Automatic feeding and discharging device of film thickness measuring instrument

Abstract

The invention discloses an automatic feeding and discharging device of a film thickness measuring instrument, which can realize automatic feeding and automatic movement detection of a sample. The automatic feeding and discharging device of the film thickness measuring instrument comprises a mounting bracket, a clamping device for fixedly mounting the mounting bracket on the film thickness measuring instrument is arranged on the mounting bracket; a first sliding block capable of horizontally moving is arranged on the mounting bracket; a second sliding block is arranged on the first sliding block; a rotating groove is formed in the second sliding block; a rotating suction cup is rotationally mounted in the rotating groove; turntables are arranged on the two sides of the bracket; a first vertical telescopic device is arranged on the turntable; a swing arm is arranged at the telescopic end of the first vertical telescopic device; a second vertical telescopic device is arranged at one end of the swing arm; and a detection piece adsorption device is arranged at the lower end of the second vertical telescopic device. By adopting the automatic feeding and discharging device of the film thickness measuring instrument, the detection efficiency can be improved, the detection operation is simplified, and the detection accuracy is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of film thickness measuring instruments, in particular to an automatic feeding and discharging device for a film thickness measuring instrument. Background Art

[0002] The thickness of a thin film is very crucial. Especially when manufacturing large-scale integrated circuits, the thickness of the thin film must be strictly controlled; it directly affects many properties of the material, such as light transmittance, magnetism, and thermal conductivity. Therefore, it is necessary to accurately measure the thickness of the thin film; specific measurement methods and instruments are required during the process of measuring the thin film thickness to ensure that the thickness of the thin film meets strict industrial standards.

[0003] A film thickness measuring instrument is a commonly used device for measuring film thickness. In the process of measuring the thickness of a device film with existing film thickness measuring instruments, generally, a sample is placed on a detection table by hand for detection. When placing the sample, the staff needs to wear gloves. During the detection process, in order to ensure the accuracy of the detection, the staff needs to continuously move the sample to complete the detection of the film thickness at various positions on the sample. Therefore, the operation is complex, the detection efficiency is low; and the accuracy is relatively low. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide an automatic feeding and discharging device for a film thickness measuring instrument that can achieve automatic feeding, realize automatic movement detection of the sample, simplify the detection operation, and improve the detection accuracy.

[0005] The technical solution adopted by the present invention to solve its technical problems is: an automatic feeding and discharging device for a film thickness measuring instrument, including a mounting bracket; a clamping device for fixedly mounting the mounting bracket on the film thickness measuring instrument is provided on the mounting bracket;

[0006] Two parallel horizontal crossbeams are provided on the mounting bracket; a first sliding block is provided on the horizontal crossbeam; a horizontal driving device for driving the first sliding block to move back and forth on the horizontal crossbeam is provided on the horizontal crossbeam;

[0007] A transverse first sliding groove is provided on the first sliding block; a second sliding block is slidably mounted in the first sliding groove; a transverse driving device for driving the second sliding block to slide in the first sliding groove is provided on the first sliding block;

[0008] A rotating groove is provided on the second sliding block; a rotating suction cup is rotatably mounted in the rotating groove;

[0009] Rotary discs are provided on both sides of the bracket; a first vertical telescopic device is provided on the rotary disc; a swing arm is provided at the telescopic end of the first vertical telescopic device; one end of the swing arm is fixedly connected to the vertical telescopic device, and the other end is provided with a second vertical telescopic device; a detection piece adsorption device is provided at the lower end of the second vertical telescopic device.

[0010] Preferably, the clamping device includes tie rods on both sides of the mounting bracket; the tie rods pass through the mounting bracket; one end of the tie rod is provided with a limit head; the other end is provided with a locking sleeve.

[0011] A spring is arranged between the locking sleeve and the mounting bracket; the spring is sleeved on the tie rod; the locking sleeve is in threaded fit with one end of the tie rod.

[0012] Preferably, the horizontal driving device adopts a lead screw drive; a horizontal chute is arranged on the horizontal cross beam; a first lead screw is arranged in the horizontal chute; a first driving motor for driving the first lead screw to rotate is arranged on the mounting bracket.

[0013] The lower surface of the first slider is provided with a first convex block matching the horizontal chute; the first convex block is slidably installed in the horizontal chute; the first lead screw passes through the first convex block and is in threaded fit with the first convex block.

[0014] Preferably, the transverse driving device adopts a lead screw drive; a first limiting block is arranged on one side of the second slider; a second limiting block is arranged on the other side.

[0015] A second chute matching the first limiting block is arranged on the side wall of one side of the first chute; a transverse through groove matching the second limiting block is arranged on the side wall of the other side.

[0016] A transverse second lead screw is arranged in the transverse through groove; a second driving motor for driving the second lead screw to rotate is arranged at one end of the first slider.

[0017] The second limiting block is slidably installed in the transverse through groove, and the second lead screw passes through the second limiting block and is in threaded fit with the second limiting block.

[0018] Preferably, a rotating shaft is arranged on one side of the rotating groove; a spiral is arranged on the rotating shaft; a gear matching the spiral on the rotating shaft is arranged on the outer surface of the lower end of the rotating suction cup.

[0019] A third driving motor for driving the rotating shaft to rotate is arranged on one side of the second slider.

[0020] An air permeable cavity is arranged at the bottom of the rotating suction cup; air permeable holes which are uniformly distributed and communicated with the air permeable cavity are arranged on the rotating suction cup; a ventilation hole is arranged on one side of the rotating groove, and a vacuum pump is arranged at one end of the ventilation hole.

[0021] Furthermore, an opening matching the third driving motor is arranged at one end of the first chute.

[0022] Preferably, the detecting element adsorbing device adopts a suction cup; or the detecting element adsorbing device includes a limiting cylinder.

[0023] A suction cup is slidably installed inside the limit cylinder; adsorption heads are evenly distributed below the suction cup; the telescopic end of the second vertical telescopic device extends into the limit cylinder; and the suction cup is connected to the telescopic end of the second vertical telescopic device.

[0024] Specifically, the adsorption head is detachably connected to the suction cup.

[0025] Specifically, both the first vertical telescopic device and the second vertical telescopic device adopt electric telescopic rods.

[0026] Furthermore, a 90° bayonet is provided on the lower surface of the mounting bracket.

[0027] The beneficial effects of the present invention are as follows: The automatic feeding and discharging device of the film thickness measuring instrument of the present invention has the following advantages:

[0028] The automatic feeding and discharging device of the film thickness measuring instrument of the present invention facilitates the automatic movement of the test sample during the detection process by providing two movable sliders and rotatable suction discs on the sliders, which is convenient for realizing the film thickness detection of each position of the test sample, improving the detection accuracy, and simplifying the operation.

[0029] The automatic feeding and discharging device of the film thickness measuring instrument of the present invention is provided with detection sample adsorption devices at both ends; therefore, the feeding and discharging of the test sample can be realized through the adsorption devices, thus avoiding the need for staff to wear gloves for placement, simplifying the operation, and improving the efficiency. Description of the Drawings

[0030] Figure 1 is a perspective view of the automatic feeding and discharging device of the film thickness measuring instrument in the embodiment of the present invention;

[0031] Figure 2 is a side view of the automatic feeding and discharging device of the film thickness measuring instrument in the embodiment of the present invention;

[0032] Figure 3 is a front view of the automatic feeding and discharging device of the film thickness measuring instrument in the embodiment of the present invention;

[0033] Figure 4 is an exploded view of the automatic feeding and discharging device of the film thickness measuring instrument in the embodiment of the present invention;

[0034] Figure 5 is Figure 3 the A-A cross-sectional view of

[0035] Figure 6 is Figure 5 the partial enlarged view of B in

[0036] Figure 7 is a perspective view of the first slider in the embodiment of the present invention;

[0037] Figure 8 is the three-dimensional view of the second slider in the embodiment of the present invention;

[0038] Figure 9 is the installation three-dimensional schematic diagram of the automatic feeding and discharging device of the film thickness measuring instrument in the embodiment of the present invention;

[0039] Figure 10 is the installation top view of the automatic feeding and discharging device of the film thickness measuring instrument in the embodiment of the present invention. Detailed implementation manners

[0040] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0041] As Figures 1 to 8 shown, the automatic feeding and discharging device of the film thickness measuring instrument described in the present invention includes an installation bracket 100; a clamping device for fixedly installing the installation bracket 100 on the film thickness measuring instrument 900 is provided on the installation bracket 100; the clamping device can adopt a clamp; in this embodiment, the clamping device includes tie rods 120 on both sides of the installation bracket 100; the tie rods 120 pass through the installation bracket 100; a limit head 121 is provided at one end of the tie rod 120; a locking sleeve 122 is provided at the other end;

[0042] A spring 123 is provided between the locking sleeve 122 and the installation bracket 100; the spring 123 is sleeved on the tie rod 120; the locking sleeve 122 is in threaded cooperation with one end of the tie rod 120.

[0043] Two parallel horizontal crossbeams 110 are provided on the installation bracket 100; a first sliding block 400 is provided on the horizontal crossbeam 110; a horizontal driving device for driving the first sliding block 400 to move back and forth on the horizontal crossbeam 110 is provided on the horizontal crossbeam 110.

[0044] The horizontal driving device can adopt a slide table. In this embodiment, the horizontal driving device adopts a screw drive; a horizontal chute 111 is provided on the horizontal crossbeam 110; a first lead screw 112 is provided in the horizontal chute 111; a first driving motor 113 for driving the first lead screw 112 to rotate is provided on the installation bracket 100;

[0045] A first convex block 440 matching the horizontal chute 111 is provided on the lower surface of the first slider 400; the first convex block 440 is slidably installed in the horizontal chute 111; the first lead screw 112 passes through the first convex block 440 and is in threaded cooperation with the first convex block 440.

[0046] A first sliding block 400 is provided with a transverse first sliding groove 410; a second sliding block 500 is slidably installed in the first sliding groove 410; the first sliding block 400 is provided with a transverse driving device for driving the second sliding block 500 to slide in the first sliding groove 410;

[0047] The transverse driving device can adopt a hydraulic telescopic cylinder. In this embodiment, the transverse driving device adopts a lead screw drive;

[0048] One side of the second sliding block 500 is provided with a first limiting block 540; the other side is provided with a second limiting block 550;

[0049] On one side wall of the first sliding groove 410, a second sliding groove 420 matching the first limiting block 540 is provided; on the other side wall, a transverse through groove 430 matching the second limiting block 550 is provided;

[0050] A transverse second lead screw 431 is provided in the transverse through groove 430; one end of the first sliding block 400 is provided with a second driving motor 432 for driving the second lead screw 431 to rotate;

[0051] The second limiting block 550 is slidably installed in the transverse through groove 430, and the second lead screw 431 passes through the second limiting block 550 and is in threaded cooperation with the second limiting block 550.

[0052] The second sliding block 500 is provided with a rotating groove 510; a rotating suction cup 600 is rotatably installed in the rotating groove 510; specifically, one side of the rotating groove 510 is provided with a rotating shaft 520; a spiral is provided on the rotating shaft 520; a gear matching the spiral on the rotating shaft 520 is provided on the outer surface of the lower end of the rotating suction cup 600;

[0053] One side of the second sliding block 500 is provided with a third driving motor 530 for driving the rotating shaft 520 to rotate; a ventilation cavity 630 is provided at the bottom of the rotating suction cup 600; ventilation holes 620 which are evenly distributed and communicated with the ventilation cavity 630 are provided on the rotating suction cup 600; a ventilation hole is provided on one side of the rotating groove 510, and one end of the ventilation hole is provided with a vacuum pump 560. An opening 411 matching the third driving motor 530 is provided at one end of the first sliding groove 410.

[0054] On both sides of the bracket 100, there are turntables 200 provided; on the turntables 200, there are first vertical telescopic devices 300 provided; at the telescopic end of the first vertical telescopic device 300, there is a swing arm 700 provided; one end of the swing arm 700 is fixedly connected to the vertical telescopic device 300, and the other end is provided with a second vertical telescopic device 800; at the lower end of the second vertical telescopic device 800, there is a test piece adsorption device. The test piece adsorption device uses a suction cup; or the test piece adsorption device includes a limiting cylinder 810;

[0055] A suction cup 820 is slidably installed in the limiting cylinder 810; below the suction cup 820, there are evenly distributed adsorption heads 830 provided; the telescopic end of the second vertical telescopic device 800 extends into the limiting cylinder 810; and the suction cup 820 is connected to the telescopic end of the second vertical telescopic device 800. The adsorption head 830 is detachably connected to the suction cup 820.

[0056] The first vertical telescopic device 300 and the second vertical telescopic device 800 can use hydraulic cylinders. In this embodiment, the first vertical telescopic device 300 and the second vertical telescopic device 800 both use electric telescopic rods.

[0057] In the specific application process, such as Figure 9 、 10 , the automatic feeding and discharging device of the film thickness measuring instrument is installed on the film thickness measuring instrument.

[0058] The suction cup 820 in the limiting cylinder 810 on the right side of the installation bracket 100 is used to suck up the test sample to be tested; then the first driving motor 113 and the second driving motor 432 are controlled to move the rotating suction cup 600 on the second slider 500 to directly below the suction cup 820. Then the test sample is placed on the rotating suction cup 600, and at this time, the vacuum pump 560 is started; so that the test sample is adsorbed on the rotating suction cup 600.

[0059] Then the first driving motor 113 and the second driving motor 432 are controlled to move the rotating suction cup 600 on the second slider 500 to below the detection head of the film thickness measuring instrument. And by controlling the first driving motor 113 and the second driving motor 432, the second slider 500 is moved; and by controlling the third driving motor, the rotating suction cup 600 is rotated, so that the detection head can detect any position on the test sample, thereby improving the detection accuracy.

[0060] After the detection is completed, control the first drive motor 113 and the second drive motor 432 to move the rotating suction cup 600 on the second slider 500 to directly below the suction cup 820 in the left limiting cylinder 810. Lift the test sample by the suction cup 820 on the left. Then drive the swing arm 700 to rotate by driving the turntable 200, so as to remove the test sample, and then control the first drive motor 113 and the second drive motor 432 to move away from below the suction cup 820 in the left limiting cylinder 810.

[0061] In summary, the automatic feeding and discharging device of the film thickness measuring instrument according to the present invention is provided with two movable sliders and a rotatable suction disc on the slider, so as to facilitate the automatic movement of the test sample during the detection process, facilitate the film thickness detection of each position of the test sample, improve the detection accuracy; and simplify the operation.

[0062] The automatic feeding and discharging device of the film thickness measuring instrument according to the present invention is provided with a detection piece suction device at both ends; therefore, the feeding and discharging of the test sample can be realized through the suction device, so as to avoid the staff wearing gloves for placement, which can simplify the operation and improve the efficiency.

[0063] In a feasible embodiment, in order to facilitate the installation and clamping of the automatic feeding and discharging device of the film thickness measuring instrument on the film thickness measuring instrument; further, a 90° bayonet 130 is provided on the lower surface of the mounting bracket 100.

Claims

1. An automatic feeding and discharging device for a film thickness measuring instrument, characterized in that: It includes a mounting bracket (100); a clamping device for fixedly mounting the mounting bracket (100) on a film thickness measuring instrument (900) is provided on the mounting bracket (100). Two parallel horizontal cross beams (110) are provided on the mounting bracket (100); a first sliding block (400) is provided on the horizontal cross beam (110); a horizontal driving device for driving the first sliding block (400) to move back and forth on the horizontal cross beam (110) is provided on the horizontal cross beam (110). A transverse first sliding groove (410) is provided on the first sliding block (400); a second sliding block (500) is slidably mounted in the first sliding groove (410); a transverse driving device for driving the second sliding block (500) to slide in the first sliding groove (410) is provided on the first sliding block (400). A rotating groove (510) is provided on the second sliding block (500); a rotating suction cup (600) is rotatably mounted in the rotating groove (510). Rotary discs (200) are provided on both sides of the bracket (100); a first vertical telescopic device (300) is provided on the rotary disc (200); a swing arm (700) is provided at the telescopic end of the first vertical telescopic device (300); one end of the swing arm (700) is fixedly connected to the vertical telescopic device (300), and a second vertical telescopic device (800) is provided at the other end; a detecting element suction device is provided at the lower end of the second vertical telescopic device (800).

2. The automatic feeding and discharging device of the film thickness measuring instrument according to claim 1, characterized in that: The clamping device includes tie rods (120) on both sides of the mounting bracket (100); the tie rods (120) pass through the mounting bracket (100); a limit head (121) is provided at one end of the tie rod (120); a locking sleeve (122) is provided at the other end. A spring (123) is provided between the locking sleeve (122) and the mounting bracket (100); the spring (123) is sleeved on the tie rod (120); the locking sleeve (122) is in threaded cooperation with one end of the tie rod (120).

3. The automatic feeding and discharging device of the film thickness measuring instrument according to claim 1, characterized in that: The horizontal driving device adopts a lead screw drive. A horizontal sliding groove (111) is provided on the horizontal cross beam (110); a first lead screw (112) is provided in the horizontal sliding groove (111); a first driving motor (113) for driving the first lead screw (112) to rotate is provided on the mounting bracket (100). A first convex block (440) matching the horizontal sliding groove (111) is provided on the lower surface of the first sliding block (400); the first convex block (440) is slidably mounted in the horizontal sliding groove (111); the first lead screw (112) passes through the first convex block (440) and is in threaded cooperation with the first convex block (440).

4. The automatic feeding and discharging device of the film thickness measuring instrument according to claim 1, wherein: The transverse driving device adopts a lead screw drive. A first limiting block (540) is provided on one side of the second sliding block (500); a second limiting block (550) is provided on the other side. A second sliding groove (420) matching the first limiting block (540) is provided on the side wall of one side of the first sliding groove (410); a transverse through groove (430) matching the second limiting block (550) is provided on the side wall of the other side. A transverse second lead screw (431) is arranged in the transverse through groove (430); a second drive motor (432) for driving the rotation of the second lead screw (431) is arranged at one end of the first slider (400); The second limit block (550) is slidably installed in the transverse through groove (430), and the second lead screw (431) passes through the second limit block (550) and is in threaded cooperation with the second limit block (550).

5. The automatic feeding and discharging device of the film thickness measuring instrument according to claim 1, characterized in that: A rotating shaft (520) is arranged on one side of the rotating groove (510); a spiral is arranged on the rotating shaft (520); a gear matching the spiral on the rotating shaft (520) is arranged on the outer surface of the lower end of the rotating suction cup (600); A third drive motor (530) for driving the rotation of the rotating shaft (520) is arranged on one side of the second slider (500); A ventilation cavity (630) is arranged at the bottom of the rotating suction cup (600); ventilation holes (620) which are evenly distributed and communicated with the ventilation cavity (630) are arranged on the rotating suction cup (600); a ventilation hole is arranged on one side of the rotating groove (510), and a vacuum pump (560) is arranged at one end of the ventilation hole.

6. The automatic feeding and discharging device of the film thickness measuring instrument according to claim 5, characterized in that: An opening (411) matching the third drive motor (530) is arranged at one end of the first sliding groove (410).

7. The automatic feeding and discharging device of the film thickness measuring instrument according to claim 1, characterized in that: The detecting element adsorption device adopts a suction cup; or the detecting element adsorption device includes a limiting cylinder (810); A suction cup (820) is slidably installed in the limiting cylinder (810); evenly distributed adsorption heads (830) are arranged below the suction cup (820); the telescopic end of the second vertical telescopic device (800) extends into the limiting cylinder (810); and the suction cup (820) is connected to the telescopic end of the second vertical telescopic device (800).

8. The automatic feeding and discharging device of the film thickness measuring instrument according to claim 7, characterized in that: The adsorption head (830) is detachably connected to the suction cup (820).

9. The automatic feeding and discharging device of the film thickness measuring instrument according to claim 1, wherein: Both the first vertical telescopic device (300) and the second vertical telescopic device (800) adopt electric telescopic rods.

10. The automatic feeding and discharging device of the film thickness measuring instrument according to claim 2, characterized in that: A 90° bayonet (130) is arranged on the lower surface of the mounting bracket (100).

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