Sealing structure and method for vacuum glass air exhaust hole

Abstract

The invention provides a sealing structure and method for a vacuum glass exhaust hole. The sealing structure comprises first glass; the second glass is positioned in the air exhaust hole in the first glass; according to the sealing structure for the method for packaging the air exhaust hole of the vacuum glass, the sealing structure is embedded in the air exhaust hole through a sealing filling layer, and the end face, away from a vacuum layer, of the sealing structure is flush with the end face of the first glass; and the inner wall of the exhaust hole is rough. The sealing structure is embedded in the air exhaust hole through the sealing filling layer, and the end face, far away from the vacuum layer, of the sealing structure and the edge of the first glass are located on the same plane, so that the sealing structure is prevented from being damaged due to external force, the inner wall of the counter bore is subjected to roughening treatment, and the service life of the counter bore is prolonged. Therefore, the sealing contact area is increased, the firm combination of the sealing structure and the glass is improved, and the tight and reliable sealing structure is formed.

Description

Technical Field

[0001] The present invention belongs to the technical field of vacuum glass preparation, and particularly relates to a sealing structure and method for air extraction holes of vacuum glass. Background Art

[0002] Traditional vacuum glass sealing technology usually adopts the method of directly sealing an alloy sheet on the outer surface of the glass. That is, an air extraction hole is provided on one of the glasses. After being evacuated through the air extraction hole by a special vacuum exhaust device, an independent heating device is used to heat the alloy sheet covering the air extraction hole. A sealing solder is preset between the alloy sheet and the glass. After the sealing solder is heated and melted, the alloy sheet and the glass form a sealed bond, thereby closing the air extraction hole.

[0003] A vacuum glass sealing structure integrating an getter is disclosed in the patent publication number: CN 205974277 U, which includes a vacuum glass cavity, a cover, and a getter. An air extraction port is provided on the vacuum glass cavity. The getter is arranged on the cover. The cover is hermetically welded to the air extraction port sieve tube through solder, and the getter is located inside the air extraction port.

[0004] However, in actual application, due to the smooth surface of the glass, the sealing performance and airtightness of the seal are poor. And since the cover protrudes from the glass surface, it is easily damaged by external forces, affecting the service life and stability of the vacuum glass.

[0005] In view of this, how to solve the defects existing in the above technical solutions has become one of the problems to be solved urgently in the technical field of vacuum glass preparation. Summary of the Invention

[0006] In view of the problems existing in the background art, on the one hand, the present invention provides a sealing structure for an air extraction hole of a vacuum glass, including:

[0007] A first glass;

[0008] A second glass, a sealing solder arranged at the edge positions of the first glass and the second glass. A closed space, a vacuum layer, is formed by enclosing the first glass, the second glass through the sealing solder;

[0009] Support columns arranged inside the vacuum layer for connecting the first glass and the second glass;

[0010] An air extraction hole located on the first glass and communicating with the vacuum layer;

[0011] A sealing structure for encapsulating the air extraction hole of the vacuum glass method, which is embedded in the air extraction hole through a sealing filling layer, and

[0012] The end surface of the sealing structure far from the vacuum layer is flush with the end surface of the first glass;

[0013] The inner wall of the air extraction hole is arranged in a rough shape.

[0014] Optionally, the diameter of the air extraction hole close to the vacuum layer is smaller than the diameter of the air extraction hole far from the vacuum layer.

[0015] Optionally, the sealing filling layer is located between the sealing structure and the first glass located at the position of the air extraction hole.

[0016] The sealing structure may be a sealing alloy sheet.

[0017] Optionally, the sealing structure end surface close to the vacuum layer is provided with a sealing tube integrally provided therewith, and when in an unsealed state,

[0018] The diameter of the sealing tube is smaller than the diameter of the air extraction hole.

[0019] The sealing tube is located in the air extraction hole.

[0020] Optionally, the mesh sheet of the memory alloy honeycomb structure is rolled up to form a support body, and is inserted into the elastic sleeve.

[0021] The support body is tightly wrapped by an elastic sleeve;

[0022] The end surface of the elastic sleeve near the vacuum layer is a closed end surface.

[0023] The end surface of the elastic sleeve at a position far away from the vacuum layer is installed on the end surface of the sealing structure to form an integrated arrangement.

[0024] Optionally, the elastic sleeve is made of high temperature resistant elastic rubber.

[0025] Optionally, the air extraction hole has a first end surface, a second end surface and a third end surface,

[0026] The thickness of the first end surface is L,

[0027] The thickness of the second end surface is L,

[0028] The thickness of the third end surface is L,

[0029] The diameter of the first end surface is greater than the diameter of the second end surface, and the diameter of the second end surface is greater than the diameter of the third end surface.

[0030] A getter layer is arranged in the air extraction hole located at the second end surface.

[0031] The getter layer is filled with a getter.

[0032] Optionally, the end surface of the sealing structure close to the vacuum layer is arranged in an arc shape.

[0033] The arc-shaped end surface is flush with the end surface of the getter layer.

[0034] Optionally, step 1: punching an exhaust hole on the first glass using a laser punching process;

[0035] Step 2: roughening the end surface of the exhaust hole away from the vacuum layer;

[0036] Step 3: Making the sealing tube;

[0037] (1) rolling up a mesh sheet of a memory alloy honeycomb structure to form a support body, extending the support body into an elastic sleeve, and the elastic sleeve tightly wrapping the support body;

[0038] (2) installing the end surface of the elastic sleeve at a position away from the vacuum layer on the end surface of the sealing structure to form an integrated arrangement;

[0039] Step 4: pre-place a sealing filling layer at the sealing structure or the air extraction hole step,

[0040] The sealing structure is placed above the sealing filling layer,

[0041] The sealing structure is located in the air extraction hole, and the top end surface of the sealing structure is flush with the first glass cover;

[0042] Step 5: Combine the first glass and the second glass and seal the edges;

[0043] Step 6: Place the vacuum glass in step 5 into the vacuum box, set the vacuum value in advance, and wait until the vacuum layer reaches the set vacuum degree;

[0044] Step 7: The sealing structure is sealed by a laser sealing process. The laser beam is sealed at a power greater than 38W and a speed of 20mm / min. The temperature is heated to 250-350°C for more than 20s. The heat is transferred to the sealing filling layer through the sealing structure and then to the sealing tube through the sealing structure.

[0045] When the temperature inside the sealing tube reaches 275°C, the honeycomb structure inside the support body undergoes thermal expansion and deformation, and the support body drives the elastic sleeve to expand outward, so that the sealing tube continuously extends toward the inner wall of the air extraction hole until the outer wall of the sealing tube fits tightly with the inner wall of the air extraction hole to form a sealed connection;

[0046] Then the laser sealing process is continued to heat at 315°C for more than 7 seconds, so that the sealing filling layer at the position of the exhaust hole is completely melted, and the sealing structure is pasted on the exhaust hole;

[0047] Step 8:

[0048] Stop heating and wait for the sealing filling layer to solidify to complete the sealing.

[0049] In summary, the beneficial effects of the present invention are as follows:

[0050] (1) By embedding the sealing structure in the air extraction hole through the sealing filling layer, and the end face of the sealing structure away from the vacuum layer is in the same plane as the edge of the first glass, the sealing structure is prevented from being damaged by external forces. Moreover, the inner wall of the counterbore of the present invention is roughened, thereby increasing the sealing contact area and improving the firm combination of the sealing structure and the glass, forming a tight and reliable sealing structure.

[0051] (2) The present invention prevents gas from entering the air extraction hole when the sealing filling layer melts by adding a sealing tube, thereby extending the service life of the vacuum tube glass. When the support body expands and deforms due to heat, a certain gap is left between the support body and the air extraction hole during the process of thermal expansion and deformation of the support body. At this time, the residual gas in the air extraction hole is gradually discharged from the air extraction hole under the action of the vacuum pumping device and the cooperation of the continuous expansion and deformation of the support body, thereby preventing the residual gas in the air extraction hole and improving the product quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0052] Figure 1 Schematic diagram of the overall structure of an embodiment of the sealing structure for the air extraction hole of the vacuum glass of the present invention;

[0053] Figure 2 Schematic diagram of the internal structure of the sealing tube of an embodiment of the sealing structure for the air extraction hole of the vacuum glass of the present invention;

[0054] Figure 3 For the present invention Figure 2 Enlarged view of the sealing tube structure;

[0055] Figure 4 Schematic diagram of the overall structure of another embodiment of the sealing structure for the air extraction hole of the vacuum glass of the present invention.

[0056] Reference numerals:

[0057] 1. Sealing tube; 01. Elastic sleeve; 02. Support body;

[0058] 2. Sealing structure;

[0059] 3. Sealing filling layer;

[0060] 4. Vacuum layer;

[0061] 5. First glass;

[0062] 6. Support column;

[0063] 7. Second glass

[0064] 8. Air extraction hole;

[0065] 9. Getter layer. Detailed implementation manners

[0066] In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. Although exemplary embodiments are disclosed in the drawings, it should be understood that the present invention can be implemented in various forms and should not be limited by the embodiments set forth herein. On the contrary, these embodiments are provided so that the present invention can be more thoroughly understood and the concept of the present invention can be completely conveyed to those skilled in the art.

[0067] In the description of this specification, the descriptions referring to terms such as "certain embodiments", "one embodiment", "some embodiments", "examples", "specific examples", or "some examples" mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic descriptions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0068] In the present invention, the terms "first", "second", and "third" are only used for the purpose of description and cannot be construed as indicating or implying relative importance; the term "plurality" refers to two or more, unless otherwise clearly defined. Terms such as "mounted", "connected", "connected to", and "fixed" should all be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; "connected" can be a direct connection or an indirect connection through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0069] Embodiment 1

[0070] As Figures 1-4 shown, this embodiment provides a sealing structure and method for a vacuum glass air extraction hole, including two pieces of glass, namely the first glass 5 and the second glass 7, by placing a sealing material at the edge positions of the first glass 6 and the second glass 7;

[0071] Support columns 6 are placed between two pieces of glass (the first glass 5 and the second glass 7), and the surrounding of the glass plates (the first glass and the second glass) is sealed by melting the sealing material (such as metal, organic polymer material, high melting point glass, etc.) through laser sealing technology. A closed space - a vacuum layer 4 is formed by enclosing with the sealing material, the first glass 5 and the second glass 7;

[0072] An air extraction hole 8 is provided on the first glass 5 and is communicated with the vacuum layer 4;

[0073] Further, the diameter of the air extraction hole 8 close to the vacuum layer is smaller than the diameter of the air extraction hole 8 far from the vacuum layer.

[0074] Further, it further includes a sealing structure 2 for encapsulating the air extraction hole of the vacuum glass. The sealing structure 2 is embedded in the air extraction hole 8 through a sealing filling layer 3 for closing the air extraction hole 8, and the end face of the sealing structure 2 far from the vacuum layer 4 is flush with the end face of the first glass;

[0075] The sealing filling layer 3 is located between the sealing structure 2 and the first glass 5 at the position of the air extraction hole 8.

[0076] Further, the sealing structure 2 can be selected as a sealing alloy sheet.

[0077] In this embodiment, by embedding the sealing structure 2 in the air extraction hole 8 through the sealing filling layer, and the end face of the sealing structure 2 far from the vacuum layer 4 is flush with the end face of the first glass, the sealing structure is thus prevented from being damaged by external forces.

[0078] Further, the inner wall of the air extraction hole 8 is set to be rough.

[0079] In this embodiment, since the diameter of the air extraction hole 8 close to the vacuum layer is smaller than the diameter of the air extraction hole 8 far from the vacuum layer, and the inner wall of the air extraction hole 8 is set to be rough, the sealing contact area is increased, and the sealing performance and airtightness are thus significantly improved.

[0080] Further, a sealing tube 1 integrally provided with the sealing structure 2 is provided on the end face of the sealing structure 2 close to the vacuum layer 4. When in the unsealed state, the diameter of the sealing tube 1 is smaller than the diameter of the air extraction hole 8 at this time, and the sealing tube 1 is located in the air extraction hole 8; of course, in actual application, the end face of the sealing tube 1 far from the sealing structure 2 is provided on the end face of the second glass, which can play a supporting role;

[0081] When in the heating and sealing state, the outer wall of the sealing tube is closely attached to the inner wall of the air extraction hole;

[0082] The support body 02 is formed by coiling a mesh sheet of a shape memory alloy honeycomb structure and inserted into the elastic sleeve 01, and the elastic sleeve 01 tightly wraps the support body 02.

[0083] The end face of the elastic sleeve 01 near the vacuum layer 04 is a closed end face, and the end face of the elastic sleeve 01 far from the vacuum layer is installed on the end face of the sealing structure 2 by means of fixed connection such as adhesion, so that they are integrally arranged.

[0084] Furthermore, the elastic sleeve is made of high-temperature resistant elastic rubber.

[0085] In this embodiment,

[0086] The sealing method includes the following steps:

[0087] Step 1: In this embodiment, when using the sealing structure for sealing, there are no positioning points on the glass surface, which easily leads to misalignment or deviation from the center air extraction port. Therefore, by using the laser drilling process, the air extraction hole 8 is drilled on the first glass 5, enabling precise positioning, avoiding misalignment and deviation problems, and ensuring the accuracy and consistency of the sealing.

[0088] Step 2: The end face of the air extraction hole far from the vacuum layer is roughened to increase the sealing contact area.

[0089] Step 3: Manufacturing the sealing tube;

[0090] (1) Coil the mesh sheet of the shape memory alloy honeycomb structure to form the support body 02, insert the support body 02 into the elastic sleeve 01, and the elastic sleeve 01 tightly wraps the support body 02;

[0091] (2) The end face of the elastic sleeve 01 far from the vacuum layer is installed on the end face of the sealing structure 2 by means of fixed connection such as adhesion, so that they are integrally arranged;

[0092] Step 4: Preset the sealing filling layer 3 at the step of the sealing structure 2 or the air extraction hole 8;

[0093] Step 5: Place the sealing structure above the sealing filling layer 3. The sealing structure is located in the air extraction hole 8, and the top end face of the sealing structure is flush with the cover of the first glass;

[0094] Step 6: Combine the first glass and the second glass and seal the edges;

[0095] Step 7: Send the vacuum glass in Step 6 into the vacuum chamber, preset the vacuum value in advance, and wait for the vacuum layer to reach the set vacuum degree;

[0096] Step 8: Seal the sealing structure through a laser sealing process. The laser beam seals at a power greater than 38W and a speed of 20mm / min, heats to 250 - 350°C, and heats for more than 20s. The heat is transferred to the sealing filling layer through the sealing structure and also transferred into the sealing tube 1 through the sealing structure;

[0097] When the temperature inside the sealing tube reaches 275°C, it can meet the temperature for the high-temperature deformation of the support body. At this time, the honeycomb structure inside the support body undergoes thermal expansion and deformation. At this time, the support body drives the elastic sleeve 01 to expand outward, causing the sealing tube to continuously extend towards the inner wall of the air extraction hole. When the sealing tube continuously extends towards the inner wall of the air extraction hole, it will also squeeze the gas to continuously discharge from the gap between the air extraction hole and the sealing tube until the outer wall of the sealing tube is in close contact with the inner wall of the air extraction hole, forming a sealed connection;

[0098] Then, the laser sealing process continuously heats at 315°C for 7 seconds, which can melt the sealing filling layer at the air extraction hole position and paste the sealing structure on the air extraction hole;

[0099] Step 9:

[0100] Stop heating. After the sealing filling layer solidifies, the hole sealing is completed.

[0101] In actual application, traditionally, a heating device is mostly directly used to heat the sealing structure. After heating to a certain temperature, the sealing filling layer melts and pastes the sealing structure onto the air extraction hole. When the sealing filling layer solidifies, the gas that entered the air extraction hole when the sealing filling layer melted will be sealed inside the air extraction hole, thereby affecting the product quality.

[0102] In this embodiment, by adding the sealing tube 1, since the melting temperature of the sealing filling layer is 315°C which is greater than the high-temperature deformation temperature of the support body, 275°C

[0103] Therefore, when it reaches 275°C, the required heat is transferred to the support body through heat conduction. The support body first undergoes thermal expansion and deformation. When the support body undergoes thermal expansion and deformation, there is a certain gap between the support body and the air extraction hole. At this time, the residual gas in the air extraction hole is gradually discharged from the air extraction hole under the cooperation of the action of the vacuum device and the continuous expansion and deformation of the support body.

[0104] The laser sealing process continuously heats to 315°C and continuously heats for more than 7 seconds, which can melt the sealing filling layer at the air extraction hole position and paste the sealing structure on the air extraction hole. When the heating stops, the temperature drops at this time. How long does the sealing filling layer solidify to complete the hole sealing;

[0105] After the sealed tube has been naturally cooled for a long time, the support body drives the elastic sleeve to retract to its original state, and at this time, the sealed tube.

[0106] Embodiment 2

[0107] Two pieces of glass, namely the first glass 5 and the second glass 7, by placing sealing materials at the edge positions of the first glass 6 and the second glass 7;

[0108] Support columns 6 are placed between the two pieces of glass (the first glass 5 and the second glass 7), and the sealing materials (such as metals, organic polymers, high-melting-point glasses, etc.) are melted by laser sealing technology to seal the four sides of the sealed glass plate (the first glass and the second glass). A closed space - a vacuum layer 4 is formed by enclosing the sealing materials, the first glass 5 and the second glass 7;

[0109] An air extraction hole 8 is provided on the first glass 5 and is communicated with the vacuum layer 4;

[0110] The air extraction hole 8 has a first end face, a second end face and a third end face, and the thickness of the first end face is L1, the thickness of the second end face is L2, the thickness of the third end face is L3, and the diameter of the first end face is larger than the diameter of the second end face, and the diameter of the second end face is larger than the diameter of the third end face.

[0111] Furthermore, it further includes a sealing structure 2 for encapsulating the method of the air extraction hole of the vacuum glass. The sealing structure 2 is embedded in the first end face of the air extraction hole 8 through a sealing filling layer 3 for closing the air extraction hole 8, and the end face of the sealing structure 2 away from the vacuum layer 4 is flush with the end face of the first glass;

[0112] An getter layer 9 is provided in the air extraction hole 8 at the second end face, and the getter layer 9 is filled with getters;

[0113] The end face of the sealing structure 2 close to the vacuum layer 4 is arranged in an arc shape, and the arc-shaped end face is flush with the end face of the getter layer 9;

[0114] The sealing filling layer 3 is located between the sealing structure 2 and the first glass 5 at the position of the air extraction hole 8.

[0115] Furthermore, the sealing structure 2 can select a sealing alloy sheet.

[0116] In this embodiment, by embedding the sealing structure 2 in the air extraction hole 8 through the sealing filling layer, and the end face of the sealing structure 2 away from the vacuum layer 4 is flush with the end face of the first glass, the sealing structure is thus prevented from being damaged by external forces.

[0117] Furthermore, the inner wall of the air extraction hole 8 is arranged in a rough shape.

[0118] In this embodiment, since the inner wall of the air extraction hole 8 is rough, the sealing contact area is increased, thereby significantly improving the sealing performance and airtightness.

[0119] Furthermore, a sealing tube 1 integrally provided therewith is arranged at the end face of the sealing structure 2 close to the vacuum layer 4. When in the unsealed state, the diameter of the sealing tube 1 is smaller than the diameter of the air extraction hole 8 at this time, and the sealing tube 1 is located inside the air extraction hole 8;

[0120] The support 02 is formed by coiling a mesh sheet of a shape memory alloy honeycomb structure and extending into the elastic sleeve 01, and the elastic sleeve 01 tightly wraps the support 02;

[0121] The end face of the elastic sleeve 01 at the position close to the vacuum layer 04 is a closed end face, and the end face of the elastic sleeve 01 at the position far from the vacuum layer is installed on the end face of the sealing structure 2 by means of fixed connection such as adhesion, so that they are integrally provided.

[0122] Furthermore, the elastic sleeve is made of high-temperature resistant elastic rubber.

[0123] In this embodiment, when the temperature reaches 275 °C, the required heat is transferred to the support through heat conduction. The support first undergoes thermal expansion deformation. During the process of the support undergoing thermal expansion deformation, a certain gap is left between the support and the air extraction hole. At this time, the residual gas in the air extraction hole is gradually discharged from the air extraction hole under the action of the vacuum pumping device and the cooperation of the continuous expansion and deformation extrusion of the support.

[0124] The laser sealing process continues to heat to a temperature of 315 °C and lasts for more than 7 seconds, which can melt the sealing filling layer at the position of the air extraction hole completely and paste the sealing structure on the air extraction hole.

[0125] During the process of the support undergoing thermal expansion deformation, the residual gas in the air extraction hole is gradually discharged from the air extraction hole under the action of the vacuum pumping device and the cooperation of the continuous expansion and deformation extrusion of the support. Even if a very small amount of gas enters or is not discharged during the melting process of the sealing filling layer at the position of the air extraction hole, the getter layer 9 at the second end face position absorbs the gas in the cavity at this time, thereby preventing the residual gas in the air extraction hole and improving the product quality.

[0126] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention rather than restrictive. Although the present invention has been described in detail with reference to the embodiments, those of ordinary skill in the art should understand that any modification or equivalent replacement of the technical solutions of the present invention does not depart from the spirit and scope of the technical solutions of the present invention, and they should all be covered by the scope of the claims of the present invention.

Claims

1. A sealing structure for the air extraction hole of a vacuum glass, characterized in that Comprising: A first glass; A second glass, a sealing solder disposed at the edge positions of the first glass and the second glass, and an enclosed space, a vacuum layer formed by enclosing the first glass and the second glass through the sealing solder; Support columns disposed within the vacuum layer for connecting the first glass and the second glass; An air extraction hole located on the first glass and communicating with the vacuum layer; A sealing structure for encapsulating the air extraction hole of the vacuum glass, embedded in the air extraction hole through a sealing filling layer, and The end face of the sealing structure away from the vacuum layer is flush with the end face of the first glass; The inner wall of the air extraction hole is provided in a rough shape.

2. The sealing structure for the air extraction hole of the vacuum glass according to claim 1, wherein The diameter of the air extraction hole near the vacuum layer is smaller than the diameter of the air extraction hole away from the vacuum layer.

3. The sealing structure for the air extraction hole of the vacuum glass according to claim 1, wherein The sealing filling layer is located between the sealing structure and the first glass at the position of the air extraction hole, The sealing structure is preferably a sealing alloy sheet.

4. The sealing structure for the air extraction hole of the vacuum glass according to claim 3, wherein A sealing tube integrally provided therewith is provided on the end face of the sealing structure near the vacuum layer. When in an unsealed state, The diameter of the sealing tube is smaller than the diameter of the air extraction hole, The sealing tube is located within the air extraction hole.

5. The sealing structure for the air extraction hole of the vacuum glass according to claim 1, wherein A mesh sheet of a shape memory alloy honeycomb structure is wound to form a support body and inserted into an elastic sleeve, The elastic sleeve tightly wraps the support body; The end face of the elastic sleeve near the vacuum layer is a closed end face, The end face of the elastic sleeve away from the vacuum layer is mounted on the end face of the sealing structure to make it integrally provided.

6. The sealing structure for the air extraction hole of the vacuum glass according to claim 5, wherein The elastic sleeve is made of a high-temperature resistant elastic rubber.

7. The sealing structure for the air extraction hole of the vacuum glass according to claim 1, wherein The air extraction hole has a first end face, a second end face and a third end face, The thickness of the first end face is L1, The thickness of the second end face is L2, The thickness of the third end face is L3, The diameter of the first end face is greater than the diameter of the second end face, and the diameter of the second end face is greater than the diameter of the third end face. An getter layer is provided in the air extraction hole at the second end face, The getter layer is filled with a getter.

8. The sealing structure for the air extraction hole of the vacuum glass according to claim 7, wherein The end face of the sealing structure near the vacuum layer is provided in an arc shape, The arc-shaped end face is flush with the end face of the getter layer.

9. A method for encapsulating the air extraction hole of a vacuum glass, characterized in that, Including the following steps: Step 1: Punch an air extraction hole on the first glass by using a laser drilling process; Step 2: Roughen the end face of the air extraction hole away from the vacuum layer; Step 3: Fabrication of the sealing tube; (1) Wind a mesh sheet of a shape memory alloy honeycomb structure to form a support body, insert the support body into an elastic sleeve, and the elastic sleeve tightly wraps the support body; (2) Mount the end face of the elastic sleeve at a position far from the vacuum layer on the end face of the sealing structure to make it integrally arranged; Step Four: Pre-set a sealing and filling layer at the sealing structure or the step of the air extraction hole, Place the sealing structure above the sealing and filling layer, The sealing structure is located inside the air extraction hole, and the top end face of the sealing structure is flush with the first glass cover; Step Five: Combine the first glass and the second glass and perform edge sealing; Step Six: Send the vacuum glass in Step Five into the vacuum chamber, pre-set the vacuum value in advance, and wait for the vacuum layer to reach the set vacuum degree; Step Seven: Seal the sealing structure through the laser sealing process. The laser beam seals at a power greater than 38W and a speed of 20mm / min, heats to 250 - 350°C, and heats for more than 20s. The heat is transferred to the sealing and filling layer through the sealing structure and transferred to the inside of the sealing tube through the sealing structure; When the temperature inside the sealing tube reaches 275°C, the honeycomb structure inside the support body undergoes thermal expansion and deformation. The support body drives the elastic sleeve to expand outwards, causing the sealing tube to continuously extend towards the inner wall of the air extraction hole until the outer wall of the sealing tube is in close contact with the inner wall of the air extraction hole, forming a sealed connection; Then the laser sealing process continuously heats at 315°C for more than 7 seconds, causing the sealing and filling layer at the air extraction hole position to melt completely, and pasting the sealing structure on the air extraction hole; Step Eight: Stop heating. After the sealing and filling layer solidifies, the hole sealing is completed.

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