Quartz boat overturning manipulator

Abstract

The quartz boat overturning manipulator comprises a conveyor and a U-shaped frame, a connecting box is fixedly installed on the upper surface of the U-shaped frame, an H-shaped plate is fixedly installed on the upper surface of the connecting box, connecting cylinders are slidably installed at the two ends of the outer surface of the H-shaped plate, connecting pipes are installed on the upper surfaces of the connecting cylinders in a communicating mode, and lifting mechanisms are arranged in the connecting pipes and the H-shaped plate; and a turnover mechanism is mounted on the outer surface of the lifting mechanism in the connecting pipe in a threaded manner. Through the design of the turnover mechanism, in the process of clamping the quartz boat, self-adaptive extension and top contact clamping can be carried out according to the shape of the outer surface of the quartz boat, tight fit clamping operation is achieved, the pressing and clamping force can be automatically detected in the pressing and clamping process, the quartz boat can be prevented from being damaged by too large pressure, and the quality of the quartz boat is improved. And it is ensured that the surface of the quartz boat is intact in the whole clamping process, the product yield is increased, and the production cost is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of mechanical fixtures, and particularly to a quartz boat flipping manipulator. Background Art

[0002] In high-tech fields such as semiconductor manufacturing and photovoltaic industries, the quartz boat, as a core tool for carrying key materials such as silicon wafers, its precise operation between various processes directly affects product quality and production efficiency. Traditional manual operation is not only inefficient but also poses a risk of damage to the quartz boat or damage to the silicon wafers due to improper operation. Against this background, the quartz boat flipping manipulator came into being and became an important device for realizing production automation and improving process precision.

[0003] For example, a Chinese patent with the publication number CN220408753U discloses a flipping manipulator, which includes a workbench, a robotic arm, two grippers, and two extension mechanisms. The extension mechanism includes a drive assembly, a gear, two tooth blocks, a connecting plate, and two extension plates. The workbench provides an installation condition for the robotic arm, and the robotic arm can drive the two grippers to flip and grip. When it is necessary to expand the clamping area of the two grippers, the drive assembly is started. The drive assembly works to drive the gear to rotate, the gear drives the two tooth blocks to move away from each other, the two tooth blocks respectively drive the two connecting plates to move away from each other, and the two connecting plates drive the two extension plates to move to the side away from the grippers until the two extension plates move to the preset position, and the adjustment of the clamping area of the two grippers can be completed, thus solving the problem that the existing mechanical claws cannot adjust the clamping area of the clamping plate when clamping objects of different sizes.

[0004] However, in the process of clamping and flipping an object, the above-mentioned flipping manipulator cannot adaptively fit and clamp according to the shape of the object and automatically adjust the clamping force. When dealing with special-shaped parts with complex surface curvature and irregular contours, it will cause uneven stress, and even slip and fall off due to too small contact area. The uncontrollable clamping force will apply a fixed clamping force to the surface of the workpiece. If the local structure of the workpiece is weak, such as thin-walled parts and hollow parts, it is easy to cause deformation, indentation or even damage due to excessive pressure, which will further affect the assembly accuracy of the subsequent processes of the workpiece, and is particularly unsuitable for flipping quartz boat tools. Summary of the Invention

[0005] The purpose of the present invention is to provide a quartz boat flipping manipulator to solve the problem that in the process of clamping and flipping an object, it cannot adaptively fit and clamp according to the shape of the object and automatically adjust the clamping force as mentioned in the above background art.

[0006] To achieve the above purpose, the present invention provides the following technical solutions: A quartz boat flipping manipulator, comprising: a conveyor and a U-shaped frame. A connection box is fixedly installed on the upper surface of the U-shaped frame. An H-shaped plate is fixedly installed on the upper surface of the connection box. Both the connection box and the H-shaped plate penetrate out of the conveyor. Connecting cylinders are respectively slidably installed at both end regions of the outer surface of the H-shaped plate along the length direction, that is, each group of connecting cylinders can perform linear sliding along the transverse guide rails on the outer surface of the H-shaped plate. A connecting pipe is communicated and installed on the upper surface of the connecting cylinder. Lifting mechanisms are rotatably installed in both the connecting pipe and the H-shaped plate. A flipping mechanism is threadedly installed on the outer surface of the lifting mechanism in the connecting pipe. The flipping mechanism slides out of the connecting pipe and is located at the inner end of the connecting pipe, so that the lifting mechanism can synchronously drive the two groups of flipping mechanisms to perform lifting operations inside the connecting pipe. The conveyor can perform conveying operations on the quartz boat, and then can make the flipping mechanism driven to lift be flush with the height of the quartz boat.

[0007] Preferably, driving blocks are fixedly installed on the lower surfaces of both groups of connecting cylinders. The driving blocks slide through the lower surface of the H-shaped plate into the connection box and are threadedly installed on the outer surface of the transmission mechanism. The transmission mechanism is fixedly installed in the connection box, so that the transmission mechanism can synchronously drive the two groups of driving blocks to drive the connecting cylinders to slide outward or inward synchronously on the outer surface of the H-shaped plate. The sliding connecting cylinders can drive the internal lifting mechanism and flipping mechanism to slide inward or outward synchronously, so as to drive the flipping mechanism to clamp the two ends of the quartz boat by sliding towards the center synchronously.

[0008] Preferably, the transmission mechanism includes a first double-shaft motor. The first double-shaft motor is fixedly installed at the center in the connection box. Rotating columns are fixedly installed at one ends of the output shafts at both ends of the first double-shaft motor. Threaded strips are fixedly installed on the outer surfaces of both groups of rotating columns. The threaded strips installed on the outer surfaces of the two groups of rotating columns are respectively positive helical and reverse helical. Driving blocks are threadedly installed on the outer surfaces of both groups of threaded strips, so that the two groups of threaded strips can drive the two groups of driving blocks to slide outward or inward synchronously through the first double-shaft motor.

[0009] Preferably, the other ends of both groups of rotating columns are respectively rotatably installed in the support plates. The support plates are fixedly installed at both ends in the connection box, so that the support plates can provide a supporting force for the rotating columns and threaded strips driven to rotate.

[0010] Preferably, the lifting mechanism includes a second double-shaft motor fixedly installed at the center inside the H-shaped plate. One end of the output shafts at both ends of the second double-shaft motor is fixedly installed with a T-shaped rotating rod. The outer surfaces of the two T-shaped rotating rods are both slidably installed with rotating tubes. A T-shaped sliding groove adapted to the T-shaped rotating rod is opened inside the rotating tube. The T-shaped rotating rod is slidably inserted into the T-shaped sliding groove. A rectangular through groove is opened on the side wall of the H-shaped plate. A first bearing seat inserted into the rectangular through groove is fixed on the inner wall of the connecting cylinder. A first bearing is fixed inside the first bearing seat. The rotating tube is fixedly connected to the inner ring of the first bearing. One end of each of the two rotating tubes is fixedly installed with a first bevel gear. The first bevel gear meshes with a second bevel gear. The second bevel gear is fixedly installed at the lower surface of the threaded rod. The threaded rod is rotatably installed at the inner top of the connecting tube. Second bearing seats are respectively fixed at both ends inside the connecting tube. A second bearing is fixed inside the second bearing seat. Both ends of the threaded rod respectively penetrate through the second bearing and are fixedly connected to the inner ring of the second bearing. A turning mechanism is threadedly installed on the outer surface of the threaded rod, so that the two threaded rods can drive the two turning mechanisms to perform lifting operations through a single second double-shaft motor. The first bevel gear and the second bevel gear rotate inside the connecting cylinder.

[0011] Preferably, the rotating tube at one end of the first bevel gear rotates inside the L-shaped plate at the same time, and the other end of the L-shaped plate is rotatably installed on the outer surface of the rotating rod of the second bevel gear. The outer surface of the threaded rod at one end of the second bevel gear rotates inside the limiting ring at the same time. The limiting ring is also fixedly installed inside the connecting cylinder.

[0012] Preferably, the turning mechanism includes a connecting block. The connecting block is slidably installed inside the connecting tube and is threadedly installed on the outer surface of the threaded rod at the same time. One end of the connecting block slides out from the inner side end of the connecting tube. And one end of the connecting block that slides out from the connecting tube is fixedly installed with a tapered block. A first transmission disk is rotatably installed inside the tapered block. One end of the first transmission disk is fixedly installed with a connecting disk. Multiple piston chambers are opened at one end of the connecting disk. Piston columns are slidably installed in multiple piston chambers. One end of the piston column is fixedly installed with a pressing rod. The pressing rod penetrates out of the piston chamber and the other end is fixedly installed with a rubber pad.

[0013] Preferably, a pressure-receiving disk is slidably installed horizontally inside the connecting disk. One end of the pressure-receiving disk is in contact communication with an annular air pipe. The other end of the annular air pipe is fixedly installed inside the connecting disk. And an air outlet is provided at the other end of the annular air pipe. And each air outlet is communicated with each piston chamber. The air inlet of the annular air pipe penetrates out from the upper end of the outer surface of the connecting disk and is connected and installed with the air outlet of an air pump. The air pump is fixedly installed on the upper surface of the mounting plate. The mounting plate is fixedly installed on the upper end of the outer surface of the tapered block.

[0014] Preferably, the air pump can inject air into multiple piston cavities through an annular air pipe to push multiple piston columns to slide towards one end in the piston cavities. The other end of the annular air pipe can push and press a pressure plate through air pressure to press against one end of a pressure sensor. The pressure sensor is fixedly installed in the first drive disk in an embedded manner. The signal transmitting end of the pressure sensor is connected to the signal receiving end of the controller, and the control output end of the controller is electrically connected to the electric control ends of the air pump and the first double-shaft motor.

[0015] Preferably, a transmission belt is sleeved on the outer surface of the first drive disk. The other end of the transmission belt slides out of the tapered block and is sleeved on the outer surface of the second drive disk. The second drive disk is fixedly installed at one end of the output shaft of a reduction motor. The reduction motor is fixedly installed in a docking plate. The docking plate is fixedly installed at one end of the outer surface of the tapered block. The electric control end of the reduction motor is electrically connected to the control output end of the controller.

[0016] Preferably, the models of the pressure sensor and the controller are GML669 and S7-1200 respectively.

[0017] Compared with the prior art, the beneficial effects of the present invention are as follows: 1. Precise positioning and high-efficiency compatibility Through the linkage of the lifting mechanism and the transmission mechanism, the flipping mechanism is driven to achieve crosswise sliding, which can quickly match the heights and horizontal positions of quartz boats of different batches and sizes without manual adjustment, improving the production line efficiency.

[0018] The step-by-step operation of "first height positioning and then horizontal positioning", combined with the high-precision control of the bevel gear pair and the screw drive, avoids collision damage caused by positioning deviation, and greatly enhances the compatibility of the equipment with quartz boats of different specifications.

[0019] 2. Adaptive clamping and low-loss flipping The flipping mechanism is internally provided with a piston column and a rubber pad driven by air pressure, which can adaptively extend and touch according to the irregular structures such as convex platforms and grooves on the surface of the quartz boat, maximizing the contact area and avoiding the problems of slipping or local stress concentration of traditional rigid clamping jaws.

[0020] The pressure sensor and the controller are linked to monitor the clamping force in real time and automatically adjust it, ensuring that thin and fragile quartz boats (such as those used for semiconductor wafers) are stable and without shaking during flipping, significantly reducing the risk of fragmentation and improving the product integrity rate.

[0021] 3. Full-process automation and seamless connection The whole process from conveying, positioning, clamping, flipping to resetting is automated without manual intervention, reducing the production line bottleneck and improving the production continuity.

[0022] After the flipping is completed, the mechanism automatically resets and releases the quartz boat, and cooperates with the conveyor to achieve seamless docking of processes, shorten the beat time, and improve the overall production capacity.

[0023] 4. Structural reliability and stability control Structural designs such as the limit ring and bearing restrict the radial runout of the transmission components, ensure the transmission accuracy of the bevel gear pair, thread bar, etc., and avoid position deviations caused by mechanical hard contact.

[0024] The reduction motor precisely controls the flipping angle (such as 180°), combined with the pressure threshold and air pressure stability monitoring (fluctuation < 0.05 MPa, lasting for 2 seconds), to ensure the stability and repeatability of the operation process. Brief description of the drawings

[0025] Figure 1 It is a schematic diagram of the overall structure of the quartz boat flipping manipulator of the present invention; Figure 2 It is a schematic diagram of the structures of the conveyor, connection box and H-shaped plate of the present invention; Figure 3 It is a schematic diagram of the sectional structure of the overall side of the present invention; Figure 4 It is a schematic diagram of the structures of the transmission mechanism and lifting mechanism of the present invention; Figure 5 It is a schematic diagram of the structure where the annular air pipe is connected to the air pump of the present invention; Figure 6 It is a schematic diagram of the structure where the annular air pipe is fixedly installed in the piston chamber of the present invention; Figure 7 It is a schematic diagram of the structures of the annular air pipe and the pressure-receiving disc of the present invention; Figure 8 It is a schematic diagram of the structure of the flipping mechanism of the present invention.

[0026] In the figure: 1. Conveyor; 101. U-shaped frame; 102. Connecting pipe; 103. Connection box; 104. H-shaped plate; 105. Connecting cylinder; 106. Support plate; 107. L-shaped plate; 108. Limit ring; 109. Transmission block; 2. Flipping mechanism; 201. Connecting block; 202. First transmission disc; 203. Connection disc; 204. Annular air pipe; 205. Mounting plate; 206. Air pump; 207. Pressure sensor; 208. Pressure-receiving disc; 209. Piston chamber; 210. Docking plate; 211. Reduction motor; 212. Second transmission disc; 213. Transmission belt; 214. Piston rod; 215. Jacking rod; 216. Rubber pad; 217. Taper block; 3. Transmission mechanism; 301. First double-shaft motor; 302. Rotating column; 303. Thread bar; 4. Lifting mechanism; 401. Second double-shaft motor; 402. T-shaped rotating rod; 403. Rotating pipe; 404. First bevel gear; 405. Second bevel gear; 406. Threaded rod. Detailed implementation manners

[0027] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0028] Please refer to Figures 1-8 , the following technical solutions are provided in this embodiment: As Figures 1-3 shown, a quartz boat flipping manipulator includes: a conveyor 1 and a U-shaped frame 101. A connection box 103 is fixedly installed on the upper surface of the U-shaped frame 101. An H-shaped plate 104 is fixedly installed on the upper surface of the connection box 103. Both the connection box 103 and the H-shaped plate 104 penetrate out of the conveyor 1. Connecting cylinders 105 are slidably installed at both ends of the outer surface of the H-shaped plate 104 along the length direction, that is, each group of connecting cylinders 105 can perform linear sliding along the transverse guide rail on the outer surface of the H-shaped plate. A connecting pipe 102 is communicated and installed on the upper surface of the connecting cylinder 105. Lifting mechanisms 4 are rotatably installed in both the connecting pipe 102 and the H-shaped plate 104. A flipping mechanism 2 is threadedly installed on the outer surface of the lifting mechanism 4 in the connecting pipe 102. The flipping mechanism 2 slides out of the connecting pipe 102 and is located at the inner end of the connecting pipe 102, so that the lifting mechanism 4 can synchronously drive the two flipping mechanisms 2 to perform lifting operations inside the connecting pipe 102. The conveyor 1 can convey the quartz boat, and further enable the flipping mechanism 2 driven to lift to be flush with the height of the quartz boat.

[0029] Driving blocks 109 are fixedly installed on the lower surfaces of the two connecting cylinders 105. The driving blocks 109 slide through the lower surface of the H-shaped plate 104 into the connection box 103 and are threadedly installed on the outer surface of a transmission mechanism 3. The transmission mechanism 3 is fixedly installed in the connection box 103, so that the transmission mechanism 3 can synchronously drive the two driving blocks 109 to drive the connecting cylinders 105 to slide synchronously outward or inward on the outer surface of the H-shaped plate 104. The sliding connecting cylinders 105 can drive the internal lifting mechanisms 4 and flipping mechanisms 2 to slide synchronously inward or outward, so as to drive the flipping mechanisms 2 to clamp the two ends of the quartz boat by sliding synchronously towards the center.

[0030] Through the design of the conveyor 1, H-shaped plate 104, connecting cylinder 105, connecting pipe 102, flipping mechanism 2, transmission mechanism 3 and lifting mechanism 4, when flipping the quartz boat, the quartz boat can be placed on the surface of the conveyor 1 and conveyed between the two groups of connecting pipes 102. Subsequently, the lifting mechanism 4 and the transmission mechanism 3 can be started. The started lifting mechanism 4 can drive the two groups of flipping mechanisms 2 to perform lifting operations until they stop after rising or falling to the same height as the quartz boat. The started transmission mechanism 3 can synchronously drive the two groups of transmission blocks 109 to drive the connecting cylinder 105 to slide inwards synchronously on the outer surface of the H-shaped plate 104. The inwards sliding connecting cylinder 105 can drive the internal lifting mechanism 4 and flipping mechanism 2 to slide inwards synchronously. Thus, the flipping mechanism 2 can perform crosswise sliding through the transmission mechanism 3 and the lifting mechanism 4, achieving the ability to quickly match the height and horizontal position of quartz boats of different specifications, such as quartz boats of different batches and sizes. It also avoids collision damage caused by the hard contact of the machinery and inaccurate clamping positions, thereby enhancing the compatibility of the equipment. Furthermore, the flipping mechanism 2 can be driven to slide towards the center to touch the two ends of the quartz boat. Subsequently, the flipping mechanism 2 can be started to adaptively bulge and dent according to the shapes of the two ends of the quartz boat to fit the surface of the two ends of the quartz boat for clamping operations. For quartz boats with irregular surfaces, such as structures with bosses or grooves, it can maximize the contact area and avoid slipping or local stress concentration caused by the mismatch of the contact surface of traditional rigid jaws. Therefore, it can reduce the shaking of the quartz boat during the flipping process, especially suitable for thin and fragile quartz boats, such as quartz boats for semiconductor wafers, reducing the risk of fragmentation. After clamping the quartz boat inside, the lifting mechanism 4 can be started again to drive the flipping mechanism 2 to lift the quartz boat. Then, the flipping mechanism 2 can be started again to flip the clamped quartz boat. After flipping the quartz boat, the lifting mechanism 4 can be started again to drive the flipping mechanism 2 to return to its original position. The quartz boat can be placed on the surface of the conveyor 1 again. Subsequently, the flipping mechanism 2 and the transmission mechanism 3 can be started again to slide towards both ends synchronously to release the clamping of the quartz boat, allowing it to be conveyed away, realizing seamless connection to the next process, that is, achieving full automation from conveying, positioning, clamping, flipping to resetting, without manual intervention and reducing production line bottlenecks.

[0031] such as Figure 4As shown in the figure, the transmission mechanism 3 includes a first dual-shaft motor 301, which is fixedly installed at the center inside the connection box 103. At one end of each output shaft at both ends of the first dual-shaft motor 301, a rotating column 302 is fixedly installed, and threaded strips 303 are fixedly installed on the outer surfaces of the two groups of rotating columns 302. The threaded strips 303 installed on the outer surfaces of the two groups of rotating columns 302 are respectively in a positive spiral shape and a reverse spiral shape. Transmission blocks 109 are threadedly installed on the outer surfaces of the two groups of threaded strips 303, so that the two groups of threaded strips 303 can drive the two groups of transmission blocks 109 to slide outward or inward synchronously through the first dual-shaft motor 301.

[0032] The other ends of the two groups of rotating columns 302 are respectively rotatably installed inside the support plate 106, and the support plate 106 is fixedly installed at both ends inside the connection box 103, so that the support plate 106 can provide a supporting force for the rotating columns 302 and the threaded strips 303 driven to rotate.

[0033] The lifting mechanism 4 includes a second dual-shaft motor 401, which is fixedly installed at the center inside the H-shaped plate 104. At one end of each output shaft at both ends of the second dual-shaft motor 401, a T-shaped rotating rod 402 is fixedly installed. Rotating tubes 403 are slidably installed on the outer surfaces of the two groups of T-shaped rotating rods 402. To improve stability, a T-shaped sliding groove adapted to the T-shaped rotating rod 402 is opened inside the rotating tube 403, and the T-shaped rotating rod 402 is slidably inserted into the T-shaped sliding groove. A rectangular through groove is opened on the side wall of the H-shaped plate 104, and a first bearing seat inserted into the rectangular through groove is fixed on the inner wall of the connecting cylinder 105. A first bearing is fixed inside the first bearing seat, and the rotating tube 403 is fixedly connected to the inner ring of the first bearing; at one end of each of the two groups of rotating tubes 403, a first bevel gear 404 is fixedly installed, and the first bevel gear 404 meshes with a second bevel gear 405. The second bevel gear 405 is fixedly installed at the lower surface of the threaded rod 406, and the threaded rod 406 is rotatably installed at the top inside the connecting pipe 102. To improve the stability of the threaded rod 406, second bearing seats are respectively fixed at both ends inside the connecting pipe 102, and second bearings are fixed inside the second bearing seats. The two ends of the threaded rod 406 respectively penetrate through the second bearings and are fixedly connected to the inner rings of the second bearings. A turnover mechanism 2 is threadedly installed on the outer surface of the threaded rod 406, so that the two groups of threaded rods 406 can drive the two groups of turnover mechanisms 2 to perform lifting operations through a single second dual-shaft motor 401. The first bevel gear 404 and the second bevel gear 405 rotate inside the connecting cylinder 105.

[0034] The rotating tube 403 at one end of the first bevel gear 404 rotates inside the L-shaped plate 107 at the same time, and the other end of the L-shaped plate 107 is rotatably installed on the outer surface of the rotating rod of the second bevel gear 405. The outer surface of the threaded rod 406 at one end of the second bevel gear 405 rotates inside the limiting ring 108 at the same time, and the limiting ring 108 is also fixedly installed inside the connecting cylinder 105.

[0035] Through the design of the first dual-axis motor 301, threaded bar 303, second dual-axis motor 401, T-shaped rotating rod 402, rotating tube 403, first bevel gear 404, second bevel gear 405 and threaded rod 406, when the quartz boat is flipped, the quartz boat can be placed on the conveyor 1, and the conveyor 1 can transport the quartz boat towards the U-shaped frame 101 at a constant speed. When the quartz boat approaches the target position under the transportation of the conveyor 1, the second dual-axis motor 401 in the H-shaped plate 104 is started first to drive the T-shaped rotating rods 402 at both ends to rotate. The T-shaped rotating rod 402 drives the first bevel gear 404 to rotate through the rotating tube 403 sleeved on the outer surface. The rotating first bevel gear 404 can drive the second bevel gear 405 in a meshing manner to drive the threaded rod 406 to rotate in the connecting tube 102. The flipping mechanism 2 threadedly installed on the outer surface of the threaded rod 406 can be driven to perform vertical lifting. At this time, the L-shaped plate 107 and the limiting ring 108 respectively restrict the radial runout of the rotating tube 403 and the threaded rod 406 through the bearing structure to ensure the meshing accuracy of the bevel gear pair. When the flipping mechanism 2 is flush with the height of the quartz boat, the second dual-axis motor 401 can stop to complete the height positioning; Subsequently, the first dual-axis motor 301 can be started to drive the rotating columns 302 at both ends to rotate synchronously. The threaded bars 303 on the outer surfaces of the two groups of rotating columns 302 are respectively forward and reverse. Furthermore, the two threaded bars 303 can respectively drive the transmission blocks 109 on the outer surfaces to slide inwards along the axial direction of the rotating columns 302 under the threaded drive. Furthermore, the transmission blocks 109 can drive the two connecting cylinders 105 to translate inwards on the outer surface of the H-shaped plate 104. During this process, the driven connecting tube 102 will push the rotating tube 403 to slide on the outer surface of the T-shaped rotating rod 402 through the L-shaped plate 107 until the flipping mechanism 2 in the connecting cylinder 105 touches the two ends of the quartz boat and the pressure sensing end in the flipping mechanism 2 can receive the feedback signal and stop the first dual-axis motor 301. During this process, the support plate 106 supports the rotating column 302 through the bearing to offset the radial force to avoid bending deformation, that is, the crosswise sliding operation of driving the flipping mechanism 2 is realized. First, the second dual-axis motor 401 drives the flipping mechanism 2 to perform vertical lifting and is precisely flush with the height of the quartz boat. Then, the first dual-axis motor 301 drives the transmission block 109 to make the flipping mechanism 2 slide horizontally inwards to achieve the precise operation of "first height positioning and then horizontal positioning". This step-by-step positioning method can quickly adapt to quartz boats of different heights and sizes. Whether it is the height difference or the horizontal position deviation, precise alignment can be achieved through the automatic adjustment of the mechanical structure, avoiding the collision and damage of the quartz boat caused by positioning deviation, and greatly improving the compatibility of the equipment with quartz boats of different specifications.

[0036] Such as Figures 5-8As shown in the figure, the flipping mechanism 2 includes a connecting block 201. The connecting block 201 is slidably installed in the connecting pipe 102 and simultaneously threadedly installed on the outer surface of the threaded rod 406. One end of the connecting block 201 slides out from the inner end of the connecting pipe 102, and a tapered block 217 is fixedly installed at the end of the connecting block 201 that slides out of the connecting pipe 102. A first transmission disk 202 is rotatably installed in the tapered block 217. One end of the first transmission disk 202 is fixedly installed with a connecting disk 203. A plurality of piston chambers 209 are formed at one end of the connecting disk 203. A piston rod 214 is slidably installed in each of the plurality of piston chambers 209. One end of the piston rod 214 is fixedly installed with a pressing rod 215. The pressing rod 215 penetrates out of the piston chamber 209 and a rubber pad 216 is fixedly installed at the other end.

[0037] A pressure-receiving disk 208 is slidably installed horizontally in the connecting disk 203. One end of the pressure-receiving disk 208 is in contact and communicated with an annular air pipe 204. The other end of the annular air pipe 204 is fixedly installed in the connecting disk 203, and an air outlet is provided at the other end of the annular air pipe 204. Each air outlet is communicated with each piston chamber 209. The air inlet of the annular air pipe 204 penetrates out from the upper end of the outer surface of the connecting disk 203 and is connected and installed with the air outlet of an air pump 206. The air pump 206 is fixedly installed on the upper surface of a mounting plate 205. The mounting plate 205 is fixedly installed at the upper end of the outer surface of the tapered block 217.

[0038] The air pump 206 can inject air into the plurality of piston chambers 209 through the annular air pipe 204 to push the plurality of piston rods 214 to slide towards one end in the piston chambers 209. The other end of the annular air pipe 204 can push and squeeze the pressure-receiving disk 208 through air pressure to press against one end of a pressure sensor 207. The pressure sensor 207 is fixedly installed in the first transmission disk 202 in an embedded manner. The signal transmitting end of the pressure sensor 207 is connected to the signal receiving end of a controller. The control output end of the controller is electrically connected to the electric control ends of the air pump 206 and a first double-shaft motor 301. The electric control end of a reduction motor 211 is electrically connected to the control output end of the controller.

[0039] A transmission belt 213 is sleeved on the outer surface of the first transmission disk 202. The other end of the transmission belt 213 slides out of the tapered block 217 and is sleeved on the outer surface of a second transmission disk 212. The second transmission disk 212 is fixedly installed at one end of the output shaft of a reduction motor 211. The reduction motor 211 is fixedly installed in a docking plate 210. The docking plate 210 is fixedly installed at one end of the outer surface of the tapered block 217.

[0040] Among them, the models of the pressure sensor 207 and the controller are GML669 and S7-1200 respectively.

[0041] Through the design of the connecting block 201, pressure sensor 207, connecting plate 203, piston chamber 209, piston column 214, top pressure rod 215, rubber pad 216, pressure-receiving plate 208, air pump 206 and reduction motor 211, when the flipping mechanism 2 performs lifting and horizontal sliding actions, after the piston column 214 sliding in the piston chamber 209 of the internal connecting plate 203 touches both ends of the quartz boat through the top pressure rod 215 and the rubber pad 216, the rubber pad 216 can push the top pressure rod 215 to drive the piston column 214 to move backward in the piston chamber 209. And through the backward movement of the piston column 214 in the piston chamber 209, gas can be injected into the annular air pipe 204. And the injected gas can push the pressure-receiving plate 208 to press against one end of the pressure sensor 207. And the pressed pressure sensor 207 can convert the pressure signal into an electrical signal in real time and transmit it to the controller. And the program built in the controller immediately compares the current pressure value with the preset clamping force threshold. Until the current pressure value reaches the set threshold, the controller controls the first biaxial motor 301 to stop pushing the connecting pipe 102. Subsequently, the controller can start the air pump 206 to inject high-pressure air into the annular air pipe 204. Furthermore, the annular air pipe 204 can evenly flush the air into each piston chamber 209 to push multiple piston columns 214. And the multiple pushed piston columns 214 can drive multiple top pressure rods 215 and rubber pads 216 to extend and touch different parts of the quartz boat. And during the touching process, they will adaptively extend and touch according to the shape of the outer surface of the quartz boat. And the started air pump 206 will continuously inject high-pressure gas into the annular air pipe 204 and the piston chamber 209. And the rubber pad 216 touching the outer surface of the quartz boat can increase the top pressure by staying at the current position in the piston chamber 209 through the piston column 214. And the stopped pushed piston column 214 can make the high-pressure air stay in the annular air pipe 204 and push against one end of the pressure-receiving plate 208. And the pressure-receiving plate 208 can press the pressure of the high-pressure gas against one end of the pressure sensor 207 to make it detected until the pressure value reaches within the preset threshold range and the fluctuation amplitude is less than 0.When the air pressure reaches 0.5 MPa and the duration reaches the set duration of 2 seconds, the controller can determine that the quartz boat has been stably clamped and then close the air pump 206 to stop injecting high-pressure air into the annular air pipe 204. Subsequently, it can start the second biaxial motor 401 again to drive the connecting block 201 to lift, and then the connecting block 201 can drive the quartz boat clamped between the connecting disks 203 to perform a lifting operation. Subsequently, the controller can start the reduction motor 211 to drive the second transmission disk 212 to rotate, and the rotating second transmission disk 212 can drive the transmission belt 213 sleeved on the outer surface to drive the first transmission disk 202 to rotate. The first transmission disk 202 can drive the connecting disk 203 to rotate, and then drive the quartz boat clamped between them to perform a flipping operation. During the flipping process, the controller will monitor the number of rotation turns of the reduction motor 211 in real time and accurately convert it into the flipping angle of the quartz boat. When the preset flipping angle, such as 180°, is reached, the controller immediately sends a braking instruction to the reduction motor 211 to turn off the reduction motor 211. After the flipping is completed, the second biaxial motor 401 and the first biaxial motor 301 can be started again. The second biaxial motor 401 can drive the connecting disk 203 to descend back to the original position, and the quartz boat can be placed on the upper end of the conveyor 1. The started first biaxial motor 301 can drive the two groups of connecting pipes 102 to slide outwards synchronously, so as to drive the rubber pad 216 in the connecting disk 203 to disengage from the clamping of the quartz boat. Subsequently, the controller can control the air pump 206 to extract the air in the annular air pipe 204, so that the high-pressure gas in the annular air pipe 204 and the piston chamber 209 is quickly discharged. The piston column 214 that loses air pressure and is sucked of air can retract inward along the piston chamber 209 to return to the original position. The flipped quartz boat can be conveyed by the conveyor 1 to the next process to achieve seamless connection. Among them, by pushing multiple piston columns 214 with air pressure and cooperating with the rubber pad 216, it can adaptively extend and touch according to the shape of the outer surface of the quartz boat. The shapes of quartz boats are diverse, and the surfaces may be uneven. This adaptive clamping method can make the rubber pad 216 closely fit the surface of the quartz boat, ensure that uniform pressure is applied to each part, and avoid damage to the quartz boat caused by local stress concentration. This design can greatly improve the integrity rate of the quartz boat and reduce product loss.

[0042] Among them, the dynamic adjustment of the clamping force satisfies the following equation:

[0043] Where: F(t) is the real-time clamping force (unit: N); k is the safety factor, which is set according to the material and structure of the quartz boat (value range: 0.8 - 1.2); P is the air pressure output by the air pump (unit: Pa); A is the effective cross-sectional area of a single piston column (unit: m²); S(t) is the real-time contact area (unit: m²), calculated through the deformation feedback of the pressure sensor and the rubber pad; S max is the contact area corresponding to the maximum stroke of the piston column (unit: m²); τ is the system response time constant (unit: s), set according to the dynamic characteristics of the mechanical structure; t is the time of the clamping process (unit: s).

[0044] Example: When there are irregular protrusions on the surface of the quartz boat, the contact area S(t) decreases, and the controller automatically reduces the air pressure P according to the equation, so that the clamping force F(t) decreases to avoid local overpressure; when the contact area S(t) increases, P is gradually increased to enhance the clamping stability. For example, set k = 1.0, A = 0.005 m², S max = 0.02 m², τ = 0.5 s. When S(t) = 0.01 m² and t = 1 s: F(t) ≈ 1.0·P·0.005·(0.01 / 0.02)·(1 - e -2 ) ≈ 0.00216P, and by adjusting P, the F(t) is accurately matched to the preset safety threshold.

[0045] Technical effects: Dynamic adaptability: The clamping force is adjusted in real time according to the contact area S(t) to avoid local stress concentration caused by irregular shapes; Shock protection: The clamping force is gradually loaded through the time constant τ to reduce mechanical shock; Precise control: Combining the air pressure P and the safety factor k to ensure that the clamping force is always within the bearing range of the quartz boat; Improved compatibility: Applicable to quartz boats of different sizes and shapes, and automatically adapts the clamping parameters through the equation.

[0046] Working principle process: 1. Contact detection: After the rubber pad contacts the quartz boat, the pressure sensor immediately feeds back the contact area S(t); 2. Equation calculation: The controller calculates the target clamping force F(t) according to S(t) and the preset parameters; 3. Air pressure adjustment: Dynamically adjust the output P of the air pump to make the actual clamping force approach F(t); 4. Closed-loop feedback: Continuously monitor the data of the pressure sensor and finely adjust P to maintain the stability of F(t); 5. Safety locking: When F(t) reaches the preset threshold and stabilizes, stop the adjustment to complete the clamping.

[0047] This equation combines the contact area, time response, and air pressure control, breaking through the limitations of the traditional fixed threshold of clamping force and achieving non-linear adaptive adjustment. By introducing an exponential decay term , the problem of instantaneous impact during clamping is solved. At the same time, the use of S(t) / S max dynamically corrects the clamping force distribution.

[0048] Summarize and sort out the working steps of this solution according to the above technical solution: When the quartz boat is flipped, it can be transported to between the two connecting pipes 102 by placing it on the surface of the conveyor 1. Then, the second double-shaft motor 401 can be started to drive the T-shaped rotating rods 402 at both ends to rotate. The T-shaped rotating rods 402 drive the first bevel gears 404 to rotate through the rotating pipes 403 of the sliding sleeves on the outer surface. The rotating first bevel gears 404 can mesh and drive the second bevel gears 405 to drive the threaded rods 406 to rotate in the connecting pipes 102. The connecting blocks 201 threadedly installed on the outer surface of the threaded rods 406 can be driven to move vertically. At this time, the L-shaped plates 107 and the limiting rings 108 respectively restrict the radial runout of the rotating pipes 403 and the threaded rods 406 through the bearing structure, ensuring the meshing accuracy of the bevel gear pair. When the connecting blocks 201 are driven to be level with the height of the quartz boat, the second double-shaft motor 401 can stop, and the connecting blocks 201 can drive the connecting disks 203 fixedly installed at one end to be level with the height position of the quartz boat, completing the height positioning; Subsequently, the first double-shaft motor 301 can be started to drive the rotating columns 302 at both ends to rotate synchronously. The thread strips 303 on the outer surfaces of the two rotating columns 302 are respectively forward and reverse. Therefore, the two thread strips 303 can respectively drive the transmission blocks 109 on the outer surfaces to slide synchronously inward along the axial direction of the rotating columns 302 under the thread drive. As a result, the transmission blocks 109 can drive the two connecting cylinders 105 and the connecting pipes 102 to move inward on the outer surface of the H-shaped plate 104. During this process, the driven connecting pipes 102 will push the rotating pipes 403 to slide on the outer surface of the T-shaped rotating rods 402 through the L-shaped plates 107 together. Then, the two connecting pipes 102 can drive the piston columns 214 sliding in the piston chambers 209 of the connecting disks 203 to press against both ends of the quartz boat through the pressing rods 215 and the rubber pads 216. The rubber pads 216 can push the pressing rods 215 to drive the piston columns 214 to move backward in the piston chambers 209. By the backward movement of the piston columns 214 in the piston chambers 209, gas can be injected into the annular air pipes 204. The injected gas can push the pressure-receiving disks 208 to press against one end of the pressure sensors 207. The pressurized pressure sensors 207 can immediately convert the pressure signals into electrical signals and transmit them to the controller. The program built into the controller immediately compares the current pressure value with the preset clamping force threshold until the current pressure value reaches the set threshold, and then the controller controls the first double-shaft motor 301 to stop pushing the connecting pipes 102; Subsequently, the controller can start the air pump 206 to inject high-pressure air into the annular air pipe 204. Then, the annular air pipe 204 can evenly flush the air into each piston chamber 209 to push multiple piston columns 214. The multiple pushed piston columns 214 can drive multiple pressing rods 215 and rubber pads 216 to extend therefrom and touch different parts of the quartz boat. During the touching process, they will adaptively extend and touch according to the shape of the outer surface of the quartz boat. The started air pump 206 will continuously inject high-pressure gas into the annular air pipe 204 and the piston chamber 209. The rubber pad 216 touching the outer surface of the quartz boat can increase the pressing force by staying at the current position in the piston chamber 209 through the piston column 214. The stopped pushed piston column 214 can make the high-pressure air stay in the annular air pipe 204 and push one end of the pressure receiving disc 208. The pressure receiving disc 208 can press the pressure of the high-pressure gas against one end of the pressure sensor 207 to be detected. Until the pressure value reaches within the preset threshold range, the fluctuation amplitude is less than 0.05 MPa, and the duration reaches the set duration of 2 seconds, the controller can determine that the quartz boat has been stably clamped and close the air pump 206 to stop injecting high-pressure air into the annular air pipe 204. Subsequently, the second double-shaft motor 401 can be started again to drive the connecting block 201 to lift. Then, the connecting block 201 can drive the clamped quartz boat between the connecting discs 203 to perform a lifting operation. Subsequently, the controller can start the reduction motor 211 to drive the second transmission disc 212 to rotate. The rotating second transmission disc 212 then drives the transmission belt 213 sleeved on the outer surface to drive the first transmission disc 202 to rotate. The first transmission disc 202 can drive the connecting disc 203 to rotate, and then drive the clamped quartz boat to perform a flipping operation. During the flipping process, the controller will real-time monitor the number of rotation turns of the reduction motor 211 and accurately convert it into the flipping angle of the quartz boat. When reaching the preset flipping angle such as 180°, the controller immediately sends a braking instruction to the reduction motor 211 to turn off the reduction motor 211. After the flipping is completed, the second double-shaft motor 401 and the first double-shaft motor 301 can be started again. The second double-shaft motor 401 can drive the connecting disc 203 to descend back to the original position, and the quartz boat can be placed on the upper end of the conveyor 1. The started first double-shaft motor 301 can drive the two connecting pipes 102 to slide outward synchronously, thereby driving the rubber pad 216 in the connecting disc 203 to release the clamping of the quartz boat. Subsequently, the controller can control the air pump 206 to extract the air in the annular air pipe 204, so that the high-pressure gas in the annular air pipe 204 and the piston chamber 209 is quickly discharged. The piston column 214 that loses air pressure and is sucked in can retract inward along the piston chamber 209 to return to the original position. The flipped quartz boat can be conveyed by the conveyor 1 to the next process to achieve seamless connection.

[0049] In summary, during the process of clamping the quartz boat by the quartz boat flipping manipulator, it can adaptively extend and touch the clamping according to the shape of the outer surface of the quartz boat, enabling it to achieve a tight fitting clamping operation. Moreover, during the pressing process, it can automatically detect the pressing force, prevent the quartz boat from being damaged by excessive pressure, ensure that the surface of the quartz boat remains intact during the entire clamping process, improve the product yield rate, and reduce the production cost.

[0050] Parts not involved in the present invention are the same as or can be implemented using the prior art. Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A quartz boat flipping manipulator, characterized in that Including: A conveyor (1) and a U-shaped frame (101), a connection box (103) is fixedly installed on the upper surface of the U-shaped frame (101), an H-shaped plate (104) is fixedly installed on the upper surface of the connection box (103), both the connection box (103) and the H-shaped plate (104) penetrate out of the conveyor (1). At both ends of the outer surface of the H-shaped plate (104) along the length direction, connection cylinders (105) are respectively slidably installed, that is, each group of connection cylinders (105) can perform linear sliding along the transverse guide rail on the outer surface of the H-shaped plate. A connection pipe (102) is communicated and installed on the upper surface of the connection cylinder (105). A lifting mechanism (4) is rotatably installed in both the connection pipe (102) and the H-shaped plate (104). And a turning mechanism (2) is threadedly installed on the outer surface of the lifting mechanism (4) in the connection pipe (102). The turning mechanism (2) slides out of the connection pipe (102) and is located at the inner end of the connection pipe (102), so that the lifting mechanism (4) can synchronously drive the two turning mechanisms (2) to perform lifting operations inside the connection pipe (102). The conveyor (1) can convey the quartz boat, and then can make the turning mechanism (2) driven to lift be flush with the height of the quartz boat.

2. The quartz boat flipping manipulator according to claim 1, characterized in that: Driving blocks (109) are fixedly installed on the lower surfaces of both groups of connection cylinders (105). The driving blocks (109) slide from the lower surface of the H-shaped plate (104) into the connection box (103) and are threadedly installed on the outer surface of the transmission mechanism (3). The transmission mechanism (3) is fixedly installed in the connection box (103), so that the transmission mechanism (3) can synchronously drive the two driving blocks (109) to drive the connection cylinders (105) to slide outward or inward synchronously on the outer surface of the H-shaped plate (104). And the sliding connection cylinders (105) can drive the internal lifting mechanism (4) and turning mechanism (2) to slide inward or outward synchronously, so as to drive the turning mechanism (2) to clamp the two ends of the quartz boat by sliding towards the center synchronously.

3. The quartz boat flipping manipulator according to claim 2, characterized in that: The transmission mechanism (3) includes a first double-shaft motor (301). The first double-shaft motor (301) is fixedly installed at the center in the connection box (103). Rotating columns (302) are fixedly installed at one ends of the output shafts at both ends of the first double-shaft motor (301). And threaded strips (303) are fixedly installed on the outer surfaces of both groups of rotating columns (302). The threaded strips (303) installed on the outer surfaces of the two groups of rotating columns (302) are respectively in a positive spiral shape and a reverse spiral shape. Driving blocks (109) are threadedly installed on the outer surfaces of both groups of threaded strips (303), so that the two groups of threaded strips (303) can drive the two driving blocks (109) to slide outward or inward synchronously through the first double-shaft motor (301).

4. A quartz boat flipping manipulator according to claim 3, characterized in that: The other ends of the two sets of the rotating columns (302) are respectively rotatably installed in the support plate (106), and the support plate (106) is fixedly installed at both ends inside the connection box (103), so that the support plate (106) can provide a supporting force for the driven rotating columns (302) and the threaded bars (303).

5. The quartz boat flipping manipulator according to claim 4, wherein: The lifting mechanism (4) includes a second double-shaft motor (401). The second double-shaft motor (401) is fixedly installed at the center inside the H-shaped plate (104). One end of the output shafts at both ends of the second double-shaft motor (401) is fixedly installed with a T-shaped rotating rod (402). The outer surfaces of the two sets of T-shaped rotating rods (402) are slidably installed with rotating tubes (403). A T-shaped sliding groove adapted to the T-shaped rotating rod (402) is formed in the rotating tube (403). The T-shaped rotating rod (402) is slidably inserted into the T-shaped sliding groove. A rectangular through groove is formed in the side wall of the H-shaped plate (104). A first bearing seat inserted into the rectangular through groove is fixed on the inner wall of the connecting cylinder (105). A first bearing is fixed in the first bearing seat. The rotating tube (403) is fixedly connected to the inner ring of the first bearing. One end of each of the two sets of rotating tubes (403) is fixedly installed with a first bevel gear (404). The first bevel gear (404) meshes with a second bevel gear (405). The second bevel gear (405) is fixedly installed on the lower surface of the threaded rod (406). The threaded rod (406) is rotatably installed at the inner top of the connecting pipe (102). Second bearing seats are respectively fixed at both ends inside the connecting pipe (102). A second bearing is fixed in the second bearing seat. The two ends of the threaded rod (406) respectively penetrate through the second bearing and are fixedly connected to the inner ring of the second bearing. A turning mechanism (2) is threadedly installed on the outer surface of the threaded rod (406). In this way, the two sets of threaded rods (406) can drive the two sets of turning mechanisms (2) to perform lifting operations through a set of second double-shaft motors (401). The first bevel gear (404) and the second bevel gear (405) rotate inside the connecting cylinder (105).

6. The quartz boat turning manipulator according to claim 5, characterized in that: The rotating tube (403) at one end of the first bevel gear (404) rotates inside the L-shaped plate (107) at the same time, and the other end of the L-shaped plate (107) is rotatably installed on the outer surface of the rotating rod of the second bevel gear (405). The outer surface of the threaded rod (406) at one end of the second bevel gear (405) rotates inside the limiting ring (108) at the same time. The limiting ring (108) is also fixedly installed inside the connecting cylinder (105).

7. A quartz boat flipping manipulator according to claim 6, characterized in that: The flipping mechanism (2) includes a connecting block (201). The connecting block (201) is slidably installed in the connecting pipe (102) and simultaneously threadedly installed on the outer surface of the threaded rod (406). One end of the connecting block (201) slides out from the inner end of the connecting pipe (102). And a conical block (217) is fixedly installed at one end of the connecting block (201) that slides out of the connecting pipe (102). A first transmission disk (202) is rotatably installed in the conical block (217). A connecting disk (203) is fixedly installed at one end of the first transmission disk (202). Multiple piston chambers (209) are formed at one end of the connecting disk (203). A piston column (214) is slidably installed in each of the multiple piston chambers (209). A top pressure rod (215) is fixedly installed at one end of the piston column (214). The top pressure rod (215) penetrates out of the piston chamber (209) and a rubber pad (216) is fixedly installed at the other end.

8. A quartz boat flipping manipulator according to claim 7, characterized in that: A pressure-receiving disk (208) is horizontally slidably installed in the connecting disk (203). One end of the pressure-receiving disk (208) is in contact and communication with an annular air pipe (204). The other end of the annular air pipe (204) is fixedly installed in the connecting disk (203). And an air outlet is provided at the other end of the annular air pipe (204). Each air outlet is in communication with each piston chamber (209). The air inlet of the annular air pipe (204) penetrates out from the upper end of the outer surface of the connecting disk (203) and is connected and installed with the air outlet of an air pump (206). The air pump (206) is fixedly installed on the upper surface of a mounting plate (205). The mounting plate (205) is fixedly installed at the upper end of the outer surface of the conical block (217).

9. A quartz boat flipping manipulator according to claim 8, characterized in that: The air pump (206) can inject air into the multiple piston chambers (209) through the annular air pipe (204) to push the multiple piston columns (214) to slide towards one end in the piston chambers (209). The other end of the annular air pipe (204) can push and press the pressure-receiving disk (208) to press against one end of a pressure sensor (207) through air pressure. The pressure sensor (207) is fixedly installed in the first transmission disk (202) in an embedded manner. The signal transmitting end of the pressure sensor (207) is connected to the signal receiving end of a controller. The control output end of the controller is electrically connected to the electric control ends of the air pump (206) and a first double-shaft motor (301).

10. A quartz boat flipping manipulator according to claim 9, characterized in that: A transmission belt (213) is sleeved on the outer surface of the first transmission disk (202). The other end of the transmission belt (213) slides out of the conical block (217) and is sleeved on the outer surface of a second transmission disk (212). The second transmission disk (212) is fixedly installed at one end of the output shaft of a reduction motor (211). The reduction motor (211) is fixedly installed in a docking plate (210). The docking plate (210) is fixedly installed at one end of the outer surface of the conical block (217). The electric control end of the reduction motor (211) is electrically connected to the control output end of the controller.

Images