MEMS-based directional sound wave loudspeaker control method

Abstract

The invention discloses a directional sound wave loudspeaker control method based on MEMS, and relates to the technical field of stereo loudspeakers. By initializing the MEMS array, the microphone array and the control circuit, stable operation of the system is ensured. The microphone array accurately locates a sound source by using a TDOA or beam forming algorithm, and the control circuit calculates phase and amplitude parameters of the MEMS unit to realize high-precision beam forming. The MEMS acoustic metasurface array transmits directional sound wave beams according to parameter adjustment, a microphone in a target area monitors sound wave quality in real time, and a control circuit dynamically and finely adjusts array setting through a feedback optimization algorithm to adapt to environmental changes. The system has the advantages of high-precision positioning, efficient beam forming, real-time optimization and low power consumption, is suitable for scenes such as smart home and virtual reality, and remarkably improves sound wave directionality and quality stability.

Description

Technical Field

[0001] The present invention relates to the technical field of stereo speakers, and specifically to a control method for a MEMS directional sound wave speaker. Background Art

[0002] The existing sound wave directional systems mainly rely on traditional speaker arrays or ultrasonic technologies to achieve directional propagation of sound waves. The traditional speaker array realizes beamforming through the collaborative work of multiple speaker units, using phase and amplitude adjustment, and it is difficult to achieve high-precision sound wave focusing, especially in complex environments, it is easily affected by noise interference. Although ultrasonic technology can achieve a certain degree of directivity, its frequency range is limited and it is difficult to transmit high-quality audio signals. In addition, in the existing systems, simple microphone arrays are mostly used for sound source localization, and the localization accuracy is relatively low. Especially in a multi-source or high-noise environment, positioning deviation is likely to occur. The feedback optimization mechanism is also relatively primitive, lacking real-time and adaptive capabilities, resulting in unstable sound wave quality and being difficult to adapt to dynamic environmental changes. Summary of the Invention

[0003] To overcome the defects of the above-mentioned prior art, the present invention provides the following technical solutions: A control method for a MEMS directional sound wave speaker, including the following steps to realize the directional sound wave function of the speaker: S1. Initialize the hardware components of the system to ensure the normal operation of the microphone array, MEMS array, and control circuit, and realize system startup; S2. Detect the sound source position in the environment through the microphone array, generate sound source position data, and perform sound source localization; S3. The control circuit receives the sound source position data, calculates the phase and amplitude parameters required for each MEMS unit in the MEMS array, and realizes beamforming calculation; S4. Adjust the settings of the MEMS acoustic metasurface array according to the calculated phase and amplitude parameters; S5. The adjusted MEMS array emits a directional sound wave beam to the target area; S6. The microphone in the target area monitors the received sound wave quality and generates sound wave quality data; S7. The control circuit receives the sound wave quality data, analyzes and generates adjustment parameters to optimize the sound wave output; S8. Fine-tune the MEMS array according to the adjustment parameters; S9. Optimize the directivity and quality of the sound wave through the fine-tuned MEMS array; S10. The system continuously monitors environmental changes and sound wave effects, dynamically adjusts the MEMS array, and realizes adaptive control; S11. The system enters a stable operation state and continuously provides high-quality directional sound wave output.

[0004] Preferably, it is responsible for initializing all hardware components, including the MEMS array, microphone array, and microphone in the target area, control circuit, and power supply module; at this stage, the power supply module provides stable power support for the system, and the control circuit runs a self-check program to check the connection status and functional integrity of the MEMS unit, microphone array, and signal processing module one by one.

[0005] Preferably, the microphone array is composed of multiple microphones distributed at different positions, recording the time difference and intensity difference of the sound wave arriving at each microphone; by analyzing the time difference of the sound wave arriving at different microphones and combining the geometric relationship between the microphones, the three-dimensional coordinates of the sound source are deduced; or beamforming positioning, by scanning the sound wave intensity in different directions, the position of the sound source is determined.

[0006] Preferably, according to the sound source positioning result, the beamforming calculation calculates the required phase and amplitude adjustment values for each unit in the MEMS array to form a sound wave beam pointing to the target; by adjusting the phase and amplitude of the sound wave, constructive interference is formed in a specific direction, so as to focus in the target area.

[0007] Preferably, adjusting the MEMS array is to apply the beamforming calculation result to the MEMS acoustic metasurface array, and by changing the phase and amplitude of each MEMS unit, the propagation characteristics of the sound wave are regulated.

[0008] Preferably, after the adjustment of the MEMS array is completed, the system emits a directional sound wave beam to the target area; through the coordinated regulation of the phase and amplitude by the acoustic metasurface, the sound wave forms interference enhancement in a specific direction, realizing focusing or directional propagation.

[0009] Preferably, the target area monitoring is carried out by the microphones arranged in the target area, and the quality of the received sound wave is monitored in real time, including intensity, clarity and focusing degree.

[0010] Preferably, the feedback optimization analyzes the monitoring data of the target area, identifies the defects of the sound wave output (such as insufficient intensity or focusing deviation), and generates adjustment parameters to optimize the settings of the MEMS array.

[0011] Preferably, the MEMS unit is fine-tuned according to the adjustment parameters generated by the feedback optimization, and the MEMS array is slightly adjusted to optimize the sound wave output; after the MEMS unit is fine-tuned, the system re-emits the sound wave, and the optimization effect is verified by the microphones in the target area. If there are still defects, the feedback optimization and fine-tuning will continue.

[0012] Preferably, the system enters a continuous operation state, monitors the environmental changes in real time (such as the movement of the sound source or the change of noise), and dynamically adjusts the MEMS array to adapt to these changes.

[0013] The present invention has the following beneficial effects compared with the prior art: (1) By combining a microphone array with the time difference of arrival method (TDOA) or beamforming localization algorithm, the present invention accurately calculates the three-dimensional coordinates of the sound source, overcoming the disadvantages of low positioning accuracy and susceptibility to noise interference in traditional systems. The microphone array is calibrated for sensitivity and can capture weak acoustic wave signals. Combining geometric relationships and high-precision algorithms, it can accurately determine the target position even in multi-source or complex environments, providing a reliable target direction for subsequent beamforming, significantly improving the directivity and focusing effect of sound waves, and being applicable to scenarios such as conference systems and virtual reality that require precise sound field control; (2) The present invention utilizes a MEMS acoustic metasurface array to achieve constructive interference and form a highly focused acoustic beam by precisely adjusting the phase and amplitude of each MEMS unit. Compared with traditional speaker arrays, the MEMS array is small in size, low in power consumption, and high in control precision, and can generate a clear main lobe and suppress sidelobe interference. This efficient beamforming technology ensures that the intensity and clarity of sound waves in the target area reach the best, while reducing interference to the surrounding environment, significantly improving the audio transmission quality, and meeting the application requirements of smart homes, directional advertising, etc.; (3) The microphones in the target area of the present invention continuously monitor the sound wave quality, collect key indicators such as sound pressure level, frequency response, and distortion degree, and the control circuit generates adjustment parameters through optimization algorithms (such as gradient descent method or PID control) to dynamically fine-tune the MEMS array settings. Compared with the defect of the lack of real-time feedback in traditional systems, it quickly responds to changes in sound wave quality through closed-loop control to ensure output stability. This real-time optimization mechanism effectively copes with dynamic changes such as environmental noise or sound source movement, significantly improving the reliability and user experience of the system in complex environments; (4) By continuously monitoring environmental changes (such as sound source movement or noise changes), the present invention uses the microphone array and the microphones in the target area to collect real-time data, and dynamically adjusts the MEMS array settings in combination with the closed-loop algorithm of the control circuit. Traditional systems perform poorly in dynamic environments due to the lack of adaptability, while this system maintains high-quality and stable sound wave output through adaptive control. This feature gives it significant advantages in dynamic scenarios (such as mobile communication devices or outdoor environments), expanding the application scope of directional sound wave technology; (5) The MEMS acoustic metasurface array of the present invention adopts microelectromechanical system technology, having lower power consumption and higher integration compared with traditional speaker arrays. The power supply module provides stable power support, and the control circuit ensures the efficient collaborative operation of each module through a self-check program. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is the overall flowchart of the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0015] The technical solution of the present invention will be further described below with reference to the drawings and through specific embodiments.

[0016] The present invention provides a control method for a directional sound wave speaker based on MEMS, comprising the following steps to realize the directional sound wave function of the speaker: S1, initializing the hardware components of the system, ensuring the normal operation of the microphone array, the MEMS array and the control circuit, and realizing the system startup. The power-on sequence is as follows: first start the voltage stabilizing module (5V→3.3V→1.8V) to ensure that the three-level power supplies of logic, drive and inductive load do not crosstalk; after 50ms of power-on, the clock generator outputs a 24MHz reference clock; the global reset pulse is released synchronously at 10µs; hardware handshake: the main MCU reads the I²CID register in turn to confirm that the MEMS array, the main microphone array, the target area microphone probe, and the temperature-current monitoring chip are online; safety timeout: if any device does not respond within 300ms, the system enters the fault indication mode (buzzer + red LED), and maintains the lowest power consumption waiting for manual intervention. The self-test procedures include: MEMS unit (test content: static capacitance <0.3pF; dynamic amplitude-frequency error <±2dB (1kHz–20kHz); judgment threshold: full test; treatment measures: over-threshold, automatically shield the faulty unit and record), main microphone (test content: sensitivity deviation <±0.5dB; self-noise <20dBSPL; judgment threshold: random inspection of 10%; treatment measures: mismatch, gain correction LUT rewrite), target microphone (test content: frequency response ±1dB (500Hz–16kHz); judgment threshold: full test; treatment measures: mismatch, prompt to replace the sensor), control circuit (test content: FlashCRC32, SRAMMarchC-; judgment threshold: must be checked; treatment measures: error, restart and report) and signal processing module (test content: DSP core instruction CRC; FFT / IIR function block error <±1LSB; judgment threshold: must be checked; treatment measures: error, enter safety downgrade mode and reload firmware).

[0017] S2. Detect the location of the sound source in the environment through the microphone array, generate the sound source location data, and locate the sound source. Multi-level collaborative positioning: Main array TDOA: 64 microphones sample 48kHz, window 512-point FFT calculates cross-correlation, and extracts the arrival time difference Δt1; Auxiliary annular sensor belt: 16 broadband piezoelectric probes sample environmental noise and calculate the noise direction vector N; Three-dimensional coordinate solution: Use the least squares method to combine Δt1 with the array geometry matrix G, and output the initial value of the sound source P0; Noise suppression correction: If , then it is determined that the noise interference is obvious, and the second-order Kalman filter is used to smooth P. Sound source position data transmission: Data frame format: 0xAA0x55|X[4B]Y[4B]Z[4B]|Err[2B]|CRC16; Link: The main MCU writes the coordinate frame to the beam processing FPGA through a bidirectional SPI@10Mbps; Delay budget: Typical total delay is 42µs, and the maximum does not exceed 60µs.

[0018] S3. The control circuit receives the sound source position data, calculates the phase and amplitude parameters required for each unit in the MEMS array, and implements beamforming calculation; the differential phase enhancement method is used for calculation: Sub-array division: 256 MEMS units are divided into 8×8 sub-arrays; Weight calculation: Equal phase center method: According to P, calculate the distance difference Δd from the geometric center of each sub-array to the target; Differential phase: ; Add 90° staggered phase to make the sidelobe suppression ≥25 dB; Amplitude windowing: Hann-Taylor hybrid window suppresses edge diffraction; Resource occupancy: 48×128 FPGA DSPs, operation time 18 µs. Transmission of phase and amplitude parameters in parallel-serial synchronization: FPGA parallel 256×14-bit phase words → serial LVDS (8 lane @ 40 MHz) → MEMS Driver ASIC; Synchronization pulse: TTL Sync 10 kHz ensures the phase consistency of MEMS components; Complete refresh cycle: 25 µs.

[0019] S4. According to the calculated phase and amplitude parameters, adjust the settings of the MEMS acoustic metasurface array; Adjust the MEMS array: Drive: Electrostatic drive voltage ±16 V, resolution 0.5 mV; Displacement feedback: Built-in capacitive displacement meter for each unit, sampling 100 kS / s, closed-loop control ±0.2 µm; Temperature drift compensation: NTC sensor corrects the temperature coefficient of the drive voltage in real time −0.01% / °C.

[0020] S5. The adjusted MEMS array emits a directional acoustic beam to the target area; Emit a directional acoustic wave: Synthesized main lobe width: @10 kHz −3 dB main lobe width ≈ 5°; Sound pressure level: 82 dB SPL at 1 m; Sidelobe suppression: First sidelobe ≤−23 dB; Modulation bandwidth: 150 Hz–18 kHz linearity ±1.5 dB.

[0021] S6. The microphone in the target area monitors the received acoustic wave quality and generates acoustic wave quality data; Target area monitoring: Sampling: 4 high-directional capacitive microphones, 96 kHz / 24 bit; Measurement indicators: Sound pressure level SPLm, frequency response FR(f), focusing error ; Anti-crosstalk: The front end uses 3 kHz and 20 kHz dual notch filters to filter out environmental fixed noise sources. Transmission of acoustic wave quality data: Communication protocol: UART-DMA @ 1 Mbps; Packet length: 128 B; Frame interval 5 ms; Integrity: Each packet has a CRC8, and if there are 3 consecutive packet errors, a retransmission is requested.

[0022] S7. The control circuit receives the acoustic wave quality data, analyzes it and generates adjustment parameters to optimize the acoustic wave output; Feedback optimization (closed-loop controller): Error vector: ; Control law: Gain scheduling PID + gradient method ; ; ; Gradient ; ; Iteration period: 2ms; Output Δφ, ΔA after a maximum of 5 iterations.

[0023] S8. Fine-tune the MEMS array according to the adjustment parameters; Stepping resolution: Phase 0.05°, Amplitude 0.1dB; Transient compensation: Keep it if the Overshoot of the step response ≤ 5%; Otherwise, enable a second-order filter ; Mechanical hysteresis correction: Characterize the reverse scan of the curve to fill in and memorize the optimal drive code.

[0024] S9. Optimize the directivity and quality of the acoustic wave through the fine-tuned MEMS array; Optimize acoustic wave output: Power distribution: Adjust the voltage of each sub-array based on the real-time SPLm, duty cycle 20–100%; Temperature rise monitoring: If the array temperature T > 60°C, derate by 3dB and start the micro-fan; Sidelobe active suppression: Monitor the lateral microphone in real time. If the lateral SPL > -35dB, then the secondary phase perturbation Δφ2 is randomly ±2°.

[0025] S10. The system continuously monitors environmental changes and acoustic wave effects, dynamically adjusts the MEMS array, and realizes adaptive control; Continuous monitoring and adjustment: Cycle time: 10ms for a complete closed loop; Dynamic threshold: Trigger rapid repositioning when the external noise SPL_env changes > ±3dB or the sound source displacement > 0.2m; Beam alternation: Pre-store 3 sets of candidate weight tables and alternate at 1kHz frequency to avoid blank windows caused by sudden jumps of the sound source.

[0026] S11. The system enters a stable operation state and continuously provides high-quality directional acoustic wave output; Data recording: Log is written to 4MB SPINOR at a cycle of 1s; Save for a 72h cycle. Remote diagnosis: Upload key indicators (SPL, temperature, fault code) via CAN-FD@2Mbps or Ethernet; Maintenance reminder: When the MEMS unit has accumulated 10000h of operation or the failure rate > 0.5%, the MCU pulls up the alarm GPIO; Self-recovery strategy: Automatically return to step 2 after detecting an anomaly and then enter the full-process closed loop.

[0027] Responsible for initializing all hardware components, including the MEMS array, microphone array, and target area microphones, control circuit, and power module; during this stage, the power module provides stable power support for the system, and the control circuit runs a self-check program to check the connection status and functional integrity of the MEMS unit, microphone array, and signal processing module one by one, ensuring that the system is in the best state before operation; the self-check program includes a drive signal test for the MEMS unit to verify its normal response; sensitivity calibration for the microphone array to ensure its ability to accurately capture acoustic signals; verification of the communication protocol of the control circuit to ensure error-free data transmission between modules.

[0028] The microphone array consists of multiple microphones distributed at different positions, recording the time difference and intensity difference of the sound wave arriving at each microphone; common algorithms such as Time Difference of Arrival (TDOA), by analyzing the time difference of the sound wave arriving at different microphones and combining the geometric relationship between microphones, calculate the three-dimensional coordinates of the sound source; or beamforming localization, by scanning the sound wave intensity in different directions to determine the sound source position. The purpose of sound source localization is to determine the precise position of the sound source that needs to be focused or processed in the environment, providing the target direction for subsequent beamforming; the microphone array captures the sound wave signal and calculates the coordinates of the sound source using the sound source localization algorithm.

[0029] Based on the sound source localization result, beamforming calculation computes the phase and amplitude adjustment values required for each unit in the MEMS array to form a sound wave beam pointing at the target; by adjusting the phase and amplitude of the sound wave, constructive interference is formed in a specific direction, thus focusing in the target area. The control circuit uses beamforming algorithms (such as delay-and-sum method or phase array method), with input parameters including the sound source coordinates and the geometric layout of the MEMS array; the output result is the phase delay and amplitude weight of each MEMS unit, used to generate control signals.

[0030] Adjusting the MEMS array is to apply the beamforming calculation result to the MEMS acoustic metasurface array, regulating the propagation characteristics of the sound wave by changing the phase and amplitude of each MEMS unit. The control circuit converts the calculated phase and amplitude parameters into electrical signals to drive the actuators of the MEMS units (the actuators are piezoelectric materials, electrostatic drivers, or thermal drivers), and by changing the vibration characteristics of the micro diaphragm or structure, precise control of the sound wave is achieved; the adjustment process requires high precision to ensure the coordinated operation of all units.

[0031] After the MEMS array adjustment is completed, the system emits a directional acoustic beam to the target area; through the collaborative regulation of phase and amplitude, the acoustic metasurface enables the interference enhancement of sound waves in a specific direction, achieving focusing or directional propagation. Each MEMS unit emits sound waves according to its phase and amplitude settings; the sound waves are superimposed in space, forming an acoustic beam with the main lobe pointing to the target area, while forming lower side lobes in other directions; this interference effect depends on the collaboration of the MEMS array. Emitting directional sound waves is the core output function of the system, directly achieving the design goal of providing high-quality sound waves in a specific area while reducing interference to other areas.

[0032] Target area monitoring is carried out through microphones arranged in the target area to monitor the quality of the received sound waves in real time, including intensity, clarity, and focusing degree. These data are used to evaluate the acoustic output effect and provide a basis for subsequent optimization. The microphone collects the acoustic signal, converts the analog signal into a digital signal, and transmits it to the control circuit; the control circuit analyzes key indicators such as sound pressure level (SPL), frequency response, and distortion; data acquisition needs to have high real-time performance to support rapid feedback.

[0033] Feedback optimization analyzes the monitoring data of the target area, identifies defects in the acoustic output (such as insufficient intensity or focusing deviation), and generates adjustment parameters to optimize the settings of the MEMS array. The control circuit uses optimization algorithms (such as gradient descent method or PID control); according to the error between the monitoring data and the expected value, it calculates the adjustment amount of the phase and amplitude of the MEMS unit; the adjustment parameters are designed to reduce the error and improve the acoustic quality.

[0034] Fine-tuning the MEMS unit makes minor adjustments to the MEMS array according to the adjustment parameters generated by feedback optimization to optimize the acoustic output. The control circuit updates the drive signal of the MEMS unit, fine-tuning its phase and amplitude; the adjustment process involves small changes in voltage or current, requiring high-precision control; fine-tuning needs to avoid over-adjustment or system oscillation. Fine-tuning is the execution link of feedback control, improving the adaptability and stability of the system by continuously improving the acoustic quality; after fine-tuning the MEMS unit, the system re-emits sound waves, and verifies the optimization effect through the target area microphone. If there are still defects, feedback optimization and fine-tuning will continue. Optimization is an iterative process, improving the directivity and sound quality of sound waves through multiple feedbacks and adjustments; the verification indicators include acoustic intensity, focusing accuracy, and sound quality clarity; the ultimate goal is to meet the preset performance standards.

[0035] The system enters a continuous operation state, continuously monitors environmental changes (such as sound source movement or noise changes), and dynamically adjusts the MEMS array to adapt to these changes; the microphone array and the target area microphone work together to collect environmental and output data; the control circuit repeatedly performs sound source localization, feedback optimization, and fine-tuning; this process forms a closed-loop control to ensure long-term stability. With the support of continuous monitoring and adjustment, the system operates stably and continuously provides directional acoustic wave output; all modules work together to maintain closed-loop control and adaptive adjustment. The system automatically processes environmental changes to maintain the stability and high quality of the acoustic wave output; the cooperation between modules depends on real-time data and control algorithms.

Claims

1. A control method for a MEMS directional acoustic wave loudspeaker, characterized in that, The steps for implementing the directional sound wave function of the speaker are as follows: S1. Initialize the hardware components of the system to ensure the normal operation of the microphone array, MEMS array, and control circuit, and achieve system startup and self-check; S2. Detect the position of the sound source in the environment through the microphone array, generate sound source position data, and perform sound source localization; S3. The control circuit receives the sound source position data, calculates the phase and amplitude parameters required for each MEMS unit in the MEMS array, and implements beamforming calculation; S4. Adjust the settings of the MEMS acoustic metasurface array according to the calculated phase and amplitude parameters; S5. The adjusted MEMS array emits a directional sound wave beam to the target area; S6. The microphone in the target area monitors the quality of the received sound wave and generates sound wave quality data; S7. The control circuit receives the sound wave quality data, analyzes it, and generates adjustment parameters to optimize the sound wave output; S8. Fine-tune the MEMS array according to the adjustment parameters; S9. Optimize the directivity and quality of the sound wave through the fine-tuned MEMS array; S10. The system continuously monitors the environmental changes and sound wave effects, dynamically adjusts the MEMS array, and achieves adaptive control; S11. The system enters a stable operating state and continuously provides high-quality directional sound wave output.

2. The control method of a MEMS directional acoustic wave speaker according to claim 1, wherein: Step S1 is responsible for initializing all hardware components, including the MEMS array, microphone array, microphone in the target area, control circuit, signal processing module, and power supply module; The power supply module provides stable power support for the system. The control circuit runs a self-check program to check the connection status and functional integrity of the MEMS unit, microphone array, and signal processing module one by one.

3. The control method of a MEMS directional acoustic wave speaker according to claim 1, wherein: In step S2, the microphone array records the time and intensity of the sound wave reaching each of its microphones. The microphone array includes a plurality of microphones distributed at different positions; and the system is configured to determine the position of the sound source in any of the following ways: Based on the relative time difference of the recorded sound wave reaching different microphones, combined with the geometric relationship between the microphones in the microphone array, determine the three-dimensional coordinates of the sound source; Or perform beamforming localization, which includes scanning the sound wave intensity in different directions to determine the position of the sound source.

4. A control method for a MEMS directional acoustic wave loudspeaker according to claim 1, characterized in that: In step S3, the control circuit receives the sound source position data; and the control circuit performs beamforming calculation based on the sound source position data to determine the phase and amplitude parameters required for each unit in the MEMS array; the beamforming calculation aims to adjust the phase and amplitude of the sound wave emitted by the MEMS array so that the sound wave forms constructive interference in the target area at the sound source position, thereby achieving the focusing of the sound wave in this area.

5. A control method for a MEMS directional acoustic wave speaker according to claim 1, characterized in that: In the step S4, the phase and the amplitude parameter calculated in the step S3 are applied to the MEMS array; the application to the MEMS array includes changing the phase and the amplitude of each unit in the MEMS array to regulate the propagation characteristics of the acoustic wave according to the beamforming calculation result.

6. The control method of a MEMS directional acoustic wave speaker according to claim 1, characterized in that: After the adjustment of the MEMS array in the step S5 is completed, the system emits a directional acoustic beam to the target area; through the collaborative regulation of the phase and the amplitude, the acoustic metasurface enables the acoustic wave to form interference enhancement in a specific direction, realizing focused or directional propagation.

7. The control method of a MEMS directional acoustic wave loudspeaker according to claim 1, characterized in that: In the step S6, the target area is monitored by a microphone arranged in the target area to monitor the quality of the received acoustic wave in real time, including intensity, clarity, and focusing degree.

8. A control method for a MEMS directional acoustic wave speaker according to claim 1, characterized in that: In the step S7, the monitoring data of the target area is analyzed by feedback optimization to identify the defects in the acoustic wave output and generate adjustment parameters to optimize the setting of the MEMS array.

9. A method for controlling a MEMS directional acoustic wave speaker according to claim 1, characterized in that: In the steps S8 to S10, feedback optimization and fine-tuning are performed, and the feedback optimization and fine-tuning include: according to the adjustment parameters generated by the feedback optimization, the control circuit performs fine-tuning on the MEMS array to optimize the output of the acoustic wave in the target area; and, the system is configured to re-transmit the acoustic wave after the fine-tuning; the system is also configured to receive the re-transmitted acoustic wave by the target area microphone and verify the optimization effect based on the received acoustic wave information; and, in the verification, if the optimization effect does not meet the preset standard, the system is configured to repeat the feedback optimization and the fine-tuning process.

10. The control method of a MEMS directional acoustic wave speaker according to claim 1, characterized in that: In the step S11, the system enters a continuous operation state, monitors environmental changes in real time, and dynamically adjusts the MEMS array.

Images