Structural space staggered piezoelectric jet system for cooling electronic component

Abstract

The invention discloses a structural space staggered piezoelectric jet system for cooling electronic components, which belongs to the technical field of micro piezoelectric pumps and comprises a piezoelectric jet pump and a jet top plate. The number of the jet pumps is at least five, liquid outlet flow channels are parallel to one another, openings of the liquid outlet flow channels are evenly formed in a jet top plate, and each pump body comprises a pump cavity, a piezoelectric vibrator, a Tesla flow channel and a jet hole. An inlet in the outer side of the Tesla flow channel is connected with pumping liquid and is inwards and sequentially communicated with a jet flow hole and a pump cavity of the pump body where the Tesla flow channel is located; the pump cavities in the plurality of pump body groups (layers) are provided with respective jet holes, the jet holes are in the form of expanded pipes from the pump cavities to the leftmost jet top plates, and barb structures are uniformly distributed on the inner wall surfaces of the pipes; the jet pumps of the multiple pump bodies are arranged in a staggered mode, jet flow interference is avoided, the overall structure is compact, it can be ensured that fluid efficiently enters and exits a pump cavity, and the stable jet flow effect is achieved.

Description

Technical Field

[0001] The present invention belongs to the technical field of micro piezoelectric pumps, and particularly relates to a piezoelectric jet system with spatially staggered structures for cooling electronic components. Background Art

[0002] Piezoelectric pumps work by utilizing the unique inverse piezoelectric effect of piezoelectric materials. When an alternating excitation is applied to the piezoelectric ceramics on the piezoelectric vibrator, due to the inverse piezoelectric effect, deformation occurs inside the piezoelectric ceramics and is manifested as macroscopic vibration, forcing the volume of the pump chamber to change, thereby causing a change in the pressure inside the chamber, and thus realizing the transmission of fluid.

[0003] Currently, due to its advantages such as small size, light weight, high precision, simple structure, low energy consumption, and low noise, piezoelectric pumps have become the main research direction of researchers at home and abroad and are widely used in fields such as aerospace and heat dissipation of electronic devices.

[0004] However, ordinary valve-less piezoelectric liquid pumps do not have valves to prevent liquid backflow, and liquid backflow is likely to occur during operation. This not only reduces the efficiency of the pump but also may cause liquid to accumulate in the pump chamber; moreover, the overall size of the piezoelectric liquid pump increases as the number of built-in jet pumps increases. To increase the jet number while keeping the overall volume unchanged, the size of the actuator must be reduced, which will lead to insufficient flow rate and heat dissipation capacity of the actuator.

[0005] In summary, to solve the problems of low efficiency of unidirectional fluid flow, small pumping volume, and low space utilization rate in the existing piezoelectric pump system, a highly efficient and reliable piezoelectric pump system is urgently needed in this field. Summary of the Invention

[0006] The purpose of the present invention is to solve the problems existing in the above-mentioned existing piezoelectric pump system, and to provide a piezoelectric jet system with spatially staggered structures for cooling electronic components, so as to improve the performance and application range of the piezoelectric pump.

[0007] It includes more than five piezoelectric jet pumps and a jet top plate; their liquid inlet ports are independent of each other, and the liquid outlet channels are parallel to each other and uniformly open on the jet top plate.

[0008] The piezoelectric jet system is provided with multiple layers of piezoelectric jet pumps, and each layer of piezoelectric jet pumps is provided with one or more piezoelectric jet pumps, which are arranged in a spatially staggered manner. During operation, at the jet top plate, it presents a sprinkler-like jet.

[0009] A piezoelectric jet pump, characterized in that it includes a pump body, a pump chamber, a piezoelectric vibrator, a liquid inlet and a liquid outlet; the liquid outlet is provided with a jet hole, the jet hole is a diverging tube, and is on the same straight line as the liquid outlet channel. Inside the pipeline of the diverging tube, on the pipe wall surface, above the outlet of the Tesla channel, barbs are evenly distributed; the liquid inlet is provided with a Tesla channel, and the outlet of the Tesla channel opens below the jet hole, above the bottom of the jet hole, on the pipe wall of the diverging tube.

[0010] The piezoelectric jet pump is the above-mentioned piezoelectric jet pump.

[0011] The Tesla channel is perpendicular to the axis of the jet hole.

[0012] The piezoelectric jet system includes: 3 layers of piezoelectric jet pumps. The first layer of piezoelectric jet pump is provided with one piezoelectric jet pump, whose jet hole is located at the center position, and the flow channel passes through the second layer of piezoelectric jet pump and the third layer of piezoelectric jet pump, and opens at the center of the jet top plate; both the second layer of piezoelectric jet pump and the third layer of piezoelectric jet pump are provided with three piezoelectric jet pumps arranged in an equilateral triangle. The liquid outlet channels of the six piezoelectric jet pumps open in a regular hexagon on the jet top plate.

[0013] There are 4 Tesla channels in the first layer of piezoelectric jet pump. Each piezoelectric jet pump in the second layer of piezoelectric jet pump and the third layer of piezoelectric jet pump is provided with 3 Tesla channels, which are distributed in a claw shape. One end of each Tesla channel communicates with the diverging tube of the jet hole, and the other end converges with each other through the flow channel.

[0014] The piezoelectric jet system includes three pump body layers connected in sequence from left to right, which are composed of the first right pump body 8, the first left pump body 6, the second right pump body 5, the second left pump body 4, the third right pump body 3, the third left pump body 1, the jet top plate 16 and the piezoelectric vibrator 2 connected in sequence;

[0015] A groove 12 is provided at the center on the left side of the first right pump body 8, and the groove 12 is provided with a concave edge;

[0016] A circular ring boss 13 is provided at the center on the right side of the first left pump body 6. The two are arranged opposite to each other, and a piezoelectric vibrator 2 is provided between them, thereby forming the pump chamber 15 of the first jet pump layer; a Tesla channel 10 converging to the center is provided on the left side of the first left pump body 6, and a jet hole 9 penetrating the entire pump body to the left is provided at the center, constituting the first jet pump layer;

[0017] Three grooves 12 evenly distributed at the center are provided on the left side of the second right pump body 5;

[0018] On the right side of the second left pump body 4, there are 3 annular bosses 13 evenly distributed at the center. The two are arranged opposite to each other, and 3 piezoelectric vibrators 2 are arranged therebetween, thus forming 3 pump cavities 15 of the second jet pump layer; on the left side of the second left pump body 4, 3 evenly distributed Tesla channels 10 are provided according to the 3 pump cavities 15 of the second jet pump layer, and are respectively connected to the jet holes 9 that penetrate the entire pump body to the left above, constituting the second jet pump layer;

[0019] On the left side of the third right pump body 3, there are 3 grooves 12 evenly distributed at the center, which are arranged in a staggered space with the 3 grooves 12 of the second right pump body 5;

[0020] On the right side of the third left pump body 1, there are 3 annular bosses 13 evenly distributed at the center, which are arranged opposite to the grooves 12 of the third right pump body 3. 3 piezoelectric vibrators 2 are arranged therebetween, thus forming 3 pump cavities 15 of the third jet pump layer; on the left side of the third left pump body 1, 3 evenly distributed Tesla channels 10 are provided according to the 3 pump cavities 15 of the third jet pump layer, and are respectively connected to the jet holes 9 that penetrate the entire pump body to the left above, constituting the third jet pump layer; The overall structure forms a seven-pump structure with three jet pump layers.

[0021] The piezoelectric vibrator 3 is composed of an elastic substrate and a piezoelectric ceramic 7, and the piezoelectric ceramic 7 is arranged on the side opposite to the pump cavity 15.

[0022] The Tesla channels in the first jet pump layer are 4 evenly distributed and intersecting Tesla channels, and the 3 evenly distributed Tesla channels in the second jet pump layer and the third jet pump layer are distributed in a claw shape.

[0023] The number of pump bodies in the piezoelectric jet system and the number of piezoelectric valveless jet pumps in each pump body determine the number of final working jet beams. When the number of pump bodies is three, the combinations that can be achieved include:

[0024] A five-pump structure with three jet pump layers: 1 pump cavity in the first jet pump layer, 2 evenly distributed pump cavities in the second jet pump layer, 2 evenly distributed pump cavities in the third jet pump layer, and the pump cavities in the second jet pump layer and the third jet pump layer are arranged in a staggered space; there are a total of 5 piezoelectric valveless jet pumps, and 5 jet beams can be formed;

[0025] A nine-pump structure with three jet pump layers: 1 pump cavity in the first jet pump layer, 4 evenly distributed pump cavities in the second jet pump layer, 4 evenly distributed pump cavities in the third jet pump layer, and the pump cavities in the second jet pump layer and the third jet pump layer are arranged in a staggered space; there are a total of 9 piezoelectric valveless jet pumps, and 9 jet beams can be formed;

[0026] A nine-pump structure with three jet pump layers: 1 pump cavity in the first jet pump layer, 4 evenly distributed pump cavities in the second jet pump layer, 4 evenly distributed pump cavities in the third jet pump layer, and the pump cavities in the second jet pump layer and the third jet pump layer are arranged in a staggered space; there are a total of 9 piezoelectric valveless jet pumps, and 9 jet beams can be formed;

[0027] The structure of the thirteen-pump layer with triple jet pumps: 1 pump chamber in the first jet pump layer, 6 evenly distributed pump chambers in the second jet pump layer, and 6 evenly distributed pump chambers in the third jet pump layer. The pump chamber spaces in the second and third jet pump layers are arranged in a staggered manner; there are a total of 13 piezoelectric valveless jet pumps, which can form 13 jet beams.

[0028] When the number of pump bodies in the piezoelectric jet system is six, a seventeen-pump structure with six jet pump layers can be formed: The system is provided with six sequentially connected pump bodies, including 1 pump chamber in the first jet pump layer, 3 evenly distributed pump chambers in the second jet pump layer, 3 evenly distributed pump chambers in the third jet pump layer, 3 evenly distributed pump chambers in the fourth jet pump layer, 3 evenly distributed pump chambers in the fifth jet pump layer, and 4 evenly distributed pump chambers in the sixth jet pump layer. The pump chambers from the second jet pump layer to the sixth jet pump layer are arranged in a staggered manner; there are a total of 17 piezoelectric valveless jet pumps, which can form 17 jet beams.

[0029] The present invention provides a piezoelectric jet system with a staggered structure space for cooling electronic components, belonging to the technical field of micro piezoelectric pumps. It includes at least three pump bodies sequentially connected left and right; each pump body includes its own pump chamber, piezoelectric vibrator, Tesla flow channel, and jet hole; the outer inlet of the Tesla flow channel is connected to the pumped liquid and communicates inwardly with the jet hole and pump chamber of the pump body where it is located in sequence; the pump chambers in the multiple pump bodies are all provided with their own jet holes, and all the jet holes are parallel to each other, work independently, and do not interfere with each other, and penetrate to the jet top plate to the left; the jet hole is in the shape of a divergent tube from the pump chamber where it is located to the leftmost jet top plate, and barbs are evenly distributed on the inner wall surface of the pipeline; the Tesla flow channel is arranged perpendicular to the axis of the jet hole communicating with it. In summary, the jet pumps between the multiple pump bodies in the present invention are arranged in a staggered manner, avoiding jet interference, with a compact overall structure, which can ensure the efficient entry and exit of fluid into and out of the pump chamber and achieve a stable jet effect.

[0030] In summary, after the present invention adopts the above technical solutions, the beneficial technical effects are as follows:

[0031] 1. The piezoelectric valveless jet pump structure with multiple pump bodies arranged in a staggered space in the present invention significantly improves the flow rate and the number of jet beams without reducing the size of a single piezoelectric liquid pump through ingenious design and optimization, optimizes the space utilization efficiency, and realizes the compact integration of the system. The number of pump bodies and the number of piezoelectric vibrators in each pump body can be adjusted according to actual needs to achieve different flow rates and numbers of jet beams, and the space staggered structure is applicable to any number of space layers and piezoelectric vibrators to meet different application scenarios and working conditions.

[0032] 2. In the piezoelectric liquid pump of the present invention, the jet hole channels are all constructed with a valve-less one-way structure, which combines an expansion tube and a barbed structure. By utilizing the geometric characteristics of the expansion tube and the barbs, the fluid can easily pass in the jet direction, while being subject to greater resistance during reverse flow. This one-way flow characteristic can effectively prevent fluid backflow and greatly increase the flow rate and pressure during jetting.

[0033] 3. The inlets of the piezoelectric pumps of the present invention are all provided with a structure of multiple Tesla channels, enabling the fluid to pass smoothly during forward flow and forming complex eddy currents and pressure distributions during reverse flow, so as to achieve the effect of forward conduction and reverse cut-off, and improve the overall inflow efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 It is an exploded schematic view A of the overall structure of the piezoelectric jet system of the present invention;

[0035] Figure 2 It is an exploded schematic view B of the overall structure of the piezoelectric jet system of the present invention;

[0036] Figure 3 It is a top view of the third left pump body of the piezoelectric jet system of the present invention;

[0037] Figure 4 It is a bottom view of the third left pump body of the piezoelectric jet system of the present invention;

[0038] Figure 5 It is a schematic diagram of the specific structure of the Tesla channels and jet holes in the third left pump body of the piezoelectric jet system of the present invention;

[0039] Figure 6 It is a top view of the second layer pump body of the piezoelectric jet system of the present invention;

[0040] Figure 7 It is a schematic diagram A of the jet working principle of the valve-less piezoelectric pump in the piezoelectric jet system of the present invention;

[0041] Figure 8 It is a schematic diagram B of the jet working principle of the valve-less piezoelectric pump in the piezoelectric jet system of the present invention;

[0042] Figure 9 It is a schematic diagram of the five-pump structure of the three-jet pump layer in the piezoelectric jet system of the present invention;

[0043] Figure 10 It is a schematic diagram of the seven-pump structure of the three-jet pump layer in the piezoelectric jet system of the present invention;

[0044] Figure 11 It is a schematic diagram of the nine-pump structure of the three-jet pump layer in the piezoelectric jet system of the present invention;

[0045] Figure 12Schematic diagram of the structure of the thirteen-pump of the triple-jet pump layer of the piezoelectric jet system of the present invention;

[0046] Figure 13 Schematic diagram of the structure of the seventeen-pump of the six-jet pump layer of the piezoelectric jet system of the present invention.

[0047] In the drawings:

[0048] 1. Third left pump body; 2. Piezoelectric vibrator; 3. Third right pump body; 4. Second left pump body; 5. Second right pump body; 6. First left pump body; 7. Piezoelectric ceramic, 8. First right pump body;

[0049] 9. Jet hole; 10. Tesla flow channel; 12. Groove; 13. Circular ring boss; 14. Barbs; 15. Pump cavity; 16. Jet top plate. Detailed implementation manners

[0050] The following is a further detailed description of the present invention application in conjunction with the attached Figures 1-13 drawings.

[0051] Embodiment 1:

[0052] Refer to the attached Figure 1 and the attached Figure 2 , a piezoelectric jet system with spatially staggered structures for cooling electronic components, including three pump bodies with spatially staggered flow channels and jet holes;

[0053] The structures of the three pump bodies are arranged in a rectangle from right to left in sequence, and are composed of a first right pump body 8, a first left pump body 6, a second right pump body 5, a second left pump body 4, a third right pump body 3, a third left pump body 1, a jet top plate 16 and a piezoelectric vibrator 2;

[0054] A groove 12 is provided at the center of the left side of the first right pump body 8, and a circular ring boss 13 is provided at the center of the right side of the first left pump body 6. The two are arranged opposite to each other, and a piezoelectric vibrator 2 is provided between them, thereby forming a pump cavity 15 of the first jet pump layer;

[0055] The first left pump body 6 is provided with a Tesla flow channel 10 converging at the center on the left side, and a jet hole 9 penetrating the entire pump body to the left is provided at the center. The jet hole 9 communicates with the pump cavity 15 of the first jet pump layer to the right;

[0056] The second right pump body 5 is provided with three grooves 12 evenly distributed at the center on the left side, and the second left pump body 4 is provided with three circular ring bosses 13 evenly distributed at the center on the right side. The two are arranged opposite to each other, and three piezoelectric vibrators 2 are provided between them, thereby forming three pump cavities 15 of the second jet pump layer;

[0057] On the left side of the second left pump body 4, three evenly distributed Tesla channels 10 are provided according to the three pump cavities 15 of the second jet pump layer. The three evenly distributed Tesla channels 10 are connected to the jet holes 9 that penetrate the entire pump body to the left above them. The three jet holes 9 of the second left pump body 4 communicate with the three pump cavities 15 of the second jet pump layer to the right;

[0058] On the left side of the third right pump body 3, three grooves 12 evenly distributed in the center are provided, which are arranged in a staggered manner with the three grooves 12 of the second right pump body 5 and do not interfere with each other; on the right side of the third left pump body 1, three circular ring bosses 13 evenly distributed in the center are provided, which are arranged opposite to the grooves 12 of the third right pump body 3, and three piezoelectric vibrators 2 are provided therebetween, thereby forming three pump cavities 15 of the third jet pump layer;

[0059] On the left side of the third left pump body 1, three evenly distributed Tesla channels 10 are provided according to the three pump cavities 15 of the third jet pump layer. The three evenly distributed Tesla channels 10 are connected to the jet holes 9 that penetrate the entire pump body to the left above them. The three jet holes 9 of the third left pump body 1 communicate with the three pump cavities 15 of the third jet pump layer to the right;

[0060] The grooves 12 in the pump body structure are all provided with concave edges, and piezoelectric vibrators 2 are provided therein and fixed by the opposite circular ring bosses 13, thereby forming pump cavities;

[0061] The outer inlet of the Tesla channel 10 is connected to the pumped liquid and communicates inward with the jet hole 9 and the pump cavity 15 of the corresponding pump body;

[0062] Each pump cavity in the first jet pump layer, the second jet pump layer, and the third jet pump layer is provided with its own jet hole. All the jet holes are parallel to each other, work independently, and do not interfere with each other, and penetrate to the jet top plate 16 to the left.

[0063] The piezoelectric vibrator 2 is composed of an elastic substrate and piezoelectric ceramics 7. The piezoelectric ceramics 7 are arranged on the opposite side of the pump cavity 15, and a cooling medium can be provided on this side and sealed to ensure the stability and reliability of the piezoelectric pump during operation.

[0064] The Tesla channels 10 in the first jet pump layer are four evenly distributed and intersecting Tesla channels, and the three evenly distributed Tesla channels 10 in the second jet pump layer and the third jet pump layer are all Tesla channels with a claw-shaped distribution;

[0065] The Tesla channel is perpendicular to the axis of the jet hole 9 communicating with it.

[0066] See Appendix Figure 7 and Appendix Figure 8 , the jet hole 9 is in the shape of a divergent tube from the pump cavity 15 where it is located to the leftmost jet top plate 16, and barbs 14 are evenly distributed on the inner wall surface of its pipeline.

[0067] See the appendix Figure 10 In this embodiment, a three-jet pump layer with seven pumps is formed, where: the green solid line represents 1 pump chamber of the first jet pump layer, the blue dashed line represents 3 evenly distributed pump chambers of the second jet pump layer, and the red solid line represents 3 evenly distributed pump chambers of the third jet pump layer, constituting a total of 7 piezoelectric valveless jet pumps, which can form 7 simultaneously working jet beams.

[0068] Embodiment 2:

[0069] The number of pump bodies in the piezoelectric jet system of the present invention and the number of piezoelectric valveless jet pumps in each pump body determine the number of finally working jet beams. Therefore, a three-jet pump layer with five pumps as shown in the appendix Figure 9 can be achieved, where: the green solid line represents 1 pump chamber of the first jet pump layer, the blue dashed line represents 2 evenly distributed pump chambers of the second jet pump layer, and the red solid line represents 2 evenly distributed pump chambers of the third jet pump layer, thus constituting a total of 5 piezoelectric valveless jet pumps, which can form 5 simultaneously working jet beams.

[0070] Embodiment 3:

[0071] The piezoelectric jet system of the present invention can achieve a three-jet pump layer with nine pumps as shown in the appendix Figure 11 where: the green solid line represents 1 pump chamber of the first jet pump layer, the blue dashed line represents 4 evenly distributed pump chambers of the second jet pump layer, and the red solid line represents 4 evenly distributed pump chambers of the third jet pump layer, thus constituting a total of 9 piezoelectric valveless jet pumps, which can form 9 simultaneously working jet beams.

[0072] Embodiment 4:

[0073] The piezoelectric jet system of the present invention can achieve a three-jet pump layer with thirteen pumps as shown in the appendix Figure 12 where: the green solid line represents 1 pump chamber of the first jet pump layer, the blue dashed line represents 6 evenly distributed pump chambers of the second jet pump layer, and the red solid line represents 6 evenly distributed pump chambers of the third jet pump layer, thus constituting a total of 13 piezoelectric valveless jet pumps, which can form 13 simultaneously working jet beams.

[0074] Embodiment 5:

[0075] The piezoelectric jet system of the present invention can add the number of pump bodies, with a total of six sequentially connected pump bodies, to achieve a six-jet pump layer with seventeen pumps, where: the green solid line represents 1 pump chamber of the first jet pump layer, the purple dashed line represents 3 evenly distributed pump chambers of the second jet pump layer, the brown dashed line represents 3 evenly distributed pump chambers of the third jet pump layer, the yellow dashed line represents 3 evenly distributed pump chambers of the fourth jet pump layer, the blue dashed line represents 3 evenly distributed pump chambers of the fifth jet pump layer, and the red solid line represents 4 evenly distributed pump chambers of the sixth jet pump layer, thus constituting a total of 17 piezoelectric valveless jet pumps, which can form 17 simultaneously working jet beams.

[0076] In summary, referring to the piezoelectric valveless jet pump structure with multi-pump bodies arranged in a spatially staggered manner in Embodiments 1-5 (partial embodiments of this invention application), the jet pumps between multiple pump bodies are staggered from each other to avoid jet interference and maintain a compact overall structure; the jet holes of each jet pump are parallel to each other and penetrate through to the jet top plate, and the inlet flow channel is perpendicular to the axis of the jet hole and communicates with the pump cavity of the piezoelectric vibrator, ensuring efficient fluid inlet and outlet of the pump cavity and achieving a stable jet effect.

[0077] A piezoelectric jet system with a spatially staggered structure for cooling electronic components provided by this invention has the following working principle:

[0078] The piezoelectric valveless jet pump structure with multi-pump bodies arranged in a spatially staggered manner in this invention can enable multiple piezoelectric valveless jet pumps to work simultaneously to form multiple jet beams. The working principle of a single piezoelectric valveless jet pump is the same. Taking the working principle of a single piezoelectric valveless jet pump as an example:

[0079] Referring to the attached Figure 7 and the attached Figure 8 , the arrow direction indicates the fluid flow direction in the jet hole 9. The large arrow indicates a large fluid flow rate, and the small arrow indicates a small fluid flow rate;

[0080] During use, an electrical signal is applied to the piezoelectric vibrator 2 of the piezoelectric valveless jet pump, and the piezoelectric vibrator 2 makes periodic up and down vibrations;

[0081] Referring to the attached Figure 8 , when the piezoelectric vibrator 2 vibrates downward, the volume of the pump cavity 15 becomes larger, generating a negative pressure. Most of the external fluid enters the pump cavity 15 through the evenly distributed Tesla flow channels 10, and a small part enters the pump cavity from the jet hole 9. Due to the geometric characteristics of the expansion tube and the evenly distributed barbs 14 in the jet hole 9, the fluid is easy to pass through in the jet direction (outward jet), while it encounters greater resistance during reverse flow, making it difficult for the fluid to flow back through the jet hole, thus realizing the inflow process of the piezoelectric valveless jet pump.

[0082] Referring to the attached Figure 7 , when the piezoelectric vibrator 2 vibrates upward, the volume of the pump cavity 15 becomes smaller, the pressure increases, and the fluid in the piezoelectric valveless jet pump is ejected from the pump cavity 15 through the jet hole 9. The ejected fluid drives the fluid around the jet hole 9 to form a vortex. During this process, most of the fluid is discharged from the jet hole 9, and a very small part of the fluid enters the Tesla flow channel 10. However, due to the geometric characteristics of the Tesla valve, when the fluid flows in the reverse direction, complex eddies will be formed in the Tesla valve flow channel to prevent the fluid from flowing back, thus realizing reverse cutoff.

[0083] In summary, with the up-and-down vibration of all piezoelectric vibrators in the piezoelectric jet system of the present invention, the piezoelectric valveless jet pump structure with multi-pump bodies arranged in a spatially staggered manner can achieve the jet operation of multiple fluid streams and realize the continuous pumping of a large flow rate of fluid.

Claims

1. A piezoelectric jet system with spatially staggered structural spaces for cooling electronic components, characterized in that: It includes a piezoelectric jet pump and a jet top plate; there are at least five of the jet pumps, and the liquid outlet channels are parallel to each other and uniformly open on the jet top plate.

2. The piezoelectric jet system with spatially staggered structures for cooling electronic components according to claim 1, wherein: The piezoelectric jet system is provided with multiple piezoelectric jet pump layers. Each piezoelectric jet pump layer is provided with one or more piezoelectric jet pumps, and the structural spaces are arranged in a staggered manner. When working, at the jet top plate, it jets in a sprinkler-like manner.

3. A piezoelectric jet pump, characterized in that: It includes a pump body, a pump cavity, a piezoelectric vibrator, a liquid inlet and a liquid outlet; the liquid outlet is provided with a jet hole, and the jet hole is a divergent tube, which is in a straight line with the liquid outlet channel, and barbs are evenly distributed on the inner wall surface of its pipeline; the liquid inlet is provided with a Tesla channel, and the outlet of the Tesla channel opens below the jet hole, above the bottom of the jet hole, on the tube wall of the divergent tube.

4. A piezoelectric jet system with spatially staggered structures for cooling electronic components according to claim 1 or 2, characterized in that: The piezoelectric jet pump is a piezoelectric jet pump as described in Claim 3.

5. A piezoelectric jet system with spatially staggered structures for cooling electronic components according to claim 4, characterized in that: The Tesla channel is perpendicular to the axis of the jet hole.

6. The piezoelectric jet system with spatially staggered structures for cooling electronic components according to claim 5, characterized in that: The piezoelectric jet system includes: 3 piezoelectric jet pump layers. The first piezoelectric jet pump layer is provided with one piezoelectric jet pump, and its jet hole is located at the central position. The channel passes through the second piezoelectric jet pump layer and the third piezoelectric jet pump layer and opens at the center of the jet top plate; both the second piezoelectric jet pump layer and the third piezoelectric jet pump layer are provided with three piezoelectric jet pumps arranged in an equilateral triangle. The liquid outlet channels of the six piezoelectric jet pumps open in a regular hexagon on the jet top plate.

7. A piezoelectric jet system with spatially staggered structures for cooling electronic components according to claim 6, characterized in that: There are 4 Tesla channels in the first piezoelectric jet pump layer. Each piezoelectric jet pump in the second piezoelectric jet pump layer and the third piezoelectric jet pump layer is provided with 3 Tesla channels, which are distributed in a claw shape. One end of each Tesla channel communicates with the jet hole, and one end converges with each other through the channels.

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