Large cavity plasma processing equipment

Abstract

The present invention relates to the field of plasma processing technology, and in particular to a large-cavity plasma processing device, comprising a shell and a hatch, wherein the hatch is rotatably mounted inside the shell, an inner cavity is fixedly mounted inside the shell, a side wall of the inner cavity is provided with an exhaust hole, a vacuum pump is provided outside the shell, and the output end of the vacuum pump is fixedly connected to the exhaust hole. The magnetic field of the magnetic block itself can effectively improve the activity of the plasma, thereby improving the efficiency of the plasma processing. The movement of the magnetic block can improve the uniformity of the plasma. In addition, the magnetic block can also absorb debris inside the inner shell, and the magnetic block drives a second scraper to vibrate, so that the second scraper discharges the debris inside the collection tank. At the same time, the second scraper scrapes the debris at the bottom of the magnetic block to prevent the debris from affecting the magnetism of the magnetic block. The second scraper scrapes the debris on the mounting seat and the side wall of the scraper, so that the interior of the inner shell does not need to be manually cleaned, thereby improving the working efficiency of the equipment.

Description

Technical Field

[0001] The present invention relates to the technical field of plasma processing, and in particular to a large-cavity plasma processing device. Background Art

[0002] Vacuum plasma equipment is widely used in product surface cleaning, etching, and degumming. Through its treatment, the wettability of the material surface can be improved, so that a variety of materials can be coated, plated, and other operations can be performed, the adhesion and bonding strength can be enhanced, and organic pollutants, oil or grease can be removed at the same time. Existing plasma treatment equipment needs to replace different placement racks when processing different workpieces, and adjust the plasma distribution between the plates in turn to avoid uneven plasma distribution and low treatment efficiency. Each workpiece requires a corresponding placement rack, which increases factory costs. In addition, after the plasma treatment of the workpiece is completed, the debris generated by the workpiece falls into the inside of the equipment, and the equipment needs to be manually cleaned. However, during the plasma treatment process of the workpiece, harmful gases will be generated inside the equipment, so that when the equipment is manually cleaned, the harmful gases will cause harm to the workers, which increases the risk factor for the workers. At the same time, manual cleaning of the equipment not only increases the labor intensity of the workers, but also affects the treatment efficiency. Summary of the Invention

[0003] The purpose of the present invention is to solve the problems in the background technology and to propose a large cavity plasma processing equipment.

[0004] In order to achieve the above object, the present invention adopts the following technical solutions:

[0005] A large-cavity plasma processing device comprises an outer shell and a hatch, the hatch being rotatably mounted inside the outer shell, an inner cavity being fixedly mounted inside the outer shell, an exhaust hole being formed in the side wall of the inner cavity, a vacuum pump being provided outside the outer shell, an output end of the vacuum pump being fixedly connected to the exhaust hole, an inner shell being fixedly mounted inside the inner cavity, a reinforcement assembly being movably mounted inside the inner shell, the reinforcement assembly comprising a conveyor belt and a plurality of magnetic blocks, the conveyor belt being rotatably mounted inside the inner shell, a plurality of evenly distributed mounting seats being integrally formed on the side wall of the conveyor belt, the magnetic blocks corresponding to the mounting seats one-to-one, and the magnetic blocks being slidably mounted on the side wall of the mounting seat;

[0006] A cleaning assembly is movably installed inside the inner shell, and the cleaning assembly includes a second scraper and a plurality of first scrapers. The first scrapers correspond to the mounting seats one by one, and the first scraper is slidably installed inside the mounting seat. The first scraper is located on the side wall of the magnetic block, and the second scraper is located on the inner side of the conveyor belt. The second scraper is rotatably installed on the side wall of the inner shell;

[0007] A placement component is movably installed inside the inner shell, and the placement component is used to place a workpiece that needs to be processed.

[0008] In the above-mentioned large-cavity plasma processing equipment, four rotating rollers are rotatably installed inside the inner shell, the conveyor belt is sleeved on the outside of the rotating rollers, and a motor 1 is fixedly installed on the side wall of the inner shell, and the output end of the motor 1 is fixedly connected to one of the rotating rollers.

[0009] In the above-mentioned large-cavity plasma processing equipment, the scraper 2 is located above the placement component, and a torsion spring is provided at the connection between the scraper 2 and the inner shell.

[0010] In the above-mentioned large-cavity plasma processing equipment, the side wall of the scraper 2 is integrally formed with a plurality of closely arranged tooth surfaces, and the side wall of the scraper 2 is integrally formed with an inclined collecting groove and a side plate, and the collecting groove is located below the tooth surface.

[0011] In the above-mentioned large-cavity plasma processing equipment, a plurality of evenly distributed telescopic covers are movably installed on the side wall of the conveyor belt, the telescopic covers correspond to the mounting seats, and a connecting rope is provided between the bottom of the inner wall of the telescopic cover and the side wall of the scraper.

[0012] In the above-mentioned large-cavity plasma processing equipment, a first spring and a second spring are provided between the side wall of the first scraper and the inner wall of the mounting seat, and the length of the first spring is smaller than the length of the second spring.

[0013] In the above-mentioned large-cavity plasma processing equipment, the placement assembly includes a placement rack, a pole plate and a storage plate. The placement rack is slidably installed inside the inner shell, and each storage plate is located between every two pole plates. The pole plates and storage plates are both slidably installed inside the placement rack.

[0014] In the above-mentioned large-cavity plasma processing equipment, an observation window is provided on the side wall of the hatch, an air inlet is opened on the side wall of the hatch, the air inlet is connected to an external air pump, and a wind shield is fixedly installed inside the inner cavity, and the wind shield is located on the outside of the exhaust hole.

[0015] Compared with the existing technology, the beneficial effects of the present invention are:

[0016] By movably installing a strengthening component inside the inner shell, the conveyor belt drives the magnetic block to move during plasma treatment. The magnetic field of the magnetic block itself can effectively improve the activity of the plasma, thereby improving the efficiency of the plasma treatment. At the same time, the movement of the magnetic block can improve the uniformity of the plasma and the uniformity of the air inside the conveyor belt, thereby improving the effect of the plasma treatment and the uniformity of the gas discharge. There is no need to replace different placement racks to adjust the plasma distribution, thereby reducing factory costs. In addition, the magnetic block can also absorb debris inside the inner shell, and the magnetic block drives the scraper 2 to vibrate, so that the scraper 2 discharges the debris inside the collection tank. At the same time, the scraper 2 scrapes the debris at the bottom of the magnetic block to prevent the debris from affecting the magnetism of the magnetic block. After the plasma treatment is completed, the debris on the outside of the magnetic block is cleaned by the scraper 1 and the mounting seat to prevent the debris from affecting the magnetism of the magnetic block and improving the working life of the magnetic block. In addition, the scraper 2 scrapes the debris on the mounting seat and the side wall of the scraper, so that the inside of the inner shell does not need to be manually cleaned, thereby improving the working efficiency of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0018] Figure 2 Schematic diagram of the structure of the hatch in the present invention;

[0019] Figure 3 Schematic diagram of the internal structure of the inner cavity in the present invention;

[0020] Figure 4 Schematic diagram of the external structure of the inner cavity in the present invention;

[0021] Figure 5 It is a structural schematic diagram of the placement rack in the present invention;

[0022] Figure 6 Schematic diagram of the structure of the inner shell in the present invention;

[0023] Figure 7 This is a cross-sectional view of the structure of the inner shell of the present invention;

[0024] Figure 8 For the present invention Figure 7 A magnified schematic diagram of point A in the middle;

[0025] Figure 9 A partial cross-sectional view of the mounting seat of the present invention;

[0026] Figure 10 Schematic diagram of the structure of the scraper 1 in the present invention;

[0027] Figure 11 It is a structural schematic diagram of the scraper 2 in the present invention.

[0028] In the figure: 1. outer shell; 11. hatch; 12. vacuum pump; 121. wind shield; 131. observation window; 132. air inlet; 21. placement rack; 211. pole plate; 212. storage plate; 213. inner cavity; 214. air extraction hole; 22. inner shell; 221. motor 1; 222. conveyor belt; 223. rotating roller; 224. magnetic block; 225. mounting seat; 23. scraper 1; 231. telescopic cover; 232. spring 1; 233. connecting rope; 234. spring 2; 24. scraper 2; 241. tooth surface; 242. collecting trough; 243. side panel. DETAILED DESCRIPTION

[0029] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0030] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as limiting the present invention.

[0031] Reference Figure 1 - Figure 11 As shown, a large-cavity plasma processing equipment includes a shell 1 and a hatch 11, the hatch 11 is rotatably mounted inside the shell 1, an inner cavity 213 is fixedly mounted inside the shell 1, and an exhaust hole 214 is opened on the side wall of the inner cavity 213, a vacuum pump 12 is provided on the outside of the shell 1, and the output end of the vacuum pump 12 is fixedly connected to the exhaust hole 214, an inner shell 22 is fixedly mounted inside the inner cavity 213, and a reinforcement component is movably mounted inside the inner shell 22, and the reinforcement component includes a conveyor belt 222 and a plurality of magnetic blocks 224, the conveyor belt 222 is rotatably mounted inside the inner shell 22, and a plurality of evenly distributed mounting seats 225 are integrally formed on the side wall of the conveyor belt 222, the magnetic blocks 224 and the mounting seats 225 correspond one to one, and the magnetic blocks 224 are slidably mounted on the side wall of the mounting seat 225;

[0032] A cleaning assembly is movably mounted inside the inner shell 22. The cleaning assembly includes a second scraper 24 and a plurality of first scrapers 23. The first scraper 23 corresponds to the mounting seat 225 one by one. The first scraper 23 is slidably mounted inside the mounting seat 225. The first scraper 23 is located on the side wall of the magnetic block 224. The second scraper 24 is located on the inner side of the conveyor belt 222. The second scraper 24 is rotatably mounted on the side wall of the inner shell 22.

[0033] A placement component is movably installed inside the inner shell 22, and the placement component is used to place the workpiece to be processed.

[0034] Among them, after the hatch 11 is closed, the vacuum pump 12 extracts the air inside the inner cavity 213 through the exhaust hole 214, so that a vacuum is formed on the inner side of the conveyor belt 222. At this time, the magnetic block 224 moves toward the inner side of the conveyor belt 222, and the magnetic field generated by the magnetic block 224 improves the activity of the plasma and the efficiency of the plasma treatment during the working process.

[0035] like Figure 6 and Figure 7 As shown, four rotating rollers 223 are rotatably installed inside the inner shell 22, and the conveyor belt 222 is sleeved on the outside of the rotating rollers 223. A motor 221 is fixedly installed on the side wall of the inner shell 22, and the output end of the motor 221 is fixedly connected to one of the rotating rollers 223.

[0036] Among them, the working principle of the magnetic block 224 is: after the magnetic block 224 slides out, the motor 221 is started, the rotating roller 223 drives the conveyor belt 222 to rotate, and the conveyor belt 222 drives the magnetic block 224 to move around the inner shell 22. Through the movement of the magnetic block 224, the uniformity of the plasma inside the inner shell 22 is improved. The magnetic block 224 guides the air inside the inner shell 22 to rotate, so that the vacuum pump 12 evenly extracts the air inside the inner shell 22. An inclined surface is provided at the bottom of the magnetic block 224. During the movement of the magnetic block 224, when the magnetic block 224 moves to the side wall of the rotating roller 223, the inclined surface contacts the outer peripheral wall of the rotating roller 223, causing the magnetic block 224 to contract. After the magnetic block 224 moves away from the rotating roller 223, the magnetic block 224 is moved out again by the pressure on the inner side of the conveyor belt 222.

[0037] like Figure 6-Figure 8 and Figure 11 As shown, scraper 2 24 is located above the placement assembly, and a torsion spring is provided at the connection between scraper 24 and the inner shell 22. The side wall of scraper 24 is integrally formed with a plurality of closely arranged tooth surfaces 241. The side wall of scraper 24 is integrally formed with an inclined collecting groove 242 and a side plate 243, and the collecting groove 242 is located below the tooth surface 241.

[0038] The working principle of the scraper 24 is as follows: during the plasma treatment of the workpiece, the magnetic block 224 will absorb the debris of the metal workpiece, without the need for manual cleaning of the inner shell 22, thereby improving work efficiency. During the movement of the magnetic block 224, when the magnetic block 224 hits the side wall of the scraper 24, the scraper 24 deflects so that the side wall of the magnetic block 224 hits the tooth surface 241. The closer the collecting groove 242 is to the exhaust hole 214, the lower it is. The magnetic block 224 is on the tooth surface 241. When the side wall slides, the scraper 24 vibrates. Through the vibration of the scraper 24, the debris inside the collection tank 242 is discharged to the exhaust hole 214 and directly extracted by the vacuum pump 12. When the magnetic block 224 is away from the tooth surface 241, the scraper 24 contacts the bottom of the magnetic block 224 and cleans the debris at the bottom of the magnetic block 224. When the magnetic block 224 is away from the scraper 24, the scraper 24 returns to its position through the torsion spring, so that the debris falls into the inside of the collection tank 242.

[0039] like Figures 6-10 As shown, the side wall of the conveyor belt 222 is movably installed with several evenly distributed telescopic covers 231, the telescopic covers 231 correspond to the mounting seat 225, a connecting rope 233 is provided between the bottom of the inner wall of the telescopic cover 231 and the side wall of the scraper 23, and a spring 1 232 and a spring 2 234 are provided between the side wall of the scraper 23 and the inner wall of the mounting seat 225, and the length of the spring 1 232 is less than the length of the spring 2 234.

[0040] The working principle of the scraper 23 is as follows: in the process of forming a vacuum on the inner side of the conveyor belt 222, the telescopic cover 231 moves toward the inner side of the conveyor belt 222, so that the telescopic cover 231 pulls the connecting rope 233, and the scraper 23 squeezes the spring 234 and moves toward the inside of the mounting seat 225. When the scraper 23 hits the spring 1 232, the scraper 23 and the telescopic cover 231 stop moving. As the magnetic block 224 continues to move toward the inner side of the conveyor belt 222, the inclined surface of the side wall of the magnetic block 224 hits and squeezes the scraper 23. At this time, the scraper 23 squeezes the spring 234. 32, scraper 1 23 and telescopic cover 231 continue to move. During the process of the inner side of conveyor belt 222 returning to normal, magnet 224 moves toward the outer side of conveyor belt 222, and the side wall of mounting seat 225 scrapes off the debris on the side wall of magnet 224. When the inclined surface of the side wall of magnet 224 contacts scraper 1 23 again, scraper 1 23 scrapes off the debris on the inclined surface of the side wall of magnet 224, so that no debris remains on the outer side of magnet 224. As conveyor belt 222 drives scraper 1 23 to move, scraper 2 24 scrapes off the debris on scraper 1 23 and the side wall of mounting seat 225, without the need for manual cleaning.

[0041] like Figure 2 、 Figure 3 and Figure 5As shown, the placement assembly includes a placement rack 21, a plate 211 and a storage plate 212. The placement rack 21 is slidably installed inside the inner shell 22. Each storage plate 212 is located between every two plates 211. The plates 211 and the storage plates 212 are both slidably installed inside the placement rack 21.

[0042] The number of layers of the electrode plates 211 is always one layer more than the storage plates 212 , so that the storage plates 212 are always located between two adjacent electrode plates 211 , and the placement assembly is located on the inner side of the conveyor belt 222 .

[0043] like Figures 1-4 As shown, the side wall of the hatch 11 is provided with an observation window 131, and the side wall of the hatch 11 is provided with an air inlet 132, which is connected to the external air pump. A wind shield 121 is fixedly installed inside the inner cavity 213, and the wind shield 121 is located on the outside of the exhaust hole 214.

[0044] When the vacuum pump 12 is pumping gas, the gas inside the inner shell 22 hits the windshield 121 , causing the gas to diffuse to the outside of the windshield 121 and then be discharged, thereby improving the uniformity of gas discharge.

[0045] The specific working principle and method of use of the present invention are explained in detail below: After the placement rack 21 is manually moved to the inside of the inner shell 22, the hatch 11 is closed, the vacuum pump 12 and the motor 221 are started, and the magnetic block 224 and the scraper 23 are moved to the inside of the conveyor belt 222 and the inside of the mounting seat 225 respectively. After the vacuum is formed inside the conveyor belt 222, the air inlet 132 is opened. The cooperation between the air inlet 132 and the vacuum pump 12 ensures that the pressure inside the conveyor belt 222 is constant. The pole plate 211 is energized, and plasma is generated between every two layers of pole plates 211. The plasma processes the workpiece. The motor 221 drives the conveyor belt 222 to rotate, and the conveyor belt 222 drives the magnetic block 224 to move. The magnetic field of the magnetic block 224 itself increases the activity of the plasma, thereby improving the efficiency of the plasma treatment. At the same time, the movement of the magnetic block 224 improves the uniformity of the plasma and the uniformity of the air inside the conveyor belt 222, thereby To improve the effect of plasma treatment and the uniformity of gas discharge, during the movement of the magnetic block 224, the magnetic block 224 absorbs the debris generated during the plasma treatment process. When the magnetic block 224 contacts the scraper 24, the scraper 24 deflects, so that the magnetic block 224 drives the scraper 24 to vibrate through the tooth surface 241. The vibration of the scraper 24 discharges the debris inside the collection tank 242. At the same time, the scraper 24 scrapes off the debris at the bottom of the magnetic block 224 to prevent the debris from affecting the magnetic block 2 24, after the plasma treatment is completed and the inner side of the conveyor belt 222 returns to normal, the scraper 1 23 and the mounting seat 225 both clean the debris on the outside of the magnetic block 224 to prevent the debris from affecting the magnetism of the magnetic block 224 and improve the working life of the magnetic block 224. After the mounting seat 225 contacts the scraper 2 24, the scraper 2 24 scrapes off the debris on the side walls of the mounting seat 225 and the scraper 1 23, so that the inside of the inner shell 22 does not need to be cleaned manually, thereby improving the working efficiency of the equipment.

[0046] It is further explained that the above-mentioned fixed connection should be understood in a broad sense unless otherwise clearly specified and limited. For example, it can be welding, gluing, or one-piece molding, etc., which are common means well known to those skilled in the art.

[0047] The above description is only a preferred specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any technician familiar with the technical field, within the technical scope disclosed by the present invention, who makes equivalent replacements or changes based on the technical solution and inventive concept of the present invention, should be covered by the scope of protection of the present invention.

Claims

1. A large-cavity plasma processing device, comprising a housing (1) and a hatch (11), characterized in that: The hatch (11) is rotatably mounted inside the outer shell (1), an inner cavity (213) is fixedly mounted inside the outer shell (1), an exhaust hole (214) is provided on the side wall of the inner cavity (213), a vacuum pump (12) is provided outside the outer shell (1), an output end of the vacuum pump (12) and the exhaust hole (214) are fixedly connected, an inner shell (22) is fixedly mounted inside the inner cavity (213), a reinforcing component is movably mounted inside the inner shell (22), the reinforcing component comprises a conveyor belt (222) and a plurality of magnetic blocks (224), the conveyor belt (222) is rotatably mounted inside the inner shell (22), a plurality of evenly distributed mounting seats (225) are integrally formed on the side wall of the conveyor belt (222), the magnetic blocks (224) and the mounting seats (225) correspond one to one, and the magnetic blocks (224) are slidably mounted on the side wall of the mounting seat (225); A cleaning assembly is movably installed inside the inner shell (22), and the cleaning assembly includes a second scraper (24) and a plurality of first scrapers (23). The first scraper (23) corresponds to the mounting seat (225) one by one. The first scraper (23) is slidably installed inside the mounting seat (225). The first scraper (23) is located on the side wall of the magnetic block (224). The second scraper (24) is located on the inner side of the conveyor belt (222). The second scraper (24) is rotatably installed on the side wall of the inner shell (22); A placement component is movably installed inside the inner shell (22), and the placement component is used to place a workpiece to be processed.

2. The large-cavity plasma processing equipment according to claim 1, characterized in that: Four rotating rollers (223) are rotatably mounted inside the inner shell (22), the conveyor belt (222) is sleeved on the outside of the rotating rollers (223), a motor 1 (221) is fixedly mounted on the side wall of the inner shell (22), and an output end of the motor 1 (221) is fixedly connected to one of the rotating rollers (223).

3. The large-cavity plasma processing equipment according to claim 1, characterized in that: The second scraper (24) is located above the placement assembly, and a torsion spring is provided at the connection between the second scraper (24) and the inner shell (22).

4. The large-cavity plasma processing equipment according to claim 1, characterized in that: The side wall of the scraper 2 (24) is integrally formed with a plurality of closely arranged tooth surfaces (241), and the side wall of the scraper 2 (24) is integrally formed with an inclined collecting groove (242) and a side plate (243), and the collecting groove (242) is located below the tooth surface (241).

5. The large-cavity plasma processing equipment according to claim 1, characterized in that: The side wall of the conveyor belt (222) is movably mounted with a plurality of evenly distributed telescopic covers (231), the telescopic covers (231) corresponding to the mounting seat (225), and a connecting rope (233) is provided between the bottom of the inner wall of the telescopic cover (231) and the side wall of the scraper (23).

6. The large-cavity plasma processing equipment according to claim 1, characterized in that: A spring 1 (232) and a spring 2 (234) are provided between the side wall of the scraper 1 (23) and the inner wall of the mounting seat (225), and the length of the spring 1 (232) is smaller than the length of the spring 2 (234).

7. The large-cavity plasma processing equipment according to claim 1, characterized in that: The placement assembly comprises a placement rack (21), a pole plate (211) and a storage plate (212); the placement rack (21) is slidably mounted inside the inner shell (22); each storage plate (212) is located between two pole plates (211); and both the pole plates (211) and the storage plates (212) are slidably mounted inside the placement rack (21).

8. The large-cavity plasma processing equipment according to claim 1, characterized in that: An observation window (131) is provided on the side wall of the hatch (11), an air inlet (132) is opened on the side wall of the hatch (11), and the air inlet (132) is connected to an external air pump. A windshield (121) is fixedly installed inside the inner cavity (213), and the windshield (121) is located outside the air extraction hole (214).

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