A COF packaging substrate sputtering pretreatment device

Abstract

The present invention discloses a sputtering pretreatment device for a COF packaging substrate, which belongs to the technical field of flexible substrate processing. An upper cleaning roller and a lower cleaning roller are installed between the first support plate and the second support plate, and a driving component is installed at the upper end. A regulating component 1 and a regulating component 2 are installed at the lower end of the driving component, and the lower ends of the regulating component 1 and the regulating component 2 are connected to the end of the upper cleaning roller. A supplementing component is installed on the side wall of the second support plate, and a placement component 1 and a placement component 2 are installed between the first support plate and the second support plate, and the supplementing component is connected to the placement component 1 and the placement component 2. The upper cleaning roller and the lower cleaning roller are replenished with solution at a regular time and in a fixed amount by the supplementing component, thereby improving the cleaning effect and reducing the volatilization of the organic solvent. The lower push plate drives the upper cleaning roller to relax or tighten the substrate, which does not affect the operation of the substrate during the regulation period, thereby achieving the technical effect of continuous working adjustment.

Description

Technical Field

[0001] The present invention belongs to the technical field of flexible substrate processing, and in particular relates to a sputtering pre-processing device for a COF packaging substrate. Background Art

[0002] Magnetron sputtering is an important method of vacuum coating. It uses high-energy particles (usually positive ions accelerated by an electric field, such as argon ions) to bombard the solid surface, causing the atoms or molecules on the solid surface to exchange kinetic energy with the incident high-energy particles and then splash out from the solid surface. These sputtered atoms (or atomic clusters) have a certain amount of energy and can be redeposited and condensed on the surface of the solid substrate to form a thin film, which is sputtering coating.

[0003] Impurities, oil stains, etc. on the surface of the flexible substrate will affect the adhesion between the sputtered film and the substrate. Therefore, before sputtering, the substrate surface needs to be thoroughly cleaned. The substrate surface can be wiped with an organic solvent (such as acetone, ethanol, etc.), and then rinsed with deionized water. Finally, plasma cleaning is used to further remove organic residues and oxides on the surface. However, there are many problems in the actual cleaning process. On the one hand, when cleaning the top and bottom of the flexible substrate, the existing device is difficult to ensure the flatness of the flexible substrate during the cleaning process, which affects the cleaning effect. Moreover, although there are some tensioning devices in the existing technology, it is often impossible to achieve real-time tensioning and relaxation of the flexible substrate during the cleaning process. The workflow is easily interrupted, resulting in low production efficiency.

[0004] On the other hand, organic solvents such as ethanol and acetone are volatile and will continue to evaporate during the cleaning process, making it difficult to maintain a stable concentration and amount of organic solvents, affecting the cleaning effect. In order to ensure the cleaning effect, the traditional method is to continuously add a large amount of organic solvents, but this will not only cause waste of organic solvents and increase production costs, but may also cause greater pollution to the environment. However, if the organic solvents are not replenished in time, the ideal cleaning effect may not be achieved due to insufficient organic solvents. Summary of the Invention

[0005] In view of the above situation, in order to overcome the defects of the prior art, the present invention provides a COF packaging substrate sputtering pretreatment device, which at least partially solves the problems raised in the above background technology.

[0006] The technical solution adopted by the present invention is as follows: A COF packaging substrate sputtering pretreatment device includes a first support plate and a second support plate for supporting and fixing, the first support plate and the second support plate are placed opposite to each other, an upper cleaning roller and a lower cleaning roller are installed between the first support plate and the second support plate, the upper cleaning roller is arranged at the upper end of the lower cleaning roller, the upper ends of the first support plate and the second support plate are installed with a driving assembly, and the lower end of the driving assembly is installed with a regulating assembly 1 and a regulating assembly 2, the regulating assembly 1 and the regulating assembly 2 are symmetrically placed with the center line between the first support plate and the second support plate as the symmetry axis, the regulating assembly 1 is arranged on the first support plate, and the regulating assembly 2 is arranged on the second support plate, the lower end of the regulating assembly 1 and the lower end of the regulating assembly 2 are respectively connected to the end of the upper cleaning roller, a supplementary assembly is installed on the side wall of the second support plate, and a placement assembly 1 and a placement assembly 2 are also installed between the first support plate and the second support plate, the placement assembly 1 is arranged at the upper end of the upper cleaning roller, and the placement assembly 2 is arranged at the lower end of the lower cleaning roller, and the supplementary assembly is respectively connected to the placement assembly 1 and the placement assembly 2.

[0007] Preferably, gear one, gear two, gear three and gear four are movably installed on the outer wall of the second support plate in sequence, the gear one is connected to one end of the lower cleaning roller, the gear four is connected to one end of the upper cleaning roller, the gear two is movably installed on the second support plate, and gear two is meshed and connected with gear one, the gear three is meshed and connected with gear two, and at the same time, gear three can move along the outer wall of gear two, the gear four is meshed and connected with gear three, and at the same time, gear four can move along the outer wall of gear three, a connecting rod one is movably installed at the center of the gear two, the other end of the connecting rod one is movably connected to the center of gear three, a connecting rod two is movably installed at the center of the gear three, and the other end of the connecting rod two is movably connected to the center of gear four.

[0008] Furthermore, the outer wall of the lower cleaning roller is provided with a lower cleaning piece, the lower cleaning piece is elastically arranged, and the outer wall is installed with a flexible material that can easily absorb liquid, such as a flexible sponge, and a ventilation cavity three is provided between the lower cleaning piece and the outer wall of the lower cleaning roller, and a ventilation cavity one is provided in the center of the lower cleaning roller, and multiple groups of ventilation cavities two for gas circulation are also provided in the lower cleaning roller, one end of the ventilation cavity two is through-connected with the ventilation cavity one, and the other end of the ventilation cavity two is through-connected with the ventilation cavity three, and the outer wall of the upper cleaning roller is provided with an upper cleaning piece, and the outer wall of the upper cleaning piece is installed with a flexible material that can easily absorb liquid, such as a flexible sponge; the end of the lower cleaning roller close to the supplementary component is installed with a toggle piece, and the toggle piece is arranged at the upper end of the supplementary component and can be movably connected to the supplementary component, and the ventilation cavity one passes through the other end of the lower cleaning roller and is arranged in the center of the toggle piece, and the end of the toggle piece away from the lower cleaning roller is an arc structure, and multiple groups of balls that can reduce friction are movably installed.

[0009] In which, the driving assembly includes a connecting plate and a hydraulic rod, two ends of the connecting plate are respectively connected to the upper walls of the first support plate and the second support plate, the first support plate and the second support plate support the connecting plate, the hydraulic rod is arranged at the center position of the connecting plate, and the connecting plate supports and fixes the hydraulic rod, the movable end of the hydraulic rod is installed with a lower push plate, airbag 1 and airbag 2 are installed between the lower push plate and the connecting plate, ventilation pipe 1 is installed between airbag 1 and airbag 2, ventilation pipe 1 is used for gas flow between airbag 1 and airbag 2, ventilation pipe 2 is installed on one side wall of the airbag, the other end of ventilation pipe 2 is movably connected to the center of the toggle member, and ventilation pipe 2 connects airbag 1 and ventilation chamber 1.

[0010] Preferably, the supplementary component includes a fixing plate 1, which is arranged on the side wall of the second support plate, and the second support plate supports and fixes the fixing plate 1. A telescopic rod is installed on the upper wall of the fixing plate 1, and a pressure plate is installed on the upper end of the telescopic rod. A spring and a folding bag are installed between the pressure plate and the fixing plate 1, and the spring is arranged on the outside of the folding bag. The toggle member is arranged at the upper end of the pressure plate. When the toggle member rotates to the lower end, it can drive and squeeze the pressure plate. The downward movement of the pressure plate drives the spring and the telescopic rod, and the folding bag is compressed.

[0011] Among them, the space inside the folding bag is divided into cavity one and cavity two, the upper end of cavity one is installed with an upper connecting tube, and the other end of the upper connecting tube is connected to the placement component one, and the lower end of cavity two is installed with a lower connecting tube, and the other end of the lower connecting tube is connected to the placement component two. The supplementary component also includes a storage box, and ethanol, propanol or isopropanol, etc. for cleaning flexible substrates are placed in the storage box. The storage box is connected to cavity one and cavity two through a delivery pipe, and the delivery pipe, upper connecting pipe and lower connecting pipe are all provided with a one-way valve, which can control the liquid in the storage box to enter cavity one and cavity two through the delivery pipe. The liquid in cavity one enters the placement component one through the upper connecting pipe, and the liquid in cavity two enters the placement component two through the lower connecting pipe.

[0012] Preferably, the placement component 1 includes a placement plate 1, the two ends of the placement plate 1 are respectively arranged on the opposite side walls of the first support plate and the second support plate, the bottom wall of the placement plate 1 is provided with a temporary storage cavity 1, the upper cleaning piece is provided at the lower end of the temporary storage cavity 1, the bottom wall of the temporary storage cavity 1 is provided with multiple groups of through holes for liquid circulation, the upper end of the placement plate 1 is provided with an air vent, the air vent is connected with the temporary storage cavity 1, the other end of the upper connecting tube passes through the upper wall of the placement plate 1 and is connected with the temporary storage cavity 1, the liquid in the cavity 1 enters the temporary storage cavity 1 through the upper connecting tube, and flows into the upper cleaning piece through the through hole.

[0013] Among them, the placement component 1 includes a placement plate 2, the two ends of the placement plate 2 are respectively arranged on the opposite side walls of the first support plate and the second support plate, the upper wall of the placement plate 2 is provided with a temporary storage cavity 2, the lower cleaning component is arranged in the temporary storage cavity 2, and the other end of the lower connecting tube passes through the placement plate 2 and is connected with the temporary storage cavity 2, and the liquid in the cavity 2 enters the temporary storage cavity 2 through the lower connecting tube.

[0014] Furthermore, the upper ends of the first support plate and the second support plate are both provided with slots, the lower ends of the regulating component one movably clamped in the slot hole in the first support plate, and the lower ends of the regulating component two movably clamped in the slot hole in the second support plate, the regulating component one and regulating component two have the same structure, and only one group is introduced here, the regulating component one includes a fixing plate two, a driving rod and a mounting block, the mounting block movably clamped in the slot hole in the first support plate, the fixing plate two is arranged on the wall surface of the first support plate and is arranged at the upper end of the slot hole, a sleeve is installed in the center of the fixing plate two, the driving rod movably passes through the sleeve arrangement, the upper end of the driving rod is connected to the bottom wall of the lower push plate, the lower end of the driving rod is connected to the upper wall of the mounting block, and the two ends of the upper cleaning roller are movably connected to the mounting block respectively.

[0015] Wherein, a mounting seat is provided on the side wall of the first support plate, a motor is installed on the mounting seat, an output shaft end of the motor is connected to the other end of the lower cleaning roller, and the motor drives the lower cleaning roller to rotate when it works.

[0016] After adopting the above structure, the beneficial effects of the present invention are as follows:

[0017] (1) The liquid in cavity one enters temporary storage chamber one through the upper connecting tube and flows into the rotating upper cleaning member through the through hole. The liquid in cavity two enters temporary storage chamber two through the lower connecting tube. When the lower cleaning roller rotates, the liquid in temporary storage chamber two is adsorbed in the lower cleaning member. The upper cleaning roller and the lower cleaning roller are replenished with solution at regular intervals and in fixed quantities through the replenishing component, thereby improving the cleaning effect and reducing the volatilization of organic solvents.

[0018] (2) During the cleaning process, if the flexible substrate needs to be tensioned, the lower push plate can drive the upper cleaning roller to tension the substrate; if the flexible substrate needs to be relaxed, the lower push plate can drive the upper cleaning roller to relax the substrate. During the adjustment period, the operation of the substrate is not affected, and the technical effect of non-stop continuous work adjustment is achieved.

[0019] (3) When the push plate moves downward, the gas in the lower cleaning part decreases, and when the push plate moves upward, the gas in the lower cleaning part increases. The distance between the upper cleaning part and the lower cleaning part can be adjusted in time according to the tensioning or relaxation effect of the substrate to facilitate the passage of the substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The accompanying drawings are used to provide further understanding of the present invention and constitute a part of the specification. They are used to explain the present invention together with the embodiments of the present invention and do not constitute a limitation of the present invention.

[0021] Figure 1 Schematic diagram of the structure of a COF packaging substrate sputtering pretreatment device proposed by the present invention Figure 1 ;

[0022] Figure 2 for Figure 1 A local enlarged view of point A;

[0023] Figure 3 A schematic diagram of the structure of the supplementary components proposed by the present invention;

[0024] Figure 4 for Figure 3 A local enlarged view of point B;

[0025] Figure 5 Schematic diagram of the structure of a COF packaging substrate sputtering pretreatment device proposed by the present invention Figure 2 ;

[0026] Figure 6 for Figure 5 A local enlarged view of point C;

[0027] Figure 7 A cross-sectional view of a sputtering pretreatment device for a COF package substrate proposed by the present invention Figure 1 ;

[0028] Figure 8 for Figure 7 A local enlarged view of point D;

[0029] Figure 9 for Figure 7 A local enlarged view of point E;

[0030] Figure 10 A cross-sectional view of a sputtering pretreatment device for a COF package substrate proposed by the present invention Figure 2 .

[0031] In the accompanying drawings: 1. First support plate, 2. Second support plate, 3. Upper cleaning roller, 4. Lower cleaning roller, 5. Drive assembly, 6. Control assembly 1, 7. Control assembly 2, 8. Supplement assembly, 9. Placement assembly 1, 10. Placement assembly 2, 11. Gear 1, 12. Gear 2, 13. Gear 3, 14. Gear 4, 15. Connecting rod 1, 16. Connecting rod 2, 17. Lower cleaning member, 18. Ventilation chamber 3, 19. Ventilation chamber 1, 20. Ventilation chamber 2, 21. Upper cleaning member, 22. Toggle member, 23. Connecting plate, 24. Hydraulic rod, 25. Push-down plate, 26. Airbag 1, 27. Airbag 2, 28. Ventilation tube 1, 29. Ventilation tube 2, 30. Fixed plate 1, 31. Telescopic rod, 32. Pressure plate, 33. Spring, 34. Folding bag, 35. Cavity 1, 36. Cavity 2, 37. Upper connecting tube, 38. Lower connecting tube, 39. Storage box, 40. Placement plate 1, 41. Temporary storage cavity 1, 42. Placement plate 2, 43. Temporary storage cavity 2, 44. Slot, 45. Fixed plate 2, 46. Drive rod, 47. Mounting block, 48. Sleeve, 49. Mounting seat, 50. Motor. DETAILED DESCRIPTION

[0032] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments; based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0033] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0034] like Figures 1-10As shown, a COF package substrate sputtering pretreatment device includes a first support plate 1 and a second support plate 2 for supporting and fixing, the first support plate 1 and the second support plate 2 are placed opposite to each other, an upper cleaning roller 3 and a lower cleaning roller 4 are installed between the first support plate 1 and the second support plate 2, the upper cleaning roller 3 is arranged at the upper end of the lower cleaning roller 4, a driving component 5 is installed at the upper end of the first support plate 1 and the second support plate 2, and a regulating component 1 6 and a regulating component 2 7 are installed at the lower end of the driving component 5, and the regulating component 1 6 and the regulating component 2 7 are based on the center line between the first support plate 1 and the second support plate 2. The symmetry axes are symmetrically placed, and the regulating component 1 6 is arranged on the first support plate 1, and the regulating component 2 7 is arranged on the second support plate 2. The lower ends of the regulating component 1 6 and the regulating component 2 7 are respectively connected to the ends of the upper cleaning roller 3. The side wall of the second support plate 2 is installed with a supplementary component 8. A placement component 1 9 and a placement component 2 10 are also installed between the first support plate 1 and the second support plate 2. The placement component 1 9 is arranged at the upper end of the upper cleaning roller 3, and the placement component 2 10 is arranged at the lower end of the lower cleaning roller 4. The supplementary component 8 is respectively connected to the placement component 1 9 and the placement component 2 10.

[0035] Gear 1 11, gear 2 12, gear 3 13 and gear 4 14 are movably installed on the outer wall of the second supporting plate 2 in sequence, the gear 11 is connected to one end of the lower cleaning roller 4, the gear 4 14 is connected to one end of the upper cleaning roller 3, the gear 2 12 is movably installed on the second supporting plate 2, and the gear 2 12 is meshed and connected with the gear 1 11, the gear 3 13 is meshed and connected with the gear 2 12, and the gear 3 13 can move along the outer wall of the gear 2 12, the gear 4 14 is meshed and connected with the gear 3 13, and the gear 4 14 can move along the outer wall of the gear 3 13, a connecting rod 15 is movably installed at the center of the gear 2 12, the other end of the connecting rod 15 is movably connected to the center of the gear 3 13, a connecting rod 2 16 is movably installed at the center of the gear 3 13, and the other end of the connecting rod 2 16 is movably connected to the center of the gear 4 14;

[0036] It should be noted that the rotation of the lower cleaning roller 4 drives gear 11 to rotate, gear 11 drives gear 2 12 meshing with it to rotate, gear 2 12 drives gear 3 13 to rotate, gear 3 13 drives gear 4 14 to rotate, and gear 4 14 drives the upper cleaning roller 3 to rotate; when the regulating component 1 6 and the regulating component 2 7 move downward, they push the upper cleaning roller 3, and the upper cleaning roller 3 moves downward along the slot 44, driving gear 4 14 to move downward. Gear 4 14 moves downward under the restriction of the slot 44, pushing connecting rod 2 16 to move, connecting rod 2 16 drives gear 3 13, gear 3 13 moves along gear 2 12 in the direction away from the slot 44, and connecting rod 15 swings. Due to the setting of connecting rod 15 and connecting rod 2 16, gear 2 12 is still meshed with gear 3 13, and gear 3 13 is still meshed and connected with gear 4 14.

[0037] The outer wall of the lower cleaning roller 4 is provided with a lower cleaning piece 17, the lower cleaning piece 17 is elastically arranged, and the outer wall is installed with a flexible material that is easy to absorb liquid, such as a flexible sponge. A ventilation cavity three 18 is provided between the lower cleaning piece 17 and the outer wall of the lower cleaning roller 4, and a ventilation cavity one 19 is provided in the center of the lower cleaning roller 4. The lower cleaning roller 4 is also provided with a plurality of ventilation cavities two 20 for gas circulation, one end of the ventilation cavity two 20 is connected to the ventilation cavity one 19, and the other end of the ventilation cavity two 20 is connected to the ventilation cavity three 18. The outer wall of the upper cleaning roller 3 is provided with an upper cleaning piece 21, and the outer wall of the upper cleaning piece 21 is installed with a flexible material that is easy to absorb liquid. Material, such as flexible sponge; the gas in ventilation chamber 19 enters ventilation chamber 3 18 through ventilation chamber 2 20, and the lower cleaning piece 17 bulges; the lower cleaning roller 4 is provided with a toggle piece 22 at one end close to the supplementary component 8, and the toggle piece 22 is provided at the upper end of the supplementary component 8 and can be movably connected with the supplementary component 8, and the ventilation chamber 19 passes through the other end of the lower cleaning roller 4 and is provided in the center of the toggle piece 22, and the end of the toggle piece 22 away from the lower cleaning roller 4 is an arc structure, and multiple groups of balls that can reduce friction are movably installed; when the lower cleaning roller 4 rotates, it can drive the toggle piece 22 to rotate, and when the toggle piece 22 rotates, it drives the supplementary component 8.

[0038] The driving assembly 5 includes a connecting plate 23 and a hydraulic rod 24, the two ends of the connecting plate 23 are respectively connected to the upper walls of the first support plate 1 and the second support plate 2, the first support plate 1 and the second support plate 2 support the connecting plate 23, the hydraulic rod 24 is arranged at the center of the connecting plate 23, and the connecting plate 23 supports and fixes the hydraulic rod 24, and the movable end of the hydraulic rod 24 is installed with a lower push plate 25, and an airbag 1 26 and an airbag 2 27 are installed between the lower push plate 25 and the connecting plate 23, and a ventilation pipe 1 28 is installed between the airbag 1 26 and the airbag 2 27, and the ventilation pipe 1 28 is used for the gas flow between the airbag 1 26 and the airbag 2 27, and a ventilation pipe 29 is installed on the side wall of the airbag 1 26, and the other end of the ventilation pipe 29 is movably connected to the center of the toggle member 22, and the ventilation pipe 2 29 communicates with the airbag 1 26 and the ventilation cavity 19;

[0039] It should be noted that when the hydraulic rod 24 drives the lower push plate 25 to move upward, the lower push plate 25 squeezes airbag 1 26 and airbag 2 27, and the gas in airbag 1 26 enters the ventilation cavity 19 through the ventilation pipe 2 29, and the gas in airbag 2 27 enters the airbag 1 26 through the ventilation pipe 1 28.

[0040] The supplementary component 8 includes a fixed plate 30, which is arranged on the side wall of the second support plate 2, and the second support plate 2 supports and fixes the fixed plate 30. A telescopic rod 31 is installed on the upper wall of the fixed plate 30, and a pressure plate 32 is installed on the upper end of the telescopic rod 31. A spring 33 and a folding capsule 34 are installed between the pressure plate 32 and the fixed plate 30, and the spring 33 is arranged on the outside of the folding capsule 34. The toggle member 22 is arranged at the upper end of the pressure plate 32. When the toggle member 22 rotates to the lower end, it can drive and squeeze the pressure plate 32. The pressure plate 32 moves downward to drive the spring 33 and the telescopic rod 31, and the folding capsule 34 is compressed.

[0041] The space inside the folding bag 34 is divided into cavity one 35 and cavity two 36. The upper end of cavity one 35 is equipped with an upper connecting tube 37, and the other end of the upper connecting tube 37 is connected to the placement component one 9. The lower end of cavity two 36 is equipped with a lower connecting tube 38, and the other end of the lower connecting tube 38 is connected to the placement component two 10. The supplementary component 8 also includes a storage box 39, and the storage box 39 is filled with ethanol, propanol or isopropanol for cleaning flexible substrates. The storage box 39 is connected to cavity one 35 and cavity two 36 through a delivery pipe. The delivery pipe, the upper connecting tube 37 and the lower connecting tube 38 are all provided with a one-way valve, which can control the liquid in the storage box 39 to enter cavity one 35 and cavity two 36 through the delivery pipe. The liquid in cavity one 35 enters the placement component one 9 through the upper connecting tube 37, and the liquid in cavity two 36 enters the placement component two 10 through the lower connecting tube 38.

[0042] The placement component 9 includes a placement plate 40, the two ends of which are respectively arranged on the opposite side walls of the first support plate 1 and the second support plate 2, the bottom wall of the placement plate 40 is provided with a temporary storage cavity 41, the upper cleaning piece 21 is provided at the lower end of the temporary storage cavity 41, the bottom wall of the temporary storage cavity 41 is provided with a plurality of through holes for liquid circulation, the upper end of the placement plate 40 is provided with an air vent, the air vent is connected with the temporary storage cavity 41, the other end of the upper connecting pipe 37 passes through the upper wall of the placement plate 40 and is connected with the temporary storage cavity 41, the liquid in the cavity 35 enters the temporary storage cavity 41 through the upper connecting pipe 37, and flows into the upper cleaning piece 21 through the through hole.

[0043] The placement component 9 includes a placement plate 2 42 , the two ends of which are respectively arranged on the opposite side walls of the first support plate 1 and the second support plate 2 , a temporary storage cavity 2 43 is provided on the upper wall of the placement plate 2 42 , the lower cleaning member 17 is arranged in the temporary storage cavity 2 43 , the other end of the lower connecting pipe 38 passes through the placement plate 2 42 and is connected to the temporary storage cavity 2 43 , and the liquid in the cavity 2 36 enters the temporary storage cavity 2 43 through the lower connecting pipe 38 .

[0044] The upper ends of the first support plate 1 and the second support plate 2 are both provided with slots 44, and the lower end of the regulating component 1 6 is movably engaged in the slot 44 in the first support plate 1, and the lower end of the regulating component 2 7 is movably engaged in the slot 44 in the second support plate 2. The structures of the regulating component 1 6 and the regulating component 2 7 are the same. Only one group is introduced here. The regulating component 1 6 includes a fixing plate 2 45, a driving rod 46 and a mounting block 47. The mounting block 47 is movably engaged in the slot 44 in the first support plate 1. The fixing plate 2 45 is provided on the upper wall of the first support plate 1 and is provided at the upper end of the slot 44. A sleeve 48 is installed in the center of the fixing plate 2 45. The driving rod 46 movably passes through the sleeve 48. The upper end of the driving rod 46 is connected to the bottom wall of the lower push plate 25, and the lower end of the driving rod 46 is connected to the upper wall of the mounting block 47. The two ends of the upper cleaning roller 3 are movably connected to the mounting blocks 47 respectively.

[0045] It should be noted that when the lower push plate 25 moves down or up, it can drive the drive rod 46 to move down or up along the sleeve 48, and the drive rod 46 drives the mounting block 47 to move down or up along the slot 44, and the mounting block 47 drives the upper cleaning roller 3 to move down or up.

[0046] A mounting seat 49 is provided on the side wall of the first support plate 1 , and a motor 50 is mounted on the mounting seat 49 . The output shaft end of the motor 50 is connected to the other end of the lower cleaning roller 4 , and the motor 50 drives the lower cleaning roller 4 to rotate when it works.

[0047] The specific usage is as follows:

[0048] The flexible substrate to be cleaned passes through the upper cleaning roller 3 and the lower cleaning roller 4 through movement. The flexible substrate pay-off end and the receiving end are provided with a driving force, which can drive the flexible substrate. The upper side of the flexible substrate is in contact with the upper cleaning roller 3, and the lower side is in contact with the lower cleaning roller 4. The motor 50 drives the lower cleaning roller 4 to rotate. The rotation of the lower cleaning roller 4 drives the gear 11 to rotate. The gear 11 drives the gear 2 12 meshing with it to rotate. The gear 2 12 drives the gear 3 13 to rotate. The gear 3 13 drives the gear 4 14 to rotate. The gear 4 14 drives the upper cleaning roller 3 to rotate.

[0049] When the lower cleaning roller 4 rotates, it drives the toggle member 22 to rotate. When the toggle member 22 rotates to the lower end, it can drive the pressure plate 32 to squeeze. The pressure plate 32 moves downward to drive the spring 33 and the telescopic rod 31. The folding bag 34 is compressed. The liquid in the cavity 1 35 enters the temporary storage chamber 1 41 through the upper connecting pipe 37 and flows into the rotating upper cleaning member 21 through the through hole. The liquid in the cavity 2 36 enters the temporary storage chamber 2 43 through the lower connecting pipe 38. When the lower cleaning roller 4 rotates, the liquid in the temporary storage chamber 2 43 is absorbed in the lower cleaning member 17. The lower cleaning roller 4 and the upper cleaning roller 3 contaminated with the cleaning solvent can clean the upper and lower sides of the substrate when they rotate.

[0050] When the toggle member 22 is separated from the pressure plate 32 , the spring 33 pushes the pressure plate 32 upward, and the liquid in the storage box 39 enters the cavity 1 35 and the cavity 2 36 through the delivery pipe.

[0051] During the cleaning process, if the flexible substrate needs to be tensioned, the hydraulic rod 24 works to push the lower push plate 25 downward, and the lower push plate 25 can drive the driving rod 46 to move downward along the sleeve 48, and the driving rod 46 drives the mounting block 47 to move downward along the slot 44, and the mounting block 47 drives the upper cleaning roller 3 to move downward, and the upper cleaning roller 3 performs tensioning on the substrate;

[0052] At the same time, when the upper cleaning roller 3 moves downward along the slot 44, it can drive the gear 4 14 to move downward. The gear 4 14 moves downward under the restriction of the slot 44, pushing the connecting rod 2 16 to move. The connecting rod 2 16 drives the gear 3 13. The gear 3 13 moves along the gear 2 12 in the direction away from the slot 44. The connecting rod 1 15 swings. Due to the arrangement of the connecting rod 1 15 and the connecting rod 2 16, the gear 2 12 is still meshed with the gear 3 13, and the gear 3 13 is still meshed and connected with the gear 4 14.

[0053] When the push plate 25 moves downward, the airbag 1 26 and the airbag 2 27 are stretched, and the gas in the ventilation cavity 3 18 enters the airbag 1 26 and the airbag 2 27 through the ventilation cavity 20, the ventilation cavity 1 19 and the ventilation pipe 2 29. The gas in the lower cleaning member 17 is reduced, making it easier for the substrate to pass through. After adjustment, the cleaning process can be followed.

[0054] During the cleaning process, if the flexible substrate needs to be loosened, the hydraulic rod 24 works to push the lower push plate 25 upward, and the lower push plate 25 can drive the driving rod 46 to move upward along the sleeve 48. The driving rod 46 drives the mounting block 47 to move upward along the slot 44. The mounting block 47 drives the upper cleaning roller 3 to move upward, and the upper cleaning roller 3 loosens the substrate.

[0055] At the same time, when the upper cleaning roller 3 moves upward along the slot 44, it can drive the gear 4 14 to move upward. The gear 4 14 moves upward under the restriction of the slot 44, driving the connecting rod 2 16 to move. The connecting rod 2 16 drives the gear 3 13. The gear 3 13 moves along the gear 2 12 in the direction close to the slot 44. The connecting rod 1 15 swings in the opposite direction. Due to the arrangement of the connecting rod 1 15 and the connecting rod 2 16, the gear 2 12 is still meshed with the gear 3 13, and the gear 3 13 is still meshed and connected with the gear 4 14.

[0056] When the push plate 25 moves upward, the airbag 1 26 and the airbag 2 27 are squeezed, and the gas in the airbag 1 26 enters the ventilation cavity 19 through the vent pipe 2 29, and the gas in the airbag 2 27 enters the airbag 1 26 through the vent pipe 1 28. The gas in the lower cleaning part 17 increases, which facilitates the passage of the substrate. After adjustment, cleaning can be carried out according to the above cleaning process.

[0057] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents. In short, if those skilled in the art are inspired by the present invention and, without departing from the purpose of the present invention, design structures and embodiments similar to the technical solution without inventiveness, they shall fall within the scope of protection of the present invention.

Claims

1. A COF package substrate sputtering pretreatment device, comprising a first support plate and a second support plate for supporting and fixing, characterized in that: An upper cleaning roller and a lower cleaning roller are installed between the first support plate and the second support plate, and a driving assembly is installed at the upper ends of the first support plate and the second support plate, and a regulating assembly 1 and a regulating assembly 2 are installed at the lower ends of the driving assembly, said regulating assembly 1 is arranged on the first support plate, and said regulating assembly 2 is arranged on the second support plate, and the lower ends of said regulating assembly 1 and the lower ends of said regulating assembly 2 are respectively connected to the end of the upper cleaning roller, and a supplementary assembly is installed on the side wall of the second support plate, and a placing assembly 1 and a placing assembly 2 are further installed between the first support plate and the second support plate, said placing assembly 1 is arranged at the upper end of the upper cleaning roller, and said placing assembly 2 is arranged at the lower end of the lower cleaning roller, and the supplementary assembly is respectively connected to the placing assembly 1 and the placing assembly 2; Gear 1, gear 2, gear 3 and gear 4 are movably installed on the outer wall of the second supporting plate in sequence, the gear 1 is connected to one end of the lower cleaning roller, the gear 4 is connected to one end of the upper cleaning roller, the gear 2 is movably installed on the second supporting plate, and the gear 2 is meshed with the gear 1, the gear 3 is meshed with the gear 2, and the gear 3 can move along the outer wall of the gear 2, the gear 4 is meshed with the gear 3, and the gear 4 can move along the outer wall of the gear 3, a connecting rod 1 is movably installed at the center of the gear 2, the other end of the connecting rod 1 is movably connected to the center of the gear 3, a connecting rod 2 is movably installed at the center of the gear 3, and the other end of the connecting rod 2 is movably connected to the center of the gear 4; The outer wall of the lower cleaning roller is provided with a lower cleaning piece, and a ventilation cavity three is provided between the lower cleaning piece and the outer wall of the lower cleaning roller, and a ventilation cavity one is provided in the center of the lower cleaning roller, and multiple groups of ventilation cavities two for gas circulation are further provided in the lower cleaning roller, one end of the ventilation cavity two is connected with the ventilation cavity one, and the other end of the ventilation cavity two is connected with the ventilation cavity three, and the outer wall of the upper cleaning roller is provided with an upper cleaning piece; the end of the lower cleaning roller close to the supplementary assembly is equipped with a toggle piece, and the toggle piece is provided at the upper end of the supplementary assembly, and the ventilation cavity one passes through the other end of the lower cleaning roller and is arranged in the center of the toggle piece, and the end of the toggle piece away from the lower cleaning roller is an arc structure; The driving assembly includes a connecting plate and a hydraulic rod, the two ends of the connecting plate are respectively connected to the upper walls of the first support plate and the second support plate, the hydraulic rod is arranged at the center of the connecting plate, the movable end of the hydraulic rod is installed with a push-down plate, airbag 1 and airbag 2 are installed between the push-down plate and the connecting plate, a vent pipe 1 is installed between the airbag 1 and the airbag 2, a vent pipe 2 is installed on one side wall of the airbag, and the other end of the vent pipe 2 is movably connected to the center of the toggle member; The supplementary assembly includes a first fixing plate, the first fixing plate being arranged on the side wall of the second support plate, a telescopic rod being installed on the upper wall of the first fixing plate, a pressure plate being installed on the upper end of the telescopic rod, a spring and a folding bag being installed between the pressure plate and the first fixing plate, the spring being arranged on the outside of the folding bag, and the toggle member being arranged at the upper end of the pressure plate; The space inside the folding bag is divided into cavity one and cavity two. An upper connecting tube is installed at the upper end of cavity one, and the other end of the upper connecting tube is connected to the placement component one. A lower connecting tube is installed at the lower end of cavity two, and the other end of the lower connecting tube is connected to the placement component two. The supplementary component also includes a storage box, which is connected to cavity one and cavity two through a delivery pipe, and a one-way valve is provided in the delivery pipe, the upper connecting pipe and the lower connecting pipe.

2. A COF packaging substrate sputtering pretreatment device according to claim 1, characterized in that: The placement component 1 includes a placement plate 1, the two ends of which are respectively arranged on the opposite side walls of the first support plate and the second support plate, the bottom wall of the placement plate 1 is provided with a temporary storage chamber 1, the upper cleaning component is provided at the lower end of the temporary storage chamber 1, the bottom wall of the temporary storage chamber 1 is provided with multiple groups of through holes for liquid circulation, the upper end of the placement plate 1 is provided with an air vent, the air vent is connected to the temporary storage chamber 1, and the other end of the upper connecting pipe passes through the upper wall of the placement plate 1 and is connected to the temporary storage chamber 1.

3. A COF packaging substrate sputtering pretreatment device according to claim 2, characterized in that: The placement component 1 includes a placement plate 2, the two ends of which are respectively arranged on the opposite side walls of the first support plate and the second support plate. The upper wall of the placement plate 2 is provided with a temporary storage cavity 2, and the lower cleaning component is arranged in the temporary storage cavity 2. The other end of the lower connecting pipe passes through the placement plate 2 and is connected to the temporary storage cavity 2.

4. A COF packaging substrate sputtering pretreatment device according to claim 3, characterized in that: The cam is secured to the first support plate and secured to the second support plate by a spring, the spring having a bottom end connected to the first support plate and a bottom end connected to the second support plate.

5. A COF packaging substrate sputtering pretreatment device according to claim 4, characterized in that: A mounting seat is provided on the side wall of the first supporting plate. A motor is installed on the mounting seat. The output shaft end of the motor is connected to the other end of the lower cleaning roller.

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