic cross-sectional structure diagram in the Figure 2 ; Figure 9 It is a schematic structural diagram of the floating adjustment part and the second clamping component in this application; Figure 10 It is a schematic structural diagram of the first plate body and the second plate body being separated in this application; Figure 11 It is a simple schematic structural diagram of driving the floating adjustment part to move by an electromagnet in this application; Figure 12 It is a simple schematic structural diagram of the working state conversion of the crystal holder clamping device in this application; Figure 13 It is a schematic flow diagram of the crystal holder clamping method in this application; In the figure, 100, base; a, fixed clamping surface; 700, floating adjustment part; 710, first plate body; 711, first opening; 712, first inclined surface; 720, second plate body; 721, second opening; 722, third opening; 723, second inclined surface; 724, connecting part; 725, magnetic part; 726, second plane; b, floating clamping surface; 110, accommodating groove; 120, connecting column; 121, first end; 122, second end; 130, elastic part; 140, installation groove; 200, first clamping component; 210, first clamping piece; 220, first driving mechanism; 221, first output end; 300, second clamping component; 310, second clamping piece; 320, second driving mechanism; 321, second output end; 400, third driving mechanism; 410, screw rod; 420, torque sensor; 430, electromagnet; 500, first distance sensor; 600, second distance sensor; J, crystal holder; J1, first part; J2, second part; S, crystal bar. Specific Embodiments

[0022] To make the above objects, features, and advantages of the present application more apparent and understandable, the following describes in detail the specific embodiments of the present application with reference to the accompanying drawings. Many specific details are set forth in the following description to facilitate a thorough understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the spirit of the present application. Therefore, the present application is not limited by the specific embodiments disclosed below.

[0023] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present application.

[0024] In addition, the terms "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In the description of the present application, "a plurality of" means at least two, such as two, three, etc., unless otherwise specifically and clearly defined.

[0025] In the present application, unless otherwise clearly specified and limited, the terms "mounted", "connected", "coupled", "fixed", etc. should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the internal communication of two elements or the interaction relationship between two elements, unless otherwise clearly limited. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0026] In the present application, unless otherwise clearly specified and limited, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over", and "on top of" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "below", and "beneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0027] It should be noted that when an element is referred to as "fixed to" or "disposed on" another element, it can be directly on the other element or there may be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only embodiments.

[0028] Please refer to the Figures 1 to 6 of the accompanying drawings of the specification. The crystal holder clamping device of the present application includes a base 100, a first clamping assembly 200 and a second clamping assembly 300. At least two fixed clamping surfaces a are arranged along the length direction at the bottom of the base 100. Refer to Figure 2 and Figure 7 . The fixed clamping surface a is used to abut against the first part J1 of the upper surface of the crystal holder J. A floating adjustment member 700 is provided between at least two fixed clamping surfaces a. The floating adjustment member 700 is movably connected to the base 100. The floating adjustment member 700 has a floating clamping surface b. The floating clamping surface b has a vertical degree of freedom of movement for abutting against the second part J2 of the upper surface of the crystal holder J. The first part J1 of the upper surface of the crystal holder J is set to be two or more, and the second part J2 of the upper surface of the crystal holder J is defined as being located between a plurality of first parts J1. As Figure 4 and Figure 5 shown, the first clamping assembly 200 includes a first clamping member 210 and a first driving mechanism 220. The first clamping member 210 is at least two and are respectively arranged in the vertical direction of the fixed clamping surface a. The first clamping member 210 and the fixed clamping surface a are used to jointly clamp the first part J1 of the upper surface of the crystal holder J. The first driving mechanism 220 has a first output end 221. The first output end 221 acts on the first clamping member 210 to drive the first clamping member 210 to approach or separate from the fixed clamping surface a. As Figure 4 and Figure 6 shown, the second clamping assembly 300 includes a second clamping member 310 and a second driving mechanism 320. The second clamping member 310 is arranged in the vertical direction of the floating clamping surface b. The second clamping member 310 and the floating clamping surface b are used to jointly clamp the second part J2 of the upper surface of the crystal holder J. The second driving mechanism 320 has a second output end 321. The second output end 321 passes through the floating adjustment member 700 and acts on the second clamping member 310 to drive the second clamping member 310 to approach or separate from the floating clamping surface b.

[0029] It can be understood that the fixed clamping surface a is fixed to the bottom of the base 100, preferably arranged at both ends of the bottom of the base 100 or near both ends of the bottom of the base 100. Exemplarily, there can also be three fixed clamping surfaces a, with one fixed clamping surface a arranged in the middle area of the bottom of the base 100, and a floating adjustment member 700 is arranged at intervals between every two of the three fixed clamping surfaces a; Exemplarily, there can also be two fixed clamping surfaces a, and two floating adjustment members 700 are equally spaced along the length direction of the base 100 between the two fixed clamping surfaces a; Exemplarily, there can also be three fixed clamping surfaces a, with a floating adjustment member 700 arranged between two of the fixed clamping surfaces a. Additionally, the fixed clamping surface a can also be four, five, six, etc. Correspondingly, at least one floating adjustment member 700 needs to be located between two of the fixed clamping surfaces a. By making the fixed clamping surface a fit with the first part J1 of the upper surface of the crystal carrier J, and arranging a floating adjustment member 700 between at least two fixed clamping surfaces a, the floating adjustment member 700 floats up and down to make the floating clamping surface b abut against the second part J2 of the upper surface of the crystal carrier J. Among them, the first part J1 of the upper surface of the crystal carrier J is generally set at both ends of the upper surface of the crystal carrier J, and the second part J2 of the upper surface of the crystal carrier J is generally set in the middle area of the upper surface of the crystal carrier J. Since the first part J1 of the upper surface of the crystal carrier J is lifted upward by at least two first clamping members 210 and abuts against the fixed clamping surface a, and the second part J2 of the upper surface of the crystal carrier J protrudes downward relative to the first part J1 and has a certain curvature, it cannot directly use the second clamping member 310 to lift upward and abut against the base 100, otherwise it is easy to cause internal stress in the crystal bar S inside the bottom of the crystal carrier J. Therefore, the floating adjustment member 700 moves downward to abut against and support the second part J2 of the upper surface of the crystal carrier J, and the crystal carrier J will not be clamped and bent. Moreover, when the base 100 drives the crystal carrier J and the crystal bar S to press down on the cutting wire, both the fixed clamping surface a and the floating clamping surface b can support the received cutting reaction force, and the probability of hidden cracks in the cutting of the crystal bar S can be effectively reduced. Exemplarily, the first driving mechanism 220 and the second driving mechanism 320 are preferably configured as spring cylinders, or other conventional driving mechanisms that output forces in the vertical direction.

[0030] See Figure 8 , in some embodiments, a receiving groove 110 is formed at the bottom of the base 100, the receiving groove 110 houses the floating adjustment member 700, the floating adjustment member 700 includes a first plate body 710 and a second plate body 720, the first plate body 710 is arranged between the second clamping member 310 and the base 100, and the first plate body 710 is movably connected to the base 100 in the vertical direction, combined with Figure 6 and Figure 9As shown, a first opening 711 is formed in the first plate body 710. The second output end 321 passes through the first opening 711. The surface of the first plate body 710 facing away from the base 100 is a floating clamping surface b, and the surface of the first plate body 710 close to the base 100 is a first inclined surface 712. The second plate body 720 is disposed between the first plate body 710 and the base 100 and is located in the accommodation groove 110. A second opening 721 is formed in the second plate body 720. The second opening 721 is coaxially arranged with the first opening 711 for the second output end 321 to pass through. The second plate body 720 has a movable degree of freedom to move along the first inclined surface 712 to adjust the movement of the first plate body 710 relative to the base 100 in the vertical direction.

[0031] Exemplarily, as Figures 8 to 10 shown, the first plate body 710 and the second plate body 720 are configured as wedge blocks. By forming an accommodation groove 110 at the bottom of the base 100, a movable space is provided for the second plate body 720, and the inner wall of the accommodation groove 110 is configured to abut at least partially against the first plate body 710 and the second plate body 720, so as to ensure that the second plate body 720 can only move along the second inclined surface 723 and cannot move in other directions. By forming openings in the first plate body 710 and the second plate body 720, the second output end 321 of the second driving mechanism 320 can pass through, so as to cooperate with the second clamping member 310 to perform clamping activities in the vertical direction.

[0032] Referring to Figure 8 and Figure 9 In some embodiments, as shown in and, a connecting portion 724 is provided on the second plate body 720. The connecting portion 724 is threadedly connected to a screw rod 410. The third driving mechanism 400 acts on the screw rod 410 to drive the screw rod 410 to rotate. It can be understood that since the second plate body 720 is disposed in the accommodation groove 110 and is restricted to only move along the first inclined surface 712, by driving the screw rod 410 to rotate through the third driving mechanism 400, the rotation of the screw rod 410 can drive the second plate body 720 to move along the first inclined surface 712. This driving method is preferably used to ensure the movement accuracy of the second plate body 720. After the screw rod 410 stops rotating, an automatic locking function can be realized to prevent the floating clamping surface b from floating and ensure the stable support of the second part on the upper surface of the crystal carrier J.

[0033] Continuing to refer to Figure 8 and Figure 9, in some embodiments, a second distance sensor 600 is provided on the screw 410. The second distance sensor 600 faces the second plate body 720 to obtain the distance from the second plate body 720, and the second distance sensor 600 is communicatively connected to the third driving mechanism 400. It can be understood that by providing the second distance sensor 600 on the screw 410, the moving distance of the stud can be further clarified, and the actual height position change amount of the second plate body 720 and the floating clamping surface b in the vertical direction can be deduced, which can be matched with the pre-adjusted height of the floating clamping surface b calculated after detecting the position of the crystal carrier J to complete the closed-loop adjustment.

[0034] Referring to Figure 3 , Figure 9 and Figure 10 , in some embodiments, a third driving mechanism 400 is provided on the base 100. The third driving mechanism 400 acts on the second plate body 720 to drive the second plate body 720 to move along the first inclined surface 712. It can be understood that by driving the second plate body 720 to move along the first inclined surface 712 by the third driving mechanism 400, the floating clamping surface b can be controlled to float in the height direction, so that the floating clamping surface b abuts against the second part of the upper surface of the crystal carrier J. In some embodiments, the third driving mechanism 400 can also be communicatively connected to the second driving mechanism 320, so that when the third driving mechanism 400 drives the floating clamping surface b in place, a signal can be sent to the second driving mechanism 320. After the second driving mechanism 320 responds, it can drive the second clamping member 310 to lift the crystal carrier J, and the second clamping member 310 cooperates with the floating clamping surface b to clamp the crystal carrier J. In some embodiments, the third driving mechanism 400 is connected with a torque sensor 420 to feedback and adjust the rotation of the screw 410. It can be understood that when the torque sensor 420 of the third driving mechanism 400 detects an increase in torque, it can be determined that the floating clamping surface b abuts against the crystal carrier J. If the floating clamping surface b wants to continue to move downward, a greater driving force is required. Therefore, the rotation of the screw 410 can be immediately stopped to ensure that the floating clamping surface b and the crystal carrier J are in this just-fitting state, avoiding hidden cracks and damage to the crystal bar S.

[0035] See Figures 9 to 11, in some embodiments, a connecting post 120 is provided between the first plate body 710 and the base 100. The connecting post 120 penetrates through the second plate body 720 to form a third opening 722. The cross-sectional length of the third opening 722 is greater than the outer diameter of the connecting post 120. The length direction of the cross-section of the third opening 722 is substantially parallel to the length direction of the second plate body 720. The connecting post 120 has a first end 121 and a second end 122. The first end 121 is fixedly connected to the first plate body 710, and an elastic member 130 is provided between the second end 122 and the base 100. The elastic member 130 acts on the second end 122 to make the first plate body 710 always tend to move upward. Exemplarily, there are multiple connecting posts 120, preferably 4, which are circumferentially arranged on the first plate body 710. The base 100 is provided with mounting grooves 140 corresponding to the number of the connecting posts 120. The second end 122 and the elastic member 130 are located in the mounting grooves 140. The connecting post 120 penetrates through the mounting grooves 140 and the first plate body 710 and is fixedly connected to the second plate body 720. The second end 122 of the connecting post 120 is in the shape of a bolt. The connecting post 120 penetrates through the mounting groove 140 to form a through hole (not shown in the figure). The outer diameter of the second end 122 is greater than the aperture of the through hole. The elastic member 130 is arranged in the mounting groove 140 and between the second end 122 and the through hole, so as to always provide an upward elastic acting force to the second end 122, ensuring that the connecting post 120 always drives the first plate body 710 to tightly abut against the second plate body 720 upward. When the second plate body 720 is subjected to a sufficient force to overcome the elastic acting force of the elastic member 130, it can move, realizing the height adjustment of the floating clamping surface b. During the moving process, the first plate body 710 always tightly abuts against the second plate body 720 through the elastic acting force of the elastic member 130 on the connecting post 120, ensuring the adjustment accuracy of the floating clamping surface b and having the performance of being resetable. It should be noted that the width direction of the cross-section of the third opening 722 is slightly greater than the outer diameter of the connecting post 120. By configuring the length direction of the cross-section of the third opening 722 to be substantially parallel to the length direction of the second plate body 720, it can provide a guiding effect for the movement of the second plate body 720 and further improve the movement accuracy.

[0036] Referring to Figure 10, in some embodiments, the second plate body 720 has a second inclined surface 723, the second inclined surface 723 is attached to the first inclined surface 712, and the slope of the second inclined surface 723 is equal to the slope of the first inclined surface 712. The surface of the second plate body 720 close to the base 100 is a second plane 726, and the second plane 726 and the floating clamping surface b are respectively parallel to the fixed clamping surface a. It can be understood that by setting the slopes of the second inclined surface 723 and the first inclined surface 712 to be equal, after the two are overlapped, the floating clamping surface b of the first plate body 710 and the second plane 726 of the second plate body 720 are respectively parallel to the fixed clamping surface a, so that the floating clamping surface b can increase the fitting area with the second part J2 of the crystal holder J, thereby providing stable support. Preferably, the slopes of the first inclined surface 712 and the second inclined surface 723 are both less than or equal to 0.2, so as to improve the moving accuracy of the second plate body 720, and further improve the adjustment accuracy of the floating clamping surface b in the vertical direction.

[0037] Refer to Figure 2 , Figure 7 and Figure 12 , in some embodiments, a first distance sensor 500 is provided on one side of the base 100 close to the floating adjustment member 700. The first distance sensor 500 faces the outer peripheral side of the floating clamping surface b to obtain the distance from the second part J2 of the upper surface of the crystal holder J, and the first distance sensor 500 is communicatively connected to the third driving mechanism 400. Exemplarily, the first distance sensor 500 is preferably an eddy current sensor. The eddy current sensor can obtain the height position of the second part J2 of the upper surface of the crystal holder J. Since the first part J1 of the upper surface of the crystal holder J has abutted against the fixed clamping surface a, and the fixed clamping surface a is at a fixed height, the height difference between the second part of the upper surface of the crystal holder J and the first part J1 can be calculated. The eddy current sensor can send a signal to the third driving mechanism 400, and the third driving mechanism 400 drives the floating adjustment member 700 to move to a suitable height to abut against the second part of the upper surface of the crystal holder J. At the same time, it can also detect in real time whether the actual distance of the second part of the upper surface of the crystal holder J reaches the set distance, and send a signal to the third driving mechanism 400 accordingly. The third driving mechanism 400 can stop driving to avoid further bending of the crystal holder J and driving the crystal bar S to have a hidden crack. It should be noted that the upper surface of the crystal holder J has a certain bending curvature. Therefore, the eddy current sensor is closer to the second part of the upper surface of the crystal holder J in the horizontal direction, that is, the detection value is more accurate. Therefore, it is a preferred solution to set the first distance sensor 500 on the outer periphery of the floating clamping surface b while ensuring that the detection vision range is not blocked by the floating clamping member.

[0038] Refer to Figure 11, in some embodiments, a magnetic member 725 is provided on the second plate body 720, and the third driving mechanism 400 includes an electromagnet 430. The electromagnet 430 acts on the magnetic member 725 to drive the second plate body 720 to move along the first inclined surface 712. It can be understood that, as another solution, by using the magnetic properties of the electromagnet 430 and the magnetic member 725, one of them is driven to perform magnetic attraction or magnetic repulsion movement, and the magnetic force is adjusted by controlling the magnitude of the current of the electromagnet 430, so as to change the moving amount of the second plate body 720, and the height adjustment of the floating clamping surface b can also be realized.

[0039] Working principle of the crystal carrier clamping device of the present application: First, refer to Figure 1 , bond the crystal bar S to the bottom surface of the crystal carrier J, and then refer to Figure 2 As shown, embed the upper half of the crystal carrier J between the base 100, the first clamping member 210, and the second clamping member 310. When both ends of the crystal carrier J are located below both ends of the base 100, refer to Figure 12 For the simple working process of each component in, the first driving mechanism 220 drives the first clamping member 210 to lift the crystal carrier J upward until the first part J1 of the upper surface of the crystal carrier J abuts against the fixed clamping surface a of the base 100. Then, the height position of the second part J2 of the upper surface of the crystal carrier J is detected and obtained by the first distance sensor 500, and a signal is sent to the third driving mechanism 400. The third driving mechanism 400 drives the screw 410 to rotate. The rotation of the screw 410 drives the second plate body 720 to move along the first plate body 710. When the first plate body 710 moves, it presses down the second plate body 720 against the elastic force of the elastic member 130, so that the floating clamping surface b of the second plate body 720 moves downward until it abuts against the second part J2 of the upper surface of the crystal carrier J. Finally, the second driving mechanism 320 drives the second clamping member 310 to abut against the bottom of the crystal carrier J upward.

[0040] Beneficial effects: The crystal holder J clamping device of the present application can move vertically by setting the floating adjustment member 700, so that it can abut against and support the second part J2 of the upper surface of the crystal holder J, and the crystal holder J will not be clamped and bent. When the base 100 drives the crystal holder J and the crystal bar S to press down the cutting wire, both the fixed clamping surface a and the floating clamping surface b can support the cutting reaction force received, and the probability of hidden cracks in the cutting of the crystal bar S can be effectively reduced. By opening a receiving groove 110 at the bottom of the base 100, a movable space is provided for the second plate body 720, and the inner wall of the receiving groove 110 is configured to abut at least partially against the first plate body 710 and the second plate body 720, so as to ensure that the second plate body 720 can only move along the second inclined surface 723 and cannot move in other directions. By setting the elastic member 130, an upward elastic force is always provided to the second end 122 to ensure that the connecting column 120 always drives the first plate body 710 to tightly abut against the second plate body 720 upward. When the second plate body 720 receives sufficient force to overcome the elastic force of the elastic member 130, it can move, realizing the height adjustment of the floating clamping surface b. During the moving process, the first plate body 710 always tightly abuts against the second plate body 720 through the elastic force of the elastic member 130 on the connecting column 120, ensuring the adjustment accuracy of the floating clamping surface b and having the performance of being reset. By setting detection elements such as the first distance sensor 500, the second distance sensor 600, and the torque sensor 420, it can be ensured that the second part J2 of the upper surface of the crystal holder J just fits with the floating clamping surface b, and the floating clamping member will not press down excessively to aggravate the bending of the crystal holder J, thereby reducing the probability of hidden cracks inside the crystal bar S.

[0041] The wire cutting machine (not shown in the figure) of the present application includes the crystal holder clamping device of the present application. It can be understood that by applying the crystal holder clamping device of the present application to the wire cutting machine, the clamping state of the crystal holder can be significantly improved, the continuous deformation of the crystal holder leading to hidden cracks in the crystal bar can be avoided, and the slicing quality of the crystal bar can be improved. The wire cutting machine of the present application mainly refers to a device for wire cutting a crystal bar or crystal into wafers. Wire cutting can be achieved by the reciprocating movement of a wire such as a diamond wire in cooperation with the downward pressure of the crystal holder and the crystal bar. The wire cutting machine is a mature equipment solution, so it will not be elaborated here.

[0042] See Figure 13 , the crystal holder clamping method of the present application includes the following steps: S100. Control at least two first clamping members 210 to lift the crystal holder J upward, and keep the first part J1 of the upper surface of the crystal holder J in contact with the fixed clamping surface a of the base 100. S200. Obtain the height position of the second part J2 of the upper surface of the crystal holder J. S300. Based on the height position of the second part J2 of the upper surface of the crystal holder J, control the floating clamping surface b to downwardly abut against the second part J2 of the upper surface of the crystal holder J, and control the second clamping member 310 to upwardly abut against the crystal holder J.

[0043] It can be understood that the height position of the second part J2 of the upper surface of the crystal holder J can be achieved by the first distance sensor 500. It should be noted that when controlling the floating clamping surface b to abut downward against the second part J2 of the upper surface of the crystal holder J and controlling the second clamping member 310 to abut upward against the crystal holder J, the order of these two steps can be replaced, but it is necessary to ensure that the floating clamping surface b or the second clamping member 310 does not move excessively. Preferably, the movement of the floating clamping surface b is started first to abut against the second part J2 of the upper surface of the crystal holder J.

[0044] The specific embodiments described herein are merely illustrative of the spirit of the present application. Those skilled in the art to which the present application pertains can make various modifications or supplements to the described specific embodiments or use similar ways to replace them, but will not deviate from the spirit of the present application or exceed the scope defined by the appended claims.

Claims

1. A crystal holder clamping device, characterized in that, Comprising: A base (100), at least two fixed clamping surfaces (a) are arranged along the length direction at the bottom of the base (100), and the fixed clamping surfaces (a) are used to abut against a first part of the upper surface of the crystal carrier. A floating adjustment member (700), the floating adjustment member (700) is arranged between at least two of the fixed clamping surfaces (a) and is movably connected to the base (100), the floating adjustment member (700) has a floating clamping surface (b), and the floating clamping surface (b) has a vertical movement degree of freedom to be used for abutting against a second part of the upper surface of the crystal carrier, and it is defined that the second part of the upper surface of the crystal carrier is located between at least two first parts of the upper surface of the crystal carrier. A first clamping assembly (200), the first clamping assembly (200) includes: First clamping members (210), at least two first clamping members (210) are respectively arranged in the vertical direction of the fixed clamping surface (a), and the first clamping members (210) and the fixed clamping surface (a) are used to jointly clamp the crystal carrier. A first driving mechanism (220), the first driving mechanism (220) has a first output end (221), and the first output end (221) acts on the first clamping member (210) to drive the first clamping member (210) to approach or move away from the fixed clamping surface (a); and A second clamping assembly (300), the second clamping assembly (300) includes: Second clamping members (310), the second clamping members (310) are arranged in the vertical direction of the floating clamping surface (b), and the second clamping members (310) and the floating clamping surface (b) are used to jointly clamp the crystal carrier. A second driving mechanism (320), the second driving mechanism (320) has a second output end (321), and the second output end (321) penetrates through the floating adjustment member (700) and acts on the second clamping member (310) to drive the second clamping member (310) to approach or move away from the floating clamping surface (b).

2. The crystal holder clamping device according to claim 1, characterized in that, A receiving groove (110) is formed at the bottom of the base (100), the receiving groove (110) receives the floating adjustment member (700), and the floating adjustment member (700) includes: A first plate body (710), the first plate body (710) is arranged between the second clamping member (310) and the base (100), the first plate body (710) is movably connected to the base (100) in the vertical direction, a first opening (711) is formed on the first plate body (710), the first opening (711) allows the second output end (321) to pass through, the surface of the first plate body (710) facing away from the base (100) is the floating clamping surface (b), and the surface of the first plate body (710) close to the base (100) is a first inclined surface (712). A second plate body (720) is disposed between the first plate body (710) and the base (100) and is located within the accommodation groove (110). A second opening (721) is formed in the second plate body (720). The second opening (721) is coaxially arranged with the first opening (711) for the second output end (321) to pass through. The second plate body (720) has a degree of freedom of movement along the first inclined surface (712) to adjust the vertical movement of the first plate body (710) relative to the base (100).

3. The crystal holder clamping device according to claim 2, wherein, A connecting column (120) is provided between the first plate body (710) and the base (100). The connecting column (120) penetrates through the second plate body (720) to form a third opening (722). The cross-sectional length of the third opening (722) is greater than the outer diameter of the connecting column (120). The length direction of the cross-section of the third opening (722) is substantially parallel to the length direction of the second plate body (720). The connecting column (120) has a first end (121) and a second end (122). The first end (121) is fixedly connected to the first plate body (710), and an elastic member (130) is provided between the second end (122) and the base (100). The elastic member (130) acts on the second end (122) to make the first plate body (710) always have a tendency to move upward.

4. The crystal holder clamping device according to claim 2, wherein, The second plate body (720) has a second inclined surface (723). The second inclined surface (723) is in contact with the first inclined surface (712), and the slope of the second inclined surface (723) is equal to the slope of the first inclined surface (712). The surface of the second plate body (720) close to the base (100) is a second plane (726). The second plane (726) and the floating clamping surface (b) are respectively parallel to the fixed clamping surface (a).

5. The crystal holder clamping device according to claim 2, wherein A third driving mechanism (400) is provided on the base (100). The third driving mechanism (400) acts on the second plate body (720) to drive the second plate body (720) to move along the first inclined surface (712).

6. The crystal holder clamping device according to claim 5, wherein, A first distance sensor (500) is provided on the base (100) near the floating adjusting member (700). The first distance sensor (500) faces the outer peripheral side of the floating clamping surface (b) to obtain the distance from the second part of the upper surface of the crystal carrier, and the first distance sensor (500) is communicatively connected to the third driving mechanism (400).

7. The crystal holder clamping device according to claim 5, wherein, A connecting portion (724) is provided on the second plate body (720). The connecting portion (724) is threadedly connected to a screw rod (410). The third driving mechanism (400) acts on the screw rod (410) to drive the screw rod (410) to rotate.

8. The crystal holder clamping device according to claim 7, characterized in that, The third driving mechanism (400) is connected to a torque sensor (420) to feedback and adjust the rotation of the screw rod (410).

9. The crystal holder clamping device according to claim 7, wherein, A second distance sensor (600) is provided on the screw rod (410). The second distance sensor (600) faces the second plate body (720) to obtain the distance from the second plate body (720), and the second distance sensor (600) is communicatively connected to the third driving mechanism (400).

10. The crystal holder clamping device according to claim 5, characterized in that, A magnetic member (725) is provided on the second plate body (720). The third driving mechanism (400) includes an electromagnet (430). The electromagnet (430) acts on the magnetic member (725) to drive the second plate body (720) to move along the first inclined surface (712).

11. A wire cutting machine, characterized in that, It includes a crystal carrier clamping device according to any one of claims 1-10.

12. A method for clamping a crystal carrier, which applies the crystal carrier clamping device according to any one of claims 1-10, characterized in that, It includes the following steps: Controlling at least two first clamping members (210) to lift the crystal carrier upward, and keeping the first part of the upper surface of the crystal carrier in contact with the fixed clamping surface (a) of the base (100); Obtaining the height position of the second part of the upper surface of the crystal carrier; Based on the height position of the second part of the upper surface of the crystal carrier, controlling the floating clamping surface (b) to abut against the second part of the upper surface of the crystal carrier downward, and controlling the second clamping member (310) to abut against the crystal carrier upward.

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